JP2010211126A - Ink discharge printing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ink discharge printing device that reduces the time required for positioning an object substrate to be printed necessary prior to ink discharge (including conveyance time to the alignment position and subsequent positioning time), and at the same time, improves positioning accuracy so as to be compatible with a large substrate separately exposed. <P>SOLUTION: The ink discharge printing device includes retractable lift pins provided to a substrate mount base, in which the distance of the lift pins in a direction perpendicular to the advancing direction of the substrate is set to be larger than the width of a fork for conveying the substrate, and the height of the lift pins is adjustable to be larger than the thickness of the fork. Thereby, the device can directly convey the substrate to the deep portion of the substrate mount base while preventing the fork from being brought into contact with the lift pins. The ink discharge printing device also includes an imaging means having two types of cameras with low and high magnifications for simultaneously imaging positioning marks formed on the substrate. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an ink discharge printing apparatus that forms a high-definition pattern by discharging ink onto a substrate.

  For example, a photolithography method, an etching method, and the like are known as a color filter manufacturing method. The method of manufacturing a color filter by a photolithography method is to form a coating film made of a photosensitive colored resin of a specific color on the entire substrate, and after exposing the pattern, remove unnecessary portions of the coating film and use the remaining pattern as pixels. To do. In this method, a large amount of material is wasted because most of the coating film is developed and removed. Furthermore, since the exposure and development processes are repeated for each color, the number of processes increases. This photolithography method is used not only for color filters but also for manufacturing various optical elements and electric elements such as organic electroluminescence elements.

  However, the size of the substrate on which the color filter is formed is increasing year by year. In order to reduce the cost of the color filter, the conventional pigment dispersion method that repeats the photolithography process is wasteful, and recently, a method using an ink discharge printing apparatus has been studied.

  The ink discharge printing apparatus includes an ink discharge portion in which a plurality of nozzles (hereinafter referred to as ink discharge ports) are arranged and arranged. In an ink discharge printing apparatus, drawing is performed by relatively moving an ink discharge portion and a substrate placing table surface on which a substrate to be printed is placed in two orthogonal directions. In consideration of the increase in the size of the substrate and the increase in printing speed, the ink ejection printing apparatus is provided with a plurality of ink ejection portions arranged side by side, and the ink is applied so that the amount of ejection liquid is uniform based on the ejection pattern information. It is discharged onto the printing substrate.

  High ink landing accuracy (positional accuracy) is required at the ink discharge port of the ink discharge portion. This is because if the relative positional accuracy between the ink ejection portions is not accurate, gaps are formed between the ink ejection portions or dots are overlapped. When such a phenomenon occurs, streak-like omissions and unevenness occur and cause color defects and the like. For this reason, when arranging the ink ejection parts, the heights of the ink ejection port surfaces of the plurality of ink ejection parts are horizontal and the same height so that gaps do not occur between the ink ejection parts and dots do not overlap. In addition, the moving direction of the base material table and the moving direction of the ink discharge unit are adjusted to a predetermined direction and position. Such an adjustment is important particularly when a large substrate is used as the base material because the larger the base material, the larger the error.

  Further, high positional accuracy is also required for the substrate conveyance accuracy. If the substrate conveyance accuracy becomes inaccurate, streaky omissions and unevenness occur as in the above case, causing defects such as color mixing. This base material transport accuracy includes transport accuracy for transporting the base material fixed on the base material table and base material positioning accuracy for fixing the base material at a predetermined position on the base before transport. Regarding these accuracies, higher accuracy is required when the base material is enlarged.

  By the way, when forming the colored layer of a color filter using an ink discharge printing apparatus, the glass substrate in which the grid | lattice-like or stripe-like pattern formation called a black matrix was made is used as a to-be-printed base material. In recent years, in order to improve the productivity of liquid crystal panels, the size of glass substrates has been increased. The black matrix is often formed mainly by photolithography. Here, if the glass substrate and the photomask are the same size and the black matrix can be formed at once, the dimensional accuracy of the photomask is transferred as it is, so that a highly accurate substrate with a black matrix can be manufactured. However, pattern formation on a large substrate is performed in several divisions due to the limitation of the photomask size. For this reason, an error occurs in the relative positional relationship between the divided patterns. Furthermore, this error is not fixed and varies from one glass substrate to another. For this reason, consideration for minimizing the influence of the division formation error is necessary for positioning the base material of the large substrate with the division formation black matrix.

  Furthermore, the substrate positioning accuracy greatly depends on the resolution of the imaging system used for measuring the alignment mark. In order to position with high accuracy, it is necessary to make the substrate positioning alignment mark formed at the same time as the black matrix formation small, and as a result, it is necessary to enlarge and detect, so the imaging system field of view is inevitably narrow. I have to be. As a countermeasure against this narrow field of view, either a glass substrate is transported from an upstream device while the alignment mark for positioning the substrate is within the imaging system field of view, or it is provided with means for storing it within the imaging system field of view after transportation. Means that measures need to be taken.

  Conventionally, a transfer robot with a hand fork has been used for transferring a substrate. The substrate delivery accuracy from the transfer robot is generally about ± 1 mm. On the other hand, the field of view of the positioning imaging device is about 500 μm square. For this reason, means for putting the base material delivered from the transfer robot into the imaging system field of view is required. In such a case, it is common to position the base material by providing a positioning abutment and a pressing mechanism on the base material table.

  However, when the base material size is 1500 × 1800 mm or more, the sliding friction between the base material and the base material mount becomes large, and there is a risk of occurrence of chipping at the end of the base material or generation of abrasion powder when the base material slides. A method that does not cause a problem is preferable. Furthermore, the abutting mechanism complicates the apparatus and contributes to an increase in the apparatus price. In this respect as well, it is preferable to substitute an alternative method.

  In addition, the delivery of the base material from the transfer robot is performed by moving the hand fork holding the base material between a plurality of pins protruding from the base material table so that the hand fork does not come in contact with the base material and placing the base material on the pin. . For this reason, the height of the delivery pin must be a dimension that takes into account the thickness of the hand fork holding the base material, the deflection of the base material and the hand fork, and the shaking in the height direction. Empirically, when the substrate size is 1500 × 1800 mm or more, a height of about 80 mm is required. This pin height will increase with further increase in substrate size.

  By the way, increasing the area of the base material is a method for increasing the production efficiency by applying the same pattern to the substrate in multiple faces, and if the productivity is reduced by increasing the size, the advantage of increasing the area Will disappear. Accordingly, it is desirable that the processing time for one base material is as short as possible, and it is desirable to shorten the base material positioning time. Furthermore, the time required for alignment of the imaging system, which is one of the setups when changing the product type, also affects the productivity.

As a method of shortening the substrate positioning time, for example, in the method described in Reference 1, coarse alignment operation for placing a fine alignment mark in the fine alignment camera field of view for precise substrate positioning (fine alignment) Is performed during the movement of the base material to the fine alignment position. By doing so, since the coarse alignment and the substrate movement can be performed simultaneously, the coarse alignment time is shortened.
However, although it is effective when the coarse alignment time and the base material movement time are substantially equal, the larger the base material, the less the effect of the parallel processing.

Another method for shortening the positioning time is, for example, the method described in Reference 2, in which two types of alignment cameras with different optical magnifications are arranged so as to capture the same alignment mark, and coarse adjustment is performed at the substrate delivery position. By alignment and fine alignment, the substrate is positioned without moving the substrate.
However, this method uses a polarization optical system to image the same alignment mark at the same position, or tilts the coarse alignment camera, so that the optical system becomes expensive and it takes time to adjust the camera position. There is a problem.

  Furthermore, when there is a change in the product with different substrate thicknesses in both the above two methods, it is necessary to manually adjust the focus in a plurality of alignment cameras. This takes a lot of setup time. In addition, there is a risk of attracting dust contamination that causes quality defects due to work in the substrate passage. For this reason, it is preferable that consideration is also given to shortening the setup time and maintaining the quality when the substrate thickness changes.

JP 2008-304612 A JP 2003-29017 A

  An object of the present invention is to reduce the time required for positioning the substrate to be printed prior to ink ejection in the ink ejection printing apparatus (the transport time to the alignment position and the subsequent alignment time). At the same time, the positioning accuracy is improved so as to be compatible with a large-sized substrate that has been separately exposed.

  In order to solve the above problems, an invention according to claim 1 of the present invention is an ink discharge printing apparatus that discharges ink from an ink discharge port provided in an ink discharge portion at a predetermined position on a base material. An ink discharge unit having a plurality of ink discharge portions having a plurality of ink discharge ports arranged in the direction of the ink, a first moving means for moving the ink discharge unit along a first direction, and the base material Substrate holding means for holding the substrate, second moving means for moving the substrate in a second direction substantially perpendicular to the first direction, and the held substrate in the first direction. Means for rotating with a third direction orthogonal to the second direction as a rotation axis, and positioning the held substrate at predetermined positions in the first direction, the second direction, and the third direction Means and a positioning mark formed on the substrate From an imaging means comprising two types of cameras of low magnification and high magnification for imaging, an imaging system moving means for moving the imaging means in first, second and third directions, and the imaging means Image recognition means for recognizing the position of the positioning mark from the obtained image information pattern and calculating the amount of deviation from the specified position, and a first direction and a second direction for correcting the deviation from the image recognition means; And an imaging system moving means for moving in an orthogonal third direction.

  Next, in the invention according to claim 2 of the present invention, the substrate holding means includes a plurality of lift pins for temporarily receiving the substrate and a plurality of vacuum suction holes for fixing the substrate after lift pin down. And an ink discharge printing apparatus according to claim 1, further comprising a thickness measuring device for measuring the thickness of the base material.

  Next, the invention according to claim 3 of the present invention is characterized in that the substrate mounting surface provided in the substrate holding means and the imaging means can be separated by 80 mm or more in the third direction. The ink discharge printing apparatus according to 1 is provided.

Next, in the invention according to claim 4 of the present invention, the distance between the optical axis of the low-magnification camera and the optical axis of the high-magnification camera provided in the image pickup means is the low-magnification camera positioning mark formed on the substrate. The high-magnification camera positioning mark is connected at the same interval, and can be moved together in the first, second, and third directions. This is an ink discharge printing apparatus.

  Next, the invention according to claim 5 of the present invention is that the imaging means includes two sets of low magnification cameras and high magnification cameras to be connected, and one or two other high magnification cameras. The ink discharge printing apparatus according to claim 1 or 4, wherein the ink discharge printing apparatus is characterized.

  In the ink ejection printing apparatus of the present invention, the distance between the substrate mounting surface of the substrate mounting table and the coarse alignment camera and the precision alignment camera in the height direction can be set to 80 mm or more, and the hand fork of the transfer robot can Even if it is on the pedestal, it is configured not to come into contact with the stretchable lift pins for receiving the substrate. Therefore, after conveying the large base material on the hand fork to a desired position, the base material can be received by extending the lift pin, and when the fork is pulled up, the base material can be supported by the lift pin. Thereafter, when the lift pins are lowered, a large base material can be placed on the base material table. As a result, it is not necessary to transport the base material from the base material delivery position before the base material placing stand to the base material positioning position, which is necessary in the conventional apparatus, and the time required for it can be shortened.

  In addition, the ink ejection printing apparatus of the present invention is provided with a low-magnification camera as a coarse alignment camera having an area in which the imaging field of view can be imaged on the base material transferred from the transport robot. Thus, positioning is possible with the base material fixed without using the base material abutting mechanism. For this reason, the damage of the base-material edge part which has arisen with the contact | abutting of abutment is lose | eliminated.

  In addition, the ink discharge printing apparatus of the present invention is the same as the coarse alignment mark formed on the base material and the fine alignment mark interval between the two sets obtained by integrating the coarse alignment camera and the fine alignment camera. Coarse alignment and fine alignment could be performed without moving the substrate, and the time could be shortened.

  Furthermore, the ink ejection printing apparatus of the present invention can image the coarse alignment mark and the fine alignment mark formed at the same interval vertically below both the coarse alignment camera and the fine alignment camera, thereby simplifying the optical system and accompanying it. The price could be reduced. In addition, since the optical system is simple, the replacement work when the camera fails can be simplified.

  Furthermore, the ink ejection printing apparatus of the present invention is configured such that both the coarse alignment camera and the fine alignment camera can move in the first (X direction), second (Y direction), and third (Z direction) directions. This eliminates the need to manually adjust the camera position in the device when changing the product type, thus shortening the setup time. As a result, the quality could be maintained without dust contamination by the workers.

  In addition, the ink ejection printing apparatus of the present invention includes four fine alignment cameras and an image processing apparatus that processes images captured by them, and evenly positions errors of the precision alignment marks in the vicinity of the four corners of the pattern forming portion on the substrate. As a result, it was possible to minimize the division pattern exposure error on a large-sized substrate and perform highly accurate substrate positioning.

In addition, as described above, the ink ejection printing apparatus of the present invention has a configuration in which the base material can be carried into the placing base deep portion with a hand fork, so by placing the base material positioning position immediately before the coating portion,
The substrate movement time before the main coating could be minimized.

  In addition, since the ink ejection printing apparatus of the present invention is provided with a base material thickness detector, the coarse alignment camera and the fine alignment camera are moved in the third (Z direction) direction according to the thickness information to perform focusing. Can do. This makes it possible to perform focusing faster than when performing image recognition.

  Due to the above-described effects, the ink ejection printing apparatus of the present invention can improve the productivity by being able to shorten the base material positioning time and the setup time, and can perform high-precision and clean coating.

1 is an overall view of an ink ejection printing apparatus according to an embodiment of the present invention. It is an ink discharge part group of this invention, and its periphery mechanism figure. It is a base-material conveyance stage of this invention, and its periphery mechanism figure. It is a top view which shows the arrangement | sequence and alignment mark of the ink discharge part in the ink discharge part group of this invention. It is a figure which shows the state which the lift pin is rising from the base-material adsorption | suction board of this invention. It is a figure which shows the positional relationship of a base material adsorption | suction board and an alignment camera part. It is a mechanism figure of an alignment camera part. It is a mechanism figure of an integrated alignment camera part. It is a mechanism figure of a fine alignment camera part. It is a figure which shows the positional relationship of each alignment mark and each alignment camera. It is a figure which shows the base material conveyance stage of a base material receipt preparation state, and its peripheral state. It is a figure which shows the state which a base material conveyance robot delivers a base material to a base material conveyance stage. It is a figure which shows the state which the base material conveyance robot evacuated after the base material delivery. It is a figure which shows the state of the base material conveyance stage at the time of base material positioning.

The ink ejection printing apparatus according to the present invention will be described in detail along the embodiments with reference to the drawings.

  FIG. 1 is a schematic perspective view showing an example of the ink ejection printing apparatus of the present invention. FIG. 2 is a perspective view for explaining the outline of the ink discharge unit of the ink discharge printing apparatus according to the present invention.

  As shown in FIG. 1, the ink ejection printing apparatus of the present invention includes a substrate conveyance stage 2, an ink ejection unit 14, an ink ejection unit moving axis 4, a main controller 10, an alignment camera unit 40, and an image processing unit 23. It includes a discharge control unit 9 and the like.

  The base material transport stage 2 includes a base material suction plate 23 provided with a vacuum suction hole for fixing the base material 1, and can fix the base material without protruding from the base material surface. As a result, the distance between the base material 1 and the ink ejection part 13 can be made closer to a desired distance set in advance.

  The substrate transport stage 2 includes a θ adjusting mechanism for rotating the substrate 1 in the θ direction and a stage X axis 28 for moving in the X direction. By these, although demonstrated in detail later, base-material positioning can be performed in the state which fixed the base material 1 by adsorption.

Further, the ink discharge unit 14 at the tip of the second direction (hereinafter also referred to as the substrate transport direction) is provided with an inverted microscope 7 for detecting the alignment mark 20 as shown in FIG. The ink discharge unit can be adjusted to be orthogonal to the substrate transport direction. By this adjustment, each ink discharge part can be arranged at a position orthogonal to the substrate conveyance direction.

  In addition, the ink discharge unit 14 uses the alignment mark 20 as a reference to determine the parallelism of the plurality of ink discharge units 13 and the interval between the ink discharge ports of adjacent ink discharge units (hereinafter referred to as an apparatus outside the ink discharge printing apparatus). , Which is referred to as a correction device but not shown).

  This correction device includes an elevation correction means for correcting an error in the third direction of the ink discharge unit 14 generated on the moving shaft. And it is good also as a means which rotates a base material and corrects a yawing error. Then, when each error information measured by operating the correction device in advance is transferred to the correction device, the correction device uses the information to determine the deflection that occurs when the ink ejection unit moves along the movement axis. To correct automatically. This eliminates the step of adjusting the position of each ink discharge unit during actual operation of the ink discharge printing apparatus.

  The ink discharge unit moving shaft 4 is provided with a φ adjusting mechanism 15 for rotating the ink discharge unit 14 in the φ direction 18 shown in FIG. Accordingly, the ink discharge unit 14 can be corrected from the position of the alignment mark 20 (shown in FIG. 4) of the ink discharge unit 14 so as to be orthogonal to the substrate transport direction.

  Further, the ink discharge unit moving shaft 4 can be moved up and down in a third direction (hereinafter referred to as Z direction) 17 shown in FIG. The spacing can be kept at a desired value.

  A linear scale 5 for detecting the position of the ink discharge unit 14 in the first direction (hereinafter also referred to as the X direction) 12 is provided. Thereby, the position control of the ink discharge unit 14 and each correction control described later can be performed.

  The main controller 10 includes a recording unit that records measurement values in the X direction accompanying the movement of the substrate transport stage. Accordingly, the yawing error can be corrected by rotating the θ axis in accordance with the yawing error at a desired position in the second direction (hereinafter referred to as the Y direction).

  In addition, the main controller has a built-in recording unit that stores a measurement value (error in the Z direction) that accompanies the movement of the substrate transport stage. Thereby, the error amount in the X direction at a desired position on the Y axis can be grasped. Then, the error in the X direction can be corrected by moving the X adjustment mechanism 28 in accordance with the amount of error in the X direction at an arbitrary position during the movement of the substrate transport stage.

  Further, the ejection control unit 9 has a built-in recording unit that records the measurement value of the position on the X-axis as the ink ejection unit 14 moves. As a result, the error between the expected position and the actual position at the desired position on the X axis can be grasped. Then, after the ink discharge unit 14 is moved to another desired position, the discharge timing (discharge start time) of the ink discharge port is changed according to the error between the planned position and the actual position at that position. Corrections can be made.

  Next, FIG. 4 is a schematic diagram for explaining the outline of the arrangement and alignment marks of the ink discharge units in the ink discharge unit of the ink discharge printing apparatus of the present invention.

  The ink discharge unit 13 is arranged in parallel to a direction orthogonal to the substrate conveyance direction. In addition, the width of the ink discharge body is wider than the ink discharge port range. And the adjacent ink discharge part is made into the staggered arrangement | positioning shifted in the base-material conveyance direction.

  For this reason, by changing the ejection timing by the difference in the position in the Y direction between adjacent ink ejection portions, uniform ink ejection can be performed as in the case where the ink ejection portions are arranged linearly.

  The alignment mark 20 is on the lower side of the ink discharge unit unit main body so that it can be detected by the inverted microscope 7 of the substrate transport stage 2. Further, with the alignment mark 20 as a reference, each ink discharge portion is adjusted to a desired position in both the X direction 12 and the φ direction 18.

  FIG. 5 shows a state where delivery pins (hereinafter referred to as lift pins 30) provided on the substrate suction plate 23 for receiving the substrate 1 from the substrate transfer robot protrude from the substrate transfer stage. ing. This pin interval is wider than the width of the hand fork 61 (see FIG. 11), thereby avoiding contact of the substrate transport robot 60 with the hand fork.

  Further, the substrate adsorption plate 23 is provided with a substrate thickness detector 33 for measuring the substrate thickness. Thereby, since the base material thickness can be recognized at the time of receiving the base material, it is possible to facilitate the focusing of each alignment camera described later.

  FIG. 6 is a diagram for explaining the relative positional relationship between the base material transport stage 2 and the alignment camera unit 40 when the base material transport stage 2 is at the base material positioning position. Each alignment camera is arranged above the substrate conveyance stage, and when receiving the substrate from the substrate conveyance robot 60 to the upper surface of the lift pin, the interval is set to be 80 mm or more from the upper surface of the substrate adsorption plate 23 so as not to contact each alignment camera.

  FIG. 7 shows the arrangement of the alignment cameras 41, 42, 43, 44 and the alignment camera movement axes 53a, 53b, 54a, 54b. The alignment camera includes two coarse alignment cameras and four fine alignment cameras. As shown in FIG. 8, the coarse alignment camera is integrated with the fine alignment camera and the fixture 47, and two sets 41 and 42 are inks. It is arranged parallel to the X direction on the discharge unit side. Further, the remaining two fine alignment cameras 43 and 44 shown in FIG. 9 are arranged in parallel to the X direction on the transport robot side.

  These four alignment cameras can move independently in the X direction 50 and the Z direction 51 with the four alignment cameras X-axis 53a, 53b and the four alignment cameras Z-axis along which the two alignment cameras move. it can. Similarly, the coarse alignment camera, the two fine alignment cameras, and the two fine alignment cameras integrated by the pair of alignment cameras Y-axis 54a and 54b can be moved independently.

  Further, the camera can be focused from the thickness information of the substrate by the substrate thickness detector of the substrate suction plate and the alignment camera Z-axis.

  FIG. 10 shows the positional relationship between each alignment camera and the alignment mark on the substrate. The coarse and fine alignment marks 48 and 49 on the substrate are arranged at the four corners of the black matrix pattern forming portion, and are parallel to the X axis, and the interval thereof is the same as that of the coarse and fine alignment cameras. .

The alignment mark on the substrate can be imaged from the alignment camera and each movement axis. In addition, it is possible to measure a positional deviation from the alignment mark image stored in advance in the image processing apparatus from the imaging position, and to calculate a correction amount (deviation correction movement amount) in the θ direction and the X direction to be further corrected.

  Next, a procedure for fixing and positioning the base material 1 on the base material transport stage 2 will be described.

As a procedure for fixing the substrate, first, the lift pins are raised in a state where the substrate transport stage is moved to the substrate positioning position as shown in FIG. Next, each alignment camera is moved to the vicinity of the alignment mark based on the alignment mark position information of the substrate. Next, as shown in FIG. 12, the base material is transferred to the lift pins of the base material transport stage by the hand fork 61 of the base material transport robot. FIG. 13 shows a state in which the hand fork 61 of the substrate transport robot is retracted. Next, the lift pins are lowered and brought into close contact with the substrate transport stage. At this time, if the descending speed is too high, the base material is in an air floating state just before contacting the base material transport stage, and is displaced in the X and Y directions. If this amount is large, the coarse alignment mark deviates from the field of view of the coarse alignment camera. For this reason, the lowering of the lift pin avoids the air floating state by reducing the speed just before the base material contacts the base material transport stage.
Next, the state which vacuum-sucked the base material to the base material adsorption | suction board is shown in FIG. In this state, the substrate thickness is measured by the substrate thickness detector, and each alignment camera is moved in the Z direction so as to be in focus. Thereby, fixation of a base material and base material positioning preparation can be performed.

  The base material positioning procedure will be described with reference to FIG. First, the coarse alignment mark is imaged by the coarse alignment camera, the correction amount is calculated from the positional deviation amount from the alignment mark stored in the image processing apparatus in advance, and the substrate stage is moved by the amount to the X and Y positions. And move in the θ direction. The coarse alignment mark position is imaged again, and if the positional deviation amount is within an allowable range, the coarse alignment is completed. However, if the positional deviation amount is outside the allowable range, the above procedure is repeated to make it within the allowable range. Here, when the coarse alignment mark position is within the allowable range from the beginning, the coarse alignment is completed as it is.

  Next, the fine alignment mark is imaged by the fine alignment camera, and the correction amount is calculated from the positional deviation amount from the alignment mark stored in the image processing apparatus in advance, and the substrate stage is moved in the X, Y, and θ directions by that amount. Move. At this time, the correction amount is calculated so that the positional deviation amounts of the four points are equal after movement (so that the difference between the deviation point and the non-displacement point is small). The fine alignment mark position is imaged again, and if the positional deviation amount is within an allowable range, the fine alignment is completed. However, if the positional deviation amount is outside the allowable range, the above procedure is repeated to make it within the allowable range. Here, when the fine alignment mark position is within the allowable range from the beginning, the fine alignment is completed as it is.

  After positioning the base material, the base material transport stage is moved to the ink discharge portion to perform coating, and ink is discharged to all the black matrix openings on the base material.

DESCRIPTION OF SYMBOLS 1 ... Base material 2 ... Base material holding part 3 ... Maintenance station 4 ... Ink discharge part unit moving axis (X-axis)
DESCRIPTION OF SYMBOLS 5 ... Linear scale 6 ... Ink discharge part unit movement base 7 ... Inverted microscope 8 ... Conveyance stage control part 9 ... Discharge control part 10 ... Main controller 11 ... Base material conveyance stage conveyance direction (Y direction)
12. Ink discharge unit unit moving direction (X direction)
13 ... Ink discharge unit 14 ... Ink discharge unit 15 ... φ adjustment mechanism (φ axis)
16 ... Elevating mechanism (Z axis)
17 ... Z direction 18 ... φ direction 19 ... Ink ejection part base plate 20 ... Alignment mark 21 ... Camera 1
22 ... Camera 2
23 ... Substrate adsorption plate 24 ... X direction 25 ... θ direction 26 ... θ adjustment mechanism (θ axis)
27: Substrate transport stage 28: Stage X axis (X adjustment mechanism)
30 ... Lift pin 31 ... Lift pin lifting / lowering direction (Z direction)
32 ... Image processing apparatus 33 ... Base material thickness detector 40 ... Alignment camera part 41 ... Integrated alignment camera part (a)
42. Integrated alignment camera part (b)
43 ... fine alignment camera part (c)
44 ... fine alignment camera part (d)
45 (a) ... coarse alignment camera (a)
45 (b) ... coarse alignment camera (b)
46 (a) ... fine alignment camera (a)
46 (b) Fine alignment camera (b)
46 (c) Fine alignment camera (c)
46 (d) ... fine alignment camera (d)
47 (a) ... Camera integrated bracket (a)
47 (b) ... Camera integrated bracket (b)
47 (c) ... Camera integrated bracket (c)
47 (d) ... Camera integrated bracket (d)
48 (a) ... coarse alignment mark (a)
48 (b) ... coarse alignment mark (b)
49 (a) Fine alignment mark (a)
49 (b) ... fine alignment mark (b)
49 (c) ... fine alignment mark (c)
49 (c) ... fine alignment mark (d)
50 ... X-axis movement direction of the alignment camera (X direction)
51 ... Y-axis movement direction of alignment camera (Y direction)
52 ... Z axis movement direction of alignment camera (Z direction)
53 (a) ... Alignment camera X-axis (a)
53 (b) ... Alignment camera X-axis (b)
54 (a) ... alignment camera Y axis (a)
54 (b) ... alignment camera Y-axis (b)
60 ... Substrate transport robot 61 ... Hand fork

Claims (5)

An ink discharge printing apparatus that discharges ink from an ink discharge port provided in an ink discharge portion at a predetermined position on a substrate,
An ink discharge unit comprising a plurality of ink discharge portions having a plurality of ink discharge ports arranged in the first direction;
First moving means for moving the ink discharge unit along a first direction;
Means for rotating the ink discharge unit with a third direction orthogonal to the first direction and the second direction as a rotation axis;
Substrate holding means for holding the substrate;
Second moving means for moving the base material in a second direction substantially orthogonal to the first direction;
Means for rotating the held substrate with a third direction orthogonal to the first direction and the second direction as a rotation axis;
Means for positioning the held substrate at predetermined positions in a first direction, a second direction, and the third direction;
An imaging means comprising two types of cameras of low magnification and high magnification for imaging the positioning mark formed on the substrate;
An imaging system moving means for moving the imaging means in the first, second and third directions;
Image recognition means for recognizing a positioning mark position from an image information pattern obtained from the imaging means and calculating a deviation amount from a specified position;
An imaging system moving means for moving in a first direction that corrects a deviation from the image recognition means and a third direction orthogonal to the second direction;
An ink ejection printing apparatus comprising:   The substrate holding means includes a plurality of lift pins for temporarily receiving the substrate, a plurality of vacuum suction holes for fixing the substrate after the lift pin down, and a thickness measurement for measuring the substrate thickness. The ink discharge printing apparatus according to claim 1, further comprising an apparatus.   2. The ink ejection printing apparatus according to claim 1, wherein the substrate mounting surface provided in the substrate holding unit and the imaging unit can be separated by 80 mm or more in the third direction.   The distance between the optical axis of the low-magnification camera and the optical axis of the high-magnification camera provided in the imaging means is connected at the same interval as the positioning mark for the low-magnification camera and the positioning mark for the high-magnification camera formed on the substrate. The ink discharge printing apparatus according to claim 1 or 3, wherein the ink discharge printing apparatus can be moved integrally in the first, second and third directions.   5. The imaging device according to claim 1, wherein the imaging unit includes two sets of a low-magnification camera and a high-magnification camera to be connected and one or two other high-magnification cameras. Ink ejection printing device.

Images