JP5181929B2 - Spherical surface acoustic wave device - Google Patents

Description

  The present invention relates to a spherical surface acoustic wave device.

  A surface acoustic wave circuit that is formed continuously in an annular shape by at least a part of a spherical shape and can excite surface acoustic waves, and the excited surface acoustic waves can propagate and circulate in the continuous direction of the ring. A surface acoustic wave propagation substrate included on the outer surface; and disposed on or opposite to the surface acoustic wave circuit of the surface acoustic wave propagation substrate, and the surface acoustic wave circuit is excited by exciting the surface acoustic wave. A surface acoustic wave that propagates in a continuous direction of the ring and circulates, and detects a surface acoustic wave that circulates the surface acoustic wave circuit and generates a received signal corresponding to the surface acoustic wave that has circulated A spherical surface acoustic wave device including a wave / excitation / detection means is already well known, for example, from FIGS. 1 and 7 of Japanese Patent Laid-Open No. 2005-94609 (Patent Document 1).

  The surface acoustic wave propagation substrate is a base formed using a material that cannot excite a surface acoustic wave so that the outer surface includes at least a part that is continuously formed in an annular shape by a part of a spherical shape. It is formed by coating at least the annular portion on the outer surface of the material with a material capable of exciting surface acoustic waves, or at least one spherical shape using a material capable of exciting surface acoustic waves. The outer surface includes a portion that is continuously formed in an annular shape by the portion.

Here, a piezoelectric material is usually used as a material capable of exciting a surface acoustic wave. When the entire surface acoustic wave propagation substrate is formed using a material capable of exciting a surface acoustic wave, a piezoelectric material such as a quartz crystal is used. Piezoelectric crystal materials such as, lithium niobate (LiNbO ₃ ), lithium tantalate (LiTaO ₃ ), langasite (La ₃ Ga ₅ SiO ₁₄ ) and their families are used. In this case, the portion continuously formed in an annular shape by at least a part of the spherical shape is on a line where predetermined crystal planes respectively determined by the piezoelectric crystal material intersect the outer surface, and the annular shape The direction that continues to is the direction in which the above line extends substantially.

  The surface acoustic wave propagation base made of piezoelectric crystal material is usually formed into a spherical shape having a diameter of about 10 mm to about 1 mm in consideration of the manufacturing cost and the frequency at the time of operation.

  The surface acoustic wave / excitation / detection means can have various configurations, and so-called interdigital electrodes (also referred to as comb electrodes) are usually used in consideration of manufacturing cost, device size, conversion efficiency, and the like. The

  Interdigital electrodes have been proposed in various shapes, but the most basic one is a shape in which a plurality of comb-like electrode branches are alternately arranged in combination with a pair of comb-shaped terminal portions. Are formed directly on the outer surface of the surface acoustic wave propagation substrate, for example, by photolithography (photoengraving), or elastically formed on at least a part of the spherical shape. For example, photolithography (photoengraving) is applied to the inner surface of a partially spherical recess formed on the surface of the interdigital electrode support member that is separate from the surface wave propagation substrate and is formed in a shape similar to the above-mentioned portion of the outer surface of the piezoelectric crystal material After being directly formed by the above method, the surface portion of the surface acoustic wave propagation substrate is disposed so as to face the above-mentioned portion via a predetermined gap (1/4 or less of the wavelength of the surface acoustic wave to be excited).

  By applying a high frequency signal having a predetermined frequency in a burst shape between a pair of comb-shaped terminal portions, a surface acoustic wave having a wavelength corresponding to the period length of the plurality of comb-shaped electrode branches is applied to the surface of the surface acoustic wave propagation substrate. The above-described portion of the surface can be excited, and the width of the excited surface acoustic wave corresponds to the length of the portions facing each other in the two adjacent comb-like electrode branches.

  In addition, the wavefront of the surface acoustic wave excited in the direction in which the plurality of comb-like electrode branches of the pair of comb-shaped terminal portions of the interdigital electrode are alternately arranged is the above-described surface of the outer surface of the piezoelectric crystal material. It will be the direction which advances substantially in the part. Therefore, in order to excite the surface acoustic wave by the interdigital electrode on the outer surface of the surface acoustic wave propagation substrate and to propagate the surface acoustic wave in the direction in which the portion continues in an annular shape, The plurality of comb-like electrode branches of the pair of comb-shaped terminal portions of the electrodes must be arranged in the above direction.

  For example, as known from International Publication No. WO 01/45255 A1 (Patent Document 2), the curvature of the portion of the outer surface of the surface acoustic wave propagation substrate and the continuous direction of the portion (that is, excited elasticity) The width of the surface acoustic wave to be excited in the direction orthogonal to the surface wave propagation direction (when the surface acoustic wave / excitation / detection means is an interdigital electrode, multiple electrode branches of the interdigital electrode face each other) And the frequency of the surface acoustic wave to be excited in the above part (surface acoustic wave / arrangement period of plural electrode branches of the interdigital electrode when the excitation / detection means is an interdigital electrode) By setting the item to a predetermined condition and exciting the surface acoustic wave in the continuous direction, the excited surface acoustic wave intersects the continuous direction of the portion along the portion of the outer surface. Direction Can be repeatedly circulated without being greatly diffused in the direction.

  The spherical surface acoustic wave device is provided with a sensitive film that is sensitive to changes in the external environment on the portion of the outer surface of the surface acoustic wave propagation substrate (that is, the surface acoustic wave circuit), and an external environment in contact with the sensitive film, for example, a gas Corresponding to the change in concentration, the propagation speed of surface acoustic waves that circulate around the peripheral circuit and the attenuation rate of vibration energy change, and the peripheral circuit obtained by the output from the surface acoustic wave / excitation / detection means bursts. The change in the external environment, for example, gas concentration, is measured using the time (phase) required to make one round of the surface acoustic wave and the phase and intensity of the surface acoustic wave change every round. It can be used for anything.

  For example, when the gas concentration becomes high, the peripheral speed of the surface acoustic wave that circulates around the peripheral circuit becomes slow due to the influence of the change in the sensitive film corresponding to the concentration change, and as a result, the surface acoustic wave goes around the peripheral circuit once. It takes more time to do. In the same case, a delay (phase delay) occurs in the surface acoustic wave for each round, and the strength decreases.

  Due to the change in environment as described above, the change in the circumferential speed of the surface acoustic wave during one round of the circumference circuit, the change in the time required for the surface acoustic wave to make one round in the circumference circuit, Although the phase delay of the surface acoustic wave and the decrease in strength are small, these changes are superimposed and become larger as the number of times the surface acoustic wave circulates in the peripheral circuit increases. That is, the measurement accuracy of the change is improved.

Therefore, when measuring the change in the external environment using the spherical surface acoustic wave device as described above, the attenuation factor of the vibration energy of the surface acoustic wave that circulates in the peripheral circuit is caused by factors other than the change in the external environment. Obviously, it is not desirable to decrease.
JP 2005-94609 A International Publication WO 01/45255 A1

  For this purpose, it is important to support the surface acoustic wave propagation substrate with a support without attaching anything to the peripheral circuit, and after measuring changes in the external environment using a sensitive film as described above. Needs to be replaced with a surface acoustic wave propagation substrate having a new sensitive film.

  The present invention has been made under the above circumstances, and the object of the present invention is to support a surface acoustic wave propagation substrate with a support without attaching anything to the surface acoustic wave circuit, or to provide an elastic film having a new sensitive film. An object of the present invention is to provide a spherical surface acoustic wave device having a simple configuration that can be easily and quickly replaced with a surface wave propagation substrate.

A spherical surface acoustic wave device according to one concept of the present invention includes: a circular surface continuously configured by at least a part of a sphere, wherein the surface acoustic wave that can be excited and excited is A surface acoustic wave propagation substrate including an outer surface including a surface acoustic wave circuit that can propagate and circulate in a continuous direction; and a surface acoustic wave circuit provided on the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation substrate. Surface acoustic wave / excitation / detection means for exciting and circulating a surface acoustic wave and detecting the surface acoustic wave that has circulated in the surface acoustic wave circuit; excluding the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation substrate A substrate support including a substrate seat on which the region is mounted; and a substrate support on the outer surface of the surface acoustic wave propagation substrate that exhibits elastic resistance to bending and is mounted on the substrate support Surface acoustic wave circuit on opposite side Both sides of the portion of the contact as well as contact with the exception of the portion is pressed against the elastic resistance toward the substrate support, the ends of the both sides away from the base seat at opposite sides of the base seat in the substrate support A base elastic holding body fixed at a position; and both ends of the base elastic support body are inserted into the base support at positions away from the base seat portion on both sides of the base seat portion. Engaging recesses are formed to engage the ends of the both sides of the base elastic holding body against resistance, and the base on the outer surface of the surface acoustic wave propagation base placed on the base seat of the base support A first contact point on the opposite side of the support to which the base elastic holding body comes into contact and a second contact point where the both ends of the base elastic holding body first contact the corresponding engagement recesses of the base support body. A first straight line connecting the contact points, a second contact point and the base of the base support The outer surface of the surface acoustic wave propagation substrate and a second straight line connecting the third contact in contact with the side of the second contact, but the angle formed is not more than 70 degrees, it is characterized in that in the part.

  A spherical surface acoustic wave device according to another concept of the present invention includes: a circular surface continuously configured by at least a part of a sphere, wherein the surface acoustic wave that can be excited and excited is A surface acoustic wave propagation substrate including a surface acoustic wave circuit that can propagate and circulate in a continuous direction of the ring on the outer surface; and a region excluding the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation substrate is placed A substrate support including a substrate seat portion; exhibiting an elastic resistance to bending, and a surface acoustic wave periphery on the opposite side of the substrate support relative to the outer surface of the surface acoustic wave propagation substrate mounted on the substrate support While contacting the circuit, both sides of the contacted portion are pressed against the base support against the elastic resistance, and the end portions on both sides are located on both sides of the base seat in the base support at a position away from the base seat. Substrate elastic holding fixed against elastic resistance And a surface acoustic wave that is provided in the contact portion of the substrate elastic holding body and excites the surface acoustic wave around the surface acoustic wave circuit to detect the surface acoustic wave that has circulated around the surface acoustic wave circuit.・ Excitation / detection means;

  A spherical surface acoustic wave device according to yet another concept of the present invention includes: an annular surface continuously configured by at least a part of a sphere, wherein the surface acoustic wave that can be excited and excited is A surface acoustic wave propagation substrate including a surface acoustic wave circuit that propagates in a continuous direction of the annulus and can circulate on the outer surface; and a surface acoustic wave circuit provided in the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation substrate A surface acoustic wave / excitation / detection means that excites and circulates the surface acoustic wave in the circuit and detects the surface acoustic wave that has circulated the surface acoustic wave circuit; and a support; and is fixed to a predetermined position of the support The fixed portion and the region excluding the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation substrate that protrudes from the fixed portion to one side of the support are sandwiched from both sides in the radial direction of the surface acoustic wave propagation substrate. A surface wave propagation substrate is used as a support. It is characterized by comprising; a holding portion of a pair of holding the outside of the side, and the substrate holder comprising a.

A spherical surface acoustic wave device according to yet another concept of the present invention includes: an annular surface continuously configured by at least a part of a sphere, wherein the surface acoustic wave that can be excited and excited is A surface acoustic wave propagation substrate including a surface acoustic wave circuit that propagates in a continuous direction of the annulus and can circulate on the outer surface; and a surface acoustic wave circuit provided in the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation substrate A surface acoustic wave and excitation / detection means for exciting and circulating a surface acoustic wave in the circuit and detecting the surface acoustic wave that has circulated in the surface acoustic wave circumferential circuit; a support; and an approximately U by an elastic material A pair of both sides elastically sandwiching the region excluding the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation substrate from both sides in the radial direction of the surface acoustic wave propagation substrate Supports surface acoustic wave propagation substrate It holds outwardly of one side of the ends of both side portions of the pair and the base elastic holding member which is fixed to a support against the elastic force; includes a substrate elastically retained in the support A locking recess into which the ends of the pair of both side portions are inserted and locked is formed at a position where the ends of the pair of both side portions of the body are fixed .

  A spherical surface acoustic wave device according to yet another concept of the present invention includes: an annular surface continuously configured by at least a part of a sphere, wherein the surface acoustic wave that can be excited and excited is A surface acoustic wave propagation base including an outer surface including a surface acoustic wave circuit that can propagate and circulate in a continuous direction of an annulus; a support; and a substantially U-shaped material made of an elastic material. One side of the pair is in contact with the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation base, and the other side of the pair of both sides excludes the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation base The surface acoustic wave propagation substrate is brought into contact with one of the pair of both side portions from the opposite side in the radial direction of the surface acoustic wave propagation substrate and elastically sandwiches the surface acoustic wave propagation substrate together with one of the pair of both side portions. While holding the outside of one side of the support A base elastic holding body in which ends of both sides of the pair are fixed to the support against an elastic force; a surface acoustic wave circumference of an outer surface of the surface acoustic wave propagation base provided on one of the pair of both sides A surface acoustic wave / excitation / detection means for contacting the circuit to excite and circulate the surface acoustic wave in the surface acoustic wave circuit and to detect the surface acoustic wave that has circulated in the surface acoustic wave circuit. It is a feature.

  In any case, the spherical surface acoustic wave device according to the above-described various concepts of the present invention provides a substrate support that resists the elastic resistance at both ends of the substrate elastic holder with the surface acoustic wave propagation substrate. To the support, or to fix the surface acoustic wave propagation substrate elastically between the pair of both sides. The simple U-shaped base elastic holding body is fixed to the support body against the elastic force, and it has a simple configuration without attaching anything to the surface acoustic wave circuit. Supporting the surface acoustic wave propagation substrate with a support or replacing the surface acoustic wave propagation substrate with a surface acoustic wave propagation substrate having a new sensitive film can be performed easily and quickly.

[First Embodiment]
First, a spherical surface acoustic wave device 10 according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 3.

  The spherical surface acoustic wave device 10 includes a known surface acoustic wave propagation base 12. The surface acoustic wave propagation base 12 is formed using a material that cannot excite a surface acoustic wave so that the outer surface includes at least a part that is continuously formed in an annular shape by a part of a spherical shape. It is formed by coating at least the annular portion on the outer surface of the base material with a material capable of exciting surface acoustic waves, or at least a spherical shape using a material capable of exciting surface acoustic waves. The outer surface includes a part that is continuously formed in an annular shape by a part.

  In this embodiment, the surface acoustic wave propagation substrate 12 is formed in a spherical shape by a material capable of exciting surface acoustic waves, and is continuously formed in an annular shape by at least a part of the spherical shape. The surface acoustic wave circuit 12a that can be excited and propagates in the direction in which the annular ring continues and can circulate is included on the outer surface.

Examples of materials that can excite surface acoustic waves include quartz, lithium niobate (LiNbO ₃ ), lithium tantalate (LiTaO ₃ ), langasite (La ₃ Ga ₅ SiO ₁₄ ), and piezoelectric crystal materials such as these families. Is used. In this case, the portion continuously formed in an annular shape by at least a part of the spherical shape is on a line where the crystal surface unique to the crystal material of the piezoelectric crystal material intersects the outer surface, and the annular shape The direction that continues to is the direction in which the above line extends substantially. For example, surface acoustic waves can circulate on the crystal plane that is usually crystallographically called the C axis in the above materials.

  The surface acoustic wave propagation base 12 made of piezoelectric crystal material is usually formed into a spherical shape having a diameter of about 10 mm to about 1 mm in consideration of the manufacturing cost, but the surface acoustic wave propagation according to this embodiment is performed. The diameter of the substrate 12 is 3.3 mm.

  In this embodiment, the surface acoustic wave propagation base 12 is formed of a spherical crystal. Quartz crystal has a crystal axis Z (C axis in the case of quartz crystal) that corresponds to the equator when the crystal axis Z is viewed as the rotation axis of the earth. The surface acoustic wave propagation path 12a is a line intersecting the surface, and circles the outer surface in an annular shape along the maximum outer peripheral line. This path is usually called a Z-axis cylinder.

  The surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation substrate 12 detects the surface acoustic wave that has circulated around the surface acoustic wave circuit 12a by exciting the surface acoustic wave around the surface acoustic wave circuit 12a. A surface acoustic wave / excitation / detection means 14 is provided.

  In this embodiment, the surface acoustic wave / excitation / detection means 14 is provided by an interdigital electrode. As shown in FIG. 1, the interdigital electrode has a shape in which a pair of comb-shaped terminal portions 14a and 14b are combined by alternately arranging a plurality of comb-shaped electrode branches 14c. The direction in which the plurality of comb-like electrode branches 14c of the pair of comb-shaped terminal portions 14a and 14b of the interdigital electrode are alternately arranged extends in the annular shape of the surface acoustic wave circuit 12a (this embodiment) Then, on the outer surface of the surface acoustic wave propagation substrate 12 made of quartz, the crystal plane around the crystal axis Z of the quartz coincides with a direction along an annular line intersecting with the outer surface), and preferably a plurality of comb teeth The extending direction of each of the electrode branches 14c extends in the annular shape of the surface acoustic wave circuit 12a (in this embodiment, on the outer surface of the surface acoustic wave propagation substrate 12 made of quartz, An annular shape in which the crystal plane intersects the outer surface So as to be perpendicular to the direction) along, and is formed on the surface acoustic wave divider circuit 12a.

  The interdigital electrode is formed by directly forming a highly conductive metal thin film such as gold, copper, or aluminum on the outer surface of the surface acoustic wave propagation substrate 12 and then molding the thin film by, for example, photolithography (photoengraving). I can do it.

  The surface acoustic wave / excitation / detection means 14 includes first and second external connection terminals 14 d and 14 e disposed on both sides of the surface acoustic wave circuit 12 a on the outer surface of the surface acoustic wave propagation base 12. In this embodiment, the first and second external connection terminals 14d and 14e are interdigital electrodes on the surface acoustic wave circuit 12a corresponding to the equator when the surface acoustic wave propagation substrate 12 is regarded as the earth as described above. From the pair of comb-shaped terminal portions 14a and 14b, the surface of the surface acoustic wave propagation base 12 extends to the position opposite to the radial direction of the surface acoustic wave propagation base 12 corresponding to the north and south poles. The first and second external connection terminals 14d and 14e are formed integrally with the interdigital electrode as described above.

  The interdigital electrode is supported while a region excluding the surface acoustic wave circuit 12a is supported on the outer surface of the surface acoustic wave propagation substrate 12 (that is, while nothing is in contact with the surface acoustic wave circuit 12a). A known operation control means for controlling the operation of the surface acoustic wave / excitation / detection means 14 via the first and second external connection terminals 14d, 14e to the pair of comb-shaped terminal portions 14a, 14b. By electrically connecting and applying a high-frequency signal having a predetermined frequency in a burst shape between the pair of comb-shaped terminal portions 14a and 14b by the known operation control means, a surface acoustic wave having a predetermined wavelength is generated. The surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation substrate 12 can be excited. Here, the wavelength of the predetermined frequency and the predetermined wavelength correspond to the arrangement period of the plurality of comb-like electrode branches 14c.

  The width of the surface acoustic wave excited by the interdigital transducer 12a is the distance at which the plurality of comb-shaped electrode branches 14c of the pair of comb-shaped terminal portions 14a, 14b of the interdigital electrode face each other (electrode Width).

  If a surface acoustic wave having a predetermined range of width and a predetermined wavelength is excited with respect to the radius of the surface acoustic wave circuit 12a, the surface acoustic wave circuit 12a diffuses along the surface acoustic wave circuit 12a in a direction intersecting with the extension direction. It is known from Patent Document 2 described above that the surface acoustic wave can be repeatedly circulated without any problems.

  The known operation control means detects the surface acoustic wave that circulates the surface acoustic wave circuit 12a by the interdigital electrode of the surface acoustic wave / excitation / detection means 14 provided in the surface acoustic wave circuit 12a. Can do.

  In this embodiment, the interdigital electrode of the surface acoustic wave / excitation / detection means 14 formed in the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation substrate 12 propagates the surface acoustic wave. It becomes a factor which attenuates energy and reduces the number of times of the surface acoustic wave. However, the overall length of the interdigital electrode in the extending direction of the surface acoustic wave circuit 12a is much shorter than the length of the surface acoustic wave circuit 12a (approximately equal to the equator length). Compared with the area of the circuit 12a, the area where the interdigital electrode is in contact with the surface acoustic wave circuit 12a is very small. Accordingly, the proportion of attenuation of the propagation energy of the surface acoustic wave that circulates along the surface acoustic wave circuit 12a is small, and the surface acoustic wave can perform significant multiple laps for a desired measurement.

  The spherical surface acoustic wave device 10 also includes a substrate support 16 including a substrate seat 16a on which an area excluding the surface acoustic wave circuit 12a is placed on the outer surface of the surface acoustic wave propagation substrate 12. In this embodiment, the substrate support 16 is formed of a non-conductor, such as plastic or glass epoxy material, and a wiring board generally called a printed wiring board may be used. The base seat portion 16 a is a recess formed on one surface of the base support 16, and a second external connection of the interdigital electrode of the surface acoustic wave / excitation / detection means 14 on the outer surface of the surface acoustic wave propagation base 12. It has substantially the same shape and dimension as the portion corresponding to the south pole where the terminal 14e is disposed.

  If the recesses are not substantially the same size and shape, the recesses locally contact the portion corresponding to the south pole on the outer surface of the surface acoustic wave propagation base 12 so that a strong local pressure is present in the portion corresponding to the south pole. There is a possibility that the second external connection terminal 14e of the portion of the second external connection terminal 14e is disconnected.

  A first terminal 16 b is disposed on the base seat 16 a, and the first terminal 16 b is connected to the above-described known operation control means 20 for controlling the operation of the surface acoustic wave / excitation / detection means 14. ing. Accordingly, when the portion corresponding to the south pole on the outer surface of the surface acoustic wave propagation base 12 is seated on the base seat 16a of the base support 16, the second external surface of the interdigital electrode of the surface acoustic wave / excitation / detection means 14 is provided. The connection terminal 14e is connected to the known operation control means 20 through the first terminal 16b of the base seat 16a.

  The spherical surface acoustic wave device 10 further allows the surface acoustic wave propagation base 12 mounted on the base seat 16a of the base support 16 to be easily attached to and detached from the base support 16 without touching the surface acoustic wave circuit 12a. A base elastic holding body 18 to be fixed is provided.

  The base elastic holding body 18 exhibits an elastic resistance against bending, and is elastic on the outer surface of the surface acoustic wave propagation base 12 placed on the base seat 16a of the base support 16 on the side opposite to the base support 16. In contact with the region excluding the surface wave circuit 12a, both sides of the contacting portion 18a are pressed against the base support 16 against the elastic resistance, and the end portions 18b on both sides of the base support 16 in the base seat. The both sides of the part 16a are fixed to the part away from the base seat part 16a so as to be easily detachable.

  In this embodiment, the substrate support 16 is defined with respect to the region excluding the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation substrate 12 mounted on the substrate seat 16a of the substrate support 16. The part where the base elastic support 18 contacts on the opposite side is a part corresponding to the north pole where the first external connection terminal 14d of the interdigital electrode of the surface acoustic wave / excitation / detection means 14 is disposed.

  In the base elastic holding body 18, a portion 18 a that contacts the north pole corresponding portion of the outer surface of the surface acoustic wave propagation base 12 placed on the base seat 16 a of the base support 16 is outside the surface acoustic wave propagation base 12. A portion corresponding to the North Pole corresponding to the surface is configured as a recess for receiving line contact or surface contact. The recess preferably has substantially the same shape and dimension as the corresponding portion of the North Pole, which is a corresponding portion of the outer surface of the surface acoustic wave propagation substrate 12, and is substantially in surface contact with the North Pole corresponding portion.

  The base elastic holding body 18 is a base on at least one of the portion 18a that contacts the first external connection terminal 14d on the outer surface of the surface acoustic wave propagation base 12 and the side opposite to the base support 16, and the end portions 18b on both sides. A conductive path 18c extending between a portion that is detachably fixed to the support 16 is provided. The conductive path 18c can be provided by forming the base elastic holder 18 with a conductive material. When the base elastic holder 18 is formed with a nonconductive material, the conductive path 18c is made of a nonconductive material. For example, a known conductive material can be provided so as to extend on the outer surface of the base elastic holder 18 as described above.

  On the one surface of the base support 16, the base elastic support 18 is attached to the base elastic support 18 at portions on both sides of the base seat 16 a that are separated from the base seat 16 a and the end portions 18 b on both sides are detachably fixed. A second terminal 16c that contacts the conductive path 18c is disposed at the at least one of the end portions 18b on both sides of the 18, and the second terminal 16c controls the operation of the surface acoustic wave / excitation / detection means 14. It is connected to the above-mentioned known operation control means 20 for the purpose.

  In a normal electronic circuit, one of the pair of electrodes is often a ground-side electrode. In the present invention, the substrate support to which the first and second external connection terminals 14d and 14e of the interdigital electrode are connected is also provided. Even if one of the first and second terminals 16b, 16c of the body 16 is connected to the ground, there is no problem at all, which is preferable for preventing noise.

  Therefore, the both ends of the base elastic holding body 18 in which the contacting portion 18a is brought into contact with the north pole corresponding portion of the outer surface of the surface acoustic wave propagation base 12 seated on the base seat 16a of the base support 16. The portion 18b is detachably fixed on both sides of the base seat 16a on the one surface of the base support 16 so as to be detached from the base seat 16a, so that the interdigital electrode of the surface acoustic wave / excitation / detection means 14 is obtained. The first external connection terminal 14d is connected to a known operation control means 20 through the conductive path 18c of the base elastic holding body 18 and the second terminal 16c of the base support body 16.

  In this embodiment, the base elastic holding body 18 in which the contacting portion 18 a is brought into contact with the north pole corresponding portion of the outer surface of the surface acoustic wave propagation base 12 seated on the base seat 16 a of the base support 16. The end portions 18b on both sides are detachably fixed, and on both sides of the base seat portion 16a on the one surface of the base support member 16, at positions away from the base seat portion 16a, An engaging recess 16d is formed in which the end 18b is inserted and engages the end 18b on both sides of the base elastic holding body 18 against the elastic resistance. In this embodiment, the engagement recess 16d is formed as a through hole for ease of manufacture and insertion for engagement of the end portions 18b on both sides of the base elastic holding body 18 with respect thereto. ing. The second terminal 16c is arranged at a portion where the corresponding end portions 18b on both sides of the base elastic holding body 18 are brought into contact with and frictionally engaged with each other on the inner peripheral surface of the through hole of the engaging recess 16d.

  In this embodiment, as shown in FIGS. 2A and 2B, the base elastic holder 18 is a stainless steel plate having a thickness of 30 microns, which is a kind of conductive material. Thus, it is configured to have a strip shape extending linearly between the end portions 18b on both sides described above.

  FIG. 2B shows the side surface of the base elastic holding body 18 before the end portions 18b on both sides are pressed against the elastic resistance. Here, the base of the base support 16 is shown. As described above, the elasticity of the central portion of the belt-shaped elastic holder 18 that is a portion 18a that contacts the north pole corresponding portion of the outer surface of the surface acoustic wave propagation base 12 placed on the seat portion 16a is in contact therewith. It is also shown that the outer surface of the surface wave propagation base 12 is configured as a recess having substantially the same size and shape as the north pole corresponding portion. In the case where the shape and shape are not substantially the same, the recess is locally in contact with the north pole corresponding portion of the outer surface of the surface acoustic wave propagation substrate 12, so that a strong local pressure is present in the north pole corresponding portion. There is a possibility that the first external connection terminal 14d of that portion will be disconnected.

  Such a belt-shaped base elastic holding body 18 is formed by supporting a portion corresponding to the south pole on the outer surface of the surface acoustic wave propagation base 12 as indicated by a white arrow A in FIG. The second external connection terminal 14e of the interdigital electrode of the surface acoustic wave / excitation / detection means 14 that is seated on the base body seat portion 16a and is disposed in the portion corresponding to the South Pole is connected to the first terminal 16b of the base seat portion 16a. Then, the surface acoustic wave propagation base 12 is fixed to the base seat 16a so as to be easily detachable as follows.

  2A and 2B, the band-shaped base elastic holding body 18 is a surface acoustic wave propagation base that is seated on the base seat 16a of the base support 16 as described above. 2C is shown in FIG. 2C above the first external connection terminal 14d of the interdigital electrode of the surface acoustic wave / excitation / detection means 14 disposed in the portion corresponding to the north pole of the outer surface 12 of FIG. Thus, while the central portion is supported by the central portion support CS, both end portions 18b are pressed against the base support 16 against the elastic resistance by the pair of pressing members PM, thereby forming a substantially inverted U shape. The

  Next, in the state as it is, the pair of pressing members PM are lowered together with the central support CS, and the end portions 18b on both sides of the base elastic holding body 18 are indicated by arrows B in FIG. As shown, the base support 16 is inserted into the engagement recesses 16d on both sides of the base seat 16a.

  Next, the concave shape of the contact portion 18 a at the center of the base elastic holder 18 is the interdigital shape of the surface acoustic wave / excitation / detection means 14 disposed in the north pole corresponding portion of the outer surface of the surface acoustic wave propagation base 12. The central support CS is detached from the central portion immediately before being covered with the first external connection terminal 14d of the electrode, and the recess of the contact portion 18a of the central portion of the base elastic holding body 18 is also propagated by surface acoustic waves. A pair of pressing members after being in line contact or surface contact with the first external connection terminal 14d of the interdigital electrode of the surface acoustic wave / excitation / detection means 14 disposed on the portion corresponding to the north pole on the outer surface of the base 12 The PM is separated from the end portions 18b on both sides of the base elastic holding body 18 as indicated by the white arrow C in FIG. As a result, the end portions 18b on both sides of the base elastic holding body 18 are developed so as to be separated from each other as indicated by an arrow D in FIG. It abuts against the inner peripheral surface of the engaging recess 16d on both sides of the seat 16a and frictionally engages. At this time, the conductive path 18c is connected to the second terminal 16c on the inner peripheral surface of the engaging recess 16d at the end portions 18b on both sides of the base elastic holding body 18.

  As described above, the base elastic holding body 18 in which the end portions 18b on both sides are brought into contact with and frictionally engaged with the inner peripheral surfaces of the engaging recesses 16d on both sides of the base seat portion 16a of the base support 16 has a central portion due to its elastic force. The first external connection terminal 14d of the interdigital electrode of the surface acoustic wave / excitation / detection means 14 disposed in the portion corresponding to the north pole on the outer surface of the surface acoustic wave propagation base 12 through the recess of the portion 18a in contact with Is pressed against the substrate support 16 and, as a result, the second external connection terminal 14e of the interdigital electrode of the surface acoustic wave / excitation / detection means 14 disposed in the portion corresponding to the south pole on the outer surface of the surface acoustic wave propagation substrate 12. Is pressed onto the first terminal 16 b of the base seat 16 a of the base support 16.

  As a result, the base elastic holding body 18 fixes the surface acoustic wave propagation base 12 on the base seat 16a of the base support 16 so as to be easily detachable. The substrate elastic holder 18 has a simple structure, but the surface acoustic wave propagation substrate 12 is not attached to the surface acoustic wave circuit 12a of the surface acoustic wave propagation substrate 12 and the substrate seat portion of the substrate support 16 is used. The surface acoustic wave propagation base 12 having a new sensitive film on the surface acoustic wave circuit 12a can be surely and easily replaced quickly.

  The ends 18b on both sides of the base elastic support 18 are brought into contact with the inner peripheral surfaces of the engagement recesses 16d on both sides of the base seat 16a of the base support 16 and are frictionally engaged (that is, by the base elastic support 18). The surface acoustic wave propagation substrate 12 is fixed on the substrate seat 16a of the substrate support 16), and is placed on the substrate seat 16a of the substrate support 16 as shown in FIG. The first contact point FP that contacts the base elastic support 18 on the outer surface of the surface acoustic wave propagation base 12 on the opposite side of the base support 16 and the ends 18b on both sides of the base elastic support 12 are the base support. The first straight line FL connecting the second contact SP that first contacts the corresponding engagement recess 16d of the 16 and the surface acoustic wave propagation base at the second contact SP and the base seat portion 16a of the base support 16 12 outer surfaces are in contact with the second contact SP side 3 a second straight SL connecting the contacts TP of, but the angle α may be equal to or less than 90 degrees. If the angle exceeds 90 degrees, it is difficult to stably fix the gas elastic holding body 18 to the base support 16 from the mechanical viewpoint. However, in order to make the above-mentioned fixing by the above-described friction engagement more reliable against the vibration in the vertical direction by utilizing the elastic force of the end portions 18b on both sides of the base elastic holding body 18, the above angle α is 70 degrees or less. It is preferable that

[Modification of First Embodiment]
Next, a modification of the spherical surface acoustic wave device 10 according to the first embodiment of the present invention will be described with reference to FIGS. 4 (A) and 4 (B).

  The spherical surface acoustic wave device 10 'according to this modification is different from the spherical surface acoustic wave device 10 according to the first embodiment described above with reference to FIGS. The second terminal 16 'for the first external connection terminal 14d of the interdigital electrode of the surface acoustic wave / excitation / detection means 14 of the surface acoustic wave propagation base 12 c is provided not on the base support 16 ′ but on the base elastic support 18 ′.

  In the spherical surface acoustic wave device 10 ′ according to the modification, the same constituent members as those of the spherical surface acoustic wave device 10 according to the first embodiment are used as the spherical surface acoustic waves according to the first embodiment. The same reference numerals as those used for the corresponding components of the apparatus 10 are used, and detailed descriptions thereof are omitted.

  In the spherical surface acoustic wave device 10 'according to the modified example, as shown in FIG. 4A, the base support 16' has an angular U-shape, and a pair thereof. The extended end portions 16′f of the side walls 16′e are bent so as to be away from each other in the direction intersecting the extending direction of the pair of side walls 16′e. The central wall 16'g of the square U-shaped substrate support 16 'has a surface acoustic wave / excitation / excitation / region which is a region excluding the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation substrate 12. A base seat portion 16a is provided on which the portion of the interdigital electrode of the detecting means 14 where the second external connection terminal 14e is disposed is placed. Also in this modification, the base member seat portion 16a is a comb-like surface of the surface acoustic wave / excitation / detection means 14 which is a region excluding the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation base 12 placed thereon. It is constituted by a recess having substantially the same size and shape as the portion where the second external connection terminal 14e of the electrode is disposed. The base seat 16a is provided with a first terminal 16b connected to the operation control means 20 shown in FIG. The substrate support 16 'is formed of a non-conductor such as plastic or glass epoxy material or a wiring board generally called a printed wiring board, or a conductor containing a metal such as a stainless steel material is used as a non-conductor such as plastic. The first terminal 16b is formed on the surface of such a substrate support 16 'by a known terminal forming means.

  The width between the pair of side walls 16 ′ e of the substrate support 16 ′ is larger than the diameter of the surface acoustic wave circuit 12 a on the outer surface of the surface acoustic wave propagation substrate 12. Accordingly, a pair of side walls 16'e are surface acoustic wave circumferences on the outer surface of the surface acoustic wave propagation substrate 12 mounted on the substrate seat 16a of the central wall 16'g of the substrate support 16 'as described above. There is no contact with the circuit 12a.

  The extending length of the pair of side walls 16 ′ e from the central wall 16 ′ g to the extending end 16 ′ f is shorter than the diameter of the outer surface of the surface acoustic wave propagation base 12.

  A pair of side walls 16'e located on both sides of the base seat 16a of the central wall 16'g of the base support 16 'has a extending end 16'f located away from the base seat 16a. Both end portions of a plate-like base elastic holding body 18 ′ exhibiting elastic resistance against bending are detachably fixed. In this modification, both end portions of the plate-like base elastic holding body 18 ′ are detachably engaged and sandwiched by snap engagement claws 16 ′ h formed on the extended end portion 16 ′ f. The base elastic holding body 18 ′ thus sandwiched closes the opening between the extended end portions 16 ′ f of the pair of side walls 16 ′ e of the base support body 16 ′. During this time, the central portion of the plate-like base elastic holding body 18 ′ is located on the outer surface of the surface acoustic wave propagation base 12 placed on the base seat 16 a of the base support 16 ′. It contacts the part except the surface acoustic wave circuit 12a on the side opposite to the seat 16a. Further, both end portions of the plate-like base elastic holding body 18 'are engaged with snap engagement claws 16'h of the extended end portions 16'f of the pair of side walls 16'e of the base support body 16'. Therefore, both sides of the contacting portion 18a of the base elastic holding body 18 'are pressed against the base seat 16a of the base support 16' against the elastic resistance. Due to the elastic force generated by this pressing, the central portion of the plate-like base elastic holding body 18 ′ presses the surface acoustic wave propagation base 12 toward the base seat 16 a of the base support 16 ′. It is elastically sandwiched between the base seat 16a.

  As shown in FIG. 4B, the contacting portion 18 a in the central portion of the base elastic holding body 18 ′ is a surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation base 12 in contact therewith. In the region excluding 12a, it is constituted by a recess having substantially the same size and shape as the portion of the substrate support 16 'opposite to the substrate seat 16a.

  The first external connection terminal 14d of the interdigital electrode of the surface acoustic wave / excitation / detection means 14 is provided on the portion of the outer surface of the surface acoustic wave propagation substrate 12 that contacts the contact portion 18a of the base elastic holder 18 '. The second terminal 16'c connected to the operation control means 20 shown in FIG. 1 is arranged on the contacting portion 18a of the base elastic holder 18 '.

  The base elastic support 18 'is formed of a non-conductive material such as plastic or glass epoxy material or a wiring board generally called a printed wiring board which exhibits an elastic resistance against bending, or a metal such as a stainless steel material. The second conductor 16'c is formed on the surface of the base elastic holding body 18 'by a known terminal forming means. The conductor is covered with a non-conductor such as plastic.

  The first terminal 16b of the substrate support 16 'and the second terminal 16'c of the substrate elastic holder 18' are referred to FIG. 1 for controlling the operation of the surface acoustic wave / excitation / detection means 14. It is connected to the known operation control means 20 described above.

  In a normal electronic circuit, one of the pair of electrodes is often a ground-side electrode. In the present invention, the substrate support to which the first and second external connection terminals 14d and 14e of the interdigital electrode are connected is also provided. Even if one of the first terminal 16b of the body 16 'and the second terminal 16'c of the base elastic holding body 18' is connected to the ground, there is no problem at all, which is preferable for noise prevention.

[Second Embodiment]
Next, a spherical surface acoustic wave device 30 according to a second embodiment of the present invention will be described with reference to FIGS. 5 (A) and 5 (B).

  The spherical surface acoustic wave device 30 according to the second embodiment is used in the spherical surface acoustic wave device 10 according to the first embodiment of the present invention described above with reference to FIGS. The same surface acoustic wave propagation substrate 12 as the surface acoustic wave propagation substrate 12 is used. That is, the surface acoustic wave propagation substrate 12 is continuously formed in an annular shape by at least a part of a spherical shape, and the surface acoustic wave that can be excited and propagated in the direction in which the ring is continuous. A surface acoustic wave circuit 12a capable of rotating around is included on the outer surface. Nevertheless, the surface acoustic wave circuit 12a of the surface acoustic wave propagation base 12 used in the spherical surface acoustic wave device 30 according to the second embodiment has a spherical elasticity according to the first embodiment. The surface acoustic wave propagation substrate 12 used in the surface acoustic wave device 10 is not provided with the surface acoustic wave / excitation / detection means 14 provided in the surface acoustic wave circuit 12a.

  The spherical surface acoustic wave device 30 according to the second embodiment includes a substrate support 32a including a substrate seat portion 32a on which an area excluding the surface acoustic wave circuit 12a is placed on the outer surface of the surface acoustic wave propagation substrate 12. A body 32 is provided. The substrate support 32 may be formed of a non-conductor, such as plastic or glass epoxy material, and a wiring board generally called a printed wiring board may be used.

  The base seat portion 32 a is configured by a recess in which an area including the surface acoustic wave peripheral circuit 12 a is seated on the outer surface of the surface acoustic wave propagation base 12. The recess has substantially the same size and shape as the above-mentioned region of the outer surface of the surface acoustic wave propagation base 12 seated thereon, and is formed on the outer surface of the surface acoustic wave propagation base 12 seated there. Line contact or surface contact is made with the region.

  In the recess of the base seat portion 32a, a portion 32b corresponding to the surface acoustic wave peripheral circuit 12a included in the region of the outer surface of the surface acoustic wave propagation base 12 seated thereon is deleted. As a result, the recesses of the base seat portion 32a have portions on both sides of the surface acoustic wave circuit 12a in the region including the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation base 12 (ie, the outer surface A region not including the surface acoustic wave circuit 12a on the surface is placed.

  As described above, the surface acoustic wave circuit 12 a of the surface acoustic wave propagation substrate 12 placed in the recess of the substrate seat 32 a of the substrate support 32 has the recess of the substrate seat 32 a formed in the substrate support 32. It is directed in a direction perpendicular to the one surface, and is directed to a predetermined circumferential position centered on the base seat portion 32a on the one surface.

  The spherical surface acoustic wave device 30 according to the second embodiment further allows the surface acoustic wave propagation base 12 mounted on the base seat 32a of the base support 32 to be easily attached to and detached from the base support 32. A base elastic holding body 34 for holding is provided. The base elastic holding body 34 exhibits elastic resistance against bending, and is opposite to the base support 32 with respect to the outer surface of the surface acoustic wave propagation base 12 placed on the base seat 32a of the base support 32. While contacting the surface acoustic wave circuit 12a, both sides of the contacting portion 34a are pressed against the base support 32 against the elastic resistance, and the end portions 34b on both sides of the base support 32 are formed on the base seat 32a. On both sides, it is detachably fixed at positions away from the base seat portion 32a against the elastic resistance.

  In the contact portion 34a of the base elastic holder 34, the surface acoustic wave is detected by causing the surface acoustic wave circuit 12a to excite and circulate the surface acoustic wave and detect the surface acoustic wave that has circulated the surface acoustic wave circuit 12a. Excitation / detection means 36 is provided.

  The surface acoustic wave / excitation / detection means 36 includes first and second external connection terminals 36 a and 36 b extending toward the end portions 34 b on both sides of the base elastic holder 34.

  The base support 32 has first and second external connection terminals at the ends 34b on both sides of the base elastic holder 34 at positions where the ends 34b on both sides of the base elastic holder 34 are detachably fixed. First and second terminals 32c and 32d that are in contact with 36a and 36b are provided. The first and second terminals 32 c and 32 d are connected to a known operation control means 20 for controlling the operation of the surface acoustic wave / excitation / detection means 36. This known operation control means 20 is the surface acoustic wave / excitation / detection of the surface acoustic wave propagation substrate 12 in the spherical surface acoustic wave device 10 according to the first embodiment described above with reference to FIGS. This is the same as the known operation control means 20 used for the means 14. Accordingly, as in the case of the spherical surface acoustic wave device 10 according to the first embodiment described above, the substrate support 32 to which the first and second external connection terminals 36a, 36b of the interdigital electrodes are connected. Even if one of the first and second terminals 32c and 32d is grounded, there is no problem at all, which is preferable for noise prevention.

  In this embodiment, the base elastic holding body 34 is an elastic non-conductor, for example, a plastic having a thickness of 100 microns, and between the end portions 34b on both sides as well shown in FIG. It is configured in a strip shape extending linearly. In this embodiment, a highly conductive metal thin film such as gold, copper or aluminum attached to the outer surface of the base elastic holder 34 is subjected to, for example, photolithography (photoengraving), thereby generating surface acoustic Excitation / detection means 36 and first and second external connection terminals 36a, 36b are formed.

  A portion 34 a of the base elastic support 34 that contacts the outer surface of the surface acoustic wave propagation base 12 placed on the base seat 32 a of the base support 32 on the side opposite to the base seat 32 a of the base support 32. The recess is configured to receive a corresponding portion of the outer surface of the surface acoustic wave propagation base 12. The recess has substantially the same size and shape as the region on the outer surface of the surface acoustic wave propagation substrate 12 that is in contact therewith, and is in surface contact with the region.

  The portion 34a in contact with the central portion of the base elastic holding body 34 is brought into surface contact with the region on the outer surface of the surface acoustic wave propagation base 12 in contact therewith, whereby the elasticity provided in the contact portion 34a. The surface wave / excitation / detection means 36 is in surface contact with the surface acoustic wave circuit 12 a in the above region on the outer surface of the surface acoustic wave propagation substrate 12.

  In this embodiment, the surface acoustic wave / excitation / detection means 36 is the surface acoustic wave / excitation / detection unit in the spherical surface acoustic wave device 10 according to the first embodiment of the present invention described above with reference to FIGS. It is comprised by the same interdigital electrode which comprised the detection means 14. FIG.

  In other words, a pair of comb-shaped terminal portions 36c and 36d is formed by alternately arranging a plurality of comb-shaped electrode branches 36e.

  In the interdigital electrode of the surface acoustic wave / excitation / detection means 36, the contact portion 34 a in the central portion of the base elastic holding body 34 has a surface acoustic wave propagation base 12 as shown in FIG. 5B. The surface elastic wave circuit 12a on the outer surface of the base member 32 is in surface contact with the base member 32a on the opposite side of the base member 32a. When being fixed to both sides of 32a, it is arranged at a portion 34a in contact with the central portion of the base elastic holder 34 so as to be arranged as follows with respect to the surface acoustic wave circuit 12a.

  That is, the direction in which the plurality of comb-like electrode branches 36e of the pair of comb-shaped terminal portions 36c and 36d of the interdigital electrode are alternately arranged extends in the annular shape of the surface acoustic wave circuit 12a (this embodiment In the embodiment, the crystal surface around the crystal axis Z of the crystal coincides with the outer surface of the surface acoustic wave propagation substrate 12 made of crystal in a direction along an annular line intersecting the outer surface, and preferably a plurality of combs The extending direction of each of the toothed electrode branches 36e extends in the annular shape of the surface acoustic wave circuit 12a (in this embodiment, the crystal axis Z of the crystal on the outer surface of the surface acoustic wave propagation substrate 12 made of crystal). The surrounding crystal plane is perpendicular to the direction along an annular line intersecting the outer surface.

  The interdigital electrode is elastically connected to the pair of comb-shaped terminal portions 36c and 36d via the first and second external connection terminals 36a and 36b and the first and second terminals 32c and 32d of the base support 32. It is electrically connected to a known operation control means 20 for controlling the operation of the surface wave / excitation / detection means 14, and the known operation control means 20 provides a predetermined amount between the pair of comb-shaped terminal portions 36c and 36d. By applying a high frequency signal having a frequency of 1 to a surface, a surface acoustic wave having a predetermined wavelength can be excited in the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation substrate 12. Here, the wavelength of the predetermined frequency and the predetermined wavelength correspond to the arrangement period of the plurality of comb-like electrode branches 36e.

  The width of the surface acoustic wave excited by the interdigital electrode 12a is the distance at which the plurality of comb-shaped electrode branches 36e of the pair of comb-shaped terminal portions 36c, 36d of the interdigital electrode face each other (electrode Width).

  If a surface acoustic wave having a predetermined range of width and a predetermined wavelength is excited with respect to the radius of the surface acoustic wave circuit 12a, the surface acoustic wave circuit 12a diffuses along the surface acoustic wave circuit 12a in a direction intersecting with the extension direction. It is known from Patent Document 2 described above that the surface acoustic wave can be repeatedly circulated without any problems.

  The known operation control means 20 detects the surface acoustic wave that circulates the surface acoustic wave circuit 12a by the interdigital electrode of the surface acoustic wave / excitation / detection means 36 that is in contact with the surface acoustic wave circuit 12a. Can do.

  In this embodiment, the interdigital electrode of the surface acoustic wave / excitation / detection means 36 in the contact portion 34 a of the central portion of the base elastic holder 34 is the surface acoustic wave circumference of the outer surface of the surface acoustic wave propagation base 12. As described above, the surface contact with the circuit 12a is a factor that attenuates the propagation energy of the surface acoustic wave and decreases the frequency of the surface acoustic wave. However, the overall length of the interdigital electrode in the extending direction of the surface acoustic wave circuit 12a is much shorter than the length of the surface acoustic wave circuit 12a (approximately equal to the equator length). Compared with the area of the circuit 12a, the area where the interdigital electrode is in contact with the surface acoustic wave circuit 12a is very small. Accordingly, the proportion of attenuation of the propagation energy of the surface acoustic wave that circulates along the surface acoustic wave circuit 12a is small, and the surface acoustic wave can perform significant multiple laps for a desired measurement.

  It should be noted that a plurality of combs of interdigital electrodes are provided in the surface acoustic wave circuit 12a at a portion 34a at the center of the substrate elastic holder 34 on which the interdigital electrodes of the surface acoustic wave / excitation / detection means 36 are formed. The factor that attenuates the propagation energy of the surface acoustic wave in the surface acoustic wave circuit 12a is further lowered by making the portion recessed from the plurality of comb-like electrode branches 36e so that portions other than the tooth-like electrode branch 36e do not contact each other. be able to.

  In this embodiment, a non-conductor is used for the base elastic holder 34 for the following reason. That is, when the base elastic holder 34 is made of a conductor whose surface is covered with a nonconductive film, the surface acoustic wave is applied to the interdigital electrode of the surface acoustic wave / excitation / detection means 36 formed on the surface of the base elastic holder 34. When a high-frequency signal is loaded for excitation, the pair of comb-shaped terminal portions 36c and 36d of the interdigital electrode is covered with a thin non-conductive film although it is covered with a non-conductive film. This is because there is a high possibility of short-circuiting through the conductor.

  In other words, if the above-mentioned short circuit can be prevented in the pair of comb-shaped terminal portions 36c and 36d of the interdigital electrode, a metal such as stainless steel having elasticity in which the base elastic holding body 34 is covered with a nonconductor is provided. Can be formed. For example, only the portion 34a (in this embodiment, the recess in which the interdigital electrode of the surface acoustic wave / excitation / detection means 36 is disposed) in contact with the central portion of the base elastic holder 34 or the vicinity thereof is described above. Cover with material configured to prevent short circuit.

  Furthermore, as long as the elastic support body 34 exhibits a necessary elastic resistance against bending, the degree of adhesion to the outer surface of the surface acoustic wave propagation substrate 12 increases because it is made of a softer plastic. The outer surface of can be held more stably. Alternatively, the base elastic holder 34 is configured only in the contact portion 34a (that is, the recess in which the interdigital electrode of the surface acoustic wave / excitation / detection means 36 is disposed) in the central portion of the base elastic holder 34. By forming a non-conductive film that is more flexible than plastic, the degree of adhesion to the outer surface of the surface acoustic wave propagation substrate 12 is increased, and the outer surface of the surface acoustic wave propagation substrate 12 can be more stably held.

  In this embodiment, the above-mentioned contact is made on the side opposite to the base seat 32a with respect to the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation base 12 seated on the base seat 32a of the base support 32. Positions away from the base seat portion 32a on both sides of the base seat portion 32a on the one surface of the base support 32, where the end portions 34b on both sides of the base elastic holder 34 in contact with the portion 34a are detachably fixed. Are formed with engaging recesses 32e into which the end portions 34b on both sides of the base elastic holder 34 are inserted to engage the end portions 34b on both sides of the base elastic holder 34 against elastic resistance. In this embodiment, the engagement recess 32e is formed as a through-hole for ease of manufacture and insertion for engagement of the end portions 34b on both sides of the base elastic holding body 34 with respect to the engagement recess 32e. ing. Then, the first and second terminals 32c and 32d are arranged at the inner peripheral surface of the through hole of the engaging recess 32e at the portion where the corresponding end portions 34b on both sides of the base elastic contact body 34 come into contact and frictionally engage with each other. Has been.

  As shown in FIG. 5A, the strip-shaped base elastic holding body 34 extending linearly before the end portions 34b on both sides are pressed against the elastic resistance is shown in FIG. The end portions 18b of the belt-like base elastic support 18 of the spherical surface acoustic wave device 10 according to the first embodiment shown in (A) to (D) of FIG. In the same manner as it is detachably fixed to the mating recess 16d, it is detachably fixed to the engagement recess 32e of the base support 32.

  That is, the portion of the outer surface of the surface acoustic wave propagation substrate 12 that includes the surface acoustic wave circuit 12a does not include the surface acoustic wave circuit 12a (that is, the surface acoustic wave circuits 12a on both sides of the surface acoustic wave circuit 12a). The surface acoustic wave propagation base 12 is easily detachably fixed to the base seat 32a as described below after the base portion) is seated on the base seat 32a of the base support 32 as described above.

  As shown in FIG. 5A, the strip-shaped linear base elastic holding body 34 is surface-acoustic-wave-propagating base 12 seated on the base seat 32a of the base support 32 as described above. As shown in FIG. 2C, the central portion is supported by the central support CS above the portion on the outer surface of the surface acoustic wave circuit 12a opposite to the base seat portion 32a. In the meantime, both end portions 34b are pressed against the elastic support by the pair of pressing members PM toward the base support body 32 so as to have a substantially inverted U shape.

  Next, in the state as it is, the pair of pressing members PM are lowered together with the central support CS, and the end portions 34b on both sides of the base elastic holding body 34 are indicated by arrows B in FIG. As shown, the base support 32 is inserted into the engagement recesses 32e on both sides of the base seat 32a.

  Next, the concave portion of the contact portion 34a at the center of the base elastic holding body 34 is covered with the portion of the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation base 12 opposite to the base seat portion 32a. Immediately before, the central support CS is detached from the central portion, and the recess of the contact portion 34a of the central portion of the base elastic holding body 34 is the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation base 12. In FIG. 2, the pair of pressing members PM are put on both sides of the base elastic holding body 34 as shown by the white arrow C in FIG. It is spaced apart from the end 34b. As a result, the end portions 34b on both sides of the base elastic holding body 34 are developed so as to be separated from each other as indicated by an arrow D in FIG. 2D due to the elastic force, and FIG. As shown in the figure, the base support 32 is brought into contact with and frictionally engaged with the inner peripheral surfaces of the engagement recesses 32e on both sides of the base seat 32a. At this time, the first and second external connection terminals 36a and 36b of the interdigital electrode of the surface acoustic wave / excitation / detection means 14 are connected to the inner peripheral surface of the engagement recess 32e at the end portions 34b on both sides of the base elastic holding body 34. Are connected to the first and second terminals 32c and 32d.

  As described above, the base elastic holding body 34 in which the end portions 34b on both sides are brought into contact with and frictionally engaged with the inner peripheral surfaces of the engaging recesses 32e on both sides of the base seat portion 32a of the base support 32 is provided in the center portion by its elastic force. The interdigital electrode of the surface acoustic wave / excitation / detection means 36 disposed in the recess of the portion 34a in contact with the substrate surface portion 32a in the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation substrate 12 is defined as The surface of the surface of the surface acoustic wave propagation substrate 12 that does not include the surface acoustic wave circuit 12a (that is, the surface acoustic wave circuit 12a) (ie, the surface acoustic wave circuit) The portion not including the surface acoustic wave circuit 12a on both sides of the circuit 12a) is pressed onto the base seat portion 32a of the base support 32.

  As a result, the base elastic holding body 34 fixes the surface acoustic wave propagation base 12 on the base seat portion 32a of the base support 32 in a detachable manner. The base elastic support 34 has a simple configuration, but the surface acoustic wave propagation base 12 is attached to the surface support circuit 32 without attaching anything to the surface acoustic wave circuit 12 a of the surface acoustic wave propagation base 12. It is possible to reliably and quickly perform the replacement with the surface acoustic wave propagation base 12 having a new sensitive film on the surface acoustic wave circuit 12a.

  The ends 34b on both sides of the base elastic support 34 are brought into contact with and frictionally engaged with the inner peripheral surfaces of the engagement recesses 32e on both sides of the base seat 32a of the base support 32 (ie, by the base elastic support 34). In order to fix the surface acoustic wave propagation substrate 12 on the substrate seat 32a of the substrate support 32, as shown in FIG. 5B, the substrate seat 32a of the substrate support 32 is placed on the substrate seat 32a. On the outer surface of the surface acoustic wave propagation substrate 12 placed on the opposite side of the substrate support 32, the first contact point FP in contact with the central portion of the substrate elastic support 34 and the ends on both sides of the substrate elastic support 34 are arranged. A first straight line FL that connects each of the second contacts SP that first contact the corresponding engaging recesses 32e of the base support 32, and a base seat portion of the base support 32. In 32a, the outer surface of the surface acoustic wave propagation base 12 is the second contact. A second straight SL connecting the third contacts TP in contact with P side, but the angle α may be equal to or less than 90 degrees. If it exceeds 90 degrees, it becomes difficult to stably fix the base elastic holding body 34 to the base support 32 from the mechanical viewpoint. However, in order to make the above-mentioned fixing by the above-described friction engagement more reliable against the vibration in the vertical direction by using the elastic force of the end portions 34b on both sides of the base elastic holding body 34, the angle α is 70 degrees or less. It is preferable that

[Modification of Second Embodiment]
Next, a modification of the spherical surface acoustic wave device 30 according to the second embodiment of the present invention will be described with reference to FIGS. 6 (A) and 6 (B).

  The spherical surface acoustic wave device 30 'according to this modification is different from the spherical surface acoustic wave device 30 according to the second embodiment described above with reference to FIGS. 5A and 5B. The first and second externals of the interdigital electrodes of the surface acoustic wave / excitation / detection means 36 provided on the base elastic support 34 'and the structure of the base support 32' and the base elastic support 34 '. The first and second terminals 32c and 32d for the connection terminal 36a are not provided because they are not provided on the base support 32 '.

  In the spherical surface acoustic wave device 30 ′ according to the modification, the same constituent members as those of the spherical surface acoustic wave device 30 according to the second embodiment are used as the spherical surface acoustic waves according to the second embodiment. The same reference numerals as those used for the corresponding components of the device 30 are attached, and detailed description thereof is omitted.

  In the spherical surface acoustic wave device 30 'according to the modification, as shown in FIG. 6A, the substrate support 32' has an angular U shape, and a pair thereof. The extending end portions 32′g of the side walls 32′f are bent so as to be away from each other in the direction intersecting the extending direction of the pair of side walls 32′f. A base seat portion in which a region not including the surface acoustic wave circuit 12a is placed on the outer surface of the surface acoustic wave propagation base 12 on the central wall 32'h of the square U-shaped base support 32 '. 32'i is provided.

  The base support 32 ′ is formed of a nonconductor, such as plastic or glass epoxy material. Alternatively, it can be formed of a conductor such as metal coated with a non-conductor such as plastic.

  The base seat portion 32 ′ i is configured by a recess in which an area including the surface acoustic wave peripheral circuit 12 a is seated on the outer surface of the surface acoustic wave propagation base 12. The recess has substantially the same size and shape as the above-mentioned region of the outer surface of the surface acoustic wave propagation base 12 seated thereon, and is formed on the outer surface of the surface acoustic wave propagation base 12 seated there. Line contact or surface contact is made with the region.

  A portion 32 ′ j corresponding to the surface acoustic wave circuit 12 a included in the region of the outer surface of the surface acoustic wave propagation base 12 seated thereon is further recessed in the recess of the base seat portion 32 ′ i. Yes. As a result, in the recesses of the base seat portion 32'i, portions on both sides of the surface acoustic wave circuit 12a in the region including the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation base body 12 (that is, A region not including the surface acoustic wave circuit 12a) is placed on the outer surface.

  Thus, the surface acoustic wave circuit 12a of the surface acoustic wave propagation substrate 12 placed in the recess of the substrate seat portion 32a of the substrate support 32 'is placed on the central wall 32'h of the substrate support 32'. Directed in a direction orthogonal to the surface on which the recess of the base seat portion 32′i is formed, and directed to a predetermined circumferential position on the base surface with the base seat portion 32′i as the center. Yes.

  The width between the pair of side walls 32 ′ f of the substrate support 32 ′ is larger than the diameter of the outer surface of the surface acoustic wave propagation substrate 12. Accordingly, the pair of side walls 32'f are in contact with the outer surface of the surface acoustic wave propagation substrate 12 placed on the substrate seat 32'i of the central wall 32'h of the substrate support 32 'as described above. There is no.

  The extending length of the pair of side walls 32 ′ f from the central wall 32 ′ h to the extending end 32 ′ g is shorter than the diameter of the outer surface of the surface acoustic wave propagation base 12.

  An extended end portion 32 at a position away from the base seat portion 32'i at a pair of side walls 32'f located on both sides of the base seat portion 32'i of the central wall 32'h of the base support 32 '. Both ends of a plate-like base elastic holding body 34 ′ exhibiting elastic resistance against bending are detachably fixed to ′ g. In this modification, both ends of the plate-like base elastic holding body 34 'can be attached to and detached from the extending end 32'g by a known easily removable fixing means 32'k including a fixing screw and a fixing pin, for example. It is fixed to. The base elastic holding body 34 'thus fixed closes the opening between the extended end portions 32'g of the pair of side walls 32'f of the base support body 32'. In the meantime, the central portion of the plate-like base elastic holding body 34 ′ of the surface acoustic wave propagation base 12 mounted on the base seat portion 32 ′ i of the central wall 32 ′ h of the base support 32 ′ is provided. In the surface acoustic wave circuit 12a on the outer surface, the base support 32 'contacts the side opposite to the base seat 32'i. Further, both end portions of the plate-like base elastic holding body 34 'can be easily attached to and detached from the extended end portions 32'g of the pair of side walls 32'f of the base support body 32' by a known fixing means 32'k. Since the base elastic holding body 34 'is fixed, both sides of the contacting portion 34a are pressed against the base seat 32'i of the base support 32' against the elastic resistance.

  The central portion of the plate-like base elastic holding body 34 ′ presses the surface acoustic wave propagation base 12 toward the base seat 32 ′ i of the base support 32 ′ by the elastic force generated by this pressing, and the surface acoustic wave propagation base. 12 is elastically clamped between the base seat portion 32'i.

  As shown in FIG. 6B, the contacting portion 34 a in the central portion of the base elastic holder 34 ′ is a surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation base 12 in contact therewith. In 12a, it is comprised by the recessed part which has the substantially same dimension shape as the part on the opposite side to base | substrate seat part 32'i of base-body support body 32 '.

  The interdigital electrode of the surface acoustic wave / excitation / detection means 36 is disposed on the contacting portion 34a of the base elastic holder 34 '. The base elastic holder 34 'is made of a nonconductor such as plastic that exhibits elastic resistance against bending, and the interdigital electrode of the surface acoustic wave / excitation / detection means 36 is such a base elastic holder 34'. Is formed by a known terminal forming means. On the surface of the base elastic holder 34 ', first and second external connection terminals 36a and 36b for the interdigital electrode are formed together with the interdigital electrode. In this modified example, the interdigital electrodes of the surface acoustic wave / excitation / detection means 36 have the first and second external connection terminals 36a and 36b directly operated by the operation control means shown in FIG. 20. Therefore, as in the case of the spherical surface acoustic wave device 30 according to the second embodiment described above, even if one of the first and second external connection terminals 36a and 36b of the interdigital electrode is grounded. There is no problem at all, which is preferable for noise prevention.

  The base elastic holder 34 'of this modification is pressed against the elastic force as compared with the base elastic holder 34 of the second embodiment described above with reference to FIGS. 5 (A) and 5 (B). The amount of bending is small. Accordingly, the base elastic holder 34 'is formed of a conductor such as metal coated with a non-conductor such as plastic, and the interdigital electrode and the second electrode of the surface acoustic wave / excitation / detection means 36 are formed on the non-conductor coating. The first and second external connection terminals 36a and 36b can also be formed. However, in this case, the thickness of the non-conductor coating is such that when a high-frequency signal is loaded on the interdigital electrode of the surface acoustic wave / excitation / detection means 36 for surface acoustic wave excitation, The pair of comb-shaped terminal portions 36c and 36d of the interdigital electrode must have a sufficient thickness so as not to be short-circuited through the conductor covered with the nonconductive film. Alternatively, a portion where the pair of comb-shaped terminal portions 36c and 36d are disposed in the base elastic holder 34 '(in this modification, a recess 34a where the interdigital electrode of the surface acoustic wave / excitation / detection means 36 is disposed). Only) or the vicinity thereof is covered with a material configured to prevent the short circuit described above.

  Furthermore, as long as the base elastic holder 34 ′ exhibits a necessary elastic resistance against bending, the surface elastic wave propagation base is made of a softer plastic because the degree of adhesion to the outer surface of the surface acoustic wave propagation base 12 is increased. 12 outer surfaces can be held more stably. Alternatively, the base elastic holder 34 'is formed only in the contact portion 34a (that is, the recess in which the interdigital electrode of the surface acoustic wave / excitation / detection means 36 is disposed) at the center of the base elastic holder 34'. By forming a non-conductive film that is softer than the plastic that is used, the degree of adhesion to the outer surface of the surface acoustic wave propagation substrate 12 is increased, and the outer surface of the surface acoustic wave propagation substrate 12 can be held more stably. it can.

  Further, as in the case of the second embodiment described above with reference to FIGS. 5A and 5B, the substrate elasticity on which the interdigital electrodes of the surface acoustic wave / excitation / detection means 36 are formed. In the contact portion 34a of the central portion of the holding body 34 ', the portion other than the plurality of comb-like electrode branches 36e of the interdigital electrode is not contacted with the surface acoustic wave circuit 12a. By reducing the depth from 36e, the factor of attenuating the propagation energy of the surface acoustic wave in the surface acoustic wave circuit 12a can be further reduced.

[Third Embodiment]
Next, a spherical surface acoustic wave device 40 according to a third embodiment of the present invention will be described with reference to FIGS.

  The spherical surface acoustic wave device 40 according to the third embodiment is used in the spherical surface acoustic wave device 10 according to the first embodiment of the present invention described above with reference to FIGS. The same surface acoustic wave propagation substrate 12 as the surface acoustic wave propagation substrate 12 is used. That is, the surface acoustic wave propagation substrate 12 is continuously formed in an annular shape by at least a part of a spherical shape, and the surface acoustic wave that can be excited and propagated in the direction in which the ring is continuous. A surface acoustic wave circuit 12a capable of rotating around is included on the outer surface. The surface acoustic wave circuit 12a of the surface acoustic wave propagation base 12 used in the surface acoustic wave device 40 according to the third embodiment includes the surface acoustic wave device according to the first embodiment. In the same manner as the surface acoustic wave propagation substrate 12 used in FIG. 10, the surface acoustic wave circuit 12 a is provided with a surface acoustic wave / excitation / detection means 14.

  The spherical surface acoustic wave device 40 according to the third embodiment further includes a support 42 and a substrate holder 44 that holds the surface acoustic wave propagation substrate 12 on one side of the support 42. .

  In this embodiment, the support 42 may be formed of a non-conductor, such as plastic or glass epoxy material, and a wiring board generally called a printed wiring board may be used.

  In this embodiment, the substrate holder 44 includes a fixed portion 44a fixed at a predetermined position of the support 42, and protrudes from the fixed portion 44a to one side of the support 42 to the outer surface of the surface acoustic wave propagation substrate 12. A region excluding the surface acoustic wave peripheral circuit 12a is sandwiched from both radial sides of the surface acoustic wave propagation base 12, and the surface acoustic wave propagation base 12 is held outside one side of the support 42. Holding part 44b.

  In this embodiment, the base body holding body 44 is formed in a substantially U shape by a material having elasticity, such as plastic, and has a fixing portion 44a whose central portion is fixed at a predetermined position of the support body 42. The surface area of the surface acoustic wave propagation substrate 12 is a region excluding the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation substrate 12 with a pair of both sides protruding from the fixed portion 44a to one side of the support 42. A pair of holding portions 44b that hold the surface acoustic wave propagation base 12 outwardly on one side of the support 42 by elastically sandwiching it from both sides in the radial direction are configured.

  In this embodiment, the pair of holding portions 44b of the base body holding body 44 are portions opposite to each other in the radial direction of the surface acoustic wave propagation base 12 on both sides of the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation base 12. Are elastically sandwiched from both sides in the radial direction, and a pair of first and second pairs of comb-shaped terminal portions 14a and 14b of the surface acoustic wave / excitation / detection means 14 are provided at the opposite portions. External connection terminals 14d, 14e are arranged.

  The pair of holding portions 44b of the base body holding body 44 extend between the positions where the first and second external connection terminals 14a and 14b of the surface acoustic wave / excitation / detection means 14 are in contact with the fixing portion 44a. A pair of conductive paths 44c and 44d are provided.

  In the case where the substrate holder 44 is made of a nonconductor such as plastic, the pair of conductive paths 44c and 44d is formed by attaching a conductor such as gold, copper, or aluminum to the surface of the substrate holder 44. Composed.

  The support 42 includes a pair of terminals 42 a and 42 b that are in contact with the pair of conductive paths 44 c and 44 d in the fixing portion 44 a of the base body holder 44. The pair of terminals 42a and 42b are provided on the surface acoustic wave propagation substrate 12 in the surface acoustic wave device 10 according to the first embodiment described above with reference to FIGS. It is connected to the known operation control means 20 which is the same as the known operation control means 20 used for the means 14.

  In a normal electronic circuit, one of the pair of electrodes is often a ground-side electrode. In the present invention, the pair of external connection terminals 14d and 14e of the interdigital electrode is connected to the substrate support 42. Even if one of the first and second terminals 42a and 42b is connected to the ground, there is no problem at all, which is preferable for noise prevention.

  The portion of the pair of holding portions 44b of the substrate holder 44 that sandwiches the region excluding the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation substrate 12 corresponds to the outer surface of the surface acoustic wave propagation substrate 12. The portion is configured as a recess 44e that makes a receiving line contact or a surface contact.

  In this embodiment, a fitting recess 42c is formed at a predetermined position of the support 42 to which the fixing portion 44a of the base body holding body 44 is fixed, and is formed in a substantially U shape by an elastic material. The fixed portion 44a at the center of the substrate holding body 44 is fitted in the fitting recess 42c at a predetermined position of the support 42 so that it can be easily attached and detached.

  The pair of terminals 42a and 42b of the support 42 are disposed on the inner peripheral surface of the fitting recess 42c, and the fixing portion 44a at the center of the base body holder 44 is fitted into the fitting recess 42c. As a result, the pair of conductive paths 44c and 44d of the substrate holder 44 are brought into contact with the fixing portion 44a of the substrate holder 44.

  In this embodiment, the surface acoustic wave propagation substrate 12 can be easily inserted and removed between the pair of holding portions 44b by separating the pair of holding portions 44b of the substrate holding body 44 from each other against elasticity. The pair of holding portions 44b are made to approach each other by elasticity while the surface acoustic wave propagation substrate 12 is inserted between the pair of holding portions 44b spaced apart from each other. Accordingly, as shown in FIG. 7B, the surface acoustic wave propagation base 12 can be easily held by the pair of holding portions 44 b on the outer side on one side of the support 42.

  At this time, the surface acoustic wave / excitation / detection means 14 in which the recesses 44e of the pair of holding portions 44b of the base body holding body 44 are located on both sides of the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation base body 12 is provided. The pair of external connection terminals 14a and 14b are in contact with the receiving line or in surface contact. As a result, the pair of external connection terminals 14d and 14e of the surface acoustic wave / excitation / detection means 14 are connected to the conductive paths 44c and 44d and the conductive paths 44c and 44d disposed in the recess 44e at the support 42. The operation control means 20 is connected via the first and second terminals 42a and 42b. Further, the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation substrate 12 does not contact anything.

  In addition, the recesses 44e of the pair of holding portions 44b of the base holder 44 are arranged in the radial direction of the surface acoustic wave propagation base 12 on both sides of the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation base 12 received therein. It is preferable that they have substantially the same size and shape as the opposite parts. The reason is that the recesses 44e of the pair of holding portions 44b are opposite in the radial direction of the surface acoustic wave propagation base 12 on both sides of the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation base 12 received therein. When the shape and shape are not substantially the same as the portion, the surface acoustic wave / excitation of the surface acoustic wave propagation substrate 12 in which a strong local pressure is present in the opposite portion by locally contacting the opposite portion. This is because there is a possibility that the pair of external connection terminals 14d and 14e of the detecting means 14 will be disconnected, and the pair of external connection terminals 14d and 14e in that part may be disconnected.

[Fourth Embodiment]
Next, a spherical surface acoustic wave device 50 according to a fourth embodiment of the present invention will be described with reference to FIGS.

  The spherical surface acoustic wave device 50 according to the fourth embodiment is used in the spherical surface acoustic wave device 10 according to the first embodiment of the present invention described above with reference to FIGS. The same surface acoustic wave propagation substrate 12 as the surface acoustic wave propagation substrate 12 is used. That is, the surface acoustic wave propagation substrate 12 is continuously formed in an annular shape by at least a part of a spherical shape, and the surface acoustic wave that can be excited and propagated in the direction in which the ring is continuous. A surface acoustic wave circuit 12a capable of rotating around is included on the outer surface. The surface acoustic wave circuit 12a of the surface acoustic wave propagation base 12 used in the surface acoustic wave device 50 according to the fourth embodiment includes the surface acoustic wave device according to the first embodiment. In the same manner as the surface acoustic wave propagation substrate 12 used in FIG. 10, the surface acoustic wave circuit 12 a is provided with a surface acoustic wave / excitation / detection means 14.

  The spherical surface acoustic wave device 50 according to the fourth embodiment further includes a support 52 and a base holder 54 that holds the surface acoustic wave propagation base 12 on one side of the support 52. .

  In this embodiment, the support 52 may be formed of a non-conductor, such as plastic or glass epoxy material, and a wiring board generally called a printed wiring board may be used.

  In this embodiment, the base elastic holding body 54 is configured as a substantially U-shaped band plate made of an elastic material such as plastic, and a pair of both side portions 54a are outside the surface acoustic wave propagation base 12. The region excluding the surface acoustic wave circuit 12 a on the surface is elastically sandwiched from both radial sides of the surface acoustic wave propagation base 12, and the surface acoustic wave propagation base 12 is held outward on one side of the support 52. In addition, the end portions 54b of the pair of both side portions 54a are detachably fixed to the support body 52 against the elastic force.

  In this embodiment, the pair of both side portions 54a of the base elastic holding body 54 is opposite to the outer surface of the surface acoustic wave propagation base 12 in the radial direction of the surface acoustic wave propagation base 12 on both sides of the surface acoustic wave circuit 12a. The portion is elastically sandwiched from both sides in the radial direction, and the pair of first and first pairs of comb-shaped terminal portions 14a and 14b of the surface acoustic wave / excitation / detection means 14 are sandwiched between the opposite portions. Two external connection terminals 14d and 14e are arranged.

  A pair of both side portions 54a of the base elastic holding member 54 extend between a position where the first and second external connection terminals 14a and 14b of the surface acoustic wave / excitation / detection means 14 are in contact with the end portion 54b. The pair of conductive paths 54c and 54d is provided.

  When the base elastic holding body 54 is made of a non-conductor such as plastic, for example, the pair of conductive paths 54c and 54d is formed of a highly conductive metal thin film such as gold, copper, or aluminum by, for example, photolithography ( By photolithography, the surface of the substrate holder 54 is molded.

  The support body 52 contacts the pair of conductive paths 54c and 54d of the pair of both side portions 54a at positions where the end portions 54b of the pair of both side portions 54a of the base elastic holding body 54 are easily detachably fixed. A pair of terminals 52a and 52b are provided. The pair of terminals 52a and 52b are provided on the surface acoustic wave propagation substrate 12 in the surface acoustic wave device 10 according to the first embodiment described above with reference to FIGS. It is connected to the known operation control means 20 which is the same as the known operation control means 20 used for the means 14.

  In a normal electronic circuit, one of the pair of electrodes is often a ground-side electrode. In the present invention, one of the support bodies 52 to which the pair of external connection terminals 14d and 14e of the interdigital electrode is connected. Even if one of the pair of terminals 52a and 52b is grounded, there is no problem at all, which is preferable for noise prevention.

  A portion of the pair of side portions 54 a of the base elastic holding member 54 that sandwiches the region excluding the surface acoustic wave circuit 12 a on the outer surface of the surface acoustic wave propagation base 12 corresponds to the outer surface of the surface acoustic wave propagation base 12. This portion is configured as a recess 54e that makes a receiving line contact or a surface contact.

  Note that the recesses 54e of the pair of side portions 54a of the base elastic holding body 54 are regions excluding the surface acoustic wave peripheral circuit 12a on the outer surface of the surface acoustic wave propagation base 12 received therein (in this embodiment, elastic It is preferable that they have substantially the same size and shape as the diametrically opposite portions of the surface acoustic wave propagation base 12 on both sides of the surface wave circuit 12a. The reason is that the recesses 44e of the pair of both side portions 54a have a region excluding the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation base 12 received therein (in this embodiment, the surface acoustic wave circumference). The surface acoustic wave propagation substrate 12 that is received in the recesses 44e of the pair of both side portions 54a is not substantially the same size and shape as the diametrically opposite portion of the surface acoustic wave propagation substrate 12 on both sides of the circuit 12a. The surface of the outer surface of the surface acoustic wave circuit 12a excluding the surface acoustic wave circuit 12a (in this embodiment, on both sides of the surface acoustic wave circuit 12a is locally in contact with the area opposite to the radial direction of the surface acoustic wave propagation substrate 12). Thus, the first and second external connection terminals of the surface acoustic wave / excitation / detection means 14 of the surface acoustic wave propagation substrate 12 in which a locally strong pressure is in the region (the diametrically opposite portion in this embodiment). 1 d, takes the 14e, first and second external connection terminals 14d of the part, because 14e is likely to break.

  In this embodiment, a locking recess 52c is formed at a predetermined position of the support body 52 to which the end portions 54b of the pair of both side portions 54a of the base elastic holding body 54 are fixed, and has elasticity. Thus, the end portions 54b of the pair of both side portions 54a of the base elastic holding body 54 configured in a substantially U shape are locked against a locking recess 52c at a predetermined position of the support body 52 against elastic force. It is fixed so that it can be easily detached.

  The pair of terminals 52a and 52b of the support body 52 are disposed on the inner peripheral surface of the locking recess 52c, and the end portions 54b of the pair of both side portions 54a of the base elastic holding body 54 serve as the locking recess 52c. By being locked against the elastic force, the ends 54b of the pair of both side portions 54a of the base elastic holding body 54 come into contact with the pair of conductive paths 54c and 54d of the base elastic holding body 54.

  In this embodiment, the end portions 54b of the pair of both side portions 54a are made to approach each other against the elasticity by causing the end portions 54b of the pair of both side portions 54a to approach each other against elasticity. The surface acoustic wave propagation base 12 can be easily removed between the pair of side portions 54a by pulling the end portions 54b of the pair of side portions 54a away from each other by elasticity. Can be inserted and removed. The end portions 54b of the pair of side portions 54a are made elastic while the surface acoustic wave propagation substrate 12 is inserted between the recesses 54e of the pair of side portions 54a that are spaced apart from each other. In this state, the end portions 54b of the pair of both side portions 54a are inserted into the locking recesses 52c at predetermined positions of the support body 52, and the end portions 54b of the pair of both side portions 54a are further inserted. As shown in FIG. 8 (B), the end portions 54b of the pair of both side portions 54a are engaged with each other by the elastic recesses 52c at predetermined positions of the support body 52. The surface acoustic wave propagation base 12 can be easily held by the recesses 54e of the pair of both side portions 54a of the base elastic holding body 54 outside one side of the support 52.

  At this time, the surface acoustic wave excitation / detection means in which the recesses 54e of the pair of side portions 54a of the base elastic holding body 54 are located on both sides of the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation base 12 The 14 first and second external connection terminals 14a and 14b are in contact with the receiving line or in surface contact. As a result, the first and second external connection terminals 14a and 14b of the surface acoustic wave / excitation / detection means 14 are provided with the conductive paths 54c and 54d and the conductive paths 54c and 54d disposed in the recess 54e and the support body 52. Is connected to the operation control means 20 through a pair of terminals 52a and 52b connected in FIG. Further, the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation substrate 12 does not contact anything.

[Fifth Embodiment]
Next, a spherical surface acoustic wave device 60 according to a fifth embodiment of the present invention will be described with reference to FIGS.

  The spherical surface acoustic wave device 60 according to the fifth embodiment is used in the spherical surface acoustic wave device 10 according to the first embodiment of the present invention described above with reference to FIGS. The same surface acoustic wave propagation substrate 12 as the surface acoustic wave propagation substrate 12 is used. That is, the surface acoustic wave propagation substrate 12 is continuously formed in an annular shape by at least a part of a spherical shape, and the surface acoustic wave that can be excited and propagated in the direction in which the ring is continuous. A surface acoustic wave circuit 12a capable of rotating around is included on the outer surface. Nevertheless, the surface acoustic wave circuit 12a of the surface acoustic wave propagation base 12 used in the spherical surface acoustic wave device 60 according to the fifth embodiment has a spherical elasticity according to the first embodiment. The surface acoustic wave propagation substrate 12 used in the surface acoustic wave device 10 is not provided with the surface acoustic wave / excitation / detection means 14 provided in the surface acoustic wave circuit 12a.

  The spherical surface acoustic wave device 60 according to the fifth embodiment further includes a support 62 and a base elastic support 64 that holds the surface acoustic wave propagation base 12 on one side of the support 62. Yes.

  In this embodiment, the support body 62 may be formed of a non-conductive material such as plastic or glass epoxy material, and a wiring board generally called a printed wiring board may be used.

  In this embodiment, the base elastic holding body 64 is configured as a substantially U-shaped band plate by a non-conductive material such as plastic, and one of the pair of side portions 64a is a surface acoustic wave propagation base. 12 is in contact with the surface acoustic wave circuit 12a, and the other side of the pair of both side portions 64a is a region on the outer surface of the surface acoustic wave propagation substrate 12 excluding the surface acoustic wave circuit 12a. The surface acoustic wave propagation base 12 is abutted from the opposite side of the radial direction of the surface acoustic wave propagation base 12 and elastically sandwiches the surface acoustic wave propagation base 12 together with one of the pair of both side portions 64a to support the surface acoustic wave propagation base 12 While being held outward on one side of the body 62, the end portions 64b of the pair of both side portions 64a are detachably fixed to the support body 62 against the elastic force.

  In one of the pair of both side portions 64a, the portion of the outer surface of the surface acoustic wave propagation base 12 that is in contact with the region including the surface acoustic wave circuit 12a is the outer surface of the surface acoustic wave propagation base 12 seated there. It is configured as a recess 64c having substantially the same size and shape as the above-described region, and is in surface contact with the region on the outer surface of the surface acoustic wave propagation base 12 in contact therewith.

  A portion of the outer surface of the surface acoustic wave propagation base 12 that is in contact with a region other than the surface acoustic wave circuit 12a on the other side of the pair of both side portions 64a is a surface acoustic wave circuit on both sides of the surface acoustic wave circuit 12a. The bridge portion 64d is in contact with a position away from 12a (that is, a region not including the surface acoustic wave circuit 12a on the outer surface) and straddles the surface acoustic wave circuit 12a.

  In one of the pair of both side portions 64a of the base elastic holding body 64, a portion of the outer surface of the surface acoustic wave propagation base 12 that is in contact with a region including the surface acoustic wave circuit 12a (in this embodiment, the region is In the surface contacted recess 64c, the surface acoustic wave is detected by the surface acoustic wave circuit 12a by exciting the surface acoustic wave and circulating the surface acoustic wave and detecting the surface acoustic wave that has circulated the surface acoustic wave circuit 12a. Excitation / detection means 66 is provided.

  The surface acoustic wave / excitation / detection means 66 includes first and second external connection terminals 66 a and 66 b extending toward the end portions 64 b of the pair of both side portions 64 a of the base elastic holding body 64.

  When the base elastic holding body 64 is made of a nonconductor such as plastic, the surface acoustic wave / excitation / detection means 66 and the first and second external connection terminals 66a and 66b are, for example, gold, copper, A highly conductive metal thin film such as aluminum is formed on the surface of the base elastic holder 64 by, for example, photolithography (photoengraving).

  The base support body 62 is formed at the end 64b of the pair of both side portions 64a of the base elastic holding body 64 at a position where the end portions 64b of the pair of both side portions 64a of the base elastic holding body 64 are detachably fixed. The first and second terminals 62a and 62b are in contact with the first and second external connection terminals 66a and 66b. The first and second terminals 62 a and 62 b are connected to a known operation control means 20 for controlling the operation of the surface acoustic wave / excitation / detection means 66. This known operation control means 20 is the surface acoustic wave / excitation / detection of the surface acoustic wave propagation substrate 12 in the spherical surface acoustic wave device 10 according to the first embodiment described above with reference to FIGS. This is the same as the known operation control means 20 used for the means 14.

  Therefore, as in the case of the spherical surface acoustic wave device 10 according to the first embodiment described above, the substrate support 62 to which the first and second external connection terminals 66a and 66b of the interdigital electrodes are connected. Even if one of the first and second terminals 62a and 62b is grounded, there is no problem at all, which is preferable for noise prevention.

  In this embodiment, the surface acoustic wave / excitation / detection means 66 is the surface acoustic wave / excitation / detection unit in the spherical surface acoustic wave device 10 according to the first embodiment of the present invention described above with reference to FIGS. It is comprised by the same interdigital electrode which comprised the detection means 14. FIG.

  In other words, a pair of comb-shaped terminal portions 66c and 66d is formed by alternately arranging a plurality of comb-shaped electrode branches 66e.

  The interdigital electrode of the surface acoustic wave / excitation / detection means 66 is a region including the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation base 12 on one of the pair of both side portions 64a of the base elastic holding body 64. As shown in FIG. 9B, the portion that is in contact with the surface (in this embodiment, the recess 64c where the region is in surface contact) is elastic on the outer surface of the surface acoustic wave propagation substrate 12. The surface bridge circuit portion 64d of the pair of both side portions 64a of the base elastic holding body 64 is brought into surface contact with the surface acoustic wave circuit 12a and the surface acoustic wave propagation circuit 12a is excluded on the outer surface of the surface acoustic wave propagation base body 12. Further, when the end portions 64b of the pair of both side portions 64a of the base elastic holding body 64 are detachably fixed to the base support body 62, the surface elastic wave circuit 12a is as follows. Group to be placed A portion of one of the pair of side portions 64a of the elastic holding body 64 that is in contact with a region including the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation base 12 (in this embodiment, the region is a surface). It is arranged in the recess 64c) to be contacted.

  That is, the direction in which the plurality of comb-like electrode branches 66e of the pair of comb-shaped terminal portions 66c and 66d of the interdigital electrode are alternately arranged extends in a ring shape of the surface acoustic wave circuit 12a (this embodiment) In the embodiment, the crystal surface around the crystal axis Z of the crystal coincides with the outer surface of the surface acoustic wave propagation substrate 12 made of crystal in a direction along an annular line intersecting the outer surface, and preferably a plurality of combs The extending direction of each of the toothed electrode branches 66e extends in a ring shape of the surface acoustic wave circuit 12a (in this embodiment, the crystal axis Z of the crystal on the outer surface of the surface acoustic wave propagation substrate 12 made of crystal). The surrounding crystal plane is perpendicular to the direction along an annular line intersecting the outer surface.

  The interdigital electrode is a portion of one of the pair of side portions 64a of the base elastic holding body 64 that is in contact with the region including the surface acoustic wave peripheral circuit 12a on the outer surface of the surface acoustic wave propagation base 12 (this embodiment). Then, the recess 64c) in which the region is in surface contact is in surface contact with the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation substrate 12, as shown in FIG. 9B. In addition, the other bridge-like portion 64d of the pair of both side portions 64a of the base elastic holding body 64 is brought into contact with a region excluding the surface acoustic wave peripheral circuit 12a on the outer surface of the surface acoustic wave propagation base 12, and further the base elastic holding While the end portions 64b of the pair of both side portions 64a of the body 64 are detachably fixed to the base support body 62 (that is, while nothing is in contact with the surface acoustic wave circuit 12a), a pair of Comb-shaped terminal portions 66c and 66d Known for controlling the operation of the surface acoustic wave / excitation / detection means 66 via the first and second external connection terminals 66a and 66b and the first and second terminals 62a and 62b of the substrate support 62. The high-frequency signal having a predetermined frequency is applied in a burst shape between the pair of comb-shaped terminal portions 66c and 66d by the known operation control unit 20 so as to be predetermined. It is possible to excite the surface acoustic wave of the wavelength to the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation substrate 12. Here, the wavelength of the predetermined frequency and the predetermined wavelength correspond to the arrangement period of the plurality of comb-like electrode branches 66e.

  The width of the surface acoustic wave excited by the interdigital transducer 12a is the distance at which the plurality of comb-like electrode branches 66e of the pair of comb-shaped terminal portions 66c, 66d of the interdigital electrode face each other (electrode Width).

  If a surface acoustic wave having a predetermined range of width and a predetermined wavelength is excited with respect to the radius of the surface acoustic wave circuit 12a, the surface acoustic wave circuit 12a diffuses along the surface acoustic wave circuit 12a in a direction intersecting with the extension direction. It is known from Patent Document 2 described above that the surface acoustic wave can be repeatedly circulated without any problems.

  The known operation control means 20 detects the surface acoustic wave that circulates the surface acoustic wave circuit 12a by the interdigital electrode of the surface acoustic wave / excitation / detection means 66 that is in contact with the surface acoustic wave circuit 12a. Can do.

  In this embodiment, the interdigital electrode of the surface acoustic wave / excitation / detection means 66 in one recess 64 c of the pair of both side portions 64 a of the base elastic holding body 64 is formed on the outer surface of the surface acoustic wave propagation base 12. Since the surface contact with the surface acoustic wave circuit 12a as described above is caused, the propagation energy of the surface acoustic wave is attenuated and the frequency of the surface acoustic wave is decreased. However, the overall length of the interdigital electrode in the extending direction of the surface acoustic wave circuit 12a is much shorter than the length of the surface acoustic wave circuit 12a (approximately equal to the equator length). Compared with the area of the circuit 12a, the area where the interdigital electrode is in contact with the surface acoustic wave circuit 12a is very small. Accordingly, the proportion of attenuation of the propagation energy of the surface acoustic wave that circulates along the surface acoustic wave circuit 12a is small, and the surface acoustic wave can perform significant multiple laps for a desired measurement.

  It should be noted that the surface acoustic wave circuit 12a is interdigitally formed in one of the recesses 64c of the pair of both side portions 64a of the base elastic holding body 64 on which the interdigital electrode of the surface acoustic wave / excitation / detection means 66 is formed. The portion of the electrode other than the plurality of comb-like electrode branches 66e does not come into contact with the above-mentioned portion so as to be recessed from the plurality of comb-like electrode branches 66e, thereby attenuating the propagation energy of the surface acoustic wave in the surface acoustic wave circuit 12a. Factors can be further reduced.

  In this embodiment, a non-conductor is used for the base elastic holding body 64 for the following reason. That is, when the base elastic holding body 64 is made of a conductor whose surface is covered with a non-conductive film, the surface acoustic wave is applied to the interdigital electrode of the surface acoustic wave / excitation / detection means 66 formed on the surface of the base elastic holding body 64. When a high-frequency signal is loaded for excitation, a pair of comb-shaped terminal portions 66c and 66d of the interdigital electrode is covered with a thin non-conductive film although it is covered with a non-conductive film. This is because there is a high possibility of short-circuiting through the conductor.

  In other words, if the above-described short circuit can be prevented in the pair of comb-shaped terminal portions 66c and 66d of the interdigital electrode, a metal such as stainless steel having elasticity in which the base elastic holding body 64 is covered with a nonconductor is provided. Can be formed. For example, the portion where the surface acoustic wave / excitation / detection means 66 is formed in one of the pair of both side portions 64a of the base elastic holding body 64, in this embodiment, only the recess 64c or the vicinity thereof is described above. Cover with material configured to prevent short circuit.

  Further, as long as the elastic support body 64 exhibits the necessary elastic resistance against bending, the degree of adhesion to the outer surface of the surface acoustic wave propagation substrate 12 increases because it is made of a softer plastic. The outer surface of can be held more stably. Alternatively, a portion of one of the pair of both side portions 64a of the base elastic holder 64 that contacts the surface acoustic wave circuit 12a of the surface acoustic wave propagation base 12 (ie, the interdigital electrode of the surface acoustic wave / excitation / detection means 66) By forming a non-conductive film that is more flexible than the plastic constituting the base elastic holding body 64 only in the recess 64c), the degree of adhesion to the outer surface of the surface acoustic wave propagation base 12 is increased and elasticity is increased. The outer surface of the surface wave propagation substrate 12 can be held more stably.

  In this embodiment, a locking recess 62c is formed at a predetermined position of the support body 62 to which the end portions 64b of the pair of both side portions 64a of the base elastic holding body 64 are detachably fixed. The ends 64b of the pair of both side portions 64a of the base elastic holding body 64, which is formed in a substantially U shape by the material possessed, are engaged with the locking recess 62c at a predetermined position of the support body 62 against the elastic force. By being stopped, it is fixed so as to be easily detachable.

  The pair of terminals 62a and 62b of the support body 62 are arranged on the inner peripheral surface of the locking recess 62c, and the end portions 64b of the pair of both side portions 64a of the base elastic holding body 64 are the locking recesses 62c. By being locked against the elastic force, the ends 64b of the pair of both side portions 64a of the base elastic holder 64 come into contact with the first and second external connection terminals 66a and 66b of the base elastic holder 64. .

  In this embodiment, the end portions 64b of the pair of both side portions 64a of the base elastic holding body 64 are made to approach each other against elasticity, whereby the end portions 64b of the pair of both side portions 64a are fixed to a predetermined portion of the support body 62. The surface acoustic wave propagation substrate 12 can be easily pulled between the pair of both side portions 64a by pulling the end portions 64b of the pair of both side portions 64a away from each other by elasticity. Can be inserted and removed. A pair of surface acoustic wave propagation bases 12 is inserted between one recess 64c and the other bridge-like part 64d of a pair of side parts 64a spaced apart from each other of the base elastic holding body 64. The end portions 64b of the both side portions 64a are made to approach each other against elasticity, and in this state, the end portions 64b of the pair of both side portions 64a are inserted into the locking recesses 62c at predetermined positions of the support body 62, and The end portions 64b of the pair of both side portions 64a are elastically moved away from each other, and the end portions 64b of the pair of both side portions 64a are locked to the locking recesses 62c at predetermined positions of the support body 62, as shown in FIG. As shown in FIG. 5B, the surface acoustic wave propagation base 12 can be easily held by the pair of both side portions 64a of the base elastic holding body 64 on the outer side on one side of the support body 62.

  At this time, a pair of comb-shaped terminal portions 66c and 66d of the interdigital electrode of the surface acoustic wave / excitation / detection means 66 provided in one recess 64e of the pair of both side portions 64a of the base elastic holding body 64. Are in surface contact with the surface acoustic wave circuit 12 a on the outer surface of the surface acoustic wave propagation substrate 12, and the other bridge-shaped portion 64 d of the pair of both side portions 64 a is surface acoustic wave on the outer surface of the surface acoustic wave propagation substrate 12. Contact is made on both sides of the surface acoustic wave circuit 12a, which is a region excluding the circuit 12a. As a result, the pair of comb-shaped terminal portions 66c and 66d of the interdigital electrode of the surface acoustic wave / excitation / detection means 66 are provided on the pair of both side portions 64a of the base elastic holding body 64. Two external connection terminals 66 a and 66 b are connected to the operation control means 20 via first and second terminals 62 a and 62 b connected to the support body 62. Further, the surface acoustic wave circuit 12a on the outer surface of the surface acoustic wave propagation substrate 12 does not contact anything.

FIG. 1 is a schematic longitudinal sectional view of a spherical surface acoustic wave device according to a first embodiment of the present invention. FIG. 2A is a schematic perspective view of a strip-shaped base elastic holding body used in the spherical surface acoustic wave device according to the first embodiment of the present invention; FIG. 2B is a schematic side view showing the elastic substrate supporting body of FIG. 2A and the surface acoustic wave propagating substrate supported by the substrate support; FIG. 1B is a schematic longitudinal cross-sectional view showing a state in which the end portions of the substrate elastic holding body of (B) located on both sides of the surface acoustic wave propagation substrate are fixed to the substrate support with the surface acoustic wave propagation substrate FIG. 2D is a cross-sectional view of the base elastic carrier of FIG. 2B with the surface acoustic wave propagating base on both sides of the surface acoustic wave propagating base. It is a schematic longitudinal cross-sectional view which shows a mode just before fixing to a support body. FIG. 3 shows the substrate after the end portions of the substrate elastic holding body of FIG. 2 (B) positioned on both sides of the surface acoustic wave propagation substrate with the surface acoustic wave propagation substrate are fixed to the substrate support. The first contact point where the elastic holding member contacts the outer surface of the surface acoustic wave propagation base and the second contact point where both ends of the base elastic holding member first contact the locking recess of the base support member are connected. A first straight line, and a second straight line connecting the second contact and a third contact where the outer surface of the surface acoustic wave propagation base is in contact with the base seat portion of the base support on the second contact side. It is a longitudinal cross-sectional view which shows schematically the angle | corner which comprises. 4A is a schematic perspective view of a modification of the spherical surface acoustic wave device according to the first embodiment of the present invention; and FIG. 4B is a diagram of FIG. It is a schematic front view of the base | substrate elastic holding body of the modification of (A). 5 (A) is a schematic back view of a strip-shaped base elastic holder used in the spherical surface acoustic wave device according to the second embodiment of the present invention; FIG. 5B shows a surface acoustic wave propagation substrate according to the second embodiment of the present invention in which the substrate elastic holder of FIG. 5A is accompanied by a surface acoustic wave propagation substrate. It is a longitudinal cross-sectional view which shows a mode that the edge part located in both sides was fixed to the base | substrate support body. 6A is a schematic perspective view of a modification of the spherical surface acoustic wave device according to the second embodiment of the present invention; and FIG. 6B is a diagram of FIG. It is a schematic front view of the base | substrate elastic holding body of the modification of (A). FIG. 7A is a schematic back view of a strip-shaped substrate holder used in the spherical surface acoustic wave device according to the third embodiment of the present invention; (B) is an elastic structure on a pair of both sides after the base body holder of FIG. 7 (A) is bent into a substantially U shape in a spherical surface acoustic wave device according to the third embodiment of the present invention. It is a longitudinal cross-sectional view which shows a mode that the fixing | fixed part between a pair of both sides is being fixed to the support body while pinching | interposing a surface wave propagation base | substrate. FIG. 8A is a schematic back view of a strip-shaped base elastic holder used in a spherical surface acoustic wave device according to the fourth embodiment of the present invention; (B) is a pair of both side portions after the base elastic holding body of FIG. 8 (A) is curved in a substantially U shape in the spherical surface acoustic wave device according to the fourth embodiment of the present invention. FIG. 2 is a longitudinal sectional view schematically showing a state in which ends of a pair of both side portions are fixed to a support body while the surface acoustic wave propagation substrate is sandwiched. 9 (A) is a schematic back view of a strip-shaped base elastic holder used in a spherical surface acoustic wave device according to a fifth embodiment of the present invention; (B) is a pair of both side portions after the base elastic holding body of FIG. 9 (A) is bent into a substantially U shape in the spherical surface acoustic wave device according to the fifth embodiment of the present invention. FIG. 2 is a longitudinal sectional view schematically showing a state in which ends of a pair of both side portions are fixed to a support body while the surface acoustic wave propagation substrate is sandwiched.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Spherical surface acoustic wave apparatus, 12 ... Surface acoustic wave propagation base | substrate, 12a ... Surface acoustic wave circuit, 14 ... Surface acoustic wave and excitation / detection means, 14a, 14b ... Comb-shaped terminal part, 14c ... Comb-shaped electrode Branches, 14d ... first external connection terminal, 14e ... second external connection terminal, 16 ... base support, 16a ... base seat, 16b ... first terminal, 16c ... second terminal, 16d ... engagement Recessed portion, 18 ... base elastic holding body, 18a ... contact portion, 18b ... end portions on both sides, 18c ... conductive path, 20 ... operation control means, CS ... center support, PM ... pressing member, FP ... first Contact, SP ... second contact, FL ... first straight line, TP ... third contact, SL ... second straight line,
10 '... spherical surface acoustic wave device, 16' ... substrate support, 16'c ... second terminal, 16'e ... side wall, 16'f ... extension end, 16'g ... wall in the center, 16 'H ... snap engaging claw, 18' ... base elastic holder,
DESCRIPTION OF SYMBOLS 30 ... Spherical surface acoustic wave apparatus, 32 ... Base support body, 32a ... Base seat part, 32b ... Corresponding part, 32c ... 1st terminal, 32d ... 2nd terminal, 32e ... Engagement recessed part, 34 ... Base elastic Holding body, 34a ... contact part, 34b ... ends on both sides, 36 ... surface acoustic wave / excitation / detection means, 36a ... first external connection terminal, 36b ... second external connection terminal, 36c, 36d ... comb Shape terminal part, 36e ... comb-like electrode branch,
30 '... spherical surface acoustic wave device, 32' ... substrate support, 32'f ... side wall, 32'g ... extended end, 32'h ... wall in the center, 32'i ... substrate seat, 32 ' j ... corresponding portion, 32'k ... fixing means, 34 '... base elastic holder,
40 ... spherical surface acoustic wave device, 42 ... support, 42a, 42b ... terminal, 42c ... fitting recess, 44 ... base holder, 44a ... fixing part, 44b ... holding part, 44c, 44d ... conductive path, 44e ... recesses,
DESCRIPTION OF SYMBOLS 50 ... Spherical surface acoustic wave apparatus, 52 ... Support body, 52a, 52b ... Terminal, 52c ... Locking recess, 54 ... Base elastic holding body, 54a ... Both sides, 54b ... End part, 54c, 54d ... Conductive path, 54e ... recess,
DESCRIPTION OF SYMBOLS 60 ... Spherical surface acoustic wave apparatus, 62 ... Support body, 62a ... 2nd terminal, 62b ... 2nd terminal, 62c ... Locking recess, 64 ... Base elastic holding body, 64a ... Both sides, 64b ... End 64c ... recess, 64d ... bridge-like part, 66 ... surface acoustic wave excitation / detection means, 66a ... first external connection terminal, 66b ... second external connection terminal, 66c, 66d ... comb-shaped terminal part, 66e ... Comb electrode branch

Claims (21)

A surface acoustic wave circuit that is formed continuously in an annular shape by at least a part of a spherical shape and can excite surface acoustic waves, and the excited surface acoustic waves can propagate and circulate in the continuous direction of the ring. A surface acoustic wave propagation substrate included on the outer surface;
A surface acoustic wave provided in the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation substrate is used to excite and circulate the surface acoustic wave in the surface acoustic wave circuit and detect the surface acoustic wave that has circulated in the surface acoustic wave circuit. -Excitation / detection means;
A substrate support including a substrate seat on which the region excluding the surface acoustic wave circuit is mounted on the outer surface of the surface acoustic wave propagation substrate; and
Exhibits elastic resistance against bending, and contacts with the outer surface of the surface acoustic wave propagation substrate placed on the substrate support, except for the surface acoustic wave circuit on the opposite side of the substrate support. A base elastic holding body in which both sides of the portion are pressed against the base support against the elastic resistance, and the end portions on both sides are fixed at positions away from the base seat on both sides of the base seat in the base support; ;
Equipped with a,
The both ends of the base elastic holder are inserted into the base support at positions away from the base seat on both sides of the base seat, and the both ends of the base elastic holder are placed against the elastic resistance. An engaging recess to be engaged is formed,
A first contact point on the outer surface of the surface acoustic wave propagation substrate placed on the substrate seat of the substrate support and the substrate elastic support on the opposite side of the substrate support, and the ends of the both sides of the substrate elastic support A first straight line connecting a second contact point where each of the first portions comes into contact with a corresponding engagement recess of the substrate support first, and a surface acoustic wave propagation substrate at the second contact point and the substrate seat portion of the substrate support member The angle formed by the second straight line connecting the third contact point of the outer surface of the second contact point on the second contact side is 70 degrees or less,
A spherical surface acoustic wave device. The surface acoustic wave / excitation / detection means includes a first external connection terminal disposed on a portion of the outer surface of the surface acoustic wave propagation substrate that is in contact with the substrate elastic holder on the side opposite to the substrate support, and a surface acoustic wave. A second external connection terminal disposed on a portion of the base support placed on the base seat portion of the base support on the outer surface of the propagation base;
The base elastic holder is a member of the outer surface of the surface acoustic wave propagation base that is in contact with the first external connection terminal on the opposite side of the base support and at least one of the ends on both sides. It has a conductive path that extends between the part that contacts the inner surface of the recess,
The substrate support corresponds to the first terminal that contacts the second external connection terminal on the outer surface of the surface acoustic wave propagation substrate in the substrate seat, and at least one of the end portions on both sides of the substrate elastic holding member. A second terminal in contact with the conductive path of the base elastic holder in the engagement recess,
The spherical surface acoustic wave device according to claim 1. 3. The spherical surface acoustic wave device according to claim 2, wherein the base elastic holder is made of a conductive material . The base elastic holder has a strip shape extending linearly between the end portions on both sides,
The portion of the substrate elastic holder that contacts the outer surface of the surface acoustic wave propagation substrate placed on the substrate seat of the substrate support on the side opposite to the substrate support corresponds to the outer surface of the surface acoustic wave propagation substrate. It is configured as a recess for receiving line contact or surface contact with the part to be
Spherical surface acoustic wave device according to any one of claims 1 to 3, characterized in that. A surface acoustic wave circuit that is formed continuously in an annular shape by at least a part of a spherical shape and can excite surface acoustic waves, and the excited surface acoustic waves can propagate and circulate in the continuous direction of the ring. A surface acoustic wave propagation substrate included on the outer surface;
A substrate support including a substrate seat on which a region excluding the surface acoustic wave circuit is mounted on the outer surface of the surface acoustic wave propagation substrate;
Delivers elastic resistance to bending, and contacts the surface acoustic wave circuit on the opposite side of the substrate support with respect to the outer surface of the surface acoustic wave propagation substrate mounted on the substrate support, and both sides of the contact portion. Is pressed against the substrate support against the elastic resistance, and the base ends are fixed against the elastic resistance at positions away from the base seat on both sides of the base seat in the base support. A holding body; and
Surface acoustic wave / excitation / detection provided at the contact portion of the substrate elastic holder for detecting the surface acoustic wave that has circulated around the surface acoustic wave circuit by exciting the surface acoustic wave around the surface acoustic wave circuit. With means;
Spherical shaped surface acoustic wave device you comprising the. The both ends of the base elastic holder are inserted into the base support at positions away from the base seat on both sides of the base seat, and the both ends of the base elastic holder are placed against the elastic resistance. An engaging recess to be engaged is formed,
A first contact point on the outer surface of the surface acoustic wave propagation substrate placed on the substrate seat of the substrate support and the substrate elastic support on the opposite side of the substrate support, and the ends of the both sides of the substrate elastic support A first straight line connecting a second contact point where each of the first portions comes into contact with a corresponding engagement recess of the substrate support first, and a surface acoustic wave propagation substrate at the second contact point and the substrate seat portion of the substrate support member 6. The spherical elastic surface according to claim 5 , wherein an angle formed by a second straight line connecting the third contact point of the outer surface of the second contact point with the second contact point is 70 degrees or less. Wave equipment. The surface acoustic wave / excitation / detection means includes first and second external connection terminals extending toward the both ends of the base elastic holder,
The base support body includes first and second external contact terminals which are in contact with the first and second external connection terminals at the both end portions of the base elastic support body in the engagement recesses corresponding to the both end portions of the base elastic support body. 2 terminals,
The spherical surface acoustic wave device according to claim 6 . The spherical surface acoustic wave device according to claim 7, wherein the base elastic holder is made of a nonconductor . The base elastic holder has a strip shape extending linearly between the end portions on both sides,
The portion of the substrate elastic holder that contacts the outer surface of the surface acoustic wave propagation substrate placed on the substrate seat of the substrate support on the side opposite to the substrate support corresponds to the outer surface of the surface acoustic wave propagation substrate. It is configured as a recess that contacts the receiving surface,
Spherical surface acoustic wave device according to any one of claims 6 to 8, characterized in that. A surface acoustic wave circuit that is formed continuously in an annular shape by at least a part of a spherical shape and can excite surface acoustic waves, and the excited surface acoustic waves can propagate and circulate in the continuous direction of the ring. A surface acoustic wave propagation substrate included on the outer surface;
A surface acoustic wave provided in the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation substrate is used to excite and circulate the surface acoustic wave in the surface acoustic wave circuit and detect the surface acoustic wave that has circulated in the surface acoustic wave circuit. -Excitation / detection means;
A support; and
The diameter of the surface acoustic wave propagation substrate is a fixed portion fixed at a predetermined position of the support, and the region excluding the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation substrate that protrudes from the fixed portion to one side of the support. A substrate holder including a pair of holding portions that are sandwiched from both sides of the direction and hold the surface acoustic wave propagation substrate outward on one side of the support;
Spherical shaped surface acoustic wave device you comprising the. A fitting recess is formed at the predetermined position of the support,
The substrate holding body is formed in a substantially U shape by a material having elasticity, and the central portion thereof constitutes a fixing portion that is fitted into the fitting recess of the support body, and a pair of both side portions are fixed. Surface acoustic wave propagation by elastically sandwiching the region of the surface of the surface acoustic wave propagation substrate excluding the surface acoustic wave circuit from both sides in the radial direction of the surface acoustic wave propagation substrate. A pair of holding portions for holding the base body on the outer side on one side of the support;
The spherical surface acoustic wave device according to claim 10 . The surface acoustic wave / excitation / detection means includes a pair of external connection terminals arranged on a portion held by the pair of holding portions of the substrate holder on the outer surface of the surface acoustic wave propagation substrate,
The pair of holding portions of the substrate holder includes a pair of conductive paths extending between a position in contact with the pair of external connection terminals of the surface acoustic wave / excitation / detection means and the fixed portion,
The support body includes a pair of terminals that are in contact with the pair of conductive paths at the fixing portion of the base body holder.
The spherical surface acoustic wave device according to claim 10, wherein the surface acoustic wave device is a spherical surface acoustic wave device. The portion of the pair of holding portions of the substrate holder that sandwiches the region excluding the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation substrate accepts the corresponding portion of the outer surface of the surface acoustic wave propagation substrate by receiving line contact. Or configured as a surface contact recess,
Spherical surface acoustic wave device according to any one of claims 10 to 12, characterized in that. A surface acoustic wave circuit that is formed continuously in an annular shape by at least a part of a spherical shape and can excite surface acoustic waves, and the excited surface acoustic waves can propagate and circulate in the continuous direction of the ring. A surface acoustic wave propagation substrate included on the outer surface;
A surface acoustic wave provided in the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation substrate is used to excite and circulate the surface acoustic wave in the surface acoustic wave circuit and detect the surface acoustic wave that has circulated in the surface acoustic wave circuit. -Excitation / detection means;
A support; and
The elastic material is substantially U-shaped, and a pair of both side portions are formed on the outer surface of the surface acoustic wave propagation substrate except for the surface acoustic wave circuit in the radial direction of the surface acoustic wave propagation substrate. A substrate in which a surface acoustic wave propagation substrate is held elastically from both sides and held outward on one side of the support, and ends of a pair of both sides are fixed to the support against an elastic force An elastic carrier;
With
At the position where the ends of the pair of both side portions of the base elastic holding body are fixed on the support, a locking recess is formed in which the ends of the pair of both side portions are inserted and locked.
Spherical shaped surface acoustic wave device you wherein a. The surface acoustic wave / excitation / detection means includes a pair of external connection terminals arranged on portions of the outer surface of the surface acoustic wave propagation substrate that are held on a pair of both sides of the substrate elastic holder,
A pair of both side portions of the base elastic holding body includes a pair of conductive paths extending between a portion of the surface acoustic wave / excitation / detection means that contacts the pair of external connection terminals and an end portion,
The support includes a pair of terminals in contact with the pair of conductive paths at the ends of the pair of both sides of the base elastic holder.
The spherical surface acoustic wave device according to claim 14 . A portion that sandwiches the region excluding the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation substrate at a pair of both side portions of the substrate elastic holder is a receiving line corresponding to the outer surface of the surface acoustic wave propagation substrate. Configured as a contact or surface contact recess,
The spherical surface acoustic wave device according to claim 14, wherein the surface acoustic wave device is a spherical surface acoustic wave device. A surface acoustic wave circuit that is formed continuously in an annular shape by at least a part of a spherical shape and can excite surface acoustic waves, and the excited surface acoustic waves can propagate and circulate in the continuous direction of the ring. A surface acoustic wave propagation substrate included on the outer surface;
A support;
The elastic material is substantially U-shaped, and one of the pair of both sides contacts the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation substrate, and the other of the pair of both sides is On the outer surface of the surface acoustic wave propagation substrate, the region excluding the surface acoustic wave circuit is brought into contact with one of the pair of both side portions from the opposite side in the radial direction of the surface acoustic wave propagation substrate, along with one of the pair of both side portions. The surface acoustic wave propagation base is elastically sandwiched to hold the surface acoustic wave propagation base outwardly on one side of the support and a pair of ends on both sides are fixed to the support against the elastic force. A base elastic holding body,
A surface acoustic wave circuit that is provided on one of the pair of both sides contacts the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation substrate to excite the surface acoustic wave to circulate and circulate the surface acoustic wave circuit. Surface acoustic wave / excitation / detection means for detecting surface acoustic waves generated;
Spherical shaped surface acoustic wave device you comprising the. At the position where the ends of the pair of both side portions of the base elastic holding body are fixed on the support, a locking recess is formed in which the ends of the pair of both side portions are inserted and locked.
The spherical surface acoustic wave device according to claim 17 . The surface acoustic wave / excitation / detection means includes first and second external connection terminals extending toward both ends of a pair of both side portions of the base elastic holder,
The base support body includes first and second external connection terminals at the ends of the pair of both side portions of the base elastic support body in the engagement recesses corresponding to the ends of the pair of both side portions of the base elastic support body. First and second terminals in contact with each other,
The spherical surface acoustic wave device according to claim 17 or 18 , wherein the device is a spherical surface acoustic wave device. The spherical surface acoustic wave device according to claim 17 , wherein the base elastic holding body is formed of a nonconductor . The base elastic holder has a strip shape extending linearly between both ends of a pair of both side portions,
A portion of one of the pair of both side portions of the base elastic carrier that contacts the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation base corresponds to the surface acoustic wave circuit on the outer surface of the surface acoustic wave propagation base. The part is configured as a recess to contact the receiving surface,
Spherical surface acoustic wave device according to any one of claims 17 to 20, characterized in that.

Images