JP2010249814A - Error compensation method and components measuring method using it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an error compensation method and components measuring method using this, which decrease a cost of a measuring device and secure a measurement precision. <P>SOLUTION: The error compensation method includes steps of: providing the measuring device equipped with a probe and a guide; measuring and compensating a straightness error of the guide; carrying out a fitting of mounting tilt angle of the probe, a step which calculates a shape error of the probe; and forming a systematic error compensation program. The components measuring method includes steps of forming the systematic error compensation program through the error compensation method; providing the components which have a curved surface or a curve; measuring the curved surface or the curve of the components by using the above measuring device; measuring and compensating the straightness error of the guide; compensating the error of the fitting tilt angle of the probe; compensating the shape error of the probe; and forming the measuring error by the program. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an error correction method and a component measurement method using the same, and more particularly to an error correction method using software and a component measurement method using the same.

  In the ultra-precision measurement field, the measurement accuracy is generally increased by the hardware configuration. For example, the measurement accuracy is increased by using a contact-type measurement device having high measurement accuracy. In order to ensure measurement accuracy, a contact-type measuring apparatus generally uses high-cost precision parts such as high-precision guides, probes, and laser interferometers. In addition, in order to obtain an accurate measurement result, the demand for the mechanical transmission and the mounting accuracy of the measuring device is increasing, and therefore the manufacturing cost of the measuring device tends to further increase. Therefore, the price of the conventional ultraprecision measuring device is high, and the versatility of the ultraprecision measuring device is low.

  In view of the above problems, an object of the present invention is to provide an error correction method capable of reducing the cost of a measuring apparatus and ensuring measurement accuracy, and a component measuring method using the same.

  In order to solve the above problem, an error correction method according to the present invention includes a step of providing a measuring device including a probe and a guide, a step of measuring and correcting a straightness error of the guide, and a mounting inclination of the probe. Fitting a corner, calculating a shape error of the probe, and generating a systematic error correction program.

  The component measurement method according to the present invention includes a step of generating a systematic error correction program through the error correction method, a step of providing a component having a curved surface or a curve, and a curved surface or curve of the component using the measuring device. Measuring the straightness error of the guide, correcting the error due to the mounting inclination angle of the probe, correcting the shape error of the probe, and a measurement error by a program Generating.

  The error correction method and the component measurement method using the same according to the present invention can achieve high measurement accuracy by correcting errors due to various factors of the measurement apparatus. The present invention uses software to reduce the adverse effects of various errors on the measurement accuracy, thereby appropriately reducing the demands on the accuracy of manufacturing, mounting and transmission of the measuring device, and using high-precision components By reducing the amount, the manufacturing cost of the measuring device can be greatly reduced.

3 is a flowchart of an error correction method according to an embodiment of the present invention. It is a figure which shows the step which measures a reference sphere in the error correction method shown in FIG. It is a flowchart of the components measurement method which concerns on embodiment of this invention. It is a figure which shows the step which measures components in the component measurement method shown in FIG.

  Hereinafter, an error correction method according to an embodiment of the present invention and a component measurement method using the same will be described in detail with reference to the drawings.

  1 and 2, the error correction method 100 according to the present invention includes the following steps (S102 to S110).

  In step S102, the measuring device 20 is provided.

  The measuring device 20 is a contact-type measuring device including two probes 21 a and 21 b and a guide 23.

In step S104, corrected by measuring the straightness error _{e 1} of the guide 23.

Linearity errors e ₁ of the guide 23, can be measured and corrected by the following method.

  First, a reference sphere 40 and a reference plane 50 that are separately arranged on both sides of the measuring device 20 are provided, and one probe 21 a of the measuring device 20 is brought into contact with the surface of the reference sphere 40 to thereby make the reference sphere 40. , And the reference plane 50 is measured by bringing another probe 21b of the measuring device 20 into contact with the surface of the reference plane 50.

Next, the surface of the reference sphere 40 is scanned with the one probe 21a to obtain a series of scan data (Xn, dz1 _n ) (n = 1, 2, 3,...) Of the reference sphere 40, and The surface of the reference plane 50 is scanned with the other probe 21b to acquire the positional deviation data (Xn, dz2 _n ) (n = 1, 2, 3,...) Of the guide 23.

Next, a fitting value (Fitted Values) k and an additional value b are obtained by performing straight-line fitting based on the positional deviation data (Xn, dz2 _n ).

  When there is an attachment inclination error in the reference plane 50, assuming that the inclination angle of the reference plane 50 is θ, the inclination angle can be calculated by the formula (1): K = tan θ.

The straightness error e ₁ of the guide 23 can be calculated by the equation (2): e ₁ = dz2 _n − (k × Xn + b).

The correction value _{L 1} corrected with linearity errors _{e 1} of the guide 23, the formula _(3): can be calculated by L 1 = _dz1 n + _{e 1.}

  In step S106, the mounting inclination angle α of the probe 21a is fitted.

When there is a mounting inclination angle α, measurement is performed after correcting the depression angle between the cutting line of the contact point of the probe 21 and the reference sphere 40 and the axial direction of the guide 23 with β and the straightness error e ₁ of the guide 23. If the value and _{L 2,} the formula _(4): by _{L 2 = L 1 × (cos} (α) + sin (α) × tan (β)) can be calculated _{L 2.} Therefore, the mounting inclination angle α of the probe 21 can be calculated using a non-linear least square method. L ₁ and L ₂ are correction values after measuring the scan data of the reference sphere 40. L ₁ is a measurement value after correction with the straightness error e ₁ of the guide 23, whereas L ₂ is based on the correction value L ₁ after correction with the straightness error e ₁ of the guide 23. It is the measured value obtained in this way.

In step S108, it calculates the shape error _{e 2} of the probe 21.

Assuming that the theoretical value in the case where the probe 21 does not have the mounting inclination angle α is L ′, the straightness error e ₁ of the guide 23 and the mounting inclination angle α of the probe 21 are obtained in the above-described steps. (5): The shape error e ₂ of the probe 21 can be calculated based on e ₂ = L ₁ −L ′.

  In step S110, a systematic error correction program is generated.

The resulting shape error e ₂ be one-to-one correspondence with the included angle β between the tangent to the axial direction of the guide 23 of each contact point of the reference sphere 40 and the probe 21, to produce a systematic error correction program Can do.

  Referring to FIGS. 1, 3 and 4 together, the component measuring method 200 according to the present invention includes the following steps (S202 to S214).

  In step S202, a systematic error correction program is generated through the error correction method 100.

  In step S204, the component 60 having a curved surface or a curve is provided.

  In step S206, the curved surface or curve of the component 60 is measured using the measuring device 20.

The theoretical value of the part 60 A, the measured value of the uncorrected and A _1.

The linearity errors _{e 1} of the guide 23 to correct measured at step S208.

Since linearity errors e ₁ of the guide 23 that may change each time the measurement is corrected by measuring the straightness error e ₁ of the guide 23 in the same manner as in step S104.

  In step S210, an error due to the mounting inclination angle α of the probe 21 is corrected.

Since the mounting inclination angle α of the probe 21 is a fixed value, the error due to the mounting inclination angle α of the probe 21 is automatically corrected by the computer after measuring the straightness error e ₁ of the guide 23 in step S208. can do.

In step S212, the correcting the shape error _{e 2} of the probe 21.

Since the shape error e ₂ of the probe 21 is also a fixed value, it is possible to automatically correct it by the computer.

  In step S214, a measurement error Err is generated by a program.

Measured value after correcting various errors in the above-described steps based on the formula (6): A ₂ = (A ₁ + e ₁ ) × (cos (α) + sin (α) × tan (β)) − e ₂ A ₂ can be calculated. Therefore, the measurement error Err is calculated based on the equation (7): Err = A ₂ −A = (A ₁ + e ₁ ) × (cos (α) + sin (α) × tan (β)) − e ₂ −A can do. A ₁ and A ₂ are measured values of the curved surface or curve of the component 60. Whereas A ₁ is a measure of the uncorrected, A ₂ is the measured value after correction of the various errors.

  In the embodiment of the present invention, high measurement accuracy is achieved by correcting various errors at the time of measurement using a method of correcting by software that establishes a mathematical model by a computer, and the measurement apparatus 20 is manufactured, mounted, and Costs can be reduced by reducing demands on transmission accuracy.

  The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the above-described embodiments, and various modifications or corrections are possible within the scope of the present invention. Needless to say, it is also included in the scope of the claims of the present invention.

θ Reference plane tilt angle α Probe mounting tilt angle β Angle between the cutting line of the contact point of the probe and the reference sphere and the guide axial direction 20 Measuring device 21a, 21b Probe 23 Guide 40 Reference sphere 50 Reference plane 60 Parts 100 Error correction Method 200 Component Measurement Method S102 to S110 Error Correction Method Steps S202 to S214 Component Measurement Method Steps

Claims (5)

Providing a measuring device comprising a probe and a guide;
Measuring and correcting straightness error of the guide;
Fitting a mounting inclination angle of the probe;
Calculating a shape error of the probe;
Generating a systematic error correction program;
An error correction method comprising: The measuring device has two probes,
The step of measuring and correcting the straightness error of the guide provides a reference sphere and a reference plane that are separately arranged on both sides of the measuring device, so that one probe of the measuring device is placed on the surface of the reference sphere. The guide sphere is measured by bringing it into contact, and the straightness error of the guide is calculated by measuring the reference plane by bringing another probe of the measuring device into contact with the surface of the reference plane. The error correction method according to claim 1.   The error correction method according to claim 2, wherein fitting inclination angle of the probe is fitted using a least square method.   The error correction method according to claim 1, wherein the measuring device is a contact-type measuring device. Providing a measuring device comprising a probe and a guide;
Measuring and correcting straightness error of the guide;
Fitting a mounting inclination angle of the probe;
Calculating a shape error of the probe;
Generating a systematic error correction program;
Providing a part having a curved surface or a curve;
Measuring the curved surface or curve of the part using the measuring device;
Measuring and correcting straightness error of the guide;
Correcting the error due to the mounting inclination angle of the probe;
Correcting the shape error of the probe;
Generating a measurement error programmatically;
A part measuring method comprising:

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