JP2011085429A - Tuning fork type vibration gyro - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tuning fork type vibration gyro, which enables input of an angular velocity to its angular-velocity input axis, and which facilitates miniaturization as well. <P>SOLUTION: A support member 2 is composed of a quadrangular crystal prism. Electrodes 21-24 are stuck respectively to both-side edges of two side faces opposite to each other of the quadrangular prism. The support member 2 performs stretching vibrations in the direction reverse to each other in the Y-axis direction, by applying an AC voltage v of a frequency f to the electrodes 21-24. The angular-velocity input axis 100 of a vibrator 1 is at the longitudinal axis of a driving leg 11c for non-excitation and a detecting leg 12c for nonvibration, thereby the stretching vibrations in the direction opposite to each other in the right and left side faces of the support member 2 can apply rotational vibration around the angular-velocity input axis 100 to the vibrator 1. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a vibration gyro that enables a vibration gyro to be diagnosed by applying rotational vibration about the input shaft of the vibrator to the vibrator, and in particular, one end of a support member is fixed to the vibrator, and the support member This invention relates to a tuning fork type vibration gyro that supports a vibrator on a package by fixing the other end of the vibrator to the package.

  A tuning fork type vibration gyro is generally formed by mounting a vibrator made of a piezoelectric material in a package. In order to mount the vibrator on the package, a structure is adopted in which one end of the support member is fixed to a relatively small vibration region of the vibrator and the other end of the support member is fixed to the package. The vibrator and the like hexapodal, H-type (four-legged type).

  FIG. 7 is an exploded perspective view showing a tuning-fork type vibration gyro disclosed in FIG. The tuning fork type vibration gyro shown in FIG. 7 includes a tuning fork type hexapod type vibrator 1, a support member 2, and a package 3. The lower surface of the support member 2 is fixed to the support member fixing region 30a on the upper surface of the package substrate 30 with an adhesive, and the upper surface of the support member 2 is fixed to the support member fixing region on the bottom surface of the body 10 of the vibrator 1 with an adhesive. ing.

  The hexapod type vibrator 1 is made of a piezoelectric material, and has a central plate-like body 10, a drive leg 11 extending from one end face of the body 10, and a detection leg 12 extending from the other end face of the body 10. And have. The drive leg 11 includes excitation drive legs 11a and 11b and a non-excitation drive leg 11c. The detection leg 12 includes vibration detection legs 12a and 12b and a non-vibration detection leg 12c.

  In the hexapodal vibrator 1 of FIG. 7, in-plane vibration in a direction parallel to the main surface (upper surface in FIG. 7) is excited by the excitation drive legs 11a and 11b and around the longitudinal axis of the non-excitation drive leg 11c. When rotation is input, surface vertical vibration in a direction perpendicular to the main surface is excited by Coriolis force in accordance with the input angular velocity, and is transmitted to the vibration detection legs 12 a and 12 b via the trunk portion 10. The longitudinal axes of the non-excitation drive leg 11 c and the non-vibration detection leg 12 c coincide with each other, and this longitudinal axis becomes the input axis of the hexapod type vibrator 1.

  The hexapod vibrator 1 converts the angular velocity around the input shaft into surface vertical vibration of the vibration detection legs 12a and 12b, and the surface thereof is provided by electrodes (not shown) attached to the vibration detection legs 12a and 12b. Converts vertical vibrations into electrical signals and outputs them.

  In a tuning fork type vibration gyro, a vibrator is mounted on a package, and the package is fixed to an object whose angular velocity is to be measured. Therefore, some supporting means for supporting the vibrator with the part of the package as a fulcrum is an essential constituent member. The support means is provided between the vibrator and the package. The tuning fork type vibration gyro of FIG. 7 shows a structure in which the hexagonal vibrator 1 is supported by fixing a quadrangular prism support member 2 to the hexapod vibrator 1 with an adhesive or the like. This support member 2 is the support means.

  Although Patent Document 1 does not disclose the dimensions of the hexapod vibrator 1, for example, the thickness is 0.4 mm, the length and width of the body 10 are both 4 mm, the drive legs 11a, 11b, 11c, and the detection legs 12a. , 12b and 12c are all 6 mm in length, and the widths of their legs are both 0.4 mm. Thus, the vibrator 1 has a fine structure. In particular, each of the legs 11a, 11b, 11c, 12a, 12b, and 12c has a length to width ratio of 15: 1, and is long and thin. May be broken or cracked due to some kind of impact.

  When the tuning-fork type vibration gyro shown in FIG. 7 is mounted on a portable device such as a video camera or a still camera, these portable devices can be easily moved. Therefore, by adding an angular velocity to the vibrator and detecting the output of the vibrator, The child can be easily tested for damage. However, when the tuning fork type vibration gyro of FIG. 7 is mounted on a large object such as an automobile, a ship, or a building, it is not easy to apply an angular velocity to the large object. In order to apply angular velocity to a gyro mounted on a large object, a considerably large device is required. Therefore, it has not been easy to diagnose the presence or absence of damage to a gyro mounted on a large object.

  Conventionally, failure diagnosis of a gyro mounted on a large object has been performed by electrical means such as the magnitude of an output signal and output comparison among a plurality of gyros when angular velocity is not applied (angular velocity = 0). . However, in the electrical failure diagnosis, since the angular velocity is not applied to the vibrator, it is not often possible to confirm the failure of the vibrator such as a cracked leg.

  Conventionally, a method disclosed in Patent Document 2 has been proposed as a means for compensating for the drawbacks of such electrical fault diagnosis. FIGS. 8A, 8B, and 8C are diagrams shown in FIG. 1, FIG. 2, and FIG. 5 in Patent Document 2, respectively.

  The angular velocity detection device of Patent Document 2 includes a sensor package (11) and a support portion (12). The sensor package (11) includes a vibrator supported so as to be able to vibrate in the X-axis and Y-axis directions on a substrate that moves together with a base (10) fixed to a detection target, and the vibrator with respect to the substrate. Drive means that vibrates in the direction, and detection means for detecting vibration in the Y-axis direction with respect to the substrate of the vibrator. The support unit (12) is a drive unit support (12-3a, 12-3b) erected on the base (10), and a diagnosis that is supported by the drive unit support and supports the sensor package (11). use driving unit (12-2a, 12-2b) and a. At the time of failure diagnosis of the angular velocity detection function, a drive signal is given to the piezoelectric elements (12-4a, 12-4b) of the drive unit support bodies (12-3a, 12-3b), thereby the sensor package (11). Is diagnosed based on the detection result of the detection means at that time.

JP 2006-275630 A JP 2001-221737 A

  The angular velocity detection device of Patent Document 2 has a configuration in which a support portion (12) is provided on a base body (10) and the sensor package (11) is supported by the support portion (12) in order to cause the sensor package (11) to rotate and vibrate. Since it is essential, miniaturization is difficult. Accordingly, an object of the present invention is to provide a vibrating gyroscope that can input an angular velocity to an angular velocity input shaft of a tuning fork type vibrating gyroscope and that can be easily downsized.

  The present invention to solve the problems described above provides the following means.

(1) In a tuning fork type vibration gyroscope including a vibrator, a package, and a support member,
The support member is a polygonal column, and one end surface and the other end surface orthogonal to the longitudinal direction of the polygonal column are fixed to the vibrator and the package, the vibrator is supported on the package, and the vertical axis The direction is a direction orthogonal to the angular velocity input axis of the vibrator, and the support member is provided with rotational vibration applying means for applying rotational vibration around the input axis of the vibrator to the vibrator. Tuning fork type vibration gyro.

  (2) The tuning-fork type vibration gyro according to (1), wherein the rotational vibration applying means causes the support member to expand and contract in opposite directions parallel to the vertical axis direction.

  (3) The support member is a quadrangular prism made of a piezoelectric single crystal material, and the rotational vibration applying means is an electrode provided on each side edge of two opposing side surfaces of the support member. tuning-fork vibrating gyroscope according to (2).

  (4) In the above (2), the support member is made of an elastic material, and the rotational vibration applying means is a piezoelectric element with an electrode provided on each of two opposing side surfaces of the support member. The tuning fork type vibration gyro described.

  (5) The tuning fork type vibration gyroscope according to any one of (1) to (4), wherein an AC is supplied to the rotational vibration applying means as an angular velocity input for fault diagnosis.

(6) The two opposite side surfaces are a first side surface and a second side surface orthogonal to the angular velocity input axis,
The electrodes include first and second electrodes facing each other, and third and fourth electrodes facing each other,
The first and third electrodes are provided on each side edge on the first side surface and opposite to each other in a direction orthogonal to the angular velocity input axis and the longitudinal axis direction,
The second and fourth electrodes are provided on each side edge on the second side surface and opposite to each other in a direction orthogonal to the angular velocity input axis and the vertical axis direction,
The support member is applied with an electric field from the first electrode to the second electrode, and when an electric field from the fourth electrode to the third electrode is applied, The length in the longitudinal direction at the side edge on the side where the second electrode is provided is extended, and the length at the side edge on the side where the third and fourth electrodes are provided. The length in the axial direction was shrunk, and conversely, an electric field from the second electrode toward the first electrode was applied, and an electric field from the third electrode toward the fourth electrode was applied. When the first and second electrodes are provided on the side edge portion of the side edge portion, the length in the longitudinal axis direction is contracted, and the third and fourth electrodes are provided on the side provided with the first and second electrodes. The length of the side edge portion in the longitudinal axis direction is extended. The tuning-fork type vibration jig according to (3) above, Gyro.

  ADVANTAGE OF THE INVENTION According to this invention, the angular velocity for a test can be input into the angular velocity input shaft of a tuning fork type vibration gyro, and also the tuning fork type vibration gyro which can be reduced in size easily can be provided.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an exploded perspective view of a hexapod tuning fork type vibrating gyroscope according to a first embodiment of the present invention. It is a diagram showing the principle of a rotary vibrating means by the support structure 20. (A) is a perspective view of the support structure 20 and the vibrator 1 as viewed from above, (B) is an enlarged view of the support structure 20, and (C) and (D) are vibrated by the rotational vibration applying means included in the support structure 20. It is a figure which shows the aspect which the child 1 vibrates. It is a figure which shows the operation principle of the rotational vibration provision means by the support structure 40 in the 6 leg type tuning fork type vibration gyro of the 2nd Embodiment of this invention. (A) is a perspective view of the support structure 40 and the vibrator 1 as viewed from above, (B) is an enlarged view of the support structure 40, and (C) and (D) are vibrators by the rotational vibration applying means included in the support structure 40. It is a figure which shows the aspect which 1 vibrates. It is a figure for demonstrating the angular velocity of the vibrator | oscillator 1 in embodiment of FIG. 1, FIG. It is a figure which shows the operation principle of the rotational vibration provision means by the support structure 50 in the tuning fork type vibration gyroscope which is a modification of the 2nd Embodiment of this invention shown in FIG. (A) is a perspective view of the support structure 50 and the vibrator 1 as viewed from above, (B) is an enlarged view of the support structure 50, and (C) and (D) are vibrators by the rotational vibration applying means included in the support structure 50. It is a figure which shows the aspect which 1 vibrates. FIG. 6 is an enlarged view of the support structure 50 shown in FIG. 5, in which the support member 5 and the piezoelectric ceramic elements 51 and 52 are drawn as opaque bodies. FIG. 2 is an exploded perspective view showing a tuning-fork type vibration gyro disclosed in FIG. 8A, 8 </ b> B, and 8 </ b> C are diagrams of the angular velocity detection device disclosed in Patent Document 2 as FIGS. 1, 2, and 5.

  Next, embodiments of the present invention will be described, and the present invention will be described more specifically with reference to the drawings. FIG. 1 is an exploded perspective view of a six-leg type tuning fork type vibrating gyroscope according to the first embodiment of the present invention. FIG. 2 is a diagram showing the operating principle of the rotational vibration applying means in the first embodiment of FIG. FIG. 2A is a perspective view of the support structure 20 and the vibrator 1 viewed from above, and is drawn on the assumption that the support structure 20 and the vibrator 1 are transparent. FIG. 2B is an enlarged view of the support structure 20, and FIGS. 2C and 2D are views showing a mode in which the vibrator 1 vibrates by the rotational vibration applying means included in the support structure 20. 1 and 2, the same reference numerals as those in FIG. 7 mean the same elements. The same applies to FIGS. 3 to 5 to be described later.

  The six-leg type tuning fork type vibration gyro shown in FIG. 1 includes a vibrator 1 that is a tuning fork type six-leg vibrator, a support structure 20, and a package 3. The lower surface of the support structure 20 is fixed to the upper surface of the package 3 with an adhesive, and the upper surface of the support structure 20 is fixed to the center of the bottom surface of the body 10 of the vibrator 1 with an adhesive. An arrow in FIG. 1 indicates a direction in which the vibrator 1 and the support structure 20 are mounted on the package 3.

  The vibrator 1 is made of a piezoelectric material, and has a plate-like body portion 10 at the center, a tripod drive leg 11 extending from one end surface of the body portion 10, and detection of three legs extending from the other end surface of the body portion 10. Legs 12. The drive leg 11 includes excitation drive legs 11a and 11b and a non-excitation drive leg 11c. The detection leg 12 includes vibration detection legs 12a and 12b and a non-vibration detection leg 12c.

  In the vibrator 1, when in-plane vibration in a direction parallel to the main surface (upper surface in FIG. 1) is excited by the excitation drive legs 11 a and 11 b, and rotation is input around the longitudinal axis of the non-excitation drive legs 11 c. In accordance with the input angular velocity, the surface vertical vibration in the direction perpendicular to the main surface is excited by the Coriolis force and transmitted to the vibration detection legs 12a and 12b via the trunk portion 10. This longitudinal axis is the input axis of the vibrator 1.

  The vibrator 1 converts the angular velocity around the input shaft into surface vertical vibration of the vibration detection legs 12a and 12b, and the surface vertical vibration is generated by electrodes (not shown) attached to the vibration detection legs 12a and 12b. Convert to electrical signal and output.

  The piezoelectric material of the vibrator 1 is quartz or the like. The dimensions of the vibrator 1 are as follows: the thickness is 0.4 mm, the length and width of the body 10 (2w described later, see FIG. 4) are both 4 mm, the drive legs 11a, 11b, 11c and the detection legs 12a, 12b, 12c. any length 6 mm, the width of which leg is 0.4mm either. 1 and 2 are conceptually drawn, the ratio of the dimensions of the respective parts in these drawings does not necessarily correspond to the dimensions of the respective parts. The same applies to FIGS. 3 to 6 to be described later.

  In a tuning fork type vibration gyro, a vibrator is mounted on a package, and the package is fixed to an object whose angular velocity is to be measured. Therefore, some supporting means for supporting the vibrator with the part of the package as a fulcrum is an essential constituent member. The support means is provided between the vibrator and the package. The tuning fork type vibration gyro shown in FIG. 1 has a structure that supports the vibrator 1 by fixing a square pillar type support structure 20 to the body portion 10 of the vibrator 1 with an adhesive or the like.

  The support structure 20 includes a support member 2 and electrodes 21 to 24 as shown in an enlarged view in FIG. The support member 2 is a quadrangular prism made of quartz and has a height of 1 mm and a width and a depth of 0.6 mm. The electrodes 21 to 24 correspond to the above-described rotational vibration applying means, and are respectively attached to both side edges of two opposing side surfaces of the quadrangular prism. The two side surfaces refer to the front side surface and the back side surface in FIG. 2B, and electrodes 21 and 23 are attached to the front side surface, and electrodes 22 and 24 are attached to the back side surface. Has been. The electrode 21 is provided on the left side edge of the front side surface, and the electrode 23 is provided on the right side edge of the front side surface. Further, the electrode 22 is provided on one side edge of the rear surface so as to face the electrode 21. The electrode 24 is provided facing the electrode 23 on the side edge on the other side of the rear surface.

  2B applies an AC voltage having a frequency f and a voltage v to the electrodes 21 to 24. FIGS. 2C and 2D are diagrams conceptually showing a mode in which the support member 2 expands and contracts in opposite directions by applying an alternating voltage v having a frequency f to the electrodes 21 to 24. When the left side of the support member 2 contracts, the right side of the support member 2 expands (FIG. 2C). Conversely, when the left side of the support member 2 extends, the right side of the support member 2 contracts (FIG. 2D).

  In FIG. 2B, when the support member 2 is a crystal, the longitudinal direction of the quadrangular column forming the support member 2 (the direction perpendicular to the upper surface and the lower surface of the quadrangular column) is the Y direction of the crystal axis. The Y direction here refers to the direction of stretching vibration when an electric field is applied. Further, the application direction of the electric field at this time is defined as the X direction. When a voltage is applied between the electrodes 21 and 22 and an electric field in the X direction is applied to the support member 2, when the left side of the support member 2 contracts, a reverse polarity voltage is applied between the electrodes 23 and 24. When the electric field in the −X direction is applied to the support member 2, the right side of the support member 2 extends (FIG. 2C). Similarly, an electric field in the −X direction is applied to the support member 2 by the voltage between the electrodes 21 and 22, the left side of the support member 2 extends, and an electric field in the X direction is applied to the support member 2 by the voltage between the electrodes 23 and 24. added to, it shrinks right support member 2 (FIG. 2 (D)). Note that the relationship between the direction of the electric field and the direction of the stretching vibration of the support member varies depending on the piezoelectric material used in the support member.

  The direction of the angular velocity input shaft 100 of the vibrator 1 is the longitudinal axis direction of the non-excitation drive leg 11c and the non-vibration detection leg 12c, as shown in FIG. 2 (A) and FIGS. is there. Since the vertical axis of the support member 2 is in the Y-axis direction of FIG. 2B as described above, it is orthogonal to the angular velocity input shaft 100. In the mode of FIGS. 2C and 2D, the support member 2 expands and contracts in the directions opposite to each other about the axis. Therefore, the support structure 20 composed of the support member 2 and the electrodes 21 to 24 has a rotational vibration around the angular velocity input shaft 100 as shown by arrows drawn on the left and right of the vibrator 1 in FIGS. Is given to the vibrator 1.

FIG. 4 is a diagram for explaining the angular velocity of the vibrator 1 due to rotational vibration. Now, in the XYZ orthogonal coordinates, the vertical axis of the support member 2 is in the Y axis, the angular velocity input axis of the vibrator 1 is in the X axis direction, and the vibrator when the vibrator 1 is not subjected to rotational vibration around the X axis. 1 is parallel to the Z-axis, the width of the body 10 of the vibrator 1 is 2w, the rotational angle of the vibrator 1 due to the rotational vibration of sinωt is θ [rad], and the vibrator 1 is rotated by an angle θ. Where h is the circumferential displacement of the end of the vibrator 1 in the width direction, the angular velocity dθ / dt due to rotational vibration can be obtained by the following equation.

wθ = hsinωt
θ = (h / w) sinωt
dθ / dt = ω · (h / w) cos ωt
= 2πf (h / w) cos ωt [rad / s] (1)
According to the computer simulation, if the voltage between the electrodes 21-22 and 23-24 is 1 [V] and the frequency f is 100 [Hz], w = 2 mm, so h = 0.015 nm (MAX). . When these numerical values are applied to the equation (1), the maximum value 2πf · (h / w) of the angular velocity dθ / dt is 0.00036 [° / s]. This is because, in the tuning fork type vibration gyro according to the embodiment of FIGS. 1 and 2, the frequency f = 100 [Hz] and the voltage v = 1 [V] between the electrodes 21-22 of the support structure 20 and 23-24. It shows that an angular velocity dθ / dt of 0.00036 [° / s] at maximum can be input by applying the voltage.

  Now, it is assumed that the tuning fork type vibration gyro according to the embodiment shown in FIGS. 1 and 2 has a high accuracy and the bias stability is a maximum of 0.005 [° / s]. For fault diagnosis, it is only necessary to input an angular velocity exceeding the detection sensitivity, and this detection sensitivity is sufficiently smaller than the bias stability. Therefore, it is only necessary to input an angular velocity exceeding the bias stability of 0.005 [° / s]. Since the angular velocity dθ / dt is proportional to the voltage v, an angular velocity of 0.007 [° / s] can be input to the vibrator 1 by setting v = 1 [V] to v = 20 [V].

  Since the applied voltage v of the support structure 20 can be sufficiently set to 20 [V] or more, the angular velocity capable of diagnosing the presence or absence of a failure of the tuning fork type vibrating gyroscope having a bias stability larger than 0.005 [° / s]. Can be entered.

  In this embodiment, in order to input an angular velocity for failure diagnosis to the angular velocity input shaft (same as the input shaft 100 of the vibrator 1) of the tuning fork type vibration gyroscope, the rotational vibration applying means including the electrodes 21 to 24 is a rectangular column. The support member 2 is provided on two opposing side surfaces, and the support member 2 is expanded and contracted in the opposite directions on the electrodes 21 and 22 side and the electrodes 23 and 24 side. As described above, in the present embodiment, the means for applying rotational vibration around the input shaft 100 of the vibrator 1 to the vibrator 1 (rotational vibration applying means) includes the electrodes 21 to 24 provided on the support member 2. It can be realized extremely small and inexpensively.

  In the embodiment of FIGS. 1 and 2, the height, width, and depth of the support member 2 are 1 mm, 0.6 mm, and 0.6 mm, respectively, but there is no particular limitation on the dimensional ratio of these three sides. The material of the support member 2 is quartz in the present embodiment, but other piezoelectric single crystals such as langasite and other piezoelectric materials may be used. In the present embodiment, the package 3 is made of Kovar, and silicone is used as an adhesive for fixing the support member 2 to the vibrator 1 and the package 3. However, instead of these, the material of the package 3 may be ceramic, iron-nickel alloy, or the like, and the adhesive may be epoxy resin, rubber, or the like.

  FIG. 3 is a diagram showing an operating principle of the rotational vibration applying means by the support structure 40 in the six-leg type tuning fork type vibration gyro according to the second embodiment of the present invention. FIG. 3A is a perspective view of the support structure 40 and the vibrator 1 as viewed from above, and is drawn on the assumption that the support structure 40 and the vibrator 1 are transparent. FIG. 3B is an enlarged view of the support structure 40. FIGS. 3C and 3D are views showing a mode in which the vibrator 1 vibrates by the rotational vibration applying means provided in the support structure 40.

  The six-leg type tuning fork type vibration gyro of FIG. 3 is different from the tuning fork type vibration gyro of the first embodiment shown in FIGS. 1 and 2 in that the support structure 20 is replaced with a support structure 40, and other points. Is the same. The support structure 40 includes a quadrangular prism support member 4 made of an elastic body and piezoelectric ceramic elements 41 and 42. The piezoelectric ceramic elements 41 and 42 are respectively provided on two opposing side surfaces of the quadrangular prism, and correspond to the aforementioned rotational vibration applying means. Electrodes (not shown) are fixed to the piezoelectric ceramic elements 41 and 42. By applying an AC voltage to these electrodes, the piezoelectric ceramic elements 41 and 42 are subjected to stretching vibration as shown in FIGS. providing rotational oscillation of the first angular velocity input shaft 100 around the vibrator 1. The principle of applying rotational vibration to the vibrator 1 is the same as that described in the first embodiment with reference to FIGS. The elastic body forming the support member 4 is preferably a material having high hardness and high elasticity, and can be metal, resin, or glass. As the metal material, stainless steel can be mentioned as an example.

  FIG. 5 is a diagram showing the operating principle of the rotational vibration applying means in the modification of the second embodiment of the present invention shown in FIG. The modification of FIG. 5 includes a hexagonal column support structure 50 instead of the square column support structure 40 in the second embodiment of FIG. 3, and is otherwise the same as the second embodiment of FIG. 3. . FIG. 5 is drawn assuming that the support structure 50 and the vibrator 1 are transparent. The support structure 50 includes a hexagonal column support member 5 made of an elastic body and piezoelectric ceramic elements 51 and 52. The piezoelectric ceramic elements 51 and 52 are respectively provided on two opposing side surfaces of the hexagonal column, and correspond to the aforementioned rotational vibration applying means. Electrodes (not shown) are fixed to the piezoelectric ceramic elements 51 and 52, and by applying an alternating voltage to these electrodes, stretching vibration is generated as shown in FIGS. providing rotational oscillation of the first angular velocity input shaft 100 around the vibrator 1. The principle of applying rotational vibration to the vibrator 1 is the same as that described above for the first embodiment with reference to FIGS. 2 (C) and 2 (D). As the elastic body constituting the support member 5, a material having high hardness and high elasticity is preferable, and metal, resin, or glass can be used. As the metal material, stainless steel can be mentioned as an example. FIG. 6 is an enlarged view of the support structure 50 shown in FIG. 5, in which the support member 5 and the piezoelectric ceramic elements 51 and 52 are drawn as opaque bodies.

  In the embodiment of the present invention described above, the vibrator is a hexapod type, but the present invention can be applied even if the vibrator is of a type other than the hexapod type such as an H type (four legs). Furthermore, in the embodiment of the present invention, the dimensions, shapes, materials, and the like of each part are specifically shown. However, these are merely examples, and the present invention is of course not limited to this embodiment. is there.

[Explanation of Symbols in FIGS. 1 to 6]
DESCRIPTION OF SYMBOLS 1 Vibrator 2,4,5 Support member 3 Package 10 Trunk part 11 Drive leg 11a, 11b Excitation drive leg 11c Non-excitation drive leg 12 Detection leg 12a, 12b Vibration detection leg 12c Non-vibration detection leg 20, 40 , 50 Support structure 21, 22, 23, 24 Electrode 25 AC power supply 30 Package substrate 30a Support member fixing area 41, 42, 51, 52 Piezoelectric ceramic element 100 Angular velocity input shaft

Claims (6)

In a tuning fork-type vibrating gyroscope including a vibrator, a package, and a support member,
The support member is a polygonal column, and one end surface and the other end surface orthogonal to the longitudinal direction of the polygonal column are fixed to the vibrator and the package, the vibrator is supported on the package, and the vertical axis The direction is a direction orthogonal to the angular velocity input axis of the vibrator, and the support member is provided with rotational vibration applying means for applying rotational vibration around the input axis of the vibrator to the vibrator. Tuning fork type vibration gyro.   2. The tuning fork type vibration gyro according to claim 1, wherein the rotational vibration applying means causes the support member to expand and contract in opposite directions parallel to the longitudinal axis direction.   3. The support member is a rectangular column made of a piezoelectric single crystal material, and the rotational vibration applying means is an electrode provided on each side edge of two opposing side surfaces of the support member. Tuning fork type vibration gyro described in 1.   3. The tuning fork type according to claim 2, wherein the support member is made of an elastic material, and the rotational vibration applying unit is a piezoelectric element with an electrode provided on each of two opposing side surfaces of the support member. Vibration gyro.   5. A tuning fork type vibration gyro according to claim 1, wherein an alternating current is supplied to said rotational vibration applying means as an angular velocity input for fault diagnosis. The two opposing side surfaces are a first side surface and a second side surface orthogonal to the angular velocity input axis,
The electrodes include first and second electrodes facing each other, and third and fourth electrodes facing each other,
The first and third electrodes are provided on each side edge on the first side surface and opposite to each other in a direction orthogonal to the angular velocity input axis and the longitudinal axis direction,
The second and fourth electrodes are provided on each side edge on the second side surface and opposite to each other in a direction orthogonal to the angular velocity input axis and the vertical axis direction,
The support member is applied with an electric field from the first electrode to the second electrode, and when an electric field from the fourth electrode to the third electrode is applied, The length in the longitudinal direction at the side edge on the side where the second electrode is provided is extended, and the length at the side edge on the side where the third and fourth electrodes are provided. The length in the axial direction was shrunk, and conversely, an electric field from the second electrode toward the first electrode was applied, and an electric field from the third electrode toward the fourth electrode was applied. When the first and second electrodes are provided on the side edge portion of the side edge portion, the length in the longitudinal axis direction is contracted, and the third and fourth electrodes are provided on the side provided with the first and second electrodes. The tuning-fork type vibration jaw according to claim 3, wherein a length of the side edge portion in the longitudinal axis direction is extended. Iro.

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