JP2011079625A - Workpiece carrying carriage and workpiece processing system - Google Patents

Workpiece carrying carriage and workpiece processing system Download PDF

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JP2011079625A
JP2011079625A JP2009232542A JP2009232542A JP2011079625A JP 2011079625 A JP2011079625 A JP 2011079625A JP 2009232542 A JP2009232542 A JP 2009232542A JP 2009232542 A JP2009232542 A JP 2009232542A JP 2011079625 A JP2011079625 A JP 2011079625A
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gas
buffer tank
workpiece
carriage
supply
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Toshio Egami
寿雄 惠上
Masaumi Okuda
雅海 奥田
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Chugai Ro Co Ltd
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Chugai Ro Co Ltd
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Priority to JP2009232542A priority Critical patent/JP2011079625A/en
Priority to TW099128626A priority patent/TW201113456A/en
Priority to CN201010505841XA priority patent/CN102034657A/en
Priority to KR1020100096297A priority patent/KR20110037877A/en
Publication of JP2011079625A publication Critical patent/JP2011079625A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a workpiece carrying carriage that inexpensively and easily use gas. <P>SOLUTION: The workpiece carrying carriage 1 has an apparatus 11 for consuming the gas, and revolves around a closed rail, and is provided with buffer tanks 13 and 14 for storing the gases. Couplers 16 and 17 are arranged in receiving flow passages 22 and 23 capable of supplying the gases to the buffer tanks 13 and 14, and every time when the workpiece carrying carriage 1 makes one round around the rail, external supply flow passages 29 and 30 are connected to the couplers 16 and 17, and required quantities of the gases are replenished to the buffer tanks 13 and 14 during the one-round revolution of the workpiece carrying carriage 1. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、ワーク搬送台車およびワーク加工システムに関する。   The present invention relates to a workpiece conveyance carriage and a workpiece machining system.

例えば、フラットディスプレイパネルの製造では、特許文献１〜３に記載されているように、複数のガラス基板（ワーク）を保持して、レールに沿って加熱炉内を通過するワーク搬送台車が使用される。ワーク搬送台車は、ガラス基板の真空引き作業に用いられるエアシリンダや空気圧によって膨張して気密性を確保する空気圧チャック等を備え、その駆動のための圧縮空気を製造するエアコンプレッサがそれぞれに設けられている。空気圧チャックでは、圧縮空気にドレンが混入していると、その機能を損なう場合があり、低露点の圧縮空気が必要とされる。このため、フラットディスプレイパネル製造用のワーク搬送台車には、スーパードライヤを備えるエアコンプレッサが搭載されている。   For example, in the manufacture of a flat display panel, as described in Patent Documents 1 to 3, a work carriage that holds a plurality of glass substrates (workpieces) and passes through a heating furnace along rails is used. The The work carriage is equipped with an air cylinder used for evacuating the glass substrate, a pneumatic chuck that expands by air pressure to ensure airtightness, etc., and an air compressor that produces compressed air for driving it is provided for each. ing. In a pneumatic chuck, if drain is mixed in compressed air, its function may be impaired, and compressed air with a low dew point is required. For this reason, an air compressor equipped with a super dryer is mounted on a work conveyance carriage for manufacturing a flat display panel.

このように、ワーク搬送台車にエアコンプレッサを搭載すると、その他の搭載機器との間の空間が小さくなり、メンテナンス性が損なわれるという問題がある。また、各ワーク搬送台車にエアコンプレッサを搭載すると、設備コストが大きくなる。さらに、スーパードライヤは、ドレンのために常に圧縮空気を放出するので、圧縮空気の補充のために断続的に稼働し、電力を消費し続ける。   As described above, when the air compressor is mounted on the work conveyance carriage, there is a problem that the space between the other mounted devices is reduced and the maintainability is impaired. In addition, if an air compressor is mounted on each workpiece transfer carriage, the equipment cost increases. Furthermore, since the super dryer always discharges compressed air for drainage, it operates intermittently to replenish compressed air and continues to consume power.

特許文献４のワーク検査装置は、圧縮空気によって開閉してワークを把持するチャックを備える搬送するパレットの圧縮空気の流路にカプラを設け、パレットの停止位置において、カプラに管路を接続して圧縮空気を供給または排出することで、チャックを開閉させている。   In the workpiece inspection apparatus of Patent Document 4, a coupler is provided in a compressed air flow path of a pallet to be transported provided with a chuck that is opened and closed by compressed air, and a pipe line is connected to the coupler at a stop position of the pallet. The chuck is opened and closed by supplying or discharging compressed air.

しかしながら、特許文献１〜３のフラットパネルの製造設備（ワーク加工システム）では、ワーク搬送台車が加熱炉の中を移動しながら圧縮空気を消費するので、特許文献４のワーク検査装置のように、ワーク搬送台車に管路を接続して外部から圧縮空気を供給することはできない。   However, in the flat panel manufacturing equipment (work processing system) of Patent Documents 1 to 3, since the work transport carriage consumes compressed air while moving in the heating furnace, like the work inspection apparatus of Patent Document 4, Compressed air cannot be supplied from the outside by connecting a pipeline to the work carriage.

また、フラットディスプレイパネルの製造に用いるワーク搬送台車は、特許文献１〜３に記載されているように、パネルに封入する発光ガスのボンベも搭載しており、ボンベの残圧が低くなると、人手によってそれらのボンベを交換している。多数のワーク搬送台車を使用する生産設備では、交換用のボンベも多数必要となり、数多くのボンベを管理しなければならない。   In addition, as described in Patent Documents 1 to 3, the work conveyance carriage used for manufacturing the flat display panel is also equipped with a cylinder of luminescent gas sealed in the panel, and when the residual pressure of the cylinder is low, By replacing those cylinders. In a production facility that uses a large number of work carriages, a large number of replacement cylinders are required, and many cylinders must be managed.

特開２００２−１７３３３１号公報JP 2002-173331 A 特開２００２−３２４４８６号公報JP 2002-324486 A 特開２００５−２１６８３０号公報JP 2005-216830 A 特開平１１−２９５０６０号公報Japanese Patent Laid-Open No. 11-295060

前記問題点に鑑みて、本発明は、ガスを安価且つ容易に使用できるワーク搬送台車およびそのようなワーク搬送台車を使用したワーク加工システムを提供することを課題とする。   In view of the above-described problems, an object of the present invention is to provide a workpiece transfer carriage that can use gas inexpensively and easily, and a workpiece processing system that uses such a workpiece transfer carriage.

前記課題を解決するために、本発明によるワーク搬送台車は、ガスを消費する機器と、ガスを蓄えるバッファタンクと、前記バッファタンクにガスを供給できる受入流路と、前記受入流路に設けたカプラとを有するものとする。   In order to solve the above-mentioned problems, a work conveying cart according to the present invention is provided with a device that consumes gas, a buffer tank that stores gas, a receiving channel that can supply gas to the buffer tank, and the receiving channel. And a coupler.

この構成によれば、カプラを介して供給されたガスをバッファタンクに一時的に蓄えることで、ワークを搬送・加工している間に消費するガスをまかなうことができる。また、ワーク搬送台車毎に、圧縮機やガスボンベのようなガスの供給源を設ける必要がないので、設備コストや管理コストが小さく、ワーク搬送台車の有効スペースも大きくとれる。また。カプラを介してガスの供給源に接続することで、簡単にガスを補給できるため、製造プロセスのサイクル毎に、頻繁にガスを補給することができる。これにより、バッファタンクの容量が小さくても、ガスの圧力を高くして蓄えるガスの量を多くする必要がないので、バッファタンクに高い耐圧性が要求されない。   According to this configuration, by temporarily storing the gas supplied via the coupler in the buffer tank, it is possible to cover the gas consumed while the workpiece is being conveyed and processed. In addition, since it is not necessary to provide a gas supply source such as a compressor or a gas cylinder for each work transfer carriage, the equipment cost and the management cost are low, and the effective space of the work transfer carriage can be increased. Also. By connecting to the gas supply source via the coupler, the gas can be easily replenished, so that the gas can be replenished frequently every cycle of the manufacturing process. Thereby, even if the capacity of the buffer tank is small, it is not necessary to increase the amount of gas stored by increasing the gas pressure, so that the buffer tank is not required to have high pressure resistance.

また、本発明のワーク搬送台車において、前記ガスを消費する機器と前記バッファタンクとの間にレギュレータを有してもよい。   Moreover, in the workpiece conveyance truck of the present invention, a regulator may be provided between the gas consuming device and the buffer tank.

この構成によれば、ガスの使用圧力よりもバッファタンクの圧力を高くすることで、ガスの使用圧力を一定にできる。   According to this configuration, the gas use pressure can be made constant by making the buffer tank pressure higher than the gas use pressure.

また、本発明のワーク搬送台車において、前記受入流路に、逆止弁および開閉弁の少なくともいずれかを設けてもよい。   Moreover, in the workpiece conveyance cart of the present invention, at least one of a check valve and an on-off valve may be provided in the receiving flow path.

この構成によれば、カプラを外した状態で、受入流路を介してバッファタンクガスが漏出しない。   According to this configuration, the buffer tank gas does not leak through the receiving flow path with the coupler removed.

また、本発明によれば、閉じた軌条上をワーク搬送台車が循環するワーク加工システムは、前記ワーク搬送台車が、ガスを消費する機器と、ガスを収容するバッファタンクと、前記バッファタンクにガスを供給できる受入流路と、前記受入流路に設けたカプラとを有し、前記軌条上の前記ワーク搬送台車を停止させられる位置に、前記カプラに供給流路を接続して、前記バッファタンクにガスを供給する供給ステーションを設けたものとする。   Further, according to the present invention, the workpiece processing system in which the workpiece transfer carriage circulates on the closed rail is configured such that the workpiece transfer carriage includes a device that consumes gas, a buffer tank that stores gas, and a gas that is contained in the buffer tank. A buffer provided in the receiving channel and connected to the coupler at a position where the work transport carriage can be stopped on the rail, and the buffer tank It is assumed that a supply station for supplying gas is provided.

この構成によれば、供給ステーションにおいて、各ワーク搬送台車のバッファタンクに次に供給ステーションに停留するまでに消費する分のガスを蓄えるので、ワーク搬送台車が移動しながらガスを消費できる。   According to this configuration, in the supply station, the amount of gas consumed until the next stop at the supply station is stored in the buffer tank of each work transport carriage, so that the gas can be consumed while the work transport carriage is moving.

本発明によれば、ワーク搬送台車にガスを蓄えるバッファタンクを設け、着脱容易なカプラを介してバッファタンクに頻繁にガスを補給できるようにしたので、ワーク搬送台車に圧縮機のようなガスの製造装置やガスボンベのような高圧のガス供給源を搭載する必要がない。これにより、ワーク加工システムの設備コストおよび運転コストを低減できる。   According to the present invention, the work transport carriage is provided with a buffer tank for storing gas, and the buffer tank can be replenished frequently through an easily attachable / detachable coupler. There is no need to mount a high-pressure gas supply source such as a manufacturing apparatus or a gas cylinder. Thereby, the installation cost and operation cost of a workpiece processing system can be reduced.

本発明の第１実施形態のフラットディスプレイパネル製造設備のレイアウト図である。It is a layout figure of the flat display panel manufacturing equipment of a 1st embodiment of the present invention. 図１のパネル搬送台車および供給ステーションの概略図である。It is the schematic of the panel conveyance trolley and supply station of FIG. 本発明の第２実施形態のフラットディスプレイパネル製造設備のパネル搬送台車および供給ステーションの概略図である。It is the schematic of the panel conveyance trolley and supply station of the flat display panel manufacturing equipment of 2nd Embodiment of this invention. 本発明の第３実施形態のフラットディスプレイパネル製造設備のパネル搬送台車および供給ステーションの概略図である。It is the schematic of the panel conveyance trolley and supply station of the flat display panel manufacturing equipment of 3rd Embodiment of this invention.

これより、本発明の実施形態について、図面を参照しながら説明する。図１は、本発明の第１実施形態のフラットディスプレイパネル製造設備（ワーク加工システム）のレイアウト図である。このフラットディスプレイパネル製造設備は、フラットディスプレイパネル用のガラス基板（ワーク）を積載して移動する複数のワーク搬送台車１が、閉じた軌条２の上を循環する。   Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a layout diagram of a flat display panel manufacturing facility (work processing system) according to a first embodiment of the present invention. In this flat display panel manufacturing facility, a plurality of workpiece transfer carriages 1 that load and move a glass substrate (work) for a flat display panel circulate on a closed rail 2.

軌条２は、それぞれ直線状のレールＲからなる往路および復路と、往路および復路の両端に設けられ、ワーク搬送台車１を往路から復路または復路から往路へと移し替えるトランスファー装置Ｔとからなる。   The rail 2 includes an outward path and a return path each composed of a straight rail R, and a transfer device T that is provided at both ends of the forward path and the return path, and transfers the work transport carriage 1 from the forward path to the return path or from the return path to the forward path.

軌条２の往路は、大半が、ガラス基板を加熱して内部空間を真空引きするための加熱炉３の中を延伸している。加熱炉３の直後には、ガラス基板に発光ガスを封入する封入ステーション４が設けられている。   Most of the outward path of the rail 2 extends in the heating furnace 3 for heating the glass substrate and evacuating the internal space. Immediately after the heating furnace 3 is provided a sealing station 4 for sealing a luminescent gas in a glass substrate.

軌条２の復路には、ガラス基板の真空排気および発光ガス封入のための流路となるチップ管を封止する封止ステーション５と、ワーク搬送台車１からガラス基板を取り出すアンローディングステーション６と、メンテナンスのためにワーク搬送台車１を引き出す引き出しステーション７と、ワーク搬送台車１にガラス基板を積み込むローディングステーション８とワーク搬送台車１に発光ガスおよび圧縮空気を供給する供給ステーション９とが設けられている。   In the return path of the rail 2, a sealing station 5 that seals a chip tube that becomes a flow path for evacuating the glass substrate and enclosing a luminescent gas, an unloading station 6 that takes out the glass substrate from the work carriage 1, A drawer station 7 for pulling out the workpiece conveyance carriage 1 for maintenance, a loading station 8 for loading a glass substrate onto the workpiece conveyance carriage 1, and a supply station 9 for supplying luminescent gas and compressed air to the workpiece conveyance carriage 1 are provided. .

図２に、ガス供給ステーション９に停止しているワーク搬送台車１を簡略化して示す。ワーク搬送台車１は、上部の収容スペースに、ガラス基板Ｐを保持する複数の保持部材１０と、それぞれガラス基板Ｐを真空引きして発光ガスを封入するために、空気圧で動作するチャックおよびエアシリンダを備える複数のヘッド（ガスを消費する機器）１１とを有する。   In FIG. 2, the workpiece conveyance carriage 1 stopped at the gas supply station 9 is shown in a simplified manner. The work conveyance carriage 1 includes a plurality of holding members 10 that hold the glass substrate P in an upper accommodation space, and a chuck and an air cylinder that are operated by air pressure to evacuate the glass substrate P and enclose the luminescent gas, respectively. And a plurality of heads (devices that consume gas) 11.

また、ワーク搬送台車１は、下部の機械スペースに、ヘッド１１を真空引きするための真空ポンプ１２と、発光ガスを蓄えるガスバッファタンク１３と、圧縮空気を蓄えるエアバッファタンク１４と、ヘッド１１の構成要素に、真空ポンプ１２、ガスバッファタンク１３およびエアバッファタンク１４を、所定のプログラムにしたがって接続する分配制御装置１５とを有する。   Further, the work conveyance carriage 1 includes a vacuum pump 12 for evacuating the head 11, a gas buffer tank 13 for storing luminescent gas, an air buffer tank 14 for storing compressed air, The component has a distribution control device 15 for connecting the vacuum pump 12, the gas buffer tank 13 and the air buffer tank 14 according to a predetermined program.

ガスバッファタンク１３およびエアバッファタンク１４は、それぞれ、末端にメス型のカプラ１６，１７を備え、逆止弁１８，１９および受入弁２０，２１が設けられた受入流路２２，２３が接続されている。カプラ１６，１７は、ワーク搬送台車１の底面に、下向きに固定されている。また、ガスバッファタンク１３およびエアバッファタンク１４は、それぞれ、レギュレータ２４，２５を介して分配制御装置１５にガスおよび圧縮空気を供給する。   The gas buffer tank 13 and the air buffer tank 14 are respectively provided with female couplers 16 and 17 at their ends, and receiving passages 22 and 23 provided with check valves 18 and 19 and receiving valves 20 and 21 are connected. ing. The couplers 16 and 17 are fixed downward on the bottom surface of the work conveyance carriage 1. The gas buffer tank 13 and the air buffer tank 14 supply gas and compressed air to the distribution control device 15 via regulators 24 and 25, respectively.

逆止弁１８，１９および受入弁２０，２１は、ガスバッファタンク１３およびエアバッファタンク１４から受入流路２２，２３を介して圧縮空気および発光ガスが漏出しないようにするためのものであり、封止能力が十分であれば、いずれか一方であってもよい。また、逆止弁１８，１９および受入弁２０，２１は、カプラ１６，１７に内蔵されてもよい。   The check valves 18 and 19 and the reception valves 20 and 21 are for preventing compressed air and luminescent gas from leaking from the gas buffer tank 13 and the air buffer tank 14 through the reception flow paths 22 and 23, Any one of them may be used as long as the sealing ability is sufficient. The check valves 18 and 19 and the receiving valves 20 and 21 may be incorporated in the couplers 16 and 17.

また、ワーク搬送台車１は、底面に、２つのローラからなる位置決め受け部材２６を有する。位置決め受け部材２６は、不図示の搬送バーを受け入れて、ワーク搬送台車１の駆動のためにも供される。   Moreover, the workpiece conveyance carriage 1 has the positioning receiving member 26 which consists of two rollers on the bottom face. The positioning receiving member 26 receives a transfer bar (not shown) and is also used for driving the workpiece transfer carriage 1.

供給ステーション９は、発光ガスのガスボンベ２７および低露点空気圧縮機２８を備え、ガスボンベ２７および低露点空気圧縮機２８から、発光ガスおよび圧縮空気をワーク搬送台車１の受入流路２２，２３に供給するための供給流路２９，３０を有する。供給流路２９，３０の先端には、エアシリンダ３１，３２によって昇降して、カプラ１６，１７と結合するオス型のカプラ３３，３４が設けられている。尚、ガスボンベ２７および低露点空気圧縮機２８は、供給ステーション９から離れた場所に設置され、配管によって供給ステーション９に発光ガスおよび圧縮ガスを供給するものであってもよい。   The supply station 9 includes a gas cylinder 27 for light emission gas and a low dew point air compressor 28, and supplies the light emission gas and compressed air from the gas cylinder 27 and the low dew point air compressor 28 to the receiving passages 22 and 23 of the work conveyance carriage 1. Supply passages 29 and 30 are provided. Male couplers 33 and 34 that are moved up and down by air cylinders 31 and 32 and coupled to the couplers 16 and 17 are provided at the ends of the supply flow paths 29 and 30. In addition, the gas cylinder 27 and the low dew point air compressor 28 may be installed in a place away from the supply station 9 and supply the luminescent gas and the compressed gas to the supply station 9 by piping.

供給流路２９には、レギュレータ３５および供給弁３６が設けられ、カプラ１６とカプラ３３とが結合したときだけ、供給流路２９を介して受入流路２２に所定圧力の発光ガスを供給するようになっている。供給流路３０は、供給弁３７を有し、カプラ１７にカプラ３４が結合したときだけ、受入流路２３に圧縮空気を供給する。   The supply flow path 29 is provided with a regulator 35 and a supply valve 36 so that only when the coupler 16 and the coupler 33 are coupled, the luminescent gas having a predetermined pressure is supplied to the reception flow path 22 through the supply flow path 29. It has become. The supply flow path 30 has a supply valve 37 and supplies compressed air to the reception flow path 23 only when the coupler 34 is coupled to the coupler 17.

また、供給ステーション９は、エアシリンダ３８によって昇降して、ワーク搬送台車１の位置決め受け部材２６を係止する位置決め部材３９を有している。   Further, the supply station 9 has a positioning member 39 that is moved up and down by the air cylinder 38 to lock the positioning receiving member 26 of the work conveyance carriage 1.

本実施形態のフラットディスプレイパネル製造設備において、ワーク搬送台車１は、軌条２を１周する毎に、供給ステーション９上に停止して、カプラ１６，１７にカプラ３３，３４が結合されることにより、受入流路２２，２３に供給流路２９，３０が接続され、ガスバッファタンク１３に発光ガスが、エアバッファタンク１４に圧縮空気が、それぞれ、所定の圧力で供給される。   In the flat display panel manufacturing facility of the present embodiment, the work conveyance carriage 1 stops on the supply station 9 every time the rail 2 is rotated once, and the couplers 33 and 34 are coupled to the couplers 16 and 17. The supply passages 29 and 30 are connected to the reception passages 22 and 23, and the luminescent gas is supplied to the gas buffer tank 13 and the compressed air is supplied to the air buffer tank 14 at a predetermined pressure.

勿論、１周の軌条２に複数の供給ステーション９を設けて、エアバッファタンク１４に圧縮空気を２回に分けて補給してもよい。また、圧縮空気および発光ガスの消費量が少ない場合は、数周に１回、圧縮空気および発光ガスを補給するようにしてもよい。   Needless to say, a plurality of supply stations 9 may be provided on the rail 2 for one turn, and the compressed air may be supplied to the air buffer tank 14 in two portions. Further, when the consumption amounts of compressed air and luminescent gas are small, the compressed air and luminescent gas may be replenished once every several cycles.

ワーク搬送台車１のガスバッファタンク１３に発光ガスを供給するために、カプラ１６にカプラ３３を接続したとき、受入流路２２および供給流路２９の受入弁２０と供給弁３６との間には、空気が閉じこめられる。この空気は、受入弁２０および供給弁３６を開いてガスバッファタンク１３に発光ガスを供給すると、バッファタンク１３に流入し、ガスバッファタンク１３内において、供給された発光ガスと混ざり合う。このため、１回に供給する発光ガスの量に対して、受入流路２２および供給流路２９に取り込まれる空気量が十分に小さくなるように、受入流路２２および供給流路２９の受入弁２０と供給弁３６との間の空間を小さくすることが好ましい。さらに、カプラ１６およびカプラ３３にバルブを内蔵したものを用いて、カプラ１６とカプラ３３とを分離したとき、受入流路２２および供給流路２９に空気が進入しないようにすることがより好ましい。   When the coupler 33 is connected to the coupler 16 in order to supply the luminescent gas to the gas buffer tank 13 of the work transport carriage 1, there is a gap between the receiving valve 20 and the supply valve 36 of the receiving flow path 22 and the supply flow path 29. The air is trapped. When the receiving valve 20 and the supply valve 36 are opened and the luminescent gas is supplied to the gas buffer tank 13, this air flows into the buffer tank 13 and mixes with the supplied luminescent gas in the gas buffer tank 13. For this reason, the receiving valve of the receiving flow path 22 and the supply flow path 29 is set so that the amount of air taken into the receiving flow path 22 and the supply flow path 29 becomes sufficiently small with respect to the amount of luminescent gas supplied at one time. It is preferable to reduce the space between 20 and the supply valve 36. Furthermore, it is more preferable that when the coupler 16 and the coupler 33 are separated using the coupler 16 and the coupler 33 having a built-in valve, air does not enter the receiving flow path 22 and the supply flow path 29.

また、供給ステーション９は、位置決め部材３９によって受け部材２６を係止してワーク搬送台車１の位置決めを行うが、さらに、カプラ１６，１７またはカプラ３３，３４が自動調芯機構を備えることが望ましい。   In addition, the supply station 9 engages the receiving member 26 with the positioning member 39 to position the workpiece transport carriage 1, and it is preferable that the couplers 16 and 17 or the couplers 33 and 34 have an automatic alignment mechanism. .

ガスバッファタンク１３およびエアバッファタンク１４は、ワーク搬送台車１が軌条２を１周する間のディスプレイパネルの製造工程において消費する量の発光ガスおよび圧縮空気を供給できればよい。このため、ガスバッファタンク１３およびエアバッファタンク１４は、容積の大きいものや高圧のものでなくてもよい。また、ガスバッファタンク１３およびエアバッファタンク１４は、圧縮ガスおよび発光ガスの供給のために電動機を必要としないので、ワーク搬送台車１の消費電力が小さい。また、ワーク搬送台車１は、ガスバッファタンク１３およびエアバッファタンク１４が動力機構を有しないので、メンテナンスの頻度も低くてよい。   The gas buffer tank 13 and the air buffer tank 14 only need to be able to supply light emission gas and compressed air in an amount consumed in the manufacturing process of the display panel while the work conveyance carriage 1 goes around the rail 2 once. For this reason, the gas buffer tank 13 and the air buffer tank 14 do not have to be large in volume or high pressure. Further, since the gas buffer tank 13 and the air buffer tank 14 do not require an electric motor for supplying compressed gas and luminescent gas, the power consumption of the work transfer carriage 1 is small. In addition, since the work buffer carriage 1 does not have a power mechanism, the gas buffer tank 13 and the air buffer tank 14 may have a low maintenance frequency.

図３に、本発明の第２実施形態のフラットディスプレイパネル製造設備のワーク搬送台車１ａおよび供給ステーション９ａを示す。本実施形態のワーク搬送台車１ａは、構成上、ガスバッファタンク１３の受入流路２２が排気弁４０を介して真空ポンプ１２に接続されている点のみが第１実施形態と異なる。そこで、第１実施形態と同じ構成要素には同じ符号を付して、重複する説明を省略する。   FIG. 3 shows a work transfer carriage 1a and a supply station 9a of a flat display panel manufacturing facility according to a second embodiment of the present invention. The workpiece transfer carriage 1a of the present embodiment differs from the first embodiment only in that the receiving flow path 22 of the gas buffer tank 13 is connected to the vacuum pump 12 via the exhaust valve 40 in terms of configuration. Therefore, the same components as those in the first embodiment are denoted by the same reference numerals, and redundant description is omitted.

本実施形態において、ワーク搬送台車１のガスバッファタンク１３に発光ガスを供給する際は、カプラ１６にカプラ３３を接続した後、受入流路２２の受入弁２０および供給流路２９の供給弁３６を開く前に、先ず排気弁４０を開放して、真空ポンプ１２によって受入流路２２の内部の空気を排気することで、ガスバッファタンク１３に空気が混入しないようにする。   In the present embodiment, when the luminescent gas is supplied to the gas buffer tank 13 of the work conveyance carriage 1, the coupler 33 is connected to the coupler 16, and then the receiving valve 20 of the receiving flow path 22 and the supply valve 36 of the supply flow path 29. Before opening, the exhaust valve 40 is first opened, and the air inside the receiving passage 22 is exhausted by the vacuum pump 12 so that the air is not mixed into the gas buffer tank 13.

さらに、図４に、本発明の第３実施形態のフラットディスプレイパネル製造設備のワーク搬送台車１ｂおよび供給ステーション９ｂを示す。本実施形態の構成は、供給ステーション９ｂに真空ポンプ４１が設置され、供給流路２９に排気弁４２を介して真空ポンプ４１が接続されている点が、第１実施形態と異なる。ここでも、第１実施形態と同じ構成要素には同じ符号を付して、重複する説明を省略する。   Further, FIG. 4 shows a work conveying cart 1b and a supply station 9b of a flat display panel manufacturing facility according to a third embodiment of the present invention. The configuration of this embodiment is different from that of the first embodiment in that a vacuum pump 41 is installed in the supply station 9b and the vacuum pump 41 is connected to the supply flow path 29 via an exhaust valve 42. Also here, the same components as those in the first embodiment are denoted by the same reference numerals, and redundant description is omitted.

この真空ポンプ４１も、第２実施形態と同様に、受入流路２２のカプラ１６に供給流路２９のカプラ３３を接続した後、受入弁２０および供給弁３６を開いてガスバッファタンク１３に発光ガスを供給する前に、排気弁４２を開いて受入流路２２および供給流路２９の内部を真空引きして、発光ガスに空気が混入しないようにするものである。   Similarly to the second embodiment, the vacuum pump 41 also connects the coupler 33 of the supply flow path 29 to the coupler 16 of the reception flow path 22 and then opens the reception valve 20 and the supply valve 36 to emit light to the gas buffer tank 13. Before supplying the gas, the exhaust valve 42 is opened to evacuate the interior of the receiving flow path 22 and the supply flow path 29 so that air is not mixed into the luminescent gas.

本実施形態では、第２実施形態と異なり、受入流路２２および供給流路２９の内部を真空引きするために、各ワーク搬送台車１ｂに設けた真空ポンプ１２を用いず、供給ステーション９ｂに専用の真空ポンプ４１を設置したので、高真空を実現してより高いレベルで発光ガスに空気が混入することを防止できる。   In the present embodiment, unlike the second embodiment, in order to evacuate the interior of the receiving flow path 22 and the supply flow path 29, the vacuum pump 12 provided in each workpiece transfer carriage 1b is not used, but dedicated to the supply station 9b. Since the vacuum pump 41 is installed, it is possible to realize high vacuum and prevent air from being mixed into the luminescent gas at a higher level.

１，１ａ，１ｂ…ワーク搬送台車
２…軌条
９，９ａ，９ｂ…供給ステーション
１１…ヘッド（ガスを消費する機器）
１２…真空ポンプ
１３…ガスバッファタンク
１４…エアバッファタンク
１６，１７…カプラ
１８，１９…逆止弁
２０，２１…受入弁
２２，２３…受入流路
２４，２５…レギュレータ
２７…ガスボンベ
２８…低露点空気圧縮機
２９，３０…供給流路
３１，３２…エアシリンダ
３３，３４…カプラ
３５…レギュレータ
３６，３７…供給弁
４０，４２…排気弁
４１…真空ポンプ
Ｐ…ガラス基板（ワーク）
Ｒ…レール DESCRIPTION OF SYMBOLS 1, 1a, 1b ... Work conveying cart 2 ... Rail 9, 9a, 9b ... Supply station 11 ... Head (apparatus which consumes gas)
DESCRIPTION OF SYMBOLS 12 ... Vacuum pump 13 ... Gas buffer tank 14 ... Air buffer tank 16, 17 ... Coupler 18, 19 ... Check valve 20, 21 ... Reception valve 22, 23 ... Reception flow path 24, 25 ... Regulator 27 ... Gas cylinder 28 ... Low Dew point air compressor 29, 30 ... Supply flow path 31, 32 ... Air cylinder 33, 34 ... Coupler 35 ... Regulator 36, 37 ... Supply valve 40, 42 ... Exhaust valve 41 ... Vacuum pump P ... Glass substrate (workpiece)
R ... Rail

Claims (4)

ガスを消費する機器と、
ガスを蓄えるバッファタンクと、
前記バッファタンクにガスを供給できる受入流路と、
前記受入流路に設けたカプラとを有することを特徴とするワーク搬送台車。 Gas consuming equipment,
A buffer tank that stores gas,
A receiving channel capable of supplying gas to the buffer tank;
And a coupler provided in the receiving flow path. 前記ガスを消費する機器と前記バッファタンクとの間にレギュレータを有することを特徴とする請求項１に記載のワーク搬送台車。   The work conveying cart according to claim 1, further comprising a regulator between the gas consuming device and the buffer tank. 前記受入流路に、逆止弁および開閉弁の少なくともいずれかを設けたことを特徴とする請求項１または２に記載のワーク搬送台車。   The work conveying carriage according to claim 1, wherein at least one of a check valve and an on-off valve is provided in the receiving flow path. 閉じた軌条上をワーク搬送台車が循環するワーク加工システムにおいて、
前記ワーク搬送台車は、ガスを消費する機器と、ガスを収容するバッファタンクと、前記バッファタンクにガスを供給できる受入流路と、前記受入流路に設けたカプラとを有し、
前記軌条上の前記ワーク搬送台車を停止させられる位置に、前記カプラに供給流路を接続して、前記バッファタンクにガスを供給する供給ステーションを設けたことを特徴とするワーク加工システム。 In a workpiece processing system in which a workpiece transfer carriage circulates on a closed rail,
The work transport carriage has a device that consumes gas, a buffer tank that stores gas, a receiving channel that can supply gas to the buffer tank, and a coupler that is provided in the receiving channel,
A workpiece machining system, wherein a supply station for supplying a gas to the buffer tank by connecting a supply flow path to the coupler is provided at a position on the rail where the workpiece conveyance carriage can be stopped.
JP2009232542A 2009-10-06 2009-10-06 Workpiece carrying carriage and workpiece processing system Pending JP2011079625A (en)

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TW099128626A TW201113456A (en) 2009-10-06 2010-08-26 Work transporting cart, work processing system, gas feeding system and gas feeding method
CN201010505841XA CN102034657A (en) 2009-10-06 2010-09-29 Work transporting cart, work processing system, gas feeding system and gas feeding method
KR1020100096297A KR20110037877A (en) 2009-10-06 2010-10-04 Work transporting cart, work processing system, gas feeding system and gas feeding method

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JPH092253A (en) * 1995-06-23 1997-01-07 Mitsubishi Motors Corp Conveying device
JPH11238777A (en) * 1998-02-23 1999-08-31 Mitsubishi Electric Corp Cassette carrier and cassette carrier system provided therewith
JP2002203889A (en) * 2000-12-27 2002-07-19 Tokyo Electron Ltd Equipment for vacuum holding device to be treated
JP2004026026A (en) * 2002-06-26 2004-01-29 Nec Kansai Ltd Carrying device

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Publication number Priority date Publication date Assignee Title
JP2021158193A (en) * 2020-03-26 2021-10-07 ヤマハ発動機株式会社 Production system

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