JP2011043441A5 - - Google Patents

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Publication number
JP2011043441A5
JP2011043441A5 JP2009192503A JP2009192503A JP2011043441A5 JP 2011043441 A5 JP2011043441 A5 JP 2011043441A5 JP 2009192503 A JP2009192503 A JP 2009192503A JP 2009192503 A JP2009192503 A JP 2009192503A JP 2011043441 A5 JP2011043441 A5 JP 2011043441A5
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JP
Japan
Prior art keywords
probe
base portion
contact
beam portion
covers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009192503A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011043441A (ja
JP5386272B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2009192503A priority Critical patent/JP5386272B2/ja
Priority claimed from JP2009192503A external-priority patent/JP5386272B2/ja
Publication of JP2011043441A publication Critical patent/JP2011043441A/ja
Publication of JP2011043441A5 publication Critical patent/JP2011043441A5/ja
Application granted granted Critical
Publication of JP5386272B2 publication Critical patent/JP5386272B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2009192503A 2009-08-21 2009-08-21 プローブカード Active JP5386272B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009192503A JP5386272B2 (ja) 2009-08-21 2009-08-21 プローブカード

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009192503A JP5386272B2 (ja) 2009-08-21 2009-08-21 プローブカード

Publications (3)

Publication Number Publication Date
JP2011043441A JP2011043441A (ja) 2011-03-03
JP2011043441A5 true JP2011043441A5 (cg-RX-API-DMAC7.html) 2012-07-26
JP5386272B2 JP5386272B2 (ja) 2014-01-15

Family

ID=43830972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009192503A Active JP5386272B2 (ja) 2009-08-21 2009-08-21 プローブカード

Country Status (1)

Country Link
JP (1) JP5386272B2 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5777997B2 (ja) * 2011-03-07 2015-09-16 日本特殊陶業株式会社 電子部品検査装置用配線基板およびその製造方法
WO2022208708A1 (ja) * 2021-03-31 2022-10-06 日本電子材料株式会社 プローブカード

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007127481A (ja) * 2005-11-02 2007-05-24 Japan Electronic Materials Corp プローブカードの製作方法
JP5414158B2 (ja) * 2007-06-13 2014-02-12 日本電子材料株式会社 コンタクトプローブの製造方法

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