JP2010266685A5

JP2010266685A5 -

Info

Publication number: JP2010266685A5
Application number: JP2009117891A
Authority: JP
Filing date: 2009-05-14
Publication date: 2012-04-05
Anticipated expiration: 2029-05-14

Description

特開平７−２７５７７０号公報JP-A-7-275770 特許第３７０１８８２号公報Japanese Patent No. 3701882

上記目的を達成するために、本発明の第１の手段は、ペーストが充填されたペースト収納筒とペースト収納筒からのペーストを吐出するノズル吐出口とを備えた１または複数の塗布ヘッドが移動可能に設けられたガントリが架台上に設置され、架台上に設置された基板載置テーブルに搭載された基板に対してガントリが移動し、ノズル吐出口から基板上にペーストを吐出させるペースト塗布装置において、基板載置テーブルは、複数の吸着孔が設けられた複数の第１の部材と複数の第２の部材とが直交して組み合わされて井桁状をなす構造のテーブルであって、基板載置テーブルの中心部では回転部材で支持し、基板載置テーブルの中心部以外の第１，第２の部材の直交位置では回転部材と直交軸受とを組み合わせた複数の移動部材で支持して回動させながらＸＹ移動することにより、基板載置テーブルを移動及び回転させて、基板載置テーブルに載置された基板の位置，姿勢を調整する複数のＸＹθ軸移動機構を備えたことを特徴とする。 In order to achieve the above object, the first means of the present invention is that one or a plurality of application heads including a paste storage cylinder filled with a paste and a nozzle discharge port for discharging the paste from the paste storage cylinder are moved. A paste coating apparatus in which a gantry provided on a gantry is installed on a gantry and the gantry moves relative to the substrate mounted on a substrate mounting table installed on the gantry, and the paste is ejected from the nozzle ejection port onto the substrate. smell Te, the substrate mounting table, a structure which forms a plurality of a plurality of suction holes are provided first member and a plurality of second members and are combined with orthogonal grid pattern table, the substrate At the center of the mounting table, it is supported by a rotating member, and at the orthogonal positions of the first and second members other than the center of the substrate mounting table, it is supported by a plurality of moving members that combine the rotating member and orthogonal bearings. Characterized by XY movement while rotating, the substrate mounting table is moved and rotated, the position of the substrate placed on the substrate mounting table, further comprising a plurality of XYθ axis moving mechanism for adjusting the attitude It shall be the.

上記目的を達成するために、本発明の第２の手段は、ペーストが充填されたペースト収納筒とペースト収納筒からのペーストを吐出するノズル吐出口とを備えた１または複数の塗布ヘッドが移動可能に設けられたガントリが架台上に設置され、架台上に設置された基板載置テーブルに搭載された基板に対してガントリが移動し、ノズル吐出口から基板上にペーストを吐出させるペースト塗布装置において、基板載置テーブルの中心にθ軸方向の回転方向の位置決めのためのクロスローラ軸受からなるθ軸移動機構を設け、基板載置テーブルは、複数の第１の部材と複数の第２の部材とが直交して組み合わされて井桁状をなす構造のテーブルであって、第１，第２の部材が直交する位置に、基板載置テーブルのＸ，Ｙ軸方向の位置決めのための直交軸受とθ方向の回転方向位置決めのためのクロスローラ軸受とからなる複数のＸＹθ軸移動機構を設けたことを特徴とする。 In order to achieve the above object, the second means of the present invention is that one or a plurality of application heads including a paste storage cylinder filled with paste and a nozzle discharge port for discharging the paste from the paste storage cylinder are moved. A paste coating apparatus in which a gantry provided on a gantry is installed on a gantry and the gantry moves relative to the substrate mounted on a substrate mounting table installed on the gantry, and the paste is ejected from the nozzle ejection port onto the substrate. odor Te, the θ-axis moving mechanism consisting of cross roller bearing for positioning the rotating direction of the θ-axis direction in the center of the substrate placement table provided in the substrate mounting table, the plurality of first members and a plurality second The table has a structure in which the members are orthogonally combined to form a cross girder, and the first and second members are directly positioned for the positioning of the substrate mounting table in the X- and Y-axis directions at the positions orthogonal to each other. You characterized in that a plurality of XYθ axis moving mechanism consisting of a cross roller bearing for the exchange bearing and θ-rotation direction positioning.

本発明の第３の手段は、第２の手段において、ガントリと架台側に設置されてガントリを移動させる機構を支持する部分とを、基板載置テーブルの外側で分離できる構成としたことを特徴とする。 The third means of the present invention is characterized in that, in the second means, the gantry and the portion installed on the gantry side and supporting the mechanism for moving the gantry can be separated outside the substrate mounting table. It shall be the.

本発明の第４の手段は、第２の手段又は第３の手段において、基板が載置された基板載置テーブルを、ガントリに設けられた１または複数の塗布ヘッドによるペーストの塗布可能範囲の外側に移動させる手段を備えたことを特徴とする。 According to a fourth means of the present invention, in the second means or the third means, the substrate placement table on which the substrate is placed is disposed within a range where the paste can be applied by one or more application heads provided in the gantry. it comprising the means for moving outward.

上記目的を達成するために、本発明の第５の手段は、ペーストが充填されたペースト収納筒とペースト収納筒からのペーストを吐出するノズル吐出口とを備えた１または複数の塗布ヘッドが移動可能に設けられたガントリが架台上に設置され、架台上に設置された基板載置テーブルに搭載された基板に対してガントリが移動し、ノズル吐出口から基板上にペーストを吐出させるペースト塗布方法において、基板載置テーブルは、複数の第１の部材と複数の第２の部材とが直交して組み合わされて井桁状をなす構造のテーブルであって、基板載置テーブルの中心部にθ軸方向の回転方向の位置決めのためのクロスローラ軸受からなるθ軸移動機構を備えるとともに、基板載置テーブルの中心部以外の位置に直交軸受とクロスローラ軸受とからなる複数のＸＹθ軸移動機構を備え、基板載置テーブルの中心部まわりの回転位置決めの際に中心部以外では、第１，第２の部材が直交する位置に設けられた直交軸受によって基板載置テーブルをＸ，Ｙ軸方向に位置決めし、第１，第２の部材が直交する位置に設けられたクロスローラ軸受によって基板載置テーブルをθ軸方向の回転方向に位置決めすることを特徴とする。 In order to achieve the above object, the fifth means of the present invention is to move one or a plurality of application heads including a paste storage cylinder filled with paste and a nozzle discharge port for discharging the paste from the paste storage cylinder. A paste application method in which a gantry provided on a gantry is installed on a gantry, the gantry moves relative to a substrate mounted on a substrate mounting table installed on the gantry, and the paste is ejected from the nozzle ejection port onto the substrate. smell Te, the substrate mounting table, a structure forming a plurality of first members and a plurality of second members and are combined with orthogonal grid pattern table, theta in the center of the substrate mount table It is equipped with a θ-axis moving mechanism consisting of a cross roller bearing for positioning in the axial direction of rotation, and is composed of an orthogonal bearing and a cross roller bearing at a position other than the center of the substrate mounting table. The substrate mounting table includes a plurality of XYθ-axis moving mechanisms, and is orthogonally provided by orthogonal bearings provided at positions where the first and second members are orthogonal to each other at the position other than the central portion when rotating around the central portion of the substrate mounting table. the X, positioned in the Y-axis direction, first, characterized in that the second member to position the substrate placement table by a cross roller bearing provided in a position perpendicular to the direction of rotation of the θ-axis direction.

本発明の第６の手段は、第５の手段において、ガントリと架台側に設置されてガントリを移動させる機構を支持する部分とを分離可能としたことを特徴とする。 Sixth means of the present invention, in the fifth means, characterized in that the separable and a portion for supporting a mechanism for moving the gantry is installed on the gantry and gantry side.

本発明の第７の手段は、第５の手段又は第６の手段において、基板が載置された基板載置テーブルを、ガントリに設けられた塗布ヘッドによるペーストの塗布可能範囲の外側に移動可能としたことを特徴とする。 According to a seventh means of the present invention, in the fifth means or the sixth means, the substrate placing table on which the substrate is placed can be moved outside the range where the paste can be applied by the coating head provided in the gantry. it said that the content was.

本発明によるペースト塗布装置及び方法の第１の実施形態を示す斜視図である。1 is a perspective view showing a first embodiment of a paste coating apparatus and method according to the present invention. 図１における塗布ヘッド部の一具体例を示す斜視図である。It is a perspective view which shows one specific example of the application | coating head part in FIG. 図１に示す第１の実施形態での主制御系統の一具体例を示すブロック図である。FIG. 2 is a block diagram showing a specific example of a main control system in the first embodiment shown in FIG. 1. 図１に示す第１の実施形態での副制御系統の一具体例を示すブロック図である。FIG. 2 is a block diagram showing a specific example of a sub control system in the first embodiment shown in FIG. 1. 図１に示す第１の実施形態の全体動作の一具体例を示すフローチャートである。2 is a flowchart showing a specific example of the overall operation of the first exemplary embodiment shown in FIG. 図１に示すペースト塗布装置のガントリを架台から取り外した状態の一具体例を示す斜視図である。It is a perspective view showing a specific example of a state of removing the gantry paste coater from rack stand shown in FIG. 図１に示すペースト塗布装置のガントリを架台から取り外した状態の他の具体例を示す斜視図である。It is a perspective view showing another specific example of the state of detaching the gantry paste coater from rack stand shown in FIG. 図１における基板保持機構の一具体例の一部を拡大して示す斜視図である。It is a perspective view which expands and shows a part of one specific example of the board | substrate holding mechanism in FIG. 図７における吸着プレートの一具体例を示す図である。It is a figure which shows one specific example of the suction plate in FIG. 図８に示す吸着プレートの分断線Ａ−Ａに沿う横断面図である。It is a cross-sectional view along the parting line AA of the suction plate shown in FIG.

ガントリ２ｂの横梁３ｂは架台１のＹ軸方向の幅よりも長く、このため、横梁３ｂの両端部は架台１のＸ軸に平行な両側の側面、即ち、架台側面１ａ，１ｂから突出しており、このため、この横梁３ｂの両端部の下面に設けられている横梁側支持部材４ａ，４ｂも夫々、架台１のかかる両側の架台側面１ａ，１ｂから突出している。これにより、ガントリ２ｂは、横梁３ｂが基板保持機構８を横梁側支持部材４ａ，４ｂと架台側支持部材５ａ，５ｂとで抱え込んでいるような形状をなしている。 The lateral beam 3b of the gantry 2b is longer than the width of the gantry 1 in the Y-axis direction. For this reason, both ends of the lateral beam 3b protrude from the side surfaces parallel to the X axis of the gantry 1, that is, the gantry side surfaces 1a and 1b. , Therefore, the transverse beam supporting member 4a which is provided on the lower surface of both ends of the cross beams 3b, 4b also respectively opposite sides of the frame sides 1a consuming gantry 1, and protrudes from 1b. Thus, the gantry 2b has a shape in which the cross beam 3b holds the substrate holding mechanism 8 between the cross beam side support members 4a and 4b and the gantry side support members 5a and 5b.

夫々の塗布ヘッド部１０の架台には、その裏面側（ヘッド設置面９側）に、上記のように、Ｙ軸方向移動機構１１のリニアモータが設けられ、その表面側にＺ軸サーボモータ１２を有するＺ軸移動テ−ブル支持ブラケット１３が設けられており、このＺ軸サーボモータ１２により、塗布ヘッド部１０を上下に移動させるＺ軸移動テーブル１４が設けられている。このＺ軸移動テーブル１４に、後述するように、ペースト収納筒（シリンジ）やノズルが設けられたノズル支持具，距離計，照明光源を備えた鏡筒と画像認識カメラなどが取り付けている。 The rack stand of the coating head portion 10 of each, on the back surface side (head installation surface 9 side), as described above, the linear motor is provided in the Y-axis direction moving mechanism 11, Z-axis servo motor on the front side A Z-axis moving table support bracket 13 having 12 is provided, and a Z-axis moving table 14 for moving the coating head unit 10 up and down by the Z-axis servo motor 12 is provided. As will be described later, a paste storage cylinder (syringe), a nozzle support provided with a nozzle, a distance meter, a lens barrel equipped with an illumination light source, an image recognition camera, and the like are attached to the Z-axis moving table 14.

図２は図１における塗布ヘッド部１０の一具体例の要部を拡大して示す斜視図であって、１６はノズル支持具、１７はペースト収納筒、１８はノズル、１９は距離計である。 FIG. 2 is an enlarged perspective view showing an essential part of one specific example of the coating head unit 10 in FIG. 1, wherein 16 is a nozzle support, 17 is a paste storage cylinder, 18 is a nozzle, and 19 is a distance meter. .

また、基板保持機構８のＸ，Ｙ軸方向の位置の微調整は、ガントリ２ａ，２ｂのＸ軸方向の位置の微調整やこれらガントリ２ａ，２ｂでの塗布ヘッド部１０のＹ軸方向の位置の微調整によって行われる。 Further, the fine adjustment of the position of the substrate holding mechanism 8 in the X and Y axis directions is performed by fine adjustment of the position of the gantry 2a, 2b in the X axis direction or the position of the coating head portion 10 in the gantry 2a, 2b in the Y axis direction. This is done by fine-tuning.

Claims

A gantry having a paste storage cylinder filled with paste and a nozzle discharge port for discharging the paste from the paste storage cylinder, in which one or a plurality of application heads are movably provided, is installed on the mount, In the paste application apparatus in which the gantry moves relative to the substrate mounted on the substrate mounting table installed in the substrate, and the paste is discharged onto the substrate from the nozzle discharge port.
The substrate mounting table is a table having a structure in which a plurality of first members provided with a plurality of suction holes and a plurality of second members are combined orthogonally to form a cross-beam shape,
A plurality of combinations of rotating members and orthogonal bearings are supported at the central portion of the substrate mounting table by a rotating member, and at the orthogonal positions of the first and second members other than the central portion of the substrate mounting table. A plurality of XYθ for adjusting the position and posture of the substrate placed on the substrate placement table by moving and rotating the substrate placement table by XY movement while being supported and rotated by the moving member A paste coating apparatus comprising an axis moving mechanism.

A gantry having a paste storage cylinder filled with paste and a nozzle discharge port for discharging the paste from the paste storage cylinder, in which one or a plurality of application heads are movably provided, is installed on the mount, In the paste application apparatus in which the gantry moves relative to the substrate mounted on the substrate mounting table installed in the substrate, and the paste is discharged onto the substrate from the nozzle discharge port.
A θ-axis moving mechanism comprising a cross roller bearing for positioning in the rotation direction of the θ-axis direction is provided at the center of the substrate mounting table,
The substrate mounting table is a table having a structure in which a plurality of first members and a plurality of second members are orthogonally combined to form a cross-beam shape,
A plurality of orthogonal bearings for positioning the substrate mounting table in the X and Y axis directions and cross roller bearings for positioning in the rotational direction in the θ direction at positions where the first and second members are orthogonal to each other. A paste coating apparatus provided with an XYθ axis moving mechanism.

In the paste application apparatus according to claim 2,
A paste coating apparatus characterized in that the gantry and a portion installed on the gantry side and supporting a mechanism for moving the gantry can be separated outside the substrate mounting table.

In the paste application apparatus according to claim 2 or 3,
A paste coating apparatus comprising: means for moving the substrate mounting table on which a substrate is mounted to an outside of a paste application range by one or a plurality of application heads provided in the gantry.

A gantry having a paste storage cylinder filled with paste and a nozzle discharge port for discharging the paste from the paste storage cylinder, in which one or a plurality of application heads are movably provided, is installed on the mount, In the paste application method in which the gantry moves with respect to the substrate mounted on the substrate mounting table installed on the substrate, and the paste is discharged onto the substrate from the nozzle discharge port.
The substrate mounting table is a table having a structure in which a plurality of first members and a plurality of second members are orthogonally combined to form a cross-beam shape,
A θ-axis moving mechanism comprising a cross-roller bearing for positioning in the rotational direction in the θ-axis direction is provided at the center of the substrate mounting table, and the orthogonal bearing and the cross roller are provided at positions other than the center of the substrate mounting table. A plurality of XYθ axis moving mechanisms comprising bearings are provided,
When rotating around the central portion of the substrate mounting table, the substrate mounting table is X, Y by the orthogonal bearing provided at a position where the first and second members are orthogonal to each other outside the central portion . A paste coating method characterized by positioning in the axial direction and positioning the substrate mounting table in the rotational direction in the θ-axis direction by the cross roller bearing provided at a position where the first and second members are orthogonal to each other .

In the paste application method according to claim 5,
A paste application method characterized in that the gantry and a portion that is installed on the gantry side and supports a mechanism for moving the gantry can be separated.

In the paste application method according to claim 5 or 6,
A paste coating method characterized in that the substrate mounting table on which the substrate is mounted can be moved outside a range in which paste can be applied by the coating head provided in the gantry.