JP2010219392A

JP2010219392A - Electrochemical capacitor

Info

Publication number: JP2010219392A
Application number: JP2009065970A
Authority: JP
Inventors: Shunpei Yamazaki; 舜平山崎; Konami Izumi; 小波泉
Original assignee: Semiconductor Energy Laboratory Co Ltd
Current assignee: Semiconductor Energy Laboratory Co Ltd
Priority date: 2009-03-18
Filing date: 2009-03-18
Publication date: 2010-09-30
Anticipated expiration: 2029-03-18
Also published as: JP5337546B2

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a thin electrochemical capacitor with a large capacity. <P>SOLUTION: The present invention relates to an electrochemical capacitor including: a positive electrode active material coming into in contact with a positive electrode collector and having a rugged structure on its surface, a first insulator provided at a distal end of a projecting portion of the positive electrode active material, a negative electrode active material coming into contact with a negative electrode collector and having a rugged structure on its surface, a second insulator provided at a distal end of a projecting portion of the negative electrode active material, and an electrolyte containing lithium ions and provided in a space where the positive electrode collector and the negative electrode collector are disposed while facing each other, the first insulator and the second insulator are interposed, and the positive electrode active material and the negative electrode active material are formed while being engaged in such a way that their projecting portions and recessed portions are not brought into direct contact with each other. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本明細書に開示される発明は、電気化学キャパシタに関する。 The invention disclosed herein relates to an electrochemical capacitor.

近年、電池材料にリチウム金属酸化物を用い、リチウムイオンが正極と負極の間を移動することによって充放電を行う方式の二次電池である、リチウムイオン二次電池、及び、電気化学キャパシタの開発が盛んに進められている（特許文献１、特許文献２、特許文献３参照）。 In recent years, development of lithium ion secondary batteries and electrochemical capacitors that use lithium metal oxides as battery materials and charge and discharge by moving lithium ions between positive and negative electrodes (See Patent Literature 1, Patent Literature 2, and Patent Literature 3).

特開２００８−２９４３１４号公報JP 2008-294314 A 特開２００２−２８９１７４号公報JP 2002-289174 A 特開２００７−２９９５８０号公報JP 2007-299580 A

容量の大きい電気化学キャパシタを得るためには、正極及び負極の表面積を大きくする必要がある。正極及び負極の表面積を大きくするには、正極及び負極のそれぞれの表面に凹凸を設ければよい。 In order to obtain an electrochemical capacitor having a large capacity, it is necessary to increase the surface areas of the positive electrode and the negative electrode. In order to increase the surface areas of the positive electrode and the negative electrode, it is only necessary to provide irregularities on the surfaces of the positive electrode and the negative electrode.

凹凸が設けられた正極及び負極の間に電解質を設けることにより、大容量のキャパシタを得ることができる。 A large-capacity capacitor can be obtained by providing an electrolyte between the positive and negative electrodes provided with unevenness.

しかしながら、正極及び負極のそれぞれの表面に凹凸を設けた電気化学キャパシタは、その厚さが厚くなってしまう恐れがある。 However, the electrochemical capacitor having irregularities on the surfaces of the positive electrode and the negative electrode may be thick.

正極及び負極それぞれの表面に複数の突起を設け、それぞれの突起上に絶縁体を配置し、かつ、正極及び負極それぞれの表面に複数の突起を互い違い（交互）に配置する。正極及び負極の突起は、突起状に設けられた絶縁体により絶縁されている。 A plurality of protrusions are provided on the surfaces of the positive electrode and the negative electrode, an insulator is disposed on each of the protrusions, and a plurality of protrusions are alternately (alternately) disposed on the surfaces of the positive electrode and the negative electrode. The protrusions of the positive electrode and the negative electrode are insulated by an insulator provided in a protrusion shape.

すなわち、正極集電体に接する正極活性物質及び負極集電体に接する負極活性物質のそれぞれの表面を凹凸構造とする。また、正極活性物質及び負極活性物質における凹凸構造の凸部の先端部には絶縁体を設ける。 That is, the surface of each of the positive electrode active material in contact with the positive electrode current collector and the negative electrode active material in contact with the negative electrode current collector has an uneven structure. In addition, an insulator is provided at the tip of the convex portion of the concave-convex structure in the positive electrode active material and the negative electrode active material.

また、正極活性物質及び負極活性物質における凹凸構造の凸部と凸部の間隔は、凸部の幅よりも広くしておき、正極活性物質及び負極活性物質の凹凸構造を噛み合わせた場合にも直接接触しないようにする。 In addition, the interval between the convex and concave portions of the concavo-convex structure in the positive electrode active material and the negative electrode active material is made wider than the width of the convex portion, and also when the concavo-convex structure of the positive electrode active material and the negative electrode active material is meshed. Avoid direct contact.

そして正極活性物質と負極活性物質の凸部と凹部が直接接触しないように噛み合って形成された空間部に電解質を充填する。 Then, the electrolyte is filled into the space formed by engaging the positive electrode active material and the negative electrode active material so that the convex portions and the concave portions are not in direct contact with each other.

さらに、正極集電体及びそれに接する正極活性物質（正極集電体及び正極活性物質を合わせて「正極」とする）、並びに、負極集電体及びそれに接する負極活性物質（負極集電体及び負極活性物質を合わせて「負極」とする）のそれぞれの表面を凹凸構造とする。また、正極及び負極における凹凸構造の凸部の先端部には絶縁体を設ける。 Furthermore, the positive electrode current collector and the positive electrode active material in contact therewith (the positive electrode current collector and the positive electrode active material are collectively referred to as “positive electrode”), the negative electrode current collector and the negative electrode active material in contact therewith (the negative electrode current collector and the negative electrode) The surface of each of the active materials is taken as a “negative electrode” to have a concavo-convex structure. In addition, an insulator is provided at the tip of the convex portion of the concavo-convex structure in the positive electrode and the negative electrode.

また、正極及び負極における凹凸構造の凸部と凸部の間隔は、凸部の幅よりも広くしておき、正極及び負極の凹凸構造を噛み合わせた場合にも直接接触しないようにする。 In addition, the interval between the convex and concave portions of the concavo-convex structure in the positive electrode and the negative electrode is set wider than the width of the convex portion so that the direct contact does not occur even when the concavo-convex structure of the positive and negative electrodes are engaged.

そして正極と負極の凸部と凹部が直接接触しないように噛み合って形成された空間部に電解質を充填してもよい。 Then, the electrolyte may be filled in a space formed by meshing so that the convex portions and the concave portions of the positive electrode and the negative electrode are not in direct contact with each other.

正極集電体に接し、表面に凹凸構造を有する正極活性物質と、前記正極活性物質の該凸部の先端部に設けられた第１の絶縁体と、負極集電体に接し、表面に凹凸構造を有する負極活性物質と、前記負極活性物質の該凸部の先端部に設けられた第２の絶縁体とを有する電気化学キャパシタに関する。該電気化学キャパシタにおいて、前記正極集電体と前記負極集電体とが対向配置され、前記第１の絶縁体と前記第２の絶縁体が介在して、前記正極活性物質と前記負極活性物質の凸部と凹部が直接接触しないように噛み合って形成された空間部に設けられ、リチウムイオンを含む電解質とを有することを特徴とする。 A positive electrode active material having a concavo-convex structure on the surface, in contact with the positive electrode current collector, a first insulator provided at a tip portion of the convex portion of the positive electrode active material, and a negative electrode current collector and having a rugged surface The present invention relates to an electrochemical capacitor having a negative active material having a structure and a second insulator provided at a tip of the convex portion of the negative active material. In the electrochemical capacitor, the positive electrode current collector and the negative electrode current collector are disposed to face each other, and the positive electrode active material and the negative electrode active material are interposed between the first insulator and the second insulator. It is provided in the space part formed by meshing so that a convex part and a recessed part may not contact directly, It has the electrolyte containing lithium ion, It is characterized by the above-mentioned.

表面に凹凸構造を有する正極集電体及び正極活性物質からなる正極と、前記正極の該凸部の先端部に設けられた第１の絶縁体と、表面に凹凸構造を有する負極集電体及び負極活性物質からなる負極と、前記負極の該凸部の先端部に設けられた第２の絶縁体とを有する電気化学キャパシタに関する。該電気化学キャパシタは、前記正極と前記負極とが対向配置され、前記第１の絶縁体と前記第２の絶縁体が介在して、前記正極と前記負極の凸部と凹部が直接接触しないように噛み合って形成された空間部に設けられ、リチウムイオンを含む電解質とを有することを特徴とする。 A positive electrode current collector having a concavo-convex structure on the surface and a positive electrode made of a positive electrode active material; a first insulator provided at a tip of the convex portion of the positive electrode; a negative electrode current collector having a concavo-convex structure on the surface; The present invention relates to an electrochemical capacitor having a negative electrode made of a negative electrode active material and a second insulator provided at the tip of the convex portion of the negative electrode. In the electrochemical capacitor, the positive electrode and the negative electrode are arranged to face each other, and the first insulator and the second insulator are interposed so that the convex portion and the concave portion of the positive electrode and the negative electrode are not in direct contact with each other. And an electrolyte containing lithium ions provided in a space formed by meshing with each other.

表面に凹凸構造を有する正極集電体及び正極活性物質からなる正極と、前記正極の該凹部に設けられた第１の絶縁体と、表面に凹凸構造を有する負極集電体及び負極活性物質からなる負極と、前記負極の該凹部に設けられた第２の絶縁体とを有する電気化学キャパシタに関する。該電気化学キャパシタにおいて、前記正極と前記負極とが対向配置され、前記第１の絶縁体と前記第２の絶縁体が介在して、前記正極と前記負極の凸部と凹部が直接接触しないように噛み合って形成された空間部に設けられ、リチウムイオンを含む電解質とを有することを特徴とする。 A positive electrode made of a positive electrode current collector having a concavo-convex structure and a positive electrode active material, a first insulator provided in the concave portion of the positive electrode, and a negative electrode current collector and a negative electrode active material having a concavo-convex structure on the surface It is related with the electrochemical capacitor which has the negative electrode which becomes and the 2nd insulator provided in this recessed part of the said negative electrode. In the electrochemical capacitor, the positive electrode and the negative electrode are arranged to face each other, and the first insulator and the second insulator are interposed so that the convex portion and the concave portion of the positive electrode and the negative electrode are not in direct contact with each other. And an electrolyte containing lithium ions provided in a space formed by meshing with each other.

表面に凹凸構造を有する正極集電体と、前記正極活集電体の該凸部の先端部に設けられた第１の絶縁体と、前記正極集電体及び前記第１の絶縁体に接し、表面に凹凸構造を有する正極活物質と、表面に凹凸構造を有する負極集電体と、前記負極活集電体の該凸部の先端部に設けられた第２の絶縁体と、前記負極集電体及び前記第２の絶縁体に接し、表面に凹凸構造を有する負極活物質とを有する電気化学キャパシタに関する。該電気化学キャパシタにおいて、前記正極活物質と前記負極活物質とが対向配置され、前記第１の絶縁体と前記第２の絶縁体が介在して、前記正極活性物質と前記負極活性物質の凸部と凹部が直接接触しないように噛み合って形成された空間部に設けられ、リチウムイオンを含む電解質とを有することを特徴とする。 A positive electrode current collector having a concavo-convex structure on the surface; a first insulator provided at a tip of the convex portion of the positive electrode active current collector; and the positive electrode current collector and the first insulator. A positive electrode active material having a concavo-convex structure on the surface, a negative electrode current collector having a concavo-convex structure on the surface, a second insulator provided at a tip of the convex part of the negative electrode active current collector, and the negative electrode The present invention relates to an electrochemical capacitor having a negative electrode active material in contact with a current collector and the second insulator and having a concavo-convex structure on a surface thereof. In the electrochemical capacitor, the positive electrode active material and the negative electrode active material are disposed to face each other, and the first and second insulators are interposed so that the positive electrode active material and the negative electrode active material are convex. It is provided in the space part formed by meshing so that a part and a recessed part may not contact directly, It has the electrolyte containing lithium ion, It is characterized by the above-mentioned.

正極及び負極それぞれの表面に複数の突起を設けるため、表面積が大きくなり、大容量のキャパシタを得ることができる。 Since a plurality of protrusions are provided on the surfaces of the positive electrode and the negative electrode, the surface area is increased, and a large-capacity capacitor can be obtained.

またそれぞれの突起を互い違い（交互）に配置することにより、薄くて小型なキャパシタを得ることができる。 Further, by arranging the protrusions alternately (alternately), a thin and small capacitor can be obtained.

電気化学キャパシタの作製工程を示す断面図。Sectional drawing which shows the manufacturing process of an electrochemical capacitor. 電気化学キャパシタの作製工程を示す断面図。Sectional drawing which shows the manufacturing process of an electrochemical capacitor. 電気化学キャパシタの作製工程を示す断面図。Sectional drawing which shows the manufacturing process of an electrochemical capacitor. 電気化学キャパシタの作製工程を示す断面図。Sectional drawing which shows the manufacturing process of an electrochemical capacitor. 電気化学キャパシタの作製工程を示す断面図。Sectional drawing which shows the manufacturing process of an electrochemical capacitor. 電気化学キャパシタの作製工程を示す断面図。Sectional drawing which shows the manufacturing process of an electrochemical capacitor. 電気化学キャパシタの作製工程を示す断面図。Sectional drawing which shows the manufacturing process of an electrochemical capacitor. 電気化学キャパシタの作製工程を示す断面図。Sectional drawing which shows the manufacturing process of an electrochemical capacitor. 電気化学キャパシタの作製工程を示す断面図。Sectional drawing which shows the manufacturing process of an electrochemical capacitor. 電気化学キャパシタの作製工程を示す断面図。Sectional drawing which shows the manufacturing process of an electrochemical capacitor. 電気化学キャパシタの作製工程を示す断面図。Sectional drawing which shows the manufacturing process of an electrochemical capacitor.

以下、本明細書に開示された発明の実施の態様について、図面を参照して説明する。但し、本明細書に開示された発明は多くの異なる態様で実施することが可能であり、本明細書に開示された発明の趣旨及びその範囲から逸脱することなくその形態及び詳細を様々に変更し得ることは当業者であれば容易に理解される。従って、本実施の形態の記載内容に限定して解釈されるものではない。なお、以下に示す図面において、同一部分又は同様な機能を有する部分には同一の符号を付し、その繰り返しの説明は省略する。 Hereinafter, embodiments of the invention disclosed in this specification will be described with reference to the drawings. However, the invention disclosed in this specification can be implemented in many different modes, and various changes can be made in form and details without departing from the spirit and scope of the invention disclosed in this specification. It will be readily understood by those skilled in the art. Therefore, the present invention is not construed as being limited to the description of this embodiment mode. Note that in the drawings described below, the same portions or portions having similar functions are denoted by the same reference numerals, and repetitive description thereof is omitted.

［実施の形態１］
本実施の形態を、図１（Ａ）〜図１（Ｂ）、図２（Ａ）〜図２（Ｄ）、図３（Ａ）〜図３（Ｄ）、図４（Ａ）〜図４（Ｅ）、図５（Ａ）〜図５（Ｅ）、図６（Ａ）〜図６（Ｄ）、図７（Ａ）〜図７（Ｂ）、図８（Ａ）〜図８（Ｂ）、図９（Ａ）〜図９（Ｂ）、図１０（Ａ）〜図１０（Ｂ）、図１１（Ａ）〜図１１（Ｂ）を用いて説明する。 [Embodiment 1]
In this embodiment mode, FIGS. 1A to 1B, 2A to 2D, 3A to 3D, and 4A to 4 are used. (E), FIG. 5 (A) to FIG. 5 (E), FIG. 6 (A) to FIG. 6 (D), FIG. 7 (A) to FIG. 7 (B), FIG. 8 (A) to FIG. ), FIG. 9 (A) to FIG. 9 (B), FIG. 10 (A) to FIG. 10 (B), and FIG. 11 (A) to FIG. 11 (B).

まず図１（Ａ）に示す電気化学キャパシタ１３５の構成及びその作製方法について、図１（Ａ）、図２（Ａ）〜図２（Ｄ）、図３（Ａ）〜図３（Ｄ）を用いて説明する。 First, a structure of an electrochemical capacitor 135 shown in FIG. 1A and a manufacturing method thereof are shown in FIGS. 1A, 2A to 2D, and 3A to 3D. It explains using.

まず板状の正極集電体１１１を用意する（図２（Ａ）参照）。正極集電体１１１は、アルミニウム（Ａｌ）、チタン（Ｔｉ）、等の単体あるいは化合物を用いればよい。 First, a plate-like positive electrode current collector 111 is prepared (see FIG. 2A). For the positive electrode current collector 111, a single substance or a compound such as aluminum (Al) or titanium (Ti) may be used.

次いで、正極集電体１１１上に、正極活物質１１２の材料となる板状正極活物質材料１０１を形成する（図２（Ｂ）参照）。 Next, a plate-like positive electrode active material 101 which is a material of the positive electrode active material 112 is formed over the positive electrode current collector 111 (see FIG. 2B).

板状正極活物質材料１０１は、活性炭、あるいは、ＬｉＣｏＯ_２、ＬｉＮｉＯ_２等の化学式Ｌｉ_ｘＭ_ｙＯ_２（ただし、ＭはＣｏ、Ｎｉ、Ｍｎ、Ｖ、Ｆｅ、またはＴｉを示し、ｘは０．２≦ｘ≦２．５、ｙは０．８≦ｙ≦１．２５の範囲である）で示されるリチウム含有複合酸化物を用いればよい。 Plate positive electrode active material 101 is activated carbon _or,, LiCoO 2, LiNiO ₂ formula such as _Li x _M y _{O 2} (however, M represents Co, Ni, Mn, V, Fe or Ti,, x is 0 .2 ≦ x ≦ 2.5, y is in the range of 0.8 ≦ y ≦ 1.25).

板状正極活物質材料１０１上に、エッチング工程においてマスクとなる絶縁体１１３を複数形成する（図２（Ｃ）参照）。 A plurality of insulators 113 that serve as masks in the etching step are formed over the plate-like positive electrode active material 101 (see FIG. 2C).

絶縁体１１３は、アクリル樹脂、ポリイミド樹脂、ポリイミドアミド樹脂、フェノール樹脂、エポキシ樹脂、レジスト等の有機樹脂が挙げられる。絶縁体１１３は、このような有機樹脂を、印刷法やスピンコート法等で形成すればよい。例えば、未感光の感光性アクリルを板状正極活物質材料１０１の表面に印刷法で形成し、絶縁体１１３を形成する領域に光を当てることにより、絶縁体１１３を形成すればよい。 Examples of the insulator 113 include an organic resin such as an acrylic resin, a polyimide resin, a polyimide amide resin, a phenol resin, an epoxy resin, and a resist. The insulator 113 may be formed using such an organic resin by a printing method, a spin coating method, or the like. For example, the insulator 113 may be formed by forming unexposed photosensitive acrylic on the surface of the plate-like positive electrode active material 101 by a printing method and applying light to a region where the insulator 113 is formed.

また絶縁体１１３として、酸化珪素膜、窒素を含む酸化珪素膜、酸素を含む窒化珪素膜、窒化珪素膜等の無機絶縁物を用いてもよい。 As the insulator 113, an inorganic insulator such as a silicon oxide film, a silicon oxide film containing nitrogen, a silicon nitride film containing oxygen, or a silicon nitride film may be used.

さらに絶縁体１１３は、上述の有機樹脂あるいは無機絶縁物の単層でもよいし、２つ以上の有機樹脂の積層あるいは２つ以上の無機絶縁物の積層、さらにあるいは、２つ以上の有機樹脂と無機絶縁物を積層したものを用いてもよい。 Further, the insulator 113 may be a single layer of the above-described organic resin or inorganic insulator, a laminate of two or more organic resins, a laminate of two or more inorganic insulators, or, alternatively, two or more organic resins and A laminate of inorganic insulators may be used.

次いで、絶縁体１１３をマスクとして、板状正極活物質材料１０１をドライエッチング法で異方性エッチングを行う。これにより、幅ａと高さｂの比が３以上１０００以下、好ましくは、１０以上１０００以下、例えば、幅ａが１μｍ〜１０μｍ、高さｂが１０μｍ〜１００μｍ、さらに例えば幅ａが１μｍ、高さｂが１０μｍとなる突起１１５を複数有する正極活物質１１２を形成する（図２（Ｄ）参照）。図２（Ｄ）は断面図のため、正極活物質１１２は櫛状に示されている。しかし突起１１５が奥方向にも連なって形成されるので、正極活物質１１２は剣山のような形状を有する。 Next, using the insulator 113 as a mask, the plate-like positive electrode active material 101 is anisotropically etched by a dry etching method. Thereby, the ratio of the width a to the height b is 3 to 1000, preferably 10 to 1000, for example, the width a is 1 μm to 10 μm, the height b is 10 μm to 100 μm, and further, for example, the width a is 1 μm, high A positive electrode active material 112 having a plurality of protrusions 115 each having a thickness b of 10 μm is formed (see FIG. 2D). Since FIG. 2D is a cross-sectional view, the positive electrode active material 112 is shown in a comb shape. However, since the protrusion 115 is formed continuously in the back direction, the positive electrode active material 112 has a shape like a sword mountain.

また、突起１１５の上面から見た形状は、円、四角形、三角形、星型、五角形、六角形等を用いることができ、必要に応じて形状を決めればよい。 The shape of the protrusion 115 viewed from the top can be a circle, a quadrangle, a triangle, a star, a pentagon, a hexagon, or the like, and the shape may be determined as necessary.

板状正極活物質材料１０１の材料のうち、ドライエッチングが難しい材料は、例えば、機械加工、スクリーン印刷、電解メッキ、ホットエンボス加工等の別の方法で、突起１１５を形成してもよい。さらにドライエッチングが可能な板状正極活物質材料１０１であっても、これらの方法を用いて突起１１５を形成してもよい。以上のようにして正極１１７が形成される。 Among the materials of the plate-like positive electrode active material 101, a material that is difficult to dry-etch may form the protrusion 115 by another method such as machining, screen printing, electrolytic plating, hot embossing, or the like. Furthermore, even if it is the plate-shaped positive electrode active material material 101 which can be dry-etched, you may form the protrusion 115 using these methods. As described above, the positive electrode 117 is formed.

また一方、板状の負極集電体１２１を用意する（図２（Ａ）参照）。負極集電体１２１は、銅（Ｃｕ）、アルミニウム（Ａｌ）、ニッケル（Ｎｉ）、チタン（Ｔｉ）等の単体あるいは化合物を用いればよい。 On the other hand, a plate-like negative electrode current collector 121 is prepared (see FIG. 2A). The negative electrode current collector 121 may be a single substance or a compound such as copper (Cu), aluminum (Al), nickel (Ni), titanium (Ti), or the like.

次いで、負極集電体１２１上に、負極活物質１２２の材料となる板状負極活物質材料１０５を形成する（図３（Ｂ）参照）。 Next, a plate-like negative electrode active material 105 which is a material of the negative electrode active material 122 is formed over the negative electrode current collector 121 (see FIG. 3B).

板状負極活物質材料１０５は、リチウムイオンを吸蔵、放出可能な炭素材、シリコン材料、シリコン合金材料等のリチウムイオン保持体を負極活物質として用いる。このような炭素材として、粉末状または繊維状の黒鉛等の炭素材を用いることが可能である。 The plate-like negative electrode active material 105 uses a lithium ion carrier such as a carbon material, silicon material, or silicon alloy material capable of occluding and releasing lithium ions as a negative electrode active material. As such a carbon material, a carbon material such as powdery or fibrous graphite can be used.

次いで、板状負極活物質材料１０５上に、エッチング工程においてマスクとなる絶縁体１２３を複数形成する（図３（Ｃ）参照）。絶縁体１２３は、絶縁体１１３と同様の材料及び同様の作製方法で形成すればよい。 Next, a plurality of insulators 123 that serve as masks in the etching step are formed over the plate-like negative electrode active material 105 (see FIG. 3C). The insulator 123 may be formed using a material similar to that of the insulator 113 and a similar manufacturing method.

次いで、絶縁体１２３をマスクとして、ドライエッチングが可能な板状負極活物質材料１０５をドライエッチング法で異方性エッチングを行う。これにより、幅ｃと高さｄの比が３以上１０００以下、好ましくは、１０以上１０００以下、例えば、幅ｃが１μｍ〜１０μｍ、高さｄが１０μｍ〜１００μｍ、さらに例えば幅ｃが１μｍ、高さｄが１０μｍとなる突起１２５を複数有する負極活物質１２２を形成する（図３（Ｄ）参照）。図３（Ｄ）は断面図のため、負極活物質１２２は櫛状に示されている。しかし突起１２５が奥方向にも連なって形成されるので、負極活物質１２２は剣山のような形状を有する。 Next, using the insulator 123 as a mask, anisotropic etching is performed on the plate-shaped negative electrode active material material 105 that can be dry etched by a dry etching method. Thereby, the ratio of the width c to the height d is 3 to 1000, preferably 10 to 1000, for example, the width c is 1 μm to 10 μm, the height d is 10 μm to 100 μm, and further, for example, the width c is 1 μm, high A negative electrode active material 122 having a plurality of protrusions 125 each having a thickness d of 10 μm is formed (see FIG. 3D). 3D is a cross-sectional view, the negative electrode active material 122 is shown in a comb shape. However, since the protrusion 125 is formed continuously in the back direction, the negative electrode active material 122 has a shape like a sword mountain.

また、突起１２５の上面から見た形状は、円、四角形、三角形、星型、五角形、六角形等を用いることができ、必要に応じて形状を決めればよい。また突起１１５に対応する形状を形成すればよい。 The shape of the protrusion 125 viewed from the top can be a circle, a quadrangle, a triangle, a star, a pentagon, a hexagon, or the like, and the shape may be determined as necessary. Further, a shape corresponding to the protrusion 115 may be formed.

板状負極活物質材料１０５の材料のうち、ドライエッチングが難しい材料は、例えば、機械加工、スクリーン印刷、電解メッキ、ホットエンボス加工等の別の方法で、突起１２５を形成してもよい。さらにドライエッチングが可能な板状負極活物質材料１０５であっても、これらの方法を用いて突起１２５を形成してもよい。以上のようにして、負極１２７が形成される。 Of the material of the plate-like negative electrode active material 105, a material that is difficult to dry-etch may form the protrusion 125 by another method such as machining, screen printing, electrolytic plating, hot embossing, or the like. Furthermore, even if it is the plate-shaped negative electrode active material material 105 which can be dry-etched, the protrusion 125 may be formed using these methods. As described above, the negative electrode 127 is formed.

また、電気化学キャパシタの中でも、リチウムイオンキャパシタを作製する場合には、負極にリチウムイオンを添加するプレドーピング工程を行う。 Moreover, when producing a lithium ion capacitor among electrochemical capacitors, a pre-doping step of adding lithium ions to the negative electrode is performed.

次いで、正極１１７と負極１２７を対向させ、正極活物質１１２の突起１１５と、負極活物質１２２の突起１２５が互い違い（交互）となるように配置する。このとき、正極活物質１１２の突起１１５と負極活物質１２２、並びに、負極活物質１２２の突起１２５と正極活物質１１２は、それぞれ絶縁体１１３並びに絶縁体１２３により絶縁されるように配置する。 Next, the positive electrode 117 and the negative electrode 127 are opposed to each other, and the protrusions 115 of the positive electrode active material 112 and the protrusions 125 of the negative electrode active material 122 are arranged alternately (alternately). At this time, the protrusion 115 and the negative electrode active material 122 of the positive electrode active material 112 and the protrusion 125 and the positive electrode active material 112 of the negative electrode active material 122 are disposed so as to be insulated by the insulator 113 and the insulator 123, respectively.

電解質１３２を正極１１７及び負極１２７の間の空間に配置する。以上により電気化学キャパシタ１３５を作製する。（図１（Ａ）参照）。 The electrolyte 132 is disposed in a space between the positive electrode 117 and the negative electrode 127. Thus, the electrochemical capacitor 135 is manufactured. (See FIG. 1A).

電解質１３２はリチウムイオンを含み、リチウムイオンが電気伝導を担っている。電解質１３２は、溶媒と、その溶媒に溶解するリチウム塩とから構成されている。リチウム塩として、例えば、ＬｉＰＦ_６（六フッ化リン酸リチウム）、ＬｉＣｌＯ_４、ＬｉＢＦ_４、ＬｉＰＦ_６、ＬｉＡｌＣｌ_４、ＬｉＳｂＦ_６、ＬｉＳＣＮ、ＬｉＣｌ、ＬｉＣＦ_３ＳＯ_３、ＬｉＣＦ_３ＣＯ_２、Ｌｉ（ＣＦ_３ＳＯ_２）_２、ＬｉＡｓＦ_６、ＬｉＮ（ＣＦ_３ＳＯ_２）_２、ＬｉＢ_１０Ｃｌ_１０、ＬｉＮ（Ｃ_２Ｆ_５ＳＯ_２）、ＬｉＰＦ_３（ＣＦ_３）_３、およびＬｉＰＦ_３（Ｃ_２Ｆ_５）_３等を挙げることができ、これらを使用する電解質１３２に単独または二種以上を組み合わせて使用することができる。 The electrolyte 132 contains lithium ions, and the lithium ions are responsible for electrical conduction. The electrolyte 132 is composed of a solvent and a lithium salt that dissolves in the solvent. Examples of the lithium salt include LiPF ₆ (lithium hexafluorophosphate), LiClO ₄ , LiBF ₄ , LiPF ₆ , LiAlCl ₄ , LiSbF ₆ , LiSCN, LiCl, LiCF ₃ SO ₃ , LiCF ₃ CO ₂ , Li (CF ₃ _{_{_{SO 2) 2, LiAsF 6,}}} LiN (CF 3 SO 2) 2, LiB 10 Cl 10, LiN (C 2 F 5 SO 2), LiPF 3 (CF 3) 3, and _{_{_{_{LiPF 3 (C 2 F 5)}}}} 3 The electrolyte 132 using these can be used alone or in combination of two or more.

また電解質１３２中の溶媒として、例えば、エチレンカーボネート（以下、ＥＣと略す）、プロピレンカーボネート（ＰＣ）、ブチレンカーボネート（ＢＣ）、およびビニレンカーボネート（ＶＣ）などの環状カーボネート類、ジメチルカーボネート（ＤＭＣ）、ジエチルカーボネート（ＤＥＣ）、エチルメチルカーボネート（以下、ＥＭＣと略す）、メチルプロピルカーボネート（ＭＰＣ）、メチルイソブチルカーボネート（ＭＩＰＣ）、およびジプロピルカーボネート（ＤＰＣ）などの非環状カーボネート類、ギ酸メチル、酢酸メチル、プロピオン酸メチル、およびプロピオン酸エチルなどの脂肪族カルボン酸エステル類、γ−ブチロラクトン等のγ−ラクトン類、１，２−ジメトキシエタン（ＤＭＥ）、１，２−ジエトキシエタン（ＤＥＥ）、およびエトキシメトキシエタン（ＥＭＥ）等の非環状エーテル類、テトラヒドロフラン、２−メチルテトラヒドロフラン等の環状エーテル類、ジメチルスルホキシド、１，３−ジオキソラン等やリン酸トリメチル、リン酸トリエチル、およびリン酸トリオクチルなどのアルキルリン酸エステルやそのフッ化物を挙げることができ、これらの一種または二種以上を混合して使用する。 Examples of the solvent in the electrolyte 132 include cyclic carbonates such as ethylene carbonate (hereinafter abbreviated as EC), propylene carbonate (PC), butylene carbonate (BC), and vinylene carbonate (VC), dimethyl carbonate (DMC), Acyclic carbonates such as diethyl carbonate (DEC), ethyl methyl carbonate (hereinafter abbreviated as EMC), methyl propyl carbonate (MPC), methyl isobutyl carbonate (MIPC), and dipropyl carbonate (DPC), methyl formate, methyl acetate Aliphatic carboxylic acid esters such as methyl propionate and ethyl propionate, γ-lactones such as γ-butyrolactone, 1,2-dimethoxyethane (DME), 1,2-diethoxyethane (DE E), acyclic ethers such as ethoxymethoxyethane (EME), cyclic ethers such as tetrahydrofuran and 2-methyltetrahydrofuran, dimethyl sulfoxide, 1,3-dioxolane, trimethyl phosphate, triethyl phosphate, and phosphoric acid Examples thereof include alkyl phosphate esters such as trioctyl and fluorides thereof, and these are used alone or in combination.

正極活物質１１２の突起１１５と負極活物質１２２の突起１２５は、それぞれ絶縁体１１３及び絶縁体１２３に絶縁するので、正極１１７と負極１２７が接触しショートすることがない。以上によって、容量は大きく、かつ、厚さが薄い電気化学キャパシタを得ることが可能である。 Since the protrusion 115 of the positive electrode active material 112 and the protrusion 125 of the negative electrode active material 122 are insulated from the insulator 113 and the insulator 123, respectively, the positive electrode 117 and the negative electrode 127 do not come into contact with each other and short-circuit. As described above, an electrochemical capacitor having a large capacity and a small thickness can be obtained.

次いで図１（Ａ）と異なる構成を有する電気化学キャパシタ２３５及びその作製方法について、図１（Ｂ）、図４（Ａ）〜図４（Ｅ）、図５（Ａ）〜図５（Ｅ）を用いて説明する。 Next, an electrochemical capacitor 235 having a structure different from that in FIG. 1A and a manufacturing method thereof are described with reference to FIGS. 1B, 4A to 4E, and FIGS. 5A to 5E. Will be described.

正極集電体２１１の材料となる板状正極材料２１９上に、エッチング工程においてマスクとなる絶縁体２１７を複数形成する（図４（Ａ）参照）。 A plurality of insulators 217 that serve as masks in the etching step are formed over the plate-like positive electrode material 219 that serves as the material of the positive electrode current collector 211 (see FIG. 4A).

板状正極材料２１９は、正極集電体１１１と同様の材料をを用いればよい。また絶縁体２１７は、絶縁体１１３と同様の材料及び作製方法を用いてばよい。 As the plate-like positive electrode material 219, a material similar to that of the positive electrode current collector 111 may be used. The insulator 217 may be formed using the same material and manufacturing method as the insulator 113.

次いで、絶縁体２１７をマスクとして、板状正極材料２１９をドライエッチング法で異方性エッチングを行う。これにより、突起２４７を複数有する正極集電体２１１を形成する（図４（Ｂ）参照）。図４（Ｂ）は断面図のため、正極集電体２１１は櫛状に示されている。しかし突起２４７が奥方向にも連なって形成されるので、正極集電体２１１は剣山のような形状を有する。 Next, using the insulator 217 as a mask, the plate-like positive electrode material 219 is anisotropically etched by a dry etching method. Thus, the positive electrode current collector 211 having a plurality of protrusions 247 is formed (see FIG. 4B). Since FIG. 4B is a cross-sectional view, the positive electrode current collector 211 is shown in a comb shape. However, since the protrusion 247 is formed continuously in the back direction, the positive electrode current collector 211 has a shape like a sword mountain.

板状正極材料２１９の材料のうち、ドライエッチングが難しい材料は、例えば、機械加工、スクリーン印刷、電解メッキ、ホットエンボス加工等の別の方法で、突起２４７を形成してもよい。さらにドライエッチングが可能な板状正極材料２１９であっても、これらの方法を用いて突起２４７を形成してもよい。 Of the materials of the plate-like positive electrode material 219, a material that is difficult to dry-etch may form the protrusions 247 by another method such as machining, screen printing, electrolytic plating, hot embossing, or the like. Furthermore, even if it is the plate-shaped positive electrode material 219 which can be dry-etched, you may form the protrusion 247 using these methods.

次いで、正極集電体２１１の突起２４７の先端上に存在する絶縁体２１７を除去する（図４（Ｃ）参照）。 Next, the insulator 217 existing on the tip of the protrusion 247 of the positive electrode current collector 211 is removed (see FIG. 4C).

次いで、複数の突起２４７を有する正極集電体２１１を覆って、正極活物質２１２を形成する（図４（Ｄ）参照）。正極活物質２１２は、板状正極活物質材料１０１と同様の材料を用いればよい。 Next, the positive electrode active material 212 is formed so as to cover the positive electrode current collector 211 having the plurality of protrusions 247 (see FIG. 4D). The positive electrode active material 212 may be formed using the same material as the plate-like positive electrode active material 101.

以上の工程により、正極集電体２１１及び正極活物質２１２により、複数の突起２４５が形成される。図４（Ｄ）は断面図のため、正極集電体２１１及び正極活物質２１２を含む突起２４５は櫛状に示されている。しかし突起２４５が奥方向にも連なって形成されるので、剣山のような形状となる。 Through the above steps, the plurality of protrusions 245 are formed by the positive electrode current collector 211 and the positive electrode active material 212. 4D is a cross-sectional view, the protrusion 245 including the positive electrode current collector 211 and the positive electrode active material 212 is shown in a comb shape. However, since the protrusion 245 is formed continuously in the back direction, it has a shape like a sword mountain.

また、突起２４５の上面から見た形状は、円、四角形、三角形、星型、五角形、六角形等を用いることができ、必要に応じて形状を決めればよい。 The shape of the protrusion 245 viewed from the top can be a circle, a rectangle, a triangle, a star, a pentagon, a hexagon, or the like, and the shape may be determined as necessary.

突起２４５は幅ｃと高さｄを有しているが、幅ｅと高さｆの比が３以上１０００以下、好ましくは、１０以上１０００以下、例えば、幅ｅが１μｍ〜１０μｍ、高さｈが１０μｍ〜１００μｍ、さらに例えば幅ｅが１μｍ、高さｈが１０μｍとなるとよい。 The protrusion 245 has a width c and a height d, but the ratio of the width e to the height f is 3 or more and 1000 or less, preferably 10 or more and 1000 or less, for example, the width e is 1 μm to 10 μm and the height h. 10 μm to 100 μm, and for example, the width e is preferably 1 μm and the height h is 10 μm.

次いで、突起２４５の先端表面上に、絶縁体２１３を形成する（図４（Ｅ）参照）。絶縁体２１３は、絶縁体１１３で説明した有機樹脂を用いインクジェット法等にて形成すればよい。以上にして正極２４１が作製される。 Next, an insulator 213 is formed over the tip surface of the protrusion 245 (see FIG. 4E). The insulator 213 may be formed using an organic resin described in the insulator 113 by an inkjet method or the like. Thus, the positive electrode 241 is manufactured.

また一方、負極集電体２２１の材料となる板状負極材料２２９上に、エッチング工程においてマスクとなる絶縁体２２７を複数形成する（図５（Ａ）参照）。 On the other hand, a plurality of insulators 227 that serve as masks in the etching step are formed over the plate-like negative electrode material 229 that serves as the material of the negative electrode current collector 221 (see FIG. 5A).

板状負極材料２２９は、負極集電体１２１と同様の材料を用いればよい。絶縁体２２７は、絶縁体１１３と同様の材料及び同様の作製方法で形成すればよい。 As the plate-like negative electrode material 229, a material similar to that of the negative electrode current collector 121 may be used. The insulator 227 may be formed using a material similar to that of the insulator 113 and a similar manufacturing method.

次いで、絶縁体２２７をマスクとして、ドライエッチングが可能な板状負極材料２２９をドライエッチング法で異方性エッチングを行う。これにより、突起２４８を複数有する負極集電体２２１を形成する（図（Ｂ）参照）。図４（Ｂ）は断面図のため、負極集電体２２１は櫛状に示されている。しかし突起２４８が奥方向にも連なって形成されるので、負極集電体２２１は剣山のような形状を有する。 Next, using the insulator 227 as a mask, anisotropic etching is performed on the plate-shaped negative electrode material 229 capable of dry etching by a dry etching method. Thus, the negative electrode current collector 221 having a plurality of protrusions 248 is formed (see FIG. 5B). 4B is a cross-sectional view, the negative electrode current collector 221 is shown in a comb shape. However, since the protrusion 248 is formed continuously in the back direction, the negative electrode current collector 221 has a shape like a sword mountain.

板状負極材料２２９の材料のうち、ドライエッチングが難しい材料は、例えば、機械加工、スクリーン印刷、電解メッキ、ホットエンボス加工等の別の方法で、突起２４８を形成してもよい。さらにドライエッチングが可能な板状負極材料２２９であっても、これらの方法を用いて突起２４８を形成してもよい。 Of the materials of the plate-like negative electrode material 229, a material that is difficult to dry-etch may form the protrusions 248 by another method such as machining, screen printing, electrolytic plating, hot embossing, or the like. Furthermore, even if it is the plate-shaped negative electrode material 229 which can be dry-etched, you may form the protrusion 248 using these methods.

次いで、負極集電体２２１の突起２４８の先端上に存在する絶縁体２２７を除去する（図５（Ｃ）参照）。 Next, the insulator 227 existing on the tip of the protrusion 248 of the negative electrode current collector 221 is removed (see FIG. 5C).

次いで、複数の突起２４８を有する負極集電体２２１を覆って、負極活物質２２２を形成する（図５（Ｄ）参照）。負極活物質２２２は、板状負極活物質材料１０５と同様の材料を用いればよい。 Next, the negative electrode active material 222 is formed so as to cover the negative electrode current collector 221 having the plurality of protrusions 248 (see FIG. 5D). The negative electrode active material 222 may be formed using the same material as the plate-like negative electrode active material 105.

以上の工程により、負極集電体２２１及び負極活物質２２２により、複数の突起２４６が形成される。図５（Ｄ）は断面図のため、負極集電体２２１及び負極活物質２２２を含む突起２４６は櫛状に示されている。しかし突起２４６が奥方向にも連なって形成されるので、剣山のような形状となる。 Through the above steps, the plurality of protrusions 246 are formed by the negative electrode current collector 221 and the negative electrode active material 222. 5D is a cross-sectional view, the protrusion 246 including the negative electrode current collector 221 and the negative electrode active material 222 is shown in a comb shape. However, since the protrusion 246 is formed continuously in the back direction, it has a shape like a sword mountain.

また、突起２４６の上面から見た形状は、円、四角形、三角形、星型、五角形、六角形等を用いることができ、必要に応じて形状を決めればよい。また突起２４５に対応する形状を形成すればよい。 Further, the shape of the protrusion 246 viewed from the top can be a circle, a quadrangle, a triangle, a star, a pentagon, a hexagon, or the like, and the shape may be determined as necessary. In addition, a shape corresponding to the protrusion 245 may be formed.

突起２４６は幅ｇと高さｈを有しているが、幅ｇと高さｈの比が３以上１０００以下、好ましくは、１０以上１０００以下、例えば、幅ｇが１μｍ〜１０μｍ、高さｈが１０μｍ〜１００μｍ、さらに例えば幅ｇが１μｍ、高さｈが１０μｍとなるとよい。 The protrusion 246 has a width g and a height h, and the ratio of the width g to the height h is 3 to 1000, preferably 10 to 1000, for example, the width g is 1 μm to 10 μm, and the height h. 10 μm to 100 μm, and for example, the width g may be 1 μm and the height h may be 10 μm.

次いで、突起２４６の先端表面上に、絶縁体２２３を形成する（図５（Ｅ）参照）。絶縁体２２３は、絶縁体１１３で説明した有機樹脂を用いインクジェット法等にて形成すればよい。以上にして負極２４２が作製される。 Next, an insulator 223 is formed over the tip surface of the protrusion 246 (see FIG. 5E). The insulator 223 may be formed using the organic resin described for the insulator 113 by an inkjet method or the like. In this way, the negative electrode 242 is manufactured.

次いで、正極２４１と負極２４２を対向させ、正極２４１の突起２４５と、負極２４２のの突起２４６が互い違い（交互）となるように配置する。このとき、正極２４１の突起２４５と負極活物質２２２、並びに、負極２４２の突起２４５と正極活物質２１２は、それぞれ絶縁体２１３並びに絶縁体２２３により絶縁されるように配置する。 Next, the positive electrode 241 and the negative electrode 242 are opposed to each other, and the protrusions 245 of the positive electrode 241 and the protrusions 246 of the negative electrode 242 are arranged alternately (alternately). At this time, the protrusion 245 and the negative electrode active material 222 of the positive electrode 241 and the protrusion 245 and the positive electrode active material 212 of the negative electrode 242 are disposed so as to be insulated by the insulator 213 and the insulator 223, respectively.

電解質２３２を正極２４１及び負極２４２の間の空間に配置する。以上により電気化学キャパシタ２３５を作製する。（図１（Ｂ）参照）。 The electrolyte 232 is disposed in a space between the positive electrode 241 and the negative electrode 242. Thus, the electrochemical capacitor 235 is produced. (See FIG. 1B).

また図１（Ａ）及び図１（Ｂ）の構成とは異なる電気化学キャパシタ及びその作製方法を、図６（Ａ）〜図６（Ｄ）及び図７（Ａ）を用いて説明する。 Further, an electrochemical capacitor different from the structure in FIGS. 1A and 1B and a manufacturing method thereof will be described with reference to FIGS. 6A to 6D and FIG. 7A.

まず図４（Ａ）〜図４（Ｄ）で述べられた作製工程に基づいて、突起２４５を有する正極集電体２１１及び正極活物質２１２を作製する。次いで、正極集電体２１１及び正極活物質２１２上に、絶縁層２７１を形成する（図６（Ａ）参照）。 First, the positive electrode current collector 211 and the positive electrode active material 212 each having the protrusion 245 are manufactured based on the manufacturing process described with reference to FIGS. Next, the insulating layer 271 is formed over the positive electrode current collector 211 and the positive electrode active material 212 (see FIG. 6A).

絶縁層２７１は、絶縁体１１３の材料のうち有機樹脂を用いて形成すればよい。 The insulating layer 271 may be formed using an organic resin among the materials of the insulator 113.

次いで、絶縁層２７１と正極活物質２１２との間で選択比が異なるエッチャントを用いて、絶縁層２７１をエッチングする。絶縁層２７１のエッチングは、突起２４５の先端が露出し、かつ、隣り合う突起２４５の間の凹部に絶縁体２７２が残るように行う（図６（Ｂ）参照）。以上のようにして、正極２３７を形成する。 Next, the insulating layer 271 is etched using an etchant having a different selection ratio between the insulating layer 271 and the positive electrode active material 212. The insulating layer 271 is etched so that the tips of the protrusions 245 are exposed and the insulator 272 remains in the recesses between the adjacent protrusions 245 (see FIG. 6B). As described above, the positive electrode 237 is formed.

一方、まず図５（Ａ）〜図５（Ｄ）で述べられた作製工程に基づいて、突起２４６を有する負極集電体２２１及び負極活物質２２２を作製する。次いで、負極集電体２２１及び負極活物質２２２上に、絶縁層２７３を形成する（図６（Ｃ）参照）。 On the other hand, first, the negative electrode current collector 221 and the negative electrode active material 222 having the protrusions 246 are manufactured based on the manufacturing steps described with reference to FIGS. Next, an insulating layer 273 is formed over the negative electrode current collector 221 and the negative electrode active material 222 (see FIG. 6C).

絶縁層２７３は、絶縁体１１３の材料のうち有機樹脂を用いて形成すればよい。 The insulating layer 273 may be formed using an organic resin among the materials of the insulator 113.

次いで、絶縁層２７３と負極活物質２２２との間で選択比が異なるエッチャントを用いて、絶縁層２７３をエッチングする。絶縁層２７３のエッチングは、突起２４６の先端が露出し、かつ、隣り合う突起２４６の間の凹部に絶縁体２７４が残るように行う（図６（Ｄ）参照）。以上のようにして、負極２３８を形成する。 Next, the insulating layer 273 is etched using an etchant having a different selection ratio between the insulating layer 273 and the negative electrode active material 222. The insulating layer 273 is etched so that the tips of the protrusions 246 are exposed and the insulator 274 remains in the recesses between the adjacent protrusions 246 (see FIG. 6D). As described above, the negative electrode 238 is formed.

次いで、正極２３７と負極２３８を対向させ、正極２３７の突起２４５と、負極２３８の突起２４６が互い違い（交互）となるように配置する。このとき、正極２３７の突起２４５と負極活物質２２２、並びに、負極２３８の突起２４５と正極活物質２１２は、それぞれ絶縁体２７４並びに絶縁体２７２により絶縁されるように配置する。 Next, the positive electrode 237 and the negative electrode 238 are opposed to each other, and the protrusions 245 of the positive electrode 237 and the protrusions 246 of the negative electrode 238 are arranged alternately (alternately). At this time, the protrusion 245 and the negative electrode active material 222 of the positive electrode 237 and the protrusion 245 and the positive electrode active material 212 of the negative electrode 238 are arranged to be insulated by the insulator 274 and the insulator 272, respectively.

電解質２７５を正極２３７及び負極２４２の間の空間に配置する。以上により電気化学キャパシタ２３６を作製する。（図７（Ａ）参照）。 An electrolyte 275 is disposed in a space between the positive electrode 237 and the negative electrode 242. Thus, the electrochemical capacitor 236 is produced. (See FIG. 7A).

また図１（Ａ）、図１（Ｂ）及び図７（Ａ）の構成とは異なる電気化学キャパシタ及びその作製方法を、図７（Ｂ）、図８（Ａ）〜図８（Ｂ）、図９（Ａ）〜図９（Ｂ）、図１０（Ａ）〜図１０（Ｂ）、図１１（Ａ）〜図１１（Ｂ）を用いて説明する。 Further, an electrochemical capacitor different from the structure of FIGS. 1A, 1B, and 7A and a manufacturing method thereof are illustrated in FIGS. 7B, 8A to 8B, This will be described with reference to FIGS. 9A to 9B, FIGS. 10A to 10B, and FIGS. 11A to 11B.

まず図４（Ａ）〜図４（Ｂ）で述べられた作製工程に基づいて、突起２４７を有する正極集電体２１１、並びに、突起２４７上の絶縁体２１７を形成する。さらに正極集電体２１１及び絶縁体２１７を覆って、正極活物質２５１を形成する（図８（Ａ）参照）。 First, the positive electrode current collector 211 having the protrusion 247 and the insulator 217 over the protrusion 247 are formed based on the manufacturing process described with reference to FIGS. Further, the positive electrode active material 251 is formed so as to cover the positive electrode current collector 211 and the insulator 217 (see FIG. 8A).

なお、突起２４７の上面から見た形状は、円、四角形、三角形、星型、五角形、六角形等を用いることができ、必要に応じて形状を決めればよい。 In addition, the shape seen from the upper surface of the protrusion 247 can be a circle, a square, a triangle, a star, a pentagon, a hexagon, or the like, and the shape may be determined as necessary.

次いで、正極活物質２５１上に、絶縁層２５２を形成する（図８（Ｂ）参照）。 Next, the insulating layer 252 is formed over the positive electrode active material 251 (see FIG. 8B).

絶縁層２５２は、絶縁体１１３の材料のうち有機樹脂を用いて形成すればよい。 The insulating layer 252 may be formed using an organic resin among the materials of the insulator 113.

次いで、絶縁層２５２及び正極活物質２５１、並びに、絶縁体２１７との間で選択比が異なるエッチャントを用い、絶縁層２５２及び正極活物質２５１をエッチングして、絶縁体２５４及び正極活物質２５３を得る。 Next, the insulating layer 252 and the positive electrode active material 251 are etched using the etchant having a selection ratio different from that of the insulating layer 252 and the positive electrode active material 251, and the insulator 217. obtain.

絶縁層２５２及び正極活物質２５１のエッチングは、絶縁体２１７が後の工程で正極活物質２５３と負極活物質２６３が絶縁できる程度の厚さになるように行う（図９（Ａ）参照）。すなわち、絶縁体２１７の一部が露出しており、露出している絶縁体２１７の一部は正極活物質２５３に覆われていない。 The insulating layer 252 and the positive electrode active material 251 are etched so that the insulator 217 has a thickness that allows the positive electrode active material 253 and the negative electrode active material 263 to be insulated in a later step (see FIG. 9A). That is, part of the insulator 217 is exposed, and part of the exposed insulator 217 is not covered with the positive electrode active material 253.

次いで絶縁体２５４と正極活物質２５３との間で、選択比が異なるエッチャントを用い、絶縁体２５４をエッチングして除去する（図９（Ｂ）参照）。これにより正極２５５が作製される。 Next, the insulator 254 is etched and removed using etchants having different selectivity between the insulator 254 and the positive electrode active material 253 (see FIG. 9B). Thereby, the positive electrode 255 is manufactured.

一方、まず図５（Ａ）〜図５（Ｂ）で述べられた作製工程に基づいて、突起２４８を有する負極集電体２２１、並びに、突起２４８上の絶縁体２２７を形成する。さらに負極集電体２２１及び絶縁体２２７を覆って、負極活物質２６１を形成する（図１０（Ａ）参照）。 On the other hand, first, the negative electrode current collector 221 having the protrusions 248 and the insulator 227 on the protrusions 248 are formed based on the manufacturing steps described with reference to FIGS. Further, the negative electrode active material 261 is formed so as to cover the negative electrode current collector 221 and the insulator 227 (see FIG. 10A).

また、突起２４８の上面から見た形状は、円、四角形、三角形、星型、五角形、六角形等を用いることができ、必要に応じて形状を決めればよい。また突起２４７に対応する形状を形成すればよい。 The shape of the protrusion 248 viewed from the top can be a circle, a quadrangle, a triangle, a star, a pentagon, a hexagon, or the like, and the shape may be determined as necessary. In addition, a shape corresponding to the protrusion 247 may be formed.

次いで、負極活物質２６１上に、絶縁層２６２を形成する（図１０（Ｂ）参照）。 Next, the insulating layer 262 is formed over the negative electrode active material 261 (see FIG. 10B).

絶縁層２６２は、絶縁体１１３の材料のうち有機樹脂を用いて形成すればよい。 The insulating layer 262 may be formed using an organic resin among the materials of the insulator 113.

次いで、絶縁層２６２及び負極活物質２６１、並びに、絶縁体２２７との間で選択比が異なるエッチャントを用い、絶縁層２６２及び負極活物質２６１をエッチングして、絶縁体２６４及び負極活物質２６３を得る。 Next, the insulating layer 262 and the negative electrode active material 261 and the etchant having a selection ratio different from that of the insulator 227 are used to etch the insulating layer 262 and the negative electrode active material 261 so that the insulator 264 and the negative electrode active material 263 are obtained. obtain.

絶縁層２６２及び負極活物質２６１のエッチングは、絶縁体２２７が後の工程で正極活物質２５３と負極活物質２６３が絶縁できる程度の厚さになるように行う（図１１（Ａ）参照）。すなわち、絶縁体２２７の一部が露出しており、露出している絶縁体２２７の一部は負極活物質２６３に覆われていない。 The insulating layer 262 and the negative electrode active material 261 are etched so that the insulator 227 has a thickness enough to insulate the positive electrode active material 253 and the negative electrode active material 263 in a later step (see FIG. 11A). That is, part of the insulator 227 is exposed, and part of the exposed insulator 227 is not covered with the negative electrode active material 263.

次いで絶縁体２６４と負極活物質２６３との間で、選択比が異なるエッチャントを用い、絶縁体２６４をエッチングして除去する（図１１（Ｂ）参照）。これにより負極２６５が作製される。 Next, the insulator 264 is etched away using an etchant having a different selectivity between the insulator 264 and the negative electrode active material 263 (see FIG. 11B). Thereby, the negative electrode 265 is manufactured.

次いで、正極２５５と負極２６５を対向させ、正極２５５の突起２４７上の絶縁体２１７と、負極２６５の突起２４８上の絶縁体２２７が互い違い（交互）となるように配置する。このとき、正極２５５の正極活物質２５３と負極２６５の負極活物質２６３は、絶縁体２１７並びに絶縁体２２７により絶縁されるように配置する。 Next, the positive electrode 255 and the negative electrode 265 are opposed to each other, and the insulator 217 on the protrusion 247 of the positive electrode 255 and the insulator 227 on the protrusion 248 of the negative electrode 265 are alternately arranged. At this time, the positive electrode active material 253 of the positive electrode 255 and the negative electrode active material 263 of the negative electrode 265 are disposed so as to be insulated by the insulator 217 and the insulator 227.

電解質２５７を正極２５５及び負極２６５の間の空間に配置する。以上により電気化学キャパシタ２６７を作製する。（図７（Ｂ）参照）。 An electrolyte 257 is disposed in a space between the positive electrode 255 and the negative electrode 265. Thus, an electrochemical capacitor 267 is manufactured. (See FIG. 7B).

１０１板状正極活物質材料
１０５板状負極活物質材料
１１１正極集電体
１１２正極活物質
１１３絶縁体
１１５突起
１１７正極
１２１負極集電体
１２２負極活物質
１２３絶縁体
１２５突起
１２７負極
１３２電解質
１３５電気化学キャパシタ
２１１正極集電体
２１２正極活物質
２１３絶縁体
２１７絶縁体
２１９板状正極材料
２２１負極集電体
２２２負極活物質
２２３絶縁体
２２７絶縁体
２２９板状負極材料
２３２電解質
２３５電気化学キャパシタ
２３６電気化学キャパシタ
２３７正極
２３８負極
２４１正極
２４２負極
２４５突起
２４６突起
２４７突起
２４８突起
２５１正極活物質
２５２絶縁層
２５３正極活物質
２５４絶縁体
２５５正極
２５７電解質
２６１負極活物質
２６２絶縁層
２６３負極活物質
２６４絶縁体
２６５負極
２６７電気化学キャパシタ
２７１絶縁層
２７２絶縁体
２７３絶縁層
２７４絶縁体
２７５電解質 101 plate-like positive electrode active material 105 plate-like negative electrode active material material 111 positive electrode current collector 112 positive electrode active material 113 insulator 115 protrusion 117 positive electrode 121 negative electrode current collector 122 negative electrode active material 123 insulator 125 protrusion 127 negative electrode 132 electrolyte 135 electricity Chemical capacitor 211 Positive electrode current collector 212 Positive electrode active material 213 Insulator 217 Insulator 219 Plate-like positive electrode material 221 Negative electrode current collector 222 Negative electrode active material 223 Insulator 227 Insulator 229 Plate-like negative electrode material 232 Electrolyte 235 Electrochemical capacitor 236 Electricity Chemical capacitor 237 Positive electrode 238 Negative electrode 241 Positive electrode 242 Negative electrode 245 Protrusion 246 Protrusion 247 Protrusion 248 Protrusion 251 Positive electrode active material 252 Insulating layer 253 Positive electrode active material 254 Insulator 255 Positive electrode 257 Electrolyte 261 Negative electrode active material 262 Insulating layer 263 Negative electrode active material 264 Insulator 2 5 negative 267 electrochemical capacitor 271 insulating layer 272 insulating 273 insulating layer 274 insulator 275 electrolyte

Claims

A positive electrode active material in contact with the positive electrode current collector and having a concavo-convex structure on the surface;
A first insulator provided at a tip of the convex portion of the positive electrode active material;
A negative electrode active material in contact with the negative electrode current collector and having an uneven structure on the surface;
A second insulator provided at the tip of the convex portion of the negative electrode active material;
The positive electrode current collector and the negative electrode current collector are arranged to face each other, the first insulator and the second insulator are interposed, and the positive electrode active material, the convex portion and the concave portion of the negative electrode active material are provided. An electrolyte containing lithium ions provided in a space formed by meshing so as not to be in direct contact;
An electrochemical capacitor comprising:

A positive electrode comprising a positive electrode current collector having a concavo-convex structure on the surface and a positive electrode active material;
A first insulator provided at a tip of the convex portion of the positive electrode;
A negative electrode current collector having a concavo-convex structure on the surface and a negative electrode comprising a negative electrode active material;
A second insulator provided at the tip of the convex portion of the negative electrode;
The positive electrode and the negative electrode are arranged to face each other, and the first insulator and the second insulator are interposed, and the positive electrode and the negative electrode are formed so as not to be in direct contact with each other. An electrolyte provided in the space and containing lithium ions;
An electrochemical capacitor comprising:

A positive electrode comprising a positive electrode current collector having a concavo-convex structure on the surface and a positive electrode active material;
A first insulator provided in the recess of the positive electrode;
A negative electrode current collector having a concavo-convex structure on the surface and a negative electrode comprising a negative electrode active material;
A second insulator provided in the recess of the negative electrode;
The positive electrode and the negative electrode are arranged to face each other, and the first insulator and the second insulator are interposed, and the positive electrode and the negative electrode are formed so as not to be in direct contact with each other. An electrolyte provided in the space and containing lithium ions;
An electrochemical capacitor comprising:

A positive electrode current collector having an uneven structure on the surface;
A first insulator provided at the tip of the convex portion of the positive electrode active current collector;
A positive electrode active material in contact with the positive electrode current collector and the first insulator and having a concavo-convex structure on the surface;
A negative electrode current collector having an uneven structure on the surface;
A second insulator provided at the tip of the convex portion of the negative electrode active current collector;
A negative electrode active material in contact with the negative electrode current collector and the second insulator and having a concavo-convex structure on the surface;
The positive electrode active material and the negative electrode active material are arranged to face each other, and the first insulator and the second insulator are interposed, so that the convex portion and the concave portion of the positive electrode active material and the negative electrode active material are in direct contact with each other. An electrolyte containing lithium ions, provided in a space formed so as not to mesh with each other,
An electrochemical capacitor comprising: