JP2011082286A5 - - Google Patents

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Publication number
JP2011082286A5
JP2011082286A5 JP2009232135A JP2009232135A JP2011082286A5 JP 2011082286 A5 JP2011082286 A5 JP 2011082286A5 JP 2009232135 A JP2009232135 A JP 2009232135A JP 2009232135 A JP2009232135 A JP 2009232135A JP 2011082286 A5 JP2011082286 A5 JP 2011082286A5
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JP
Japan
Prior art keywords
end point
polishing end
spectral profiles
reflection intensity
spectral
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JP2009232135A
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English (en)
Japanese (ja)
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JP2011082286A (ja
JP5583946B2 (ja
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Priority to JP2009232135A priority Critical patent/JP5583946B2/ja
Priority claimed from JP2009232135A external-priority patent/JP5583946B2/ja
Priority to US12/897,973 priority patent/US8568199B2/en
Publication of JP2011082286A publication Critical patent/JP2011082286A/ja
Publication of JP2011082286A5 publication Critical patent/JP2011082286A5/ja
Priority to US14/036,321 priority patent/US8777694B2/en
Application granted granted Critical
Publication of JP5583946B2 publication Critical patent/JP5583946B2/ja
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JP2009232135A 2009-10-06 2009-10-06 研磨終点検知方法および研磨終点検知装置 Active JP5583946B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009232135A JP5583946B2 (ja) 2009-10-06 2009-10-06 研磨終点検知方法および研磨終点検知装置
US12/897,973 US8568199B2 (en) 2009-10-06 2010-10-05 Polishing endpoint detection apparatus
US14/036,321 US8777694B2 (en) 2009-10-06 2013-09-25 Polishing endpoint detection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009232135A JP5583946B2 (ja) 2009-10-06 2009-10-06 研磨終点検知方法および研磨終点検知装置

Publications (3)

Publication Number Publication Date
JP2011082286A JP2011082286A (ja) 2011-04-21
JP2011082286A5 true JP2011082286A5 (https=) 2012-11-15
JP5583946B2 JP5583946B2 (ja) 2014-09-03

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JP2009232135A Active JP5583946B2 (ja) 2009-10-06 2009-10-06 研磨終点検知方法および研磨終点検知装置

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US (2) US8568199B2 (https=)
JP (1) JP5583946B2 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8388408B2 (en) * 2008-10-10 2013-03-05 Ebara Corporation Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method for selecting wavelength of light for polishing endpoint detection, and polishing endpoint detection method
JP5728239B2 (ja) * 2010-03-02 2015-06-03 株式会社荏原製作所 研磨監視方法、研磨方法、研磨監視装置、および研磨装置
US9221147B2 (en) * 2012-10-23 2015-12-29 Applied Materials, Inc. Endpointing with selective spectral monitoring
TWI635929B (zh) * 2013-07-11 2018-09-21 日商荏原製作所股份有限公司 研磨裝置及研磨狀態監視方法
JP6475604B2 (ja) * 2015-11-24 2019-02-27 株式会社荏原製作所 研磨方法
JP2018083267A (ja) * 2016-11-25 2018-05-31 株式会社荏原製作所 研磨装置及び研磨方法
JP7023063B2 (ja) * 2017-08-08 2022-02-21 株式会社荏原製作所 基板研磨装置及び方法
JP6985107B2 (ja) * 2017-11-06 2021-12-22 株式会社荏原製作所 研磨方法および研磨装置
JP7667025B2 (ja) * 2021-08-06 2025-04-22 株式会社荏原製作所 研磨装置および研磨装置における研磨終点検出方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6489624B1 (en) * 1997-07-18 2002-12-03 Nikon Corporation Apparatus and methods for detecting thickness of a patterned layer
JP3360610B2 (ja) 1998-05-21 2002-12-24 株式会社ニコン 検出方法及び検出装置及び研磨装置
US6271047B1 (en) 1998-05-21 2001-08-07 Nikon Corporation Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same
JP3607083B2 (ja) 1998-07-21 2005-01-05 大日本スクリーン製造株式会社 終点検出装置、終点検出方法
JP4542324B2 (ja) 2002-10-17 2010-09-15 株式会社荏原製作所 研磨状態監視装置及びポリッシング装置
JP2004165473A (ja) * 2002-11-14 2004-06-10 Seiko Epson Corp Ｃｍｐ装置、ｃｍｐ研磨方法、半導体装置及びその製造方法
JP4581427B2 (ja) 2004-02-27 2010-11-17 富士電機システムズ株式会社 膜厚評価方法、研磨終点検出方法
KR101361875B1 (ko) 2005-05-26 2014-02-12 가부시키가이샤 니콘 Ｃｍｐ 연마 장치에서의 연마 종료점 검출 방법, ｃｍｐ연마 장치, 및 반도체 디바이스의 제조 방법
JP4857659B2 (ja) * 2005-08-24 2012-01-18 富士電機株式会社 膜厚評価方法、研磨終点検出方法及びデバイス製造装置
TWI422798B (zh) * 2006-10-06 2014-01-11 荏原製作所股份有限公司 加工終點檢測方法、研磨方法及研磨裝置
US8388408B2 (en) * 2008-10-10 2013-03-05 Ebara Corporation Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method for selecting wavelength of light for polishing endpoint detection, and polishing endpoint detection method

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