JP2010262141A - Exposure device, and method of adjusting lamp position of exposure device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To quickly and accurately adjust the position of a lamp. <P>SOLUTION: An exposure device includes: a clamp 70 which fixes the lamp 31; an adjustment mechanism which adjusts the position of the lamp 31 by moving the clamp 70; a position adjustment device having motors 55, 66 driving the adjustment mechanism; and a display device (arc monitor 45) which displays an image of a cathode 32a of the lamp 31 and a target position. The exposure device acquires the image of the cathode 31a of the lamp 31 and an image of the target position displayed on the display device (arc monitor 45), processes the image of the cathode 31a of the lamp 31 and an image signal of the target position to detect the shift quantity of the cathode 31a of the lamp 31 from the target position, and matches the center of the lamp 31 to the focus of a light collecting mirror 32 by controlling the motors 55, 66 of the position adjustment device based on the detection result. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an exposure apparatus that performs exposure of a substrate and a lamp position adjustment method of the exposure apparatus in the manufacture of a display panel substrate such as a liquid crystal display device, and more particularly, a light condensing that condenses light generated from the lamp and the lamp. The present invention relates to an exposure apparatus that includes a mirror and exposes a substrate with light condensed by a condenser mirror, and a lamp position adjustment method for the exposure apparatus.

  Manufacturing of TFT (Thin Film Transistor) substrates, color filter substrates, plasma display panel substrates, organic EL (Electroluminescence) display panel substrates, and the like of liquid crystal display devices used as display panels is performed using photolithography using an exposure apparatus. This is performed by forming a pattern on the substrate by a technique. The exposure apparatus transfers a mask pattern onto a substrate by irradiating the substrate coated with a photosensitive resin material (photoresist) with exposure light through the mask.

  As a light source for generating exposure light of an exposure apparatus, a lamp in which a high-pressure gas is enclosed in a bulb, such as a mercury lamp, a halogen lamp, or a xenon lamp, is used. A condensing mirror that condenses the light generated from the lamp is provided around the lamp. The lamp has a short life and must be replaced after a predetermined usage time. For example, if the lamp has a lifetime of 750 hours and it is lit continuously, it needs to be replaced about once a month. As a technique related to replacement of a light source lamp for an exposure apparatus, for example, there is one described in Patent Document 1.

JP 2007-64993 A

  Since there are manufacturing variations in the dimensions of the lamp, it is necessary to adjust the position of the lamp so that the center of the lamp is in focus with the condenser mirror after the lamp is replaced. Conventionally, a moving mechanism is provided in a clamp for fixing a lamp, and an operator moves the moving mechanism by hand to adjust the position of the lamp. For this reason, it takes time to adjust the position of the lamp, and during that time, the exposure process cannot be performed, resulting in a problem that productivity is lowered. In addition, it is necessary to adjust the position of the lamp in a state where the illuminance of the lamp is stable. It takes about one hour in the case of a mercury lamp until the illuminance of the lamp is stabilized after the lamp is turned on. Therefore, for the operator, the replacement of the lamp and the adjustment of the position of the lamp have been troublesome operations with a long time.

  In recent years, as the size of the substrate is increased with the increase in the screen size of the display panel, a light source with higher illuminance has been required for the exposure light source. For this reason, a light source that uses a plurality of lamps as a light source that generates exposure light has been developed, and the time and labor required for adjusting the position of the lamps have been increased.

  An object of the present invention is to accurately adjust the position of a lamp in a short time.

  The exposure apparatus of the present invention is an exposure apparatus that includes a lamp and a condensing mirror that condenses the light generated from the lamp, and that exposes the substrate with the light collected by the condensing mirror, the clamp fixing the lamp An adjustment mechanism for adjusting the position of the lamp by moving the clamp, a position adjustment device having a motor for driving the adjustment mechanism, a display device for displaying an image of the cathode of the lamp and a target position, and a display device. The image of the cathode of the lamp and the image of the target position are acquired and an image acquisition device for outputting the image signal, and the image signal output from the image acquisition device is processed to obtain a deviation amount from the target position of the lamp cathode And a control device that controls the motor of the position adjustment device based on the detection result of the image processing device and adjusts the center of the lamp to the focus of the condenser mirror.

  Further, the lamp position adjusting method of the exposure apparatus of the present invention comprises a lamp and a condensing mirror that condenses the light generated from the lamp, and the lamp of the exposure apparatus that exposes the substrate with the light condensed by the condensing mirror A position adjustment method comprising: a clamp for fixing a lamp; an adjustment mechanism for adjusting the position of the lamp by moving the clamp; and a position adjustment device having a motor for driving the adjustment mechanism; an image of the cathode of the lamp and a target position A display device that displays a lamp cathode image and a target position image displayed on the display device, and processes the lamp cathode image and the target position image signal to obtain a lamp cathode target. The amount of deviation from the position is detected, and based on the detection result, the motor of the position adjusting device is controlled to adjust the center of the lamp to the focus of the condenser mirror.

  Provided with a display device that displays the image of the cathode of the lamp and the target position, acquires the image of the cathode of the lamp and the image of the target position displayed on the display device, and processes the image of the cathode of the lamp and the image signal of the target position Thus, since the deviation amount of the lamp cathode from the target position is detected, the deviation amount of the lamp cathode from the target position is detected with high accuracy. Then, a clamp for fixing the lamp, an adjustment mechanism for adjusting the position of the lamp by moving the clamp, and a position adjustment device having a motor for driving the adjustment mechanism are provided, and an amount of deviation from the target position of the cathode of the lamp is provided. Based on the detection result, the motor of the position adjusting device is controlled to adjust the center of the lamp to the focal point of the condenser mirror, so that the position adjustment of the lamp can be accurately performed in a short time.

  Furthermore, the exposure apparatus of the present invention includes a plurality of lamps and condenser mirrors, and includes a clamp, a position adjustment device, and a display device for each lamp. Further, the lamp position adjusting method of the exposure apparatus according to the present invention is provided with a clamp, a position adjusting device, and a display device for each lamp for a plurality of lamps and a condenser mirror, and a cathode of each lamp displayed on each display device. The image of the lamp and the image of the target position are acquired, the image of the cathode of each lamp and the image signal of the target position are processed, and the amount of deviation from the target position of the cathode of each lamp is detected. The center of each lamp is adjusted to the focus of each condenser mirror by controlling the motor of the adjusting device. Even when a plurality of lamps are used as the light source of the exposure light, the position of each lamp is adjusted accurately in a short time.

  According to the present invention, a clamp that fixes a lamp, an adjustment mechanism that moves the clamp to adjust the position of the lamp, a position adjustment device that has a motor that drives the adjustment mechanism, an image of the cathode of the lamp, and a target position are obtained. A display device for display, and an image of a cathode of the lamp and an image of a target position displayed on the display device are acquired, and an image signal of the cathode of the lamp and an image signal of the target position are processed to obtain a target position of the cathode of the lamp The position of the lamp can be adjusted accurately in a short time by detecting the amount of deviation from the lens and controlling the motor of the position adjustment device based on the detection result so that the center of the lamp is in focus with the focus of the condenser mirror. it can.

  Furthermore, with respect to a plurality of lamps and condenser mirrors, a clamp, a position adjustment device, and a display device are provided for each lamp, and an image of a cathode of each lamp and an image of a target position displayed on each display device are obtained. The image of the cathode of the lamp and the image signal of the target position are processed, the amount of deviation from the target position of the cathode of each lamp is detected, the motor of each position adjusting device is controlled based on the detection result, and each lamp By adjusting the center to the focus of each condenser mirror, the position of each lamp can be adjusted with high accuracy in a short time even when a plurality of lamps are used as the exposure light source.

1 is a diagram showing a schematic configuration of an exposure apparatus according to an embodiment of the present invention. It is a top view of the lamp | ramp and condensing mirror of the exposure apparatus by one Embodiment of this invention. It is a figure which shows an arc monitor. It is a top view which shows an example of arrangement | positioning of an arc monitor. It is a figure explaining operation | movement of an arc monitor. It is a side view of a lamp | ramp and a condensing mirror. It is a front view of a lamp | ramp and a condensing mirror. It is a rear view of a lamp | ramp and a condensing mirror. It is a top view of a position adjusting device. It is an enlarged view of a position adjustment apparatus. It is a rear view of a Z direction adjustment mechanism. It is a top view of an XY direction adjustment mechanism. It is a block diagram of the control system of a position adjusting device. It is a flowchart which shows operation | movement of a light source control apparatus. It is a top view of the lamp | ramp and condensing mirror of the exposure apparatus by other embodiment of this invention. It is a top view which shows an example of arrangement | positioning of an arc monitor.

  FIG. 1 is a view showing the schematic arrangement of an exposure apparatus according to an embodiment of the present invention. This embodiment shows an example of a proximity exposure apparatus that transfers a mask pattern to a substrate by providing a minute gap (proximity gap) between the mask and the substrate. The exposure apparatus includes a base 3, an X guide 4, an X stage 5, a Y guide 6, a Y stage 7, a θ stage 8, a chuck support base 9, a chuck 10, a mask holder 20, and an exposure light irradiation device 30. ing. In addition to these, the exposure apparatus includes a substrate transfer robot that loads the substrate 1 into the chuck 10 and unloads the substrate 1 from the chuck 10, a temperature control unit that performs temperature management in the apparatus, and the like.

  Note that the XY directions in the embodiments described below are examples, and the X direction and the Y direction may be interchanged.

  In FIG. 1, the chuck 10 is at an exposure position where the substrate 1 is exposed. A mask holder 20 for holding the mask 2 is installed above the exposure position. The mask holder 20 holds the periphery of the mask 2 by vacuum suction. An exposure light irradiation device 30 is disposed above the mask 2 held by the mask holder 20. At the time of exposure, exposure light from the exposure light irradiation device 30 passes through the mask 2 and is irradiated onto the substrate 1, whereby the pattern of the mask 2 is transferred to the surface of the substrate 1 and a pattern is formed on the substrate 1. .

  The chuck 10 is moved to the load / unload position away from the exposure position by the X stage 5 and the Y stage 7. At the load / unload position, the substrate 1 is carried into the chuck 10 and the substrate 1 is carried out of the chuck 10 by a substrate transfer robot (not shown). The loading of the substrate 1 onto the chuck 10 and the unloading of the substrate 1 from the chuck 10 are performed using a plurality of push-up pins provided on the chuck 10. The push-up pin is housed inside the chuck 10 and is lifted from the inside of the chuck 10 to receive the substrate 1 from the substrate transfer robot and unload the substrate 1 from the chuck 10 when loading the substrate 1 onto the chuck 10. In doing so, the substrate 1 is delivered to the substrate transfer robot.

  The chuck 10 is mounted on the θ stage 8 via the chuck support 9, and a Y stage 7 and an X stage 5 are provided below the θ stage 8. The X stage 5 is mounted on an X guide 4 provided on the base 3 and moves along the X guide 4 in the X direction (the horizontal direction in FIG. 1). The Y stage 7 is mounted on a Y guide 6 provided on the X stage 5 and moves along the Y guide 6 in the Y direction (the depth direction in FIG. 1). The θ stage 8 is mounted on the Y stage 7 and rotates in the θ direction. The chuck support 9 is mounted on the θ stage 8 and supports the chuck 10 at a plurality of locations.

  The chuck 10 is moved between the load / unload position and the exposure position by the movement of the X stage 5 in the X direction and the movement of the Y stage 7 in the Y direction. At the load / unload position, the substrate 1 mounted on the chuck 10 is pre-aligned by moving the X stage 5 in the X direction, moving the Y stage 7 in the Y direction, and rotating the θ stage 8 in the θ direction. Is done. At the exposure position, the X stage 5 is moved in the X direction and the Y stage 7 is moved in the Y direction, whereby the substrate 1 mounted on the chuck 10 is stepped in the XY direction. Then, the substrate 1 is aligned by the movement of the X stage 5 in the X direction, the movement of the Y stage 7 in the Y direction, and the rotation of the θ stage 8 in the θ direction. Further, the gap between the mask 2 and the substrate 1 is adjusted by moving and tilting the mask holder 20 in the Z direction (the vertical direction in FIG. 1) by a Z-tilt mechanism (not shown).

  In the present embodiment, the gap between the mask 2 and the substrate 1 is adjusted by moving and tilting the mask holder 20 in the Z direction. However, the chuck support base 9 is provided with a Z-tilt mechanism, The gap between the mask 2 and the substrate 1 may be adjusted by moving and tilting the chuck 10 in the Z direction.

  The exposure light irradiation device 30 includes a lamp 31, a condensing mirror 32, a first plane mirror 33, a lens group 34, a shutter 35, a collimation lens group 36, a second plane mirror 37, a power source 38, an illuminance sensor 39, and a light source control device 80. It is configured to include. As the lamp 31, a lamp in which high-pressure gas is sealed in a bulb, such as a mercury lamp, a halogen lamp, a xenon lamp, or the like is used. The lamp 31 is turned on when power is supplied from the power source 38 to generate exposure light.

  A condensing mirror 32 that condenses the light generated from the lamp 31 is provided around the lamp 31. The light generated from the lamp 31 is collected by the condenser mirror 32 and irradiated to the first plane mirror 33. The light reflected by the first plane mirror 33 enters a lens group 34 including a fly-eye lens or a lot lens, and is transmitted through the lens group 34 so that the illuminance distribution is made uniform. The shutter 35 is opened when the substrate 1 is exposed, and is closed when the substrate 1 is not exposed. When the shutter 35 is open, the light transmitted through the lens group 34 is transmitted through the collimation lens group 36 to become a parallel light beam, reflected by the second plane mirror 37, and irradiated onto the mask 2. The pattern of the mask 2 is transferred to the substrate 1 by the exposure light applied to the mask 2, and the substrate 1 is exposed. When the shutter 35 is closed, the light transmitted through the lens group 34 is blocked by the shutter 35 and the substrate 1 is not exposed.

  An illuminance sensor 39 is disposed in the vicinity of the back side of the second plane mirror 37. The second plane mirror 37 is provided with a small opening that allows a part of the exposure light to pass therethrough. The illuminance sensor 39 receives the light that has passed through the opening of the second plane mirror 37 under the control of the light source control device 80 and measures the illuminance of the exposure light. The measurement result of the illuminance sensor 39 is input to the light source control device 80.

  FIG. 2 is a top view of the lamp and the condenser mirror of the exposure apparatus according to the embodiment of the present invention. The condensing mirror 32 is an ellipsoidal reflecting mirror. The collector mirror 32 is provided with two transparent windows 32 b at the height of the cathode of the lamp 31. The two windows 32 b are arranged in a direction of 90 ° with respect to each other when viewed from the center of the lamp 31. Two arc monitors 45 are installed outside the condenser mirror 32.

  FIG. 3 is a diagram showing an arc monitor. The arc monitor 45 displays an image of the cathode 31a of the lamp 31 viewed through the window 32b of the condenser mirror 32. In the example shown in FIG. 3, an inverted image of the cathode 31a of the lamp 31 is displayed. On the display surface for displaying the image of the cathode 31a of the lamp 31 of the arc monitor 45, the target position of the tip of the cathode 31a of the lamp 31 is indicated by the intersection of the gauges 45a and 45b forming a cross. The arc monitor 45 is arranged so that the tip of the image of the cathode 31a of the lamp 31 comes to the intersection of the gauges 45a and 45b when the center of the lamp 31 is in focus with the focusing mirror 32, as shown in FIG. Yes.

  FIG. 4 is a top view showing an example of the arrangement of the arc monitor. FIG. 5 is a diagram for explaining the operation of the arc monitor. In FIG. 4, the condensing mirror 32 is shown with a broken line, and in FIG. 5, the cross section which passes along the window 32b of the condensing mirror 32 is shown. In FIG. 5, a mirror 41 is installed outside the window 32 b of the condenser mirror 32, and a mirror 42 is installed below the mirror 41. In FIG. 4, a lens 43 and a mirror 44 are installed further outside the mirror 42. 4 and 5, the light emitted from the cathode 31 a of the lamp 31 passes through the window 32 b of the condenser mirror 32, is reflected by the mirrors 41 and 42, and enters the lens 43. The light emitted from the lens 43 is reflected by the mirror 44 and forms an inverted image of the cathode 31 a of the lamp 31 on the display surface of the arc monitor 45.

  FIG. 6 is a side view of the lamp and the condenser mirror. FIG. 7 is a front view of the lamp and the condenser mirror. FIG. 8 is a rear view of the lamp and the condenser mirror. 6 to 8 show a cross section of the condenser mirror 32, and the mirrors 41, 42, 44, the lens 43, and the arc monitor 45 disposed outside the condenser mirror 32 are omitted. An opening 32 a through which the lamp 31 passes is provided at the bottom of the condenser mirror 32. An insulator 71 is mounted on the upper surface of the table 60 via a position adjusting device described later, and a clamp 70 is attached to the insulator 71. The clamp 70 is configured to fasten the screw 72 to fix the lower end 31 a of the lamp 31 and loosen the screw 72 to remove the lamp 31.

  FIG. 9 is a top view of the position adjusting device. FIG. 10 is an enlarged view of the position adjusting device. In FIG. 9, the lamp 31 and the condenser mirror 32 are indicated by broken lines. The position adjusting device includes a Z-direction adjusting mechanism and motor 55, and an XY-direction adjusting mechanism and motor 66. FIG. 11 is a rear view of the Z-direction adjusting mechanism. The Z-direction adjusting mechanism includes a table 50, a worm 51, a worm wheel 52, a bearing 53, and a shaft coupling 54. In FIG. 11, the worm 51 is provided below the insulator 71. On the table 50, a worm wheel 52 is rotatably supported by a bearing 53. A rotating shaft of a motor 55 is connected to the worm wheel 52 via a shaft coupling 54. When the worm wheel 52 is rotated by the motor 55, the worm 51 meshing with the worm wheel 52 moves up and down, and the position (height) of the lamp 31 in the Z direction is adjusted.

  FIG. 12 is a top view of the XY direction adjusting mechanism. The XY direction adjustment mechanism includes an adjustment base 61, an adjustment block 62, a spring 63, a shaft 64, a shaft holder 65, and an eccentric cam 67. The adjustment base 61 has a predetermined thickness, and a rectangular recess 61a cut to a predetermined depth is formed on the upper surface thereof. The adjustment block 62 is integrally formed with a plate that is larger than the recess 61a and substantially covers the recess 61a on the upper surface of the adjustment base 61, and a block 62a that is smaller than the recess 61a and is accommodated in the recess 61a and moves within the recess 61a. Is formed. On the adjustment block 62, an insulator 71 to which a clamp 70 is attached is mounted.

  The block 62a is urged in the recess 61a by the spring 63 in the upper right direction of the drawing and the lower right direction of the drawing. A shaft 64 is attached to the block 62a so as to extend obliquely upward to the right of the drawing or obliquely downward to the right of the drawing. Each shaft 64 passes through a through hole provided in the adjustment base 61 and is guided by a shaft holder 65 to be movable in the axial direction. An eccentric cam 67 is attached to the rotating shaft 66 a of the motor 66, and the tip of the shaft 64 is pressed against the eccentric cam 67 by a spring 63. When the eccentric cam 67 is rotated by the motor 66, the shaft 64 is pushed by the spring 63 or the eccentric cam 67, the block 62a moves in the recess 61a, and the position of the clamp 70 in the XY direction is adjusted.

  Hereinafter, a lamp position adjusting method for an exposure apparatus according to an embodiment of the present invention will be described. FIG. 13 is a block diagram of a control system of the position adjusting device. The control system of the position adjusting device includes an image processing device 40, a CCD camera 46, a light source control device 80, and motor drive circuits 81, 82, and 83. The CCD camera 46 acquires the image of the cathode 31a of the lamp 31 and the images of the gauges 45a and 45b displayed on the arc monitor 45, and outputs an image signal. The image processing device 40 processes the image signal output from the CCD camera 46 and detects the amount of deviation of the cathode 31a of the lamp 31 from the target position. The light source control device 80 controls the power source 38, the illuminance sensor 39, the CCD camera 46, the image processing device 40, and the motor drive circuits 81, 82, and 83. The motor drive circuits 81, 82, 83 drive the motors 55, 66 of the position adjusting device under the control of the light source control device 80, respectively.

  FIG. 14 is a flowchart showing the operation of the light source control device. When the replacement of the lamp 31 is completed, the light source control device 80 controls the power source 38 to turn on the lamp 31 (step 101). Then, the light source control device 80 stands by for a predetermined time until the illuminance of the lamp 31 is stabilized (step 102). In the case of a mercury lamp, it takes about one hour until the illuminance of the lamp 31 is stabilized after the lamp 31 is turned on. The power source 38 measures the power of the lamp 31 and outputs the measurement result to the light source control device 80. After the predetermined time has elapsed, the light source control device 80 checks whether or not the power of the lamp 31 is within a predetermined range, and repeats this until the power of the lamp 31 falls within the predetermined range (step 103).

  When the power of the lamp 31 falls within a predetermined range, the light source control device 80 controls the CCD camera 46 to acquire the image of the cathode 31a of the lamp 31 and the images of the gauges 45a and 45b displayed on the arc monitor 45. (Step 104). The image processing apparatus 40 processes the image signal output from the CCD camera 46 and detects the amount of deviation of the lamp 31 from the target position of the cathode 31a (step 105). An arc monitor 45 for displaying an image of the cathode 31a of the lamp 31 and a target position is provided, and an image of the cathode 31a of the lamp 31 and an image of the target position displayed on the arc monitor 45 are acquired, and an image of the cathode 31a of the lamp 31 and Since the image signal of the target position is processed to detect the amount of deviation of the lamp 31 from the target position of the cathode 31a, the amount of deviation of the lamp 31 from the target position of the cathode 31a is detected with high accuracy.

  The light source control device 80 determines whether the amount of deviation of the lamp 31 from the target position of the cathode 31a detected by the image processing device 40 is a predetermined value or less (step 106). When the amount of deviation is not less than the predetermined value, the light source control device 80 controls the motor drive circuits 81, 82, 83 based on the amount of deviation detected by the image processing device 40 to drive the motors 55, 66 of the position adjustment device. The position of the lamp 31 is adjusted (step 107). The light source control device 80 repeats Steps 104 to 107 until the deviation amount becomes a predetermined value or less. A clamp 70 for fixing the lamp 31, an adjustment mechanism for adjusting the position of the lamp 31 by moving the clamp 70, and a position adjustment device having motors 55 and 66 for driving the adjustment mechanism are provided. Based on the detection result of the amount of deviation from the target position, the motors 55 and 66 of the position adjusting device are controlled to adjust the center of the lamp 31 to the focus of the condenser mirror 32, so that the position adjustment of the lamp 31 can be accurately performed in a short time. Well done.

  When the deviation amount of the lamp 31 from the target position of the cathode 31a becomes equal to or less than a predetermined value, the light source control device 80 controls the illuminance sensor 39 to measure the illuminance of the exposure light (step 108). Then, the light source control device 80 calibrates the illuminance of the exposure light by controlling the power source 38 based on the measurement result of the illuminance sensor 39 (step 109).

  According to the embodiment described above, the position adjustment device having the clamp 70 for fixing the lamp 31, the adjustment mechanism for adjusting the position of the lamp 31 by moving the clamp 70, and the motors 55 and 66 for driving the adjustment mechanism. And an arc monitor 45 that displays the image of the cathode 31a and the target position of the lamp 31 and acquires the image of the cathode 31a of the lamp 31 and the image of the target position displayed on the arc monitor 45, and the cathode 31a of the lamp 31 And the image signal of the target position are processed to detect the amount of deviation of the cathode 31a of the lamp 31 from the target position, and the motors 55 and 66 of the position adjusting device are controlled based on the detection result to By adjusting the center to the focus of the condenser mirror 32, the position of the lamp 31 can be adjusted accurately in a short time.

    FIG. 15 is a top view of a lamp and a condenser mirror of an exposure apparatus according to another embodiment of the present invention. In the present embodiment, four lamps 31 are used as a light source that generates exposure light. Each lamp 31 is a lamp in which high pressure gas is enclosed in a bulb, such as a mercury lamp, a halogen lamp, or a xenon lamp. A condensing mirror 32 that condenses the exposure light generated from each lamp 31 is provided around each lamp 31. Each condensing mirror 32 is an ellipsoidal reflecting mirror. Each condensing mirror 32 is provided with two transparent windows 32 b at the height of the cathode of the lamp 31. The two windows 32 b are arranged in a direction of 90 ° with respect to each other when viewed from the center of the lamp 31.

  In the present embodiment, two adjacent lamps 31 are arranged close to a distance smaller than the diameter of the condenser mirror 32 by cutting out a part of the condenser mirror 32. However, the two adjacent lamps 31 may be arranged at a distance larger than the diameter of the condenser mirror 32 without cutting out a part of the condenser mirror 32.

  A partition wall 32 c is provided between the lamps 31. The partition wall 32c is made of aluminum with high reflectivity of ultraviolet rays, prevents exposure light generated from each lamp 31 from being irradiated to other lamps, and heat generated from each lamp 31 is transmitted to the other lamps. Suppress. In addition, what is necessary is just to provide a partition between lamps, and the number can be suitably determined according to arrangement | positioning of a some lamp. For example, when four lamps are arranged with the same distance between adjacent lamps, the number of partition walls may be four. Further, a plurality of partition walls may be connected to form an integral structure.

  FIG. 16 is a top view showing an example of the arrangement of the arc monitor. In FIG. 16, each condensing mirror 32 is indicated by a broken line. As in FIG. 5, a mirror 41 is installed outside the window 32 b of each condenser mirror 32, and a mirror 42 is installed below the mirror 41. In FIG. 16, a lens 43 and a mirror 44 are installed further outside the mirror 42. Light emitted from the cathode 31 a of each lamp 31 passes through the window 32 b of each condenser mirror 32, is reflected by the mirrors 41 and 42, and enters the lens 43. The light emitted from the lens 43 is reflected by the mirror 44 and forms an inverted image of the cathode 31 a of the lamp 31 on the display surface of the arc monitor 45.

  In the present embodiment, the clamp 70 shown in FIGS. 6 to 8 and the position adjusting device shown in FIGS. 9 to 12 are provided corresponding to each lamp 13, and the positions shown in FIG. The position of each lamp 13 is adjusted by the operation shown in FIG. 14 by the control system of the adjusting device.

  According to the embodiment shown in FIGS. 15 and 16, a clamp 70, a position adjusting device, and an arc monitor 45 are provided for each of the lamps 31 and the condenser mirror 32 for each lamp 31. The displayed image of the cathode 31a of each lamp 31 and the image of the target position are acquired, the image of the cathode 31a of each lamp 31 and the image signal of the target position are processed, and the target position of the cathode 31a of each lamp 31 is obtained. By detecting the amount of deviation and controlling the motors 55 and 66 of each position adjusting device based on the detection result so that the center of each lamp 31 is focused on the focus of each condenser mirror 32, a plurality of light sources of exposure light are used. Even when the lamps 31 are used, the position of each lamp 31 can be adjusted accurately in a short time.

  The present invention can be applied not only to a proximity exposure apparatus but also to a projection exposure apparatus that projects a mask pattern onto a substrate using a lens or a mirror.

DESCRIPTION OF SYMBOLS 1 Substrate 2 Mask 3 Base 4 X guide 5 X stage 6 Y guide 7 Y stage 8 θ stage 9 Chuck support 10 Chuck 20 Mask holder 30 Exposure light irradiation device 31 Lamp 31a Cathode 32 Condensing mirror 32a Opening 32b Window 32c Partition 33 First plane mirror 34 Lens group 35 Shutter 36 Collimation lens group 37 Second plane mirror 38 Power supply 39 Illuminance sensor 40 Image processing device 41, 42, 44 Mirror 43 Lens 45 Arc monitor 46 CCD camera 50 Table 51 Warm 52 Warm wheel 52 Bearing 54 Axis Joint 55 Motor 60 Table 61 Adjustment base 62 Adjustment block 63 Spring 64 Shaft 65 Shaft holder 66 Motor 67 Eccentric cam 70 Clamp 71 Insulator 72 Screw 80 Light source control Device 81, 82, 83 Motor drive circuit

Claims (4)

An exposure apparatus comprising a lamp and a condensing mirror for condensing light generated from the lamp, and exposing the substrate with the light collected by the condensing mirror,
A clamp for fixing the lamp;
An adjustment mechanism for adjusting the position of the lamp by moving the clamp, and a position adjustment device having a motor for driving the adjustment mechanism;
A display device for displaying a cathode image and a target position of the lamp;
An image acquisition device for acquiring an image of a cathode of the lamp and an image of a target position displayed on the display device, and outputting an image signal;
An image processing device that processes an image signal output from the image acquisition device and detects a deviation amount from a target position of a cathode of the lamp;
An exposure apparatus comprising: a control device that controls a motor of the position adjustment device based on a detection result of the image processing device to adjust a center of the lamp to a focus of the condenser mirror. A plurality of the lamp and the condenser mirror;
The exposure apparatus according to claim 1, wherein the clamp, the position adjustment device, and the display device are provided for each lamp. A method for adjusting the lamp position of an exposure apparatus comprising a lamp and a condensing mirror for condensing light generated from the lamp, and exposing the substrate with the light collected by the condensing mirror,
A clamp to fix the lamp;
An adjustment mechanism for adjusting the position of the lamp by moving the clamp, and a position adjustment device having a motor for driving the adjustment mechanism;
A display device for displaying an image of a cathode of a lamp and a target position;
Acquire an image of the cathode of the lamp and an image of the target position displayed on the display device,
Process the image of the cathode of the lamp and the image signal of the target position to detect the amount of deviation from the target position of the lamp cathode,
A lamp position adjusting method for an exposure apparatus, characterized in that, based on the detection result, a motor of the position adjusting apparatus is controlled to adjust the center of the lamp to the focus of the condenser mirror. For multiple lamps and condenser mirrors
A clamp, a position adjustment device, and a display device are provided for each lamp.
Obtain an image of the cathode of each lamp and an image of the target position displayed on each display device,
Process the image of the cathode of each lamp and the image signal of the target position to detect the amount of deviation from the target position of the cathode of each lamp,
4. The lamp position adjusting method for an exposure apparatus according to claim 3, wherein the center of each lamp is adjusted to the focus of each condenser mirror by controlling the motor of each position adjusting apparatus based on the detection result.

Images