JP2011045844A5 - - Google Patents

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Publication number
JP2011045844A5
JP2011045844A5 JP2009197266A JP2009197266A JP2011045844A5 JP 2011045844 A5 JP2011045844 A5 JP 2011045844A5 JP 2009197266 A JP2009197266 A JP 2009197266A JP 2009197266 A JP2009197266 A JP 2009197266A JP 2011045844 A5 JP2011045844 A5 JP 2011045844A5
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JP
Japan
Prior art keywords
waste solution
developer waste
tetraalkylammonium hydroxide
titanium chloride
purifying
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Pending
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JP2009197266A
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Japanese (ja)
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JP2011045844A (en
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Priority to JP2009197266A priority Critical patent/JP2011045844A/en
Priority claimed from JP2009197266A external-priority patent/JP2011045844A/en
Publication of JP2011045844A publication Critical patent/JP2011045844A/en
Publication of JP2011045844A5 publication Critical patent/JP2011045844A5/ja
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金属成分を含有する水酸化テトラアルキルアンモニウム含有現像廃液より金属成分を除去する方法であって、該現像廃液に塩化チタンを添加し、上記塩化チタン由来の沈殿物を生成せしめた後、該沈殿物を分離することを特徴とする水酸化テトラアルキルアンモニウム含有現像廃液の精製方法。   A method for removing a metal component from a developer waste solution containing a tetraalkylammonium hydroxide containing a metal component, wherein titanium chloride is added to the developer waste solution to form a precipitate derived from the titanium chloride, and then the precipitate is formed. A method for purifying a developer waste solution containing tetraalkylammonium hydroxide, characterized by separating the slag. 前記水酸化テトラアルキルアンモニウム含有現像廃液への塩化チタンの添加量が、該現像廃液に対して、Ｔｉとして１００〜５０００ｐｐｍｗである請求項１記載の水酸化テトラアルキルアンモニウム含有現像廃液の精製方法。   The method for purifying a tetraalkylammonium hydroxide-containing developer waste solution according to claim 1, wherein the amount of titanium chloride added to the tetraalkylammonium hydroxide-containing developer waste solution is 100 to 5000 ppmw as Ti with respect to the developer waste solution. 前記塩化チタン由来の沈殿物を生成せしめた現像廃液のｐＨが３〜８の範囲で該沈殿物を分離する請求項１又は２記載の水酸化テトラアルキルアンモニウム含有現像廃液の精製方法。   The method for purifying a developer waste solution containing a tetraalkylammonium hydroxide according to claim 1 or 2, wherein the developer waste solution in which the precipitate derived from titanium chloride is produced is separated in a pH range of 3-8. 前記水酸化テトラアルキルアンモニウム含有現像廃液が、フォトレジスト由来の有機物が溶解した水酸化テトラアルキルアンモニウム含有現像廃液である請求項１から３のいずれかに記載の水酸化テトラアルキルアンモニウム含有現像廃液の精製方法。   4. The tetraalkylammonium hydroxide-containing developer waste solution according to claim 1, wherein the tetraalkylammonium hydroxide-containing developer waste solution is a tetraalkylammonium hydroxide-containing developer waste solution in which an organic substance derived from a photoresist is dissolved. Method.
JP2009197266A 2009-08-27 2009-08-27 Method for refining waste developing solution containing tetraalkylammonium hydroxide Pending JP2011045844A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009197266A JP2011045844A (en) 2009-08-27 2009-08-27 Method for refining waste developing solution containing tetraalkylammonium hydroxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009197266A JP2011045844A (en) 2009-08-27 2009-08-27 Method for refining waste developing solution containing tetraalkylammonium hydroxide

Publications (2)

Publication Number Publication Date
JP2011045844A JP2011045844A (en) 2011-03-10
JP2011045844A5 true JP2011045844A5 (en) 2012-05-31

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JP2009197266A Pending JP2011045844A (en) 2009-08-27 2009-08-27 Method for refining waste developing solution containing tetraalkylammonium hydroxide

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JP (1) JP2011045844A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5844558B2 (en) * 2011-06-29 2016-01-20 多摩化学工業株式会社 Recycling method for waste liquid containing tetraalkylammonium hydroxide

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000301163A (en) * 1999-04-20 2000-10-31 Ebara Corp Water cleaning method and apparatus
US6919029B2 (en) * 2002-02-14 2005-07-19 Trustees Of Stevens Institute Of Technology Methods of preparing a surface-activated titanium oxide product and of using same in water treatment processes
JP4790589B2 (en) * 2006-12-26 2011-10-12 パナソニック株式会社 Waste liquid treatment apparatus and treatment method

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