JP2011087423A - Actuator and method for manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an actuator having a simple structure, reducing man hours on assembly, and being manufactured at a low cost, and also to provide a method for manufacturing the actuator. <P>SOLUTION: In the actuator 1, electrode films are formed on at least one surface of an electrostrictive sheet (sheet) 2 formed of an electrostrictive material and a plurality of electrostrictive sheets (sheets) 2 forming the electrode film are laminated. Each electrode film has: a first electrode film 3 exposed on one side face of the actuator 1; and a second electrode film 4 opposed to the first electrode film 3 through the electrostrictive sheet (sheet) 2, and exposed on the opposite side face of the one side face of the actuator 1. In the electrode film, a first conductor 5 electrically connected to the first electrode film 3 is formed on one side face of the actuator 1, and a second conductor 6 electrically connected to the second electrode film 4 is formed on the opposite side face of the one side face of the actuator 1. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an actuator and a method for manufacturing the actuator, and more particularly to an actuator in which sheets formed of an electrostrictive material are stacked and a method for manufacturing the actuator.

  There are increasing opportunities for actuators to be used in devices that require precise movement, such as medical devices and industrial robots. As opportunities for use increase, it is an urgent task to develop a compact, lightweight, and inexpensive actuator. For example, Patent Document 1 discloses a polymer electrostatic actuator in which electrodes can be easily taken out without increasing the number of manufacturing steps, and creeping discharge is reduced.

  The actuator disclosed in Patent Document 1 is provided with a first electrode layer portion or a second electrode layer portion by providing a first electrode layer portion or a second electrode layer portion on the surface of each sheet folded in a bellows shape. And a plurality of single-layer actuators made of sheets sandwiched between the first electrode layer portion and the second electrode layer portion.

JP 2008-211922

  In the actuator disclosed in Patent Document 1, a sheet in which a first wiring portion that electrically connects first electrode layer portions and a second wiring portion that electrically connects second electrode layer portions are stacked. It is necessary to provide it by pulling it out from the end. For this reason, the actuator disclosed in Patent Document 1 has a problem in that the structure is complicated and it is difficult to manufacture the actuator inexpensively due to an increase in the number of assembly steps. Moreover, since the actuator currently disclosed by patent document 1 needs to bend | fold a sheet | seat so that a sheet | seat may be pinched | interposed by a 1st electrode layer part and a 2nd electrode layer part, a 1st electrode layer part and a 2nd electrode layer There is a problem that it is difficult to manufacture at low cost due to the need for alignment with the part and an increase in assembly man-hours. Furthermore, the actuator disclosed in Patent Document 1 requires a thickness for bending the sheet, and there is a problem that it is difficult to reduce the thickness of the actuator itself.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an actuator that has a simple structure, requires a small number of assembly steps, and can be manufactured at low cost, and a method for manufacturing the actuator.

  In order to achieve the above object, the actuator according to the first invention has an electrode film formed on at least one surface of a sheet formed of an electrostrictive material, and a plurality of the sheets on which the electrode film is formed are stacked. The electrode film includes a first electrode film exposed on one side surface of the actuator, a side surface facing the first electrode film through the sheet, and a side surface opposite to the one side surface of the actuator. A first conductive portion that is electrically connected to the first electrode film is formed on one side surface of the actuator and is electrically connected to the second electrode film. The second conductive portion is formed on the side surface opposite to the one side surface of the actuator.

  The actuator according to a second aspect of the present invention is the actuator according to the first aspect, wherein the first electrode film is continuously provided in at least the long side direction of one surface of the sheet, and at least the length of the surface opposite to the one surface of the sheet. The second electrode films are respectively formed continuously in the side direction, and the sheet is bent into a bellows shape.

  The actuator according to a third aspect of the present invention is the actuator according to the second aspect, wherein one end of the sheet is bent on one side surface of the actuator, and the other end of the sheet is bent on a side surface opposite to the one side surface of the actuator. is there.

  In order to achieve the above object, a method of manufacturing an actuator according to a fourth aspect of the present invention is a method of manufacturing an actuator according to the second aspect of the present invention, wherein the first electrode film is continuously formed in at least the long side direction of one surface of the sheet. The second electrode film is formed continuously in at least the long side direction on the surface opposite to the one surface of the sheet, and the sheet on which the first electrode film and the second electrode film are formed has a bellows shape. The first conductive portion is formed on one side of the actuator where the first electrode film is exposed, and the second conductive portion is formed on the side opposite to the one side of the actuator where the second electrode film is exposed. Form.

  In order to achieve the above object, a method for manufacturing an actuator according to a fifth invention is a method for manufacturing the actuator according to the first invention, wherein an electrode film is formed on one surface of a sheet at a predetermined interval, and the electrode The sheet on which the film is formed is wound into a roll shape, and the actuator is cut out from the sheet wound in a roll shape so that the electrode film constitutes the first electrode film and the second electrode film. A first conductive part is formed on one side of the exposed actuator, and a second conductive part is formed on a side opposite to the one side of the actuator where the second electrode film is exposed.

  The first invention has a first electrode film exposed on one side surface of the actuator, and a second electrode film facing the first electrode film through a sheet and exposed on the side surface opposite to the one side surface of the actuator. The first conductive portion electrically connected to the first electrode film is formed on one side surface of the actuator, and the second conductive portion electrically connected to the second electrode film is opposite to the one side surface of the actuator. Therefore, it is not necessary to draw out the wiring from the end portion of the laminated sheets, and the work of connecting the wiring is not required. Therefore, the structure is simple, and the number of assembling steps can be reduced and the manufacturing can be performed at low cost.

  In the second and fourth inventions, the first electrode film is continuously formed in at least the long side direction of one surface of the sheet, and the second electrode is continuously formed in at least the long side direction of the surface opposite to the one surface of the sheet. Since each film is formed and the sheet is bent into a bellows shape, when the sheet is folded into a bellows shape, the first electrode film and the second electrode film do not need to be aligned, so the structure is simple. It can be manufactured at low cost with few assembly steps.

  In the third invention, one end of the sheet is bent on one side of the actuator, and the other end of the sheet is bent on the side opposite to the one side of the actuator. It becomes easy to form on each side.

  In the fifth invention, the sheet formed with the electrode film is wound into a roll shape, and the actuator is cut out from the rolled sheet so that the electrode film forms the first electrode film and the second electrode film. A plurality of actuators can be cut out from the sheet wound in a shape, and it becomes easy to manufacture a large number of actuators.

  An actuator and a method of manufacturing the actuator according to the present invention include a first electrode film exposed on one side surface of the actuator, a first electrode film opposed to the first electrode film through a sheet, and exposed on a side surface opposite to the one side surface of the actuator. A first conductive part electrically connected to the first electrode film is formed on one side surface of the actuator, and a second conductive part electrically connected to the second electrode film is formed on the side surface of the actuator. Since it is formed on the side opposite to the one side of the actuator, it is not necessary to draw out the wiring from the end of the laminated sheet, and the work of connecting the wiring is not required, so the structure is simple and the number of assembly steps is small. It can be manufactured at low cost.

It is sectional drawing which shows typically the structure of the actuator which concerns on Embodiment 1 of this invention. It is sectional drawing which shows typically operation | movement of the actuator which concerns on Embodiment 1 of this invention. It is sectional drawing which shows typically the method to manufacture the actuator which concerns on Embodiment 1 of this invention. It is sectional drawing which shows typically the structure of the actuator which concerns on Embodiment 2 of this invention. It is sectional drawing which shows typically the method to manufacture the actuator which concerns on Embodiment 2 of this invention.

  Hereinafter, an actuator according to an embodiment of the present invention and a method for manufacturing the actuator will be specifically described with reference to the drawings. The following embodiments do not limit the invention described in the claims, and all combinations of characteristic items described in the embodiments are essential to the solution. It goes without saying that it is not limited.

(Embodiment 1)
FIG. 1 is a cross-sectional view schematically showing the configuration of the actuator according to Embodiment 1 of the present invention. As shown in FIG. 1, the actuator 1 includes an electrostrictive sheet (sheet) 2 bent into a bellows shape, and a first surface formed on one surface of the electrostrictive sheet 2 (upper side surface as viewed in FIG. 1). The electrode film 3, the second electrode film 4 formed on the surface opposite to the one surface of the electrostrictive sheet 2 (the lower surface toward the paper surface of FIG. 1), and the actuator 1 with the first electrode film 3 exposed. The first conductive portion 5 formed on the side surface of the actuator 1 and the second conductive portion 6 formed on the side surface of the actuator 1 where the second electrode film 4 is exposed are provided.

  The electrostrictive sheet 2 is not particularly limited as long as the electrostrictive sheet 2 is made of a polymer electrostrictive material and has a ferroelectric polymer property. For example, PVDF (polyvinylidene fluoride), PVDF (polyvinylidene fluoride) -based copolymer PVDF-TrFE, or PVDF-based terpolymers, such as PVDF-TrFE-CFE, PVDF-TrFE-CTFE, PVDF-TrFE-CDFE, PVDF-TrFE-HFA, PVDF-TrFE-HFP, PVDF-TrFE-VC and the like are preferable. TrFE is trifluoroethylene, CFE is chlorofluoroethylene, CTFE is chlorotrifluoroethylene, CDFE is chlorodifluoroethylene, HFA is hexafluoroacetone, HFP is hexafluoropropylene, and VC is vinyl chloride. Respectively.

  Specifically, as the electrostrictive sheet 2, a sheet of about several μm to 100 μm is formed using the above-described polymer electrostrictive material. Ni (nickel), Pt (platinum), Pt—Pd (platinum-palladium alloy), Al (aluminum), Au (gold), Au—Pd (gold palladium) is deposited on one surface of the electrostrictive sheet 2 by vapor deposition or sputtering. A metal film such as an alloy is formed as the first electrode film 3. Similarly, Ni (nickel), Pt (platinum), Pt—Pd (platinum-palladium alloy), Al (aluminum), Au (on the surface opposite to one surface of the electrostrictive sheet 2 by vapor deposition or sputtering. A metal film such as gold) or Au—Pd (gold palladium alloy) is formed as the second electrode film 4. In addition, the film thickness of the 1st electrode film 3 and the 2nd electrode film 4 is about 20 nm-50 nm.

  The first electrode film 3 and the second electrode film 4 are bent in a bellows shape together with the electrostrictive sheet 2. Therefore, the first electrode film 3 or the second electrode film 4 located inside the electrostrictive sheet 2 bent into a bellows shape is in contact with the first electrode films 3 or the second electrode films 4. Further, since the first electrode film 3 and the second electrode film 4 are formed on the entire surface of the electrostrictive sheet 2, when the electrostrictive sheet 2 is bent together with the electrostrictive sheet 2, the first electrode films 3 or the second electrodes The film 4 can be bent without considering the alignment between the films 4. The first electrode film 3 and the second electrode film 4 are not limited to the case where the first electrode film 3 and the second electrode film 4 are formed on the entire surface of the electrostrictive sheet 2, and are formed continuously in at least the long side direction of the electrostrictive sheet 2. It should be.

  The first conductive portion 5 is formed on a conductive paste, for example, an epoxy resin, applied to one side surface (left side surface of the paper) of the actuator 1 from which the first electrode film 3 folded in a bellows shape together with the electrostrictive sheet 2 is exposed. It can be formed by applying a paste in which Ag (silver) particles are dispersed and curing with heat or ultraviolet rays. Similarly, the second conductive portion 6 is also applied to the side surface (the right side surface toward the paper surface) opposite to the one side surface of the actuator 1 where the second electrode film 4 folded in a bellows shape together with the electrostrictive sheet 2 is exposed. The conductive paste can be formed by applying a paste in which Ag (silver) particles are dispersed in an epoxy resin, for example, and curing with heat or ultraviolet rays.

  Since the first electrode film 3 and the second electrode film 4 are bent on the side surface of the actuator 1, cracks may occur in the first electrode film 3 and the second electrode film 4. The first electrode film 3 and the second electrode When a voltage of about 50 V / μm was applied between the film 4 and the film 4, discharge sometimes occurred in the crack. However, since the first conductive portion 5 and the second conductive portion 6 are formed on the side surface of the actuator 1 according to Embodiment 1 of the present invention, cracks occur in the first electrode film 3 and the second electrode film 4. Even in this case, it is possible to fill the crack, prevent the occurrence of discharge in the crack, and operate the actuator 1 normally.

  When a voltage is applied between the first electrode film 3 and the second electrode film 4, the electrostrictive sheet 2 contracts in the direction perpendicular to the first electrode film 3 and the second electrode film 4, and the first electrode film 3 and the second electrode film 2 The electrode film 4 is deformed so as to extend in the horizontal direction. The electrostrictive sheet 2 contracts in the vertical direction of the first electrode film 3 and the second electrode film 4 even when the direction of the applied voltage is reversed, and the horizontal direction of the first electrode film 3 and the second electrode film 4. Therefore, even if the laminated electrostrictive sheet 2 is bent into a bellows shape and the direction of the voltage applied to each layer of the folded electrostrictive sheet 2 is reversed, the same displacement occurs in the actuator 1.

  The operation of the actuator 1 according to Embodiment 1 of the present invention will be described. FIG. 2 is a cross-sectional view schematically showing the operation of the actuator 1 according to the first embodiment of the present invention. As shown in FIG. 2, the actuator 1 has the first conductive portion 5 and the second conductive portion 6 at both ends so that the bottom surface (the surface facing the fixed base 10) of the electrostrictive sheet 2 does not contact the fixed base 10. Fix to the fixed base 10. That is, the first conductive portion 5 and the second conductive portion 6 are fixed to the fixing base 10 at positions inside the both ends of the actuator 1, and the electrostrictive sheet 2 has a shape protruding toward the upper side of FIG. (Indicated with wavy lines in the drawing). In FIG. 2, the actuator 1 is simplified and only the electrostrictive sheet 2, the first conductive portion 5, and the second conductive portion 6 are illustrated, but actually, as illustrated in FIG. 1, the first electrode film 3 and the second conductive portion 6 are illustrated. The electrode film 4 is bent together with the electrostrictive sheet 2 into a bellows shape, and the first conductive portion 5 and the second conductive portion 6 are formed on the exposed side surfaces of the actuator 1.

  When a voltage is applied between the first electrode film 3 and the second electrode film 4 to the actuator 1 whose both ends are fixed to the fixed base 10, the electrostrictive sheet 2 has the first electrode film 3 and the second electrode film 4. However, since both ends are fixed by the first conductive portion 5 and the second conductive portion 6, the electrostrictive sheet 2 is deformed so as to protrude upward in FIG. 2. When both ends of the actuator 1 are not fixed, the vertical displacement (shrinkage) of the first electrode film 3 and the second electrode film 4 is about 3%. However, when both ends of the actuator 1, that is, the first conductive portion 5 and the second conductive portion 6 are fixed to the fixed base 10, the displacement of the actuator 1 with respect to the vertical direction of the fixed base 10, for example, the length of the actuator 1 is about 10 mm. In this case, it can be about 10%.

  Next, a method for manufacturing the actuator 1 according to Embodiment 1 of the present invention will be described. FIG. 3 is a cross-sectional view schematically showing a method for manufacturing the actuator 1 according to the first embodiment of the present invention. First, by using vapor deposition or sputtering, the first electrode film 3 is formed on one surface of the electrostrictive sheet 2 (upper surface toward the paper surface), and the surface opposite to the one surface of the electrostrictive sheet 2 (lower toward the paper surface). The second electrode film 4 is formed on each side surface (FIG. 3A).

  The electrostrictive sheet 2 on which the first electrode film 3 and the second electrode film 4 are formed is bent into a bellows shape, and further bent so that one end 2a and the other end 2b of the electrostrictive sheet 2 are positioned in opposite directions (FIG. 3 (b)). The first conductive portion 5 is formed on one side surface (left side surface of the paper in FIG. 3) of the actuator 1 where the first electrode film 3 bent together with the electrostrictive sheet 2 is exposed. The second conductive portions 6 are respectively formed on the side surface opposite to the one side surface of the actuator 1 where the second electrode film 4 bent to the side is exposed (the right side surface as viewed in FIG. 3) (FIG. 3C). ).

  As described above, in the actuator 1 according to Embodiment 1 of the present invention, the electrostrictive sheet 2 having the first electrode film 3 and the second electrode film 4 formed on the surface thereof is bent into an accordion shape, thereby forming an electrostrictive sheet. 2 and a plurality of first electrode films 3 and a plurality of second electrode films 4 are formed. The first conductive portion 5 is formed on one side of the actuator 1 where the first electrode film 3 is exposed, and the second electrode film 4 is formed. Second conductive portions 6 are respectively formed on the side surface opposite to the one side surface of the exposed actuator 1. Therefore, the actuator 1 according to the first embodiment of the present invention draws wiring from the end portion of the laminated electrostrictive sheet 2 in order to electrically connect the first electrode films 3 and the second electrode films 4 to each other. There is no need, and the work of connecting the wiring becomes unnecessary, so the structure is simple, and the number of assembly steps is small, and it can be manufactured at low cost. Further, in the actuator 1 according to Embodiment 1 of the present invention, the first electrode film 3 and the second electrode film 4 are respectively formed on the entire surface of the electrostrictive sheet 2, and therefore the bellows together with the electrostrictive sheet 2. Since the first electrode films 3 or the second electrode films 4 need not be aligned when bent into a shape, the structure is simple and the number of assembly steps can be reduced and the manufacturing can be performed at low cost. The first conductive portion 5 formed on one side surface of the actuator 1 may be formed of a material other than a resin such as a conductive paste as long as the first electrode films 3 can be electrically connected to each other. Similarly, the second conductive portion 6 formed on the side surface opposite to the one side surface of the actuator 1 is made of a material other than resin, such as a conductive paste, as long as the second electrode films 4 can be electrically connected to each other. May be formed.

(Embodiment 2)
FIG. 4 is a cross-sectional view schematically showing the configuration of the actuator according to Embodiment 2 of the present invention. As shown in FIG. 4, the actuator 1 is formed by laminating a plurality of electrostrictive sheets 2, first electrode films 3, and second electrode films 4 on one side surface (left side surface toward the paper surface) of the actuator 1. The first conductive portion 5 and the second conductive portion 6 formed on the side surface opposite to the one side surface of the actuator 1 (the right side surface as viewed in the drawing).

  The first electrode film 3 is formed on one surface of the electrostrictive sheet 2 (upper side surface toward the paper surface) and is exposed on one side surface of the actuator 1, but on the side surface opposite to the one side surface of the actuator 1. Not exposed. The second electrode film 4 is formed on the surface opposite to the one surface of the electrostrictive sheet 2 (lower side surface toward the paper surface) and is not exposed on one side surface of the actuator 1, Is exposed on the opposite side. Therefore, the first conductive portion 5 formed on one side surface of the actuator 1 can electrically connect the exposed first electrode films 3 to each other. Similarly, the second conductive portion 6 formed on the side surface opposite to the one side surface of the actuator 1 can electrically connect the exposed second electrode films 4 to each other.

  The materials constituting the electrostrictive sheet 2, the first electrode film 3, the second electrode film 4, the first conductive part 5, and the second conductive part 6 according to the first embodiment of the present invention are the same as those in the first embodiment. Since the material is the same as that described in, detailed description is omitted. Further, since the operation of the actuator 1 according to the second embodiment of the present invention is the same as the operation of the actuator 1 according to the first embodiment, detailed description thereof is omitted.

  Next, a method for manufacturing the actuator 1 according to Embodiment 2 of the present invention will be described. FIG. 5 is a cross-sectional view schematically showing a method for manufacturing the actuator 1 according to the second embodiment of the present invention. First, the electrode film 7 is formed at a predetermined interval in the short side direction on one surface of the electrostrictive sheet 2 (upper side surface toward the paper surface) by vapor deposition or sputtering (FIG. 5A).

  The electrostrictive sheet 2 on which the electrode film 7 is formed is wound in a roll shape in the long side direction of the electrostrictive sheet 2 (FIG. 5B). The actuator 1 is cut out from the electrostrictive sheet 2 wound in a roll shape (FIG. 5C). In the actuator 1, the electrode film 7 is exposed on one side surface of the actuator 1, but is not exposed on the side surface opposite to the one side surface of the actuator 1. Although not exposed, it is cut out from the electrostrictive sheet 2 wound in a roll shape so as to constitute the second electrode film 4 exposed on the side opposite to the one side of the actuator 1.

  As shown in FIG. 5D, the cut-out actuator 1 has a first electrode film 3 (7) on one side surface (left side surface toward the paper surface) and a side surface opposite to one side surface (to the paper surface). The second electrode film 4 (7) is exposed on the right side). Therefore, as shown in FIG. 4, the first conductive portion 5 is formed on one side surface of the actuator 1 to electrically connect the first electrode films 3 (7), and the side opposite to the one side surface of the actuator 1. A second conductive portion 6 is formed on the side surface of the first electrode, and the exposed second electrode films 4 (7) are electrically connected to each other.

  As described above, the actuator 1 according to Embodiment 2 of the present invention is cut out from the electrostrictive sheet 2 wound in a roll shape so that the electrode film 7 constitutes the first electrode film 3 and the second electrode film 4. The electrostrictive sheet 2, the first electrode film 3 and the second electrode film 4 are formed in a laminated shape, and the first conductive portion 5 is formed on one side surface of the actuator 1 where the first electrode film 3 is exposed. Second conductive portions 6 are formed on the side surface opposite to the one side surface of the actuator 1 where the electrode film 4 is exposed. Therefore, the actuator 1 according to the second embodiment of the present invention draws the wiring from the end portion of the laminated electrostrictive sheet 2 in order to electrically connect the first electrode films 3 and the second electrode films 4 to each other. There is no need, and the work of connecting the wiring becomes unnecessary, so the structure is simple, the number of assembling steps is small, and it can be manufactured at low cost. In addition, since the actuator 1 according to Embodiment 2 of the present invention can cut out a plurality of actuators 1 from the electrostrictive sheet 2 wound in a roll shape, it becomes easy to manufacture the actuators 1 in large quantities.

DESCRIPTION OF SYMBOLS 1 Actuator 2 Electrostrictive sheet 3 1st electrode film 4 2nd electrode film 5 1st electroconductive part 6 2nd electroconductive part 7 Electrode film

Claims (5)

An electrode film is formed on at least one surface of a sheet formed of an electrostrictive material, and an actuator in which a plurality of the sheets formed with the electrode film are stacked,
The electrode film is
A first electrode film exposed on one side of the actuator;
A second electrode film facing the first electrode film through the sheet and exposed on a side surface opposite to the one side surface of the actuator;
A first conductive portion electrically connected to the first electrode film is formed on one side surface of the actuator, and a second conductive portion electrically connected to the second electrode film is defined on one side surface of the actuator. An actuator formed on the opposite side surface. The first electrode film is formed continuously in at least the long side direction of one surface of the sheet, and the second electrode film is formed continuously in at least the long side direction of the surface opposite to the one surface of the sheet. And
The actuator according to claim 1, wherein the sheet is bent into a bellows shape.   3. The actuator according to claim 2, wherein one end of the sheet is bent on one side surface of the actuator, and the other end of the sheet is bent on a side surface opposite to the one side surface of the actuator. A method for manufacturing the actuator according to claim 2, comprising:
Forming a first electrode film continuously in at least the long side direction of one surface of the sheet, and forming a second electrode film continuously in at least the long side direction of the surface opposite to the one surface of the sheet;
Bending the sheet on which the first electrode film and the second electrode film are formed into a bellows shape;
Forming a first conductive portion on one side of the actuator where the first electrode film is exposed;
A method of manufacturing an actuator, comprising: forming a second conductive portion on a side surface opposite to a side surface of the actuator where the second electrode film is exposed. A method for manufacturing the actuator according to claim 1, comprising:
An electrode film is formed at a predetermined interval on one surface of the sheet,
The sheet on which the electrode film is formed is wound into a roll,
Cut out the actuator from the sheet wound in a roll shape so that the electrode film constitutes the first electrode film and the second electrode film,
Forming a first conductive portion on one side of the actuator where the first electrode film is exposed;
A method of manufacturing an actuator, comprising: forming a second conductive portion on a side surface opposite to a side surface of the actuator where the second electrode film is exposed.

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