JP6004720B2 - Sample holder base - Google Patents

Description

  The present invention relates to a sample holder pedestal, and more particularly to a sample holder pedestal having a tool shaft position holding arm.

  When observing a sample in a microscope such as a transmission electron microscope, for example, the tip of a sample holder (hereinafter also referred to as a sample cradle) inserted into a limited space between the gaps of the objective pole piece of the transmission electron microscope. )) Must be inserted into the limited space of the objective lens pole piece and tilted to the electron beam optical axis on the sample holder axis, so that the sample cradle is necessarily made as thin as possible. Yes.

  For example, as an electron microscope, a transmission electron microscope will be described as an example. A sample to be observed with a transmission electron microscope is mounted on a sample cradle portion and observed. In order to mount and fix the TEM sample mesh on the sample cradle, the sample cradle needs at least a cradle pedestal and a sample pressing member. Furthermore, the sample presser requires some fixing means for sandwiching the sample mesh in the cradle body, and therefore means for arranging fixing screws is generally used.

  In order to effectively use the limited space of the objective lens pole piece, the thickness of the sample pressing plate and the size of the sample fixing screw must be reduced. However, there are limits to downsizing for human use. Furthermore, there is a limit to downsizing due to the durability of the screw itself. Currently, M1-M2 size screws are generally used.

  Under such circumstances, as a method for exchanging a sample, for example, a sample exchange device including a sample chamber, a sample exchange chamber, a gate valve, and a sample exchange rod is known (Patent Document 1).

Japanese Patent Laid-Open No. 08-273571

  However, in the existing sample exchange devices including the sample exchange device as in Patent Document 1, in the case of fixing to a screw hole provided in the cradle body, a sample mesh is placed, a spacer ring is placed thereon, and further With the sample holding plate placed on top, keeping the three members sewn together, pinching the screws with tweezers, keeping them precisely aligned with the axial positions of the screw holes in the cradle body, It is necessary to be skilled to accurately place and tighten a precision screwdriver (hereinafter also referred to as TOOL) in the slit groove on the head of the head.

  In such cases, the sample attachment work is done by contacting the sample as a result of a screwdriver or tweezers accidentally slipping as a result of the screw that is pinched by both skilled and tweezers coming off and losing. In many cases, the sample is destroyed.

Note that the sample cradle part at the tip of the sample is generally only about 2 mm thick, and when tightening a screw, an expert knows the minimum force applied to press the TOOL to tighten the screw. performed when, unduly a given TOOL (the driver) the force will be Installing press unnecessarily, as a result, also much generated accident would bend the sample cradle. Therefore, there is a demand for a measure that enables safe sample exchange.

  Accordingly, an object of the present invention is to provide a sample holder pedestal capable of safely exchanging samples in order to solve the above problems.

  In order to achieve the above object, the present inventor has analyzed the accident related to the sample exchange of the sample holder, and as a result of intensive studies, has found the present invention.

That is, the sample holder pedestal according to the present invention includes a pedestal, a sample holder fixing means provided on the pedestal, and an arm- shaped member provided on the pedestal for holding the axial position of the sample replacement tool. sample holder consisting of - a pedestal, to the arm-like member, characterized in that the preventing means sway preventing wobble of the tool is provided.

In a preferred embodiment of the sample holder base according to the present invention, the arm-shaped member is variable in the longitudinal direction.

  In a preferred embodiment of the sample holder pedestal of the present invention, the sample holder further comprises a pillow portion for receiving the tip of the sample holder on the pedestal.

  Moreover, the preferable embodiment of the base for sample holders of this invention WHEREIN: The said base has a palm rest, It is characterized by the above-mentioned.

  In a preferred embodiment of the sample holder pedestal of the present invention, the pedestal has a leg portion having a height adjustable.

  In a preferred embodiment of the sample holder base according to the present invention, the sample holder fixing means has a plunger.

  In a preferred embodiment of the sample holder pedestal of the present invention, the sample holder fixing means further has an extraction means for taking out the sample holder.

  According to the present invention, there is an advantageous effect that it is possible to reduce damage to a sample holder or the like during sample replacement as much as possible.

FIG. 1 is a diagram illustrating an example of a sample fixing method. FIG. 2 is a diagram illustrating an example of a configuration diagram of a saddle portion that receives a sample holder. FIG. 2A is a view showing an example of a state in which the sample holder is mounted on the fixing means (saddle). FIG. 2B is a diagram showing an example of a state when the push-back piston is pushed. FIG. 3 is a diagram showing an example in which a sample holder is installed on a sample holder base in one embodiment of the present invention. FIG. 3 (a) is a schematic diagram showing the procedure when the sample holder is set and the sample is exchanged. FIG. 3B is a diagram illustrating an example in which the setting is completed and the sample is fixed. FIG. 4 is a diagram showing a state of sample replacement in an example of a sample holder base according to the present invention. FIG. 5 is a diagram showing a layout in which an example of a sample holder base according to the present invention and an actual microscope are linked. FIG. 6 is a diagram showing an example of an accident in which the sample cradle portion is pushed and bent by applying too much force to the tool while the sample presser is being attached with the tool. FIG. 7 shows an example of how the sample holding screw is tightened with a tool, FIG. 7 (a) shows an example of correct usage, and FIG. 7 (b) shows an example of an accident.

  The sample holder pedestal of the present invention comprises a pedestal, a sample holder fixing means provided on the pedestal, and a tool axis position holding arm provided on the pedestal. The pedestal is not particularly limited to a material or the like as long as there is a space for fixing the sample holder. A sample holder fixing means is provided on the pedestal. The fixing means for fixing the sample holder is not particularly limited, and can be fixed by, for example, a clamp mechanism, a plunger mechanism, or the like. In general, a sample is fixed or removed by a tool, but the operation of the tool usually requires skilled experience. For this reason, there is an accident in which the sample holder is damaged due to the tool being displaced.

  Here, an example of a general sample mounting portion will be described with reference to FIG. FIG. 1 is a diagram illustrating an example of a sample fixing method. Reference numeral 1 denotes a sample fixing screw, 2 denotes a sample holding plate, 3 denotes a spacer, 4 denotes a sample mesh, and 5 denotes a sample cradle (the tip of the sample holder).

  More specifically, in this example, the TEM sample mesh 4 is placed on the sample cradle part, the spacer ring 3 is placed thereon, the sample holding plate 2 is further placed thereon, and they are fixed by the sample fixing screw 1. Generally, it is fixed to the sample cradle 5. The head of the sample fixing screw in Fig. 1 is drawn with a general minus groove, but there is a plus groove type, hexagonal hole, etc. Not specified.

  In the following, an example using a screw will be described as an example. However, in rare cases, it is theoretically possible to use a silver paste, epoxy, or the like and directly bond to the cradle. The present invention is applicable. However, it is a technique that is avoided in the realization site because it can be safely removed and recovered without observing the sample after observation, which hinders safekeeping.

  In addition, the present invention can also be applied to an embodiment using an adhesive such as silver paste or epoxy. However, since the material molecules are ejected in a vacuum, it is a cause of contamination during sample observation. It is a technique.

  The TEM sample is usually placed on the TEM sample mesh 4 and observed. Further, even when a bulk material is cut out thinly and a sample that can be observed by TEM by FIB is prepared, it is customarily stored within a range of φ3 mm and thickness 0.1 mm. The TEM sample mesh is inevitably standardized and has a diameter of 3 mm, and the thickness is generally 0.01 mm to 0.05 mm depending on the application.

  In Fig. 1, one sample presser plate is pressed with two screws, but the sample presser plate is divided into two parts, each fixed with one screw each, or with two screws. Some have a holding plate fixed, and the figure is a general schematic diagram.

  In the present invention, a tool shaft position holding arm is provided to prevent accidents. That is, in the present invention, an arm-like member that holds the axial position of the TOOL is provided. For example, a minimum TOOL guide hole through which TOOL passes is provided in this member, and the tool is passed through the guide hole and applied to the slit groove on the head of the sample holding screw to prevent accidental TOOL fall. It is aimed to do.

  In a preferred embodiment of the sample holder base according to the present invention, the axial position holding arm is variable in the longitudinal direction. Since it is variable in the longitudinal direction, it is possible to accurately set the axial position according to the size of various sample holders. Further, it may be variable in a direction perpendicular to the longitudinal direction. A finer axis position can be set.

  In addition, the said arm can be made into the structure which can be taken in / out in the support means etc. of a tool axis position holding arm, for example. This makes it possible to adjust the TOOL guide hole at the top of the screw position, and it has a retractable mechanism that can be stored when not in use. When the sample holder is attached to and detached from the safety sample exchange pedestal of the present invention, there is an effect that the sample cradle part and the arm do not interfere (do not obstruct).

In a preferred embodiment of the sample holder pedestal of the present invention, the sample holder further comprises a pillow portion for receiving the tip of the sample holder on the pedestal. Ie upon the invention, may be arranged a pillow member which supports the specimen cradle. Considering the possibility of bending the sample cradle by unnecessarily pressing the TOOL (driver) and bending the sample cradle as a result, the pillow is powerful as a mechanism that supports it from the back of the sample cradle. To do. That is, the pillow part is a mechanism that takes charge of the stress applied to the tip of the holder.

  Preferably, the height of the pillow part is adjusted according to the holder to be mounted, because it corresponds to the tip shape and thickness of various sample holders. It can have possible mechanisms. For example, the height can be adjusted with a screw or the like.

  In addition, if you continue to use the sample holder for many years, the sample cradle may be bent slightly, but if it is at a usable level of bending (warping), the height of the pillow member that supports the sample cradle will vary. Therefore, if there is a function capable of appropriately adjusting the height, this is advantageous.

  The existence of such a pillow portion can be applied to virtually any sample holder by providing a height adjusting mechanism.

  Moreover, the preferable embodiment of the base for sample holders of this invention WHEREIN: The said base has a palm rest, It is characterized by the above-mentioned. By placing the palm on the palm rest attached to the pedestal, the position of the arm and wrist is stabilized, and further, the palm can be used as a fulcrum and work can be done with the fingertips removed.

  In addition, the palm rest position that stabilizes the position of the arm and wrist by placing a palm varies between individuals, and from the viewpoint of giving the palm rest position a degree of freedom, the palm rest may have a mechanism that rotates horizontally with the pedestal. good. The palm rest improves work stability and prevents damage accidents during work. This also has the advantageous effect that the power applied to the tool can be grasped more accurately.

  In a preferred embodiment of the sample holder pedestal of the present invention, the pedestal has a leg portion having a height adjustable. Due to the presence of the legs, the height of the legs can be adjusted even if the top plate of the work table (desk or table) is warped, so that the safety sample exchange pedestal has the effect that rattling does not occur. .

  In addition, the legs can be used to create a space between the base plate of the safety sample exchange base and the top plate of the work table (desk or table), so that the leg (base member) of the binocular microscope (binocular) is straddled. Layout, and a layout in which a cradle is placed under the optical axis of a binocular microscope is possible.

  When observing the sample exchange work with a binocular reality microscope so far, when bringing the cradle under the optical axis of the binocular reality microscope, the conventional holder base must be stable on the binocular reality microscope base member. I couldn't. However, in one embodiment of the present invention, since a space can be provided under the pedestal, there is no need to lay out a suitable stand on the outside of the binocular actual microscope base member, and it is easily arranged in cooperation with the binocular actual microscope. Became possible. In addition, it is possible to achieve further safety. In one embodiment of the present invention, the space under the pedestal can be realized by a leg whose height is adjustable, but the space is not limited to this as long as the space can be substantially provided under the pedestal by other means.

  In a preferred embodiment of the sample holder base according to the present invention, the sample holder fixing means has a plunger. By providing the sample holder fixing means for receiving the sample holder with a plunger, it is possible to improve the convenience of mounting and stabilize during holding by taking care to hold the sample holder shaft portion.

  In a preferred embodiment of the sample holder pedestal of the present invention, the sample holder fixing means further has an extraction means for taking out the sample holder. Furthermore, the sample holder fixing means (saddle part) is provided with an extruding means for facilitating taking out the sample holder, for example, a piston that pushes back, and has a mechanism for pushing the holder held by the plunger. Removal workability is improved.

  In the sample holder fixing means, the inlet wall for storing the sample holder can be provided with a taper on the opposite side corresponding to the plunger. Thereby, taking in and out of the sample holder is made easier.

  Here, although one Example of the base of this invention is described, this invention is limited to a following example and is not interpreted. Moreover, it cannot be overemphasized that it can change suitably, without deviating from the summary of this invention.

FIG. 7 shows an example of how the sample holding screw is tightened with a tool, FIG. 7 (a) shows an example of correct usage, and FIG. 7 (b) shows an example of an accident. FIG. 7 shows an example of pressing with a screw. When tightening the sample holding screw, 1) Consider keeping the tool (driver in this example) as vertical as possible 2) Considering that the screwdriver does not shift relative to the screw split 3) Care must be taken to keep the pressing force on the shaft to the minimum necessary.

  If the force of the tool (driver) is excessively applied, an accident occurs in which the tip portion of the sample holder is bent as shown in FIG. 7B. Therefore, skill is required, but in the example of the present invention, a design that can prevent accidents to the minimum is provided as follows.

  One embodiment of the sample holder base of the present invention will be described with reference to the drawings as follows. FIG. 3 is a diagram showing an example in which a sample holder is installed on a sample holder base in one embodiment of the present invention. FIG. 3 (a) is a schematic diagram showing the procedure when the sample holder is set and the sample is exchanged. FIG. 3B is a diagram illustrating an example in which the setting is completed and the sample is fixed. In FIG. 3, 20 is a sample holder, 21 is a sample holder fixing means, 22 is a base plate, 23 is a leg, 24 is a palm rest, 25 is a support means for a tool axis position holding arm, 26 is a pillow section, and 27 is a tool axis position. The holding arm, 28 is a tool, 29 is procedure 1, 30 is procedure 2, 31 is procedure 3, and 32 is procedure 4.

  In this embodiment, in addition to the tool shaft position holding arm, a pillow portion, a palm rest, and the like are included, but these may or may not be present. First, according to the procedure, the sample holder 20 is set on the sample holder fixing means 21 in the procedure 1 (arrow 29 in FIG. 3). In the figure, a sample holder bearing stop saddle member 21 is used as a sample holder fixing means. The sample fixing means 21 is provided on the base plate 22 of the pedestal. After fixing the sample holder, the pillow part 26 is placed on the pedestal as in procedure 2 (indicated by the arrow 30 in FIG. 3). The pillow part 26 can receive a sample holder front-end | tip part, and can adjust height in a preferable aspect. After adjusting the height of the holder tip of the sample holder 20 and the height of the pillow portion, the tool axis position holding arm 27 is moved with respect to the longitudinal direction as in procedure 3 (arrow 31 in FIG. 3). Thus, the guide hole can be guided so that the tool can be operated on the sample mounting screw at the tip of the sample holder. The guide hole is provided in the arm 27.

  Then, as shown in procedure 4 (arrow 32 in FIG. 3), a tool 28, such as a screwdriver, for tightening the sample holding screw at the tip of the sample holder is guided to the guide hole provided in the tool shaft position holding arm. To do. In this embodiment, the guide hole is used. However, the mechanism is not limited to the hole but may be a mechanism as long as the axial position of the tool can be stabilized. In short, it is not particularly limited as long as the tool can be prevented from wobbling (if it has a tool wobbling prevention means).

  FIG. 4 is a diagram showing a state of sample replacement in an example of a sample holder base according to the present invention. In FIG. 4, 20 is a sample holder, 21 is a sample holder fixing means, 24 is a palm rest, 25 is a support means for a tool axis position holding arm, 26 is a pillow part, 27 is a tool axis position holding arm, and 28 is a tool. Show. Thanks to the palm rest, camera shake can be reduced. In this aspect, the tool axis position holding arm is of a retractable type and can be stored in a support member of the tool axis position holding arm when not in use.

  FIG. 2 is a diagram illustrating an example of a configuration diagram of a saddle portion that receives a sample holder. FIG. 2A is a view showing an example of a state in which the sample holder is mounted on the fixing means (saddle). FIG. 2B is a diagram showing an example of a state when the push-back piston is pushed. Reference numeral 10 denotes a holder shaft, 11 denotes a plunger, 12 denotes a return piston, 13 denotes a fixing bush, 14 denotes a sample holder fixing means (saddle member), and 15 denotes an elastic member (spring or the like).

  When the sample holder 20 is fixed to the sample holder fixing means 21 in the operation of the procedure 1 in FIG. 3 (29 arrow in FIG. 3), the following operation is performed in the fixing means in the mode as shown in FIG. It becomes. That is, in FIG. 2, when the sample holder is set, the holder shaft is fixed along the opposite surface of the plunger and the tapered shape, but when the holder shaft 10 reaches the recessed portion dug into the push-back piston, The sample holder 20 can be prevented from popping out thanks to the plunger. FIG. 2A shows a state where the sample holder is firmly fixed to the sample holder fixing means.

  On the other hand, when the sample holder is taken out from the sample holder fixing means, the sample holder can be easily taken out by pushing the return piston. As shown in FIG. 2, in the sample holder fixing means, the wall on the opposite side of the plunger is tapered so that it can be attached and detached more easily. FIG. 2B shows a state in which the push-back piston is pushed to take out the sample holder.

  FIG. 5 is a diagram showing a layout in which an example of a sample holder base according to the present invention and an actual microscope are linked. 20 is a sample holder, 21 is a sample holder fixing means, 22 is a base plate for a pedestal, 23 is a leg, 24 is a palm rest, 25 is a support means for a tool axis position holding arm, 26 is a pillow section, and 27 is a tool axis position holding arm. , 40 indicate microscopes, respectively. Since there is a space under the base plate 22 of the pedestal, a leg (base member) such as a binocular microscope (binocular) can be placed in the space, and measurement can be performed more easily without using another table. Is possible.

  Thus, according to the pedestal of the present invention, it is possible to exchange samples safely, and it is possible to avoid a plurality of human errors.

  Such a pedestal for a sample holder of the present invention can cope with various human errors and has an advantageous effect even in combination with other devices, so that it is useful in a wide range of fields. I can expect that.

1 Sample fixing screw 2 Sample holding plate 3 Spacer
4 Sample mesh 5 Sample cradle (tip of sample holder)
10 Holder shaft 11 Plunger 12 Push-back piston 13 Fixing bush 14 Sample holder fixing means (saddle member)
15 Elastic member (spring, etc.)
20 Sample holder 21 Sample holder fixing means 22 Base plate 23 Leg 24 Palm rest 25 Tool axis position holding arm support means 26 Pillow part 27 Tool axis position holding arm 28 Tool 29 Procedure 1
30 Step 2
31 Step 3
32 Step 4
40 microscope

Claims (7)

A pedestal - a pedestal, a specimen holder fixing means provided on said base, is provided on the pedestal, a specimen holder consisting of an arm-shaped member for holding the shaft position of the tool for sample exchange The arm holder is provided with a wobbling prevention means for preventing wobbling of the tool . The pedestal according to claim 1, wherein the arm-shaped member is variable in a longitudinal direction.   Furthermore, the base according to claim 1 or 2 which has a pillow part which receives a sample holder tip part on said base.   The pedestal according to claim 1, wherein the pedestal has a palm rest.   The pedestal according to any one of claims 1 to 4, wherein the pedestal has a leg portion whose height is adjustable.   The pedestal according to claim 1, wherein the sample holder fixing means includes a plunger. Furthermore, the said sample holder fixing means has a taking-out means for taking out the said sample holder, The base of any one of Claims 1-6.