JP2011026702A - SPUTTERING TARGET MATERIAL OF Fe-Co-Ni-BASED ALLOY - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sputtering target material of an Fe-Co-Ni-based alloy having low magnetic permeability, which can improve the efficiency of use in the magnetron sputtering, and can increase the plate thickness of the target. <P>SOLUTION: The sputtering target material of the Fe-Co-Ni-based alloy is formed of a sintered body having such a composition ratio as to satisfy Fe:Ni=90:10 to 65:35 and (Fe+Ni):Co=90:10 to 10:90 by atom ratio, and includes crystal phases containing 35 atom% or less Ni, 15 atom% or less Co and mainly Fe in the structure of the sintered target material, in which the ratio Ifcc(200)/Ibcc(200) of X-ray diffraction peak intensity (Ifcc(200)) obtained from the (200) face of the fcc phase containing mainly Fe of the crystal phases containing mainly Fe, to X-ray diffraction peak intensity (Ibcc(200)) obtained from the (200) face of the bcc phase containing mainly Fe is 10 or more. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an Fe—Co—Ni alloy sputtering target material for forming a soft magnetic film.

  In recent years, high recording density has been strongly demanded by an advanced information society. As a technique for realizing this high density, a perpendicular magnetic recording system has been put into practical use instead of the conventional in-plane magnetic recording system.

Perpendicular magnetic recording is a method in which the magnetic film of a perpendicular magnetic recording medium is formed so that the axis of easy magnetization is oriented perpendicularly to the medium surface. This is a method suitable for high recording density with a small decrease in recording and reproduction characteristics. In the perpendicular magnetic recording system, a recording medium having a magnetic recording film layer and a soft magnetic film layer with improved recording sensitivity has been developed.
As the soft magnetic film of such a magnetic recording medium, an amorphous soft magnetic alloy is adopted because excellent soft magnetic properties are required. As typical amorphous alloys for soft magnetic films, Fe, Co or Fe—Co alloys containing an additive element, Co—Zr—Nb alloy films, Co—Zr—Ta alloy films, etc. have already been put into practical use. (For example, refer to Patent Document 1).

In general, it is known that a magnetron sputtering method is used to form a soft magnetic film. The magnetron sputtering method is a sputtering method that enables high-speed film formation by placing a magnet behind the target material, leaking magnetic flux to the surface of the target material, and converging the plasma in the leakage magnetic flux region. . This magnetron sputtering method is characterized in that magnetic flux leaks to the sputtering surface of the target material. Therefore, when the magnetic permeability of the target material itself is large or the saturation magnetic flux density is large, the magnetron sputtering method is applied to the sputtering surface of the target material. It becomes difficult to form a necessary and sufficient leakage magnetic flux. Therefore, there is a requirement that the permeability of the target material itself must be reduced as much as possible.
In response to such requirements, a material has been proposed that has a high saturation magnetic flux density as a soft magnetic film after sputtering but a sufficient leakage magnetic flux as a target material and a low saturation magnetic flux density (for example, patents). Reference 2).

JP 2004-206805 A JP 2007-59424 A

  In the above-mentioned Patent Document 2, in order to reduce the saturation magnetic flux density of the target and sufficiently secure the leakage magnetic flux from the magnet of the magnetron sputtering apparatus, in the magnetic thin film production target including two or more types of crystal phases, It has been proposed to control at least one of the FeNi alloys with Fe: 60 to 80 atomic% and Ni: 20 to 40 atomic%. This target can reduce the saturation magnetic flux density of the target itself by controlling the structure of the target using a feature in which Fe: Ni = 70: 30 in a weight ratio and the magnetism is lost in a target mainly composed of an FeNi alloy. It is very good.

  An object of the present invention is to provide a Fe—Co—Ni alloy sputtering target material having a lower magnetic permeability, which can further improve use efficiency in magnetron sputtering and increase a target plate thickness.

  In order to secure leakage magnetic flux, the present inventors have investigated the crystal phase of Fe—Co—Ni alloy for Fe—Co—Ni alloy sputtering target material for forming a soft magnetic film used for perpendicular magnetic recording media and the like. As a result of studying the crystal structure, sputtering with low permeability is achieved by forming a crystal structure in which a certain amount or more of the fcc phase having a relatively small magnetic moment remains as a crystal phase mainly composed of Fe in the structure of the target material. The inventors have found that a target material can be obtained and have reached the present invention.

That is, the present invention provides an Fe—Co—Ni system comprising a sintered body having an atomic ratio of Fe: Ni = 90: 10 to 65:35 and (Fe + Ni): Co = 90: 10 to 10:90. An alloy sputtering target material having a crystal phase mainly composed of Fe containing 35 atomic% or less of Ni and 15 atomic% or less of Co in the sintered structure of the target material, and 10 mm of the target material. X-ray diffraction peak intensity (Ifcc (200)) from the (200) plane of the fcc phase mainly composed of Fe of the crystal phase mainly composed of Fe when X diffraction intensity is measured in ^two or more regions and mainly composed of Fe Fe-Co-Ni-based alloy sputtering in which the ratio Ifcc (200) / Ibcc (200) to the X-ray diffraction peak intensity (Ibcc (200)) from the (200) plane of the bcc phase is 10 or more There is a target material. Preferably, 30 atomic% or less of one or more elements selected from (Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, B, Al, Si) is contained.

  ADVANTAGE OF THE INVENTION According to this invention, the Fe-Co-Ni type alloy sputtering target material for soft-magnetic film formation with a low magnetic permeability which can use efficiency improvement in magnetron sputtering and can make target plate thickness thick can be provided stably, and perpendicular | vertical. This is an extremely effective technique for manufacturing an industrial product that requires a soft magnetic film of an Fe—Co—Ni alloy, such as a magnetic recording medium.

It is an X-ray diffraction intensity chart of sample 1 in an example. It is a X-ray diffraction intensity chart of the sample 2 in an Example. It is a X-ray diffraction intensity chart of the sample 3 in an Example. It is a X-ray diffraction intensity chart of the sample 4 in an Example. It is a X-ray diffraction intensity chart of the sample 5 in an Example. It is a X-ray diffraction intensity chart of the sample 6 in an Example. It is an X-ray diffraction intensity chart of sample 7 in an example.

  As described above, an important feature of the present invention is that the Fe-Co-Ni alloy sputtering target material has a crystal structure in which a certain amount or more of the fcc phase remains as a crystal phase mainly composed of Fe. Thus, an unprecedented low permeability sputtering target is realized.

  First, the Fe—Co—Ni-based alloy sputtering target material of the present invention has a composition of Fe: Ni = 90: 10 to 65:35 and (Fe + Ni): Co = 90: 10 to 10:90 in atomic ratio. . As the soft magnetic film of the perpendicular recording medium, it is desirable to have high saturation magnetization, and a composition system containing Fe, Ni, and Co has been studied. The composition in the present invention has an atomic ratio of Fe: Ni = 90: 10 to 65:35 because the effect of reducing magnetostriction can be obtained by making Ni 10 atomic% or more, and when the atomic ratio exceeds 35 atomic%. This is because the magnetic moment is greatly lowered and it is difficult to obtain soft magnetic characteristics desirable as a soft magnetic film of a magnetic recording medium. Also, the atomic ratio (Fe + Ni): Co = 90: 10 to 10:90 is high as a soft magnetic film used for a perpendicular magnetic recording medium by controlling the composition ratio of Fe, Ni, and Co to this value. This is because a saturated magnetization film can be obtained.

Next, the sintered structure of the sputtering target of the present invention will be described.
The sputtering target material of the present invention has a crystal phase mainly composed of Fe containing 35 atomic percent or less of Ni and 15 atomic percent or less of Co in the sintered structure, and a region of 10 mm ² or more of the target material. X-ray diffraction peak intensity (Ifcc (200)) from the (200) plane of the fcc phase mainly composed of Fe and the bcc phase mainly composed of Fe when X diffraction intensity is measured The structure is controlled so that the ratio Ifcc (200) / Ibcc (200) to the X-ray diffraction peak intensity (Ibcc (200)) from the (200) plane becomes 10 or more.
In the Fe—Co—Ni alloy containing Fe of a certain composition ratio or more according to the present invention, since Fe has the highest magnetic moment, it is possible to reduce the magnetization of the crystal phase mainly composed of Fe. This is important in reducing the magnetic permeability of the sputtering target material.

In the above-mentioned patent document 2, it has been found that the saturation magnetic flux density of the target itself is reduced and the magnetic permeability is reduced by performing the structure control using the feature that the magnetism disappears at Fe: Ni = 70: 30. is there. On the other hand, in the present invention, the raw material powder is coarsened to suppress composition fluctuations due to diffusion, or heat treatment including a rapid cooling step is performed in order to leave the fcc phase that is a high-temperature stable phase, thereby further comprising mainly Fe. By allowing the crystal phase to remain stably as the fcc phase, the magnetic permeability is further reduced.
In general, Fe is stable in the bcc phase having a large magnetic moment, but the fcc phase is a phase having a relatively small magnetic moment. Therefore, in the present invention, in the crystal phase mainly composed of Fe, the X-ray diffraction peak intensity (Ifcc (200)) from the (200) plane of the fcc phase and the X-ray diffraction peak from the (200) plane of the bcc phase. Further reduction in magnetic permeability by stably forming an fcc phase as a crystalline phase mainly composed of Fe so that the ratio Ifcc (200) / Ibcc (200) to the strength (Ibcc (200)) is 10 or more. Is realized.
The X-ray diffraction intensity is measured as the diffraction intensity when X-rays are irradiated on a region having an area of 10 mm ² or more of the target material.

  In addition, in the crystal phase mainly composed of Fe in the present invention, it is effective to add Ni or Co in order to make the fcc phase the main phase, but Ni exceeding 35 atomic% or Co exceeding 15 atomic% is Fe. When the fcc phase is the main phase, the magnetization of the fcc phase itself is increased, so that the Fe-based crystal phase contains 35 atomic% or less Ni and 15 atomic% or less. The crystal phase was mainly composed of Fe containing Co. In addition, since Fe is difficult to obtain an fcc structure stably in an equilibrium state in a region where the Ni content is 30 atomic% or less, especially when it is a crystal phase mainly composed of Fe containing Ni at 30 atomic% or less. It is effective and desirable to leave the fcc phase stably.

Further, the X-ray diffraction peak intensity (Ifcc (200)) from the (200) plane of the fcc phase mainly composed of Fe in the crystal phase mainly composed of Fe and the (200) plane of the bcc phase mainly composed of Fe. When the ratio Ifcc (200) / Ibcc (200) of the X-ray diffraction peak intensity (Ibcc (200)) is less than 10, the presence of the fcc phase is not sufficient for reducing the magnetization of the target material, and the ratio is made 10 or more. It was confirmed that the effect of reducing the magnetization of the target material was obtained. Needless to say, the larger the X-ray diffraction peak intensity (Ifcc (200) / Ibcc (200)), the better.
Although it is originally preferable to compare the X-ray diffraction peak intensity ratios of the fcc phase (111) plane and the bcc phase (110) plane, which are the closest packed plane, the fcc phase (111) plane and the bcc phase (110) are Since the peak positions are adjacent, the (200) plane that is not adjacent to any peak from the fcc phase is selected as the peak from the bcc phase. Further, since the peak intensity of the bcc (200) plane is relatively weak, the amount ratio of the fcc phase sufficient for reducing the magnetization of the target material cannot be obtained unless Ifcc (200) / Ibcc (200) is 10 or more.

  In addition, the Fe—Co—Ni alloy sputtering target material of the present invention is one or two selected from (Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, B, Al, Si). It is preferable to contain 30 atomic% or less of the above elements. By containing these elements, it is possible to improve the characteristics required as a soft magnetic film. In particular, two or more elements selected from (Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, B, Al, Si) are used for film amorphization, high corrosion resistance, and high magnetic permeability. It is preferable to add 5 atomic% or more.

As a method for producing the Fe—Co—Ni alloy target material of the present invention, for example, the following method can be applied.
Since the Fe—Co—Ni based alloy sputtering target material of the present invention is characterized by stably forming an fcc phase as a crystal phase mainly composed of Fe, when producing a target by a sintering method, Fe is preferably used as a raw material powder having an fcc structure. For example, an alloy powder mainly composed of fcc structure Fe composed of the remaining Fe containing 35 atomic% or less of Ni and 15 atomic% or less of Co is used as the essential raw material powder.
As a combination of the raw material powders applied to the sintering, it is preferable that the above-mentioned alloy powder mainly composed of Fe and one other kind of alloy powder have a desired target composition. The effects of the present invention can be obtained even when an alloy powder or a pure metal powder is used.

Further, in the case of an alloy powder mainly composed of Fe, when the particle size of the powder is coarser, the displacement of the crystal structure due to the composition variation region due to diffusion in the manufacturing process is suppressed, so that the fcc phase can be stably formed. For example, as an alloy powder mainly composed of Fe, it is desirable to use a powder having an average particle size exceeding 35 μm.
The target material of the present invention can be obtained by using an alloy powder mainly composed of Fe and sintering by mixing a plurality of powders prepared to have a desired target composition. As a sintering method, a sintering temperature of 800 ° C. to 1100 ° C. and a pressing pressure of 50 MPa or more, specifically, hot isostatic pressing, hot pressing, current sintering, extrusion sintering, etc. are used. It is possible. Furthermore, rapid cooling such as water cooling is performed from a temperature not lower than 550 ° C. and not higher than the sintering temperature in the cooling process after sintering, or heating is performed not lower than 550 ° C. and not higher than the sintering temperature after cooling, and water cooling is performed in the subsequent cooling process. By performing such rapid cooling, the crystal phase mainly composed of Fe can be more stably formed as the fcc phase.

Example 1
Gas atomized powders of Fe-29 atomic% Ni, Co-25 atomic% Zr, Co-20 atomic% Nb, pure Co, and pure Ni were prepared.
First, in Sample 1, the gas atomized powders of Fe-29 atomic% Ni, Co-25 atomic% Zr, Co-20 atomic% Nb, pure Co, and pure Ni prepared above were sieved through a sieve having a mesh size of 250 μm. The powder that passed through the sieve was used as the raw material powder. The raw material powder is changed to ((Fe ₆₆ -Ni ₃₄ ) ₃₈ -Co ₆₂ ) ₉₂ -Nb ₄ -Zr ₄ (atomic%) [Fe: Ni = 66: 34 and (Fe + Ni): Co = 38: 62 in atomic ratio) , Nb: 4 atomic%, Zr: 4 atomic%], the raw material powder was weighed and mixed to prepare a mixed powder. The obtained mixed powder is filled into a mild steel capsule and degassed and sealed, and then subjected to pressure sintering by hot isostatic pressing (HIP) under conditions of a temperature of 950 ° C., a pressure of 100 MPa, and a holding time of 2 hours. The body was made.

In sample 2, the gas atomized powder of Fe-29 atomic% Ni of the raw material powder was further sieved with a sieve having a mesh size of 74 μm, and the powder obtained by removing the powder that passed through the sieve was used as the raw material powder ((Fe ₆₆ -Ni ₃₄ ) _{38 -Co 62) 92 -Nb 4 -Zr} 4 ( atomic%) [Fe atomic ratio: Ni = 66: 34 and (Fe + Ni): Co = 38: 62, Nb: 4 atomic%, Zr: 4 atomic%] The raw material powder was weighed and mixed so that a mixed powder was prepared. The obtained mixed powder is filled into a mild steel capsule and degassed and sealed, and then subjected to pressure sintering by hot isostatic pressing (HIP) under conditions of a temperature of 950 ° C., a pressure of 100 MPa, and a holding time of 2 hours. The body was made.
Further, a part of the sintered body of sample 2 was cut out, heated to 600 ° C., held for 30 minutes, and cooled to room temperature with water cooling, which was used as sample 3.

  The sintered bodies of Samples 1 to 3 prepared above were machined into a diameter of 180 mm and a thickness of 7 mm to prepare an Fe—Co—Ni alloy target material. Test pieces having a length of 30 mm, a width of 10 mm, and a thickness of 5 mm were collected from the end materials of each of the prepared target materials, and the magnetization curves of these test pieces were measured using a DC magnetic property measuring apparatus TRF5A manufactured by Toei Industry Co., Ltd. Was measured. In addition, the maximum magnetic permeability was calculated | required from the obtained magnetization curve as the maximum applied magnetic field 400 (KA / m).

In addition, a 10 mm × 10 mm × 7 mm test piece was collected from the center of each of the prepared target materials and buffed, and then the X-ray diffraction intensity measurement was performed on the sputtered surface of the target material. For measurement of X-ray diffraction intensity, RINT2500V manufactured by Rigaku Corporation was used, Co was used as a radiation source, and X-rays were irradiated onto a 10 mm ² region. From the X-ray diffraction intensity measurement results, the X-ray diffraction peak intensity (Ifcc (200)) from the (200) plane of the fcc phase mainly composed of Fe and the X-ray from the (200) plane of the bcc phase mainly composed of Fe. The diffraction peak intensity (Ibcc (200)) was calculated, and the intensity ratio Ifcc (200) / Ibcc (200) was obtained. The X-ray diffraction peak intensity was calculated as a value obtained by subtracting the background. Table 1 summarizes the raw material powder, heat treatment, maximum magnetic permeability, and X-ray diffraction peak intensity ratio of the prepared target material. Moreover, the chart of the X-ray diffraction intensity of each target material of samples 1-3 is shown as FIGS. 1-3, respectively.

From Table 1 and FIGS. 1 to 3, in Samples 2 and 3 where the X-ray diffraction peak intensity ratio Ifcc (200) / Ibcc (200) is 10 or more, the maximum magnetic permeability is greatly reduced as compared with Sample 1. It can be seen that In addition, from comparison between sample 2 and sample 3, it is found that sample 3 that has been heated to 550 ° C. or higher and then rapidly cooled by water cooling has a larger X-ray diffraction peak intensity ratio and reduced maximum magnetic permeability. .
From the observation with an energy dispersive X-ray fluorescence spectrometer (EDX), the crystal phase mainly composed of Fe of the target materials of Samples 2 and 3 is a phase mainly composed of Fe containing 29 atomic% of Ni. It was confirmed.

(Example 2)
In Sample 4, first, a gas atomized powder of Co-10 atomic% Ta-2 atomic% Zr powder (-250 μm) and Co-19 atomic% Al powder (-250 μm) and sieving used in Sample 2 of Example 1 were used. Fe-29 atomic% Ni (74-250 μm), Co-25 atomic% Zr (−250 μm), pure Co (−250 μm), and pure Ni (−250 μm) gas atomized powder were prepared. Each of these powders ((Fe ₆₅ -Ni ₃₅ ) ₃₇ -Co ₆₃ ) ₉₀ -Ta ₃ -Zr ₅ -Al ₂ (atomic%) [at an atomic ratio of Fe: Ni = 65: 35 and (Fe + Ni): Co = 37:63, Ta: 3 atomic%, Zr: 5 atomic%, Al: 2 atomic%] The raw material powder was weighed and mixed to prepare a mixed powder. The obtained mixed powder is filled in a mild steel capsule and degassed and sealed, and then subjected to pressure sintering by hot isostatic pressing (HIP) under conditions of a temperature of 950 ° C., a pressure of 100 MPa, and a holding time of 2 hours. The body was made.
Further, a part of the sintered body of Sample 4 was cut out, heated to 600 ° C. and held for 30 minutes, and then the sintered body cooled to room temperature by water cooling was used as Sample 5.

  The sintered bodies of Samples 4 and 5 prepared above were machined into a diameter of 180 mm and a thickness of 7 mm to prepare an Fe—Co—Ni alloy target material. Test pieces having a length of 30 mm, a width of 10 mm, and a thickness of 5 mm were collected from the end materials of each of the prepared target materials, and the magnetization curves of these test pieces were measured using a DC magnetic property measuring apparatus TRF5A manufactured by Toei Industry Co., Ltd. Was measured. In addition, the maximum magnetic permeability was calculated | required from the obtained magnetization curve as the maximum applied magnetic field 400 (KA / m).

  In addition, a 10 mm × 10 mm × 7 mm test piece was sampled from the center of each prepared target material and buffed, and then the X-ray diffraction intensity measurement was performed on the sputtered surface of the target material by the same method as in Example 1. It was. From the X-ray diffraction intensity measurement results, the X-ray diffraction peak intensity (Ifcc (200)) from the (200) plane of the fcc phase mainly composed of Fe and the X-ray from the (200) plane of the bcc phase mainly composed of Fe. The diffraction peak intensity (Ibcc (200)) was calculated, and the intensity ratio Ifcc (200) / Ibcc (200) was obtained. The X-ray diffraction peak intensity was calculated as a value obtained by subtracting the background. Table 2 summarizes the raw material powder, heat treatment, maximum magnetic permeability, and X-ray diffraction peak intensity ratio of the prepared target material. Moreover, the chart of the X-ray diffraction intensity of each target material of the samples 4 and 5 is shown as FIGS.

From Table 2 and FIGS. 4 and 5, it can be seen that samples 4 and 5 having an X-ray diffraction peak intensity ratio Ifcc (200) / Ibcc (200) of 10 or more can obtain a target having a low maximum magnetic permeability.
From the observation with an energy dispersive X-ray fluorescence spectrometer (EDX), the crystal phase mainly composed of Fe of the target material of Samples 4 and 5 is a phase mainly composed of Fe containing 29 atomic% of Ni. It was confirmed.

(Example 3)
In sample 6, first, a gas atomized powder of Co-10 atomic% Zr (-250 μm), Co-37 atomic% B (−250 μm), pure Ti powder (−250 μm), and the sieve used in sample 2 of Example 1 were used. Separated gas atomized powders of Fe-29 atomic% Ni (74-250 μm) and pure Co (−250 μm) were prepared. Each of these powders ((Fe ₇₁ -Ni ₂₉ ) ₆₅ -Co ₃₅ ) ₉₂ -Zr ₃ -B ₃ -Ti ₂ (atomic%) [at atomic ratio of Fe: Ni = 71: 29 and (Fe + Ni): Co = 65:35, Zr: 3 atomic%, B: 3 atomic%, Ti: 2 atomic%] The raw material powder was weighed and mixed to prepare a mixed powder. The obtained mixed powder is filled into a mild steel capsule and degassed and sealed, and then subjected to pressure sintering by hot isostatic pressing (HIP) under conditions of a temperature of 950 ° C., a pressure of 100 MPa, and a holding time of 2 hours. The body was made.
Further, a part of the sintered body of Sample 6 was cut out, heated to 600 ° C. and held for 30 minutes, and then the sintered body cooled to room temperature by water cooling was used as Sample 7.

  The sintered bodies of Samples 6 and 7 prepared above were machined into a diameter of 180 mm and a thickness of 7 mm to prepare an Fe—Co—Ni alloy target material. Test pieces having a length of 30 mm, a width of 10 mm, and a thickness of 5 mm were collected from the end materials of each of the prepared target materials, and the magnetization curves of these test pieces were measured using a DC magnetic property measuring apparatus TRF5A manufactured by Toei Industry Co., Ltd. Was measured. In addition, the maximum magnetic permeability was calculated | required from the obtained magnetization curve as the maximum applied magnetic field 400 (KA / m).

  In addition, a 10 mm × 10 mm × 7 mm test piece was sampled from the center of each prepared target material and buffed, and then the X-ray diffraction intensity measurement was performed on the sputtered surface of the target material by the same method as in Example 1. It was. From the X-ray diffraction intensity measurement results, the X-ray diffraction peak intensity (Ifcc (200)) from the (200) plane of the fcc phase mainly composed of Fe and the X-ray from the (200) plane of the bcc phase mainly composed of Fe. The diffraction peak intensity (Ibcc (200)) was calculated, and the intensity ratio Ifcc (200) / Ibcc (200) was obtained. The X-ray diffraction peak intensity was calculated as a value obtained by subtracting the background. Table 3 summarizes the raw material powder, heat treatment, maximum magnetic permeability, and X-ray diffraction peak intensity ratio of the prepared target material. In addition, charts of the X-ray diffraction intensities of the target materials of the samples 6 and 7 are shown in FIGS.

From Table 3 and FIGS. 6 and 7, it can be seen that samples 6 and 7 having an X-ray diffraction peak intensity ratio Ifcc (200) / Ibcc (200) of 10 or more can obtain a target having a low maximum magnetic permeability. Moreover, from the comparison between sample 6 and sample 7, it can be seen that sample 7, which was rapidly cooled by water cooling after heating the sintered body to 550 ° C. or higher, had a larger X-ray diffraction peak intensity ratio and a reduced maximum magnetic permeability. .
From the observation with an energy dispersive X-ray fluorescence spectrometer (EDX), the crystal phase mainly composed of Fe of the target material of Samples 6 and 7 is a phase mainly composed of Fe containing 29 atomic% of Ni. It was confirmed.

  The present invention makes it possible to stably provide a Fe—Co—Ni alloy sputtering target material having a low magnetic permeability, and provides a technique indispensable for stable production of a soft magnetic film.

Claims (2)

An Fe—Co—Ni alloy sputtering target material comprising a sintered body having a composition ratio of Fe: Ni = 90: 10 to 65:35 and (Fe + Ni): Co = 90: 10 to 10:90 in atomic ratio. There,
The sintered structure of the target material has a crystal phase mainly composed of Fe containing 35 atomic% or less of Ni and 15 atomic% or less of Co, and a region of 10 mm ² or more of the target material has an X diffraction intensity. X-ray diffraction peak intensity (Ifcc (200)) from the (200) plane of the fcc phase mainly composed of Fe in the crystal phase mainly composed of Fe and (200) of the bcc phase mainly composed of Fe when measured. An Fe—Co—Ni alloy sputtering target material, wherein the ratio Ifcc (200) / Ibcc (200) of the X-ray diffraction peak intensity (Ibcc (200)) from the surface is 10 or more.   It contains 30 atomic% or less of one or more elements selected from (Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, B, Al, Si). The Fe—Co—Ni-based alloy sputtering target material according to 1.