JP2011045844A5 - - Google Patents
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- Publication number
- JP2011045844A5 JP2011045844A5 JP2009197266A JP2009197266A JP2011045844A5 JP 2011045844 A5 JP2011045844 A5 JP 2011045844A5 JP 2009197266 A JP2009197266 A JP 2009197266A JP 2009197266 A JP2009197266 A JP 2009197266A JP 2011045844 A5 JP2011045844 A5 JP 2011045844A5
- Authority
- JP
- Japan
- Prior art keywords
- waste solution
- developer waste
- tetraalkylammonium hydroxide
- titanium chloride
- purifying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002699 waste material Substances 0.000 claims 11
- 150000005622 tetraalkylammonium hydroxides Chemical class 0.000 claims 8
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 claims 4
- 239000002244 precipitate Substances 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 239000002893 slag Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009197266A JP2011045844A (ja) | 2009-08-27 | 2009-08-27 | 水酸化テトラアルキルアンモニウム含有現像廃液の精製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009197266A JP2011045844A (ja) | 2009-08-27 | 2009-08-27 | 水酸化テトラアルキルアンモニウム含有現像廃液の精製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011045844A JP2011045844A (ja) | 2011-03-10 |
| JP2011045844A5 true JP2011045844A5 (https=) | 2012-05-31 |
Family
ID=43832704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009197266A Pending JP2011045844A (ja) | 2009-08-27 | 2009-08-27 | 水酸化テトラアルキルアンモニウム含有現像廃液の精製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2011045844A (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5844558B2 (ja) * | 2011-06-29 | 2016-01-20 | 多摩化学工業株式会社 | 水酸化テトラアルキルアンモニウム含有廃液の再生処理方法 |
| CN116119853A (zh) * | 2022-10-31 | 2023-05-16 | 沧州信联化工有限公司 | 一种四甲基氢氧化铵显影废液的回收方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000301163A (ja) * | 1999-04-20 | 2000-10-31 | Ebara Corp | 水の浄化方法及びその装置 |
| US6919029B2 (en) * | 2002-02-14 | 2005-07-19 | Trustees Of Stevens Institute Of Technology | Methods of preparing a surface-activated titanium oxide product and of using same in water treatment processes |
| JP4790589B2 (ja) * | 2006-12-26 | 2011-10-12 | パナソニック株式会社 | 廃液の処理装置及び処理方法 |
-
2009
- 2009-08-27 JP JP2009197266A patent/JP2011045844A/ja active Pending
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