JP2003039301A - Wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a wire saw enabling immediate recognition of generation of abnormal wear in annular grooves of working rollers and prevention of a working defective. SOLUTION: Many annular grooves 11a, 12a and 13a are formed at prescribed pitch on each of outer peripheries of the three working rollers 11, 12 and 13. A wire 14 is wound on the annular grooves 11a, 12a and 13a to stride among the working rollers 11, 12 and 13. Acoustic wave detecting devices 36 are arranged at positions opposed to the wire 14 at both end positions among the working rollers 11, 12 and 13. By the acoustic wave detecting devices 36, vibration of the wire 14 is detected via acoustic waves. When a vibration frequency is lower than a prescribed value fixed in advance due to the abnormal wear of the annular grooves 11a, 12a and 13a, an alarm is given, the device is stopped and the working defective is prevented.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw for cutting a work made of a hard and brittle material such as a silicon ingot.

[0002]

2. Description of the Related Art A wire saw has a plurality of working rollers having a large number of annular grooves formed on the outer periphery thereof, and a wire is wound in a stretched state a number of times so as to pass through the annular grooves. The wire is run between the working rollers by the rotation of the working roller. Then, while the wire is running, the slurry containing abrasive grains is supplied to the wire row between the processing rollers and the work is pressed against the wire row, so that the work is cut into slices by the wire. Is processed.

[0003]

However, with the operation of the wire saw, the annular groove of the processing roller gradually wears as it becomes deeper, wider, or gouged. In particular, the annular grooves at both ends of the processing roller are often worn abnormally more than other parts due to the change in the wire tension between the reel and the processing roller. If such an abnormal condition is left as it is, the tension of the wire passing between the both ends of the processing roller is significantly different from the other parts, the processing accuracy is lowered, and processing failure occurs.

However, since the wire used is extremely thin, and the slurry is scattered around the wire row and its surroundings, the abnormal wear of the annular groove is often overlooked.

An object of the present invention is, when abnormal wear occurs in the annular groove of the working roller, it can be judged immediately as abnormal wear of the annular groove of the working roller, and the defective wear can be prevented in advance. The purpose is to provide a wire saw that is made possible.

[0006]

In order to achieve the above-mentioned object, in the invention described in claim 1, a wire is wound between annular grooves formed in a plurality of processing rollers, and the processing rollers are processed. In a wire saw in which a work is cut between rollers by a wire, if a detection means for detecting vibration of the wire and at least one of the vibration frequency or the amplitude exceeds a predetermined value as a result of the vibration detection by the detection means. And a control means for performing a predetermined operation.

When the annular groove of the working roller is worn, the tension of the wire between the annular grooves fluctuates. Therefore, the frequency or amplitude of vibration of the wire in this portion changes. When the vibration frequency or the amplitude exceeds a predetermined value, the control means executes a predetermined operation such as the operation of the alarm device. Therefore, the operator can immediately recognize that abnormal wear has occurred in the annular groove of the processing roller. Here, the fact that the vibration frequency or the amplitude exceeds the predetermined value includes that the vibration frequency or the amplitude exceeds both the plus side and the minus side.

In the invention described in claim 2, in claim 1, the predetermined operation is to generate an alarm. Therefore, based on this alarm, the operator immediately recognizes the abnormal wear and enables the countermeasure to be taken.

In the invention described in claim 3, the predetermined operation in claim 1 or 2 is
To stop the device. Therefore, it is possible to prevent the cutting process from being continued in the abnormal wear state, and prevent a processing defect from occurring.

According to a fourth aspect of the present invention, in any one of the first to third aspects, the detecting means detects the vibration frequency or amplitude of the wire at the end position between the processing rollers. To do.

Therefore, the wire is monitored at the end position between the processing rollers, where the abnormal groove is most likely to be abnormally worn, and the abnormal wear can be effectively detected.

According to a fifth aspect of the present invention, in any one of the first to fourth aspects, the detecting means is provided at a plurality of locations, and the control means displays an indication of a position of abnormal wear. .

Therefore, the operator can easily identify the machining roller in which abnormal wear has occurred, and can replace the machining roller or move the groove without error. A sixth aspect of the present invention is characterized in that, in any one of the first to fifth aspects, the detection means detects the vibration of the wire as a sound wave.

Therefore, since the sound wave in which the wire vibration is directly manifested is detected, the structure for detection is simple and reliable detection can be performed.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings. As shown in Figure 1,
In the wire saw of this embodiment, a pair of support plates 32 (only one of which is shown in FIG. 1) are erected on a base 31 so as to face each other. Three processing rollers 11, 12, 13 are arranged at a predetermined interval between both support plates 32, and a large number of annular grooves 11a are formed on the outer circumferences of the respective processing rollers 11, 12, 13. , 12a, 13a are formed at a predetermined pitch.

As shown in FIGS. 1 and 2, one wire 14 is wound around a pair of reels 16 and 17 at both ends. This wire 14 has two reels 16,
It is guided by a plurality of guide rollers 28 between 17 and is continuously wound around the annular grooves 11a, 12a, 13a in a stretched state so as to straddle between the processing rollers 11, 12, 13.

Then, the wire 1 is rotated by the rotation of the processing roller motor 18 and the pair of reel motors 19 and 20.
4 is fed in one direction by a predetermined feed amount, and then in the other direction by a feed amount smaller than the forward feed amount. By repeating the forward rotation side feed and the reverse rotation side feed, the wire 14 is stepwise advanced to the forward rotation side.

A work supporting arm 27 is provided above the processing rollers 11, 12, 13 so as to be capable of moving up and down, and a work W is supported on the lower surface thereof. Then, in the traveling state of the wire 14, the work supporting arm 27 descends, and the work W
Is pressed against the row of wires 14 between the upper processing rollers 11, 12. At this time, the slurry S containing abrasive grains is supplied from the slurry supply unit 33 onto the row of the wires 14 between the processing rollers 11 and 12. Therefore, the work 21 is cut into slices so as to have a predetermined thickness.

Dancer arms 22 and 23 are provided in the traveling path of the wire 14 between the pair of reels 16 and 17 and the processing rollers 11, 12 and 13, and dancer rollers 22a and 23a at their tips are provided. A wire 14 is hung. Both dancer arms 22 have weights 2 respectively.
2b and 23b are provided, and a predetermined tension is applied to the wire 14.

Between the processing rollers 11, 12, and 13, brackets 35 (acoustic wave detectors) are provided at a plurality of positions facing the wire 14 wound between both ends of the processing rollers 11, 12, and 13, respectively. 36c, 36
Only the bracket 35 of d is shown)
a, 36b, 36c, 36d, 36e, 36f are arranged. And these sound wave detectors 36a to 36f
Thus, the vibration of the wire 14 at both end positions is detected via the sound wave. The sound wave detector 36 outputs a detection signal representing the vibration frequency of the wire 14.

As shown in FIG. 3, the control device 26 as the control means inputs the detection signals from the sound wave detectors 36a to 36f, respectively. Then, if any of the input vibration frequencies falls below a predetermined value, that is, if it exceeds the negative side, the control device 26
An alarm is issued from the alarm device 37. At the same time, the control device 26 stops the rotation of the motor 18 for rotating the processing rollers 11, 12, 13 and the motors 19, 20 for rotating the reels 16, 17 described above.
Stop the device. Further, the control device 26 operates the indicator 38 to display which position of the wire 14 the frequency abnormality from the sound wave detectors 36a to 36f indicates.

During the processing of the work W, the vibration of the wire 14 at both end positions between the processing rollers 11, 12 and 13 is detected by the sound wave detectors 36a to 36f via sound waves, and the detection signal is controlled. Input to the device 26. In this case, the annular grooves 11a, 12 at both ends of the processing rollers 11, 12, 13 on which the first or last wire 14 is hung.
When a and 13a are worn and gouged, their annular grooves 11
The tension of the wire 14 stretched between a, 12a and 13a is reduced. Therefore, the vibration frequency of the wire 14 in this portion becomes low. When the vibration frequency is lower than the predetermined value, the control device 26 discriminates it. Therefore, an alarm is issued from the alarm device 37 and the position where the abnormal wear occurs is displayed. Motor 1 at the same time
8, 19, 20 are stopped and the device is stopped.

Therefore, the worker is required to use the processing rollers 11, 1
It is possible to immediately recognize that the abnormal wear has occurred in the annular grooves 11a, 12a, 13a of the Nos. 2 and 13 and the position thereof, and the continuation of the cutting process of the work W in the abnormal wear state is stopped. Therefore, the worn annular grooves 11a, 12
It is possible to take measures such as unwinding the wire 14 from a, 13a by one turn, and replace the processing rollers 11, 12, 13 and the like, and it is possible to prevent processing defects from occurring.

Also, the reels 16 and 17 and the processing roller 1
Annular groove 11a due to tension fluctuation between 1, 12, and 13,
Abnormal wear of 12a, 13a is caused by the processing rollers 11, 1
It is likely to appear at both ends of 2, 13. In this case, in this embodiment, since the respective sound wave detectors 36a to 36f face the wire 14 at both end positions between the processing rollers 11, 12 and 13, the abnormal wear can be accurately detected.

The above embodiment may be modified as follows. In the above-described embodiment, the sound wave detectors 36a to 36f are provided so as to face the wires 14 at both ends of the processing rollers 11, 12, 13; The one-sided structure is provided corresponding to the wire 14. Since the annular grooves 11a, 12a, 13a at both ends of the processing rollers 11, 12, 13 are worn in substantially the same manner, even if the sound wave detector 36 has a one-sided configuration, the same action and effect as in the above-described embodiment are obtained. Can be obtained. Further, the sound wave detector may not be provided between the processing rollers 11, 12, and 13, but may be provided at only one place.

In the above-described embodiment, the control device 26 is configured to perform a predetermined alarm operation or the like when the vibration frequency of the wire 14 becomes equal to or lower than a predetermined value. That is, when abnormal wear occurs in the annular grooves 11a, 12a, 13a and the wire tension decreases, the wire 1
Since the amplitude of the vibration of No. 4 becomes large, it is configured to detect this.

-Configure to monitor both the vibration frequency and the amplitude of the vibration of the wire 14. -In the said embodiment, annular groove 11a, 12a, 13a.
When abnormal wear occurs, an alarm is generated and
The device was stopped. On the other hand, an alarm is generated,
Configure so that only one side of the equipment is stopped.

In the above embodiment, the vibration of the wire 14 is detected as a sound wave. On the other hand, for example, a support plate 3 that supports the processing rollers 11, 12, and 13
Incorporating a vibrometer for 2 to detect the vibration of the wire 14 as mechanical vibration without passing through sound waves.

[0029]

As described above in detail, in the present invention, when abnormal wear occurs in the annular groove of the working roller,
The effect is that it can be immediately recognized and processing defects can be prevented.

[Brief description of drawings]

FIG. 1 is a partially cutaway front view of a wire saw.

FIG. 2 is a perspective view showing a traveling path of a wire.

3A is an explanatory view showing a positional relationship between a wire and a sound wave detector, and FIG. 3B is a partially enlarged sectional view showing an annular groove of a processing roller.

FIG. 4 is a block diagram showing an electrical configuration.

[Explanation of symbols]

11, 12, 13 ... Processing rollers, 11a, 12a, 1
3a ... annular groove, 14 ... wire, 26 ... control device as control means, 36 ... sound wave detector as detection means, 37 ... alarm device.

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 3C058 AA05 AA14 AC02 BA09 BB02                       BC03 CA04 CB06 DA03                 3C069 AA01 BA06 BB03 BB04 BC02                       CA04 DA01 DA03 EA03 EA05

Claims (6)

[Claims] 1. A wire saw in which a wire is wound between annular grooves formed in a plurality of processing rollers, and a work is cut by the wire between the processing rollers, for detecting vibration of the wire. When at least one of the vibration frequency and the amplitude exceeds a predetermined value as a result of the vibration detection by the detection means and the detection means, it is determined that the annular groove of the processing roller is abnormally worn and a predetermined operation is performed. A wire saw, comprising: 2. The wire saw according to claim 1, wherein the predetermined action is to generate an alarm. 3. The wire saw according to claim 1, wherein the predetermined action is to stop the device. 4. The wire saw according to claim 1, wherein the detection means detects a vibration frequency or an amplitude of the wire at an end position between the processing rollers. 5. The wire saw according to claim 1, wherein the detection means is provided at a plurality of locations, and the control means displays an indication of a position of abnormal wear. 6. The wire saw according to claim 1, wherein the detecting means detects the vibration of the wire as a sound wave.