JP2010199014A - Sample supporting device for charged particle beam device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sample supporting device having a lower profile and higher operability while avoiding the fly-apart of a ring spring which holds a sample on a charge particle beam device. <P>SOLUTION: On a sample supporting bed 201, a sample pressing dovetail groove 202 is provided. A sample fixing mechanism part B includes the ring spring 203 for pressing a sample 207 in cooperation with the dovetail groove. The ring spring 203 includes a ring portion 203b for pressing the sample at its outer edge and two leg portions 203a extending from both ends of the ring portion. Via the two leg portions, the ring spring 203 is mounted on the sample supporting device so that it does not come off from the sample supporting bed 201 and is put in up-and-down turning motion when mounted/demounted in/from the dovetail groove. When the ring spring 203 is mounted/demounted in/from the dovetail groove 202, a slider 205 is used for slightly closing the spring leg portions 203a to make the diameter of the ring portion 203b shorter than that of the dovetail groove. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a sample support device in a charged particle beam device.

  In a charged particle beam apparatus represented by a transmission electron microscope or the like, a sample support apparatus is usually composed of a sample support section, a sample fixing mechanism section, and a support rod section. It is used as a device that introduces to the passage position. For example, in a transmission electron microscope, it is necessary that the sample can be observed without being affected by vibration and drift even at a high magnification of 100,000 times or more. In other words, the sample support device must be able to withstand vibrations and drifts at the reciprocal thereof.

  The performance of the sample support device itself is greatly influenced by the sample support part and the sample fixing mechanism part. Various methods have been proposed to realize stable fixation of the sample. For example, a screw fixing method that holds the sample by tightening the screw, a separate member fixing method that holds the sample with another member (screw fixing / spring fixing), a ring spring fixing method that holds the sample placed in the dovetail groove using a ring-shaped spring, etc. is there.

  Among these, the screw fixing method may cause a misorientation or kinking due to rotation during the final tightening. In addition, the separate member fixing method has a problem that when the sample is pressed by another member, even if the sample is misaligned, the operator cannot see the misalignment.

  The ring spring fixing method has a thin spring wire diameter of 0.2 to 0.3 mm and can check the state of the sample even during the work of fixing the sample and in the fixed state, thus preventing the problems of the other methods described above. .

  FIG. 4 shows a conventional headband-shaped ring spring 101 and its dedicated attachment / detachment tweezers 102. The ring spring is mounted in a dovetail groove provided in the sample support base by grasping the slight protrusion 101a of the headband-shaped ring spring 101 with the dedicated loading / unloading tweezers 102 and contracting the ring spring 101 in the radial direction. The ring spring after mounting the dovetail spreads in the radial direction when the protrusion 101a is released from the tweezers, and the spreading force is restricted by the tapered wall surface of the dovetail and presses the outer edge of the sample downward. Is converted to Thereby, the sample installed in the dovetail is fixed. If the protrusion 101a is enlarged, the height of the sample support portion becomes thick. Therefore, the protrusion needs to be minimized. Due to the restriction of such a protrusion, the headband-shaped ring spring 101 has a dedicated device. It was easy to scatter from the tweezers 102 and the dovetail.

  In addition, since the conventional ring spring has a headband shape, a special attachment / detachment tweezers for gripping the ring spring is required when the ring spring is attached to or removed from the sample support device. The Further, if the gripping operation of the ring spring is mistaken even a little, the ring spring may be scattered. Therefore, handling requires skill for workers and careful attention during work.

  Incidentally, in the transmission electron microscope, the gap of the objective pole piece is as narrow as possible. It is necessary to give and observe.

  Therefore, it is necessary to make the sample support part of the sample support apparatus holding the sample as thin and thin as possible while maintaining the mechanical strength. In addition, from the viewpoint of operability, loading and unloading of the sample is required to be one touch. Since general sample support is supported by a sample presser plate, the diameter of the support portion inevitably tends to be thick and thick. As one method for improving this, the above-described ring spring that can be made the same size as the diameter (3 mm) of the sample is used. However, as described above, there is a problem in terms of handling. Therefore, there has been a demand for a sample support device that can meet the above-mentioned needs and can be easily handled.

  In the case of a ring spring fixing method in a sample support device of a charged particle beam device, the wire diameter of the ring spring of the sample support portion is made as thin as possible so that the ring spring is not scattered from the sample support portion. And it is necessary to fix the sample firmly to the support base.

  Under the conditions of using an electron microscope at a high magnification, even a slight vibration source in the sample part becomes a problem when observing the image, so the sample should be fixed to the support base in the sample support device at the outer edge of the installed sample. It is necessary to keep the part as uniform as possible over the entire circumference.

  An object of the present invention is to allow a ring spring to be mounted in a dovetail groove in a sample support device with a simple operation and without scattering of the ring spring, and in a charged particle beam device, the sample can be loaded into a narrow space. It is an object of the present invention to provide a sample support device that can realize installation and / or a high tilt state of a sample.

  In order to achieve the above object, the present invention basically includes a sample support base for holding a sample, a sample fixing mechanism for fixing the sample to the sample support base, The following configuration is proposed in the sample support apparatus including the support rod portion for introducing the sample from the charged particle beam passage portion to the charged particle beam passage portion.

  The sample support base is provided with a dovetail groove for holding a sample, and the sample fixing mechanism has a ring spring for holding the sample in cooperation with the dovetail groove. Further, the ring spring has a ring portion for holding the outer edge portion of the sample and a plurality of leg portions extending from both ends of the ring portion, so that the ring spring does not come off from the sample support base portion via the leg portions, and It is attached to the sample support device so as to be capable of rotating in the vertical direction that can be attached to and detached from the dovetail groove.

  The present invention configured as described above enables the following series of operations.

  When the sample is placed in the dovetail groove, the ring spring is lifted upward (rotating upward) with a part of its leg portion as a fulcrum, and retracted to a position where there is no hindrance in the sample placement work. After the sample is placed in the dovetail groove, the ring spring is turned down (turned downward) to the dovetail groove position, and the leg portion is somewhat closed to slightly reduce the diameter of the ring portion in the radial direction ( The ring portion is shrunk to such an extent that it can be inserted into the dovetail groove), and a ring spring is attached to the dovetail groove. Thereafter, by releasing the closing force of the leg portion of the ring spring, the radial contraction of the ring portion is released. As a result, the force spreading in the radial direction of the ring spring is converted into a downward pressing force (pressing force against the sample) by the inner peripheral wall (taper wall surface) of the dovetail groove, whereby the sample is loaded in the dovetail groove. It is fixed to the mounting part.

  When the sample is taken out from the dovetail groove, the reverse of the above operation, that is, with the sample in the dovetail groove, the ring spring leg part is closed somewhat (the ring part is present and contracted to the extent that it can come out of the groove). ), Lift the ring spring to the retracted position (upward rotation). Thereby, the sample is released from the restraint of the ring spring and can be taken out from the dovetail groove.

  According to the present invention, the ring spring can be mounted by a simple operation without being scattered in the dovetail groove in the sample support device. In addition, the sample support is thinned by securely fixing the outer peripheral edge of the sample with a ring spring having a small diameter and no projection, and the sample is installed in a narrow space in the charged particle beam apparatus and / or the sample is placed. A high inclination state can be realized.

The principal part perspective view which shows the sample fixed state in one Example of the sample support apparatus of this invention. The longitudinal cross-sectional view of FIG. The principal part perspective view which shows the state (state which lifted the ring spring) in which the sample fixation in the said Example was released. Explanatory drawing which shows the handling state of a ring spring in the case of mounting | wearing the conventional ring spring to a sample support apparatus.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  The sample support apparatus in the present embodiment can be applied to various charged particle beam apparatuses such as a focused ion beam processing apparatus, a transmission electron microscope, and a scanning electron microscope, but is not limited to these listed apparatuses. . Hereinafter, for convenience of explanation, a transmission electron microscope will be described as an example.

  FIG. 1 shows a state in which a sample is fixed to a sample support device, and FIG. 2 shows a cross-sectional view thereof. FIG. 3 shows a state in which the ring spring, which is an element of the sample fixing mechanism, is removed from the dovetail groove so that the sample can be placed and removed from the dovetail groove.

  The sample support device is roughly divided into a sample support portion A, a sample fixing mechanism portion B, and a support rod portion 208, and is a device for transporting a sample from the outside of the vacuum to the position of the electron beam passage in the vacuum.

  The sample support part A includes a sample support base part 201 that functions as a sample holder, and a sample mounting part 212 (see FIG. 2) formed in a dovetail groove 202 formed in the sample support base part 201. The sample mounting portion 212 is formed around a hole through which a charged particle beam passes, and the upper periphery of the sample mounting portion 212 is surrounded by a downwardly expanding taper that forms the dovetail groove 202.

  The sample fixing mechanism B includes a dovetail groove 202, a ring spring 203 having a pair of spring legs 203a, a slider 205 for adjusting the ring diameter of the ring spring so as to expand and contract, and a groove for receiving the slider and the spring legs. 209, a conical protrusion guide 206 that functions as a spring guide when the ring spring is attached and detached, and a spring support 204 that allows the ring spring 203 to rotate in the vertical direction when the ring spring 203 is attached to and detached from the groove 202.

  The support bar portion 208 is provided with the above-described conical protrusion guide 206 and the spring support 204 on a flat surface portion 208a formed on the distal end side thereof. The spring support 204 is fixed to the support bar 208 with the mounting screw 21.

  Here, the structure of the sample fixing mechanism B will be further described.

  The dovetail groove 202 is formed so as to surround the sample mounting portion 212 and is continuous with the groove portion 209 on the spring leg receiving side. The ring spring 203 has a pair of spring legs 203a extending from both ends of the ring portion 203b for holding the sample. The pair of spring legs 203a are constricted as indicated by reference numeral 203c near the ring portion 203b, and have portions 203d spreading in a Y shape on both sides symmetrically from there. A slider 205 that can slide from the constricted portion 203c to the Y-shaped widened portion 203d is attached to the spring leg portion 203a.

  The slider 205 has an open-loop shaped slit 205 a so that the slider 205 can be attached to the leg 203 a of the ring spring 203. The open portion of the slit 205a is narrowed so that the leg portion 203a of the ring spring can be passed through.

  The ring spring 203 is formed such that a leg one end side 203 a ′ opposite to the dovetail groove 202 is bent in a width direction perpendicular to the axial direction of the support base 201 and engages with the spring support groove 211 of the spring support 204. ing. The spring support 204 is provided with a pair of spring leg fitting grooves 210 for enabling the ring spring 203 to rotate in the vertical direction.

  With such a ring spring attachment structure, the ring spring 203 is attached to the sample support device so as to be vertically rotatable about the leg end 203a ′ opposite to the dovetail groove 202 as a fulcrum. Thereby, when the sample 207 is put into the dovetail groove 202 and when it is taken out from the dovetail groove 203, it is set so that it can be moved to a position (position of FIG. 3) where there is no hindrance to the sample taking-in / out operation by the vertical movement. ing.

  The ring spring 203 is adjusted to open and close by moving and adjusting the slider 205 in the range from the constricted portion 203c on the spring leg to the widened portion 203. Thereby, a ring diameter adjusting mechanism that adjusts the diameter of the ring portion to be extendable and retractable is configured.

  The sample support bar 208 is provided with a conical protrusion guide 206 in order to prevent lateral displacement when the ring spring 203 is returned to the groove. The conical protrusion guide 206 is positioned between the leg portions of the ring spring and between the slider 205 and the spring support 204 when the ring spring 203 rotates in the vertical direction, and guides the ring spring 203.

  The conical protrusion guide 206 includes an upper conical portion and a lower straight portion, and the straight portion has an outer diameter that is the same size as the distance between the pair of spring legs when the ring spring 203 is attached to the spring support 204. is doing.

  In the above configuration, when the sample 207 is installed in the dovetail groove 202, the ring spring 203 is lifted upward with one end of its leg as a fulcrum as shown in FIG. Let me. If the sample 207 is installed in the dovetail groove 202, the ring spring 203 is held by tweezers while holding the slider 205 attached to the ring spring 203 to the position just above the dovetail groove 202 while using the projection guide 206 as a guide. Defeat. Then, at a position where the ring spring 203 is in contact with the upper surface of the support base 201, the slider 205 is moved from the constricted portion 203d on the spring leg portion toward the Y-shaped spread portion 203d (direction of arrow A). Since the leg portion of the ring spring 203 is held at a constant distance on the opposite side of the dovetail groove by the spring support 204 and the projection guide 206, the ring spring 203 can be contracted only in the vicinity of the slider 205. For this reason, the ring spring 203 contracts in the radial direction, and can be made smaller in a shape closer to a circle than the upper surface of the dovetail groove. Thereby, there is a ring spring 203 and enters the groove 202. When the ring spring 203 reaches the sample 207, the ring spring 203 is released from the shape contracted in the radial direction by moving the slider 205 in the direction of the constricted portion 203c (direction B). Thereby, the ring spring 203 spreads in the radial direction by its own spring force, and this spreading force is converted into a downward force by the taper on the side of the dovetail groove 202. The ring portion 203b of the ring spring 203 at this time is located at the outer edge of the sample 207, and the sample 207 is uniformly pressed against the sample mounting portion 212 side by the conversion force downward of the ring spring, so that the sample is held in the dovetail groove. It can be pressed firmly in.

  One end of one end 203a 'of the leg portion of the ring spring 203 is fitted into a groove 211 of the spring support 204. The ring of the spring support has a ring portion of the ring spring, and the outer edge of the sample is pressed by the groove. For this reason, some play is provided.

  When the sample 207 is taken out from the dovetail groove 202, the slider 205 is moved in the Y-shaped widened portion 203d direction (arrow A direction) on the spring leg in the reverse operation to the above, that is, with the sample in the dovetail groove. ) To slightly close the ring spring leg (shrink the ring spring to the extent that it comes out of the groove), and lift the ring spring to the retracted position in FIG. 3 (upward rotation). Thereby, the sample 207 is released from the restraint of the ring spring 203 and can be taken out from the dovetail groove.

  Note that the spring legs of the ring spring may be a plurality other than a pair (two).

  As described above, according to the present embodiment, the ring spring can be mounted without being scattered in the dovetail groove in the sample support device by simple slider operation and vertical rotation of the ring spring. In addition, the outer periphery of the sample is uniformly fixed with a ring spring having a small diameter and no protrusions, thereby reducing the thickness of the sample support, and installing the sample in a narrow space in the charged particle beam apparatus and / or A high inclination state can be realized.

DESCRIPTION OF SYMBOLS 201 ... Sample support stand part, 202 ... Dovetail groove, 203 ... Ring spring, 204 ... Spring support, 205 ... Slider, 206 ... Conical protrusion guide, 207 ... Sample, 208 ... Support bar part, A ... Sample support part, B ... Sample fixing mechanism.

Claims (8)

A sample support device for placing a sample to be observed or processed with a charged particle beam device on a charged particle beam passage, a sample support table for holding the sample, and fixing the sample to the sample support table In a sample support device provided with a sample fixing mechanism part for carrying out and a support bar part for introducing the sample from outside the vacuum to the charged particle beam passage part,
The sample support base is provided with a dovetail groove for holding the sample,
The sample fixing mechanism has a ring spring that presses the sample in cooperation with the dovetail groove,
The ring spring includes a ring portion that holds the outer edge of the sample and a plurality of legs extending from both ends of the ring portion, and the ring spring is provided so as not to be detached from the sample support base via the legs. A sample support device for a charged particle beam apparatus, wherein the sample support device is attached to the sample support device so as to be capable of rotating in a vertical direction that can be attached to and detached from a groove.   The ring spring is attached to the sample support device so as to be pivotable in the vertical direction with one end of the leg opposite to the dovetail as a fulcrum, and when the sample is put into the dovetail groove and taken out from the dovetail groove 2. The sample support device for charged particle beam apparatus according to claim 1, wherein the sample support device is set so that the sample can be moved to a position where there is no hindrance in the work of taking in and out the sample by the pivoting operation in the vertical direction.   The sample support device for a charged particle beam apparatus according to claim 1, wherein the ring spring includes a ring diameter adjusting mechanism that adjusts a diameter of the ring portion by adjusting opening and closing of the leg portion. The leg portion of the ring spring has a constricted portion in which a portion near the ring portion is narrowed, and a Y-shaped spread portion that gradually spreads from the constricted portion,
The ring diameter adjusting mechanism is constituted by a slider mounted so as to slide in a range from the constricted portion to the Y-shaped spreading portion in the leg portion of the ring spring, and the leg of the ring spring is adjusted by moving the slider. The sample support device for charged particle beam apparatus according to claim 3, wherein the opening and closing of the unit is adjusted.   5. The sample support device for a charged particle beam device according to claim 4, wherein the slider has an open-loop shaped slit for enabling attachment to a leg portion of the ring spring.   The sample support base is located between the leg portions of the ring spring to guide the ring spring when the ring spring rotates in the vertical direction in order to prevent lateral displacement when the ring spring is returned to the dovetail groove. 6. A sample support device for a charged particle beam device according to claim 1, wherein a conical projection guide is fixed.   The charged particle according to any one of claims 4 to 6, wherein the diameter of the ring spring can be adjusted by a slight movement amount of the slider by the cooperation of the sliding of the slider and the conical protrusion guide. Sample support device for wire device.   One end of the leg portion of the ring spring is fitted into a groove of a spring support provided in the sample support device, and the ring portion of the ring spring is provided in the groove of the spring support so that the outer edge portion of the sample is formed by the dovetail groove. The sample support device for charged particle beam apparatus according to claim 1, wherein play is provided for pressing.

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