JP2011027577A - Device for inspecting glossy cylindrical surface shape - Google Patents

Device for inspecting glossy cylindrical surface shape Download PDF

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JP2011027577A
JP2011027577A JP2009174207A JP2009174207A JP2011027577A JP 2011027577 A JP2011027577 A JP 2011027577A JP 2009174207 A JP2009174207 A JP 2009174207A JP 2009174207 A JP2009174207 A JP 2009174207A JP 2011027577 A JP2011027577 A JP 2011027577A
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cylindrical surface
mirror
glossy
surface shape
gate
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JP5294081B2 (en
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Katsumi Tashiro
田代克
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OPUTOUEA KK
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Abstract

<P>PROBLEM TO BE SOLVED: To overcome the problem in a conventional shape inspection method that uses the rotation of a cylindrical surface with specular reflection, wherein the method can not be applied to the cylindrical surface of a continuum or to an unrotatable cylindrical surface. <P>SOLUTION: The device for inspecting a glossy cylindrical surface shape includes: an illumination system with a circular light source, a condenser lens and a gate-type mirror; and a detection system with a gate-type mirror, an imaging mirror and a two-dimensional camera. The gate-type mirror is arranged so that the optical axes of the condenser lens and the imaging lens and the central axis of the cylindrical surface to be measured are coincided with each other by the gate-type mirror. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

本発明は、外側に光沢面あるいは鏡面をもつ円筒状物体の形状を検査する光沢円筒面形状検査装置に関するものである。 The present invention relates to a glossy cylindrical surface shape inspection apparatus for inspecting the shape of a cylindrical object having a glossy surface or mirror surface on the outside.

今日では、金属、プラスチック、ガラス等から構成される表面が光沢性の円筒状の物体、例えば紙やフィルムを搬送するロール、あるいはコピー等に使われる感光ロール等が存在し、これらの表面形状は、円筒面の軸方向に走査あるいは線像を作って切断面を測定する方法、たとえば特許文献1、あるいは円筒面の軸方向に円錐状ミラー等を動かして測定する方法、たとえば特許文献2等の方法で表面形状検査がされている。 Today, there are cylindrical objects with glossy surfaces composed of metal, plastic, glass, etc., such as rolls for transporting paper and film, or photosensitive rolls used for copying, etc. A method of measuring the cut surface by scanning or making a line image in the axial direction of the cylindrical surface, for example, Patent Document 1, or a method of measuring by moving a conical mirror or the like in the axial direction of the cylindrical surface, for example, Patent Document 2 Surface shape inspection is performed by the method.

特許3429966Patent 3429966 特許3099462Patent 3099462

円筒面の軸方向に走査あるいは線像を作って切断面を測定する方法では円筒面を回転することが前提となっているので、回転できない物体、たとえば連続成型品の表面等は検査できなかった。同様に回転対称でない物体、たとえば板上のものの端部が円筒状になっているようなものの円筒面部は測ることができなかった。また、円筒面の軸方向に円錐状ミラー等を動かして測定する方法では、円筒面の軸方向に非常に長いかあるいは連続した物体、たとえば連続成型樹脂パイプなどを測定することができなかった。そこで、本発明は円筒部が回転できなくても、また、円筒部が非常に長いか連続体であっても、なおかつ表面が光沢性あるいは鏡面であっても表面形状が測定できる光沢円筒面形状検査装置を提供することを目的とする。 The method of measuring the cut surface by scanning or making a line image in the axial direction of the cylindrical surface is based on the premise that the cylindrical surface is rotated, so it was not possible to inspect non-rotatable objects, such as the surface of a continuous molded product . Similarly, an object that is not rotationally symmetric, for example, a cylindrical surface portion of an object having a cylindrical shape on the plate, could not be measured. Further, in the method of measuring by moving a conical mirror or the like in the axial direction of the cylindrical surface, it is not possible to measure an object that is very long or continuous in the axial direction of the cylindrical surface, such as a continuously molded resin pipe. Therefore, the present invention provides a glossy cylindrical surface shape that can measure the surface shape even when the cylindrical portion cannot be rotated, or even if the cylindrical portion is very long or continuous, and the surface is glossy or mirror surface. An object is to provide an inspection device.

上記課題を解決するため、円弧状光源、集光レンズ、門型ミラーを備えた照明系と、門型ミラー、結像レンズ、2次元画像センサを備えた検出系を設け、集光レンズ及び結像レンズの光軸と測定対象円筒面の中心軸が門型ミラーを介してほぼ同一となるよう門型ミラーを配置することを特徴とする光沢円筒面形状検査装置とした。 In order to solve the above problems, an illumination system including an arc-shaped light source, a condensing lens, and a portal mirror, and a detection system including a portal mirror, an imaging lens, and a two-dimensional image sensor are provided. The glossy cylindrical surface shape inspection apparatus is characterized in that the portal mirror is arranged so that the optical axis of the image lens and the central axis of the measurement target cylindrical surface are substantially the same through the portal mirror.

また、2次元画像センサの画像について円弧中心からの距離で数値化する画像処理を行い、その数値に基づき良不良判定を行うことを特徴とする光沢円筒面形状検査装置とした。   Further, the glossy cylindrical surface shape inspection apparatus is characterized in that image processing for converting the image of the two-dimensional image sensor into a numerical value by the distance from the center of the arc is performed, and good / bad determination is performed based on the numerical value.

また、円弧状光源は半導体レーザ、コリメーションレンズ、ふたつのアキシコンレンズを備えることを特徴とする光沢円筒面形状検査装置とした。   Also, the glossy cylindrical surface shape inspection apparatus is characterized in that the arc-shaped light source includes a semiconductor laser, a collimation lens, and two axicon lenses.

上記のように構成することにより、回転が不可能でも、またどんなに長い円筒物体であっても、また表面が完全な光沢面や鏡面であっても、表面の形状計測が可能な光沢円筒面形状検査装置を提供できる。   By configuring as above, glossy cylindrical surface shape that can measure the surface shape even if it is impossible to rotate, no matter how long a cylindrical object is, and even if the surface is a perfect glossy surface or mirror surface An inspection device can be provided.

本発明の実施例1における光沢円筒面形状検査装置の構成図である。It is a block diagram of the glossy cylindrical surface shape inspection apparatus in Example 1 of this invention. 本発明の実施例1における光沢円筒面形状検査装置のミラー折り返しを省略した光学系の断面図である。It is sectional drawing of the optical system which abbreviate | omitted mirror folding of the glossy cylindrical surface shape inspection apparatus in Example 1 of this invention. 本発明の実施例1における結像画像および処理を説明した図である。It is a figure explaining the image formation image and process in Example 1 of this invention. 本発明の実施例2における光沢円筒面形状検査装置の構成図である。It is a block diagram of the glossy cylindrical surface shape inspection apparatus in Example 2 of this invention.

図1に、本発明の実施例1における光沢円筒面形状検査装置の構成図を示す。1は半導体レーザ、2はコリメータレンズ、3、4は円錐形状のアキシコンレンズ、5は遮光板、6は集光レンズ、7は門型ミラー、8は測定対象円筒面、9は門型ミラー、10、11は結像レンズ、12は2次元画像センサである。 FIG. 1 shows a configuration diagram of a glossy cylindrical surface shape inspection apparatus in Embodiment 1 of the present invention. 1 is a semiconductor laser, 2 is a collimator lens, 3 and 4 are conical axicon lenses, 5 is a light shielding plate, 6 is a condenser lens, 7 is a portal mirror, 8 is a cylindrical surface to be measured, and 9 is a portal mirror Reference numerals 10 and 11 denote imaging lenses, and reference numeral 12 denotes a two-dimensional image sensor.

半導体レーザ1からでた光はコリメータレンズ2でほぼ平行な光に変換され、アキシコンレンズ3に入射する。アキシコンレンズは円錐形状のレンズであり、出射した光は円弧状に広がる。これをアキシコンレンズ4にいれて再度ほぼ平行な円弧状の光に変換する。 The light emitted from the semiconductor laser 1 is converted into substantially parallel light by the collimator lens 2 and enters the axicon lens 3. The axicon lens is a conical lens, and the emitted light spreads in an arc shape. This is put into the axicon lens 4 and converted again into a substantially parallel arc-shaped light.

ここで遮光板5により、門型ミラー7で反射できない部分の光を遮光する。遮光されなかった円弧状の光は集光レンズ6で集光される。集光途中で門型ミラー7により折り返され、測定対象円筒面8の表面上に円弧状に集光される。門型ミラーは通常のミラーであるが、測定対象物と機械的に干渉する部分を切り欠いたものである。 Here, the light that is not reflected by the gate mirror 7 is shielded by the light shielding plate 5. The arc-shaped light that is not shielded is condensed by the condenser lens 6. In the middle of the light collection, it is folded back by the gate-shaped mirror 7 and is collected in a circular arc shape on the surface of the measurement target cylindrical surface 8. The gate-type mirror is a normal mirror, but a part that mechanically interferes with the measurement object is cut out.

ここで集光レンズの光軸は門型ミラー7で折り返されたとき、測定対象円筒面8の円筒軸と一致するよう構成される。光軸に垂直な面で切った断面上で考えると、集光レンズを出た光は光軸方向に集光するため同じ軸をもつ円筒面に対しては常に垂直に入射することになる。 Here, the optical axis of the condenser lens is configured to coincide with the cylindrical axis of the cylindrical surface 8 to be measured when it is folded back by the portal mirror 7. Considering a cross-section cut by a plane perpendicular to the optical axis, the light exiting the condenser lens is always incident perpendicularly to a cylindrical surface having the same axis because it converges in the optical axis direction.

測定対象円筒面を反射した光は門型ミラー9で折り返され、結像レンズ10、11により2次元画像センサ12に入射する。ここでも門型ミラー9で折り返されたとき、結像レンズ10、11の光軸が測定対象円筒面8の円筒軸と一致するよう構成される。2次元画像センサ12は測定対象円筒面8の反射点と結像レンズ10、11に対し共役な位置に置かれるので2次元画像センサ上には測定対象円筒面8の反射円弧光と共役な円弧像があらわれることになる。 The light reflected from the measurement target cylindrical surface is folded back by the portal mirror 9 and is incident on the two-dimensional image sensor 12 by the imaging lenses 10 and 11. Again, when folded by the portal mirror 9, the optical axes of the imaging lenses 10 and 11 are configured to coincide with the cylindrical axis of the cylindrical surface 8 to be measured. Since the two-dimensional image sensor 12 is placed at a position conjugate to the reflection point of the measurement target cylindrical surface 8 and the imaging lenses 10 and 11, an arc conjugate to the reflected arc light of the measurement target cylindrical surface 8 is placed on the two-dimensional image sensor. An image will appear.

図2に本発明の実施例における光沢円筒面形状検査装置のミラー折り返しを省略した光学系の図を示す。ここでは折り返しミラーを省き、光学系の光軸と測定対象円筒面の軸を実際に一致させて図示している。各部品の機能は図1で説明したとおりであり、門型ミラーで反射できない部分以外は光軸を含むどの断面でも本図のとおり光が進むことになる。 FIG. 2 shows a diagram of an optical system in which mirror folding of the glossy cylindrical surface shape inspection apparatus in the embodiment of the present invention is omitted. Here, the folding mirror is omitted, and the optical axis of the optical system and the axis of the cylindrical surface to be measured are actually matched. The function of each component is as described in FIG. 1, and light travels as shown in this figure in any cross section including the optical axis except for the portion that cannot be reflected by the portal mirror.

ここで測定対象円筒面が8aのように変動した場合、その反射光は破線のように進み、2次元画像センサ上で12aの部分に到達することになり、変動を検知することができる。光軸を含むどの断面の変動でもこのように検知できるので光沢円筒面の形状を測定することができる。 When the measurement target cylindrical surface fluctuates as indicated by 8a, the reflected light travels as indicated by a broken line and reaches the portion 12a on the two-dimensional image sensor, so that the fluctuation can be detected. Since any change in the cross section including the optical axis can be detected in this way, the shape of the glossy cylindrical surface can be measured.

図3は本発明の実施例における結像画像および処理を説明する図である。12は2次元画像センサであり、その面に測定対象円筒面8の反射点と共役な結像光Iが投影されている。図2で説明したように、本光学系は光軸に対して回転対称であるので、円筒面が完全であれば2次元画像センサ12上にも光軸と交わる中心座標Oを中心とした回転対称な円弧状結像光Iが形成される。 FIG. 3 is a diagram for explaining a formed image and processing in the embodiment of the present invention. Reference numeral 12 denotes a two-dimensional image sensor on which imaging light I conjugate with the reflection point of the measurement target cylindrical surface 8 is projected. As described in FIG. 2, since this optical system is rotationally symmetric with respect to the optical axis, if the cylindrical surface is perfect, the two-dimensional image sensor 12 also rotates about the central coordinate O that intersects the optical axis. Symmetric arc-shaped imaging light I is formed.

もし測定対象円筒面に変動があれば、その変動は図2で説明したように結像光の変動に変換されるが、その変動は2次元画像センサ12上では中心座標Oを含む直線上で変動することになる。よって本画像から測定対象円筒面8の凹凸を読み取る場合には中心座標Oから任意の角度θの直線を考え、その直線と結像光Iとの交点を求め、中心座標Oからの距離Rを求めることになる。つまり点Oを中心とした極座標系(θ、R)のデータを算出していくという画像処理を行うことになる。そして算出された(θ、R)座標が予定した範囲に入らない場合は形状不良と判定することになる。 If there is a change in the measurement target cylindrical surface, the change is converted into a change in imaging light as described with reference to FIG. 2, but the change is on a straight line including the center coordinate O on the two-dimensional image sensor 12. Will fluctuate. Therefore, when the unevenness of the cylindrical surface 8 to be measured is read from the main image, a straight line with an arbitrary angle θ is considered from the center coordinate O, the intersection of the straight line and the imaging light I is obtained, and the distance R from the central coordinate O is obtained. Will be asked. That is, image processing is performed in which data of the polar coordinate system (θ, R) centered on the point O is calculated. If the calculated (θ, R) coordinates do not fall within the expected range, it is determined that the shape is defective.

図4に、本発明の実施例2における光沢円筒面形状検査装置の構成図を示す。21はランプ光源、22は円弧状スリットを切った遮光板、23はコリメーションレンズ、5Bは円弧状光を通す遮光板、6以下は実施例1と同様である。 FIG. 4 shows a configuration diagram of a glossy cylindrical surface shape inspection apparatus in Embodiment 2 of the present invention. 21 is a lamp light source, 22 is a light-shielding plate having an arc-shaped slit, 23 is a collimation lens, 5B is a light-shielding plate through which arc-shaped light is transmitted, and 6 and the like are the same as in the first embodiment.

ランプ光源21からでた光は遮光板22で遮光されるが、円弧上スリットが切られているのでその部分のみ通過する。円弧上スリットを通過した光はコリメーションレンズ23でほぼ平行な光に変換される。 The light emitted from the lamp light source 21 is shielded by the light shielding plate 22, but only the portion passes because the slit on the arc is cut. The light that has passed through the slit on the arc is converted into substantially parallel light by the collimation lens 23.

ここで遮光板5Bにより、門型ミラー7で反射できない部分の光を遮光する。実施例1ではもともとのビームが中心部分のないものだったが、実施例2では
中心部分も光としてあるので中心部分も遮光する。遮光されなかった円弧状の光は集光レンズ6で集光される。集光途中で門型ミラー7により折り返され、測定対象円筒面8の表面上に円弧状に集光される。以降の機能は実施例1と同様である。
Here, the light that cannot be reflected by the portal mirror 7 is blocked by the light blocking plate 5B. In the first embodiment, the original beam has no central portion. However, in the second embodiment, since the central portion is also light, the central portion is also shielded. The arc-shaped light that is not shielded is condensed by the condenser lens 6. In the middle of the light collection, it is folded back by the gate-shaped mirror 7 and condensed on the surface of the measurement target cylindrical surface 8 in an arc shape. Subsequent functions are the same as those in the first embodiment.

以上説明したようにいずれの実施例においても、円筒面が完全な鏡面反射面であっても、また、円筒面を回転することができなくても、また、円筒面が連続物体であってもその表面形状を測定することができる。いずれの実施例においてもこれを2セット用いれば、360度範囲の円筒物体の検査も可能になる。また、対象物は円筒面が最適であるがこれに限らず、球体や多角柱状の鏡面反射体の検査も本方法で可能である。なお遮光板5、5Bは省略して同様な機能を門型ミラーに持たすことも可能である。 As described above, in any of the embodiments, even if the cylindrical surface is a perfect specular reflection surface, the cylindrical surface cannot be rotated, or the cylindrical surface is a continuous object. The surface shape can be measured. In any embodiment, if two sets are used, it is possible to inspect cylindrical objects in a 360 degree range. In addition, the cylindrical surface of the object is optimal, but the present invention is not limited to this, and inspection of a spherical body or a polygonal mirror reflector can be performed by this method. It is also possible to omit the light shielding plates 5 and 5B and to have a similar function in the portal mirror.

以上説明したように本実施例によれば円筒面が完全な鏡面反射面であっても、また、円筒面を回転することができなくても、また、円筒面が連続物体であってもその表面形状を測定することができるため、これまで検査が難しかった表面が鏡面反射性の連続円筒体の検査が可能となり、ライン上での測定に利用できる。また、平面の端部等回転検査が不可能な物体にも適用できる。このようにこれまで困難であった円筒体の検査が可能となるので産業上非常に有用である。 As described above, according to the present embodiment, even if the cylindrical surface is a perfect specular reflection surface, the cylindrical surface cannot be rotated, or the cylindrical surface is a continuous object, Since the surface shape can be measured, the surface which has been difficult to inspect until now can be inspected for a specular continuous cylindrical body, and can be used for measurement on a line. Further, the present invention can be applied to an object that cannot be rotated such as a flat end. Thus, since it is possible to inspect a cylindrical body that has been difficult until now, it is very useful in industry.

1 半導体レーザ
2 コリメータレンズ
3、4 アキシコンレンズ
5 遮光板
6 集光レンズ
7 門型ミラー
8 測定対象円筒面
9 門型ミラー
10、11 結像レンズ
12 2次元画像センサ
21 ランプ光源
22 円弧状スリット付き遮光板
23 コリメーションレンズ
O 中心座標
I 結像光像









DESCRIPTION OF SYMBOLS 1 Semiconductor laser 2 Collimator lens 3, 4 Axicon lens 5 Light shielding plate 6 Condensing lens 7 Portal mirror 8 Cylindrical mirror surface 9 Portal mirror 10, 11 Imaging lens 12 Two-dimensional image sensor 21 Lamp light source 22 Arc-shaped slit With light shielding plate 23 Collimation lens O Center coordinates I Imaged light image









Claims (3)

円弧状光源、集光レンズ、門型ミラーを備えた照明系と、門型ミラー、結像レンズ、2次元カメラを備えた検出系を設け、集光レンズ及び結像レンズの光軸と測定対象円筒面の中心軸が門型ミラーを介して同一となるよう門型ミラーを配置することを特徴とする光沢円筒面形状検査装置。 An illumination system with an arc-shaped light source, a condenser lens, and a portal mirror, and a detection system with a portal mirror, an imaging lens, and a two-dimensional camera are provided. A glossy cylindrical surface shape inspection apparatus, wherein a gate-type mirror is arranged so that a central axis of the cylindrical surface is the same through a gate-type mirror. 2次元カメラの画像について光軸光点座標からの距離で数値化する画像処理を行い、その数値に基づき良不良判定を行うことを特徴とする請求項1の光沢円筒面形状検査装置。 2. The glossy cylindrical surface shape inspection apparatus according to claim 1, wherein image processing for converting the image of the two-dimensional camera into a numerical value based on the distance from the optical axis light spot coordinate is performed, and whether the quality is good or bad is determined based on the numerical value. 円弧状光源は半導体レーザ、コリメーションレンズ、ふたつのアキシコンレンズを備えることを特徴とする請求項1乃至2の光沢円筒面形状検査装置。


3. The glossy cylindrical surface shape inspection apparatus according to claim 1, wherein the arc-shaped light source includes a semiconductor laser, a collimation lens, and two axicon lenses.


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US11336966B2 (en) 2014-05-29 2022-05-17 Nevermind Capital Llc Methods and apparatus for delivering content and/or playing back content
US11871085B2 (en) 2014-05-29 2024-01-09 Nevermind Capital Llc Methods and apparatus for delivering content and/or playing back content

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