JP2010260130A - Wire sawing device and method of cutting workpiece by wire sawing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To cut a workpiece while enhancing the quality of a cut-off surface by suppressing vibration generated in a wire and guide rollers. <P>SOLUTION: A wire sawing device 1 includes the wire 2; the guide rollers 3A to 3C; a frame 4, a motor 6; a workpiece feed portion 5; sensors 7A and 7B; and a controller 8. The wire 2 is stretched among these guide rollers 3A to 3C. The frame 4 rotatably holds these guide rollers 3A to 3C. The motor 6 allows the wire 2 to travel at a set speed. The workpiece feed portion 5 feeds the workpiece 50 toward the side of the wire 2 from a direction vertical to the side surface of the wire 2. These sensors 7A and 7B output detected instantaneous values related to positions of the guide rollers 3B and 3C. The controller 8 analyzes the detected instantaneous values inputted from these sensors 7A and 7B, and detects amplitude central values of vibration generated in these detected instantaneous values, and sets a speed at which the wire 2 travels so as to reduce their amplitude central values. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a wire saw device for cutting a workpiece using a wire as a cutting tool, and a method for cutting a workpiece with a wire saw device.

  Certain electronic components are individually cut from a workpiece such as an unsintered ceramic block. There are various types of processing machines used in the process of cutting a workpiece, and a certain type of processing machine is a wire saw device. The wire saw device cuts a workpiece by pressing the workpiece against the side surface of the traveling wire (see, for example, Patent Document 1).

  A wire saw device adopting a general configuration includes a plurality of guide rollers, a frame, a wire, a motor, and a workpiece feeding unit. The frame holds the guide roller rotatably at a predetermined position. The wire is stretched around a plurality of guide rollers. The motor moves the wire. The workpiece feeding unit feeds the workpiece toward the side surface of the traveling wire.

  In such a wire saw device, the frame and the guide roller bend due to the cutting force acting on the wire. Further, the frame and the guide roller are thermally expanded due to frictional heat generated in the wire and heat generated in the motor. For this reason, the wire may escape (offset) in a direction along the rotation axis of the guide roller from a predetermined cutting position in the workpiece. As a result, the dimensional accuracy of the electronic component may be deteriorated.

  Therefore, the wire saw device disclosed in Patent Document 1 includes a detection unit, a movable bearing, and an adjustment unit in addition to the configuration of a general wire saw device. The detection unit detects a first sensor offset amount generated in a direction along the rotation axis of the guide roller, and a second sensor detects an offset amount of the workpiece feeding unit generated in the direction along the rotation axis of the guide roller. And a sensor. The movable bearing holds the guide roller slidably in a direction along the rotation axis of the guide roller. The adjustment unit pushes the guide roller in the direction along the rotation axis, thereby compensating for the offset between the workpiece and the wire that occurs in the direction along the rotation axis of the guide roller.

Japanese Patent No. 3010426

  In the wire saw device that compensates for the offset, the device has to have low rigidity by attaching a movable bearing, and the amplitude of vibration generated in the wire and the guide roller is likely to increase as the wire travels. Thereby, flatness etc. deteriorate in the cut surface of a workpiece | work, and the problem that the cut surface quality of a workpiece | work falls arises. This problem occurs even if the wire saw device adopts a general configuration in which the adjusting unit and the movable bearing are not provided, if the device has low rigidity.

  Further, the vibration generated in the wire and the guide roller is affected by various settings of the apparatus. If the optimal setting that can most suppress the vibration generated in the wire and the guide roller is known in advance, the initial setting of the apparatus can be optimized in advance. However, when the state of the workpiece or the apparatus changes due to the wear of the wire or the thermal expansion of each part, the optimum setting that can most suppress the vibration generated in the wire and the guide roller changes. Therefore, it is difficult to optimize the initial settings in advance.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a wire saw device that makes it possible to cut a workpiece while improving the quality of the cut surface by suppressing vibration generated in the wire and the guide roller, and a method of cutting a workpiece with the wire saw device. It is to provide.

The wire saw device according to the present invention includes a wire, a plurality of guide rollers, a frame, a motor, a workpiece feeding unit, a sensor, and a control unit. A plurality of guide rollers are provided with wires. The frame holds a plurality of guide rollers rotatably. The motor runs the wire at the set speed. The workpiece feeding unit feeds the workpiece toward the side surface of the wire from a direction perpendicular to the side surface of the wire. The sensor outputs a detection instantaneous value related to the position of the guide roller. The control unit analyzes the detected instantaneous value input from the sensor, detects the representative amplitude value in the vibration of the detected instantaneous value, and sets the speed at which the wire travels so as to reduce the representative amplitude value.
Here, the amplitude representative value is an analysis value related to amplitude such as maximum amplitude or RMS amplitude. The maximum amplitude is a half value with respect to the peek-to-peek value of vibration during a certain period. The RMS amplitude is a value obtained by taking the square root of an arithmetic average after squaring the value of vibration in a certain period.
The amplitude of vibration generated in the wire and the guide roller varies depending on the traveling speed of the wire, the state of the workpiece and the apparatus, and the like. Therefore, in this wire saw device, the speed at which the wire travels is set by the control unit based on the detected instantaneous value related to the position of the guide roller. Thereby, even if the state between the workpiece and the apparatus changes, the setting of the speed at which the wire travels can be brought close to the speed suitable for suppressing the vibration generated in the guide roller. Therefore, it is possible to improve the cut surface quality of the workpiece by suppressing the vibration generated in the wire.

In the frame according to the present invention, it is preferable that the guide roller is held by prohibiting sliding in the direction along the rotation axis of the guide roller.
Thereby, compared with the structure which hold | maintains a guide roller slidably like patent document 1, the connection rigidity of a guide roller and a flame | frame can be improved. Therefore, vibration generated in the wire and the guide roller can be suppressed. In addition, the apparatus can be simply configured, and the equipment cost can be reduced.

It is preferable that the detected instantaneous value according to the present invention vibrates with a magnitude approximately proportional to the vibration generated in the guide roller.
When the workpiece is fed, the workpiece feeding section also vibrates. When this vibration affects, the detected instantaneous value may not vibrate with a magnitude that is substantially proportional to the vibration generated in the guide roller. Even if the speed at which the wire travels is set by the control unit using such detected instantaneous value, the effect of suppressing the vibration generated in the guide roller is low. Therefore, the vibration generated in the guide roller can be effectively suppressed by setting the speed at which the wire travels based on the detected instantaneous value that vibrates at a magnitude approximately proportional to the vibration generated in the guide roller. In addition, since the speed which a wire drive | works can be set appropriately, even if it does not detect with a sensor about the vibration of a workpiece | work feed part, an apparatus can be comprised simply and installation cost can be held down.

The instantaneous detection value according to the present invention is preferably related to the position of the guide roller in the direction along the rotation axis of the guide roller.
The vibration of the guide roller that occurs in the direction along the rotation axis tends to affect the quality of the cut surface of the workpiece. In addition, it is not easily affected by the bending that occurs in the guide roller. Therefore, by setting the speed at which the wire travels in the control unit based on the detected instantaneous value, it is possible to effectively suppress the vibration of the guide roller that occurs in the direction along the rotation axis.

A frame according to the present invention is installed on a floor surface by connecting a first wall portion holding a plurality of guide rollers, a second wall portion holding a sensor, and the first wall portion and the second wall portion. The sensor is preferably an optical sensor that utilizes reflection of light at a measurement point.
This makes it difficult for vibration generated in the guide roller to reach the sensor body. Therefore, the reliability of the sensor is increased. In addition, the optical sensor can detect the position of the guide roller with high accuracy and high resolution while being inexpensive.

The control unit according to the present invention is preferably configured to change the setting of the speed at which the wire travels when the detected amplitude representative value exceeds a threshold value.
Thereby, the oscillation and divergence of the control system can be suppressed as compared with the configuration in which the speed at which the wire travels is sequentially changed using feedback. Therefore, it is possible to avoid the influence of the oscillation and divergence of the control system and to prevent the cut surface quality of the workpiece from fluctuating.

  In the method of cutting a workpiece with the wire saw device according to the present invention, first, a detection moment related to the position of the guide roll on which the wire is stretched while the wire is traveling at a set speed and the workpiece is fed toward the side surface of the wire. Detect value. Then, the detected instantaneous value is analyzed to detect the amplitude representative value in the vibration of the detected instantaneous value, it is determined whether the amplitude representative value exceeds the threshold value, and if it exceeds, the wire is arranged so as to reduce the amplitude representative value. Set the traveling speed.

  According to the present invention, even when the state between the workpiece and the apparatus is changed, the setting of the speed at which the wire travels can be brought close to the speed suitable for suppressing the vibration generated in the guide roller. Thereby, it is possible to improve the cut surface quality of the workpiece by suppressing the vibration generated in the wire.

It is a figure explaining the structure of the wire saw apparatus which concerns on the 1st Embodiment of this invention. It is a figure explaining the operation | movement which cuts a workpiece | work with the wire saw apparatus shown in FIG. It is a figure which illustrates the vibration of the detection instantaneous value of the sensor with which the wire saw apparatus shown in FIG. 1 is equipped. It is a figure which illustrates the vibration of the detection instantaneous value of the sensor with which the wire saw apparatus shown in FIG. 1 is equipped. It is a figure explaining schematic structure of the control part with which the wire saw apparatus shown in FIG. 1 is provided. It is a figure explaining the control flow of the control part shown in FIG. It is a figure explaining the structure of the wire saw apparatus which concerns on the 2nd Embodiment of this invention. It is a figure explaining the structure of the wire saw apparatus which concerns on the 3rd Embodiment of this invention.

The wire saw device 1 according to the first embodiment will be described below.
FIG. 1A is a schematic front sectional view of the wire saw device 1, and FIG. 1B is a schematic side sectional view of the wire saw device 1.
The wire saw device 1 includes a wire 2, guide rollers 3 </ b> A to 3 </ b> C, a frame 4, a work feeding unit 5, a motor 6, sensors 7 </ b> A and 7 </ b> B, a control unit 8, tension adjusting units 9 and 10, and terminal bobbins 11 and 12. .

  The frame 4 includes a back plate 4A, a bottom plate 4B, and a front plate 4C. The bottom plate 4B is the base of the present invention and is installed on the floor surface. The back plate 4A is the first wall portion of the present invention, and rises from the end of the bottom plate 4B on the apparatus back side. The front plate 4C is the second wall portion of the present invention, and rises from the end of the bottom plate 4B on the front side of the apparatus.

  The wire 2 is in the form of an end line, and a first end is wound around the terminal bobbin 11 and a second end is wound around the terminal bobbin 12. From the first end to the second end, the end bobbin 11, the plurality of intermediate rollers constituting the tension adjustment unit 9, the guide rollers 3 </ b> A to 3 </ b> C, the plurality of intermediate rollers constituting the tension adjustment unit 10, and the end bobbin 12 in this order. It is stretched. With respect to the guide rollers 3A to 3C, the wire 2 is stretched in a spiral manner so as to go around the outside surrounding the guide rollers 3A to 3C.

  The workpiece feeding unit 5 is provided so as to be movable up and down, and holds the workpiece 50 on the bottom surface side of the apparatus. The workpiece feeding unit 5 is disposed directly above the guide roller 3A and above the center of the portion of the wire 2 that is stretched between the guide rollers 3B and 3C. The work feeding unit 5 descends from above, and feeds the work 50 to be held perpendicularly to the side surface of the wire 2 at a predetermined speed.

  The guide rollers 3A to 3C are attached to the apparatus front side of the back plate 4A via a fixed bearing so that the rotation axes thereof are parallel to each other. By using the fixed bearing, the connection rigidity between the frame 4 and the guide rollers 3 </ b> A to 3 </ b> C can be increased as compared with the case of using the movable bearing. Each of the guide rollers 3A to 3C includes a plurality of feed grooves (not shown) on the peripheral surface. The plurality of feed grooves are engraved along the circumference in parallel with each other. Each feed groove accommodates the wire 2 and regulates the position of the wire 2. The guide rollers 3A to 3C are arranged at positions that form vertices of inverted isosceles triangles. Specifically, the guide roller 3A is disposed on the apparatus bottom side, the guide roller 3B is disposed on the apparatus left side, and the guide roller 3C is disposed on the apparatus right side.

  The tension adjusting units 9 and 10 adjust the path length over which the wire 2 is stretched to make the tension of the wire 2 constant.

  The end bobbins 11 and 12 rotate forward or backward at a predetermined speed and wind or send the wire 2.

  The motor 6 is attached to the rear surface side of the back plate 4A, and the rotation shaft of the motor 6 is connected to the guide roller 3C. Therefore, the motor 6 directly drives the guide roller 3C. Further, the guide rollers 3A and 3B are rotated by the frictional force acting from the traveling wire 2. Therefore, the motor 6 indirectly drives the guide rollers 3A and 3B.

  The sensors 7A and 7B are provided on the back side of the device of the front plate 4C. By attaching the sensors 7A and 7B to the front plate 4C to which no movable part such as a motor is attached, the vibration of the movable part is less likely to reach the sensors 7A and 7B. The sensor 7A is disposed to face the end surface of the guide roller 3B on the front side of the apparatus. The sensor 7B is disposed to face the end face of the guide roller 3C on the front side of the apparatus. These sensors 7A and 7B are optical sensors, and detect the distances to the guide rollers 3B and 3C using reflection of light at the end faces of the guide rollers 3B and 3C. And the detection instantaneous value which vibrates by the magnitude | size substantially proportional to the vibration which arises in the guide rollers 3B and 3C in the direction along a rotating shaft is output.

The control unit 8 receives detection instantaneous values from the sensors 7A and 7B. The control unit 8 analyzes these detected instantaneous values and detects the maximum amplitude of each vibration. The control unit 8 updates the set speed for the speed at which the wire 2 travels based on the detected maximum amplitude. Then, the control unit 8 outputs a motor control signal for realizing the set speed to the motor 6. The motor 6 rotates the guide roller 3C at a rotation speed based on the motor control signal. As a result, the wire 2 travels at the set speed.
In this example, the maximum amplitude is used as the amplitude representative value. However, as the amplitude representative value, an analysis value related to another amplitude such as an RMS amplitude may be used. Further, as the amplitude representative value, a value obtained by adding or averaging analysis values based on outputs of a plurality of sensors may be used, or only the analysis value of one sensor may be used.

  With the above configuration, in the wire saw device 1, the wire 2 can travel at an appropriate speed that suppresses the vibrations of the guide rollers 3 </ b> A to 3 </ b> C. Even if the wear of the wire 2 or the thermal expansion of each part of the apparatus progresses during the operation of the wire saw device 1, the control unit 8 updates the set speed of the wire 2 during the operation of the wire saw device 1, so that the cut surface The work 50 can be cut with high quality.

Next, the state which cuts the workpiece | work 50 using this wire saw apparatus 1 is demonstrated.
FIG. 2A is a schematic perspective view illustrating a state in which the workpiece 50 is cut by the wire saw device 1.
The work 50 includes a main layer 51 and a sacrificial layer 52. The main layer 51 is a member constituting a target electronic component. The sacrificial layer 52 is a member that is directly held by the workpiece feeding unit 5 and later deleted from the electronic component. The sacrificial layer 52 is provided in order to cut the main layer 51 with a substantially uniform cut surface to the end in the cutting process using the wire saw device 1.
The workpiece feeding unit 5 holds the workpiece 50 and feeds the workpiece 50 perpendicular to the side surface of the wire 2. Thereby, the workpiece 50 is cut in contact with the side surface of the traveling wire 2.

FIG. 2B is a schematic state transition diagram in a front cross-section in a state in which the workpiece 50 is cut by the wire saw device 1.
In the present embodiment, in the cutting process of the workpiece 50, after the motor is normally rotated for a predetermined period, the traveling of the wire 2 and the feeding of the workpiece 50 are stopped. Then, in order to change the traveling direction of the wire 2 to the opposite direction, the motor is reversed to resume the traveling of the wire and the feeding of the workpiece is resumed. Thus, in the cutting process of the workpiece 50, the forward rotation and the reverse rotation of the motor are repeatedly changed.

Next, an example of data detected by the sensors 7A and 7B in the wire saw device 1 of the present embodiment will be described.
FIG. 3 is a diagram illustrating, for each set speed of the wire 2, a graph showing the vibration of data obtained by converting the detected instantaneous value output by the sensor 7B into the displacement amount of the guide roller 3C in [mm] units.
FIG. 4 is a diagram illustrating a graph showing the vibration of data obtained by converting the detected instantaneous value output by the sensor 7 </ b> A into the displacement amount of the guide roller 3 </ b> B in [mm] for each set speed of the wire 2.

  The data waveform also vibrates when the set speed of the wire 2 is [0 m / min]. For this reason, the values detected by the sensors 7A and 7B include noise.

  The guide roller 3C is directly driven by the motor 6, and the guide roller 3B is indirectly driven by the motor 6 via the wire 2. For this reason, the data waveform in FIG. 3 tends to be more vibrated than the data waveform in FIG.

Further, when the drive of the motor 6 is reversed from normal rotation to reverse rotation, or when the drive of the motor 6 is reversed from reverse rotation to normal rotation, the vibration tends to maximize instantaneously in the data waveform of each graph.
Furthermore, during the period in which the motor is in steady operation (steady period), the amplitude of vibration in the data waveform tends to be substantially constant.

  Further, the vibration center of the data waveform in the steady period tends to shift alternately between the plus side and the minus side in each cycle. This is because the wire 2 is tilted from the plane perpendicular to the rotation axis of each guide roller 3A to 3C and the wire 2 is wound around each guide roller 3A to 3C, and the force acting on the guide roller 3A to 3C from the wire 2 is a direction along the rotation axis. This is because it has This component force acts in the opposite direction during forward and reverse rotation of the motor, and the vibration center of the data waveform is shifted alternately between the plus side and the minus side.

  In the data waveform illustrated here, a specific fluctuation tendency is observed between the magnitude of vibration and the set speed of the wire 2. And it turns out that the setting speed | rate of the wire 2 which can suppress the vibration of a data waveform exists. For example, in this example, the setting of [900 m / min] is optimal.

Next, control by the control unit 8 will be described.
FIG. 5 is a diagram illustrating a schematic configuration of the control unit 8.
The control unit 8 includes an input port 8A, an output port 8B, a CPU 8C, and a memory 8D. The input port 8A is connected to a plurality of external devices including the sensors 7A and 7B, and at least a detection instantaneous value is input. The output port 8B is connected to a plurality of external devices including the motor 6 and outputs at least a motor control signal. The memory 8D stores various program data. In addition, a threshold table, a detected instantaneous value storage area, and a setting storage area are provided. The CPU 8C reads various program data from the memory 8D and executes the program.
The detected instantaneous value storage area is a memory area for accumulating and storing a predetermined amount of sampling data of the detected instantaneous value input to the input port 8A. The setting storage area is a memory area for storing operating conditions set in each external device connected to the output port 8B. The threshold value table is a memory area for storing a threshold value used for determining whether or not to execute an update process for updating the set speed of the wire 2 in relation to the set speed of the wire 2, which will be described in detail later. .

FIG. 6 is a diagram illustrating an example of a control flow by the control unit 8.
When the apparatus is activated, the control unit 8 stores an initial value in the setting storage area of the memory 8D (S1). For example, [500 m / min] is adopted as an initial value of the speed at which the wire 2 travels.

  The control unit 8 operates the work feeding unit 5 while controlling the rotation speed of the motor 6 so that the wire 2 travels based on the information on the set speed stored in the setting storage area of the memory 8D. Thereby, the wire 2 travels at the set speed, and the cutting of the workpiece 50 progresses. The control unit 8 samples the detected instantaneous value input from the sensors 7A and 7B as the cutting of the workpiece 50 progresses, and stores it in the detected instantaneous value storage area of the memory 8D (S2).

  After the predetermined period has elapsed, the control unit 8 stops the workpiece feeding unit 5 and the motor 6 and rewrites information on the rotation direction of the motor 6 in the setting storage area of the memory 8D (S3).

  After stopping the workpiece feeding unit 5 and the motor 6, the control unit 8 determines whether the feeding amount of the workpiece 50 has reached a predetermined distance. If the predetermined amount has been reached, the cutting of the workpiece 50 is terminated (S4). ). The feed amount of the work 50 is preferably updated and stored in the memory 8D.

  If the feed amount of the workpiece 50 has not reached the predetermined distance, the control unit 8 analyzes the sampling data stored in the detected instantaneous value storage area of the memory 8D during the predetermined period to detect the amplitude representative value (S5).

  After detecting the representative amplitude value, the control unit 8 reads out the threshold value stored in the threshold value table of the memory 8D in relation to the set speed of the wire 2 at that time, and determines whether the amplitude representative value exceeds the threshold value. Do. If the amplitude representative value does not exceed the threshold value, the workpiece feeding unit 5 and the motor 6 are actuated again (S6 → S2).

  If the amplitude representative value exceeds the threshold value, the control unit 8 updates the setting speed of the wire 2 and updates information related to the setting speed in the setting storage area of the memory 8D. Then, the workpiece feeding section 5 and the motor 6 are actuated again (S7 → S2).

  In the above control flow, since it is determined whether or not the update process is executed using the threshold value (S6), the control system oscillates and diverges compared to the configuration in which the update process is executed in real time using feedback. Can be suppressed. Therefore, it is possible to avoid the influence of the oscillation and divergence of the control system and to prevent the cut surface quality of the workpiece from fluctuating.

  Here, an example is shown in which the determination (S6) is performed every time the predetermined period elapses. However, the determination (S6) may be performed after the predetermined period has passed a plurality of times. Further, the determination (S6) may be performed after the workpiece is cut, not in the middle of cutting the workpiece. The determination (S6) may be performed after cutting a plurality of workpieces.

Further, any optimization method may be adopted for the update process (S7). For example, the fluctuation tendency of the amplitude representative value of the detected instantaneous value is determined in advance at the time of starting the apparatus, and addition / subtraction is selected according to the fluctuation tendency, and the set speed is changed by a predetermined step size, for example, [100 m / min] You may make it do.
Further, for example, the fluctuation tendency of the amplitude representative value may be determined based on the detection result of the previous detection instantaneous value, and addition / subtraction may be selected according to the fluctuation tendency, and the set speed may be changed by a predetermined step size.
Further, for example, in the update process (S7), the workpiece cutting test may be performed while actually changing the set speed, and the speed at which the amplitude representative value is most reduced may be selected.
In addition, the update process (S7) may be performed using a linear programming method or a known optimization means of AI, and a speed at which the amplitude representative value is reduced may be searched and set.

  Further, the threshold value table of the memory 8D may be used without updating the threshold value as the initial value. In this case, for example, it is preferable to set the threshold value in consideration of the dimensional tolerance of the workpiece. Further, the threshold value may be updated during operation. For example, if the threshold value is updated to a previously detected amplitude representative value, the update process (S7) is promptly executed if the detected instantaneous value to be newly detected is increased due to a state transition or disturbance of the workpiece or device. Is done. Then, even when the set speed falls into a local solution that is not the optimal solution, the optimal solution is easily re-searched, and the set speed is likely to be the optimal solution.

  The wire saw device 21 according to the second embodiment will be described below. Here, the same reference numerals are given to the same components as those in the first embodiment, and description thereof will be omitted.

FIG. 7 is a schematic side sectional view of the wire saw device 21.
The wire saw device 21 includes a sensor 27A (not shown) and a sensor 27B instead of the sensors 7A and 7B of the first embodiment.
The sensor 27A (not shown) and the sensor 27B are provided on the end faces of the guide roller 3B (not shown) and the guide roller 3C on the apparatus front side. The sensor 27A (not shown) and the sensor 27B are acceleration detection elements, and detect accelerations in a predetermined direction of the guide roller 3B (not shown) and the guide roller 3C. The accelerations of the guide roller 3B (not shown) and the guide roller 3C vibrate according to the displacement of the guide roller 3B (not shown) and the guide roller 3C. The direction in which the acceleration is detected is not limited to the direction along the rotation axis of the guide roller, but may be a vertical direction, a horizontal direction, or a combined direction thereof. Since vibration in any direction may show a similar fluctuation tendency with respect to the traveling speed of the wire 2, suppressing vibration of acceleration detected by the sensor 27A (not shown) and the sensor 27B The quality of the cut surface of the workpiece can be improved regardless of the directionality of vibration.

  Below, the wire saw apparatus 31 which concerns on 3rd Embodiment is demonstrated. Here, the same reference numerals are given to the same components as those in the first embodiment, and description thereof will be omitted.

FIG. 8 is a schematic side sectional view of the wire saw device 31.
The wire saw device 31 includes an offset adjustment unit 32A (not shown) and an offset adjustment unit 32B in addition to the configuration of the first embodiment. The guide roller 3C is attached to the back plate 4A via a movable bearing, and is attached to the front plate 4C via a link mechanism of the offset adjustment unit 32B. Similarly, the guide roller 3B (not shown) is attached to the back plate 4A via a movable bearing, and is attached to the front plate 4C via a link mechanism of an offset adjustment unit 32A (not shown).

In this configuration, the control unit 8 includes an offset adjustment unit 32A (not shown) based on the output of the sensor so as to compensate for the offset in the direction along the rotation axis of the guide roller 3B (not shown) and the guide roller 3C. The offset adjustment unit 32B is controlled. The offset adjusting unit 32A (not shown) and the offset adjusting unit 32B adjust the link angle of the link mechanism in accordance with a control signal from the control unit 8, thereby rotating the rotation shafts of the guide roller 3B (not shown) and the guide roller 3C. Compensates for offsets in the direction along
Even in such a configuration, the control unit 8 appropriately updates the set speed of the wire 2 based on the sensor output, thereby suppressing vibrations between the guide roller 3B (not shown) and the guide roller 3C. Is possible.

DESCRIPTION OF SYMBOLS 1, 21, 31 ... Wire saw apparatus 2 ... Wire 3A-3C ... Guide roller 4 ... Frame 4A ... Back plate 4B ... Bottom plate 4C ... Front plate 5 ... Feed part 6 ... Motor 7A, 7B ... Sensor 8 ... Control part 8A ... Input port 8B ... Output port 8C ... CPU
8D ... Memory 9, 10 ... Tension adjuster 11, 12 ... Terminal bobbin 50 ... Work 51 ... Main layer 52 ... Sacrificial layer

Claims (7)

Wire,
A plurality of guide rollers on which the wire is stretched;
A frame for rotatably holding the plurality of guide rollers;
A motor that runs the wire at a set speed;
A workpiece feeding section for feeding a workpiece from the direction perpendicular to the side surface of the wire toward the side surface of the wire;
A sensor that outputs a detection instantaneous value related to the position of at least one of the guide rollers; and
A control unit that analyzes the detected instantaneous value input from the sensor to detect an amplitude representative value in vibration of the detected instantaneous value and sets a speed at which the wire travels so as to reduce the amplitude representative value; Wire saw device provided.   The wire saw device according to claim 1, wherein the frame holds the guide roller by prohibiting sliding in a direction along a rotation axis of the guide roller.   3. The wire saw device according to claim 1, wherein the detected instantaneous value vibrates with a magnitude substantially proportional to a vibration generated in the guide roller.   The wire saw device according to any one of claims 1 to 3, wherein the detected instantaneous value relates to a position of the guide roller in a direction along a rotation axis of the guide roller. The frame is installed on the floor surface by connecting the first wall portion holding the plurality of guide rollers, the second wall portion holding the sensor, the first wall portion and the second wall portion. With a base,
The wire saw device according to claim 1, wherein the sensor is an optical sensor that uses reflection of light at a measurement point.   The wire saw device according to any one of claims 1 to 5, wherein the control unit changes a setting of a speed at which the wire travels when the detected amplitude representative value exceeds a threshold value. Detecting a detection instantaneous value related to a position of a guide roller on which the wire is stretched while running the wire at a set speed and feeding a workpiece toward the side surface of the wire;
Analyzing the detected instantaneous value, detecting an amplitude representative value in vibration of the detected instantaneous value, determining whether the amplitude representative value exceeds a threshold, and reducing the amplitude representative value if it exceeds. Setting the speed at which the wire travels;
A method of cutting a workpiece with a wire saw device.

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