JP2011062963A - Manufacturing method of liquid discharging head - Google Patents

Manufacturing method of liquid discharging head Download PDF

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Publication number
JP2011062963A
JP2011062963A JP2009216911A JP2009216911A JP2011062963A JP 2011062963 A JP2011062963 A JP 2011062963A JP 2009216911 A JP2009216911 A JP 2009216911A JP 2009216911 A JP2009216911 A JP 2009216911A JP 2011062963 A JP2011062963 A JP 2011062963A
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Prior art keywords
element substrate
recording element
adhesive
manufacturing
liquid
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Inventor
Motoaki Sato
元昭 佐藤
Masashi Miyagawa
昌士 宮川
Shozo Hattori
省三 服部
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2009216911A priority Critical patent/JP2011062963A/en
Priority to US12/847,575 priority patent/US20110067810A1/en
Priority to EP10008238A priority patent/EP2305473B1/en
Priority to KR1020100088849A priority patent/KR101346536B1/en
Priority to RU2010138569/12A priority patent/RU2433918C1/en
Priority to CN201010287860XA priority patent/CN102019757B/en
Publication of JP2011062963A publication Critical patent/JP2011062963A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/17Ink jet characterised by ink handling
    • B41J2/175Ink supply systems ; Circuit parts therefor
    • B41J2/17503Ink cartridges
    • B41J2/17526Electrical contacts to the cartridge
    • B41J2/1753Details of contacts on the cartridge, e.g. protection of contacts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/17Ink jet characterised by ink handling
    • B41J2/175Ink supply systems ; Circuit parts therefor
    • B41J2/17503Ink cartridges
    • B41J2/17553Outer structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/17Ink jet characterised by ink handling
    • B41J2/175Ink supply systems ; Circuit parts therefor
    • B41J2/17503Ink cartridges
    • B41J2/17559Cartridge manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/14Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
    • B29C65/1403Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation characterised by the type of electromagnetic or particle radiation
    • B29C65/1406Ultraviolet [UV] radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/14Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
    • B29C65/1403Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation characterised by the type of electromagnetic or particle radiation
    • B29C65/1412Infrared [IR] radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/14Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
    • B29C65/1403Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation characterised by the type of electromagnetic or particle radiation
    • B29C65/1412Infrared [IR] radiation
    • B29C65/1416Near-infrared radiation [NIR]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/14Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
    • B29C65/1403Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation characterised by the type of electromagnetic or particle radiation
    • B29C65/1412Infrared [IR] radiation
    • B29C65/1419Mid-infrared radiation [MIR]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/14Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
    • B29C65/1403Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation characterised by the type of electromagnetic or particle radiation
    • B29C65/1412Infrared [IR] radiation
    • B29C65/1422Far-infrared radiation [FIR]

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a liquid discharging head capable of alleviating deformation caused by thermal expansion upon the bonding of an ink feed member with a recording element substrate and capable of alleviating misalignment upon the bonding of the recording element substrate. <P>SOLUTION: In the method, the recording element substrate 002 for discharging liquid and the liquid feed member for feeding the liquid to the recording element substrate 002 are coupled with an adhesive agent which contains at least an infrared ray absorbing agent and is hardened by an ion polymerization reaction mechanism, and the recording element substrate 002 includes a silicon substrate 008 to make the adhesive agent irradiated with light including at least an ultraviolet region to an infrared region pass through a filter composed of silicon. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、液体を吐出する液体吐出ヘッドの製造方法に関する。具体的にはインクを記録媒体に吐出して記録を行うインクジェット記録ヘッドの製造方法に関する。   The present invention relates to a method for manufacturing a liquid discharge head that discharges liquid. Specifically, the present invention relates to a method for manufacturing an ink jet recording head that performs recording by discharging ink onto a recording medium.

一般に、インクジェット記録装置の記録方式は、インクジェット記録ヘッドのインク吐出口から記録媒体に対してインクを吐出することで記録する、いわゆるノンインパクト記録方式が採用されている。   In general, as a recording method of an ink jet recording apparatus, a so-called non-impact recording method is adopted in which recording is performed by discharging ink to a recording medium from an ink discharge port of an ink jet recording head.

このノンインパクト記録方式を採用したインクジェット記録装置に採用されるインクジェット記録ヘッドとその製造方法が、特許文献1に開示されている。これは、以下のようなものである。   An ink jet recording head employed in an ink jet recording apparatus employing this non-impact recording method and a method for manufacturing the same are disclosed in Patent Document 1. This is as follows.

まず、インクを吐出するために利用されるエネルギーを発生するエネルギー発生素子とインクの吐出口とが設けられた記録素子基板を用意する。次いで、記録素子基板の所定の位置に接着剤を予め塗布する。次いで、記録素子基板にインクを供給するための樹脂成型によりつくられたインク供給部材と記録素子基板との位置合わせを行った後、記録素子基板とインク供給部材とを接着剤を介して貼り合わせる。そして、UV光で接着剤を仮硬化させ、熱キュアにて完全硬化を行う。   First, a recording element substrate provided with an energy generating element that generates energy used for ejecting ink and an ink ejection port is prepared. Next, an adhesive is applied in advance to a predetermined position of the recording element substrate. Next, after aligning the ink supply member made by resin molding for supplying ink to the recording element substrate and the recording element substrate, the recording element substrate and the ink supply member are bonded together with an adhesive. . Then, the adhesive is temporarily cured with UV light and is completely cured by thermal curing.

特開2009−61710号公報JP 2009-61710 A

インク供給部材は一般に熱可塑性樹脂からなるため、接着剤の硬化温度を経験すると、記録素子基板とインク供給部材の線膨張係数の違いが原因となり、記録素子基板が変形したり、マウント精度が低下する場合がある。   Since the ink supply member is generally made of a thermoplastic resin, if the curing temperature of the adhesive is experienced, the recording element substrate is deformed or the mounting accuracy is reduced due to the difference in the linear expansion coefficient between the recording element substrate and the ink supply member. There is a case.

より具体的には、接着剤の硬化のための加熱温度は、接着剤の種類によっても異なるが、一般的には80〜120℃程度である。上記の加熱によって、接着剤を硬化するときに接着剤が収縮したり、記録素子基板が膨張したり、さらにはインク供給部材が膨張したりする。このため、例えば記録素子基板の長さが1インチの場合は、記録素子基板がインク供給部材に対して位置合わせした位置から相対的に7〜30μm程度の伸び縮みすることが考えられる。このような加熱による伸び縮みが原因となって、インクジェット記録ヘッドの記録素子基板の位置が縦方向、横方向に位置合わせした位置よりずれてしまう場合がある。このズレが大きくなると、プリンタ本体にインクジェット記録ヘッドを搭載した時に組み付け精度が低下し、インク滴の着弾位置に影響が生じ、印字品位の低下を起こす原因となる場合がある。   More specifically, the heating temperature for curing the adhesive varies depending on the type of the adhesive, but is generally about 80 to 120 ° C. The heating causes the adhesive to contract when the adhesive is cured, the recording element substrate to expand, and further the ink supply member to expand. For this reason, for example, when the length of the recording element substrate is 1 inch, it is conceivable that the recording element substrate is relatively expanded or contracted by about 7 to 30 μm from the position where the recording element substrate is aligned with the ink supply member. Due to such expansion and contraction due to heating, the position of the recording element substrate of the ink jet recording head may deviate from the position aligned in the vertical and horizontal directions. When this deviation becomes large, the assembly accuracy is lowered when the ink jet recording head is mounted on the printer body, the landing position of the ink droplet is affected, and the print quality may be lowered.

従って、本発明は、インク供給部材と記録素子基板の接着時における熱膨張による変形を低減でき、記録素子基板の貼り付け時の位置ズレを低減できる液体吐出ヘッドの製造方法を提供することにある。   Accordingly, it is an object of the present invention to provide a method of manufacturing a liquid discharge head that can reduce deformation due to thermal expansion during adhesion of an ink supply member and a recording element substrate, and can reduce positional deviation when the recording element substrate is attached. .

そこで、本発明は、
液体を吐出する記録素子基板と、前記記録素子基板に前記液体を供給する液体供給部材と、を少なくとも赤外線吸収剤を含有しかつイオン重合反応機構により硬化する接着剤を用いて連結する方法であって、
前記記録素子基板はシリコン基板を含んで構成され、
少なくとも紫外から赤外領域を含む光をシリコンからなるフィルターに通して前記接着剤に照射することを特徴とする液体吐出ヘッドの製造方法である。
Therefore, the present invention provides
In this method, a recording element substrate that discharges a liquid and a liquid supply member that supplies the liquid to the recording element substrate are connected using an adhesive that contains at least an infrared absorber and is cured by an ion polymerization reaction mechanism. And
The recording element substrate includes a silicon substrate;
A method of manufacturing a liquid discharge head, wherein the adhesive is irradiated with light including at least ultraviolet to infrared regions through a filter made of silicon.

従来の技術において、赤外線吸収剤を含む接着剤に光を照射して硬化を促進させる際、照射光に含まれる紫外線や、赤外線のうちの一部の波長領域の光が記録素子基板を加熱してしまい、膨張による貼り付け誤差が大きくなる場合がある。とくに記録素子基板がシリコン基板を含んで構成される場合、シリコンは主に紫外光や、赤外線の一部の波長領域の光を吸収する性質を有するため、記録素子基板が加熱されやすい。   In the prior art, when irradiating light to an adhesive containing an infrared absorber to promote curing, ultraviolet light contained in the irradiated light or light in a part of the wavelength region of the infrared light heats the recording element substrate. In some cases, a pasting error due to expansion may increase. In particular, when the recording element substrate includes a silicon substrate, silicon mainly has a property of absorbing light in the ultraviolet light or a part of the wavelength region of infrared light, and thus the recording element substrate is easily heated.

そこで、本発明では、シリコンからなるフィルターに少なくとも紫外から赤外領域を含む光を通過させることにより得られた光を接着剤の硬化反応に用いる。シリコンは、図4に示すように、主に紫外光を低減する性質を有するため、シリコンからなるフィルターに光を通過させることにより紫外光を低減することができる。紫外光を低減させたかつ赤外光を含む光を用いることにより、シリコン基板を含む記録素子基板の加熱を防ぎつつ、赤外線を接着剤に照射して硬化反応を促進させることができる。したがって、本発明により、記録素子基板の加熱による膨張を低減することができ、記録素子基板と液体供給部材とを赤外線吸収剤を含有する接着剤を用いて有効に接着することができる。   Therefore, in the present invention, light obtained by passing light including at least ultraviolet to infrared region through a filter made of silicon is used for the curing reaction of the adhesive. As shown in FIG. 4, silicon mainly has a property of reducing ultraviolet light, so that ultraviolet light can be reduced by passing light through a filter made of silicon. By using light with reduced ultraviolet light and containing infrared light, the curing reaction can be promoted by irradiating the adhesive with infrared light while preventing heating of the recording element substrate including the silicon substrate. Therefore, according to the present invention, expansion due to heating of the recording element substrate can be reduced, and the recording element substrate and the liquid supply member can be effectively bonded using the adhesive containing the infrared absorber.

本発明により、液体供給部材と記録素子基板の接着時における熱膨張による変形を低減でき、記録素子基板の貼り付け時の位置ズレを低減できる液体吐出ヘッドの製造方法を提供することができる。   According to the present invention, it is possible to provide a method for manufacturing a liquid discharge head that can reduce deformation due to thermal expansion when the liquid supply member and the recording element substrate are bonded, and can reduce positional deviation when the recording element substrate is attached.

より具体的には、記録素子基板と液体供給部材とへの接着固定の際に、シリコンからなるフィルターにより紫外光を低減した光を照射することにより、記録素子基板や液体供給部材ではなく、接着剤を有効に加熱することができる。そのため、記録素子基板及び液体供給部材の熱膨張による変形量が低減することができ、記録素子基板の貼り合わせ精度に優れる。したがって、記録素子基板の長尺化やノズルの高密度化においても、必要な貼り合せ精度が得られる。   More specifically, at the time of bonding and fixing between the recording element substrate and the liquid supply member, by irradiating light with reduced ultraviolet light by a filter made of silicon, not the recording element substrate and the liquid supply member but bonding The agent can be heated effectively. Therefore, the deformation amount due to thermal expansion of the recording element substrate and the liquid supply member can be reduced, and the bonding accuracy of the recording element substrate is excellent. Therefore, the required bonding accuracy can be obtained even when the recording element substrate is lengthened and the nozzle density is increased.

本発明により製造されるインクジェット記録ヘッドの構成例を説明する模式図である。It is a schematic diagram explaining the structural example of the inkjet recording head manufactured by this invention. 本発明により製造されるインクジェット記録ヘッドの構成例(インク供給接合体、記録素子基板)を説明する模式図である。It is a schematic diagram explaining the structural example (ink supply joined body, recording element board | substrate) of the inkjet recording head manufactured by this invention. キセノンフラッシュランプで接着剤硬化を行う方法を説明する模式図である。It is a schematic diagram explaining the method of performing adhesive agent hardening with a xenon flash lamp. シリコン板の光の波長に対する吸収の関係を示すグラフである。It is a graph which shows the relationship of absorption with respect to the wavelength of the light of a silicon plate.

以下、本発明の構成要件について説明する。   Hereinafter, the configuration requirements of the present invention will be described.

(フィルター)
本発明で用いるフィルターは、シリコンからなる。シリコンは、図4に示すような吸収曲線を有し、主に紫外領域の光を吸収する。図4は、結晶性シリコン板(厚さ;約50μm)の光の波長に対する吸収の関係を示すグラフである。なお、紫外光の波長は、一般的に10〜400nm程度と言われている。また、赤外光(以下、赤外線とも称す)の波長は、一般的に0.7μm(又は770nm)〜1mm程度と言われている。図4に示すように、シリコンは、1.3μm以下の波長の光を吸収し、特に1.0μm以下の光を有効に吸収する。したがって、接着剤の硬化を促進するための照射光に含まれる紫外光(以下、紫外線とも称す)を有効に低減することができる。フィルターとしてはシリコン板であることが好ましく、一定の厚さを有することが好ましい。また、本発明において、記録素子基板はシリコン基板を含んで構成され、例えばシリコン基板の上に被覆樹脂層やオリフィスプレートが形成されてなる。
(filter)
The filter used in the present invention is made of silicon. Silicon has an absorption curve as shown in FIG. 4, and mainly absorbs light in the ultraviolet region. FIG. 4 is a graph showing the relationship of absorption with respect to the wavelength of light in a crystalline silicon plate (thickness: about 50 μm). The wavelength of ultraviolet light is generally said to be about 10 to 400 nm. The wavelength of infrared light (hereinafter also referred to as infrared light) is generally said to be about 0.7 μm (or 770 nm) to 1 mm. As shown in FIG. 4, silicon absorbs light having a wavelength of 1.3 μm or less, and particularly effectively absorbs light of 1.0 μm or less. Therefore, it is possible to effectively reduce ultraviolet light (hereinafter also referred to as ultraviolet light) included in the irradiation light for promoting the curing of the adhesive. The filter is preferably a silicon plate, and preferably has a certain thickness. In the present invention, the recording element substrate includes a silicon substrate. For example, a coating resin layer and an orifice plate are formed on the silicon substrate.

光を照射したシリコン基板は温度が上昇し、この温度上昇によって膨張が引き起こされる。したがって、フィルターとしてシリコンを用いることにより、記録素子基板に含まれるシリコンを加熱する原因となる紫外光及び赤外光の一部を有効に低減させつつ、接着剤を硬化させるための赤外光を透過させ、赤外線吸収剤を含有する接着剤を有効に加熱することができる。   The temperature of the silicon substrate irradiated with light rises, and this temperature rise causes expansion. Therefore, by using silicon as a filter, infrared light for curing the adhesive is effectively reduced while effectively reducing a part of ultraviolet light and infrared light that cause heating of silicon contained in the recording element substrate. The adhesive containing the infrared absorbing agent can be effectively heated by permeation.

フィルターとして用いるシリコン板の厚さは、50以上200μm以下であることが好ましい。この範囲とすることにより、接着剤をより選択的に加熱でき、記録素子基板の温度上昇を防いで、液体供給部材と記録素子基板の線膨張差と昇降温による応力歪を好ましく抑えることができる。   The thickness of the silicon plate used as a filter is preferably 50 to 200 μm. By setting it within this range, the adhesive can be heated more selectively, the temperature rise of the recording element substrate can be prevented, and the difference in linear expansion between the liquid supply member and the recording element substrate and the stress distortion due to the temperature rise and fall can be preferably suppressed. .

(接着剤)
本発明に用いる接着剤は、赤外線吸収剤を含有しかつイオン重合反応機構により硬化する接着剤である。接着剤に赤外線吸収剤を含ませることで赤外光(赤外線)の吸収効率を高め、接着剤を短時間で硬化させることができる。また、接着剤にイオン重合反応機構により硬化する接着剤を用いれば、短時間での接着が可能となる。イオン重合反応機構により硬化する接着剤としては、例えばUVカチオンエポキシ接着剤を好ましく挙げることができ、UVカチオンエポキシ接着剤の中でも、遅延硬化型UVカチオンエポキシ接着剤が有効である。UVカチオンエポキシ接着剤は、イオン重合反応機構により硬化するため、所定温度にすることで速やかに硬化し、短時間での接着が可能となる。
(adhesive)
The adhesive used in the present invention is an adhesive that contains an infrared absorber and is cured by an ionic polymerization reaction mechanism. By including an infrared absorber in the adhesive, the absorption efficiency of infrared light (infrared rays) can be increased, and the adhesive can be cured in a short time. In addition, if an adhesive that cures by an ion polymerization reaction mechanism is used as the adhesive, adhesion in a short time becomes possible. As an adhesive that cures by an ion polymerization reaction mechanism, for example, a UV cationic epoxy adhesive can be preferably exemplified. Among UV cationic epoxy adhesives, a delayed curing type UV cationic epoxy adhesive is effective. Since the UV cationic epoxy adhesive is cured by an ion polymerization reaction mechanism, the UV cationic epoxy adhesive is quickly cured at a predetermined temperature and can be bonded in a short time.

赤外線吸収剤(近赤外線吸収剤も含む)の含有量は、0.01〜5質量%の範囲とすることが好ましい。含有量をこの範囲とすることで、赤外線の吸収効率を高めることができる。   The content of the infrared absorber (including the near infrared absorber) is preferably in the range of 0.01 to 5% by mass. By setting the content within this range, infrared absorption efficiency can be increased.

赤外線吸収剤としては、赤外光を吸収する材料であれば、その種類は特に限定されない。また、シリコンからなるフィルターの吸収波長領域との関係から、1.0μm以上の赤外光を吸収するものが好ましく、1.3μm以上の赤外光を吸収するものがより好ましい。赤外線吸収剤としては、例えば、シアニン系化合物、フタロシアニン系化合物、ナフタロシアニン系化合物、ナフトキノン系化合物、アントラキノン系化合物、オニウム系化合物、ニッケル錯体類、又はジイモニウム類等を挙げることができる。また、これらを1種または2種以上混合して用いることができる。   The infrared absorber is not particularly limited as long as it is a material that absorbs infrared light. Further, from the relationship with the absorption wavelength region of the filter made of silicon, those that absorb infrared light of 1.0 μm or more are preferable, and those that absorb infrared light of 1.3 μm or more are more preferable. Examples of infrared absorbers include cyanine compounds, phthalocyanine compounds, naphthalocyanine compounds, naphthoquinone compounds, anthraquinone compounds, onium compounds, nickel complexes, and diimoniums. Moreover, these can be used 1 type or in mixture of 2 or more types.

(光源)
本発明において、光源としては、特に限定されるものではないが、少なくとも赤外光を発する光源を用いることができる。とくに、瞬間的に大きなエネルギーを与えることができ、硬化反応を短縮することができるハロゲンランプ又はキセノンランプが好ましい。これらのランプは、赤外光及び紫外光を発する。
(light source)
In the present invention, the light source is not particularly limited, but at least a light source that emits infrared light can be used. In particular, a halogen lamp or a xenon lamp capable of giving large energy instantaneously and shortening the curing reaction is preferable. These lamps emit infrared light and ultraviolet light.

赤外光(又は赤外線)とは、可視光より波長の長い電磁波の一種で、可視光端(約770nm)から1,000μm(1mm)程の波長範囲の光を指す。本発明では、この赤外光を接着剤に照射することにより、硬化反応を促進させる。赤外線は波長によって、近赤外線、中赤外線、遠赤外線に分けられるが、本発明では、接着剤に含有させる赤外線吸収剤の種類にもよるが、光線の分布域が広い近赤外線や中赤外線が好ましい。   Infrared light (or infrared light) is a type of electromagnetic wave having a wavelength longer than that of visible light, and refers to light having a wavelength range of about 1,000 μm (1 mm) from the visible light end (about 770 nm). In the present invention, the curing reaction is promoted by irradiating the adhesive with this infrared light. Infrared rays are classified into near infrared rays, middle infrared rays, and far infrared rays depending on the wavelength, but in the present invention, near infrared rays and middle infrared rays having a wide light distribution range are preferable, although depending on the type of infrared absorber contained in the adhesive. .

特に、波長1.3μm以上の長波の赤外線は記録素子基板の少なくとも一部を構成するシリコン基板を透過するため、該波長領域の赤外線を用いれば、殆ど記録素子基板を昇温することなく接着剤を硬化することが可能となる。また、接着剤の昇温により記録素子基板が温まることを防ぐために、赤外線の光源は極めて強い光源であることが望ましい。一般的にはハロゲンフラッシュランプやキセノンフラッシュランプ等のような、数十mSECから数百mSECで所定温度に到達できるランプが好適に使用できる。   In particular, since long wave infrared rays having a wavelength of 1.3 μm or more are transmitted through a silicon substrate constituting at least a part of the recording element substrate, if the infrared rays in the wavelength region are used, the adhesive hardly raises the temperature of the recording element substrate. Can be cured. In order to prevent the recording element substrate from warming due to the temperature rise of the adhesive, it is desirable that the infrared light source be an extremely strong light source. In general, a lamp that can reach a predetermined temperature at several tens of mSEC to several hundreds of mSEC, such as a halogen flash lamp or a xenon flash lamp, can be suitably used.

本発明では、特に、このような高い発光出力のランプを用いる場合に有効である。ランプから発生する紫外線をフィルターにより低減し、記録素子基板の昇温を防止する。   The present invention is particularly effective when such a lamp having a high light emission output is used. Ultraviolet rays generated from the lamp are reduced by a filter to prevent the temperature rise of the recording element substrate.

このような高い出力のランプの場合、短波長カットフィルターを用いて記録素子基板が吸収する波長の赤外線、紫外線をカットしようとした場合、フィルターは瞬時に破壊されてしまう。シリコン板の場合は800℃以上の耐熱性があること、高い熱伝導率を有することから、高い出力のランプの赤外線を吸収しても破壊されることはない。また、記録素子基板に照射したくない1.3μm以下の短波長の赤外線を有効に吸収するので、記録素子基板の昇温を有効に防止することができる。ランプの出力や発光条件、シリコン板の厚さ、接着剤中の赤外線吸収剤の添加量を最適化することで、記録素子基板を殆ど加熱することなく接着剤を硬化することが可能となり、マウント精度を大幅に向上することができる。また、長時間連続でランプから光を照射し、被照射物が入れ替わるようは方法を行う場合には、シリコン板の昇温に注意する必要がある。そのため、厚いシリコン基板を用意することが困難な場合は、薄いシリコン板を複数用意して、シリコン板の温度が高くなった時点で、薄いシリコン板を交換してもよい。また、照射中にシリコン板を空冷、水冷、その他冷却ツールを使用して冷却をおこなうことができる。   In the case of such a high output lamp, when an infrared ray or ultraviolet ray having a wavelength absorbed by the recording element substrate is cut using a short wavelength cut filter, the filter is instantaneously destroyed. In the case of a silicon plate, since it has a heat resistance of 800 ° C. or higher and has a high thermal conductivity, it is not destroyed even if it absorbs infrared rays from a high-power lamp. In addition, since infrared rays having a short wavelength of 1.3 μm or less that are not desired to be irradiated on the recording element substrate are effectively absorbed, the temperature rise of the recording element substrate can be effectively prevented. By optimizing the lamp output and light emission conditions, the thickness of the silicon plate, and the amount of infrared absorber added to the adhesive, it becomes possible to cure the adhesive with almost no heating of the recording element substrate. The accuracy can be greatly improved. In addition, when performing a method of irradiating light from a lamp continuously for a long time so that the irradiated object is replaced, it is necessary to pay attention to the temperature rise of the silicon plate. Therefore, if it is difficult to prepare a thick silicon substrate, a plurality of thin silicon plates may be prepared, and the thin silicon plate may be replaced when the temperature of the silicon plate becomes high. In addition, the silicon plate can be cooled by air cooling, water cooling, or other cooling tools during irradiation.

(記録素子基板)
記録素子基板の構成としては、例えば、シリコン基板上に半導体プロセスで液体吐出に必要な発熱素子と金属配線パターンと感光性樹脂からなる液体流路を形成してなる構造とすることができる。
(Recording element substrate)
As a configuration of the recording element substrate, for example, a structure in which a liquid flow path including a heating element, a metal wiring pattern, and a photosensitive resin necessary for liquid discharge in a semiconductor process is formed on a silicon substrate can be used.

記録素子基板を接着剤の硬化温度まで上昇せしめると、前記したようにマウント精度が低下する原因となる。本発明では、記録素子基板に含まれるシリコン基板を加熱する波長の光をシリコンを用いて有効に低減することで、シリコン基板を加熱せずに、接着剤の温度を硬化温度にせしめることを特徴としている。赤外線は電磁波であり、伝熱によって接着剤を昇温せしめるのではなく、接着剤中に添加した赤外線吸収材を直接励起することで、記録素子基板を加熱することなく接着剤を硬化することができる。   When the recording element substrate is raised to the curing temperature of the adhesive, as described above, the mounting accuracy is lowered. In the present invention, the wavelength of the light for heating the silicon substrate included in the recording element substrate is effectively reduced using silicon, so that the temperature of the adhesive is set to the curing temperature without heating the silicon substrate. It is said. Infrared rays are electromagnetic waves, and the adhesive can be cured without heating the recording element substrate by directly exciting the infrared absorbing material added to the adhesive, rather than heating the adhesive by heat transfer. it can.

(液体供給部材)
液体供給部材は記録素子基板にインク等の液体を供給するタンク部材であり、有機、無機材のいずれでも用いることができる。インク等の液体と接触しても膨潤、溶解、有機、無機物質の溶出がない材質であることが望ましい。また、原材料の価格や加工のし易さから熱可塑性樹脂を好ましく用いることができ、例えばポリプロピレン、変性PPE(変性ポリフェニレンエーテル)といった汎用樹脂を主に液体供給部材として用いることができる。機械的強度を高めるために、シリカやアルミナ等を充填剤として用いてもよい。
(Liquid supply member)
The liquid supply member is a tank member that supplies a liquid such as ink to the recording element substrate, and can be an organic or inorganic material. A material that does not swell, dissolve, or elute organic or inorganic substances even when in contact with a liquid such as ink is desirable. In addition, a thermoplastic resin can be preferably used because of the cost of raw materials and ease of processing. For example, general-purpose resins such as polypropylene and modified PPE (modified polyphenylene ether) can be mainly used as a liquid supply member. In order to increase the mechanical strength, silica, alumina or the like may be used as a filler.

(支持部材)
液体供給部材の記録素子基板と貼り合わせる面に支持部として支持部材を設けてもよい。支持部を形成するための支持部材の材質は液体供給部材と同一で耐インク性の物質を用いることが望ましい。
(Support member)
A support member may be provided as a support portion on the surface of the liquid supply member to be bonded to the recording element substrate. The material of the support member for forming the support part is preferably the same as that of the liquid supply member, and an ink-resistant substance is used.

また、支持部剤は、記録素子基板を貼り付ける面として平面性に優れることが望ましい。また、本体との取り付け性に優れることが望ましい。また、紙面からヘッド迄の位置関係を決定するため、寸法精度、剛性に優れることが望ましい。   Further, it is desirable that the support member has excellent flatness as a surface to which the recording element substrate is attached. Moreover, it is desirable that it is excellent in attachment property with the main body. Further, in order to determine the positional relationship from the paper surface to the head, it is desirable to have excellent dimensional accuracy and rigidity.

そこで、前記液体供給部材の寸法精度、平面性、剛性を高めるために、シリカ、カーボン、アルミナ、マイカ、雲母といった充填剤が添加されたものを支持部材として用いることが好ましい。特にPPS樹脂(ポリフェニレンサルファイド樹脂)は、線膨張係数を低減させることのできるフィラーを多く含ませても、容易に成形可能であるため好適である。さらに、特に液体供給部材に変性PPEが使用される場合には、支持部材にPPSと変性PPEとの混合物のポリマーアロイを用いて、液体供給部材と支持部材とを一体的に成形することが好ましい。特に、球状のフィラ―を70%以上含有するポリマーアロイを使用すると線膨張係数を十分に下げることができるため好ましい。液体供給部材と支持部材との接合はインサート成形または二色成形でおこない、両者が一体的に形成されると支持部が設けられた供給部材が得られる。   Therefore, in order to improve the dimensional accuracy, planarity, and rigidity of the liquid supply member, it is preferable to use a support member added with a filler such as silica, carbon, alumina, mica, mica. In particular, a PPS resin (polyphenylene sulfide resin) is preferable because it can be easily molded even if it contains a large amount of filler capable of reducing the linear expansion coefficient. Further, particularly when modified PPE is used for the liquid supply member, it is preferable to integrally form the liquid supply member and the support member using a polymer alloy of a mixture of PPS and modified PPE for the support member. . In particular, the use of a polymer alloy containing 70% or more of a spherical filler is preferable because the linear expansion coefficient can be sufficiently lowered. The liquid supply member and the support member are joined by insert molding or two-color molding, and when both are formed integrally, a supply member provided with a support portion is obtained.

以下、図面を参照にして、本発明の実施形態について説明する。また、以下の説明では、本発明の適用例として、インクジェット記録ヘッドを例に挙げて説明を行うが、本発明の適用範囲はこれに限定されるものではなく、バイオッチップ作製や電子回路印刷用途の液体吐出ヘッドにも適用できる。液体吐出ヘッドとしては、インクジェット記録ヘッドの他にも、例えばカラーフィルター製造用ヘッド等も挙げられる。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, an inkjet recording head will be described as an example of application of the present invention. However, the scope of the present invention is not limited to this, and is applicable to biochip manufacturing and electronic circuit printing. It can also be applied to a liquid discharge head. As the liquid discharge head, in addition to the ink jet recording head, for example, a head for producing a color filter can be cited.

(実施形態1)
図1に、本実施形態に係るインクジェット記録ヘッドの構成を説明する模式図を示す。本実施形態に係るインクジェット記録ヘッド001は、記録素子基板002と、インク供給部材005と、電気配線テープ003と、支持部材004と、を備える。記録素子基板002はインクを吐出する吐出口を有する。インク供給部材005は記録素子基板002にインクを供給し、かつインクを格納する。支持部材004は、記録素子基板002とインク供給部材005との間に介在し、インク供給部材005から記録素子基板002にインクを供給するインク通路を備え、少なくとも記録素子基板002を支持固定する接合面を有する。但し、本実施形態では、支持部材004がインク供給部材005と一体に形成されインク供給接合体006を構成している。なお、図2では、便宜上、支持部材004をインク供給部材005と分離して示した模式図と、支持部材004とインク供給部材005が一体になっているインク供給接合体006と、を両方記載している。なお、本発明において、支持部材をインク供給部材の一部と捉えることも可能であり、支持部材をインク供給部材の一部と捉えるか、支持部材とインク供給部材を別々の部材と捉えるかは、表現上の差異に過ぎない。
(Embodiment 1)
FIG. 1 is a schematic diagram illustrating the configuration of the ink jet recording head according to the present embodiment. The ink jet recording head 001 according to this embodiment includes a recording element substrate 002, an ink supply member 005, an electric wiring tape 003, and a support member 004. The recording element substrate 002 has an ejection port for ejecting ink. The ink supply member 005 supplies ink to the recording element substrate 002 and stores ink. The support member 004 is interposed between the recording element substrate 002 and the ink supply member 005, includes an ink passage for supplying ink from the ink supply member 005 to the recording element substrate 002, and is a joint that supports and fixes at least the recording element substrate 002. Has a surface. However, in the present embodiment, the support member 004 is formed integrally with the ink supply member 005 to form the ink supply assembly 006. In FIG. 2, for convenience, a schematic diagram showing the support member 004 separated from the ink supply member 005 and an ink supply assembly 006 in which the support member 004 and the ink supply member 005 are integrated are shown. is doing. In the present invention, the support member can be regarded as a part of the ink supply member. Whether the support member is regarded as a part of the ink supply member or whether the support member and the ink supply member are regarded as separate members. It ’s just a difference in expression.

本発明においては、支持部材を用いることが好ましい。一般的に、インクジェット記録ヘッドを製造する際、記録素子基板とインク供給部材の線膨張係数の差による応力を接着剤の硬化収縮でキャンセルするメカニズムをとっている。しかし、記録素子基板の長尺化、薄化に伴い、記録素子基板の応力を接着剤では抑えることができなくなる場合が考えれられる。線膨張係数の差による応力を低減するために、インク供給部材の線膨張係数を10ppm以下として記録素子基板の値に近づけることが考えられる。しかし、線膨張係数が10ppm以下の樹脂材料とするには、80%以上のフィラーを含有させることとなり、インク供給部材の複雑な形状を射出成形することができない。そのため、低線膨張係数で成形可能な部材で支持部材作製し、この支持部材を介して記録素子基板とインク供給部材とを接合させることが望ましい形態である。   In the present invention, it is preferable to use a support member. Generally, when manufacturing an ink jet recording head, a mechanism is employed in which stress due to the difference in linear expansion coefficient between the recording element substrate and the ink supply member is canceled by curing shrinkage of the adhesive. However, as the recording element substrate becomes longer and thinner, there may be a case where the stress of the recording element substrate cannot be suppressed by the adhesive. In order to reduce the stress due to the difference in linear expansion coefficient, it is conceivable that the linear expansion coefficient of the ink supply member is set to 10 ppm or less so as to approach the value of the recording element substrate. However, in order to use a resin material having a linear expansion coefficient of 10 ppm or less, 80% or more of filler is included, and the complicated shape of the ink supply member cannot be injection molded. For this reason, it is desirable that the support member is made of a member that can be molded with a low coefficient of linear expansion, and the recording element substrate and the ink supply member are bonded via the support member.

支持部材に用いる樹脂は、特に限定されるものではないが、汎用エンジニアプラスチック、スーパーエンジニアプラスチックいずれでも配合させることができる。インク液との接触を伴う部材であるため、耐アルカリ性、耐熱性を有することが好ましい。インクジェット製品は大量生産、消耗品ビジネスであるため汎用エンジニアプラスチックを用いることが好ましい。そこで、汎用エンジニアプラスチックとして、例えば、ポリスチレン、アクリル系樹脂、HIPS(ハイインパクト(耐衝撃性)ポリスチレン)、PP(ポリプロピレン)、PE(ポリエチレン)、ナイロン、PSF(ポリサルフォン)等のホモポリマー、あるいは前記樹脂類のポリマーブレンド、ポリマーアロイ等のコンパウンドが候補として挙げられる。   The resin used for the support member is not particularly limited, but any of general-purpose engineer plastic and super engineer plastic can be blended. Since it is a member that comes into contact with the ink liquid, it preferably has alkali resistance and heat resistance. Since inkjet products are mass production and consumables business, it is preferable to use general-purpose engineer plastics. Therefore, as general-purpose engineer plastics, for example, polystyrene, acrylic resin, HIPS (high impact (impact resistance) polystyrene), PP (polypropylene), PE (polyethylene), nylon, PSF (polysulfone), or the like, or the above-mentioned Compounds such as polymer blends of resins and polymer alloys can be mentioned as candidates.

また、支持部材は内部に液体通路(インク通路)を有し、インク液と接する。そのため、支持部材の材料としては、インク液との接触で有機、無機成分がインク液中へ抽出されないことが好ましく、耐熱温度、射出成形性が高いものが好ましい。これらの観点から、支持部材の材料は、ポリマーアロイである変性PPEや変性PPEとPPSからなるポリマーアロイが好ましく挙げられる。   Further, the support member has a liquid passage (ink passage) inside and is in contact with the ink liquid. Therefore, as a material for the support member, it is preferable that organic and inorganic components are not extracted into the ink liquid by contact with the ink liquid, and a material having high heat resistance and high injection moldability is preferable. From these viewpoints, the material of the support member is preferably a modified PPE which is a polymer alloy or a polymer alloy composed of a modified PPE and PPS.

また、支持部材に添加するフィラーとしては、例えば無機フィラーであるガラスフィラー、カーボンフィラー、シリカ、アルミナ、雲母、タルク、マイカ等が挙げられる。特にこれらに限定されるものではなく、樹脂の線膨張係数を低下させる物であれば使用可能である。フィラーの形状としては、球状であることが好ましい。球状フィラーを用いることで、変性PPE等にフィラーを高い含有率で充填することができる。また、混練工程、成形工程での装置の材料接触部分の磨耗を低減することができ、さらに線膨張係数の異方性を解消することができる。   Moreover, as a filler added to a supporting member, the glass filler which is an inorganic filler, a carbon filler, a silica, an alumina, a mica, a talc, mica etc. are mentioned, for example. It is not particularly limited to these, and any material that reduces the linear expansion coefficient of the resin can be used. The shape of the filler is preferably spherical. By using a spherical filler, it is possible to fill the modified PPE or the like with a high content. Further, it is possible to reduce the wear of the material contact portion of the apparatus in the kneading step and the molding step, and to eliminate the anisotropy of the linear expansion coefficient.

ポリマーアロイ組成物のフィラー含有率を50質量%以上とする場合、混練時に高温下で強力な剪断力をかけることが好ましい。このような混練が可能な装置としては、例えばオープンロール連続押出機「ニーデックス」(商品名、三井鉱山(株)社製)を用いることができる。前記装置では、遠心ミルで粉砕した変性PPEとフィラーとを前記装置に供給することで、混練からペレット化まで連続して行うことができる。   When the filler content of the polymer alloy composition is 50% by mass or more, it is preferable to apply a strong shear force at high temperature during kneading. As an apparatus capable of such kneading, for example, an open roll continuous extruder “NEDEX” (trade name, manufactured by Mitsui Mining Co., Ltd.) can be used. In the said apparatus, it can carry out continuously from kneading | mixing to pelletization by supplying the modification | denaturation PPE and filler which were grind | pulverized with the centrifugal mill to the said apparatus.

次に、前記ペレットを、成形機を用いて所定の形状の金型内に流し込み、射出成形により支持部材を得る。このとき、ポリマーアロイ組成物のフィラー含有率が50質量%以上である場合、該組成物の流動性が低いので、ポリマーアロイ組成物を高速で流し込むことが可能な成形機を用いることが好ましく、該成形機として高速・高圧対応成形機を用いることができる。通常の成形機では、射出速度が500mm/sec程度であるのに対し、高速・高圧対応成形機では1500〜2000mm/secの射出速度が得られる。   Next, the pellets are poured into a mold having a predetermined shape using a molding machine, and a support member is obtained by injection molding. At this time, when the filler content of the polymer alloy composition is 50% by mass or more, since the fluidity of the composition is low, it is preferable to use a molding machine capable of pouring the polymer alloy composition at a high speed. A high-speed and high-pressure molding machine can be used as the molding machine. A normal molding machine has an injection speed of about 500 mm / sec, whereas a high-speed and high-pressure molding machine can obtain an injection speed of 1500 to 2000 mm / sec.

また、支持部材の射出成形時の成形温度としては、320℃以下であることが好ましい。成形温度が320℃以下であれば、変性PPEの樹脂成分の分解が生じないため好ましい。また、変性PPEに、PPEとポリスチレンとのポリマーアロイを用いる場合、射出成形時の金型温度としては、100℃以下であることが好ましい。変性PPEの構成成分であるポリスチレンのガラス転移温度(100℃)以下とすることで、成形物の変形や平面性の低下が生じないため好ましい。例えば、高速・高圧対応成形機を用いて、所定の形状の金型内に射出速度1500mm/sec、射出圧力340MPa、成形温度300℃、金型温度80℃で射出成形して、支持部材を得ることができる。   The molding temperature at the time of injection molding of the support member is preferably 320 ° C. or lower. A molding temperature of 320 ° C. or lower is preferable because decomposition of the resin component of the modified PPE does not occur. Moreover, when using the polymer alloy of PPE and polystyrene for modified PPE, it is preferable that it is 100 degrees C or less as mold temperature at the time of injection molding. It is preferable that the temperature is not higher than the glass transition temperature (100 ° C.) of polystyrene, which is a constituent component of the modified PPE, because deformation of the molded product and reduction in flatness do not occur. For example, using a high-speed / high-pressure molding machine, a support member is obtained by injection molding into a mold having a predetermined shape at an injection speed of 1500 mm / sec, an injection pressure of 340 MPa, a molding temperature of 300 ° C., and a mold temperature of 80 ° C. be able to.

また、製造した支持部材はインク供給部材にインサート成形により固定することが好ましい。例えば、成形された支持部材をインク供給部材の金型内に予め配置し、該金型内にインク供給部材材料である樹脂組成物を流し込み、インサート成形を行うことが好ましい。これにより、支持部材とインク供給部材とが一体として接合されたインク供給接合体(液体供給接合体)を得ることができる。   Further, the manufactured support member is preferably fixed to the ink supply member by insert molding. For example, it is preferable to place the molded support member in advance in a mold of the ink supply member, and to pour the resin composition as the ink supply member material into the mold to perform insert molding. Thereby, an ink supply assembly (liquid supply assembly) in which the support member and the ink supply member are integrally bonded can be obtained.

得られたインク供給接合体に記録素子基板を連結するには記録素子基板を貼り合せる支持部材の所定のエリアに接着剤を塗布した後、硬化して固定する。   In order to connect the recording element substrate to the obtained ink supply assembly, an adhesive is applied to a predetermined area of a support member to which the recording element substrate is bonded, and then cured and fixed.

なお、従来の方法では、一般的に、硬化メカニズムとして、熱硬化、紫外線硬化、熱、紫外線併用、湿気硬化等が用いられる。しかし、ヘッドの部材にプラスチックが多く用いられることから、キュアの温度はあまり高く設定できない。例えば熱硬化型の接着剤を用いる場合、キュア時間が長くなり、記録素子基板及びインク供給部材についてもキュア時に熱膨張による変形が起こる場合がある。熱膨張により変形した記録素子基板やインク供給部材を常温に戻すと収縮し、接着剤を介して応力変形が生じることになる。   In the conventional method, generally, as a curing mechanism, thermosetting, ultraviolet curing, heat, ultraviolet combined use, moisture curing, or the like is used. However, since a lot of plastic is used for the head member, the curing temperature cannot be set too high. For example, when a thermosetting adhesive is used, the curing time becomes long, and the recording element substrate and the ink supply member may be deformed due to thermal expansion during curing. When the recording element substrate or ink supply member deformed due to thermal expansion is returned to room temperature, the recording element substrate contracts and stress deformation occurs through the adhesive.

そこで、本発明では、赤外線吸収剤を含みかつイオン重合反応機構により硬化する接着剤を用いる。この接着剤を用いることにより、短時間での接着が可能となり、接着剤の熱が伝わることによるインク供給部材、シリコン基板の熱膨張を低減することができる。遅延硬化型UVカチオンエポキシ接着剤がこのような用途により好ましく有効である。   Therefore, in the present invention, an adhesive that contains an infrared absorber and is cured by an ionic polymerization reaction mechanism is used. By using this adhesive, it is possible to bond in a short time, and the thermal expansion of the ink supply member and the silicon substrate due to the transfer of heat of the adhesive can be reduced. A delayed cure UV cationic epoxy adhesive is preferably effective for such applications.

イオン重合反応を用いる接着剤としては、例えば、光酸発生剤が光エネルギーを受けて酸を発生させて、エポキシ、オキセタン、ビニルエーテル等を重合させた硬化材料が挙げられる。例として、エポキシUVカチオン系接着剤(商品名「KR−827」、ADEKA社製)、エポキシUVカチオン系接着剤(商品名「KR−826」、ADEKA社製)、エポキシUVカチオン系接着剤(商品名「KS−820」、ADEKA社製)が挙げられる。   Examples of the adhesive using an ionic polymerization reaction include a cured material obtained by polymerizing epoxy, oxetane, vinyl ether, etc. by generating an acid when a photoacid generator receives light energy. Examples include an epoxy UV cationic adhesive (trade name “KR-827”, manufactured by ADEKA), an epoxy UV cationic adhesive (trade name “KR-826”, manufactured by ADEKA), an epoxy UV cationic adhesive ( Trade name "KS-820", manufactured by ADEKA).

イオン重合反応について、光カチオン重合開始剤としてモノスルホニウム塩とエポキシモノマーを用いた場合を例に挙げて説明する。   The ionic polymerization reaction will be described by taking as an example the case where a monosulfonium salt and an epoxy monomer are used as a photocationic polymerization initiator.

光酸発生剤はカチオン部とアニオン部からなるイオン性のスルホニウム塩系のオニウム塩で、紫外光を照射すると吸収分解して、アニオン部が酸の発生源になる。ついで溶媒または酸発生剤自体から水素を引き抜いて酸を発生する。酸はエポキシに配位し、次のエポキシの攻撃を受けてオキソニウムカチオンを生成し、前記オキソニウムカチオンとエポキシの逐次開環重合が進行する。   The photoacid generator is an ionic sulfonium salt-based onium salt composed of a cation portion and an anion portion, which is absorbed and decomposed when irradiated with ultraviolet light, and the anion portion becomes a source of acid. Then, hydrogen is extracted from the solvent or the acid generator itself to generate an acid. The acid is coordinated to the epoxy and is subjected to the attack of the next epoxy to generate an oxonium cation, and sequential ring-opening polymerization of the oxonium cation and the epoxy proceeds.

Figure 2011062963
Figure 2011062963

Figure 2011062963
Figure 2011062963

本発明においては、特に瞬間的に大きなエネルギーを与えることができる光源である、ハロゲンランプのうちのショートアークランプやロングアークランプを用いることが好ましい。   In the present invention, it is preferable to use a short arc lamp or a long arc lamp of a halogen lamp, which is a light source capable of giving a large energy instantaneously.

特にロングアークランプであるキセノンフラッシュランプはmsecから数10msecオーダーの時間で100〜150℃以上の高温に加熱することができる。   In particular, a xenon flash lamp, which is a long arc lamp, can be heated to a high temperature of 100 to 150 ° C. or higher in a time on the order of msec to several tens of msec.

また、接着剤に予め赤外吸収剤(近赤外吸収剤)を0.01〜5質量%添加することで赤外線の吸収効率を高め、加熱したい部材を選択的に短時間で硬化させることができる。   Further, by adding 0.01 to 5% by mass of an infrared absorber (near infrared absorber) in advance to the adhesive, the infrared absorption efficiency is increased, and the member to be heated can be selectively cured in a short time. it can.

また、本発明で用いる接着剤は赤外線吸収剤を含む。赤外線吸収剤としては、赤外領域の光を吸収する材料であれば、その種類は特に限定されるものではない。赤外領域は近赤外領域も含む。赤外線吸収剤としては、例えば、シアニン系化合物、フタロシアニン系化合物、ナフタロシアニン系化合物、ナフトキノン系化合物、アントラキノン系化合物、オニウム系、ニッケル錯体類又はジイモニウム類が挙げられる。また、これらを1種又は2種以上混合して用いることができる。   Moreover, the adhesive agent used by this invention contains an infrared absorber. The type of the infrared absorber is not particularly limited as long as it is a material that absorbs light in the infrared region. The infrared region includes the near infrared region. Examples of the infrared absorber include cyanine compounds, phthalocyanine compounds, naphthalocyanine compounds, naphthoquinone compounds, anthraquinone compounds, onium compounds, nickel complexes, and diimonium compounds. Moreover, these can be used 1 type or in mixture of 2 or more types.

さらに、有機赤外吸収剤として、具体的には、「THX0113」(トスコ社製、商品名)、「NIR−IM1」若しくは「NIR−AM1」(ナガセケムテックス(株)社製、商品名)、又は、「IRG-002」若しくは「IRG−003」(日本化薬社製、商品名)等が挙げられる。無機の赤外線吸収剤としてはカーボン化合物を使用することができ、黒鉛化カーボンが好ましく、算術粒子径が70nm以下の黒鉛化カーボンを用いることがより好ましい。   Furthermore, as an organic infrared absorber, specifically, “THX0113” (trade name, manufactured by Tosco Corporation), “NIR-IM1” or “NIR-AM1” (trade name, manufactured by Nagase ChemteX Corporation) Or “IRG-002” or “IRG-003” (trade name, manufactured by Nippon Kayaku Co., Ltd.). A carbon compound can be used as the inorganic infrared absorber, graphitized carbon is preferable, and graphitized carbon having an arithmetic particle diameter of 70 nm or less is more preferable.

また、本発明で用いる光源の他の例としてはハロゲンヒータがある。紫外域から赤外域までスペクトルの分布があり、電力密度が高く、被照射物の急速な昇降温が可能である。またハロゲンサイクルでフィラメントが長寿命である。出力もサイリスタで容易に制御可能といった長所を持つ。接着剤硬化に必要な100℃程度の加温も100msec〜数secのオーダーで到達する。接着剤の塗布範囲、塗布厚に応じてハロゲンヒータユニットと附属するミラーの形状とで均一な面照射を行うか、フォーカスタイプで光を集光させて必要部分のみ加熱するか、照射条件の自由度がある。   Another example of the light source used in the present invention is a halogen heater. There is a spectrum distribution from the ultraviolet region to the infrared region, the power density is high, and the temperature of the irradiated object can be rapidly increased and decreased. Also, the filament has a long life in the halogen cycle. The output has the advantage of being easily controllable with a thyristor. The heating of about 100 ° C. necessary for curing the adhesive also reaches on the order of 100 msec to several seconds. Uniform surface irradiation with the halogen heater unit and the shape of the attached mirror depending on the adhesive application range and application thickness, or focusing the light with a focus type to heat only the necessary part, or free irradiation conditions There is a degree.

ハロゲンランプ、キセノンフラッシュランプなどの光源との間にシリコンからなるフィルター(好ましくはシリコン基板(例えば50〜200μm程度))を設置すれば、接着剤をより選択的に加熱できる。そのため、記録素子基板の温度上昇を防いで、インク供給接合体と記録素子基板の線膨張差と昇降温による応力歪を抑えることができる。
インクジェット記録ヘッド製造ラインにてこの工程を連続的に行うには、高温となったシリコンフィルターを室温程度まで冷却させる必要がある。
そこで装置上に複数枚のシリコンフィルターを収納し、冷却する機構とヘッドを所定回数処理した後にシリコンフィルターを交換する機構を搭載することが好ましい。
If a filter made of silicon (preferably a silicon substrate (for example, about 50 to 200 μm)) is provided between a light source such as a halogen lamp or a xenon flash lamp, the adhesive can be heated more selectively. Therefore, the temperature rise of the recording element substrate can be prevented, and the stress distortion due to the difference in linear expansion between the ink supply assembly and the recording element substrate and the temperature rise and fall can be suppressed.
In order to perform this process continuously in the ink jet recording head production line, it is necessary to cool the silicon filter that has reached a high temperature to about room temperature.
Therefore, it is preferable to mount a plurality of silicon filters on the apparatus, and to install a mechanism for cooling and a mechanism for exchanging the silicon filter after processing the head a predetermined number of times.

(実施例1)
以下、実施例について説明する。
Example 1
Examples will be described below.

本実施例では、図1に示したインクジェット記録ヘッドの構成とした。図1に示されるインクジェット記録ヘッド001は、記録素子基板002と、電気配線テープ003と、支持部材004と、インク供給部材005と、からなる。また、支持部材004とインク供給部材はインサート成形によって一体成形され、インク供給接合体006として用いられる。   In this embodiment, the configuration of the ink jet recording head shown in FIG. 1 is adopted. The ink jet recording head 001 shown in FIG. 1 includes a recording element substrate 002, an electric wiring tape 003, a support member 004, and an ink supply member 005. The support member 004 and the ink supply member are integrally formed by insert molding and used as the ink supply assembly 006.

支持部材の材料となるポリマーアロイとして、変性PPE(商品名「SE−1X」、SABIC社製)と球状シリカ(商品名「S−430」、マイクロン社製)とを質量比25:75の割合で混練、ペレット化した。得られたペレットを、高速・高圧対応成形機及び所定の形状の金型を用いて射出成形(射出速度1500mm/sec、射出圧力340MPa、成形温度300℃、金型温度80℃)し、支持部材を得た。   As a polymer alloy used as a material for the support member, a modified PPE (trade name “SE-1X”, manufactured by SABIC) and spherical silica (trade name “S-430”, manufactured by Micron) are used in a mass ratio of 25:75. Kneaded and pelletized. The obtained pellets are injection-molded (injection speed 1500 mm / sec, injection pressure 340 MPa, molding temperature 300 ° C., mold temperature 80 ° C.) using a high-speed and high-pressure molding machine and a mold having a predetermined shape, and a support member Got.

前記支持部材をインク供給部材の金型内に予め配置し、該金型内に変性PPE(PCN−2910(商品名、SABIC社製))を流し込み、インサート成形を行った。このとき、射出速度を70mm/sec、射出圧力を150MPa、成形温度を300℃、金型温度を80℃とした。これにより支持部材とインク供給部材とが一体として接合されたインク供給接合体を得た。   The support member was placed in advance in the mold of the ink supply member, and modified PPE (PCN-2910 (trade name, manufactured by SABIC)) was poured into the mold to perform insert molding. At this time, the injection speed was 70 mm / sec, the injection pressure was 150 MPa, the molding temperature was 300 ° C., and the mold temperature was 80 ° C. As a result, an ink supply joined body was obtained in which the support member and the ink supply member were joined together.

作製したインク供給接合体における支持部材の記録素子基板の貼り合せ位置に接着剤を硬化後の膜厚が10μmとなるように塗布した。接着剤としては、エポキシUVカチオン系接着剤(商品名「KR−827」、ADEKA社製)に2.5質量%の赤外線吸収剤(商品名「SDA3610」、トスコ社製)を均一に混合したものを用いた。   An adhesive was applied to the bonding position of the recording element substrate of the support member in the manufactured ink supply assembly so that the film thickness after curing was 10 μm. As an adhesive, 2.5% by mass of an infrared absorber (trade name “SDA3610”, manufactured by Tosco Corporation) was uniformly mixed with an epoxy UV cationic adhesive (trade name “KR-827”, manufactured by ADEKA). A thing was used.

そして、前記接着剤塗布面にUV光を120mW/cm2、3sec照射し、記録素子基板(幅1.5mm、長さ19.06mm、厚み0.3mm)の黒色用記録素子基板を支持部材の所定の位置にマウント装置にて貼り合わせた(仮止め)。 Then, the surface to which the adhesive is applied is irradiated with UV light at 120 mW / cm 2 for 3 seconds, and the black recording element substrate of the recording element substrate (width 1.5 mm, length 19.06 mm, thickness 0.3 mm) is used as a support member. Affixed to a predetermined position with a mounting device (temporary fixing).

そして、ハロゲンフラッシュランプ光源(出力60w)と記録素子基板を載せたインク供給接合体ユニットの間に、フィルターとして120μmのシリコン板を設置して、記録素子基板全面にハロゲンランプ光を2.0sec照射し、接着剤を硬化させた。   Then, a 120 μm silicon plate is installed as a filter between the halogen flash lamp light source (output 60 w) and the ink supply assembly unit on which the recording element substrate is mounted, and the entire surface of the recording element substrate is irradiated with halogen lamp light for 2.0 sec. And the adhesive was cured.

作製したインク供給接合体ユニットに、インク吸収体、インク、インク供給体蓋等を組み込み、印字可能なインクジェット記録ヘッドとした。   An ink absorber, ink, an ink supply lid, and the like were incorporated into the manufactured ink supply assembly unit to obtain a printable ink jet recording head.

なお、本実施例では、ブラックインク用インクジェット記録ヘッドについて説明したが、これに限らずカラー用インクジェット記録ヘッドにも適用可能である。   In this embodiment, the black ink jet recording head has been described. However, the present invention is not limited to this, and can be applied to a color ink jet recording head.

(実施例2)
光源と被照射物との間に設置するシリコン基板の厚みを55μmとした以外は、実施例1と同一条件でインクジェット記録ヘッドを作製した。
(Example 2)
An ink jet recording head was produced under the same conditions as in Example 1 except that the thickness of the silicon substrate placed between the light source and the irradiated object was 55 μm.

(実施例3)
光源と被照射物との間に設置するシリコン基板の厚みを195μmとした以外は、実施例1と同一条件でインクジェット記録ヘッドを作製した。
(Example 3)
An ink jet recording head was manufactured under the same conditions as in Example 1 except that the thickness of the silicon substrate placed between the light source and the irradiated object was 195 μm.

(実施例4)
接着剤の赤外線吸収剤の含有量を1.2質量%とした以外は、実施例1と同一条件でインクジェット記録ヘッドを作製した。
Example 4
An ink jet recording head was produced under the same conditions as in Example 1 except that the content of the infrared absorber in the adhesive was 1.2% by mass.

(実施例5)
接着剤の赤外線吸収剤の含有量を4.8質量%とした以外は、実施例1と同一条件でインクジェット記録ヘッドを作製した。
(Example 5)
An ink jet recording head was produced under the same conditions as in Example 1 except that the content of the infrared absorber in the adhesive was 4.8% by mass.

(実施例6)
支持部材の樹脂組成物としてPPS(商品名:「B−060P」、東ソーサスティール社製)と変性PPE(商品名「SE−1X」、SABIC社製)、球状シリカ(商品名「S−430」、マイクロン社製)とを質量比8:12:80の割合で混練、ペレット化した。赤外線吸収剤として(商品名「トーカブラック#3855」東海カーボン社製)を含有量を0.5質量%とした以外は実施例1と同一条件でインクジェット記録ヘッドを作製した。
(Example 6)
As the resin composition of the support member, PPS (trade name: “B-060P”, manufactured by Tosoh Steel Corporation), modified PPE (trade name “SE-1X”, manufactured by SABIC), spherical silica (trade name “S-430”). ", Manufactured by Micron Corporation) and kneaded and pelletized at a mass ratio of 8:12:80. An ink jet recording head was produced under the same conditions as in Example 1 except that the content of the infrared absorber (trade name “Toka Black # 3855” manufactured by Tokai Carbon Co., Ltd.) was 0.5 mass%.

(比較例1)
ハロゲンフラッシュランプ光源(出力60w)と記録素子基板を載せたインク供給接合体ユニットの間に、フィルターとしてのシリコン基板を設置しない以外は実施例1と同様にインクジェット記録ヘッドを作製した。
(Comparative Example 1)
An ink jet recording head was prepared in the same manner as in Example 1 except that a silicon substrate as a filter was not placed between the halogen flash lamp light source (output 60 w) and the ink supply assembly unit on which the recording element substrate was placed.

(物流試験後印字画像品位)
実施例1〜6、比較例1〜4で作製したインクジェット記録ヘッドを以下に記載する温度試験後の印字検査(試験後画質)およびヘッドノズル面の観察で評価を行った。温度60℃、湿度20%の環境にヘッドを梱包形態で360時間放置した後にヘッドを観察した。
(Printed image quality after physical distribution test)
The ink jet recording heads produced in Examples 1 to 6 and Comparative Examples 1 to 4 were evaluated by the following print test (image quality after test) and observation of the head nozzle surface. The head was observed after being left in a packaged form for 360 hours in an environment of temperature 60 ° C. and humidity 20%.

上記条件での保存後のヘッドの印字品質を実画像で比較を行った。   The print quality of the head after storage under the above conditions was compared with actual images.

「評価基準」
○:試験後に記録素子基板の反り、クラックなし。接合面のハガレによるインク液の色混じりなし。印字品位が良好であった。
△:試験後に記録素子基板に軽微な反りが見られる。印字品位は許容範囲内であった。
"Evaluation criteria"
○: No warpage or crack of the recording element substrate after the test. No ink color mixing due to peeling of the joint surface. The print quality was good.
Δ: Minor warpage is observed on the recording element substrate after the test. The print quality was within the allowable range.

[貼り合せ精度]
インク供給接合体の基準位置と記録素子基板のアライメントマークまでの距離を貼り合わせ前後で測定を行った。
[Bonding accuracy]
The distance between the reference position of the ink supply assembly and the alignment mark of the recording element substrate was measured before and after bonding.

「評価基準」
◎:記録素子基板の長手、短手方向ともにズレ量3μm未満。
○:記録素子基板の長手、短手方向ともにズレ量3μm以上5μm未満。
△:記録素子基板の長手、短手X、Y方向ともにズレ量5μm以上。
"Evaluation criteria"
A: The amount of deviation is less than 3 μm in both the longitudinal and lateral directions of the recording element substrate.
A: The displacement amount is 3 μm or more and less than 5 μm in both the longitudinal direction and the short direction of the recording element substrate.
Δ: A shift amount of 5 μm or more in both the long and short X and Y directions of the recording element substrate.

結果を表1に示す。   The results are shown in Table 1.

Figure 2011062963
Figure 2011062963

001 インクジェット記録ヘッド(Bk)
002 記録素子基板
003 電気配線テープ
004 支持部材
005 インク供給部材
006 インク供給接合体
007 フラッシュランプ
008 シリコン基板
009 反射板
010 光線
011 接着剤層
001 Inkjet recording head (Bk)
002 Recording element substrate 003 Electrical wiring tape 004 Support member 005 Ink supply member 006 Ink supply assembly 007 Flash lamp 008 Silicon substrate 009 Reflector 010 Light 011 Adhesive layer

Claims (10)

液体を吐出する記録素子基板と、前記記録素子基板に前記液体を供給する液体供給部材と、を少なくとも赤外線吸収剤を含有しかつイオン重合反応機構により硬化する接着剤を用いて連結する方法であって、
前記記録素子基板はシリコン基板を含んで構成され、
少なくとも紫外から赤外領域を含む光をシリコンからなるフィルターに通して前記接着剤に照射することを特徴とする液体吐出ヘッドの製造方法。
In this method, a recording element substrate that discharges a liquid and a liquid supply member that supplies the liquid to the recording element substrate are connected using an adhesive that contains at least an infrared absorber and is cured by an ion polymerization reaction mechanism. And
The recording element substrate includes a silicon substrate;
A method of manufacturing a liquid discharge head, wherein the adhesive is irradiated with light including at least an ultraviolet to infrared region through a filter made of silicon.
前記フィルターは50以上200μm以下の厚みを有するシリコン板であることを特徴とする請求項1に記載の液体吐出ヘッドの製造方法。   The method for manufacturing a liquid discharge head according to claim 1, wherein the filter is a silicon plate having a thickness of 50 to 200 μm. 前記接着剤における前記赤外線吸収剤の含有量が0.01〜5質量%であることを特徴とする請求項1又は2に記載の液体吐出ヘッドの製造方法。   3. The method of manufacturing a liquid discharge head according to claim 1, wherein the content of the infrared absorber in the adhesive is 0.01 to 5 mass%. 前記接着剤は、UVカチオンエポキシ接着剤であることを特徴とする請求項1乃至3のいずれかに記載の液体吐出ヘッドの製造方法。   The method of manufacturing a liquid discharge head according to claim 1, wherein the adhesive is a UV cationic epoxy adhesive. 前記紫外から赤外領域を含む光を発する光源は、キセノンフラッシュランプ又はハロゲンランプであることを特徴とする請求項1乃至4のいずれかに記載の液体吐出ヘッドの製造方法。   5. The method of manufacturing a liquid discharge head according to claim 1, wherein the light source that emits light including the ultraviolet to infrared region is a xenon flash lamp or a halogen lamp. (1)前記接着剤を前記記録素子基板又は前記液体供給部材に配置する工程と、
(2)前記記録素子基板と前記液体供給部材とを貼り合わせる工程と、
(3)前記光を前記フィルターを通して前記接着剤に照射する工程と、
を有することを特徴とする請求項1乃至5のいずれかに記載の液体吐出ヘッドの製造方法。
(1) arranging the adhesive on the recording element substrate or the liquid supply member;
(2) bonding the recording element substrate and the liquid supply member together;
(3) irradiating the adhesive with the light through the filter;
The method of manufacturing a liquid discharge head according to claim 1, comprising:
前記記録素子基板と前記液体供給部材との間に支持部材が介在し、
前記液体供給部材と前記支持部材はインサート成形により接合された接合体を形成し、
前記支持部材に前記記録素子基板が前記接着剤により接着されることを特徴とする請求項1乃至6のいずれかに記載の液体吐出ヘッドの製造方法。
A support member is interposed between the recording element substrate and the liquid supply member,
The liquid supply member and the support member form a joined body joined by insert molding,
The method of manufacturing a liquid discharge head according to claim 1, wherein the recording element substrate is bonded to the support member with the adhesive.
前記支持部材を構成する樹脂組成物が球状フィラーを70%以上含有するポリマーアロイであることを特徴とする請求項7に記載の液体吐出ヘッドの製造方法。   8. The method of manufacturing a liquid discharge head according to claim 7, wherein the resin composition constituting the support member is a polymer alloy containing 70% or more of a spherical filler. 前記ポリマーアロイが少なくとも変性PPEを構成成分として含むことを特徴とする請求項8に記載の液体吐出ヘッドの製造方法。   9. The method of manufacturing a liquid discharge head according to claim 8, wherein the polymer alloy contains at least modified PPE as a constituent component. 前記フィルターへ光を照射した後に、該フィルターを冷却することを特徴とする請求項1乃至9に記載の液体吐出ヘッドの製造方法。   The method of manufacturing a liquid ejection head according to claim 1, wherein the filter is cooled after irradiating the filter with light.
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