JP2011033624A5 - - Google Patents

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Publication number
JP2011033624A5
JP2011033624A5 JP2010169895A JP2010169895A JP2011033624A5 JP 2011033624 A5 JP2011033624 A5 JP 2011033624A5 JP 2010169895 A JP2010169895 A JP 2010169895A JP 2010169895 A JP2010169895 A JP 2010169895A JP 2011033624 A5 JP2011033624 A5 JP 2011033624A5
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JP
Japan
Prior art keywords
thickness
photodiode
carrier diffusion
dead layer
diffusion distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010169895A
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English (en)
Japanese (ja)
Other versions
JP2011033624A (ja
JP5639809B2 (ja
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Publication date
Priority claimed from US12/512,714 external-priority patent/US8409908B2/en
Application filed filed Critical
Publication of JP2011033624A publication Critical patent/JP2011033624A/ja
Publication of JP2011033624A5 publication Critical patent/JP2011033624A5/ja
Application granted granted Critical
Publication of JP5639809B2 publication Critical patent/JP5639809B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2010169895A 2009-07-30 2010-07-29 背面照射型フォトダイオードを製造する方法 Expired - Fee Related JP5639809B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/512,714 US8409908B2 (en) 2009-07-30 2009-07-30 Apparatus for reducing photodiode thermal gain coefficient and method of making same
US12/512,714 2009-07-30

Publications (3)

Publication Number Publication Date
JP2011033624A JP2011033624A (ja) 2011-02-17
JP2011033624A5 true JP2011033624A5 (OSRAM) 2013-08-22
JP5639809B2 JP5639809B2 (ja) 2014-12-10

Family

ID=43402907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010169895A Expired - Fee Related JP5639809B2 (ja) 2009-07-30 2010-07-29 背面照射型フォトダイオードを製造する方法

Country Status (3)

Country Link
US (2) US8409908B2 (OSRAM)
JP (1) JP5639809B2 (OSRAM)
DE (1) DE102010036752B4 (OSRAM)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6037405A (en) * 1995-12-25 2000-03-14 Sakata Inx Corp. Pigment dispersion and offset printing ink composition using the same
US8736008B2 (en) 2012-01-04 2014-05-27 General Electric Company Photodiode array and methods of fabrication
US9935152B2 (en) 2012-12-27 2018-04-03 General Electric Company X-ray detector having improved noise performance
US9285489B2 (en) 2013-08-29 2016-03-15 General Electric Company Organic x-ray detector assembly and method of manufacturing same
US9917133B2 (en) 2013-12-12 2018-03-13 General Electric Company Optoelectronic device with flexible substrate
EP3117204B1 (en) 2014-03-13 2021-06-16 General Electric Company Curved digital x-ray detector for weld inspection
JP6671839B2 (ja) * 2014-10-07 2020-03-25 キヤノン株式会社 放射線撮像装置及び撮像システム
JP6691783B2 (ja) * 2016-01-20 2020-05-13 キヤノンメディカルシステムズ株式会社 Ｘ線検出器及びｘ線ｃｔ装置
CN115589774B (zh) * 2022-12-08 2023-03-10 西安电子科技大学杭州研究院 一种光控电容型铁电存储器及其制备方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4686554A (en) * 1983-07-02 1987-08-11 Canon Kabushiki Kaisha Photoelectric converter
US5583352A (en) * 1994-04-29 1996-12-10 Eg&G Limited Low-noise, reach-through, avalanche photodiodes
US5808329A (en) * 1996-07-15 1998-09-15 Raytheon Company Low light level imager with extended wavelength response employing atomic bonded (fused) semiconductor materials
JP2001067565A (ja) * 1999-08-26 2001-03-16 Matsushita Electric Works Ltd 光電式煙感知器
US6677182B2 (en) * 2000-04-20 2004-01-13 Digirad Corporation Technique for suppression of edge current in semiconductor devices
US6670258B2 (en) * 2000-04-20 2003-12-30 Digirad Corporation Fabrication of low leakage-current backside illuminated photodiodes
WO2002027805A2 (en) * 2000-09-29 2002-04-04 Board Of Regents, The University Of Texas System A theory of the charge multiplication process in avalanche photodiodes
US6426991B1 (en) 2000-11-16 2002-07-30 Koninklijke Philips Electronics N.V. Back-illuminated photodiodes for computed tomography detectors
JP3782008B2 (ja) * 2001-12-26 2006-06-07 シャープ株式会社 受光アンプ回路
US6707046B2 (en) 2002-01-03 2004-03-16 General Electric Company Optimized scintillator and pixilated photodiode detector array for multi-slice CT x-ray detector using backside illumination
US6933489B2 (en) 2002-05-10 2005-08-23 Hamamatsu Photonics K.K. Back illuminated photodiode array and method of manufacturing the same
JP4153252B2 (ja) * 2002-07-11 2008-09-24 浜松ホトニクス株式会社 ホトダイオード
US6762473B1 (en) 2003-06-25 2004-07-13 Semicoa Semiconductors Ultra thin back-illuminated photodiode array structures and fabrication methods
CN1954409B (zh) * 2004-05-18 2010-10-13 库克有限公司 注入计数掺杂质离子
JP4696631B2 (ja) * 2005-03-25 2011-06-08 Ｔｄｋ株式会社 光電流増幅回路

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