JP2011043806A - Photosensitive composition - Google Patents
Photosensitive composition Download PDFInfo
- Publication number
- JP2011043806A JP2011043806A JP2010164698A JP2010164698A JP2011043806A JP 2011043806 A JP2011043806 A JP 2011043806A JP 2010164698 A JP2010164698 A JP 2010164698A JP 2010164698 A JP2010164698 A JP 2010164698A JP 2011043806 A JP2011043806 A JP 2011043806A
- Authority
- JP
- Japan
- Prior art keywords
- group
- ethylenically unsaturated
- unsaturated monomer
- photosensitive composition
- epoxy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 94
- 150000001875 compounds Chemical class 0.000 claims abstract description 86
- 239000004593 Epoxy Substances 0.000 claims abstract description 70
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims abstract description 70
- 229920005989 resin Polymers 0.000 claims abstract description 49
- 239000011347 resin Substances 0.000 claims abstract description 49
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims abstract description 46
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 35
- 239000002904 solvent Substances 0.000 claims abstract description 25
- 230000001681 protective effect Effects 0.000 claims abstract description 24
- 239000011248 coating agent Substances 0.000 claims abstract description 23
- 239000011229 interlayer Substances 0.000 claims abstract description 16
- 239000000178 monomer Substances 0.000 claims description 131
- 229920000642 polymer Polymers 0.000 claims description 62
- 125000003700 epoxy group Chemical group 0.000 claims description 57
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 42
- 125000004432 carbon atom Chemical group C* 0.000 claims description 32
- 150000008065 acid anhydrides Chemical class 0.000 claims description 19
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 15
- 150000007519 polyprotic acids Polymers 0.000 claims description 15
- 239000003505 polymerization initiator Substances 0.000 claims description 13
- 239000002253 acid Substances 0.000 claims description 11
- 238000009413 insulation Methods 0.000 claims description 9
- 125000004018 acid anhydride group Chemical group 0.000 claims description 8
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 8
- 238000012719 thermal polymerization Methods 0.000 claims description 7
- 125000003118 aryl group Chemical group 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 125000002723 alicyclic group Chemical group 0.000 claims description 3
- 238000003860 storage Methods 0.000 abstract description 14
- 239000000463 material Substances 0.000 abstract description 7
- 125000002619 bicyclic group Chemical group 0.000 abstract 1
- 125000002950 monocyclic group Chemical group 0.000 abstract 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 82
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- 238000006243 chemical reaction Methods 0.000 description 62
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- 239000004973 liquid crystal related substance Substances 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 8
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 8
- 238000001723 curing Methods 0.000 description 8
- 239000003112 inhibitor Substances 0.000 description 8
- 125000006850 spacer group Chemical group 0.000 description 8
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 7
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- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 6
- 239000003513 alkali Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
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- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 description 6
- 238000001879 gelation Methods 0.000 description 6
- 239000011342 resin composition Substances 0.000 description 6
- QSUJHKWXLIQKEY-UHFFFAOYSA-N (2-oxooxolan-3-yl) 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1CCOC1=O QSUJHKWXLIQKEY-UHFFFAOYSA-N 0.000 description 5
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 description 5
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 5
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- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 5
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 5
- 238000004132 cross linking Methods 0.000 description 5
- 238000013007 heat curing Methods 0.000 description 5
- RBTKNAXYKSUFRK-UHFFFAOYSA-N heliogen blue Chemical compound [Cu].[N-]1C2=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=NC([N-]1)=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=N2 RBTKNAXYKSUFRK-UHFFFAOYSA-N 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 238000000016 photochemical curing Methods 0.000 description 5
- 230000009257 reactivity Effects 0.000 description 5
- 229920001187 thermosetting polymer Polymers 0.000 description 5
- 238000004383 yellowing Methods 0.000 description 5
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 4
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 4
- YYLLIJHXUHJATK-UHFFFAOYSA-N Cyclohexyl acetate Chemical compound CC(=O)OC1CCCCC1 YYLLIJHXUHJATK-UHFFFAOYSA-N 0.000 description 4
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 4
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 4
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 4
- UKLDJPRMSDWDSL-UHFFFAOYSA-L [dibutyl(dodecanoyloxy)stannyl] dodecanoate Chemical compound CCCCCCCCCCCC(=O)O[Sn](CCCC)(CCCC)OC(=O)CCCCCCCCCCC UKLDJPRMSDWDSL-UHFFFAOYSA-L 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- 239000012986 chain transfer agent Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 4
- 230000002401 inhibitory effect Effects 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- ZQMHJBXHRFJKOT-UHFFFAOYSA-N methyl 2-[(1-methoxy-2-methyl-1-oxopropan-2-yl)diazenyl]-2-methylpropanoate Chemical compound COC(=O)C(C)(C)N=NC(C)(C)C(=O)OC ZQMHJBXHRFJKOT-UHFFFAOYSA-N 0.000 description 4
- 230000000704 physical effect Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 3
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 3
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 3
- 239000005977 Ethylene Substances 0.000 description 3
- OWYWGLHRNBIFJP-UHFFFAOYSA-N Ipazine Chemical compound CCN(CC)C1=NC(Cl)=NC(NC(C)C)=N1 OWYWGLHRNBIFJP-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- SJRJJKPEHAURKC-UHFFFAOYSA-N N-Methylmorpholine Chemical compound CN1CCOCC1 SJRJJKPEHAURKC-UHFFFAOYSA-N 0.000 description 3
- 239000002202 Polyethylene glycol Substances 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 3
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 3
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 3
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- RBQRWNWVPQDTJJ-UHFFFAOYSA-N methacryloyloxyethyl isocyanate Chemical compound CC(=C)C(=O)OCCN=C=O RBQRWNWVPQDTJJ-UHFFFAOYSA-N 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
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- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 3
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- 150000003839 salts Chemical class 0.000 description 3
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- 229940014800 succinic anhydride Drugs 0.000 description 3
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- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical compound C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 description 3
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- ZADXFVHUPXKZBJ-UHFFFAOYSA-N 2-[(4-ethenylphenyl)methoxymethyl]oxirane Chemical compound C1=CC(C=C)=CC=C1COCC1OC1 ZADXFVHUPXKZBJ-UHFFFAOYSA-N 0.000 description 2
- TXHZNLCKXHJYNX-UHFFFAOYSA-N 2-[2-[2-[2-[2-[2-[2-[2-(2-methoxyethoxy)ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethyl 2-methylprop-2-enoate Chemical compound COCCOCCOCCOCCOCCOCCOCCOCCOCCOC(=O)C(C)=C TXHZNLCKXHJYNX-UHFFFAOYSA-N 0.000 description 2
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- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- MOYAFQVGZZPNRA-UHFFFAOYSA-N Terpinolene Chemical compound CC(C)=C1CCC(C)=CC1 MOYAFQVGZZPNRA-UHFFFAOYSA-N 0.000 description 2
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 2
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 2
- 150000003926 acrylamides Chemical class 0.000 description 2
- XXROGKLTLUQVRX-UHFFFAOYSA-N allyl alcohol Chemical compound OCC=C XXROGKLTLUQVRX-UHFFFAOYSA-N 0.000 description 2
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 description 2
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- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
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- NMOALOSNPWTWRH-UHFFFAOYSA-N tert-butyl 7,7-dimethyloctaneperoxoate Chemical compound CC(C)(C)CCCCCC(=O)OOC(C)(C)C NMOALOSNPWTWRH-UHFFFAOYSA-N 0.000 description 1
- GJBRNHKUVLOCEB-UHFFFAOYSA-N tert-butyl benzenecarboperoxoate Chemical compound CC(C)(C)OOC(=O)C1=CC=CC=C1 GJBRNHKUVLOCEB-UHFFFAOYSA-N 0.000 description 1
- SWAXTRYEYUTSAP-UHFFFAOYSA-N tert-butyl ethaneperoxoate Chemical compound CC(=O)OOC(C)(C)C SWAXTRYEYUTSAP-UHFFFAOYSA-N 0.000 description 1
- XTXFUQOLBKQKJU-UHFFFAOYSA-N tert-butylperoxy(trimethyl)silane Chemical compound CC(C)(C)OO[Si](C)(C)C XTXFUQOLBKQKJU-UHFFFAOYSA-N 0.000 description 1
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- 150000003609 titanium compounds Chemical class 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
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- BDIWFCKBPZPBQT-UHFFFAOYSA-N tributyl(tributylstannylsulfanyl)stannane Chemical compound CCCC[Sn](CCCC)(CCCC)S[Sn](CCCC)(CCCC)CCCC BDIWFCKBPZPBQT-UHFFFAOYSA-N 0.000 description 1
- NXFZDTAAMQLJEC-UHFFFAOYSA-M tributyl-(2,2,2-trichloroacetyl)oxytin(1-) Chemical compound CCCC[Sn-](CCCC)(CCCC)OC(=O)C(Cl)(Cl)Cl NXFZDTAAMQLJEC-UHFFFAOYSA-M 0.000 description 1
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Abstract
Description
本発明は、液晶パネルやタッチパネルなどの表示パネルを形成するための材料として好適な感光性組成物、それを含むコーティング剤ならびにそれより形成されるカラーフィルタ保護膜、層間絶縁膜、フォトスペーサーに関する。 The present invention relates to a photosensitive composition suitable as a material for forming a display panel such as a liquid crystal panel or a touch panel, a coating agent containing the same, a color filter protective film formed therefrom, an interlayer insulating film, and a photospacer.
一般に、液晶表示素子、集積回路素子、固体撮像素子などには、電子部品の劣化や損傷を防止するための保護膜、素子表面を平坦化するための平坦化膜、電気絶縁性を保つための絶縁膜、素子の距離を一定に保つための微細なパターンなどが設けられている。これらの膜や微細パターンを形成するには、熱硬化性組成物を用いる場合の他、感放射線性組成物を用いるフォトリソグラフィー法が採用される場合が多い。これらの膜や微細パターンには、その用途に応じて耐熱性、透明性、基材密着性、平坦性が求められ、また感放射線性組成物には保存安定性などが求められるが、すべてを満足できる感放射線性組成物を得ることは難しかった。以下にその具体例を説明する。 In general, for liquid crystal display elements, integrated circuit elements, solid-state imaging elements, etc., a protective film for preventing deterioration and damage of electronic parts, a flattening film for flattening the element surface, and for maintaining electrical insulation An insulating film, a fine pattern for keeping the distance between elements constant, and the like are provided. In order to form these films and fine patterns, a photolithography method using a radiation-sensitive composition is often employed in addition to the case of using a thermosetting composition. These films and fine patterns are required to have heat resistance, transparency, substrate adhesion, and flatness according to their use, and radiation sensitive compositions are required to have storage stability. It was difficult to obtain a satisfactory radiation sensitive composition. Specific examples will be described below.
層間絶縁膜を形成する材料としては、必要とするパターン形状の層間絶縁膜を得るための工程数が少なくしかも十分な平坦性を有する層間絶縁膜が得られるという特徴を生かし、さらにITO電極とTFT素子とを導通させるために層間絶縁膜に空けられるコンタクトホールをパターニングできる感光性組成物が幅広く使用されている。 As a material for forming the interlayer insulating film, an ITO electrode and a TFT are obtained by taking advantage of the fact that an interlayer insulating film having sufficient flatness can be obtained with a small number of steps for obtaining an interlayer insulating film having a required pattern shape. Photosensitive compositions capable of patterning contact holes that are opened in an interlayer insulating film for electrical connection with an element are widely used.
例えば、特許文献1には、液晶ディスプレイの層間絶縁膜、保護膜などの永久膜を形成するための感光性組成物が開示され、不飽和カルボン酸とエポキシ基含有重合性化合物との共重合体を用いたものである。しかしながら、この技術では、アルカリ現像性を付与するためにカルボン酸もしくはこれに代わる酸成分を相当量必要とするために、組成物中に存在するエポキシ基とカルボン酸とが反応し、保存中に増粘、固化してしまうという欠点を有している。 For example, Patent Document 1 discloses a photosensitive composition for forming a permanent film such as an interlayer insulating film or a protective film of a liquid crystal display, and a copolymer of an unsaturated carboxylic acid and an epoxy group-containing polymerizable compound. Is used. However, since this technique requires a considerable amount of carboxylic acid or an acid component in place of it in order to impart alkali developability, the epoxy group present in the composition reacts with the carboxylic acid and is stored during storage. It has the disadvantage of thickening and solidifying.
液晶表示装置やタッチパネルなど、表示装置を構成するカラーフィルタとアレイ基板との間には、両基板の間隔を保持するためにスペーサーが設けられている。このスペーサーとしては、球形粒子を散布する代わりに、感光性組成物を用いてスペーサーを形成するフォトスペーサー法が提案されている。 A spacer is provided between the color filter constituting the display device, such as a liquid crystal display device or a touch panel, and the array substrate in order to maintain the distance between the two substrates. As the spacer, a photospacer method has been proposed in which a spacer is formed using a photosensitive composition instead of dispersing spherical particles.
このフォトスペーサーの形成に用いられる感光性組成物としては、例えば、バインダー樹脂としてメタクリル酸/アリルメタクリレート共重合体を、光重合性化合物としてジペンタエリスリトールヘキサアクリレートを、光重合開始剤として2,4−ビス−(トリクロロメチル)−6−[4−(N,N−ジエトキシカルボニルメチルアミノ)−3−ブロモフェニル]−s−トリアジンを、溶剤としてメチルエチルケトンと1−メトキシ−2−プロピルアセテートとメタノールを有してなるフォトスペーサー形成用感光性組成物が提案されている(例えば、特許文献2参照 ) 。 Examples of the photosensitive composition used for forming the photospacer include methacrylic acid / allyl methacrylate copolymer as a binder resin, dipentaerythritol hexaacrylate as a photopolymerizable compound, and 2,4 as a photopolymerization initiator. -Bis- (trichloromethyl) -6- [4- (N, N-diethoxycarbonylmethylamino) -3-bromophenyl] -s-triazine as solvents, methyl ethyl ketone, 1-methoxy-2-propyl acetate and methanol There has been proposed a photosensitive composition for forming a photospacer comprising, for example, Patent Document 2.
上記特許文献2では、スペーサーの塑性変形量を適正な範囲に規定することで、液晶表示ムラのない高品質な画像を表示可能な液晶表示素子を提供できるとされているが、耐熱黄変性に乏しく、熱硬化による光線透過率が低下してしまうという問題が生じる。 In Patent Document 2, it is said that a liquid crystal display element capable of displaying a high-quality image without liquid crystal display unevenness can be provided by defining the plastic deformation amount of the spacer within an appropriate range. There is a problem that light transmittance due to heat curing is poor.
また、特許文献3では、樹脂にメタクリロイル基を組み込んだ感光性組成物を用いたフォトスペーサーが提案されているが、上記同様、透明性や耐熱黄変性に乏しく、こちらも熱硬化による光線透過率が低下してしまうという問題が生じる。 In addition, Patent Document 3 proposes a photospacer using a photosensitive composition in which a methacryloyl group is incorporated in a resin. However, as described above, it is poor in transparency and heat-resistant yellowing. This causes a problem of lowering.
カラー液晶表示装置、カラー撮像管素子等は、その製造工程中に、溶剤、酸またはアルカリ溶液などによる表示素子の浸漬処理が行なわれ、また、スパッタリングにより配線電極層を形成する際には、素子表面が局部的に高温に曝される。従って、このような処理によって素子が劣化あるいは損傷することを防止するために、これらの処理に対して耐性を有する薄膜からなる保護膜を素子の表面に設けることが行なわれている。 A color liquid crystal display device, a color image pickup tube element, etc. are subjected to a dipping process of the display element with a solvent, an acid or an alkali solution during the manufacturing process, and when the wiring electrode layer is formed by sputtering, The surface is locally exposed to high temperatures. Therefore, in order to prevent the element from being deteriorated or damaged by such treatment, a protective film made of a thin film having resistance to these treatments is provided on the surface of the element.
このような保護膜は、当該保護膜を形成すべき基体または下層、さらに保護膜上に形成される層に対して密着性が高いものであること、膜自体が平滑で強靭であること、透明性を有するものであること、耐熱性および耐光性が高く、長期間にわたって着色、黄変、白化などの変質を起こさないものであること、耐水性、耐溶剤性、耐酸性および耐アルカリ性に優れたものであることなどの性能が要求される。これらの諸特性を満たす保護膜を形成するための材料としては、例えばエポキシ基を有する重合体を含む熱硬化性組成物が知られている(特許文献4および特許文献5参照)。しかし、組成物中にエポキシ基を有する重合体と、その硬化剤として多価カルボン酸無水物および多価カルボン酸とを含有しているために保存安定性が悪い。 Such a protective film has high adhesion to the substrate or lower layer on which the protective film is to be formed, and further to the layer formed on the protective film, the film itself is smooth and tough, transparent It has excellent heat resistance and light resistance, does not cause deterioration such as coloring, yellowing, and whitening over a long period of time, and has excellent water resistance, solvent resistance, acid resistance, and alkali resistance. Performance is required. As a material for forming a protective film satisfying these various properties, for example, a thermosetting composition containing a polymer having an epoxy group is known (see Patent Document 4 and Patent Document 5). However, since the composition contains a polymer having an epoxy group and a polyvalent carboxylic acid anhydride and a polyvalent carboxylic acid as the curing agent, the storage stability is poor.
また、カラーフィルタ保護膜は、RGB着色層の保護、液晶封入時の耐熱性および耐圧力性を発現するための硬度が必要である。硬度を発現するために、高架橋密度の活性エネルギー線硬化性樹脂組成物が検討されてきた(特許文献6を参照)。しかしながら、これら硬化性樹脂組成物、特に活性エネルギー線硬化性組成物は硬化に際して収縮し、残存応力が発生することにより、基材への密着性が十分でないという問題がある。 Further, the color filter protective film needs to have hardness for protecting the RGB colored layer, and exhibiting heat resistance and pressure resistance when liquid crystal is sealed. In order to express hardness, an active energy ray-curable resin composition having a high crosslinking density has been studied (see Patent Document 6). However, these curable resin compositions, particularly the active energy ray curable composition, have a problem that the adhesiveness to the substrate is not sufficient due to shrinkage upon curing and generation of residual stress.
本発明は、保存安定性に優れ、かつ耐熱性、透明性、基材密着性、平坦性に優れた感光性組成物、それを含むコーティング剤ならびにこれを用いたカラーフィルタ保護膜、層間絶縁膜、フォトスペーサーの提供を目的とする。 The present invention relates to a photosensitive composition having excellent storage stability and heat resistance, transparency, substrate adhesion, and flatness, a coating agent containing the same, a color filter protective film using the same, and an interlayer insulating film The purpose is to provide a photo spacer.
本発明者らは前記の課題を解決するため、鋭意検討の結果、特定の官能基を有するアクリル系硬化性樹脂と、シクロ環構造を有するエポキシ化合物とを含む感光性組成物が前記課題を解決するものであることを見出し、本発明を完成するに至った。 In order to solve the above-mentioned problems, the present inventors have intensively studied, and as a result, a photosensitive composition containing an acrylic curable resin having a specific functional group and an epoxy compound having a cyclo ring structure solves the above problems. As a result, the present invention has been completed.
すなわち、第1の発明は、炭素数1〜4の直鎖状もしくは分岐状のアルキル基、カルボキシル基、およびエチレン性不飽和基を有するアクリル系硬化性樹脂(A)、
モノシクロ環を有するエポキシ化合物、ビシクロ環を有するエポキシ化合物、およびトリシクロ環を有するエポキシ化合物からなる群より選ばれる少なくとも1つのエポキシ化合物(B)、
エチレン性不飽和基を有する重合性化合物(C)、ならびに、
溶剤(D)を含んでなる感光性組成物に関する。
That is, the first invention is an acrylic curable resin (A) having a linear or branched alkyl group having 1 to 4 carbon atoms, a carboxyl group, and an ethylenically unsaturated group,
At least one epoxy compound (B) selected from the group consisting of an epoxy compound having a monocyclo ring, an epoxy compound having a bicyclo ring, and an epoxy compound having a tricyclo ring,
A polymerizable compound (C) having an ethylenically unsaturated group, and
The present invention relates to a photosensitive composition comprising a solvent (D).
また、第2の発明は、エポキシ化合物(B)が、下記一般式(1)で表される化合物である第1の発明の感光性組成物に関する。
一般式(1)
Moreover, 2nd invention is related with the photosensitive composition of 1st invention whose epoxy compound (B) is a compound represented by following General formula (1).
General formula (1)
[式中、n1は0〜10の整数である。] Wherein, n 1 is an integer of 0. ]
また、第3の発明は、 エポキシ化合物(B)が、下記一般式(2)で表される化合物である第1の発明の感光性組成物に関する。
一般式(2)
Moreover, 3rd invention is related with the photosensitive composition of 1st invention whose epoxy compound (B) is a compound represented by following General formula (2).
General formula (2)
[式中、R1は水素原子もしくはメチル基であり、n2は1〜20の整数である。] [Wherein, R 1 is a hydrogen atom or a methyl group, and n 2 is an integer of 1-20. ]
また、第4の発明は、アクリル系硬化性樹脂(A)中のカルボキシル基のモル数(a)と、エポキシ化合物(B)中のエポキシ基のモル数(b)とのモル比が、(a)/(b)=0.5〜2である第1〜第3いずれかの発明の感光性組成物に関する。 Moreover, 4th invention is the molar ratio of the number of moles (a) of the carboxyl group in acrylic curable resin (A), and the number of moles (b) of the epoxy group in epoxy compound (B), ( It relates to the photosensitive composition of any one of the 1st-3rd invention which is a) / (b) = 0.5-2.
また、第5の発明は、アクリル系硬化性樹脂(A)が、炭素数1〜4の直鎖状もしくは分岐状のアルキル基を有するエチレン性不飽和単量体(m1)とカルボキシル基含有エチレン性不飽和単量体(m2)とを含むエチレン性不飽和単量体(M)を共重合してカルボキシル基含有重合体(E)を得た後に、
該重合体(E)中のカルボキシル基に対してエポキシ基含有エチレン性不飽和単量体(F)中のエポキシ基を反応させてなる第1〜第4いずれかの発明の感光性組成物に関する。
In the fifth invention, the acrylic curable resin (A) comprises an ethylenically unsaturated monomer (m1) having a linear or branched alkyl group having 1 to 4 carbon atoms and a carboxyl group-containing ethylene. After copolymerizing an ethylenically unsaturated monomer (M) containing a polymerizable unsaturated monomer (m2) to obtain a carboxyl group-containing polymer (E),
The photosensitive composition of any one of the first to fourth inventions, wherein the epoxy group in the epoxy group-containing ethylenically unsaturated monomer (F) is reacted with the carboxyl group in the polymer (E). .
また、第6の発明は、アクリル系硬化性樹脂(A)が、炭素数1〜4の直鎖状もしくは分岐状のアルキル基を有するエチレン性不飽和単量体(m1)とカルボキシル基含有エチレン性不飽和単量体(m2)とを含むエチレン性不飽和単量体(M)を共重合してカルボキシル基含有重合体(E)を得、
該重合体(E)中のカルボキシル基に対してエポキシ基含有エチレン性不飽和単量体(F)中のエポキシ基を反応して水酸基含有重合体(G)を得た後に、
該重合体(G)中の水酸基に対して多塩基酸無水物(H)中の酸無水物基を反応してなる第1〜第4いずれかの発明の感光性組成物に関する。
The sixth invention is an acrylic curable resin (A) in which an ethylenically unsaturated monomer (m1) having a linear or branched alkyl group having 1 to 4 carbon atoms and a carboxyl group-containing ethylene An ethylenically unsaturated monomer (M) containing a polymerizable unsaturated monomer (m2) to obtain a carboxyl group-containing polymer (E),
After reacting the epoxy group in the epoxy group-containing ethylenically unsaturated monomer (F) with the carboxyl group in the polymer (E) to obtain a hydroxyl group-containing polymer (G),
The present invention relates to the photosensitive composition according to any one of the first to fourth inventions, wherein the acid anhydride group in the polybasic acid anhydride (H) is reacted with the hydroxyl group in the polymer (G).
また、第7の発明は、アクリル系硬化性樹脂(A)が、炭素数1〜4の直鎖状もしくは分岐状のアルキル基を有するエチレン性不飽和単量体(m1)とエポキシ基含有エチレン性不飽和単量体(m3)とを含むエチレン性不飽和単量体(N)を共重合してエポキシ基含有重合体(P)を得、
該重合体(P)中のエポキシ基に対してカルボキシル基含有エチレン性不飽和単量体(Q)中のカルボキシル基を反応して水酸基含有重合体(K)を得た後に、
該重合体(K)中の水酸基に対して多塩基酸無水物(H)中の酸無水物基を反応してなる第1〜第4いずれかの発明の感光性組成物に関する。
In addition, according to a seventh invention, the acrylic curable resin (A) comprises an ethylenically unsaturated monomer (m1) having a linear or branched alkyl group having 1 to 4 carbon atoms and an epoxy group-containing ethylene. An epoxy group-containing polymer (P) by copolymerizing an ethylenically unsaturated monomer (N) containing a polymerizable unsaturated monomer (m3),
After reacting the carboxyl group in the carboxyl group-containing ethylenically unsaturated monomer (Q) with the epoxy group in the polymer (P) to obtain a hydroxyl group-containing polymer (K),
The present invention relates to the photosensitive composition according to any one of the first to fourth inventions, wherein the hydroxyl group in the polymer (K) is reacted with the acid anhydride group in the polybasic acid anhydride (H).
また、第8の発明は、エチレン性不飽和単量体(M)またはエチレン性不飽和単量体(N)が、下記一般式(3)で表されるエチレン性不飽和単量体(m4)を含む第5〜第7いずれかの発明の感光性組成物に関する。
一般式(3)
The eighth invention relates to an ethylenically unsaturated monomer (m4) in which the ethylenically unsaturated monomer (M) or the ethylenically unsaturated monomer (N) is represented by the following general formula (3): ) In any one of the fifth to seventh inventions.
General formula (3)
[式中、R2は、水素原子もしくはメチル基であり、R3は、水素原子、炭素数1〜8の直鎖状もしくは分岐状のアルキル基、脂環族炭化水素基、または芳香族炭化水素基であり、n3は、1〜10の整数である。] [Wherein R 2 represents a hydrogen atom or a methyl group, and R 3 represents a hydrogen atom, a linear or branched alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group, or an aromatic carbon group. A hydrogen group, and n 3 is an integer of 1 to 10. ]
また、第9の発明は、アクリル系硬化性樹脂(A)の酸価が、20〜200mgKOH/gである第1〜第8いずれかの発明の感光性組成物に関する。 Moreover, 9th invention is related with the photosensitive composition of the 1st-8th invention whose acid value of acrylic curable resin (A) is 20-200 mgKOH / g.
また、第10の発明は、アクリル系硬化性樹脂(A)の重量平均分子量が、2000〜25000である第1〜第9いずれかの発明の感光性組成物に関する。 The tenth invention relates to the photosensitive composition of any one of the first to ninth inventions, wherein the acrylic curable resin (A) has a weight average molecular weight of 2000 to 25000.
また、第11の発明は、溶剤(D)が、下記一般式(4)で表される溶剤を含む第1〜第10いずれかの発明の感光性組成物に関する。
一般式(4)
The eleventh invention relates to the photosensitive composition according to any one of the first to tenth inventions, wherein the solvent (D) contains a solvent represented by the following general formula (4).
General formula (4)
[式中、R4は炭素数1〜3のアルキル基であり、R5は水素原子もしくは炭素数1〜3のアルキル基である。] [Wherein, R 4 is an alkyl group having 1 to 3 carbon atoms, and R 5 is a hydrogen atom or an alkyl group having 1 to 3 carbon atoms. ]
また、第12の発明は、光重合開始剤(I)を含有する第1〜第11いずれかの発明の感光性組成物に関する。 The twelfth invention relates to the photosensitive composition of any one of the first to eleventh inventions containing the photopolymerization initiator (I).
また、第13の発明は、熱重合開始剤(J)を含有する第1〜第12いずれかの発明の感光性組成物に関する。 The thirteenth invention relates to the photosensitive composition of any one of the first to twelfth inventions containing a thermal polymerization initiator (J).
また、第14の発明は、第1〜第13いずれかの発明の感光性組成物を含むカラーフィルタ保護膜用コーティング剤に関する。 The fourteenth invention relates to a coating agent for a color filter protective film comprising the photosensitive composition of any one of the first to thirteenth inventions.
また、第15の発明は、第14の発明のカラーフィルタ保護膜用コーティング剤から形成されるカラーフィルタ保護膜に関する。 The fifteenth invention relates to a color filter protective film formed from the coating agent for the color filter protective film of the fourteenth invention.
さらに、第16の発明は、第1〜第13いずれかの発明の感光性組成物を用いて形成されるタッチパネル用層間絶縁膜に関する。 Furthermore, the sixteenth invention relates to an interlayer insulating film for a touch panel formed using the photosensitive composition of any one of the first to thirteenth inventions.
さらにまた、第17の発明は、第1〜第13いずれかの発明の感光性組成物を用いて形成されるタッチパネル用フォトスペーサーに関する。 Furthermore, the seventeenth invention relates to a photo spacer for a touch panel formed using the photosensitive composition of any one of the first to thirteenth inventions.
本発明により、保存安定性に優れ、かつ耐熱性、透明性、基材密着性、平坦性ともに優れた感光性組成物、それを含むコーティング剤ならびにこれを用いたカラーフィルタ保護膜、層間絶縁膜、フォトスペーサーを提供することができた。 According to the present invention, a photosensitive composition having excellent storage stability and excellent heat resistance, transparency, substrate adhesion, and flatness, a coating agent containing the same, and a color filter protective film and interlayer insulating film using the same We were able to provide photo spacers.
以下に、本発明について詳細に説明する。はじめに、本発明の感光性組成物は、炭素数1〜4の直鎖状もしくは分岐状のアルキル基、カルボキシル基、およびエチレン性不飽和基を有する透明性の高いアクリル系硬化性樹脂(A)と、
モノシクロ環を有するエポキシ化合物、ビシクロ環を有するエポキシ化合物、およびトリシクロ環を有するエポキシ化合物からなる群より選ばれる少なくとも1つの、透明性および剛直性の高いエポキシ化合物(B)と、を光および熱を用いて硬化させることにより、耐熱性、透明性、基材密着性、平坦性に優れたカラーフィルタ保護膜、層間絶縁膜、フォトスペーサー等の膜およびパターンとすることができる。
The present invention is described in detail below. First, the photosensitive composition of the present invention is a highly transparent acrylic curable resin (A) having a linear or branched alkyl group having 1 to 4 carbon atoms, a carboxyl group, and an ethylenically unsaturated group. When,
At least one highly transparent and rigid epoxy compound (B) selected from the group consisting of an epoxy compound having a monocyclo ring, an epoxy compound having a bicyclo ring, and an epoxy compound having a tricyclo ring; When used and cured, films and patterns such as a color filter protective film, an interlayer insulating film, and a photospacer excellent in heat resistance, transparency, substrate adhesion, and flatness can be obtained.
アクリル系硬化性樹脂(A)は、炭素数1〜4の直鎖状もしくは分岐状のアルキル基、カルボキシル基、およびエチレン性不飽和基を有することを特徴とする。 The acrylic curable resin (A) is characterized by having a linear or branched alkyl group having 1 to 4 carbon atoms, a carboxyl group, and an ethylenically unsaturated group.
アクリル系硬化性樹脂(A)中の炭素数1〜4の直鎖状もしくは分岐状のアルキル基は、炭素数1〜4の直鎖状もしくは分岐状のアルキル基を有するエチレン性不飽和単量体(m1)を共重合することで導入できる。また、カルボキシル基は、カルボキシル基含有エチレン性不飽和単量体(m2)を共重合することで導入できる。または、水酸基含有エチレン性不飽和単量体を共重合した樹脂中の水酸基や、樹脂中のエポキシ基とカルボキシル基との反応によって生成した水酸基に対して、多塩基酸無水物(H)中の酸無水物基を反応させることで導入できる。また、エチレン性不飽和基は、以下の3つの方法で導入することができる。 The linear or branched alkyl group having 1 to 4 carbon atoms in the acrylic curable resin (A) is an ethylenically unsaturated monomer having a linear or branched alkyl group having 1 to 4 carbon atoms. It can introduce | transduce by copolymerizing a body (m1). Moreover, a carboxyl group can be introduce | transduced by copolymerizing a carboxyl group-containing ethylenically unsaturated monomer (m2). Or, in the polybasic acid anhydride (H) with respect to a hydroxyl group in a resin copolymerized with a hydroxyl group-containing ethylenically unsaturated monomer or a hydroxyl group formed by a reaction between an epoxy group and a carboxyl group in the resin. It can introduce | transduce by making an acid anhydride group react. Further, the ethylenically unsaturated group can be introduced by the following three methods.
1つ目は、カルボキシル基含有エチレン性不飽和単量体(m2)を共重合して得られるカルボキシル基含有重合体(E)中のカルボキシル基に対して、エポキシ基含有エチレン性不飽和単量体(F)中のエポキシ基を反応させる方法がある(反応式1)。2つ目は、エポキシ基含有エチレン性不飽和単量体(m3)を共重合して得られるエポキシ基含有重合体(P)中のエポキシ基に対して、カルボキシル基含有エチレン性不飽和単量体(Q)中のカルボキシル基を反応させる方法がある(反応式2)。3つ目は、水酸基含有エチレン性不飽和単量体を共重合して得られる水酸基含有重合体(E’)中の水酸基に対して、イソシアネート基含有エチレン性不飽和単量体中のイソシアネート基を反応させる方法がある(反応式3)。 The first is an epoxy group-containing ethylenically unsaturated monomer with respect to the carboxyl group in the carboxyl group-containing polymer (E) obtained by copolymerizing the carboxyl group-containing ethylenically unsaturated monomer (m2). There is a method of reacting an epoxy group in the body (F) (Reaction Formula 1). Second, the carboxyl group-containing ethylenically unsaturated monomer with respect to the epoxy group in the epoxy group-containing polymer (P) obtained by copolymerizing the epoxy group-containing ethylenically unsaturated monomer (m3). There is a method of reacting a carboxyl group in the body (Q) (Reaction Formula 2). The third is an isocyanate group in the isocyanate group-containing ethylenically unsaturated monomer with respect to the hydroxyl group in the hydroxyl group-containing polymer (E ′) obtained by copolymerizing the hydroxyl group-containing ethylenically unsaturated monomer. There is a method of reacting (Scheme 3).
(反応式1) (Reaction Formula 1)
[P1はエチレン性不飽和単量体(M)を共重合してなるポリマー鎖であり、R6はエポキシ基含有エチレン性不飽和単量体(F)の反応残基である。] [P 1 is a polymer chain obtained by copolymerizing the ethylenically unsaturated monomer (M), and R 6 is a reaction residue of the epoxy group-containing ethylenically unsaturated monomer (F). ]
(反応式2)
[P2はエチレン性不飽和単量体(N)を共重合してなるポリマー鎖であり、R7はカルボキシル基含有エチレン性不飽和単量体(Q)の反応残基である。] [P 2 is a polymer chain obtained by copolymerizing the ethylenically unsaturated monomer (N), and R 7 is a reaction residue of the carboxyl group-containing ethylenically unsaturated monomer (Q). ]
(反応式3) (Reaction Formula 3)
[P3はエチレン性不飽和単量体(S)を共重合してなるポリマー鎖であり、R8はイソシアネート基含有エチレン性不飽和単量体の反応残基である。] [P 3 is a polymer chain obtained by copolymerizing an ethylenically unsaturated monomer (S), and R 8 is a reaction residue of an isocyanate group-containing ethylenically unsaturated monomer. ]
エチレン性不飽和基の導入方法としては、耐熱性、樹脂の黄変性の観点から1つ目または2つ目の方法(反応式1または2)を用いるのが好ましい。 As the method for introducing an ethylenically unsaturated group, it is preferable to use the first or second method (reaction formula 1 or 2) from the viewpoint of heat resistance and yellowing of the resin.
1つ目または2つ目の方法(反応式1または2)により得られた共重合体は水酸基を有しており[水酸基含有重合体(G)および(K)]、本発明は、さらに該重合体(G)または(K)中の水酸基に対して多塩基酸無水物(H)中の酸無水物基を反応させ、カルボキシル基を生成することができる(反応式4または5)。これにより酸価の調整も容易に行うことができる。 The copolymer obtained by the first or second method (reaction formula 1 or 2) has a hydroxyl group [hydroxyl-containing polymers (G) and (K)], and the present invention further comprises The hydroxyl group in the polymer (G) or (K) can be reacted with the acid anhydride group in the polybasic acid anhydride (H) to generate a carboxyl group (Reaction Formula 4 or 5). Thereby, adjustment of an acid value can also be performed easily.
(反応式4) (Reaction Formula 4)
[P1はエチレン性不飽和単量体(M)を共重合してなるポリマー鎖であり、R6はエポキシ基含有エチレン性不飽和単量体(F)の反応残基、R8は多塩基酸無水物(H)の反応残基である。] [P 1 is a polymer chain obtained by copolymerizing an ethylenically unsaturated monomer (M), R 6 is a reaction residue of an epoxy group-containing ethylenically unsaturated monomer (F), and R 8 is It is a reaction residue of a basic acid anhydride (H). ]
(反応式5) (Reaction Formula 5)
[P2はエチレン性不飽和単量体(N)を共重合してなるポリマー鎖であり、R7はカルボキシル基含有エチレン性不飽和単量体(Q)の反応残基、R8は多塩基酸無水物(H)の反応残基である。] [P 2 is a polymer chain obtained by copolymerizing an ethylenically unsaturated monomer (N), R 7 is a reaction residue of a carboxyl group-containing ethylenically unsaturated monomer (Q), and R 8 is It is a reaction residue of a basic acid anhydride (H). ]
このようにして得られたアクリル系硬化性樹脂(A)中のエチレン性不飽和基は、光および熱によりエチレン性不飽和基を有する重合性化合物(C)と反応し、カルボキシル基は熱によりエポキシ化合物(B)中のエポキシ基と反応することにより、架橋密度が高く、耐熱性および耐熱黄変性ともに優れた硬化物を得ることができる。 The ethylenically unsaturated group in the acrylic curable resin (A) thus obtained reacts with the polymerizable compound (C) having an ethylenically unsaturated group by light and heat, and the carboxyl group is heated. By reacting with the epoxy group in the epoxy compound (B), a cured product having a high crosslinking density and excellent in both heat resistance and heat yellowing resistance can be obtained.
アクリル系硬化性樹脂(A)の酸価は、20〜200mgKOH/gが好ましく、さらに40〜100mgKOH/gが好ましい。20mgKOH/g未満であるとエポキシ樹脂中のエポキシ基と反応しうる官能基(カルボキシル基)が少なくなり耐熱性および硬度を満足に得ることができない場合があり、200mgKOH/gを超えるとコーティング剤の粘度が高く、保存安定性が悪化する場合がある。 The acid value of the acrylic curable resin (A) is preferably 20 to 200 mgKOH / g, more preferably 40 to 100 mgKOH / g. If it is less than 20 mgKOH / g, the functional group (carboxyl group) that can react with the epoxy group in the epoxy resin may be reduced, and heat resistance and hardness may not be obtained satisfactorily. Viscosity is high and storage stability may deteriorate.
アクリル系硬化性樹脂(A)の重量平均分子量(Mw)は、2000〜25000が好ましく、より好ましくは4000〜15000である。重量平均分子量(Mw)が2000未満であると耐熱性が悪化する場合があり、重量平均分子量(Mw)が25000を超えると高粘度となり、塗工が困難になる場合がある。 As for the weight average molecular weight (Mw) of acrylic curable resin (A), 2000-25000 are preferable, More preferably, it is 4000-15000. When the weight average molecular weight (Mw) is less than 2,000, the heat resistance may be deteriorated, and when the weight average molecular weight (Mw) exceeds 25,000, the viscosity becomes high and coating may be difficult.
次にアクリル系硬化性樹脂(A)の製造方法について説明する。アクリル系硬化性樹脂(A)は、炭素数1〜4の直鎖状もしくは分岐状のアルキル基を有するエチレン性不飽和単量体(m1)とカルボキシル基含有エチレン性不飽和単量体(m2)とを含むエチレン性不飽和単量体(M)を共重合してカルボキシル基含有重合体(E)を得た後に、エポキシ基含有エチレン性不飽和単量体(F)を反応させて得ることができる(反応式1)。さらに、反応式1で得られた前記重合体[すなわち、水酸基含有重合体(G)]に多塩基酸無水物(H)を反応させることもできる(反応式4)。
また、炭素数1〜4の直鎖状もしくは分岐状のアルキル基を有するエチレン性不飽和単量体(m1)とエポキシ基含有エチレン性不飽和単量体(m3)とを含むエチレン性不飽和単量体(N)を共重合してエポキシ基含有重合体(P)を得た後に、カルボキシル基含有エチレン性不飽和単量体(Q)を反応させ(反応式2)、さらに、反応式2で得られた前記重合体[すなわち、水酸基含有重合体(K)]に多塩基酸無水物(H)を反応させて得ることができる(反応式5)。
また、エチレン性不飽和単量体(m1)とエチレン性不飽和単量体(m2)と水酸基含有エチレン性不飽和単量体を含むエチレン性不飽和単量体(S)を共重合して水酸基含有重合体(E’)を得た後に、イソシアネート基含有エチレン性不飽和単量体を反応させて得ることができる(反応式3)。
Next, the manufacturing method of acrylic curable resin (A) is demonstrated. The acrylic curable resin (A) includes an ethylenically unsaturated monomer (m1) having a linear or branched alkyl group having 1 to 4 carbon atoms and a carboxyl group-containing ethylenically unsaturated monomer (m2). To obtain a carboxyl group-containing polymer (E), and then reacting the epoxy group-containing ethylenically unsaturated monomer (F). (Scheme 1). Furthermore, the polybasic acid anhydride (H) can also be reacted with the polymer obtained by the reaction formula 1 [namely, the hydroxyl group-containing polymer (G)] (reaction formula 4).
Moreover, the ethylenically unsaturated containing the ethylenically unsaturated monomer (m1) which has a C1-C4 linear or branched alkyl group, and an epoxy-group-containing ethylenically unsaturated monomer (m3) After the monomer (N) is copolymerized to obtain the epoxy group-containing polymer (P), the carboxyl group-containing ethylenically unsaturated monomer (Q) is reacted (reaction formula 2), and further the reaction formula 2 can be obtained by reacting the polybasic acid anhydride (H) with the polymer obtained in Step 2 [namely, hydroxyl group-containing polymer (K)] (Reaction Formula 5).
Further, an ethylenically unsaturated monomer (S) containing an ethylenically unsaturated monomer (m1), an ethylenically unsaturated monomer (m2), and a hydroxyl group-containing ethylenically unsaturated monomer is copolymerized. After obtaining a hydroxyl group-containing polymer (E ′), it can be obtained by reacting an isocyanate group-containing ethylenically unsaturated monomer (Reaction Formula 3).
エチレン性不飽和単量体(M)としては、炭素数1〜4の直鎖状もしくは分岐状のアルキル基を有するエチレン性不飽和単量体(m1)、カルボキシル基含有エチレン性不飽和単量体(m2)および必要に応じて用いられるその他の共重合可能なエチレン性不飽和単量体が含まれる。
また、エチレン性不飽和単量体(N)としては、炭素数1〜4の直鎖状もしくは分岐状のアルキル基を有するエチレン性不飽和単量体(m1)、エポキシ基含有エチレン性不飽和単量体(m3)および必要に応じて用いられるその他の共重合可能なエチレン性不飽和単量体が含まれる。
さらに、エチレン性不飽和単量体(S)としては、炭素数1〜4の直鎖状もしくは分岐状のアルキル基を有するエチレン性不飽和単量体(m1)、カルボキシル基含有エチレン性不飽和単量体(m2)、水酸基含有エチレン性不飽和単量体および必要に応じて用いられるその他の共重合可能なエチレン性不飽和単量体が含まれる。
Examples of the ethylenically unsaturated monomer (M) include an ethylenically unsaturated monomer (m1) having a linear or branched alkyl group having 1 to 4 carbon atoms, and a carboxyl group-containing ethylenically unsaturated monomer. The body (m2) and other copolymerizable ethylenically unsaturated monomers used as required are included.
Further, as the ethylenically unsaturated monomer (N), an ethylenically unsaturated monomer (m1) having a linear or branched alkyl group having 1 to 4 carbon atoms, an epoxy group-containing ethylenically unsaturated monomer Monomer (m3) and other copolymerizable ethylenically unsaturated monomers used as needed are included.
Further, as the ethylenically unsaturated monomer (S), an ethylenically unsaturated monomer (m1) having a linear or branched alkyl group having 1 to 4 carbon atoms, a carboxyl group-containing ethylenically unsaturated monomer. A monomer (m2), a hydroxyl group-containing ethylenically unsaturated monomer, and other copolymerizable ethylenically unsaturated monomers used as necessary are included.
炭素数1〜4の直鎖状もしくは分岐状のアルキル基を有するエチレン性不飽和単量体(m1)としては、例えば、メチル(メタ)アクリレート、エチル(メタ)アクリレート、n−プロピル(メタ)アクリレート、イソプロピル(メタ)アクリレート、n−ブチル(メタ)アクリレート、イソブチル(メタ)アクリレート、t−ブチル(メタ)アクリレート等が挙げられる。その中でも透明性、耐熱性の観点からメチルメタクリレートが好ましい。 Examples of the ethylenically unsaturated monomer (m1) having a linear or branched alkyl group having 1 to 4 carbon atoms include methyl (meth) acrylate, ethyl (meth) acrylate, and n-propyl (meth). Examples include acrylate, isopropyl (meth) acrylate, n-butyl (meth) acrylate, isobutyl (meth) acrylate, and t-butyl (meth) acrylate. Among these, methyl methacrylate is preferable from the viewpoint of transparency and heat resistance.
炭素数1〜4の直鎖状もしくは分岐状のアルキル基を有するエチレン性不飽和単量体(m1)の使用量としては、エチレン性不飽和単量体(M)、(N)もしくは(S)100重量%中に10〜70重量%が好ましい。さらに20〜60重量%が好ましい。10重量%未満だと透明性が悪化する場合があり、70重量%を超えるとカルボキシル基やエチレン性不飽和基の導入量が少なくなり、得られる塗膜の架橋密度が下がり、耐熱性や基材密着性が低下する場合がある。 The amount of the ethylenically unsaturated monomer (m1) having a linear or branched alkyl group having 1 to 4 carbon atoms may be selected from the ethylenically unsaturated monomer (M), (N) or (S ) 10 to 70% by weight is preferable in 100% by weight. Furthermore, 20 to 60% by weight is preferable. If it is less than 10% by weight, the transparency may be deteriorated. If it exceeds 70% by weight, the amount of carboxyl groups and ethylenically unsaturated groups to be introduced decreases, the crosslinking density of the resulting coating film decreases, and heat resistance and group Material adhesion may be reduced.
カルボキシル基含有エチレン性不飽和単量体(m2)としては、例えば、(メタ)アクリル酸、イタコン酸、マレイン酸、フマール酸、クロトン酸、α−(ヒドロキシメチル)アクリル酸、α−(ヒドロキシメチル)メタクリル酸、p−ビニル安息香酸、2−(メタ)アクリロイロキシエチルコハク酸、2−(メタ)アクリロイロキシエチルフタル酸、2−(メタ)アクリロイロキシエチルヘキサヒドロフタル酸等があげられる。中でも反応性の点から(メタ)アクリル酸が好ましい。 Examples of the carboxyl group-containing ethylenically unsaturated monomer (m2) include (meth) acrylic acid, itaconic acid, maleic acid, fumaric acid, crotonic acid, α- (hydroxymethyl) acrylic acid, α- (hydroxymethyl). ) Methacrylic acid, p-vinylbenzoic acid, 2- (meth) acryloyloxyethyl succinic acid, 2- (meth) acryloyloxyethyl phthalic acid, 2- (meth) acryloyloxyethyl hexahydrophthalic acid, etc. It is done. Of these, (meth) acrylic acid is preferred from the viewpoint of reactivity.
カルボキシル基含有エチレン性不飽和単量体(m2)の使用量としては、エチレン性不飽和単量体(M)もしくは(S)100重量%中に5〜40重量%が好ましい。5重量%未満だとエポキシ化合物(B)との硬化部位が減少し基材密着性が低くなる場合があり、40重量%を超えると溶剤への溶解性が悪化する場合がある。 As a usage-amount of a carboxyl group-containing ethylenically unsaturated monomer (m2), 5 to 40 weight% is preferable in 100 weight% of ethylenically unsaturated monomers (M) or (S). If it is less than 5% by weight, the cured site with the epoxy compound (B) may be reduced and the substrate adhesion may be lowered, and if it exceeds 40% by weight, the solubility in a solvent may be deteriorated.
エポキシ基含有エチレン性不飽和単量体(m3)としては、例えば、グリシジル(メタ)アクリレート、メチルグリシジル(メタ)アクリレート、4−ヒドロキシブチル(メタ)アクリレートグリシジルエーテル、3,4−エポキシブチル(メタ)アクリレート、3−メチル−3,4−エポキシブチル(メタ)アクリレート、3−エチル−3,4−エポキシブチル(メタ)アクリレート、4−メチル−4,5−エポキシペンチル(メタ)アクリレート、5−メチル−5,6−エポキシヘキシル(メタ)アクリレート、α−エチルアクリル酸グリシジル、アリルグリシジルエーテル、クロトニルグリシジルエール、(イソ)クロトン酸グリシジルエーテル、(3,4−エポキシシクロヘキシル)メチル(メタ)アクリレート、N−(3,5−ジメチル−4−グリシジル)ベンジルアクリルアミド、o−ビニルベンジルグリシジルエーテル、m−ビニルベンジルグリシジルエーテル、p−ビニルベンジルグリシジルエーテル、α−メチル−o−ビニルベンジルグリシジルエーテル、α−メチル−m−ビニルベンジルグリシジルエーテル、α−メチル−p−ビニルベンジルグリシジルエーテル、2,3−ジグリシジルオキシメチルスチレン、2,4−ジグリシジルオキシメチルスチレン、2,5−ジグリシジルオキシメチルスチレン、2,6−ジグリシジルオキシメチルスチレン、2,3,4−トリグリシジルオキシメチルスチレン、2,3,5−トリグリシジルオキシメチルスチレン、2,3,6−トリグリシジルオキシメチルスチレン、3,4,5−トリグリシジルオキシメチルスチレン、2,4,6−トリグリシジルオキシメチルスチレンなどが挙げられる。好ましくは、工業品の入手の容易さという点からグリシジル(メタ)アクリレート、メチルグリシジル(メタ)アクリレート、(3,4−エポキシシクロヘキシル)メチル(メタ)アクリレートが挙げられる。 Examples of the epoxy group-containing ethylenically unsaturated monomer (m3) include glycidyl (meth) acrylate, methyl glycidyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate glycidyl ether, and 3,4-epoxybutyl (meth) ) Acrylate, 3-methyl-3,4-epoxybutyl (meth) acrylate, 3-ethyl-3,4-epoxybutyl (meth) acrylate, 4-methyl-4,5-epoxypentyl (meth) acrylate, 5- Methyl-5,6-epoxyhexyl (meth) acrylate, α-ethyl acrylate glycidyl, allyl glycidyl ether, crotonyl glycidyl ale, (iso) crotonic acid glycidyl ether, (3,4-epoxycyclohexyl) methyl (meth) acrylate , N- (3,5-di Til-4-glycidyl) benzylacrylamide, o-vinylbenzylglycidyl ether, m-vinylbenzylglycidyl ether, p-vinylbenzylglycidyl ether, α-methyl-o-vinylbenzylglycidyl ether, α-methyl-m-vinylbenzylglycidyl Ether, α-methyl-p-vinylbenzylglycidyl ether, 2,3-diglycidyloxymethylstyrene, 2,4-diglycidyloxymethylstyrene, 2,5-diglycidyloxymethylstyrene, 2,6-diglycidyloxy Methylstyrene, 2,3,4-triglycidyloxymethylstyrene, 2,3,5-triglycidyloxymethylstyrene, 2,3,6-triglycidyloxymethylstyrene, 3,4,5-triglycidyloxymethylstyrene 2,4,6-triglycidyloxymethylstyrene and the like. Preferably, glycidyl (meth) acrylate, methyl glycidyl (meth) acrylate, and (3,4-epoxycyclohexyl) methyl (meth) acrylate are mentioned from the viewpoint of easy availability of industrial products.
エポキシ基含有エチレン性不飽和単量体(m3)の使用量としては、エチレン性不飽和単量体(N)100重量%中に20〜90重量%が好ましい。20重量%未満だとカルボキシル基含有エチレン性不飽和単量体(Q)と反応させるエポキシ基の量が少なくなり導入されるエチレン性不飽和基の量が少なくなるため、硬化部位が減り、耐熱性が不足する場合がある。90重量%を超えると炭素数1〜4の直鎖状もしくは分岐状のアルキル基を有するエチレン性不飽和単量体(m1)の導入量が少なくなり、透明性が悪化する場合がある。 The amount of the epoxy group-containing ethylenically unsaturated monomer (m3) used is preferably 20 to 90% by weight in 100% by weight of the ethylenically unsaturated monomer (N). If it is less than 20% by weight, the amount of epoxy groups to be reacted with the carboxyl group-containing ethylenically unsaturated monomer (Q) is reduced and the amount of ethylenically unsaturated groups to be introduced is reduced. Sexuality may be insufficient. When it exceeds 90% by weight, the amount of the ethylenically unsaturated monomer (m1) having a linear or branched alkyl group having 1 to 4 carbon atoms is decreased, and transparency may be deteriorated.
水酸基含有エチレン性不飽和単量体としては、例えば、2−ヒドロキシエチル(メタ)アクリレート、3−ヒドロキシプロピル(メタ)アクリレート、2−ヒドロキシプロピル(メタ)アクリレート、4−ヒドロキシブチル(メタ)アクリレート、3−ヒドロキシブチル(メタ)アクリレート、2−ヒドロキシブチル(メタ)アクリレート、エチル−α−(ヒドロキシメチル)アクリレート、2−ヒドロキシ−3−フェノキシプロピルアクリレート、1,4−シクロヘキサンジメタノールモノ(メタ)アクリレート、フタル酸モノヒドロキシエチル(メタ)アクリレート、2−ヒドロキシ−3−フェノキシプロピル(メタ)アクリレート、p−ヒドロキシフェニルエチル(メタ)アクリレート等の水酸基含有(メタ)アクリレート類;
2−ヒドロキシエチルアクリルアミド、2,3−ジヒドロキシプロピル(メタ)アクリルアミド等の水酸基含有(メタ)アクリルアミド類;
2−ヒドロキシエチルビニルエーテル、ジエチレングリコールビニルエーテル、4−ヒドロキシブチルビニルエーテル等の水酸基含有ビニルエーテル類等が挙げられる。
Examples of the hydroxyl group-containing ethylenically unsaturated monomer include 2-hydroxyethyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, 3-hydroxybutyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, ethyl-α- (hydroxymethyl) acrylate, 2-hydroxy-3-phenoxypropyl acrylate, 1,4-cyclohexanedimethanol mono (meth) acrylate Hydroxyl group-containing (meth) acrylates such as monohydroxyethyl (meth) acrylate, phthalate, 2-hydroxy-3-phenoxypropyl (meth) acrylate, p-hydroxyphenylethyl (meth) acrylate;
Hydroxyl group-containing (meth) acrylamides such as 2-hydroxyethylacrylamide and 2,3-dihydroxypropyl (meth) acrylamide;
Examples thereof include hydroxyl group-containing vinyl ethers such as 2-hydroxyethyl vinyl ether, diethylene glycol vinyl ether, and 4-hydroxybutyl vinyl ether.
水酸基含有エチレン性不飽和単量体の使用量としては、エチレン性不飽和単量体(S)100重量%中に20〜90重量%が好ましい。20重量%未満だとイソシアネート基含有エチレン性不飽和単量体と反応させる水酸基の量が少なくなり導入されるエチレン性不飽和基の量が少なくなるため、硬化部位が減り、耐熱性が不足する場合がある。90重量%を超えると炭素数1〜4の直鎖状もしくは分岐状のアルキル基を有するエチレン性不飽和単量体(m1)の導入量が少なくなり、透明性が悪化する場合がある。 As the usage-amount of a hydroxyl-containing ethylenically unsaturated monomer, 20 to 90 weight% is preferable in 100 weight% of ethylenically unsaturated monomers (S). If it is less than 20% by weight, the amount of hydroxyl groups to be reacted with the isocyanate group-containing ethylenically unsaturated monomer is reduced, and the amount of ethylenically unsaturated groups to be introduced is reduced. There is a case. When it exceeds 90% by weight, the amount of the ethylenically unsaturated monomer (m1) having a linear or branched alkyl group having 1 to 4 carbon atoms is decreased, and transparency may be deteriorated.
また、本発明では、エチレン性不飽和単量体(M)、(N)もしくは(S)に下記一般式(3)で表されるエチレン性不飽和単量体(m4)を含むことが好ましい。エチレン性不飽和単量体(m4)を用いることにより親水性のコントロールが容易になり、絶縁膜およびフォトスペーサーのパターン作製時に用いるアルカリ現像液への溶解性を向上することができる。 In the present invention, the ethylenically unsaturated monomer (M), (N) or (S) preferably contains an ethylenically unsaturated monomer (m4) represented by the following general formula (3). . By using the ethylenically unsaturated monomer (m4), the hydrophilicity can be easily controlled, and the solubility in an alkaline developer used for patterning the insulating film and the photospacer can be improved.
一般式(3) General formula (3)
[式中、R2は、水素原子もしくはメチル基であり、R3は、水素原子、炭素数1〜8の直鎖状もしくは分岐状のアルキル基、脂環族炭化水素基、または芳香族炭化水素基であり、n3は、1〜10の整数である。] [Wherein R 2 represents a hydrogen atom or a methyl group, and R 3 represents a hydrogen atom, a linear or branched alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group, or an aromatic carbon group. A hydrogen group, and n 3 is an integer of 1 to 10. ]
上記一般式(3)に示す、エチレン性不飽和単量体(m4)としては、例えば、メトキシエチル(メタ)アクリレート、フェノキシエチル(メタ)アクリレート、フェノキシジエチレングリコール(メタ)アクリレート、メトキシポリエチレングリコール(メタ)アクリレート、エトキシポリエチレングリコール(メタ)アクリレート等のアルコキシポリエチレングリコール(メタ)アクリレート類が挙げられる。特にメトキシエチル(メタ)アクリレートは耐熱性の観点から最も好ましい。 Examples of the ethylenically unsaturated monomer (m4) represented by the general formula (3) include methoxyethyl (meth) acrylate, phenoxyethyl (meth) acrylate, phenoxydiethylene glycol (meth) acrylate, methoxypolyethylene glycol (meta ) Alkoxy polyethylene glycol (meth) acrylates such as acrylate and ethoxypolyethylene glycol (meth) acrylate. In particular, methoxyethyl (meth) acrylate is most preferable from the viewpoint of heat resistance.
上記一般式(3)に示す、エチレン性不飽和単量体(m4)の使用量としては、エチレン性不飽和単量体(M)、(N)もしくは(S)100重量%中に5〜30重量%が好ましい。5重量%未満だと親水性のコントロールが困難であり、アルカリ現像液への溶解性の向上に対する効果が低い場合があり、30重量%を超えると耐熱性の悪化が起きる場合がある。 The amount of the ethylenically unsaturated monomer (m4) shown in the general formula (3) is 5 to 100% by weight in the ethylenically unsaturated monomer (M), (N) or (S). 30% by weight is preferred. If it is less than 5% by weight, it is difficult to control the hydrophilicity, and the effect for improving the solubility in an alkali developer may be low. If it exceeds 30% by weight, the heat resistance may be deteriorated.
エチレン性不飽和単量体(M)、(N)および(S)に用いることができる、その他共重合可能なエチレン性不飽和単量体としては、例えば、2−エチルヘキシル(メタ)アクリレート、シクロヘキシル(メタ)アクリレート、2,2,4−トリメチルシクロヘキシル(メタ)アクリレート、4−t−ブチルシクロヘキシル(メタ)アクリレート、ステアリル(メタ)アクリレート、ラウリル(メタ)アクリレート、イソボルニル(メタ)アクリレート、アダマンチル(メタ)アクリレート、ジシクロペンテニル(メタ)アクリレート、ジシクロペンテニルオキシエチル(メタ)アクリレート、トリシクロ−(5,2,1,0,2.6)−デカニル(メタ)アクリレート、トリシクロ−(5,2,1,0,2.6)−デカニルオキシエチル(メタ)アクリレート等の脂肪族(メタ)アクリレート類;
フェニル(メタ)アクリレート、ベンジル(メタ)アクリレート、ロジンアクリレート等の芳香族(メタ)アクリレート類;
オキセタン(メタ)アクリレート、テトラヒドロフルフリール(メタ)アクリレート、(2−エチル−2−メチル−1,3−ジオキソラン−4−イル)メチル(メタ)アクリレート、1,4−ジオキサスピロ[4,5]デカ−2−イル)メチル(メタ)アクリレート等のエポキシ基をのぞく環状エーテル含有(メタ)アクリレート類;
N−(メタ)アクリロイルオキシエチルヘキサヒドロフタルイミド等の複素環式(メタ)アクリレート類;
メトキシポリプロピレングリコール(メタ)アクリレート等のアルコキシポリプロピレングリコール(メタ)アクリレート類;
2−メタクリロイルオキシ−γ−ブチロラクトン、3−メタクリロイルオキシ−γ−ブチロラクトン、5−メタクリロイルオキシ−2,6−ノルボルナンカルボラクトン、β−メタクリロイルオキシ−β−メチル−δ−バレロラクトン、β−メタクリロイルオキシ−β−メチル−γ−ブチロラクトン、2−(1−メタクリロイルオキシ)エチル−4−ブタノリド等のラクトン骨格含有(メタ)アクリレート類;
(メタ)アクリルアミド、N,N−ジメチル(メタ)アクリルアミド、N,N−ジエチル(メタ)アクリルアミド、N−イソプロピル(メタ)アクリルアミド、N−ブチル(メタ)アクリルアミド、イソブチル(メタ)アクリルアミド、t−ブチル(メタ)アクリルアミド、t−オクチル(メタ)アクリルアミド、2−ヒドロキシエチルアクリルアミド、ダイアセトン(メタ)アクリルアミド、アクリロイルモルホリン等の非置換もしくはN置換型(メタ)アクリルアミド類;
N,N−ジメチルアミノエチル(メタ)アクリレート、N,N−ジエチルアミノエチル(メタ)アクリレート等のアミノ基含有(メタ)アクリレート類;
(メタ)アクリロニトリル等のニトリル類;
片末端メタクリロイル化ポリメチルメタクリレートオリゴマー、片末端メタクリロイル化ポリスチレンオリゴマー、および片末端メタクリロイル化ポリエチレングリコール等の重合性オリゴマー等が挙げられる。
Other copolymerizable ethylenically unsaturated monomers that can be used for the ethylenically unsaturated monomers (M), (N) and (S) include, for example, 2-ethylhexyl (meth) acrylate, cyclohexyl (Meth) acrylate, 2,2,4-trimethylcyclohexyl (meth) acrylate, 4-t-butylcyclohexyl (meth) acrylate, stearyl (meth) acrylate, lauryl (meth) acrylate, isobornyl (meth) acrylate, adamantyl (meta ) Acrylate, dicyclopentenyl (meth) acrylate, dicyclopentenyloxyethyl (meth) acrylate, tricyclo- (5,2,1,0,2.6) -decanyl (meth) acrylate, tricyclo- (5,2, 1,0,2.6) -decanyloxyethyl ( Data) aliphatic acrylates such as (meth) acrylates;
Aromatic (meth) acrylates such as phenyl (meth) acrylate, benzyl (meth) acrylate, rosin acrylate;
Oxetane (meth) acrylate, tetrahydrofurfuryl (meth) acrylate, (2-ethyl-2-methyl-1,3-dioxolan-4-yl) methyl (meth) acrylate, 1,4-dioxaspiro [4,5] Cyclic ether-containing (meth) acrylates excluding epoxy groups such as (dec-2-yl) methyl (meth) acrylate;
Heterocyclic (meth) acrylates such as N- (meth) acryloyloxyethyl hexahydrophthalimide;
Alkoxypolypropylene glycol (meth) acrylates such as methoxypolypropylene glycol (meth) acrylate;
2-methacryloyloxy-γ-butyrolactone, 3-methacryloyloxy-γ-butyrolactone, 5-methacryloyloxy-2,6-norbornanecarbolactone, β-methacryloyloxy-β-methyl-δ-valerolactone, β-methacryloyloxy- Lactone skeleton-containing (meth) acrylates such as β-methyl-γ-butyrolactone and 2- (1-methacryloyloxy) ethyl-4-butanolide;
(Meth) acrylamide, N, N-dimethyl (meth) acrylamide, N, N-diethyl (meth) acrylamide, N-isopropyl (meth) acrylamide, N-butyl (meth) acrylamide, isobutyl (meth) acrylamide, t-butyl Unsubstituted or N-substituted (meth) acrylamides such as (meth) acrylamide, t-octyl (meth) acrylamide, 2-hydroxyethyl acrylamide, diacetone (meth) acrylamide, acryloylmorpholine;
Amino group-containing (meth) acrylates such as N, N-dimethylaminoethyl (meth) acrylate and N, N-diethylaminoethyl (meth) acrylate;
Nitriles such as (meth) acrylonitrile;
Examples thereof include polymerizable oligomers such as one-end methacryloylated polymethyl methacrylate oligomer, one-end methacryloylated polystyrene oligomer, and one-end methacryloylated polyethylene glycol.
さらに、スチレン、α−メチルスチレン、p−ヒドロキシスチレン、クロロメチルスチレン、ビニルトルエン、インデン等のスチレン類;
エチルビニルエーテル、n−プロピルビニルエーテル、イソプロピルビニルエーテル、n−ブチルビニルエーテル、イソブチルビニルエーテル等のビニルエーテル類;
酢酸ビニル、プロピオン酸ビニル等の脂肪酸ビニル類;
N−メチルマレイミド、N−エチルマレイミド、N−シクロヘキシルマレイミド、N−フェニルマレイミド等のN置換マレイミド類が挙げられる。
Furthermore, styrenes such as styrene, α-methylstyrene, p-hydroxystyrene, chloromethylstyrene, vinyltoluene, indene;
Vinyl ethers such as ethyl vinyl ether, n-propyl vinyl ether, isopropyl vinyl ether, n-butyl vinyl ether, isobutyl vinyl ether;
Fatty acid vinyls such as vinyl acetate and vinyl propionate;
N-substituted maleimides such as N-methylmaleimide, N-ethylmaleimide, N-cyclohexylmaleimide, N-phenylmaleimide and the like can be mentioned.
特に、スチレン、2−メタクリロイルオキシ−γ−ブチロラクトンが、密着性の点で好ましく、トリシクロ−(5,2,1,0,2.6)−デカニル(メタ)アクリレートが、モノシクロ環を有するエポキシ化合物、ビシクロ環を有するエポキシ化合物、およびトリシクロ環を有するエポキシ化合物との相溶性が高く透明性、密着性の点でさらに好ましい。 In particular, styrene and 2-methacryloyloxy-γ-butyrolactone are preferable in terms of adhesion, and tricyclo- (5,2,1,0,2.6) -decanyl (meth) acrylate is an epoxy compound having a monocyclo ring. , Epoxy compounds having a bicyclo ring, and epoxy compounds having a tricyclo ring are highly compatible with each other, and are more preferable in terms of transparency and adhesion.
エチレン性不飽和単量体(M)、(N)もしくは(S)の重合は、公知の方法で行うことができる。すなわち、エチレン不飽和単量体を任意で重合開始剤と混合して加熱することで行うことができる。重合温度は、40〜150℃、好ましくは50〜120℃である。 The polymerization of the ethylenically unsaturated monomer (M), (N) or (S) can be performed by a known method. That is, it can be carried out by optionally mixing an ethylenically unsaturated monomer with a polymerization initiator and heating. The polymerization temperature is 40 to 150 ° C, preferably 50 to 120 ° C.
重合の際、エチレン性不飽和単量体の合計100重量部に対して、任意に0.001〜15重量部の重合開始剤を使用することができる。重合開始剤としては、アゾ系化合物および有機過酸化物を用いることができる。アゾ系化合物の例としては、2,2’−アゾビスイソブチロニトリル、2,2’−アゾビス(2−メチルブチロニトリル)、1,1’−アゾビス(シクロヘキサン1−カルボニトリル)、2,2’−アゾビス(2,4−ジメチルバレロニトリル)、2,2’−アゾビス(2,4−ジメチル−4−メトキシバレロニトリル)、ジメチル2,2’−アゾビス(2−メチルプロピオネート)、4,4’−アゾビス(4−シアノバレリック酸)、2,2’−アゾビス(2−ヒドロキシメチルプロピオニトリル)、2,2’−アゾビス[2−(2−イミダゾリン−2−イル)プロパン]等が挙げられる。有機過酸化物の例としては、過酸化ベンゾイル、t−ブチルパーベンゾエイト、クメンヒドロパーオキシド、ジイソプロピルパーオキシジカーボネート、ジ−n−プロピルパーオキシジカーボネート、ジ(2−エトキシエチル)パーオキシジカーボネート、t−ブチルパーオキシネオデカノエート、t−ブチルパーオキシビバレート、(3,5,5−トリメチルヘキサノイル)パーオキシド、ジプロピオニルパーオキシド、ジアセチルパーオキシド等が挙げられる。これらの重合開始剤は、単独で、もしくは2種類以上組み合わせて用いることができる。 In the polymerization, 0.001 to 15 parts by weight of a polymerization initiator can be arbitrarily used with respect to 100 parts by weight of the total of ethylenically unsaturated monomers. As the polymerization initiator, azo compounds and organic peroxides can be used. Examples of the azo compounds include 2,2′-azobisisobutyronitrile, 2,2′-azobis (2-methylbutyronitrile), 1,1′-azobis (cyclohexane 1-carbonitrile), 2 , 2′-azobis (2,4-dimethylvaleronitrile), 2,2′-azobis (2,4-dimethyl-4-methoxyvaleronitrile), dimethyl 2,2′-azobis (2-methylpropionate) 4,4′-azobis (4-cyanovaleric acid), 2,2′-azobis (2-hydroxymethylpropionitrile), 2,2′-azobis [2- (2-imidazolin-2-yl) Propane] and the like. Examples of organic peroxides include benzoyl peroxide, t-butyl perbenzoate, cumene hydroperoxide, diisopropyl peroxydicarbonate, di-n-propyl peroxydicarbonate, di (2-ethoxyethyl) peroxy Examples include dicarbonate, t-butyl peroxyneodecanoate, t-butyl peroxybivalate, (3,5,5-trimethylhexanoyl) peroxide, dipropionyl peroxide, diacetyl peroxide and the like. These polymerization initiators can be used alone or in combination of two or more.
重合の際、分子量を調整する目的で連鎖移動剤を用いてもよい。エチレン性不飽和単量体の合計100重量部に対して、任意に0.001〜15重量部の連鎖移動剤を使用することができる。 During the polymerization, a chain transfer agent may be used for the purpose of adjusting the molecular weight. 0.001 to 15 parts by weight of a chain transfer agent can be arbitrarily used for 100 parts by weight of the total of ethylenically unsaturated monomers.
連鎖移動剤としては、分子量の調節ができる化合物であれば特に制限されず、公知の連鎖移動剤が使用できる。例えば、オクチルメルカプタン,n−ドデシルメルカプタン,t−ドデシルメルカプタン,n−ヘキサデシルメルカプタン,n−テトラデシルメルカプタン、メルカプトエタノール、チオグリセロール、チオグリコール酸、2−メルカプトプロピオン酸、3−メルカプトプロピオン酸、チオリンゴ酸、チオグリコール酸オクチル、3−メルカプトプロピオン酸オクチル、2−メルカプトエタンスルホン酸、ブチルチオグリコレートなどのメルカプタン;
ジメチルキサントゲンジスルフィド,ジエチルキサントゲンジスルフィド,ジイソプロピルキサンチゲンジスルフィド、テトラメチルチウラムジスルフィド,テトラエチルチウラムジスルフィド,テトラブチルチウラムジスルフィドなどのジスルフィド;
四塩化炭素,塩化メチレン、ブロモホルム、ブロモトリクロロエタン、四臭化炭素,臭化エチレンなどのハロゲン化炭化水素;
イソプロパノール、グリセリン等の、第2級アルコール;
亜リン酸、次亜リン酸、及びその塩(次亜リン酸ナトリウム、次亜リン酸カリウム等)や、亜硫酸、亜硫酸水素、亜二チオン酸、メタ重亜硫酸、およびそれらの塩(亜硫酸水素ナトリウム、亜硫酸水素カリウム、亜二チオン酸ナトリウム、亜二チオン酸カリウム、メタ重亜硫酸ナトリウム、メタ重亜硫酸カリウム等)等の、低級酸化物およびその塩;
およびアリルアルコール、2−エチルヘキシルチオグリコレート、α−メチルスチレンダイマー、ターピノーレン、α−テルピネン、γ−テルピネン、ジペンテン、アニソールなどを挙げることができる。これらは単独で、または2種以上を組み合わせて用いられる。
The chain transfer agent is not particularly limited as long as it is a compound capable of adjusting the molecular weight, and a known chain transfer agent can be used. For example, octyl mercaptan, n-dodecyl mercaptan, t-dodecyl mercaptan, n-hexadecyl mercaptan, n-tetradecyl mercaptan, mercaptoethanol, thioglycerol, thioglycolic acid, 2-mercaptopropionic acid, 3-mercaptopropionic acid, thioapple Mercaptans such as acids, octyl thioglycolate, octyl 3-mercaptopropionate, 2-mercaptoethanesulfonic acid, butylthioglycolate;
Disulfides such as dimethylxanthogen disulfide, diethylxanthogen disulfide, diisopropylxanthogen disulfide, tetramethylthiuram disulfide, tetraethylthiuram disulfide, tetrabutylthiuram disulfide;
Halogenated hydrocarbons such as carbon tetrachloride, methylene chloride, bromoform, bromotrichloroethane, carbon tetrabromide, ethylene bromide;
Secondary alcohols such as isopropanol, glycerin;
Phosphorous acid, hypophosphorous acid, and salts thereof (sodium hypophosphite, potassium hypophosphite, etc.), sulfurous acid, hydrogen sulfite, dithionite, metabisulfite, and salts thereof (sodium hydrogen sulfite) Lower oxides and salts thereof, such as potassium bisulfite, sodium dithionite, potassium dithionite, sodium metabisulfite, potassium metabisulfite);
And allyl alcohol, 2-ethylhexyl thioglycolate, α-methylstyrene dimer, terpinolene, α-terpinene, γ-terpinene, dipentene, anisole and the like. These may be used alone or in combination of two or more.
また、重合の際、重合溶媒として有機溶剤を使用することができる。有機溶剤としては、本発明にかかる感光性樹脂組成物に使用する溶剤(D)を使用することが好ましい。例えば、酢酸エチル、酢酸n−ブチル、酢酸イソブチル、トルエン、キシレン、アセトン、ヘキサン、メチルエチルケトン、シクロヘキサノン、プロピレングリコールモノメチルエーテルアセテート、ジエトキシジエチレングリコール、3−エトキシプロピオン酸エチル等が用いられるが特にこれらに限定されるものではない。これらの重合溶媒は、2種類以上混合して用いても良い。 In the polymerization, an organic solvent can be used as a polymerization solvent. As an organic solvent, it is preferable to use the solvent (D) used for the photosensitive resin composition concerning this invention. For example, ethyl acetate, n-butyl acetate, isobutyl acetate, toluene, xylene, acetone, hexane, methyl ethyl ketone, cyclohexanone, propylene glycol monomethyl ether acetate, diethoxydiethylene glycol, ethyl 3-ethoxypropionate and the like are particularly limited thereto. Is not to be done. These polymerization solvents may be used as a mixture of two or more.
炭素数1〜4の直鎖状もしくは分岐状のアルキル基を有するエチレン性不飽和単量体(m1)とカルボキシル基含有エチレン性不飽和単量体(m2)とを含むエチレン性不飽和単量体(M)を共重合して得られるカルボキシル基含有重合体(E)中のカルボキシル基と反応する、エポキシ基含有エチレン性不飽和単量体(F)としては、前述のエポキシ基含有エチレン性不飽和単量体(m3)と同様のものを使用することができる。工業品の入手の容易さという点からグリシジル(メタ)アクリレート、メチルグリシジル(メタ)アクリレート、(3,4−エポキシシクロヘキシル)メチル(メタ)アクリレートが望ましい。 An ethylenically unsaturated monomer comprising an ethylenically unsaturated monomer (m1) having a linear or branched alkyl group having 1 to 4 carbon atoms and a carboxyl group-containing ethylenically unsaturated monomer (m2) As the epoxy group-containing ethylenically unsaturated monomer (F) that reacts with the carboxyl group in the carboxyl group-containing polymer (E) obtained by copolymerizing the body (M), the above-mentioned epoxy group-containing ethylenic monomer (F) is used. The thing similar to an unsaturated monomer (m3) can be used. Glycidyl (meth) acrylate, methyl glycidyl (meth) acrylate, and (3,4-epoxycyclohexyl) methyl (meth) acrylate are desirable from the viewpoint of easy availability of industrial products.
エポキシ基含有エチレン性不飽和単量体(F)の使用量としては、カルボキシル基含有重合体(E)中のカルボキシル基1モルに対して、エポキシ基含有エチレン性不飽和単量体(F)中のエポキシ基を0.1〜0.9モル反応させるのが好ましい。さらに好ましくは0.2〜0.7モルである。0.9モルを超えるとアクリル系硬化性樹脂(A)中のカルボキシル基の量が少なくなりエポキシ化合物(B)との反応が十分に行えなくなるとともに、硬化収縮が大きく基材密着性が悪化する場合がある。 As the usage-amount of an epoxy-group-containing ethylenically unsaturated monomer (F), with respect to 1 mol of carboxyl groups in a carboxyl-group-containing polymer (E), an epoxy-group-containing ethylenically unsaturated monomer (F) It is preferable to react 0.1 to 0.9 mol of the epoxy group therein. More preferably, it is 0.2-0.7 mol. If the amount exceeds 0.9 mol, the amount of carboxyl groups in the acrylic curable resin (A) decreases, and the reaction with the epoxy compound (B) cannot be performed sufficiently, and the curing shrinkage is large and the substrate adhesion deteriorates. There is a case.
反応温度は40〜150℃、好ましくは50〜120℃である。温度が上記範囲より低いと、付加反応が十分進行しない恐れがあり、一方、上記範囲より高いと、付加反応時にゲル化が起こりやすい。 The reaction temperature is 40 to 150 ° C, preferably 50 to 120 ° C. If the temperature is lower than the above range, the addition reaction may not proceed sufficiently. On the other hand, if the temperature is higher than the above range, gelation tends to occur during the addition reaction.
炭素数1〜4の直鎖状もしくは分岐状のアルキル基を有するエチレン性不飽和単量体(m1)とエポキシ基含有エチレン性不飽和単量体(m3)とを含むエチレン性不飽和単量体(N)を共重合して得られるエポキシ基含有重合体(P)のエポキシ基と反応する、カルボキシル基含有エチレン性不飽和単量体(Q)としては、前述のカルボキシル基含有エチレン性不飽和単量体(m2)と同様のものを使用することができる。中でも反応性の点から(メタ)アクリル酸が好ましい。 An ethylenically unsaturated monomer comprising an ethylenically unsaturated monomer (m1) having a linear or branched alkyl group having 1 to 4 carbon atoms and an epoxy group-containing ethylenically unsaturated monomer (m3) Examples of the carboxyl group-containing ethylenically unsaturated monomer (Q) that reacts with the epoxy group of the epoxy group-containing polymer (P) obtained by copolymerizing the product (N) include the above-mentioned carboxyl group-containing ethylenically unsaturated monomers. The thing similar to a saturated monomer (m2) can be used. Of these, (meth) acrylic acid is preferred from the viewpoint of reactivity.
カルボキシル基含有エチレン性不飽和単量体(Q)の使用量としては、エポキシ基含有重合体(P)中のエポキシ基1モルに対して、カルボキシル基含有エチレン性不飽和単量体(Q)中のカルボキシル基を0.2〜1モル反応させるのが好ましい。さらに好ましくは0.3〜1モルである。0.2モル未満では、エチレン性不飽和基の濃度が低くなり、耐熱性等が不足する場合がある。また、残存のエポキシ基と、多塩基酸無水物(H)と反応させた際に、ゲル化が生じる場合がある。1モルを超えるとカルボキシル基含有エチレン性不飽和単量体(Q)が残存する場合がある。 The amount of the carboxyl group-containing ethylenically unsaturated monomer (Q) used is that the carboxyl group-containing ethylenically unsaturated monomer (Q) with respect to 1 mol of the epoxy group in the epoxy group-containing polymer (P). It is preferable to react 0.2 to 1 mol of the carboxyl group therein. More preferably, it is 0.3-1 mol. If it is less than 0.2 mol, the concentration of the ethylenically unsaturated group may be low, and heat resistance and the like may be insufficient. Further, gelation may occur when the remaining epoxy group is reacted with the polybasic acid anhydride (H). If it exceeds 1 mol, the carboxyl group-containing ethylenically unsaturated monomer (Q) may remain.
反応温度は40〜150℃、好ましくは50〜120℃である。温度が上記範囲より低いと、付加反応が十分進行しない恐れがあり、一方、上記範囲より高いと、付加反応時にゲル化が起こりやすい。 The reaction temperature is 40 to 150 ° C, preferably 50 to 120 ° C. If the temperature is lower than the above range, the addition reaction may not proceed sufficiently. On the other hand, if the temperature is higher than the above range, gelation tends to occur during the addition reaction.
炭素数1〜4の直鎖状もしくは分岐状のアルキル基を有するエチレン性不飽和単量体(m1)とカルボキシル基含有エチレン性不飽和単量体(m2)と水酸基含有エチレン性不飽和単量体とを含むエチレン性不飽和単量体(S)を共重合して得た水酸基含有重合体(E’)中の水酸基と反応させるイソシアネート基含有エチレン性不飽和単量体としては、例えば、2−メタクリロイルオキシエチルイソシアネート、2−アクリロイルオキシエチルイソシアネート、2−メタクリロイルオキシエトキシエチルイソシアネート、1,1−ビス(アクリロイルメチル)エチルイソシアネートなどが挙げられる。 Ethylenically unsaturated monomer (m1) having a linear or branched alkyl group having 1 to 4 carbon atoms, carboxyl group-containing ethylenically unsaturated monomer (m2), and hydroxyl group-containing ethylenically unsaturated monomer As an isocyanate group-containing ethylenically unsaturated monomer to be reacted with a hydroxyl group in a hydroxyl group-containing polymer (E ′) obtained by copolymerizing an ethylenically unsaturated monomer (S) containing, for example, Examples include 2-methacryloyloxyethyl isocyanate, 2-acryloyloxyethyl isocyanate, 2-methacryloyloxyethoxyethyl isocyanate, 1,1-bis (acryloylmethyl) ethyl isocyanate.
イソシアネート基含有エチレン性不飽和単量体の使用量としては、水酸基含有重合体(E’)中の水酸基1モルに対して、イソシアネート基含有エチレン性不飽和単量体中のイソシアネート基を0.1〜0.9モル反応させるのが好ましい。さらに好ましくは0.2〜0.7モルである。0.9モルを超えると硬化収縮が大きく基材密着性が悪化する場合がある。 With respect to the amount of the isocyanate group-containing ethylenically unsaturated monomer used, the isocyanate group in the isocyanate group-containing ethylenically unsaturated monomer is added to 0.1 mol of the hydroxyl group in the hydroxyl group-containing polymer (E ′). It is preferable to make it react 1-0.9 mol. More preferably, it is 0.2-0.7 mol. When it exceeds 0.9 mol, the curing shrinkage is large and the substrate adhesion may be deteriorated.
反応の温度は40〜120℃が好ましい。さらに好ましくは50〜100℃である。温度が上記範囲より低いと、付加反応が十分進行しない恐れがあり、一方、上記範囲より高いと、付加反応時にゲル化が起こりやすい。 The reaction temperature is preferably 40 to 120 ° C. More preferably, it is 50-100 degreeC. If the temperature is lower than the above range, the addition reaction may not proceed sufficiently. On the other hand, if the temperature is higher than the above range, gelation tends to occur during the addition reaction.
また、カルボキシル基含有重合体(E)にエポキシ基含有エチレン性不飽和単量体(F)を反応させて得られる(反応式1)水酸基含有重合体(G)またはエポキシ基含有重合体(P)にカルボキシル基含有エチレン性不飽和単量体(Q)を反応させて得られる(反応式2)水酸基含有重合体(K)中の水酸基に対して反応させる多塩基酸無水物(H)としては、例えば、無水マレイン酸、無水コハク酸、無水イタコン酸、無水フタル酸、テトラヒドロ無水フタル酸、無水メチルテトラヒドロフタル酸、ヘキサヒドロ無水フタル酸、無水クロレンド酸、無水トリメリット酸、ピロメリット酸無水物、3,3’,4,4’−ビフェニルスルホンテトラカルボン酸無水物、ビス(トリフェニルフタル酸)−4,4’−ジフェニルメタン無水物、9,9−ビス(3,4−ジカルボキシフェニル)フルオレン酸無水物等の多塩基酸無水物が挙げられる。溶剤溶解性という点から、特に好ましくはテトラヒドロ無水フタル酸、ヘキサヒドロ無水フタル酸である。 Further, a hydroxyl group-containing polymer (G) or an epoxy group-containing polymer (P) obtained by reacting an epoxy group-containing ethylenically unsaturated monomer (F) with a carboxyl group-containing polymer (E). As a polybasic acid anhydride (H) to be reacted with a hydroxyl group in a hydroxyl group-containing polymer (K) obtained by reacting a carboxyl group-containing ethylenically unsaturated monomer (Q) with For example, maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, methyltetrahydrophthalic anhydride, hexahydrophthalic anhydride, chlorendic anhydride, trimellitic anhydride, pyromellitic anhydride 3,3 ′, 4,4′-biphenylsulfonetetracarboxylic anhydride, bis (triphenylphthalic acid) -4,4′-diphenylmethane anhydride, 9 Polybasic acid anhydrides such as 9- bis (3,4-carboxyphenyl) fluorene anhydride. From the viewpoint of solvent solubility, tetrahydrophthalic anhydride and hexahydrophthalic anhydride are particularly preferred.
多塩基酸無水物(H)の使用量としては、水酸基含有重合体(G)または(K)中の水酸基1モルに対して多塩基酸無水物(H)中の酸無水物基を0.05〜0.95モル反応させるのが好ましい。さらに好ましくは0.2〜0.7モルである。0.05モル未満では、密着性向上の効果が十分に得られない場合があり、さらにカルボキシル基を導入させる目的の1つであるアルカリ現像性も十分に得られない場合がある。 The amount of the polybasic acid anhydride (H) used is such that the acid anhydride group in the polybasic acid anhydride (H) is 0. 1 mol with respect to 1 mol of the hydroxyl group in the hydroxyl group-containing polymer (G) or (K). It is preferable to carry out the reaction between 05 and 0.95 mol. More preferably, it is 0.2-0.7 mol. If it is less than 0.05 mol, the effect of improving adhesion may not be sufficiently obtained, and further, alkali developability, which is one of the purposes for introducing a carboxyl group, may not be sufficiently obtained.
反応温度は40〜150℃、好ましくは50〜120℃である。温度が上記範囲より低いと、付加反応が十分進行しない恐れがあり、一方、上記範囲より高いと、付加反応時にゲル化が起こりやすい。 The reaction temperature is 40 to 150 ° C, preferably 50 to 120 ° C. If the temperature is lower than the above range, the addition reaction may not proceed sufficiently. On the other hand, if the temperature is higher than the above range, gelation tends to occur during the addition reaction.
上記のカルボキシル基とエポキシ基との付加反応(反応式1および反応式2)、および水酸基と酸無水物基との付加反応(反応式4および反応式5)の際には、必要に応じて、公知の触媒を使用することができる。触媒としては、例えば、トリエチルアミン、トリブチルアミン、ジメチルベンジルアミン、1,8−ジアザビシクロ[5,4,0]ウンデカ−7−エン、1,5−ジアザビシクロ[4,3,0]ノナ−5−エン、1,4−ジアザビシクロ[2,2,2]オクタン等の3級アミン、トリフェニルホスフィン等のホスフィン化合物などが挙げられる。触媒の使用量は、反応系中の固形分の合計100重量部に対して、0.01〜30重量部が好ましく、0.05〜5重量部がさらに好ましく、0.1〜2重量部が最も好ましい。 In the case of the above addition reaction between the carboxyl group and the epoxy group (Reaction Formula 1 and Reaction Formula 2) and the addition reaction between the hydroxyl group and the acid anhydride group (Reaction Formula 4 and Reaction Formula 5), as necessary A known catalyst can be used. Examples of the catalyst include triethylamine, tributylamine, dimethylbenzylamine, 1,8-diazabicyclo [5,4,0] undec-7-ene, 1,5-diazabicyclo [4,3,0] non-5-ene. , Tertiary amines such as 1,4-diazabicyclo [2,2,2] octane, and phosphine compounds such as triphenylphosphine. The amount of the catalyst used is preferably 0.01 to 30 parts by weight, more preferably 0.05 to 5 parts by weight, and 0.1 to 2 parts by weight based on 100 parts by weight of the total solid content in the reaction system. Most preferred.
上記水酸基とイソシアネート基との付加反応(反応式3)時には、公知の触媒を使用することができる。例えば、3級アミン系化合物、有機金属系化合物等が挙げられる。3級アミン系化合物としては、例えば、トリエチルアミン、トリエチレンジアミン、N,N−ジメチルベンジルアミン、N−メチルモルホリン、1,8−ジアザビシクロ−[5.4.0]−7−ウンデセン、1,5−ジアザビシクロ−[4.3.0]−5−ノネン等が挙げられる。 A known catalyst can be used in the addition reaction (reaction formula 3) between the hydroxyl group and the isocyanate group. Examples thereof include tertiary amine compounds and organometallic compounds. Examples of the tertiary amine compound include triethylamine, triethylenediamine, N, N-dimethylbenzylamine, N-methylmorpholine, 1,8-diazabicyclo- [5.4.0] -7-undecene, 1,5- And diazabicyclo- [4.3.0] -5-nonene.
有機金属系化合物としては錫系化合物、非錫系化合物を挙げることができる。錫系化合物としては、例えばジブチル錫ジクロライド、ジブチル錫オキサイド、ジブチル錫ジブロマイド、ジブチル錫ジマレエ−ト、ジブチル錫ジラウレ−ト、ジブチル錫ジアセテ−ト、ジブチル錫スルファイド、トリブチル錫スルファイド、トリブチル錫オキサイド、トリブチル錫アセテ−ト、トリエチル錫エトキサイド、トリブチル錫エトキサイド、ジオクチル錫オキサイド、トリブチル錫クロライド、トリブチル錫トリクロロアセテ−ト、2−エチルヘキサン酸錫等が挙げられる。非錫系化合物としては、例えばジブチルチタニウムジクロライド、テトラブチルチタネ−ト、ブトキシチタニウムトリクロライドなどのチタン系、オレイン酸鉛、2−エチルヘキサン酸鉛、安息香酸鉛、ナフテン酸鉛などの鉛系、2−エチルヘキサン酸鉄、鉄アセチルアセトネ−トなどの鉄系、安息香酸コバルト、2−エチルヘキサン酸コバルトなどのコバルト系、ナフテン酸亜鉛、2−エチルヘキサン酸亜鉛などの亜鉛系、ナフテン酸ジルコニウムなどが挙げられる。これらは単独使用、もしくは併用することもできる。 Examples of organometallic compounds include tin compounds and non-tin compounds. Examples of the tin-based compound include dibutyltin dichloride, dibutyltin oxide, dibutyltin dibromide, dibutyltin dimaleate, dibutyltin dilaurate, dibutyltin diacetate, dibutyltin sulfide, tributyltin sulfide, tributyltin oxide, Examples include tributyltin acetate, triethyltin ethoxide, tributyltin ethoxide, dioctyltin oxide, tributyltin chloride, tributyltin trichloroacetate, tin 2-ethylhexanoate and the like. Examples of non-tin compounds include titanium compounds such as dibutyltitanium dichloride, tetrabutyltitanate, butoxytitanium trichloride, and lead compounds such as lead oleate, lead 2-ethylhexanoate, lead benzoate, and lead naphthenate. Iron, such as iron 2-ethylhexanoate and iron acetylacetonate, cobalt-based such as cobalt benzoate, cobalt 2-ethylhexanoate, zinc-based such as zinc naphthenate and zinc 2-ethylhexanoate, naphthene Examples thereof include zirconium acid. These can be used alone or in combination.
さらに、前記付加反応時には、重合禁止効果のあるガスを反応系中に導入したり、重合禁止剤を添加したりしてもよい。重合禁止効果のあるガスを反応系中に導入したり、重合禁止剤を添加したりすることにより、付加反応時のゲル化を防ぐことができる。重合禁止効果のあるガスとしては、系内物質の爆発範囲に入らない程度の酸素を含むガス、例えば、空気などが挙げられる。 Furthermore, at the time of the addition reaction, a gas having a polymerization inhibiting effect may be introduced into the reaction system, or a polymerization inhibitor may be added. By introducing a gas having a polymerization inhibition effect into the reaction system or adding a polymerization inhibitor, gelation during the addition reaction can be prevented. Examples of the gas having a polymerization inhibiting effect include a gas containing oxygen that does not enter the explosion range of the substance in the system, for example, air.
重合禁止剤としては、公知のものを使用することができ、特に制限はされないが、例えば、ヒドロキノン、メトキノン、2,6−ジ−t−ブチルフェノール、2,2’−メチレンビス(4−メチル−6−t−ブチルフェノール)、フェノチアジン等が挙げられる。これら重合禁止剤は、1種のみを用いても、2種以上を併用してもよい。使用する重合禁止剤の量としては、反応系中の固形分の合計100重量部に対して、0.005〜5重量部が好ましく、0.03〜3重量部がさらに好ましく、0.05〜1.5重量部が最も好ましい。重合禁止剤の量が少なすぎると、重合禁止効果が十分でない場合があり、一方、多すぎると、露光感度が低下する恐れがある。また、重合禁止効果のあるガスと重合禁止剤とを併用すると、使用する重合禁止剤の量を低減できたり、重合禁止効果を高めたりすることができるのでより好ましい。 A known polymerization inhibitor can be used and is not particularly limited. For example, hydroquinone, methoquinone, 2,6-di-t-butylphenol, 2,2′-methylenebis (4-methyl-6) -T-butylphenol), phenothiazine and the like. These polymerization inhibitors may be used alone or in combination of two or more. The amount of the polymerization inhibitor to be used is preferably 0.005 to 5 parts by weight, more preferably 0.03 to 3 parts by weight, more preferably 0.05 to 3 parts by weight with respect to 100 parts by weight of the total solids in the reaction system. Most preferred is 1.5 parts by weight. If the amount of the polymerization inhibitor is too small, the polymerization inhibition effect may not be sufficient. On the other hand, if the amount is too large, the exposure sensitivity may decrease. Further, it is more preferable to use a gas having a polymerization inhibitory effect in combination with a polymerization inhibitor because the amount of the polymerization inhibitor to be used can be reduced or the polymerization inhibitory effect can be enhanced.
次にモノシクロ環を有するエポキシ化合物、ビシクロ環を有するエポキシ化合物、およびトリシクロ環を有するエポキシ化合物からなる群より選ばれる少なくとも1つのエポキシ化合物(B)[以下、エポキシ化合物(B)と表記する場合がある。]について説明する。一般に、エポキシ化合物を添加することで耐薬品性、耐熱性、基材密着性を向上させることが可能である。さらに本発明では、エポキシ化合物(B)を使用することにより、透明性および硬度に優れる膜およびパターンを得ることができる。 Next, at least one epoxy compound (B) selected from the group consisting of an epoxy compound having a monocyclo ring, an epoxy compound having a bicyclo ring, and an epoxy compound having a tricyclo ring [hereinafter sometimes referred to as an epoxy compound (B). is there. ] Will be described. Generally, it is possible to improve chemical resistance, heat resistance and substrate adhesion by adding an epoxy compound. Furthermore, in this invention, the film | membrane and pattern which are excellent in transparency and hardness can be obtained by using an epoxy compound (B).
エポキシ化合物(B)は、化合物中のエポキシ基とアクリル系硬化性樹脂(A)中のカルボキシル基と反応して硬化する。エポキシ化合物(B)の使用量は、アクリル系硬化性樹脂(A)中のカルボキシル基のモル数とエポキシ化合物(B)中のエポキシ基のモル数との比により調整する。アクリル系硬化性樹脂(A)中のカルボキシル基のモル数(a)と、エポキシ化合物(B)中のエポキシ基のモル数(b)とのモル比が、(a)/(b)=0.5〜2であるのが好ましく、0.75〜1.5であるのがより好ましい。(a)/(b)=0.5より小さいとエポキシ樹脂の量が多くなり、パターン作成時の形状の悪化やアルカリ現像性が悪化する場合があり、(a)/(b)=2より大きいと保護膜中にカルボキシル基が残存してしまうため、絶縁性の低下や、硬化不良により耐熱性が悪化する場合がある。 The epoxy compound (B) is cured by reacting with an epoxy group in the compound and a carboxyl group in the acrylic curable resin (A). The amount of the epoxy compound (B) used is adjusted by the ratio between the number of moles of carboxyl groups in the acrylic curable resin (A) and the number of moles of epoxy groups in the epoxy compound (B). The molar ratio of the number of moles of carboxyl groups (a) in the acrylic curable resin (A) to the number of moles (b) of epoxy groups in the epoxy compound (B) is (a) / (b) = 0. 0.5 to 2 is preferable, and 0.75 to 1.5 is more preferable. When (a) / (b) is less than 0.5, the amount of epoxy resin increases, and the shape deterioration or alkali developability at the time of pattern formation may deteriorate. From (a) / (b) = 2 If it is large, the carboxyl group remains in the protective film, so that the heat resistance may be deteriorated due to a decrease in insulating properties or poor curing.
モノシクロ環を有するエポキシ化合物としては、例えば、水添ビスフェノールAジグリシジルエーテル、水添ビスフェノールAジグリシジルエステル、シクロヘキサンジオールジグリシジルエーテル、シクロヘキサンジジグリシジルエステル、ビニルシクロヘキセンジオキシド、テトラグリシジルビスアミノメチルシクロヘキサン、3,4−エポキシシクロヘキセニルメチル−3’,4’−エポキシシクロヘキセンカルボキシレート、1,2:8,9ジエポキシリモネン、ラクトン変性エポキシ化ブタンテトラカルボン酸テトラキス−(3−シクロヘキセニルメチル)、2,2−ビス(ヒドロキシメチル)−1−ブタノールの1,2−エポキシ−4−(2−オキシラニル)シクロヘキサン付加物、3,4−エポキシシクロヘキシルメチル(メタ)アクリレート、2−(3,4−エポキシ)シクロヘキシル−5,1−スピロ(3,4−エポキシ)シクロヘキシル−m−ジオキサン等が挙げられ、製品としては、EP−4080S、同4085S[以上、(株)ADEKA製]、CY−175、同177、同179、アラルダイトCY−182、同192、184[以上、チバ・スペシャルティ・ケミカルズ(株)製]、ERL−4234、4299、4221、4206[以上、U.C.C社製]、ショーダイン509[昭和電工(株)製]、エピクロン200、同400[以上、DIC(株)製]、エピコート871、同872[以上、ジャパンエポキシレジン(株)製]、ED−5661、同5662[以上、セラニーズコーティング(株)製]、セロキサイド2021、同2021A、同2021P、同2080、同3000、エポリードCT300、同400、EHPE3150、EHPE3150CE[以上、ダイセル化学工業(株)製]などが挙げられる。シクロヘキサン等のモノシクロ環を有するエポキシ化合物であればこれに限定されるものではない。 Examples of the epoxy compound having a monocyclo ring include hydrogenated bisphenol A diglycidyl ether, hydrogenated bisphenol A diglycidyl ester, cyclohexanediol diglycidyl ether, cyclohexanedidiglycidyl ester, vinylcyclohexene dioxide, tetraglycidylbisaminomethylcyclohexane, 3,4-epoxycyclohexenylmethyl-3 ′, 4′-epoxycyclohexenecarboxylate, 1,2: 8,9 diepoxy limonene, lactone-modified epoxidized butanetetracarboxylic acid tetrakis- (3-cyclohexenylmethyl), 2 , 2-Bis (hydroxymethyl) -1-butanol, 1,2-epoxy-4- (2-oxiranyl) cyclohexane adduct, 3,4-epoxycyclohexylmethyl (meth) ) Acrylate, 2- (3,4-epoxy) cyclohexyl-5,1-spiro (3,4-epoxy) cyclohexyl-m-dioxane, and the like. EP-4080S, 4085S [above, ( ADEKA Co., Ltd.], CY-175, 177, 179, Araldite CY-182, 192, 184 [above, manufactured by Ciba Specialty Chemicals], ERL-4234, 4299, 4221, 4206 [above. U. C. C company], Shodyne 509 [Showa Denko Co., Ltd.], Epicron 200, 400 [above, DIC Corporation], Epicoat 871, 872 [above, Japan Epoxy Resin Co., Ltd.], ED -5661, 5562 [above, manufactured by Celanese Coating Co., Ltd.], Celoxide 2021, 2021A, 2021P, 2080, 3000, Epolide CT300, 400, EHPE3150, EHPE3150CE [above, Daicel Chemical Industries, Ltd. Manufactured]. It is not limited to this as long as it is an epoxy compound having a monocyclo ring such as cyclohexane.
ビシクロ環を有するエポキシ化合物としては、例えば、ノルボルネンジオールジグリシジルエーテル、イソボルニルジオールジグリシジルエーテル等が挙げられる。 Examples of the epoxy compound having a bicyclo ring include norbornenediol diglycidyl ether and isobornyldiol diglycidyl ether.
トリシクロ環を有するエポキシ化合物としては、例えば、トリシクロデカニルジグリシジルエーテル、ジシクロペンタジエンとフェノールノボラック重合物のグリシジルエーテル化物などが挙げられ、製品としては、EP−4088S[以上(株)ADEKA製]、XD−1000、XD−1000−L、XD−1000−2L[以上日本化薬(株)社製]、EPICLON HP−7200、HP−7200L、HP−7200H、HP−7200HH[以上、DIC(株)社製]などが挙げられる。 Examples of the epoxy compound having a tricyclo ring include tricyclodecanyl diglycidyl ether, glycidyl etherified product of dicyclopentadiene and a phenol novolak polymer, and the product is EP-4088S [manufactured by ADEKA Co., Ltd.] ], XD-1000, XD-1000-L, XD-1000-2L [manufactured by Nippon Kayaku Co., Ltd.], EPICLON HP-7200, HP-7200L, HP-7200H, HP-7200HH [above, DIC ( Etc.].
この中でも、下記一般式(1)で表されるエポキシ化合物〔ジシクロペンタジエンとフェノールノボラック重合物のグリシジルエーテル化物、製品としては、XD−1000、XD−1000−L、XD−1000−2L[以上日本化薬(株)社製]、EPICLON HP−7200、HP−7200L、HP−7200H、HP−7200HH[以上、DIC(株)社製]〕を使用することが好ましい。 Among these, an epoxy compound represented by the following general formula (1) [glycidyl etherified product of dicyclopentadiene and phenol novolac polymer, as products, XD-1000, XD-1000-L, XD-1000-2L [or more] Nippon Kayaku Co., Ltd.], EPICLON HP-7200, HP-7200L, HP-7200H, HP-7200HH [above, DIC Corporation]] is preferably used.
一般式(1) General formula (1)
[式中、n1は0〜10の整数である。] Wherein, n 1 is an integer of 0. ]
また、下記一般式(2)で表されるエポキシ化合物〔2,2−ビス(ヒドロキシメチル)−1−ブタノールの1,2−エポキシ−4−(2−オキシラニル)シクロヘキサン付加物、製品としては、EHPE3150、[ダイセル化学工業(株)製]〕を使用することが好ましい。 In addition, as an epoxy compound represented by the following general formula (2) [1,2-epoxy-4- (2-oxiranyl) cyclohexane adduct of 2,2-bis (hydroxymethyl) -1-butanol, It is preferable to use EHPE3150 [manufactured by Daicel Chemical Industries, Ltd.].
一般式(2) General formula (2)
[式中、R1は水素原子もしくはメチル基であり、n2は1〜20の整数である。] [Wherein, R 1 is a hydrogen atom or a methyl group, and n 2 is an integer of 1-20. ]
上記一般式(1)、一般式(2)で表されるエポキシ化合物を用いることにより、膜およびパターンの透明性を確保し、かつ耐熱性、絶縁性を併せ持つ塗膜を得ることができる。 By using the epoxy compounds represented by the above general formulas (1) and (2), it is possible to obtain a coating film that ensures the transparency of the film and the pattern and has both heat resistance and insulation properties.
これらのエポキシ化合物(B)は、1種のみを用いても、2種以上を併用してもよい。さらに、エポキシ化合物(B)として、上記一般式(1)、一般式(2)で表されるエポキシ化合物と併用して分子量(式量)で150〜1000の低分子量エポキシ化合物を使用するのがより好ましい。低分子量エポキシ化合物を用いることにより、現像速度の調整および熱硬化膜の架橋密度を向上することが可能になり、耐熱性の向上や基材密着性の調整が可能になる。 These epoxy compounds (B) may use only 1 type, or may use 2 or more types together. Further, as the epoxy compound (B), a low molecular weight epoxy compound having a molecular weight (formula weight) of 150 to 1000 is used in combination with the epoxy compound represented by the general formula (1) or the general formula (2). More preferred. By using a low molecular weight epoxy compound, it is possible to adjust the developing speed and improve the crosslinking density of the thermosetting film, thereby improving the heat resistance and adjusting the adhesion of the substrate.
次にエチレン性不飽和基を有する重合性化合物(C)について説明する。エチレン性不飽和基を有する重合性化合物(C)は、エチレン性不飽和単量体および必要に応じてエチレン性不飽和基を有する樹脂により構成される。ただし、本発明における「エチレン性不飽和基を有するアクリル系硬化性樹脂(A)」は、「エチレン性不飽和基を有する重合性化合物(C)」には含まれないものとする。
エチレン性不飽和基を有する重合性化合物(C)は、公知のものであれば、特に限定されず、例えば、メチル(メタ)アクリレート、エチル(メタ)アクリレート、2−ヒドロキシエチル(メタ)アクリレート、2−ヒドロキシプロピル(メタ)アクリレート、シクロヘキシル(メタ)アクリレート、β−カルボキシエチル(メタ)アクリレート、ポリエチレングリコールジ(メタ)アクリレート、1,6−ヘキサンジオールジ(メタ)アクリレート、トリエチレングリコールジ(メタ)アクリレート、トリプロピレングリコールジ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレートと多塩基酸無水物との反応生成物、1,6−ヘキサンジオールジグリシジルエーテルジ(メタ)アクリレート、ビスフェノールAジグリシジルエーテルジ(メタ)アクリレート、ネオペンチルグリコールジグリシジルエーテルジ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、ジペンタエリスリトールペンタ(メタ)アクリレートと多塩基酸無水物との反応生成物、トリシクロデカニル(メタ)アクリレート、エステルアクリレート、メラミン(メタ)アクリレート、エポキシ(メタ)アクリレート、ウレタンアクリレート等の各種アクリル酸エステルおよびメタクリル酸エステルや、その他として、(メタ)アクリル酸、スチレン、酢酸ビニル、ヒドロキシエチルビニルエーテル、エチレングリコールジビニルエーテル、ペンタエリスリトールトリビニルエーテル、(メタ)アクリルアミド、N−ヒドロキシメチル(メタ)アクリルアミド、N−ビニルホルムアミド、アクリロニトリル等が挙げられ、これらを単独、または2種類以上混合して用いることができる。
Next, the polymerizable compound (C) having an ethylenically unsaturated group will be described. The polymerizable compound (C) having an ethylenically unsaturated group is composed of an ethylenically unsaturated monomer and, if necessary, a resin having an ethylenically unsaturated group. However, the “acrylic curable resin (A) having an ethylenically unsaturated group” in the present invention is not included in the “polymerizable compound (C) having an ethylenically unsaturated group”.
The polymerizable compound (C) having an ethylenically unsaturated group is not particularly limited as long as it is a known compound. For example, methyl (meth) acrylate, ethyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, cyclohexyl (meth) acrylate, β-carboxyethyl (meth) acrylate, polyethylene glycol di (meth) acrylate, 1,6-hexanediol di (meth) acrylate, triethylene glycol di (meth) ) Acrylate, tripropylene glycol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tri (meth) acrylate and polybasic acid anhydride 1,6-hexanediol diglycidyl ether di (meth) acrylate, bisphenol A diglycidyl ether di (meth) acrylate, neopentyl glycol diglycidyl ether di (meth) acrylate, dipentaerythritol hexa (meth) acrylate, dipenta Reaction products of erythritol penta (meth) acrylate and polybasic acid anhydrides, various acrylic esters such as tricyclodecanyl (meth) acrylate, ester acrylate, melamine (meth) acrylate, epoxy (meth) acrylate, urethane acrylate And methacrylic acid esters and others, (meth) acrylic acid, styrene, vinyl acetate, hydroxyethyl vinyl ether, ethylene glycol divinyl ether, pentaerythritol Examples include rutrivinyl ether, (meth) acrylamide, N-hydroxymethyl (meth) acrylamide, N-vinylformamide, acrylonitrile and the like, and these can be used alone or in admixture of two or more.
ここで、エチレン性不飽和基を有する重合性化合物(C)は、通常、紫外線や電子線を照射することにより[必要に応じ光重合開始剤(I)を添加して]光硬化させるが、本発明では、熱により[必要に応じ熱重合開始剤(J)を添加して]熱硬化させてもよい。 Here, the polymerizable compound (C) having an ethylenically unsaturated group is usually photocured by adding ultraviolet rays or an electron beam [adding a photopolymerization initiator (I) as necessary], In the present invention, heat curing may be performed by heat [adding a thermal polymerization initiator (J) if necessary].
エチレン性不飽和基を有する重合性化合物(C)の使用量は、感光性組成物の固形分100重量%中に、10〜60重量%が好ましく、さらに好ましくは15〜50重量%、特に好ましくは20〜40重量%である。10重量%未満であると光硬化反応性が悪く重合が進行しない場合があり、60重量%を超える量を用いると硬化収縮による基材密着性が低下する場合がある。 The amount of the polymerizable compound (C) having an ethylenically unsaturated group is preferably 10 to 60% by weight, more preferably 15 to 50% by weight, particularly preferably 100% by weight of the solid content of the photosensitive composition. Is 20-40% by weight. If it is less than 10% by weight, the photocuring reactivity may be poor and polymerization may not proceed, and if it exceeds 60% by weight, the substrate adhesion due to curing shrinkage may be reduced.
次に溶剤(D)について詳細に説明する。溶剤(D)の使用量は、感光性組成物の固形分濃度を5〜50重量%とする量を使うのが好ましい。感光性組成物の固形分濃度をこのような範囲とすることにより、より均一な厚さの、平滑性の高い絶縁膜およびフォトスペーサーを提供することができる。すなわち、固形分濃度が50重量%を超えると、絶縁膜およびフォトスペーサーのレベリング性や、得られる絶縁膜およびフォトスペーサーの透明性が低下するおそれがあるためであり、一方、固形分濃度が5重量%未満となると、所定の厚さの膜およびパターンが得られなかったりするおそれがあるためである。 Next, the solvent (D) will be described in detail. The amount of the solvent (D) used is preferably an amount that makes the solid content concentration of the photosensitive composition 5 to 50% by weight. By setting the solid content concentration of the photosensitive composition in such a range, it is possible to provide an insulating film and a photospacer having a more uniform thickness and high smoothness. That is, when the solid content concentration exceeds 50% by weight, the leveling property of the insulating film and the photospacer and the transparency of the obtained insulating film and photospacer may be lowered, while the solid content concentration is 5%. This is because if the amount is less than% by weight, a film and a pattern having a predetermined thickness may not be obtained.
よって、かかる感光性組成物のレベリング性等と、得られる膜およびパターンの耐薬品性等とのバランスがより良好な観点から、固形分濃度を10〜40重量%の範囲とするのがより好ましい。 Therefore, the solid content concentration is more preferably in the range of 10 to 40% by weight from the viewpoint of a better balance between the leveling property of the photosensitive composition and the chemical resistance of the resulting film and pattern. .
ここで、感光性組成物の固形分を調節するための溶剤(D)としては、感光性組成物を構成する、他の成分と反応しないもの(不活性)であれば特に限定されるものではないが、好ましくは、前述したアクリル系硬化性樹脂(A)の合成の際に使用することができる有機溶剤と同一のものを挙げることができる。具体的には、ケトン系溶剤やエステル系溶剤の、1種の単独使用または2種以上の併用が好ましい。 Here, the solvent (D) for adjusting the solid content of the photosensitive composition is not particularly limited as long as it does not react with other components (inactive) constituting the photosensitive composition. Preferably, the same organic solvent that can be used in the synthesis of the acrylic curable resin (A) described above can be used. Specifically, a single type of ketone solvent or an ester solvent is preferably used alone or in combination of two or more types.
中でも下記一般式(4)で表される溶剤を用いることがより好ましい。 Among them, it is more preferable to use a solvent represented by the following general formula (4).
一般式(4) General formula (4)
[式中、R4は炭素数1〜3のアルキル基であり、R5は水素原子もしくは炭素数1〜3のアルキル基である。] [Wherein, R 4 is an alkyl group having 1 to 3 carbon atoms, and R 5 is a hydrogen atom or an alkyl group having 1 to 3 carbon atoms. ]
上記一般式(4)で表される溶剤を用いることで、スピン塗布方式またはスリット塗布方式いずれの塗布方式でも各種ムラの発生を防ぐことができ、またモノシクロ環を有するエポキシ化合物、ビシクロ環を有するエポキシ化合物、およびトリシクロ環を有するエポキシ化合物からなる群より選ばれる少なくとも1つのエポキシ化合物(B)との相溶性が良好であるため膜およびパターンの平坦性を向上することができる。 By using the solvent represented by the general formula (4), it is possible to prevent the occurrence of various unevenness in any of the spin coating method and the slit coating method, and it has an epoxy compound having a monocyclo ring and a bicyclo ring. Since the compatibility with at least one epoxy compound (B) selected from the group consisting of an epoxy compound and an epoxy compound having a tricyclo ring is good, the flatness of the film and the pattern can be improved.
上記一般式(4)で表される溶剤としてはアルキル酸シクロヘキシルエステルが挙げられ、例えば、酢酸シクロヘキシル、プロピオン酸シクロヘキシル、酪酸シクロヘキシル、イソ酪酸シクロヘキシル、酢酸−2−メチルシクロヘキシル、酢酸−2−エチルシクロヘキシル、酢酸−2−プロピルシクロヘキシル、酢酸−2−イソプロピルシクロヘキシル、酢酸−4−メチルシクロヘキシル、酢酸−4−エチルシクロヘキシル、酢酸−4−プロピルシクロヘキシル、酢酸−4−イソプロピルシクロヘキシル、プロピオン酸−2−メチルシクロヘキシル、プロピオン酸−2−エチルシクロヘキシル、プロピオン酸−2−プロピルシクロヘキシル、プロピオン酸−2−イソプロピルシクロヘキシル、プロピオン酸−4−メチルシクロヘキシル、プロピオン酸−4−エチルシクロヘキシル、プロピオン酸−4−プロピルシクロヘキシル、プロピオン酸−4−イソプロピルシクロヘキシル、酪酸−2−メチルシクロヘキシル、酪酸−2−エチルシクロヘキシル、酪酸−2−プロピルシクロヘキシル、酪酸−2−イソプロピルシクロヘキシル、酪酸−4−メチルシクロヘキシル、酪酸−4−エチルシクロヘキシル、酪酸−4−プロピルシクロヘキシル、酪酸−4−イソプロピルシクロヘキシルなどが挙げられる。 Examples of the solvent represented by the general formula (4) include cyclohexyl esters of alkyl acids, such as cyclohexyl acetate, cyclohexyl propionate, cyclohexyl butyrate, cyclohexyl isobutyrate, 2-methylcyclohexyl acetate, and 2-ethylcyclohexyl acetate. , Acetate-2-propylcyclohexyl, acetate-2-isopropylcyclohexyl, acetate-4-methylcyclohexyl, acetate-4-ethylcyclohexyl, acetate-4-propylcyclohexyl, acetate-4-isopropylcyclohexyl, propionate-2-methylcyclohexyl , Propionate-2-ethylcyclohexyl, propionate-2-propylcyclohexyl, propionate-2-isopropylcyclohexyl, propionate-4-methylcyclohexyl, pro 4-ethylcyclohexyl onion, 4-propylcyclohexyl propionate, 4-isopropylcyclohexyl propionate, 2-methylcyclohexyl butyrate, 2-ethylcyclohexyl butyrate, 2-propylcyclohexyl butyrate, 2-isopropyl butyrate Examples include cyclohexyl, 4-methylcyclohexyl butyrate, 4-ethylcyclohexyl butyrate, 4-propylcyclohexyl butyrate, and 4-isopropylcyclohexyl butyrate.
中でも、酢酸シクロヘキシル(別名:シクロヘキシルアセテート)、酢酸−2−メチルシクロヘキシル(別名:2−メチルヘキシルアセテート)を用いることが好ましい。 Among them, it is preferable to use cyclohexyl acetate (alias: cyclohexyl acetate) or 2-methylcyclohexyl acetate (alias: 2-methylhexyl acetate).
上記一般式(4)で表される溶剤の含有量としては、溶剤(D)の合計100重量%中に好ましくは20〜80重量%、より好ましくは30〜70重量%、さらに好ましくは35〜65重量%となるような範囲である。20重量%未満では、良好な塗工性が得られない場合がある。また、80重量%を超えると溶剤選択性が低下してしまう場合がある。 The content of the solvent represented by the general formula (4) is preferably 20 to 80% by weight, more preferably 30 to 70% by weight, and still more preferably 35 to 100% by weight in the total 100% by weight of the solvent (D). The range is 65% by weight. If it is less than 20% by weight, good coatability may not be obtained. Moreover, when it exceeds 80 weight%, solvent selectivity may fall.
次に光重合開始剤(I)について説明する。本発明の感光性組成物は、光重合開始剤(I)を含有するのが好ましい。光重合開始剤(I)は公知のものであれば、特に限定されず、例えば、特開昭59−152396号公報、特開昭61−151197号各公報に記載のチタノセン化合物を含むメタロセン化合物や、特開平10−39503号公報記載のヘキサアリールビイミダゾール誘導体、ハロメチル−s−トリアジン誘導体、N−フェニルグリシン等のN−アリール−α−アミノ酸類、N−アリール−α−アミノ酸塩類、N−アリール−α−アミノ酸エステル類等のラジカル活性剤、α−アミノアルキルフェノン系化合物、特開2000−80068号公報、特開2006−36750号公報等に記載されているオキシムエステル系開始剤等が挙げられる。 Next, the photopolymerization initiator (I) will be described. The photosensitive composition of the present invention preferably contains a photopolymerization initiator (I). The photopolymerization initiator (I) is not particularly limited as long as it is a known one, and examples thereof include metallocene compounds including titanocene compounds described in JP-A Nos. 59-152396 and 61-151197. Hexaarylbiimidazole derivatives, halomethyl-s-triazine derivatives, N-aryl-α-amino acids such as N-phenylglycine, N-aryl-α-amino acid salts, N-aryl described in JP-A-10-39503 -Radical activators such as -α-amino acid esters, α-aminoalkylphenone compounds, oxime ester initiators described in JP-A 2000-80068, JP-A 2006-36750, and the like. .
本発明で用いることができる光重合開始剤(I)の具体例としては、2−(4−メトキシフェニル)−4,6−ビス(トリクロロメチル)−s−トリアジン、2−(4−メトキシナフチル)−4,6−ビス(トリクロロメチル)−s−トリアジン、2−(4−エトキシナフチル)−4,6−ビス(トリクロロメチル)−s−トリアジン、2−(4−エトキシカルボニルナフチル)−4,6−ビス(トリクロロメチル)−s−トリアジン等のハロメチル化トリアジン誘導体;
2−トリクロロメチル−5−(2’−ベンゾフリル)−1,3,4−オキサジアゾール、2−トリクロロメチル−5−[β−(2’−ベンゾフリル)ビニル]−1,3,4−オキサジアゾール、2−トリクロロメチル−5−〔β−[2’−(6”−ベンゾフリル)ビニル]〕−1,3,4−オキサジアゾール、2−トリクロロメチル−5一フリル−1,3,4−オキサジアゾール等のハロメチル化オキサジアゾール誘導体;
2−(2’−クロロフェニル)−4,5−ジフェニルイミダソール2量体、2−(2’−クロロフェニル)−4,5−ビス(3’−メトキシフェニル)イミダゾール2量体、2−(2’−フルオロフェニル)−4,5−ジフェニルイミダゾール2量体、2−(2’−メトキシフェニル)−4,5−ジフェニルイミダゾール2量体、(4’−メトキシフェニル)−4,5−ジフェニルイミダゾール2量体等のイミダゾール誘導体;
ベンゾインメチルエーテル、ベンゾインフェニルエーテル、ベンゾインイソブチルエーテル、ベンゾインイソプロピルエーテル等のベンゾインエーテル類;
2−メチルアントラキノン、2−エチルアントラキノン、2−t−ブチルアントラキノン、1−クロロアントラキノン等のアントラキノン誘導体;
ベンゾフェノン、ミヒラーズケトン、2−メチルベンゾフェノン、3−メチルベンゾフェノン、4−メチルベンゾフェノン、2−クロロベンゾフェノン、4−ブロモベンゾフェノン、2−カルボキシベンゾフェノン等のベンゾフェノン誘導体;
2,2−ジメトキシ−2−フェニルアセトフェノン、2,2−ジエトキシアセトフェノン、1−ヒドロキシシクロへキシルフェニルケトン、α−ヒドロキシ−2−メチルフェニルプロパノン、1−ヒドロキシ−1−メチルエチル−(p−イソプロピルフェニル)ケトン、1−ヒドロキシ−1−(p−ドデシルフェニル)ケトン、2−メチル−1−(4−(メチルチオ)フェニル)−2−モルホリノ−1−プロパノン、1,1,1−トリクロロメチル−(p−ブチルフェニル)ケトン等のアセトフェノン誘導体;
チオキサントン、2−エチルチオキサントン、2−イソプロピルチオキサントン、2−クロロチオキサントン、2,4−ジメチルチオキサントン、2,4−ジエチルチオキサントン、2,4−ジイソプロピルチオキサントン等のチオキサントン誘導体;
p−ジメチルアミノ安息香酸エチル、p−ジエチルアミノ安息香酸エチル等の安息香酸エステル誘導体;
9−フェニルアクリジン、9−(p−メトキシフェニル)アクリジン等のアクリジン誘導体;
9,10−ジメチルベンズフェナジン等のフェナジン誘導体;
ベンズアンスロン等のアンスロン誘導体;
ジ−シクロペンタジエニルTi−ジ−クロライド、ジ−シクロペンタジエニルTi−ビス−フェニル、ジ−シクロペンタジエニルTi−ビス−2,3,4,5,6−ペンタフルオロフェニル−1−イル、ジ−シクロペンタジエニルTi−ビス−2,3,5,6−テトラフルオロフェニル−1−イル、ジ−シクロペンタジエニルTi−ビス−2,4,6−トリフルオロフェニ−1−イル、ジ−シクロペンタジエニルTi−2,6一ジープルオロフェニ−1−イル、ジ−シクロペンタジエニルTi−2,4−ジ−フルオロフェニ−1−イル、ジ−メチルシクロペンタジエニルTi−ビス−2,3,4,5,6−ペンタフルオロフェニ−1−イル、ジ−メチルシクロペンタジエニルTi−ビス−2,6−ジ−フルオロフェニ−1−イル、ジ−シクロペンタジエニルTi−2,6−ジ−フルオロ−3−(ピル−1−イル)−フェニ−1−イル等のチタノセン誘導体;
2−メチル−1[4−(メチルチオ)フェニル]−2−モルフォリノプロパン−1−オン、2−ベンジル−2−ジメチルアミノ−1−(4−モルフォリノフェニル)−ブタノン−1、2−ベンジル−2−ジメチルアミノ−1−(4−モルフォリノフェニル)ブタン−1−オン、4−ジメチルアミノエチルベンゾエ−ト、4−ジメチルアミノイソアミルベンゾエ−ト、4−ジエチルアミノアセトフェノン、4−ジメチルアミノプロピオフェノン、2−エチルヘキシル−1,4−ジメチルアミノベンゾエート、2,5−ビス(4−ジエチルアミノベンザル)シクロヘキサノン、7−ジエチルアミノ−3−(4−ジエチルアミノベンゾイル)クマリン、4−(ジエチルアミノ)カルコン等のα−アミノアルキルフェノン系化合物;
1,2−オクタンジオン,1−[4−(フェニルチオ)フェニル]−2−(O−ベンゾイルオキシム)、エタノン,1−[9−エチル−6−(2−メチルベンゾイル)−9H−カルバゾール−3−イル]−1−(O−アセチルオキシム)等のオキシムエステル系化合物等が挙げられる。特に、アセトフェノン系やオキシムエステル系化合物が感度の点で好ましい。
Specific examples of the photopolymerization initiator (I) that can be used in the present invention include 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-methoxynaphthyl). ) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-ethoxynaphthyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-ethoxycarbonylnaphthyl) -4 Halomethylated triazine derivatives such as 1,6-bis (trichloromethyl) -s-triazine;
2-trichloromethyl-5- (2′-benzofuryl) -1,3,4-oxadiazole, 2-trichloromethyl-5- [β- (2′-benzofuryl) vinyl] -1,3,4-oxa Diazole, 2-trichloromethyl-5-[[beta]-[2 '-(6 "-benzofuryl) vinyl]]-1,3,4-oxadiazole, 2-trichloromethyl-5 monofuryl-1,3 Halomethylated oxadiazole derivatives such as 4-oxadiazole;
2- (2′-chlorophenyl) -4,5-diphenylimidazole dimer, 2- (2′-chlorophenyl) -4,5-bis (3′-methoxyphenyl) imidazole dimer, 2- ( 2'-fluorophenyl) -4,5-diphenylimidazole dimer, 2- (2'-methoxyphenyl) -4,5-diphenylimidazole dimer, (4'-methoxyphenyl) -4,5-diphenyl Imidazole derivatives such as imidazole dimer;
Benzoin ethers such as benzoin methyl ether, benzoin phenyl ether, benzoin isobutyl ether, benzoin isopropyl ether;
Anthraquinone derivatives such as 2-methylanthraquinone, 2-ethylanthraquinone, 2-t-butylanthraquinone, 1-chloroanthraquinone;
Benzophenone derivatives such as benzophenone, Michler's ketone, 2-methylbenzophenone, 3-methylbenzophenone, 4-methylbenzophenone, 2-chlorobenzophenone, 4-bromobenzophenone, 2-carboxybenzophenone;
2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxyacetophenone, 1-hydroxycyclohexyl phenyl ketone, α-hydroxy-2-methylphenylpropanone, 1-hydroxy-1-methylethyl- (p -Isopropylphenyl) ketone, 1-hydroxy-1- (p-dodecylphenyl) ketone, 2-methyl-1- (4- (methylthio) phenyl) -2-morpholino-1-propanone, 1,1,1-trichloro Acetophenone derivatives such as methyl- (p-butylphenyl) ketone;
Thioxanthone derivatives such as thioxanthone, 2-ethylthioxanthone, 2-isopropylthioxanthone, 2-chlorothioxanthone, 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2,4-diisopropylthioxanthone;
benzoic acid ester derivatives such as ethyl p-dimethylaminobenzoate and ethyl p-diethylaminobenzoate;
Acridine derivatives such as 9-phenylacridine, 9- (p-methoxyphenyl) acridine;
Phenazine derivatives such as 9,10-dimethylbenzphenazine;
Anthrone derivatives such as benzanthrone;
Di-cyclopentadienyl Ti-di-chloride, di-cyclopentadienyl Ti-bis-phenyl, di-cyclopentadienyl Ti-bis-2,3,4,5,6-pentafluorophenyl-1- , Di-cyclopentadienyl Ti-bis-2,3,5,6-tetrafluorophenyl-1-yl, di-cyclopentadienyl Ti-bis-2,4,6-trifluorophen-1- Yl, di-cyclopentadienyl Ti-2,6-dipuruolophen-1-yl, di-cyclopentadienyl Ti-2,4-di-fluorophen-1-yl, di-methylcyclopentadi Enyl Ti-bis-2,3,4,5,6-pentafluorophen-1-yl, di-methylcyclopentadienyl Ti-bis-2,6-di-fluorophen-1-yl, di-cyclo Ntajieniru Ti-2,6-di - fluoro-3- (pill-1-yl) - titanocene derivatives of 1-yl and the like;
2-Methyl-1 [4- (methylthio) phenyl] -2-morpholinopropan-1-one, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1,2-benzyl 2-dimethylamino-1- (4-morpholinophenyl) butan-1-one, 4-dimethylaminoethylbenzoate, 4-dimethylaminoisoamylbenzoate, 4-diethylaminoacetophenone, 4-dimethylamino Propiophenone, 2-ethylhexyl-1,4-dimethylaminobenzoate, 2,5-bis (4-diethylaminobenzal) cyclohexanone, 7-diethylamino-3- (4-diethylaminobenzoyl) coumarin, 4- (diethylamino) chalcone Α-aminoalkylphenone compounds such as
1,2-octanedione, 1- [4- (phenylthio) phenyl] -2- (O-benzoyloxime), ethanone, 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazole-3 And oxime ester compounds such as -yl] -1- (O-acetyloxime). In particular, acetophenone and oxime ester compounds are preferred in terms of sensitivity.
光重合開始剤(I)の使用量は、感光性組成物の固形分の合計100重量%中、0.01〜10重量%が好ましく、さらに好ましくは0.05〜7重量%、特に好ましくは0.1〜5重量%である。0.01重量%未満であると光硬化反応性が悪く重合が進行しない場合があり、10重量%を超える量を用いると開始剤の黄変の影響より透明性の悪化が起きる場合がある。 The amount of the photopolymerization initiator (I) used is preferably from 0.01 to 10% by weight, more preferably from 0.05 to 7% by weight, particularly preferably from 100% by weight of the total solid content of the photosensitive composition. 0.1 to 5% by weight. If it is less than 0.01% by weight, the photocuring reactivity may be poor and polymerization may not proceed, and if it exceeds 10% by weight, transparency may be deteriorated due to the yellowing of the initiator.
次に熱重合開始剤(J)について説明する。熱重合開始剤(J)は公知のものであれば、特に限定されないが、10時間半減期温度が100℃〜250℃の範囲の化合物が好ましい。さらに好ましくは、110℃〜180℃の範囲の化合物がより好ましい。10時間半減期温度が100℃未満であると保存安定性が悪化する場合があり、250℃を超えると熱硬化時に効率よくラジカルが発生せずに硬化が進行しない場合がある。 Next, the thermal polymerization initiator (J) will be described. The thermal polymerization initiator (J) is not particularly limited as long as it is a known one, but a compound having a 10-hour half-life temperature in the range of 100 ° C to 250 ° C is preferable. More preferably, a compound in the range of 110 ° C to 180 ° C is more preferable. When the 10-hour half-life temperature is less than 100 ° C., the storage stability may be deteriorated, and when it exceeds 250 ° C., radicals are not efficiently generated at the time of thermal curing, and curing may not proceed.
10時間半減期温度100℃以上で250℃未満の熱重合開始剤(J)としては、次の化合物が挙げられる。t−ブチルパーオキシアセテート(半減期温度102℃)、2,2−ジ−(t−ブチルパーオキシ)ブタン(半減期温度103℃)、t−ブチルパーオキシベンゾエート(半減期温度104℃)、n−ブチル4,4−ジ−(t−ブチルパーオキシ)バレレート(半減期温度105℃)、ジ−(2−t−ブチルパーオキシイソプロピル)ベンゼン(半減期温度119℃)、ジクミルパーオキサイド(半減期温度116℃)、ジ−t−ヘキシルパーオキサイド(半減期温度116℃)、2,5,−ジメチル−2,5,−ジ(t−ブチルパーオキシ)ヘキサン(半減期温度118℃)、t−ブチルクミルパーオキサイド(半減期温度120℃)、ジ−t−ブチルパーオキサイド(半減期温度124℃)、ジイソプロピルベンゼンハイドロパーオキサイド(半減期温度145℃)、1,1,3,3,−テトラメチルブチルハイドロパーオキサイド(半減期温度153℃)、クメンハイドロパーオキサイド(半減期温度158℃)、t−ブチルハイドロパーオキサイド(半減期温度167℃)、t−ブチルトリメチルシリルパーオキサイド(半減期温度176℃)等のパーオキサイド系重合開始剤;
1−[(1−シアノ−1−メチルエチル)アゾ]ホルムアミド(半減期温度104℃)、2,2’−アゾビス(N−ブチル−2−メチルプロピオンアミド)(半減期温度110℃)、2,2’−アゾビス(N−シクロヘキシル−2−メチルプロピオンアミド)(半減期温度111℃)、2,2’−アゾビス(2,4,4−トリメチルペンタン)(半減期温度110℃)等のアゾ系重合開始剤;
その他、2,3−ジメチル−2,3−ジフェニルブタン(半減期温度210℃)等が挙げられる。
Examples of the thermal polymerization initiator (J) having a 10-hour half-life temperature of 100 ° C. or higher and lower than 250 ° C. include the following compounds. t-butyl peroxyacetate (half-life temperature 102 ° C.), 2,2-di- (t-butylperoxy) butane (half-life temperature 103 ° C.), t-butyl peroxybenzoate (half-life temperature 104 ° C.), n-butyl 4,4-di- (t-butylperoxy) valerate (half-life temperature 105 ° C.), di- (2-t-butylperoxyisopropyl) benzene (half-life temperature 119 ° C.), dicumyl peroxide (Half-life temperature 116 ° C), di-t-hexyl peroxide (half-life temperature 116 ° C), 2,5, -dimethyl-2,5-di (t-butylperoxy) hexane (half-life temperature 118 ° C) ), T-butylcumyl peroxide (half-life temperature 120 ° C.), di-t-butyl peroxide (half-life temperature 124 ° C.), diisopropylbenzene hydroperoxide (Half-life temperature 145 ° C.), 1,1,3,3-tetramethylbutyl hydroperoxide (half-life temperature 153 ° C.), cumene hydroperoxide (half-life temperature 158 ° C.), t-butyl hydroperoxide Peroxide polymerization initiators such as (half-life temperature of 167 ° C.), t-butyltrimethylsilyl peroxide (half-life temperature of 176 ° C.);
1-[(1-cyano-1-methylethyl) azo] formamide (half-life temperature 104 ° C.), 2,2′-azobis (N-butyl-2-methylpropionamide) (half-life temperature 110 ° C.), 2 , 2′-azobis (N-cyclohexyl-2-methylpropionamide) (half-life temperature 111 ° C.), 2,2′-azobis (2,4,4-trimethylpentane) (half-life temperature 110 ° C.), etc. Polymerization initiators;
In addition, 2,3-dimethyl-2,3-diphenylbutane (half-life temperature 210 ° C.) and the like can be mentioned.
熱重合開始剤(J)の使用量は、感光性組成物の固形分の合計100重量%中、0.01〜10重量%が好ましく、さらに好ましくは0.05〜7重量%、特に好ましくは0.1〜5重量%である。0.01重量%未満であると熱硬化反応性が悪く重合が進行しない場合があり、10重量%を超える量を用いると感光性組成物から得られる膜およびパターンの分子量の低下による耐熱性の悪化が起きる場合がある。 The amount of the thermal polymerization initiator (J) used is preferably from 0.01 to 10% by weight, more preferably from 0.05 to 7% by weight, particularly preferably from 100% by weight of the total solid content of the photosensitive composition. 0.1 to 5% by weight. When the amount is less than 0.01% by weight, the thermosetting reactivity is poor and the polymerization may not proceed. When the amount exceeds 10% by weight, the heat resistance of the film and pattern obtained from the photosensitive composition is reduced due to a decrease in the molecular weight. Deterioration may occur.
本発明の感光性組成物には以下に示す添加剤を用いることができる。例えば、レベリング剤等の界面活性剤、シランカップリング剤、酸化防止剤、耐光安定剤、耐熱安定剤等を必要に応じて添加することができる。 The following additives can be used in the photosensitive composition of the present invention. For example, a surfactant such as a leveling agent, a silane coupling agent, an antioxidant, a light resistance stabilizer, a heat resistance stabilizer and the like can be added as necessary.
また、本発明の感光性組成物は、形成されるカラーフィルタ保護膜、層間絶縁膜、フォトスペーサー等の厚さとして0.005〜30μmとするのが好ましく、0.01〜20μmとするのがより好ましく、0.1〜10μmとするのが特に好ましい。カラーフィルタ保護膜、層間絶縁膜、フォトスペーサー等の厚さをこのような範囲とすることにより、適度な機械的強度や耐熱性が得られるとともに、光の透過率を損なうおそれが少ない。 In the photosensitive composition of the present invention, the thickness of the formed color filter protective film, interlayer insulating film, photospacer, etc. is preferably 0.005 to 30 μm, and 0.01 to 20 μm. More preferably, the thickness is 0.1 to 10 μm. By setting the thicknesses of the color filter protective film, the interlayer insulating film, the photospacer, and the like in such ranges, an appropriate mechanical strength and heat resistance can be obtained, and there is little possibility of impairing the light transmittance.
また、本発明の感光性組成物をガラス基板等に塗布する方法は特に限定されるものでなく、例えば、浸漬法、スプレー法、ロールコート法、回転塗布法等が使用可能であり、その他、スクリーン印刷法、オフセット印刷法、グラビア印刷法等の印刷法によっても塗布可能である。 In addition, the method for applying the photosensitive composition of the present invention to a glass substrate or the like is not particularly limited, and for example, an immersion method, a spray method, a roll coating method, a spin coating method, and the like can be used. It can also be applied by printing methods such as screen printing, offset printing, and gravure printing.
さらに、本発明の感光性組成物をガラス基板等に塗布した後の乾燥方法についても、特に制限されるものではないが、例えば、オーブンや赤外線加熱機等を使用することが可能である。そして、その加熱条件も、感光性組成物に使用する各構成成分の種類や、添加量(配合量)等によって変えることができるものの、通常、温度が50〜300℃の範囲で、0.1〜10時間の条件で加熱硬化するのが好ましく、より好ましくは、温度が100〜250℃の範囲で、0.5〜5.0時間の加熱硬化条件である。 Further, the drying method after applying the photosensitive composition of the present invention to a glass substrate or the like is not particularly limited, but for example, an oven or an infrared heater can be used. And although the heating conditions can also be changed depending on the kind of each component used in the photosensitive composition, the addition amount (blending amount), etc., the temperature is usually in the range of 50 to 300 ° C. Heat curing is preferably performed under a condition of 10 to 10 hours, and more preferably a temperature of 100 to 250 ° C. and a heat curing condition of 0.5 to 5.0 hours.
光硬化方法についても、特に制限されるものではないが、例えば、光源として高圧水銀灯やメタルハライド灯等を使用して紫外線を照射することが可能である。そして、その照射条件も、感光性組成物に使用する各構成成分の種類や、添加量(配合量)等によって変えることができるものの、通常、紫外線の照射量は、10〜500mJ/cm2が好ましく、より好ましくは20〜300mJ/cm2である。光硬化後、さらに加熱することにより熱硬化させてもよい。 The photocuring method is not particularly limited. For example, it is possible to irradiate ultraviolet rays using a high pressure mercury lamp, a metal halide lamp or the like as a light source. And although the irradiation conditions can also be changed according to the kind of each component used in the photosensitive composition, the addition amount (blending amount), etc., the irradiation amount of ultraviolet rays is usually 10 to 500 mJ / cm 2. More preferably, it is 20-300 mJ / cm < 2 >. After photocuring, it may be thermally cured by further heating.
光硬化後に行う熱硬化に関しては、感光性組成物に使用する各構成成分の種類や、添加量(配合量)等によって変えることができるものの、アクリル系硬化性樹脂(A)中のカルボン酸とエポキシ化合物(B)中のエポキシ基とが架橋反応する温度が好ましく、温度が50〜300℃の範囲で、0.1〜10時間の条件で加熱硬化するのが好ましく、より好ましくは、温度が100〜250℃の範囲で、0.5〜5.0時間、さらに好ましくは150〜250℃の範囲で0.5〜2時間の加熱硬化条件である。 Regarding the thermosetting performed after photocuring, the carboxylic acid in the acrylic curable resin (A) can be changed depending on the kind of each component used in the photosensitive composition, the addition amount (blending amount), and the like. The temperature at which the epoxy group in the epoxy compound (B) undergoes a crosslinking reaction is preferred, and the temperature is preferably in the range of 50 to 300 ° C., and is preferably heat-cured under the conditions of 0.1 to 10 hours, more preferably The heat curing conditions are in the range of 100 to 250 ° C for 0.5 to 5.0 hours, more preferably in the range of 150 to 250 ° C for 0.5 to 2 hours.
本発明の感光性組成物を使用することにより、液晶パネルやタッチパネル、特にタッチパネル用の層間絶縁膜およびフォトスペーサーとして、耐熱性、透明性、基材密着性、絶縁性に優れた塗膜を得ることができる。また、ブラックマトリックス、RGB着色層、透明電極、シール剤、および配向膜との密着性に優れた保護膜を有するカラーフィルタを得ることができる。 By using the photosensitive composition of the present invention, a coating film excellent in heat resistance, transparency, substrate adhesion, and insulation is obtained as an interlayer insulating film and a photospacer for liquid crystal panels and touch panels, particularly touch panels. be able to. In addition, a color filter having a protective film excellent in adhesion to the black matrix, the RGB colored layer, the transparent electrode, the sealant, and the alignment film can be obtained.
本発明の感光性組成物は、タッチパネル用絶縁膜、フォトスペーサー、カラーフィルタ保護膜用途だけでなく、光学ハードコート、ソルダーレジスト、各種コーティング、UVインキ、感光性平版印刷版等に使用することができる。 The photosensitive composition of the present invention can be used not only for insulating films for touch panels, photo spacers and color filter protective films, but also for optical hard coats, solder resists, various coatings, UV inks, photosensitive lithographic printing plates and the like. it can.
以下に、実施例により、本発明をさらに具体的に説明するが、以下の実施例は本発明の権利範囲を何ら制限するものではない。なお、実施例における「部」は「重量部」を、「%」は「重量%」を表す。 The present invention will be described more specifically with reference to the following examples. However, the following examples do not limit the scope of rights of the present invention. In the examples, “part” represents “part by weight” and “%” represents “% by weight”.
[製造例1]
ガス導入管、コンデンサー、攪拌翼、および温度計を備え付けた反応槽に、メトキシプロピルアセテート100部を仕込み90℃に昇温し、反応容器内を窒素置換した後、滴下槽から、メチルメタクリレート62部、メタクリル酸21部、スチレン17部、およびジメチル2,2’−アゾビス(2−メチルプロピオネート)13部を予め均一に混合した混合液を2時間かけて滴下し、その後3時間、同じ温度で攪拌を続けカルボキシル基含有重合体を得た。続いて、反応容器内に乾燥空気を導入し、グリシジルメタクリレート20部、メトキシプロピルアセテート20部、ジメチルベンジルアミン1部、メトキノン0.1部を仕込み、その後10時間、同じ温度で攪拌を続け、アクリル系硬化性樹脂を得た。ここでグリシジルメタクリレートの反応率は、反応前後のポリマーの酸価の変化から求めたところ99%であった。室温に冷却後、メトキシプロピルアセテートで希釈することにより、固形分30%のアクリル系硬化性樹脂溶液P−1を得た。
[Production Example 1]
A reaction vessel equipped with a gas introduction tube, a condenser, a stirring blade, and a thermometer was charged with 100 parts of methoxypropyl acetate, heated to 90 ° C., and the inside of the reaction vessel was purged with nitrogen. , 21 parts of methacrylic acid, 17 parts of styrene and 13 parts of dimethyl 2,2′-azobis (2-methylpropionate) were added dropwise over 2 hours, and then the same temperature for 3 hours. And stirring was continued to obtain a carboxyl group-containing polymer. Subsequently, dry air was introduced into the reaction vessel, charged with 20 parts of glycidyl methacrylate, 20 parts of methoxypropyl acetate, 1 part of dimethylbenzylamine, and 0.1 part of methoquinone, and then stirred at the same temperature for 10 hours. A system curable resin was obtained. Here, the reaction rate of glycidyl methacrylate was 99% as determined from the change in the acid value of the polymer before and after the reaction. After cooling to room temperature, an acrylic curable resin solution P-1 having a solid content of 30% was obtained by dilution with methoxypropyl acetate.
[製造例2、3、5、13、14、16、17、19、20]
表1に示す組成で、製造例1と同様に合成し、固形分30%のアクリル系硬化性樹脂溶液P−2、P−3、P−5、P−13、P−14、P−16、P−17、P−19、P−20を得た。なお、製造例13(P−13)、製造例16(P−16)、製造例17(P−17)、製造例20(P−20)では、エチレン性不飽和基を付与する変性は行っていない。
[Production Examples 2, 3, 5, 13, 14, 16, 17, 19, 20]
The composition shown in Table 1 was synthesized in the same manner as in Production Example 1, and the acrylic curable resin solution P-2, P-3, P-5, P-13, P-14, P-16 having a solid content of 30%. , P-17, P-19 and P-20 were obtained. In Production Example 13 (P-13), Production Example 16 (P-16), Production Example 17 (P-17), and Production Example 20 (P-20), modification to give an ethylenically unsaturated group was performed. Not.
[製造例4]
ガス導入管、コンデンサー、攪拌翼、および温度計を備え付けた反応槽に、メトキシプロピルアセテート100部を仕込み90℃に昇温し、反応容器内を窒素置換した後、滴下槽から、メチルメタクリレート43部、メタクリル酸6部、2−メタクリロイルオキシ−γ−ブチロラクトン25部、2−ヒドロキシエチルメタクリレート26部およびジメチル2,2’−アゾビス(2−メチルプロピオネート)4部を予め均一に混合した混合液を2時間かけて滴下し、その後3時間、同じ温度で攪拌を続けカルボキシル基含有重合体を得た。続いて、反応容器の温度を70℃に冷却し、さらに反応容器内に乾燥空気を導入し、2−メタクリロイルオキシエチルイソシアネート25部、メトキシプロピルアセテート25部、ジブチル錫ジラウレート0.1部、メトキノン0.1部を仕込み、その後10時間、同じ温度で攪拌を続け、アクリル系硬化性樹脂を得た。ここでIRスペクトルにより水酸基とイソシアネート基との反応が完了していることを確認した。室温に冷却後、メトキシプロピルアセテートで希釈することにより、固形分30%のアクリル系硬化性樹脂溶液P−4を得た。
[Production Example 4]
A reaction vessel equipped with a gas introduction tube, a condenser, a stirring blade, and a thermometer was charged with 100 parts of methoxypropyl acetate, heated to 90 ° C., and the inside of the reaction vessel was purged with nitrogen. , 6 parts of methacrylic acid, 25 parts of 2-methacryloyloxy-γ-butyrolactone, 26 parts of 2-hydroxyethyl methacrylate and 4 parts of dimethyl 2,2′-azobis (2-methylpropionate) were previously mixed uniformly. Was added dropwise over 2 hours, followed by stirring at the same temperature for 3 hours to obtain a carboxyl group-containing polymer. Subsequently, the temperature of the reaction vessel is cooled to 70 ° C., and dry air is further introduced into the reaction vessel. 25 parts of 2-methacryloyloxyethyl isocyanate, 25 parts of methoxypropyl acetate, 0.1 part of dibutyltin dilaurate, 0.1 part of methoquinone .1 part was charged, and then stirring was continued at the same temperature for 10 hours to obtain an acrylic curable resin. Here, it was confirmed by the IR spectrum that the reaction between the hydroxyl group and the isocyanate group was completed. After cooling to room temperature, it was diluted with methoxypropyl acetate to obtain an acrylic curable resin solution P-4 having a solid content of 30%.
[製造例9、15、18]
表1に示す組成で、製造例4と同様に合成し、固形分30%のアクリル系硬化性樹脂溶液P−9、P−15、P−18を得た。なお、製造例15では、中間体として得られる重合体はカルボキシル基を含有していない。
[Production Examples 9, 15, 18]
The compositions shown in Table 1 were synthesized in the same manner as in Production Example 4 to obtain acrylic curable resin solutions P-9, P-15, and P-18 having a solid content of 30%. In Production Example 15, the polymer obtained as an intermediate does not contain a carboxyl group.
[製造例6]
ガス導入管、コンデンサー、攪拌翼、および温度計を備え付けた反応槽に、メトキシプロピルアセテート100部を仕込み90℃に昇温し、反応容器内を窒素置換した後、滴下槽から、メチルメタクリレート20部、エチルアクリレート30部、アクリル酸37部、PME−400を8部、トリシクロ−(5,2,1,0,2.6)−デカニル(メタ)アクリレート5部およびジメチル2,2’−アゾビス(2−メチルプロピオネート)9部を予め均一に混合した混合液を2時間かけて滴下し、その後3時間、同じ温度で攪拌を続けカルボキシル基含有重合体を得た。続いて、反応容器内に乾燥空気を導入し、グリシジルメタクリレート58部、メトキシプロピルアセテート77部、ジメチルベンジルアミン1部、メトキノン0.1部を仕込み、その後10時間、同じ温度で攪拌を続け、水酸基含有重合体を得た。ここでグリシジルメタクリレートの反応率は、反応前後のポリマーの酸価の変化から求めたところ99%であった。さらに、テトラヒドロ無水フタル酸19部を仕込み、その後10時間、同じ温度で攪拌を続け、アクリル系硬化性樹脂を得た。ここでIRスペクトルにより水酸基と酸無水物の反応が完了していることを確認した。室温に冷却後、メトキシプロピルアセテートで希釈することにより、固形分30%のアクリル系硬化性樹脂溶液P−6を得た。
[Production Example 6]
A reaction vessel equipped with a gas introduction tube, a condenser, a stirring blade, and a thermometer was charged with 100 parts of methoxypropyl acetate, heated to 90 ° C., and the inside of the reaction vessel was purged with nitrogen. 30 parts of ethyl acrylate, 37 parts of acrylic acid, 8 parts of PME-400, 5 parts of tricyclo- (5,2,1,0,2.6) -decanyl (meth) acrylate and dimethyl 2,2′-azobis ( A mixed liquid in which 9 parts of 2-methylpropionate) were uniformly mixed in advance was dropped over 2 hours, and then stirred at the same temperature for 3 hours to obtain a carboxyl group-containing polymer. Subsequently, dry air was introduced into the reaction vessel, charged with 58 parts of glycidyl methacrylate, 77 parts of methoxypropyl acetate, 1 part of dimethylbenzylamine and 0.1 part of methoquinone, and then continued stirring at the same temperature for 10 hours. A containing polymer was obtained. Here, the reaction rate of glycidyl methacrylate was 99% as determined from the change in the acid value of the polymer before and after the reaction. Further, 19 parts of tetrahydrophthalic anhydride was charged, and stirring was continued at the same temperature for 10 hours to obtain an acrylic curable resin. Here, it was confirmed by the IR spectrum that the reaction between the hydroxyl group and the acid anhydride was completed. After cooling to room temperature, it was diluted with methoxypropyl acetate to obtain an acrylic curable resin solution P-6 having a solid content of 30%.
[製造例7、8]
表1に示す組成で、製造例6と同様に合成し、固形分30%のアクリル系硬化性樹脂溶液P−7、P−8得た。
[Production Examples 7 and 8]
The compositions shown in Table 1 were synthesized in the same manner as in Production Example 6 to obtain acrylic curable resin solutions P-7 and P-8 having a solid content of 30%.
[製造例10]
ガス導入管、コンデンサー、攪拌翼、および温度計を備え付けた反応槽に、メトキシプロピルアセテート100部を仕込み90℃に昇温し、反応容器内を窒素置換した後、滴下槽から、メチルメタクリレート30部、エチルアクリレート30部、グリシジルメタクリレート23部、トリシクロ−(5,2,1,0,2.6)−デカニルメタアクリレート7部、2−メタクリロイルオキシ−γ−ブチロラクトン10部およびジメチル2,2’−アゾビス(2−メチルプロピオネート)7部を予め均一に混合した混合液を2時間かけて滴下し、その後3時間、同じ温度で攪拌を続けエポキシ基含有重合体を得た。続いて、反応容器内に乾燥空気を導入し、アクリル酸12部、メトキシプロピルアセテート28部、ジメチルベンジルアミン1部、メトキノン0.1部を仕込み、その後10時間、同じ温度で攪拌を続け、水酸基含有重合体を得た。ここでアクリル酸の反応率は、反応前後のポリマーのエポキシ価の変化から求めたところ99%であった。さらに、無水コハク酸16部を仕込み、その後10時間、同じ温度で攪拌を続け、アクリル系硬化性樹脂を得た。ここでIRスペクトルにより水酸基と酸無水物の反応が完了していることを確認した。室温に冷却後、メトキシプロピルアセテートで希釈することにより、固形分30%のアクリル系硬化性樹脂溶液P−10を得た。
[Production Example 10]
A reaction vessel equipped with a gas introduction tube, a condenser, a stirring blade, and a thermometer was charged with 100 parts of methoxypropyl acetate, heated to 90 ° C., the inside of the reaction vessel was purged with nitrogen, and then 30 parts of methyl methacrylate from the dropping tank. 30 parts of ethyl acrylate, 23 parts of glycidyl methacrylate, 7 parts of tricyclo- (5,2,1,0,2.6) -decanyl methacrylate, 10 parts of 2-methacryloyloxy-γ-butyrolactone and dimethyl 2,2 ′ -A mixed solution in which 7 parts of azobis (2-methylpropionate) was uniformly mixed in advance was added dropwise over 2 hours, followed by stirring at the same temperature for 3 hours to obtain an epoxy group-containing polymer. Subsequently, dry air was introduced into the reaction vessel, charged with 12 parts of acrylic acid, 28 parts of methoxypropyl acetate, 1 part of dimethylbenzylamine and 0.1 part of methoquinone, and then stirred at the same temperature for 10 hours. A containing polymer was obtained. Here, the reaction rate of acrylic acid was 99% as determined from the change in the epoxy value of the polymer before and after the reaction. Furthermore, 16 parts of succinic anhydride was charged, and then stirring was continued at the same temperature for 10 hours to obtain an acrylic curable resin. Here, it was confirmed by the IR spectrum that the reaction between the hydroxyl group and the acid anhydride was completed. After cooling to room temperature, it was diluted with methoxypropyl acetate to obtain an acrylic curable resin solution P-10 having a solid content of 30%.
[製造例11、12]
表1に示す組成で、製造例10と同様に合成し、固形分30%のアクリル系硬化性樹脂溶液P−11、P−12得た。
[Production Examples 11 and 12]
The compositions shown in Table 1 were synthesized in the same manner as in Production Example 10 to obtain acrylic curable resin solutions P-11 and P-12 having a solid content of 30%.
MMA:メチルメタクリレート
EA:エチルアクリレート
n−BMA:n−ブチルメタクリレート
GMA:グリシジルメタクリレート
M−100:3,4−エポキシシクロヘキシルメチルメタアクリレート(ダイセル化学工業社製)
VBGE:p−ビニルベンジルグリシジルエーテル
2MTA:2−メトキシエチルアクリレート(大阪有機化学工業社製)
PME−400:メトキシポリエチレングリコールモノメタクリレート(日本油脂株式会社製)
FA513M:トリシクロ−(5,2,1,0,2.6)−デカニル(メタ)アクリレート(日立化成工業社製)
GBLMA:2−メタクリロイルオキシ−γ−ブチロラクトン(大阪有機化学工業社製)
HEMA:2−ヒドロキシエチルメタクリレート
HMA:ヘキシルメタクリレート
CHMA:シクロヘキシルメタクリレート
LMA:ラウリルメタクリレート
BzMA:ベンジルメタクリレート
AMA:アリルメタクリレート
V−601:ジメチル2,2’−アゾビス(2−メチルプロピオネート)(和光純薬工業株式会社製)
V−65:2,2’−アゾビス(2,4−ジメチルバレロニトリル)(和光純薬工業株式会社製)
AIBN:N,N−アゾビスイソブチロニトリル
PGMAc:メトキシプロピルアセテート(ダイセル化学社製)
HPE:3−ヒドロキシプロピオン酸エチル
4HBAGE:4−ヒドロキシブチルアクリレートグリシジルエーテル(日本化成株式会社製)
MOI:2−メタクリロイルオキシエチルイソシアネート(昭和電工株式会社製)
AOI:2−アクリロイルオキシエチルイソシアネート(昭和電工株式会社製)
THPA:テトラヒドロ無水フタル酸
SA:無水コハク酸
DMBA:ジメチルベンジルアミン
DBTDL:ジブチル錫ジラウリレート
TEBAC:トリエチルベンジルアンモニウムクロライド
IPA:イソプロピルアルコール
MMA: methyl methacrylate EA: ethyl acrylate n-BMA: n-butyl methacrylate GMA: glycidyl methacrylate M-100: 3,4-epoxycyclohexylmethyl methacrylate (manufactured by Daicel Chemical Industries)
VBGE: p-vinylbenzyl glycidyl ether 2MTA: 2-methoxyethyl acrylate (manufactured by Osaka Organic Chemical Industry Co., Ltd.)
PME-400: Methoxypolyethylene glycol monomethacrylate (manufactured by NOF Corporation)
FA513M: Tricyclo- (5,2,1,0,2.6) -decanyl (meth) acrylate (manufactured by Hitachi Chemical Co., Ltd.)
GBLMA: 2-methacryloyloxy-γ-butyrolactone (manufactured by Osaka Organic Chemical Industry Co., Ltd.)
HEMA: 2-hydroxyethyl methacrylate HMA: hexyl methacrylate CHMA: cyclohexyl methacrylate LMA: lauryl methacrylate BzMA: benzyl methacrylate AMA: allyl methacrylate V-601: dimethyl 2,2'-azobis (2-methylpropionate) (Wako Pure Chemical) Manufactured by Kogyo Corporation)
V-65: 2,2′-azobis (2,4-dimethylvaleronitrile) (manufactured by Wako Pure Chemical Industries, Ltd.)
AIBN: N, N-azobisisobutyronitrile PGMAc: methoxypropyl acetate (manufactured by Daicel Chemical Industries)
HPE: ethyl 3-hydroxypropionate 4HBAGE: 4-hydroxybutyl acrylate glycidyl ether (manufactured by Nippon Kasei Co., Ltd.)
MOI: 2-methacryloyloxyethyl isocyanate (made by Showa Denko KK)
AOI: 2-acryloyloxyethyl isocyanate (manufactured by Showa Denko KK)
THPA: Tetrahydrophthalic anhydride SA: Succinic anhydride DMBA: Dimethylbenzylamine DBTDL: Dibutyltin dilaurate TEBAC: Triethylbenzylammonium chloride IPA: Isopropyl alcohol
[実施例1〜16、比較例1〜12]
表2および表3に示す配合組成で、混合物を均一になるように攪拌混合した後、1μmのフィルタで濾過して、感光性樹脂組成物S−1〜S−16およびH−1〜H−12を得た。
[Examples 1 to 16, Comparative Examples 1 to 12]
In the blending compositions shown in Table 2 and Table 3, the mixture was stirred and mixed so as to be uniform, then filtered through a 1 μm filter, and photosensitive resin compositions S-1 to S-16 and H-1 to H- 12 was obtained.
XD−1000:ジシクロペンタジエン骨格含有エポキシ化合物(日本化薬社製)エポキシ当量250
EHPE3150:2,2−ビス(ヒドロキシメチル)−1−ブタノールの1,2−エポキシ−4−(2−オキシラニル)シクロセキサン付加物(ダイセル化学工業社製)エポキシ当量179
セロキサイド2021P:3,4−エポキシシクロヘキセニルメチル−3’4’−エポキシシクロヘキセンカルボキシレート(ダイセル化学工業社製)エポキシ当量145
EP−4088S:トリシクロデカニルジグリシジルエーテル(ADEKA製)エポキシ当量170
DPHA:ジペンタエリスリトールヘキサアクリレート
TMPTA:トリメチロールプロパントリアクリレート
Irg907:2−メチル−1−[4−(メチルチオ)フェニル]−2−モルフォリノプロパン−1−オン(チバ・ジャパン社製;製品名IRGACURE907)
Irg184:1−ヒドロキシ−シクロヘキシルフェニルケトン(チバ・ジャパン社製;製品名IRGACURE184)
OXE02:エタノン,1−[9−エチル−6−(2−メチルベンゾイル)−9H−カルバゾール−3−イル]−,1−(O−アセチルオキシム)(チバ・ジャパン社製;製品名IRGACURE OXE02)
VAm−111:2,2’−アゾビス(N−シクロヘキシル−2−メチルプロピオンアミド)(和光純薬工業株式会社製)
KBM403:3−グリシドキシプロピルトリメトキシシラン(信越化学工業社製)
PGMAc:メトキシプロピルアセテート(ダイセル化学社製)
CHXA:酢酸シクロヘキシル(ダイセル化学社製)
Irg369:2−ベンジル−2−ジメチルアミノ−1−(4−モルフォリノフェニル)−ブタン−1−オン(チバ・ジャパン社製;製品名IRGACURE 369)
α−AAF:α−アミノアセトフェノン
MIBK−ST:シリカゾルの30質量%メチルイソブチルケトン分散物(日産化学株式会社製)
YH434L:ビスフェノールFのグリシジルアミン化物(4官能エポキシ、東都化成株式会社製、エポキシ当量130)
NC7000L:ナフタレン骨格含有エポキシ化合物(日本化薬社製、エポキシ当量230)
EX411:ペンタエリスリトールテトラグリシジルエーテル(4官能エポキシ、ナガセケムテックス株式会社製、エポキシ当量229)
V−05:カルボジライトV−05(カルボジイミド硬化剤、日清紡社製、カルボジイミド当量262)
TMA:トリメリット酸無水物
2E4MI:2−エチル−4−メチルイミダゾール
HPE:3−ヒドロキシプロピオン酸エチル
EGE:エチレングリコールモノエチルエーテル
XD-1000: epoxy compound containing dicyclopentadiene skeleton (manufactured by Nippon Kayaku Co., Ltd.) epoxy equivalent 250
EHPE3150: 1,2-epoxy-4- (2-oxiranyl) cyclosoxane adduct of 2,2-bis (hydroxymethyl) -1-butanol (manufactured by Daicel Chemical Industries), epoxy equivalent 179
Celoxide 2021P: 3,4-epoxycyclohexenylmethyl-3′4′-epoxycyclohexenecarboxylate (manufactured by Daicel Chemical Industries) Epoxy equivalent 145
EP-4088S: tricyclodecanyl diglycidyl ether (manufactured by ADEKA) epoxy equivalent 170
DPHA: dipentaerythritol hexaacrylate TMPTA: trimethylolpropane triacrylate Irg907: 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropan-1-one (manufactured by Ciba Japan; product name IRGACURE907) )
Irg184: 1-hydroxy-cyclohexyl phenyl ketone (manufactured by Ciba Japan; product name IRGACURE184)
OXE02: Ethanone, 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazol-3-yl]-, 1- (O-acetyloxime) (manufactured by Ciba Japan; product name IRGACURE OXE02)
VAm-111: 2,2′-azobis (N-cyclohexyl-2-methylpropionamide) (manufactured by Wako Pure Chemical Industries, Ltd.)
KBM403: 3-glycidoxypropyltrimethoxysilane (manufactured by Shin-Etsu Chemical Co., Ltd.)
PGMAc: Methoxypropyl acetate (manufactured by Daicel Chemical Industries)
CHXA: cyclohexyl acetate (manufactured by Daicel Chemical Industries)
Irg369: 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butan-1-one (manufactured by Ciba Japan; product name IRGACURE 369)
α-AAF: α-aminoacetophenone MIBK-ST: Silica sol 30% by mass methyl isobutyl ketone dispersion (manufactured by Nissan Chemical Co., Ltd.)
YH434L: glycidyl aminated product of bisphenol F (tetrafunctional epoxy, manufactured by Tohto Kasei Co., Ltd., epoxy equivalent 130)
NC7000L: Naphthalene skeleton-containing epoxy compound (manufactured by Nippon Kayaku Co., Ltd., epoxy equivalent 230)
EX411: Pentaerythritol tetraglycidyl ether (tetrafunctional epoxy, manufactured by Nagase ChemteX Corporation, epoxy equivalent 229)
V-05: Carbodilite V-05 (carbodiimide curing agent, Nisshinbo Co., Ltd., carbodiimide equivalent 262)
TMA: trimellitic anhydride 2E4MI: 2-ethyl-4-methylimidazole HPE: ethyl 3-hydroxypropionate EGE: ethylene glycol monoethyl ether
実施例および比較例で得られた感光性組成物について、下記の方法でサンプル基板を作製し、現像性、透明性、硬度、絶縁性、基材密着性、平坦性、および保存安定性を評価した。 About the photosensitive composition obtained by the Example and the comparative example, a sample board | substrate is produced with the following method, and developability, transparency, hardness, insulation, base-material adhesiveness, flatness, and storage stability are evaluated. did.
<評価用サンプル基板の作製>
(インキの調製)
ε型銅フタロシアニン顔料(C.I.Pigment Blue 15:6)10.0部(BASF製「ヘリオゲンブルーL−6700F」)、フタロシアニン系顔料誘導体[下記式(5)]1.0部、アクリル樹脂溶液(メチルメタクリレート/n−ブチルメタクリレート/ベンジルメタクリレート/メタクリル酸=30/30/30/10(重量比)、Mw30,000、固形分50%のメトキシプロピルアセテート溶液)40.0部、メトキシプロピルアセテート48.0部の混合物を均一に撹拌混合した後、直径1mmのガラスビーズを用いて、サンドミルで5時間分散した後、5μmのフィルタで濾過し銅フタロシアニン分散体を作製した。
<Preparation of sample substrate for evaluation>
(Preparation of ink)
ε-type copper phthalocyanine pigment (CI Pigment Blue 15: 6) 10.0 parts (“Heliogen Blue L-6700F” manufactured by BASF), phthalocyanine pigment derivative [following formula (5)] 1.0 part, acrylic Resin solution (methyl methacrylate / n-butyl methacrylate / benzyl methacrylate / methacrylic acid = 30/30/30/10 (weight ratio), Mw 30,000, methoxypropyl acetate solution having a solid content of 50%) 40.0 parts, methoxypropyl A mixture of 48.0 parts of acetate was uniformly stirred and mixed, and then dispersed with a sand mill for 5 hours using glass beads having a diameter of 1 mm, and then filtered with a 5 μm filter to prepare a copper phthalocyanine dispersion.
式(5)
[Cu−pcは、銅フタロシアニン残基を示す。] [Cu-pc represents a copper phthalocyanine residue. ]
ついで、上記銅フタロシアニン分散体45.0部、上記アクリル樹脂溶液15.0部、トリメチロールプロパントリアクリレート5.6部(新中村化学社製「NKエステルATMPT」)、光重合開始剤(チバガイギー社製「イルガキュアー907」)2.0部、増感剤(保土ヶ谷化学社製「EAB−F」)0.2部、メトキシプロピルアセテート32.2部の混合物を均一になるように攪拌混合した後、1μmのフィルタで濾過して、青色着色組成物(インキB)を得た。 Subsequently, 45.0 parts of the copper phthalocyanine dispersion, 15.0 parts of the acrylic resin solution, 5.6 parts of trimethylolpropane triacrylate (“NK ester ATMPT” manufactured by Shin-Nakamura Chemical Co., Ltd.), photopolymerization initiator (Ciba Geigy) “Irgacure 907” manufactured by 2.0), 0.2 parts of a sensitizer (“EAB-F” manufactured by Hodogaya Chemical Co., Ltd.), and 32.2 parts of methoxypropyl acetate were stirred and mixed uniformly. It filtered with a 1 micrometer filter and obtained the blue coloring composition (ink B).
ε型銅フタロnシアニン顔料のかわりに、ジケトピロロピロール系顔料(C.I.Pigment Red 254)8.33部(チバガイギー社製「イルガフォーレッドB−CF」)、アントラキノン系顔料(C.I.Pigment Red 177)1.33部(チバガイギー社製「クロモフタールレッドA2B」)、アントラキノン系顔料(C.I.Pigment Yellow 199)0.34部(チバガイギー社製「クロモフタールエローGT−AD」)を、フタロシアニン系顔料誘導体のかわりに下記式(6)で表される化合物1.0部を用いた以外は、青色着色組成物(インキB)と同様にして、赤色着色組成物(インキR)を得た。 Instead of the ε-type copper phthalon-cyanine pigment, 8.33 parts of diketopyrrolopyrrole pigment (CI Pigment Red 254) (“Irgafour Red B-CF” manufactured by Ciba Geigy Co.), anthraquinone pigment (C.I. Pigment Red 177) 1.33 parts (Ciba Geigy "chromoftal red A2B"), anthraquinone pigment (CI Pigment Yellow 199) 0.34 parts (Ciba Geigy "chromoftal yellow GT-") AD ”) in the same manner as the blue colored composition (ink B) except that 1.0 part of the compound represented by the following formula (6) was used instead of the phthalocyanine pigment derivative. Ink R) was obtained.
式(6)
(密着性試験用基板の作製)
インキBを、10cm×10cm角のガラス基板上に、スピンコーターを用いて塗布した後、80℃のオーブン内にて5分乾燥させて膜厚1.5μmの塗膜を形成した。この基板を室温に冷却した後、高圧水銀ランプを用い、100mJ/cm2の露光量でフォトマスクを通して露光した。その後、この基板を25℃の5重量%炭酸ナトリウム水溶液からなる現像液に1分間浸漬して、現像を行い、純水で洗浄して風乾し、さらに240℃のオーブン内にて40分ベークを行った。このようにして作成した密着性試験用基板を基板Bとした。同様の方法でインキRを用いて作成した密着性試験用基板を基板Rとした。
(サンプル基板の作製)
感光性組成物S−1を、10cm×10cm角のガラス基板および基板Bおよび基板R上に、スピンコーターを用いて塗布した後、80℃のオーブン内にて5分乾燥させて膜厚2.0μmの塗膜を形成した。この基板を室温に冷却した後、高圧水銀ランプを用い、100mJ/cm2の露光量でフォトマスクを通して露光した。その後、この基板を25℃の5重量%炭酸ナトリウム水溶液からなる現像液に1分間浸漬して、現像を行い、純水で洗浄して風乾し、さらに240℃のオーブン内にて40分ベークを行うことにより、サンプル基板U−1を作製した。
(Preparation of adhesion test substrate)
Ink B was applied on a 10 cm × 10 cm square glass substrate using a spin coater, and then dried in an oven at 80 ° C. for 5 minutes to form a coating film having a thickness of 1.5 μm. The substrate was cooled to room temperature, and then exposed through a photomask using a high-pressure mercury lamp at an exposure amount of 100 mJ / cm 2 . Thereafter, the substrate is immersed in a developer composed of 5% by weight sodium carbonate aqueous solution at 25 ° C. for 1 minute, developed, washed with pure water and air-dried, and further baked in an oven at 240 ° C. for 40 minutes. went. The adhesion test substrate thus prepared was designated as substrate B. A substrate for adhesion test prepared using ink R in the same manner was used as substrate R.
(Production of sample substrate)
The photosensitive composition S-1 was applied on a 10 cm × 10 cm square glass substrate, the substrate B, and the substrate R using a spin coater, and then dried in an oven at 80 ° C. for 5 minutes to obtain a film thickness of 2. A 0 μm coating film was formed. The substrate was cooled to room temperature, and then exposed through a photomask using a high-pressure mercury lamp at an exposure amount of 100 mJ / cm 2 . Thereafter, the substrate is immersed in a developer composed of 5% by weight sodium carbonate aqueous solution at 25 ° C. for 1 minute, developed, washed with pure water and air-dried, and further baked in an oven at 240 ° C. for 40 minutes. By performing, the sample substrate U-1 was produced.
サンプル基板U−2〜U−28を、感光性樹脂組成物S−2〜S−16およびH−1〜H−12を用いる以外はサンプル基板U−1と同様にして作製した。 Sample substrates U-2 to U-28 were prepared in the same manner as the sample substrate U-1, except that the photosensitive resin compositions S-2 to S-16 and H-1 to H-12 were used.
<塗膜の評価>
(現像性評価)
感光性組成物を、10cm×10cm角のガラス基板上に、スピンコーターを用いて塗布した後、80℃のオーブン内にて5分乾燥させて膜厚2.0μmの塗膜を形成した。この基板を室温に冷却した後、高圧水銀ランプを用い、100mJ/cm2の露光量でフォトマスクを通して露光した。その後、この基板を25℃の5重量%炭酸ナトリウム水溶液からなる現像液に30秒、1分間それぞれ浸漬し、純水で洗浄して風乾した。このときの現像残渣の残り具合を観察した。現像液に30秒浸漬時に現像残渣が観察されなかったときを○、現像液に1分浸漬時に現像残渣が観察されなかったときを△、現像液に1分浸漬しても残渣が観察されたときを×とした。○および△が実用レベルである。
<Evaluation of coating film>
(Developability evaluation)
The photosensitive composition was applied on a 10 cm × 10 cm square glass substrate using a spin coater, and then dried in an oven at 80 ° C. for 5 minutes to form a coating film having a thickness of 2.0 μm. The substrate was cooled to room temperature, and then exposed through a photomask using a high-pressure mercury lamp at an exposure amount of 100 mJ / cm 2 . Thereafter, the substrate was immersed in a developer composed of a 5% by weight aqueous sodium carbonate solution at 25 ° C. for 30 seconds and 1 minute, washed with pure water, and air-dried. The remaining degree of the development residue at this time was observed. When the development residue was not observed when immersed in the developer for 30 seconds, when the development residue was not observed when immersed in the developer for 1 minute, Δ was observed even when immersed in the developer for 1 minute. Time was marked with x. ○ and Δ are practical levels.
(透明性評価)
サンプル基板U−1〜U−28(ガラス基板)の透過率を、分光光度計(日立社製「U−3310」)で測定した。実用的な要求物性を考慮し、波長400nmにおける透過率が95%以上のときを○、95%より小さいときを×と判定した。
(Transparency evaluation)
The transmittance of the sample substrates U-1 to U-28 (glass substrate) was measured with a spectrophotometer (“U-3310” manufactured by Hitachi, Ltd.). Considering practical required physical properties, a case where the transmittance at a wavelength of 400 nm was 95% or more was judged as ○, and a case where it was smaller than 95% was judged as ×.
(硬度評価)
JIS K5600に準拠し、鉛筆硬度試験機(テスター産業社製「クレメンス型引掻硬度試験機」)を用い、鉛筆の芯の硬さを種々変えて、荷重500gにてサンプル基板U1〜U−28(ガラス基板)上の塗膜を5回試験した。5回中、1回も傷がつかない、もしくは1回のみキズがつくときの芯の硬さを、その塗膜の鉛筆硬度とした。実用的な要求物性を考慮すると鉛筆硬度が2H以上のものが良好と判定した。
(Hardness evaluation)
In accordance with JIS K5600, using a pencil hardness tester ("Clemens-type scratch hardness tester" manufactured by Tester Sangyo Co., Ltd.), the hardness of the pencil core is changed variously, and the sample substrates U1 to U-28 are loaded at a load of 500 g. The coating on the (glass substrate) was tested 5 times. The hardness of the core when scratches were not scratched or scratched only once out of 5 times was defined as the pencil hardness of the coating film. Considering practical required physical properties, it was determined that a pencil hardness of 2H or higher was good.
(絶縁性評価)
サンプル基板U−1〜U−28(ガラス基板)について、体積抵抗値を、デジタル超高抵抗/微少電流計R8340A(第一化学社製、プローブURS、印加電圧5V)にて測定した。層間絶縁膜の実用的な要求物性を考慮し、表面抵抗値が1×1012〜3×1016Ω/□の範囲のものを絶縁性○、それ以下の範囲のサンプルについては、絶縁性×とした。
(Insulation evaluation)
About the sample board | substrates U-1 to U-28 (glass board | substrate), the volume resistance value was measured with the digital ultrahigh resistance / microammeter R8340A (Daiichi Kagaku company make, probe URS, applied voltage 5V). In consideration of practical required physical properties of the interlayer insulating film, those having a surface resistance in the range of 1 × 10 12 to 3 × 10 16 Ω / □ are insulative. It was.
(基材密着性評価)
JIS K5400に準拠し、サンプル基板U−1〜U−28(ガラス基板)上の塗膜について、1mm角の100個の碁盤目試験を実施して、セロハンテープにより、剥離状態を観察した。100個中の接着数(剥離されないで残った碁盤目の数)を数え、ガラス密着性の評価とした。実用的な要求物性を考慮し、90以上を○、80〜89を△、79以下を×と判定した。○および△が実用レベルである。
(Base material adhesion evaluation)
Based on JIS K5400, 100 cross-cut test of 1 mm square was implemented about the coating film on sample board | substrate U-1-U-28 (glass substrate), and the peeling state was observed with the cellophane tape. The adhesion number in 100 pieces (the number of grids remaining without being peeled) was counted to evaluate the glass adhesion. In consideration of practical required physical properties, 90 or more was judged as ◯, 80 to 89 as Δ, and 79 or less as x. ○ and Δ are practical levels.
また、サンプル基板U−1〜U−28(基板Bおよび基板R)についても上記ガラス基板上の塗膜と同様の方法で密着性の評価を行った。ただし、ここではインキBまたはインキRよりなる塗膜と感光性組成物よりなる塗膜との界面における剥離状態を観察した。 Further, the adhesion of the sample substrates U-1 to U-28 (substrate B and substrate R) was evaluated in the same manner as the coating film on the glass substrate. However, here, the peeled state at the interface between the coating film made of ink B or ink R and the coating film made of the photosensitive composition was observed.
(平坦性評価)
サンプル基板U−1〜U−28(ガラス基板)について、表面形状測定装置「Dektak150」(株式会社アルバック製)を用いて、測定長1,000μm、測定範囲1,000μm角、測定点数n=5で測定し、平均粗さを測定した。この値が40nm未満のとき、平坦性は○、40〜100nmの範囲のときは△、100nmを超えるときは×とした。○および△が実用レベルである。
(Flatness evaluation)
For the sample substrates U-1 to U-28 (glass substrates), using a surface shape measuring device “Dektak150” (manufactured by ULVAC, Inc.), the measurement length is 1,000 μm, the measurement range is 1,000 μm square, and the number of measurement points is n = 5. The average roughness was measured. When this value is less than 40 nm, the flatness is indicated by ◯, when it is in the range of 40 to 100 nm, Δ is indicated, and when it exceeds 100 nm, it is indicated by ×. ○ and Δ are practical levels.
(保存安定性)
保存安定性を評価するために、感光性組成物S−1〜S−16、H−1〜H−12の初期粘度および経時粘度をB型粘度計(25℃、回転速度100rpm)で測定した。初期粘度は、感光性組成物S1〜S16、H−1〜H−12を調液して1日室温で放置後に測定した。経時粘度は1週間50℃に放置後に測定を行った。(経時粘度−初期粘度)の値が、初期粘度に対して±10%以内の時は保存安定性が○、±10%の範囲外の時は×とした。
(Storage stability)
In order to evaluate the storage stability, the initial viscosity and time-lapse viscosity of the photosensitive compositions S-1 to S-16 and H-1 to H-12 were measured with a B-type viscometer (25 ° C., rotation speed 100 rpm). . The initial viscosity was measured after the photosensitive compositions S1 to S16 and H-1 to H-12 were prepared and allowed to stand at room temperature for 1 day. The viscosity with time was measured after leaving at 50 ° C. for 1 week. When the value of (aging viscosity−initial viscosity) is within ± 10% with respect to the initial viscosity, the storage stability was evaluated as “◯”, and when out of the range of ± 10%, it was evaluated as “X”.
評価結果を表4および表5に示す。 The evaluation results are shown in Table 4 and Table 5.
表4に示すように、実施例1〜16の感光性樹脂組成物は、現像性、透明性、硬度、絶縁性、基材密着性、平坦性、および保存安定性のいずれも良好であったのに対し、表5に示した比較例1〜12の感光性組成物は、現像性、透明性、硬度、絶縁性、基材密着性、平坦性、および保存安定性のいずれかが不良であり、全てが良好となるものは得られなかった。 As shown in Table 4, the photosensitive resin compositions of Examples 1 to 16 were good in all of developability, transparency, hardness, insulation, substrate adhesion, flatness, and storage stability. On the other hand, the photosensitive compositions of Comparative Examples 1 to 12 shown in Table 5 are poor in developability, transparency, hardness, insulation, substrate adhesion, flatness, and storage stability. There was nothing that was all good.
[実施例17]
(サンプル基板の作製)
実施例14で作製した感光性組成物S−14を、10cm×10cm角のガラス基板および基板Bおよび基板R上に、スピンコーターを用いて塗布した後、80℃のオーブン内にて5分乾燥させて膜厚2.0μmの塗膜を形成した。さらに240℃のオーブン内にて40分ベークを行うことにより、サンプル基板U−29を作製した。
[Example 17]
(Production of sample substrate)
The photosensitive composition S-14 produced in Example 14 was applied on a 10 cm × 10 cm square glass substrate, substrate B, and substrate R using a spin coater, and then dried in an oven at 80 ° C. for 5 minutes. Thus, a coating film having a thickness of 2.0 μm was formed. Further, a sample substrate U-29 was produced by baking in an oven at 240 ° C. for 40 minutes.
[実施例18、および比較例13]
サンプル基板U−30、U−31を、実施例15で作製した感光性組成物S−15および比較例4で作製したH−4を用いる以外は実施例17と同様にして作製した。
[Example 18 and Comparative Example 13]
Sample substrates U-30 and U-31 were produced in the same manner as in Example 17 except that the photosensitive composition S-15 produced in Example 15 and H-4 produced in Comparative Example 4 were used.
透明性、硬度、絶縁性、密着性、および平坦性の評価を上記方法で行い、その結果を表6に示す。 Transparency, hardness, insulation, adhesion, and flatness were evaluated by the above methods, and the results are shown in Table 6.
表6に示すように、実施例17、18の感光性組成物は、透明性、硬度、絶縁性、密着性が良好であり、さらには平坦性も良好であったのに対し、比較例13の感光性組成物は、硬度、密着性、および平坦性が不良であった。 As shown in Table 6, the photosensitive compositions of Examples 17 and 18 had good transparency, hardness, insulation and adhesion, and also had good flatness, whereas Comparative Example 13 This photosensitive composition had poor hardness, adhesion, and flatness.
Claims (17)
モノシクロ環を有するエポキシ化合物、ビシクロ環を有するエポキシ化合物、およびトリシクロ環を有するエポキシ化合物からなる群より選ばれる少なくとも1つのエポキシ化合物(B)、
エチレン性不飽和基を有する重合性化合物(C)、ならびに、
溶剤(D)を含んでなる感光性組成物。 An acrylic curable resin (A) having a linear or branched alkyl group having 1 to 4 carbon atoms, a carboxyl group, and an ethylenically unsaturated group;
At least one epoxy compound (B) selected from the group consisting of an epoxy compound having a monocyclo ring, an epoxy compound having a bicyclo ring, and an epoxy compound having a tricyclo ring,
A polymerizable compound (C) having an ethylenically unsaturated group, and
A photosensitive composition comprising a solvent (D).
一般式(1)
General formula (1)
一般式(2)
General formula (2)
該重合体(E)中のカルボキシル基に対してエポキシ基含有エチレン性不飽和単量体(F)中のエポキシ基を反応させてなる請求項1〜4いずれか記載の感光性組成物。 The acrylic curable resin (A) comprises an ethylenically unsaturated monomer (m1) having a linear or branched alkyl group having 1 to 4 carbon atoms and a carboxyl group-containing ethylenically unsaturated monomer (m2). ) And an ethylenically unsaturated monomer (M) to obtain a carboxyl group-containing polymer (E),
The photosensitive composition in any one of Claims 1-4 formed by making the epoxy group in an epoxy-group-containing ethylenically unsaturated monomer (F) react with the carboxyl group in this polymer (E).
該重合体(E)中のカルボキシル基に対してエポキシ基含有エチレン性不飽和単量体(F)中のエポキシ基を反応して水酸基含有重合体(G)を得た後に、
該重合体(G)中の水酸基に対して多塩基酸無水物(H)中の酸無水物基を反応してなる請求項1〜4いずれか記載の感光性組成物。 The acrylic curable resin (A) comprises an ethylenically unsaturated monomer (m1) having a linear or branched alkyl group having 1 to 4 carbon atoms and a carboxyl group-containing ethylenically unsaturated monomer (m2). ) And an ethylenically unsaturated monomer (M) to obtain a carboxyl group-containing polymer (E),
After reacting the epoxy group in the epoxy group-containing ethylenically unsaturated monomer (F) with the carboxyl group in the polymer (E) to obtain a hydroxyl group-containing polymer (G),
The photosensitive composition in any one of Claims 1-4 formed by making the acid anhydride group in a polybasic acid anhydride (H) react with the hydroxyl group in this polymer (G).
該重合体(P)中のエポキシ基に対してカルボキシル基含有エチレン性不飽和単量体(Q)中のカルボキシル基を反応して水酸基含有重合体(K)を得た後に、
該重合体(K)中の水酸基に対して多塩基酸無水物(H)中の酸無水物基を反応してなる請求項1〜4いずれか記載の感光性組成物。 The acrylic curable resin (A) is an ethylenically unsaturated monomer (m1) having a linear or branched alkyl group having 1 to 4 carbon atoms and an epoxy group-containing ethylenically unsaturated monomer (m3). ) To obtain an epoxy group-containing polymer (P) by copolymerizing an ethylenically unsaturated monomer (N) containing
After reacting the carboxyl group in the carboxyl group-containing ethylenically unsaturated monomer (Q) with the epoxy group in the polymer (P) to obtain a hydroxyl group-containing polymer (K),
The photosensitive composition in any one of Claims 1-4 formed by making the acid anhydride group in a polybasic acid anhydride (H) react with the hydroxyl group in this polymer (K).
一般式(3)
General formula (3)
一般式(4)
General formula (4)
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