JP2010221365A - Suction head for electronic component transfer device - Google Patents

Suction head for electronic component transfer device Download PDF

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JP2010221365A
JP2010221365A JP2009073001A JP2009073001A JP2010221365A JP 2010221365 A JP2010221365 A JP 2010221365A JP 2009073001 A JP2009073001 A JP 2009073001A JP 2009073001 A JP2009073001 A JP 2009073001A JP 2010221365 A JP2010221365 A JP 2010221365A
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electronic component
transfer device
suction head
axis
tip
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Haruyuki Takeuchi
治幸 竹内
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an attracting head for an electronic component transfer device, capable of reliably vacuum attracting an electronic component whose face is inclined to be attracted and thrusting the electronic component while uniforming pressure distribution. <P>SOLUTION: The suction head includes (a) a fixed part 12 to be fixed to the electronic component transfer device, (b) a front end part 20 held by the fixed part 12 and protruded from the fixed part 12, (c) a first member 30, and (d) a second member 40. The second member 40 has an attracting hole 48 formed in a front end face 42s protruded from the front end part 20 and the first member 30 to vacuum contact the electronic component. The second member 40 is rockingly supported on the first member 30 around a first axis 34 parallel to the front end face 42s. The first member 30 is rockingly supported on the fixed part 20 around a second axis 24 parallel to the front end face 42s of the second member 40 and across the first axis 34. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、電子部品移送装置用吸着ヘッドに関し、詳しくは、電子部品移送装置に装着され、電子部品を真空吸着する電子部品移送装置用吸着ヘッドに関する。   The present invention relates to a suction head for an electronic component transfer device, and more particularly to a suction head for an electronic component transfer device that is mounted on an electronic component transfer device and vacuum-sucks the electronic component.

従来、電子部品を固定したり取り外したりするために、電子部品移送装置が用いられている。電子部品移送装置には、電子部品を真空吸着する吸着ヘッドが装着され、吸着ヘッドに電子部品を吸着した状態で吸着ヘッドを移動させることにより、電子部品を移送する。電子部品が吸着される吸着ヘッドの先端面には、真空吸引するための吸着孔が形成されている。一般的には、吸着ヘッドの先端面は平面である。   Conventionally, an electronic component transfer device has been used to fix and remove electronic components. The electronic component transfer device is equipped with a suction head that vacuum-sucks the electronic component. The electronic component is transferred by moving the suction head while the electronic component is sucked by the suction head. A suction hole for vacuum suction is formed on the tip surface of the suction head on which the electronic component is sucked. Generally, the tip surface of the suction head is a flat surface.

電子部品の被吸着面が凸状曲面である場合には、図5の要部拡大断面図に示すように、吸着孔12aが形成された吸着ヘッドの先端部12kの当接開口部12bを、電子部品Pの被吸着面Aの形状に合わせて略円弧状にすることが提案されている(例えば、特許文献1参照)。   When the attracted surface of the electronic component is a convex curved surface, as shown in the enlarged sectional view of the main part of FIG. 5, the contact opening 12b of the tip 12k of the suction head in which the suction hole 12a is formed is It has been proposed to form a substantially arc shape in accordance with the shape of the attracted surface A of the electronic component P (see, for example, Patent Document 1).

特開2002−283265号公報JP 2002-283265 A

搬送用テープ表面に固定されている電子部品や、治具に取り付けられている電子部品を吸着ヘッドで吸着する際に、搬送用テープ表面自体あるいは治具自体が傾いていることがある。また、電子部品が金属キャップなどを有するモジュール部品である場合、吸着される金属キャップの上面が、金属キャップの取り付けバラツキなどにより傾くことがある。   When the electronic component fixed on the surface of the transport tape or the electronic component attached to the jig is sucked by the suction head, the transport tape surface itself or the jig itself may be inclined. In addition, when the electronic component is a module component having a metal cap or the like, the upper surface of the metal cap to be adsorbed may be inclined due to variations in the attachment of the metal cap.

このように電子部品の被吸着面が傾いていると、吸着ヘッドと被吸着面との間に空隙が発生し、電子部品を十分に吸着ができず、吸着不良が発生したり、搬送時に電子部品が落下したりすることがある。また、電子部品の金属キャップが傾いて取り付けられていると、測定治具に取り付けるために電子部品の金属キャップを吸着ヘッドで押圧する際に、圧力分布が不均一になり、電子部品の端子と治具に設けられた端子との間で接触不良が発生することがある。   If the suction surface of the electronic component is tilted in this way, a gap is generated between the suction head and the suction surface, and the electronic component cannot be sufficiently sucked. Parts may fall. In addition, if the metal cap of the electronic component is attached at an inclination, the pressure distribution becomes uneven when the metal cap of the electronic component is pressed with the suction head to be attached to the measuring jig, and the electronic component terminal and A contact failure may occur between the terminals provided on the jig.

本発明は、かかる実情に鑑み、電子部品の被吸着面が傾いていても、電子部品を確実に真空吸着でき、圧力分布が均一になるように電子部品を押圧できる電子部品移送装置用吸着ヘッドを提供しようとするものである。   In view of such circumstances, the present invention provides a suction head for an electronic component transfer device capable of reliably vacuum-sucking an electronic component even when the suction surface of the electronic component is inclined and pressing the electronic component so that the pressure distribution is uniform. Is to provide.

本発明は、上記課題を解決するために、以下のように構成した電子部品移送装置用吸着ヘッドを提供する。   In order to solve the above problems, the present invention provides a suction head for an electronic component transfer device configured as follows.

電子部品移送装置用吸着ヘッドは、電子部品移送装置に装着されて移動し、電子部品を真空吸着する。電子部品移送装置用吸着ヘッドは、(a)前記電子部品移送装置に固定される固定部と、(b)前記固定部に保持され、前記固定部から突出する先端部と、(c)前記先端部に揺動自在に支持された第1部材と、(d)前記第1部材に揺動自在に支持された第2部材とを備える。前記第2部材は、前記先端部及び前記第1部材よりも突出する先端面を有し、該先端面には電子部品を真空吸着するための吸着孔が形成され、該先端面と平行な第1軸を中心に揺動自在に前記第1部材に支持される。前記第1部材は、前記第2部材の前記先端面と平行かつ前記第1軸と交差する第2軸を中心に揺動自在に前記固定部に支持される。   The suction head for the electronic component transfer device is mounted on the electronic component transfer device and moves to vacuum-suck the electronic component. The suction head for an electronic component transfer device includes: (a) a fixed portion fixed to the electronic component transfer device; (b) a tip portion held by the fixed portion and protruding from the fixed portion; and (c) the tip. A first member that is swingably supported by the portion; and (d) a second member that is swingably supported by the first member. The second member has a tip surface that protrudes more than the tip portion and the first member, and a suction hole for vacuum-sucking electronic components is formed on the tip surface, and the second member is parallel to the tip surface. The first member is supported so as to be swingable about one axis. The first member is supported by the fixed portion so as to be swingable about a second axis that is parallel to the distal end surface of the second member and intersects the first axis.

上記構成において、電子部品が吸着される第2部材の先端面は、第1軸を中心に揺動自在であり、かつ、第2軸を中心に揺動自在であり、第1軸と第2軸とが交差する交点を中心に、任意の方向に傾くことができる。そのため、電子部品の被吸着面が傾いていても電子部品を確実に吸着することができ、圧力分布が均一になるように電子部品を押圧できる。   In the above configuration, the front end surface of the second member to which the electronic component is attracted is swingable about the first axis and swingable about the second axis. It can be tilted in any direction around the intersection where the axis intersects. Therefore, even if the attracted surface of the electronic component is inclined, the electronic component can be reliably attracted and the electronic component can be pressed so that the pressure distribution is uniform.

好ましくは、前記先端部は、前記固定部に対して出没する方向に移動自在に、前記固定部に保持される。前記固定部の内部に、前記先端部が前記固定部から突出する方向に、前記先端部を弾力的に付勢する弾性部材をさらに備える。   Preferably, the distal end portion is held by the fixing portion so as to be movable in a direction in which the tip portion protrudes and protrudes from the fixing portion. An elastic member that elastically biases the tip portion in a direction in which the tip portion protrudes from the fixing portion is further provided inside the fixing portion.

この場合、第2部材の先端面が電子部品に押し当てられたとき、ばねやゴムなどの弾性部材の弾力によって、第2部材の先端面は固定部側に後退するため、弾性部材を介して適当な圧力で第2部材の先端面を電子部品に押し当てることができる。また、第2部材の先端面が電子部品に接触するときの衝撃が弾性部材によって緩和されるため、電子部品の破損や故障を防ぐことができる。   In this case, when the distal end surface of the second member is pressed against the electronic component, the distal end surface of the second member is retracted toward the fixed portion by the elastic force of the elastic member such as a spring or rubber. The tip surface of the second member can be pressed against the electronic component with an appropriate pressure. Moreover, since the impact when the front end surface of the second member contacts the electronic component is alleviated by the elastic member, the electronic component can be prevented from being damaged or broken.

好ましくは、前記第1軸と前記第2軸とが互いに直交する。   Preferably, the first axis and the second axis are orthogonal to each other.

この場合、第2部材の先端面は、任意の方向に最も円滑に傾くことができる。   In this case, the front end surface of the second member can be inclined most smoothly in an arbitrary direction.

好ましくは、前記先端部の外側に、前記第1部材及び前記第2部材が配置されている。   Preferably, the first member and the second member are disposed outside the tip portion.

この場合、第2部材の先端面の面積を、先端部の先端面の面積よりも大きくすることができるので、先端部の先端面に電子部品を吸着する場合よりも大きなサイズの電子部品についても、対応可能となる。   In this case, since the area of the front end surface of the second member can be made larger than the area of the front end surface of the front end portion, an electronic component having a size larger than that when the electronic component is attracted to the front end surface of the front end portion It becomes possible to respond.

好ましくは、前記第2部材の前記先端面は、前記第2部材の前記先端面に真空吸着される電子部品の被吸着面よりも大きい。   Preferably, the front end surface of the second member is larger than a surface to be attracted of an electronic component that is vacuum-sucked to the front end surface of the second member.

この場合、電子部品の被吸着面が傾いていても、電子部品の被吸着面全体を第2部材の先端面で覆った状態で吸着でき、電子部品の被吸着面の傾きを確実に吸収できるため、吸着不良や不均一な押圧を低減しやすい。   In this case, even if the attracted surface of the electronic component is inclined, it can be attracted in a state where the entire attracted surface of the electronic component is covered with the tip surface of the second member, and the tilt of the attracted surface of the electronic component can be reliably absorbed. Therefore, it is easy to reduce adsorption failure and uneven pressing.

好ましくは、前記第1部材と前記第2部材とは、同軸に配置された筒状の部材である。前記第1軸と前記第2軸との前記交点は、前記第1部材及び前記第2部材の中心軸上に配置される。   Preferably, the first member and the second member are cylindrical members arranged coaxially. The intersection of the first axis and the second axis is disposed on the central axis of the first member and the second member.

この場合、第2部材の先端面がどの方向にも均一に揺動するように構成し、電子部品の吸引力を向上することができる。   In this case, the front end surface of the second member is configured to swing uniformly in any direction, and the suction force of the electronic component can be improved.

本発明の電子部品移送装置用吸着ヘッドは、電子部品の被吸着面が傾いていても、電子部品を確実に真空吸着することができ、圧力分布が均一になるように電子部品を押圧することができる。   The suction head for an electronic component transfer device according to the present invention can reliably vacuum-suck the electronic component even if the suction surface of the electronic component is inclined, and presses the electronic component so that the pressure distribution is uniform. Can do.

吸着ヘッドの(a)部分断面略正面図、(b)断面図である。(実施例)It is the (a) partial cross section schematic front view of a suction head, (b) sectional drawing. (Example) 吸着ヘッドの断面図である。(比較例)It is sectional drawing of a suction head. (Comparative example) 吸着ヘッドの動作を示す説明図である。(実施例)It is explanatory drawing which shows operation | movement of a suction head. (Example) 吸着ヘッドの動作を示す説明図である。(比較例)It is explanatory drawing which shows operation | movement of a suction head. (Comparative example) 吸着ヘッドの要部拡大断面図である。(従来例)It is a principal part expanded sectional view of a suction head. (Conventional example)

以下、本発明の実施の形態について、図1〜図4を参照しながら説明する。   Hereinafter, embodiments of the present invention will be described with reference to FIGS.

<実施例> 本発明の実施例の電子部品移送装置用吸着ヘッド10について、図1及び図3を参照しながら説明する。   <Example> The suction head 10 for electronic component transfer apparatuses of the Example of this invention is demonstrated referring FIG.1 and FIG.3.

図1(a)は、本発明の実施例の電子部品移送装置用吸着ヘッド10の構成を模式的に示す部分断面略正面図である。図1(b)は、図1(a)の線A−Aに沿って切断した断面図である。   FIG. 1A is a schematic front view of a partial cross section schematically illustrating a configuration of an adsorption head 10 for an electronic component transfer device according to an embodiment of the present invention. FIG.1 (b) is sectional drawing cut | disconnected along line AA of Fig.1 (a).

図1(a)及び(b)に示すように、吸着ヘッド10は、固定部12と、先端部20と、第1部材30と、第2部材40とが同軸に配置されている。   As shown in FIGS. 1A and 1B, the suction head 10 has a fixed portion 12, a tip portion 20, a first member 30, and a second member 40 arranged coaxially.

固定部12は、略筒状の空間13を有し、不図示の電子部品搬送装置に固定される。先端部20は、基端20a側が固定部12の略筒状の空間13内に移動自在に保持され、先端20b側が固定部12から突出している。固定部12の略筒状の空間13内には、先端部20を固定部12から突出させる方向に付勢するばね部材14が配置され、先端部20の先端20bが固定部12から所定位置まで突出するようになっている。   The fixing portion 12 has a substantially cylindrical space 13 and is fixed to an electronic component transport device (not shown). The distal end portion 20 is movably held in the substantially cylindrical space 13 of the fixed portion 12 at the proximal end 20 a side, and the distal end 20 b side protrudes from the fixed portion 12. In the substantially cylindrical space 13 of the fixed portion 12, a spring member 14 that urges the tip portion 20 in a direction in which the tip portion 20 protrudes from the fixed portion 12 is disposed, and the tip 20 b of the tip portion 20 extends from the fixed portion 12 to a predetermined position. It is designed to protrude.

第1部材30は、筒部31と底部32とを有する略筒形状のキャップ部材であり、固定部12及び先端部20の外側に隙間を設けて同軸に配置される。第2部材40は、筒部41と底部42とを有する略筒形状のキャップ部材であり、第1部材30の外側に隙間を設けて同軸に配置される。   The first member 30 is a substantially cylindrical cap member having a cylindrical portion 31 and a bottom portion 32, and is disposed coaxially with a gap provided outside the fixed portion 12 and the distal end portion 20. The second member 40 is a substantially cylindrical cap member having a cylindrical portion 41 and a bottom portion 42, and is arranged coaxially with a gap provided outside the first member 30.

図1(b)に示すように、第1部材30は、筒部31に形成された1対の貫通孔31yに、先端部20の先端20b側を貫通する第1軸24の両端がそれぞれ挿通され、第1軸24を介して先端部20に揺動自在に支持されている。第2部材40は、筒部41に形成された1対の貫通孔41xに、第1部材30の筒部31に突設された1対の第2軸34がそれぞれ挿通され、第2軸34を介して第1部材30に揺動自在に支持されている。   As shown in FIG. 1B, in the first member 30, both ends of the first shaft 24 penetrating the distal end 20 b side of the distal end portion 20 are inserted into a pair of through holes 31 y formed in the cylindrical portion 31. The first end portion 20 is swingably supported via the first shaft 24. In the second member 40, a pair of second shafts 34 projecting from the cylindrical portion 31 of the first member 30 are inserted into a pair of through holes 41 x formed in the cylindrical portion 41, respectively. The first member 30 is supported so as to be capable of swinging.

図1(a)及び(b)に示すように、第1軸24の中心軸Yと、第2軸34の中心軸Xと、同軸に配置された固定部12、先端部20、第1部材30及び第2部材40の中心軸Zとは、1点Oで交わり、互いに直交するようになっている。   As shown in FIGS. 1A and 1B, the central axis Y of the first shaft 24 and the central axis X of the second shaft 34, the fixed portion 12, the tip portion 20, and the first member arranged coaxially. 30 and the center axis Z of the second member 40 intersect at one point O and are orthogonal to each other.

図1(a)に示すように、第2部材40の底部42には貫通孔48が形成され、この貫通孔48に柔軟な管16の一端が接続され、管16の他端が真空ポンプ等の不図示の真空吸引手段に接続され、貫通孔48から真空吸引されるようになっている。これにより、第2部材40の底部42の外表面42s、すなわち先端面42sに、電子部品を吸着することできる。先端面42sは中心軸Zに垂直であり、第1軸24及び第2軸34は先端面42sと平行である。   As shown in FIG. 1A, a through hole 48 is formed in the bottom 42 of the second member 40, one end of a flexible tube 16 is connected to the through hole 48, and the other end of the tube 16 is a vacuum pump or the like. The vacuum suction means (not shown) is connected to be sucked from the through hole 48. Thereby, an electronic component can be adsorbed to the outer surface 42 s of the bottom 42 of the second member 40, that is, the distal end surface 42 s. The front end face 42s is perpendicular to the central axis Z, and the first axis 24 and the second axis 34 are parallel to the front end face 42s.

電子部品が吸着される第2部材40の先端面42sは、第1軸24を中心に揺動自在であり、かつ、第2軸34を中心に揺動自在であり、第1軸24と第2軸34との交点Oを中心に、任意の方向に傾くことができる。そのため、電子部品の被吸着面が傾いていても、第2部材40の先端面42sに電子部品を確実に吸着することができ、第2部材40の先端面42sで圧力分布が均一になるように電子部品を押圧することができる。   The front end surface 42 s of the second member 40 on which the electronic component is attracted is swingable about the first shaft 24 and swingable about the second shaft 34. It can be inclined in any direction around the intersection O with the two axes 34. Therefore, even if the attracted surface of the electronic component is inclined, the electronic component can be reliably attracted to the tip surface 42s of the second member 40, and the pressure distribution is uniform on the tip surface 42s of the second member 40. It is possible to press the electronic component.

次に、電子部品移送装置用吸着ヘッド10の動作について、図3を参照しながら説明する。図3は、実施例の電子部品移送装置用吸着ヘッド10の動作の説明図である。   Next, the operation of the suction head 10 for the electronic component transfer device will be described with reference to FIG. FIG. 3 is an explanatory diagram of the operation of the suction head 10 for the electronic component transfer device according to the embodiment.

まず、図3(a)に示すように、治具80内に電子部品6を置いた状態で、吸着ヘッド10の固定部12が固定されている不図示の電子部品移送装置を動作させ、吸着ヘッド10を、治具80内に置かれている電子部品6の上方まで移動させ、吸着ヘッド10の第2部材40の底部42の外表面42s、すなわち先端面42sを、電子部品6に対向させる。電子部品6は、基板2を覆うように基板2に金属キャップ4が接合されており、吸着ヘッド10の先端面42sは、金属キャップ4の上面5に対向する。前述したように、第1部材30は、矢印25で示すように、第1軸24を中心に揺動自在に、先端部20に支持されている。第2部材40は、矢印35で示すように、第2軸34を中心に揺動自在に、第1部材30に支持されている。   First, as shown in FIG. 3A, with the electronic component 6 placed in the jig 80, an electronic component transfer device (not shown) to which the fixing portion 12 of the suction head 10 is fixed is operated to perform suction. The head 10 is moved to above the electronic component 6 placed in the jig 80, and the outer surface 42 s of the bottom 42 of the second member 40 of the suction head 10, that is, the front end surface 42 s is opposed to the electronic component 6. . In the electronic component 6, the metal cap 4 is bonded to the substrate 2 so as to cover the substrate 2, and the tip surface 42 s of the suction head 10 faces the upper surface 5 of the metal cap 4. As described above, the first member 30 is supported by the distal end portion 20 so as to be swingable about the first shaft 24 as indicated by the arrow 25. As indicated by an arrow 35, the second member 40 is supported by the first member 30 so as to be swingable about the second shaft 34.

次いで、図3(b)及び(c)に示すように、電子部品移送装置は、吸着ヘッド10を矢印11b,11cで示すように下降させ、吸着ヘッド10の先端面42sを、電子部品6の上面5に当接させる。   Next, as shown in FIGS. 3B and 3C, the electronic component transfer device lowers the suction head 10 as indicated by arrows 11 b and 11 c, and the tip surface 42 s of the suction head 10 is moved to the electronic component 6. It is made to contact the upper surface 5.

このとき、図3(b)に示すように、金属キャップ4の上面5が図において右側が下がるように金属キャップ4が傾いた状態で基板2に接合されている場合、下降する吸着ヘッド10の先端面42sは、まず、電子部品6の上面5の図において左側に当接する。さらに吸着ヘッド10が下降すると、第1部材30及び第2部材40は第1軸24を中心に時計回り方向に回転し、やがて、吸着ヘッド10の先端面42sが電子部品6の上面5全体と当接する。   At this time, as shown in FIG. 3B, when the upper surface 5 of the metal cap 4 is bonded to the substrate 2 in a state where the metal cap 4 is inclined so that the right side in the drawing is lowered, the lowering of the suction head 10 is lowered. First, the front end surface 42 s comes into contact with the left side in the drawing of the upper surface 5 of the electronic component 6. When the suction head 10 is further lowered, the first member 30 and the second member 40 rotate in the clockwise direction around the first shaft 24, and eventually the tip surface 42 s of the suction head 10 and the entire upper surface 5 of the electronic component 6 are moved. Abut.

吸着ヘッド10の先端面42sが電子部品6の上面5全体と当接した後、電子部品移送装置により吸着ヘッド10の固定部12がさらに下降すると、電子部品6の上面5の圧力分布は、矢印70で示すように均一になる。   After the tip surface 42s of the suction head 10 contacts the entire upper surface 5 of the electronic component 6, when the fixing portion 12 of the suction head 10 is further lowered by the electronic component transfer device, the pressure distribution on the upper surface 5 of the electronic component 6 is changed to an arrow. It becomes uniform as shown at 70.

このとき、先端部20、第1部材30及び第2部材40は、ばね14の弾力に抗して固定部12側に後退するため、ばね14を介して適当な圧力で、第2部材40の先端面42sを電子部品6の上面5に押し当てることができる。また、第2部材40の先端面42sが電子部品6の上面5に接触するときの衝撃が、ばね14によって緩和されるため、電子部品6の破損や故障を防ぐことができる。   At this time, the distal end portion 20, the first member 30, and the second member 40 retreat toward the fixing portion 12 against the elasticity of the spring 14, so that the second member 40 can be moved with an appropriate pressure through the spring 14. The front end surface 42 s can be pressed against the upper surface 5 of the electronic component 6. Moreover, since the impact when the front end surface 42 s of the second member 40 contacts the upper surface 5 of the electronic component 6 is alleviated by the spring 14, damage or failure of the electronic component 6 can be prevented.

一方、図3(c)に示すように、金属キャップ4の上面5の図において手前側が下がるように金属キャップ4が傾いた状態で基板4に接合されている場合、下降する吸着ヘッド10の先端面42sは、まず、電子部品6の上面5の図において奥側に当接し、さらに吸着ヘッド10が下降すると、吸着ヘッド10の先端面42sの手前側が下がるように、第1部材30及び第2部材40が第2軸34を中心に回転し、やがて、第2部材40の先端面42sは電子部品6の上面5全体と当接する。   On the other hand, as shown in FIG. 3C, when the metal cap 4 is inclined and joined to the substrate 4 so that the front side in the figure of the upper surface 5 of the metal cap 4 is lowered, the tip of the lowering suction head 10 is lowered. First, the surface 42s contacts the back side in the drawing of the upper surface 5 of the electronic component 6, and when the suction head 10 is further lowered, the front side 42s of the suction head 10 is lowered so that the front side of the front surface 42s is lowered. The member 40 rotates around the second shaft 34, and eventually the tip surface 42 s of the second member 40 comes into contact with the entire upper surface 5 of the electronic component 6.

電子部品移送装置によって吸着ヘッド10の固定部12がさらに下降すると、矢印72で示すように、第2部材40の先端面42sは、電子部品6の上面5を押圧する。   When the fixing portion 12 of the suction head 10 is further lowered by the electronic component transfer device, the front end surface 42 s of the second member 40 presses the upper surface 5 of the electronic component 6 as indicated by an arrow 72.

このとき、先端部20、第1部材30及び第2部材40は、ばね14の弾力に抗して固定部12側に後退するため、ばね16を介して適当な圧力で、第2部材40の先端面42sを電子部品6の上面5に押し当てることができる。また、第2部材40の先端面42sが電子部品6の上面5に接触するときの衝撃が、ばね14によって緩和されるため、電子部品6の破損や故障を防ぐことができる。   At this time, the distal end portion 20, the first member 30 and the second member 40 retreat toward the fixing portion 12 against the elasticity of the spring 14, so that the second member 40 can be moved with an appropriate pressure via the spring 16. The front end surface 42 s can be pressed against the upper surface 5 of the electronic component 6. Moreover, since the impact when the front end surface 42 s of the second member 40 contacts the upper surface 5 of the electronic component 6 is alleviated by the spring 14, damage or failure of the electronic component 6 can be prevented.

電子部品6の上面5が図3(b)及び(c)に示した方向以外に傾いている場合には、図3(b)の動作と図3(c)の動作の組み合わせによって、第2部材40の先端面42sが電子部品6の上面5全体に、圧力分布が均一になるように当接する。   When the upper surface 5 of the electronic component 6 is tilted in directions other than those shown in FIGS. 3B and 3C, the second operation is performed by combining the operation in FIG. 3B and the operation in FIG. The front end surface 42s of the member 40 contacts the entire upper surface 5 of the electronic component 6 so that the pressure distribution is uniform.

図3に示すように、第2部材40の先端面42sが、第2部材40の先端面42sに吸着される電子部品6の上面5よりも大きい場合には、電子部品6の上面5が傾いていても、電子部品6の上面5全体を第2部材40の先端面42sで覆った状態で電子部品6を吸着でき、電子部品6の上面5の傾きを確実に吸収できるため、吸着不良や不均一な押圧を低減しやすい。   As shown in FIG. 3, when the tip surface 42 s of the second member 40 is larger than the top surface 5 of the electronic component 6 attracted to the tip surface 42 s of the second member 40, the top surface 5 of the electronic component 6 is inclined. Even in this case, the electronic component 6 can be adsorbed in a state where the entire upper surface 5 of the electronic component 6 is covered with the tip surface 42s of the second member 40, and the inclination of the upper surface 5 of the electronic component 6 can be reliably absorbed. It is easy to reduce uneven pressing.

また、図3(b)及び(c)に示すように電子部品6の上面5が傾いていても、第2部材40の先端面42sが電子部品6の上面5全体に当接した状態で、吸着孔48から真空吸引して電子部品6を吸着すると、電子部品6を確実に吸着することができるため、吸着不良が発生したり搬送時に電子部品が落下したりすることがない。   3B and 3C, even when the upper surface 5 of the electronic component 6 is inclined, the tip surface 42s of the second member 40 is in contact with the entire upper surface 5 of the electronic component 6, When the electronic component 6 is sucked by vacuum suction from the suction hole 48, the electronic component 6 can be reliably sucked, so that a suction failure does not occur and the electronic component does not fall during transportation.

<比較例> 次に、比較例の電子部品移送装置用吸着ヘッド10xについて、図2及び図4を参照しながら説明する。   <Comparative example> Next, the suction head 10x for electronic component transfer apparatuses of a comparative example is demonstrated, referring FIG.2 and FIG.4.

図2は、比較例の電子部品移送装置用吸着ヘッド10xの構成を模式的に示す部分断面略正面図である。   FIG. 2 is a partial front view schematically showing a configuration of a suction head 10x for an electronic component transfer device of a comparative example.

図2に示すように、比較例の吸着ヘッド10xは、実施例と同じく、固定部12と、先端部20と、ばね14と、管16とを備える。しかし、実施例とは異なり、第1部材30と第2部材40とを備えていない。   As shown in FIG. 2, the suction head 10 x of the comparative example includes a fixed portion 12, a tip portion 20, a spring 14, and a tube 16 as in the embodiment. However, unlike the embodiment, the first member 30 and the second member 40 are not provided.

先端部20の底部22には貫通孔28が形成され、この貫通孔28に柔軟な管16の一端が接続されている。これにより、先端部20の底部22の外表面22s、すなわち先端面22sに、電子部品を吸着することできる。   A through hole 28 is formed in the bottom portion 22 of the distal end portion 20, and one end of the flexible tube 16 is connected to the through hole 28. Thereby, an electronic component can be adsorbed to the outer surface 22s of the bottom portion 22 of the distal end portion 20, that is, the distal end surface 22s.

次に、比較例の吸着ヘッド10xの動作について、図4を参照しながら説明する。図4は、比較例の吸着ヘッド10xの動作の説明図である。   Next, the operation of the suction head 10x of the comparative example will be described with reference to FIG. FIG. 4 is an explanatory diagram of the operation of the suction head 10x of the comparative example.

図4(a)に示すように、吸着ヘッド10xの固定部12が固定されている不図示の電子部品移送装置は、吸着ヘッド10xを、治具80に取り付けられている電子部品6の上方まで移動させ、先端部20の底部22の外表面22s、すなわち先端面22sを、電子部品6に対向させる。電子部品6は、基板2を覆うように金属キャップ4が基板2に接合されており、吸着ヘッド10の先端面22sは、金属キャップ4の上面5に対向する。   As shown in FIG. 4A, the electronic component transfer device (not shown) to which the fixing portion 12 of the suction head 10 x is fixed moves the suction head 10 x to above the electronic component 6 attached to the jig 80. The outer surface 22 s of the bottom portion 22 of the distal end portion 20, that is, the distal end surface 22 s is opposed to the electronic component 6. In the electronic component 6, the metal cap 4 is bonded to the substrate 2 so as to cover the substrate 2, and the front end surface 22 s of the suction head 10 faces the upper surface 5 of the metal cap 4.

次いで、図4(b)及び(c)に示すように、電子部品移送装置は、吸着ヘッド10を矢印11s,11tで示すように下降させ、吸着ヘッド10の先端面22sを、電子部品6の上面5に当接させる。   Next, as shown in FIGS. 4B and 4C, the electronic component transfer device lowers the suction head 10 as indicated by arrows 11 s and 11 t, and the tip surface 22 s of the suction head 10 is moved to the electronic component 6. It is made to contact the upper surface 5.

このとき、図4(b)に示すように、電子部品6の金属キャップ4の上面5が図において左側が高くなるように金属キャップ4が傾いた状態で基板2に接合されている場合、下降する吸着ヘッド10xの先端面22sは、まず、電子部品6の上面5の図において左側に当接する。さらに吸着ヘッド10xが下降すると、電子部品6の図において左側が押し下げられ、電子部品6は図において左回りに回転し、やがて吸着ヘッド10xの先端面42sが電子部品6の上面5全体と当接する。このとき、矢印74で示すように、電子部品6の左側は相対的に強く押し下げられ、右側は相対的に弱く押し下げられ、圧力分布が不均一になる。   At this time, as shown in FIG. 4B, when the upper surface 5 of the metal cap 4 of the electronic component 6 is joined to the substrate 2 with the metal cap 4 tilted so that the left side is higher in the drawing, the lowering is performed. First, the front end surface 22s of the suction head 10x contacts the left side of the upper surface 5 of the electronic component 6 in the figure. When the suction head 10x is further lowered, the left side in the drawing of the electronic component 6 is pushed down, the electronic component 6 rotates counterclockwise in the drawing, and the tip surface 42s of the suction head 10x eventually comes into contact with the entire top surface 5 of the electronic component 6. . At this time, as indicated by an arrow 74, the left side of the electronic component 6 is pushed down relatively strongly, and the right side is pushed down relatively weakly, resulting in uneven pressure distribution.

電子部品6の金属キャップ4が傾かずに基板2に接合されていても、図4(c)に示すように、電子部品6が取り付けられている治具80自体が傾いている場合には、第2部材40の先端面42sで電子部品6の上面5を押圧すると、矢印76で示すように、圧力分布が不均一になる。   Even if the metal cap 4 of the electronic component 6 is joined to the substrate 2 without being inclined, as shown in FIG. 4C, when the jig 80 itself to which the electronic component 6 is attached is inclined, When the top surface 5 of the electronic component 6 is pressed by the tip surface 42 s of the second member 40, the pressure distribution becomes non-uniform as indicated by an arrow 76.

図4(b)及び(c)に示すように、圧力分布が不均一になると、圧力が弱い箇所では電子部品6の不図示の端子と治具80に設けられた不図示の端子との間の接触不良が発生して、電子部品6について測定できなかったり、測定誤差が大きくなったりする。   As shown in FIGS. 4B and 4C, when the pressure distribution becomes non-uniform, between the terminal (not shown) of the electronic component 6 and the terminal (not shown) provided on the jig 80 at a place where the pressure is weak. As a result, the electronic component 6 cannot be measured or the measurement error becomes large.

これに対し、実施例の吸着ヘッド10は、押圧分布が均一になるように電子部品6を押圧することができるので、端子間の接触不良を防止し、電子部品を正確に測定することができる。   On the other hand, since the suction head 10 of the embodiment can press the electronic component 6 so that the pressure distribution is uniform, contact failure between terminals can be prevented and the electronic component can be accurately measured. .

また、図4(b)及び(c)に示すように、電子部品6の上面5が傾き、先端部20の先端面22sと電子部品6の上面5との間に空隙が発生すると、吸着孔28から真空吸引しても、電子部品6を十分に吸着することができず、吸着不良が発生したり、搬送時に電子部品が落下したりする。   Further, as shown in FIGS. 4B and 4C, when the upper surface 5 of the electronic component 6 is inclined and a gap is generated between the distal end surface 22s of the distal end portion 20 and the upper surface 5 of the electronic component 6, suction holes are formed. Even if vacuum suction is performed from 28, the electronic component 6 cannot be sufficiently adsorbed, resulting in poor adsorption or the electronic component falling during transportation.

これに対し、実施例の吸着ヘッド10は、電子部品6の上面5の傾きに応じて、第2部材40の先端面42sが傾き、第2部材40の先端面42sと電子部品6の上面5との間に空隙が発生しないようにすることができるため、電子部品6を確実に吸着することができ、吸着不良が発生したり搬送時に電子部品が落下したりすることがない。   On the other hand, in the suction head 10 of the embodiment, the front end surface 42 s of the second member 40 is inclined according to the inclination of the upper surface 5 of the electronic component 6, and the front end surface 42 s of the second member 40 and the upper surface 5 of the electronic component 6. Therefore, the electronic component 6 can be reliably adsorbed, and the adsorbing failure does not occur and the electronic component does not fall during transportation.

<まとめ> 以上に説明したように、第2部材の先端面が任意の方向に自在に傾くことができるように構成することで、電子部品の被吸着面が傾いていても、電子部品を確実に真空吸着することができ、圧力分布が均一になるように電子部品を押圧することができる。   <Summary> As described above, by configuring the tip surface of the second member to be freely tiltable in an arbitrary direction, the electronic component can be reliably secured even when the attracted surface of the electronic component is tilted. The electronic component can be pressed so that the pressure distribution is uniform.

なお、本発明は、上記実施の形態に限定されるものではなく、種々変更を加えて実施することが可能である。   The present invention is not limited to the above embodiment, and can be implemented with various modifications.

例えば、先端部を付勢するばね部材を設けない構成とすることも可能である。第1軸と第2軸とが直交しない構成とすることも可能である。   For example, a configuration in which a spring member that urges the tip portion is not provided is also possible. A configuration in which the first axis and the second axis are not orthogonal to each other is also possible.

先端部と、第1部材と、第2部材との内外の関係は任意であり、例えば、第2部材の内側に第1部材が配置され、第1部材の内側に先端部が配置される構成や、第2部材の内側に先端部が配置され、先端部の内側に第1部材が配置される構成であってもよい。先端部と、第1部材及び第2部材とが同軸に配置されない構成とすることも可能である。   The inside / outside relationship between the tip portion, the first member, and the second member is arbitrary. For example, the first member is arranged inside the second member, and the tip portion is arranged inside the first member. Or the front-end | tip part may be arrange | positioned inside a 2nd member, and the structure by which a 1st member is arrange | positioned inside a front-end | tip part may be sufficient. It is also possible to adopt a configuration in which the tip portion and the first member and the second member are not arranged coaxially.

第1部材や第2部材は、略筒形状のキャップ部材に限らず、揺動自在に支持される形状であればよい。また、電子部品を吸着する第2部材の先端面は、電子部品の被吸着面と同じ大きさであっても、電子部品の被吸着面よりも小さくてもよい。   The first member and the second member are not limited to a substantially cylindrical cap member, but may be any shape that is supported in a swingable manner. Moreover, the front end surface of the second member that sucks the electronic component may be the same size as the attracted surface of the electronic component or may be smaller than the attracted surface of the electronic component.

5 被吸着面
6 電子部品
10,10x 電子部品移送装置用吸着ヘッド
12 固定部
14 ばね(弾性部材)
16 管
20 先端部
22s 先端面
24 第1軸
28 吸着孔
30 第1部材
34 第2軸
40 第2部材
42s 先端面
48 吸着孔
5 Adsorbed surface 6 Electronic component 10, 10x Adsorption head for electronic component transfer device 12 Fixing portion 14 Spring (elastic member)
16 pipe 20 tip portion 22s tip surface 24 first shaft 28 suction hole 30 first member 34 second shaft 40 second member 42s tip surface 48 suction hole

Claims (6)

電子部品移送装置に装着されて移動し、電子部品を真空吸着する、電子部品移送装置用吸着ヘッドであって、
前記電子部品移送装置に固定される固定部と、
前記固定部に保持され、前記固定部から突出する先端部と、
前記先端部に揺動自在に支持された第1部材と、
前記第1部材に揺動自在に支持された第2部材と、
を備え、
前記第2部材は、前記先端部及び前記第1部材よりも突出する先端面を有し、該先端面には電子部品を真空吸着するための吸着孔が形成され、該先端面と平行な第1軸を中心に揺動自在に前記第1部材に支持され、
前記第1部材は、前記第2部材の前記先端面と平行かつ前記第1軸と交差する第2軸を中心に揺動自在に前記固定部に支持されることを特徴とする、電子部品移送装置用吸着ヘッド。
A suction head for an electronic component transfer device that is mounted on an electronic component transfer device and moves to vacuum-suck the electronic component,
A fixing portion fixed to the electronic component transfer device;
A tip portion held by the fixing portion and protruding from the fixing portion;
A first member swingably supported by the tip portion;
A second member swingably supported by the first member;
With
The second member has a tip surface that protrudes more than the tip portion and the first member, and a suction hole for vacuum-sucking electronic components is formed on the tip surface, and the second member is parallel to the tip surface. Supported by the first member so as to be swingable about one axis;
The first component is supported by the fixed portion so as to be swingable about a second axis that is parallel to the distal end surface of the second member and intersects the first axis. Vacuum head for equipment.
前記先端部は、前記固定部に対して出没する方向に移動自在に、前記固定部に保持され、
前記固定部の内部に、前記先端部が前記固定部から突出する方向に、前記先端部を弾力的に付勢する弾性部材をさらに備えたことを特徴とする、請求項1に記載の電子部品移送装置用吸着ヘッド。
The distal end portion is held by the fixed portion so as to be movable in a direction in which the tip portion appears and disappears.
The electronic component according to claim 1, further comprising an elastic member that elastically biases the tip portion in a direction in which the tip portion protrudes from the fixing portion. Adsorption head for transfer device.
前記第1軸と前記第2軸とが互いに直交することを特徴とする、請求項1又は2に記載の電子部品移送装置用吸着ヘッド。   The suction head for an electronic component transfer device according to claim 1, wherein the first axis and the second axis are orthogonal to each other. 前記先端部の外側に、前記第1部材及び前記第2部材が配置されていることを特徴とする、請求項1乃至3のいずれか一つに記載の電子部品移送装置用吸着ヘッド。   The suction head for an electronic component transfer device according to any one of claims 1 to 3, wherein the first member and the second member are disposed outside the tip portion. 前記第2部材の前記先端面は、前記第2部材の前記先端面に真空吸着される電子部品の被吸着面よりも大きいことを特徴とする、請求項1乃至4のいずれか一つに記載の電子部品移送装置用吸着ヘッド。   The said front end surface of the said 2nd member is larger than the to-be-adsorbed surface of the electronic component vacuum-sucked by the said front end surface of the said 2nd member, The any one of Claim 1 thru | or 4 characterized by the above-mentioned. Suction head for electronic component transfer device. 前記第1部材と前記第2部材とは、同軸に配置された筒状の部材であり、
前記第1軸と前記第2軸との前記交点は、前記第1部材及び前記第2部材の中心軸上に配置されることを特徴とする、請求項1乃至5のいずれか一つに記載の電子部品移送装置用吸着ヘッド。
The first member and the second member are cylindrical members arranged coaxially,
6. The intersection point between the first axis and the second axis is disposed on a central axis of the first member and the second member, according to any one of claims 1 to 5. Suction head for electronic component transfer device.
JP2009073001A 2009-03-25 2009-03-25 Suction head for electronic component transfer device Pending JP2010221365A (en)

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