JP2011060490A - Antistatic electric apparatus conveying system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an antistatic electric apparatus conveying system capable of destaticizing in a wide range. <P>SOLUTION: The electric apparatus conveying system is provided with a destaticizing brush device fitted to a support base body so as to face a loading area of an electric apparatus for destaticizing it by being in elastic contact with its side faces, a retaining device for elastically retaining the destaticizing brush device selectively at an open position where the electric apparatus can be loaded on the support body and a contact position in elastic contact with the electric apparatus, a conveying vessel with an opening which can let the electric apparatus pass, and the destaticizing brush device arranged facing to the opening on the conveying vessel and destaticizing in elastic contact with an outer periphery face of the electric apparatus passing through the opening. With this system, static discharge at the electric apparatus can be prevented. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an antistatic electrical equipment transport apparatus, and more particularly to an antistatic electrical equipment transport apparatus such as a support base and a transport box that can remove static electricity from the electrical equipment and prevent electrostatic discharge.

  "Electrical equipment" in the present invention includes a semiconductor device, an electronic component that constitutes a circuit with a resistor, a capacitor component, or the like, a mounting substrate, a liquid crystal substrate, and an electric / electronic device in which the electronic component is mounted. Means all electrical equipment that can be adversely affected by electrostatic discharge. In such an electric device, contact frictional charging may occur due to contact with equipment, machine members, or the like in a production line, and there is a possibility that dielectric breakdown of the electric device may occur due to electrostatic discharge. One cause of the occurrence of such electrostatic discharge is that when the electrical device is placed on or taken out from a transport device such as a support or a transport box, the electrical device contacts or rubs against the transport device. Static electricity is generated.

  In order to prevent such electrostatic discharge, a static elimination brush was installed on the upper surface of the semiconductor substrate transfer arm to remove static electricity charged on the substrate during substrate transfer, and also occurred when removing the substrate after transfer from the transfer arm. It has been proposed to remove static electricity due to peeling charging (see, for example, Patent Document 1).

  In addition, it has been proposed that a static elimination brush made of conductive fibers is provided on the transport tray of the liquid crystal display element, and all the scanning electrode terminals and signal electrode terminals of the liquid crystal display element are short-circuited (for example, patents). Reference 2).

JP 2002-158277 A JP 7-320890 A

  However, according to the electrostatic charge countermeasures using the above-described static elimination brush, when the electrical equipment that needs static elimination has an insulator part, the part that is in contact with the static elimination brush can be eliminated, but the part that is not in contact In this case, since the charge remains, the countermeasures against electrostatic discharge are insufficient, and the possibility of occurrence of defects due to electrostatic discharge remains. In recent years, there have been electrical devices that are destroyed by electrostatic discharge, ranging from semiconductor devices and electronic components that are circuit-configured with resistors and capacitor components to these semiconductor devices, mounting / liquid crystal substrates, and electrical / electronic devices equipped with electronic components. Although these electrical devices are enclosed in a housing, the bottom and sides of the housing come into contact with the equipment and machine members that are in production and generate contact frictional charging. Insulation breakdown of the internal IC may occur due to electrostatic discharge.

  When the electric device is transported and taken out from the support base or the box, charging occurs due to contact and friction between the surface of the electric device casing and the fixed support base (cushion material or the like) or the box. The support base and the transport box for fixing the electric device are made of a conductive material, and can prevent electrostatic charging of the device itself. However, even in a conductive support base or a transport box, electrostatic charging is generated if the casing of the electrical device is an insulator. If the support base or the transport box is made of a conductive material, the idea that the electrical equipment does not generate static electricity is a big mistake, and this phenomenon is often overlooked even in countermeasures against static electricity.

  In order to explain this charging phenomenon, it is necessary to explain a model for generating static electricity due to contact and friction. As the two materials, charge transfer occurs when the material A and the material B come into contact with each other to form an electric double layer, and static electricity is generated when separated. This generated charge amount depends on the work function difference between the materials. The work function is energy necessary for taking out electrons from a substance, and is specific to the material. If the work function difference between materials is large, the amount of charge generated by static electricity increases. Therefore, even if the material is a low-resistance metal, the static electricity depends on the work function difference, so that charges are generated. However, in the case of a low-resistance metal or conductive material, since the resistance of the material itself is low, it is easy to be relaxed, and static electricity escapes through the ground and does not appear to be generated. However, when a high-resistance material (insulator) is in contact with these low-resistance materials, the charge generated by the work function difference is retained on the insulator and does not relax. In other words, when the side surface or bottom surface of the high-resistance electrical device casing is charged as in this problem, the charged state is maintained, and the electrical device may cause a static failure due to electrostatic discharge.

  As a general provisional measure, an ionizer is installed when an electric device is transported and taken out from a supporting base or a box. However, adding an ionizer increases costs, and maintenance is a burden on site workers. Therefore, in order to suppress the occurrence of electrostatic discharge, it is necessary for the operator to have a function for suppressing the static charge that is simple and permanent.

  Accordingly, an object of the present invention is to provide an antistatic electric device transport apparatus that can remove a wide range of a charged portion of an electric device and prevent electrostatic charging when the electric device is taken out of the transport device. is there.

  An antistatic electrical equipment transport apparatus according to the present invention includes a support base having a placement area for placing electrical equipment, and the support base provided on the support base in a desired manner outside the placement area. A brush element that has a brush element that elastically contacts a side surface of the electric device placed on a base, removes the electric device from the static electricity, and a brush element provided on the support base, An open position where the mounting area is opened so that the electric device can be received on the support base, and a contact position where the brush element is elastically brought into contact with a side surface of the electric device mounted on the support base. And a holding device for selectively elastically holding.

  In addition, the antistatic electrical equipment transport apparatus according to the present invention accommodates electrical equipment, and is provided on a container wall and has an opening through which the electrical equipment can pass, and is disposed in the opening on the transport container. And a neutralizing brush device that has a brush element that elastically contacts the outer peripheral surface of the electrical device that passes through the opening and that neutralizes the electrical device.

  According to the apparatus of the present invention, the static electricity generated in the electric equipment can be eliminated by the static elimination brush device, and electrostatic discharge can be prevented.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic plan view showing a first embodiment of an antistatic electrical device transport apparatus according to the present invention. FIG. 2 is a schematic plan view of the antistatic electric device transport apparatus of FIG. 1. FIG. 3 is a schematic side cross-sectional view of the antistatic electric device transport apparatus shown along line III-III in FIG. 2. FIG. 4 is a schematic plan cross-sectional view of the antistatic electric device transport apparatus shown along line IV-IV in FIG. 3. It is a schematic perspective view which shows the brush element of a static elimination brush apparatus. It is a schematic plan view which shows 2nd Embodiment of the antistatic electric equipment conveying apparatus of this invention. FIG. 5 is a schematic side cross-sectional view similar to FIG. 3 showing a third embodiment of the antistatic electric device transport apparatus of the present invention. FIG. 8 is a schematic side cross-sectional view showing a state in which the electrical equipment removal operation of the antistatic electrical equipment transport apparatus of FIG. FIG. 5 is a schematic side cross-sectional view similar to FIG. 3 showing a fourth embodiment of the antistatic electric device transport apparatus of the present invention. FIG. 10 is a schematic side cross-sectional view showing a state in which the electrical equipment removal operation of the antistatic electrical equipment transport apparatus of FIG. FIG. 6 is a schematic side cross-sectional view similar to FIG. 3 showing a fifth embodiment of the antistatic electric device transport apparatus of the present invention. It is a schematic sectional side view which shows the state in the electric equipment removal operation | work of the antistatic electric equipment conveyance apparatus of FIG. FIG. 9 is a schematic side cross-sectional view similar to FIG. 3 showing a sixth embodiment of the antistatic electric device transport apparatus of the present invention. It is a schematic sectional side view which shows the state in the electrical equipment removal operation | work of the antistatic electrical equipment conveying apparatus of FIG.

  Embodiments of the present invention will be described below.

Embodiment 1 FIG.
As shown in FIGS. 1 to 5, the antistatic electric device transport apparatus according to the first embodiment of the present invention includes, for example, a plate-like support 2 for mounting a rectangular parallelepiped electric device 1 and a support. And a transport container 3 that is a transport box having a hollow rectangular parallelepiped shape for storing 2 together with the electric device 1. As shown in the figure, the support 2 and the transport container 3 can be used as a single antistatic electrical equipment transport device by cooperating with the support 2 housed in a separate transport container 3, for example, The support body 2 can be used as a bottom wall of the transport container 3 to provide an integrated antistatic electrical equipment transport device, or the support body 2 and the transport container 3 can be separated and independent from each other. It can also be used as a transport device. In other words, the antistatic electrical equipment transport apparatus of the present invention means the support 2, the transport container 3, or a combination thereof.

  The support 2 includes a support base 4, a static elimination brush device 5 attached on the support base 4, and a holding device 6 that holds the static elimination brush device 5 in an open position and a contact position, which will be described later. The support base 4 is a rectangular plate-like member having a recess 8 corresponding to the placement region 7 (see FIG. 4) for placing the electric device 1.

  The neutralizing brush device 5 is provided on the support base 4 so as to surround the placement area 7, and elastically contacts almost the entire circumference of the side surface of the electric device 1 placed on the placement area 7 of the support base 4. The electric device 1 has a plurality of brush elements 9 and removes electricity. The brush element 9 illustrated in FIG. 5 includes a rectangular plate-like body 10 and conductive brush fibers 11 implanted in the plate-like body 10. In order to increase the charge removal effect of the charge removal brush device 5, the brush element 9 is preferably grounded. Suitable materials for the brush fibers 11 include metals such as stainless steel, aluminum, and copper, or conductive acrylic, conductive polyamide, conductive acetate, conductive polyester, and copper ion fibers obtained by adsorbing copper ions to these materials. It is a conductive material such as carbon fiber mixed with a carbon material. A typical brush fiber 11 has a fiber diameter of 5-50 μm and a length of 1-30 mm.

  The holding device 6 is provided on the support base 4 and the brush element 9 is opened to open the mounting area 7 of the support base 4 so that the electric device 1 can be received on the support base 4 (see FIG. 5). Is selectively elastically held at a contact position (shown by a solid line in FIG. 5) where the brush element 9 is elastically brought into contact with the side surface of the electric device 1 placed on the support base 4. Is.

  In the illustrated example, the holding device 6 includes a hinge 12 that pivotally attaches the brush element 9 to the support base 4 and a spring 13 that biases the brush element 9 to a contact position. The hinge 12 is provided on the side edge of the plate-like body 10 on the side where the brush fibers 11 are not implanted, and the plate-like body 10 on both ends thereof is provided with a cam member 14 that is a rectangular column with a rectangular cross section. The cam surface of the cam member 14 is elastically contacted and pressed by a spring 13 which is a leaf spring attached to the support base 4. For this reason, the brush element 9 pivotally supported by the hinge 12 is held elastically and stably at a position where the spring 13 presses the flat cam surface of the cam member 14. If the crest between the flat cam surfaces is moved over the spring 13 by turning it around the hinge 12 by hand or a tool, the flat cam surface on the side of the flat cam surface is elastically held and stabilized at that position. Thus, the elastic engagement between the spring 13 and the cam member 14 allows the brush element 9 to be selectively held at the open position indicated by the imaginary line in FIG. 5 and the contact position indicated by the solid line in FIG. .

  The transport container 3 of the antistatic electrical device transport apparatus according to the present invention accommodates the support 2 together with the electrical device 1 placed thereon, and a container such as the top wall 15 facing the placement region 7 of the support 2. The container is provided on the wall and can be used as a transport box having an opening 16 through which the electric device 1 can pass. In the illustrated example, in addition to the top wall 15, the transport container 3 includes a rectangular bottom wall 17 on which the support 2 is placed, side walls 18, 19 and 20 rising from three sides of the bottom wall 17, and the rest of the bottom wall 17. And a lid 21 that opens and closes the space in the transport container 3.

  The edge of the opening 16 provided in the top wall 15 of the transfer container 3 extends from the outside of the opening 16 to the inside of the opening 16 in a plane that is the same as or parallel to the plane including the top wall 15. The neutralizing brush device 24 having a plurality of brush elements 23 that have the conductive brush fibers 22 directly planted in this manner and elastically contact the outer peripheral surface of the electric device 1 that passes through the opening 16 is provided. . The opening 16 is larger than the electric device 1 so that the electric device 1 can pass through, and the neutralization brush device 24 has sufficient length and elasticity so as to contact the outer surface of the electric device 1 that is about to pass through the opening 16 and perform the charge removal. And have

  In such an antistatic electrical equipment transport apparatus, when the electrical equipment 1 is removed from the support 2, static electricity due to contact friction is generated on the contact surface that is in contact with the support base 4 of the electrical equipment 1. However, since the static eliminating brush device 5 that is flexible is in contact with the outer peripheral surface of the electric device 1, the generated static electricity can be removed. Thus, the support body 2 including the support base 4, the static elimination brush device 5 attached on the support base 4, and the holding device 6 that holds the static elimination brush device 5 in the open position and the contact position is supported by Even when the body 2 is used alone, the electric device 1 can be protected from electrostatic discharge by exhibiting an excellent charge eliminating action even when the electric device 1 is held and transported.

  The electrical device 1 placed on the support 2 in this way and protected from electrostatic discharge is stored in the transport container 3 by opening the lid 21 of the transport container 3 as a transport box together with the support 2. Can be transported. When the electric device 1 is taken out from the transport container 3, the lid 21 is opened and, for example, a hand or an appropriate tool is inserted therein to lift and remove the electric device 1 from the support 2. It is taken out through the provided opening 16. At this time as well, the outer peripheral surface of the electric device 1 is contacted by the flexible static eliminating brush device 24, and almost the entire outer surface is neutralized. As described above, even if the transport container 3 provided with the static eliminating brush device 24 is used alone, when the electric device 1 is taken out, the transport container 3 is brought into contact with the static eliminating brush device 24 to perform static elimination of the electric device 1. Can be protected from.

  Since the neutralizing brush device 5 preferably contacts the entire contact surface efficiently in accordance with the size, shape, and structure of the electrical device 1, the length of the brush fiber 11 and the inclination angle of the brush fiber 11 with respect to the electrical device 1. The plate-like body 10 in which the brush fibers 11 are implanted may be changed. The length of the brush fiber 11 is generally 1-30 mm, but the length may be changed depending on the size, shape, and structure of the electric device 1. Moreover, you may arrange the brush fiber 11 which changed length alternately. As for the inclination angle of the brush fibers 11, the brush fibers 11 may be installed horizontally (inclination angle 0 degree) with respect to the support base 4, but reach the direction perpendicular to the support base 4 (inclination angle 90 degrees). An inclination angle may be added. The plate-like body 10 is generally made of metal. However, the plate-like body 10 may not be made of metal but may be a piece of conductive material (sheet or the like), or may be a metal or conductive thread. If it can be attached to the support base 4, it can be reduced in weight as a base as the support 2 of the electric device 1.

Embodiment 2. FIG.
In the antistatic electrical equipment transport apparatus shown in FIG. 6, the brush element 23 of the static eliminating brush device 24 of the transport container 3 is not directly implanted at the edge of the opening 16 but is attached to the edge. And a conductive brush fiber 26 implanted in the plate-like body 25. The plate-like body 25 may be fixed to the edge of the opening 16 or may be elastically supported by an appropriate spring-equipped hinge device or the like. Protrusions 16 a are provided at the four corners of the opening 16 so as to close the gap of the static eliminating brush device 24. The other structure is the same as that of the antistatic electric equipment conveying apparatus shown in FIGS.

Embodiment 3 FIG.
7 and 8, the support is provided with a brush element 27 that is provided in the placement region 7 of the support base 4 and removes static electricity by contacting the bottom surface of the electric device 1. Yes. The brush element 27 has brush fibers 28 implanted directly on the bottom surface of the recess 8 corresponding to the placement region 7 of the support base 4, and the electric device 1 is supported in the recess 8 as shown in FIG. 7. When the electric device 1 is detached from the brush fiber 28 during the removal of the electric device 1 from the support 2 as shown in FIG. 28 returns to an upright state due to elasticity. The brush fibers 28 may be planted on the entire bottom surface of the concave portion 8 or may be planted by arranging them at an appropriate interval. The other structure is the same as that of the antistatic electric equipment conveying apparatus shown in FIGS. In this embodiment, since the brush element 27 always contacts the bottom surface of the electric device 1, the brush element 27 can contact the entire outer surface of the electric device 1 including the side surface of the electric device 1. The entire device 1 can be neutralized.

Embodiment 4 FIG.
9 and 10, a brush element 27 provided in the placement region 7 of the support base 4 and removing electricity by contacting the bottom surface of the electric device 1 is a brush element, that is, a brush fiber. A spacer 29 for limiting 28 variations is provided. Due to the spacer 29, the position in the recess 8 of the electric device 1 is limited, and the brush fiber 28 is not crushed or bent by the bottom surface of the electric device 1. The length of the brush fiber 28 is preferably longer than the height of the spacer 29. The other structure is the same as that of the antistatic electrical equipment transport apparatus shown in FIGS.

Embodiment 5 FIG.
11 and 12, the brush element 27 includes a spring mechanism 30 that applies a contact pressure to the electric device 1 to the brush fibers 28 of the brush element 27. In the illustrated example, the spring mechanism 30 includes a fixed plate member 31 fixed to the side wall surface of the recess 8 of the support base 4 and a movable plate member 32 that is pivotally attached to the fixed plate member 31 and forms a hinge together with the fixed plate member 31. And a mechanism provided with a spring 33 such as a torsion spring provided between the fixed plate member 31 and the movable plate member 32, and the brush fiber 28 is implanted at the tip of the movable plate member 32, The brush fiber 28 is elastically brought into contact with the bottom surface of the electric device 1 by the elastic force of the spring 33. In a state where the electric device 1 is supported by the support 2, both the brush fiber 28 and the movable plate member 32 move to be parallel to the bottom surface of the concave portion 8 as shown in FIG. As shown, in the state of being removed from the support 2, for example, the spring 33 returns to the position shown in FIG. 12 to follow the movement of the electric device 1, but no further follow-up is possible. 27 is removed from the support 2 away from the support 27. The other structure is the same as that of the antistatic electrical equipment transport apparatus shown in FIGS.

Embodiment 6 FIG.
13 and 14, the brush element 27 includes a spring mechanism 34 that applies a contact pressure to the electric device 1 to the brush fibers 28 of the brush element 27. In the illustrated example, the spring mechanism 34 is a spring 36 that is a compression coil spring provided between the movable plate member 35 pivotally attached to the corner of the bottom surface of the recess 8 of the support 2 and the bottom surface of the recess 8. The brush fiber 28 implanted at the tip of the movable plate member 35 is a mechanism that acts so as to be biased toward the bottom surface of the electric device 1. Also in this example, there is a limit to the follow-up of the brush fiber 28 to the bottom surface of the electric device 1, and the electric device 1 is removed from the support 2. The other structure is the same as that of the antistatic electrical equipment transport apparatus shown in FIGS.

  The antistatic electric equipment transport apparatus illustrated and described above is merely an example, and various modifications are possible, and the features of each specific example can be used altogether or selectively combined. For example, in the illustrated example, the neutralizing brush device 24 is provided over the entire periphery of the opening 16 of the top wall 15 of the transport container 3 that is a transport box, but only a part of the edge or the container wall It is also possible to dispose the charge eliminating brush device only on a part of the inner surface and move the electric device 1 to bring the entire outer surface into contact with the charge eliminating brush device 24. The holding device for holding the static eliminating brush device 5 provided on the support 2 in the open position or the contact position can also be performed using a link mechanism. Furthermore, the electrical device 1 is not limited to the rectangular parallelepiped shown in the figure, but may have various shapes such as a cylindrical shape, a spherical shape, and a flat plate shape, and any of them can be neutralized by the antistatic electrical device transport apparatus of the present invention. . Further, even when the support base 4 is conductive or insulating, it can be neutralized by the neutralizing brush device of the present invention. Moreover, in order to raise the static elimination efficiency, it is preferable that the brush fibers 11, 22, 26, and 28 are grounded.

  The present invention can be used as an antistatic electrical equipment conveying apparatus.

  DESCRIPTION OF SYMBOLS 1 Electric equipment, 2 Support body, 3 Transport container, 4 Support base | substrate, 5 Static elimination brush apparatus, 6 Holding apparatus, 7 Mounting area | region, 8 Recessed part, 9, 23, 27 Brush element, 10, 25 Plate-shaped body, 11, 22, 26, 28 Brush fiber, 12 Hinge, 13, 33, 36 Spring, 14 Cam member, 15 Top wall, 16 Opening, 16a Protruding part, 17 Bottom wall, 18, 19, 20 Side wall, 21 Lid, 24 Static neutralization Brush device, 29 Spacer, 30, 34 Spring mechanism, 31 Fixed plate member, 32, 35 Movable plate member.

Claims (11)

A support base with a mounting area for mounting electrical equipment;
There is a brush element that is provided on the support base in hopes of the placement area outside the placement area and elastically contacts a side surface of the electrical equipment placed on the support base. A static elimination brush device for eliminating static electricity;
An open position provided on the support base to open the placement area of the brush element so that the electrical equipment can be received on the support base; and the electrical equipment placed on the support base. And a holding device that selectively and elastically holds the brush element at a contact position where the brush element is elastically brought into contact with a side surface of the antistatic electric device conveying apparatus.   2. The antistatic electrical equipment transport apparatus according to claim 1, wherein the holding device includes a hinge that pivotally attaches the brush element to the support base, and a spring that biases the brush element to a contact position. .   The static eliminating brush device includes a plurality of brush elements that are provided on the support base so as to surround the placement area and elastically contact substantially the entire circumference of the side surface of the electric device placed on the support base. The antistatic electrical equipment transport apparatus according to claim 1 or 2, characterized in that:   The said static elimination brush apparatus was provided in the said mounting area | region on the said support base, and was equipped with the brush element which contacts the bottom face of the said electric equipment and neutralizes electricity, The any one of Claims 1-3 characterized by the above-mentioned. The antistatic electrical equipment transport apparatus according to Item.   5. The antistatic electric equipment transport apparatus according to claim 4, wherein the static eliminating brush device includes a spacer that restricts deformation of the brush element provided in the placement area on the support base.   5. The antistatic device according to claim 4, wherein the static eliminating brush device includes a spring mechanism that applies a contact pressure to the electric device to the brush element provided in the placement region on the support base. Electrical equipment transfer device. A transport container that houses the support base together with the electric device and has an opening that is provided on a container wall facing the placement area on the support base and allows the electric device to pass through;
A brushing device that has a brush element elastically contacting the outer peripheral surface of the electrical device that passes through the opening and is disposed in a desired manner on the transport container, and that neutralizes the electrical device. The antistatic electrical equipment transport apparatus according to any one of claims 1 to 6. A transport container that houses an electrical device and has an opening that is provided on a container wall and allows the electrical device to pass through,
A brushing device that has a brush element elastically contacting the outer peripheral surface of the electrical device that passes through the opening and is disposed in a desired manner on the transport container, and that neutralizes the electrical device. An antistatic electrical equipment transport device characterized by   9. The antistatic device according to claim 8, wherein the brush element is provided in the transfer container so as to surround the opening, and performs static elimination by elastically contacting substantially the entire circumference of the side surface of the electric device. Electrical equipment transfer device.   10. The antistatic electrical equipment transport apparatus according to claim 8, wherein the brush element is directly planted at an edge of the opening.   The antistatic electrical equipment transport apparatus according to claim 8 or 9, wherein the brush element has a plate-like body attached to an edge of the opening.

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