JP2010281581A5 - - Google Patents

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Publication number
JP2010281581A5
JP2010281581A5 JP2009132836A JP2009132836A JP2010281581A5 JP 2010281581 A5 JP2010281581 A5 JP 2010281581A5 JP 2009132836 A JP2009132836 A JP 2009132836A JP 2009132836 A JP2009132836 A JP 2009132836A JP 2010281581 A5 JP2010281581 A5 JP 2010281581A5
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JP
Japan
Prior art keywords
pressure
pressure sensor
frequency
approximate polynomial
coefficients
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JP2009132836A
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English (en)
Japanese (ja)
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JP5293413B2 (ja
JP2010281581A (ja
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Priority to JP2009132836A priority Critical patent/JP5293413B2/ja
Priority claimed from JP2009132836A external-priority patent/JP5293413B2/ja
Publication of JP2010281581A publication Critical patent/JP2010281581A/ja
Publication of JP2010281581A5 publication Critical patent/JP2010281581A5/ja
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Publication of JP5293413B2 publication Critical patent/JP5293413B2/ja
Expired - Fee Related legal-status Critical Current
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JP2009132836A 2009-06-02 2009-06-02 圧力センサー及びその製造方法 Expired - Fee Related JP5293413B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009132836A JP5293413B2 (ja) 2009-06-02 2009-06-02 圧力センサー及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009132836A JP5293413B2 (ja) 2009-06-02 2009-06-02 圧力センサー及びその製造方法

Publications (3)

Publication Number Publication Date
JP2010281581A JP2010281581A (ja) 2010-12-16
JP2010281581A5 true JP2010281581A5 (https=) 2012-05-31
JP5293413B2 JP5293413B2 (ja) 2013-09-18

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ID=43538463

Family Applications (1)

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JP2009132836A Expired - Fee Related JP5293413B2 (ja) 2009-06-02 2009-06-02 圧力センサー及びその製造方法

Country Status (1)

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JP (1) JP5293413B2 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9857782B2 (en) 2011-12-28 2018-01-02 Fuji Electric Co., Ltd. Output value correction method for physical quantity sensor apparatus, output correction method for physical quantity sensor, physical quantity sensor apparatus and output value correction apparatus for physical quantity sensor
JP2019158476A (ja) 2018-03-09 2019-09-19 セイコーエプソン株式会社 物理量センサーデバイス、物理量センサーデバイスを用いた傾斜計、慣性計測装置、構造物監視装置、及び移動体
CN116718301A (zh) * 2023-06-16 2023-09-08 西安交通大学 一种温压一体传感器温度补偿方法及系统
CN116754107B (zh) * 2023-08-23 2023-10-20 清华四川能源互联网研究院 具有放大结构的高灵敏度谐振压力传感器及信号调理方法
CN119334532B (zh) * 2024-12-20 2025-04-11 吉林大学 基于压力检测探头的高精度压力感知方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS532097A (en) * 1976-06-29 1978-01-10 Seiko Instr & Electronics Ltd Quartz crystal oscillator
JPS54158150A (en) * 1978-06-05 1979-12-13 Seiko Instr & Electronics Ltd Crystal oscillation circuit
JPS5726723A (en) * 1980-07-25 1982-02-12 Seiko Epson Corp Crystal thermometer
JP3010922B2 (ja) * 1992-08-28 2000-02-21 セイコーエプソン株式会社 温度検出用水晶振動子及びその製造方法
JPS63281033A (ja) * 1987-05-13 1988-11-17 Daiwa Shinku Kogyosho:Kk 圧力検出装置
JP5403200B2 (ja) * 2006-06-09 2014-01-29 セイコーエプソン株式会社 圧力センサ
JP2008076075A (ja) * 2006-09-19 2008-04-03 Epson Toyocom Corp 絶対圧センサ

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