JP2010238294A - Laminated body separating device, laminated body separating method, manufacturing method of glass substrate, glass substrate, and magnetic recording medium - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laminated body separating device which separates a spacer by a simple structure. <P>SOLUTION: The laminated body separating device 21 is provided with a laminated body placing part 29 where laminated bodies 4 are placed, and a first actuator 37. The first actuator 37 is provided with a chuck part 39 so as to be opposed to the laminated body placing part 29. The chuck part 39 is provided with an air blow part 45 which sprays air. The air blow part 45 faces a spacer casing part 47 so as to be orthogonal to an adsorption part 41 and is so configured to spray the air to the lower main surface of a glass substrate 1a while the adsorption part 41 adsorbs the glass substrate 1a. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a laminate separation apparatus, a laminate separation method, a glass substrate manufacturing method, a glass substrate, and a magnetic recording medium.

  In recent years, with the advancement of information technology, information recording technology, particularly magnetic recording technology, has made remarkable progress.

  An aluminum substrate has been widely used as a substrate for a magnetic recording medium such as an HDD (Hard Disk Drive) which is one of such magnetic recording techniques.

  However, with the downsizing, thinning, and high-density recording of magnetic disks, in recent years, there has been an increasing demand for glass substrates that have superior substrate surface flatness and substrate strength compared to aluminum substrates.

  Conventionally, for example, as shown in paragraph [0004] of Patent Document 1, a glass substrate is chamfered by forming glass into a disk shape, and end faces and main surfaces are polished, and then impact resistance and vibration resistance are obtained. It has been manufactured by applying a chemical strengthening treatment for improving (Patent Document 1).

  Here, as a method of polishing the end face, since it takes time to polish one by one, for example, as shown in FIG. 4 of Patent Document 2, a plurality of glass substrates are laminated through a spacer and a brush is used. There is a method of automatically polishing the end surfaces of a plurality of glass substrates at once (Patent Document 2).

  The spacer 4 is provided to prevent the end surface from being polished and to prevent the glass substrate from being damaged by the tightening force generated by tightening the glass substrate to fix the laminate during the end surface polishing. It has been.

  On the other hand, as disclosed in Patent Document 2, in the method of polishing a laminated body of glass with a spacer, the glass and the spacer must be separated after polishing.

  Since this separation method takes time in manual work, as in Patent Document 3, a laminated body after polishing is placed in water, and the uppermost glass substrate is adsorbed by a suction pad, and then the water pressure is applied to the glass substrate. There is a method of separating the spacer by adding (Patent Document 3).

Japanese Unexamined Patent Publication No. 2000-076652 JP 2008-269766 A JP 2008-302448 A

  However, in Patent Document 3, since the spacer is separated by water pressure in water, the entire device must be provided in water, and a device for circulating or supplying / draining water is required, which increases the size and complexity of the device. There was a problem.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a laminate separation apparatus capable of separating spacers with a simple structure.

  In order to solve the above problems, the present invention has the following configuration.

(Configuration 1) Placed on the placement portion, a placement portion for placing a laminated body having a plurality of glass base materials and spacers provided between main surfaces of the plurality of glass base materials, Separating means for chucking and separating the glass substrate at the extreme end of the laminated body from the laminated body, and removing the spacer by blowing air to the main surface of the adsorbed glass substrate provided in the separating means And a removing means for removing the laminate.

(Structure 2) The laminate separating apparatus according to Structure 1, further comprising transport means for chucking and transporting the glass substrate chucked by the separation means.

(Structure 3) The laminate separation apparatus according to Structure 2, further comprising a storage portion in which the glass base material chucked by the transport means is stored.

(Structure 4) The separation means includes a first suction part that sucks and chucks one main surface of the glass substrate, and the removal means includes an air blow part provided in the first suction part. The laminated body separation device according to Configuration 3, wherein the air blow unit includes an air outlet provided in the first suction unit.

(Structure 5) The stack separation apparatus according to Structure 4, further comprising first moving means for moving the separation means in the axial direction of the mounting portion.

(Structure 6) The transport means includes a second suction portion that sucks and chucks the other main surface of the glass substrate chucked by the separation means, and the glass substrate sucked by the second suction portion. And a transporting means for transporting the container to the storage unit.

(Structure 7) The transport means includes a rotating means for rotating the second suction part in a direction facing the first suction part, and a second means for moving the second suction part toward the storage part. And a moving means for separating the laminated body according to the sixth aspect.

(Structure 8) The laminate according to Structure 7, wherein the second moving means is means for moving the second suction portion in a direction parallel to the moving direction of the first moving means. Separation device.

(Structure 9) The stack separating apparatus according to Structure 8, further comprising third moving means for moving the storage portion relative to the transport means.

(Configuration 10) The separation unit is moved toward the placement unit using the first moving unit, the glass substrate is chucked using the first suction unit, and the second movement is performed. Control means (a) for moving the second suction part toward the storage part using means, and moving the separation means in a direction away from the placement part using the first movement means. Control means (b) for ejecting air from the air outlet and further moving the second suction portion in a direction away from the storage portion using the second moving means; Control using the rotating means to rotate the second adsorbing part in a direction approaching the first adsorbing part and bring the other main surface of the glass substrate into contact with the first adsorbing part to adsorb Means (c) and said glass substrate from said first adsorption part And a control means (d) for rotating the second suction portion by a predetermined angle in a direction away from the first suction portion while the glass substrate is sucked using the rotating means. And a control means (e) that repeats the control means (a) to (d) in this order.

(Configuration 11) In the step (a), when the second adsorption unit is adsorbing the glass substrate,
The separation means is moved toward the mounting portion using the first moving means, the glass substrate is chucked using the first suction portion, and the second moving means is used. Means for moving the second suction part toward the storage part, storing the glass base material in the storage part, and dechucking the glass base material from the second suction part; ) Using the first moving means to move the separating means in a direction away from the placement portion, and to eject air from the air outlet, and further using the second moving means And moving the second suction part in a direction away from the storage part, and further moving the storage part relative to the transport means using the third moving means. The laminate according to the constitution 10 characterized by Separation device.

(Configuration 12) A method for separating a laminate, wherein the separation device according to any one of configurations 1 to 11 is used.

(Structure 13) A method for producing a glass substrate, comprising the separation method according to Structure 12 in a process.

(Configuration 14) A glass substrate manufactured by the method for manufacturing a glass substrate according to Configuration 13.

(Structure 15) A magnetic recording medium comprising the glass substrate according to Structure 14, and an underlayer, a magnetic layer, a protective layer, and a lubricating layer provided on a main surface of the glass substrate.

  ADVANTAGE OF THE INVENTION According to this invention, the separation apparatus of the laminated body which can isolate | separate a spacer with a simple structure can be provided.

1A is a plan view of the glass substrate 1, FIG. 1B is a cross-sectional view taken along the line AA of FIG. 1A, and FIG. 1C is a cross-sectional view showing the magnetic recording medium 100. 4 is a flowchart showing details of a method for manufacturing the glass substrate 1. 1 is a cross-sectional view showing an end surface polishing apparatus 101. FIG. FIG. 4A is a side view showing the laminate separating apparatus 21, and FIG. 4B is a plan view of the laminate placing portion 29 in FIG. 4A. 3 is a block diagram showing a laminated body separating apparatus 21. FIG. It is a figure which shows the procedure which forms a laminated body using the laminated body separation apparatus 21, Comprising: The support bar 31 is abbreviate | omitting description. It is a figure which shows the procedure which forms a laminated body using the laminated body separation apparatus 21, Comprising: The support bar 31 is abbreviate | omitting description. It is a figure which shows the procedure which forms a laminated body using the laminated body separation apparatus. It is a figure which shows the procedure which forms a laminated body using the laminated body separation apparatus. It is a figure which shows the procedure which forms a laminated body using the laminated body separation apparatus 21, Comprising: The support bar 31 is abbreviate | omitting description.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  First, with reference to FIG. 1, the structure of the glass substrate 1 manufactured using the manufacturing method of the glass substrate using the laminated body separation apparatus 21 which concerns on this embodiment is demonstrated easily.

  As shown in FIG. 1A, the glass substrate 1 has a main body 3 having a disc shape, and an inner hole 5 is formed at the center of the main body 3.

  As shown in FIG. 1B, the main body 3 has substantially smooth main surfaces 7a and 7b.

  The main surfaces 7a and 7b are surfaces on which a layer for recording / reproducing information is formed. For example, as shown in FIG. 1C, one or both of the main surfaces 7a and 7b are provided with an underlayer 18a and magnetic layers. By providing the layer 18b, the protective layer 18c, and the lubricating layer 18d, the glass substrate 1 becomes the magnetic recording medium 100.

  Moreover, as shown in FIG.1 (b), the main body 3 has the inner peripheral end surface 11 and the outer peripheral end surface 9 which are orthogonal to the main surfaces 7a and 7b.

  The inner peripheral end face 11 and the outer peripheral end face 9 are chamfered, and an inner peripheral chamfered face 13 and an outer peripheral chamfered face 15 are provided, respectively.

  Furthermore, the chemical strengthening layer 17 is formed on the surface of the main body 3.

  Although details of the chemical strengthening layer 17 will be described later, for example, a part of the glass ions used as the raw material of the glass substrate 1 is replaced with ions having a larger ion radius to form a compressive stress layer.

  Next, with reference to FIGS. 2-6, the manufacturing method of the glass substrate 1 is demonstrated.

  In the following description, the glass in the manufacturing process is referred to as “glass substrate 1a”, and the finished product is referred to as “glass substrate 1”.

  First, as shown in FIG. 2, the glass used as a raw material is shape | molded in disk shape, and the glass base material 1a is manufactured (step 101).

  Next, as shown in FIG. 2, the main surfaces 7a and 7b are ground (first lapping) in order to adjust the plate thickness of the glass substrate 1a (step 102).

  Next, as shown in FIG. 2, an inner hole 5 (see FIG. 1) is formed in the center of the glass substrate 1a (step 103).

  Next, as shown in FIG. 2, the inner peripheral end face 11 and the outer peripheral end face 9 are chamfered to remove cracks on the end face of the glass substrate 1a (step 104).

  In addition, you may add the process of grinding (2nd lapping) main surface 7a, 7b after chamfering. Thereby, the unevenness | corrugation produced by formation and chamfering of the inner hole 5 can be ground, and the burden at the time of grinding | polishing can be reduced.

  Next, as shown in FIG. 2, the inner peripheral end surface 11 and the outer peripheral end surface 9 of the glass substrate 1a are polished, that is, end surface polishing is performed (step 105).

  Details of step 105 will be described here.

  First, the apparatus and method used for end face polishing in step 105 will be described in detail.

  First, the structure of the end surface polishing apparatus 101 for polishing the end surface will be described with reference to FIG.

  As shown in FIG. 3, the end surface polishing apparatus 101 is an apparatus that simultaneously polishes the end surface of the glass substrate 1 a in the state of a laminated body 4 in which a plurality of sheets are laminated, and fixing the laminated body 4. A part 122, a polishing body 124 for polishing the laminated body 4, a polishing driving part 118 for driving the polishing body 124, and a polishing liquid supply part 141 for supplying a polishing liquid.

  The laminated body 4 is obtained by alternately laminating glass substrates 1 a and spacers 2.

  The fixing unit 122 holds and holds the substrate case 130 that houses the laminate 4, the fastening cover 132 that is fitted to the substrate case 130 and fastens and fixes the laminate 4 via the collar 136, and the substrate case 130. And a rotating holding table 134 that rotates.

  The polishing body 124 is orthogonal to the glass substrate 1 a of the laminate 4, coincides with the central axis of the inner hole 5 of the glass substrate 1 a, has a rotation axis serving as the rotation center of the polishing body 124, and is a polishing body 140. And a plurality of polishing cloths 126 provided on the side wall of the polishing body 140.

  When the end surface is polished using the end surface polishing apparatus 101, the polishing body 124 (the polishing cloth 126) is brought into contact with the inner peripheral end surface 11 and the inner peripheral chamfered surface 13 of the glass substrate 1 a of the laminated body 4. A polishing liquid is supplied between the end surface 11 and the polishing body 124 using the polishing liquid supply unit 141, and the polishing body 124 is rotated in the direction about the rotation axis, so that the inner peripheral end surface 11 and the inner peripheral chamfered surface. 13 is polished.

  Although only the apparatus for polishing the inner peripheral end face 11 and the inner peripheral chamfered face 13 is disclosed in FIG. 3, the configuration of the apparatus for polishing the outer peripheral end face 9 and the outer peripheral chamfered face 15 is basically the same. .

  That is, it has a fixing part for fixing the laminate 4, an abrasive body, and a drive part for rotating the abrasive body, and the abrasive body is rotated while the laminate 4 is fixed by the fixing part. The outer peripheral end surface 9 and the outer peripheral chamfered surface 15 of the glass substrate 1a are polished.

  When the polishing is finished, the glass substrate 1a is separated from the laminate 4.

  Here, the structure and separation method of the laminated body separating apparatus 21 for separating the glass substrate 1a from the laminated body 4 will be described with reference to FIGS.

  First, the structure of the laminated body separation apparatus 21 is demonstrated with reference to FIG. 4 and FIG.

  As shown in FIG. 4A, the stacked body separating apparatus 21 includes a pedestal 23, and a side wall 25 having a surface orthogonal to the upper surface is provided on the upper surface of the pedestal 23.

  The side wall 25 is provided with a support portion 33 having a surface orthogonal to the side wall 25 and parallel to the normal direction of the upper surface of the pedestal 23, and the support portion 33 is arranged to be parallel to the pedestal 23. A plate-shaped pedestal 27 is provided.

  On the upper surface of the pedestal 27, a stacked body mounting portion 29 on which the stacked body 4 is mounted is provided as a mounting portion, and the support portion 33 is adjacent to the stacked body mounting portion 29. A box-shaped spacer accommodating portion 47 in which the separated spacer 2 is accommodated is provided.

  The stacked body placement unit 29 is provided with a plurality of support bars 31 for fixing the stacked body 4, and the stacked body 4 is accommodated in the stacked body mounting unit 29 so as to be surrounded by the support bars 31.

  In addition, as shown in FIG.4 (b), the space | interval 31a of the two support rods 31 which oppose the spacer accommodating part 47 among the support rods 31 is larger than the diameter 31b of the spacer 2, and the glass base material 1a. The diameter is smaller than 31c.

  This is because, as will be described later, when the spacer 2 is separated from the glass substrate 1 a, only the spacer 2 is blown into the spacer accommodating portion 47.

  On the other hand, the support portion 33 is provided with a rail 35 arranged so as to be parallel to the normal direction of the upper surface of the pedestal 23 (the axial direction of the stacked body placement portion 29).

  The rail 35 is provided with a first actuator 37 as a first moving means. The first actuator 37 is provided with a chuck portion 39 as a separating means so as to face the stacked body placing portion 29. Yes.

  The chuck portion 39 is provided with a suction portion 41 as a first suction portion so as to face the stacked body placement portion 29.

  The chuck portion 39 is provided with an air blow portion 45 that blows air through a support portion 43 as a removing means. The air blower 45 has an air outlet directed toward the suction part 41 and toward the spacer housing part 47, and the lower side of the glass base 1a with the suction part 41 adsorbing the glass base 1a. It is comprised so that air can be sprayed on the main surface of.

  The first actuator 37 is configured to be able to move the chuck portion 39 and the air blow portion 45 in the directions of A1 and A2 in FIG.

  Further, a plate-like support portion 49 is provided on the side wall 25 so as to face the support portion 33. The support portion 49 faces the rail 35 so as to face the upper surface of the base 23. Rails 51 are provided so as to be parallel to the line direction.

  The rail 51 is provided with a second actuator 53 as a second moving means, and the second actuator is provided with a third actuator 57 as a rotating means via a support portion 55.

  The third actuator is provided with a rotation arm 59, and an adsorption portion 61 that adsorbs the glass substrate 1a is provided as an second adsorption portion at the end of the rotation arm 59.

  The rotary arm 59 and the suction part 61 can be moved by the second actuator 53 in the directions of A1 and A2 in FIG. 4A (the axial direction of the stacked body placing part 29).

  Further, the rotary arm 59 and the suction part 61 can be rotated in the directions of B1 and B2 in FIG. 4A by the third actuator 57, and the suction part 61 is opposed to the suction part 41 by rotation as will be described later. It is possible.

  The rotating arm 59, the suction part 61, the second actuator 53, and the third actuator 57 constitute a transport means, and the second actuator 53 and the third actuator 57 constitute a transport means.

  On the other hand, the pedestal 23 is provided with a fourth actuator 67 as third moving means, and the fourth actuator 67 is provided with a substrate storage container 69 for storing the glass substrate 1a as a storage portion. A plurality of partitions 62 are provided inside the substrate storage container 69 so that the stored glass substrates 1a do not come into contact with each other.

  The substrate storage container 69 can be moved by the fourth actuator 67 in the directions of C1 and C2 in FIG.

  Further, as shown in FIG. 5, the laminate separating apparatus 21 includes a first actuator 37, a chuck part 39 (adsorption part 41), an air blow part 45, a second actuator 53, a third actuator 57, an adsorption part 61, and a fourth actuator. The control part 63 which controls operation | movement of 67 is provided, and the control part 63 and these apparatuses are connected.

  The control unit 63 includes a program (a) for operating the first actuator 37, the chuck unit 39 (adsorption unit 41), the air blow unit 45, the second actuator 53, the third actuator 57, the adsorption unit 61, and the fourth actuator 67. To (e) are provided as control means (control program). The role of these programs will be described later.

  Next, a method for separating the laminate 4 using the laminate separator 21 will be described with reference to FIGS.

  In the following description, as shown in FIG. 4, the glass substrate 1 a is placed on the uppermost surface of the laminate 4, the adsorbing part 41 does not adsorb the glass substrate 1 a, and the rotary arm 59 is a rail. The operation of each member from the state parallel to 51 (state of FIG. 4) will be described.

  First, as shown in FIGS. 4 and 6, the controller 63 moves the first actuator 37 in the direction of A1 in FIG. 6 using the program (a) in FIG. The suction part 41 of the chuck part 39 is brought into contact with the glass base material 1a, and the suction part 41 is used to suck the glass base material 1a on the uppermost surface of the laminated body 4.

  At this time, at the same time, the second actuator 53 is used to move the rotating arm 59 in the direction of A1 so that the suction portion 61 is disposed in the substrate storage container 69.

  Next, as shown in FIG. 7, the control unit 63 uses the program (b) to move the first actuator 37 in the direction of A <b> 2 of FIG. 7 so that the chuck unit 39 is separated from the stacked body mounting unit 29. While being moved, air is blown from the air blow part 45 toward the lower main surface of the glass substrate 1a, and the spacer 4 is blown off to the spacer housing part 47 (see arrow D in FIG. 4B and FIG. 7). ). As described above, in the support rod 31, the interval 31a between the two support rods 31 facing the spacer accommodating portion 47 is larger than the diameter 31b of the spacer 2 and larger than the diameter 31c of the glass substrate 1a. It is getting smaller.

  Therefore, only the spacer 2 is blown to the spacer accommodating portion 47.

  The spacer 4 blown off is accommodated in the spacer accommodating portion 47.

  At this time, simultaneously with the second actuator 53, the rotary arm 59 is also moved in the direction of A2.

  Next, as shown in FIG. 8, the control unit 63 uses the program (c) to move the rotary arm 59 to the direction B1 in FIG. 8 (direction approaching the suction unit 41 of the chuck unit 39) by the third actuator 57. The glass substrate 1a is adsorbed by rotating and bringing the adsorbing portion 61 into contact with the lower main surface of the glass substrate 1a.

  Next, as shown in FIG. 9, the control unit 63 uses the program (d) to release the adsorption of the adsorption unit 41 (dechuck), and the third actuator 57 moves the rotary arm 59 in the direction B2 (adsorption) of FIG. 9. The rotating arm 59 is arranged so as to be parallel to the rail 51.

  Thereafter, using the program (e), the programs (a) to (d) are repeatedly executed, and the above-described operation is repeated until all of the glass substrate 1a is separated.

  That is, as shown in FIG. 10, the control unit 63 moves the first actuator 37 in the direction of A1 in FIG. 10 using the program (a) in FIG. 5 (that is, the chuck unit 39 is moved to the stacked body placing unit 29). The suction part 41 is brought into contact with the glass substrate 1a, and the suction member 41 is used to suck the glass substrate 1a on the uppermost surface of the laminated body 4.

  At this time, at the same time, the second actuator 53 is used to move the rotary arm 59 in the direction of A1 so that the suction unit 61 is disposed in the substrate storage container 69, thereby releasing the suction of the suction unit 61 (dechucking). ) And the glass substrate 1a is stored in the substrate storage container 69.

  Next, the control unit 63 controls the first actuator 37 using the program (b), moves the chuck unit 39 in the direction A2 in FIG. 10, and moves the chuck unit 39 away from the stacked body mounting unit 29. While moving, air is blown from the air blow part 45 toward the lower main surface of the glass substrate 1a, and the spacer 4 is blown off to the spacer accommodating part 47 to be separated. At this time, the substrate storage container 69 is moved in the direction of C1 in FIG. 10 (relative movement with respect to the rotating arm 59) using the fourth actuator 67 so that the next glass substrate 1a can be stored. The following operations are omitted because the description is duplicated.

  As described above, the laminate separating device 21 adsorbs the glass substrate 1a on the laminate 4 with the adsorption unit 41 and separates the spacer 2 by blowing air using the air blow unit 45 when separating. Yes.

  Therefore, unlike the apparatus that separates the spacer 2 by water pressure in the water, the laminate separating apparatus 21 does not require a water tank, water circulation, and water supply / drainage equipment, and is simpler than the apparatus that separates the spacer 2 by water pressure in water. It is a structure.

  Moreover, the laminated body separation apparatus 21 automatically accommodates the adsorbed glass substrate 1a in the substrate storage container 69 using the first to fourth actuators.

  Therefore, the separation process can be completely automated.

  The details of step 105 have been described above.

  Next, as shown in FIG. 2, the glass substrate 1a is chemically strengthened to form the chemically strengthened layer 17 (step 106).

  Specifically, the glass substrate 1a is immersed in the chemical strengthening solution, and ions contained in the chemical strengthening solution are exchanged with ions contained in the glass substrate 1a.

  At this time, when ion exchange occurs with ions having a larger ion radius than the ions contained in the glass substrate 1a, the chemically strengthened layer 17 becomes a compressive stress layer, and the strength of the surface of the glass substrate 1a increases.

  Next, after the chemical strengthening is finished, the glass substrate 1a is washed to remove the surface chemical strengthening solution, and then the flatness and surface roughness of the main surfaces 7a and 7b of the glass substrate 1a are removed as shown in FIG. In order to adjust the thickness (substantially smooth), the main surfaces 7a and 7b are polished (step 107).

  Polishing may be performed in two stages.

  Specifically, for example, as abrasive grains contained in the polishing liquid, two types of abrasive grains having different particle diameters are used, and first polishing is performed using abrasive grains having a relatively large particle diameter, and then the grains Second polishing is performed using abrasive grains having a relatively small diameter.

  When polishing is completed, the glass substrate 1a is washed to remove abrasives and impurities adhering to the surface during manufacture (step 108).

  Specific examples include physical cleaning such as scrub cleaning and ultrasonic cleaning, and chemical cleaning using a fluoride, organic acid, hydrogen peroxide, surfactant, and the like.

  Finally, product inspection (for example, inspection of the surface roughness of the main surfaces 7a and 7b and the amount of particles) is performed (step 109).

  Specifically, defect inspection is performed using, for example, ODT (Optical Defect Tester) or OSA (Optical Surface Analyzer).

  The glass substrate 1 is completed by the above process.

  Thus, according to this embodiment, the laminated body separation apparatus 21 has the laminated body mounting part 29, the adsorption | suction part 41, and the air blow part 45, and the glass base material 1a on the laminated body 4 by the adsorption | suction part 41 is shown. At the time of adsorption and separation, the spacer 2 is separated by blowing air using the air blow unit 45.

  Therefore, unlike an apparatus that separates the spacer 2 by water pressure in water, a water tank, water circulation, and water supply / drainage facilities are unnecessary, and the structure is simpler than an apparatus that separates the spacer 2 by water pressure in water.

  Moreover, the laminated body separation apparatus 21 automatically accommodates the adsorbed glass substrate 1a in the substrate storage container 69 using the first to fourth actuators.

  Therefore, the separation process can be completely automated.

  In the above-described embodiment, the case where the present invention is applied to the manufacturing method for separating the laminated body of the glass substrates 1 for magnetic recording media has been described. However, the present invention is not limited to this, and the substrate, the spacer, The present invention can be applied to all apparatuses in which a substrate needs to be separated from a laminate obtained by stacking layers.

DESCRIPTION OF SYMBOLS 1 ......... Glass substrate 1a ......... Glass base material 3 ......... Main body 5 ......... Inner hole 7a ............ Main surface 17 ......... Chemical strengthening layer 18b ......... Magnetic layer 21 ………… Laminate separator 23 ………… Base 25 ………… Side wall 33 ………… Supporting part 27 ………… Base 29 ………… Laminate placing part 31 ………… ... support rod 35 ………… rail 37 ………… first actuator 41 ………… adsorption part 45 ………… air blow part 49 ………… support part 51 ………… rail 53 ………… first 2 Actuator 57 ………… Third actuator 59 ………… Rotating arm 61 ………… Adsorption part 63 ………… Control part 67 ………… Fourth actuator 69 ………… Substrate storage container

Claims (15)

A placement unit for placing a laminate having a plurality of glass substrates and spacers provided between main surfaces of the plurality of glass substrates;
Separating means for chucking and separating the glass substrate at the endmost part of the laminate placed on the placement unit from the laminate;
A removing means provided in the separating means for blowing the air onto the main surface of the adsorbed glass substrate to remove the spacer;
A separator for separating a laminate, comprising:   The apparatus for separating a laminate according to claim 1, further comprising a conveying unit that chucks and conveys the glass substrate chucked by the separating unit.   The apparatus for separating a laminated body according to claim 2, further comprising a storage unit in which the glass base material chucked by the transport means is stored. The separation means includes a first suction portion that sucks and chucks one main surface of the glass substrate,
The said removal means has an air blow part provided in the said 1st adsorption | suction part, and the said air blow part has an air jet nozzle provided in the said 1st adsorption | suction part. The separator for separating laminates as described.   5. The stack separating apparatus according to claim 4, further comprising first moving means for moving the separating means in the axial direction of the mounting portion. The conveying means is
A second adsorption part for adsorbing and chucking the other main surface of the glass substrate chucked by the separating means;
Transport means for transporting the glass substrate adsorbed by the second adsorption unit to the storage unit;
The laminate separation device according to claim 5, wherein The transportation means is
A rotating means for rotating the second suction part in a direction facing the first suction part;
Second moving means for moving the second suction part toward the storage part;
The separator for a laminate according to claim 6, comprising:   8. The stack separating apparatus according to claim 7, wherein the second moving unit is a unit that moves the second adsorption portion in a direction parallel to a moving direction of the first moving unit.   The stack separating apparatus according to claim 8, further comprising third moving means for moving the storage portion relative to the transport means. The separation means is moved toward the mounting portion using the first moving means, the glass substrate is chucked using the first suction portion, and the second moving means is used. Control means (a) for moving the second suction part toward the storage part;
The separation means is moved in the direction away from the mounting portion using the first moving means, air is ejected from the air outlet, and the second moving means is used to Control means (b) for moving the two adsorbing portions in a direction away from the storage portion;
Using the rotating means, the second adsorption part is rotated in a direction approaching the first adsorption part, and the other main surface of the glass substrate is brought into contact with the first adsorption part and adsorbed. Control means (c);
The glass substrate is dechucked from the first suction portion, and the second suction portion is separated from the first suction portion in a state where the glass substrate is sucked using the rotating means. Control means (d) for rotating a predetermined angle;
Control means (e) for repeating the control means (a) to (d) in this order;
The apparatus for separating a laminate according to claim 9, comprising: In the step (a), when the second adsorption part is adsorbing the glass substrate,
The separation means is moved toward the mounting portion using the first moving means, the glass substrate is chucked using the first suction portion, and the second moving means is used. A means for moving the second suction part toward the storage part, storing the glass base material in the storage part, and dechucking the glass base material from the second suction part;
The step (b) uses the first moving means to move the separating means in a direction away from the mounting portion, and ejects air from the air outlet, The second suction unit is moved away from the storage unit using a moving unit, and the storage unit is moved relative to the transport unit using the third moving unit. The laminate separating apparatus according to claim 10, wherein the separator is a means.   A separation apparatus according to any one of claims 1 to 11, wherein the separation apparatus is separated.   A method for producing a glass substrate, comprising the separation method according to claim 12 in a process.   A glass substrate manufactured by the method for manufacturing a glass substrate according to claim 13. A glass substrate according to claim 14,
An underlayer, a magnetic layer, a protective layer, a lubricating layer provided on the main surface of the glass substrate;
A magnetic recording medium comprising:

Images