JP2011085655A - Mirau type interference objective lens and microscope - Google Patents

Mirau type interference objective lens and microscope Download PDF

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JP2011085655A
JP2011085655A JP2009236473A JP2009236473A JP2011085655A JP 2011085655 A JP2011085655 A JP 2011085655A JP 2009236473 A JP2009236473 A JP 2009236473A JP 2009236473 A JP2009236473 A JP 2009236473A JP 2011085655 A JP2011085655 A JP 2011085655A
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objective lens
reference mirror
interference
optical axis
optical path
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Yasuhito Matsuba
泰人 松葉
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Nikon Corp
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Nikon Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a Mirau type interference objective lens that obtains a desired interference fringe without using an inclination stage. <P>SOLUTION: The interference objective lens includes: an objective lens system for condensing light onto the specimen surface for illuminating the specimen surface; an optical path splitting means disposed between the specimen surface and the objective lens system and configured to split the light emitted from the objective lens system into rays of light, reflect one ray of light in a direction different from the specimen surface and transmit the other ray of light in the direction of the specimen surface; a reference mirror for reflecting the light reflected by the optical path splitting means so that the light reflected by the optical path splitting means and light passed through the optical path splitting means and reflected by the specimen surface may be combined by the optical path splitting means; and a lens barrel holding the reference mirror so as to alter the angle of the reference mirror relative to a plane intersecting the optical axis of the objective lens system at right angles. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明はミロー型干渉対物レンズおよび顕微鏡に関する。   The present invention relates to a Miro type interference objective lens and a microscope.

従来、顕微鏡等で干渉観察を行うための対物レンズとして、対物レンズ内にミロー型の干渉部を組み込んだ干渉対物レンズがある（例えば、特許文献１）。   2. Description of the Related Art Conventionally, as an objective lens for performing interference observation with a microscope or the like, there is an interference objective lens in which a miro type interference unit is incorporated in the objective lens (for example, Patent Document 1).

従来の干渉対物レンズは、対物レンズ、ハーフミラーおよび参照ミラーを備えて構成されており、対物レンズを透過した照明光をハーフミラーで分割し、このハーフミラーを透過した光を標本面に照射し、また、ハーフミラーで反射した光を参照ミラーで反射させた後、標本面で反射した光はハーフミラーを透過させ、さらに、参照ミラーで反射された光はハーフミラーで反射させて対物レンズで集光することにより、これらの光を干渉させて、干渉像と物体像とを形成して標本面を観察するとともに凹凸を測定するものである。   A conventional interference objective lens includes an objective lens, a half mirror, and a reference mirror. The illumination light that has passed through the objective lens is divided by the half mirror, and the specimen surface is irradiated with the light that has passed through the half mirror. In addition, after the light reflected by the half mirror is reflected by the reference mirror, the light reflected by the sample surface is transmitted through the half mirror, and the light reflected by the reference mirror is reflected by the half mirror and is reflected by the objective lens. By condensing, these lights are made to interfere with each other to form an interference image and an object image so as to observe the sample surface and measure the unevenness.

特開平１０−１９７２１０号公報JP-A-10-197210

ミロー型干渉対物レンズを用いて標本を観察する場合、所望の干渉縞を観察可能にするために標本を傾斜させる傾角ステージを使用しなければならないということがある。   When observing a specimen using a Mirro type interference objective lens, it may be necessary to use an inclination stage that tilts the specimen in order to make it possible to observe a desired interference fringe.

本発明はこのような状況に鑑みてなされたものであり、傾角ステージを用いずに所望の干渉縞が得ることができるミロー型干渉対物レンズを提供することを課題とする。   This invention is made | formed in view of such a condition, and makes it a subject to provide the mirrow type | mold interference objective lens which can obtain a desired interference fringe without using an inclination stage.

上記課題を解決するため、本発明に係る干渉対物レンズは、対物レンズ系と、標本面と前記対物レンズ系の中の先端部との間に配置され、前記対物レンズ系から出射された照明光を分割し、一方は前記標本面とは異なる方向に反射し、他方は前記標本面の方に透過する光路分割手段と、前記光路分割手段と前記対物レンズ系の先端部との間に配置され、前記光路分割手段によって反射された前記光と、前記光路分割手段を透過し前記標本面で反射された光とが、前記光路分割手段で合さるように前記光路分割手段によって反射された前記光を反射する参照ミラーと、前記対物レンズ系の光軸と直角に交わる平面に対する前記参照ミラーの角度を変更する角度変更部とを備えていることを特徴とする。   In order to solve the above-described problems, an interference objective lens according to the present invention is disposed between an objective lens system, a specimen surface, and a tip portion of the objective lens system, and illumination light emitted from the objective lens system. Is arranged between an optical path splitting unit that reflects in a direction different from the sample plane and transmits the other toward the sample plane, and between the optical path splitting unit and the tip of the objective lens system. The light reflected by the optical path splitting means so that the light reflected by the optical path splitting means and the light transmitted through the optical path splitting means and reflected by the sample surface are combined by the optical path splitting means. And a reference angle mirror for changing the angle of the reference mirror with respect to a plane perpendicular to the optical axis of the objective lens system.

本発明によれば、傾角ステージを用いずに所望の干渉縞が得ることができるミロー型干渉対物レンズを提供することができる。   According to the present invention, it is possible to provide a Miro type interference objective lens capable of obtaining a desired interference fringe without using an inclination stage.

実施形態に係るミロー型干渉対物レンズの全体の構成を示す断面図である。It is sectional drawing which shows the whole structure of the Millo type | mold interference objective lens which concerns on embodiment. （ａ）は参照ミラーを保持する保持枠の側面図であり、（ｂ）は保持枠を像側から見た図である。(A) is the side view of the holding frame holding a reference mirror, (b) is the figure which looked at the holding frame from the image side. 図３（ａ）は干渉部鏡筒１９の光軸方向の断面図であり、（ｂ）は図３（ａ）のＸ−Ｘ線の断面を矢印方向から見た図である。3A is a cross-sectional view of the interference lens barrel 19 in the optical axis direction, and FIG. 3B is a cross-sectional view taken along line XX in FIG. 参照ミラー収容部に形成されたねじ孔部分近傍の拡大図である。It is an enlarged view of the screw hole part vicinity formed in the reference mirror accommodating part.

以下、本発明の実施形態について図面を参照しつつ説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図１は、本発明の実施形態に係るミロー型干渉対物レンズの断面図である。   FIG. 1 is a cross-sectional view of a mirro interference objective lens according to an embodiment of the present invention.

本実施形態に係るミロー型干渉対物レンズは、標本の干渉観察をする正立型あるいは倒立型の同軸落射照明顕微鏡等に取付けられて使用される。なお、図１において、紙面左側が標本面側、右側が像側である。   The mirro interference objective lens according to the present embodiment is used by being attached to an upright or inverted coaxial epi-illumination microscope that performs interference observation of a specimen. In FIG. 1, the left side of the drawing is the sample surface side, and the right side is the image side.

図１に示すように、本実施形態に係るミロー型干渉対物レンズ１は、標本面４側から順に光軸Ｌに沿って、ハーフミラー７と、参照ミラー１０と、複数のレンズを有する対物レンズ系１３とを備えている。ハーフミラー７と参照ミラー１０とで干渉部１６を構成している。干渉部１６は干渉部鏡筒１９に備えられている。ハーフミラー７は環状の保持枠２２の内径側に保持されている。ハーフミラー７の保持枠２２は干渉部鏡筒１９の標本面４側の端部に固定されている。参照ミラー１０は、円形の平行平板ガラス板の中央部分のみがミラー面１０ａとなっている。参照ミラー１０のミラー面１０ａはガラス板の像側の面に形成されており、標本面４側からの光を反射するように形成されている。参照ミラー１０は環状の保持枠２５の内径側に保持され、参照ミラー１０の保持枠２５は干渉部鏡筒１９の標本面４側の端部近傍に保持されている。なお、参照ミラー１０の保持枠２５の干渉部鏡筒１９への保持機構については後で詳細に説明する。   As shown in FIG. 1, the mirro interference objective lens 1 according to this embodiment includes an objective lens having a half mirror 7, a reference mirror 10, and a plurality of lenses along the optical axis L in order from the sample surface 4 side. System 13. The half mirror 7 and the reference mirror 10 constitute an interference unit 16. The interference unit 16 is provided in the interference unit barrel 19. The half mirror 7 is held on the inner diameter side of the annular holding frame 22. The holding frame 22 of the half mirror 7 is fixed to the end of the interference unit barrel 19 on the sample surface 4 side. The reference mirror 10 has a mirror surface 10a only at the center of a circular parallel flat glass plate. The mirror surface 10a of the reference mirror 10 is formed on the image side surface of the glass plate, and is formed so as to reflect light from the sample surface 4 side. The reference mirror 10 is held on the inner diameter side of the annular holding frame 25, and the holding frame 25 of the reference mirror 10 is held in the vicinity of the end of the interference unit barrel 19 on the sample surface 4 side. The holding mechanism for holding the holding frame 25 of the reference mirror 10 to the interference unit barrel 19 will be described in detail later.

対物レンズ系１３のレンズ１３ａ、１３ｂ、１３ｃは主鏡筒２８に保持されている。最も像側のレンズ１３ｃは、主鏡筒２８の像側端部に配置されている。この位置は対物レンズ系１３に光源（図示省略）からの照明光が最初に入射される位置である。レンズ１３ｃは、主鏡筒２８の内周側に嵌合された円筒状の保持部材４０の像側端部に保持されている。円筒状の保持部材４０の像側端部は、内径がレンズ１３ｃの径に対応した環状に形成されており、レンズ１３ｃは環状部の内径側に保持されている。主鏡筒２８の標本面４側の端部には、主鏡筒２８の径方向で内側に向かって突出する鍔部３１が形成されている。最も標本面４側のレンズ１３ａは鍔部３１によって標本面４側への抜けが防止される。つまり鍔部３１はレンズ１３ａの標本面４側への抜け止めとなっている。レンズ１３ａと中央のレンズ１３ｂとの間は、円筒のスペーサ４３によって間隔が保持されている。スペーサ４３の外径は主鏡筒２８の内径とほぼ同じ寸法に形成されている。中央のレンズ１３ｂと像側のレンズ１３ｃとの間は保持部材４０によって間隔が保持されている。つまり保持部材４０はレンズ１３ｂとレンズ１３ｃとの間隔を保持するスペーサの機能を兼ねている。   The lenses 13 a, 13 b, and 13 c of the objective lens system 13 are held by the main lens barrel 28. The most image side lens 13 c is disposed at the image side end of the main barrel 28. This position is a position where illumination light from a light source (not shown) is first incident on the objective lens system 13. The lens 13 c is held at the image side end of a cylindrical holding member 40 fitted to the inner peripheral side of the main lens barrel 28. The image-side end portion of the cylindrical holding member 40 is formed in an annular shape whose inner diameter corresponds to the diameter of the lens 13c, and the lens 13c is held on the inner diameter side of the annular portion. At the end of the main barrel 28 on the sample surface 4 side, a flange 31 is formed that protrudes inward in the radial direction of the main barrel 28. The lens 13a closest to the specimen surface 4 is prevented from coming off to the specimen surface 4 side by the flange 31. That is, the collar portion 31 prevents the lens 13a from coming off to the sample surface 4 side. A space is maintained between the lens 13 a and the central lens 13 b by a cylindrical spacer 43. The outer diameter of the spacer 43 is substantially the same as the inner diameter of the main barrel 28. A distance between the central lens 13b and the image side lens 13c is maintained by a holding member 40. That is, the holding member 40 also functions as a spacer that holds the distance between the lens 13b and the lens 13c.

主鏡筒２８の像側の端部には、レボルバ（図示省略）への取付け部４６が形成されている。取付け部４６の内径は主鏡筒２８の内径とほぼ同じ大きさまたは少し大きく形成されている。取付け部４６の外周には雄ねじ４６ａが形成されており、レボルバの雌ねじ（図示省略）と螺合することで干渉対物レンズ１はレボルバに取付けられる。取付け部４６の内周側には雌ねじ４６ｂが形成されている。雌ねじ４６ｂには、押え環４９が螺合している。押え環４９は取付け部４６の像側から標本面４側に向かって螺合しており、押え環４９の標本面４側の端部は、レンズ１３ｃを保持している保持部材４０の像側端部と接触している。このように押え環４９を像側から標本面４側に向かって螺合することで、レンズ１３ａ、スペーサ４３、レンズ１３ｂ、保持部材４０およびレンズ１３ｃを主鏡筒２８の内周側で押え環４９と鍔部３１との間に固定している。   A mounting portion 46 for a revolver (not shown) is formed at the image side end of the main barrel 28. The inner diameter of the mounting portion 46 is formed to be approximately the same as or slightly larger than the inner diameter of the main lens barrel 28. A male screw 46a is formed on the outer periphery of the attachment portion 46, and the interference objective lens 1 is attached to the revolver by screwing with a female screw (not shown) of the revolver. A female screw 46 b is formed on the inner peripheral side of the attachment portion 46. A presser ring 49 is screwed into the female screw 46b. The presser ring 49 is screwed from the image side of the mounting portion 46 toward the sample surface 4 side, and the end of the presser ring 49 on the sample surface 4 side is the image side of the holding member 40 holding the lens 13c. It is in contact with the edge. In this way, the presser ring 49 is screwed from the image side toward the sample surface 4 side, so that the lens 13a, the spacer 43, the lens 13b, the holding member 40, and the lens 13c are held on the inner peripheral side of the main barrel 28. 49 and the collar 31 are fixed.

主鏡筒２８の外周側の中央部には周方向に亘って段部３４が形成されている。段部３４よりも標本面４側は外径が小さい小径部２８ａ、像側は外径が大きい大径部２８ｂとなっている。また、干渉部鏡筒１９は像側が光軸Ｌ方向に延在する円筒部１９ａとなっている。円筒部１９ａの内径は主鏡筒２８の小径部２８ａの外径とほぼ同じ大きさに形成されており、また、光軸Ｌ方向の長さも小径部２８ａの光軸Ｌ方向の長さとほぼ同じ長さに形成されている。主鏡筒２８の小径部２８ａは干渉部鏡筒１９の円筒部１９ａの内周側に嵌入されている。円筒部１９ａの像側端部は段部３４の標本面４側の面に接触している。   A step portion 34 is formed in the central portion on the outer peripheral side of the main lens barrel 28 in the circumferential direction. The sample surface 4 side of the step portion 34 is a small diameter portion 28a having a small outer diameter, and the image side is a large diameter portion 28b having a large outer diameter. Further, the interference part barrel 19 is a cylindrical part 19a whose image side extends in the optical axis L direction. The inner diameter of the cylindrical portion 19a is formed to be approximately the same as the outer diameter of the small diameter portion 28a of the main lens barrel 28, and the length in the optical axis L direction is also substantially the same as the length of the small diameter portion 28a in the optical axis L direction. It is formed in length. The small diameter portion 28 a of the main lens barrel 28 is fitted on the inner peripheral side of the cylindrical portion 19 a of the interference portion lens barrel 19. The image side end portion of the cylindrical portion 19a is in contact with the surface of the step portion 34 on the sample surface 4 side.

干渉部鏡筒１９の円筒部１９ａの像側端部には、径方向で外方に向かって突出する拡径部１９ｂが周方向に亘って形成されている。また、主鏡筒２８の大径部２８ｂの標本面４側端部には、外径側に雄ねじ３７が形成されている。干渉部鏡筒１９の円筒部１９ａの外径側には外筒５２が配置されている。外筒５２の像側端部の内周側には雌ねじ５２ａが形成されており、また、当該雌ねじ５２ａの標本面４側に隣接して段部５２ｂが周方向に亘って形成されている。段部５２ｂの断面形状は干渉部鏡筒１９の円筒部１９ａに形成された拡径部１９ｂの断面形状に対応した形状に形成されている。外筒５２は標本面４側から像側に向かって干渉部鏡筒１９に嵌め込まれ、象側端部の雌ねじ５２ａと主鏡筒２８の大径部２８ｂの雄ねじ３７とが螺合されることにより、干渉部鏡筒１９の外周側に位置するように主鏡筒２８に固定される。このとき、干渉部鏡筒１９の円筒部１９ａに形成された拡径部１９ｂと外筒５２の内周側の段部５２ｂとが係合する。この係合により、干渉部鏡筒１９の主鏡筒２８から標本面４側への抜けを防止し、かつ干渉部鏡筒１９は主鏡筒２８に対して回転可能に保持される。   An enlarged-diameter portion 19b that protrudes outward in the radial direction is formed on the image side end portion of the cylindrical portion 19a of the interference portion barrel 19 in the circumferential direction. Further, a male screw 37 is formed on the outer diameter side at the end of the large diameter portion 28b of the main barrel 28 on the sample surface 4 side. An outer cylinder 52 is disposed on the outer diameter side of the cylindrical portion 19 a of the interference unit barrel 19. A female screw 52a is formed on the inner peripheral side of the image side end portion of the outer cylinder 52, and a stepped portion 52b is formed in the circumferential direction adjacent to the sample surface 4 side of the female screw 52a. The cross-sectional shape of the stepped portion 52 b is formed in a shape corresponding to the cross-sectional shape of the enlarged diameter portion 19 b formed in the cylindrical portion 19 a of the interference portion barrel 19. The outer cylinder 52 is fitted into the interference unit barrel 19 from the specimen surface 4 side toward the image side, and the female screw 52a at the elephant side end and the male screw 37 of the large diameter part 28b of the main barrel 28 are screwed together. By this, it is fixed to the main lens barrel 28 so as to be positioned on the outer peripheral side of the interference part lens barrel 19. At this time, the enlarged diameter portion 19b formed in the cylindrical portion 19a of the interference portion barrel 19 and the stepped portion 52b on the inner peripheral side of the outer tube 52 are engaged. By this engagement, the interference portion lens barrel 19 is prevented from coming off from the main lens barrel 28 toward the sample surface 4, and the interference portion lens barrel 19 is held rotatably with respect to the main lens barrel 28.

次に、参照ミラー１０の保持枠２５の干渉部鏡筒１９への保持機構について説明する。   Next, a mechanism for holding the holding frame 25 of the reference mirror 10 to the interference unit barrel 19 will be described.

図２（ａ）は参照ミラー１０の保持枠２５の側面図であり、（ｂ）は保持枠２５を像側から見た図である。   2A is a side view of the holding frame 25 of the reference mirror 10, and FIG. 2B is a view of the holding frame 25 as viewed from the image side.

図２（ａ）、（ｂ）に示すように、保持枠２５の像側面には光軸Ｌを挟んで対向する１対の溝５５、５５が形成されている。１対の溝５５、５５は断面形状が略Ｖ字状に形成されている（以下、１対のＶ字溝５５、５５という。）。１対のＶ字溝５５、５５は、それぞれ保持枠２５の内径側から外径側まで連通し、径方向に沿って延在している。１対のＶ字溝５５、５５には、図１および図２（ａ）に示すように、それぞれ角度変更部の一部である鋼球５８、５８が配置されている。Ｖ字溝５５、５５の深さは鋼球５８、５８をＶ字溝５５、５５に入れた状態で鋼球５８、５８の中心が参照ミラー１０のミラー面１０ａと略同一面になる深さに形成されている。また、図２（ａ）に示すように、保持枠２５の外径側には、周方向に亘って断面形状が略Ｖ字状の溝（以下、周方向溝という。）６１が形成されている。   As shown in FIGS. 2A and 2B, a pair of grooves 55 and 55 are formed on the image side surface of the holding frame 25 so as to face each other with the optical axis L interposed therebetween. The pair of grooves 55 and 55 have a substantially V-shaped cross section (hereinafter referred to as a pair of V-shaped grooves 55 and 55). The pair of V-shaped grooves 55 and 55 communicate from the inner diameter side to the outer diameter side of the holding frame 25 and extend along the radial direction. As shown in FIGS. 1 and 2 (a), steel balls 58 and 58, which are part of the angle changing portion, are disposed in the pair of V-shaped grooves 55 and 55, respectively. The depth of the V-shaped grooves 55, 55 is such that the center of the steel balls 58, 58 is substantially flush with the mirror surface 10a of the reference mirror 10 when the steel balls 58, 58 are placed in the V-shaped grooves 55, 55. Is formed. Further, as shown in FIG. 2A, a groove 61 (hereinafter referred to as a circumferential groove) 61 having a substantially V-shaped cross section is formed on the outer diameter side of the holding frame 25 in the circumferential direction. Yes.

図３（ａ）は干渉部鏡筒１９の光軸方向の断面図であり、（ｂ）は図３（ａ）のＸ−Ｘ線の断面を矢印方向から見た図である。   3A is a cross-sectional view of the interference lens barrel 19 in the optical axis direction, and FIG. 3B is a cross-sectional view taken along line XX in FIG.

図３（ａ）、（ｂ）に示すように、干渉部鏡筒１９は全体が略円筒形状に形成されている。干渉部鏡筒１９の像側は円筒部１９ａとなっており、主鏡筒２８の小径部２８ａが嵌入される（図１参照）。また、標本面４側には保持枠２２に保持されたハーフミラー７を固定するハーフミラー固定部６４と、保持枠２５に保持された参照ミラー１０を収容する参照ミラー収容部６７とが設けられている。ハーフミラー固定部６４は内径側に雌ねじ６４ａが形成されており、ハーフミラー７の保持枠２２の外径側に形成された雄ねじと螺合することでハーフミラー７の保持枠２２が固定される。参照ミラー収容部６７と円筒部１９ａとの間は、光路を周方向に囲んで環状壁７０が形成されている。環状壁７０は、参照ミラー１０を収容した状態において、保持枠２５の像側面と対向している（図１参照）。   As shown in FIGS. 3A and 3B, the entire interference unit barrel 19 is formed in a substantially cylindrical shape. The image side of the interference unit barrel 19 is a cylindrical portion 19a, and the small diameter portion 28a of the main barrel 28 is inserted (see FIG. 1). On the sample surface 4 side, a half mirror fixing portion 64 for fixing the half mirror 7 held by the holding frame 22 and a reference mirror housing portion 67 for housing the reference mirror 10 held by the holding frame 25 are provided. ing. The half mirror fixing portion 64 has a female screw 64a formed on the inner diameter side, and the holding frame 22 of the half mirror 7 is fixed by screwing with a male screw formed on the outer diameter side of the holding frame 22 of the half mirror 7. . An annular wall 70 is formed between the reference mirror housing portion 67 and the cylindrical portion 19a so as to surround the optical path in the circumferential direction. The annular wall 70 faces the image side surface of the holding frame 25 in a state in which the reference mirror 10 is accommodated (see FIG. 1).

環状壁７０の参照ミラー収容部６７側、すなわち標本面４側の壁面には、図３（ａ）に示すように凹部７３が１つ形成してある。凹部７３は、参照ミラー収容部６７に参照ミラー１０を収容した状態で、保持枠２５の１対のＶ字溝５５、５５を結ぶ直線の光軸Ｌに直角に交わる垂直二等分線と、光軸Ｌ方向に隣接して重なる位置に形成されている。つまり１対のＶ字溝５５、５５のそれぞれは、凹部７３からほぼ９０°の角度位置にある。凹部７３には、図１に示すように、ゴム球７６が配置されている。ゴム球７６は凹部７３に配置された状態において、環状壁７０の壁面よりも標本面４側に突出している。   As shown in FIG. 3A, one concave portion 73 is formed on the wall surface of the annular wall 70 on the reference mirror housing portion 67 side, that is, on the specimen surface 4 side. The recess 73 has a perpendicular bisector that intersects the optical axis L of the straight line connecting the pair of V-shaped grooves 55 and 55 of the holding frame 25 in a state where the reference mirror 10 is accommodated in the reference mirror accommodating portion 67, and It is formed at a position overlapping adjacent to the optical axis L direction. That is, each of the pair of V-shaped grooves 55 and 55 is at an angular position of approximately 90 ° from the recess 73. As shown in FIG. 1, a rubber ball 76 is disposed in the recess 73. The rubber ball 76 protrudes closer to the specimen surface 4 than the wall surface of the annular wall 70 in a state where the rubber ball 76 is disposed in the recess 73.

図３（ｂ）は、保持枠２５の１対のＶ字溝５５、５５に配置される鋼球５８、５８および環状壁７０の凹部７３に配置されるゴム球７６の環状壁７０に対する配置位置を示している。図３（ｂ）に示すように、１対の鋼球５８、５８を結ぶ直線は光軸Ｌをその中間点としている。鋼球５８、５８のそれぞれは、環状壁７０に設けられた図示しない位置決め用の凹部にその一部が収まっている。また、図１に示すように、１対の鋼球５８、５８とゴム球７６とは略同一面内に存在している。すなわち、ゴム球７６は１対の鋼球５８、５８を結ぶ直線の光軸Ｌに直角に交わる垂直二等分線上に位置している。   FIG. 3B shows an arrangement position of the steel balls 58 and 58 arranged in the pair of V-shaped grooves 55 and 55 of the holding frame 25 and the rubber ball 76 arranged in the recess 73 of the annular wall 70 with respect to the annular wall 70. Is shown. As shown in FIG. 3 (b), the straight line connecting the pair of steel balls 58, 58 has the optical axis L as its intermediate point. Each of the steel balls 58, 58 is partially accommodated in a positioning recess (not shown) provided in the annular wall 70. Further, as shown in FIG. 1, the pair of steel balls 58 and 58 and the rubber ball 76 exist in substantially the same plane. That is, the rubber ball 76 is positioned on a perpendicular bisector that intersects the straight optical axis L connecting the pair of steel balls 58, 58 at a right angle.

干渉部鏡筒１９には、図３（ａ）、（ｂ）に示すように、外径側から参照ミラー収容部６７に連通するねじ孔７９が形成されている。ねじ孔７９は、ゴム球７６を通り光軸Ｌと直交する直線と光軸方向に重なる位置に形成されている。ねじ孔７９には、図１に示すようにねじ８２が螺合している。   As shown in FIGS. 3A and 3B, a screw hole 79 communicating with the reference mirror housing portion 67 from the outer diameter side is formed in the interference portion barrel 19. The screw hole 79 is formed at a position overlapping with a straight line passing through the rubber ball 76 and orthogonal to the optical axis L in the optical axis direction. A screw 82 is screwed into the screw hole 79 as shown in FIG.

図４は角度変更部の一部である参照ミラー収容部６７に形成されたねじ孔７９部分近傍の拡大図である。   FIG. 4 is an enlarged view of the vicinity of the screw hole 79 portion formed in the reference mirror housing portion 67 which is a part of the angle changing portion.

図４に示すように、ねじ孔７９に螺合されているねじ８２は、先端部が円錐状に形成されている（円錐部８２ａ）。この円錐部８２ａの傾斜角度は、参照ミラー１０の保持枠２５の外径側に形成された周方向溝６１の断面形状の傾斜角度に対応している。ねじ８２の円錐部８２ａの斜面は周方向溝６１の像側の溝面６１ａに接触している。   As shown in FIG. 4, the screw 82 screwed into the screw hole 79 has a conical tip portion (conical portion 82a). The inclination angle of the conical portion 82 a corresponds to the inclination angle of the cross-sectional shape of the circumferential groove 61 formed on the outer diameter side of the holding frame 25 of the reference mirror 10. The inclined surface of the conical portion 82 a of the screw 82 is in contact with the image-side groove surface 61 a of the circumferential groove 61.

また、図１に示すように、参照ミラー１０の保持枠２５とハーフミラー７の保持枠２２との間にはウエーブワッシャ８５が配置されている。参照ミラー１０の保持枠２５は、ウエーブワッシャ８５により像側に向かう方向に予圧がかけられている。この予圧により、参照ミラー１０の保持枠２５は１対のＶ字溝５５、５５にそれぞれ配置された鋼球５８、５８が環状壁７０に接触し、同時に環状壁７０の凹部７３に配置されたゴム球７６に接触する。つまり、参照ミラー１０の保持枠２５の像側面は１対の鋼球５８、５８と１つのゴム球７６の３点によって参照ミラー収容部６７内に支持されている。言い換えると、参照ミラーの像側は、保持枠２５を介して１対の鋼球５８、５８と１つのゴム球７６の３点によって参照ミラー収容部６７内に支持されている。   Further, as shown in FIG. 1, a wave washer 85 is disposed between the holding frame 25 of the reference mirror 10 and the holding frame 22 of the half mirror 7. The holding frame 25 of the reference mirror 10 is preloaded by a wave washer 85 in a direction toward the image side. Due to this preloading, the holding frame 25 of the reference mirror 10 has the steel balls 58 and 58 arranged in the pair of V-shaped grooves 55 and 55 respectively in contact with the annular wall 70 and at the same time arranged in the recess 73 of the annular wall 70. Contact the rubber ball 76. That is, the image side surface of the holding frame 25 of the reference mirror 10 is supported in the reference mirror housing portion 67 by three points of a pair of steel balls 58 and 58 and one rubber ball 76. In other words, the image side of the reference mirror is supported in the reference mirror accommodating portion 67 by the three points of a pair of steel balls 58 and 58 and one rubber ball 76 via the holding frame 25.

上述したように、ゴム球７６は１対の鋼球５８、５８を結ぶ直線の光軸Ｌに直角に交わる垂直二等分線上に位置している。また、図１および図４に示すように、ハーフミラー７と参照ミラー１０のミラー面１０ａとが平行で、それぞれが光軸Ｌと直角に交わる面を形成するとき、ゴム球７６はある程度潰れた状態となっている。したがって、ウエーブワッシャ８５により参照ミラー１０の保持枠２５全体に像側方向の予圧がかけられると、参照ミラー１０は１対の鋼球５８、５８を結ぶ直線を中心にしてゴム球７６が配置されている側の半分側がゴム球７６の弾性力によって標本面４側に移動しようとする。同時にゴム球７６が配置されていない方の半分側は像側に移動しようとする。つまり参照ミラー１０は１対の鋼球５８、５８を通る直線、すなわち参照ミラー１０の直径を中心軸に回転しようとする。しかしゴム球７６が配置されている側の半分側は、ねじ８２の傾斜部８２ａが周方向溝６１の像側の溝面６１ａに接触しているので、標本面４側に移動することができない。このため参照ミラー１０は回転することなく固定される。   As described above, the rubber ball 76 is positioned on a vertical bisector that intersects the optical axis L of the straight line connecting the pair of steel balls 58 and 58 at a right angle. Also, as shown in FIGS. 1 and 4, when the half mirror 7 and the mirror surface 10a of the reference mirror 10 are parallel and each form a surface that intersects with the optical axis L at right angles, the rubber ball 76 is crushed to some extent. It is in a state. Therefore, when the preload in the image side direction is applied to the entire holding frame 25 of the reference mirror 10 by the wave washer 85, the reference mirror 10 is provided with the rubber ball 76 around the straight line connecting the pair of steel balls 58 and 58. The half of the moving side tends to move to the specimen surface 4 side by the elastic force of the rubber ball 76. At the same time, the half side where the rubber ball 76 is not arranged tends to move to the image side. That is, the reference mirror 10 tries to rotate about the straight line passing through the pair of steel balls 58, 58, that is, the diameter of the reference mirror 10. However, since the inclined portion 82a of the screw 82 is in contact with the image-side groove surface 61a of the circumferential groove 61, the half side on the side where the rubber ball 76 is disposed cannot move to the sample surface 4 side. . For this reason, the reference mirror 10 is fixed without rotating.

ハーフミラー７と参照ミラー１０のミラー面１０ａとが平行で、それぞれが光軸Ｌと直角に交わる平面を形成するとき、周方向溝６１の底部とねじ８２の最先端部すなわち円錐部８２ａの頂点とは、図４に示すように、光軸Ｌ方向に少しずれて位置している。本実施形態においては、周方向溝６１の底部の方がねじ８２の最先端部よりも標本面４側に位置している。また、この状態においては、上述したようにゴム球７６はある程度潰れた状態である。   When the half mirror 7 and the mirror surface 10a of the reference mirror 10 are parallel and each form a plane that intersects the optical axis L at right angles, the bottom of the circumferential groove 61 and the tip of the screw 82, that is, the apex of the conical portion 82a. As shown in FIG. 4, it is slightly shifted in the optical axis L direction. In the present embodiment, the bottom of the circumferential groove 61 is located closer to the specimen surface 4 than the most distal end of the screw 82. In this state, the rubber ball 76 is crushed to some extent as described above.

この状態からねじ８２を締め付ける方向に回転させ、ねじ８２が光軸Ｌに近づく方向（図１および図４の紙面下方）に進むと、ねじ８２の円錐部８２ａが周方向溝６１の像側の溝面６１ａに同方向の力を加える。すると、ねじ８２の円錐部８２ａと周方向溝６１の像側の溝面６１ａとが摺動し、ねじ８２は周方向溝６１の溝面６１ａを像側方向に移動させようとする。するとゴム球７６が当初の状態よりもさらに潰れることで保持枠２５の移動を許容する。その結果、保持枠２５は１対の鋼球５８、５８を結ぶ直線、すなわち参照ミラー１０の直径を軸にしてゴム球７６が配置されている側の半分側が像側へ、他方の半分側が標本面４側へ傾くこととなる。つまり保持枠２５に保持されている参照ミラー１０は光軸Ｌに直交する平面に対して傾斜する。そしてねじ８２の回転を止めると、参照ミラー１０は光軸Ｌに直交する平面に対して傾いた状態で参照ミラー収容部６７に保持される。   From this state, when the screw 82 is rotated in the tightening direction and the screw 82 advances in the direction approaching the optical axis L (downward in the drawing in FIGS. 1 and 4), the conical portion 82a of the screw 82 is located on the image side of the circumferential groove 61. A force in the same direction is applied to the groove surface 61a. Then, the conical portion 82a of the screw 82 and the image-side groove surface 61a of the circumferential groove 61 slide, and the screw 82 tries to move the groove surface 61a of the circumferential groove 61 in the image-side direction. Then, the movement of the holding frame 25 is permitted by the rubber balls 76 being further crushed than in the initial state. As a result, the holding frame 25 is a straight line connecting the pair of steel balls 58, that is, the half side where the rubber ball 76 is arranged with the diameter of the reference mirror 10 as the axis, and the other half side is the specimen. It will be inclined to the surface 4 side. That is, the reference mirror 10 held by the holding frame 25 is inclined with respect to a plane orthogonal to the optical axis L. When the rotation of the screw 82 is stopped, the reference mirror 10 is held in the reference mirror housing portion 67 while being inclined with respect to a plane perpendicular to the optical axis L.

一方、ハーフミラー７と参照ミラー１０のミラー面１０ａとが平行な状態からねじ８２を弛める方向に回転させ、ねじ８２が光軸Ｌから離れる方向（図１および図４の紙面上方）に進むと、ねじ８２の円錐部８２ａが周方向溝６１の像側の溝面６１ａから離れる方向に移動する。上述したように、参照ミラー１０は１対の鋼球５８、５８を結ぶ直線を中心にしてゴム球７６が配置されている側の半分側がゴム球７６の弾性力によって標本面４側に移動しようとしている。この状態でねじ８２の円錐部８２ａが光軸Ｌから離れる方向に移動すると、ねじ８２の円錐部８２ａと周方向溝６１の像側の溝面６１ａとが摺動しながら、ゴム球７６が配置されている側の半分側の標本面４側への移動を許容する。その結果、保持枠２５は１対の鋼球５８、５８を結ぶ直線を軸にしてゴム球７６が配置されている側の半分側が標本面４側へ、他方の半分側が像側へ傾くこととなる。つまり保持枠２５に保持された参照ミラー１０は光軸Ｌに直交する平面に対して、ねじ８２を締めこんだ時とは反対方向に傾斜する。そしてねじ８２の回転を止めると、参照ミラー１０は光軸Ｌに直交する平面に対して傾いた状態で参照ミラー収容部６７に保持される。なお、参照ミラー１０がどちらに傾いても、参照ミラー１０の中心点、すなわち光軸Ｌと参照ミラー１０との交点と、ハーフミラー７との距離は、参照ミラー１０の傾斜前と傾斜後で変化しない。   On the other hand, when the half mirror 7 and the mirror surface 10a of the reference mirror 10 are parallel to each other, the screw 82 is rotated in a loosening direction, and the screw 82 advances in a direction away from the optical axis L (upward in the drawing in FIGS. 1 and 4). The conical portion 82a of the screw 82 moves in a direction away from the image-side groove surface 61a of the circumferential groove 61. As described above, in the reference mirror 10, the half side on which the rubber ball 76 is arranged around the straight line connecting the pair of steel balls 58, 58 is moved toward the sample surface 4 side by the elastic force of the rubber ball 76. It is said. When the conical portion 82a of the screw 82 moves away from the optical axis L in this state, the rubber ball 76 is disposed while the conical portion 82a of the screw 82 and the image-side groove surface 61a of the circumferential groove 61 slide. The movement to the side of the specimen surface 4 on the half side of the side that is being performed is allowed. As a result, the holding frame 25 is inclined such that the half side on which the rubber ball 76 is disposed is inclined to the sample surface 4 side and the other half side is directed to the image side with a straight line connecting the pair of steel balls 58 and 58 as an axis. Become. That is, the reference mirror 10 held by the holding frame 25 is inclined with respect to a plane orthogonal to the optical axis L in the direction opposite to that when the screw 82 is tightened. When the rotation of the screw 82 is stopped, the reference mirror 10 is held in the reference mirror housing portion 67 while being inclined with respect to a plane perpendicular to the optical axis L. Note that, regardless of which of the reference mirrors 10 is inclined, the distance between the center point of the reference mirror 10, that is, the intersection of the optical axis L and the reference mirror 10, and the half mirror 7 is before and after the reference mirror 10 is inclined. It does not change.

このように、本実施形態では、ねじ８２が参照ミラー１０を傾斜させるための駆動用の部材となっている。すなわち、ねじ８２を締め付ける方向に回転させると参照ミラー１０の保持枠２５は光軸Ｌに直交する平面に対して所定の方向に傾斜し、ねじ８２を反対方向に回転させると参照ミラー１０の保持枠２５は前記所定の方向とは反対方向に傾斜する。そしてねじ８２の回転を止めたところで保持枠２５を固定することができる。その結果、参照ミラー１０を光軸Ｌに直交する平面に対して任意の角度に傾斜させることができる。   Thus, in the present embodiment, the screw 82 is a driving member for inclining the reference mirror 10. That is, when the screw 82 is rotated in the tightening direction, the holding frame 25 of the reference mirror 10 is inclined in a predetermined direction with respect to the plane orthogonal to the optical axis L, and when the screw 82 is rotated in the opposite direction, the reference mirror 10 is held. The frame 25 is inclined in a direction opposite to the predetermined direction. The holding frame 25 can be fixed when the rotation of the screw 82 is stopped. As a result, the reference mirror 10 can be inclined at an arbitrary angle with respect to a plane orthogonal to the optical axis L.

また、図１に示すように、外筒５２にはねじ孔８８が設けられている。ねじ孔８８は外筒５２の外径側と内径側とを連通し、ねじ９１が螺合されている。このねじ９１を締め付けることでねじ９１の先端部が干渉部鏡筒１９に係合し、干渉部鏡筒１９が主鏡筒２８に対して光軸Ｌを中心に周方向に回転しないように固定している。ねじ９１を弛める方向に回転させると、ねじ９１と干渉部鏡筒１９との係合が解け、干渉部鏡筒１９は主鏡筒２８に対して回転可能となる。このように、干渉部鏡筒１９は主鏡筒２８に対して周方向に回転可能となっている。   As shown in FIG. 1, the outer cylinder 52 is provided with a screw hole 88. The screw hole 88 communicates the outer diameter side and the inner diameter side of the outer cylinder 52, and the screw 91 is screwed together. By tightening the screw 91, the tip of the screw 91 is engaged with the interference unit barrel 19, and the interference unit barrel 19 is fixed to the main barrel 28 so as not to rotate in the circumferential direction around the optical axis L. is doing. When the screw 91 is rotated in the loosening direction, the engagement between the screw 91 and the interference unit barrel 19 is released, and the interference unit barrel 19 can be rotated with respect to the main barrel 28. In this way, the interference unit barrel 19 is rotatable in the circumferential direction with respect to the main barrel 28.

次に、図１を参照して、このような構成の干渉対物レンズ１における照明光および標本からの観察光の光路について説明する。   Next, the optical paths of the illumination light and the observation light from the specimen in the interference objective lens 1 having such a configuration will be described with reference to FIG.

光源（図示省略）からの照明光はレボルバ（図示省略）を介して干渉対物レンズ１に入射する。照明光はレンズ１３ｃを透過して干渉対物レンズ１の主鏡筒２８内に導かれる。主鏡筒２８に導かれた照明光はレンズ１３ｂ、１３ａを透過して標本面４の方へ出射され、参照ミラー１０に達する。参照ミラー１０を透過した光はハーフミラー７の像側面７ａに達する。ハーフミラー７の像側面７ａは照明光を分割し、一方は対物レンズ系１３の方へ反射し、他方は標本面４の方へ透過する。ハーフミラー７の像側面７ａで反射された光は参照ミラー１０のミラー面１０ａに達する。そして参照ミラー１０のミラー面１０ａで標本面４の方へ反射された後に、ハーフミラー７で反射されて対物レンズ系１３に向かう。一方、ハーフミラー７を透過した光は標本面４で反射された後、ハーフミラー７に達し、ハーフミラー７の像側面７ａにおいて参照ミラー１０で反射された光と合わせられて対物レンズ系１３に向かう。つまり、参照ミラー１０は、ハーフミラー７で反射された光と、ハーフミラー７を透過して標本面４で反射された光とが、ハーフミラー７の像側面７ａで合さるように、当該ハーフミラー７で反射された光を反射している。   Illumination light from a light source (not shown) enters the interference objective lens 1 via a revolver (not shown). The illumination light passes through the lens 13 c and is guided into the main barrel 28 of the interference objective lens 1. The illumination light guided to the main lens barrel 28 passes through the lenses 13b and 13a and is emitted toward the sample surface 4, and reaches the reference mirror 10. The light transmitted through the reference mirror 10 reaches the image side surface 7 a of the half mirror 7. The image side surface 7 a of the half mirror 7 divides the illumination light, one is reflected toward the objective lens system 13 and the other is transmitted toward the specimen surface 4. The light reflected by the image side surface 7 a of the half mirror 7 reaches the mirror surface 10 a of the reference mirror 10. Then, after being reflected by the mirror surface 10 a of the reference mirror 10 toward the sample surface 4, it is reflected by the half mirror 7 and heads toward the objective lens system 13. On the other hand, the light transmitted through the half mirror 7 is reflected by the sample surface 4 and then reaches the half mirror 7, and is combined with the light reflected by the reference mirror 10 on the image side surface 7 a of the half mirror 7 to the objective lens system 13. Head. That is, the reference mirror 10 is configured so that the light reflected by the half mirror 7 and the light transmitted through the half mirror 7 and reflected by the sample surface 4 are combined at the image side surface 7 a of the half mirror 7. The light reflected by the mirror 7 is reflected.

ここで、標本面４からハーフミラー７の像側面７ａまでの光路長Ｌ1（図１参照）と、ハーフミラー７の像側面７ａから参照ミラー１０のミラー面１０ａまでの光路長Ｌ2が等しい時、標本面４の干渉縞は最も明瞭に観察される。このとき、干渉縞は互いの長さが波長の４分の１ずれるごとに明暗を繰り返す。観察標本面４、ハーフミラー７の像側面７ａおよび参照ミラー１０のミラー面１０ａとが完全に平行である場合、観察視野内で光路長が一様になるため干渉縞は等高線状としては観察されない。この場合、等高線状の干渉縞を発生させるために、本実施形態においては参照ミラー１０を傾けて視野内で光路長の差を生じさせる。すると参照ミラー１０の傾きに応じて干渉縞を等高線状に観察することが可能となる。 Here, the optical path length L 1 (see FIG. 1) from the specimen surface 4 to the image side surface 7 a of the half mirror 7 is equal to the optical path length L 2 from the image side surface 7 a of the half mirror 7 to the mirror surface 10 a of the reference mirror 10. Sometimes the interference fringes on the specimen surface 4 are observed most clearly. At this time, the interference fringes repeat light and dark each time their lengths deviate by a quarter of the wavelength. When the observation specimen surface 4, the image side surface 7a of the half mirror 7 and the mirror surface 10a of the reference mirror 10 are completely parallel, the optical path length is uniform in the observation field, and therefore the interference fringes are not observed as contour lines. . In this case, in order to generate contour-like interference fringes, in this embodiment, the reference mirror 10 is tilted to cause a difference in optical path length within the field of view. Then, it becomes possible to observe the interference fringes in contour lines according to the inclination of the reference mirror 10.

参照ミラー１０を傾けるには、干渉部鏡筒１９のねじ孔７９に螺合しているねじ８２を締め付け方向または弛む方向に回転させる。ねじ８２の回転操作は標本面４の観察像を見ながらドライバーで行う。ねじ８２を締め付け方向に回転させると、参照ミラー１０は保持枠２５を介して１対の鋼球５８、５８を結ぶ直線、すなわち参照ミラー１０の直径を軸にしてゴム球７６が配置されている側の半分側が像側へ、他方の半分側が標本面４側へ傾く。また、ねじ８２を弛む方向に回転させると、参照ミラー１０は保持枠２５を介して１対の鋼球５８、５８を結ぶ直線を軸にしてゴム球７６が配置されている側の半分側が標本面４側へ、他方の半分側が像側へ傾く。こうして観察者は所望の干渉縞を生じさせることができる。このとき参照ミラー１０の中心点、すなわち光軸Ｌと参照ミラー１０との交点と、ハーフミラー７との距離は、参照ミラー１０の傾斜前と傾斜後で変化しない。   To tilt the reference mirror 10, the screw 82 screwed into the screw hole 79 of the interference unit barrel 19 is rotated in the tightening direction or the loosening direction. The screw 82 is rotated with a screwdriver while viewing the observation image of the specimen surface 4. When the screw 82 is rotated in the tightening direction, the reference mirror 10 is arranged with a rubber ball 76 about the straight line connecting the pair of steel balls 58 and 58 via the holding frame 25, that is, the diameter of the reference mirror 10. The other half side is inclined toward the image side, and the other half side is inclined toward the specimen surface 4 side. In addition, when the screw 82 is rotated in the loosening direction, the reference mirror 10 has a sample on the half side where the rubber ball 76 is arranged around a straight line connecting the pair of steel balls 58 and 58 via the holding frame 25. The other half side is inclined toward the image side toward the surface 4 side. In this way, the observer can generate a desired interference fringe. At this time, the distance between the center point of the reference mirror 10, that is, the intersection of the optical axis L and the reference mirror 10, and the half mirror 7 does not change before and after the reference mirror 10 is inclined.

また、本実施形態においては、参照ミラー１０の回転軸の光軸Ｌに対する向きを変更することができる。つまり、参照ミラー１０の回転軸は上述したように１対の鋼球５８、５８を通る直線すなわち参照ミラー１０の直径であって、光軸Ｌに直交しているが、この１対の鋼球５８、５８を通る直線が光軸Ｌに直交する向きを変更することができる。参照ミラー１０の回転軸の向きを変えると、干渉縞の発生する向きが変わる。参照ミラー１０の回転軸の向きを変更したいときは、外筒５２のねじ孔８８に螺合しているねじ９１を弛める。ねじ９１の回転操作はドライバーで行う。すると干渉部鏡筒１９はねじ９１との係合が解かれ、主鏡筒２８に対して周方向に回転可能となる。観察者は標本面４の観察像を見ながら干渉部鏡筒１９を主鏡筒２８に対して周方向に回転させ、所望の位置まで回転させる。そしてねじ９１を締め付けて干渉部鏡筒１９と再度係合させて干渉部鏡筒１９を固定する。つまり、参照ミラー１０の回転軸である参照ミラー１０の直径を、参照ミラー１０を周方向に回転させることで回転移動させる。参照ミラー１０の回転軸は光軸Ｌを中心にして、光軸Ｌに直交する平面内で回転する。こうすることで、参照ミラー１０の光軸Ｌに対する回転軸の向きを変更することができる。その結果、干渉縞の向きを変えることができる。   In the present embodiment, the direction of the rotation axis of the reference mirror 10 with respect to the optical axis L can be changed. That is, the rotation axis of the reference mirror 10 is a straight line passing through the pair of steel balls 58, 58 as described above, that is, the diameter of the reference mirror 10, and is orthogonal to the optical axis L. The direction in which the straight line passing through 58 and 58 is orthogonal to the optical axis L can be changed. When the direction of the rotation axis of the reference mirror 10 is changed, the direction in which the interference fringes are generated is changed. When it is desired to change the direction of the rotation axis of the reference mirror 10, the screw 91 screwed into the screw hole 88 of the outer cylinder 52 is loosened. The screw 91 is rotated by a screwdriver. Then, the interference section barrel 19 is disengaged from the screw 91 and can rotate in the circumferential direction with respect to the main barrel 28. The observer rotates the interference unit barrel 19 in the circumferential direction with respect to the main barrel 28 while viewing the observation image of the sample surface 4 and rotates it to a desired position. Then, the screw 91 is tightened and re-engaged with the interference unit barrel 19 to fix the interference unit barrel 19. That is, the diameter of the reference mirror 10 that is the rotation axis of the reference mirror 10 is rotated by rotating the reference mirror 10 in the circumferential direction. The rotation axis of the reference mirror 10 rotates around the optical axis L in a plane orthogonal to the optical axis L. By doing so, the direction of the rotation axis with respect to the optical axis L of the reference mirror 10 can be changed. As a result, the direction of the interference fringes can be changed.

本実施形態に係る干渉対物レンズ１は、以上のような構成となっているので、傾角ステージを使用することなく所望の方向に干渉縞を発生させることができる。また、干渉対物レンズ１のみで干渉縞を発生させる操作を完結することができる。   Since the interference objective lens 1 according to the present embodiment is configured as described above, interference fringes can be generated in a desired direction without using an inclination stage. Further, the operation for generating the interference fringes can be completed only by the interference objective lens 1.

なお、本実施形態においては主鏡筒２８に保持された対物レンズ系１３を３つのレンズとしたが、レンズの数および保持位置はこれに限定されるものではない。また、本実施形態では参照ミラー１０を光軸Ｌに直交する平面に対して所定の方向および所定の方向と反対方向に傾けることができるが、何れか一方の方向に傾けることができれば干渉縞を発生させることができる。また、本実施形態においては、干渉部鏡筒１９のねじ８２および外筒５２のねじ９１の回転操作はドライバーで行っているが、それぞれのねじと一体に回転用つまみを形成しても良い。   In the present embodiment, the objective lens system 13 held in the main lens barrel 28 has three lenses, but the number of lenses and the holding position are not limited to this. In the present embodiment, the reference mirror 10 can be tilted in a predetermined direction and in a direction opposite to the predetermined direction with respect to a plane orthogonal to the optical axis L. If the reference mirror 10 can be tilted in any one direction, interference fringes are generated. Can be generated. In this embodiment, the screw 82 of the interference unit barrel 19 and the screw 91 of the outer cylinder 52 are rotated by a driver. However, a knob for rotation may be formed integrally with each screw.

また、本実施形態においては、ゴム球７６を用いたが、バネ等の弾性部材でも良い。更に、弾性部材を用いず、保持枠２５の角度調整をクリックストップ機構を用い、各角度について機械的に位置決めさせる機構でも良い。   In the present embodiment, the rubber ball 76 is used, but an elastic member such as a spring may be used. Furthermore, a mechanism for mechanically positioning each angle by using a click stop mechanism for adjusting the angle of the holding frame 25 without using an elastic member may be used.

このように、本発明の構成は本実施形態に限定されるものではなく、適宜変更が可能である。   Thus, the configuration of the present invention is not limited to this embodiment, and can be changed as appropriate.

１ ミロー型干渉対物レンズ
４ 標本面
７ ハーフミラー
１０ 参照ミラー
１０ａ ミラー面
１９ 干渉部鏡筒
１９ａ 円筒部
１９ｂ 拡径部
２２ （ハーフミラーの）保持枠
２５ （参照ミラーの）保持枠
２８ 主鏡筒
２８ａ 小径部
２８ｂ 大径部
３１ 鍔部
３４ 段部
３７ 雄ねじ
４６ 取付け部
５２ 外筒
５５ Ｖ字溝
５８ 鋼球
６１ 周方向溝
６１ａ 溝面
６４ ハーフミラー固定部
６７ 参照ミラー収容部
７０ 環状壁
７３ 凹部
７６ ゴム球
７９ ねじ孔
８２ ねじ
８５ ウエーブワッシャ
８８ ねじ孔 1 Millo-type interference objective lens 4 Sample surface
7 Half mirror
10 Reference mirror
10a Mirror surface
19 Interference tube
19a Cylindrical part
19b Expanded part
22 (half mirror) holding frame
25 Holding frame (of reference mirror)
28 Main tube
28a Small diameter part 28b Large diameter part
31 Buttocks
34 steps
37 Male thread
46 Mounting part 52 Outer cylinder
55 V-shaped groove 58 Steel ball
61 Circumferential groove
61a Groove surface
64 Half mirror fixing part 67 Reference mirror accommodating part
70 annular wall
73 recess
76 Rubber ball 79 Screw hole
82 screws
85 Wave washer 88 Screw hole

Claims (8)

対物レンズ系と、
標本面と前記対物レンズ系の中の先端部との間に配置され、前記対物レンズ系から出射された照明光を分割し、一方は前記標本面とは異なる方向に反射し、他方は前記標本面の方に透過する光路分割手段と、
前記光路分割手段と前記対物レンズ系の先端部との間に配置され、前記光路分割手段によって反射された前記光と、前記光路分割手段を透過し前記標本面で反射された光とが、前記光路分割手段で合さるように前記光路分割手段によって反射された前記光を反射する参照ミラーと、
前記対物レンズ系の光軸と直角に交わる平面に対する前記参照ミラーの角度を変更する角度変更部とを備えていることを特徴とする干渉対物レンズ。 An objective lens system;
Arranged between the sample surface and the tip of the objective lens system, the illumination light emitted from the objective lens system is divided, one of which is reflected in a direction different from the sample surface, and the other is the sample An optical path dividing means that transmits toward the surface;
The light that is disposed between the optical path splitting means and the tip of the objective lens system, is reflected by the optical path splitting means, and the light that is transmitted through the optical path splitting means and reflected by the sample surface is A reference mirror that reflects the light reflected by the optical path dividing means so as to be combined by the optical path dividing means;
An interference objective lens, comprising: an angle changing unit that changes an angle of the reference mirror with respect to a plane perpendicular to the optical axis of the objective lens system. 前記参照ミラーは、前記光軸と直角に交わる軸を中心に回転することで、前記光軸と直角に交わる平面に対する角度を変更することを特徴とする請求項１に記載の干渉対物レンズ。   2. The interference objective lens according to claim 1, wherein the reference mirror changes an angle with respect to a plane intersecting at right angles with the optical axis by rotating around an axis intersecting at right angles with the optical axis. 前記参照ミラーの一方の面側は、前記軸上の２箇所と他の１箇所との３箇所で鏡筒に支持されていることを特徴とする請求項２に記載の干渉対物レンズ。   3. The interference objective lens according to claim 2, wherein one surface side of the reference mirror is supported by the lens barrel at three locations of two locations on the shaft and one other location. 前記参照ミラーの他方の面側は、弾性部材により付勢されていることを特徴とする請求項３に記載の干渉対物レンズ。   The interference objective lens according to claim 3, wherein the other surface side of the reference mirror is biased by an elastic member. 前記参照ミラーの回転軸は、該回転軸を含み、前記光軸と直角に交わる平面内で前記光軸を中心として前記鏡筒の周方向に回転可能に設けられていることを特徴とする請求項２から４の何れか一項に記載の干渉対物レンズ。   The rotation axis of the reference mirror is provided so as to be rotatable in the circumferential direction of the lens barrel around the optical axis in a plane that includes the rotation axis and intersects the optical axis at a right angle. Item 5. The interference objective lens according to any one of Items 2 to 4. 前記参照ミラーは、前記鏡筒を前記光軸と直角に交わる方向に移動する部材によって前記回転軸を中心に回転することを特徴とする請求項２から５の何れか一項に記載の干渉対物レンズ。   6. The interference objective according to claim 2, wherein the reference mirror is rotated around the rotation axis by a member that moves the barrel in a direction perpendicular to the optical axis. lens. 前記参照ミラーは外径側に周方向に亘る溝が形成された保持部材に保持され、前記光軸と直角に交わる方向に移動する部材と前記溝とが摺動することで前記回転軸を中心に回転することを特徴とする請求項６に記載の干渉対物レンズ。   The reference mirror is held by a holding member in which a groove extending in the circumferential direction is formed on the outer diameter side, and the member moving in a direction perpendicular to the optical axis and the groove slide so that the rotating shaft is centered. The interference objective lens according to claim 6, wherein 請求項１から７の何れか一項に記載された干渉対物レンズを備えた顕微鏡。   The microscope provided with the interference objective lens as described in any one of Claim 1 to 7.
JP2009236473A 2009-10-13 2009-10-13 Mirau type interference objective lens and microscope Withdrawn JP2011085655A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016200014A1 (en) 2015-01-05 2016-07-07 Mitutoyo Corporation Interference objective lens and light interference measuring device
KR102212681B1 (en) * 2019-09-26 2021-02-05 한국기초과학지원연구원 Mounting device for complex motion of objective lens with cassegrain structure
DE102022121710A1 (en) 2021-08-30 2023-03-02 Mitutoyo Corporation optical device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016200014A1 (en) 2015-01-05 2016-07-07 Mitutoyo Corporation Interference objective lens and light interference measuring device
JP2016126176A (en) * 2015-01-05 2016-07-11 株式会社ミツトヨ Interference objective lens and optical interference measurement device
CN105758294A (en) * 2015-01-05 2016-07-13 株式会社三丰 Interference objective lens and light interference measuring device
US9921391B2 (en) 2015-01-05 2018-03-20 Mitutoyo Corporation Interference objective lens and light interference measuring device
CN105758294B (en) * 2015-01-05 2019-12-24 株式会社三丰 Interference objective and optical interference measuring device
DE102016200014B4 (en) 2015-01-05 2023-02-02 Mitutoyo Corporation Interference objective lens and light interference measuring device
KR102212681B1 (en) * 2019-09-26 2021-02-05 한국기초과학지원연구원 Mounting device for complex motion of objective lens with cassegrain structure
DE102022121710A1 (en) 2021-08-30 2023-03-02 Mitutoyo Corporation optical device

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A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20130108