JP2010249728A - Spherical surface acoustic wave element holding device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a spherical surface acoustic wave element holding device, capable of readily holding a spherical surface acoustic wave element in a prescribed array, even if the spherical surface acoustic wave element has a small diameter. <P>SOLUTION: The spherical surface acoustic wave element holding device includes: a first holding section 20 for placing thereon a first electrode 16a of each surface acoustic wave excitation/detection means 16 of a plurality of spherical surface acoustic wave elements 10, and including a first terminal 22 connected electrically to the first electrode; a second holding section 28, including a second terminal placed on a second electrode 16b and connected electrically to the second electrode of each surface acoustic wave excitation/detection means of the plurality of spherical surface acoustic wave elements, during a period when the first electrode of each surface acoustic wave excitation/detection means of the plurality of spherical surface acoustic wave elements is placed and electrically connected to the first terminal of the first holding section; and pressing fixing means 26, 32 for fixing the second holding section to the first holding section in a pressed state toward the first holding section. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a spherical surface acoustic wave element holding device that holds a plurality of spherical surface acoustic wave elements in a predetermined arrangement.

  A plate-like surface acoustic wave element in which surface acoustic wave excitation means and surface acoustic wave detection means are arranged opposite to each other at two positions on the upper surface of a flat piezoelectric body arranged on a flat substrate. Is well known in the art.

  In such a conventional plate-shaped surface acoustic wave element, interdigital electrodes (also called comb-shaped electrodes) are used as the surface acoustic wave excitation means and the surface acoustic wave detection means, respectively. When a high-frequency current is supplied to the surface acoustic wave excitation means, the surface acoustic wave excitation means excites the surface acoustic wave on the upper surface of the piezoelectric body, and the excited surface acoustic wave is detected along the upper surface of the flat piezoelectric body. And is detected by the surface acoustic wave detection means.

  Such conventional plate-like surface acoustic wave devices are used in delay lines, oscillation and resonance devices for oscillators, frequency selective filters, chemical sensors, biosensors, remote tags, and the like. When the surface acoustic wave element is used as various sensors, the distance between the surface acoustic wave excitation means and the surface acoustic wave detection means on the upper surface of the piezoelectric body is increased, and the surface is excited by the surface acoustic wave excitation means. The longer the time required for the surface acoustic wave excited by the surface acoustic wave detecting means to be detected, the more the physical properties of the surface acoustic wave from the excitation to the detection of the surface acoustic wave. Therefore, the accuracy of various sensors using surface acoustic wave elements is increased.

  However, in such a conventional plate-shaped surface acoustic wave element, since the piezoelectric body disposed on the flat substrate is flat, the surface acoustic wave excited by the surface acoustic wave excitation means on the upper surface of the piezoelectric body is provided. Diffuses in a direction perpendicular to the propagation direction while propagating toward the surface acoustic wave detecting means along the upper surface of the flat piezoelectric body, and loses its energy. Accordingly, the distance between the surface acoustic wave excitation means and the surface acoustic wave detection means that can be set on the upper surface of the flat piezoelectric body is naturally limited.

  If the surface area of the flat substrate is increased by increasing the energy of the high-frequency current supplied to the surface acoustic wave excitation means, the distance can be increased, but the power required for driving the surface acoustic wave element increases and the elasticity is increased. The external dimensions of the surface acoustic wave device are increased.

  International Publication WO 01/45255 (Patent Document 1) places interdigital electrodes as surface acoustic wave / excitation / detection means on the surface of a spherical substrate capable of exciting and propagating surface acoustic waves. The frequency and width of the surface acoustic wave excited on the surface of the substrate by the interdigital electrode and the radius of the substrate (the surface acoustic wave in a direction orthogonal to the direction of propagation of the surface acoustic wave on the surface of the substrate along the surface of the substrate) By setting the beam width dimension) to a predetermined condition, a surface acoustic wave having a predetermined frequency and a predetermined width excited on the surface of the substrate with a predetermined radius by the interdigital electrode is applied to the surface of the substrate. It is theoretically possible to propagate infinitely without spreading in the direction orthogonal to the direction of propagation along the surface of the substrate, and thus it is possible to circulate repeatedly. It is.

  The trajectory of the surface acoustic wave that circulates around the surface of the spherical substrate is within a region where a part of the sphere including the maximum outer circumference of the spherical substrate is continuous in an annular shape on the surface of the spherical substrate. This area is called a surface acoustic wave circuit. Such a conventional surface acoustic wave device using a spherical base body generates a large number of surface acoustic waves along the surface acoustic wave circuit without diffusing in the direction intersecting the extending direction of the surface acoustic wave circuit. The surface acoustic wave can be rotated (that is, after the interdigital electrode excites the surface acoustic wave until the interdigital electrode cannot accurately detect the surface acoustic wave that circulates the surface acoustic wave circuit). Therefore, the degree of change in the surface acoustic wave phase and the change in the intensity of the surface acoustic wave that accompany the increase in the number of turns is more obvious, and these levels are measured more precisely. You will be able to

  The degree of change in the surface acoustic wave phase and the change in the intensity of the surface acoustic wave are the same as the degree of change in the environment in which the surface acoustic wave circuit of the spherical surface acoustic wave element is in contact (for example, an increase in gas concentration). Correspond. Therefore, measuring the various degrees described above means measuring changes in the environment in which the surface acoustic wave circuit of the spherical surface acoustic wave element is in contact.

  Here, the environmental change described above is nothing but a change in the amount of various substances contained in the environment. Therefore, the surface acoustic wave circuit is sensitive to the predetermined substance to be informed of the change in the quantity, and By providing a sensitive element that has a predetermined effect on the surface acoustic wave that circulates the corresponding surface acoustic circuit according to the degree of sensitivity, the change in the amount of a given substance, that is, the change in the environment, can be made more precise. It can be measured.

  A spherical surface acoustic wave element in which such a sensitive element is provided as a film in a surface acoustic wave circuit is known, for example, from Japanese Patent Application No. 2004-108236 (Patent Document 2). Japanese Patent Application No. 2004-108236 discloses palladium as a sensitive film for hydrogen, platinum as a sensitive film for ammonia, tungsten oxide as a sensitive film for hydrogen compounds, and carbon monoxide, carbon dioxide, sulfur dioxide, and nitrogen dioxide. Phthalocyanine is illustrated as a sensitive film for the above.

  For example, Japanese Patent Application No. 2004-104139 (Patent Document 3) discloses a surface acoustic wave element having a plurality of surface acoustic wave peripheral circuits in which a part of a sphere continues in an annular shape. In this publication, when the temperature of the substrate of the surface acoustic wave element changes due to a change in the ambient temperature of the surface acoustic wave element, the physical properties (for example, density and elastic constant) of the material of the substrate change. Changes in the propagation speed and intensity of the surface acoustic wave propagating through the circumferential circuit, and finally measurement results of changes in the environment in which the surface acoustic wave circuit is in contact, obtained by measuring the propagation speed and intensity of the surface acoustic wave It is described that it affects. In order to eliminate such influences, one of a plurality of surface acoustic wave peripheral circuits should be used to calibrate changes in the propagation speed and intensity of surface acoustic waves due to the influence of ambient temperature changes. It is described.

  Note that the phase in the high-frequency signal generally means the temporal position of the signal at the time when a predetermined time is defined. The phase measurement in the output measurement of the spherical surface acoustic wave element is performed by calculating the time position (phase) of the high-frequency signal output from the spherical surface acoustic wave element at the time when a predetermined time has elapsed from the time when the surface acoustic wave is excited. It is usually used to measure using analysis, quadrature detection, wavelet transform, etc., and the propagation (circulation) velocity of the surface acoustic wave can be directly measured from the measurement. Alternatively, for example, the time at which the spherical surface acoustic wave element has finished outputting a predetermined number of times (the time at which the predetermined number of laps have been completed) is obtained, and the time distance from the lap start time can also be obtained. In this invention, it is not excluded to obtain information on the propagation speed of surface acoustic waves.

International Publication WO 01/45255 Japanese Patent Application No. 2004-108236 Japanese Patent Application No. 2004-104139

  When a piezoelectric crystalline material such as quartz is used as the spherical substrate, for example, along the maximum outer peripheral line on the surface of the piezoelectric crystalline material corresponding to the equator when the crystal axis of the piezoelectric crystalline material is regarded as the ground axis. It is well known that if a surface acoustic wave is excited, the surface acoustic wave can be efficiently circulated around the maximum outer circumferential line. The substrate can also be produced by coating a surface of a spherical core material, which cannot excite surface acoustic waves, with a material capable of exciting surface acoustic waves. At present, an interdigital electrode as a surface acoustic wave / excitation / detection means can be accurately formed at a predetermined position on the surface of a substrate having a diameter of about 1 mm by a printing technique such as photolithography. .

  This means that a large amount of spherical surface acoustic wave elements having a diameter of 5 mm or less and, in some cases, about 1 mm can be stably supplied at low cost.

  By creating an environment detection device that detects various conditions in an environment where a plurality of small-diameter spherical surface acoustic wave elements are used, a small size and high accuracy It is possible to provide an environmental detection device.

  However, maintaining the small-diameter spherical surface acoustic wave elements in a predetermined arrangement as described above is a complicated operation.

  The present invention has been made under the above circumstances, and the object of the present invention is to easily hold the spherical surface acoustic wave elements in a predetermined arrangement even if the spherical surface acoustic wave elements have a small diameter. A spherical surface acoustic wave element holding device is provided.

  In order to achieve the above-mentioned object of the present invention, a spherical surface acoustic wave element holding device according to one concept of the present invention is: a spherical surface that extends continuously in an annular shape, and a surface acoustic wave A substrate including a surface having at least one surface acoustic wave circuit in which the excited surface acoustic wave can circulate in the extending direction; and provided in the surface acoustic wave circuit on the surface of the substrate. Surface acoustic wave / excitation / detection means for generating surface acoustic waves by exciting surface acoustic waves based on high-frequency signals and causing them to circulate along the corresponding surface acoustic wave circuit and detecting the surface acoustic waves that circulate. And a sensitivity that is provided in the surface acoustic wave circuit and is sensitive to a predetermined substance and has a predetermined influence on the surface acoustic wave that circulates the surface acoustic wave circuit corresponding to the degree of sensitivity to the predetermined substance. With elements and; The surface acoustic wave / excitation / detection means includes a plurality of spherical surface acoustic wave elements in a predetermined arrangement, including first and second electrodes disposed on both sides of the surface acoustic wave circuit on the surface of the substrate. To do.

The spherical surface acoustic wave element holding device includes: a first terminal on which a first electrode of a surface acoustic wave / excitation / detection unit of a plurality of spherical surface acoustic wave elements is placed and electrically connected to the first electrode; A first holding unit including; while the first electrode of the surface acoustic wave / excitation / detection means of the plurality of spherical surface acoustic wave elements is placed and electrically connected to the first terminal of the first holding unit, A second holding unit including a second terminal mounted on the second electrode of the surface acoustic wave / excitation / detection means of the plurality of spherical surface acoustic wave elements and electrically connected to the second electrode; Pressing and fixing means for fixing the holding part to the first holding part in a state of pressing the holding part toward the first holding part;
It is characterized by having.

  A spherical surface acoustic wave element holding device according to one concept of the present invention, characterized in that it is configured as described above, has such a spherical surface acoustic wave element even if the spherical surface acoustic wave element has a small diameter. It can be easily held in a predetermined arrangement.

FIG. 1 is a perspective view schematically showing one of a plurality of known spherical surface acoustic wave elements held in a predetermined arrangement in the spherical surface acoustic wave element holding device according to the first embodiment of the present invention. . FIG. 2 is a perspective view showing a first holding unit with a peripheral member in the spherical surface acoustic wave element holding device according to the first embodiment of the present invention. FIG. 2 is a perspective view schematically showing a state before spherical surface acoustic wave elements are held in a predetermined arrangement. (A) is a schematic longitudinal cross-sectional view of the 1st holding | maintenance part with the surrounding member of the spherical surface acoustic wave element holding | maintenance apparatus of FIG. 2; (B) is the spherical shape illustrated in (A) In the surface acoustic wave element holding device, a plurality of the spherical surface acoustic wave elements of FIG. 1 are placed in a predetermined arrangement in the region of the first holding portion surrounded by the surrounding members, and the surface acoustic waves of the plurality of spherical surface acoustic wave elements are arranged. FIG. 6 is a schematic longitudinal sectional view showing a state in which the first electrode of the excitation / detection means is electrically connected to the first terminals of the predetermined array in the region of the first holding unit; , (B) Schematic showing a state in which the opening at the extending end of the peripheral member of the first holding portion of the spherical surface acoustic wave element holding device shown in FIG. 5B is covered with the second holding portion of the conductive material member. It is a longitudinal cross-sectional view; (D) is a spherical surface acoustic wave element holding device as illustrated in (C). FIG. 3 is a schematic longitudinal sectional view showing a state in which the second holding part of the conductive material member covering the opening of the extending end of the surrounding member of the one holding part is further covered with a filter; and (E) is ( D) The second holding part and the filter that cover the opening of the extending end of the peripheral member of the first holding part of the spherical surface acoustic wave element holding device as shown in FIG. A plurality of spherical surface acoustic wave elements of FIG. 1 fixed in a pressed state and placed in a predetermined arrangement in the region of the first holding part surrounded by the surrounding members are a first holding part and a second holding part. A schematic longitudinal section showing a state in which the second electrodes of the surface acoustic wave / excitation / detection means of the plurality of spherical surface acoustic wave elements are electrically connected to the second terminal of the second holding unit. FIG. FIG. 4 is a schematic perspective view of the spherical surface acoustic wave element holding device in the state shown in FIG. FIG. 5 is a schematic longitudinal sectional view showing a modification of the pressing and fixing means of the spherical surface acoustic wave element holding device according to the first embodiment of the present invention in the same state as FIG. (A) is a schematic plan view of a first modification of the second holding portion of the spherical surface acoustic wave element holding device according to the first embodiment of the present invention; and (B) It is a schematic plan view of the 2nd modification of the 2nd holding | maintenance part of the spherical surface acoustic wave element holding device according to 1st Embodiment of invention. 1A shows a spherical surface acoustic wave element holding device according to a second embodiment of the present invention, in which a plurality of spherical surface acoustic wave elements of FIG. 1 are placed in a predetermined arrangement in a predetermined region of the first holding portion. The first electrode of the surface acoustic wave / excitation / detection means of the plurality of spherical surface acoustic wave elements is electrically connected to the first terminals of the predetermined array in the predetermined region of the first holding unit. FIG. 2B is a schematic longitudinal sectional view showing a plurality of spherical surface acoustic wave elements mounted in a predetermined arrangement in a predetermined region of the first holding portion as shown in FIG. It is a schematic longitudinal cross-sectional view which shows the state by which the 2nd holding part of the electroconductive material member was mounted in the 2nd electrode of the surface acoustic wave and excitation / detection means of (C); As shown in the figure, the spherical surface acoustic wave element holding device is mounted in the predetermined area of the first holding portion in the predetermined arrangement. The second holding portion placed on the second electrode of the surface acoustic wave / excitation / detection means of the plurality of spherical surface acoustic wave elements is fixed in a state of being pressed toward the first holding portion by the pressing fixing means. A plurality of spherical surface acoustic wave elements mounted in the predetermined arrangement in the predetermined region of the first holding unit between the first holding unit and the second holding unit, and a plurality of spherical elastic surfaces FIG. 6 is a schematic longitudinal sectional view showing a state in which the second electrode of the surface acoustic wave / excitation / detection means of the wave element is electrically connected to the second terminal of the second holding unit; and (D) It is a schematic top view of the 2nd holding | maintenance part used in the spherical surface acoustic wave element holding | maintenance apparatus according to 2nd Embodiment of this invention illustrated in (A) thru | or (C). FIG. 8 is a perspective view schematically showing the first holding unit and the second holding unit of the spherical surface acoustic wave element holding device according to the third embodiment of the present invention in a state where they are separated from each other. FIG. 9 is a perspective view schematically showing the first holding unit and the second holding unit with surrounding members of the spherical surface acoustic wave element holding device according to the fourth embodiment of the present invention, separated from each other. It is. FIG. 9A shows a first surface of the first holding unit in which the first electrode of the surface acoustic wave / excitation / detection means is placed in a predetermined region of the first holding unit of the spherical surface acoustic wave element holding device of FIG. A plurality of the spherical surface acoustic wave elements of FIG. 1 in a state of being electrically connected to the first terminals of the predetermined array in the region are replaced with the peripheral members of the spherical surface acoustic wave element holding device of FIG. 2 is a schematic longitudinal sectional view showing a state covered by two holding portions; and (B) is a predetermined region of the first holding portion of the spherical surface acoustic wave element holding device shown in FIG. 1 is fixed to the second electrode of the surface acoustic wave / excitation / detection means of the plurality of spherical surface acoustic wave elements shown in FIG. The second holding part is pressed and electrically connected, and the predetermined area of the first holding part is Is a schematic vertical sectional view showing a holding state between a plurality of spherical surface acoustic wave element is mounted first holding portion and the second holding portion in sequence. FIG. 11 shows the surface acoustic wave / excitation / detection means for the first terminals in a predetermined arrangement in a predetermined region of the first holding portion of the spherical surface acoustic wave element holding device according to the fifth embodiment of the present invention. 1 is fixed to the second electrode of the surface acoustic wave / excitation / detection means of the plurality of spherical surface acoustic wave elements shown in FIG. FIG. 2 is a perspective view schematically showing a state in which a plurality of spherical surface acoustic wave elements of FIG. 1 are held between a first holding part and a second holding part by pressing a second holding part. FIG. 12 shows the second holding part and the filter covering the opening of the extending member of the peripheral part of the first holding part of the spherical surface acoustic wave element holding device according to the first embodiment of the present invention by the pressing and fixing means. FIG. 5 is a schematic longitudinal sectional view showing a state in which a plurality of other known spherical surface acoustic wave elements are held in a predetermined arrangement between the first holding part and the second holding part that are fixed in the above state.

[First Embodiment]
FIG. 1 schematically shows one of a plurality of known spherical surface acoustic wave elements 10 held in a predetermined arrangement in the spherical surface acoustic wave element holding device according to the first embodiment of the present invention. .

  The spherical surface acoustic wave element 10 includes a base 12 formed in a spherical shape with a predetermined diameter from a piezoelectric crystal material such as quartz. The surface of the substrate 12 is continuously extended in an annular shape by a part of a spherical shape on the surface thereof, and the surface acoustic wave that can be circulated in the extending direction is excited by the surface acoustic wave. At least one circuit 14 is provided. In the case of the substrate 12 formed in a spherical shape with a predetermined diameter from a piezoelectric crystal material such as quartz, the maximum on the surface of the piezoelectric crystal material corresponding to the equator when the crystal axis of the piezoelectric crystal material is regarded as the ground axis. If a surface acoustic wave is excited along a perimeter line (a line where the crystal plane intersects a spherical surface), the surface acoustic wave can be efficiently circulated along the maximum perimeter line, and a surface acoustic wave circuit 14 is along the maximum outer peripheral line.

  The spherical surface acoustic wave element 10 is further provided in the surface acoustic wave circuit 14 on the surface of the substrate 12, and the surface acoustic wave excited by exciting the surface acoustic wave based on the high frequency signal is applied to the corresponding surface acoustic wave circuit 14. A surface acoustic wave / excitation / detection means 16 that circulates along and detects a surface acoustic wave that has circulated and generates a received signal; and is provided in the surface acoustic wave circuit 14 and is sensitive to a predetermined substance and sensitive to a predetermined substance A sensitive element 18 having a predetermined influence on the surface acoustic wave that circulates the surface acoustic wave circuit 14 corresponding to the degree of the surface acoustic wave.

  In this embodiment, the surface acoustic wave / excitation / detection means 16 is composed of interdigital electrodes (also called comb electrodes), and is arranged on both sides of the surface acoustic wave circuit 14 on the surface of the substrate 12. The first and second electrodes 16a and 16b are included. The first and second electrodes 16a and 16b extend from the interdigital electrode so as to move away from each other on both sides of the surface acoustic wave circuit 14, and the respective protruding ends of the first and second electrodes 16a and 16b extend the crystal axis of the substrate 12 of the piezoelectric crystalline material. It is arranged at a position corresponding to the North Pole and South Pole when viewed as the earth axis.

  2A and 3A schematically show the first holding unit 20 included in the spherical surface acoustic wave element holding device according to the first embodiment of the present invention. In this embodiment, the 1st holding | maintenance part 20 is comprised with the wiring board, and the wiring board contains the some 1st terminal 22 mutually independent on one surface.

  The plurality of first terminals 22 are arranged in a predetermined arrangement on one surface of the wiring board. In this embodiment, the predetermined array is annular or angular. The plurality of first terminals 22 are connected to a predetermined wiring on the other surface of the wiring board by conducting wires extending through the plurality of through holes formed in the predetermined arrangement on the wiring board.

  One surface of the wiring board as the first holding portion 20 has an annular peripheral member 24 that surrounds the plurality of first terminals 22 and extends away from the one surface. The extension length of the peripheral member 24 from one surface of the wiring board as the first holding unit 20 is set to be larger than the diameter of the surface acoustic wave element 10 shown in FIG. The peripheral member 24 of this embodiment is made of an airtight material without electrical conductivity, and the peripheral member 24 is concentrically arranged with respect to the arrangement of the plurality of first terminals 22 on the one surface. Yes.

  One end of the fixed column 26 is fixed to the center of the arrangement of the plurality of first terminals 22 in the first holding unit 20, which is also the center of the peripheral member 24 in this embodiment. The other end of the fixed column 26 has the other end that extends away from the one surface of the wiring board as the first holding unit 20. The other end portion of the fixed column 26 is located farther than the extending end of the peripheral member 24 with respect to one surface of the wiring board as the first holding portion 20. In this embodiment, the fixed column 26 is made of a conductive material, such as metal, and a male screw is formed on the outer peripheral surface of the other end, and the one end is grounded.

  As shown in FIG. 2B, the first electrode 16 a of the surface acoustic wave element 10 shown in FIG. 1 is arranged in the arrangement of the plurality of first terminals 22 of the first holding unit 20. Mounted and electrically connected. The surface acoustic wave element 10 is moved from a storage location (not shown) to the first terminal 22 by, for example, a known suction chuck using negative pressure. The surface acoustic wave element 10 having the first electrode 16 a placed on the first terminal 22 does not contact the surrounding member 24.

  Next, as shown in FIG. 3C, the second holding portion 28 in which the through hole 28a into which the other end of the fixed column 26 is inserted is formed in the through hole 28a. It is placed on the extended end of the peripheral member 24 with the other end inserted. The second holding portion 28 has substantially the same planar shape as the extended end of the peripheral member 24, and the periphery is placed on the extended end of the peripheral member 24, thereby opening the extended end of the peripheral member 24. It is blocking. However, the second holding portion 28 has a ventilation gap (not shown), and the ventilation gap is surrounded by the predetermined region of the first holding portion 20, the surrounding member 24, and the second holding portion 28. The space is communicated with the external space.

  In this embodiment, the second holding portion 28 includes a plate-shaped portion that can be elastically deformed, and further, a plurality of spherical shapes in a predetermined arrangement in a predetermined region surrounded by the peripheral member 24 in the first holding portion 20. The surface acoustic wave element 10 is formed of a conductive material, for example, a metal so as to provide a second terminal opposed to each second electrode 16b.

  Next, as shown in FIG. 3D, the filter 30 in which the through hole 30a into which the other end of the fixed column 26 is inserted is formed in the filter 30 and the other end of the fixed column 26 is inserted into the through hole 30a. Is overlapped with the second holding unit 28 in a state where is inserted. The filter 30 allows gas to pass through but does not pass foreign matters other than the gas in the gas, such as dust and dirt.

  Finally, the male screw at the extended end portion of the fixed column 26 protruding to the external space through the second holding portion 28 supported on the extended end of the peripheral member 24 and the through holes 28a and 30a of the filter 30. As shown in FIG. 3E and FIG. 4, the nut 32 is screwed into the filter 30 and the peripheral portions of the through holes 30a and 28a of the second holding portion 28 as shown in FIG. The filter 30 and the second holding part 28 are fixed to the first holding part 20 through the extending end of the surrounding member 24 while being pressed toward the first side. Here, the combination of the fixed column 26 and the nut 32 screwed into the male screw at the extending end of the fixed column 26 is the first holding in a state where the second holding unit 28 is pressed toward the first holding unit 20. A pressing and fixing means for fixing to the portion 20 is configured.

  At this time, the second holding portion 28 of the electrically conductive material that has been elastically deformed is each of the plurality of spherical surface acoustic wave elements 10 in a predetermined arrangement in a predetermined region surrounded by the peripheral member 24 in the first holding portion 20. The second electrode 16b is mounted and electrically connected to provide a common second terminal for the second electrodes 16b of the plurality of spherical surface acoustic wave elements 10. The second holding portion 28 is also electrically connected to a fixed column 26 made of a conductive material, for example, metal, through the inner edge of the central through hole 28 a, and is connected via the fixed column 26. Grounded.

  The periphery of the filter 30 pressed toward the first holding portion 20 together with the second holding portion 28 by the nut 32 screwed into the male screw at the extending end portion of the fixed column 26 is lifted from the extending end of the surrounding member 24. In order to reliably prevent a gap from being formed between the extending end and the periphery of the filter 30, it is preferable that the periphery of the filter 30 is in close contact with the extending end of the peripheral member 24 by a known close contact means. Such close contact means includes, for example, an adhesive, a double-sided tape, and the like, while the periphery of the filter 30 is pressed against the extended end of the peripheral member 24 by the same annular presser as the extended end of the peripheral member 24. And fixing the tail brace to the extending end of the peripheral member 24 using a fixing screw or a fixing pin.

  The lead wire (not shown) electrically connected to the plurality of first terminals 22 of the first holding unit 20 as described above is electrically connected to a high-frequency burst signal generator (not shown) and a well-known measurement means (not shown). The known measuring means (not shown) is further connected to known display means (not shown).

  The known high-frequency burst signal generator (not shown) described above transmits a high-frequency burst signal to the surface acoustic wave / excitation / detection means 14 of the plurality of spherical surface acoustic wave elements 10 via the lead (not shown) and the plurality of first terminals 22 described above. As a result, the surface acoustic wave / excitation / detection means 14 excites the surface acoustic wave to the surface acoustic wave circuit 14 of the corresponding spherical surface acoustic wave element 10 and converts the surface acoustic wave to the surface acoustic wave circuit 14. To go around. Thereafter, a known measuring means (not shown) receives a received signal received from a surface acoustic wave that has circulated the surface acoustic wave circuit 14 of the spherical surface acoustic wave element 10 corresponding to the surface acoustic wave / excitation / detection means 14 a predetermined number of times. From the above, a change in the above-described conventional characteristic of the surface acoustic wave that has been circulated a predetermined number of times is measured, and the measurement result is displayed on a known display means (not shown).

  The sensitive elements 18 provided in the surface acoustic wave circuit 14 of the plurality of spherical surface acoustic wave elements 10 are sensitive to different gases. Therefore, a measurement result measured by a known measuring means (not shown) from a surface acoustic wave obtained by circulating the surface acoustic wave circuit 14 of the plurality of spherical surface acoustic wave elements 10 by a predetermined number of times is a mutual result that is sensitive to the plurality of sensitive elements 18. The concentration of different types of gases.

  By incorporating the spherical surface acoustic wave element 10 in which the sensitive element 18 is not provided in the surface acoustic wave circuit 14 into the plurality of spherical surface acoustic wave elements 10, the surface acoustic wave circuit 14 due to the influence of only the temperature change. A known measuring means (not shown) can know the change in the characteristics of the surface acoustic wave that has been rotated a predetermined number of times. A known measuring means (not shown) is based on the change in the characteristics of the surface acoustic wave due to only the temperature change. The spherical surface acoustic wave element 10 in which the sensitive element 18 is provided in the surface acoustic wave circuit 14 is used. A change in the characteristics of the surface acoustic wave due to the influence of only the temperature change can be removed from the measurement result from the surface acoustic wave that has rotated the surface acoustic wave circuit 14 a predetermined number of times. That is, it is possible to measure the concentrations of different types of gases sensitive to the plurality of sensitive elements 18 more precisely.

  In this embodiment, the peripheral member 24 is formed of an airtight material that does not have conductivity. However, the peripheral member 24 may be formed of a breathable material that does not have conductivity. Such a breathable material can protect the plurality of spherical surface acoustic wave elements 10 from an external force, and adheres to the plurality of spherical surface acoustic wave elements 10 with foreign matters other than gas in the external space, such as dust and dirt. It can be prevented to some extent.

[Modification of the pressing and fixing means of the first embodiment]
FIG. 5 schematically shows a modification of the pressing and fixing means of the spherical surface acoustic wave element holding device according to the first embodiment of the present invention in the same state as in FIG.

  The pressing and fixing means of this modification is provided by a headed fixing pin 40 made of a conductive material such as metal. The fixed pin 40 with a head is inserted into the second holding portion 28 and the through hole 30a and 28a in the center of the filter 30 with the periphery placed on the extending end of the surrounding member 24, and the first holding portion is further inserted. 20 is inserted into a through hole 20a formed at the center of a predetermined arrangement of a plurality of first terminals 22 in a predetermined region surrounded by a peripheral member 24, and finally a headed fixing pin outside the through hole 20a. The distal end portion 40a is fixed to the first holding portion 20 by pushing and expanding the diameter as shown in FIG.

  At this time, the head 40 b of the fixed pin 40 with the head is the periphery of the plate-like portion of the second holding portion 28 and the periphery of the through holes 28 a and 20 a at the center of the filter 30. Is pressed toward the first holding unit 20, and the second holding unit 28 is applied to the second electrodes 16 b of the plurality of spherical surface acoustic wave elements 10 placed in a predetermined arrangement on the first holding unit 20 as described above. It is placed and electrically connected to the second electrode 16b. Further, the distal end portion 40a of the headed fixing pin 40 whose diameter is increased is pressed against the ground lead wire provided on the first holding portion 20 and is electrically grounded.

  In addition to this, as a pressing and fixing means, although not shown, instead of the combination of the male screw at the extending end of the fixed column 26 and the nut 32, the extending end of the fixed column 26 penetrates in the radial direction of the fixed column 26. A combination of a through hole formed so as to be fixed and a fixing pin inserted into the through hole can also be used.

[Modification of Second Holding Unit of First Embodiment]
FIG. 6A schematically shows a plan view of the first modification of the second holding portion 28 of the spherical surface acoustic wave element holding device according to the first embodiment of the present invention described above. FIG. 6B is a schematic plan view of the second modification of the second holding portion 28 of the spherical surface acoustic wave element holding device according to the first embodiment of the present invention described above. Is shown in

  The plate-like portion of the second holding portion 28 ′ according to the first modification is placed in a predetermined arrangement on the first holding portion 20 as described above when the periphery is placed on the extending end of the surrounding member 24. The plurality of portions 28 ′ b corresponding to the second electrodes 16 b of the plurality of spherical surface acoustic wave elements 10 placed are slightly recessed in the direction away from the extending end so as to be in line contact or surface contact with the second electrode 16 b. ing. Further, radial notches 28'c for facilitating elastic deformation of the plate-like portion are formed between the plurality of portions 28'b recessed as described above in the plate-like portion of the second holding portion 28 '. ing. Further, a positioning element projecting outward in the radial direction of the plate-like portion, in this modification, a positioning projection 28'd is formed around the plate-like portion of the second holding portion 28 '.

  The plate-like portion of the second holding portion 28 ′ according to the first modification is illustrated as being previously formed at a predetermined position of the extended end when the periphery is placed on the extended end of the peripheral member 24. The positioning element, in this modification, the positioning protrusion, 28'd is fitted in the corresponding positioning element, in this modification, the corresponding positioning recess, so that the first holding portion 20 has a predetermined arrangement as described above. The plurality of concave portions 28 ′ b can always be made to correspond to the second electrodes 16 b of the plurality of spherical surface acoustic wave elements 10 placed thereon, as described above.

  The radial cuts 28'c of the plate-like portion of the second holding part 28 'are pressed by the above-described pressing fixing means so that the periphery of the through hole 28'a at the center of the second holding part 28' faces the first holding part 20. When this is done, the distance at which the periphery elastically deforms toward the first holding portion 20 is expanded, and as a result, a plurality of concave portions as described above between the radial cuts 28'c of the plate-like portion of the second holding portion 28 'are formed. It is ensured that the portion 28 ′ b covers the second electrode 16 b of the corresponding plurality of spherical surface acoustic wave elements 10 and makes line contact or surface contact with the corresponding second electrode 16 b. That is, the plate-like portion of the second holding portion 28 'is reliably electrically connected to the corresponding second electrodes 16b of the plurality of spherical surface acoustic wave elements 10 through the plurality of portions 28'b recessed as described above. It is guaranteed to be done.

  The plate-like portion of the second holding portion 28 ″ according to the second modification is arranged in a predetermined arrangement on the first holding portion 20 as described above when the periphery is placed on the extending end of the surrounding member 24. A circular seat having a diameter slightly smaller than the diameter of the second electrode 16b so as to be in line contact with the second electrode 16b at a plurality of portions corresponding to the second electrode 16b of the plurality of spherical surface acoustic wave elements 10 mounted thereon. A hole 28''b is formed. Further, radial notches 28 ″ c for facilitating elastic deformation of the plate-like portion are formed between the plurality of seating holes 28 ″ b of the plate-like portion of the second holding portion 28 ″. . Further, a positioning element protruding outward in the radial direction of the plate-shaped portion, in this modified example, a positioning projection, 28 ″ ″ is formed around the plate-shaped portion of the second holding portion 28 ″. Yes.

  The plate-like portion of the second holding portion 28 ″ according to the second modified example is formed in advance at a predetermined position of the extending end when the periphery is placed on the extending end of the surrounding member 24. The positioning element, which is a positioning protrusion in this modification, is fitted into a corresponding positioning recess which is not provided, in this modification, a predetermined projection as described above on the first holding portion 20. A plurality of seating holes 28 ′ b can always be reliably associated with the second electrodes 16 b of the plurality of spherical surface acoustic wave elements 10 placed in an array.

  The radial notch 28 ″ c of the plate-like portion of the second holding portion 28 ″ is located around the through hole 28 ″ a at the center of the second holding portion 28 ″ by the above-described pressing and fixing means. When the pressure is applied to 20, the distance that the periphery is elastically deformed toward the first holding part 20 is expanded, and as a result, a plurality of radial notches 28''c between the plate-like portions of the second holding part 28 '' are provided. It is ensured that the seating hole 28 ″ b covers the second electrode 16 b of the corresponding plurality of spherical surface acoustic wave elements 10 and is in line contact with the corresponding second electrode 16 b. That is, the plate-like portion of the second holding portion 28 ″ is reliably electrically connected to the second electrodes 16 b of the corresponding plurality of spherical surface acoustic wave elements 10 through the plurality of seating holes 28 ″ b. Is guaranteed.

[Second Embodiment]
Next, a spherical surface acoustic wave element holding device according to a second embodiment of the present invention will be described with reference to FIGS.

  The main parts of the components of the spherical surface acoustic wave element holding device according to the second embodiment of the present invention are the spherical surface according to the first embodiment of the present invention described above with reference to FIGS. This is the same as the main part of the constituent members of the wave element holding device. Therefore, in the spherical surface acoustic wave element holding device according to the second embodiment, the same constituent members as those of the spherical surface acoustic wave element holding device according to the first embodiment have a spherical shape according to the first embodiment. The same reference numerals as those used for the corresponding structural members in the surface acoustic wave element holding device are attached, and detailed description of these structural members is omitted.

  As apparent from FIGS. 7A and 7D, the spherical surface acoustic wave element holding device according to the second embodiment conforms to the first embodiment described above with reference to FIGS. The spherical surface acoustic wave element holding device is different from the spherical surface acoustic wave element holding device in that the peripheral member 24 surrounding the plurality of first terminals 22 in the predetermined arrangement of the first holding portion 20 is omitted, and the pressing and fixing means together with the nut 32 is provided. A part of the peripheral surface of the male screw at the extending end of the fixed column 26 ′ is cut out flat from the extending end to the base end of the male screw along the longitudinal center line of the fixed column 26 ′. The so-called orientation flat portion 26'a is provided, and the second surface acoustic wave element holding device according to the first embodiment described above with reference to FIGS. Like the holding part 28, it is disc-shaped with a conductive material. The planar shape and size of the through hole 36a at the center of the formed second holding portion 36 are the same as the cross-sectional shape and size of the male screw at the extending end portion of the fixed column 26 '(that is, called the orientation flat). The positioning flat portion 36b is formed).

  As shown in FIG. 7A, the fixing column 26 'fixed to the first holding unit 20 in the first holding unit 20 of the spherical surface acoustic wave element holding device according to the second embodiment. The first electrodes of the surface acoustic wave / excitation / detection means 16 of the plurality of spherical surface acoustic wave elements 10 of FIG. 1 are connected to the plurality of first terminals 22 arranged in a predetermined arrangement in a predetermined region centered on one end. While the 16a is placed and electrically connected to the plurality of first terminals 22, the male screw at the extension end, which is the other end of the fixed column 26 ', penetrates the center of the second holding portion 36. When the holes 36a are covered, the second holding portion 36 has a plurality of spherical elastic elements placed in a predetermined arrangement in a predetermined region of the first holding portion 20 as shown in FIG. The second surface 16b of the surface acoustic wave / excitation / detection means 16 of the surface acoustic wave element 10 is shown in FIG. It moves along the longitudinal direction of the fixed column 26 ′ on the peripheral surface of the male screw at the extending end of the fixed column 26 ′ until it is placed as it is.

  After that, as shown in FIG. 7C, the nut 32 is attached to the male screw at the extending end portion of the fixed column 26 ′ protruding to the external space through the through hole 36 a of the second holding portion 36. To fix the second holding portion 28 to the first holding portion 20 via the fixing column 26 ′ while pressing the peripheral portion of the through hole 36 a of the second holding portion 36 toward the first holding portion 20. To do.

  As a result, the plurality of first electrodes 16a of the surface acoustic wave / excitation / detection means 16 are placed on the first terminals 22 placed in the predetermined arrangement in the predetermined area of the first holding unit 20. The spherical surface acoustic wave element 10 is held between the first holding part 20 and the second holding part 36, and the second electrode 16 b of the surface acoustic wave / excitation / detection means 16 of the plurality of spherical surface acoustic wave elements 10. Is electrically connected to the second holding portion 36 made of a conductive material.

  At this time, the second holding portion 36 of the elastically deformed conductive material provides a common second terminal for each of the second electrodes 16b of the plurality of spherical surface acoustic wave elements 10, and the second holding portion 36 Also, it is electrically connected to a fixed column 26 'formed of a conductive material, for example, metal, through the inner edge of the central through hole 36a, and is grounded through the fixed column 26'.

  The combination of the positioning flat part 26 ′ a on the peripheral surface of the male screw at the extending end of the fixed column 26 ′ and the positioning flat part 36 b of the through hole 36 a in the center of the second holding part 36 is the combination of the second holding part 36. While the nut 32 is screwed into the male screw at the extension end of the fixed column 26 ′ in order to press the peripheral portion of the through hole 36 a toward the first holding portion 20, the extension end of the fixed column 26 ′ The second holding portion 36 is prevented from rotating around the through hole 36a on the peripheral surface of the male screw. As a result, when the rotation occurs, the spherical surface acoustic wave element 10 placed on the first terminal 22 arranged in the predetermined arrangement in the predetermined region of the first holding unit 20 is the first. The first electrode 16a of the surface acoustic wave / excitation / detection means 16 rolling from one terminal 22 is moved away from the corresponding first terminal 22, or the spherical surface acoustic wave element 10 is in the predetermined region of the first holding part 20 It is prevented that the second electrode 16b of the surface acoustic wave / excitation / detection means 16 of the spherical surface acoustic wave element 10 is moved away from the second holding portion 36 as the second terminal at the same time. The

  The second holding portion 36 of this embodiment is arranged on the first terminal 22 arranged in the predetermined arrangement in the predetermined region of the first holding portion 20 as shown in FIG. While the first electrode 16 a of the surface acoustic wave / excitation / detection means 16 is placed on the second electrode 16 b of the surface acoustic wave / excitation / detection means 16 of the spherical surface acoustic wave element 10. As shown in FIG. 7D, between the plurality of regions in contact with the second electrode 16 b of the surface acoustic wave / excitation / detection means 16 of the spherical surface acoustic wave element 10, 2 Radial cuts 36c for facilitating elastic deformation of the holding portion 36 are formed.

  The radial notches 36c of the second holding part 36 are formed in the periphery when the periphery of the through hole 36a at the center of the second holding part 36 is pressed toward the first holding part 20 by the nut 32 of the pressing and fixing means described above. 1 The distance of elastic deformation toward the holding portion 20 is increased, and as a result, the plurality of regions between the radial cuts 36c of the second holding portion 236 are surely attached to the second electrodes 16b of the plurality of spherical surface acoustic wave elements 10 corresponding thereto. To make point contact with the corresponding second electrode 16b.

  As a structure for preventing rotation around the through hole 36a of the second holding portion 36 with respect to the peripheral surface of the male screw at the extending end of the fixed column 26 ', the male screw at the extending end of the fixed column 26' is used. Instead of the above-described combination of the positioning flat portion 26'a on the circumferential surface of the peripheral surface and the positioning flat portion 36b of the through hole 36a in the center of the second holding portion 36, the fixed column 26 'having a circular cross section is extended. A positioning long groove formed on the peripheral surface of the male screw at the end and extending from the extended end toward the one end along the longitudinal center line of the fixed column 26 ′, and a second holding portion 36 having a circular planar shape. When the through-hole 36a at the center of the second holding portion 36 is covered with the extended end portion of the fixed column 26 'formed at the edge of the through-hole 36a at the center of the center, it is accommodated in the positioning long groove and moves along the positioning long groove You can also use a combination of positioning protrusions to

  However, in order to fix the second holding part 28 to the first holding part 20 via the fixing column 26 ′ in a state where the peripheral part of the through hole 36 a of the second holding part 36 is pressed toward the first holding part 20. Although not shown in the drawings, the pressing and fixing means of the fixing column 26 ′ is arranged in the radial direction of the fixing column 26 ′ at the extending end of the fixing column 26 ′ instead of the combination of the male screw at the extending end of the fixing column 26 ′ and the nut 32. When a structure that does not generate a rotational force such as a combination of a through hole formed so as to penetrate and a fixing pin inserted into the through hole is employed, the extension end portion of the fixing column 26 ′ 2 A structure for preventing rotation around the through hole 36a of the holding portion 36 is not required.

  Further, in the second holding portion 36, between the plurality of radial notches 36c, the surface acoustic wave and excitation are performed on the first terminals 22 arranged in the predetermined arrangement in the predetermined region of the first holding portion 20. In FIG. 6A, in the region of the spherical surface acoustic wave element 10 on which the first electrode 16a of the detection means 16 is placed, the area in contact with the second electrode 16b of the surface acoustic wave / excitation / detection means 16 As in the case of the first modified example of the second holding portion 28 ′ shown in the figure, the surface contact with the second electrode 16 b of the surface acoustic wave / excitation / detection means 16 of the corresponding spherical surface acoustic wave element 10 is ensured. As in the case of the second modification of the second holding portion 28 ″ shown in FIG. 6B, a recess for making line contact is provided, and the corresponding spherical surface acoustic wave element 10 is Reliable line contact with the second electrode 16b of the surface acoustic wave / excitation / detection means 16 It is also possible to or provided with a seating hole for performing.

[Third Embodiment]
FIG. 8 schematically shows the main components of the spherical surface acoustic wave element holding device according to the third embodiment of the present invention.

  The spherical surface acoustic wave element holding device according to the third embodiment of the present invention is different from the spherical surface acoustic wave element holding device according to the first embodiment of the present invention described above with reference to FIGS. The planar shape of the peripheral member 24 ′ surrounding the plurality of first terminals 22 in the predetermined arrangement of the first holding portion 20 is a rectangular ring shape with the fixed column 26 as the center, and such a peripheral member The planar shape of the second holding portion 28 ″ ″ whose periphery is placed on the extended end of 24 ′ also corresponds to the planar shape of the peripheral member 24 ′, and the through hole 28 into which the extended end portion of the fixed column 26 is inserted. ′ ″ ′ Is an angular shape centered on this, and although not shown, the planar shape of the filter overlapping the second holding portion 28 ′ ″ is also the surrounding member 24. It is a square shape corresponding to the planar shape of ′.

  The spherical surface acoustic wave element holding device according to the third embodiment is similar to the spherical surface acoustic wave element holding device according to the first embodiment of the present invention described above with reference to FIGS. Function.

  The plate-like portion of the second holding portion 28 ′ ″ of the spherical surface acoustic wave element holding device according to the third embodiment is also applied to the first modified example described above with reference to FIG. A plurality of recessed portions or radial notches similar to the recessed portions 28'b and the radial cuts 28'c of the plate-like portion of the second holding portion 28 'can be formed, or 6B, a plurality of seats similar to the plurality of seating holes 28 ″ b and the radial cuts 28′c of the plate-like portion of the second holding portion 28 ″ of the second modification described above. Holes and radial cuts can be formed.

  However, the planar shape of the peripheral member 24 ′ of the spherical surface acoustic wave element holding device according to the third embodiment is a rectangular ring shape, and the planar shape of the plate-like portion of the second holding portion 28 ′ ″ is a square shape. Therefore, the plate of the second holding portion 28 ′ of the first modified example described above with reference to FIG. 6A in which the periphery is placed on the extending end surface of the peripheral member 24 whose planar shape is an annular shape. The plate-like portion of the second holding portion 28 ″ of the second modification described above with reference to FIG. 6B and FIG. 6B is circular, so that the peripheral member 24 can be positioned with respect to the extended end surface. The necessary positioning elements, for example, the combination of positioning protrusions and positioning recesses, 28'd and 28 "d, are not necessary.

[Fourth Embodiment]
FIG. 9 schematically shows the first holding unit 20 of the spherical surface acoustic wave element holding device according to the fourth embodiment of the present invention and the second holding unit 52 with the surrounding member 50 separated from each other. Is shown in

  The spherical surface acoustic wave element holding device according to the fourth embodiment is different from the spherical surface acoustic wave element holding device according to the first embodiment of the present invention described above with reference to FIGS. This is a configuration of the second holding unit 52.

  The second holding portion 52 has a plate-like portion having a square planar shape, and has a through hole 52a into which the extended end portion of the fixed column 26 is inserted at the center thereof. A plurality of peripheral members 50 extend from the plurality of linear sides of the second holding portion 52 toward the first holding portion 20. Each extending end of the plurality of peripheral members 50 is bent substantially in parallel with the surface of the first holding portion 20 where the plurality of first terminals 22 are provided in a predetermined arrangement to form a locking claw 50a.

  The second holding portion 52 and the plurality of surrounding members 50 are integrally formed of a conductive material such as metal and can be elastically deformed.

  On the surface of the first holding portion 20 where the plurality of first terminals 22 are provided in a predetermined arrangement, the through-hole 52a of the second holding portion 52 is formed as well shown in FIG. While the extending end portion of the fixed column 26 is inserted and the locking claws 50a at the extending ends of the plurality of peripheral members 50 are in contact with the surface of the first holding portion 20, the respective locking claws 50a. A locking and fixing member 54 is fixed at a position facing the tip of the.

  While the first electrodes 16 a of the plurality of spherical surface acoustic wave elements 10 are placed on the plurality of first terminals 22 of the first holding unit 20, the fixed columns 26 extend into the through holes 52 a of the second holding unit 52. When the end portion is inserted, as shown in FIG. 10A, a plurality of peripheral members that bring the locking claws 50a of the respective extended ends into contact with the surface of the first holding portion 20 50 surrounds the plurality of spherical surface acoustic wave elements 10, and the plate-like portion of the second holding portion 52 is slightly separated from the second electrode 16b of the plurality of spherical surface acoustic wave elements 10 and faces the second electrode 16b. Yes.

  Next, as shown in FIG. 10B, the male end of the extending end of the fixed column 26 projecting outward from the central through hole 52a of the plate-like portion of the second holding portion 52. When the nut 32 is screwed into the screw, the periphery of the through hole 52a of the plate-like portion of the second holding portion 52 is pressed toward the first holding portion 20 and elastically deformed. As a result, the plate-like portion of the second holding portion 52 is in contact with and electrically connected to the second electrodes 16b of the plurality of spherical surface acoustic wave elements 10. The plate-like portion of the second holding portion 52 is also electrically connected to the extended end portion of the fixed column 26 via the nut 32, and the fixed column 26 is fixed to the first holding portion 20 as described above. Is grounded, the plate-like portion of the second holding portion 52 functions as a second terminal for the second electrodes 16b of the plurality of spherical surface acoustic wave elements 10.

  As shown in FIG. 10B, a nut is attached to the male screw at the extending end portion of the fixed column 26 protruding outward from the central through hole 52a of the plate-like portion of the second holding portion 52. When the 32 is screwed and the periphery of the through hole 52a of the plate-like portion of the second holding portion 52 is pressed toward the first holding portion 20 and elastically deformed, a plurality of plate-like portions of the second holding portion 52 are The plurality of peripheral members 50 around the straight line are slid along the surface of the first holding part 20 with the locking claws 50a at the respective extending ends, and are locked to the corresponding locking fixing members 54 on the surface. The fixing member 54 is detachably fixed to the surface of the first holding unit 20.

  In the plate-like portion of the second holding portion 52 of the spherical surface acoustic wave element holding device according to the fourth embodiment, the second holding of the first modification described above with reference to FIG. A plurality of recessed portions or radial notches similar to the recessed portions 28'b and the radial cuts 28'c of the plate-like portion of the portion 28 'can be formed, or alternatively, as shown in FIG. A plurality of seating holes and radials similar to the plurality of seating holes 28''b and the radial notches 28'c of the plate-like portion of the second holding portion 28 '' of the second modification described above with reference to FIG. Can be formed.

[Fifth Embodiment]
FIG. 11 shows the first terminals 22 arranged in a predetermined arrangement in a predetermined region of the first holding unit 20 of the spherical surface acoustic wave element holding device according to the fifth embodiment of the present invention. A second holding portion fixed in a state in which the first holding portion 20 is pressed against the second electrodes 16b of the plurality of spherical surface acoustic wave elements 10 of FIG. 1 is schematically shown in which a plurality of the spherical surface acoustic wave elements 10 of FIG. 1 are held between the first holding part 20 and the second holding part 54.

  In this embodiment, the plurality of first terminals 22 are arranged in a plurality of lines in a straight line in a predetermined region of the first holding unit 20. The second holding portion 58 is formed in a plate shape by a material that is elastically deformable and conductive, such as metal, and the first electrode 16a is mounted on the plurality of first terminals 22 in a predetermined row. The plate-like portion 58a placed on the second electrode 16b of the plurality of spherical surface acoustic wave elements 10 shown in FIG. 1 and the periphery of the plate-like portion 58a extending toward the first holding portion 20 and extending. The end portion is fixed to the first holding portion 20 by a known pressing and fixing means 56 including a conductive welding member such as a fixing pin or a fixing screw or a conductive adhesive or solder. The plate-like portion 54a of the second holding portion 54 is fixed on the first holding portion 20 by the known pressing and fixing means 56, and the second end portion 54a of the second holding portion 54 is formed on the second electrode 16b of the corresponding spherical surface acoustic wave element 10. Spherical elasticity corresponding to the first terminal 22 of the first holding unit 20 while being elastically deformed toward the first holding unit 20 and pressing the second electrode 16b to be surely electrically connected to the second electrode 16b. The surface acoustic wave element 10 is held.

  Since the known pressing and fixing means 56 is grounded at the first holding portion 20, the plate-like portion 58 a of the second holding portion 58 functions as a second terminal for the second electrode 16 b of the corresponding spherical surface acoustic wave element 10. To do.

  The plate-like portion 58a of the second holding portion 58 of the spherical surface acoustic wave element holding device according to the fifth embodiment is also applied to the second modification of the first modification described above with reference to FIG. A plurality of recessed portions or radial notches similar to the recessed portions 28'b or radial notches 28'c of the plate-like portion of the holding portion 28 'can be formed, or FIG. A plurality of seating holes similar to the plurality of seating holes 28 ″ b and the radial cuts 28 ′ c of the second holding portion 28 ″ of the second modified example described above with reference to FIG. Radial cuts can be formed.

  In FIG. 12, in place of the known spherical surface acoustic wave element 10 shown in FIG. 1, another known spherical surface acoustic wave element 10 ′ that can be used is shown in FIG. The state of being held by the spherical surface acoustic wave holding device of the form is schematically shown.

  The spherical surface acoustic wave element 10 ′ includes a plurality of surface acoustic wave peripheral circuits 14 and a plurality of surface acoustic wave / excitation / detection means 16 corresponding thereto. The plurality of second electrodes 16 ′ b of the plurality of surface acoustic wave / excitation / detection means 16 are made common and the second holding portion 28 is elastically contacted, and the plurality of first electrodes 16 ′ a is spherical. The surface acoustic wave element 10 ′ is in contact with and electrically connected to a plurality of first terminals 22 ′ at predetermined positions corresponding to the first holding portion 20.

  A spherical surface acoustic wave element holding device according to the present invention uses a plurality of small-diameter spherical surface acoustic wave elements to detect various situations in an environment where a plurality of small-diameter spherical surface acoustic wave elements are placed. It can be used as a detection device, and the various situations include, for example, various gas concentrations and various biological substance concentrations.

DESCRIPTION OF SYMBOLS 10 ... Spherical surface acoustic wave element, 12 ... Base | substrate, 14 ... Surface acoustic wave circuit, 16 ... Surface acoustic wave excitation / detection means, 16a ... 1st electrode, 16b ... 2nd electrode, 18 ... Sensing element, 20 ... 1st holding | maintenance part, 22 ... 1st terminal, 24 ... surrounding member, 26 ... fixed pillar (press fixing means), 28 ... 2nd holding | maintenance part, 28a ... through-hole, 30 ... filter, 30a ... through-hole, 32 ... nut (Press fixing means),
20a ... through hole, 40 ... headed fixing pin (pressing fixing means), 40a ... tip,
28 '... second holding part, 28'a ... through hole, 28'b ... part, 28'c ... cut, 28'd ... positioning element,
28 ″: second holding portion, 28 ″ a: through hole, 28 ″ b: seating hole, 28 ″ c: notch, 28 ″ d: positioning element 26 ′: fixing column (pressing fixing means), 26'a ... positioning flat part, 36 ... second holding part, 36a ... through hole, 36b ... positioning flat part, 36c ... notch,
24 '... peripheral member, 28'"... second holding part, 28"'a ... through hole,
50 ... Surrounding member, 50a ... Locking claw, 52 ... Second holding portion, 52a ... Through hole, 54 ... Locking fixing member,
56 ... Pressing and fixing means, 58 ... Second holding portion, 58a ... Plate-shaped portion,
10 '... spherical surface acoustic wave element, 16'a ... first electrode, 16'b ... second electrode, 22' ... first terminal

Claims (8)

It has at least one surface acoustic wave circuit that extends continuously in an annular shape by a part of a spherical shape and that can be excited in the direction in which the surface acoustic wave is excited. A substrate including the surface of the substrate; provided in the surface acoustic wave circuit on the surface of the substrate, the surface acoustic wave is excited on the basis of the high-frequency signal, and the excited surface wave is circulated along the corresponding surface wave circuit. A surface acoustic wave / excitation / detection means for detecting a generated surface acoustic wave and generating a received signal; provided in a surface acoustic wave circuit, responding to a predetermined substance and responding to the degree of sensitivity to the predetermined substance A sensitive element that has a predetermined influence on the surface acoustic wave that circulates the surface acoustic wave circuit, and the surface acoustic wave / excitation / detection means is provided on both sides of the surface acoustic wave circuit on the surface of the substrate. Arranged first and first Includes electrodes, a spherical surface acoustic wave element holding device for holding a plurality of the predetermined arrangement of the spherical surface acoustic wave element:
A first holding portion including a first terminal on which the first electrode of the surface acoustic wave / excitation / detection means of the plurality of spherical surface acoustic wave elements is mounted and electrically connected to the first electrode;
While the first electrodes of the surface acoustic wave / excitation / detection means of the plurality of spherical surface acoustic wave elements are placed on and electrically connected to the first terminal of the first holding unit, the plurality of spherical surface acoustic waves are provided. A second holding part including a second terminal mounted on the second electrode of the surface acoustic wave / excitation / detection means of the element and electrically connected to the second electrode; and
Pressure fixing means for fixing the second holding part to the first holding part in a state of pressing the second holding part toward the first holding part;
A spherical surface acoustic wave element holding device comprising: 2. The spherical surface acoustic wave element holding device according to claim 1, wherein the second holding portion includes a plate-like portion provided with a second terminal and elastically deformable. 3. The spherical surface acoustic wave element holding device according to claim 2, wherein the plate-like portion of the second holding portion has a notch that facilitates elastic deformation of the plate-like portion toward the first holding portion. apparatus. One of the first holding part and the second holding part extends toward the other, and is placed on the first terminal of the first holding part, and the first electrode of the surface acoustic wave / excitation / detection means is electrically connected to the first terminal. And the second terminal of the second holding part is mounted on the second electrode of the surface acoustic wave / excitation / detection means and surrounds a plurality of spherical surface acoustic wave elements that are electrically connected to each other. Having a surrounding member, the extending end of the surrounding member is in contact with the other,
The spherical surface acoustic wave element holding device according to any one of claims 1 to 3. The surrounding member extends from the first holding portion toward the second holding portion, the periphery of the second holding portion is supported by the protruding end of the surrounding member, the surrounding member is airtight, and the second holding portion is against the surrounding member. Equipped with a dustproof filter that closes the ventilation gap
The spherical surface acoustic wave element holding device according to claim 4. The pressing and fixing means includes a fixed column including one end fixed to one of the first holding part and the second holding part and the other end fixed to the other of the first holding part and the second holding part. The fixed column is fixed to the other one of the first holding part and the second holding part while the one end part is fixed to one of the first holding part and the second holding part. The spherical surface acoustic wave element holding device according to claim 1, wherein the second holding portion is fixed to the first holding portion while being pressed toward the first holding portion. apparatus. The surrounding member has one of an annular shape and a square ring shape, the second holding portion has one of a circular shape and a square shape, and the plurality of spherical surface acoustic wave elements are The first holding part is arranged in a predetermined arrangement of one of an annular shape and a rectangular ring shape in the area surrounded by the surrounding member, and the annular shape is formed in the area surrounded by the surrounding member in the second holding part And arranged in any one of the ring shape,
The spherical surface acoustic wave element holding device according to claim 4, wherein the spherical surface acoustic wave element holding device is provided. The pressing and fixing means has one end fixed to the center of the area surrounded by the surrounding member in either one of the first holding part and the second holding part, and the periphery in either one of the first holding part and the second holding part. A fixed column including the other end fixed to the center of the region surrounded by the member, and the fixed column is fixed to one of the first holding unit and the second holding unit. Fixing the second holding part to the first holding part in a state of pressing the second holding part toward the first holding part by fixing the other end part to one of the first holding part and the second holding part. The spherical surface acoustic wave element holding device according to claim 7.

Images