JP2011051087A - Machining fixture, machining device using the same, and machining method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a machining fixture, a machining device and a machining method capable of performing machining at low cost by a simple step. <P>SOLUTION: The machining device includes a pressure-reduction suction member 20 for pressure-reduction sucking a workpiece 10 and a pressing member 30 for pressing the workpiece 10 toward the pressure-reduction suction member 20 on a pedestal 40. On the pressure-reduction suction member 20, a plurality of suction ports 21 for pressure-reduction sucking the workpiece 10 are provided in a longitudinal direction and an arrangement direction of the workpiece 10 so as to correspond to the workpiece 10, respectively. Furthermore, between the respective suction ports 21 adjacent in the longitudinal direction, cutting grooves 22 for cutting the respective workpieces 10 are formed with predetermined interval. On the pressure member 30, a plurality of pressing surfaces 31 for pressing the workpiece 10 are formed, and between the pressing surfaces 31 adjacent in the longitudinal direction, penetration parts 32 for cutting the respective workpieces 10 are formed with predetermined interval. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a processing jig for processing a workpiece, a processing apparatus, and a processing method using them.

  Conventionally, when a workpiece such as a resin part is cut, the workpiece is cut after the workpiece and the mounting table are bonded by irradiating the adhesive with ultraviolet rays. Then, after irradiating with ultraviolet rays to melt the adhesive, the processed product is recovered by washing.

JP-A-5-84682 JP 2004-223650 A

  However, in such a method, there are many steps and a material such as an adhesive is required, which is problematic in terms of cost. Therefore, it has been desired to develop a processing jig, a processing apparatus, and a processing method that can be processed in a simple process and at a low cost.

  The present invention has been made based on such a problem, and an object of the present invention is to provide a processing jig, a processing apparatus, and a processing method capable of processing at a low cost with a simple process.

  Note that Patent Document 1 relates to a vacuum chuck device, and even when an O-ring is disposed around a vacuum hole for vacuum-sucking a workpiece and a gap is generated between the suction plate and the workpiece, An apparatus is described that can obtain sufficient adsorption power. Patent Document 2 relates to a suction holding device, and describes a device that can reliably suck even if the sheet is warped by providing a trumpet-shaped suction pad protruding from the base surface. ing. However, the present invention and the apparatus described in Patent Document 1 or Patent Document 2 are completely different in the shape of the workpiece and the content of processing.

  The processing jig of the present invention holds each workpiece when cutting the plurality of rod-like workpieces arranged in parallel and supported by the support frame into a plurality of pieces in the length direction. A processing jig is provided with a plurality of suction ports for decompressing and sucking each work piece in the length direction and the arrangement direction corresponding to each work piece, and adjacent in the length direction. A vacuum suction member provided with a cutting groove for cutting each workpiece between the suction ports, and each workpiece is pressed toward the vacuum suction member to cut each workpiece. The pressure reducing adsorbing member is provided with a plurality of O-rings so as to individually surround each adsorbing port, and each O-ring adsorbs more than the seating surface of each workpiece. A part protrudes on the side.

  The processing apparatus of this invention is equipped with the processing jig of this invention, and the cutting member which penetrates a penetration part and cut | disconnects a workpiece.

  The processing method of the present invention is a method of processing a workpiece using the processing jig of the present invention, wherein each workpiece is vacuum-suctioned by a vacuum suction member, and the workpiece is After pressing toward the vacuum adsorbing member, the workpiece is cut from the penetrating portion.

  According to the present invention, a plurality of suction ports for sucking each workpiece under reduced pressure are provided in the length direction and the arrangement direction corresponding to each workpiece, and the suction ports adjacent to each other in the length direction are provided. A vacuum suction member provided with a cutting groove for cutting each workpiece between the mouths, and a through hole for pressing each workpiece against the vacuum suction member and cutting each workpiece Since the pressing member having the portion is provided, it can be firmly fixed by the pressing member while preventing the displacement by the reduced pressure adsorbing member. Therefore, the workpiece can be cut stably and easily.

  In addition, since a plurality of suction ports are provided in the length direction and the arrangement direction corresponding to each work piece, each work piece is sucked and held individually when the pressing member is removed after cutting. can do. Therefore, for example, even if the work piece is very thin or light, it is possible to prevent the position of the cut work piece from being displaced when the pressing member is removed. Can be recovered.

  Furthermore, since an O-ring is provided so as to surround the suction port, and a part of the O-ring protrudes to the suction side from the seating surface, the suction force can be increased and the workpiece can be held more firmly. be able to. Therefore, according to the present invention, the step of bonding with an adhesive and the step of cleaning the adhesive are not necessary, and the process can be simplified and the cost can be reduced.

  In addition, if the buffer member is provided on the pressing surface of the pressing member, the workpiece can be held more firmly.

  Furthermore, if a support frame pressing portion for pressing the support frame is provided on the pressing member, the workpiece can be more stably fixed.

  In addition, if a water supply path for supplying cutting water to the reduced pressure adsorbing member is provided, the cutting water is supplied to the workpiece 10 also from the side of the reduced pressure adsorbing member 220, thereby processing the workpiece 10. It is possible to prevent the precipitation of cutting powder that sometimes occurs. In addition, the workpiece 10 can be cooled more effectively, and the occurrence of cutting burrs on the reduced-pressure adsorption member 220 side of the workpiece 10 can be suppressed.

  Furthermore, if the suction port is provided with a plurality of suction holes connected to the suction source, the suction force can be increased and the workpiece can be held more firmly. .

  In addition, when cutting the workpiece, if the workpiece is cut between the lower end of the workpiece and the lower end of the support frame, the support frame is completely cut after the workpiece is cut. Can be left without. Therefore, the recovery of the support frame can be facilitated.

It is a perspective view showing the structure of the processing jig which concerns on the 1st Embodiment of this invention. It is the perspective view which looked at the processing jig shown in Drawing 1 from other directions. FIG. 2 is a perspective view illustrating a state in which a workpiece is disposed on the processing jig illustrated in FIG. 1. It is the perspective view which looked at the state shown in FIG. 3 from the other direction. FIG. 2 is a perspective view illustrating a state in which a workpiece is arranged on the processing jig illustrated in FIG. 1 and a pressing member is closed. It is the perspective view which looked at the state shown in FIG. 5 from the other direction. FIG. 2 is a partial cross-sectional view illustrating a state in which a workpiece is held by the processing jig illustrated in FIG. 1. FIG. 8 is an enlarged sectional view showing the state shown in FIG. 7 in an enlarged manner. FIG. 4 is a perspective view illustrating a configuration of a workpiece illustrated in FIG. 3. It is the perspective view which looked at the workpiece shown in FIG. 9 from the other direction. It is a perspective view showing the state after cut | disconnecting a workpiece with the processing jig shown in FIG. It is the perspective view which looked at the state shown in FIG. 11 from the other direction. It is a perspective view showing the support frame after cut | disconnecting a to-be-processed object. It is a perspective view showing the structure of the processing jig which concerns on the 2nd Embodiment of this invention. FIG. 15 is an enlarged perspective view illustrating a part of the processing jig illustrated in FIG. 14. It is the perspective view which looked at the processing jig shown in FIG. 14 from the other direction. FIG. 15 is a perspective view illustrating a state in which a workpiece is arranged on the processing jig illustrated in FIG. 14. It is the perspective view which looked at the state shown in FIG. 17 from the other direction. FIG. 15 is a perspective view illustrating a state in which a workpiece is arranged on the processing jig illustrated in FIG. 14 and a pressing member is closed. It is the perspective view which looked at the state shown in FIG. 19 from the other direction. It is a perspective view showing the state after cut | disconnecting a workpiece with the processing jig shown in FIG. It is the perspective view which looked at the state shown in FIG. 21 from the other direction. It is a section perspective view showing composition of a processing jig concerning a 3rd embodiment of the present invention.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(First embodiment)
FIG. 1 is a perspective view showing a processing jig 1 according to the first embodiment of the present invention, and FIG. 2 is a perspective view of the processing jig 1 as viewed from the other side. 3 to 6 are perspective views in which the workpiece 10 is arranged on the processing jig 1. FIG. 7 is a partial cross-sectional view showing a state in which the workpiece 10 is disposed on the processing jig 1, and FIG. 8 is an enlarged cross-sectional view showing a part thereof enlarged. The processing jig 1 includes a vacuum suction member 20 that vacuum-sucks the workpiece 10 and a pressing member 30 that presses the workpiece 10 toward the vacuum suction member 20 on a pedestal 40.

  FIG. 9 is a perspective view showing the workpiece 10. FIG. 10 is a perspective view of the workpiece 10 as viewed from the other side. The workpiece 10 is, for example, a rod-shaped body such as a rectangular parallelepiped, and a plurality of the workpieces 10 are arranged in parallel, and both ends of each workpiece 10 are supported by a rectangular support frame 11. The object 10 is supported by being inclined with respect to the support frame 11. The workpiece 10 and the support frame 11 are made of plastic, for example. The upper end of each workpiece 10 is positioned below, for example, the upper end of the support frame 11, and the lower end of each workpiece 10 is positioned, for example, above the lower end of the support frame 11. This is to prevent the workpiece 10 from being damaged. Further, the support frame 11 is provided with a mark 12 for indicating a cutting position, for example.

  As shown in FIGS. 1 to 4, the vacuum suction member 20 is provided with a plurality of suction ports 21 for vacuum suction of the workpiece 10. These suction ports 21 are formed so as to be inclined so that the workpieces 10 are arranged. The length direction (X direction) and the arrangement direction of the workpieces 10 correspond to the workpieces 10. A plurality of each are provided in the (Y direction). In addition, cutting grooves 22 for cutting the workpieces 10 are formed at predetermined intervals between the suction ports 21 adjacent in the length direction (X direction).

  For example, one of the pressing members 30 is rotatably connected to the pedestal 40 via a fulcrum 41 so that the workpiece 10 can be pressed toward the reduced pressure adsorption member 20. The pressing member 30 is provided with a plurality of pressing surfaces 31 for pressing the workpiece 10. These pressing surfaces 31 are formed so as to be inclined so that each workpiece 10 can be pressed, and a plurality of pressing surfaces 31 are provided in the length direction (X direction) and the arrangement direction (Y direction) of the workpieces 10. . Between the pressing surfaces 31 adjacent in the length direction (X direction), through portions 32 for cutting each workpiece 10 are formed at predetermined intervals. For example, as shown in FIGS. 5 and 6, the other side of the pressing member 30 is fixed by a lock member 42 provided on the base 40 so that the pressing member 30 can be fixed in a closed state, that is, in a state where the workpiece is pressed. It has come to be.

  In addition, as shown in FIG. 7, it is preferable that a buffer member 33 is disposed on at least a part of the pressing surface 31. This is because the workpiece 10 can be held more firmly. The buffer member 33 is made of an elastic material such as silicon rubber or fluorine rubber, for example. For example, it is preferable that a buffer member 33 is also disposed on the contact surface 34 of the support frame 11. This is for fixing the support frame 11.

  Further, as shown in FIG. 8, the vacuum suction member 20 is provided with a seating surface 23 of the workpiece 11 around each suction port 21, and each workpiece 10 is arranged on the seating surface 23. It is formed so as to be inclined. A plurality of O-rings 24 are provided around each suction port 21 so as to individually surround each suction port 21 via a seating surface 23. The O-ring 24 is disposed with respect to a disposition groove 25 provided so as to surround the suction port 21, and a part of the O-ring 24 protrudes to the suction side from the seating surface 23. The protruding amount of the O-ring 24 is preferably about 0.05 mm to 0.15 mm, and it is preferable that the O-ring 24 is pressed to be the same height as the seating surface 23 when the workpiece 10 is disposed. This is because the workpiece 10 can be held more firmly. FIG. 8 shows a state where the O-ring 24 is pressed by the workpiece 10 and the O-ring 24 is at the same height as the seating surface 23. In addition, each arrangement groove 25 is provided with a protruding portion 26 for locking the O-ring 24 on the seating surface 23 side. The protrusion 26 is formed, for example, such that the side surface on the O-ring 24 side is inclined toward the seating surface 23 so that the thickness in the direction perpendicular to the seating surface 23 decreases toward the outer peripheral side.

  Each suction port 21 is connected to a suction source (not shown) via a suction passage 27. A narrowing member 28 for narrowing the suction passage 27 is disposed between each suction port 21 and the suction passage 27 in the vicinity of the seating surface 23. This is because the workpiece 10 can be held more firmly. The narrowing member 28 is provided with a plurality of suction holes 29 that allow the suction port 21 and the suction passage 27 to communicate with each other.

  The processing jig 10 is used as follows, for example.

  First, the processing jig 1 is installed in a processing apparatus (not shown), and, for example, as shown in FIGS. 1 and 2, the other side of the pressing member 30 is lifted by a driving jig such as an arm (not shown) to expose the reduced pressure adsorption member 20. . Next, for example, as shown in FIGS. 3 and 4, one surface of the workpiece 10 is placed on the reduced-pressure suction member 20 so as to correspond to each suction port 21 by a driving jig such as an arm (not shown). After that, the vacuum suction member 20 holds the one surface of the workpiece 10 under reduced pressure. In that case, it is preferable that the gauge pressure of the suction source (not shown) connected to each suction port 21 is, for example, about −80 kPa to −90 kPa.

  Subsequently, for example, as shown in FIGS. 5 and 6, the other side of the pressing member 30 is rotated and closed by a driving jig such as an arm (not shown), and the other surface of each workpiece 10 is directed to the reduced pressure adsorbing member 20. And press. At that time, since the workpieces 10 are sucked and held by the reduced-pressure suction member 20, the displacement of the workpieces 10 is prevented. After that, for example, the other side of the pressing member 30 is fixed by the lock member 42 by a driving jig such as an arm (not shown). Thereby, each workpiece 10 is firmly held by the vacuum suction member 20 and the pressing member 30.

  Next, a cutting member (not shown) is moved along the penetrating part 32 and the cutting groove 22, and cut through the penetrating part 32 so as to divide each workpiece 10 into a plurality of parts in the length direction. At that time, each workpiece 10 is firmly held by the reduced pressure suction member 20 and the pressing member 30, and can be easily cut while preventing displacement. In addition, when cutting the workpiece 10, it is preferable to cut to between the lower end of each workpiece and the lower end of the support frame 11. This is because after the workpiece 10 is cut, the support frame 11 can be left in a state where it is not completely cut, so that the support frame 11 can be easily recovered.

  After that, for example, the other side of the pressing member 30 is lifted and removed by a driving jig such as an arm (not shown). 11 and 12 are perspective views showing a state after the workpiece 10 is cut. At that time, since the workpieces 10 are sucked and held by the reduced-pressure suction member 20, the displacement of the workpieces 10 is prevented. Subsequently, for example, the suction by the reduced pressure adsorbing member 20 is stopped, and each workpiece 10 cut by a driving jig (not shown) is collected. After that, for example, the support frame 11 after cutting the workpiece 10 shown in FIG.

  As described above, according to the present embodiment, a plurality of suction ports 21 for sucking each workpiece 10 under reduced pressure are provided in the length direction and the arrangement direction corresponding to each workpiece 10. The vacuum suction member 20 provided with a cutting groove 22 for cutting each workpiece 10 between the suction ports 21 adjacent in the length direction, and each workpiece 10 to the vacuum suction member 20 And a pressing member 30 having a penetrating portion 32 for cutting each workpiece 10. Therefore, the pressure reducing adsorbing member 20 prevents the displacement and firmly fixes the pressing member 30. can do. Therefore, the workpiece can be cut stably and easily.

  In addition, since a plurality of suction ports 21 are provided in the length direction and the arrangement direction corresponding to each work piece 10, each work piece 10 is individually attached even when the pressing member 30 is removed after cutting. It can be adsorbed and held. Therefore, for example, even if the workpiece 10 is very thin or light, it is possible to prevent the position of the workpiece 10 that is cut when the pressing member 30 is removed from being displaced, and the cut workpiece The object 10 can be easily recovered.

  Furthermore, since an O-ring 24 is provided so as to surround the suction port 21 and a part of the O-ring 24 protrudes to the suction side from the seating surface 23, the suction force can be increased and the workpiece can be processed more firmly. The object 10 can be held. Therefore, according to the present embodiment, the process of bonding with an adhesive and the process of cleaning the adhesive are not required, and the process can be simplified and the cost can be reduced.

  In addition, if the suction port 21 is provided with a plurality of suction holes 29 connected to a suction source, the suction force can be increased and the workpiece 10 can be held more firmly. be able to.

  Furthermore, if the buffer member 33 is provided on the pressing surface 31 of the pressing member 30, the workpiece 10 can be held more firmly.

  In addition, when the workpiece 10 is cut, if the workpiece 10 is cut between the lower end of the workpiece 10 and the lower end of the support frame 11, the support frame 11 is completely cut after the workpiece 10 is cut. Can be left uncut. Therefore, the collection of the support frame 11 can be facilitated.

(Second Embodiment)
The processing jig 100 according to the second embodiment has the same configuration as the processing jig 1 according to the first embodiment except that the configuration of the pressing member 130 is partially different. . Therefore, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  FIG. 14 is a perspective view showing a processing jig 100 according to the second embodiment of the present invention, FIG. 15 is an enlarged perspective view of a part of the processing jig 100, and FIG. 16 is a processing jig. It is the perspective view which looked at 100 from the other. FIGS. 17 to 22 are perspective views in which the workpiece 10 is arranged on the processing jig 100. FIGS. 17 and 18 show the workpiece 10 in a reduced pressure adsorbing member 20 by opening the pressing member 130. FIG. 19 and 20 show a state in which the workpiece 10 is placed and the pressing member 130 is closed. FIGS. 21 and 22 show the workpiece 10 cut. The state where the pressing member 130 is opened later is shown.

  For example, the pressing member 130 is provided with support frame pressing portions 135 for pressing the support frame 11 on both sides along the length direction of the penetrating portion 32. This is for fixing the workpiece 10 more stably. On the side opposite to the fulcrum 41 of the pressing member 130, for example, a pin 136 for gripping when the pressing member 130 is opened and closed is provided so as to protrude from both sides. Further, a buffer member 133 similar to the buffer member 33 described in the first embodiment is disposed on the pressing surface 31 and the contact surface 34. It is preferable that a groove 133 </ b> A is provided on the surface of the buffer member 133. Further, the surface of the buffer member 133 is preferably roughened, and the groove 133A may be provided and the surface may be roughened, or the groove 133A may not be provided and the surface may be roughened. This is to prevent the workpiece 10 from being lifted together when the workpiece 10 is attracted to the buffer member 133 and the pressing member 130 is lifted and removed. In addition, it is preferable that the buffer member 133 is also disposed on the surface 134 of the support frame pressing portion 135 facing the support frame 11. Others have the same configuration as the pressing member 30 of the first embodiment.

  As described above, according to the present embodiment, the support frame pressing portions 135 for pressing the support frame 11 are provided on both sides of the pressing member 130, so that the workpiece 10 can be more stably fixed. it can. Further, if the groove 133A is provided on the surface of the buffer member 133, or if the surface of the buffer member 11 is roughened, the buffer member 133 and the workpiece 10 can be prevented from being adsorbed and pressed. The member 130 can be removed stably.

(Third embodiment)
The processing jig 200 according to the third embodiment is the same as the processing jig 1 according to the first embodiment or the second embodiment except that the configuration of the reduced-pressure adsorption member 220 is partially different. It has the same configuration as the processing jig 100. Therefore, the same components as those in the first embodiment or the second embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  FIG. 23 is a cross-sectional perspective view showing a processing jig 200 according to the third embodiment of the present invention, and shows a cross-sectional structure along the cutting groove 22 and the through portion 32. The reduced pressure adsorbing member 220 includes, for example, a water supply path 221 for supplying cutting water to the cutting groove 22. For example, a plurality of water supply paths 221 are provided in the arrangement direction (Y direction) by extending in the length direction (X direction) of the workpiece 10. The water supply path 221 communicates with a cutting water supply source (not shown) and also communicates with the cutting groove 22. Thereby, in this processing jig 200, cutting water can be supplied also to the work piece 10 from the side of the reduced pressure adsorption member 220 at the time of processing. Others have the same configuration as the reduced-pressure adsorption member 20 of the first embodiment and the second embodiment.

  As described above, according to the present embodiment, since the water supply path 221 for supplying the cutting water to the vacuum suction member 220 is provided, the workpiece 10 is also cut from the vacuum suction member 220 side. By supplying the machining water, it is possible to prevent the cutting powder generated during machining from being deposited. In addition, the workpiece 10 can be cooled more effectively, and the occurrence of cutting burrs on the reduced-pressure adsorption member 220 side of the workpiece 10 can be suppressed.

(Examples 1-4)
With respect to the processing jig 1 shown in FIGS. 1 to 8, an adsorption experiment was performed by using a test piece made of plastic and sucking the test piece under reduced pressure with a vacuum pressure source. At that time, the material of the O-ring 24 was changed in each example. Silicon rubber (silicon 50 °) in Example 1, silicon rubber (silicon 70 °) in Example 2, fluororubber in Example 3, and Example 4 Used nitrile butadiene rubber.

  In any of Examples 1 to 4, using an individual test piece of 3 mm × 4 mm × 10 mm and a long test piece of 3 mm × 64 mm × 10 mm, it is peeled by pulling in a direction perpendicular to or parallel to the seating surface 23. Each load to be examined was examined. The individual test pieces correspond to the individual workpieces 10 after being cut, the long test pieces correspond to the workpieces 10 before being cut, and 15 individual test pieces (the cutting margin is about 0 each). .25 mm). Each test was performed 10 times, and the average value was calculated. The obtained results are shown in Tables 1 to 4.

  As a comparative example, an adsorption experiment was performed in the same manner as in Examples 1 to 4 except that a rubber plate made of silicon rubber (silicon 50 °) was attached to the surface of the seating surface 23 instead of the O-ring 24. It was. However, in the comparative example, when the test was repeated five times, the attached rubber plate was peeled off, so the number of tests was five. The obtained results are shown in Tables 1 to 4.

  As shown in Table 1, in the comparative example, the rubber plate was peeled off after 5 tests, but according to this example, the decrease in peel load was not repeated even when the test was repeated 10 times. I couldn't see it. Moreover, as shown to Tables 1-4, about the long test piece, the peeling load larger than the comparative example was obtained for the present Example both in the vertical direction and in the parallel direction. Further, with respect to the individual test pieces, a sufficient peeling load was obtained in the present example both in the vertical direction and in the parallel direction, and depending on the material of the O-ring 24, a larger peeling load was obtained than in the comparative example.

That is, if the O-ring 24 is used, the workpiece 10 can be firmly held, and the workpiece 10 after being cut can be sufficiently held, and
It was found that it can be used repeatedly because it has little deterioration.

  The present invention has been described with reference to the embodiment. However, the present invention is not limited to the above embodiment, and various modifications can be made. For example, in the above embodiment, the case where each workpiece 10 is supported while being inclined with respect to the support frame 11 has been described, but the case where each workpiece 10 is supported in parallel with the support frame 11. The present invention can also be applied to. In that case, the suction port 21, the seating surface 23, and the pressing surface 31 of the processing jig 1 are formed horizontally corresponding to the workpiece 10.

  It can be used when cutting a workpiece.

  DESCRIPTION OF SYMBOLS 1 ... Processing jig, 10 ... Workpiece, 11 ... Support frame, 12 ... Mark, 20 ... Decompression suction member, 21 ... Suction port, 22 ... Cutting groove, 23 ... Seating surface, 24 ... O-ring, 25 ... Arrangement Groove, 26 ... projection, 27 ... suction passage, 28 ... constriction member, 29 ... suction hole, 30 ... pressing member, 31 ... pressing surface, 32 ... penetrating portion, 33 ... buffer member, 34 ... contact surface, 40 DESCRIPTION OF SYMBOLS ... Base, 41 ... Supporting point, 42 ... Lock member, 100 ... Processing jig, 130 ... Pressing member, 133 ... Buffer member, 133A ... Groove, 134 ... Opposing surface, 135 ... Support frame pressing part, 136 ... Pin, 200 ... Processing jig, 220 ... decompression adsorption member, 221 ... water supply channel

Claims (9)

When cutting a plurality of rod-shaped workpieces arranged in parallel and supported by a support frame so as to be divided into a plurality of pieces in the length direction, a processing jig for holding each workpiece,
A plurality of suction ports for vacuum suction of the workpieces are provided in the length direction and the arrangement direction corresponding to the workpieces, and between the suction ports adjacent in the length direction. Is a vacuum suction member provided with a cutting groove for cutting each workpiece,
A pressing member having a penetrating portion for pressing the workpieces toward the vacuum suction member and cutting the workpieces;
The decompression suction member is provided with a plurality of O-rings so as to individually surround the suction ports, and each of the O-rings partially protrudes toward the suction side from the seating surface of each workpiece. A processing jig characterized by being provided.   The processing jig according to claim 1, wherein the pressing member includes a buffer member on a pressing surface that presses each workpiece.   The processing jig according to claim 1, wherein the pressing member includes a support frame pressing portion for pressing the support frame.   The processing jig according to any one of claims 1 to 3, wherein the reduced-pressure adsorbing member includes a water supply passage for supplying cutting water to the cutting groove.   5. The processing jig according to claim 1, wherein each suction port is provided with a plurality of suction holes connected to a suction source.   The processing jig according to claim 1, wherein the seating surface is inclined. The processing jig according to any one of claims 1 to 6,
A processing apparatus comprising: a cutting member that passes through the through portion and cuts the workpiece. A method of processing a workpiece using the processing jig according to any one of claims 1 to 6,
The vacuum suction member sucks each workpiece under reduced pressure, and the pressing member presses the workpiece toward the vacuum suction member, and then cuts the workpiece from the penetrating portion. A processing method characterized by   The lower end of the workpiece is positioned above the lower end of the support frame, and when the workpiece is cut, it is cut between the lower end of the workpiece and the lower end of the support frame. The processing method according to claim 8, wherein:

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