JP2011057550A - ペロフスカイト結晶構造を有するジルコンチタン酸鉛(pzt)を基礎とする圧電セラミック材料 - Google Patents
ペロフスカイト結晶構造を有するジルコンチタン酸鉛(pzt)を基礎とする圧電セラミック材料 Download PDFInfo
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- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
- C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
- C04B35/493—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT containing also other lead compounds
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- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
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- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/327—Iron group oxides, their mixed metal oxides, or oxide-forming salts thereof
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- C04B2235/76—Crystal structural characteristics, e.g. symmetry
- C04B2235/768—Perovskite structure ABO3
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- C04B2235/79—Non-stoichiometric products, e.g. perovskites (ABO3) with an A/B-ratio other than 1
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Abstract
【解決手段】高いレベルの圧電活性を得るためにPb(Zr、Ti)O3を基礎とする圧電セラミック材料を変性し、式A2+B4+O3 2−のペロフスカイトの結晶構造を有するジルコンチタン酸鉛(PZT)を基礎とし、Zr/Ti位置での異なる原子価のアクセプターイオンおよびドナーイオンの置換基を有する。
【選択図】なし
Description
成形:乾式プレス
焼結温度:1200℃
材料データ
比誘電率ε33 T/ε0 1980
誘電損失係数tanδ、10−4 155
平面電気機械結合係数kp 0.66
縦方向の電気機械結合係数k33 0.74
圧電率d33、10−12C/N 495
機械的Q値 70
キュリー温度、℃ 345。
成形:フィルムキャスティング法
焼結温度:1180℃
材料データ
比誘電率ε33 T/ε0 1860
誘電損失係数tanδ、10−4 160
平面電気機械結合係数kp 0.64
圧電率d33、10−12C/N 450
機械的Q値 65
キュリー温度、℃ 343。
成形:乾式プレス
焼結温度:1200℃
材料データ
比誘電率ε33 T/ε0 2010
誘電損失係数tanδ、10−4 170
平面電気機械結合係数kp 0.66
縦方向の電気機械結合係数k33 0.73
圧電率d33、10−12C/N 495
機械的Q値 70
キュリー温度、℃ 349。
成形:フィルムキャスティング法
焼結温度:1250℃
材料データ
比誘電率ε33 T/ε0 975
誘電損失係数tanδ、10−4 45
平面電気機械結合係数kp 0.36
圧電率d33、10−12C/N 305
機械的Q値 125
キュリー温度、℃ 355。
Claims (13)
- 式A2+B4+O3 2−を有するペロフスカイト結晶構造を有するジルコンチタン酸鉛(PZT)を基礎とする圧電セラミック材料において、Zr/Ti位置での異なる原子価のアクセプターイオンおよびドナーイオンの置換基を有することを特徴とする圧電セラミック材料。
- Pb(Zr、Ti)O3系の部分的にのみ原子価補償された組成物を形成するために、部分的に原子価補償されたアクセプターイオンおよびドナーイオン対B3+ y/B5+ zの置換基を有し、y<zであり、yは0.05以下である請求項1記載の圧電セラミック材料。
- 一般式Pb2+ 1−wSr2+ v[B3+ y(ZrxTi1−x)1−y−zNbz]O3を有する固溶体の系の組成物において、Zr/Ti位置で異なる原子価のアクセプターイオンおよびドナーイオンの結合した置換基が存在し、その際vが0.00〜0.05であり、wが0.00〜0.05であり、xが0.50〜0.55であり、B4+位置がAl3+イオンまたはFe3+イオンを有する請求項1または2記載の圧電セラミック材料。
- 前記系が式[Pb0.995Sr0.02][Al0.005(ZrxTi1−x)0.975Nb0.02]O3による組成を有し、xは0.50〜0.55である請求項3記載の圧電セラミック材料。
- 前記系の材料が[Pb0.995Sr0.02][Al0.005(Zr0.53Ti0.47)0.975Nb0.02]O3の組成に相当する請求項1から4までのいずれか1項記載の圧電セラミック材料。
- 前記系が[Pb0.995Sr0.02][Fe0.005(ZrxTi1−x)0.975Nb0.02]O3による組成を有し、xは0.50〜0.55である請求項3記載の圧電セラミック材料。
- 前記系の材料が[Pb0.995Sr0.02][Fe0.005(Zr0.53Ti0.47)0.975Nb0.02]O3の組成に相当する請求項1から6までのいずれか1項記載の圧電セラミック材料。
- 混合酸化物技術により材料が製造される請求項1から7までのいずれか1項記載の圧電セラミック材料。
- 材料が1100〜1200℃の範囲の温度で焼結される請求項1から8までのいずれか1項記載の圧電セラミック材料。
- 材料が圧電セラミックフィルムを製造するために使用できる請求項1から9までのいずれか1項記載の圧電セラミック材料。
- フィルムが金属被覆され、分極した状態でセンサーに使用される請求項10記載の圧電セラミック材料。
- フィルムが多層構造でアクチュエーターに使用される請求項10または11記載の圧電セラミック材料。
- 構造がモノリシックである請求項12記載の圧電セラミック材料。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10148378 | 2001-09-29 | ||
DE10229086A DE10229086A1 (de) | 2001-09-29 | 2002-06-28 | Piezoelektrische keramische Werkstoffe auf der Basis von Bleizirkonattitanat (PZT) mit der Kristallstruktur des Perowskits |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2003532419A Division JP5283815B2 (ja) | 2001-09-29 | 2002-09-20 | ペロブスカイト結晶構造を有するジルコンチタン酸鉛(pzt)を基礎とする圧電セラミック材料 |
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JP2011057550A true JP2011057550A (ja) | 2011-03-24 |
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JP2003532419A Expired - Fee Related JP5283815B2 (ja) | 2001-09-29 | 2002-09-20 | ペロブスカイト結晶構造を有するジルコンチタン酸鉛(pzt)を基礎とする圧電セラミック材料 |
JP2010238841A Pending JP2011057550A (ja) | 2001-09-29 | 2010-10-25 | ペロフスカイト結晶構造を有するジルコンチタン酸鉛(pzt)を基礎とする圧電セラミック材料 |
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JP2003532419A Expired - Fee Related JP5283815B2 (ja) | 2001-09-29 | 2002-09-20 | ペロブスカイト結晶構造を有するジルコンチタン酸鉛(pzt)を基礎とする圧電セラミック材料 |
Country Status (8)
Country | Link |
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US (1) | US7387745B2 (ja) |
EP (1) | EP1436848B1 (ja) |
JP (2) | JP5283815B2 (ja) |
AU (1) | AU2002339306A1 (ja) |
DE (2) | DE10229086A1 (ja) |
DK (1) | DK1436848T3 (ja) |
ES (1) | ES2540898T3 (ja) |
WO (1) | WO2003029162A2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012133529A1 (ja) * | 2011-03-30 | 2012-10-04 | 日本碍子株式会社 | 圧電体基板の製造方法 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10229086A1 (de) * | 2001-09-29 | 2003-04-17 | Ceramtec Ag | Piezoelektrische keramische Werkstoffe auf der Basis von Bleizirkonattitanat (PZT) mit der Kristallstruktur des Perowskits |
US7036363B2 (en) * | 2003-07-03 | 2006-05-02 | Pathfinder Energy Services, Inc. | Acoustic sensor for downhole measurement tool |
US7513147B2 (en) * | 2003-07-03 | 2009-04-07 | Pathfinder Energy Services, Inc. | Piezocomposite transducer for a downhole measurement tool |
DE102004002204A1 (de) | 2004-01-15 | 2005-08-11 | Epcos Ag | Keramikmaterial |
JP4997521B2 (ja) * | 2004-11-15 | 2012-08-08 | 独立行政法人物質・材料研究機構 | 圧電材料と非線形圧電素子 |
US7918542B2 (en) | 2006-09-15 | 2011-04-05 | Fujifilm Corporation | Perovskite oxide, process for producing the perovskite oxide, piezoelectric body, piezoelectric device, and liquid discharge device |
US7587936B2 (en) * | 2007-02-01 | 2009-09-15 | Smith International Inc. | Apparatus and method for determining drilling fluid acoustic properties |
US8117907B2 (en) * | 2008-12-19 | 2012-02-21 | Pathfinder Energy Services, Inc. | Caliper logging using circumferentially spaced and/or angled transducer elements |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07257924A (ja) * | 1994-03-22 | 1995-10-09 | Toyota Central Res & Dev Lab Inc | 圧電材料 |
JP2005503990A (ja) * | 2001-09-29 | 2005-02-10 | セラムテック アクチエンゲゼルシャフト イノヴェイティヴ セラミック エンジニアリング | ペロフスカイト結晶構造を有するジルコンチタン酸鉛(pzt)を基礎とする圧電セラミック材料 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US5237882A (en) * | 1991-05-16 | 1993-08-24 | Purolator Products Company | Engine starter gearing with laminated cushion washers |
US5378382A (en) * | 1993-12-09 | 1995-01-03 | Mitsubishi Kasei Corporation | Piezoelectric ceramic composition for actuator |
JPH111368A (ja) | 1997-06-12 | 1999-01-06 | Tdk Corp | 圧電磁器組成物 |
JPH11163433A (ja) * | 1997-11-27 | 1999-06-18 | Hitachi Metals Ltd | 積層型圧電セラミックス振動子および製造方法 |
JP3570294B2 (ja) * | 1999-05-20 | 2004-09-29 | 株式会社村田製作所 | 圧電磁器材料およびそれを用いて得られた圧電磁器焼結体 |
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2002
- 2002-06-28 DE DE10229086A patent/DE10229086A1/de not_active Withdrawn
- 2002-09-20 AU AU2002339306A patent/AU2002339306A1/en not_active Abandoned
- 2002-09-20 ES ES02776689.8T patent/ES2540898T3/es not_active Expired - Lifetime
- 2002-09-20 WO PCT/DE2002/003528 patent/WO2003029162A2/de active Application Filing
- 2002-09-20 EP EP02776689.8A patent/EP1436848B1/de not_active Expired - Lifetime
- 2002-09-20 DK DK02776689.8T patent/DK1436848T3/da active
- 2002-09-20 DE DE10297724T patent/DE10297724D2/de not_active Ceased
- 2002-09-20 JP JP2003532419A patent/JP5283815B2/ja not_active Expired - Fee Related
- 2002-09-20 US US10/490,496 patent/US7387745B2/en not_active Expired - Lifetime
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2010
- 2010-10-25 JP JP2010238841A patent/JP2011057550A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07257924A (ja) * | 1994-03-22 | 1995-10-09 | Toyota Central Res & Dev Lab Inc | 圧電材料 |
JP2005503990A (ja) * | 2001-09-29 | 2005-02-10 | セラムテック アクチエンゲゼルシャフト イノヴェイティヴ セラミック エンジニアリング | ペロフスカイト結晶構造を有するジルコンチタン酸鉛(pzt)を基礎とする圧電セラミック材料 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012133529A1 (ja) * | 2011-03-30 | 2012-10-04 | 日本碍子株式会社 | 圧電体基板の製造方法 |
US9219224B2 (en) | 2011-03-30 | 2015-12-22 | Ngk Insulators, Ltd. | Method for manufacturing piezoelectric substrate |
JP5847803B2 (ja) * | 2011-03-30 | 2016-01-27 | 日本碍子株式会社 | 圧電体基板の製造方法 |
Also Published As
Publication number | Publication date |
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AU2002339306A1 (en) | 2003-04-14 |
US20050006620A1 (en) | 2005-01-13 |
JP5283815B2 (ja) | 2013-09-04 |
JP2005503990A (ja) | 2005-02-10 |
DE10297724D2 (en) | 2005-04-21 |
DK1436848T3 (da) | 2015-07-06 |
US7387745B2 (en) | 2008-06-17 |
WO2003029162A3 (de) | 2003-10-30 |
ES2540898T3 (es) | 2015-07-14 |
WO2003029162A2 (de) | 2003-04-10 |
EP1436848B1 (de) | 2015-04-01 |
DE10229086A1 (de) | 2003-04-17 |
EP1436848A2 (de) | 2004-07-14 |
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