JP2010276432A - Profiling mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide inexpensively a profiling mechanism which realizes profiling of high accuracy by a small profiling force. <P>SOLUTION: This profiling mechanism includes a hollow suction-exhaust part 3 which projects downward from the center of the underside of a slider mechanism 2 equipped with a sliding holding part 22 and a sliding part 21 and being slidable two-dimensionally. A profiling object 7 sucked on the suction-exhaust part 3 is pushed onto a profiling reference 10 and the profiling object 7 is made to profile the profiling reference 10 by controlling a flow rate of sucked-exhausted air in the suction-exhaust part 3 so that a contact C1 of the profiling object 7 and the profiling reference 10 and a contact of the suction-exhaust part 3 and the profiling object 7 may not slide together. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a copying mechanism for causing a copying object to follow a copying reference object.

  There are a large number of drives in today's automated devices and equipment, and the position or speed of the drives is controlled. An encoder is one type of sensor for obtaining position / speed information of the drive unit, and is roughly classified into a linear motion type linear encoder and a rotary type rotary encoder. The position detection principle includes an optical type and a magnetic type.

An optical rotary encoder to be handled by the copying mechanism according to the present invention will be outlined with a focus on its position detection method.
The optical rotary encoder has a rotating shaft (either solid or hollow) connected to the rotating portion of the driving unit, a pulse disc that rotates integrally with the rotating shaft, and a pair of light emission sandwiching the pulse disc A light receiving element and a driving / processing circuit for the optical element. Here, the pulse disk is subjected to slit-like hole processing, masking treatment, or thickness and surface treatment so as to obtain a desired transmittance. By these processes, light from a light emitting element such as a light emitting diode (LED) passes through a pulse disk and is input to a light receiving element such as a photodiode (PD), thereby encoding the rotation speed (position). Will be. As a specific configuration, there is one in which a rotating shaft and a rotating disk are integrally formed of a resin, but a glass or rotating disk is generally bonded and fixed to a metal or resin rotating shaft.

  In recent years, with the miniaturization of objects handled by various devices, there is a need for automation devices and facilities that are compact, and that drive position control for high-precision processing and assembly is highly accurate (high resolution). For this reason, both an optical rotary encoder that detects a position or speed is required to be both small and highly accurate.

In order to realize this, it is essential to improve the assembly accuracy as well as the slit hole processing pitch and width of the pulse disk, the reduction of the masking width, and the response frequency of the optical element and the processing circuit. This is because the range of error of the installation position and installation posture allowed for each component is strictly limited.
For example, when the pulse disk is bonded and fixed in a posture deviated from the rotation axis, the pulse disk may come into contact with an LED, PD, or the like, which is an optical element, and break. Even if they do not contact each other, sufficient light does not reach the PD of the light receiving element from the LED of the light emitting element through the pulse disk, the desired accuracy cannot be obtained, and it cannot be used as a rotational position sensor. is there.

As described above, when assembling the rotating shaft and the pulse disc, it is necessary to adjust not only the position but also the posture with high accuracy, and the positional deviation between the rotating shaft and the pulse disc is within the range in which the performance of the rotational position sensor can be maintained. Need to fit. That is, it is necessary to make the pulse disk follow the upper surface of the rotating shaft with high accuracy.
Normally, this process is realized by pressing a copying mechanism that holds the pulse disk against the rotating shaft. Hereinafter, this pressing force is referred to as a copying force.
In general, when the scanning force is large, the rotational moment at the contact point between the rotating shaft and the pulse disk increases, so that the scanning accuracy is improved.
On the other hand, with the miniaturization of the encoder, the thickness of the pulse disk is made thinner and the diameter of the rotating shaft is made smaller, so that the rigidity of the component parts decreases. Therefore, it is necessary to realize sufficient scanning accuracy with a small scanning force.

  As a copying mechanism aiming to achieve both small scanning force and improved accuracy, a mechanism using a static pressure air bearing has been proposed.

JP 2002-329749 A (paragraph 0016, FIG. 1)

  In Patent Document 1, high-precision copying can be realized with a small scanning force, but static pressure air bearings must be used in two places for supporting the swing stage and holding the slider mechanism, and the number of parts is large. There was a problem that both manufacturing and maintenance took time and cost.

  The present invention has been made to solve the above problems. An object is to obtain an inexpensive copying mechanism capable of realizing high copying accuracy with a small copying force.

The copying mechanism according to the present invention includes a slide holding portion and a slider mechanism including a sliding portion that can slide two-dimensionally along the sliding holding portion;
A hollow intake / exhaust part protruding vertically from the sliding part in the sliding direction;
In a copying mechanism having an intake / exhaust port for sucking air from the intake / exhaust part or exhausting air to the intake / exhaust part,
The object to be copied adsorbed on the intake / exhaust part is pressed against the fixed object to be copied,
Control the air flow rate of the intake / exhaust port so that the contact point between the object to be copied and the reference object to be copied and the contact point between the intake / exhaust part and the object to be copied are not separated from each other. It is a feature.

The copying mechanism according to the present invention presses the copying object adsorbed on the intake / exhaust portion against a fixed copying reference object,
Control the air flow rate of the intake / exhaust port so that the contact between the object to be copied and the reference object to be copied and the contact between the intake / exhaust part and the object to be copied are not separated from each other. Because it is a feature,
A scanning mechanism that can realize high-precision scanning with a small scanning force can be provided at low cost.

It is a figure which shows operation | movement of the copying mechanism by Embodiment 1 of this invention. It is sectional drawing which cut | disconnected the copying mechanism by Embodiment 1 of this invention by the plane containing the axis | shaft of an intake / exhaust part. FIG. 3 is a cross-sectional view of the copying mechanism according to the first embodiment of the present invention cut along a plane including the line AA in FIG. FIG. 2 is an enlarged view in which an intake / exhaust portion and a pulse disc of the copying mechanism in the state of FIG. 1B are combined with an intake / exhaust portion of the copying mechanism, a pulse disc and a rotating shaft in a completely copied state. It is a figure which shows the force which the pressurization air of the copying mechanism by Embodiment 1 of this invention applies to a pulse disc. It is a figure which shows the change of the flow volume of pressurized air during the copying operation | movement of the copying mechanism by Embodiment 1 of this invention. It is a figure which shows the pulse disc and rotation shaft which were assembled using the copying mechanism by Embodiment 1 of this invention. It is a figure which shows the position shift | offset | difference error of the center of the pulse disc assembled using the copying mechanism by Embodiment 1 of this invention, and the center of a rotating shaft. It is sectional drawing of the copying mechanism by Embodiment 2 of this invention. It is sectional drawing which shows the state which supplied the pressurized air to the intake / exhaust port of the copying mechanism by Embodiment 2 of this invention. It is a principal part expanded sectional view which shows the state which supplied the pressurized air to the intake / exhaust port of the copying mechanism by Embodiment 2 of this invention. FIG. 10 is a diagram showing a copying operation of the copying mechanism 101 according to Embodiment 2 of the present invention and a positional relationship between the copying mechanism 101.

Embodiment 1 FIG.
Using the copying mechanism 1 according to the first embodiment of the present invention, the pulse disk (the object to be copied) of the encoder is made to follow the end of the rotary shaft (the object to be copied) of the rotary encoder (hereinafter simply referred to as the encoder). The procedure for assembling these with high accuracy will be described with reference to the drawings.

First, “copying” that the copying mechanism according to the first embodiment of the present invention intends to realize will be described.
The scanning mechanism 1 shown in FIG. 1A (parts composed of reference numerals 3, 21 and 22 and will be described in detail later) is adsorbed by the intake / exhaust portion 3 on the upper surface 11 of the rotary shaft 10 of the encoder which is a scanning reference object This is a device for copying the pulse disk 7 of the encoder.
Although the rotating shaft 10 is holding a housing (not shown) including the rotating shaft 10 by a gripping tool, a slight deviation occurs every time depending on the target workpiece due to the forming accuracy and processing accuracy of the gripping portion. In order to bond and fix the pulse disk 7 to the upper surface 11 of the rotating shaft 10 with high accuracy, the center position of the upper surface 11 of the rotating shaft 10 and the copying mechanism 1 are kept in a state where the rotating shaft 10 is held and fixed. It is necessary to measure the center position of the pulse disk 7 adsorbed in step, and to follow the rotation disk 10 so that the two centers overlap with high accuracy.

Specifically, from the state of FIG. 1A, after the copying mechanism 1 is pressed against the rotary shaft 10 as shown in FIG. 1B, pressurized air is applied to the upper surface of the pulse disk 7 in a predetermined procedure. The lower surface of the pulse disk 7 is made to follow the upper surface 11 of the rotating shaft 10 as shown in FIG.
In this process, the sliding force of the slider mechanism 2 absorbs the force at which the contact point between the rotating shaft 10 and the pulse disk 7 and the contact point between the pulse disk 7 and the copying mechanism 1 slide. This is a feature of copying realized by the copying mechanism 1.

In the first embodiment, the configuration of the copying mechanism 1 and the steps until the rotating shaft 10 of the encoder and the pulse disk 7 are bonded will be described.
It is the copying mechanism 1 side that operates in the process of “copying”, and the rotary shaft 10 is always fixed.

FIG. 2 is a cross-sectional view of the copying mechanism 1 according to Embodiment 1 of the present invention cut along a plane including the axis of the intake / exhaust section 3.
3 is a cross-sectional view of the copying mechanism 1 cut along a plane including the line AA in FIG.
In order to simplify the explanation, only the copying mechanism 1 is shown, but in actuality, the copying mechanism 1 is mounted on the hand of the robot.
The copying mechanism 1 includes a slider mechanism 2 and an intake / exhaust portion 3.
The slider mechanism 2 includes a sliding portion 21 and a sliding holding portion 22, and the sliding holding portion 22 further includes a sliding holding top plate 221 and a sliding holding flange 222 fixed to the sliding holding top plate 221. It consists of
The sliding portion 21 is in contact with the sliding holding top plate 221 and the sliding holding flange 222 via the sliding surface 2a, and slides two-dimensionally in the space surrounded by the two members.
Although not shown, the sliding surface 2a uses a member having a small sliding resistance such as a ball or a cross roller.

As shown in FIG. 3, the sliding portion 21 can freely rotate and slide inside the sliding holding 222.
That is, the sliding portion 21 can slide linearly in the vertical and horizontal directions in the drawing over the length twice the difference between the inner diameter of the sliding holding flange 222 and the radius of the sliding portion 21. It is also possible to rotate around the intake / exhaust port 23.
The cylindrical intake / exhaust portion 3 shown in FIG. 2 is fixed to the sliding portion 21 with a screw (not shown) or the like, and an external pneumatic device (not shown) is provided via an intake / exhaust port 23 provided at the center of the sliding holding top plate 221. Connected to the machine.
The airtightness of this flow path has a structure secured by the seal portion 2b even when the slider mechanism 2 slides horizontally via the sliding surface 2a.

Next, the copying operation will be described in detail.
As the order of explanation, only the copying operation will be described first, and the entire procedure including other operations such as an adhesive application operation will be described later.
FIG. 1A is a side view of the copying mechanism 1 adsorbing the pulse disk 7, and FIG. 1B is a drawing reference object (here, the rotating shaft 10) and the copying mechanism 1 are in contact with each other. It is a figure showing a state,
FIG. 1C is a side view of the copying mechanism 1 at the end of copying.
This shows a general situation in which the copying mechanism 1 and the rotary shaft 10 are displaced in the vertical direction. The deviation of the rotating shaft 10 indicates a situation in which the housing including the bearing (not shown) that fixes the rotating shaft is displaced in the vertical direction.
In order to simplify the explanation, the copying mechanism 1 is assumed to be kept horizontal by the robot on which it is mounted, but it may be tilted.
For ease of explanation, a diagram in which the rotary shaft 10 is greatly tilted is used, but it is actually slightly tilted.
It is assumed that the upper surface 11 of the rotating shaft 10 shown in the figure is held at a right angle with sufficient accuracy with respect to the central axis of the rotating shaft 10.

First, air is sucked from the intake / exhaust portion 3 by evacuating from the intake / exhaust port 23 provided at the upper center of the copying mechanism 1 at the place of the pulse disk 7 (not shown).
As a result, the upper surface of the pulse disk 7 is brought into contact with the lower surface of the intake / exhaust part 3.
The pulse disk 7 at this time is along the lower surface of the tip of the intake / exhaust portion 3.
Next, the copying mechanism 1 is moved above the rotating shaft 10 by means such as a robot (not shown) while the pulse disk 7 is held by suction (FIG. 1A), and the rotating shaft 10 which is a copying reference object. It is lowered until it touches (FIG. 1B).
Contact between the lower surface of the pulse disk 7 and the upper surface of the rotating shaft 10 can be detected by a force sensor, a position sensor, or the like (not shown). In the case of a force sensor, an increase in reaction force generated after contact is detected, and in the case of a position sensor, it is detected that the position after contact becomes a constant value and remains unchanged.

When the contact state is detected, evacuation from the intake / exhaust port 23 is stopped, and the intake / exhaust port 23 is opened to the atmosphere. At this time, the upper surface of the pulse disk 7 is in contact with the intake / exhaust portion 3, and the lower surface is in contact with the rotating shaft 10.
When the copying operation further proceeds from here, the pulse disk 7 follows the upper surface 11 of the rotating shaft 10 in the state shown in FIG. 1C. This process will be described in detail below.
FIG. 4A shows the slider mechanism 1 in the state of FIG. 1B, the pulse disk 7 adsorbed by the intake / exhaust portion 3 (indicated by a broken line), the slider mechanism 1 in a completely imitated state, and It is the enlarged view which synthesize | combined the pulse disk 7 (it displays with a continuous line).
FIG. 4B is an enlarged view of the main part of FIG.

In the figure, the rotary shaft 10 is fixed and does not move. The first contact point between the upper surface 11 of the rotating shaft 10 and the pulse disk 7 is C1, and the first contact point between the pulse disk 7 and the lower left end of the intake / exhaust section 3 is C2.
Even if the suction of the pulse disc 7 is stopped and the intake / exhaust port 23 is opened to the outside air, the inside of the intake / exhaust portion 3 is in a negative pressure state with respect to the outside air, so the pulse disc does not fall immediately.
Here, when the copying mechanism 1 is further lowered, the pulse disk 7 starts to rotate in the arrow direction with the contact point C1 and the contact point C2 as fulcrums. At this time, pressurized air is gradually supplied from the intake / exhaust port 23 into the intake / exhaust part 3, and the pulse disk 7 is not affected by the negative pressure remaining in the intake / exhaust part 3, and the contact point C 1, contact point Control is performed so as to smoothly rotate in the direction of the arrow with C2 as a fulcrum.

Then, the contact point C1 and the contact point C2 do not slide between parts that are in contact with each other.
As shown in FIG. 4B, if the position of the contact point C2 when the copying mechanism 1 first contacts the pulse disc 7 does not move during the copying operation, the position of the contact point C2 is C2 ′ at the end of copying. In the position. The slider mechanism 2 plays a role of absorbing the horizontal displacement, and the sliding portion 21 of the slider mechanism 2 moves to the right by the same length. The slider mechanism 2 in FIG. 1 (c) shows this situation.
If the slider mechanism 2 is not provided, one or both of the contact points C1 and C2 must slide between the parts in contact with each other.
However, in this case, since a considerable frictional force acts between both parts, smooth copying cannot be realized.
In the present embodiment, the slider mechanism 2 operates in the horizontal direction without sliding the contact points C1 and C2 in synchronization with the rotation operation of the pulse disk 7, and therefore the rotation operation about the contact point C1. Is smoothly realized, and the problem of friction at the contact points C1 and C2 can be solved.

  In the figure, the state where the contact point C1 is at the left end is shown for simplicity of explanation, but the slider mechanism 2 can slide freely within a predetermined range in two dimensions, so that it can cope with any contact point.

Next, the effect of pressurized air during the copying operation will be further described.
As described above, after the pulse disk 7 comes into contact with the copying mechanism 1, the supply of pressurized air to the intake / exhaust unit 3 is started while the copying mechanism 1 is further lowered. A rotational moment is generated that acts in the direction of copying the pulse disk 7.
Here, the rotational moment is the sum of the products of the air pressure of the pressurized air acting on the entire hollow area of the intake / exhaust part 3 and the distance from the rotation center C1 (FIG. 5), so the load on the pulse disk 7 is wide. The copying operation can be realized even with the pulse disk 7 having a low rigidity dispersed in the range.

Further, since the flow rate of the pressurized air from the portion where the contact relationship between the intake / exhaust portion 3 and the pulse disk 7 is broken increases, the force acting in the scanning direction is applied to the pulse disk 7 and further copying force is increased. Reduction is possible. Thus, the slidability required for the slider mechanism 2 is relaxed, and an inexpensive contact-type slider mechanism 2 using a cross ball or the like can be used instead of an expensive one such as a static pressure air bearing.
Further, in the conventional copying mechanism using only the slider mechanism, a concentrated load is applied only to the contact point between the upper surface of the pulse disk 7 and the lower surface of the intake / exhaust part 3, and therefore the copying force is limited by the rigidity of the pulse disk 7, As a result, there is a problem that the upper limit of the copying accuracy exists, but this can be solved.

On the other hand, completion of the copying operation can also be detected by a change in the flow rate of the pressurized air. The conceptual diagram is shown in FIG. The horizontal axis is the operation history, and the vertical axis is the pressurized air flow rate.
Vacuuming is started from the intake / exhaust port 23 (position A), and the negative pressure air becomes a certain value. When the pulse disk 7 starts to be sucked, the vacuuming air flow rate decreases (position B), and when it is completely sucked, the vacuuming air flow rate becomes small (position C). Next, after detecting contact with the rotating shaft 10, the evacuation is stopped and the supply of pressurized air is started (position D). The gap generated between the pulse disc 7 and the intake / exhaust section 3 gradually increases, and the pressurized air flow rate also increases. When the copying operation is completed, the gap has a certain value, so that the air flow rate flowing out of the gap is also constant (position E).
From the above, the state in which there is almost no change in pressurized air is the timing when the copying operation is completed.
Here, it is needless to say that the hollow cross-sectional shape of the intake / exhaust part 3 is similar to any shape such as a circle or a rectangle.
However, the larger the cross section at a distance away from the center of the intake / exhaust portion 3, the greater the effect of pressurized air during the copying operation.

Next, the entire process including the application of the adhesive will be described again.
The pulse disk 7 in the pulse disk storage area is photographed using an image sensor such as a CCD camera (not shown), and the center position of the upper surface of the pulse disk 7 to be acquired by suction is detected two-dimensionally. Based on this detection position, the copying mechanism 1 is moved directly above by a robot (not shown).
Thereafter, evacuation is started from the intake / exhaust port 23, the copying mechanism 1 is lowered toward the pulse disc 7, and this is vacuum-adsorbed.
When the pulse disk 7 is vacuum-sucked, the image sensor is used again to detect the amount of displacement between the center of the intake / exhaust unit 3 and the center position of the adsorbed pulse disk 7, and this displacement is stored in two dimensions. To do.
On the other hand, the center position of the upper surface 11 of the axis of the fixed rotating shaft 10 is also detected by the image sensor, and the position is stored as a two-dimensional coordinate axis.

Next, the adhesive is applied to the upper surface 11 of the rotary shaft 10 by a coating device (not shown).
The copying mechanism 1 is moved above the rotating shaft 10 and to a position where the center of the pulse disk 7 and the center of the upper surface 11 of the rotating shaft 10 coincide two-dimensionally from the stored displacement amount (FIG. 1). (A)).
After the movement, the copying operation is started by lowering the robot. This operation is performed according to the procedure described above, and the completion of the copying operation is detected, and the pressurized air is continuously supplied until the adhesive is effective.
Here, for example, if an ultraviolet curable adhesive is used, it can be fixed while maintaining its posture by irradiating with ultraviolet rays for a certain period while maintaining the pressed state. FIG. 7 shows the final assembly state.

Now, in the copying operation, the pulse disk 7 rotates about the contact point C1 with the rotating shaft 10, so that the center position of the rotating shaft 10 and the pulse disk 7 that are initially aligned is completely in the state where they are actually bonded. Deviation occurs without matching.
However, since the actual inclination of the rotary shaft 10 is very small, the amount of positional deviation is also a sufficiently small value, and there is no problem. A specific deviation amount W is calculated using FIG.
FIG. 8A shows a contact state immediately before the copying operation, and FIG. 8B shows a state after completion of the copying operation. Further, FIG. 8C is a partial enlarged view of FIG. 8A and FIG. From this triangle, when the length from C1 to the center of the pulse disk 7 is a, the error W during assembly is
W = a / cos θ−a = a (1 / cos θ−1)
It becomes. Here, since actual θ is a minute angle, W is also a minute value.
For example, when a = 5 mm and θ = 1.5 deg, W = 1.7 μm.

  The relative deviation angle between the pulse disk 7 and the rotating shaft 10 is detected by a displacement sensor or the like before the copying operation, and an estimated deviation amount W using the above relational expression is calculated from the detected deviation angle to determine the position of the robot (not shown). Needless to say, it is possible to reduce the amount of deviation of the center position that occurs after the copying operation by correcting this in a two-dimensional horizontal plane.

  Although the case where the copying mechanism 1 that holds the pulse disk 7 is operated by a robot (not shown) or the like has been described here, the same effect can be obtained by moving the rotating shaft 10 side by a robot or the like.

As described above, according to the present invention, after the pulse disk 7 is pressed against the rotating shaft 10 from the suction state, the copying operation is realized by the pressurized air from the intake / exhaust section 3, so the structure is simple and the copying is performed. The mechanism 1 can be easily downsized.
Moreover, since it can be applied to a small copying object and can be constituted by only the slider mechanism 2 and the intake / exhaust portion 3, an inexpensive copying mechanism 1 can be provided.
Further, since the copying force is the sum of the distributed pressures applied to the hollow cross section of the intake / exhaust section 3 by the pressurized air, the internal stress generated in the pulse disk 7 can be reduced, and the object is smaller and less rigid. Application to things is also possible.
Further, if the contact relationship between the intake / exhaust portion 3 and the pulse disk 7 is broken, the flow rate of pressurized air from the gap increases, so that a force in the scanning direction is applied to the pulse disk 7, The copying load can be reduced.
Further, during the copying operation, the intake / exhaust portion 3 and the pulse disk 7 are in contact with each other, but the contact point does not shift, so that the sliding resistance to be generated in the slider mechanism 2 is not affected by the frictional force. Since it can be eliminated by passing, it is possible to provide a highly accurate copying mechanism at low cost without using an expensive aerostatic bearing or the like.

Embodiment 2. FIG.
FIG. 9 is a view showing a section of the copying mechanism 101 according to the second embodiment of the present invention. Here, as in the first embodiment, only the copying mechanism 101 is shown.
The copying mechanism 101 according to the second embodiment is different from the copying mechanism 1 according to the first embodiment only in the internal structure of the intake / exhaust section 3.
Therefore, the same parts as those in Embodiment 1 are used as they are.

A stopper 31 is installed inside the intake / exhaust portion 3 to support the lower surface of the compression spring 32 and limit its lower position. The upper surface of the compression spring 32 is in contact with the upper guide portion 34 of the pressing member 33, and the lower position of the pressing member 33 is limited by the elastic force of the compression spring 32.
A spherical bearing 33a is installed at the lower end of the pushing member 33, and smooth rotation is possible due to very low rolling friction. Further, the guide portion 34 of the push-in member 33 has a predetermined length in the vertical direction, and is also provided inside the intake / exhaust portion 3 so as to be slidable in the vertical direction with a predetermined gap.

When the compressed air is not supplied to the intake / exhaust port 23 or the vacuum is not evacuated, the pushing member 33 is in a position where the reaction force of the compression spring 32 balances with its own weight including the spherical bearing 33a at the tip. In a stationary state. At this time, the initial position of the tip of the spherical bearing 33a is above or below the lower surface of the intake / exhaust section 3.
In addition, the stopper 31 may be separately provided above and may be brought into contact with the upper surface of the pushing member 33 to limit the upper position of the pushing member 33.

  When pressurized air is supplied to the intake / exhaust port 23, the pushing member 33 moves downward, and the tip of the spherical bearing 33a pops out from the lower surface of the intake / exhaust part 3 as shown in FIG. Further, the moving speed of the pushing member 33 and the force generated by the pushing member 33 downward can be freely adjusted by the supply amount and supply pressure of the pressurized air and the spring constant of the compression spring 32. Furthermore, it is also possible to provide a through hole in the guide part 34 of the pushing member 33 in the vertical direction and adjust the area for receiving pressurized air.

Next, the copying operation of the copying mechanism 101 will be described.
Since operations other than the copying operation are the same as those in the first embodiment, a description thereof will be omitted, and only the copying operation will be described.
When evacuation is performed from the intake / exhaust port 23, it is possible to evacuate from the tip of the intake / exhaust unit 3 through the gap between the pushing member 33 and the intake / exhaust unit 3 or the through hole provided in the guide unit 34, It becomes possible to suck and fix the pulse disk 7 that is not shown in the figure. That is, the same state as in FIG. 1A in the first embodiment is obtained.
Next, the pressing operation to the rotating shaft 10 is performed, which is also the same as in the embodiment of FIG. 1B, and the contact state between the suction-fixed pulse disk 7 and the rotating shaft 10 is similarly detected. . Thereafter, the copying operation further proceeds, but from here on, the operation is different from that of the first embodiment.

When the contact state between the pulse disk 7 and the rotary shaft 10 is detected, the suction / exhaust port 23 is evacuated and pressurized air is supplied. By this pressurized air, a copying moment is generated in the pulse disk 7 facing the inside of the intake / exhaust portion 3. Further, the pushing member 33 starts to move downward due to the pressure of the pressurized air, and finally, the spherical bearing 33a at the tip part comes into contact with the pulse disk 7 to promote the copying operation (FIG. 11).
Here, the rotation center of the pulse disk 7 during the copying operation is the initial contact point C1, which is different from the spherical bearing 33a that is the contact point with the pushing member 33. Therefore, the spherical bearing 33a and the pulse disk 7 The contact position shifts as the copying operation proceeds.
However, because of the low coefficient of friction using rolling, the moment for suppressing the copying operation caused by friction is reduced, and a smooth copying operation can be realized.

In the second embodiment, unlike in the first embodiment, a concentrated load is applied to the contact point with the spherical bearing 33a. The concentrated load is determined by the spring constant of the compression spring 32, the pressure of the pressurized air, and the push-in. It can be adjusted by the pressure receiving area of the member 33 or the like. Accordingly, since the load can be adjusted to be equal to or less than the internally generated stress allowable in the pulse disc 7, the pulse disc 7 is not destroyed.
Completion of the copying operation is detected by a change in the descending amount of the pushing member 33 by a position sensor (not shown).

The relationship between the position of the copying mechanism 101 that can be grasped by the position sensor and the state of the copying operation will be described with reference to FIG. The horizontal axis represents the step of the copying operation, and the vertical axis represents the movement amount of the copying mechanism 101.
When the copying operation is started, the tip of the pushing member 33 descends toward the pulse disk 7 (position from A to B), and finally comes into contact with the pulse disk 7 (position B). The lowering of the pushing member 33 continues until the copying operation is completed (C position).
For this reason, the history change of the data output from the position sensor is “constant-increase-constant”. Accordingly, if the movement amount of the pushing member 33 becomes a constant value after the increase, it can be known that the copying operation is completed.
Although detection by a force sensor is possible, the pulse disk 7 receives a force by pressurized air in addition to the pressing of the pushing member 33, so that a threshold value that takes into account the state of the pressurized air (pressure, flow rate, etc.) Therefore, detection by the position sensor is preferable.

Although the compression spring 32 is illustrated here as a configuration for generating an elastic force, a leaf spring or a shape memory alloy capable of generating an elastic force may be used, or a repulsive force such as a magnetic force of a permanent magnet or an electromagnet. Alternatively, the same effect can be obtained by using a suction force.
Further, although the spherical bearing 33a is illustrated as a configuration having a small contact friction coefficient, it is only necessary to realize a small friction coefficient, and therefore, the tip portion may be made of a material having a small friction coefficient.
Furthermore, although it is comprised by one front-end | tip part here on the center axis | shaft of the pushing member 33, the structure which has several front-end | tip parts may be sufficient.

According to the second embodiment of the present invention, after the pulse disk 7 is pressed against the rotating shaft 10 from the suction state, the pressurized air from the intake / exhaust unit 3 and the pushing member 33 installed inside the intake / exhaust unit 3 are mainly used. In order to realize the copying operation, the copying mechanism 101 can be made compact and can be applied to a small object, and the configuration of only the slider mechanism 2 and the intake / exhaust unit 3 enables more accurate copying mechanism 101. Can be realized.
Further, in the copying operation, the pulse disk 7 is pressed by the pressing member 3 in addition to the pressurized air, so that a more reliable copying operation can be realized.
Further, the pulse disk 7 and the pushing member 33 are in contact with each other during the copying operation. However, since the frictional resistance can be reduced by installing the spherical bearing 33a at the tip of the pushing member 33, the slider mechanism 2 is required. Performance can be relaxed. Thereby, an inexpensive contact-type slider mechanism 2 can be used, and the copying mechanism 101 can be configured at a low cost as a whole.
Furthermore, by constantly monitoring the movement amount of the pushing member 33, it is possible to grasp whether or not the copying mechanism 101 is operating normally, and the copying mechanism 101 with high reliability can be provided.

  In the second embodiment, the copying mechanism 101 including the spherical bearing 33a has been described as an extension of the first embodiment. However, even if the slider mechanism 2 is omitted, it is not affected by the friction at the contact point. The function as a copying mechanism can be exhibited.

1,101 copying mechanism, 2 slider mechanism, 21 sliding part, 22 sliding holding part,
221 sliding holding top plate, 222 sliding holding flange, 2a sliding surface, 2b seal part,
23 intake / exhaust port, 3 intake / exhaust section, 31 stopper, 32 compression spring,
33 pushing member, 33a spherical bearing, 34 guide part, 7 pulse disc,
10 rotation axis, 11 top surface.

Claims (3)

A slider mechanism having a sliding holding portion and a sliding portion that can slide two-dimensionally along the sliding holding portion;
A hollow intake / exhaust portion protruding perpendicularly to the sliding direction from the sliding portion;
In a copying mechanism having an intake / exhaust port for sucking air from the intake / exhaust part or exhausting air to the intake / exhaust part,
The object to be copied adsorbed on the intake / exhaust part is pressed against the fixed object to be copied,
By controlling the air flow rate of the intake / exhaust port so that the contact between the copying object and the copying reference object, and the intake / exhaust portion and the contact of the copying object do not slide together, the copying object is copied. A copying mechanism characterized by copying a reference object. 2. The copying mechanism according to claim 1, wherein air is discharged from the intake / exhaust portion after the copying reference object and the copying object contact. 3. The spherical intake bearing according to claim 1, further comprising a spherical ball bearing that protrudes by receiving pressure of exhaust air from the intake / exhaust portion and supports the object to be copied. Copy mechanism.

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