JP2010221174A - Method of forming surface protective film of surface-mounted electronic component - Google Patents

Method of forming surface protective film of surface-mounted electronic component Download PDF

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JP2010221174A
JP2010221174A JP2009073275A JP2009073275A JP2010221174A JP 2010221174 A JP2010221174 A JP 2010221174A JP 2009073275 A JP2009073275 A JP 2009073275A JP 2009073275 A JP2009073275 A JP 2009073275A JP 2010221174 A JP2010221174 A JP 2010221174A
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electronic component
protective film
powder coating
forming
mount electronic
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Satoshi Takizawa
智 滝澤
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Citizen Holdings Co Ltd
Citizen Finetech Miyota Co Ltd
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Citizen Holdings Co Ltd
Citizen Finetech Miyota Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of forming a surface protective film, which occupies a small space, has few production man-hours and excellent mass productivity, the method sticking powder coating to all except for a terminal surface for mounting by forming the surface protective film by the powder coating on a plurality of surface-mounted electronic components and therefore dispensing with a cutting process. <P>SOLUTION: When forming the surface protective film by the powder coating on the surface-mounted electronic components, by arranging the plurality of surface-mounted electronic components while the terminal surfaces for mounting of the surface-mounted electronic components is abutted on a support member, the powder coating is stuck to all except for the terminal surface for mounting of the surface-mounted electronic components by a coating apparatus, and the powder coating stuck to the surface-mounted electronic component is fixed by heating. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、表面実装型電子部品の実装用端子面以外全てに、塗装装置により粉体塗料を付着させた表面保護膜形成方法に関するものである。   The present invention relates to a method for forming a surface protective film in which a powder coating material is adhered to all surfaces other than a mounting terminal surface of a surface-mounted electronic component by a coating apparatus.

従来、表面実装型電子部品の絶縁性及び遮光性、更に切断による破片落下防止を目的として、表面保護膜形成が行われている。図4は、従来の表面実装型電子部品を樹脂成形し切断により個片化する表面保護膜形成方法を説明する概念図である。
表面実装型電子部品の実装用端子面を支持部材に当接させた状態で、複数の表面実装型電子部品の実装用端子面以外に保護膜を形成するには、一般的に切断により個片化された表面実装型電子部品1を支持部材4例えばダイシングシートに拡開または配置させ、金型又は金属マスクにて表面実装型電子部品1を覆ったのち樹脂成形または印刷方法にて表面保護膜3を形成し、その後、切断部8に沿って、ブレードダイサーなどを用いて切断し、再び個片化を行う。
Conventionally, a surface protective film has been formed for the purpose of insulating and shielding light from a surface-mounted electronic component and preventing fragments from being dropped due to cutting. FIG. 4 is a conceptual diagram illustrating a conventional method for forming a surface protective film in which a surface-mounted electronic component is molded by resin and cut into pieces.
In order to form a protective film on a surface other than the mounting terminal surfaces of a plurality of surface-mounted electronic components in a state where the mounting terminal surfaces of the surface-mounted electronic components are in contact with the support member, it is generally cut into pieces. The surface mounted electronic component 1 is expanded or arranged on a support member 4 such as a dicing sheet, the surface mounted electronic component 1 is covered with a mold or a metal mask, and then a surface protective film is formed by a resin molding or printing method. 3 is then cut along the cutting portion 8 using a blade dicer or the like, and singulated again.

また、特許文献1や特許文献2に示されるように、電子部品の表面保護膜を形成する手段として、粉体塗装を用いることも知られている。   Further, as shown in Patent Document 1 and Patent Document 2, it is also known to use powder coating as a means for forming a surface protective film of an electronic component.

特許文献1では、粉体塗料で構成された第2外装体で覆われた圧電部品の製造方法が記載されている。図5は、従来のリード線を有する圧電部品の断面図であり、図6は、従来の粉体塗装方法を説明する図である。   Patent Document 1 describes a method of manufacturing a piezoelectric component covered with a second exterior body made of a powder paint. FIG. 5 is a sectional view of a conventional piezoelectric component having a lead wire, and FIG. 6 is a diagram for explaining a conventional powder coating method.

ここで、圧電部品10に第2外装体14を形成する工程を説明する。
図6に示すように、リード導体11を有する圧電部品10を、ヒーター12で予熱し、続いて流動粉体塗料13に浸漬し、圧電部品10の周りに粉体塗料を付着させて引き上げ、その後、ヒーター12で予熱する。この工程を2〜3回程繰り返した後、粉体塗料を硬化させ、図5に示すような、第2外装体14を備えた圧電部品の完成体9が得られる。
Here, a process of forming the second exterior body 14 on the piezoelectric component 10 will be described.
As shown in FIG. 6, the piezoelectric component 10 having the lead conductors 11 is preheated with a heater 12, subsequently immersed in a fluidized powder coating 13, and the powder coating is attached around the piezoelectric component 10 and then lifted. Preheat with heater 12. After repeating this process about 2 to 3 times, the powder coating material is cured, and a piezoelectric component complete body 9 having the second exterior body 14 as shown in FIG. 5 is obtained.

特許文献2では、リードレスのチップ型部品への粉体塗料塗布方法が記載されている。図7は、従来のチップ型部品への粉体塗装方法を説明する断面図である。
チップ型部品15を、2枚のテープ17間に挿入し、チップ型部品を予熱した後、粉体塗料を融着させ、所望の部分にのみ粉体塗装を行う。
Patent Document 2 describes a method of applying a powder coating material to a leadless chip type component. FIG. 7 is a cross-sectional view for explaining a conventional powder coating method for chip-type components.
The chip-type component 15 is inserted between the two tapes 17 and the chip-type component is preheated, and then the powder coating material is fused to perform powder coating only on a desired portion.

特許文献3には、粉体塗料による塗膜の形成方法が記載されている。   Patent Document 3 describes a method for forming a coating film using a powder coating material.

特開平6−188670JP-A-6-188670 特開平10−137671JP-A-10-137671 特開平2000−153222JP 2000-153222 A

電子部品の支持部材として、例えばダイシングシートを用いて、樹脂成形及び印刷方法にて表面保護膜を形成する場合、保護膜を形成する為の装置費用が高額であり、装置占有スペースも広くなる。また、表面保護膜を形成する為には、樹脂成形であれば専用の金型が、印刷であれば専用の金属製マスクが、必要になり、部品が替わる毎に、金型や金属マスクの製作費用が発生し、製造コストがかかる。   When a surface protective film is formed by a resin molding and printing method using, for example, a dicing sheet as a support member for an electronic component, the apparatus cost for forming the protective film is high, and the space occupied by the apparatus is widened. In addition, in order to form a surface protection film, a dedicated mold is required for resin molding, and a dedicated metal mask is required for printing. Production costs are incurred and manufacturing costs are high.

さらに、表面保護膜を形成後、完成体を得るには、切断による個片化が必要になる為、切断用の装置及び切断工程が必要になる。   Furthermore, in order to obtain a finished product after forming the surface protective film, it is necessary to divide into pieces by cutting, so that a cutting device and a cutting process are required.

また、特許文献1に示すような、浸漬による保護膜形成方法では、電子部品に対して個々に保護膜を形成する為に、大量生産には不向きであり、製造コストがかかる。   In addition, the method for forming a protective film by immersion as shown in Patent Document 1 is not suitable for mass production because the protective film is individually formed on the electronic component, and the manufacturing cost is high.

特許文献2に示すような、保護膜形成方法では、表面保護膜形成前に2枚のテープ間にチップ型部品を装着固定する作業や、表面保護膜形成後に2枚のテープ間からチップ型部品を取り出す作業が必要となり、さらに電子部品の小型化に伴って、作業の難易度が増してしまう。   In the protective film forming method as shown in Patent Document 2, the chip-type component is mounted and fixed between two tapes before the surface protective film is formed, or the chip-type component is inserted between the two tapes after the surface protective film is formed. As the electronic component becomes smaller, the difficulty of the operation increases.

本発明は、このような課題を解決するためになされたもので、表面実装型電子部品の実装用端子面以外全てを粉体塗装による表面保護膜形成を行うための容易な製造工法かつ量産性に優れた表面保護膜の形成方法を提供する事を目的とする。   The present invention has been made to solve such problems, and is an easy manufacturing method and mass productivity for forming a surface protective film by powder coating on all surfaces other than the mounting terminal surface of the surface mounting type electronic component. An object of the present invention is to provide a method for forming a surface protective film excellent in the above.

本発明は、表面実装型電子部品を粉体塗装にて表面保護膜を形成するにあたって、表面実装型電子部品の実装用端子面を支持部材に当接させた状態で複数の表面実装型電子部品を配置させ、塗装装置により粉体塗料を表面実装型電子部品の実装用端子面以外全てに付着させ、加熱にて表面実装型電子部品に付着した粉体塗料を定着させる。   The present invention provides a plurality of surface-mounted electronic components in a state where a mounting terminal surface of the surface-mounted electronic component is in contact with a support member when forming a surface protective film on the surface-mounted electronic component by powder coating. The powder coating material is attached to all surfaces other than the mounting terminal surface of the surface-mounted electronic component by a coating apparatus, and the powder coating material attached to the surface-mounted electronic component is fixed by heating.

前記支持部材は、耐熱性シートであり、かつ前記粉体塗料に対して難接着性を有するテープ材料からなる表面実装型電子部品の表面保護膜の形成方法とする。   The support member is a heat-resistant sheet and is a method for forming a surface protection film of a surface-mount type electronic component made of a tape material that has poor adhesion to the powder paint.

前記支持部材は、耐熱性シートであり、かつ磁気を帯びた材料からなる表面実装型電子部品の表面保護膜の形成方法とする。   The support member is a heat-resistant sheet and is a method for forming a surface protective film of a surface-mount type electronic component made of a magnetic material.

前記粉体塗料は、静電塗装可能な粉体塗料である表面実装型電子部品の表面保護の膜形成方法とする。   The powder coating is a film forming method for surface protection of a surface mount electronic component which is a powder coating capable of electrostatic coating.

前記表面実装型電子部品に付着した前記粉体塗料以外の粉体塗料は回収する表面実装型電子部品の表面保護膜の形成方法とする。   The powder coating material other than the powder coating material adhering to the surface mount electronic component is a method for forming a surface protective film of the surface mount electronic component to be collected.

前記表面実装型電子部品は、複数の製品領域を有する母基板を切断し個片化した表面実装型電子部品であり、前記支持部材は、切断工程におけるダイシングシートであり、前記母基板を切断した後、前記ダイシングシートを拡張し、複数の前記表面実装型電子部品の間隔を拡開させた状態で、粉体塗装を行う表面実装型電子部品の表面保護膜の形成方法とする。   The surface-mounted electronic component is a surface-mounted electronic component obtained by cutting and dividing a mother board having a plurality of product regions, and the support member is a dicing sheet in a cutting process, and the mother board is cut. After that, the dicing sheet is expanded, and the surface protection film forming method of the surface mount electronic component in which powder coating is performed in a state where the interval between the plurality of the surface mount electronic components is widened.

前記表面実装型電子部品は、複数の製品領域を有する母基板を切断し個片化した表面実装型電子部品であり、前記母基板を切断した後、移載装置にて、前記支持部材に、複数の前記表面実装型電子部品を所定の間隔に配置させ、粉体塗装を行う表面実装型電子部品の表面保護の形成方法とする。   The surface-mounted electronic component is a surface-mounted electronic component obtained by cutting and dividing a mother board having a plurality of product regions, and after cutting the mother board, in the transfer device, the support member, A method for forming a surface protection of a surface-mounted electronic component in which a plurality of the surface-mounted electronic components are arranged at predetermined intervals and powder coating is performed.

本発明は、樹脂成形や印刷方法などで使用する高額な装置は不要であり、装置の占有スペースが少なく、かつ電子部品の変更時にも製造コストを低減できる。   The present invention does not require an expensive apparatus for use in resin molding or printing methods, occupies less space for the apparatus, and can reduce manufacturing costs even when electronic components are changed.

余分な表面保護膜材料を回収した後に、表面保護膜を定着させることができるため、
樹脂成形や印刷方法での表面保護膜形成後の切断工程が不要となる。
Since the surface protective film can be fixed after collecting the excess surface protective film material,
A cutting step after the formation of the surface protective film by the resin molding or printing method becomes unnecessary.

本発明によって、表面実装型電子部品の実装用端子面以外全てを粉体塗装による表面保護膜形成を行う容易な製造工法かつ量産性に優れた表面保護膜の形成方法を提供することができる。 According to the present invention, it is possible to provide an easy manufacturing method for forming a surface protective film by powder coating on all surfaces other than a mounting terminal surface of a surface-mounted electronic component, and a method for forming a surface protective film excellent in mass productivity.

図1は表面実装型電子部品の断面図であり、(a)は表面保護膜形成前で、(b)は表面保護膜形成後である。FIG. 1 is a cross-sectional view of a surface-mounted electronic component, where (a) is before the surface protective film is formed, and (b) is after the surface protective film is formed. 本実施例における粉体塗料塗布工程を説明する図である。It is a figure explaining the powder coating-material application | coating process in a present Example. 本実施例における表面実装型電子部品に形成された表面保護膜以外の粉体塗料を回収した状態を説明する図である。It is a figure explaining the state which collect | recovered powder coating materials other than the surface protective film formed in the surface mount-type electronic component in a present Example. 従来の表面実装型電子部品を樹脂成形し切断により個片化する表面保護膜形成方法を説明する概念図である。It is a conceptual diagram explaining the surface protection film formation method of resin-molding the conventional surface mount type electronic component, and cutting into pieces by cutting. 従来のリード線を有する圧電部品の断面図である。It is sectional drawing of the piezoelectric component which has the conventional lead wire. 従来の粉体塗装方法を説明する図である。It is a figure explaining the conventional powder coating method. 従来のチップ型部品への粉体塗装方法を説明する断面図である。It is sectional drawing explaining the powder coating method to the conventional chip type | mold component.

以下、本発明について、図面を参照しつつ説明する。図1は、本発明における表面実装型電子部品の断面図であり、(a)は表面保護膜形成前で、(b)は表面保護膜形成後である。図2は、本実施例における粉体塗料塗布工程を説明する図である。図3は、本実施例における表面実装型電子部品に形成された表面保護膜以外の粉体塗料を回収した状態を説明する図である。   The present invention will be described below with reference to the drawings. FIG. 1 is a cross-sectional view of a surface-mount type electronic component according to the present invention, where (a) is before the surface protective film is formed and (b) is after the surface protective film is formed. FIG. 2 is a diagram for explaining the powder coating application process in the present embodiment. FIG. 3 is a diagram for explaining a state in which the powder coating material other than the surface protective film formed on the surface mount electronic component in the present embodiment is collected.

ここで、本発明における表面実装型電子部品は、従来の圧電部品と同様に、複数の製品領域を有する母基板に形成されている。実装用端子面2を支持部材4であるダイシングシートに圧着固定させた状態で、母基板を各製品領域に切断することで、個片化を行う。   Here, the surface-mount type electronic component according to the present invention is formed on a mother board having a plurality of product areas, as in the case of a conventional piezoelectric component. In a state where the mounting terminal surface 2 is crimped and fixed to a dicing sheet that is the support member 4, the mother board is cut into each product region to be singulated.

個片化を行った後、ダイシングシートを拡開し、図2に示すように、複数の表面実装型電子部品1に、粉体塗装を行う。
尚、個片化された表面実装型電子部品1を、ダイシングシートから移載して、支持部材4に所定の間隔で配置し圧着固定させ、粉体塗装を行うこともできる。
After dividing into individual pieces, the dicing sheet is expanded, and a plurality of surface-mounted electronic components 1 are powder-coated as shown in FIG.
It is also possible to carry out powder coating by transferring the separated surface-mounted electronic component 1 from a dicing sheet, placing it on the support member 4 at a predetermined interval, and pressing and fixing it.

粉体塗料の塗装方式としては、静電塗装装置5により粉体塗料に数10KVの高電圧を印加して静電気を帯電させアースした部品に静電気力により塗装する静電塗装法を適用する。   As a coating method of the powder coating, an electrostatic coating method is applied in which a high voltage of several tens of kilovolts is applied to the powder coating by the electrostatic coating apparatus 5 to charge static electricity and apply to the grounded component by electrostatic force.

実装用端子面2は支持部材4に密着する事で遮蔽され、静電塗装装置5により粉体塗料6にて、図2に示すように実装用端子面2以外全てに表面保護膜3を形成する事ができる。   The mounting terminal surface 2 is shielded by being in close contact with the support member 4, and a surface protective film 3 is formed on the entire surface other than the mounting terminal surface 2 as shown in FIG. I can do it.

図3に示すように、表面実装型電子部品1に付着した粉体塗料6以外を回収し、加熱により表面実装型電子部品1に付着した粉体塗料6を定着させ、表面保護膜3を形成する。この時、支持部材4に固定された実装用端子面2には表面保護膜3は形成されない。   As shown in FIG. 3, the surface coating film 3 other than the powder coating material 6 attached to the surface mount electronic component 1 is collected, and the powder coating material 6 attached to the surface mount electronic component 1 is fixed by heating to form the surface protective film 3. To do. At this time, the surface protective film 3 is not formed on the mounting terminal surface 2 fixed to the support member 4.

その後、従来のような切断による個片化をすることなく、表面保護膜3を形成された表面実装型電子部品7の完成体となる。   Thereafter, the surface-mounted electronic component 7 having the surface protective film 3 formed thereon is completed without being separated into pieces by conventional cutting.

支持部材のシート材質は、表面実装型電子部品をしっかりと圧着固定する強度を保持していれば特に限定するものではないが、粉体塗料に対してポリミイドシート或いはテフロン(登録商標)コートされたシートは、やや高価ではあるが、耐熱性などの点から好適である。   The material of the support member sheet is not particularly limited as long as it retains the strength for firmly pressing and fixing the surface-mounted electronic component. However, the powder coating is a polyimide sheet or a sheet coated with Teflon (registered trademark). Is somewhat expensive, but is preferable in terms of heat resistance.

粉体塗料の材料は本発明の目的に関しては特に制限されるものではないが、電子部品へ表面保護膜を形成するには、エポキシ樹脂系の粉体塗料が密着性、絶縁性、遮光性付与などの点から好適である。粉体塗料の粒度はシートと表面実装型電子部品の実装用端子面の隙間への回り込み、均質な保護膜形状を形成する為に、表面実装型電子部品形状や大きさとの適正な整合性をはかる必要がある。   The material of the powder coating is not particularly limited with respect to the object of the present invention, but in order to form a surface protective film on the electronic component, the epoxy resin-based powder coating imparts adhesion, insulation and light shielding properties. From the point of view, it is preferable. The particle size of the powder coating wraps around the gap between the sheet and the mounting terminal surface of the surface-mounted electronic component, and in order to form a uniform protective film shape, the appropriate consistency with the surface-mounted electronic component shape and size is required. It is necessary to measure.

1 表面実装型電子部品
2 実装用端子面
3 表面保護膜
4 支持部材
5 静電塗装装置
6 粉体塗料
7 表面保護膜形成された表面実装型電子部品
8 切断部
9 第2外装体を備えた圧電部品の完成体
10 圧電部品
11 リード導体
12 ヒーター
13 流動粉体塗料
14 第2外装体
15 リードレスのチップ型部品
16 粉体塗料
17 テープ
DESCRIPTION OF SYMBOLS 1 Surface mount type electronic component 2 Terminal surface for mounting 3 Surface protective film 4 Support member 5 Electrostatic coating apparatus 6 Powder coating material 7 Surface mount type electronic component in which surface protective film was formed 8 Cutting part 9 The 2nd exterior body was provided Completed piezoelectric component 10 Piezoelectric component 11 Lead conductor 12 Heater 13 Fluid powder coating 14 Second exterior body 15 Leadless chip-shaped component 16 Powder coating 17 Tape

Claims (7)

表面実装型電子部品を粉体塗装にて表面保護膜を形成するにあたって、
前記表面実装型電子部品の実装用端子面を支持部材に当接させた状態で複数の前記表面実装型電子部品を配置させ、
塗装装置により粉体塗料を前記表面実装型電子部品の実装用端子面以外全てに付着させ、
加熱にて前記表面実装型電子部品に付着した粉体塗料を定着させることを特徴とする表面実装型電子部品の表面保護膜形成方法。
When forming a surface protective film by powder coating on surface mount electronic components,
A plurality of the surface mount electronic components are arranged in a state where the mounting terminal surface of the surface mount electronic component is in contact with a support member,
A powder coating is applied to all surfaces other than the mounting terminal surface of the surface mount electronic component by a coating device,
A method for forming a surface protective film for a surface mount electronic component, wherein the powder coating material adhered to the surface mount electronic component is fixed by heating.
前記支持部材は、
耐熱性シートであり、かつ前記粉体塗料に対して難接着性を有するテープ材料からなることを特徴とする請求項1に記載の表面実装型電子部品の表面保護膜形成方法。
The support member is
2. The method for forming a surface protection film for a surface-mount electronic component according to claim 1, wherein the surface protection film is made of a tape material that is a heat-resistant sheet and has poor adhesion to the powder paint.
前記支持部材は、
耐熱性シートであり、かつ磁気を帯びた材料からなることを特徴とする請求項1に記載の表面実装型電子部品の表面保護膜形成方法。
The support member is
2. The method for forming a surface protective film for a surface mount electronic component according to claim 1, wherein the surface protective film is made of a heat-resistant sheet and a magnetic material.
前記粉体塗料は、
静電塗装可能な粉体塗料であることを特徴とする請求項1乃至3のいずれか1つに記載の表面実装型電子部品の表面保護膜形成方法。
The powder coating is
The method for forming a surface protective film for a surface-mount type electronic component according to any one of claims 1 to 3, wherein the method is a powder paint capable of electrostatic coating.
前記表面実装型電子部品に付着した前記粉体塗料以外の粉体塗料は回収することを特徴とする請求項1乃至4のいずれか1つに記載の表面実装型電子部品の表面保護膜形成方法。   5. The surface protective film forming method for a surface mount electronic component according to claim 1, wherein a powder paint other than the powder paint attached to the surface mount electronic component is collected. . 前記表面実装型電子部品は、
複数の製品領域を有する母基板を切断し個片化した表面実装型電子部品であり、
前記支持部材は、
切断工程におけるダイシングシートであり、
前記母基板を切断した後、前記ダイシングシートを拡張し、複数の前記表面実装型電子部品の間隔を拡開させた状態で、粉体塗装を行うことを特徴とする請求項1乃至5のいずれか1つに記載の表面実装型電子部品の表面保護膜形成方法。
The surface mount electronic component is:
It is a surface-mount electronic component obtained by cutting and dividing a mother board having a plurality of product areas,
The support member is
It is a dicing sheet in the cutting process,
6. The powder coating is performed in a state where the dicing sheet is expanded after the mother substrate is cut and a space between the plurality of surface mount electronic components is widened. 6. A method for forming a surface protective film for a surface-mount type electronic component according to claim 1.
前記表面実装型電子部品は、
複数の製品領域を有する母基板を切断し個片化した表面実装型電子部品であり、
前記母基板を切断した後、移載装置にて、前記支持部材に、複数の前記表面実装型電子部品を所定の間隔に配置させ、粉体塗装を行うことを特徴する請求項1乃至5のいずれか1つに記載の表面実装型電子部品の表面保護形成方法。
The surface mount electronic component is:
It is a surface-mount electronic component obtained by cutting and dividing a mother board having a plurality of product areas,
6. The method according to claim 1, wherein after the mother substrate is cut, a plurality of surface-mount type electronic components are arranged at predetermined intervals on the support member by a transfer device, and powder coating is performed. The surface protection formation method of the surface mount electronic component as described in any one.
JP2009073275A 2009-03-25 2009-03-25 Method of forming surface protective film of surface-mounted electronic component Pending JP2010221174A (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10137671A (en) * 1996-11-15 1998-05-26 Sumitomo Durez Co Ltd Coating method for powder coating
JP2002141444A (en) * 2000-11-01 2002-05-17 Sony Corp Semiconductor device and method of manufacturing the same
JP2004253643A (en) * 2003-02-20 2004-09-09 Lintec Corp Method for manufacturing semiconductor chip
JP2005086039A (en) * 2003-09-09 2005-03-31 Oppc Co Ltd Manufacturing method of solid-state electrolytic capacitor, and solid-state electrolytic capacitor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10137671A (en) * 1996-11-15 1998-05-26 Sumitomo Durez Co Ltd Coating method for powder coating
JP2002141444A (en) * 2000-11-01 2002-05-17 Sony Corp Semiconductor device and method of manufacturing the same
JP2004253643A (en) * 2003-02-20 2004-09-09 Lintec Corp Method for manufacturing semiconductor chip
JP2005086039A (en) * 2003-09-09 2005-03-31 Oppc Co Ltd Manufacturing method of solid-state electrolytic capacitor, and solid-state electrolytic capacitor

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