JP2011086962A - Method of manufacturing semiconductor device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a semiconductor device which has a thin-film transistor that uses a compound semiconductor having favorable electrical characteristics, and a method of manufacturing the same. <P>SOLUTION: A compound semiconductor material is used as a semiconductor layer, and a buffer layer including a conductive organic compound and an inorganic compound is formed between the semiconductor layer and a source electrode layer and between the semiconductor layer and a drain electrode layer, respectively. The buffer layer is formed as a layer including the organic compound and the inorganic compound. By the buffer layer intervened between the semiconductor layer using the compound semiconductor material and the source electrode layer and between the semiconductor layer and the drain electrode layer, conductivity between the semiconductor layer and the source electrode layer and between the semiconductor layer and the drain electrode layer is improved, and favorable electrical connection can be established. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a semiconductor device using an oxide semiconductor and a method for manufacturing the semiconductor device.

Thin film transistors (TFTs) used in semiconductor devices, display devices, etc.
For the transistor, a semiconductor film made of a semiconductor material is used. As a semiconductor material, silicon, an organic semiconductor material, or the like is used, but an example using an oxide semiconductor has also been reported (see, for example, Patent Document 1).

JP 2000-150900 A

However, in a thin film transistor using an oxide semiconductor, field effect mobility is low as compared with a thin film transistor using polycrystalline silicon, and improvement in electrical characteristics is required.

In view of such circumstances, an object of the present invention is to provide a high-performance and high-reliability semiconductor device having a thin film transistor using an oxide semiconductor and a manufacturing method thereof.
Another object of the present invention is to provide a technique capable of manufacturing a semiconductor device at low cost and high productivity.

In the present invention, a compound semiconductor material is used as the semiconductor layer, and a conductive buffer layer is formed between the semiconductor layer and the source and drain electrode layers. The buffer layer is formed as a layer containing an organic compound and an inorganic compound. The buffer layer interposed between the semiconductor layer using the compound semiconductor material and the source electrode layer and the drain electrode layer improves the conductivity between the semiconductor layer, the source electrode layer, and the drain electrode layer, and provides an excellent electrical connection. It can be performed. Accordingly, the electrical characteristics of the thin film transistor are improved, and a high-performance semiconductor device or display device can be manufactured.

As a compound semiconductor that forms the semiconductor layer, for example, an oxide semiconductor can be given. Examples of the oxide semiconductor include zinc oxide (ZnO), magnesium zinc oxide (Mg _x Zn _1-x O), tin oxide (SnO ₂ ), indium oxide (In ₂ O ₃ ), and gallium oxide (Ga ₂ O ₃ ). And metal oxides. Alternatively, an oxide semiconductor including a plurality of the above oxide semiconductors may be used, and zinc oxide (ZnO), indium oxide (In ₂ O ₃ ), and gallium oxide (Ga ₂ O _3).
InGaO ₃ (ZnO) _m (m is an integer from 1 to less than 50, typically InGaO ₃ (ZnO) ₅ can also be used. The semiconductor material is a semiconductor having n-type. Alternatively, it may be a p-type semiconductor, may be formed to contain other impurity elements (aluminum, gallium, etc.), a sputtering method using an oxide semiconductor containing an impurity element as a target, It can be formed by a CVD method, or an impurity element may be introduced (added by a doping method, an ion implantation method, or the like) so that the oxide semiconductor includes the impurity element.

An oxide semiconductor such as zinc oxide is transparent because it transmits visible light. A semiconductor layer using such a light-transmitting semiconductor material (transmitting light in the visible light region) absorbs less visible light, so unnecessary photoexcited carriers even when light enters the channel portion of the semiconductor layer. Thus, a highly reliable thin film transistor with excellent light resistance can be obtained. Note that a nitride semiconductor, a carbide semiconductor, or the like may be used as another compound semiconductor.

Compared with other semiconductor materials such as silicon and organic semiconductor materials, a compound semiconductor such as an oxide semiconductor is less expensive and does not complicate the manufacturing process, so that a semiconductor device can be manufactured at low cost. .

Note that in this specification, a semiconductor device refers to a device that can function by utilizing semiconductor characteristics. By using the present invention, a semiconductor device such as a multilayer wiring layer or a chip having a processor circuit (hereinafter also referred to as a processor chip) can be manufactured.

The present invention can also be used for a display device that has a display function. The display device using the present invention includes an organic substance that emits light called electroluminescence (hereinafter also referred to as “EL”), or an organic substance. And a liquid crystal display device using a liquid crystal element having a liquid crystal material as a display element, and the like.

One embodiment of the semiconductor device of the present invention includes an oxide semiconductor layer, a conductive layer, and a layer containing an organic compound and an inorganic compound provided between the semiconductor layer and the conductive layer. Since the layer containing an organic compound and an inorganic compound only needs to be provided in contact with the oxide semiconductor layer and the conductive layer, the stacking order of the oxide semiconductor layer, the layer containing the organic compound and the inorganic compound, and the conductive layer depends on the structure of the thin film transistor. Varies with the substrate provided. Further, depending on the structure of the thin film transistor, a semiconductor layer, a layer containing an organic compound and an inorganic compound, and a conductive layer may be provided adjacent to each other on the substrate.

One embodiment of a semiconductor device of the present invention includes an oxide semiconductor layer, a source electrode layer, a drain electrode layer, and a layer including a first organic compound and an inorganic compound provided between the semiconductor layer and the source electrode layer. And a layer containing a second organic compound and an inorganic compound provided between the semiconductor layer and the drain electrode layer.

One of the semiconductor devices of the present invention is a gate electrode layer, a gate insulating layer, an oxide semiconductor layer,
A source electrode layer, a drain electrode layer, a first organic compound and an inorganic compound layer provided between the semiconductor layer and the source electrode layer, and a first layer provided between the semiconductor layer and the drain electrode layer; And a layer containing two organic compounds and an inorganic compound.

One embodiment of the semiconductor device of the present invention includes a gate electrode layer, a gate insulating layer over the gate electrode layer, a source electrode layer and a drain electrode layer over the gate insulating layer, and an oxide semiconductor over the source electrode layer and the drain electrode layer. And a semiconductor layer including an organic material over the oxide semiconductor layer.

According to one method for manufacturing a semiconductor device of the present invention, an oxide semiconductor layer is formed, a layer containing an organic compound and an inorganic compound is formed in contact with the semiconductor layer, and a conductive layer is contacted with the layer containing the organic compound and the inorganic compound. Form.

In one embodiment of the method for manufacturing a semiconductor device of the present invention, an oxide semiconductor layer is formed, and a layer containing a first organic compound and an inorganic compound and a layer containing a second organic compound and an inorganic compound are formed over the semiconductor layer. The source electrode layer is formed on the layer containing the first organic compound and the inorganic compound, and the drain electrode layer is formed on the layer containing the second organic compound and the inorganic compound.

According to one method for manufacturing a semiconductor device of the present invention, a gate electrode layer is formed, a gate insulating layer is formed over the gate electrode layer, an oxide semiconductor layer is formed over the gate insulating layer, Forming a layer containing a first organic compound and an inorganic compound and a layer containing a second organic compound and an inorganic compound, and forming a source electrode layer on the layer containing the first organic compound and the inorganic compound; A drain electrode layer is formed on the layer containing the inorganic compound.

In one embodiment of the method for manufacturing a semiconductor device of the present invention, a gate electrode layer is formed, a gate insulating layer is formed over the gate electrode layer, a source electrode layer and a drain electrode layer are formed over the gate insulating layer, and a source electrode layer is formed. A layer containing a first organic compound and an inorganic compound is formed on the drain electrode layer, a layer containing a second organic compound and an inorganic compound is formed on the drain electrode layer; An oxide semiconductor layer is formed over the layer containing an organic compound and an inorganic compound.

In one embodiment of the method for manufacturing a semiconductor device of the present invention, an oxide semiconductor layer is formed and a first layer is formed over the semiconductor layer.
Forming a layer containing the organic compound and the inorganic compound and a layer containing the second organic compound and the inorganic compound, and forming a source electrode layer on the layer containing the first organic compound and the inorganic compound, A drain electrode layer is formed over the layer containing an inorganic compound, a gate insulating layer is formed over the source electrode layer, the drain electrode layer, and the semiconductor layer, and a gate electrode layer is formed over the gate insulating layer.

In one embodiment of the method for manufacturing a semiconductor device of the present invention, a gate electrode layer is formed, a gate insulating layer is formed over the gate electrode layer, a source electrode layer and a drain electrode layer are formed over the gate insulating layer, and a source electrode layer is formed. An oxide semiconductor layer is formed over the drain electrode layer, and a semiconductor layer containing an organic material is formed over the oxide semiconductor layer.

In the present invention, the conductivity between the oxide semiconductor layer, the source electrode layer, and the drain electrode layer is improved by the buffer layer interposed between the oxide semiconductor layer, the source electrode layer, and the drain electrode layer. Connection can be made. Accordingly, the electrical characteristics of the thin film transistor are improved, and a high-performance semiconductor device or display device can be manufactured.

An oxide semiconductor is less expensive and does not complicate a manufacturing process than a semiconductor material such as silicon or an organic semiconductor material; thus, a semiconductor device can be manufactured at low cost. In addition, since an oxide semiconductor has little absorption of visible light, a thin film transistor with excellent light resistance can be obtained in which unnecessary photoexcited carriers are not generated even when light enters a channel portion of a semiconductor layer. Therefore, a high-performance and highly reliable semiconductor device capable of high-speed operation,
A display device can also be manufactured.

The conceptual diagram which shows this invention. FIG. 11 illustrates a semiconductor device of the present invention. FIG. 11 illustrates a semiconductor device of the present invention. 4A and 4B illustrate a method for manufacturing a display device of the present invention. 4A and 4B illustrate a method for manufacturing a display device of the present invention. 4A and 4B illustrate a method for manufacturing a display device of the present invention. 4A and 4B illustrate a method for manufacturing a display device of the present invention. FIG. 6 illustrates a display device of the present invention. Sectional drawing which shows the structural example of EL display module of this invention. FIG. 6 is a circuit diagram illustrating a structure of a pixel that can be applied to an EL display panel of the present invention. FIG. 6 illustrates a structure of a light-emitting element that can be applied to the present invention. 4A and 4B illustrate a method for manufacturing a display device of the present invention. 4A and 4B illustrate a method for manufacturing a display device of the present invention. FIG. 6 illustrates a display device of the present invention. FIG. 6 illustrates a display device of the present invention. Sectional drawing which shows the structural example of the liquid crystal display module of this invention. The top view of the display apparatus of this invention. The top view of the display apparatus of this invention. The figure which shows the protection circuit to which this invention is applied. 1 is a block diagram illustrating a main configuration of an electronic device to which the present invention is applied. FIG. 11 illustrates an electronic device to which the present invention is applied. FIG. 11 illustrates an electronic device to which the present invention is applied. FIG. 11 illustrates a semiconductor device of the present invention. 1 is a diagram showing a semiconductor device to which the present invention is applied. FIG. 11 illustrates a semiconductor device of the present invention. FIG. 11 illustrates an electronic device to which the present invention is applied. FIG. 6 illustrates a display device of the present invention.

Embodiments of the present invention will be described in detail with reference to the drawings. However, the present invention is not limited to the following description, and it is easily understood by those skilled in the art that modes and details can be variously changed without departing from the spirit and scope of the present invention. Therefore, the present invention should not be construed as being limited to the description of the embodiments below. Note that in structures of the present invention described below, the same portions or portions having similar functions are denoted by the same reference numerals in different drawings, and description thereof is not repeated.

(Embodiment 1)
An embodiment of the present invention will be described with reference to FIG. The transistors illustrated in FIGS. 1A, 1B, and 1C are coplanar thin film transistors with a bottom gate structure.

In this embodiment, a compound semiconductor material is used for the semiconductor layer, and a conductive buffer layer is formed between the semiconductor layer and the source and drain electrode layers. The buffer layer is formed as a layer containing an organic compound and an inorganic compound. The buffer layer interposed between the semiconductor layer using the compound semiconductor material and the source electrode layer and the drain electrode layer improves the conductivity between the semiconductor layer, the source electrode layer, and the drain electrode layer, and provides an excellent electrical connection. It can be performed.

As shown in FIG. 1A, a gate electrode layer 51 is provided over a substrate 50, a gate insulating layer 52 is formed on the gate electrode layer 51, and a source or drain electrode layer 5 is formed on the gate insulating layer 52.
3a and a source or drain electrode layer 53b are formed. A semiconductor layer 55 is formed over the source or drain electrode layer 53 a and the source or drain electrode layer 53 b, and a buffer layer 54 b is provided between the source or drain electrode layer 53 a and the semiconductor layer 55. A buffer layer 54 b is provided between the source or drain electrode layer 53 b and the semiconductor layer 55.

The buffer layer 54a and the buffer layer 54b have conductivity and are formed from a layer containing an organic compound and an inorganic compound. The buffer layer 54a and the buffer layer 54b reduce the contact resistance between the source or drain electrode layer 53a and the semiconductor layer 55, and between the source or drain electrode layer 53b and the semiconductor layer 55, so that the electrical connection is improved. can do.

Depending on the combination of the material used for the semiconductor layer and the material used for the source electrode layer and the drain electrode layer, electrical characteristics such as inability to conduct and high resistance may be deteriorated.
Therefore, the material used for the semiconductor layer and the material used for the source and drain electrode layers need to be selected as appropriate. In this embodiment, the source electrode layer, the drain electrode layer, and the oxide semiconductor layer are stacked and electrically connected to each other through the buffer layer, so that the above-described deterioration in electrical characteristics is prevented and the freedom of materials is reduced. Can be selected. Therefore, a semiconductor device that satisfies required characteristics (electric characteristics, characteristics related to reliability (a stacked state of materials (adhesion), etc.)) can be manufactured.

As the organic compound that can be used for the buffer layer, an organic compound having a hole transporting property or an organic compound having an electron transporting property can be used. The organic compound having a hole transporting property is preferably provided between the p-type semiconductor layer and the source and drain electrode layers, and the organic compound having an electron transporting property is an n-type semiconductor layer and the source electrode layer. And between the drain electrode layer and the drain electrode layer.

An organic compound having a hole-transport property that can be used for the buffer layer is 4,4′-bis [N- (1-naphthyl) -N-phenylamino] biphenyl (abbreviation: NPB), 4,4 ′.
-Bis [N- (3-methylphenyl) -N-phenylamino] biphenyl (abbreviation: TPD)
), 4,4 ′, 4 ″ -tris (N, N-diphenylamino) triphenylamine (abbreviation: TDATA), 4,4 ′, 4 ″ -tris [N- (3-methylphenyl) -N -Phenylamino] triphenylamine (abbreviation: MTDATA), 4,4′-bis {N- [4- (
N, N-di-m-tolylamino) phenyl] -N-phenylamino} biphenyl (abbreviation:
DNTPD), 1,3,5-tris [N, N-di (m-tolyl) amino] benzene (abbreviation: m-MTDAB), 4,4 ′, 4 ″ -tris (N-carbazolyl) triphenylamine (Abbreviation: TCTA), 2,3-bis (4-diphenylaminophenyl) quinoxaline (
Abbreviations: TPAQn), 2,2 ′, 3,3′-tetrakis (4-diphenylaminophenyl) -6,6′-biskinoxaline (abbreviation: D-TriPhAQn), 2,3-bis {4-
Organic materials having an arylamino group such as [N- (1-naphthyl) -N-phenylamino] phenyl} -dibenzo [f, h] quinoxaline (abbreviation: NPDiBzQn), phthalocyanine (abbreviation: H2Pc), copper phthalocyanine ( Abbreviation: CuPc), vanadyl phthalocyanine (abbreviation: VOPc), and the like can also be used.

In addition, an organic material represented by the following general formula (1) can also be suitably used as the organic compound having a hole transporting property, and specific examples thereof include 3- [N- (9-phenylcarbazole-3]. -Yl) -N-phenylamino] -9-phenylcarbazole (abbreviation: PCzPC)
A1), 3,6-bis [N- (9-phenylcarbazol-3-yl) -N-phenylamino] -9-phenylcarbazole (abbreviation: PCzPCA2), and the like can be given.
The first composite material using an organic compound having this structure has excellent thermal stability and good reliability.

（式中、Ｒ１およびＲ３は、それぞれ同一でも異なっていてもよく、水素、炭素数１〜６
のアルキル基、炭素数６〜２５のアリール基、炭素数５〜９のヘテロアリール基、アリー
ルアルキル基、炭素数１〜７のアシル基のいずれかを表し、Ａｒ１は、炭素数６〜２５の
アリール基、炭素数５〜９のヘテロアリール基のいずれかを表し、Ｒ２は、水素、炭素数
１〜６のアルキル基、炭素数６〜１２のアリール基のいずれかを表し、Ｒ４は、水素、炭
素数１〜６のアルキル基、炭素数６〜１２のアリール基、一般式（２）で示される置換基
のいずれかを表し、一般式（２）で示される置換基において、Ｒ５は、水素、炭素数１〜
６のアルキル基、炭素数６〜２５のアリール基、炭素数５〜９のヘテロアリール基、アリ
ールアルキル基、炭素数１〜７のアシル基のいずれかを表し、Ａｒ２は、炭素数６〜２５
のアリール基、炭素数５〜９のヘテロアリール基のいずれかを表し、Ｒ６は、水素、炭素
数１〜６のアルキル基、炭素数６〜１２のアリール基のいずれかを表す。）

(Wherein R1 and R3 may be the same as or different from each other, hydrogen, carbon number 1 to 6
Or an alkyl group having 6 to 25 carbon atoms, a heteroaryl group having 5 to 9 carbon atoms, an arylalkyl group, or an acyl group having 1 to 7 carbon atoms, Ar1 having 6 to 25 carbon atoms R2 represents any of an aryl group and a C5-C9 heteroaryl group, R2 represents hydrogen, a C1-C6 alkyl group, or a C6-C12 aryl group, R4 represents hydrogen , An alkyl group having 1 to 6 carbon atoms, an aryl group having 6 to 12 carbon atoms, and a substituent represented by the general formula (2). In the substituent represented by the general formula (2), R5 is: Hydrogen, carbon number 1
6 represents an alkyl group having 6 to 25 carbon atoms, an aryl group having 6 to 25 carbon atoms, a heteroaryl group having 5 to 9 carbon atoms, an arylalkyl group, or an acyl group having 1 to 7 carbon atoms. Ar2 represents 6 to 25 carbon atoms.
R6 represents any one of hydrogen, an alkyl group having 1 to 6 carbon atoms, and an aryl group having 6 to 12 carbon atoms. )

An organic material represented by any one of the following general formulas (3) to (6) can also be suitably used. Specific examples of the organic compound represented by any one of the following general formulas (3) to (6) include N- (2-naphthyl) carbazole (abbreviation: NCz), 4,4′-di (N-carbazolyl). Biphenyl (abbreviation: CBP), 9,10-bis [4- (N-carbazolyl)
Phenyl] anthracene (abbreviation: BCPA), 3,5-bis [4- (N-carbazolyl)
Phenyl] biphenyl (abbreviation: BCPBi), 1,3,5-tris [4- (N-carbazolyl) phenyl] benzene (abbreviation: TCPB), and the like.

式中Ａｒは炭素数６〜４２の芳香族炭化水素基を表し、ｎは１〜３の自然数を表し、Ｒ１
、Ｒ２は水素、または炭素数１〜４のアルキル基、または炭素数６〜１２のアリール基を
表す。

In the formula, Ar represents an aromatic hydrocarbon group having 6 to 42 carbon atoms, n represents a natural number of 1 to 3, R1
, R2 represents hydrogen, an alkyl group having 1 to 4 carbon atoms, or an aryl group having 6 to 12 carbon atoms.

ただし、式中Ａｒは炭素数６〜４２の１価の芳香族炭化水素（ビニル骨格を少なくとも
一つ含む芳香族炭化水素を含む）基を表し、Ｒ１、Ｒ２は水素、または炭素数１〜４のア
ルキル基、または炭素数６〜１２のアリール基を表す。

In the formula, Ar represents a monovalent aromatic hydrocarbon group having 6 to 42 carbon atoms (including an aromatic hydrocarbon containing at least one vinyl skeleton), and R1 and R2 are hydrogen or 1 to 4 carbon atoms. An alkyl group or an aryl group having 6 to 12 carbon atoms.

ただし、式中Ａｒは炭素数６〜４２の２価の芳香族炭化水素基を表し、Ｒ１〜Ｒ４は水
素、または炭素数１〜４のアルキル基、または炭素数６〜１２のアリール基を表す。

However, Ar represents a C6-C42 bivalent aromatic hydrocarbon group, R1-R4 represents hydrogen, a C1-C4 alkyl group, or a C6-C12 aryl group. .

ただし、式中Ａｒは炭素数６〜４２の３価の芳香族炭化水素基を表し、Ｒ１〜Ｒ６は水
素、または炭素数１〜４のアルキル基、または炭素数６〜１２のアリール基を表す。

In the formula, Ar represents a trivalent aromatic hydrocarbon group having 6 to 42 carbon atoms, R1 to R6 represent hydrogen, an alkyl group having 1 to 4 carbon atoms, or an aryl group having 6 to 12 carbon atoms. .

Further, anthracene, 9,10-diphenylanthracene (abbreviation: DPA), 2-t
ert-Butyl-9,10-di (2-naphthyl) anthracene (abbreviation: t-BuDNA)
Aromatic hydrocarbons such as tetracene, rubrene and pentacene can also be used.

Examples of the organic compound having an electron transporting property that can be used for the buffer layer include tris (8-quinolinolato) aluminum (abbreviation: Alq ₃ ), tris (4-methyl-8-quinolinolato) aluminum (abbreviation: Almq ₃ ), Bis (10-hydroxybenzo [h]-
Quinolinato) beryllium (abbreviation: BeBq ₂ ), bis (2-methyl-8-quinolinolato)
A material formed of a metal complex having a quinoline skeleton or a benzoquinoline skeleton such as -4-phenylphenolato-aluminum (abbreviation: BAlq) can be used. In addition,
Bis [2- (2-hydroxyphenyl) benzoxazolate] zinc (abbreviation: Zn (BOX
₂ ), bis [2- (2-hydroxyphenyl) benzothiazolate] zinc (abbreviation: Zn (
Materials such as metal complexes having an oxazole-based or thiazole-based ligand such as BTZ) ₂ ) can also be used. In addition to metal complexes, 2- (4-biphenylyl) -5- (4
-Tert-butylphenyl) -1,3,4-oxadiazole (abbreviation: PBD), 1,
3-bis [5- (p-tert-butylphenyl) -1,3,4-oxadiazole-2
-Yl] benzene (abbreviation: OXD-7), 3- (4-tert-butylphenyl) -4-
Phenyl-5- (4-biphenylyl) -1,2,4-triazole (abbreviation: TAZ), 3
-(4-tert-butylphenyl) -4- (4-ethylphenyl) -5- (4-biphenylyl) -1,2,4-triazole (abbreviation: p-EtTAZ), bathophenanthroline (abbreviation: BPhen), Bathocuproine (abbreviation: BCP) or the like can be used.

The inorganic compound that can be used for the buffer layer is preferably an oxide or nitride of a transition metal, more preferably an oxide or nitride of a metal belonging to Group 4-8. Among these, vanadium oxide, tantalum oxide, molybdenum oxide, tungsten oxide, rhenium oxide, and ruthenium oxide are preferable. The inorganic compound is preferably provided as a composite material mixed with an organic compound having a hole-transport property between the p-type semiconductor layer and the source and drain electrode layers.

Other inorganic compounds that can be used for the buffer layer are preferably alkali metals and alkaline earth metals, or oxides or nitrides containing them, specifically lithium, sodium, potassium, cesium, magnesium, calcium, Strontium, barium, lithium oxide, magnesium nitride, and calcium nitride are preferable. The inorganic compound has a donor property, and is preferably provided as a composite material mixed with an organic compound having an electron transport property between the n-type semiconductor layer and the source and drain electrode layers.

As described above, a layer containing an organic compound and an inorganic compound which are buffer layers containing at least one of the organic compounds and at least one of the inorganic compounds can be formed. Of course, a plurality of organic compounds and inorganic compounds may be used.

The buffer layer containing an organic compound and an inorganic compound is formed by an electron beam evaporation method, a vapor deposition method such as co-evaporation, a sputtering method, a CVD method, a coating method such as a spin coating method using a mixed solution, or a sol-gel method. Can be used. The buffer layer can be formed by depositing each material at the same time, co-evaporation method by resistance heating deposition, co-evaporation method by electron beam deposition, co-evaporation method by resistance heating deposition and electron beam deposition, resistance It can be formed by combining the same or different methods such as film formation by heating vapor deposition and sputtering and film formation by electron beam vapor deposition and sputtering. In addition, a droplet discharge (spout) method that can selectively discharge (spout) droplets of a composition prepared for a specific purpose to form a predetermined pattern (
Depending on the method, it is also called an inkjet method. ), A method by which an object can be transferred or drawn in a desired pattern, for example, various printing methods (a method in which a desired pattern such as screen (stencil) printing, offset (flat plate) printing, letterpress printing or gravure (intaglio printing) is formed) A dispenser method or the like can also be used. In addition, after forming either one (organic compound layer or inorganic compound layer) instead of forming at the same time, the other one (organic compound or inorganic compound) is introduced by an ion implantation method or a doping method, and the buffer layer May be formed.

As a compound semiconductor that forms the semiconductor layer, for example, an oxide semiconductor can be given. Examples of the oxide semiconductor include zinc oxide (ZnO), magnesium zinc oxide (Mg _x Zn _1-x O), tin oxide (SnO ₂ ), indium oxide (In ₂ O ₃ ), and gallium oxide (Ga ₂ O ₃ ). And metal oxides. Alternatively, an oxide semiconductor including a plurality of the above oxide semiconductors may be used, and zinc oxide (ZnO), indium oxide (In ₂ O ₃ ), and gallium oxide (Ga ₂ O _3).
InGaO ₃ (ZnO) _m (m is an integer from 1 to less than 50, typically InGaO ₃ (ZnO) ₅ can also be used. The semiconductor material may have any structure of crystallinity or crystallinity, and the semiconductor material may be an n-type semiconductor or a p-type semiconductor, and other impurity elements (aluminum,
(Eg, gallium). It can be formed by a sputtering method using an oxide semiconductor containing an impurity element as a target, a CVD method, or the like. Alternatively, an impurity element may be introduced (added by a doping method, an ion implantation method, or the like) so that the oxide semiconductor includes the impurity element. The semiconductor layer can be formed as a single layer or a stacked layer by a method such as vapor deposition, CVD, plasma CVD, or sputtering. In addition, the droplet discharge method,
Printing methods (screen printing, offset printing, relief printing, gravure (intaglio printing), etc.),
A coating method such as a spin coating method, a dipping method, or the like can also be used.

An oxide semiconductor such as zinc oxide is transparent because it transmits visible light. A semiconductor layer using such a light-transmitting semiconductor material (transmitting light in the visible light region) absorbs less visible light, so unnecessary photoexcited carriers even when light enters the channel portion of the semiconductor layer. Thus, a highly reliable thin film transistor with excellent light resistance can be obtained. Note that a nitride semiconductor, a carbide semiconductor, or the like may be used as another compound semiconductor.

Compared with other semiconductor materials such as silicon and organic semiconductor materials, a compound semiconductor such as an oxide semiconductor is less expensive and does not complicate the manufacturing process, so that a semiconductor device can be manufactured at low cost. .

In addition, a semiconductor layer having one conductivity type (n-type or p-type) can be formed by including an impurity element in a semiconductor layer. As an impurity element added (formed to include) to the semiconductor layer, a group 13 element (boron (B)), gallium (Ga), indium (In), thallium (Tl)), a group 17 element (fluorine (F ), Chlorine (Cl), bromine (Br), iodine (I)), group 1 elements (lithium (Li), sodium (Na), potassium (K), rubidium (Rb), cesium (Cs)), group 15 Elements (nitrogen (N), phosphorus (P), arsenic (As), antimony (Sb), bismuth (Bi)) and the like can be used, and one or more of the above elements can be used.

The impurity element may be added to a part of the semiconductor layer or may be added to the entire semiconductor layer. The addition amount depends on the size, thickness, integration degree, required performance (electrical characteristics, etc.) of the thin film transistor element. The concentration may be set appropriately according to the above, and the concentration may be uniform over the semiconductor layer or may have a concentration gradient.

Further, the semiconductor layer may have a stacked structure. FIGS. 25A and 25B illustrate an example in which a semiconductor layer has a stacked structure. 25A and 25B illustrate an example of forming a semiconductor layer using an organic semiconductor layer which is a semiconductor layer containing an organic material in addition to an oxide semiconductor layer.

FIG. 25A illustrates a coplanar thin film transistor in which a gate electrode layer 421 is formed over a substrate 420, a gate insulating layer 422 is formed over the gate electrode layer 421, and the gate insulating layer 42 is formed.
2 on the source or drain electrode layer 423a and the source or drain electrode layer 4
23b is formed. In the source or drain electrode layer 423a and the source or drain electrode layer 423b, a two-layer semiconductor layer including a semiconductor layer 425 which is an oxide semiconductor layer and a semiconductor layer 426 including an organic material is formed. . Further, a buffer layer 424 a that is a layer containing an organic compound and an inorganic compound is provided between the source or drain electrode layer 423 a and the semiconductor layer 425, and the source or drain electrode layer 423 b and the semiconductor layer 425 are provided. A buffer layer 424b which is a layer containing an organic compound and an inorganic compound is provided therebetween.

The semiconductor layer 426 including an organic material has a function of protecting the semiconductor layer 425 that is an oxide semiconductor layer. In the case where processing by etching is performed at the time of formation in order to shape into a desired shape, the semiconductor layer 426 including an organic material particularly has an effect of protecting the semiconductor layer 425. With such a structure, the semiconductor layer 425 that is an oxide semiconductor layer is easily etched, and the semiconductor layer 425 that is an oxide semiconductor layer has low resistance to an etchant or an etching gas.
Is protected and is not etched, so that a highly reliable thin film transistor can be manufactured.

Alternatively, a structure in which only one of the buffer layer and the drain side is provided may be employed. A structure in which the buffer layer is provided only on either the source side or the drain side is shown in FIG.
). FIG. 25B illustrates a coplanar thin film transistor in which a gate electrode layer 431 is formed over a substrate 430, a gate insulating layer 432 is formed over the gate electrode layer 431, and a source electrode layer or a drain electrode layer is formed over the gate insulating layer 432. 433a and a source or drain electrode layer 433b are formed. The source or drain electrode layer 433a and the source or drain electrode layer 433b each include a two-layer semiconductor including a first semiconductor layer 435 that is an oxide semiconductor layer and a second semiconductor layer 436 containing an organic material. A layer is formed. Further, the source or drain electrode layer 433a and the first semiconductor layer 4 which is an oxide semiconductor layer.
25, a buffer layer 434 which is a layer containing an organic compound and an inorganic compound is provided.

In FIG. 25B, the buffer layer 434 and the source or drain electrode layer 433
Since a is formed separately from a, the end portions of the buffer layer 434 and the source or drain electrode layer 433a are examples of cross-sectional views that do not coincide with each other. Thus, the buffer layer,
The source electrode layer, the drain electrode layer, the oxide semiconductor layer, and the semiconductor layer containing an organic material may be processed into the same shape in the same step, or may be formed in different shapes according to different steps.

As the second semiconductor layer stacked over the first semiconductor layer, in addition to the semiconductor layer including an organic material, a semiconductor layer including another oxide may be stacked. When a semiconductor layer having a conductivity type is used for the second semiconductor layer, the conductivity (conductivity type such as n-type or p-type) of the first semiconductor layer that is an oxide semiconductor layer can be further controlled. When the second semiconductor layer to be stacked has lower conductivity than the first semiconductor layer on the source electrode layer and drain electrode layer side, the second semiconductor layer is in contact with the source electrode layer and the drain electrode layer. But you can. In the case where the conductivity of the second semiconductor layer is higher than that of the first semiconductor layer, it is preferable that the second semiconductor layer have a structure that is not in contact with the source electrode layer and the drain electrode layer.

The semiconductor layer 426 containing an organic material can be formed by a printing method, a spray method, a spin coating method, a droplet discharge method, or the like using an organic semiconductor material as a semiconductor. When a printing method, a droplet discharge method, or the like that can selectively form a semiconductor layer is used, the number of steps can be reduced because an etching step is not necessary. As the organic semiconductor, a low molecular material, a polymer material, or the like is used, and materials such as an organic dye or a conductive polymer material can also be used. The organic semiconductor material used in the present invention is preferably a π-electron conjugated polymer material whose skeleton is composed of conjugated double bonds. Typically, a soluble polymer material such as polythiophene, polyfluorene, poly (3-alkylthiophene), a polythiophene derivative, or pentacene can be used.

As another organic semiconductor material that can be used, there is a material that can form a semiconductor layer by processing after forming a soluble precursor. Such organic semiconductor materials include polythienylene vinylene and poly (2,5-thienylene vinylene).
, Polyacetylene, polyacetylene derivatives, polyarylene vinylene and the like.

When converting the precursor into an organic semiconductor, a reaction catalyst such as hydrogen chloride gas is added as well as heat treatment. Typical solvents for dissolving these soluble organic semiconductor materials include toluene, xylene, chlorobenzene, dichlorobenzene, anisole, chloroform, dichloromethane, γ-butyllactone, butyl cellosolve, cyclohexane, NMP (N-methyl-2 -Pyrrolidone), cyclohexanone, 2-butanone, dioxane, dimethylformamide (DMF), THF (tetrahydrofuran), or the like can be applied.

The buffer layer 424a and the buffer layer 424b have conductivity and are formed from a layer containing an organic compound and an inorganic compound. By the buffer layer 424a and the buffer layer 424b, the source or drain electrode layer 423a and the semiconductor layer 425 which is an oxide semiconductor layer are used.
In addition, the contact resistance between the source or drain electrode layer 423b and the semiconductor layer 425 that is an oxide semiconductor layer is reduced, so that electrical connection can be improved.

As shown in FIG. 1B, a gate electrode layer 61 is provided over a substrate 60, a gate insulating layer 62 is formed on the gate electrode layer 61, and a source or drain electrode layer 6 is formed on the gate insulating layer 62.
3a and a source or drain electrode layer 63b are formed. A semiconductor layer 65 is formed over the source or drain electrode layer 63 a and the source or drain electrode layer 63 b, and a buffer layer 64 b is provided between the source or drain electrode layer 63 a and the semiconductor layer 65. A buffer layer 64 b is provided between the source or drain electrode layer 63 b and the semiconductor layer 65.

In the thin film transistor in FIG. 1B, the buffer layer 64a and the buffer layer 64b are not the same, and are layers containing an organic compound and an inorganic compound using different materials. Even when the same material is used for the buffer layer 64a and the buffer layer 64b, different characteristics (properties) may be obtained by changing the mixing ratio, mixing state, and the like of the organic compound and the inorganic compound contained therein.

The buffer layer 64a and the buffer layer 64b have conductivity and are formed from a layer containing an organic compound and an inorganic compound. The buffer layer 64a and the buffer layer 64b reduce the contact resistance between the source or drain electrode layer 63a and the semiconductor layer 65, and between the source or drain electrode layer 63b and the semiconductor layer 65, thereby improving electrical connection. can do.

The thin film transistor in FIG. 1A uses the same material for the buffer layer 54a and the buffer layer 54b, and the source region and the drain region are the same material and have the same structure. As described above, a buffer layer made of the same material may be used on the source side and the drain side, or buffer layers made of different materials (buffer layers having different properties) may be used as shown in FIG. Good. Alternatively, a structure in which only one of the buffer layer and the drain side is provided may be employed.

The buffer layer allows the electrical characteristics of the thin film transistor to be controlled more precisely, increasing the degree of freedom in electrical design of the semiconductor device, and providing high-performance, high-performance, and more useful characteristics. A semiconductor device can be manufactured.

Alternatively, a semiconductor layer having one conductivity type may be provided between the buffer layer and the source and drain electrode layers. Depending on the conductivity of the semiconductor layer having one conductivity type and the buffer layer, a semiconductor layer having one conductivity type may be formed between the buffer layer and the semiconductor layer.

As shown in FIG. 1C, a gate electrode layer 71 is provided over a substrate 70, a gate insulating layer 72 is provided on the gate electrode layer 71, and a source or drain electrode layer 7 is provided on the gate insulating layer 72.
3a and a source or drain electrode layer 73b are formed. A semiconductor layer 75 is formed over the source or drain electrode layer 73 a and the source or drain electrode layer 73 b, and a buffer layer 74 b is provided between the source or drain electrode layer 73 a and the semiconductor layer 75. A buffer layer 74 b is provided between the source or drain electrode layer 73 b and the semiconductor layer 75. Further, a semiconductor layer 76a having one conductivity type is provided between the source or drain electrode layer 73a and the buffer layer 74a, and a one conductivity type is provided between the source or drain electrode layer 73b and the buffer layer 74b. A semiconductor layer 76b is provided.

As the semiconductor layer having one conductivity type, a semiconductor layer in which an impurity element imparting one conductivity type is added to a semiconductor material can be used. As the semiconductor material, the above-described oxide semiconductor materials (zinc oxide, magnesium zinc oxide, tin oxide), silicon (Si), germanium (G
e) Organic semiconductor materials may be used. An impurity element (group 13 element, 17
A semiconductor layer to which a group element, a group 1 element, a group 15 element) or the like is added can be used. For example, as the semiconductor layer having one conductivity type, zinc oxide containing aluminum, zinc oxide containing gallium, or the like obtained by adding aluminum or gallium to zinc oxide may be used. Also, other compound semiconductors (GaAs, InP, SiC, ZnSe, GaN, SiGe, etc.) can be used. The semiconductor layer may or may not have crystallinity, and may be any of an amorphous semiconductor, a microcrystalline semiconductor, and a crystalline semiconductor. A crystalline semiconductor can be formed by crystallizing an amorphous semiconductor using light energy or thermal energy. Alternatively, a crystalline semiconductor layer immediately after film formation may be used, or crystallization may be performed in the same manner as the amorphous semiconductor layer to improve crystallinity. Crystallization of the amorphous semiconductor layer and the semiconductor layer having crystallinity may be a combination of heat treatment and crystallization by laser light irradiation, or the heat treatment and laser light irradiation may be performed several times independently.

The semiconductor layer is formed by sputtering, vapor deposition, PVD, CVD (LPCVD, plasma CVD)
Method), a coating method (spin coating method, dipping method), a droplet discharge method, a dispenser method, a printing method, or the like.

The buffer layer 74a and the buffer layer 74b are formed of a layer containing an organic compound and an inorganic compound. The buffer layer 74a and the buffer layer 74b reduce the contact resistance between the semiconductor layer 76a and the semiconductor layer 75 having one conductivity type, and the semiconductor layer 76b and the semiconductor layer 75 having one conductivity type, so that the source electrode layer or the drain electrode The electrical connection between the layer 73a, the semiconductor layer 75, the source or drain electrode layer 73b, and the semiconductor layer 75 can be improved.

In this embodiment, the buffer layer interposed between the oxide semiconductor layer and the source and drain electrode layers improves conductivity between the semiconductor layer and the source and drain electrode layers, which is electrically favorable. Connection can be made. Accordingly, the electrical characteristics of the thin film transistor are improved, and a high-performance semiconductor device or display device can be manufactured.

An oxide semiconductor is less expensive and does not complicate a manufacturing process than a semiconductor material such as silicon or an organic semiconductor material; thus, a semiconductor device can be manufactured at low cost. In addition, since a transparent semiconductor material such as an oxide semiconductor has little absorption of visible light, a thin film transistor with excellent light resistance in which unnecessary photoexcited carriers are not generated even when light enters the channel portion of the semiconductor layer. Can do. Therefore, a high-performance and high-reliability semiconductor device or display device that can operate at high speed can be manufactured.

(Embodiment 2)
Embodiment modes of the present invention will be described with reference to FIGS. This embodiment is an example of an inverted staggered thin film transistor using the present invention. Therefore, repetitive description of the same portion as in Embodiment 1 or a portion having a similar function is omitted.

In this embodiment, an oxide semiconductor material is used for the semiconductor layer, and a conductive buffer layer is formed between the semiconductor layer and the source and drain electrode layers. The buffer layer is formed as a layer containing an organic compound and an inorganic compound. The buffer layer interposed between the semiconductor layer using the oxide semiconductor material and the source electrode layer and the drain electrode layer improves conductivity between the semiconductor layer, the source electrode layer, and the drain electrode layer. Connection can be made.

As shown in FIG. 2A, a gate electrode layer 81a and a gate electrode layer 81 are formed over a substrate 80.
a gate insulating layer 82 over the gate electrode layer 81a and the gate electrode layer 81b, a semiconductor layer 85a that is an oxide semiconductor layer over the gate insulating layer 82 that overlaps with the gate electrode layer 81a, and a gate that overlaps with the gate electrode layer 81b A semiconductor layer 85 b that is an oxide semiconductor layer is formed over the insulating layer 82. A source / drain electrode layer 83a and a source / drain electrode layer 83b are formed on the semiconductor layer 85a, and a source / drain electrode layer 83b and a source / drain electrode layer 83c are formed on the semiconductor layer 85b. Yes. A buffer layer 84b is provided between the source or drain electrode layer 83a and the semiconductor layer 85a, and a buffer layer 84b is provided between the source or drain electrode layer 83b and the semiconductor layer 85a. Similarly, a buffer layer 84b is provided between the source or drain electrode layer 83b and the semiconductor layer 85b, and a buffer layer 84c is provided between the source or drain electrode layer 83c and the semiconductor layer 85b. The thin film transistors 89a and 89b are:
The source or drain electrode layer 83b is electrically connected to the conductive buffer layer 84b.

The buffer layer 84a, the buffer layer 84b, and the buffer layer 84c have conductivity and are formed from a layer containing an organic compound and an inorganic compound. By the buffer layer 84a and the buffer layer 84b, the contact resistance between the source or drain electrode layer 83a and the semiconductor layer 85a, the source or drain electrode layer 83b, and the semiconductor layer 85a is reduced, and the electrical connection is improved. can do. Similarly, the contact resistance between the source or drain electrode layer 83b and the semiconductor layer 85b, and the source or drain electrode layer 83c and the semiconductor layer 85b is reduced by the buffer layer 84b and the buffer layer 84c, so that the electrical connection is established. Can be good.
Therefore, electrical connection between the thin film transistor 89a and the thin film transistor 89b is also improved.

In this embodiment mode, the thin film transistor 89a and the thin film transistor 89b are examples of a thin film transistor having the same conductivity type (having an n type or a p type). One is an n type channel thin film transistor and the other is a p type channel. A CMOS structure can also be formed by electrically connecting the thin film transistors.

The thin film transistor illustrated in FIG. 2A uses the buffer layer 84a, the buffer layer 84b, and the buffer layer 84c which are formed using the same material and have the same properties as in the thin film transistor illustrated in FIG. Yes. The source or drain electrode layer 83b and the buffer layer 8 connect the thin film transistor 89a and the thin film transistor 89b.
Since 4b is processed into the same shape with the same mask, it has a laminated structure. Of course, the source electrode layer or the drain electrode layer and the buffer layer may be processed separately. Alternatively, a conductive layer, an insulating layer, or the like may be selectively formed using a droplet discharge method or the like without performing etching. An example in which a thin film transistor is formed by a droplet discharge method is shown in FIG.

As shown in FIG. 2B, a gate electrode layer 91a and a gate electrode layer 91 are formed over a substrate 90.
a gate insulating layer 92 over the gate electrode layer 91a and the gate electrode layer 91b, a semiconductor layer 95a that is an oxide semiconductor layer over the gate insulating layer 92 that overlaps with the gate electrode layer 91a, and a gate that overlaps with the gate electrode layer 91b A semiconductor layer 95 b that is an oxide semiconductor layer is formed over the insulating layer 92. A source / drain electrode layer 93a and a source / drain electrode layer 93b are formed on the semiconductor layer 95a, and a source / drain electrode layer 93b and a source / drain electrode layer 93c are formed on the semiconductor layer 95b. Yes. A buffer layer 94b is provided between the source or drain electrode layer 93a and the semiconductor layer 95a, and a buffer layer 94b is provided between the source or drain electrode layer 93b and the semiconductor layer 95a. Similarly, a buffer layer 97a is provided between the source or drain electrode layer 93b and the semiconductor layer 95b, and a buffer layer 97b is provided between the source or drain electrode layer 93c and the semiconductor layer 95b. The thin film transistor 99a and the thin film transistor 99b are:
The source electrode layer or the drain electrode layer 93b is electrically connected.

The buffer layer 94a, the buffer layer 94b, the buffer layer 97a, and the buffer layer 97b are:
It has conductivity and is formed from a layer containing an organic compound and an inorganic compound. By the buffer layer 94a and the buffer layer 94b, the source or drain electrode layer 93a and the semiconductor layer 8 are formed.
The contact resistance between 5a, the source or drain electrode layer 93b, and the semiconductor layer 95a is reduced, and electrical connection can be improved. Similarly, the buffer layer 97a and the buffer layer 97
By b, the contact resistance between the source or drain electrode layer 93b and the semiconductor layer 95b, and the source or drain electrode layer 93c and the semiconductor layer 95b is reduced, and electrical connection can be improved. Accordingly, electrical connection between the thin film transistor 99a and the thin film transistor 99b is also improved.

In this embodiment, FIG. 2B illustrates an example of a thin film transistor in which the thin film transistor 99a and the thin film transistor 99b have different conductivity types (having n-type or p-type). In FIG. 2B, a thin film transistor 99a is an n-channel thin film transistor, and a thin film transistor 99b is a p-channel thin film transistor, which is electrically connected to form a CMOS structure.

The thin film transistor illustrated in FIG. 2B is a thin film transistor having different conductivity types, and the buffer layer used is an example in which the thin film transistor 99a and the thin film transistor 99b are formed using different materials having different properties. Therefore, the buffer layer 94a and the buffer layer 94b and the buffer layer 97a and the buffer layer 97b are formed to include different materials. In this manner, the material and the formation method included in the buffer layer, which is a layer containing an organic compound and an inorganic compound, can be set as appropriate depending on the conductivity type of the thin film transistor and the required characteristics.

In FIG. 2B of this embodiment mode, a droplet discharge method is used for manufacturing a thin film transistor. When forming a film (insulating film, conductive film, or the like) using a droplet discharge method, a composition containing a film material processed into particles is discharged, and is fused and fused and solidified by firing. A film is formed. In such a film formed by discharging and baking a composition containing a conductive material, a film formed by sputtering or the like often shows a columnar structure,
Often exhibits a polycrystalline state with many grain boundaries. In addition, since it adheres to the formation region in a liquid state having fluidity, the shape of the liquid state may be reflected and the surface may have a gentle curvature.

The droplet discharge means used in the droplet discharge method is a general term for a device having means for discharging droplets such as a nozzle having a composition discharge port and a head having one or a plurality of nozzles. The diameter of the nozzle provided in the droplet discharge means is set to 0.02 to 100 μm (preferably 30 μm or less), and the discharge amount of the composition discharged from the nozzle is 0.001 pl to 100 pl (preferably 0). .1pl or more and 40pl or less, more preferably 10pl or less). The discharge amount increases in proportion to the size of the nozzle diameter. In addition, the distance between the object to be processed and the nozzle outlet is preferably as close as possible in order to drop it at a desired location, preferably 0.1 to
It is set to about 3 mm (preferably 1 mm or less).

A composition in which a conductive material is dissolved or dispersed in a solvent is used as the composition discharged from the discharge port.
The conductive material corresponds to fine particles or dispersible nanoparticles of metals such as Ag, Au, Cu, Ni, Pt, Pd, Ir, Rh, W, and Al, and includes metal sulfides of Cd and Zn, Fe, Ti , Si, G
e, Si, Zr, Ba and other oxides, silver halide fine particles or dispersible nanoparticles may also be mixed. The conductive material may also be used as a mixture. As the transparent conductive film, indium tin oxide (ITO), indium tin oxide containing silicon oxide (ITSO), organic indium, organic tin, zinc oxide, titanium nitride, or the like can be used. Zinc oxide (Zn
O) indium zinc oxide (IZO), zinc oxide (ZnO)
), ZnO doped with gallium (Ga), tin oxide (SnO ₂ ), indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, indium containing titanium oxide Tin oxide or the like may also be used.
However, it is preferable to use a composition in which any of gold, silver and copper is dissolved or dispersed in a solvent in consideration of the specific resistance value, more preferably the composition discharged from the discharge port. It is preferable to use low resistance silver or copper. However, when silver or copper is used, a barrier film may be provided as a countermeasure against impurities. As the barrier film, a silicon nitride film or nickel boron (NiB) can be used.

The composition to be discharged is obtained by dissolving or dispersing a conductive material in a solvent, but additionally contains a dispersant and a thermosetting resin called a binder. Especially for binders
It has the function of preventing cracks and uneven baking during firing. Thus, the formed conductive layer may contain an organic material. The organic material contained varies depending on the heating temperature, atmosphere, and time. This organic material is a metal particle binder, a solvent, a dispersant, an organic resin that functions as a coating agent, etc., and typically, polyimide, acrylic, novolac resin, melamine resin, phenol resin, epoxy resin, silicon resin , Furan resin, diallyl phthalate resin and the like.

Alternatively, particles in which a conductive material is coated with another conductive material to form a plurality of layers may be used. For example, particles having a three-layer structure in which nickel boron (NiB) is coated around copper and silver is coated around it may be used. As the solvent, esters such as butyl acetate and ethyl acetate, alcohols such as isopropyl alcohol and ethyl alcohol, organic solvents such as methyl ethyl ketone and acetone, and water are used. The viscosity of the composition is preferably 20 mPa · s (cp) or less, in order to prevent the drying from occurring or to smoothly discharge the composition from the discharge port. The surface tension of the composition is preferably 40 mN / m or less. However, the viscosity and the like of the composition may be appropriately adjusted according to the solvent to be used and the application. As an example, the viscosity of a composition in which ITO, organic indium, or organic tin is dissolved or dispersed in a solvent is 5 to 20 mPa · s, the viscosity of a composition in which silver is dissolved or dispersed in a solvent is 5 to 20 mPa · s, The viscosity of the composition in which gold is dissolved or dispersed in a solvent is preferably set to 5 to 20 mPa · s.

The conductive layer may be a stack of a plurality of conductive materials. Alternatively, first, silver may be used as a conductive material, and a conductive layer may be formed by a droplet discharge method, followed by plating with copper or the like. Plating may be performed by electroplating or chemical (electroless) plating. For plating, the substrate surface may be immersed in a container filled with a solution having a plating material, but the substrate is placed at an angle (or vertically) so that the solution having the material to be plated flows on the substrate surface. It may be applied. When plating is performed so that the solution is applied while standing the substrate, there is an advantage that the process apparatus is reduced in size.

Although depending on the diameter of each nozzle and the desired pattern shape, the diameter of the conductor particles is preferably as small as possible for preventing nozzle clogging and producing a high-definition pattern. A particle size of 1 μm or less is preferred. The composition is formed by a method such as an electrolytic method, an atomizing method, or a wet reduction method, and its particle size is generally about 0.01 to 10 μm.
m. However, when formed in a gas evaporation method, the nanomolecules protected with the dispersant are as fine as about 7 nm. When the surface of each particle is covered with a coating agent, the nanoparticles are aggregated in the solvent. And stably disperse at room temperature and shows almost the same behavior as liquid. Therefore, it is preferable to use a coating agent.

The step of discharging the composition may be performed under reduced pressure. It is preferable to perform under reduced pressure because an oxide film or the like is not formed on the surface of the conductive layer. After discharging the composition, one or both steps of drying and baking are performed. The drying and firing steps are both heat treatment steps. For example, drying is performed at 100 degrees for 3 minutes, and firing is performed at 200 to 350 degrees for 15 minutes to 60 minutes. Time is different. The drying process and the firing process are performed under normal pressure or reduced pressure by laser light irradiation, rapid thermal annealing, a heating furnace, or the like. In addition, the timing which performs this heat processing is not specifically limited. In order to perform the drying and firing steps satisfactorily, the substrate may be heated, and the temperature at that time depends on the material such as the substrate, but is generally 100 to
It is set to 800 degrees (preferably 200 to 350 degrees). By this step, the solvent in the composition is volatilized or the dispersant is chemically removed, and the surrounding resin is cured and contracted to bring the nanoparticles into contact with each other, thereby accelerating fusion and fusion.

For the laser light irradiation, a continuous wave or pulsed gas laser or solid-state laser may be used. Examples of the former gas laser include an excimer laser and a YAG laser, and examples of the latter solid-state laser include a laser using a crystal such as YAG, YVO ₄ or GdVO ₄ doped with Cr, Nd, or the like. . Note that it is preferable to use a continuous wave laser because of the absorption rate of the laser light. Further, a laser irradiation method combining pulse oscillation and continuous oscillation may be used. However, depending on the heat resistance of the substrate 100, the heat treatment by laser light irradiation may be performed instantaneously within a few microseconds to several tens of seconds so as not to destroy the substrate 100. Instantaneous thermal annealing (RTA) uses an infrared lamp or a halogen lamp that irradiates ultraviolet light or infrared light in an inert gas atmosphere, and rapidly raises the temperature for several minutes to several microseconds. This is done by applying heat instantaneously. Since this treatment is performed instantaneously, only the outermost thin film can be heated substantially without affecting the lower layer film. That is, it does not affect a substrate having low heat resistance such as a plastic substrate.

Further, after a liquid composition is discharged by a droplet discharge method to form an object to be formed, the surface may be flattened by pressing with pressure in order to improve the flatness. As a pressing method, unevenness may be reduced by scanning a roller-like object on the surface, or the surface may be pressed vertically with a flat plate-like object. A heating step may be performed when pressing. Alternatively, the surface may be softened or melted with a solvent or the like, and the surface irregularities may be removed with an air knife. Further, polishing may be performed using a CMP method. This step can be applied when the surface is flattened when unevenness is generated by the droplet discharge method.

The film formation method by the droplet discharge method has been described using the conductive layer as an example.
The conditions such as baking, the solvent, and the like can be applied to the insulating layer formed in this embodiment mode. By combining the droplet discharge method, the cost can be reduced as compared with the entire surface coating formation by a spin coating method or the like.

The thin film transistor 99a and the thin film transistor 99b each include a channel protective layer 96.
a, a channel protection type inverted staggered thin film transistor having a channel protection layer 96b.
The semiconductor layer 9 which is an oxide semiconductor layer by the channel protective layer 96a and the channel protective layer 96b
Since the semiconductor layer 95b is protected, damage to the surface due to other processes can be prevented. In FIG. 2B of this embodiment mode, a source or drain electrode layer 93a, a source or drain electrode layer 93b, and a source or drain electrode layer 93c are selectively formed using a droplet discharge method. However, in the case where processing by etching is performed at the time of formation in order to shape the film into a desired shape, the channel protective layer particularly has an effect of protecting the semiconductor layer. With such a structure, the semiconductor layer 95a which is an oxide semiconductor layer and the semiconductor layer 95b which is an oxide semiconductor layer are easily etched, and the channel portion of the semiconductor layer is protected even if resistance to an etchant or an etching gas is weak. Therefore, a highly reliable thin film transistor can be manufactured.

As the channel protective layer 96a and the channel protective layer 96b, an inorganic material (silicon oxide, silicon nitride, silicon oxynitride, silicon nitride oxide, or the like), a photosensitive or non-photosensitive organic material (organic resin material) (polyimide, acrylic, Polyamide, polyimide amide, resist, benzocyclobutene, or the like) or a laminate of these films can be used. A siloxane resin may also be used. The siloxane resin is S
It corresponds to a resin containing i-O-Si bond. Siloxane is composed of silicon (Si) and oxygen (O).
And a skeleton structure is formed by the bond. As a substituent, an organic group containing at least hydrogen (for example, an alkyl group or an aromatic hydrocarbon) is used. A fluoro group may be used as a substituent. Alternatively, an organic group containing at least hydrogen and a fluoro group may be used as a substituent.
As a manufacturing method, a vapor phase growth method such as a plasma CVD method or a thermal CVD method, a sputtering method,
An evaporation method can be used. Further, a droplet discharge method or a printing method (screen printing, offset printing, letterpress printing, gravure (intaglio printing), or the like) can also be used. A coating film obtained by a coating method can also be used.

In this embodiment, conductivity between the semiconductor layer, the source electrode layer, and the drain electrode layer is improved by the buffer layer interposed between the semiconductor layer using the oxide semiconductor material and the source electrode layer and the drain electrode layer. Electrically good connection can be made. Accordingly, the electrical characteristics of the thin film transistor are improved, and a high-performance semiconductor device or display device can be manufactured.

Compared with other semiconductor materials such as silicon and organic semiconductor materials, a compound semiconductor such as an oxide semiconductor is less expensive and does not complicate the manufacturing process, so that a semiconductor device can be manufactured at low cost. . In addition, since a transparent semiconductor material such as an oxide semiconductor has little absorption of visible light, a thin film transistor with excellent light resistance in which unnecessary photoexcited carriers are not generated even when light enters the channel portion of the semiconductor layer. Can do. Therefore, a high-performance and high-reliability semiconductor device or display device that can operate at high speed can be manufactured.

(Embodiment 3)
Embodiment modes of the present invention will be described with reference to FIGS. This embodiment is an example of a top-gate thin film transistor using the present invention. Therefore, repetitive description of the same portion as in Embodiment 1 or a portion having a similar function is omitted.

In this embodiment, an oxide semiconductor material is used for the semiconductor layer, and a conductive buffer layer is formed between the semiconductor layer and the source and drain electrode layers. The buffer layer is formed as a layer containing an organic compound and an inorganic compound. The buffer layer interposed between the semiconductor layer using the oxide semiconductor material and the source electrode layer and the drain electrode layer improves conductivity between the semiconductor layer, the source electrode layer, and the drain electrode layer. Connection can be made. A material and a manufacturing method of the gate electrode layer, the semiconductor layer containing an oxide semiconductor material, the source electrode layer, the drain electrode layer, and the like can be performed using the same materials as in Embodiment Mode 1.

FIG. 3A illustrates a planar thin film transistor having a top gate structure. A semiconductor layer 405 that is an oxide semiconductor is formed over a substrate 400 provided with an insulating layer 407 as a base film, and a channel protective layer 406 that covers a channel formation region of the semiconductor layer 405 is formed. Over the source and drain regions of the semiconductor layer 405 that is an oxide semiconductor, a source or drain electrode layer 403a and a source or drain electrode layer 403b are formed. A buffer layer 404 a is provided between the source or drain electrode layer 403 a and the semiconductor layer 405, and the source or drain electrode layer 403 b and the semiconductor layer 40 are provided.
5 is provided with a buffer layer 404b.

Semiconductor layer 405, channel protective layer 406, buffer layer 404a, buffer layer 404b
, Source or drain electrode layer 403a, and source or drain electrode layer 40
A gate insulating layer 402 is provided over 3b, and a gate electrode layer 401 is formed over the gate insulating layer 402 that overlaps with the channel formation region of the semiconductor layer 405.

The buffer layer 404a and the buffer layer 404b have conductivity and are formed from a layer containing an organic compound and an inorganic compound. The buffer layer 404a and the buffer layer 404b reduce contact resistance between the source or drain electrode layer 403a and the semiconductor layer 405, and between the source or drain electrode layer 403b and the semiconductor layer 405, so that electrical connection is favorable. can do.

The thin film transistor illustrated in FIG. 3A is a channel protective thin film transistor including a channel protective layer 406. Since the channel formation region of the semiconductor layer 405 that is an oxide semiconductor layer is covered with the channel protective layer 406, surface damage due to other steps can be prevented. Therefore, in the etching step performed for processing the source or drain electrode layer 403a and the source or drain electrode layer 403b into a desired shape, the channel protective layer particularly has an effect of protecting the semiconductor layer. With such a structure, the semiconductor layer 405 that is an oxide semiconductor layer is easily etched, and the channel portion of the semiconductor layer is protected and is not etched even if resistance to an etchant or an etching gas is weak. A thin film transistor with reliability can be manufactured.

Needless to say, by applying the present invention, a so-called channel-etched thin film transistor in which a channel protective layer is not formed can be manufactured. In the case where the etching selectivity between the semiconductor layer which is an oxide semiconductor layer and the source electrode layer and the drain electrode layer is high, the droplet discharge method or the printing method for selectively forming the electrode layer without performing the etching process, etc. Suitable when using The channel etch type has advantages such as cost reduction and productivity improvement because the process is simplified.

FIG. 3B illustrates a forward staggered thin film transistor. A source or drain electrode layer 413a and a source or drain electrode layer 413b are formed over a substrate 410 provided with an insulating film 417 as a base film, and a semiconductor layer 415 which is an oxide semiconductor layer is formed. . A buffer layer 414 a is provided between the source or drain electrode layer 413 a and the semiconductor layer 415, and the source or drain electrode layer 413 b and the semiconductor layer 415 are provided.
A buffer layer 414b is provided in between.

The semiconductor layer 415, the buffer layer 414a, the buffer layer 414b, the source or drain electrode layer 413a, and the gate insulating layer 4 over the source or drain electrode layer 413b
12, and the gate electrode layer 411 is formed over the gate insulating layer 412 which overlaps with the channel formation region of the semiconductor layer 415.

The buffer layer 414a and the buffer layer 414b have conductivity and are formed from a layer containing an organic compound and an inorganic compound. The buffer layer 414a and the buffer layer 414b reduce the contact resistance between the source or drain electrode layer 413a and the semiconductor layer 415, and between the source or drain electrode layer 413b and the semiconductor layer 415, so that electrical connection is improved. can do.

3A and 3B includes a buffer layer 404a and a buffer layer 404b.
The same material is used for the buffer layer 414a and the buffer layer 414b, and both the source region and the drain region are the same material and the same structure. In this way, buffer layers made of the same material may be used on the source side and the drain side, or buffer layers made of different materials (buffer layers having different properties) may be used. Alternatively, a structure in which only one of the buffer layer and the drain side is provided may be employed.

The buffer layer allows the electrical characteristics of the thin film transistor to be controlled more precisely, increasing the degree of freedom in electrical design of the semiconductor device, and providing high-performance, high-performance, and more useful characteristics. A semiconductor device can be manufactured.

Alternatively, a semiconductor layer having one conductivity type may be provided between the buffer layer and the source and drain electrode layers. Depending on the conductivity of the semiconductor layer having one conductivity type and the buffer layer, a semiconductor layer having one conductivity type may be formed between the buffer layer and the semiconductor layer.

Further, as the semiconductor layer, a semiconductor layer using an organic semiconductor layer in addition to a compound semiconductor layer such as an oxide semiconductor layer may be formed, and the semiconductor layer may have a stacked structure. For example, an organic semiconductor layer using an organic semiconductor material may be provided between a buffer layer that is a layer containing an organic compound and an inorganic compound and an oxide semiconductor layer. When an organic semiconductor layer with good adhesion is provided between the oxide semiconductor layer and the buffer layer, the oxide semiconductor layer and the buffer layer are stably stacked, and the reliability of the semiconductor device can be further improved.

In this embodiment, conductivity between the semiconductor layer, the source electrode layer, and the drain electrode layer is improved by the buffer layer interposed between the semiconductor layer using the oxide semiconductor material and the source electrode layer and the drain electrode layer. Electrically good connection can be made. Accordingly, the electrical characteristics of the thin film transistor are improved, and a high-performance semiconductor device or display device can be manufactured.

Compared with other semiconductor materials such as silicon and organic semiconductor materials, a compound semiconductor such as an oxide semiconductor is less expensive and does not complicate the manufacturing process, so that a semiconductor device can be manufactured at low cost. . In addition, since a transparent semiconductor material such as an oxide semiconductor has little absorption of visible light, a thin film transistor with excellent light resistance in which unnecessary photoexcited carriers are not generated even when light enters the channel portion of the semiconductor layer. Can do. Therefore, a high-performance and high-reliability semiconductor device or display device that can operate at high speed can be manufactured.

(Embodiment 4)
FIG. 17A is a top view illustrating a structure of a display panel according to the present invention. A pixel portion 2701 in which pixels 2702 are arranged in a matrix over a substrate 2700 having an insulating surface, a scanning line side input terminal 2703, a signal A line side input terminal 2704 is formed. The number of pixels may be provided in accordance with various standards, and is 1024 × 7 for a full color display using XGA and RGB.
1600 if it is 68 × 3 (RGB), UXGA and full color display using RGB
For full-color display using RGB, which corresponds to × 1200 × 3 (RGB) and full spec high vision, 1920 × 1080 × 3 (RGB) may be used.

The pixels 2702 are arranged in a matrix by a scan line extending from the scan line side input terminal 2703 and a signal line extending from the signal line side input terminal 2704 intersecting. Pixel 27
Each of 02 includes a switching element and a pixel electrode connected thereto. A typical example of the switching element is a TFT. By connecting the gate electrode side of the TFT to a scanning line and the source or drain side to a signal line, each pixel can be controlled independently by a signal input from the outside. Yes.

FIG. 17A shows the structure of a display panel in which signals input to the scanning lines and signal lines are controlled by an external driver circuit. As shown in FIG. 18A, as shown in FIG. Gla
The driver IC 2751 may be mounted on the substrate 2700 by the ss method. As another mounting form, a TAB (Tape Automated Bonn) as shown in FIG.
ding) method may be used. The driver IC may be formed on a single crystal semiconductor substrate or may be a circuit in which a TFT is formed on a glass substrate. In FIG.
The driver IC 2751 is connected to the FPC 2750.

In the case where a TFT provided for a pixel is formed using a polycrystalline (microcrystalline) semiconductor with high crystallinity, a scan line driver circuit 3702 may be formed over the substrate 3700 as illustrated in FIG. it can. In FIG. 18B, reference numeral 3701 denotes a pixel portion, and a signal line side driver circuit is
Control is performed by an external drive circuit as in FIG. In the case where a TFT provided for a pixel is formed using a polycrystalline (microcrystalline) semiconductor, a single crystal semiconductor, or the like with high mobility like the TFT formed in the present invention, FIG. 17C shows a scan line driver circuit 4702. And a signal line driver circuit 4704.
Can be integrally formed on the substrate 4700.

This embodiment will be described with reference to FIGS. In more detail, a method for manufacturing a display device having a coplanar thin film transistor with a bottom gate structure to which the present invention is applied will be described. 4A to 6A are top views of a display device pixel portion, and FIG. 4B to FIG. 6B are cross-sectional views taken along line A-C in FIG. 4A to FIG. C) Line B-
FIG. 7 is a cross-sectional view of the display device, and FIG. 8A is a top view. FIG. 8B is a cross-sectional view taken along line LB (including line I-J) in FIG.

As the substrate 100, a glass substrate made of barium borosilicate glass, alumino borosilicate glass, or the like, a quartz substrate, a metal substrate, or a plastic substrate having heat resistance that can withstand the processing temperature in this manufacturing process is used. Further, CMP is performed so that the surface of the substrate 100 is planarized.
Polishing may be performed by a method or the like.

Note that an insulating layer serving as a base film may be formed over the substrate 100 as in the insulating layers 407 and 408 described in Embodiment 3. The insulating layer is formed as a single layer or a stacked layer using an oxide material or a nitride material containing silicon by a method such as a CVD method, a plasma CVD method, a sputtering method, or a spin coating method. Or acrylic acid, methacrylic acid and derivatives thereof, polyimide, aromatic polyamide, polybenzimidazole (polybenzim
Heat-resistant polymers such as idazole) or siloxane resins may be used. Moreover, resin materials such as vinyl resins such as polyvinyl alcohol and polyvinyl butyral, epoxy resins, phenol resins, novolac resins, acrylic resins, melamine resins, and urethane resins may be used. Alternatively, an organic material such as benzocyclobutene, parylene, or polyimide, or a composition material containing a water-soluble homopolymer and a water-soluble copolymer may be used. In addition, the droplet discharge method and the printing method (
Screen printing, offset printing, relief printing, gravure (intaglio printing, etc.), coating methods such as spin coating, and dipping methods can also be used. This insulating layer may not be formed, but has an effect of blocking contaminants from the substrate 100.

A gate electrode layer 103 and a gate electrode layer 104 are formed over the substrate 100. The gate electrode layer 103 and the gate electrode layer 104 can be formed by a CVD method, a sputtering method, a droplet discharge method, or the like. The gate electrode layer 103 and the gate electrode layer 104 are made of Ag, Au, N
An element selected from i, Pt, Pd, Ir, Rh, Ta, W, Ti, Mo, Al, and Cu, or an alloy material or compound material containing the element as a main component may be used. Further, a semiconductor film typified by a polycrystalline silicon film doped with an impurity element such as phosphorus, or AgPdCu
An alloy may be used. Alternatively, a single layer structure or a multi-layer structure may be used, for example, a two-layer structure of a tungsten nitride film and a molybdenum film, a tungsten film with a thickness of 50 nm, an alloy of aluminum and silicon (Al- A three-layer structure in which a Si) film and a titanium nitride film with a thickness of 30 nm are sequentially stacked may be employed. In the case of a three-layer structure, tungsten nitride may be used instead of tungsten of the first conductive film, or aluminum instead of the aluminum and silicon alloy (Al-Si) film of the second conductive film. A titanium alloy film (Al—Ti) may be used, or a titanium film may be used instead of the titanium nitride film of the third conductive film.

A light-transmitting material having a property of transmitting visible light can be used for the gate electrode layer 103 and the gate electrode layer 104. As the light-transmitting conductive material, indium tin oxide (ITO
), Indium tin oxide containing silicon oxide (ITSO), organic indium, organic tin, zinc oxide, or the like can be used. Indium zinc oxide containing zinc oxide (ZnO) (
IZO (indium zinc oxide), zinc oxide (ZnO), ZnO doped with gallium (Ga), tin oxide (SnO ₂ ), indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, oxidation Indium oxide containing titanium, indium tin oxide containing titanium oxide, or the like may also be used.

In the case where etching is required to form the gate electrode layer 103 and the gate electrode layer 104, a mask may be formed and processed by dry etching or dry etching. Using an ICP (Inductively Coupled Plasma) etching method, the etching conditions (the amount of power applied to the coil-type electrode, the amount of power applied to the electrode on the substrate side, the electrode temperature on the substrate side, etc.) are appropriately set. By adjusting, the electrode layer can be etched into a tapered shape. As an etching gas, a chlorine-based gas typified by Cl ₂ , BCl ₃ , SiCl _4, CCl _4, etc., a fluorine-based gas typified by CF ₄ , SF _6, NF _3, etc., or O ₂ is appropriately used. be able to.

The mask can be formed by selectively discharging a composition. When the mask is selectively formed in this way, there is an effect that the process of processing the shape of the mask is simplified. For the mask, a resin material such as an epoxy resin, an acrylic resin, a phenol resin, a novolac resin, a melamine resin, or a urethane resin is used. Also, organic materials such as benzocyclobutene, parylene, flare, permeable polyimide, compound materials made by polymerization of siloxane polymers, composition materials containing water-soluble homopolymers and water-soluble copolymers, etc. are used. And formed by a droplet discharge method.
Alternatively, a commercially available resist material containing a photosensitizer may be used. For example, a novolak resin that is a typical positive resist and a naphthoquinonediazide compound that is a photosensitizer, a base resin that is a negative resist, diphenylsilanediol, and An acid generator or the like may be used. Whichever material is used, the surface tension and viscosity are appropriately adjusted by adjusting the concentration of the solvent or adding a surfactant or the like.

In this embodiment mode, when the mask is formed by a droplet discharge method, a process for controlling wettability of a formation region and its vicinity may be performed as a pretreatment. In the present invention, when a conductive layer or an insulating layer is formed by discharging droplets by a droplet discharge method, the conductive layer or the formation region of the insulating layer and the wettability around the conductive layer are controlled, Alternatively, the shape of the insulating layer can be controlled. By this treatment, the conductive layer or the insulating layer can be formed with high controllability. The wettability may be controlled in accordance with the shape of the conductive layer or insulating layer to be formed, and may be uniform wettability, or a plurality of regions having different wettability may be formed in the formation region by providing high and low wettability. It may be formed. This step can be applied as a pretreatment for forming any conductive layer or insulating layer when a liquid material is used.

The film formed in this specification may be a very thin film depending on the formation conditions, and may not have a form as a film, such as a discontinuous island structure.

Next, the gate insulating layer 105 is formed over the gate electrode layer 103 and the gate electrode layer 104. As the gate insulating layer 105, a material such as a silicon oxide material or a nitride material, yttrium oxide (Y ₂ O ₃ ), aluminum oxide (Al ₂ O ₃ ), titanium oxide (TiO ₂ ), a stacked layer thereof, or the like is used. It can be formed by using a laminated layer or a single layer. In this embodiment, a silicon oxide film containing nitrogen is formed to a thickness of 115 nm by a CVD method. Alternatively, a silicon oxide film containing nitrogen, a silicon nitride film containing oxygen, a silicon nitride film, a single layer of a silicon oxide film, or a stacked layer thereof may be used. Note that a rare gas element such as argon may be included in the reaction gas and mixed into the formed insulating layer.

In addition, after forming a substrate, an insulating layer, a semiconductor layer, a gate insulating layer, an interlayer insulating layer, other display devices, an insulating layer constituting a semiconductor device, a conductive layer, etc., oxidation or nitridation is performed using plasma treatment. The surface of the substrate, insulating layer, semiconductor layer, gate insulating layer, or interlayer insulating layer may be oxidized or nitrided. When a semiconductor layer or an insulating layer is oxidized or nitrided using plasma treatment, the surface of the semiconductor layer or the insulating layer is modified, so that the insulating layer becomes denser than an insulating layer formed by a CVD method or a sputtering method. be able to. Therefore, defects such as pinholes can be suppressed and the characteristics of the semiconductor device can be improved. In addition, the plasma treatment as described above can be performed on a conductive layer such as a gate electrode layer, a source wiring layer, and a drain wiring layer. Or it can be oxidized.

Further, the plasma treatment is performed in an atmosphere of the gas at an electron density of 1 × 10 ¹¹ cm ⁻³ or more and an electron temperature of plasma of 1.5 eV or less. More specifically, the electron density is 1 × 10 ¹¹ cm ⁻³ or more and 1 × 10 ¹³ cm ⁻³ or less, and the plasma electron temperature is 0.5 eV or more and 1
. Perform at 5 eV or less. Since the electron density of the plasma is high and the electron temperature in the vicinity of the object to be processed formed on the substrate is low, damage to the object to be processed by the plasma can be prevented. Further, since the electron density of plasma is as high as 1 × 10 ¹¹ cm ⁻³ or more, an oxide film or a nitride film formed by oxidizing or nitriding an irradiation object using plasma treatment is a CVD method. Compared with a film formed by sputtering or the like, a film having excellent uniformity in film thickness and the like and a dense film can be formed. In addition, since the electron temperature of plasma is as low as 1.5 eV or less, oxidation or nitridation can be performed at a lower temperature than conventional plasma treatment or thermal oxidation. For example, even if the plasma treatment is performed at a temperature lower by 100 degrees or more than the strain point of the glass substrate, the oxidation or nitridation treatment can be sufficiently performed. Note that a high frequency such as a microwave (2.45 GHz) can be used as a frequency for forming plasma. In addition,
Unless otherwise specified, the plasma treatment is performed using the above conditions.

A mask made of an insulating material such as resist or polyimide is formed using a droplet discharge method, and an opening 125 is formed in part of the gate insulating layer 105 by etching using the mask, and the mask is disposed on the lower layer side. A part of the gate electrode layer 104 is exposed. The etching process may be either plasma etching (dry etching) or wet etching, but plasma etching is suitable for processing a large area substrate. As an etching gas, a fluorine-based gas such as CF ₄ or NF ₃ or a chlorine-based gas such as Cl ₂ or BCl ₃ may be used, and an inert gas such as He or Ar may be added as appropriate. Further, if an atmospheric pressure discharge etching process is applied, a local electric discharge process is possible, and it is not necessary to form a mask layer on the entire surface of the substrate.

A mask used for etching for forming the opening 125 can also be formed by selectively discharging a composition. Such selective mask formation has the effect of simplifying the opening formation process. For the mask, a resin material such as an epoxy resin, a phenol resin, a novolac resin, an acrylic resin, a melamine resin, or a urethane resin is used. In addition, droplets using organic materials such as benzocyclobutene, parylene, permeable polyimide, compound materials made by polymerization of siloxane polymers, composition materials containing water-soluble homopolymers and water-soluble copolymers, etc. It is formed by a discharge method. Alternatively, a commercially available resist material containing a photosensitizer may be used. For example, a novolak resin that is a typical positive resist and a naphthoquinonediazide compound that is a photosensitizer, a base resin that is a negative resist, diphenylsilanediol, and An acid generator or the like may be used. Whichever material is used, the surface tension and viscosity are appropriately adjusted by adjusting the concentration of the solvent or adding a surfactant or the like.

A source or drain electrode layer 111, a source or drain electrode layer 112, a source or drain electrode layer 113, and a source or drain electrode layer 114 are formed over the gate insulating layer 105 (see FIG. 4). ). Source electrode layer or drain electrode layer 111
Is formed in contact with and electrically connected to the gate electrode layer 104 in the opening 125 formed in the gate insulating layer 105. The source or drain electrode layer 113 also functions as a power supply line (see FIG. 4). A source or drain electrode layer 113, a gate insulating layer 105,
A capacitor is also formed in the stacked region of the gate electrode layer 104.

A source or drain electrode layer 111, a source or drain electrode layer 112,
The source or drain electrode layer 113 and the source or drain electrode layer 114 are formed of P
A conductive film can be formed by VD, CVD, vapor deposition, or the like, and then etched into a desired shape. Further, the source electrode layer or the drain electrode layer can be selectively formed at a predetermined place by a printing method, an electroplating method, or the like. Further, a reflow method or a damascene method may be used. The material of the source electrode layer or drain electrode layer is Ag, Au, Cu, Ni, P
t, Pd, Ir, Rh, W, Al, Ta, Mo, Cd, Zn, Fe, Ti, Si, Ge,
A metal such as Zr or Ba, an alloy thereof, or a metal nitride thereof may be used. A light-transmitting material can also be used.

Further, in the case of a light-transmitting conductive material, indium tin oxide (ITO), indium tin oxide containing silicon oxide (ITSO), and indium zinc oxide containing zinc oxide (ZnO) (I
ZO (indium zinc oxide), zinc oxide (ZnO), ZnO doped with gallium (Ga), tin oxide (SnO ₂ ), indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, oxidation Indium oxide containing titanium, indium tin oxide containing titanium oxide, or the like can be used.

Next, the buffer layer 109a is formed over the source or drain electrode layer 111, the buffer layer 109b is formed over the source or drain electrode layer 112, the buffer layer 110b over the source or drain electrode layer 113, A buffer layer 110 a is formed on each drain electrode layer 114.

Buffer layer 109a, buffer layer 109b, buffer layer 110a and buffer layer 11
0b has conductivity and is formed of a layer containing an organic compound and an inorganic compound (see FIG. 5).

The buffer layer containing an organic compound and an inorganic compound is formed by an electron beam evaporation method, a vapor deposition method such as co-evaporation, a sputtering method, a CVD method, a coating method such as a spin coating method using a mixed solution, or a sol-gel method. Can be used. The buffer layer can be formed by depositing each material at the same time, co-evaporation method by resistance heating deposition, co-evaporation method by electron beam deposition, co-evaporation method by resistance heating deposition and electron beam deposition, resistance It can be formed by combining the same or different methods such as film formation by heating vapor deposition and sputtering and film formation by electron beam vapor deposition and sputtering. In addition, a droplet discharge (spout) method that can selectively discharge (spout) droplets of a composition prepared for a specific purpose to form a predetermined pattern (
Depending on the method, it is also called an inkjet method. ), A method by which an object can be transferred or drawn in a desired pattern, for example, various printing methods (a method in which a desired pattern such as screen (stencil) printing, offset (flat plate) printing, letterpress printing or gravure (intaglio printing) is formed) A dispenser method or the like can also be used. In addition, after forming either one (organic compound layer or inorganic compound layer) instead of forming at the same time, the other one (organic compound or inorganic compound) is introduced by an ion implantation method or a doping method, and the buffer layer May be formed.

In this embodiment, the buffer layer 109a, the buffer layer 109b, and the buffer layer 110a
The same material is used for the buffer layer 110b, and the source region and the drain region are examples of the same material and the same structure. In this way, buffer layers made of the same material may be used on the source side and the drain side, or buffer layers made of different materials (buffer layers having different properties) may be used. Alternatively, a structure in which only one of the buffer layer and the drain side is provided may be employed. In addition, the buffer layer used for each thin film transistor is formed of a different material,
For example, the buffer layer 109a and the buffer layer 109 may have different characteristics.
b is formed of a layer containing a first organic compound and an inorganic compound, and the buffer layer 110a and the buffer layer 110b are made of a second organic compound and an inorganic compound containing a material different from the layer containing the first organic compound and the inorganic compound. It is good also as a layer to contain.

The semiconductor layer 10 which is an oxide semiconductor layer over the buffer layer 109a and the buffer layer 109b
7 and the semiconductor layer 108 that is an oxide semiconductor layer is formed over the buffer layer 110a and the buffer layer 110b (see FIG. 6).

With the buffer layer 109a and the buffer layer 109b, the source or drain electrode layer 111 and the semiconductor layer 107, the source or drain electrode layer 112, and the semiconductor layer 1
The contact resistance with 07 is lowered, and the electrical connection can be improved. Similarly, the contact resistance between the source or drain electrode layer 114 and the semiconductor layer 108, the source or drain electrode layer 113, and the semiconductor layer 108 is reduced by the buffer layer 110a and the buffer layer 110b, so that electrical connection is achieved. Can be good.

Depending on the combination of the material used for the semiconductor layer and the material used for the source electrode layer and the drain electrode layer, electrical characteristics such as inability to conduct and high resistance may be deteriorated.
Therefore, the material used for the semiconductor layer and the material used for the source and drain electrode layers need to be selected as appropriate. In the present invention, since the source and drain electrode layers and the semiconductor layer which is an oxide semiconductor layer are stacked and electrically connected via the buffer layer, the above-described deterioration in electrical characteristics is prevented, and the material You can choose freely. Therefore, a semiconductor device that satisfies required characteristics (electric characteristics, characteristics related to reliability (a stacked state of materials (adhesion), etc.)) can be manufactured.

As described above, since the buffer layer can control the electrical characteristics of the thin film transistor more precisely, the degree of freedom in electrical design of the semiconductor device is increased, and the required functions are provided. A useful semiconductor device can be manufactured.

As a compound semiconductor that forms the semiconductor layer, for example, an oxide semiconductor can be given. Examples of the oxide semiconductor include zinc oxide (ZnO), magnesium zinc oxide (Mg _x Zn _1-x O), tin oxide (SnO ₂ ), indium oxide (In ₂ O ₃ ), and gallium oxide (Ga ₂ O ₃ ). And metal oxides. Alternatively, an oxide semiconductor including a plurality of the above oxide semiconductors may be used, and zinc oxide (ZnO), indium oxide (In ₂ O ₃ ), and gallium oxide (Ga ₂ O _3).
InGaO ₃ (ZnO) _m (m is an integer from 1 to less than 50, typically InGaO ₃ (ZnO) ₅ can also be used. A semiconductor material is an n-type semiconductor. Alternatively, it may be a p-type semiconductor, may be formed to contain other impurity elements (aluminum, gallium, etc.), a sputtering method using an oxide semiconductor containing an impurity element as a target, It can be formed by a CVD method, etc. In addition, an impurity element may be introduced (added by a doping method, an ion implantation method, or the like) so that the oxide semiconductor includes the impurity element. , A CVD method, a plasma CVD method, a sputtering method, etc., and can be formed as a single layer or a stacked layer, and a droplet discharge method or a printing method (screen printing, Offset printing, such as relief printing, or gravure (intaglio) printing), a coating method such as spin coating method, or the like can also be used dipping method.

An oxide semiconductor such as zinc oxide is transparent because it transmits visible light. A semiconductor layer using such a light-transmitting semiconductor material (transmitting light in the visible light region) absorbs less visible light, so unnecessary photoexcited carriers even when light enters the channel portion of the semiconductor layer. Thus, a highly reliable thin film transistor with excellent light resistance can be obtained. Note that a nitride semiconductor, a carbide semiconductor, or the like may be used as another compound semiconductor.

Compared with other semiconductor materials such as silicon and organic semiconductor materials, a compound semiconductor such as an oxide semiconductor is less expensive and does not complicate the manufacturing process, so that a semiconductor device can be manufactured at low cost. .

In addition, a semiconductor layer having one conductivity type (n-type or p-type) can be formed by including an impurity element in a semiconductor layer. As an impurity element added (formed to include) to the semiconductor layer, a group 13 element (boron (B)), gallium (Ga), indium (In), thallium (Tl)), a group 17 element (fluorine (F ), Chlorine (Cl), bromine (Br), iodine (I)), group 1 elements (lithium (Li), sodium (Na), potassium (K), rubidium (Rb), cesium (Cs)), group 15 Elements (nitrogen (N), phosphorus (P), arsenic (As), antimony (Sb), bismuth (Bi)) and the like can be used, and one or more of the above elements can be used.

The impurity element may be added to a part of the semiconductor layer or may be added to the entire semiconductor layer. The addition amount depends on the size, thickness, integration degree, required performance (electrical characteristics, etc.) of the thin film transistor element. The concentration may be set appropriately according to the above, and the concentration may be uniform over the semiconductor layer or may have a concentration gradient.

Further, as the semiconductor layer, a semiconductor layer using an organic semiconductor layer in addition to a compound semiconductor layer such as an oxide semiconductor layer may be formed, and the semiconductor layer may have a stacked structure.

Alternatively, a semiconductor layer having one conductivity type may be provided between the buffer layer and the source and drain electrode layers. Depending on the conductivity of the semiconductor layer having one conductivity type and the buffer layer, a semiconductor layer having one conductivity type may be formed between the buffer layer and the semiconductor layer.

As the semiconductor layer having one conductivity type, a semiconductor layer in which an impurity element imparting one conductivity type is added to a semiconductor material can be used. As the semiconductor material, the above-described oxide semiconductor materials (zinc oxide, magnesium zinc oxide, tin oxide), silicon (Si), germanium (G
e) Organic semiconductor materials may be used. An impurity element (group 13 element, 17
A semiconductor layer to which a group element, a group 1 element, a group 15 element) or the like is added can be used. For example, as the semiconductor layer having one conductivity type, zinc oxide containing aluminum, zinc oxide containing gallium, or the like obtained by adding aluminum or gallium to zinc oxide may be used. Also, other compound semiconductors (GaAs, InP, SiC, ZnSe, GaN, SiGe, etc.) can be used. The semiconductor layer may or may not have crystallinity, and may be any of an amorphous semiconductor, a microcrystalline semiconductor, and a crystalline semiconductor. A crystalline semiconductor can be formed by crystallizing an amorphous semiconductor using light energy or thermal energy. The crystallization of the amorphous semiconductor layer may be a combination of heat treatment and crystallization by laser light irradiation, or may be performed multiple times by heat treatment or laser light irradiation alone.

In the above steps, the coplanar thin film transistor 130 in this embodiment,
A thin film transistor 131 can be manufactured (see FIG. 6).

Subsequently, a first electrode layer 117 is formed over the gate insulating layer 105 (see FIG. 6).
When light is emitted from the substrate 100 side, the first electrode layer 117 is formed of indium tin oxide (
ITO), indium tin oxide (ITSO) containing silicon oxide, indium zinc oxide (IZO) containing zinc oxide (ZnO), zinc oxide (ZnO), ZnO
Doped with gallium (Ga), tin oxide (SnO ₂ ), indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, indium tin oxide containing titanium oxide Etc. can be used. In this embodiment, the first electrode layer 117 is formed by a sputtering method using indium zinc oxide containing tungsten oxide.

The composition proportion of each light-transmitting conductive material will be described. The composition ratio of indium oxide containing tungsten oxide is as follows: tungsten oxide 1.0 wt%, indium oxide 99.0 wt.
%And it is sufficient. The composition ratio of indium zinc oxide containing tungsten oxide may be 1.0 wt% tungsten oxide, 0.5 wt% zinc oxide, and 98.5 wt% indium oxide. Indium oxide containing titanium oxide is 1.0 wt% to 5.0 wt% titanium oxide,
Indium oxide may be 99.0 wt% to 95.0 wt%. Indium tin oxide (
The composition ratio of (ITO) may be 10.0 wt% tin oxide and 90.0 wt% indium oxide. The composition ratio of indium zinc oxide (IZO) may be 10.7 wt% zinc oxide and 89.3 wt% indium oxide. The composition ratio of indium tin oxide containing titanium oxide may be 5.0 wt% titanium oxide, 10.0 wt% tin oxide, and 85.0 wt% indium oxide. The above composition ratio is an example, and the ratio of the composition ratio may be set as appropriate.

Further, even when a material such as a metal film is used, light is transmitted from the first electrode layer 117 by reducing the film thickness (preferably, a thickness of about 5 nm to 30 nm) so that light can be transmitted. It becomes possible to radiate. As the metal thin film that can be used for the first electrode layer 117, a conductive film made of titanium, tungsten, nickel, gold, platinum, silver, aluminum, magnesium, calcium, lithium, zinc, and an alloy thereof, or TiN, TiSi _X N _Y
, WSi _x , WN _x , WSi _x N _y , NbN, and the like can be used.

The first electrode layer 117 is only required to be electrically connected to the source or drain electrode layer 114; therefore, the connection structure is not limited to this embodiment mode. A structure in which an insulating layer serving as an interlayer insulating layer is formed over the source or drain electrode layer 114 and electrically connected to the first electrode layer 117 by a wiring layer may be used.

In the case where the emitted light is emitted to the side opposite to the substrate 100 side, Ag (
Metals such as silver), Au (gold), Cu (copper), W (tungsten), and Al (aluminum) can be used. As another method, a transparent conductive film or a light reflective conductive film is formed by a sputtering method, a mask pattern is formed by a droplet discharge method, and a first electrode layer 117 is formed by combining etching processes. Also good.

The first electrode layer 117 may be wiped with a CMP method or a polyvinyl alcohol-based porous body and polished so that the surface thereof is planarized. Further, after polishing using the CMP method, the surface of the first electrode layer 117 may be subjected to ultraviolet irradiation, oxygen plasma treatment, or the like.

Through the above steps, a TFT substrate for a display panel in which the coplanar thin film transistor 131, the thin film transistor 130, and the first electrode layer 117 are connected to the substrate 100 is completed.

Next, an insulating layer 121 (also referred to as a partition wall) is selectively formed. The insulating layer 121 is the first
The electrode layer 117 is formed to have an opening. In this embodiment mode, the insulating layer 121 is formed over the entire surface, and is etched and processed with a mask such as a resist. In the case where the insulating layer 121 is formed using a droplet discharge method, a printing method, or the like that can be directly and selectively formed, processing by etching is not necessarily required.

The insulating layer 121 is formed using silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride, or other inorganic insulating materials, or acrylic acid, methacrylic acid, and derivatives thereof, polyimide, aromatic, A heat-resistant polymer such as polyamide, polybenzimidazole, or a siloxane resin material can be used. You may form using photosensitive and non-photosensitive materials, such as an acryl and a polyimide.
The insulating layer 121 preferably has a shape in which the radius of curvature continuously changes, and the coverage of the electroluminescent layer 122 and the second electrode layer 123 formed thereon is improved.

Alternatively, after the insulating layer 121 is formed by discharging a composition by a droplet discharge method, the surface may be pressed and flattened by pressure in order to improve the flatness. As a pressing method, unevenness may be reduced by scanning a roller-like object on the surface, or the surface may be pressed vertically with a flat plate-like object. Alternatively, the surface may be softened or melted with a solvent or the like, and the surface irregularities may be removed with an air knife. Further, polishing may be performed using a CMP method. This step can be applied when the surface is flattened when unevenness is generated by the droplet discharge method. When the flatness is improved by this step, display unevenness of the display panel can be prevented and a high-definition image can be displayed.

A light emitting element is formed over a substrate 100 which is a TFT substrate for a display panel (see FIG. 7).
).

Before the electroluminescent layer 122 is formed, heat treatment is performed at 200 ° C. in the atmospheric pressure to form the first electrode layer 1.
17. Remove moisture adsorbed in the insulating layer 121 or on the surface thereof. In addition, it is preferable to perform heat treatment at 200 to 400 ° C., preferably 250 to 350 ° C. under reduced pressure, and to form the electroluminescent layer 122 by a vacuum deposition method or a droplet discharge method under reduced pressure without being exposed to the air as it is. .

As the electroluminescent layer 122, a material that emits red (R), green (G), and blue (B) light is used.
Each is selectively formed by an evaporation method using an evaporation mask. Red (R), green (G
) The material that emits blue (B) light can also be formed by a droplet discharge method (such as a low-molecular or high-molecular material) in the same manner as a color filter. This is preferable. A second electrode layer 123 is stacked over the electroluminescent layer 122 to complete a display device having a display function using a light emitting element.

Although not shown, it is effective to provide a passivation film so as to cover the second electrode layer 123. The protective film provided when forming the display device may have a single layer structure or a multilayer structure. As the passivation film, silicon nitride (SiN), silicon oxide (SiO ₂ ), silicon oxynitride (SiON), silicon nitride oxide (SiNO), aluminum nitride (AlN), aluminum oxynitride (AlON), nitrogen content is oxygen Aluminum nitride oxide more than the content (
AlNO), aluminum oxide, diamond-like carbon (DLC), or a nitrogen-containing carbon film (CN _x ) is used, and a single layer or a combination of the insulating films can be used. For example, a laminate such as a nitrogen-containing carbon film (CN _x ) or silicon nitride (SiN), or an organic material can be used, and a laminate of polymers such as a styrene polymer may be used. A siloxane material may also be used.

At this time, it is preferable to use a film with good coverage as the passivation film, and it is effective to use a carbon film, particularly a DLC film. Since the DLC film can be formed in the temperature range from room temperature to 100 ° C., it can be easily formed over the electroluminescent layer having low heat resistance. The DLC film is formed by plasma CVD (typically, RF plasma CVD, microwave C
VD method, electron cyclotron resonance (ECR) CVD method, hot filament CVD method, etc.)
It can be formed by a combustion flame method, a sputtering method, an ion beam evaporation method, a laser evaporation method, or the like. The reaction gas used for film formation includes hydrogen gas and hydrocarbon gas (for example, CH ₄ , C ₂ H ₂ , C ₆
Using the H etc. _6), and ionized by glow discharge, depositing ions are accelerated to collide with a cathode applied with negative self bias. The CN film has C ₂ H ₄ gas and N ₂ as reaction gases.
What is necessary is just to form using gas. The DLC film has a high blocking effect against oxygen and can suppress oxidation of the electroluminescent layer. Therefore, the problem that the electroluminescent layer is oxidized during the subsequent sealing process can be prevented.

As shown in FIG. 8B, a sealant 136 is formed and sealed using a sealing substrate 140. After that, a flexible wiring board may be connected to a gate wiring layer formed by being electrically connected to the gate electrode layer 103 to be electrically connected to the outside. The same applies to the source wiring layer formed by being electrically connected to the source or drain electrode layer 111.

A filler 135 is sealed between the substrate 100 having elements and the sealing substrate 145 for sealing. A dripping method can also be used to enclose the filler. Instead of the filler 135, an inert gas such as nitrogen may be filled. Further, by installing the desiccant in the display device, the light emitting element can be prevented from being deteriorated by moisture. The desiccant is installed at the sealing substrate 140.
It may be on the side or on the side of the substrate 100 having elements, and a recess may be formed in the substrate in the region where the sealing material 136 is formed. In addition, when it is installed in a location corresponding to a region that does not contribute to display, such as a drive circuit region or a wiring region of the sealing substrate 140, the aperture ratio is not lowered even if the desiccant is an opaque substance. The filler 135 may be formed so as to include a hygroscopic material, and may have a function of a desiccant. Thus, a display device having a display function using a light-emitting element is completed (see FIG. 8).

Further, an FPC 139 is bonded to a terminal electrode layer 137 for electrically connecting the inside and the outside of the display device with an anisotropic conductive film 138 to be electrically connected to the terminal electrode layer 137.

FIG. 8A shows a top view of the display device. As shown in FIG. 8A, the pixel region 150
The scanning line drive region 151a, the scanning line drive region 151b, and the connection region 153 are formed of the sealing material 13.
6, a signal line driver circuit 152 which is sealed between the substrate 100 and the sealing substrate 140 and is formed on the substrate 100 by an IC driver is provided. The thin film transistor 133 and the thin film transistor 134 are provided in the driver circuit region, and the thin film transistor 131 is provided in the pixel region.
Each of the thin film transistors 130 is provided. The thin film transistor 133 and the thin film transistor 134 provided in the driver circuit region can be formed as described in Embodiment Mode 2. FIG. 8 shows an example in which a thin film transistor 133 which is an n-channel thin film transistor and a thin film transistor 134 which is a p-channel thin film transistor are electrically connected and have a CMOS structure, but are formed in a driver circuit region. The thin film transistor may be formed of a thin film transistor of the same channel type (n channel type or p channel type). The thin film transistor 133 and the thin film transistor 134 have buffer layers containing an organic compound and an inorganic compound containing different materials in accordance with required characteristics.

Note that in this embodiment mode, a case where the light-emitting element is sealed with a glass substrate is shown; however, the sealing process is a process for protecting the light-emitting element from moisture and is mechanically sealed with a cover material. Either a method, a method of encapsulating with a thermosetting resin or an ultraviolet light curable resin, or a method of encapsulating with a thin film having a high barrier ability such as a metal oxide or a nitride is used. As the cover material, glass, ceramics, plastic, or metal can be used. However, when light is emitted to the cover material side, it must be translucent. In addition, the cover material and the substrate on which the light emitting element is formed are bonded together using a sealing material such as a thermosetting resin or an ultraviolet light curable resin, and the resin is cured by heat treatment or ultraviolet light irradiation treatment to form a sealed space. Form. It is also effective to provide a hygroscopic material typified by barium oxide in this sealed space. This hygroscopic material may be provided in contact with the sealing material, or may be provided on the partition wall or the peripheral portion so as not to block light from the light emitting element. Further, the space between the cover material and the substrate on which the light emitting element is formed can be filled with a thermosetting resin or an ultraviolet light curable resin. In this case, it is effective to add a moisture absorbing material typified by barium oxide in the thermosetting resin or the ultraviolet light curable resin.

In the present embodiment, the switching TFT has been described in detail for a single gate structure, but a multi-gate structure such as a double gate structure may be used. In this case, a gate electrode layer may be provided above and below the semiconductor layer, or a plurality of gate electrode layers may be provided only on one side (above or below) of the semiconductor layer.

In this embodiment, conductivity between the semiconductor layer, the source electrode layer, and the drain electrode layer is improved by the buffer layer interposed between the semiconductor layer using the oxide semiconductor material and the source electrode layer and the drain electrode layer. Electrically good connection can be made. Accordingly, the electrical characteristics of the thin film transistor are improved, and a high-performance semiconductor device or display device can be manufactured.

Compared with other semiconductor materials such as silicon and organic semiconductor materials, a compound semiconductor such as an oxide semiconductor is less expensive and does not complicate the manufacturing process, so that a semiconductor device can be manufactured at low cost. . Further, the oxide semiconductor is light-transmitting to visible light and can form a transparent thin film transistor. In addition, since a transparent semiconductor such as an oxide semiconductor has little absorption of visible light, a thin film transistor with excellent light resistance in which unnecessary photoexcited carriers are not generated even when light enters the channel portion of the semiconductor layer. it can. Therefore, a high-performance and high-reliability semiconductor device or display device that can operate at high speed can be manufactured.

This embodiment mode can be used in combination with each of Embodiment Modes 1 to 3.

(Embodiment 5)
An embodiment of the present invention will be described with reference to FIGS. More specifically, a method for manufacturing a display device having a planar thin film transistor with a top-gate structure described in Embodiment 3 to which the present invention is applied will be described. 14A is a top view of the display device pixel portion, and FIGS. 13 and 14B are cross-sectional views taken along line E-F in each step of forming FIG. 14A. FIG. 15A is also a top view of the display device, and FIG.
It is sectional drawing by line OP (a line UW is included) in A). Note that an example of a liquid crystal display device using a liquid crystal material as a display element is shown. Therefore, repetitive description of the same portion or a portion having a similar function is omitted.

In this embodiment, a compound semiconductor material such as an oxide semiconductor is used as a semiconductor layer,
A conductive buffer layer is formed between the semiconductor layer and the source and drain electrode layers. The buffer layer is formed as a layer containing an organic compound and an inorganic compound. The buffer layer interposed between the semiconductor layer, the source electrode layer, and the drain electrode layer improves the conductivity between the semiconductor layer, the source electrode layer, and the drain electrode layer, so that an excellent electrical connection can be made. A material such as a gate electrode layer, a semiconductor layer, a source electrode layer, or a drain electrode layer and a manufacturing method thereof can be performed using the same materials as in Embodiments 1 to 4.

An insulating layer 201 is formed over the substrate 200, and a semiconductor layer 211 that is an oxide semiconductor layer is formed. A channel protective layer 202 for protecting the semiconductor layer is formed over the channel formation region of the semiconductor layer 211 by etching or the like in a later step (see FIG. 13A).

As a compound semiconductor that can be used for the semiconductor layer 211, an oxide semiconductor can be given, for example. Examples of oxide semiconductors include zinc oxide (ZnO) and magnesium zinc oxide (Mg).
_x Zn _1-x O), tin oxide (SnO _2), indium oxide (In ₂ O _3), gallium oxide (
Metal oxides such as Ga ₂ O ₃ ). Alternatively, an oxide semiconductor composed of a plurality of the above oxide semiconductors may be used, and InGaO ₃ (comprising zinc oxide (ZnO), indium oxide (In ₂ O ₃ ), and gallium oxide (Ga ₂ O ₃ ). ZnO) _m (m is an integer greater than or equal to 1 and less than 50, typically InGaO ₃ (ZnO) ₅ or the like can be used, even if the semiconductor material is an n-type semiconductor or a p-type semiconductor. Other impurity elements (
(Al, gallium, etc.) may be included. It can be formed by a sputtering method using an oxide semiconductor containing an impurity element as a target, a CVD method, or the like. Alternatively, an impurity element may be introduced (added by a doping method, an ion implantation method, or the like) so that the oxide semiconductor includes the impurity element. The semiconductor layer is formed by vapor deposition, CVD, plasma CV
A single layer or a stacked layer can be formed by a method such as D method or sputtering method. Also,
Droplet discharge method and printing method (screen printing, offset printing, letterpress printing and gravure (intaglio)
A printing method, etc.), a coating method such as a spin coating method, a dipping method and the like can also be used.

An oxide semiconductor such as zinc oxide is transparent because it transmits visible light. A semiconductor layer using such a light-transmitting semiconductor material (transmitting light in the visible light region) absorbs less visible light, so unnecessary photoexcited carriers even when light enters the channel portion of the semiconductor layer. Thus, a highly reliable thin film transistor with excellent light resistance can be obtained. Note that a nitride semiconductor, a carbide semiconductor, or the like may be used as another compound semiconductor.

Compared with other semiconductor materials such as silicon and organic semiconductor materials, a compound semiconductor such as an oxide semiconductor is less expensive and does not complicate the manufacturing process, so that a semiconductor device can be manufactured at low cost. .

In addition, a semiconductor layer having one conductivity type (n-type or p-type) can be formed by including an impurity element in a semiconductor layer. As an impurity element added (formed to include) to the semiconductor layer, a group 13 element (boron (B)), gallium (Ga), indium (In), thallium (Tl)), a group 17 element (fluorine (F ), Chlorine (Cl), bromine (Br), iodine (I)), group 1 elements (lithium (Li), sodium (Na), potassium (K), rubidium (Rb), cesium (Cs)), group 15 Elements (nitrogen (N), phosphorus (P), arsenic (As), antimony (Sb), bismuth (Bi)) and the like can be used, and one or more of the above elements can be used.

The impurity element may be added to a part of the semiconductor layer or may be added to the entire semiconductor layer. The addition amount depends on the size, thickness, integration degree, required performance (electrical characteristics, etc.) of the thin film transistor element. The concentration may be set appropriately according to the above, and the concentration may be uniform over the semiconductor layer or may have a concentration gradient.

Alternatively, a semiconductor layer using an organic semiconductor layer in addition to the oxide semiconductor layer may be formed as the semiconductor layer, and the semiconductor layer may have a stacked structure.

Alternatively, a semiconductor layer having one conductivity type may be provided between the buffer layer and the source and drain electrode layers.

As the semiconductor layer having one conductivity type, a semiconductor layer in which an impurity element imparting one conductivity type is added to a semiconductor material can be used. As the semiconductor material, the above-described oxide semiconductor materials (zinc oxide, magnesium zinc oxide, tin oxide), silicon (Si), germanium (G
e) Organic semiconductor materials may be used. An impurity element (group 13 element, 17
A semiconductor layer to which a group element, a group 1 element, a group 15 element) or the like is added can be used. For example, as the semiconductor layer having one conductivity type, zinc oxide containing aluminum, zinc oxide containing gallium, or the like obtained by adding aluminum or gallium to zinc oxide may be used. Also, other compound semiconductors (GaAs, InP, SiC, ZnSe, GaN, SiGe, etc.) can be used. The semiconductor layer may or may not have crystallinity, and may be any of an amorphous semiconductor, a microcrystalline semiconductor, and a crystalline semiconductor. A crystalline semiconductor can be formed by crystallizing an amorphous semiconductor using light energy or thermal energy. The crystallization of the amorphous semiconductor layer may be a combination of heat treatment and crystallization by laser light irradiation, or may be performed multiple times by heat treatment or laser light irradiation alone.

The buffer layer 210 is in contact with the source and drain regions of the semiconductor layer 211.
a and the buffer layer 210b are formed. The buffer layer 210a and the buffer layer 210b are:
The layer has conductivity and includes an organic compound and an inorganic compound. The inorganic compound and the organic compound included in the buffer layer may be formed using the materials and manufacturing methods described in Embodiment Mode 1.

The source or drain electrode layer 209a is formed over the buffer layer 210a with the buffer layer 2
A source electrode layer or a drain electrode layer 209b is formed on 10b. Buffer layer 2
10a and the buffer layer 210b may reduce the contact resistance between the source or drain electrode layer 209a and the semiconductor layer 211, and the source or drain electrode layer 209b and the semiconductor layer 211, thereby improving electrical connection. it can.

Depending on the combination of the material used for the semiconductor layer and the material used for the source electrode layer and the drain electrode layer, electrical characteristics such as inability to conduct and high resistance may be deteriorated.
Therefore, the material used for the semiconductor layer and the material used for the source and drain electrode layers need to be selected as appropriate. In the present invention, since the source and drain electrode layers and the semiconductor layer are stacked and electrically connected via the buffer layer, the above-described deterioration of the electrical characteristics can be prevented and the material can be freely selected. Can do. Therefore, a semiconductor device that satisfies required characteristics (electric characteristics, characteristics related to reliability (a stacked state of materials (adhesion), etc.)) can be manufactured.

Source / drain electrode layer 209a and source / drain electrode layer 20
9b can be formed by forming a conductive film by a PVD method, a CVD method, a vapor deposition method or the like and then etching it into a desired shape. Further, it can be selectively formed at a predetermined place by a droplet discharge method, a printing method, an electroplating method, or the like. Further, a reflow method or a damascene method may be used. The material of the source electrode layer or drain electrode layer is Ag, Au, Cu, Ni, Pt, Pd,
Ir, Rh, W, Al, Ta, Mo, Cd, Zn, Fe, Ti, Si, Ge, Zr, Ba
Such a metal or an alloy thereof, or a metal nitride thereof may be used. A light-transmitting material can also be used.

Further, in the case of a light-transmitting conductive material, indium tin oxide (ITO), indium tin oxide containing silicon oxide (ITSO), and indium zinc oxide containing zinc oxide (ZnO) (I
ZO (indium zinc oxide), zinc oxide (ZnO), ZnO doped with gallium (Ga), tin oxide (SnO ₂ ), indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, oxidation Indium oxide containing titanium, indium tin oxide containing titanium oxide, or the like can be used.

Next, the gate insulating layer 2 is formed over the semiconductor layer 211, the buffer layer 210a, the buffer layer 210b, the source or drain electrode layer 209a, and the source or drain electrode layer 209b.
12 is formed. As the gate insulating layer 212, a material such as silicon oxide material or nitride material, yttrium oxide (Y ₂ O ₃ ), aluminum oxide (Al ₂ O ₃ ), titanium oxide (TiO ₂ )
₂ ) It can be formed by using such a laminate, and may be a laminate or a single layer. Alternatively, a silicon oxide film containing nitrogen, a silicon nitride film containing oxygen, a silicon nitride film, a single layer of a silicon oxide film, or a stacked layer thereof may be used. Note that a rare gas element such as argon may be included in the reaction gas and mixed into the formed insulating layer.

A gate electrode layer 215 is formed over the gate insulating layer 212, so that the thin film transistor 250 is manufactured. The gate electrode layer 215 can be formed by a CVD method, a sputtering method, a droplet discharge method, or the like. The gate electrode layer 215 includes Ag, Au, Ni, Pt, Pd, Ir, Rh,
An element selected from Ta, W, Ti, Mo, Al, and Cu, or an alloy material or a compound material containing the element as a main component may be used. Alternatively, a semiconductor film typified by a polycrystalline silicon film doped with an impurity element such as phosphorus, or an AgPdCu alloy may be used. Further, a single layer structure or a multi-layer structure may be used.

A light-transmitting material having a property of transmitting visible light can be used for the gate electrode layer 215. As the light-transmitting conductive material, indium tin oxide (ITO), indium tin oxide containing silicon oxide (ITSO), organic indium, organic tin, zinc oxide, or the like can be used. Further, indium zinc oxide containing zinc oxide (ZnO) (IZO (indium zinc ox
ide)), zinc oxide (ZnO), ZnO doped with gallium (Ga), tin oxide (SnO ₂ ), indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium containing titanium oxide An oxide, indium tin oxide containing titanium oxide, or the like may also be used.

In the case where processing is necessary by etching to form the gate electrode layer 215, a mask may be formed and processed by dry etching or dry etching. ICP (Inductiv
ely Coupled Plasma (inductively coupled plasma) etching method is used to appropriately adjust the etching conditions (the amount of power applied to the coil-type electrode, the amount of power applied to the electrode on the substrate side, the electrode temperature on the substrate side, etc.) Thus, the electrode layer can be etched into a tapered shape. As an etching gas, a chlorine-based gas typified by Cl ₂ , BCl ₃ , SiCl _4, CCl _4, etc., a fluorine-based gas typified by CF ₄ , SF _6, NF _3, etc., or O ₂ is appropriately used. be able to.

A mask made of an insulating material such as resist or polyimide is formed, and an opening 213 is formed in a part of the gate insulating layer 212 by etching using the mask, and the source electrode layer or A part of the drain electrode layer 209b is exposed. As the etching process, either plasma etching (dry etching) or wet etching may be employed. Etching gas includes fluorine gas such as CF ₄ and NF ₃ , Cl ₂ and B
A chlorine-based gas such as Cl ₃ may be used, and an inert gas such as He or Ar may be added as appropriate. Further, if an atmospheric pressure discharge etching process is applied, a local electric discharge process is possible, and it is not necessary to form a mask layer on the entire surface of the substrate.

A pixel electrode layer 255 is formed over the gate insulating layer 212 so as to be in contact with the source or drain electrode layer 209b in the opening 213 (see FIG. 13D). The pixel electrode layer 255 can be formed using a material similar to that of the first electrode layer 117 described above. When a transmissive liquid crystal display panel is manufactured, indium oxide containing tungsten oxide or indium containing tungsten oxide is used. Zinc oxide, indium oxide containing titanium oxide, indium tin oxide containing titanium oxide, or the like can be used. Of course, indium tin oxide (ITO
), Indium zinc oxide (IZO), indium tin oxide added with silicon oxide (IT
SO) and the like can also be used. As the reflective metal thin film, a conductive film made of titanium, tungsten, nickel, gold, platinum, silver, aluminum, magnesium, calcium, lithium, or an alloy thereof can be used.

The pixel electrode layer 255 can be formed by an evaporation method, a sputtering method, a CVD method, a printing method, a droplet discharge method, or the like.

Next, an insulating layer 261 called an alignment film is formed by a printing method or a spin coating method so as to cover the pixel electrode layer 255, the gate insulating layer 212, and the gate electrode layer 215. Note that the insulating layer 261 can be selectively formed by using a screen printing method, an offset printing method, a relief printing, or a gravure (intaglio) printing method. Then, rubbing is performed. Subsequently, a sealing material 282 is formed in a peripheral region where pixels are formed by a droplet discharge method.

After that, an insulating layer 263 that functions as an alignment film, a conductive layer 265 that functions as a counter electrode,
A counter substrate 266 provided with a colored layer 264 functioning as a color filter and a polarizing plate 267
And a substrate 200 which is a TFT substrate are bonded to each other through a spacer 281 and a liquid crystal layer 262 is provided in the gap, whereby a liquid crystal display panel can be manufactured (FIGS. 14 and 1).
See 5. ). A polarizing plate 268 is also provided on the side opposite to the surface having the elements of the substrate 200.
A filler may be mixed in the sealing material, and a shielding film (black matrix) or the like may be formed on the counter substrate 266. As a method for forming the liquid crystal layer,
A dispenser type (dropping type) or a dip type (pumping type) in which liquid crystal is injected by using a capillary phenomenon after the substrate 200 having elements and the counter substrate 266 are bonded can be used. It is dripped. When the dropping method is used, a barrier layer may be provided in order to prevent the sealing material and the liquid crystal from reacting. Further, a sealing material may be formed on the TFT substrate side, and the liquid crystal may be dropped.

The spacer may be provided by dispersing particles of several μm, but in this embodiment, a method of forming a resin film on the entire surface of the substrate and then etching it is employed. After applying such a spacer material with a spinner, it is formed into a predetermined pattern by exposure and development processing. Further, it is cured by heating at 150 to 200 ° C. in a clean oven or the like. The spacers produced in this way can have different shapes depending on the conditions of exposure and development processing, but preferably, the spacers are columnar and have a flat top so that the opposite substrate is When combined, the mechanical strength of the liquid crystal display device can be ensured. The shape can be a conical shape, a pyramid shape or the like, and there is no particular limitation.

A connection portion is formed to connect the inside of the display device formed by the above steps and an external wiring board. The insulator layer in the connection portion is removed by ashing using oxygen gas at or near atmospheric pressure. This treatment is performed using oxygen gas and one or more selected from hydrogen, CF ₄ , NF ₃ , H ₂ O, and CHF ₃ . In this step, in order to prevent damage and destruction due to static electricity, ashing is performed after sealing using the counter substrate. .

Subsequently, the terminal electrode layer 287 electrically connected to the pixel portion is replaced with the anisotropic conductive layer 28.
5, an FPC 286 which is a wiring board for connection is provided. The FPC 286 plays a role of transmitting an external signal or potential. Through the above steps, a liquid crystal display device having a display function can be manufactured.

In FIG. 14 in the present embodiment, the face electrode layer 25 connected to the thin film transistor 250.
5 shows an example in which 5 is formed on the gate insulating layer 212. FIG. 27 shows an example in which the pixel electrode layer is formed on an interlayer insulating layer formed on a thin film transistor. In FIG. 27, the thin film transistor 2
An insulating layer 273 and an insulating layer 270 are stacked on the insulating layer 270, and the pixel electrode layer 271 is formed on the insulating layer 270.
Is formed. The pixel electrode layer 271 has an opening reaching the source or drain electrode layer 209b provided in the gate insulating layer 212, the insulating layer 273, and the insulating layer 270.
It is in contact with the source or drain electrode layer 209 b and is electrically connected to the thin film transistor 250. An insulating layer 272 that functions as an alignment film is formed over the pixel electrode layer 271.

In FIG. 27, the pixel electrode layer 271 includes a semiconductor layer 211, a channel protective layer 202, a buffer layer 210a, a buffer layer 210b, a source or drain electrode layer 209a, a source or drain electrode layer 209b, The gate insulating layer 212 and the gate electrode layer 215 are formed so as to overlap with the insulating layer 273 and the insulating layer 270. In this embodiment, the buffer layer 210a, the buffer layer 210b, the channel protective layer 202, the gate insulating layer 212, the insulating layer 273, and the insulating layer 270 have a light-transmitting property. Further, an oxide semiconductor which is a compound semiconductor used in the present invention has a light-transmitting property and transmits visible light. In FIG. 27, when a light-transmitting conductive material as described above is used for the source or drain electrode layer 209a, the source or drain electrode layer 209b, and the gate electrode layer 215, the pixel electrode layer 272 is transmitted. Since the thin film transistor 250 does not block the emitted light, the aperture ratio can be improved in the pixel. Thus, when the light-transmitting semiconductor material used in the present invention and the light-transmitting conductive material are used for the electrode layer, the aperture ratio can be improved in the pixel region. This is the same as in the display device including the light-emitting element described in Embodiment 4, and a display device with a high aperture ratio can be manufactured.

FIG. 15A shows a top view of a liquid crystal display device. As shown in FIG. 15A, the pixel region 290, the scanning line driving region 291a, and the scanning line driving region 291b are sealed between the substrate 200 and the counter substrate 266 by a sealant 282, and are formed on the substrate 200. A signal line driver circuit 292 formed by an IC driver is provided. Thin film transistor 2 in the drive region
A driving circuit having 83 and a thin film transistor 284 is provided.

Since the thin film transistors 283 and 284 are n-channel thin film transistors in the peripheral driver circuit in this embodiment, an NMOS circuit including the thin film transistors 283 and 284 is provided.

In this embodiment mode, an NMOS configuration is used in the drive circuit region to function as an inverter. As described above, in the case of the configuration of only PMOS and NMOS, the gate electrode layer and the source electrode layer or the drain electrode layer of some TFTs are connected.

In this embodiment mode, the switching TFT has a single gate structure, but may have a double gate structure or a multi-gate structure.

In this embodiment, the semiconductor layer, the source electrode layer, and the drain electrode layer are electrically connected to each other by the buffer layer interposed between the semiconductor layer using an oxide semiconductor material that is a compound semiconductor and the source electrode layer and the drain electrode layer. The characteristics are improved, and a good electrical connection can be made. Accordingly, the electrical characteristics of the thin film transistor are improved, and a high-performance semiconductor device or display device can be manufactured.

Compared with other semiconductor materials such as silicon and organic semiconductor materials, a compound semiconductor such as an oxide semiconductor is less expensive and does not complicate the manufacturing process, so that a semiconductor device can be manufactured at low cost. . Further, the oxide semiconductor is light-transmitting to visible light and can form a transparent thin film transistor. Therefore, when such a transparent thin film transistor is used, light is not blocked in the pixel region, so that the aperture ratio of the display device can be improved. In addition, since a transparent semiconductor material such as an oxide semiconductor has little absorption of visible light, a thin film transistor with excellent light resistance in which unnecessary photoexcited carriers are not generated even when light enters the channel portion of the semiconductor layer. Can do. Therefore, a high-performance and high-reliability semiconductor device or display device that can operate at high speed can be manufactured.

This embodiment mode can be used in combination with each of Embodiment Modes 1 to 3.

(Embodiment 6)
A thin film transistor is formed by applying the present invention, and a display device can be formed using the thin film transistor. When a light-emitting element is used and an n-channel transistor is used as a transistor for driving the light-emitting element, The light emitted from the light emitting element is any one of a downward emission for extracting light from the substrate having the element, an upward emission for emitting light from the sealing substrate side, and a dual emission for emitting light from both substrates sandwiching the light emitting element. I do. Here, a stacked structure of light-emitting elements corresponding to each case will be described with reference to FIGS.

In this embodiment, the thin film transistor 461, the thin film transistor 471, and the thin film transistor 481 which are inverted staggered thin film transistors manufactured in Embodiment 2 are used. The thin film transistor 481 is provided over the substrate 480, and includes a gate electrode layer 482, a gate insulating layer 497, a semiconductor layer 493, a channel protective layer 496, a source or drain electrode layer 48.
7a, a source electrode layer or a drain electrode layer 487b. The semiconductor layer 493 is formed using a compound semiconductor, and an oxide semiconductor layer is used as the semiconductor layer 493 in this embodiment. A buffer layer 495a is provided between the source or drain electrode layer 487a and the semiconductor layer 493, and a buffer layer 495b is provided between the source or drain electrode layer 487b and the semiconductor layer 493. Buffer layer 495a and buffer layer 495
b is a layer which has electroconductivity and contains an organic compound and an inorganic compound. Therefore, the buffer layer 4
95a and the buffer layer 495b allow the source or drain electrode layer 487a and the semiconductor layer 493, the source or drain electrode layer 487b, and the semiconductor layer 493 to have low contact resistance, so that favorable electrical connection can be achieved. . Accordingly, the electrical characteristics of the thin film transistor are improved, and a high-performance semiconductor device or display device can be manufactured.

First, in the case of radiating to the substrate 480 side, that is, in the case of performing downward radiation, FIG.
). In this case, the first electrode layer 484 and the electroluminescent layer 48 are in contact with the source or drain electrode layer 487b so as to be electrically connected to the thin film transistor 481.
5 and the second electrode layer 486 are sequentially stacked. The substrate 480 through which light passes needs to have a light-transmitting property with respect to at least light in the visible region. Next, when radiating to the opposite side of the substrate 460,
That is, the case of performing upward emission will be described with reference to FIG. The thin film transistor 461 can be formed in a manner similar to that of the thin film transistor described above.

A source or drain electrode layer 462 which is electrically connected to the thin film transistor 461 is in contact with and electrically connected to the first electrode layer 463. First electrode layer 463, electroluminescent layer 464
The second electrode layer 465 is sequentially stacked. The source or drain electrode layer 462 is a reflective metal layer, and reflects light emitted from the light emitting element to the upper surface of the arrow. Since the source or drain electrode layer 462 is stacked with the first electrode layer 463,
Even when light is transmitted using a light-transmitting material for the first electrode layer 463, the light is reflected by the source or drain electrode layer 462 and emitted to the side opposite to the substrate 460. Of course first
The electrode layer 463 may be formed using a reflective metal film. Since light emitted from the light-emitting element is emitted through the second electrode layer 465, the second electrode layer 465 is formed using a light-transmitting material at least in the visible region. Finally, the case where light is emitted to the substrate 470 side and both sides on the opposite side, that is, the case where both are emitted will be described with reference to FIG. The thin film transistor 471 is also a channel protective thin film transistor. A source or drain electrode layer 477 electrically connected to the semiconductor layer of the thin film transistor 471
In addition, the first electrode layer 472 is electrically connected. First electrode layer 472, electroluminescent layer 473
The second electrode layer 474 is sequentially stacked. At this time, when both the first electrode layer 472 and the second electrode layer 474 are formed with a light-transmitting material or a thickness capable of transmitting light at least in the visible region, both emission is realized. In this case, the insulating layer through which light is transmitted and the substrate 470 also need to have a light-transmitting property with respect to at least light in the visible region.

A mode of a light-emitting element which can be applied to this embodiment mode is shown in FIG. FIG. 11 illustrates an element structure of a light-emitting element. Light emission in which an electroluminescent layer 860 formed by mixing an organic compound and an inorganic compound is sandwiched between a first electrode layer 870 and a second electrode layer 850. It is an element. The electroluminescent layer 860 includes a first layer 804, a second layer 803, and a third layer 802 as illustrated.

First, the first layer 804 is a layer that has a function of transporting holes to the second layer 803, and includes a first organic compound and a first organic electron-accepting property with respect to the first organic compound. It is a structure containing an inorganic compound. What is important is not simply that the first organic compound and the first inorganic compound are mixed, but the first inorganic compound exhibits an electron accepting property with respect to the first organic compound. By adopting such a configuration, a large number of hole carriers are generated in the first organic compound which has essentially no inherent carrier, and exhibits extremely excellent hole injection properties and hole transport properties.

Therefore, the first layer 804 has not only an effect (such as improvement in heat resistance) considered to be obtained by mixing an inorganic compound, but also excellent conductivity (in particular, in the first layer 804, hole injection). And transportability) can also be obtained. This is because in a conventional hole transport layer in which an organic compound and an inorganic compound that do not electronically interact with each other are simply mixed,
This effect cannot be obtained. Due to this effect, the drive voltage can be made lower than in the prior art.
Further, since the first layer 804 can be thickened without causing an increase in driving voltage, a short circuit of an element due to dust or the like can be suppressed.

By the way, as described above, since hole carriers are generated in the first organic compound, the first organic compound is preferably a hole-transporting organic compound. Examples of the hole transporting organic compound include phthalocyanine (abbreviation: H ₂ Pc), copper phthalocyanine (abbreviation: C
uPc), vanadyl phthalocyanine (abbreviation: VOPc), 4,4 ′, 4 ″ -tris (N
, N-diphenylamino) triphenylamine (abbreviation: TDATA), 4,4 ′, 4 ″
-Tris [N- (3-methylphenyl) -N-phenylamino] triphenylamine (abbreviation: MTDATA), 1,3,5-tris [N, N-di (m-tolyl) amino] benzene (abbreviation: m-MTDAB), N, N′-diphenyl-N, N′-bis (3-methylphenyl) -1,1′-biphenyl-4,4′-diamine (abbreviation: TPD), 4,4′-bis [
N- (1-naphthyl) -N-phenylamino] biphenyl (abbreviation: NPB), 4,4′-
Bis {N- [4-di (m-tolyl) amino] phenyl-N-phenylamino} biphenyl (abbreviation: DNTPD), 4,4 ′, 4 ″ -tris (N-carbazolyl) triphenylamine (abbreviation: TCTA) and the like, but is not limited thereto. Among the compounds mentioned above, TDATA, MTDATA, m-MTDAB, TPD, NPB,
Aromatic amine compounds typified by DNTPD, TCTA, and the like are easy to generate hole carriers, and are a group of compounds suitable as the first organic compound.

On the other hand, the first inorganic compound may be anything as long as it can easily receive electrons from the first organic compound, and various metal oxides or metal nitrides can be used. Any transition metal oxide belonging to Group 12 is preferable because it easily exhibits electron acceptability. Specific examples include titanium oxide, zirconium oxide, vanadium oxide, molybdenum oxide, tungsten oxide, rhenium oxide, ruthenium oxide, and zinc oxide. Among the metal oxides described above, any of the transition metal oxides in Group 4 to Group 8 of the periodic table has a high electron accepting property and is a preferred group. Vanadium oxide, molybdenum oxide, tungsten oxide, and rhenium oxide are particularly preferable because they can be vacuum-deposited and are easy to handle.

Note that the first layer 804 may be formed by stacking a plurality of layers to which the above-described combination of an organic compound and an inorganic compound is applied. Moreover, other organic compounds or other inorganic compounds may be further contained.

Next, the third layer 802 will be described. The third layer 802 is a layer having a function of transporting electrons to the second layer 803, and includes at least a third organic compound and a third inorganic compound that exhibits an electron donating property with respect to the third organic compound. It is the structure containing these. What is important is not that the third organic compound and the third inorganic compound are merely mixed, but that the third inorganic compound exhibits an electron donating property to the third organic compound. By adopting such a configuration, a large number of electron carriers are generated in the third organic compound which has essentially no intrinsic carrier, and exhibits extremely excellent electron injection properties and electron transport properties.

Therefore, the third layer 802 has not only an effect (such as improvement in heat resistance) considered to be obtained by mixing an inorganic compound but also excellent conductivity (especially in the third layer 802, electron injection). And transportability) can also be obtained. This is an effect that cannot be obtained by a conventional electron transport layer in which an organic compound and an inorganic compound that do not have an electronic interaction with each other are simply mixed. Due to this effect, the drive voltage can be made lower than in the prior art. In addition, since the third layer 802 can be thickened without causing an increase in driving voltage, a short circuit of an element due to dust or the like can be suppressed.

By the way, as described above, the third organic compound generates electron carriers.
The organic compound is preferably an electron-transporting organic compound. Examples of the electron-transporting organic compound include tris (8-quinolinolato) aluminum (abbreviation: Alq ₃ ), tris (
4-methyl-8-quinolinolato) aluminum (abbreviation: Almq ₃ ), bis (10-hydroxybenzo [h] -quinolinato) beryllium (abbreviation: BeBq ₂ ), bis (2-methyl-8-quinolinolato) (4-phenyl) Phenolato) aluminum (abbreviation: BAlq), bis [2- (2′-hydroxyphenyl) benzoxazolate] zinc (abbreviation: Zn (BOX
₂ ), bis [2- (2′-hydroxyphenyl) benzothiazolate] zinc (abbreviation: Zn)
(BTZ) ₂ ), bathophenanthroline (abbreviation: BPhen), bathocuproin (abbreviation: BCP), 2- (4-biphenylyl) -5- (4-tert-butylphenyl) -1,
3,4-oxadiazole (abbreviation: PBD), 1,3-bis [5- (4-tert-butylphenyl) -1,3,4-oxadiazol-2-yl] benzene (abbreviation: OXD- 7
), 2,2 ′, 2 ″-(1,3,5-benzenetriyl) -tris (1-phenyl-1)
H-benzimidazole) (abbreviation: TPBI), 3- (4-biphenylyl) -4-phenyl-5- (4-tert-butylphenyl) -1,2,4-triazole (abbreviation: TAZ)
), 3- (4-biphenylyl) -4- (4-ethylphenyl) -5- (4-tert-butylphenyl) -1,2,4-triazole (abbreviation: p-EtTAZ), and the like. It is not limited to these. Among the above-mentioned compounds, Alq ₃ , Alm
a chelate metal complex having a chelate ligand containing an aromatic ring represented by q ₃ , BeBq ₂ , BAlq, Zn (BOX) ₂ , Zn (BTZ) _2, etc., and a phenanthroline skeleton represented by BPhen, BCP, etc. Organic compounds having an oxadiazole skeleton typified by PBD, OXD-7, and the like are easy to generate electron carriers and are a group of compounds suitable as the third organic compound.

On the other hand, the third inorganic compound may be anything as long as it easily gives electrons to the third organic compound, and various metal oxides or metal nitrides can be used.
Alkaline earth metal oxides, rare earth metal oxides, alkali metal nitrides, alkaline earth metal nitrides, and rare earth metal nitrides are preferred because they easily exhibit electron donating properties. Specific examples include lithium oxide, strontium oxide, barium oxide, erbium oxide, lithium nitride, magnesium nitride, calcium nitride, yttrium nitride, and lanthanum nitride. In particular, lithium oxide, barium oxide, lithium nitride, magnesium nitride, and calcium nitride are preferable because they can be vacuum-deposited and are easy to handle.

Note that the third layer 802 may be formed by stacking a plurality of layers to which the above-described combination of an organic compound and an inorganic compound is applied. Moreover, other organic compounds or other inorganic compounds may be further contained.

Next, the second layer 803 will be described. The second layer 803 is a layer having a light emitting function,
A luminescent second organic compound is included. Moreover, the structure containing a 2nd inorganic compound may be sufficient.
The second layer 803 can be formed using a variety of light-emitting organic compounds and inorganic compounds. However, since the second layer 803 is less likely to flow current than the first layer 804 and the third layer 802, the thickness is preferably about 10 nm to 100 nm.

The second organic compound is not particularly limited as long as it is a light-emitting organic compound,
For example, 9,10-di (2-naphthyl) anthracene (abbreviation: DNA), 9,10-di (
2-naphthyl) -2-tert-butylanthracene (abbreviation: t-BuDNA), 4,4
'-Bis (2,2-diphenylvinyl) biphenyl (abbreviation: DPVBi), Coumarin 30
, Coumarin 6, Coumarin 545, Coumarin 545T, perylene, rubrene, periflanthene, 2,5,8,11-tetra (tert-butyl) perylene (abbreviation: TBP), 9,1
0-diphenylanthracene (abbreviation: DPA), 5,12-diphenyltetracene, 4-
(Dicyanomethylene) -2-methyl- [p- (dimethylamino) styryl] -4H-pyran (abbreviation: DCM1), 4- (dicyanomethylene) -2-methyl-6- [2- (julolidin-9-yl) ) Ethenyl] -4H-pyran (abbreviation: DCM2), 4- (dicyanomethylene) -2,6-bis [p- (dimethylamino) styryl] -4H-pyran (abbreviation: Bis)
DCM) and the like. In addition, bis [2- (4 ′, 6′-difluorophenyl) pyridinato-N, C ^{2 ′} ] iridium (picolinato) (abbreviation: FIrpic), bis {2- [3
', 5'-bis (trifluoromethyl) phenyl] pyridinato-N, C ^2' } iridium (
Picolinato) (abbreviation: Ir (CF ₃ ppy) ₂ (pic)), tris (2-phenylpyridinato-N, C ^{2 ′} ) iridium (abbreviation: Ir (ppy) ₃ ), bis (2-phenylpyridina) To-N, C ^{2 ′} ) iridium (acetylacetonate) (abbreviation: Ir (ppy) ₂ (ac
ac)), bis [2- (2′-thienyl) pyridinato-N, C ^{3 ′} ] iridium (acetylacetonate) (abbreviation: Ir (thp) ₂ (acac)), bis (2-phenylquinolinato-N , C ^{2 ′} ) iridium (acetylacetonate) (abbreviation: Ir (pq) ₂ (acac
)), Bis [2- (2′-benzothienyl) pyridinato-N, C ^{3 ′} ] iridium (acetylacetonate) (abbreviation: Ir (btp) ₂ (acac)), etc. it can.

For the second layer 803, a triplet excitation material containing a metal complex or the like may be used in addition to the singlet excitation light-emitting material. For example, among red light emitting pixels, green light emitting pixels, and blue light emitting pixels, a red light emitting pixel having a relatively short luminance half time is formed of a triplet excitation light emitting material, and the other A singlet excited luminescent material is used. The triplet excited luminescent material has a feature that the light emission efficiency is good, so that less power is required to obtain the same luminance. That is, when applied to a red pixel, the amount of current flowing through the light emitting element can be reduced, so that reliability can be improved. As a reduction in power consumption, a red light-emitting pixel and a green light-emitting pixel may be formed using a triplet excitation light-emitting material, and a blue light-emitting pixel may be formed using a singlet excitation light-emitting material. By forming a green light-emitting element having high human visibility with a triplet excited light-emitting material, power consumption can be further reduced.

In the second layer 803, not only the second organic compound that emits light described above,
Furthermore, other organic compounds may be added. Examples of organic compounds that can be added include TDATA, MTDATA, m-MTDAB, TPD, NPB, and DNTPD described above.
, TCTA, Alq ₃ , Almq ₃ , BeBq ₂ , BAlq, Zn (BOX) ₂ , Zn (BT
Z) ₂ , BPhen, BCP, PBD, OXD-7, TPBI, TAZ, p-EtTAZ
, DNA, t-BuDNA, DPVBi, etc., and 4,4′-bis (N-carbazolyl)
Biphenyl (abbreviation: CBP), 1,3,5-tris [4- (N-carbazolyl) phenyl] benzene (abbreviation: TCPB), or the like can be used, but is not limited thereto. In addition, the organic compound added in addition to the second organic compound in this way has an excitation energy larger than the excitation energy of the second organic compound in order to efficiently emit the second organic compound, and the second organic compound. It is preferable to add more than the organic compound (by this, concentration quenching of the second organic compound can be prevented). Or as another function, you may show light emission with a 2nd organic compound (Thereby, white light emission etc. are attained).

The second layer 803 may have a structure in which a color display is performed by forming a light emitting layer having a different emission wavelength band for each pixel. Typically, a light emitting layer corresponding to each color of R (red), G (green), and B (blue) is formed. In this case as well, it is possible to improve color purity and prevent mirror reflection (reflection) of the pixel portion by providing a filter that transmits light in the emission wavelength band on the light emission side of the pixel. Can do. By providing the filter, it is possible to omit a circularly polarizing plate that has been conventionally required, and the loss of light emitted from the light emitting layer can be eliminated. Furthermore, a change in color tone that occurs when the pixel portion (display screen) is viewed obliquely can be reduced.

The material that can be used for the second layer 803 may be a low molecular weight organic light emitting material or a high molecular weight organic light emitting material. The polymer organic light emitting material has higher physical strength and higher device durability than the low molecular weight material. In addition, since the film can be formed by coating, the device can be manufactured relatively easily.

Since the light emission color is determined by the material for forming the light emitting layer, a light emitting element exhibiting desired light emission can be formed by selecting these materials. Examples of the polymer electroluminescent material that can be used for forming the light emitting layer include polyparaphenylene vinylene, polyparaphenylene, polythiophene, and polyfluorene.

The polyparaphenylene vinylene system includes a derivative of poly (paraphenylene vinylene) [PPV], poly (2,5-dialkoxy-1,4-phenylene vinylene) [RO-PPV].
, Poly (2- (2′-ethyl-hexoxy) -5-methoxy-1,4-phenylenevinylene) [MEH-PPV], poly (2- (dialkoxyphenyl) -1,4-phenylenevinylene) [ROPh -PPV] and the like. The polyparaphenylene series includes derivatives of polyparaphenylene [PPP], poly (2,5-dialkoxy-1,4-phenylene) [RO-
PPP], poly (2,5-dihexoxy-1,4-phenylene) and the like. The polythiophene series includes polythiophene [PT] derivatives, poly (3-alkylthiophene) [
PAT], poly (3-hexylthiophene) [PHT], poly (3-cyclohexylthiophene) [PCHT], poly (3-cyclohexyl-4-methylthiophene) [PCHM]
T], poly (3,4-dicyclohexylthiophene) [PDCHT], poly [3- (4-
Octylphenyl) -thiophene] [POPT], poly [3- (4-octylphenyl)
-2,2 bithiophene] [PTOPT] and the like. Examples of the polyfluorene series include polyfluorene [PF] derivatives, poly (9,9-dialkylfluorene) [PDAF], poly (9,9-dioctylfluorene) [PDOF], and the like.

The second inorganic compound may be any inorganic compound as long as it is difficult to quench the light emission of the second organic compound, and various metal oxides and metal nitrides can be used. In particular,
The metal oxide of Group 13 or Group 14 of the periodic table is preferable because it is difficult to quench the light emission of the second organic compound, and specifically, aluminum oxide, gallium oxide, silicon oxide, and germanium oxide are preferable. However, it is not limited to these.

Note that the second layer 803 may be formed by stacking a plurality of layers to which the above-described combination of an organic compound and an inorganic compound is applied. Moreover, other organic compounds or other inorganic compounds may be further contained. The layer structure of the light-emitting layer can be changed, and instead of having a specific electron injection region or light-emitting region, an electrode layer for this purpose is provided, or a light-emitting material is dispersed. Modifications can be made without departing from the spirit of the present invention.

A light-emitting element formed using the above materials emits light by being forward-biased. A pixel of a display device formed using a light-emitting element can be driven by a simple matrix method or an active matrix method. In any case, each pixel emits light by applying a forward bias at a specific timing, but is in a non-light emitting state for a certain period. By applying a reverse bias during this non-light emitting time, the reliability of the light emitting element can be improved. In the light-emitting element, deterioration that the light emission intensity decreases under a constant driving condition,
There is a degradation mode in which the non-light-emitting area is enlarged in the pixel and the luminance is apparently lowered. In addition, the reliability of the light emitting display device can be improved. Further, either digital driving or analog driving can be applied.

Therefore, a color filter (colored layer) may be formed on the sealing substrate. Color filter (
The colored layer) can be formed by a vapor deposition method or a droplet discharge method. When a color filter (colored layer) is used, high-definition display can be performed. This is because the color filter (colored layer) can be corrected so that a broad peak becomes a sharp peak in the emission spectrum of each RGB. In addition to full color display using three types of R, G, and B pixels, three-color video data is converted into four-color video data, and four types of R, G, B, and W (white) pixels are converted. The full color display used may be used. When four types of pixels are used, the luminance increases and a lively video display can be performed.

A full color display can be performed by forming a material exhibiting monochromatic light emission and combining a color filter and a color conversion layer. The color filter (colored layer) and the color conversion layer may be formed, for example, on the second substrate (sealing substrate) and attached to the substrate.

Of course, monochromatic light emission may be displayed. For example, an area color type display device may be formed using monochromatic light emission. As the area color type, a passive matrix type display unit is suitable, and characters and symbols can be mainly displayed.

The materials of the first electrode layer 870 and the second electrode layer 850 need to be selected in consideration of the work function, and both the first electrode layer 870 and the second electrode layer 850 are anodes depending on the pixel structure. Or a cathode. When the polarity of the driving thin film transistor is a p-channel type,
As shown in FIG. 11A, the first electrode layer 870 may be an anode and the second electrode layer 850 may be a cathode. In the case where the polarity of the driving thin film transistor is an n-channel type, it is preferable that the first electrode layer 870 be a cathode and the second electrode layer 850 be an anode as shown in FIG. Materials that can be used for the first electrode layer 870 and the second electrode layer 850 are described. First
In the case where the electrode layer 870 and the second electrode layer 850 function as an anode, a material having a high work function (specifically, a material of 4.5 eV or more) is preferable, and the first electrode layer and the second electrode layer 850 are preferable. Is a material having a low work function (specifically, a material of 3.5 eV or less). However, the hole injection characteristics and hole transport characteristics of the first layer 804,
Since the electron injection property and the electron transport property of the layer 802 are excellent, various materials can be used for both the first electrode layer 870 and the second electrode layer 850 with almost no work function limitation. .

11A and 11B has a structure in which light is extracted from the first electrode layer 870, the second electrode layer 850 does not necessarily have a light-transmitting property. As the second electrode layer 850, Ti, TiN, TiSi _x N _y , Ni, W, WSi _x , WN _x , WSi _x N _y
NbN, Cr, Pt, Zn, Sn, In, Ta, Al, Cu, Au, Ag, Mg, Ca
A film mainly composed of an element selected from Li, Mo, an alloy material or compound material containing the element as a main component, or a laminated film thereof may be used in a total film thickness of 100 nm to 800 nm.

The second electrode layer 850 can be formed by an evaporation method, a sputtering method, a CVD method, a printing method, a droplet discharge method, or the like.

In addition, when a light-transmitting conductive material such as a material used for the first electrode layer 870 is used for the second electrode layer 850, light is extracted from the second electrode layer 850, so that the light-emitting element can emit light. The emitted light can be a dual emission structure that is emitted from both the first electrode layer 870 and the second electrode layer 850.

Note that the light-emitting element of the present invention has various variations by changing types of the first electrode layer 870 and the second electrode layer 850.

FIG. 11B illustrates a case where the electroluminescent layer 860 includes the third layer 802, the second layer, and the first layer 804 in this order from the first electrode layer 870 side.

As described above, the light-emitting element of the present invention includes the first electrode layer 870 and the second electrode layer 850.
The electroluminescent layer 86 includes a layer sandwiched between the organic compound and the inorganic compound.
It consists of zero. Then, by mixing the organic compound and the inorganic compound, there are provided layers (that is, the first layer 804 and the third layer 802) that can obtain functions of high carrier injection and carrier transport that cannot be obtained independently. This is an organic / inorganic composite light emitting element. In addition, the first layer 804 and the third layer 802 are effective when the organic compound and the inorganic compound are combined, but only the organic compound and the inorganic compound may be used.

Note that although the electroluminescent layer 860 includes a layer in which an organic compound and an inorganic compound are mixed, various methods can be used as a formation method thereof. For example, a method of evaporating both an organic compound and an inorganic compound by resistance heating and co-evaporating can be mentioned. In addition, while the organic compound is evaporated by resistance heating, the inorganic compound is evaporated by an electron beam (EB),
Co-evaporation may be performed. Further, there is a method of evaporating the organic compound by resistance heating and simultaneously sputtering the inorganic compound and depositing both at the same time. In addition, the film may be formed by a wet method.

Similarly, for the first electrode layer 870 and the second electrode layer 850, a vapor deposition method using resistance heating, an EB vapor deposition method, a sputtering method, a wet method, or the like can be used.

FIG. 11C illustrates a structure in which a reflective electrode layer is used for the first electrode layer 870 and a light-transmitting electrode layer is used for the second electrode layer 850 in FIG. Light emitted from the element is reflected by the first electrode layer 870 and transmitted through the second electrode layer 850 to be emitted.
Similarly, in FIG. 11D, a reflective electrode layer is used for the first electrode layer 870 and a light-transmitting electrode layer is used for the second electrode layer 850 in FIG. 11B. The light emitted from the light emitting element is reflected by the first electrode layer 870 and is transmitted through the second electrode layer 850 and emitted. This embodiment mode can be freely combined with each of Embodiment Modes 1 to 4.

(Embodiment 7)
Next, a mode in which a driver circuit for driving is mounted on a display panel manufactured according to Embodiments 4 to 6 will be described.

First, a display device employing a COG method is described with reference to FIG. A pixel portion 2701 for displaying information such as characters and images is provided over the substrate 2700. A substrate provided with a plurality of drive circuits is divided into rectangles, and the divided drive circuit (also referred to as driver IC) 2751 is mounted on the substrate 2700. FIG. 18A shows a plurality of driver ICs 27.
51, the form which mounts FPC2750 ahead of driver IC2751 is shown. Further, the size of the division may be substantially the same as the length of the side of the pixel portion on the signal line side, and a tape may be mounted on the tip of the driver IC on a single driver IC.

Alternatively, a TAB method may be employed. In that case, a plurality of tapes may be attached and driver ICs may be mounted on the tapes as shown in FIG. As in the case of the COG method, a single driver IC may be mounted on a single tape. In this case, a metal piece or the like for fixing the driver IC may be attached together due to strength problems.

A plurality of driver ICs mounted on these display panels may be formed on a rectangular substrate having a side of 300 mm to 1000 mm or more from the viewpoint of improving productivity.

That is, a plurality of circuit patterns having a drive circuit portion and an input / output terminal as one unit may be formed on the substrate, and finally divided and taken out. The long side of the driver IC may be formed in a rectangular shape having a long side of 15 to 80 mm and a short side of 1 to 6 mm in consideration of the length of one side of the pixel portion and the pixel pitch. Or a length obtained by adding one side of the pixel portion and one side of each driver circuit.

The advantage of the external dimensions of the driver IC over the IC chip lies in the length of the long side, and the long side is 15
When a driver IC formed at ˜80 mm is used, the number required for mounting corresponding to the pixel portion can be smaller than when an IC chip is used, and the manufacturing yield can be improved. In addition, when the driver IC is formed over the glass substrate, the shape of the substrate used as a base is not limited, and thus productivity is not impaired. This is the IC from a circular silicon wafer
This is a great advantage compared to taking out the chip.

In the case where the scan line driver circuit 3702 is formed over the substrate as shown in FIG. 17B, a driver IC in which a driver circuit driver circuit on the signal line side is formed in a region outside the pixel portion 3701. Is implemented. These driver ICs are drive circuits on the signal line side. In order to form a pixel region corresponding to RGB full color, the number of signal lines in the XGA class is 3072 and the number in the UXGA class is 4800. The signal lines formed in such a number are divided into several blocks at the end of the pixel portion 3701 to form lead lines, and the driver I
Collected according to the pitch of the output terminal of C. The driver IC can be formed of a crystalline semiconductor formed on a substrate.

As shown in FIGS. 18A and 18B, driver ICs may be mounted as both the scanning line driver circuit and the signal line driver circuit. In that case, the specifications of the driver ICs used on the scanning line side and the signal line side may be different. For example, although a transistor constituting the driver IC on the scanning line side is required to have a withstand voltage of about 30 V, the driving frequency is 100 kHz or less, and a relatively high speed operation is not required. Therefore, it is preferable to set the channel length (L) of the transistors forming the driver on the scanning line side to be sufficiently large. On the other hand, the driver IC on the signal line side
A transistor with a breakdown voltage of about 12V is sufficient, but the driving frequency is 6 at 3V.
It is about 5 MHz, and high speed operation is required. Therefore, it is preferable to set the channel length and the like of the transistors constituting the driver on the micron rule.

By setting the thickness of the driver IC to be the same as that of the counter substrate, the height between the two becomes substantially the same, which contributes to the reduction in thickness of the entire display device. In addition, since each substrate is made of the same material, thermal stress is not generated even when a temperature change occurs in the display device, and the characteristics of a circuit made of TFTs are not impaired. In addition, the number of driver ICs to be mounted in one pixel region can be reduced by mounting the drive circuit with a driver IC that is longer than the IC chip as shown in this embodiment.

  As described above, a driver circuit can be incorporated in the display panel.

(Embodiment 8)
An example of a protection circuit included in a semiconductor device and a display device of the present invention will be described.

As shown in FIG. 19, a protection circuit 2713 can be formed between the external circuit and the internal circuit. The protection circuit is composed of one or a plurality of elements selected from a TFT, a diode, a resistance element, a capacitance element, and the like, and the configurations and operations of some protection circuits will be described below. First, a protection circuit arranged between an external circuit and an internal circuit,
A configuration of an equivalent circuit diagram of a protection circuit corresponding to one input terminal will be described with reference to FIG. The protection circuit illustrated in FIG. 19A includes p-channel thin film transistors 7220 and 7230.
, Capacitor elements 7210 and 7240, and a resistance element 7250. The resistance element 7250 is a two-terminal resistor, and an input voltage Vin (hereinafter referred to as Vin) is applied to one end, and a low potential voltage VSS (hereinafter referred to as VSS) is applied to the other end.

The protection circuit shown in FIG. 19B is an equivalent circuit diagram in which p-channel thin film transistors 7220 and 7230 are substituted with rectifying diodes 7260 and 7270. FIG. 19 (
C) shows a protection circuit in which p-channel thin film transistors 7220 and 7230 are connected to TFT 7.
It is an equivalent circuit diagram substituted with 350, 7360, 7370, 7380. Further, as a protection circuit having a structure different from the above, the protection circuit illustrated in FIG. 19D includes resistors 7280 and 7290, and
An n-channel thin film transistor 7300 is included. A protection circuit illustrated in FIG. 19E includes resistors 7280 and 7290, a p-channel thin film transistor 7310, and an n-channel thin film transistor 7320. Providing the protective circuit prevents abrupt fluctuations in potential and can prevent element destruction or damage, improving reliability. Note that the element forming the protection circuit is preferably formed using an amorphous semiconductor with excellent withstand voltage. This embodiment mode can be freely combined with the above embodiment modes.

This embodiment mode can be used in combination with each of Embodiment Modes 1 to 7.

(Embodiment 9)
A structure of a pixel of the display panel described in this embodiment will be described with reference to an equivalent circuit diagram illustrated in FIG. In this embodiment, an example in which a light-emitting element (EL element) is used as a display element of a pixel is described.

A pixel illustrated in FIG. 10A includes a signal line 710, a power supply line 711, a power supply line 712 in the column direction,
A power supply line 713 and a scanning line 714 are arranged in the row direction. The TFT 701 is a switching TFT, the TFT 703 is a driving TFT, the TFT 704 is a current control TFT, and further includes a capacitor 702 and a light emitting element 705.

The pixel shown in FIG. 10C is different from the pixel shown in FIG. 10A except that the gate electrode of the TFT 703 is connected to the power supply line 712 arranged in the row direction. is there. That is, both pixels shown in FIGS. 10A and 10C show the same equivalent circuit diagram. However, when the power supply line 712 is arranged in the column direction (FIG. 10A), the power supply line 712 is arranged in the row direction.
Is disposed (FIG. 10C), each power line is formed of a different conductive layer. Here, attention is paid to the wiring to which the gate electrode of the TFT 703 is connected, and in order to indicate that the layers for manufacturing these are different, FIGS. 10A and 10C are separately illustrated.

Note that the TFT 703 operates in a saturation region and has a role of controlling a current value flowing through the light emitting element 705, and the TFT 704 has a role of operating in a linear region and controls supply of current to the light emitting element 705. Both TFTs preferably have the same conductivity type in terms of manufacturing process. In the present invention having the above structure, since the TFT 704 operates in a linear region, a slight change in V _GS of the TFT 704 does not affect the current value of the light emitting element 705. That is, the current value of the light emitting element 705 is determined by the TFT 703 operating in the saturation region. The present invention having the above structure can provide a display device in which luminance unevenness of a light emitting element is improved and image quality is improved.

In the pixel shown in FIGS. 10A to 10D, a TFT 701 controls input of a video signal to the pixel. When the TFT 701 is turned on and a video signal is input into the pixel, the capacitor 702 The video signal is held in Note that FIGS. 10A and 10C illustrate a structure in which the capacitor 702 is provided; however, the present invention is not limited to this, and the capacity for holding a video signal can be covered by a gate capacity or the like. The capacitor 702 is not necessarily provided explicitly.

The light-emitting element 705 has a structure in which an electroluminescent layer is sandwiched between two electrodes, and a potential difference is generated between the pixel electrode and the counter electrode (between the anode and the cathode) so that a forward bias voltage is applied. Is provided. The electroluminescent layer is composed of a wide variety of materials such as organic materials and inorganic materials. The luminescence in the electroluminescent layer includes light emission (fluorescence) when returning from a singlet excited state to a ground state, and a triplet excited state. And light emission (phosphorescence) when returning to the ground state.

The pixel shown in FIG. 10B is the same as that shown in FIG. 1 except that a TFT 706 and a scanning line 716 are added.
The pixel configuration is the same as that shown in 0 (A). Similarly, the pixel shown in FIG.
6 and the scanning line 716 are added, and the pixel configuration is the same as that shown in FIG.

The TFT 706 is controlled to be turned on or off by a newly arranged scanning line 716. T
When the FT 706 is turned on, the charge held in the capacitor 702 is discharged, and the TFT 704 is turned off. That is, the arrangement of the TFT 706 can forcibly create a state in which no current flows through the light emitting element 705. 10B and 10D, the lighting period can be started at the same time as or immediately after the start of the writing period without waiting for signal writing to all pixels, so that the duty ratio is improved. It becomes possible.

In the pixel shown in FIG. 10E, a signal line 750, a power supply line 751, a power supply line 752, and a scanning line 753 are arranged in the column direction. The TFT 741 is a switching TFT, TFT
Reference numeral 743 denotes a driving TFT, which additionally includes a capacitor 742 and a light emitting element 744. FIG.
The pixel shown in FIG. 10F is the same as that in FIG. 10E except that a TFT 745 and a scanning line 754 are added.
The pixel configuration is the same as that shown in FIG. Note that the duty ratio of the structure in FIG. 10F can also be improved by the arrangement of the TFTs 745.

By using the present invention, high electrical characteristics and reliability required for a TFT can be imparted, and an applied technique for improving the display capability of a pixel in accordance with the purpose of use can be sufficiently handled.

This embodiment mode can be used in combination with each of Embodiment Modes 1 to 4 and Embodiments 6 to 8.

(Embodiment 10)
This embodiment will be described with reference to FIG. FIG. 9 shows a TFT manufactured by applying the present invention.
An example in which a light-emitting (EL) display module is formed using a substrate 2800 is shown. In FIG. 9, a pixel portion including pixels is formed over the TFT substrate 2800.

In FIG. 9, the same TFT as that formed in the pixel or the gate of the TFT and one of the source and the drain is connected between the driving circuit and the pixel outside the pixel portion, and similar to the diode. The protection circuit portion 2801 operated in the above is provided. The drive circuit 2809 is
A driver IC formed of a single crystal semiconductor, a driver IC formed of a polycrystalline semiconductor film over a glass substrate, a driver circuit, or the like is applied.

The TFT substrate 2800 includes spacers 2806a and 280 formed by a droplet discharge method.
It is fixed to the sealing substrate 2820 via 6b. The spacer is preferably provided to keep the distance between the two substrates constant even when the substrate is thin and the area of the pixel portion is increased. A light emitting element 2804 connected to the TFT 2802 and the TFT 2803, respectively.
On the light emitting element 2805, the gap between the TFT substrate 2800 and the sealing substrate 2820 may be filled with a resin material having a light-transmitting property with respect to at least visible light, and may be solidified. It may be filled with anhydrous nitrogen or inert gas.

FIG. 9 shows a case where the light-emitting element 2804, the light-emitting element 2805, and the light-emitting element 2815 are configured as an upward emission type (top emission type), and emits light in the direction of the arrow shown in the drawing. Each pixel has a different emission color with red, green and blue pixels,
Multicolor display can be performed. At this time, by forming the colored layer 2807a, the colored layer 2807b, and the colored layer 2807c corresponding to each color on the sealing substrate 2820 side, the color purity of the emitted light can be increased. Further, the colored layer 28 is formed using a pixel as a white light emitting element.
You may combine with 07a, the colored layer 2807b, and the colored layer 2807c.

A driver circuit 2809 which is an external circuit is connected to a scanning line or a signal line connection terminal provided at one end of the TFT substrate 2800 through a wiring substrate 2810. Further, a heat pipe 2813 and a heat radiating plate 2812 which are pipe-like high-efficiency heat conduction devices used for transferring heat to the outside of the device in contact with or close to the TFT substrate 2800 are provided to enhance the heat radiation effect. It is good also as a structure.

Although the top emission light emitting display module is shown in FIG. 9, it may be a bottom emission structure, of course, a double emission structure in which light is emitted from both the upper surface and the lower surface by changing the configuration of the light emitting element and the arrangement of the external circuit board. In the case of a top emission type structure, an insulating layer serving as a partition wall may be colored and used as a black matrix. The partition walls can be formed by a droplet discharge method, and may be formed by mixing a resin material such as polyimide with a pigment-based black resin, carbon black, or the like, or may be a laminate thereof.

In addition, the light emitting display module may block reflected light of light incident from the outside using a retardation plate or a polarizing plate. In the case of a top emission display device, an insulating layer serving as a partition may be colored and used as a black matrix. This partition wall can also be formed by a droplet discharge method or the like. Carbon black or the like may be mixed with a pigment-based black resin or a resin material such as polyimide, or may be laminated. A different material may be discharged to the same region a plurality of times by a droplet discharge method to form a partition wall. As retardation plate and retardation plate, λ / 4 plate and λ /
What is necessary is just to design so that light can be controlled using two plates. As a configuration, purely from the TFT element substrate side, a light emitting element, a sealing substrate (sealing material), a retardation plate, a retardation plate (λ / 4 plate, λ / 2 plate),
It becomes a structure called a polarizing plate, and the light emitted from the light emitting element passes through these and is emitted to the outside from the polarizing plate side. The retardation plate and the polarizing plate may be installed on the side from which light is emitted, and may be installed on both sides as long as the display is a double-sided emission type that emits light on both sides. Further, an antireflection film may be provided outside the polarizing plate. This makes it possible to display a higher-definition and precise image.

In the TFT substrate 2800, a sealing structure may be formed by attaching a resin film to the side where the pixel portion is formed using a sealing material or an adhesive resin. Although glass sealing using a glass substrate is described in this embodiment mode, various sealing methods such as resin sealing using a resin, plastic sealing using a plastic, and film sealing using a film can be used. A gas barrier film for preventing the permeation of water vapor may be provided on the surface of the resin film. By adopting a film sealing structure, further reduction in thickness and weight can be achieved.

In this embodiment, in the TFT 2802 and the TFT 2803, an oxide semiconductor material that is a compound semiconductor is used, and the semiconductor layer, the source electrode layer, and the drain are formed by a buffer layer interposed between the semiconductor layer, the source electrode layer, and the drain electrode layer. The conductivity with the electrode layer is improved,
A good electrical connection can be made. Accordingly, the electrical characteristics of the thin film transistor are improved, and a high-performance semiconductor device or display device can be manufactured.

Compared with other semiconductor materials such as silicon and organic semiconductor materials, a compound semiconductor such as an oxide semiconductor is less expensive and does not complicate the manufacturing process, so that a semiconductor device can be manufactured at low cost. . In addition, since a transparent semiconductor material such as an oxide semiconductor has little absorption of visible light, a thin film transistor with excellent light resistance in which unnecessary photoexcited carriers are not generated even when light enters the channel portion of the semiconductor layer. Can do. Therefore, a high-performance and high-reliability semiconductor device or display device that can operate at high speed can be manufactured.

This embodiment mode can be used in combination with each of Embodiment Modes 1 to 4 and Embodiments 6 to 9.

(Embodiment 11)
This embodiment will be described with reference to FIGS. 16A and 16B. FIGS. 16A and 16B illustrate an example in which a liquid crystal display module is formed using a TFT substrate 2600 manufactured by applying the present invention.

FIG. 16A shows an example of a liquid crystal display module, which includes a TFT substrate 2600 and a counter substrate 2.
601 is fixed by a sealant 2602, and a pixel portion 2603 and a liquid crystal layer 2604 are provided therebetween to form a display region. The colored layer 2605 is necessary for color display. In the case of the RGB method, a colored layer corresponding to each color of red, green, and blue is provided corresponding to each pixel. On the outside of the TFT substrate 2600 and the counter substrate 2601, polarizing plates 2606, 2607,
A lens film 2613 is provided. The light source includes a cold cathode tube 2610 and a reflection plate 2611, and the circuit board 2612 includes a wiring circuit 2608 and a flexible wiring board 2609.
Is connected to the TFT substrate 2600, and external circuits such as a control circuit and a power supply circuit are incorporated. Liquid crystal display modules include TN (Twisted Nematic) mode, IPS (In-Plane-Switching) mode, MVA (Multi-
domain Vertical Alignment mode, ASM (Axial)
(y Symmetric aligned Micro-cell) mode, OCB mode, etc. can be used.

In particular, a display device manufactured according to the present invention can have higher performance by using an OCB mode capable of high-speed response. FIG. 16B is an example in which the OCB mode is applied to the liquid crystal display module of FIG. 16A, and an FS-LCD (Field sequential) is shown.
-LCD). The FS-LCD emits red light, green light, and blue light in one frame period, and can perform color display by combining images using time division. Further, since each light emission is performed by a light emitting diode or a cold cathode tube, a color filter is unnecessary. Therefore, since it is not necessary to arrange the color filters of the three primary colors, the same area can be used.
Double pixels can be displayed. On the other hand, since three colors of light are emitted in one frame period, a high-speed response of the liquid crystal is required. When the FS mode and the OCB mode are applied to the display device of the present invention, a display device or a liquid crystal television device with higher performance and higher image quality can be completed.

The liquid crystal layer in the OCB mode has a so-called π cell structure. The π cell structure is a structure in which the pretilt angles of liquid crystal molecules are aligned in a plane-symmetric relationship with respect to the center plane between the active matrix substrate and the counter substrate. The alignment state of the π cell structure is splay alignment when no voltage is applied between the substrates, and shifts to bend alignment when a voltage is applied. When a voltage is further applied, the bend-aligned liquid crystal molecules are aligned perpendicularly to both substrates, and light is transmitted. In the OCB mode, high-speed response that is about 10 times faster than the conventional TN mode can be realized.

In addition, as a mode corresponding to the FS system, a ferroelectric liquid crystal (FLC: FLC) capable of high-speed operation.
HV-FLC using Ferroelectric Liquid Crystal),
SS-FLC can also be used. In the OCB mode, nematic liquid crystal having a relatively low viscosity is used, and smectic liquid crystal is used in HV-FLC and SS-FLC. As a liquid crystal material, materials such as FLC, nematic liquid crystal, and smectic liquid crystal may be used. it can.

In addition, the high-speed optical response speed of the liquid crystal display module is increased by narrowing the cell gap of the liquid crystal display module. The speed can also be increased by reducing the viscosity of the liquid crystal material. The increase in speed is more effective when the pixel in the pixel region of the TN mode liquid crystal display module or the dot pitch is 30 μm or less.

The liquid crystal display module in FIG. 16B is a transmissive liquid crystal display module, and a red light source 2910a, a green light source 2910b, and a blue light source 2910c are provided as light sources. The light source is provided with a controller 2912 for controlling on / off of the red light source 2910a, the green light source 2910b, and the blue light source 2910c. By the control unit 2912,
Light emission of each color is controlled, light is incident on the liquid crystal, an image is synthesized using time division, and color display is performed.

In this embodiment, an oxide semiconductor material that is a compound semiconductor is used for a semiconductor layer, and the semiconductor layer, the source electrode layer, and the drain electrode layer are separated by a buffer layer interposed between the semiconductor layer, the source electrode layer, and the drain electrode layer. The conductivity is improved, and an excellent electrical connection can be made. Accordingly, the electrical characteristics of the thin film transistor are improved, and a high-performance semiconductor device or display device can be manufactured.

Compared with other semiconductor materials such as silicon and organic semiconductor materials, a compound semiconductor such as an oxide semiconductor is less expensive and does not complicate the manufacturing process, so that a semiconductor device can be manufactured at low cost. . In addition, since a transparent semiconductor material such as an oxide semiconductor has little absorption of visible light, a thin film transistor with excellent light resistance in which unnecessary photoexcited carriers are not generated even when light enters the channel portion of the semiconductor layer. Can do. Therefore, a high-performance and high-reliability semiconductor device or display device that can operate at high speed can be manufactured.

In this embodiment, the first to third embodiments, the fifth embodiment, the seventh embodiment, and the eighth embodiment.
Can be used in combination with each other.

(Embodiment 12)
A television device can be completed with the display device formed according to the present invention. FIG. 20 is a block diagram illustrating a main configuration of the television device. In the display panel, only the pixel portion 601 is formed as shown in FIG. 17A, and the scan line side driver circuit 603 and the signal line side driver circuit 602 have a TAB method as shown in FIG. , A case where it is mounted by the COG method as shown in FIG.
As shown in FIG. 17B, when a TFT is formed, the pixel portion 601 and the scanning line side driver circuit 603 are integrally formed on the substrate, and the signal line side driver circuit 602 is separately mounted as a driver IC.
As shown in C), the pixel portion 601, the signal line side driver circuit 602, and the scanning line side driver circuit 603 may be integrally formed on the substrate, but any form may be employed.

As other external circuit configurations, on the input side of the video signal, among the signals received by the tuner 604, the video signal amplifier circuit 605 that amplifies the video signal, and the signals output from the video signal amplifier circuit 605 are red, green, and blue colors. And a control circuit 607 for converting the video signal into the input specification of the driver IC. The control circuit 607 outputs signals to the scanning line side and the signal line side, respectively. In the case of digital driving, a signal dividing circuit 608 may be provided on the signal line side and an input digital signal may be divided into m pieces and supplied.

Of the signals received by the tuner 604, the audio signal is sent to the audio signal amplification circuit 609, and the output is supplied to the speaker 613 through the audio signal processing circuit 610. The control circuit 611 receives control information on the receiving station (reception frequency) and volume from the input unit 612 and receives the tuner 60.
4 and the audio signal processing circuit 610.

These liquid crystal display modules and EL display modules can be assembled in a housing as shown in FIGS. 21A and 21B to complete a television device. E as shown in FIG.
When the L display module is used, the EL television device can be completed. When the liquid crystal display module as shown in FIGS. 16A and 16B is used, the liquid crystal television device can be completed.
A main screen 2003 is formed by the display module, and the speaker unit 2 is provided as other accessory equipment.
009, an operation switch and the like are provided. Thus, a television device can be completed according to the present invention.

A display panel 2002 is incorporated in the housing 2001, and a television broadcast is received by the receiver 2005, and connected to a wired or wireless communication network via the modem 2004, so that one direction (sender to receiver) or Bidirectional information communication (between the sender and the receiver or between the receivers) can also be performed. The television device can be operated by a switch incorporated in the housing or a separate remote control device 2006, and the remote control device 2006 also includes a display unit 2007 for displaying information to be output. good.

In addition, the television device may have a configuration in which a sub screen 2008 is formed using the second display panel in addition to the main screen 2003 to display channels, volume, and the like. In this configuration, the main screen 2003 may be formed using an EL display panel with an excellent viewing angle, and the sub screen may be formed using a liquid crystal display panel that can display with low power consumption. In order to prioritize the reduction in power consumption, the main screen 2003 may be formed using a liquid crystal display panel, the sub screen may be formed using an EL display panel, and the sub screen may blink. When the present invention is used, a highly reliable display device can be obtained even when such a large substrate is used and a large number of TFTs and electronic components are used.

FIG. 21B illustrates a television device having a large display portion of 20 to 80 inches, for example, which includes a housing 2010, a display portion 2011, a remote control device 2012 that is an operation portion, a speaker portion 2013, and the like. The present invention is applied to manufacture of the display portion 2011. The television device in FIG. 21B is a wall-hanging type and does not require a large installation space.

Of course, the present invention is not limited to a television device, but can be applied to various uses such as a monitor for a personal computer, an information display board in a railway station or airport, an advertisement display board in a street, etc. can do.

A television device to which the present invention is applied can perform high-speed operation, and can have high performance and high reliability. In addition, because it can be manufactured at low cost, it can be used in outdoor environments such as information display panels at railway stations and airports, and advertisement display panels in the street, where wear and deterioration are fast, and frequent replacement is required. In some cases, it can be purchased at a low price.

Compared with other semiconductor materials such as silicon and organic semiconductor materials, a compound semiconductor such as an oxide semiconductor is less expensive and does not complicate the manufacturing process, so that a semiconductor device can be manufactured at low cost. . In addition, since a transparent semiconductor material such as an oxide semiconductor has little absorption of visible light, a thin film transistor with excellent light resistance in which unnecessary photoexcited carriers are not generated even when light enters the channel portion of the semiconductor layer. Can do. Therefore, a high-performance and high-reliability semiconductor device or display device that can operate at high speed can be manufactured.

(Embodiment 13)
Various display devices can be manufactured by applying the present invention. That is, the present invention can be applied to various electronic devices in which these display devices are incorporated in a display portion.

Such electronic devices include cameras such as video cameras and digital cameras, projectors, head mounted displays (goggles type displays), car navigation systems, car stereos, personal computers, game machines, personal digital assistants (mobile computers, mobile phones or E-books) and image playback devices equipped with recording media (specifically Digital
And a device equipped with a display capable of reproducing a recording medium such as a Versatile Disc (DVD) and displaying the image thereof. Examples thereof are shown in FIG.

The present invention can be used for the display portion of the electronic device shown in FIGS. The light-emitting display device shown in Embodiment 4, the light-emitting display module shown in Embodiment 10 having the same,
A display portion (a display portion that performs display using a light-emitting element or a display that performs display using a liquid crystal element) includes the liquid crystal display device described in Embodiment 5 and the liquid crystal display module illustrated in Embodiment 11 that includes the liquid crystal display device. Part) can be formed. As described in the above embodiment mode, when the present invention is applied, a display portion can be formed with low yield and high yield. In addition, the manufactured electronic device can have high performance and high reliability.

FIG. 22A illustrates a personal computer, which includes a main body 2101, a housing 2102, a display portion 2103, a keyboard 2104, an external connection port 2105, and a pointing mouse 21.
Including 06. The present invention can be applied to manufacture of the display portion 2103, and high performance and high reliability can be achieved. Further, since a high aperture ratio can be obtained in the display portion, a clear and bright display can be enjoyed even when the display portion is mounted on a display portion of a small electronic device.

FIG. 22B shows an image reproducing device (specifically, a DVD reproducing device) provided with a recording medium.
A main body 2201, a housing 2202, a display portion A 2203, a display portion B 2204, a recording medium (DVD
Etc.) A reading unit 2205, an operation key 2206, a speaker unit 2207, and the like are included. Display part A
2203 mainly displays image information, and the display portion B2204 mainly displays character information. However, the present invention can be applied to the production of the display portion A2203 and the display portion B2204, and can have high performance and high reliability. It becomes. Further, since a high aperture ratio can be obtained in the display portion, a clear and bright display can be enjoyed even when the display portion is mounted on a display portion of a small electronic device.

FIG. 22C illustrates a mobile phone, which includes a main body 2301, an audio output unit 2302, and an audio input unit 230.
3, a display portion 2304, an operation switch 2305, an antenna 2306, and the like. By applying the display device manufactured according to the present invention to the display portion 2304, high performance and high reliability can be achieved. Further, since a high aperture ratio can be obtained in the display portion, a clear and bright display can be enjoyed even when the display portion is mounted on a display portion of a small electronic device.

FIG. 22D illustrates a video camera, which includes a main body 2401, a display portion 2402, a housing 2403,
External connection port 2404, remote control receiver 2405, image receiver 2406, battery 240
7, voice input unit 2408, operation key 2409, and the like. The present invention can be applied to the display portion 2402. By applying the display device manufactured according to the present invention to the display portion 2304, high performance and high reliability can be achieved. Further, since a high aperture ratio can be obtained in the display portion, a clear and bright display can be enjoyed even when the display portion is mounted on a display portion of a small electronic device.

FIG. 22E illustrates a digital player, which includes a main body 2501, a display portion 2502, operation keys 2503, a recording medium 2504, an earphone 2506 that is a small device for converting an electrical signal into an acoustic signal, and the like. A digital player shown in FIG. 22E has a function of recording and reproducing sound (music) and video, and a flash memory is used as a recording medium 2504.
Has a gigabyte capacity. The present invention can be applied to the display portion 2502. By applying the display device manufactured according to the present invention to the display portion 2304, high performance and high reliability can be achieved. Further, since a high aperture ratio can be obtained in the display portion, a clear and bright display can be enjoyed even when the display portion is mounted on a display portion of a small electronic device.

(Embodiment 14)
According to the present invention, a semiconductor device functioning as a chip having a processor circuit (also referred to as a wireless chip, a wireless processor, a wireless memory, or a wireless tag) can be formed. The semiconductor device of the present invention has a wide range of uses. For example, banknotes, coins, securities, certificates, bearer bonds, packaging containers, books, recording media, personal items, vehicles, foods, clothing It can be used in health supplies, daily necessities, medicines and electronic devices.

Since the semiconductor device described in any of the above embodiments (particularly, Embodiments 1 to 3) can be manufactured at low cost, a chip including a processor circuit using the semiconductor device can also be manufactured at low cost. In this case, a chip having a disposable (non-reusable) processor circuit can be provided at a low price, for example, when hygiene is taken into consideration in the medical field or food field. In addition, when the present invention is used, a transparent semiconductor device having a light-transmitting property can be manufactured. Therefore, even if a chip having a processor circuit is provided in various articles as described above, the appearance of the component is disturbed. There is an effect that does not impair the beauty.

Banknotes and coins are money that circulates in the market, and include those that are used in the same way as money in a specific area (cash vouchers), commemorative coins, and the like. Securities refer to checks, securities, promissory notes, and the like, and can be provided with a chip 190 including a processor circuit (see FIG. 24A). The certificate refers to a driver's license, a resident's card, and the like, and a chip 191 including a processor circuit can be provided (see FIG. 24B). Personal belongings refer to bags, glasses, and the like, and can be provided with a chip 197 including a processor circuit (see FIG. 24C). Bearer bonds refer to stamps, gift cards, and various gift certificates. Packaging containers refer to wrapping paper such as lunch boxes, plastic bottles, and the like, and can be provided with a chip 193 having a processor circuit (FIG. 24).
(See (D)). Books refer to books, books, and the like, and can be provided with a chip 194 including a processor circuit (see FIG. 24E). A recording medium refers to DVD software, a video tape, or the like, and can be provided with a chip 195 including a processor circuit (see FIG. 24F). The vehicles refer to vehicles such as bicycles, ships, etc., and a chip 196 having a processor circuit.
Can be provided (see FIG. 24G). Foods refer to food products, beverages, and the like. Clothing refers to clothing, footwear, and the like. Health supplies refer to medical equipment, health equipment, and the like. Livingware refers to furniture, lighting equipment, and the like. Chemicals refer to pharmaceuticals, agricultural chemicals, and the like. Electronic devices refer to liquid crystal display devices, EL display devices, television devices (TV receivers, flat-screen TV receivers), mobile phones, and the like.

Forgery can be prevented by providing a chip having a processor circuit on bills, coins, securities, certificates, bearer bonds, and the like. In addition, by installing chips with processor circuits in personal items such as packaging containers, books, recording media, personal items, foods, daily necessities, electronic devices, etc., the efficiency of inspection systems and rental store systems can be improved. Can be planned. By providing a chip having a processor circuit to vehicles, health supplies, medicines, and the like, counterfeiting and theft can be prevented, and medicines can prevent mistakes in taking medicine. As a method for providing a chip having a processor circuit, the chip is provided on the surface of an article or embedded in the article. For example, a book may be embedded in paper, and a package made of an organic resin may be embedded in the organic resin.

Further, by applying a chip having a processor circuit that can be formed according to the present invention to an object management or distribution system, the function of the system can be enhanced. For example, by reading information recorded on a chip having a processor circuit provided on a tag with a reader / writer provided on the side of the belt conveyor, information such as a distribution process and a delivery destination is read out. Package distribution can be performed easily.

2 shows a structure of a chip having a processor circuit that can be formed according to the present invention.
3 will be described. A chip having a processor circuit is formed of a thin film integrated circuit 9303 and an antenna 9304 connected thereto. Further, the thin film integrated circuit and the antenna are sandwiched between cover materials 9301 and 9302. The thin film integrated circuit 9303 may be bonded to the cover material with an adhesive. In FIG. 23, one thin film integrated circuit 9303 is bonded to a cover material 9301 with an adhesive 9320 interposed therebetween.

The thin film integrated circuit 9303 is peeled off by a peeling step and provided on the cover material. The thin film transistor in this embodiment is a channel protection type inverted staggered thin film transistor. In the thin film transistor of this embodiment, an oxide semiconductor layer that is a compound semiconductor is used for the semiconductor layers 9323a and 9323b. A buffer layer 9321a is provided between the source or drain electrode layer 9324a and the semiconductor layer 9323a, and a buffer layer 9321b is provided between the source or drain electrode layer 9324b and the semiconductor layer 9323a. Similarly, a buffer layer 9322a is provided between the source or drain electrode layer 9325a and the semiconductor layer 9323b, and a buffer layer 9322b is provided between the source or drain electrode layer 9325b and the semiconductor layer 9323b. ing. Buffer layer 9321
a, the buffer layer 9321b, the buffer layer 9322a, and the buffer layer 9322b are conductive layers that include an organic compound and an inorganic compound. Therefore, the buffer layer 9321a, the buffer layer 9321b, the buffer layer 9322a, and the buffer layer 9322b can be a source or drain electrode layer 9324a and a semiconductor layer 9323a, a source or drain electrode layer 9324b and a semiconductor layer 9323a, and a source or drain electrode. Electrode layer 9325a
The semiconductor layer 9323b, the source or drain electrode layer 9325b, and the semiconductor layer 93.
Each contact 23b has a low contact resistance, and a good electrical connection can be made. Accordingly, the electrical characteristics of the thin film transistor are improved, and a high-performance semiconductor device or display device can be manufactured. In addition, the buffer layer 9321a and the buffer layer 9321b, and the buffer layer 932
2a and the buffer layer 9322b are formed using materials capable of imparting necessary electrical characteristics to the thin film transistor. Further, a semiconductor element used for the thin film integrated circuit 9303 is not limited thereto, and for example, a memory element, a diode, a photoelectric conversion element, a resistance element, a coil, a capacitor element, an inductor, or the like can be used in addition to the TFT.

As shown in FIG. 23, an interlayer insulating film 9311 is formed over the TFT of the thin film integrated circuit 9303, and an antenna 9304 connected to the TFT through the interlayer insulating film 9311 is formed. On the interlayer insulating film 9311 and the antenna 9304, the barrier film 9 made of a silicon nitride film or the like is used.
312 is formed.

The antenna 9304 discharges a droplet including a conductor such as gold, silver, or copper by a droplet discharge method.
It is formed by drying and baking. By forming the antenna by a droplet discharge method, the number of steps can be reduced, and the cost can be reduced accordingly.

Cover materials 9301 and 9302 are films (polypropylene, polyester, vinyl,
(Made of polyvinyl fluoride, vinyl chloride, etc.), paper made of fibrous materials, base film (polyester, polyamide, inorganic vapor deposition film, paper, etc.), and adhesive synthetic resin film (acrylic synthetic resin, epoxy type) A laminated film with a synthetic resin or the like is preferably used. The film is bonded and bonded to the object by thermocompression bonding, and the adhesive layer provided on the outermost surface of the film or the layer provided on the outermost layer (not the adhesive layer) is subjected to heat treatment. Melt and bond with pressure.

Further, by using an incineration-free pollution material such as paper, fiber, carbon graphite or the like for the cover material, it is possible to incinerate or cut a chip having a used processor circuit.
Further, a chip having a processor circuit using these materials does not generate toxic gas even if it is incinerated, and is therefore pollution-free.

In FIG. 23, a chip having a processor circuit is provided on the cover material 9301 through an adhesive 9320. However, instead of the cover material 9301, a chip having a processor circuit may be attached to an article. .

(Embodiment 15)
As an example of this embodiment, an example in which the semiconductor device described in any of Embodiments 1 to 3 is applied to a flexible display device is described with reference to FIGS.

The display device of the present invention illustrated in FIG. 26 may be included in a housing, and includes a main body 610, a pixel portion 611 for displaying an image, a driver IC 612, a receiving device 613, a film battery 614, and the like. The driver IC and the receiving device may be mounted using semiconductor parts. In the display device of the present invention, a material constituting the main body 610 is formed of a flexible material such as a plastic or a film.

Such a display device of the present invention is a display device with a high aperture ratio, and has a low driving voltage and low power consumption. In addition, since the number of elements to be manufactured is smaller than that of a display device using a light-emitting element, the display device can be easily manufactured with high yield. By forming the pixel portion using the thin film transistor to which the present invention is applied which is manufactured in Embodiment Modes 1 to 3, a display device can be manufactured more easily and reliability can be improved.

In addition, since such a display device is very light and flexible, it can be rolled into a cylindrical shape, and is a display device that is very advantageous to carry. The display device of the present invention can freely carry a large-screen display medium.

Note that the display device shown in FIG. 26 includes a navigation system, a sound playback device (car audio, audio component, etc.), a personal computer, a game machine, a portable information terminal (mobile computer, mobile phone, portable game machine, electronic book, etc.) ) In addition to home appliances such as refrigerators, washing machines, rice cookers, landline telephones, vacuum cleaners and thermometers, to large-area information displays such as hanging advertisements in trains, arrival and departure information on railway stations and airports, etc. It can be used mainly as a means for displaying still images.

As described above, the preferred embodiments of the present invention have been particularly shown. However, it is easy for those skilled in the art to modify the embodiments and details in various ways without departing from the spirit and scope of the present invention. To be understood.

In this embodiment, an example of a method for manufacturing a coplanar thin film transistor having a bottom gate structure to which the present invention is applied will be described. 1A is used for the drawing. However, the present invention should not be construed as being limited to the description of the embodiments.

A gate electrode layer 51 is formed on the substrate 50. In this embodiment, a glass substrate is used as the substrate 50, washed with pure water and dried, and then a conductive film is formed to a thickness of 150 nm on the substrate 50 by sputtering using tungsten. The conductive film is processed into a desired shape using a resist mask formed over the conductive film, and the gate electrode layer 51 is formed. In this embodiment, the processing is performed by dry etching. After forming the gate electrode layer 51, ashing with oxygen on the mask (ashing conditions: O ₂ flow rate 300 sccm, 66.5 Pa, power 1800 W)
For 2 minutes).

A gate insulating layer 52 is formed over the gate electrode layer 51. In this embodiment, a silicon nitride film containing oxygen is formed by a CVD method. Although not shown in FIG. 1A, an opening is formed so that the gate electrode layer and the source or drain electrode layer are connected like the opening 125 shown in FIG. In this embodiment, a resist mask is formed on the gate insulating layer 52, and the opening 125 is formed by dry etching. Etching conditions are an etching gas CHF ₃ (flow rate 35 sccm), a pressure 25 mTorr, and a power 500 W for about 170 seconds. In this embodiment, the mask is ashed with oxygen (ashing condition: 0.5 Torr, power 2
00W for 15 seconds). The gate insulating layer 52 of this example has a film thickness of 115 nm.
And A hydrofluoric acid treatment (for 30 seconds) is performed to remove the oxide film formed over the gate insulating layer 52, and the source or drain electrode layer 53a and the source or drain electrode layer 53b are formed over the gate insulating layer 52. To do. In this embodiment, a conductive film (molybdenum film) with a thickness of 200 nm is formed over the gate insulating layer 52 by a sputtering method using molybdenum.
The forming conditions were as follows: a power of 1.5 kW and a pressure of 0.4 Pascal (Pa
), Argon (flow rate 30 sccm) atmosphere. In this embodiment, a conductive film obtained by a sputtering method is formed into a desired shape by wet etching using an acid as an etchant after forming a mask, and the source or drain electrode layer 53a and the source electrode layer or A drain electrode layer 53b is formed.

Source electrode layer or drain electrode layer 53 a and source electrode layer or drain electrode layer 53
A buffer layer 54a and a buffer layer 54b which are conductive layers containing an organic compound and an inorganic compound are formed on b. In this embodiment, the buffer layer 404a and the buffer layer 404b
The film is formed by a co-evaporation method using molybdenum oxide as the inorganic compound and DNTPD as the organic compound. As film forming conditions, the degree of vacuum is about 1 × 10 ⁻⁴ Pa and the mass mixing ratio is 1:
A film is formed by an evaporation method of about 50 nm while adjusting the film formation rate to be 1.

A semiconductor layer 55 is formed over the buffer layer 54a and the buffer layer 54b. In the present embodiment, a pressure of 0.4 Pa, argon (flow rate 50 sc) is formed by sputtering using zinc oxide.
cm) and oxygen (5 sccm), and a film thickness of 100 nm is formed. In this embodiment, the etching process is performed for 130 seconds by wet etching using hydrofluoric acid as an etchant. In this embodiment, the shape of the semiconductor layer 55 is formed by processing a shape using a metal mask when forming a semiconductor film by a sputtering method, forming a mask made of resist on the semiconductor film to be formed, and etching using the mask. Is processed. After the semiconductor layer 55 is formed, ashing with oxygen is applied to the mask (ashing conditions: O ₂ flow rate 300 sccm, 66.5 Pa, power 1800
W and remove for 3 minutes).

Through the above process, a coplanar thin film transistor with a bottom gate structure to which the present invention is applied as shown in FIG. 1A can be manufactured.

In this example, the conductivity between the semiconductor layer, the source electrode layer, and the drain electrode layer is improved by the buffer layer interposed between the semiconductor layer using the oxide semiconductor layer and the source electrode layer and the drain electrode layer. A good electrical connection can be made. Accordingly, the electrical characteristics of the thin film transistor are improved, and a high-performance semiconductor device or display device can be manufactured.

In addition, the oxide semiconductor layer is less expensive and does not complicate the manufacturing process than other semiconductor materials such as silicon and organic semiconductor materials; thus, a semiconductor device can be manufactured at low cost. In addition, since a transparent semiconductor such as zinc oxide used for the oxide semiconductor layer in this embodiment has little visible light absorption, unnecessary photoexcited carriers are not generated even when light enters the channel portion of the semiconductor layer. A thin film transistor with excellent properties can be manufactured. Therefore,
A high-performance and high-reliability semiconductor device or display device capable of high-speed operation can also be manufactured.

In this embodiment, an example of a method for manufacturing a planar thin film transistor having a top gate structure to which the present invention is applied will be described. 3A is used for the drawing. However, the present invention should not be construed as being limited to the description of the embodiments.

An insulating layer 407 is formed over the substrate 400, and a semiconductor layer 405 is formed over the insulating layer 407. In this embodiment, a glass substrate is used as the substrate 400, and after cleaning and drying with pure water, the insulating layer 407 is formed. Over the insulating layer 407, the semiconductor layer 405 is formed using zinc oxide which is an oxide semiconductor. Then, a film thickness of 100 nm is formed by a sputtering method in an atmosphere of pressure 0.4 Pa, argon (flow rate 50 sccm) and oxygen (5 sccm). In this embodiment, the etching process is performed for 130 seconds by wet etching using hydrofluoric acid as an etchant. In this embodiment, the shape of the semiconductor layer 405 is formed by processing a shape using a metal mask when forming a semiconductor film by a sputtering method, forming a resist mask on the semiconductor film to be formed, and etching using the mask. Is processed. After the semiconductor layer 405 is formed, ashing with oxygen is applied to the mask (ashing conditions: O ₂ flow rate 300 sccm, 66.5 Pa, power 1800 W, 3
To remove).

A channel protective layer 406 made of a silicon oxide film is formed over the semiconductor layer 405 by a sputtering method, and a buffer layer 404a and a buffer layer 404b are formed. In this embodiment, the buffer layer 404a and the buffer layer 404b are formed by a co-evaporation method using molybdenum oxide as an inorganic compound and DNTPD as an organic compound. As film formation conditions, the degree of vacuum is 1 ×
The film is formed by an evaporation method of about 50 nm while adjusting the film formation rate so that the mass mixing ratio is 1: 1 at about 10 ⁻⁴ Pa.

The source or drain electrode layer 4 is formed on the buffer layer 404a and the buffer layer 404b.
03a and a source or drain electrode layer 403b are formed. In this embodiment, the source or drain electrode layer 403a and the source or drain electrode layer 403b are formed to a thickness of 70 to 100 nm on the buffer layer 404a and the buffer layer 404b by vapor deposition using aluminum. In this embodiment, the buffer layer 404a and the buffer layer 404b
After forming the film, a film is formed by a vapor deposition method under vacuum without opening the chamber to the atmosphere (the film forming rate is 0.5 to 1.0 nm / Sec). In this embodiment, the source or drain electrode layer 403a and the source or drain electrode layer 403b are formed in a desired shape using a metal mask during evaporation.

A gate insulating layer 402 is formed over the channel protective layer 406, the source or drain electrode layer 403a, and the source or drain electrode layer 403b. In this embodiment, a silicon nitride film containing oxygen is formed by a CVD method. Although not shown in FIG. 3A, the opening 1 shown in FIG.
As in FIG. 25, an opening is formed to connect the gate electrode layer and the source or drain electrode layer. In this embodiment, a resist mask is formed over the gate insulating layer 402, and
Openings are formed using dry etching. Etching conditions are etching gas CHF ₃
(Flow rate 35 sccm), pressure 25 mTorr, power 500 W, about 170 seconds.
In this embodiment, the mask is removed by ashing with oxygen (ashing conditions: 0.5 Torr, power 200 W, 15 seconds). The gate insulating layer 402 in this embodiment has a thickness of 11
5 nm.

A hydrofluoric acid treatment (for 30 seconds) is performed, the oxide film formed over the gate insulating layer 402 is removed, and the gate electrode layer 401 is formed over the gate insulating layer 402. In this embodiment, a conductive film with a thickness of 150 nm is formed using tungsten by a sputtering method. The gate electrode layer 401 is formed by processing the conductive film into a desired shape using a resist mask formed over the conductive film. In this embodiment, the processing is performed by dry etching. After the gate electrode layer 401 is formed, ashing with oxygen is applied to the mask (ashing conditions: O ₂ flow rate 300 sccm, 66.
5 Pa, power 1800 W, 2 minutes).

Through the above steps, a planar gate type thin film transistor to which the present invention is applied as shown in FIG. 3A can be manufactured.

In this example, the conductivity between the semiconductor layer, the source electrode layer, and the drain electrode layer is improved by the buffer layer interposed between the semiconductor layer using the oxide semiconductor layer and the source electrode layer and the drain electrode layer. A good electrical connection can be made. Accordingly, the electrical characteristics of the thin film transistor are improved, and a high-performance semiconductor device or display device can be manufactured.

In addition, the oxide semiconductor layer is less expensive and does not complicate the manufacturing process than other semiconductor materials such as silicon and organic semiconductor materials; thus, a semiconductor device can be manufactured at low cost. In addition, since a transparent semiconductor such as zinc oxide used for the oxide semiconductor layer in this embodiment has little visible light absorption, unnecessary photoexcited carriers are not generated even when light enters the channel portion of the semiconductor layer. A thin film transistor with excellent properties can be manufactured. Therefore,
A high-performance and high-reliability semiconductor device or display device capable of high-speed operation can also be manufactured.

Claims (9)

An oxide semiconductor layer containing zinc oxide, indium oxide, and gallium oxide is formed by a sputtering method,
Etching the oxide semiconductor layer by ICP etching,
A channel formation region provided in the oxide semiconductor layer is electrically connected to the source electrode layer and the drain electrode layer through a region having conductivity for reducing contact resistance;
The method for manufacturing a semiconductor device, wherein the channel formation region overlaps with a gate electrode layer with a gate insulating layer interposed therebetween. An oxide semiconductor layer containing zinc oxide is formed by a sputtering method,
Etching the oxide semiconductor layer by ICP etching,
A channel formation region provided in the oxide semiconductor layer is electrically connected to the source electrode layer and the drain electrode layer through a region having conductivity for reducing contact resistance;
The method for manufacturing a semiconductor device, wherein the channel formation region overlaps with a gate electrode layer with a gate insulating layer interposed therebetween. An oxide semiconductor layer containing indium oxide and zinc oxide is formed by a sputtering method,
Etching the oxide semiconductor layer by ICP etching,
A channel formation region provided in the oxide semiconductor layer is electrically connected to the source electrode layer and the drain electrode layer through a region having conductivity for reducing contact resistance;
The method for manufacturing a semiconductor device, wherein the channel formation region overlaps with a gate electrode layer with a gate insulating layer interposed therebetween. An oxide semiconductor layer containing zinc oxide doped with gallium is formed by a sputtering method,
Etching the oxide semiconductor layer by ICP etching,
A channel formation region provided in the oxide semiconductor layer is electrically connected to the source electrode layer and the drain electrode layer through a region having conductivity for reducing contact resistance;
The method for manufacturing a semiconductor device, wherein the channel formation region overlaps with a gate electrode layer with a gate insulating layer interposed therebetween.   5. The method for manufacturing a semiconductor device according to claim 1, wherein the oxide semiconductor has crystallinity. An oxide semiconductor layer is formed by a sputtering method,
The crystallinity of the oxide semiconductor layer is improved by heat treatment,
Etching the oxide semiconductor layer by ICP etching,
A channel formation region provided in the oxide semiconductor layer is electrically connected to the source electrode layer and the drain electrode layer through a region having conductivity for reducing contact resistance;
The method for manufacturing a semiconductor device, wherein the channel formation region overlaps with a gate electrode layer with a gate insulating layer interposed therebetween. An oxide semiconductor layer is formed by a sputtering method,
Etching the oxide semiconductor layer by ICP etching,
The crystallinity of the oxide semiconductor layer is improved by heat treatment,
A channel formation region provided in the oxide semiconductor layer is electrically connected to the source electrode layer and the drain electrode layer through a region having conductivity for reducing contact resistance;
The method for manufacturing a semiconductor device, wherein the channel formation region overlaps with a gate electrode layer with a gate insulating layer interposed therebetween.   8. The oxide semiconductor according to claim 1, wherein the oxide semiconductor includes B, Ga, In, Tl, F, Cl, Br, I, Li, Na, K, Rb, Cs, N, P, As, and the like. A method for manufacturing a semiconductor device, wherein one or more of Sb and Bi elements are added. 9. A semiconductor device according to claim 8, wherein Cl ₂ , BCl ₃ , SiC ₄ , CCl ₄ , CF ₄ , SF ₆ , NF _3, or O ₂ is used as an etching gas used in the ICP etching method. Method.

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