JP2011005379A - Apparatus and method for coating fine particles - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an apparatus of a simpler structure and a method for coating fine particles, capable of causing fine particles to hit an object to be coated therewith at a higher speed and of coating the object therewith in a shorter time, without using a high pressure gas.SOLUTION: The apparatus for coating fine particles includes a vacuum chamber 10, a first DC power source 20, a wire-shaped linear electrode 30, a cylindrical electrode 31 including a slit 31S formed thereon of a width greater than the diameter of fine particles NR, wherein the fine particles are stored or supplied. The linear electrode 30 and the cylindrical electrode 31 are disposed in the chamber 10 in such a manner that the linear electrode 30 is disposed over the position of the axis of the cylindrical electrode 31 without touching each other. An object W to be coated with fine particles is disposed in the chamber 10 on a position facing the slit 31S. The first DC power source 20 generates a first potential difference between the linear electrode 30 and the cylindrical electrode 31 so that the fine particles present in the cylindrical electrode 31 are ejected through the slit 31S to hit the object W to be coated therewith.

Description

  The present invention relates to a fine particle coating apparatus and a fine particle coating method for coating various fine particles such as nanoparticles on the surface of various coated members.

In recent years, an aerosol deposition method (hereinafter, referred to as “aerosol deposition method”) is used to form a hard ceramic film on a coated member using impact energy by spraying ceramic fine particles in a solid state at a high temperature at a normal temperature without heating. (Referred to as AD method) has been developed.
Since the AD method can form a film in a dry state, the conventional process and equipment for evaporating the liquid after spraying the fine particle mixture (heating and drying) and equipment are not required, and the equipment and cost are suppressed, and the coating is performed. A uniform film can be formed with high quality in a short time regardless of the material of the member.
In the AD method, as shown in FIG. 10, the high-pressure gas in the tank 120 is introduced into the aerosol generator 122 containing fine particles NR (O) through the flow rate adjusting means 121, and the like smoke of tobacco. After making the aerosol state, high pressure injection is performed from the nozzle 130 through the crushing / classifying unit 123 so as to maintain a predetermined particle size distribution. The inside of the chamber 10 is decompressed by decompression means 11 (vacuum pump or the like), and the aerosol containing fine particles collides with the surface of the coated member W at a high speed without being decelerated, and is crushed and altered by the impact energy. Solidify at room temperature. In FIG. 10, the relative moving means 12 can move and rotate the coated member W in an arbitrary direction, and the concentration adjuster 150 is based on signals from the measuring means 151 and 152 using laser light or the like. The flow rate adjusting means 121 is controlled to adjust the concentration and flow rate of the fine particles.
In the prior art described in Patent Document 1, fine particles and auxiliary particles having a diameter larger than the diameter of the fine particles are arranged between the electrodes arranged at a predetermined interval, and a member to be coated is arranged between the electrodes. ing. A fine particle coating method in which a potential difference is applied between the electrodes, the fine particles and the auxiliary particles are reciprocated between the electrodes to disperse the fine particles with the auxiliary particles, and the auxiliary particles are struck against the coated member and coated. It is disclosed.

JP 2008-137122 A

The AD method requires high-pressure gas, and there is a possibility that the apparatus becomes large and complicated. Moreover, although the air in the chamber 10 is decompressed by the decompression means 11, aerosol (high pressure gas) containing fine particles is injected from the nozzle 130, and the efficiency of the decompression means 11 is poor. Further, in FIG. 10, there is a limitation that the nozzle width WN of the nozzle 130 is about several [mm], and it is difficult to further shorten the coating time.
In the prior art described in Patent Document 1, a DC power source is used without using high-pressure gas, and the apparatus is simple and can be miniaturized. However, even if the coating method described in Patent Document 1 is performed in a decompressed chamber, it is very difficult to increase the speed of the fine particles that collide with the member to be coated W to the same level as the AD method. .
The present invention was devised in view of such points, and it is possible to collide fine particles with a coated member at a high speed with a simpler apparatus without using high-pressure gas, It is an object of the present invention to provide a fine particle coating apparatus and a fine particle coating method capable of coating in a shorter time.

As means for solving the above-mentioned problems, a first invention of the present invention is a fine particle coating apparatus as described in claim 1.
The fine particle coating apparatus according to claim 1 includes a chamber forming a partitioned space, a decompression unit, a first DC power source, and a wire having a predetermined diameter with conductivity and a predetermined diameter. A fine particle coating comprising: a linear electrode member having a shape; and a cylindrical electrode member having a conductivity and a cylindrical shape having a diameter larger than the diameter of the linear electrode member and having an arbitrary length in the axial direction Device.
A slit having a width larger than the diameter of the fine particles is formed in the cylindrical electrode member in the axial direction, and fine particles to be coated on the coated member are accommodated or supplied. The linear electrode member and the cylinder The electrode members are arranged in the chamber so as not to contact each other and so that the linear electrode member is located at the axial position of the cylindrical electrode member.
The decompression means decompresses the interior of the chamber, and the member to be coated is disposed in the chamber and at a position facing the slit of the cylindrical electrode member.
And the first DC power supply gives a first potential difference between the linear electrode member and the cylindrical electrode member, and fine particles moving based on the first potential difference in the cylindrical electrode member, The light is emitted from the slit and collides with the member to be coated, and the member to be coated is coated with fine particles.

The second invention of the present invention is a fine particle coating apparatus as described in claim 2.
The fine particle coating apparatus according to claim 2 is the fine particle coating apparatus according to claim 1, wherein the linear electrode member and the cylindrical electrode member are horizontally arranged so that the slit does not face downward. In the cylindrical electrode member, a lower surface is provided with one or a plurality of supply-side through-holes having a diameter larger than that of the fine particles, and the cylindrical electrode member in the chamber Below, one or a plurality of fine particle emission supply means are arranged.
The fine particle emitting and supplying means is configured such that the two plate electrode members horizontally arranged at predetermined intervals so as to be parallel to each other and the two plate electrode members are electrically insulated from each other. A cylindrical wall member that maintains a gap and forms a predetermined space between two plate-like electrode members, and the predetermined space has a fine particle and a supply side auxiliary having a diameter larger than the particle diameter. The two plate-like electrode members are provided with the first potential difference from the first DC power source, or are provided with a second DC power source, and the second potential difference is provided from the second DC power source. The upper plate electrode member of the two plate electrode members is formed with one or a plurality of supply side through holes having a diameter larger than the diameter of the fine particles at an arbitrary position in the predetermined space. .
The fine particle emission supply means is arranged so that the supply side through hole and the supply side through hole face each other, and the supply side auxiliary particle moves based on the first potential difference or the second potential difference. The dispersed fine particles are reciprocated between the two plate-like electrode members based on the first potential difference or the second potential difference, and pass through the supply side through hole and the supply side through hole. It supplies in the said cylindrical electrode member.

A third aspect of the present invention is a fine particle coating apparatus as set forth in the third aspect.
A fine particle coating apparatus according to a third aspect is the fine particle coating apparatus according to the second aspect, wherein a diameter of the supply side through hole is smaller than a diameter of the supply side auxiliary particle.

The fourth invention of the present invention is the fine particle coating apparatus as described in claim 4.
The fine particle coating apparatus according to a fourth aspect is the fine particle coating apparatus according to the first aspect, wherein the linear electrode member and the cylindrical electrode member are predetermined along or in a vertical direction. It is arranged so as to be inclined at an angle and so that the slit does not face downward, and particles are dropped into the inside of the cylindrical electrode member from one of the upper ends at both ends of the cylindrical electrode member. A fine particle drop supply means is provided.

A fifth aspect of the present invention is a fine particle coating apparatus as described in the fifth aspect.
The fine particle coating apparatus according to claim 5 is the fine particle coating apparatus according to claim 1, wherein the linear electrode member and the cylindrical electrode member are horizontally disposed so that the slit does not face downward. In the cylindrical electrode member, emission-side auxiliary particles having a diameter larger than the diameter of the fine particles are accommodated, and the emission-side auxiliary particles are moved based on the first potential difference, so that the cylindrical shape The fine particles in the electrode member are dispersed, and the dispersed fine particles are moved based on the first potential difference and emitted from the slit.

A sixth aspect of the present invention is a fine particle coating apparatus as set forth in the sixth aspect.
A fine particle coating apparatus according to a sixth aspect is the fine particle coating apparatus according to the fifth aspect, wherein a width of the slit is smaller than a diameter of the emission side auxiliary particle.

A seventh aspect of the present invention is a fine particle coating apparatus as set forth in the seventh aspect.
A fine particle coating apparatus according to a seventh aspect is the fine particle coating apparatus according to any one of the first to sixth aspects, wherein the cylindrical electrode member and the member to be coated are electrically grounded.

An eighth aspect of the present invention is a fine particle coating apparatus as set forth in the eighth aspect.
The fine particle coating apparatus according to claim 8 is the fine particle coating apparatus according to any one of claims 1 to 7,
Relative movement means capable of relatively moving the member to be coated with respect to the position of the slit of the cylindrical electrode member is provided.

A ninth invention of the present invention is the fine particle coating method as described in the ninth aspect.
The fine particle coating method according to claim 9 includes a chamber forming a partitioned space, a decompression unit, a member to be coated, and a wire shape having a predetermined diameter with conductivity and a predetermined diameter. A linear electrode member, a cylindrical electrode member having electrical conductivity and having a diameter larger than the diameter of the linear electrode member and having an arbitrary length in the axial direction, a first DC power source, Relative movement means.
A slit having a width larger than the diameter of the fine particles is formed in the cylindrical electrode member in the axial direction, and fine particles to be coated on the coated member are accommodated or supplied inside the cylindrical electrode member, The electrode member and the cylindrical electrode member are arranged in the chamber so as not to contact each other and so that the linear electrode member is positioned at an axial position of the cylindrical electrode member, and the member to be coated is It arrange | positions in the said chamber so that the said slit of a cylindrical electrode member may be opposed.
A step of reducing the pressure in the chamber with the pressure reducing means; a step of applying a first potential difference between the linear electrode member and the cylindrical electrode member with the first DC power source; and the relative moving means. While moving the coated member relative to the cylindrical electrode member and the linear electrode member using the fine particles moving based on the first potential difference in the cylindrical electrode member, And a step of coating the member to be coated with fine particles by emitting from the slit and colliding with the member to be coated.

If the fine particle coating apparatus according to any one of claims 1 to 8 or the fine particle coating method according to claim 9 is used, a heating / drying process is not required, a high-pressure gas is not required, a decompressed chamber, a direct current and a line are used. The fine particle coating apparatus can be realized by an apparatus having a simpler configuration of a cylindrical electrode member and a cylindrical electrode member.
Moreover, while reducing the air resistance by reducing the pressure in the chamber, the linear electrode member and the cylindrical electrode member are arranged coaxially (position of the central axis), and are given to the fine particles on a plane arranged in parallel. Therefore, it is possible to give a very large electric field energy to the microparticles from the linear electrode member than possible, and the microparticles can move at a higher speed and collide with the coated member.
Further, the length of the slit 31S for emitting the fine particles is not particularly limited, so that the coating can be performed in a shorter time.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure explaining the whole structure of the fine particle coating apparatus 1 in 1st Embodiment. It is a figure explaining the schematic shape of the linear electrode member 30 and the cylindrical electrode member 31. FIG. It is a figure explaining the schematic shape of fine particle emission supply means. In 1st Embodiment, it is a figure explaining supply of fine particle NR (K) and a mode that fine particle NR (S) is radiate | emitted at high speed from the slit 31S. It is a figure explaining the relationship between the distance to the direction which goes to the cylindrical electrode member 31 from the linear electrode member 30 in the microparticles charged with the linear electrode member 30, and the movement speed of microparticles | fine-particles. It is a figure explaining the whole structure of the fine particle coating apparatus 2 in 2nd Embodiment. In 2nd Embodiment, it is a figure explaining supply of microparticles | fine-particles NR (K) and a mode that microparticles | fine-particles NR (S) are radiate | emitted at high speed from the slit 31S. It is a figure explaining the whole structure of the fine particle coating apparatus 3 in 3rd Embodiment. In 3rd Embodiment, it is a figure explaining a mode that fine particle NR (S) is radiate | emitted at high speed from the slit 31S. It is a figure explaining the example of the conventional coating apparatus 100 which coats the to-be-coated member W using AD method.

Hereinafter, first to third embodiments for carrying out the present invention will be described with reference to the drawings. Each of the first to third embodiments is different in the supply method of the fine particles NR to be coated on the member to be coated W.
In the following description, the fine particles to be coated on the coated member W will be described using any one of the fine particles NR (O), the fine particles NR (K), and the fine particles NR (S). However, the exercise state is different. The fine particle NR (O) shows a stationary state, the fine particle NR (S) shows a state of moving at a very high speed colliding with the coated member W, and the fine particle NR (K) is fine particle NR (O). ) And the fine particles NR (S).
Hereinafter, the first embodiment will be described in order.

●● [First embodiment (FIGS. 1 to 5)]
FIG. 1 shows an example of the overall configuration of a fine particle coating apparatus 1 according to the first embodiment. In the first embodiment, the fine particle coating apparatus 1 supplies fine particles into the cylindrical electrode member 31 by emitting fine particles NR (K) from the fine particle emission supply means 40.
● [Overall structure (Fig. 1)]
The fine particle coating apparatus 1 in the first embodiment shown in the example of FIG. 1 includes a chamber 10, a decompression unit 11, a relative movement unit 12, a first DC power source 20, a second DC power source 21, and a linear shape. The electrode member 30, the cylindrical electrode member 31, the fine particle emission supply means 40, the adjustment means 50, and the measurement means 51 and 52 are provided.
Inside the chamber 10 forming the partitioned space, a member to be coated W that is an object to be coated with the fine particles NR, a linear electrode member 30, a cylindrical electrode member 31, and a fine particle emission supply means 40. And measuring means 51 and 52 for measuring the concentration and flow rate of the fine particles NR (S).

The member W to be coated is connected to the relative moving means 12 and can be relatively translated with respect to the slit 31S of the cylindrical electrode member 31 in, for example, three orthogonal directions of the X, Y, and Z axes. At the same time, it can be turned around each of the X, Y, and Z axes, and is disposed at a position facing the slit 31S.
Further, the inside of the chamber 10 is decompressed by the decompression means 11 (vacuum pump or the like) to reduce the air resistance of the particulate NR (S) emitted from the slit 31S formed in the cylindrical electrode member 31, and the particulate A reduction in the speed of NR (S) is prevented.
In the first to third embodiments, the degree of pressure reduction by the pressure reducing means 11 is reduced to about 10 ⁻⁴ Pascals where no plasma is generated between the linear electrode member 30 and the cylindrical electrode member 31. .

The measuring means 51 and 52 are sensors using, for example, laser light, and the adjusting means 50 is the amount of fine particles NR (K) supplied to the cylindrical electrode member 31 based on signals from the measuring means 51 and 52. In order to adjust the above, the second DC power source 21 is controlled so that the amount of the fine particles NR (S) coated on the member to be coated W becomes a predetermined amount (a predetermined concentration, a predetermined flow rate, etc.).
Note that the measuring means 51 and 52 and the adjusting means 50 may be omitted.

[Configuration of the particle emission supply means 40 (FIGS. 1, 3, and 4)]
As shown in FIG. 3, the particle emission supply means 40 has a predetermined space between two plate electrode members 41, 42 arranged at a predetermined interval so as to be parallel to each other, and the plate electrode members 41, 42. The plate-like electrode members 41 and 42 are formed of a cylindrical wall member 43 for holding a predetermined interval while being electrically insulated from each other. In the upper plate-like electrode member 41, one or a plurality of supply-side through holes HK for emitting fine particles NR (K) reciprocating between the plate-like electrode members 41 and 42 to the outside are located at arbitrary positions. Is provided.
In the predetermined space 40K, fine particles NR (O) and auxiliary particles BR (K) having a diameter (for example, about several tens [μm]) larger than the diameter (for example, about 0.9 [nm]) of the fine particles NR (O). (Ceramic particles and the like, corresponding to supply side auxiliary particles) are accommodated.

The plate electrode members 41 and 42 are connected so as to be given a second potential difference from the second DC power supply 21, but the plate electrode member 41 has a higher potential than the plate electrode member 42. The plate-like electrode member 41 may be connected so as to have a lower potential than the plate-like electrode member 42. In the present embodiment, the upper plate-like electrode member 41 is connected so as to have a lower potential than the lower plate-like electrode member 42, and the plate-like electrode member 41 is electrically grounded. An example is shown.
When a second potential difference (for example, a potential difference of about 20 [KV]) is applied from the second DC power source 21 in this connected state, the auxiliary particles BR (K) reciprocate between the plate electrode members 41 and 42 and agglomerate. The fine particles NR (O) are dispersed by the auxiliary particles BR (K). The dispersed fine particles NR (K) also reciprocate between the plate electrode members 41 and 42 in the same manner as the auxiliary particles BR (K), and eventually the fine particles NR (K) are emitted from the supply side through holes HK.
The principle that the auxiliary particles BR (K) (or the fine particles NR (O)) reciprocate is that the stationary auxiliary particles BR (K) (or the fine particles NR (O)) are stationary at the lower plate-like electrode member 42. Is charged to + (or-) and moved to the upper plate electrode member 41 side which is the-side (or + side) (accelerated by an electric field). When the auxiliary particles (K) (or the fine particles NR (K)) moved to the plate electrode member 41 contact the plate electrode member 41, this time, the auxiliary particles (K) (or the fine particles NR (K)) are charged to − (or +), and the + side (or − The plate electrode member 42 on the lower side (accelerated by the electric field). This charging and movement is repeated to reciprocate.

The diameter of the supply side through hole HK may be larger than the diameter of the fine particle NR (K), but larger than the diameter of the fine particle NR (K) and smaller than the diameter of the auxiliary particle BR (K). When set, the auxiliary particles BR (K) can be prevented from jumping out.
Moreover, the supply side through-hole HK may be single or plural, and may be any number corresponding to the supply-side through hole HT formed in the cylindrical electrode member 31.
The second DC power supply 21 may be omitted by connecting the first DC power supply 20 without connecting the second DC power supply 21 to the particle emission supply means 40.

In addition, in the example of FIG. 1, an example in which a plurality of particle emission supply means 40 is arranged horizontally is shown, but one particle emission supply means 40 is arranged horizontally (in this case, the measurement means 51, 52, A single second DC power supply 21 may be provided), and a plurality of supply side through holes HK may be provided.
As shown in FIG. 4, the fine particles NR (K) emitted from the supply side through hole HK of the fine particle emission supply means 40 are supplied by the cylindrical electrode member 31 provided at a position facing the supply side through hole HK. It is supplied to the inside of the cylindrical electrode member 31 through the side through hole HT.

[Configuration of linear electrode member 30 and cylindrical electrode member 31 (FIGS. 1, 2, and 4)]
As shown in FIGS. 2 and 4, the linear electrode member 30 has conductivity and has a wire shape with an arbitrary length LS with a predetermined diameter RS, and the cylindrical electrode member 31 has conductivity. It has a cylindrical shape with an arbitrary length LT with a diameter RT larger than the diameter RS of the linear electrode member 30. The linear electrode member 30 and the cylindrical electrode member 31 are connected by the first DC power supply 20 so that a first potential difference is given. The linear electrode member 30 may be connected so as to have a higher potential than the cylindrical electrode member 31, or the linear electrode member 30 may have a lower potential than the cylindrical electrode member 31. It may be connected as follows. In the present embodiment, an example is shown in which the linear electrode member 30 is connected to have a higher potential than the cylindrical electrode member 31.
As shown in FIG. 4, the linear electrode member 30 and the cylindrical electrode member 31 are arranged so that the linear electrode member 30 is not in contact with each other and is coaxial with the cylindrical electrode member 31 (at the position of the central axis). It arrange | positions in the chamber 10 so that it may be located.

Note that either the + side or the − side of the first DC power supply 20 may be electrically grounded, but it is more preferable to ground as follows.
The cylindrical electrode member 31 is electrically grounded, and the coated member W is grounded so as to have the same potential as the cylindrical electrode member 31 so as not to repel the emitted fine particles NR (S).
Similarly, in FIG. 4, the cylindrical electrode member 31 and the plate electrode member 41 have the same potential so that the cylindrical electrode member 31 does not repel the fine particles NR (K) emitted from the fine particle emission supply means 40. Be grounded so that
Here, the electrical connection of the linear electrode member 30, the cylindrical electrode member 31, the member W to be coated, the (upper) plate electrode member 41, and the (lower) plate electrode member 42 is summarized.
If the cylindrical electrode member 31, the coated member W, and the plate electrode member 41 are electrically grounded, the linear electrode member 30 may be connected to the cylindrical electrode member 31 so as to have a high potential. The linear electrode member 30 may be connected to the cylindrical electrode member 31 so as to have a low potential. Further, the plate electrode member 42 may be connected to the plate electrode member 41 so as to have a high potential, or the plate electrode member 42 may have a low potential with respect to the plate electrode member 41. It may be connected.
Further, when both the linear electrode member 31 and the plate electrode member 42 are connected so as to have a low potential, or both have a high potential, the particulate NR (K) emitted from the particulate emission supply means 40 is linear. It is preferable that the supply side through hole HK, the supply side through hole HT, and the linear electrode member 30 are arranged in a straight line so as to face the electrode member 30.
Further, when one of the linear electrode member 31 and the plate electrode member 42 is connected to a low potential and the other is set to a high potential, the fine particles NR (K) emitted from the fine particle emission supply means 40 are accelerated. It is preferable that the supply side through hole HK, the supply side through hole HT, and the slit 31S are arranged in a straight line so as to avoid the linear electrode member 30 so as not to be emitted from the slit 31S as it is (slit 31S). The positions of the supplied side through hole HT and the supply side through hole HK are shown in FIG. 4 as slits 31S so that the linear electrode member 30, the supplied side through hole HT, and the supply side through hole HK do not line up in a straight line. And a position shifted from the straight line connecting the linear electrode member 30).

As shown in FIGS. 2 and 4, the cylindrical electrode member 31 is formed with slits 31S having a slit width 31W larger than the diameter of the fine particles along the axial direction. One or a plurality of supply-side through holes HT for receiving the supply of (K) are formed.
The length LT of the cylindrical electrode member 31 and the length LS of the linear electrode member 30 are not particularly limited and can be set to arbitrary lengths. Increasing the length LT of the cylindrical electrode member 31 and the length LS of the linear electrode member 30 is more preferable because the slit 31S that emits the fine particles NR (S) becomes longer and the coating time can be further shortened.
As shown in FIG. 4, since the fine particles NR (S) are emitted from the slit 31S (emitted in the direction from the linear electrode member 30 toward the slit 31S), the member to be coated is located at a position facing the slit 31S. W is arranged.
Further, the insulating lid 32 shown in FIG. 2 is a lid that covers the openings at both ends of the cylindrical electrode member 31, and is provided with a through-hole through which the linear electrode member 30 can be inserted. The insulating lid 32 may be omitted.
Further, in the present embodiment, the cylindrical electrode member 31 is horizontally disposed and the slit 31S is disposed on the upper side. However, the cylindrical electrode member 31 may not be disposed horizontally, and the slit 31S must be on the lower side. In particular, it may be directed in any direction.

As shown in FIG. 4, the cylindrical electrode member 31 and the linear electrode member 30 are given a first potential difference (for example, a potential difference of 50 [KV]) from the first DC power supply 20, and the cylindrical electrode member 31. The fine particles NR (K) supplied therein repeat reciprocating motion between the linear electrode member 30 and the cylindrical electrode member 31, and eventually the fine particles NR (S) are emitted from the slit 31S.
The principle that the fine particles NR (K) reciprocate between the linear electrode member 30 and the cylindrical electrode member 31 is the auxiliary particle BR (K) (reciprocating between the plate electrode members 41 and 42). Or the fine particle NR (K)), and when the supplied fine particle NR (K) comes into contact with the cylindrical electrode member 31, it is charged to-(or +) and on the + side (or-side). It moves to a certain linear electrode member 30 side. When it comes into contact with the linear electrode member 30, it is charged to + (or −) and moves to the side of the cylindrical electrode member 31 that is the − side (or + side). This charging and movement is repeated to reciprocate.
The speed at which the fine particles NR (S) are emitted from the slit 31S is important.
In order to increase the speed of the fine particles NR (S) emitted from the slit 31S, it is necessary to increase the energy given to the fine particles in the cylindrical electrode member 31. The fine particles in the cylindrical electrode member 31 are given energy based on the first potential difference from the first DC power supply 20.

Here, the merit of the structure of the linear electrode member 30 and the cylindrical electrode member 31 with respect to the structure of the plate-shaped electrode members 41 and 42 arrange | positioned in parallel is demonstrated.
The magnitude of the energy given to the fine particles NR (K) depends on the potential difference given between the electrodes and the charge of the fine particles (distance between the electrodes (electric field)) in the configuration of the plate electrode members 41 and 42 arranged in parallel. . Further, in the configuration of the linear electrode member 30 and the cylindrical electrode member 31, it depends on the potential difference between the electrodes, the distance between the electrodes, and the ratio of the diameter of the cylindrical electrode member 31 to the diameter of the linear electrode member 30. To do.
In general, the DC power supply that can be practically used is up to about 50 [KV]. Therefore, in order to use a 50 [KV] DC power supply so that the emission speed of the fine particles is equivalent to that of the conventional AD method shown in FIG. 10, the plate electrode members 41 and 42 arranged in parallel are used. In this configuration, the distance between the electrodes must be made very small, and in fact, the insulating state between the electrodes cannot be maintained and the discharge is performed, and the voltage cannot be maintained.
However, in the configuration of the linear electrode member 30 and the cylindrical electrode member 31, the ratio of the diameter of the linear electrode member 30 to the diameter of the cylindrical electrode member 31 is reduced even if the same 50 [KV] DC power supply is used. Thus, only the electric field in the vicinity of the linear electrode member can be increased, whereby the charge of the fine particles can be dramatically increased, and the emission speed of the fine particles can be increased without causing discharge between the electrodes. . For example, the energy that can be given to the fine particles when the potential difference is 50 [KV] and the distance between the electrodes is 10 [mm] in the configuration of the plate electrode members 41 and 42 is “W”. In the configuration of the linear electrode member 30 and the cylindrical electrode member 31, the potential difference is 50 [KV], the distance between the electrodes (approximately the radius of the cylindrical electrode member 31) is 10 [mm], and the diameter of the linear electrode member is In the case of 0.1 [mm] (cylinder electrode member diameter (RT) / linear electrode member diameter (RS) = about 200), the energy that can be given to the fine particles is theoretically about “W”. It will be 25 times.
Therefore, it is possible to increase the emission speed of the fine particles without generating discharge between the electrodes only by increasing the diameter (RT) of the cylindrical electrode member / diameter (RS) of the linear electrode member. Actually, the emission speed of the fine particles can be made to reach the same speed as that of the AD method.

For example, the first potential difference given from the first DC power supply 20 is 20 [KV], the diameter of the fine particles NR is 1 [nm], and the distance R from the surface of the linear electrode member 30 to the inner wall of the cylindrical electrode member 31 is 5 [ mm], the diameter RS of the linear electrode member 30 is 0.1 [mm] (that is, the diameter RT of the cylindrical electrode member 31 / the diameter RS of the linear electrode member 30 = 100), and the pressure in the chamber 10 is 10 ^{−. 4} [Pascal], the velocity of the emitted fine particles NR (S) theoretically reaches 300 [m / sec] and collides with the member to be coated W at room temperature to form a coating (coating) ) Can reach a sufficient speed.
FIG. 5 is a graph showing an example of the relationship between the distance from the linear electrode member 30 (surface thereof) and the velocity of the fine particle NR (S) in the fine particle NR (S). As can be seen from this graph, the fine particles NR (S) reach the maximum speed Vm at the position of the distance R (that is, the position of the slit 31S) and collide with the coated member W at the speed Vm.

●● [Second Embodiment (FIGS. 6 and 7)]
FIG. 6 shows an example of the overall configuration of the fine particle coating apparatus 2 according to the second embodiment. In the second embodiment, the fine particle coating apparatus 2 is configured to drop an appropriate amount of fine particles NR (O) from the fine particle drop supply means 60 and supply the fine particles into the cylindrical electrode member 31. Hereinafter, differences from the fine particle coating apparatus 1 described in the first embodiment will be mainly described.

● [Overall structure (Fig. 6)]
The fine particle coating apparatus 2 in the second embodiment shown in FIG. 6 is different from the fine particle coating apparatus 1 shown in FIG. 1 in that the linear electrode member 30 and the cylindrical electrode member 31 are in the vertical direction or the vertical direction. It arrange | positions in the chamber 10 so that it may incline at a predetermined angle. In the case of tilting, it is preferable that the slit 31S does not face downward so that the fine particles do not fall from the slit.
And the to-be-coated member W and the relative movement means 12 are arrange | positioned in the position facing the slit 31S of the cylindrical electrode member 31. FIG.
In addition to the fine particle coating apparatus 1 shown in FIG. 1, a fine particle drop supply means 60 is disposed at the upper end of the cylindrical electrode member 31 instead of the fine particle emission supply means 40.
Each shape of the linear electrode member 30 and the cylindrical electrode member 31 is the same as that of the first embodiment except that the supply-side through hole HT is not provided. Moreover, the point that the linear electrode member 30 and the cylindrical electrode member 31 are coaxially arranged is the same as that of the first embodiment, and the connection of the first DC power supply 20 is also the same as that of the first embodiment. The same.

● [Fine particle supply method and appearance of emitted fine particles (Fig. 7)]
As shown in FIG. 7, in the second embodiment, the fine particle NR (O) used for coating is stocked in the fine particle drop supply means 60.
The measuring means 51 and 52 are sensors using, for example, laser light, and the adjusting means 50 is a drop of fine particles NR (O) supplied to the cylindrical electrode member 31 based on signals from the measuring means 51 and 52. In order to adjust the amount, the opening / closing means 61 of the fine particle drop supply means 60 is controlled so that the amount of the fine particles NR (S) coated on the coated member W becomes a predetermined concentration.
Note that the measuring means 51 and 52 and the adjusting means 50 may be omitted.
When the measuring means 51 and 52 and the adjusting means 50 are omitted, the opening / closing means 61 is adjusted so that a certain amount of fine particles NR (O) are dropped at any time.
Note that the operation in which the fine particles NR (O) supplied by dropping into the cylindrical electrode member 31 are emitted from the slit 31S is the same as that in the first embodiment, and thus the description thereof is omitted.

●● [Third Embodiment (FIGS. 8 and 9)]
FIG. 8 shows an example of the overall configuration of the fine particle coating apparatus 3 according to the third embodiment. In the third embodiment, neither the particle emission supply means 40 in the first embodiment (FIG. 1) nor the particle drop supply means 60 in the second embodiment (FIG. 6) is provided, and the particle NR. (O) is accommodated in the cylindrical electrode member 31 in advance. Hereinafter, differences from the fine particle coating apparatus 1 described in the first embodiment will be mainly described.

● [Overall configuration (Fig. 8)]
The fine particle coating apparatus 3 in the third embodiment shown in FIG. 8 is different from the fine particle coating apparatus 1 shown in FIG. 1 in that the fine particle emission supply means 40, the second DC power supply 21, the measurement means 51 and 52, and the adjustment means 50. And the point that the to-be-supplied side through hole HT is not formed in the cylindrical electrode member 31 is different. Further, as shown in FIG. 9, inside the cylindrical electrode member 31, fine particles NR (O) and auxiliary particles BR (K) having a diameter larger than the diameter of the fine particles NR (O) (on the emission side auxiliary particles) Equivalent) is also different.
The linear electrode member 30 and the cylindrical electrode member 31 are arranged horizontally in the chamber 10, and are pointed so that the slit 31S of the cylindrical electrode member 31 is not on the lower side. The point that the member to be coated is arranged at a position facing the slit 31S is the same as that of the fine particle coating apparatus 1 shown in FIG.
Further, the shapes of the linear electrode member 30 and the cylindrical electrode member 31 are the same as those in the first embodiment except that the supply-side through hole HT is not provided. Moreover, the point that the linear electrode member 30 and the cylindrical electrode member 31 are coaxially arranged is the same as that of the first embodiment, and the connection of the first DC power supply 20 is also the same as that of the first embodiment. The same.
Note that the cylindrical electrode member 31 may be provided with an insulating lid 32 shown in FIG.

● [Particle supply method and appearance of particles (Fig. 9)]
As shown in FIG. 9, in the third embodiment, the fine particles NR (K) used for coating are stored in advance inside the cylindrical electrode member 31. In the example of FIG. 8, the auxiliary particles BR (K) are also accommodated in the cylindrical electrode member 31, but the auxiliary particles BR (K) may be omitted.
In addition, the operation of emitting the fine particles NR (S) from the slits 31S regardless of the presence or absence of the auxiliary particles BR (K) has been described in the first embodiment and will be omitted.
When the auxiliary particles BR (K) are accommodated in the cylindrical electrode member 31, the width 31W of the slit 31S is larger than the diameter of the fine particles NR (S) and the diameter of the auxiliary particles BR (K). If it is set smaller than that, the auxiliary particles BR (K) can be prevented from jumping out of the cylindrical electrode member 31.

  As described above in the first to third embodiments, the fine particle coating apparatuses 1 to 3 of the present invention are simpler than the AD method using electric power without using high-pressure gas. It can be set as a simple structure. In addition, by making the shape and arrangement of the linear electrode member 30 and the cylindrical electrode member 31 appropriate, fine particles can collide with the coated member at high speed, and coating at normal temperature is possible, and heating / drying is possible. This process and equipment are unnecessary. Moreover, since it is possible to make the length of the slit 31S arbitrary length, compared with AD method, coating with a wider width | variety is possible and coating time can be shortened more.

The first to third embodiments have described the fine particle coating apparatuses 1 to 3. As a fine particle coating method, the chamber 10, the decompression unit 11, the coated member W, the linear electrode member 30, and the slit 31 </ b> S are used. The cylindrical electrode member 31, the first DC power supply 20, and the relative movement means 12 are used to store or supply the fine particles NR (K) inside the cylindrical electrode member 31. The electrode member 30 is arranged on the same axis, and the coated member W is arranged at a position facing the slit 31S.
Then, the step of decompressing the inside of the chamber 10 by the decompression means 11, the step of applying a first potential difference to the linear electrode member 30 and the cylindrical electrode member 31 by the first DC power supply 20, and the slit using the relative movement means 12 Coating the coated member W with the fine particles NR (S) by emitting the fine particles NR (S) from the slit 31S and colliding with the coated member W while moving the coated member W relative to 31S; Can be used as a fine particle coating method capable of coating various fine particles on various coated members.

The fine particle coating apparatus and fine particle coating method of the present invention are not limited to the appearance, configuration, structure, operation, etc. described in the present embodiment, and various modifications, additions, and deletions are possible without departing from the spirit of the present invention. It is.
The numerical values used in the description of the present embodiment are examples, and are not limited to these numerical values.
The fine particles NR used for coating are not limited to nanoparticles or the like, and various fine particles can be used.
The coated member W is not limited to a flat surface regardless of the presence or absence of conductivity, and can be coated even if there are three-dimensional irregularities.

1 Fine particle coating apparatus (first embodiment)
2 Fine particle coating device (second embodiment)
3 Fine particle coating device (third embodiment)
DESCRIPTION OF SYMBOLS 10 Chamber 11 Pressure reducing means 12 Relative moving means 20 1st DC power supply 21 2nd DC power supply 30 Linear electrode member 31 Cylindrical electrode member 31S Slit 40 Fine particle emission supply means 41, 42 Plate electrode member 43 Cylindrical wall member 50 Adjustment Means 51, 52 Measuring means 60 Fine particle drop supply means 61 Opening / closing means HT Supply side through hole HK Supply side through hole NR (O) Fine particle NR (K) Fine particle NR (S) Fine particle BR (K) (Supply side) auxiliary particle , (Outgoing side) auxiliary particles

Claims (9)

A chamber forming a partitioned space;
Decompression means;
A first DC power supply;
A wire-like linear electrode member having electrical conductivity and having a predetermined diameter and an arbitrary length;
A cylindrical electrode member having conductivity and a cylindrical electrode member having a diameter larger than the diameter of the linear electrode member and having an arbitrary length in the axial direction;
In the cylindrical electrode member, slits having a width larger than the diameter of the fine particles are formed in the axial direction, and fine particles to be coated on the coated member are accommodated or supplied.
The linear electrode member and the cylindrical electrode member are disposed in the chamber so as not to contact each other and so that the linear electrode member is positioned at an axial position of the cylindrical electrode member,
The decompression means decompresses the inside of the chamber,
The coated member is disposed in the chamber and at a position facing the slit of the cylindrical electrode member,
The first DC power supply provides a first potential difference between the linear electrode member and the cylindrical electrode member,
The fine particles moving based on the first potential difference in the cylindrical electrode member are emitted from the slit to collide with the coated member, and the coated member is coated with the fine particles.
Fine particle coating equipment. The fine particle coating apparatus according to claim 1,
The linear electrode member and the cylindrical electrode member are horizontally disposed so that the slit does not face downward,
On the lower surface of the cylindrical electrode member, one or a plurality of supply-side through holes having a diameter larger than the diameter of the fine particles are formed,
Under the cylindrical electrode member in the chamber, one or a plurality of fine particle emission supply means are disposed,
The fine particle emitting and supplying means is configured such that the two plate electrode members horizontally arranged at predetermined intervals so as to be parallel to each other and the two plate electrode members are electrically insulated from each other. A cylindrical wall member that maintains a distance and forms a predetermined space between the two plate-like electrode members,
The predetermined space contains fine particles and supply side auxiliary particles having a diameter larger than the diameter of the fine particles,
The two plate-like electrode members are given the first potential difference from the first DC power source, or provided with a second DC power source and given the second potential difference from the second DC power source,
The upper plate-like electrode member of the two plate-like electrode members is formed with one or more supply-side through holes having a diameter larger than the diameter of the fine particles at an arbitrary position in the predetermined space,
The fine particle emission supply means comprises:
The supply side through hole and the supply side through hole are arranged to face each other,
The fine particles dispersed by the supply side auxiliary particles moving based on the first potential difference or the second potential difference are reciprocated between two plate electrode members based on the first potential difference or the second potential difference. To move and supply the cylindrical electrode member through the supply side through hole and the supply side through hole,
Fine particle coating equipment. The fine particle coating apparatus according to claim 2,
The diameter of the supply side through hole is formed smaller than the diameter of the supply side auxiliary particles,
Fine particle coating equipment. The fine particle coating apparatus according to claim 1,
The linear electrode member and the cylindrical electrode member are arranged so as to be inclined along a vertical direction or at a predetermined angle with respect to the vertical direction and the slit does not face downward.
Fine particle drop supply means is provided that drops and supplies fine particles to the inside of the cylindrical electrode member from one of the upper ends at both ends of the cylindrical electrode member.
Fine particle coating equipment. The fine particle coating apparatus according to claim 1,
The linear electrode member and the cylindrical electrode member are horizontally disposed so that the slit does not face downward,
The cylindrical electrode member contains emission-side auxiliary particles having a diameter larger than that of the fine particles,
Moving the emission-side auxiliary particles based on the first potential difference to disperse the fine particles in the cylindrical electrode member, and moving the dispersed fine particles based on the first potential difference to be emitted from the slit;
Fine particle coating equipment. The fine particle coating apparatus according to claim 5,
The width of the slit is formed smaller than the diameter of the emission side auxiliary particles,
Fine particle coating equipment. The fine particle coating apparatus according to any one of claims 1 to 6,
The cylindrical electrode member and the coated member are electrically grounded,
Fine particle coating equipment. The fine particle coating apparatus according to any one of claims 1 to 7,
A relative movement means capable of relatively moving the member to be coated with respect to the position of the slit of the cylindrical electrode member;
Fine particle coating equipment. A chamber forming a partitioned space, a decompression unit, a member to be coated, a wire-like linear electrode member having a predetermined diameter and having a conductivity, and a conductivity. Then, a cylindrical electrode member having a diameter larger than the diameter of the linear electrode member and having an arbitrary length in the axial direction, a first DC power source, and a relative moving means are used.
A slit having a width larger than the diameter of the fine particles is formed in the cylindrical electrode member in the axial direction,
Accommodating or supplying fine particles to be coated on the coated member inside the cylindrical electrode member
The linear electrode member and the cylindrical electrode member are arranged in the chamber so as not to contact each other and so that the linear electrode member is positioned at an axial position of the cylindrical electrode member,
The coated member is disposed in the chamber so as to face the slit of the cylindrical electrode member,
Decompressing the chamber with the decompression means;
Applying a first potential difference between the linear electrode member and the cylindrical electrode member at the first DC power source;
While moving the member to be coated relative to the cylindrical electrode member and the linear electrode member using the relative moving means, it moves based on the first potential difference in the cylindrical electrode member. Coating the fine particles on the coated member by causing the fine particles to exit from the slit and collide with the coated member.
Fine particle coating method.

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