WO2010150772A1 - Fine particle coating apparatus and fine particle coating method - Google Patents

Fine particle coating apparatus and fine particle coating method Download PDF

Info

Publication number
WO2010150772A1
WO2010150772A1 PCT/JP2010/060533 JP2010060533W WO2010150772A1 WO 2010150772 A1 WO2010150772 A1 WO 2010150772A1 JP 2010060533 W JP2010060533 W JP 2010060533W WO 2010150772 A1 WO2010150772 A1 WO 2010150772A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode member
cylindrical electrode
fine particle
fine particles
coated
Prior art date
Application number
PCT/JP2010/060533
Other languages
French (fr)
Japanese (ja)
Inventor
多津男 庄司
慎一郎 白岩
Original Assignee
則竹 ひとみ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 則竹 ひとみ filed Critical 則竹 ひとみ
Publication of WO2010150772A1 publication Critical patent/WO2010150772A1/en

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/02—Coating starting from inorganic powder by application of pressure only
    • C23C24/04—Impact or kinetic deposition of particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder

Definitions

  • the present invention relates to a fine particle coating apparatus and a fine particle coating method for coating the surface of various coated members with various fine particles such as nanoparticles.
  • an aerosol deposition method (hereinafter, referred to as “aerosol deposition method”) is used to form a hard ceramic film on a coated member using impact energy by spraying ceramic fine particles in a solid state at a high temperature at a normal temperature without heating. (Referred to as AD method) has been developed. Since the AD method can form a film in a dry state, the conventional process and equipment for evaporating the liquid after spraying the fine particle mixture (heating and drying) and equipment are not required, and the equipment and cost are suppressed, and the coating is performed. A uniform film can be formed with high quality in a short time regardless of the material of the member. In the AD method, as shown in FIG.
  • the high-pressure gas in the tank 120 is introduced into the aerosol generator 122 containing fine particles NR (O) through the flow rate adjusting means 121, and the like smoke of tobacco.
  • high pressure injection is performed from the nozzle 130 through the crushing / classifying unit 123 so as to maintain a predetermined particle size distribution.
  • the inside of the chamber 10 is decompressed by decompression means 11 (vacuum pump or the like), and the aerosol containing fine particles collides with the surface of the coated member W at a high speed without being decelerated, and is crushed and altered by the impact energy. Solidify at room temperature.
  • decompression means 11 vacuum pump or the like
  • the relative moving means 12 can move and rotate the coated member W in an arbitrary direction, and the concentration adjuster 150 is based on signals from the measuring means 151 and 152 using laser light or the like.
  • the flow rate adjusting means 121 is controlled to adjust the concentration and flow rate of the fine particles.
  • fine particles and auxiliary particles having a diameter larger than the diameter of the fine particles are arranged between the electrodes arranged at a predetermined interval, and a member to be coated is arranged between the electrodes. ing.
  • a fine particle coating method in which a potential difference is applied between the electrodes, the fine particles and the auxiliary particles are reciprocated between the electrodes to disperse the fine particles with the auxiliary particles, and the auxiliary particles are struck against the coated member and coated. It is disclosed.
  • the AD method requires high-pressure gas, and there is a possibility that the apparatus becomes large and complicated. Moreover, although the air in the chamber 10 is decompressed by the decompression means 11, aerosol (high pressure gas) containing fine particles is injected from the nozzle 130, and the efficiency of the decompression means 11 is poor. Further, in FIG. 10, there is a limitation that the nozzle width WN of the nozzle 130 is about several [mm], and it is difficult to further shorten the coating time. In the prior art described in Patent Document 1, a DC power source is used without using high-pressure gas, and the apparatus is simple and can be miniaturized.
  • the first invention of the present invention is a chamber having a partitioned space, a decompression means, a first DC power source, and a wire having a predetermined diameter with conductivity and a predetermined diameter.
  • Fine particle coating comprising: a linear electrode member having a shape; and a cylindrical electrode member having conductivity and a cylindrical shape having a diameter larger than the diameter of the linear electrode member and having an arbitrary length in the axial direction Device. A slit having a width larger than the diameter of the fine particles is formed in the axial direction in the cylindrical electrode member, and fine particles to be coated on the coated member are accommodated or supplied.
  • the linear electrode member and the cylinder The electrode members are arranged in the chamber so as not to contact each other and so that the linear electrode member is located at the axial position of the cylindrical electrode member.
  • the decompression means decompresses the interior of the chamber, and the member to be coated is disposed in the chamber and at a position facing the slit of the cylindrical electrode member.
  • the first DC power supply gives a first potential difference between the linear electrode member and the cylindrical electrode member, and fine particles moving based on the first potential difference in the cylindrical electrode member, The light is emitted from the slit and collides with the member to be coated to coat the member to be coated with fine particles.
  • a second invention of the present invention is the fine particle coating apparatus according to the first invention, wherein the linear electrode member and the cylindrical electrode member are horizontally arranged so that the slit does not face downward.
  • One or a plurality of supply-side through-holes having a diameter larger than the diameter of the fine particles are formed on the lower surface of the cylindrical electrode member, and the cylindrical electrode in the chamber Under the member, one or a plurality of fine particle emission supply means are arranged.
  • the fine particle emitting and supplying means is configured such that the two plate electrode members horizontally arranged at predetermined intervals so as to be parallel to each other and the two plate electrode members are electrically insulated from each other.
  • the two plate-like electrode members are provided with the first potential difference from the first DC power source, or are provided with a second DC power source, and the second potential difference is provided from the second DC power source.
  • the upper plate electrode member of the two plate electrode members is formed with one or a plurality of supply side through holes having a diameter larger than the diameter of the fine particles at an arbitrary position in the predetermined space. .
  • the fine particle emission supply means is arranged so that the supply side through hole and the supply side through hole face each other, and the supply side auxiliary particle moves based on the first potential difference or the second potential difference.
  • the dispersed fine particles are reciprocated between the two plate-like electrode members based on the first potential difference or the second potential difference, and pass through the supply side through hole and the supply side through hole. It supplies in the said cylindrical electrode member.
  • a third invention of the present invention is the fine particle coating apparatus according to the second invention, wherein the diameter of the supply side through hole is smaller than the diameter of the supply side auxiliary particle.
  • a fourth invention of the present invention is the fine particle coating apparatus according to the first invention, wherein the linear electrode member and the cylindrical electrode member are along the vertical direction or with respect to the vertical direction. And the slits are arranged so as not to face downward, and the fine particles fall into the inside of the cylindrical electrode member from one upper end at both ends of the cylindrical electrode member. There are provided fine particle drop supply means.
  • a fifth invention of the present invention is the particulate coating apparatus according to the first invention, wherein the linear electrode member and the cylindrical electrode member are arranged horizontally so that the slit does not face downward.
  • the emission side auxiliary particles having a diameter larger than the diameter of the fine particles are accommodated, and the emission side auxiliary particles are moved based on the first potential difference.
  • the fine particles in the cylindrical electrode member are dispersed, and the dispersed fine particles are moved based on the first potential difference and emitted from the slit.
  • a sixth invention of the present invention is the fine particle coating apparatus according to the fifth invention, wherein the slit has a width smaller than the diameter of the emission-side auxiliary particles.
  • a seventh invention of the present invention is the particulate coating apparatus according to any one of the first to sixth inventions, wherein the cylindrical electrode member and the member to be coated are electrically connected. Grounded.
  • an eighth invention of the present invention is the fine particle coating apparatus according to any one of the first to seventh inventions, wherein the position of the slit of the cylindrical electrode member is as follows. Relative movement means capable of relatively moving the member to be coated is provided.
  • the ninth aspect of the present invention provides a wire-like shape having a predetermined diameter with a predetermined diameter and having a chamber forming a partitioned space, a decompression means, a member to be coated, and a conductive material.
  • a slit having a width larger than the diameter of the fine particles is formed in the cylindrical electrode member in the axial direction, and fine particles to be coated on the coated member are accommodated or supplied inside the cylindrical electrode member,
  • the electrode member and the cylindrical electrode member are arranged in the chamber so as not to contact each other and so that the linear electrode member is positioned at an axial position of the cylindrical electrode member, and the member to be coated is It arrange
  • the chamber is decompressed without the need for a heating / drying process, the need for high-pressure gas, and the like.
  • the fine particle coating apparatus can be realized by an apparatus having a simpler configuration of a direct current, a linear electrode member, and a cylindrical electrode member.
  • the linear electrode member and the cylindrical electrode member are arranged coaxially (position of the central axis), and are given to the fine particles on a plane arranged in parallel.
  • the length of the slit 31S for emitting the fine particles is not particularly limited, so that the coating can be performed in a shorter time.
  • each of the first to third embodiments differs in the method for supplying the fine particles NR to be coated on the member to be coated W.
  • the fine particles to be coated on the coated member W will be described using any one of the fine particles NR (O), the fine particles NR (K), and the fine particles NR (S).
  • the fine particle NR (O) shows a stationary state
  • the fine particle NR (S) shows a state of moving at a very high speed colliding with the coated member W
  • the fine particle NR (K) is fine particle NR (O).
  • the first embodiment will be described in order.
  • FIG. 1 shows an example of the overall configuration of a fine particle coating apparatus 1 according to the first embodiment.
  • the fine particle coating apparatus 1 supplies fine particles into the cylindrical electrode member 31 by emitting fine particles NR (K) from the fine particle emission supply means 40.
  • the fine particle coating apparatus 1 in the first embodiment shown in the example of FIG. 1 includes a chamber 10, a decompression unit 11, a relative movement unit 12, a first DC power source 20, a second DC power source 21, and a linear shape.
  • the electrode member 30, the cylindrical electrode member 31, the fine particle emission supply means 40, the adjustment means 50, and the measurement means 51 and 52 are provided.
  • a member to be coated W that is an object to be coated with the fine particles NR
  • a linear electrode member 30 Inside the chamber 10 forming the partitioned space, a member to be coated W that is an object to be coated with the fine particles NR, a linear electrode member 30, a cylindrical electrode member 31, and a fine particle emission supply means 40.
  • measuring means 51 and 52 for measuring the concentration and flow rate of the fine particles NR (S).
  • the member W to be coated is connected to the relative moving means 12 and can be relatively translated with respect to the slit 31S of the cylindrical electrode member 31 in, for example, three orthogonal directions of the X, Y, and Z axes. At the same time, it can be turned around each of the X, Y, and Z axes, and is disposed at a position facing the slit 31S. Further, the inside of the chamber 10 is decompressed by the decompression means 11 (vacuum pump or the like) to reduce the air resistance of the particulate NR (S) emitted from the slit 31S formed in the cylindrical electrode member 31, and the particulate A reduction in the speed of NR (S) is prevented.
  • the degree of pressure reduction by the pressure reducing means 11 is such that plasma is not generated between the linear electrode member 30 and the cylindrical electrode member 31, and 10 ⁇ 4 Torr (about 0. The pressure was reduced to about 01 Pascal).
  • the measuring means 51 and 52 are sensors using, for example, laser light, and the adjusting means 50 is the amount of fine particles NR (K) supplied to the cylindrical electrode member 31 based on signals from the measuring means 51 and 52.
  • the second DC power source 21 is controlled so that the amount of the fine particles NR (S) coated on the member W to be coated becomes a predetermined amount (a predetermined concentration, a predetermined flow rate, etc.).
  • the measuring means 51 and 52 and the adjusting means 50 may be omitted.
  • the particle emission supply means 40 has a predetermined space between two plate electrode members 41, 42 arranged at a predetermined interval so as to be parallel to each other, and the plate electrode members 41, 42.
  • the plate-like electrode members 41 and 42 are formed of a cylindrical wall member 43 for holding a predetermined interval while being electrically insulated from each other.
  • one or a plurality of supply-side through holes HK for emitting fine particles NR (K) reciprocating between the plate-like electrode members 41 and 42 to the outside are located at arbitrary positions. Is provided.
  • the plate electrode members 41 and 42 are connected so as to be given a second potential difference from the second DC power supply 21, but the plate electrode member 41 has a higher potential than the plate electrode member 42.
  • the plate-like electrode member 41 may be connected so as to have a lower potential than the plate-like electrode member 42.
  • the upper plate-like electrode member 41 is connected so as to have a lower potential than the lower plate-like electrode member 42, and the plate-like electrode member 41 is electrically grounded.
  • a second potential difference for example, a potential difference of about 20 [KV]
  • the auxiliary particles BR (K) reciprocate between the plate electrode members 41 and 42 and agglomerate.
  • the fine particles NR (O) being dispersed are dispersed by the auxiliary particles BR (K).
  • the dispersed fine particles NR (K) also reciprocate between the plate electrode members 41 and 42 in the same manner as the auxiliary particles BR (K), and eventually the fine particles NR (K) are emitted from the supply-side through holes HK.
  • the principle that the auxiliary particles BR (K) (or the fine particles NR (O)) reciprocate is that the stationary auxiliary particles BR (K) (or the fine particles NR (O)) are stationary at the lower plate-like electrode member 42. Is charged to + (or-) and moved to the upper plate electrode member 41 side which is the-side (or + side) (accelerated by an electric field).
  • auxiliary particles (K) or fine particles NR (K) moved to the plate electrode member 41 come into contact with the plate electrode member 41, this time, the auxiliary particles (K) (or fine particles NR (K)) are charged to ⁇ (or +), The plate electrode member 42 on the lower side (accelerated by the electric field). This charging and movement is repeated to reciprocate.
  • the diameter of the supply side through hole HK may be larger than the diameter of the fine particle NR (K), but larger than the diameter of the fine particle NR (K) and smaller than the diameter of the auxiliary particle BR (K). When set, the auxiliary particles BR (K) can be prevented from jumping out.
  • the supply side through-hole HK may be single or plural, and may be any number corresponding to the supply-side through hole HT formed in the cylindrical electrode member 31.
  • the second DC power supply 21 may be omitted by connecting the first DC power supply 20 without connecting the second DC power supply 21 to the particle emission supply means 40.
  • FIG. 1 an example in which a plurality of particle emission supply means 40 is arranged horizontally is shown, but one particle emission supply means 40 is arranged horizontally (in this case, the measurement means 51, 52, A single second DC power supply 21 may be provided), and a plurality of supply side through holes HK may be provided.
  • the fine particles NR (K) emitted from the supply side through hole HK of the fine particle emission supply means 40 are supplied by the cylindrical electrode member 31 provided at a position facing the supply side through hole HK. It is supplied to the inside of the cylindrical electrode member 31 through the side through hole HT.
  • the linear electrode member 30 has conductivity and has a wire shape with an arbitrary length LS with a predetermined diameter RS, and the cylindrical electrode member 31 has conductivity. It has a cylindrical shape with an arbitrary length LT with a diameter RT larger than the diameter RS of the linear electrode member 30.
  • the linear electrode member 30 and the cylindrical electrode member 31 are connected by the first DC power supply 20 so that a first potential difference is given.
  • the linear electrode member 30 may be connected so as to have a higher potential than the cylindrical electrode member 31, or the linear electrode member 30 may have a lower potential than the cylindrical electrode member 31. It may be connected as follows.
  • the linear electrode member 30 is connected to have a higher potential than the cylindrical electrode member 31.
  • the linear electrode member 30 and the cylindrical electrode member 31 are arranged so that the linear electrode member 30 is not in contact with each other and is coaxial with the cylindrical electrode member 31 (at the position of the central axis). It arrange
  • either the + side or the ⁇ side of the first DC power supply 20 may be electrically grounded, but it is more preferable to ground as follows.
  • the cylindrical electrode member 31 is electrically grounded, and the coated member W is grounded so as to have the same potential as the cylindrical electrode member 31 so as not to repel the emitted fine particles NR (S).
  • the cylindrical electrode member 31 and the plate electrode member 41 have the same potential so that the cylindrical electrode member 31 does not repel the fine particles NR (K) emitted from the fine particle emission supply means 40.
  • the electrical connection of the linear electrode member 30, the cylindrical electrode member 31, the member W to be coated, the (upper) plate electrode member 41, and the (lower) plate electrode member 42 is summarized.
  • the linear electrode member 30 may be connected to the cylindrical electrode member 31 so as to have a high potential.
  • the linear electrode member 30 may be connected to the cylindrical electrode member 31 so as to have a low potential.
  • the plate electrode member 42 may be connected to the plate electrode member 41 so as to have a high potential, or the plate electrode member 42 may have a low potential with respect to the plate electrode member 41. It may be connected. Further, when both the linear electrode member 31 and the plate electrode member 42 are connected so as to have a low potential, or both have a high potential, the particulate NR (K) emitted from the particulate emission supply means 40 is linear.
  • the supply side through hole HK, the supply side through hole HT, and the linear electrode member 30 are arranged in a straight line so as to face the electrode member 30. Further, when one of the linear electrode member 31 and the plate electrode member 42 is connected to a low potential and the other is set to a high potential, the fine particles NR (K) emitted from the fine particle emission supply means 40 are accelerated. It is preferable that the supply side through hole HK, the supply side through hole HT, and the slit 31S are arranged in a straight line so as to avoid the linear electrode member 30 so as not to be emitted from the slit 31S as it is (slit 31S).
  • the positions of the supplied side through hole HT and the supply side through hole HK are shown in FIG. 4 as slits 31S so that the linear electrode member 30, the supplied side through hole HT, and the supply side through hole HK do not line up in a straight line. And a position shifted from the straight line connecting the linear electrode member 30).
  • the cylindrical electrode member 31 is formed with slits 31S having a slit width 31W larger than the diameter of the fine particles along the axial direction.
  • One or a plurality of supply-side through holes HT for receiving the supply of (K) are formed.
  • the length LT of the cylindrical electrode member 31 and the length LS of the linear electrode member 30 are not particularly limited and can be set to arbitrary lengths. Increasing the length LT of the cylindrical electrode member 31 and the length LS of the linear electrode member 30 is more preferable because the slit 31S that emits the fine particles NR (S) becomes longer and the coating time can be further shortened. As shown in FIG.
  • the member to be coated is located at a position facing the slit 31S.
  • W is arranged.
  • the insulating lid 32 shown in FIG. 2 is a lid that covers the openings at both ends of the cylindrical electrode member 31, and is provided with a through-hole through which the linear electrode member 30 can be inserted.
  • the insulating lid 32 may be omitted.
  • the cylindrical electrode member 31 is horizontally disposed and the slit 31S is disposed on the upper side.
  • the cylindrical electrode member 31 may not be disposed horizontally, and the slit 31S must be on the lower side. In particular, it may be directed in any direction.
  • the cylindrical electrode member 31 and the linear electrode member 30 are given a first potential difference (for example, a potential difference of 50 [KV]) from the first DC power supply 20, and the cylindrical electrode member 31.
  • the fine particles NR (K) supplied therein repeat reciprocating motion between the linear electrode member 30 and the cylindrical electrode member 31, and eventually the fine particles NR (S) are emitted from the slit 31S.
  • the principle that the fine particles NR (K) reciprocate between the linear electrode member 30 and the cylindrical electrode member 31 is the auxiliary particle BR (K) (reciprocating between the plate electrode members 41 and 42).
  • the fine particle NR (K) When the supplied fine particle NR (K) comes into contact with the cylindrical electrode member 31, it is charged to-(or +) and on the + side (or -side). It moves to a certain linear electrode member 30 side. When it comes into contact with the linear electrode member 30, it is charged to + (or-) and moves to the cylindrical electrode member 31 side which is the-side (or + side). This charging and movement is repeated to reciprocate.
  • the speed at which the fine particles NR (S) are emitted from the slit 31S is important. In order to increase the speed of the fine particles NR (S) emitted from the slit 31S, it is necessary to increase the energy given to the fine particles in the cylindrical electrode member 31.
  • the fine particles in the cylindrical electrode member 31 are given energy based on the first potential difference from the first DC power supply 20.
  • positioned in parallel is demonstrated.
  • the magnitude of the energy given to the fine particles NR (K) depends on the potential difference given between the electrodes and the charge of the fine particles (distance between the electrodes (electric field)) in the configuration of the plate electrode members 41 and 42 arranged in parallel.
  • the configuration of the linear electrode member 30 and the cylindrical electrode member 31 it depends on the potential difference between the electrodes, the distance between the electrodes, and the ratio of the diameter of the cylindrical electrode member 31 to the diameter of the linear electrode member 30.
  • the DC power supply that can be practically used is up to about 50 [KV].
  • the plate electrode members 41 and 42 arranged in parallel are used.
  • the distance between the electrodes must be made very small, and in fact, the insulating state between the electrodes cannot be maintained and the discharge is performed, and the voltage cannot be maintained.
  • the ratio of the diameter of the linear electrode member 30 to the diameter of the cylindrical electrode member 31 is reduced even if the same 50 [KV] DC power supply is used.
  • the energy that can be given to the fine particles when the potential difference is 50 [KV] and the distance between the electrodes is 10 [mm] in the configuration of the plate electrode members 41 and 42 is “W”.
  • the potential difference is 50 [KV]
  • the distance between the electrodes is 10 [mm]
  • the first potential difference given from the first DC power supply 20 is 20 [KV]
  • the diameter of the fine particles NR is 1 [nm]
  • the distance R from the surface of the linear electrode member 30 to the inner wall of the cylindrical electrode member 31 is 5 [ mm]
  • the pressure in the chamber 10 is 10 ⁇ . 4 [Torr] (about 0.01 [Pascal])
  • the velocity of the emitted fine particles NR (S) theoretically reaches 300 [m / sec] and collides with the coated member W at room temperature. To reach a speed sufficient to form (coat) the film.
  • FIG. 5 is a graph showing an example of the relationship between the distance from the linear electrode member 30 (surface thereof) and the velocity of the fine particle NR (S) in the fine particle NR (S).
  • the fine particles NR (S) reach the maximum speed Vm at the position of the distance R (that is, the position of the slit 31S) and collide with the coated member W at the speed Vm.
  • FIG. 6 shows an example of the overall configuration of the fine particle coating apparatus 2 according to the second embodiment.
  • the fine particle coating apparatus 2 is configured to drop an appropriate amount of fine particles NR (O) from the fine particle drop supply means 60 and supply the fine particles into the cylindrical electrode member 31.
  • NR fine particle drop supply means
  • the fine particle coating apparatus 2 in the second embodiment shown in FIG. 6 is different from the fine particle coating apparatus 1 shown in FIG. 1 in that the linear electrode member 30 and the cylindrical electrode member 31 are in the vertical direction or the vertical direction. It arrange
  • FIG. In addition to the fine particle coating apparatus 1 shown in FIG.
  • a fine particle drop supply means 60 is disposed at the upper end of the cylindrical electrode member 31 instead of the fine particle emission supply means 40.
  • Each shape of the linear electrode member 30 and the cylindrical electrode member 31 is the same as that of the first embodiment except that the supply-side through hole HT is not provided.
  • the point that the linear electrode member 30 and the cylindrical electrode member 31 are coaxially arranged is the same as that of the first embodiment, and the connection of the first DC power supply 20 is also the same as that of the first embodiment. The same.
  • the fine particle NR (O) used for coating is stocked in the fine particle drop supply means 60.
  • the measuring means 51 and 52 are sensors using, for example, laser light, and the adjusting means 50 is a drop of fine particles NR (O) supplied to the cylindrical electrode member 31 based on signals from the measuring means 51 and 52.
  • the opening / closing means 61 of the fine particle drop supply means 60 is controlled so that the amount of the fine particles NR (S) coated on the coated member W becomes a predetermined concentration. Note that the measuring means 51 and 52 and the adjusting means 50 may be omitted.
  • the opening / closing means 61 is adjusted so that a certain amount of fine particles NR (O) are dropped at any time. Note that the operation in which the fine particles NR (O) supplied by dropping into the cylindrical electrode member 31 are emitted from the slit 31S is the same as that in the first embodiment, and thus the description thereof is omitted.
  • FIG. 8 shows an example of the overall configuration of the fine particle coating apparatus 3 according to the third embodiment.
  • neither the particle emission supply means 40 in the first embodiment (FIG. 1) nor the particle drop supply means 60 in the second embodiment (FIG. 6) is provided, and the particle NR. (O) is accommodated in the cylindrical electrode member 31 in advance.
  • the particle NR. (O) is accommodated in the cylindrical electrode member 31 in advance.
  • the fine particle coating apparatus 3 in the third embodiment shown in FIG. 8 is different from the fine particle coating apparatus 1 shown in FIG. 1 in that the fine particle emission supply means 40, the second DC power supply 21, the measurement means 51 and 52, and the adjustment means 50. And the point that the to-be-supplied side through hole HT is not formed in the cylindrical electrode member 31 is different. Further, as shown in FIG. 9, inside the cylindrical electrode member 31, fine particles NR (O) and auxiliary particles BR (K) having a diameter larger than the diameter of the fine particles NR (O) (on the emission side auxiliary particles) Equivalent) is also different.
  • the linear electrode member 30 and the cylindrical electrode member 31 are arranged horizontally in the chamber 10, and are pointed so that the slit 31S of the cylindrical electrode member 31 is not on the lower side.
  • the point that the member to be coated is arranged at a position facing the slit 31S is the same as that of the fine particle coating apparatus 1 shown in FIG.
  • the shapes of the linear electrode member 30 and the cylindrical electrode member 31 are the same as those in the first embodiment except that the supply-side through hole HT is not provided.
  • the point that the linear electrode member 30 and the cylindrical electrode member 31 are coaxially arranged is the same as that of the first embodiment, and the connection of the first DC power supply 20 is also the same as that of the first embodiment.
  • the cylindrical electrode member 31 may be provided with an insulating lid 32 shown in FIG.
  • the fine particles NR (K) used for coating are stored in advance inside the cylindrical electrode member 31.
  • the auxiliary particles BR (K) are also accommodated in the cylindrical electrode member 31, but the auxiliary particles BR (K) may be omitted.
  • the operation of emitting the fine particles NR (S) from the slits 31S regardless of the presence or absence of the auxiliary particles BR (K) has been described in the first embodiment and will be omitted.
  • the width 31W of the slit 31S is larger than the diameter of the fine particles NR (S) and the diameter of the auxiliary particles BR (K). If it is set smaller than that, the auxiliary particles BR (K) can be prevented from jumping out of the cylindrical electrode member 31.
  • the fine particle coating apparatuses 1 to 3 of the present invention are simpler than the AD method using electric power without using high-pressure gas. It can be set as a simple structure.
  • fine particles can collide with the coated member at high speed, and coating at normal temperature is possible, and heating / drying is possible. This process and equipment are unnecessary.
  • variety is possible and coating time can be shortened more.
  • the fine particle coating apparatuses 1 to 3 have been described.
  • the chamber 10, the pressure reducing means 11, the member to be coated W, the linear electrode member 30, and the slit 31S are used.
  • the cylindrical electrode member 31, the first DC power supply 20, and the relative movement means 12 are used to store or supply the fine particles NR (K) inside the cylindrical electrode member 31.
  • the electrode member 30 is arranged on the same axis, and the coated member W is arranged at a position facing the slit 31S.
  • the step of decompressing the inside of the chamber 10 by the decompression means 11 the step of applying a first potential difference to the linear electrode member 30 and the cylindrical electrode member 31 by the first DC power supply 20, and the slit using the relative movement means 12
  • Coating the coated member W with the fine particles NR (S) by emitting the fine particles NR (S) from the slit 31S and colliding with the coated member W while moving the coated member W relative to 31S;
  • the fine particle coating apparatus and fine particle coating method of the present invention are not limited to the appearance, configuration, structure, operation, etc. described in the present embodiment, and various modifications, additions, and deletions are possible without departing from the spirit of the present invention. It is.
  • the numerical values used in the description of the present embodiment are examples, and are not limited to these numerical values.
  • the fine particles NR used for coating are not limited to nanoparticles or the like, and various fine particles can be used.
  • the coated member W is not limited to a flat surface regardless of the presence or absence of conductivity, and can be coated even if there are three-dimensional irregularities.
  • Fine particle coating apparatus (first embodiment) 2 Fine particle coating device (second embodiment) 3 Fine particle coating device (third embodiment) DESCRIPTION OF SYMBOLS 10 Chamber 11 Pressure reducing means 12 Relative moving means 20 1st DC power supply 21 2nd DC power supply 30 Linear electrode member 31 Cylindrical electrode member 31S Slit 40 Fine particle emission supply means 41, 42 Plate electrode member 43 Cylindrical wall member 50 Adjustment Means 51, 52 Measuring means 60 Fine particle drop supply means 61 Opening / closing means HT Supply side through hole HK Supply side through hole NR (O) Fine particle NR (K) Fine particle NR (S) Fine particle BR (K) (Supply side) auxiliary particle , (Outgoing side) auxiliary particles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrostatic Spraying Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

Disclosed is a fine particle coating apparatus which is capable of having fine particles collide with a member to be coated at a higher speed using a device having a simpler configuration and without using a high pressure gas. The fine particle coating apparatus is capable of coating an object with fine particles in a shorter time. Also disclosed is a fine particle coating method. The fine particle coating apparatus comprises: a chamber (10) the inside of which is at a reduced pressure; a first direct current power supply (20); a wire-like linear electrode member (30); and a hollow cylindrical electrode member (31) that is provided with a slit (31S) having a width larger than the diameter of fine particles (NR). The fine particles are contained in or supplied to the cylindrical electrode member. In the chamber, the linear electrode member is arranged at the axial position of the cylindrical electrode member without coming into contact with the cylindrical electrode member, and a member to be coated (W) is arranged at a position facing the slit in the chamber. The first direct current power supply provides a first potential difference between the linear electrode member and the cylindrical electrode member, and makes the fine particles in the cylindrical electrode member eject from the slit and collide with the member to be coated.

Description

微粒子コーティング装置及び微粒子コーティング方法Fine particle coating apparatus and fine particle coating method
　本発明は、ナノ粒子等の種々の微粒子を、種々の被コーティング部材の表面にコーティングする、微粒子コーティング装置及び微粒子コーティング方法に関する。 The present invention relates to a fine particle coating apparatus and a fine particle coating method for coating the surface of various coated members with various fine particles such as nanoparticles.
　近年、固体状態のセラミックス微粒子を、加熱することなく常温にて被コーティング部材に高速で吹き付けることで、衝撃エネルギーを利用して被コーティング部材に硬質のセラミックス被膜を形成するエアロゾルデポジション法（以下、ＡＤ法と記載する）が開発されている。
　ＡＤ法は、ドライ状態で被膜を形成できるので、従来の、微粒子混合液を吹き付けた後に液体を蒸発させる（加熱・乾燥させる）工程及び設備が不要であり、設備及びコストを抑制し、被コーティング部材の材料を選ばず、短時間に、均一な被膜を、高品質に形成することができる。
　ＡＤ法では、図１０に示すように、タンク１２０内の高圧ガスを、流量調整手段１２１を介して微粒子ＮＲ（Ｏ）が収容されているエアロゾル発生器１２２に導入してタバコの煙のようなエアロゾル状態にした後、所定の粒径分布を保つように解砕・分級器１２３を経由させて、ノズル１３０から高圧噴射する。チャンバ１０内は減圧手段１１（真空ポンプ等）にて減圧されており、微粒子を含むエアロゾルは減速されることなく高速で被コーティング部材Ｗの表面に衝突し、その衝撃エネルギーで破砕・変質して常温で固化する。なお、図１０において、相対移動手段１２は被コーティング部材Ｗを任意の方向に移動及び回転可能であり、濃度調整器１５０は、レーザ光等を用いた測定手段１５１、１５２からの信号に基づいて流量調整手段１２１を制御して微粒子の濃度や流量を調整している。
　また、特許文献１に記載された従来技術では、所定間隔に配置した電極間に、微粒子と、微粒子の径よりも大きな径の補助粒子と、を配置し、電極間に被コーティング部材を配置している。そして電極間に電位差を与え、微粒子と補助粒子とを電極間で往復運動させて補助粒子で微粒子を分散させるとともに、補助粒子にて被コーティング部材に微粒子を叩き付けてコーティングする、微粒子のコーティング方法が開示されている。 In recent years, an aerosol deposition method (hereinafter, referred to as “aerosol deposition method”) is used to form a hard ceramic film on a coated member using impact energy by spraying ceramic fine particles in a solid state at a high temperature at a normal temperature without heating. (Referred to as AD method) has been developed.
Since the AD method can form a film in a dry state, the conventional process and equipment for evaporating the liquid after spraying the fine particle mixture (heating and drying) and equipment are not required, and the equipment and cost are suppressed, and the coating is performed. A uniform film can be formed with high quality in a short time regardless of the material of the member.
In the AD method, as shown in FIG. 10, the high-pressure gas in the tank 120 is introduced into the aerosol generator 122 containing fine particles NR (O) through the flow rate adjusting means 121, and the like smoke of tobacco. After making the aerosol state, high pressure injection is performed from the nozzle 130 through the crushing / classifying unit 123 so as to maintain a predetermined particle size distribution. The inside of the chamber 10 is decompressed by decompression means 11 (vacuum pump or the like), and the aerosol containing fine particles collides with the surface of the coated member W at a high speed without being decelerated, and is crushed and altered by the impact energy. Solidify at room temperature. In FIG. 10, the relative moving means 12 can move and rotate the coated member W in an arbitrary direction, and the concentration adjuster 150 is based on signals from the measuring means 151 and 152 using laser light or the like. The flow rate adjusting means 121 is controlled to adjust the concentration and flow rate of the fine particles.
In the prior art described in Patent Document 1, fine particles and auxiliary particles having a diameter larger than the diameter of the fine particles are arranged between the electrodes arranged at a predetermined interval, and a member to be coated is arranged between the electrodes. ing. A fine particle coating method in which a potential difference is applied between the electrodes, the fine particles and the auxiliary particles are reciprocated between the electrodes to disperse the fine particles with the auxiliary particles, and the auxiliary particles are struck against the coated member and coated. It is disclosed.
特開２００８－１３７１２２号公報JP 2008-137122 A
　ＡＤ法は、高圧ガスを必要としており、装置が大型化及び複雑化する可能性がある。また、チャンバ１０内の空気を減圧手段１１にて減圧しているにもかかわらず、微粒子を含むエアロゾル（高圧ガス）をノズル１３０から噴射しており、減圧手段１１の効率が悪い。また図１０において、ノズル１３０におけるノズル幅ＷＮの長さが数［ｍｍ］程度までという制限があり、更なるコーティング時間の短縮化は困難である。
　また、特許文献１に記載された従来技術では、高圧ガスを用いることなく直流電源を用いており、装置が単純で小型化が可能である。しかし、特許文献１に記載されたコーティング方法を減圧されたチャンバ内で行ったとしても、被コーティング部材Ｗに衝突させる微粒子の速度を、ＡＤ法と同等まで高速化することは非常に困難である。
　本発明は、このような点に鑑みて創案されたものであり、高圧ガスを用いることなく、よりシンプルな構成の装置にて、微粒子を被コーティング部材により高速で衝突させることが可能であり、より短時間にコーティングできる、微粒子コーティング装置及び微粒子コーティング方法を提供することを課題とする。 The AD method requires high-pressure gas, and there is a possibility that the apparatus becomes large and complicated. Moreover, although the air in the chamber 10 is decompressed by the decompression means 11, aerosol (high pressure gas) containing fine particles is injected from the nozzle 130, and the efficiency of the decompression means 11 is poor. Further, in FIG. 10, there is a limitation that the nozzle width WN of the nozzle 130 is about several [mm], and it is difficult to further shorten the coating time.
In the prior art described in Patent Document 1, a DC power source is used without using high-pressure gas, and the apparatus is simple and can be miniaturized. However, even if the coating method described in Patent Document 1 is performed in a decompressed chamber, it is very difficult to increase the speed of the fine particles that collide with the member to be coated W to the same level as the AD method. .
The present invention was devised in view of such points, and it is possible to collide fine particles with a coated member at a high speed with a simpler apparatus without using high-pressure gas, It is an object of the present invention to provide a fine particle coating apparatus and a fine particle coating method capable of coating in a shorter time.
　上記課題を解決するため、本発明に係る微粒子コーティング装置及び微粒子コーティング方法は、次の手段をとる。
　まず、本発明の第１の発明は、仕切られた空間を形成しているチャンバと、減圧手段と、第１直流電源と、導電性を有して所定の径にて任意の長さの針金状の線状電極部材と、導電性を有して前記線状電極部材の径よりも大きな径の円筒状であって軸方向に任意の長さの筒状電極部材と、を備えた微粒子コーティング装置である。
　前記筒状電極部材には、軸方向に、微粒子の径よりも大きな幅のスリットが形成されており、被コーティング部材にコーティングする微粒子が収容または供給されており、前記線状電極部材と前記筒状電極部材は、互いに接触しないように、且つ前記筒状電極部材の軸位置に前記線状電極部材が位置するように、前記チャンバ内に配置されている。
　前記減圧手段は、前記チャンバ内を減圧し、前記被コーティング部材は、前記チャンバ内に、且つ前記筒状電極部材の前記スリットと対向する位置に配置されている。
　そして前記第１直流電源は、前記線状電極部材と前記筒状電極部材との間に第１電位差を与え、前記筒状電極部材内で前記第１電位差に基づいて運動している微粒子を、前記スリットから出射させて前記被コーティング部材に衝突させて、前記被コーティング部材に微粒子をコーティングする。 In order to solve the above problems, the fine particle coating apparatus and the fine particle coating method according to the present invention take the following means.
First, the first invention of the present invention is a chamber having a partitioned space, a decompression means, a first DC power source, and a wire having a predetermined diameter with conductivity and a predetermined diameter. Fine particle coating comprising: a linear electrode member having a shape; and a cylindrical electrode member having conductivity and a cylindrical shape having a diameter larger than the diameter of the linear electrode member and having an arbitrary length in the axial direction Device.
A slit having a width larger than the diameter of the fine particles is formed in the axial direction in the cylindrical electrode member, and fine particles to be coated on the coated member are accommodated or supplied. The linear electrode member and the cylinder The electrode members are arranged in the chamber so as not to contact each other and so that the linear electrode member is located at the axial position of the cylindrical electrode member.
The decompression means decompresses the interior of the chamber, and the member to be coated is disposed in the chamber and at a position facing the slit of the cylindrical electrode member.
And the first DC power supply gives a first potential difference between the linear electrode member and the cylindrical electrode member, and fine particles moving based on the first potential difference in the cylindrical electrode member, The light is emitted from the slit and collides with the member to be coated to coat the member to be coated with fine particles.
　次に、本発明の第２の発明は、上記第１の発明に係る微粒子コーティング装置であって、前記線状電極部材と前記筒状電極部材は、前記スリットが下向きにならないように、水平に配置されており、前記筒状電極部材における下側となる面には、微粒子の径よりも大きな径の単数または複数の被供給側貫通孔が形成されており、前記チャンバ内における前記筒状電極部材の下方には、単数または複数の微粒子出射供給手段が配置されている。
　前記微粒子出射供給手段は、互いに平行となるように所定間隔にて水平に配置した２枚の板状電極部材と、２枚の板状電極部材のそれぞれを互いに電気的に絶縁した状態で前記所定間隔を保持するとともに２枚の板状電極部材の間に所定空間を形成する筒状壁部材と、で構成され、前記所定空間には、微粒子と、微粒子の径よりも大きな径の供給側補助粒子と、が収容されており、２枚の板状電極部材は、前記第１直流電源から前記第１電位差が与えられ、あるいは第２直流電源が設けられて当該第２直流電源から第２電位差が与えられ、２枚の板状電極部材における上側の板状電極部材には、前記所定空間における任意の位置に微粒子の径よりも大きな径の単数または複数の供給側貫通孔が形成されている。
　前記微粒子出射供給手段は、前記供給側貫通孔と前記被供給側貫通孔とが対向するように配置されており、前記第１電位差あるいは前記第２電位差に基づいて運動する前記供給側補助粒子にて分散された微粒子を、前記第１電位差あるいは前記第２電位差に基づいて２枚の板状電極部材の間で往復運動させて、前記供給側貫通孔と前記被供給側貫通孔を経由させて前記筒状電極部材内に供給する。 Next, a second invention of the present invention is the fine particle coating apparatus according to the first invention, wherein the linear electrode member and the cylindrical electrode member are horizontally arranged so that the slit does not face downward. One or a plurality of supply-side through-holes having a diameter larger than the diameter of the fine particles are formed on the lower surface of the cylindrical electrode member, and the cylindrical electrode in the chamber Under the member, one or a plurality of fine particle emission supply means are arranged.
The fine particle emitting and supplying means is configured such that the two plate electrode members horizontally arranged at predetermined intervals so as to be parallel to each other and the two plate electrode members are electrically insulated from each other. A cylindrical wall member that maintains a gap and forms a predetermined space between two plate-like electrode members, and the predetermined space has a fine particle and a supply side auxiliary having a diameter larger than the particle diameter. The two plate-like electrode members are provided with the first potential difference from the first DC power source, or are provided with a second DC power source, and the second potential difference is provided from the second DC power source. The upper plate electrode member of the two plate electrode members is formed with one or a plurality of supply side through holes having a diameter larger than the diameter of the fine particles at an arbitrary position in the predetermined space. .
The fine particle emission supply means is arranged so that the supply side through hole and the supply side through hole face each other, and the supply side auxiliary particle moves based on the first potential difference or the second potential difference. The dispersed fine particles are reciprocated between the two plate-like electrode members based on the first potential difference or the second potential difference, and pass through the supply side through hole and the supply side through hole. It supplies in the said cylindrical electrode member.
　次に、本発明の第３の発明は、上記第２の発明に係る微粒子コーティング装置であって、前記供給側貫通孔の径は、前記供給側補助粒子の径よりも小さく形成されている。 Next, a third invention of the present invention is the fine particle coating apparatus according to the second invention, wherein the diameter of the supply side through hole is smaller than the diameter of the supply side auxiliary particle.
　次に、本発明の第４の発明は、上記第１の発明に係る微粒子コーティング装置であって、前記線状電極部材と前記筒状電極部材は、鉛直方向に沿って、あるいは鉛直方向に対して所定角度に傾斜させるとともに前記スリットが下向きにならないように、配置されており、前記筒状電極部材の両端部における上方となる一方の端部から、前記筒状電極部材の内部に微粒子を落下させて供給する微粒子落下供給手段を備えている。 Next, a fourth invention of the present invention is the fine particle coating apparatus according to the first invention, wherein the linear electrode member and the cylindrical electrode member are along the vertical direction or with respect to the vertical direction. And the slits are arranged so as not to face downward, and the fine particles fall into the inside of the cylindrical electrode member from one upper end at both ends of the cylindrical electrode member. There are provided fine particle drop supply means.
　次に、本発明の第５の発明は、上記第１の発明に係る微粒子コーティング装置であって、前記線状電極部材と前記筒状電極部材は、前記スリットが下向きにならないように、水平に配置されており、前記筒状電極部材内には、微粒子の径よりも大きな径の出射側補助粒子が収容されており、前記第１電位差に基づいて前記出射側補助粒子を運動させて、前記筒状電極部材内の微粒子を分散させ、分散した微粒子を前記第１電位差に基づいて運動させて前記スリットから出射する。 Next, a fifth invention of the present invention is the particulate coating apparatus according to the first invention, wherein the linear electrode member and the cylindrical electrode member are arranged horizontally so that the slit does not face downward. In the cylindrical electrode member, the emission side auxiliary particles having a diameter larger than the diameter of the fine particles are accommodated, and the emission side auxiliary particles are moved based on the first potential difference. The fine particles in the cylindrical electrode member are dispersed, and the dispersed fine particles are moved based on the first potential difference and emitted from the slit.
　次に、本発明の第６の発明は、上記第５の発明に係る微粒子コーティング装置であって、前記スリットの幅は、前記出射側補助粒子の径よりも小さく形成されている。 Next, a sixth invention of the present invention is the fine particle coating apparatus according to the fifth invention, wherein the slit has a width smaller than the diameter of the emission-side auxiliary particles.
　次に、本発明の第７の発明は、上記第１の発明～第６の発明のいずれか一項に係る微粒子コーティング装置であって、前記筒状電極部材と前記被コーティング部材が電気的に接地されている。 Next, a seventh invention of the present invention is the particulate coating apparatus according to any one of the first to sixth inventions, wherein the cylindrical electrode member and the member to be coated are electrically connected. Grounded.
　次に、本発明の第８の発明は、上記第１の発明～第７の発明のいずれか一項に係る微粒子コーティング装置であって、前記筒状電極部材の前記スリットの位置に対して、前記被コーティング部材を相対的に移動可能な相対移動手段を備えている。 Next, an eighth invention of the present invention is the fine particle coating apparatus according to any one of the first to seventh inventions, wherein the position of the slit of the cylindrical electrode member is as follows. Relative movement means capable of relatively moving the member to be coated is provided.
　また、本発明の第９の発明は、仕切られた空間を形成しているチャンバと、減圧手段と、被コーティング部材と、導電性を有して所定の径にて任意の長さの針金状の線状電極部材と、導電性を有して前記線状電極部材の径よりも大きな径の円筒状であって軸方向に任意の長さの筒状電極部材と、第１直流電源と、相対移動手段と、を用いる。
　そして前記筒状電極部材に、軸方向に、微粒子の径よりも大きな幅のスリットを形成し、前記筒状電極部材の内側に、被コーティング部材にコーティングする微粒子を収容または供給し、前記線状電極部材と前記筒状電極部材を、互いに接触しないように、且つ前記筒状電極部材の軸位置に前記線状電極部材が位置するように前記チャンバ内に配置し、前記被コーティング部材を、前記筒状電極部材の前記スリットと対向するように前記チャンバ内に配置する。
　そして前記減圧手段にて前記チャンバ内を減圧するステップと、前記第１直流電源にて、前記線状電極部材と前記筒状電極部材との間に第１電位差を与えるステップと、前記相対移動手段を用いて前記筒状電極部材及び前記線状電極部材に対して前記被コーティング部材を相対的に移動させながら、前記筒状電極部材内で前記第１電位差に基づいて運動している微粒子を、前記スリットから出射させて前記被コーティング部材に衝突させて、前記被コーティング部材に微粒子をコーティングするステップと、を有する。 The ninth aspect of the present invention provides a wire-like shape having a predetermined diameter with a predetermined diameter and having a chamber forming a partitioned space, a decompression means, a member to be coated, and a conductive material. A linear electrode member, a cylindrical electrode member having electrical conductivity and having a diameter larger than the diameter of the linear electrode member and having an arbitrary length in the axial direction, a first DC power source, Relative movement means.
A slit having a width larger than the diameter of the fine particles is formed in the cylindrical electrode member in the axial direction, and fine particles to be coated on the coated member are accommodated or supplied inside the cylindrical electrode member, The electrode member and the cylindrical electrode member are arranged in the chamber so as not to contact each other and so that the linear electrode member is positioned at an axial position of the cylindrical electrode member, and the member to be coated is It arrange | positions in the said chamber so that the said slit of a cylindrical electrode member may be opposed.
A step of reducing the pressure in the chamber with the pressure reducing means; a step of applying a first potential difference between the linear electrode member and the cylindrical electrode member with the first DC power source; and the relative moving means. While moving the coated member relative to the cylindrical electrode member and the linear electrode member using the fine particles moving based on the first potential difference in the cylindrical electrode member, And a step of coating the member to be coated with fine particles by emitting from the slit and colliding with the member to be coated.
　第１の発明～第８の発明に記載の微粒子コーティング装置、または第９の発明に記載の微粒子コーティング方法を用いれば、加熱・乾燥の工程が必要なく、高圧ガスも必要なく、減圧されたチャンバと直流電流と線状電極部材と筒状電極部材の、よりシンプルな構成の装置にて微粒子コーティング装置を実現することができる。
　また、チャンバ内を減圧して空気抵抗を低減するとともに、線状電極部材と筒状電極部材を同軸上（中心軸の位置）に配置することで、平行に配置した平面にて微粒子に与えることが可能な電場のエネルギーよりも、線状電極部材から非常に大きな電場のエネルギーを微粒子に与えることが可能であり、微粒子をより高速に運動させて被コーティング部材に衝突させることができる。
　また、微粒子を出射させるスリット３１Ｓの長さは、特に制限がないので、より短時間にコーティングをすることができる。 If the fine particle coating apparatus according to the first to eighth inventions or the fine particle coating method according to the ninth invention is used, the chamber is decompressed without the need for a heating / drying process, the need for high-pressure gas, and the like. In addition, the fine particle coating apparatus can be realized by an apparatus having a simpler configuration of a direct current, a linear electrode member, and a cylindrical electrode member.
Moreover, while reducing the air resistance by reducing the pressure in the chamber, the linear electrode member and the cylindrical electrode member are arranged coaxially (position of the central axis), and are given to the fine particles on a plane arranged in parallel. Therefore, it is possible to give a very large electric field energy to the microparticles from the linear electrode member than possible, and the microparticles can move at a higher speed and collide with the coated member.
Further, the length of the slit 31S for emitting the fine particles is not particularly limited, so that the coating can be performed in a shorter time.
第１の実施の形態における微粒子コーティング装置１の全体構成を説明する図である。BRIEF DESCRIPTION OF THE DRAWINGS It is a figure explaining the whole structure of the fine particle coating apparatus 1 in 1st Embodiment. 線状電極部材３０と筒状電極部材３１の概略形状を説明する図である。It is a figure explaining the schematic shape of the linear electrode member 30 and the cylindrical electrode member 31. FIG. 微粒子出射供給手段４０の概略形状を説明する図である。It is a figure explaining the schematic shape of the fine particle emission supply means. 第１の実施の形態において、微粒子ＮＲ（Ｋ）の供給と、微粒子ＮＲ（Ｓ）がスリット３１Ｓから高速で出射される様子を説明する図である。In 1st Embodiment, it is a figure explaining supply of fine particle NR (K) and a mode that fine particle NR (S) is radiate | emitted at high speed from the slit 31S. 線状電極部材３０にて帯電した微粒子における、線状電極部材３０から筒状電極部材３１に向かう方向への距離と、微粒子の運動速度との関係を説明する図である。It is a figure explaining the relationship between the distance to the direction which goes to the cylindrical electrode member 31 from the linear electrode member 30 in the microparticles charged with the linear electrode member 30, and the movement speed of microparticles | fine-particles. 第２の実施の形態における微粒子コーティング装置２の全体構成を説明する図である。It is a figure explaining the whole structure of the fine particle coating apparatus 2 in 2nd Embodiment. 第２の実施の形態において、微粒子ＮＲ（Ｋ）の供給と、微粒子ＮＲ（Ｓ）がスリット３１Ｓから高速で出射される様子を説明する図である。In 2nd Embodiment, it is a figure explaining supply of microparticles | fine-particles NR (K) and a mode that microparticles | fine-particles NR (S) are radiate | emitted at high speed from the slit 31S. 第３の実施の形態における微粒子コーティング装置３の全体構成を説明する図である。It is a figure explaining the whole structure of the fine particle coating apparatus 3 in 3rd Embodiment. 第３の実施の形態において、微粒子ＮＲ（Ｓ）がスリット３１Ｓから高速で出射される様子を説明する図である。In 3rd Embodiment, it is a figure explaining a mode that fine particle NR (S) is radiate | emitted at high speed from the slit 31S. ＡＤ法を用いて微粒子を被コーティング部材Ｗにコーティングする、従来のコーティング装置１００の例を説明する図である。It is a figure explaining the example of the conventional coating apparatus 100 which coats the to-be-coated member W using AD method.
　以下に本発明を実施するための第１～第３の実施の形態を、図面を用いて説明する。第１～第３の実施の形態のそれぞれは、被コーティング部材Ｗにコーティングする微粒子ＮＲの供給方法が異なる。
　なお、以下の説明では、被コーティング部材Ｗにコーティングする微粒子について、微粒子ＮＲ（Ｏ）、微粒子ＮＲ（Ｋ）、微粒子ＮＲ（Ｓ）のいずれかを用いて説明するが、どれも同じ微粒子であるが、運動状態が異なる。微粒子ＮＲ（Ｏ）は静止状態を示しており、微粒子ＮＲ（Ｓ）は被コーティング部材Ｗに衝突する非常に高速で運動している状態を示しており、微粒子ＮＲ（Ｋ）は微粒子ＮＲ（Ｏ）と微粒子ＮＲ（Ｓ）の間の速度で運動している状態を示している。
　以下、第１の実施の形態から順に説明する。 Hereinafter, first to third embodiments for carrying out the present invention will be described with reference to the drawings. Each of the first to third embodiments differs in the method for supplying the fine particles NR to be coated on the member to be coated W.
In the following description, the fine particles to be coated on the coated member W will be described using any one of the fine particles NR (O), the fine particles NR (K), and the fine particles NR (S). However, the exercise state is different. The fine particle NR (O) shows a stationary state, the fine particle NR (S) shows a state of moving at a very high speed colliding with the coated member W, and the fine particle NR (K) is fine particle NR (O). ) And the fine particles NR (S).
Hereinafter, the first embodiment will be described in order.
●●［第１の実施の形態（図１～図５）］
　図１は、第１の実施の形態における微粒子コーティング装置１の全体構成の例を示している。第１の実施の形態では、微粒子出射供給手段４０から微粒子ＮＲ（Ｋ）を出射させて、筒状電極部材３１内に微粒子を供給する微粒子コーティング装置１である。
●［全体構成（図１）］
　図１の例に示す第１の実施の形態における微粒子コーティング装置１は、チャンバ１０と、減圧手段１１と、相対移動手段１２と、第１直流電源２０と、第２直流電源２１と、線状電極部材３０と、筒状電極部材３１と、微粒子出射供給手段４０と、調整手段５０と、測定手段５１、５２とを備えている。
　仕切られた空間を形成しているチャンバ１０の内部には、微粒子ＮＲをコーティングする対象物である被コーティング部材Ｗと、線状電極部材３０と、筒状電極部材３１と、微粒子出射供給手段４０と、微粒子ＮＲ（Ｓ）の濃度や流量等を測定する測定手段５１、５２が収容されている。 ●● [First embodiment (FIGS. 1 to 5)]
FIG. 1 shows an example of the overall configuration of a fine particle coating apparatus 1 according to the first embodiment. In the first embodiment, the fine particle coating apparatus 1 supplies fine particles into the cylindrical electrode member 31 by emitting fine particles NR (K) from the fine particle emission supply means 40.
● [Overall structure (Fig. 1)]
The fine particle coating apparatus 1 in the first embodiment shown in the example of FIG. 1 includes a chamber 10, a decompression unit 11, a relative movement unit 12, a first DC power source 20, a second DC power source 21, and a linear shape. The electrode member 30, the cylindrical electrode member 31, the fine particle emission supply means 40, the adjustment means 50, and the measurement means 51 and 52 are provided.
Inside the chamber 10 forming the partitioned space, a member to be coated W that is an object to be coated with the fine particles NR, a linear electrode member 30, a cylindrical electrode member 31, and a fine particle emission supply means 40. And measuring means 51 and 52 for measuring the concentration and flow rate of the fine particles NR (S).
　被コーティング部材Ｗは、相対移動手段１２と連結され、筒状電極部材３１のスリット３１Ｓに対して、例えばＸ軸、Ｙ軸、Ｚ軸の直交３軸の方向に相対的に平行移動が可能であるとともに、Ｘ軸、Ｙ軸、Ｚ軸のそれぞれの軸の回りに旋回可能であり、スリット３１Ｓと対向する位置に配置されている。
　また、チャンバ１０の内部は、減圧手段１１（真空ポンプ等）にて減圧され、筒状電極部材３１に形成されているスリット３１Ｓから出射される微粒子ＮＲ（Ｓ）の空気抵抗を減少させ、微粒子ＮＲ（Ｓ）の速度の低下を防ぐ。
　なお第１～第３の実施の形態では、減圧手段１１による減圧の度合いは、線状電極部材３０と筒状電極部材３１との間にてプラズマが発生しない、１０-4トール（約０．０１パスカル）程度まで減圧した。 The member W to be coated is connected to the relative moving means 12 and can be relatively translated with respect to the slit 31S of the cylindrical electrode member 31 in, for example, three orthogonal directions of the X, Y, and Z axes. At the same time, it can be turned around each of the X, Y, and Z axes, and is disposed at a position facing the slit 31S.
Further, the inside of the chamber 10 is decompressed by the decompression means 11 (vacuum pump or the like) to reduce the air resistance of the particulate NR (S) emitted from the slit 31S formed in the cylindrical electrode member 31, and the particulate A reduction in the speed of NR (S) is prevented.
In the first to third embodiments, the degree of pressure reduction by the pressure reducing means 11 is such that plasma is not generated between the linear electrode member 30 and the cylindrical electrode member 31, and 10 −4 Torr (about 0. The pressure was reduced to about 01 Pascal).
　測定手段５１、５２は、例えばレーザ光等を用いたセンサであり、調整手段５０は、測定手段５１、５２からの信号に基づいて、筒状電極部材３１に供給する微粒子ＮＲ（Ｋ）の量を調整するために、第２直流電源２１を制御し、被コーティング部材Ｗにコーティングされる微粒子ＮＲ（Ｓ）の量が所定量（所定濃度や所定流量等）となるように制御する。
　なお、測定手段５１、５２、調整手段５０は省略してもよい。 The measuring means 51 and 52 are sensors using, for example, laser light, and the adjusting means 50 is the amount of fine particles NR (K) supplied to the cylindrical electrode member 31 based on signals from the measuring means 51 and 52. In order to adjust this, the second DC power source 21 is controlled so that the amount of the fine particles NR (S) coated on the member W to be coated becomes a predetermined amount (a predetermined concentration, a predetermined flow rate, etc.).
Note that the measuring means 51 and 52 and the adjusting means 50 may be omitted.
●［微粒子出射供給手段４０の構成（図１、図３、図４）］
　図３に示すように、微粒子出射供給手段４０は、互いに平行となるように所定間隔に配置された２枚の板状電極部材４１、４２と、板状電極部材４１、４２の間に所定空間４０Ｋを形成するとともに板状電極部材４１、４２のそれぞれが互いに電気的に絶縁した状態で所定間隔を保持するための筒状壁部材４３と、で構成されている。また上方の板状電極部材４１には、板状電極部材４１と４２の間で往復運動する微粒子ＮＲ（Ｋ）を外部に出射させるための、単数または複数の供給側貫通孔ＨＫが任意の位置に設けられている。
　所定空間４０Ｋには、微粒子ＮＲ（Ｏ）と、微粒子ＮＲ（Ｏ）の径（例えば約０．９［ｎｍ］）よりも大きな径（例えば約数十［μｍ］）の補助粒子ＢＲ（Ｋ）（セラミック粒子等であり、供給側補助粒子に相当）が収容されている。 [Configuration of the particle emission supply means 40 (FIGS. 1, 3, and 4)]
As shown in FIG. 3, the particle emission supply means 40 has a predetermined space between two plate electrode members 41, 42 arranged at a predetermined interval so as to be parallel to each other, and the plate electrode members 41, 42. The plate- like electrode members 41 and 42 are formed of a cylindrical wall member 43 for holding a predetermined interval while being electrically insulated from each other. In the upper plate-like electrode member 41, one or a plurality of supply-side through holes HK for emitting fine particles NR (K) reciprocating between the plate- like electrode members 41 and 42 to the outside are located at arbitrary positions. Is provided.
In the predetermined space 40K, fine particles NR (O) and auxiliary particles BR (K) having a diameter (for example, about several tens [μm]) larger than the diameter (for example, about 0.9 [nm]) of the fine particles NR (O). (Ceramic particles and the like, corresponding to supply side auxiliary particles) are accommodated.
　そして板状電極部材４１、４２は、第２直流電源２１から第２電位差が与えられるように接続されるが、板状電極部材４１の方が板状電極部材４２よりも高い電位となるように接続されていてもよいし、板状電極部材４１の方が板状電極部材４２よりも低い電位となるように接続されていてもよい。本実施の形態では、上方の板状電極部材４１の方が、下方の板状電極部材４２よりも低い電位となるように接続され、板状電極部材４１が電気的に接地されている接続の例を示している。
　この接続状態にて第２直流電源２１から第２電位差（例えば約２０［ＫＶ］の電位差）を与えると、補助粒子ＢＲ（Ｋ）が板状電極部材４１と４２の間で往復運動し、凝集している微粒子ＮＲ（Ｏ）は補助粒子ＢＲ（Ｋ）にて分散される。そして分散された微粒子ＮＲ（Ｋ）も補助粒子ＢＲ（Ｋ）と同様に板状電極部材４１と４２の間で往復運動し、やがて供給側貫通孔ＨＫから微粒子ＮＲ（Ｋ）が出射される。
　補助粒子ＢＲ（Ｋ）（または微粒子ＮＲ（Ｏ））が往復運動する原理は、まず、静止している補助粒子ＢＲ（Ｋ）（または微粒子ＮＲ（Ｏ））が、下方の板状電極部材４２にて＋（または－）に帯電され、－側（または＋側）である上方の板状電極部材４１の側に移動する（電場で加速される）。板状電極部材４１の側に移動した補助粒子（Ｋ）（または微粒子ＮＲ（Ｋ））は、板状電極部材４１に接触すると、今度は－（または＋）に帯電し、＋側（または－側）である下方の板状電極部材４２の側に移動する（電場で加速される）。この帯電と移動を繰り返して往復運動する。 The plate electrode members 41 and 42 are connected so as to be given a second potential difference from the second DC power supply 21, but the plate electrode member 41 has a higher potential than the plate electrode member 42. The plate-like electrode member 41 may be connected so as to have a lower potential than the plate-like electrode member 42. In the present embodiment, the upper plate-like electrode member 41 is connected so as to have a lower potential than the lower plate-like electrode member 42, and the plate-like electrode member 41 is electrically grounded. An example is shown.
When a second potential difference (for example, a potential difference of about 20 [KV]) is applied from the second DC power source 21 in this connected state, the auxiliary particles BR (K) reciprocate between the plate electrode members 41 and 42 and agglomerate. The fine particles NR (O) being dispersed are dispersed by the auxiliary particles BR (K). The dispersed fine particles NR (K) also reciprocate between the plate electrode members 41 and 42 in the same manner as the auxiliary particles BR (K), and eventually the fine particles NR (K) are emitted from the supply-side through holes HK.
The principle that the auxiliary particles BR (K) (or the fine particles NR (O)) reciprocate is that the stationary auxiliary particles BR (K) (or the fine particles NR (O)) are stationary at the lower plate-like electrode member 42. Is charged to + (or-) and moved to the upper plate electrode member 41 side which is the-side (or + side) (accelerated by an electric field). When the auxiliary particles (K) (or fine particles NR (K)) moved to the plate electrode member 41 come into contact with the plate electrode member 41, this time, the auxiliary particles (K) (or fine particles NR (K)) are charged to − (or +), The plate electrode member 42 on the lower side (accelerated by the electric field). This charging and movement is repeated to reciprocate.
　なお、供給側貫通孔ＨＫの径は、微粒子ＮＲ（Ｋ）の径よりも大きい径であればよいが、微粒子ＮＲ（Ｋ）の径よりも大きく、補助粒子ＢＲ（Ｋ）の径よりも小さく設定すると、補助粒子ＢＲ（Ｋ）が外部に飛び出すことを防止することができる。
　また、供給側貫通孔ＨＫは単数でも複数でもよく、筒状電極部材３１に形成された被供給側貫通孔ＨＴに対応する数であればよい。
　なお、微粒子出射供給手段４０に第２直流電源２１を接続せず、第１直流電源２０を用いて第１電位差を与え、第２直流電源２１を省略してもよい。 The diameter of the supply side through hole HK may be larger than the diameter of the fine particle NR (K), but larger than the diameter of the fine particle NR (K) and smaller than the diameter of the auxiliary particle BR (K). When set, the auxiliary particles BR (K) can be prevented from jumping out.
Moreover, the supply side through-hole HK may be single or plural, and may be any number corresponding to the supply-side through hole HT formed in the cylindrical electrode member 31.
The second DC power supply 21 may be omitted by connecting the first DC power supply 20 without connecting the second DC power supply 21 to the particle emission supply means 40.
　また、図１の例では、複数の微粒子出射供給手段４０を水平に配置した例を示しているが、１個の微粒子出射供給手段４０を水平に配置し（この場合、測定手段５１、５２、第２直流電源２１も各１個でよい）、供給側貫通孔ＨＫを複数設けてもよい。
　そして図４に示すように、微粒子出射供給手段４０の供給側貫通孔ＨＫから出射した微粒子ＮＲ（Ｋ）は、供給側貫通孔ＨＫに対向する位置に設けられた筒状電極部材３１の被供給側貫通孔ＨＴを通って筒状電極部材３１の内部へと供給される。 In addition, in the example of FIG. 1, an example in which a plurality of particle emission supply means 40 is arranged horizontally is shown, but one particle emission supply means 40 is arranged horizontally (in this case, the measurement means 51, 52, A single second DC power supply 21 may be provided), and a plurality of supply side through holes HK may be provided.
As shown in FIG. 4, the fine particles NR (K) emitted from the supply side through hole HK of the fine particle emission supply means 40 are supplied by the cylindrical electrode member 31 provided at a position facing the supply side through hole HK. It is supplied to the inside of the cylindrical electrode member 31 through the side through hole HT.
●［線状電極部材３０と筒状電極部材３１の構成（図１、図２、図４）］
　図２及び図４に示すように、線状電極部材３０は、導電性を有して所定の径ＲＳにて任意の長さＬＳの針金状であり、筒状電極部材３１は、導電性を有して線状電極部材３０の径ＲＳよりも大きな径ＲＴにて任意の長さＬＴの円筒状である。そして線状電極部材３０と筒状電極部材３１は、第１直流電源２０にて、第１電位差が与えられるように接続されている。なお、線状電極部材３０の方が筒状電極部材３１よりも高い電位となるように接続されていてもよいし、線状電極部材３０の方が筒状電極部材３１よりも低い電位となるように接続されていてもよい。本実施の形態では、線状電極部材３０の方が、筒状電極部材３１よりも高い電位となるように接続された例を示している。
　そして図４に示すように、線状電極部材３０と筒状電極部材３１は、互いに接触しないように、且つ筒状電極部材３１の同軸上に（中心軸の位置に）線状電極部材３０が位置するようにチャンバ１０内に配置されている。 [Configuration of linear electrode member 30 and cylindrical electrode member 31 (FIGS. 1, 2, and 4)]
As shown in FIGS. 2 and 4, the linear electrode member 30 has conductivity and has a wire shape with an arbitrary length LS with a predetermined diameter RS, and the cylindrical electrode member 31 has conductivity. It has a cylindrical shape with an arbitrary length LT with a diameter RT larger than the diameter RS of the linear electrode member 30. The linear electrode member 30 and the cylindrical electrode member 31 are connected by the first DC power supply 20 so that a first potential difference is given. The linear electrode member 30 may be connected so as to have a higher potential than the cylindrical electrode member 31, or the linear electrode member 30 may have a lower potential than the cylindrical electrode member 31. It may be connected as follows. In the present embodiment, an example is shown in which the linear electrode member 30 is connected to have a higher potential than the cylindrical electrode member 31.
As shown in FIG. 4, the linear electrode member 30 and the cylindrical electrode member 31 are arranged so that the linear electrode member 30 is not in contact with each other and is coaxial with the cylindrical electrode member 31 (at the position of the central axis). It arrange | positions in the chamber 10 so that it may be located.
　なお、第１直流電源２０の＋側、－側のいずれを電気的に接地してもよいが、以下のように接地すると、より好ましい。
　筒状電極部材３１を電気的に接地し、被コーティング部材Ｗは、出射された微粒子ＮＲ（Ｓ）を反発しないように、筒状電極部材３１と同じ電位となるように接地する。
　また同様に、図４において、筒状電極部材３１が、微粒子出射供給手段４０から出射された微粒子ＮＲ（Ｋ）を反発しないように、筒状電極部材３１と板状電極部材４１とが同じ電位となるように接地する。
　ここで、線状電極部材３０、筒状電極部材３１、被コーティング部材Ｗ、（上方の）板状電極部材４１、（下方の）板状電極部材４２の電気的な接続をまとめておく。
　筒状電極部材３１と被コーティング部材Ｗと板状電極部材４１を電気的に接地すれば、筒状電極部材３１に対して線状電極部材３０が高い電位となるように接続されていてもよいし、筒状電極部材３１に対して線状電極部材３０が低い電位となるように接続されていてもよい。また、板状電極部材４１に対して板状電極部材４２が高い電位となるように接続されていてもよいし、板状電極部材４１に対して板状電極部材４２が低い電位となるように接続されていてもよい。
　また、線状電極部材３１と板状電極部材４２の双方を低い電位、または双方を高い電位となるように接続した場合は、微粒子出射供給手段４０から出射された微粒子ＮＲ（Ｋ）が線状電極部材３０に向かうように、供給側貫通孔ＨＫと被供給側貫通孔ＨＴと線状電極部材３０とが直線上に並ぶように配置することが好ましい。
　また、線状電極部材３１と板状電極部材４２の一方を低い電位、他方を高い電位となるように接続した場合は、微粒子出射供給手段４０から出射された微粒子ＮＲ（Ｋ）が加速されてそのままスリット３１Ｓから出射されないように、線状電極部材３０を避けるように、供給側貫通孔ＨＫと被供給側貫通孔ＨＴとスリット３１Ｓとが直線上に並ぶように配置することが好ましい（スリット３１Ｓと線状電極部材３０と被供給側貫通孔ＨＴと供給側貫通孔ＨＫとが直線上に並ばないように、被供給側貫通孔ＨＴと供給側貫通孔ＨＫの位置を、図４においてスリット３１Ｓと線状電極部材３０とを結んだ直線上からずらした位置とする）。 It should be noted that either the + side or the − side of the first DC power supply 20 may be electrically grounded, but it is more preferable to ground as follows.
The cylindrical electrode member 31 is electrically grounded, and the coated member W is grounded so as to have the same potential as the cylindrical electrode member 31 so as not to repel the emitted fine particles NR (S).
Similarly, in FIG. 4, the cylindrical electrode member 31 and the plate electrode member 41 have the same potential so that the cylindrical electrode member 31 does not repel the fine particles NR (K) emitted from the fine particle emission supply means 40. Be grounded so that
Here, the electrical connection of the linear electrode member 30, the cylindrical electrode member 31, the member W to be coated, the (upper) plate electrode member 41, and the (lower) plate electrode member 42 is summarized.
If the cylindrical electrode member 31, the coated member W, and the plate electrode member 41 are electrically grounded, the linear electrode member 30 may be connected to the cylindrical electrode member 31 so as to have a high potential. The linear electrode member 30 may be connected to the cylindrical electrode member 31 so as to have a low potential. Further, the plate electrode member 42 may be connected to the plate electrode member 41 so as to have a high potential, or the plate electrode member 42 may have a low potential with respect to the plate electrode member 41. It may be connected.
Further, when both the linear electrode member 31 and the plate electrode member 42 are connected so as to have a low potential, or both have a high potential, the particulate NR (K) emitted from the particulate emission supply means 40 is linear. It is preferable that the supply side through hole HK, the supply side through hole HT, and the linear electrode member 30 are arranged in a straight line so as to face the electrode member 30.
Further, when one of the linear electrode member 31 and the plate electrode member 42 is connected to a low potential and the other is set to a high potential, the fine particles NR (K) emitted from the fine particle emission supply means 40 are accelerated. It is preferable that the supply side through hole HK, the supply side through hole HT, and the slit 31S are arranged in a straight line so as to avoid the linear electrode member 30 so as not to be emitted from the slit 31S as it is (slit 31S). The positions of the supplied side through hole HT and the supply side through hole HK are shown in FIG. 4 as slits 31S so that the linear electrode member 30, the supplied side through hole HT, and the supply side through hole HK do not line up in a straight line. And a position shifted from the straight line connecting the linear electrode member 30).
　また図２及び図４に示すように、筒状電極部材３１には、微粒子の径よりも大きなスリット幅３１Ｗのスリット３１Ｓが軸方向に沿って形成されており、微粒子出射供給手段４０から微粒子ＮＲ（Ｋ）の供給を受けるための単数または複数の被供給側貫通孔ＨＴが形成されている。
　なお、筒状電極部材３１の長さＬＴと線状電極部材３０の長さＬＳは、特に制限がなく任意の長さに設定することができる。筒状電極部材３１の長さＬＴと線状電極部材３０の長さＬＳを長くすると、微粒子ＮＲ（Ｓ）を出射するスリット３１Ｓが長くなり、コーティング時間をより短縮できるので、より好ましい。
　そして図４に示すように、微粒子ＮＲ（Ｓ）はスリット３１Ｓから出射される（線状電極部材３０からスリット３１Ｓに向かう方向に出射される）ので、このスリット３１Ｓと対向する位置に被コーティング部材Ｗが配置されている。
　また、図２に示す絶縁蓋３２は、筒状電極部材３１の両端部の開口部を覆う蓋であり、線状電極部材３０を挿通可能な貫通孔が設けられている。なお、絶縁蓋３２は省略してもよい。
　また、本実施の形態では、筒状電極部材３１を水平に配置し、スリット３１Ｓが上側に位置するように配置したが、特に水平に配置しなくてもよく、スリット３１Ｓも下側にならなければ、特にどの方向に向けられていてもよい。 As shown in FIGS. 2 and 4, the cylindrical electrode member 31 is formed with slits 31S having a slit width 31W larger than the diameter of the fine particles along the axial direction. One or a plurality of supply-side through holes HT for receiving the supply of (K) are formed.
The length LT of the cylindrical electrode member 31 and the length LS of the linear electrode member 30 are not particularly limited and can be set to arbitrary lengths. Increasing the length LT of the cylindrical electrode member 31 and the length LS of the linear electrode member 30 is more preferable because the slit 31S that emits the fine particles NR (S) becomes longer and the coating time can be further shortened.
As shown in FIG. 4, since the fine particles NR (S) are emitted from the slit 31S (emitted in the direction from the linear electrode member 30 toward the slit 31S), the member to be coated is located at a position facing the slit 31S. W is arranged.
Further, the insulating lid 32 shown in FIG. 2 is a lid that covers the openings at both ends of the cylindrical electrode member 31, and is provided with a through-hole through which the linear electrode member 30 can be inserted. The insulating lid 32 may be omitted.
Further, in the present embodiment, the cylindrical electrode member 31 is horizontally disposed and the slit 31S is disposed on the upper side. However, the cylindrical electrode member 31 may not be disposed horizontally, and the slit 31S must be on the lower side. In particular, it may be directed in any direction.
　そして、図４に示すように、筒状電極部材３１と線状電極部材３０には、第１直流電源２０から第１電位差（例えば５０［ＫＶ］の電位差）が与えられ、筒状電極部材３１内に供給された微粒子ＮＲ（Ｋ）は、線状電極部材３０と筒状電極部材３１との間で往復運動を繰り返し、やがてスリット３１Ｓから微粒子ＮＲ（Ｓ）が出射される。
　なお、微粒子ＮＲ（Ｋ）が線状電極部材３０と筒状電極部材３１との間で往復運動する原理は、板状電極部材４１と４２との間で往復運動する補助粒子ＢＲ（Ｋ）（または微粒子ＮＲ（Ｋ））の場合と同様であり、供給された微粒子ＮＲ（Ｋ）が筒状電極部材３１に接触した場合に－（または＋）に帯電し、＋側（または－側）である線状電極部材３０の側に移動する。そして線状電極部材３０に接触すると、＋（または－）に帯電し、－側（または＋側）である筒状電極部材３１の側に移動する。この帯電と移動を繰り返して往復運動する。
　この微粒子ＮＲ（Ｓ）がスリット３１Ｓから出射する速度が重要である。
　スリット３１Ｓから出射する微粒子ＮＲ（Ｓ）の速度を大きくするには、筒状電極部材３１内にて微粒子に与えるエネルギーをより大きくする必要がある。筒状電極部材３１内の微粒子には、第１直流電源２０からの第１電位差に基づいたエネルギーが与えられる。 As shown in FIG. 4, the cylindrical electrode member 31 and the linear electrode member 30 are given a first potential difference (for example, a potential difference of 50 [KV]) from the first DC power supply 20, and the cylindrical electrode member 31. The fine particles NR (K) supplied therein repeat reciprocating motion between the linear electrode member 30 and the cylindrical electrode member 31, and eventually the fine particles NR (S) are emitted from the slit 31S.
The principle that the fine particles NR (K) reciprocate between the linear electrode member 30 and the cylindrical electrode member 31 is the auxiliary particle BR (K) (reciprocating between the plate electrode members 41 and 42). Or the fine particle NR (K)), and when the supplied fine particle NR (K) comes into contact with the cylindrical electrode member 31, it is charged to-(or +) and on the + side (or -side). It moves to a certain linear electrode member 30 side. When it comes into contact with the linear electrode member 30, it is charged to + (or-) and moves to the cylindrical electrode member 31 side which is the-side (or + side). This charging and movement is repeated to reciprocate.
The speed at which the fine particles NR (S) are emitted from the slit 31S is important.
In order to increase the speed of the fine particles NR (S) emitted from the slit 31S, it is necessary to increase the energy given to the fine particles in the cylindrical electrode member 31. The fine particles in the cylindrical electrode member 31 are given energy based on the first potential difference from the first DC power supply 20.
　ここで、平行に配置した板状電極部材４１と４２の構成に対する、線状電極部材３０と筒状電極部材３１の構成のメリットについて説明する。
　微粒子ＮＲ（Ｋ）に与えるエネルギーの大きさは、平行に配置した板状電極部材４１と４２の構成においては各電極間に与える電位差と微粒子の電荷（電極間の距離（電場））に依存する。また、線状電極部材３０と筒状電極部材３１の構成においては各電極間に与える電位差と電極間の距離と、線状電極部材３０の径に対する筒状電極部材３１の径の比、に依存する。
　一般的に実用できる直流電源は、５０［ＫＶ］程度までのものである。そこで、５０［ＫＶ］の直流電源を用いて、微粒子の出射速度が、図１０に示す従来のＡＤ法と同等の速度となるようにするには、平行に配置した板状電極部材４１と４２の構成では、電極間の距離を非常に小さくしなければならなくなり、実際には電極間の絶縁状態を維持できずに放電してしまい、電圧が維持できない。
　ところが、線状電極部材３０と筒状電極部材３１の構成では、同じ５０［ＫＶ］の直流電源を用いても、筒状電極部材３１の径に対する線状電極部材３０の径の比を小さくすることで、線状電極部材近傍の電場のみを大きくすることができ、それによって微粒子の電荷を飛躍的に大きくでき、電極間の放電を発生させることなく、微粒子の出射速度を大きくすることができる。例えば、板状電極部材４１と４２の構成において電位差が５０［ＫＶ］、電極間の距離が１０［ｍｍ］の場合に微粒子に与えることができるエネルギーを『Ｗ』とする。そして、線状電極部材３０と筒状電極部材３１の構成において電位差が５０［ＫＶ］、電極間の距離（筒状電極部材３１のほぼ半径）が１０［ｍｍ］、線状電極部材の径が０．１［ｍｍ］（筒状電極部材の直径（ＲＴ）／線状電極部材の直径（ＲＳ）＝約２００）の場合に微粒子に与えることができるエネルギーは、理論上、『Ｗ』の約２５倍となる。
　従って、筒状電極部材の直径（ＲＴ）／線状電極部材の直径（ＲＳ）を大きくしていくだけで、電極間の放電を発生させることなく、微粒子の出射速度を大きくすることが可能であり、実際に微粒子の出射速度を、ＡＤ法と同等の速度に到達させることができる。 Here, the merit of the structure of the linear electrode member 30 and the cylindrical electrode member 31 with respect to the structure of the plate-shaped electrode members 41 and 42 arrange | positioned in parallel is demonstrated.
The magnitude of the energy given to the fine particles NR (K) depends on the potential difference given between the electrodes and the charge of the fine particles (distance between the electrodes (electric field)) in the configuration of the plate electrode members 41 and 42 arranged in parallel. . Further, in the configuration of the linear electrode member 30 and the cylindrical electrode member 31, it depends on the potential difference between the electrodes, the distance between the electrodes, and the ratio of the diameter of the cylindrical electrode member 31 to the diameter of the linear electrode member 30. To do.
In general, the DC power supply that can be practically used is up to about 50 [KV]. Therefore, in order to use a 50 [KV] DC power supply so that the emission speed of the fine particles is equivalent to that of the conventional AD method shown in FIG. 10, the plate electrode members 41 and 42 arranged in parallel are used. In this configuration, the distance between the electrodes must be made very small, and in fact, the insulating state between the electrodes cannot be maintained and the discharge is performed, and the voltage cannot be maintained.
However, in the configuration of the linear electrode member 30 and the cylindrical electrode member 31, the ratio of the diameter of the linear electrode member 30 to the diameter of the cylindrical electrode member 31 is reduced even if the same 50 [KV] DC power supply is used. Thus, only the electric field in the vicinity of the linear electrode member can be increased, whereby the charge of the fine particles can be dramatically increased, and the emission speed of the fine particles can be increased without causing discharge between the electrodes. . For example, the energy that can be given to the fine particles when the potential difference is 50 [KV] and the distance between the electrodes is 10 [mm] in the configuration of the plate electrode members 41 and 42 is “W”. In the configuration of the linear electrode member 30 and the cylindrical electrode member 31, the potential difference is 50 [KV], the distance between the electrodes (approximately the radius of the cylindrical electrode member 31) is 10 [mm], and the diameter of the linear electrode member is In the case of 0.1 [mm] (cylinder electrode member diameter (RT) / linear electrode member diameter (RS) = about 200), the energy that can be given to the fine particles is theoretically about “W”. It will be 25 times.
Therefore, it is possible to increase the emission speed of the fine particles without generating discharge between the electrodes only by increasing the diameter (RT) of the cylindrical electrode member / diameter (RS) of the linear electrode member. Actually, the emission speed of the fine particles can be made to reach the same speed as that of the AD method.
　例えば、第１直流電源２０から与える第１電位差を２０［ＫＶ］、微粒子ＮＲの径を１［ｎｍ］、線状電極部材３０の表面から筒状電極部材３１の内壁までの距離Ｒを５［ｍｍ］、線状電極部材３０の径ＲＳを０．１［ｍｍ］（すなわち、筒状電極部材３１の径ＲＴ／線状電極部材３０の径ＲＳ＝１００）、チャンバ１０内の圧力を１０-4［トール］（約０．０１［パスカル］）、とした場合、出射される微粒子ＮＲ（Ｓ）の速度は、理論上、３００［ｍ／ｓｅｃ］に達し、常温で被コーティング部材Ｗに衝突させて被膜を成形させる（コーティングする）のに充分な速度に到達させることができる。
　なお図５は、微粒子ＮＲ（Ｓ）における、線状電極部材３０（の表面）からの距離と、微粒子ＮＲ（Ｓ）の速度の関係の例を示すグラフである。このグラフから判るように、微粒子ＮＲ（Ｓ）は、距離Ｒの位置（すなわちスリット３１Ｓの位置）にて最大速度Ｖｍに達し、その速度Ｖｍにて被コーティング部材Ｗに衝突する。 For example, the first potential difference given from the first DC power supply 20 is 20 [KV], the diameter of the fine particles NR is 1 [nm], and the distance R from the surface of the linear electrode member 30 to the inner wall of the cylindrical electrode member 31 is 5 [ mm], the diameter RS of the linear electrode member 30 is 0.1 [mm] (that is, the diameter RT of the cylindrical electrode member 31 / the diameter RS of the linear electrode member 30 = 100), and the pressure in the chamber 10 is 10 −. 4 [Torr] (about 0.01 [Pascal]), the velocity of the emitted fine particles NR (S) theoretically reaches 300 [m / sec] and collides with the coated member W at room temperature. To reach a speed sufficient to form (coat) the film.
FIG. 5 is a graph showing an example of the relationship between the distance from the linear electrode member 30 (surface thereof) and the velocity of the fine particle NR (S) in the fine particle NR (S). As can be seen from this graph, the fine particles NR (S) reach the maximum speed Vm at the position of the distance R (that is, the position of the slit 31S) and collide with the coated member W at the speed Vm.
●●［第２の実施の形態（図６、図７）］
　図６は、第２の実施の形態における微粒子コーティング装置２の全体構成の例を示している。第２の実施の形態では、微粒子落下供給手段６０から適量の微粒子ＮＲ（Ｏ）を落下させて、筒状電極部材３１内に微粒子を供給する微粒子コーティング装置２である。以下、第１の実施の形態にて説明した微粒子コーティング装置１との相違点について主に説明する。 ●● [Second Embodiment (FIGS. 6 and 7)]
FIG. 6 shows an example of the overall configuration of the fine particle coating apparatus 2 according to the second embodiment. In the second embodiment, the fine particle coating apparatus 2 is configured to drop an appropriate amount of fine particles NR (O) from the fine particle drop supply means 60 and supply the fine particles into the cylindrical electrode member 31. Hereinafter, differences from the fine particle coating apparatus 1 described in the first embodiment will be mainly described.
●［全体構成（図６）］
　図６に示す第２の実施の形態における微粒子コーティング装置２は、図１に示す微粒子コーティング装置１に対して、線状電極部材３０及び筒状電極部材３１が鉛直方向、または鉛直方向に対して所定角度に傾斜するようにチャンバ１０内に配置されている。なお、傾斜させる場合は、微粒子がスリットから落下しないように、スリット３１Ｓが下向きにならないようにすることが好ましい。
　そして被コーティング部材Ｗ及び相対移動手段１２は、筒状電極部材３１のスリット３１Ｓと対向する位置に配置されている。
　また、図１に示す微粒子コーティング装置１に対して、微粒子出射供給手段４０の代わりに、微粒子落下供給手段６０が、筒状電極部材３１の上端部に配置されている。
　また、線状電極部材３０及び筒状電極部材３１のそれぞれの形状は、被供給側貫通孔ＨＴが設けられていない点を除き、第１の実施の形態と同じである。また、線状電極部材３０と筒状電極部材３１が同軸上に配置されている点も第１の実施の形態と同じであり、第１直流電源２０の接続も、第１の実施の形態と同じである。 ● [Overall structure (Fig. 6)]
The fine particle coating apparatus 2 in the second embodiment shown in FIG. 6 is different from the fine particle coating apparatus 1 shown in FIG. 1 in that the linear electrode member 30 and the cylindrical electrode member 31 are in the vertical direction or the vertical direction. It arrange | positions in the chamber 10 so that it may incline at a predetermined angle. In the case of tilting, it is preferable that the slit 31S does not face downward so that the fine particles do not fall from the slit.
And the to-be-coated member W and the relative movement means 12 are arrange | positioned in the position facing the slit 31S of the cylindrical electrode member 31. FIG.
In addition to the fine particle coating apparatus 1 shown in FIG. 1, a fine particle drop supply means 60 is disposed at the upper end of the cylindrical electrode member 31 instead of the fine particle emission supply means 40.
Each shape of the linear electrode member 30 and the cylindrical electrode member 31 is the same as that of the first embodiment except that the supply-side through hole HT is not provided. Moreover, the point that the linear electrode member 30 and the cylindrical electrode member 31 are coaxially arranged is the same as that of the first embodiment, and the connection of the first DC power supply 20 is also the same as that of the first embodiment. The same.
●［微粒子の供給方法と微粒子が出射される様子（図７）］
　図７に示すように、第２の実施の形態では、コーティングに使用される微粒子ＮＲ（Ｏ）は、微粒子落下供給手段６０にストックされている。
　測定手段５１、５２は、例えばレーザ光等を用いたセンサであり、調整手段５０は、測定手段５１、５２からの信号に基づいて、筒状電極部材３１に供給する微粒子ＮＲ（Ｏ）の落下量を調整するために、微粒子落下供給手段６０の開閉手段６１を制御し、被コーティング部材Ｗにコーティングされる微粒子ＮＲ（Ｓ）の量が所定濃度となるように制御する。
　なお、測定手段５１、５２、調整手段５０は省略してもよい。
　測定手段５１、５２、調整手段５０を省略する場合は、一定量の微粒子ＮＲ（Ｏ）が随時落下するように開閉手段６１を調整しておく。
　なお、筒状電極部材３１の内部に落下して供給された微粒子ＮＲ（Ｏ）がスリット３１Ｓから出射される動作は第１の実施の形態と同様であるので説明を省略する。 ● [Fine particle supply method and appearance of emitted fine particles (Fig. 7)]
As shown in FIG. 7, in the second embodiment, the fine particle NR (O) used for coating is stocked in the fine particle drop supply means 60.
The measuring means 51 and 52 are sensors using, for example, laser light, and the adjusting means 50 is a drop of fine particles NR (O) supplied to the cylindrical electrode member 31 based on signals from the measuring means 51 and 52. In order to adjust the amount, the opening / closing means 61 of the fine particle drop supply means 60 is controlled so that the amount of the fine particles NR (S) coated on the coated member W becomes a predetermined concentration.
Note that the measuring means 51 and 52 and the adjusting means 50 may be omitted.
When the measuring means 51 and 52 and the adjusting means 50 are omitted, the opening / closing means 61 is adjusted so that a certain amount of fine particles NR (O) are dropped at any time.
Note that the operation in which the fine particles NR (O) supplied by dropping into the cylindrical electrode member 31 are emitted from the slit 31S is the same as that in the first embodiment, and thus the description thereof is omitted.
●●［第３の実施の形態（図８、図９）］
　図８は、第３の実施の形態における微粒子コーティング装置３の全体構成の例を示している。第３の実施の形態では、第１の実施の形態（図１）における微粒子出射供給手段４０も、第２の実施の形態（図６）における微粒子落下供給手段６０も備えておらず、微粒子ＮＲ（Ｏ）を予め筒状電極部材３１内に収容している。以下、第１の実施の形態にて説明した微粒子コーティング装置１との相違点について主に説明する。 ●● [Third Embodiment (FIGS. 8 and 9)]
FIG. 8 shows an example of the overall configuration of the fine particle coating apparatus 3 according to the third embodiment. In the third embodiment, neither the particle emission supply means 40 in the first embodiment (FIG. 1) nor the particle drop supply means 60 in the second embodiment (FIG. 6) is provided, and the particle NR. (O) is accommodated in the cylindrical electrode member 31 in advance. Hereinafter, differences from the fine particle coating apparatus 1 described in the first embodiment will be mainly described.
●［全体構成（図８）］
　図８に示す第３の実施の形態における微粒子コーティング装置３は、図１に示す微粒子コーティング装置１に対して、微粒子出射供給手段４０、第２直流電源２１、測定手段５１、５２、調整手段５０が省略されている点と、筒状電極部材３１には被供給側貫通孔ＨＴが形成されていない点が異なる。また、図９に示すように、筒状電極部材３１の内部に、微粒子ＮＲ（Ｏ）と、微粒子ＮＲ（Ｏ）の径よりも大きな径を有する補助粒子ＢＲ（Ｋ）（出射側補助粒子に相当）と、が収容されている点も異なる。
　なお、線状電極部材３０及び筒状電極部材３１は、チャンバ１０内にて水平に配置されている点と、筒状電極部材３１のスリット３１Ｓが下側にならないように向けられている点と、スリット３１Ｓに対向する位置に被コーティング部材が配置されている点は、図１に示す微粒子コーティング装置１と同様である。
　また、線状電極部材３０及び筒状電極部材３１のそれぞれの形状は、被供給側貫通孔ＨＴが設けられていない点を除き、第１の実施と同じである。また、線状電極部材３０と筒状電極部材３１が同軸上に配置されている点も第１の実施の形態と同じであり、第１直流電源２０の接続も、第１の実施の形態と同じである。
　なお、筒状電極部材３１に、図２に示す絶縁蓋３２を設けてもよい。 ● [Overall configuration (Fig. 8)]
The fine particle coating apparatus 3 in the third embodiment shown in FIG. 8 is different from the fine particle coating apparatus 1 shown in FIG. 1 in that the fine particle emission supply means 40, the second DC power supply 21, the measurement means 51 and 52, and the adjustment means 50. And the point that the to-be-supplied side through hole HT is not formed in the cylindrical electrode member 31 is different. Further, as shown in FIG. 9, inside the cylindrical electrode member 31, fine particles NR (O) and auxiliary particles BR (K) having a diameter larger than the diameter of the fine particles NR (O) (on the emission side auxiliary particles) Equivalent) is also different.
The linear electrode member 30 and the cylindrical electrode member 31 are arranged horizontally in the chamber 10, and are pointed so that the slit 31S of the cylindrical electrode member 31 is not on the lower side. The point that the member to be coated is arranged at a position facing the slit 31S is the same as that of the fine particle coating apparatus 1 shown in FIG.
Further, the shapes of the linear electrode member 30 and the cylindrical electrode member 31 are the same as those in the first embodiment except that the supply-side through hole HT is not provided. Moreover, the point that the linear electrode member 30 and the cylindrical electrode member 31 are coaxially arranged is the same as that of the first embodiment, and the connection of the first DC power supply 20 is also the same as that of the first embodiment. The same.
Note that the cylindrical electrode member 31 may be provided with an insulating lid 32 shown in FIG.
●［微粒子の供給方法と微粒子が出射される様子（図９）］
　図９に示すように、第３の実施の形態では、コーティングに使用される微粒子ＮＲ（Ｋ）は、予め筒状電極部材３１の内部に収容されている。また図８の例では、筒状電極部材３１の内部に補助粒子ＢＲ（Ｋ）も収容しているが、補助粒子ＢＲ（Ｋ）は省略してもよい。
　また、補助粒子ＢＲ（Ｋ）の有無にかかわらず、微粒子ＮＲ（Ｓ）がスリット３１Ｓから出射される動作は第１の実施の形態にて説明しているので省略する。
　なお、補助粒子ＢＲ（Ｋ）を筒状電極部材３１の内部に収容させておく場合、スリット３１Ｓの幅３１Ｗを、微粒子ＮＲ（Ｓ）の径よりも大きく、且つ補助粒子ＢＲ（Ｋ）の径よりも小さく設定しておくと、補助粒子ＢＲ（Ｋ）が筒状電極部材３１の外部に飛び出すことを防止できる。 ● [Particle supply method and appearance of particles (Fig. 9)]
As shown in FIG. 9, in the third embodiment, the fine particles NR (K) used for coating are stored in advance inside the cylindrical electrode member 31. In the example of FIG. 8, the auxiliary particles BR (K) are also accommodated in the cylindrical electrode member 31, but the auxiliary particles BR (K) may be omitted.
In addition, the operation of emitting the fine particles NR (S) from the slits 31S regardless of the presence or absence of the auxiliary particles BR (K) has been described in the first embodiment and will be omitted.
When the auxiliary particles BR (K) are accommodated in the cylindrical electrode member 31, the width 31W of the slit 31S is larger than the diameter of the fine particles NR (S) and the diameter of the auxiliary particles BR (K). If it is set smaller than that, the auxiliary particles BR (K) can be prevented from jumping out of the cylindrical electrode member 31.
　以上、第１～第３の実施の形態にて説明したように、本発明の微粒子コーティング装置１～３は、高圧ガスを用いることなく、電力を用いて、ＡＤ法と比較して、よりシンプルな構成とすることができる。また、線状電極部材３０と筒状電極部材３１の形状と配置を適切にすることで、微粒子を被コーティング部材により高速で衝突させることができ、常温でのコーティングが可能であり、加熱・乾燥の工程及び設備が不要である。また、スリット３１Ｓの長さを任意の長さにすることが可能であるので、ＡＤ法と比較して、より広い幅でのコーティングが可能であり、コーティング時間をより短縮化することができる。 As described above in the first to third embodiments, the fine particle coating apparatuses 1 to 3 of the present invention are simpler than the AD method using electric power without using high-pressure gas. It can be set as a simple structure. In addition, by making the shape and arrangement of the linear electrode member 30 and the cylindrical electrode member 31 appropriate, fine particles can collide with the coated member at high speed, and coating at normal temperature is possible, and heating / drying is possible. This process and equipment are unnecessary. Moreover, since it is possible to make the length of the slit 31S arbitrary length, compared with AD method, coating with a wider width | variety is possible and coating time can be shortened more.
　以上、第１～第３の実施の形態にて、微粒子コーティング装置１～３を説明したが、微粒子コーティング方法として、チャンバ１０、減圧手段１１、被コーティング部材Ｗ、線状電極部材３０、スリット３１Ｓを形成した筒状電極部材３１、第１直流電源２０、相対移動手段１２、を用い、筒状電極部材３１の内部に微粒子ＮＲ（Ｋ）を収容または供給し、筒状電極部材３１と線状電極部材３０とを同軸上に配置し、スリット３１Ｓと対向する位置に被コーティング部材Ｗを配置する。
　そして減圧手段１１にてチャンバ１０内を減圧するステップと、第１直流電源２０にて線状電極部材３０と筒状電極部材３１に第１電位差を与えるステップと、相対移動手段１２を用いてスリット３１Ｓに対する被コーティング部材Ｗを相対的に移動させながら、スリット３１Ｓから微粒子ＮＲ（Ｓ）を出射させて被コーティング部材Ｗに衝突させることで微粒子ＮＲ（Ｓ）を被コーティング部材Ｗにコーティングするステップと、を有する、種々の被コーティング部材に種々の微粒子をコーティングできる微粒子コーティング方法として利用することができる。 In the first to third embodiments, the fine particle coating apparatuses 1 to 3 have been described. As a fine particle coating method, the chamber 10, the pressure reducing means 11, the member to be coated W, the linear electrode member 30, and the slit 31S are used. The cylindrical electrode member 31, the first DC power supply 20, and the relative movement means 12 are used to store or supply the fine particles NR (K) inside the cylindrical electrode member 31. The electrode member 30 is arranged on the same axis, and the coated member W is arranged at a position facing the slit 31S.
Then, the step of decompressing the inside of the chamber 10 by the decompression means 11, the step of applying a first potential difference to the linear electrode member 30 and the cylindrical electrode member 31 by the first DC power supply 20, and the slit using the relative movement means 12 Coating the coated member W with the fine particles NR (S) by emitting the fine particles NR (S) from the slit 31S and colliding with the coated member W while moving the coated member W relative to 31S; Can be used as a fine particle coating method capable of coating various fine particles on various coated members.
　本発明の微粒子コーティング装置及び微粒子コーティング方法は、本実施の形態で説明した外観、構成、構造、動作等に限定されず、本発明の要旨を変更しない範囲で種々の変更、追加、削除が可能である。
　また、本実施の形態の説明に用いた数値は一例であり、この数値に限定されるものではない。
　コーティングに使用する微粒子ＮＲは、ナノ粒子等に限定されず、種々の微粒子を利用することができる。
　被コーティング部材Ｗは、導電性の有無にかかわらず、また形状も平面に限定されず、立体的な凹凸があってもコーティング可能である。 The fine particle coating apparatus and fine particle coating method of the present invention are not limited to the appearance, configuration, structure, operation, etc. described in the present embodiment, and various modifications, additions, and deletions are possible without departing from the spirit of the present invention. It is.
The numerical values used in the description of the present embodiment are examples, and are not limited to these numerical values.
The fine particles NR used for coating are not limited to nanoparticles or the like, and various fine particles can be used.
The coated member W is not limited to a flat surface regardless of the presence or absence of conductivity, and can be coated even if there are three-dimensional irregularities.
　１　　　　微粒子コーティング装置（第１の実施の形態）
　２　　　　微粒子コーティング装置（第２の実施の形態）
　３　　　　微粒子コーティング装置（第３の実施の形態）
　１０　　　チャンバ
　１１　　　減圧手段
　１２　　　相対移動手段
　２０　　　第１直流電源
　２１　　　第２直流電源
　３０　　　線状電極部材
　３１　　　筒状電極部材
　３１Ｓ　　スリット
　４０　　　微粒子出射供給手段
　４１、４２　　板状電極部材
　４３　　　筒状壁部材
　５０　　　調整手段
　５１、５２　　測定手段
　６０　　　微粒子落下供給手段
　６１　　　開閉手段
　ＨＴ　　　被供給側貫通孔
　ＨＫ　　　供給側貫通孔
　ＮＲ（Ｏ）　　微粒子
　ＮＲ（Ｋ）　　微粒子
　ＮＲ（Ｓ）　　微粒子
　ＢＲ（Ｋ）　　（供給側）補助粒子、（出射側）補助粒子                          1 Fine particle coating apparatus (first embodiment)
2 Fine particle coating device (second embodiment)
3 Fine particle coating device (third embodiment)
DESCRIPTION OF SYMBOLS 10 Chamber 11 Pressure reducing means 12 Relative moving means 20 1st DC power supply 21 2nd DC power supply 30 Linear electrode member 31 Cylindrical electrode member 31S Slit 40 Fine particle emission supply means 41, 42 Plate electrode member 43 Cylindrical wall member 50 Adjustment Means 51, 52 Measuring means 60 Fine particle drop supply means 61 Opening / closing means HT Supply side through hole HK Supply side through hole NR (O) Fine particle NR (K) Fine particle NR (S) Fine particle BR (K) (Supply side) auxiliary particle , (Outgoing side) auxiliary particles

Claims (9)

  1. 　仕切られた空間を形成しているチャンバと、
    　減圧手段と、
    　第１直流電源と、
    　導電性を有して所定の径にて任意の長さの針金状の線状電極部材と、
    　導電性を有して前記線状電極部材の径よりも大きな径の円筒状であって軸方向に任意の長さの筒状電極部材と、を備えた微粒子コーティング装置であって、
    　前記筒状電極部材には、軸方向に、微粒子の径よりも大きな幅のスリットが形成されており、被コーティング部材にコーティングする微粒子が収容または供給されており、
    　前記線状電極部材と前記筒状電極部材は、互いに接触しないように、且つ前記筒状電極部材の軸位置に前記線状電極部材が位置するように、前記チャンバ内に配置され、
    　前記減圧手段は、前記チャンバ内を減圧し、
    　前記被コーティング部材は、前記チャンバ内に、且つ前記筒状電極部材の前記スリットと対向する位置に配置され、
    　前記第１直流電源は、前記線状電極部材と前記筒状電極部材との間に第１電位差を与え、
    　前記筒状電極部材内で前記第１電位差に基づいて運動している微粒子を、前記スリットから出射させて前記被コーティング部材に衝突させて、前記被コーティング部材に微粒子をコーティングする、
    　微粒子コーティング装置。     A chamber forming a partitioned space;
    Decompression means;
    A first DC power supply;
    A wire-like linear electrode member having electrical conductivity and having a predetermined diameter and an arbitrary length;
    A cylindrical electrode member having conductivity and a cylindrical electrode member having a diameter larger than the diameter of the linear electrode member and having an arbitrary length in the axial direction;
    In the cylindrical electrode member, slits having a width larger than the diameter of the fine particles are formed in the axial direction, and fine particles to be coated on the coated member are accommodated or supplied.
    The linear electrode member and the cylindrical electrode member are disposed in the chamber so as not to contact each other and so that the linear electrode member is positioned at an axial position of the cylindrical electrode member,
    The decompression means decompresses the inside of the chamber,
    The coated member is disposed in the chamber and at a position facing the slit of the cylindrical electrode member,
    The first DC power supply provides a first potential difference between the linear electrode member and the cylindrical electrode member,
    The fine particles moving based on the first potential difference in the cylindrical electrode member are emitted from the slit to collide with the coated member, and the coated member is coated with the fine particles.
    Fine particle coating equipment.
  2. 　請求項１に記載の微粒子コーティング装置であって、
    　前記線状電極部材と前記筒状電極部材は、前記スリットが下向きにならないように、水平に配置されており、
    　前記筒状電極部材における下側となる面には、微粒子の径よりも大きな径の単数または複数の被供給側貫通孔が形成されており、
    　前記チャンバ内における前記筒状電極部材の下方には、単数または複数の微粒子出射供給手段が配置されており、
    　前記微粒子出射供給手段は、互いに平行となるように所定間隔にて水平に配置した２枚の板状電極部材と、２枚の板状電極部材のそれぞれを互いに電気的に絶縁した状態で前記所定間隔を保持するとともに２枚の板状電極部材の間に所定空間を形成する筒状壁部材と、で構成され、
    　前記所定空間には、微粒子と、微粒子の径よりも大きな径の供給側補助粒子と、が収容されており、
    　２枚の板状電極部材は、前記第１直流電源から前記第１電位差が与えられ、あるいは第２直流電源が設けられて当該第２直流電源から第２電位差が与えられ、
    　２枚の板状電極部材における上側の板状電極部材には、前記所定空間における任意の位置に微粒子の径よりも大きな径の単数または複数の供給側貫通孔が形成されており、
    　前記微粒子出射供給手段は、
    　前記供給側貫通孔と前記被供給側貫通孔とが対向するように配置されており、
    　前記第１電位差あるいは前記第２電位差に基づいて運動する前記供給側補助粒子にて分散された微粒子を、前記第１電位差あるいは前記第２電位差に基づいて２枚の板状電極部材の間で往復運動させて、前記供給側貫通孔と前記被供給側貫通孔を経由させて前記筒状電極部材内に供給する、
    　微粒子コーティング装置。     The fine particle coating apparatus according to claim 1,
    The linear electrode member and the cylindrical electrode member are horizontally disposed so that the slit does not face downward,
    On the lower surface of the cylindrical electrode member, one or a plurality of supply-side through holes having a diameter larger than the diameter of the fine particles are formed,
    Under the cylindrical electrode member in the chamber, one or a plurality of fine particle emission supply means are disposed,
    The fine particle emitting and supplying means is configured such that the two plate electrode members horizontally arranged at predetermined intervals so as to be parallel to each other and the two plate electrode members are electrically insulated from each other. A cylindrical wall member that maintains a distance and forms a predetermined space between the two plate-like electrode members,
    The predetermined space contains fine particles and supply side auxiliary particles having a diameter larger than the diameter of the fine particles,
    The two plate-like electrode members are given the first potential difference from the first DC power source, or provided with a second DC power source and given the second potential difference from the second DC power source,
    The upper plate-like electrode member of the two plate-like electrode members is formed with one or more supply-side through holes having a diameter larger than the diameter of the fine particles at an arbitrary position in the predetermined space,
    The fine particle emission supply means comprises:
    The supply side through hole and the supply side through hole are arranged to face each other,
    The fine particles dispersed by the supply side auxiliary particles moving based on the first potential difference or the second potential difference are reciprocated between two plate electrode members based on the first potential difference or the second potential difference. To move and supply the cylindrical electrode member through the supply side through hole and the supply side through hole,
    Fine particle coating equipment.
  3. 　請求項２に記載の微粒子コーティング装置であって、
    　前記供給側貫通孔の径は、前記供給側補助粒子の径よりも小さく形成されている、
    　微粒子コーティング装置。     The fine particle coating apparatus according to claim 2,
    The diameter of the supply side through hole is formed smaller than the diameter of the supply side auxiliary particles,
    Fine particle coating equipment.
  4. 　請求項１に記載の微粒子コーティング装置であって、
    　前記線状電極部材と前記筒状電極部材は、鉛直方向に沿って、あるいは鉛直方向に対して所定角度に傾斜させるとともに前記スリットが下向きにならないように、配置されており、
    　前記筒状電極部材の両端部における上方となる一方の端部から、前記筒状電極部材の内部に微粒子を落下させて供給する微粒子落下供給手段を備えている、
    　微粒子コーティング装置。     The fine particle coating apparatus according to claim 1,
    The linear electrode member and the cylindrical electrode member are arranged so as to be inclined along a vertical direction or at a predetermined angle with respect to the vertical direction and the slit does not face downward.
    Fine particle drop supply means is provided that drops and supplies fine particles to the inside of the cylindrical electrode member from one of the upper ends at both ends of the cylindrical electrode member.
    Fine particle coating equipment.
  5. 　請求項１に記載の微粒子コーティング装置であって、
    　前記線状電極部材と前記筒状電極部材は、前記スリットが下向きにならないように、水平に配置されており、
    　前記筒状電極部材内には、微粒子の径よりも大きな径の出射側補助粒子が収容されており、
    　前記第１電位差に基づいて前記出射側補助粒子を運動させて、前記筒状電極部材内の微粒子を分散させ、分散した微粒子を前記第１電位差に基づいて運動させて前記スリットから出射する、
    　微粒子コーティング装置。     The fine particle coating apparatus according to claim 1,
    The linear electrode member and the cylindrical electrode member are horizontally disposed so that the slit does not face downward,
    The cylindrical electrode member contains emission-side auxiliary particles having a diameter larger than that of the fine particles,
    Moving the emission-side auxiliary particles based on the first potential difference to disperse the fine particles in the cylindrical electrode member, and moving the dispersed fine particles based on the first potential difference to be emitted from the slit;
    Fine particle coating equipment.
  6. 　請求項５に記載の微粒子コーティング装置であって、
    　前記スリットの幅は、前記出射側補助粒子の径よりも小さく形成されている、
    　微粒子コーティング装置。     The fine particle coating apparatus according to claim 5,
    The width of the slit is formed smaller than the diameter of the emission side auxiliary particles,
    Fine particle coating equipment.
  7. 　請求項１～６のいずれか一項に記載の微粒子コーティング装置であって、
    　前記筒状電極部材と前記被コーティング部材が電気的に接地されている、
    　微粒子コーティング装置。     The fine particle coating apparatus according to any one of claims 1 to 6,
    The cylindrical electrode member and the coated member are electrically grounded,
    Fine particle coating equipment.
  8. 　請求項１～７のいずれか一項に記載の微粒子コーティング装置であって、
    　前記筒状電極部材の前記スリットの位置に対して、前記被コーティング部材を相対的に移動可能な相対移動手段を備えている、
    　微粒子コーティング装置。     The fine particle coating apparatus according to any one of claims 1 to 7,
    A relative movement means capable of relatively moving the member to be coated with respect to the position of the slit of the cylindrical electrode member;
    Fine particle coating equipment.
  9. 　仕切られた空間を形成しているチャンバと、減圧手段と、被コーティング部材と、導電性を有して所定の径にて任意の長さの針金状の線状電極部材と、導電性を有して前記線状電極部材の径よりも大きな径の円筒状であって軸方向に任意の長さの筒状電極部材と、第１直流電源と、相対移動手段と、を用い、
    　前記筒状電極部材に、軸方向に、微粒子の径よりも大きな幅のスリットを形成し、
    　前記筒状電極部材の内側に、被コーティング部材にコーティングする微粒子を収容または供給し、
    　前記線状電極部材と前記筒状電極部材を、互いに接触しないように、且つ前記筒状電極部材の軸位置に前記線状電極部材が位置するように前記チャンバ内に配置し、
    　前記被コーティング部材を、前記筒状電極部材の前記スリットと対向するように前記チャンバ内に配置し、
    　前記減圧手段にて前記チャンバ内を減圧するステップと、
    　前記第１直流電源にて、前記線状電極部材と前記筒状電極部材との間に第１電位差を与えるステップと、
    　前記相対移動手段を用いて前記筒状電極部材及び前記線状電極部材に対して前記被コーティング部材を相対的に移動させながら、前記筒状電極部材内で前記第１電位差に基づいて運動している微粒子を、前記スリットから出射させて前記被コーティング部材に衝突させて、前記被コーティング部材に微粒子をコーティングするステップと、を有する、
    　微粒子コーティング方法。                A chamber forming a partitioned space, a decompression unit, a member to be coated, a wire-like linear electrode member having a predetermined diameter and having a conductivity, and a conductivity. Then, a cylindrical electrode member having a diameter larger than the diameter of the linear electrode member and having an arbitrary length in the axial direction, a first DC power source, and a relative moving means are used.
    A slit having a width larger than the diameter of the fine particles is formed in the cylindrical electrode member in the axial direction,
    Accommodating or supplying fine particles to be coated on the coated member inside the cylindrical electrode member,
    The linear electrode member and the cylindrical electrode member are arranged in the chamber so as not to contact each other and so that the linear electrode member is positioned at an axial position of the cylindrical electrode member,
    The coated member is disposed in the chamber so as to face the slit of the cylindrical electrode member,
    Decompressing the chamber with the decompression means;
    Applying a first potential difference between the linear electrode member and the cylindrical electrode member at the first DC power source;
    While moving the member to be coated relative to the cylindrical electrode member and the linear electrode member using the relative moving means, it moves based on the first potential difference in the cylindrical electrode member. Coating the fine particles on the coated member by causing the fine particles to exit from the slit and collide with the coated member.
    Fine particle coating method.
PCT/JP2010/060533 2009-06-24 2010-06-22 Fine particle coating apparatus and fine particle coating method WO2010150772A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009-149379 2009-06-24
JP2009149379A JP5340824B2 (en) 2009-06-24 2009-06-24 Fine particle coating apparatus and fine particle coating method

Publications (1)

Publication Number Publication Date
WO2010150772A1 true WO2010150772A1 (en) 2010-12-29

Family

ID=43386541

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2010/060533 WO2010150772A1 (en) 2009-06-24 2010-06-22 Fine particle coating apparatus and fine particle coating method

Country Status (2)

Country Link
JP (1) JP5340824B2 (en)
WO (1) WO2010150772A1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6041571A (en) * 1984-04-02 1985-03-05 Takashi Ide Preparation of solid thin film on surface of object to be processed
JP2001247979A (en) * 1998-07-24 2001-09-14 Agency Of Ind Science & Technol Superfine particle film deposition method
JP2008038186A (en) * 2006-08-03 2008-02-21 High Energy Accelerator Research Organization Film-forming apparatus, film-forming method and film-formed member
JP2008137122A (en) * 2006-12-04 2008-06-19 Tatsuo Shiyouji Coating method with fine particle

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6041571A (en) * 1984-04-02 1985-03-05 Takashi Ide Preparation of solid thin film on surface of object to be processed
JP2001247979A (en) * 1998-07-24 2001-09-14 Agency Of Ind Science & Technol Superfine particle film deposition method
JP2008038186A (en) * 2006-08-03 2008-02-21 High Energy Accelerator Research Organization Film-forming apparatus, film-forming method and film-formed member
JP2008137122A (en) * 2006-12-04 2008-06-19 Tatsuo Shiyouji Coating method with fine particle

Also Published As

Publication number Publication date
JP5340824B2 (en) 2013-11-13
JP2011005379A (en) 2011-01-13

Similar Documents

Publication Publication Date Title
US11845216B2 (en) 3D printed electronics using directional plasma jet
JP5180585B2 (en) Plasma processing apparatus and method
AU6162501A (en) High mass throughput particle generation using multiple nozzle spraying
JP5010766B2 (en) Method and apparatus for statistically characterizing nanoparticles
US20120315768A1 (en) Method for generating charged particles
JPWO2009060898A1 (en) Immobilization device
EP2974749B1 (en) Active ingredient generating device
Jidenko et al. Nano-particle size-dependent charging and electro-deposition in dielectric barrier discharges at atmospheric pressure for thin SiOx film deposition
GB2462112A (en) Producing fibres and droplets, using an electric field and moving band
US8877297B2 (en) Deposition method
JP5340824B2 (en) Fine particle coating apparatus and fine particle coating method
Gomez et al. Fundamentals of cone-jet electrospray
US10981184B2 (en) Coating apparatus and coating method
US9669423B2 (en) Multi-tip spark discharge generator and method for producing nanoparticle structure using same
CN104364873A (en) Device for generating plasma and directing an electron beam towards a target
JP4837409B2 (en) Nanoparticle production method
KR101891696B1 (en) Spark discharge generator and process for preparing nanoparticle structure using same
US11417506B1 (en) Apparatus including thermal energy harvesting thermionic device integrated with electronics, and related systems and methods
US20210343960A1 (en) Single electron transistor (set), circuit containing set and energy harvesting device, and fabrication method
KR20150056810A (en) Plasma Source
KR101195879B1 (en) Nano Particle Generator
JP4810497B2 (en) Atomic beam source and surface modification equipment
JP2004018899A (en) Evaporation source and film-formation equipment
EP4321325A1 (en) Additive manufacturing apparatus, system, method, and use
US20060144972A1 (en) Apparatus and method for generating fine particulates

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 10792090

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 10792090

Country of ref document: EP

Kind code of ref document: A1