JP2011079037A - Laser beam machining apparatus and method for monitoring laser beam machining condition using the same - Google Patents

Laser beam machining apparatus and method for monitoring laser beam machining condition using the same Download PDF

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JP2011079037A
JP2011079037A JP2009235179A JP2009235179A JP2011079037A JP 2011079037 A JP2011079037 A JP 2011079037A JP 2009235179 A JP2009235179 A JP 2009235179A JP 2009235179 A JP2009235179 A JP 2009235179A JP 2011079037 A JP2011079037 A JP 2011079037A
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reflected light
laser processing
laser beam
laser
bend mirror
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Kazuhiro Takabayashi
一裕 高林
Yoshihisa Miyamoto
佳尚 宮本
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Amada Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus which is capable of constantly monitoring the center of laser beam machining part, which has no burning damage of a photodetector of an optical fiber that receives reflected light from the center of the machining part, and which prevents a laser beam machining head from being damaged by preliminarily avoiding collision between the laser beam machining head and a workpiece, and also to provide a method for monitoring a laser beam machining condition using the apparatus. <P>SOLUTION: The laser beam machining apparatus is equipped with: a bend mirror holder in a laser beam machining head; a bend mirror that reflects a laser beam to a condensing lens and that transmits reflected light composed of visible light from the machining section, in the bend mirror holder; a light receiving end of an optical fiber for receiving the reflected light, in the back of the bend mirror; and a reflected light detection means that detects presence/absence of reflected light received by the light receiving end. The laser beam machining apparatus is characterized in that presence/absence of a workpiece is determined by the detection of reflected light by the reflected light detection means. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、レーザ加工装置及び同装置を用いたレーザ加工状態監視方法に関する。より詳細には、レーザ加工中心部を常時監視可能で、かつレーザ加工ヘッドとワークとの衝突を事前に回避して、レーザ加工ヘッドの破損を防止可能なレーザ加工装置及び同装置を用いたレーザ加工状態監視方法に関するものである。   The present invention relates to a laser processing apparatus and a laser processing state monitoring method using the apparatus. More specifically, a laser processing apparatus capable of constantly monitoring the laser processing center and avoiding a collision between the laser processing head and the workpiece in advance to prevent damage to the laser processing head and a laser using the same The present invention relates to a machining state monitoring method.

レーザ加工部を監視可能なレーザ加工ヘッドを備えたレーザ加工装置の例として、例えば、ピアス加工工程において、ピアス穴が実際に貫通したか否かを認識するピアス穴貫通認識装置を備えたレーザ加工装置がある(例えば、特許文献1)。   As an example of a laser processing apparatus including a laser processing head capable of monitoring a laser processing unit, for example, laser processing including a piercing hole penetration recognition device that recognizes whether or not a piercing hole has actually penetrated in a piercing process. There exists an apparatus (for example, patent document 1).

また、レーザ加工ヘッドとワークとの衝突によるレーザ加工ヘッドの破損を防止するレーザ加工機の例として、レーザ加工ヘッドとワークとの衝突を検出してからレーザ加工機の運転を停止させるものもある(例えば、特許文献2)。   In addition, as an example of a laser processing machine that prevents damage to the laser processing head due to the collision between the laser processing head and the work, there is one that detects the collision between the laser processing head and the work and then stops the operation of the laser processing machine. (For example, patent document 2).

特許文献1に記載のピアス穴貫通認識装置の概要は、加工ヘッド2内部の集光レンズ7の上方に配置したベンドミラー10の側方に、光ファイバ3の先端がワークの加工点に指向するように配置して、ピアス加工時に加工点で発生する可視光が光ファイバ3に入射されるようになっており、この光ファイバ3に入射された入射光のレベルによりピアス穴加工が完了したか否かを認識するものである。   The outline of the piercing hole penetration recognition device described in Patent Document 1 is as follows. The tip of the optical fiber 3 is directed to the processing point of the workpiece on the side of the bend mirror 10 disposed above the condenser lens 7 inside the processing head 2. The visible light generated at the processing point at the time of piercing is made incident on the optical fiber 3, and the piercing hole processing is completed depending on the level of the incident light incident on the optical fiber 3. It is to recognize whether or not.

また、特許文献2に記載のレーザ加工機の概要は、トーチボディ3とエンドエフェクタ(ノズル部分に相当)4とからなるトーチ(レーザ加工ヘッド部分に相当)1を、前記トーチボディ3に対して磁気的に吸着固定し、前記エンドエフェクタ4にワークWから外力が作用した場合には、すなわち、ノズル部分とワークWとが衝突した場合には、吸着固定部分が離脱してノズル部分が外力の作用方向に移動可能に設け、このノズル部分の移動をセンサにより検知し、レーザ加工機の運転を停止させるものである。   The outline of the laser processing machine described in Patent Document 2 is that a torch (corresponding to a laser processing head part) 1 including a torch body 3 and an end effector (corresponding to a nozzle part) 4 is attached to the torch body 3. When an external force is applied to the end effector 4 from the workpiece W, that is, when the nozzle portion and the workpiece W collide, the suction fixing portion is detached and the nozzle portion is subjected to an external force. It is provided so as to be movable in the action direction, and the movement of the nozzle portion is detected by a sensor to stop the operation of the laser processing machine.

特開2001−239388号公報JP 2001-239388 A 特開平06−182569号公報Japanese Patent Laid-Open No. 06-182569

然しながら、特許文献1のピアス穴貫通認識装置においては、不良切断時に発生するレーザ光の全反射により、加工ヘッド内部の集光レンズ7上方に配置したベンドミラー10の側方に設けた光ファイバ3の先端3Aが焼損する危険性がある。   However, in the pierced hole penetration recognition device of Patent Document 1, the optical fiber 3 provided on the side of the bend mirror 10 disposed above the condenser lens 7 inside the processing head due to total reflection of the laser light generated at the time of defective cutting. There is a risk of burning the tip 3A of the.

通常、ベンドミラー10は入射レーザ光Lのビーム径の光軸中心に配置されており、集光レンズ7に入射されるレーザ光のビーム径の外周部を規制するアパーチャー(図示省略)を集光レンズ7の上方(レーザ光Lの入射側)に配置するのが一般的である。   Normally, the bend mirror 10 is arranged at the center of the optical axis of the beam diameter of the incident laser light L, and collects an aperture (not shown) that regulates the outer periphery of the beam diameter of the laser light incident on the condenser lens 7. Generally, it is arranged above the lens 7 (on the incident side of the laser beam L).

上述の如く、レーザ光のビーム径の外周部を規制するアパーチャー(図示省略)を配置した構成のピアス穴貫通認識装置の場合においては、光ファイバ3の受光部3Aはこのアパーチャー(図示省略)の背後上方(レーザ光Lの入射側)に設置されているので、加工部中心からの反射光がこのアパーチャー(図示省略)に干渉されて光ファイバ3の受光部3Aに入らない。したがって、加工部中心を常時監視することができないというデメリットがある。   As described above, in the case of the piercing hole penetration recognition device in which the aperture (not shown) for restricting the outer periphery of the beam diameter of the laser beam is arranged, the light receiving unit 3A of the optical fiber 3 has the aperture (not shown). Since it is installed on the upper rear side (incident side of the laser beam L), the reflected light from the center of the processing part interferes with this aperture (not shown) and does not enter the light receiving part 3A of the optical fiber 3. Therefore, there is a demerit that the center of the processing part cannot be constantly monitored.

特許文献2における衝突防止装置においては、ワークとの衝突に着目しているが、例えば、ワーク無し(ワークの端)あるいは、既加工の穴などの箇所にトーチが位置する場合、ギャップセンサーが検知したワークとのギャップが無限大となり、限りなくワークのパスライン以下までトーチが突っ込んでいく現象に対処できない。すなわち、ワークを監視するのはギャップを観ることに置き換わっている為の不都合である。また、一旦衝突した場合、エンドエフェクタが離脱して直ぐには回復できないという不都合がある。   In the collision prevention device in Patent Document 2, attention is paid to the collision with the workpiece. For example, when the torch is located at a location such as no workpiece (workpiece end) or a hole that has already been machined, the gap sensor detects it. The gap between the workpiece and the workpiece has become infinite, and it is impossible to cope with the phenomenon that the torch plunges below the workpiece pass line. In other words, monitoring the workpiece is inconvenient because it is replaced by watching the gap. In addition, once a collision occurs, there is an inconvenience that the end effector cannot be recovered immediately after being detached.

本発明は上述の如き問題を解決する為に成されたものであり、本発明の課題はレーザ加工部中心を常時監視することができ、かつ、加工部中心からの反射光を受光する光ファイバの受光部が焼損せず、また、レーザ加工ヘッドとワークとの衝突を事前に回避して、レーザ加工ヘッドの破損を防止可能なレーザ加工装置及び同装置を用いたレーザ加工状態監視方法を提供することである。   The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to constantly monitor the center of the laser processing section and to receive the reflected light from the center of the processing section. Provides a laser processing apparatus that can prevent the laser processing head from being damaged by preventing the laser processing head from being burned out, avoiding collision between the laser processing head and the workpiece in advance, and a laser processing state monitoring method using the same It is to be.

上述の課題を解決する手段として請求項1に記載のレーザ加工装置は、NC制御装置の制御の下にワークテーブル上方においてX軸、Y軸及びZ軸方向へ移動位置決め自在のレーザ加工ヘッドを備えたレーザ加工装置において、前記レーザ加工ヘッドの集光レンズのレーザ光入射側にベンドミラー保持体を設け、該ベンドミラー保持体にレーザ光源からのレーザ光を前記集光レンズへ反射し、かつレーザ加工時に発生する可視光からなる反射光を透過させるベンドミラーを設け、該ベンドミラーの背後に前記反射光を受光する光ファイバーの受光端部を設け、該受光端部が受光した反射光の有無を検出する反射光検出手段を前記光ファイバーの他端部に接続して設け、該反射光検出手段が前記反射光を検出したか否かによりワークの有無を判断することを特徴とするものである。   As a means for solving the above-described problems, the laser processing apparatus according to claim 1 includes a laser processing head that can be moved and positioned in the X-axis, Y-axis, and Z-axis directions above the work table under the control of the NC controller. In the laser processing apparatus, a bend mirror holder is provided on the laser beam incident side of the condensing lens of the laser processing head, the laser beam from the laser light source is reflected on the bend mirror holder, and the laser is reflected. A bend mirror that transmits reflected light composed of visible light generated during processing is provided, a light receiving end of an optical fiber that receives the reflected light is provided behind the bend mirror, and the presence or absence of reflected light received by the light receiving end is determined. Reflected light detection means for detecting is connected to the other end of the optical fiber, and the presence / absence of a workpiece is determined by whether the reflected light detection means detects the reflected light. It is characterized in that.

請求項2に記載のレーザ加工装置は、請求項1に記載の発明において、前記反射光がピアス加工時における反射光であることを特徴とするものである。   According to a second aspect of the present invention, there is provided the laser processing apparatus according to the first aspect, wherein the reflected light is reflected light during piercing.

請求項3に記載のレーザ加工状態監視方法は、NC制御装置の制御の下にワークテーブル上方においてX軸、Y軸及びZ軸方向へ移動位置決め自在のレーザ加工ヘッドを備えたレーザ加工装置において、前記レーザ加工ヘッドの集光レンズのレーザ光入射側にベンドミラー保持体を設け、該ベンドミラー保持体にレーザ光源からのレーザ光を前記集光レンズへ反射し、かつレーザ加工時に発生する可視光からなる反射光を透過させるベンドミラーを設け、該ベンドミラーの背後に前記反射光を受光する光ファイバーの受光端部を設け、該受光端部が受光した反射光の有無を検出する反射光検出手段を前記光ファイバーの他端部に接続して設け、該反射光検出手段が前記反射光を検出したか否かによりワークの有無を判断することを特徴とするものである。   The laser processing state monitoring method according to claim 3 is a laser processing apparatus comprising a laser processing head that can be moved and positioned in the X-axis, Y-axis, and Z-axis directions above the work table under the control of the NC control device. A bend mirror holder is provided on the laser beam incident side of the condensing lens of the laser processing head, the laser beam from the laser light source is reflected on the bend mirror holder to the condensing lens, and visible light generated during laser processing A reflected light detecting means for detecting the presence or absence of reflected light received by the light receiving end portion, provided with a bend mirror that transmits the reflected light comprising: a light receiving end portion of the optical fiber that receives the reflected light behind the bend mirror; Is connected to the other end of the optical fiber, and the presence or absence of a work is determined by whether or not the reflected light detecting means detects the reflected light. Than is.

請求項4に記載のレーザ加工状態監視方法は、請求項3に記載の発明において、前記反射光がピアス加工時における反射光であることを特徴とするものである。   According to a fourth aspect of the present invention, there is provided the laser processing state monitoring method according to the third aspect, wherein the reflected light is reflected light during piercing.

請求項5に記載のレーザ加工状態監視方法は、請求項3、4に記載の発明において、前記反射光が検出されなかった場合、前記レーザ加工装置の作動を停止させることを特徴とするものである。   A laser processing state monitoring method according to a fifth aspect is characterized in that, in the invention according to the third and fourth aspects, the operation of the laser processing apparatus is stopped when the reflected light is not detected. is there.

本願発明のレーザ加工状装置またはレーザ加工状態監視方法によれば、レーザ加工中心部を常時監視可能で、かつ、不良切断時にレーザ加工部中心からの反射光によって光ファイバの受光部が焼損せず、またレーザ加工ヘッドとワークとの衝突を事前に回避してレーザ加工ヘッドの破損を防止することができる。   According to the laser processing apparatus or the laser processing state monitoring method of the present invention, the laser processing center can be constantly monitored, and the light receiving portion of the optical fiber is not burned by the reflected light from the laser processing center at the time of defective cutting. In addition, it is possible to prevent the laser processing head from being damaged by avoiding a collision between the laser processing head and the workpiece in advance.

本願発明に係るレーザ加工装置のレーザ加工ヘッド部の説明図。Explanatory drawing of the laser processing head part of the laser processing apparatus which concerns on this invention. 本願発明に係るレーザ加工装置の概要図。1 is a schematic diagram of a laser processing apparatus according to the present invention.

以下、本発明の実施の形態を図面によって説明する。   Embodiments of the present invention will be described below with reference to the drawings.

図1は、本願発明に係るレーザ加工状装置1(図2参照)のレーザ加工ヘッド11の一部を示してたものである。   FIG. 1 shows a part of a laser processing head 11 of a laser processing apparatus 1 (see FIG. 2) according to the present invention.

図2を参照するに、前記レーザ加工状装置1は、光軸移動形のレーザ加工装置であり、基台3の上部にワークテーブル5が設けてある。また、基台3のY軸方向両端部には、X軸方向に延伸する軌道7が設けてあり、この軌道7にガイドされるX軸移動体9が前記ワークテーブル5の上方をX軸駆動手段(図示省略)により移動位置決め自在設けてある。   Referring to FIG. 2, the laser processing apparatus 1 is an optical axis moving type laser processing apparatus, and a work table 5 is provided on an upper portion of a base 3. A track 7 extending in the X-axis direction is provided at both ends of the base 3 in the Y-axis direction, and an X-axis moving body 9 guided by the track 7 drives the work table 5 above the X-axis. It can be moved and positioned by means (not shown).

また、前記X軸移動体9には、前記レーザ加工ヘッド11を備えた図示しないY軸移動体がY軸駆動手段(図示省略)によりY軸方向に(X軸に直交する方向)に移動位置決め自在に設けてある。   In the X-axis moving body 9, a Y-axis moving body (not shown) provided with the laser processing head 11 is moved and positioned in the Y-axis direction (direction orthogonal to the X-axis) by a Y-axis driving means (not shown). It is provided freely.

図1を参照するに、前記レーザ加工ヘッド11下部のノズル13の上部には、集光レンズ15が設けてあり、この集光レンズ15の上方に、すなわち、レーザー発振器17(図2参照)からのレーザ光Lが集光レンズ15に入射する側にベンドミラー保持体19が設けてある。   Referring to FIG. 1, a condensing lens 15 is provided above the nozzle 13 below the laser processing head 11, and above the condensing lens 15, that is, from a laser oscillator 17 (see FIG. 2). A bend mirror holder 19 is provided on the side where the laser beam L enters the condenser lens 15.

なお、前記レーザ加工ヘッド11下部のノズル13には、ノズル先端部とワークWとの間の間隔を一定に保持する非接触の、例えば静電容量センサーの如き公知のギャップセンサー(図示省略)が設けてある。   The nozzle 13 below the laser processing head 11 has a known non-contact gap sensor (not shown) such as a capacitance sensor that keeps the distance between the nozzle tip and the workpiece W constant. It is provided.

上記構成により、レーザ加工ヘッド11は、前記レーザ加工装置1のNC制御装置21の制御の下に前記ワークテーブル5上方においてX軸、Y軸及びZ軸方向(X、Y軸に直交する方向)へ移動位置決め自在である。   With the above configuration, the laser processing head 11 is controlled in the X-axis, Y-axis, and Z-axis directions (directions orthogonal to the X and Y axes) above the work table 5 under the control of the NC control device 21 of the laser processing apparatus 1. Positioning is possible.

また、前記ベンドミラー保持体19には、前記レーザー発振器17から、例えば複数のベンドミラーからなる光学系(図示省略)を介して伝送されたレーザ光Lを前記集光レンズ15へ反射させるベンドミラー23が設けてある。   The bend mirror holder 19 reflects a laser beam L transmitted from the laser oscillator 17 through, for example, an optical system (not shown) including a plurality of bend mirrors to the condenser lens 15. 23 is provided.

上述のベンドミラー23には、レーザー発振器17からの入射レーザ光Lを前記集光レンズ15へ全反射させると共に、レーザ加工時にワークWの加工部25で発生する可視光からなる反射光L’を部分的に透過させる特性を備えたものが用いてある。   The above-described bend mirror 23 totally reflects the incident laser light L from the laser oscillator 17 to the condenser lens 15 and also reflects the reflected light L ′ made of visible light generated at the processing portion 25 of the workpiece W during laser processing. The one having the characteristic of partially transmitting is used.

また、前記集光レンズ15とベンドミラー23との間には、集光レンズ15に入射されるレーザ光Lの外径を規制するための環状のアパーチャー27が設けてある。   An annular aperture 27 is provided between the condenser lens 15 and the bend mirror 23 to restrict the outer diameter of the laser light L incident on the condenser lens 15.

また、前記ベンドミラー23の背後には、ベンドミラー15を透過した前記反射光L’を受光するための光ファイバー29の受光端部が設けてある。この光ファイバー29の他端部は、前記NC制御装置21の内部に設けた反射光検出手段(図示省略)に接続してある。   Behind the bend mirror 23 is provided a light receiving end portion of an optical fiber 29 for receiving the reflected light L ′ transmitted through the bend mirror 15. The other end of the optical fiber 29 is connected to reflected light detection means (not shown) provided inside the NC control device 21.

前記反射光検出手段は光をデジタルの電気信号に変換する光センサーを有しており、これにより反射光の有無を検出するように構成してある。   The reflected light detection means has an optical sensor that converts light into a digital electrical signal, and is configured to detect the presence or absence of reflected light.

上記構成により、レーザ加工時に反射光検出手段が反射光が検出した場合には、ワークWの加工部25にワークが存在していると判断して加工を継続し、反射光が検出されなかった場合には加工部25にワークが存在していないか、または穴が在ると判断して、前記NC制御装置21によりレーザ加工装置の作動を停止させるようになっている。   With the above configuration, when reflected light is detected by the reflected light detection means during laser processing, it is determined that the workpiece is present in the processing portion 25 of the workpiece W, and the processing is continued, and the reflected light is not detected. In this case, it is determined that there is no workpiece or a hole is present in the machining section 25, and the operation of the laser machining apparatus is stopped by the NC control device 21.

1 レーザ加工装置
3 基台
5 ワークテーブル
7 軌道
9 X軸移動体
11 レーザ加工ヘッド
13 ノズル
15 集光レンズ
17 レーザー発振器
19 ベンドミラー保持体
21 NC制御装置
23 ベンドミラー
25 加工部
27 アパーチャー
29 光ファイバー
L レーザ光
L’反射光
DESCRIPTION OF SYMBOLS 1 Laser processing apparatus 3 Base 5 Work table 7 Orbit 9 X-axis moving body 11 Laser processing head 13 Nozzle 15 Condensing lens 17 Laser oscillator 19 Bend mirror holder 21 NC controller 23 Bend mirror 25 Processing part 27 Aperture 29 Optical fiber L Laser light L 'reflected light

Claims (5)

NC制御装置の制御の下にワークテーブル上方において互いに直交するX軸、Y軸及びZ軸方向へ移動位置決め自在のレーザ加工ヘッドを備えたレーザ加工装置において、前記レーザ加工ヘッドの集光レンズのレーザ光入射側にベンドミラー保持体を設け、該ベンドミラー保持体にレーザ光源からのレーザ光を前記集光レンズへ反射し、かつレーザ加工時に発生する可視光からなる反射光を透過させるベンドミラーを設け、該ベンドミラーの背後に前記反射光を受光する光ファイバーの受光端部を設け、該受光端部が受光した反射光の有無を検出する反射光検出手段を前記光ファイバーの他端部に接続して設け、該反射光検出手段が前記反射光を検出したか否かによりワークの有無を判断することを特徴とするレーザ加工装置。   In a laser processing apparatus having a laser processing head that can be moved and positioned in the X-axis, Y-axis, and Z-axis directions orthogonal to each other above the work table under the control of the NC control device, the laser of the condenser lens of the laser processing head A bend mirror holder is provided on the light incident side, and a bend mirror that reflects the laser light from the laser light source to the condenser lens and transmits the reflected light generated during laser processing is transmitted to the bend mirror holder. A light receiving end of an optical fiber that receives the reflected light is provided behind the bend mirror, and a reflected light detecting means that detects the presence or absence of reflected light received by the light receiving end is connected to the other end of the optical fiber. A laser processing apparatus, wherein the presence or absence of a workpiece is determined based on whether or not the reflected light detection means detects the reflected light. 請求項1に記載の発明において、前記反射光がピアス加工時における反射光であることを特徴とするレーザ加工装置。   The laser processing apparatus according to claim 1, wherein the reflected light is reflected light during piercing. NC制御装置の制御の下にワークテーブル上方において互いに直交するX軸、Y軸及びZ軸方向へ移動位置決め自在のレーザ加工ヘッドを備えたレーザ加工装置において、前記レーザ加工ヘッドの集光レンズのレーザ光入射側にベンドミラー保持体を設け、該ベンドミラー保持体にレーザ光源からのレーザ光を前記集光レンズへ反射し、かつレーザ加工時に発生する可視光からなる反射光を透過させるベンドミラーを設け、該ベンドミラーの背後に前記反射光を受光する光ファイバーの受光端部を設け、該受光端部が受光した反射光の有無を検出する反射光検出手段を前記光ファイバーの他端部に接続して設け、該反射光検出手段が前記反射光を検出したか否かによりワークの有無を判断することを特徴とするレーザ加工状態監視方法。   In a laser processing apparatus having a laser processing head that can be moved and positioned in the X-axis, Y-axis, and Z-axis directions orthogonal to each other above the work table under the control of the NC control device, the laser of the condenser lens of the laser processing head A bend mirror holder is provided on the light incident side, and a bend mirror that reflects the laser light from the laser light source to the condenser lens and transmits the reflected light generated during laser processing is transmitted to the bend mirror holder. A light receiving end of an optical fiber that receives the reflected light is provided behind the bend mirror, and a reflected light detecting means that detects the presence or absence of reflected light received by the light receiving end is connected to the other end of the optical fiber. And a laser processing state monitoring method, wherein the presence or absence of a workpiece is determined based on whether or not the reflected light detecting means detects the reflected light. 請求項3に記載の発明において、前記反射光がピアス加工時における反射光であることを特徴とするレーザ加工状態監視方法。   4. The laser processing state monitoring method according to claim 3, wherein the reflected light is reflected light during piercing. 請求項3、4に記載の発明において、前記反射光が検出されなかった場合、前記レーザ加工装置の作動を停止させることを特徴とするレーザ加工状態監視方法。   5. The laser processing state monitoring method according to claim 3, wherein the operation of the laser processing apparatus is stopped when the reflected light is not detected.
JP2009235179A 2009-10-09 2009-10-09 Laser beam machining apparatus and method for monitoring laser beam machining condition using the same Pending JP2011079037A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019181816A1 (en) 2018-03-23 2019-09-26 株式会社アマダホールディングス Laser processing machine and laser processing method
CN110814529A (en) * 2019-11-01 2020-02-21 成都大德人光电科技有限公司 Flexible circuit board laser cutting method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04262885A (en) * 1990-12-28 1992-09-18 Nippei Toyama Corp Method for setting working condition of laser beam machine
JPH09277071A (en) * 1996-04-18 1997-10-28 Nisshinbo Ind Inc Method and device for laser beam machining
JPH11138278A (en) * 1997-11-06 1999-05-25 Psl Kk Machining laser beam emitting device with machining defect discriminating mechanism
JP2001239388A (en) * 2000-02-29 2001-09-04 Amada Co Ltd Apparatus and it's method for recognition of penetration completed

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04262885A (en) * 1990-12-28 1992-09-18 Nippei Toyama Corp Method for setting working condition of laser beam machine
JPH09277071A (en) * 1996-04-18 1997-10-28 Nisshinbo Ind Inc Method and device for laser beam machining
JPH11138278A (en) * 1997-11-06 1999-05-25 Psl Kk Machining laser beam emitting device with machining defect discriminating mechanism
JP2001239388A (en) * 2000-02-29 2001-09-04 Amada Co Ltd Apparatus and it's method for recognition of penetration completed

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019181816A1 (en) 2018-03-23 2019-09-26 株式会社アマダホールディングス Laser processing machine and laser processing method
CN110814529A (en) * 2019-11-01 2020-02-21 成都大德人光电科技有限公司 Flexible circuit board laser cutting method

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