JP6137801B2 - Sample holder tip, and sample holder having the sample holder tip - Google Patents

Sample holder tip, and sample holder having the sample holder tip Download PDF

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JP6137801B2
JP6137801B2 JP2012214258A JP2012214258A JP6137801B2 JP 6137801 B2 JP6137801 B2 JP 6137801B2 JP 2012214258 A JP2012214258 A JP 2012214258A JP 2012214258 A JP2012214258 A JP 2012214258A JP 6137801 B2 JP6137801 B2 JP 6137801B2
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pressing means
sample holder
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JP2014067685A (en
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宮崎 裕也
裕也 宮崎
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Mel Build Corp
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本発明は、試料ホルダー先端部、及び前記試料ホルダー先端部を有する試料ホルダーに関し、特に、特有の試料押え手段を有する試料ホルダー先端部、及び前記試料ホルダー先端部を有する試料ホルダーに関する。   The present invention relates to a sample holder tip and a sample holder having the sample holder tip, and more particularly to a sample holder tip having a specific sample pressing means and a sample holder having the sample holder tip.

透過型電子顕微鏡等の顕微鏡において、試料を観察する際には、例えば、透過型電子顕微鏡の対物ポールピースのギャップ間の限られた空間に挿入する試料ホルダーの先端部(以下、試料クレードルともいう。)は、対物レンズポールピースの限られた空間に挿入し、試料ホルダー軸上で電子線光軸に傾斜される必要があるので、必然的に、試料クレードル部は、出来るだけ薄く作られている。   When observing a sample in a microscope such as a transmission electron microscope, for example, the tip of a sample holder (hereinafter also referred to as a sample cradle) inserted into a limited space between the gaps of the objective pole piece of the transmission electron microscope. )) Must be inserted into the limited space of the objective lens pole piece and tilted to the electron beam optical axis on the sample holder axis, so that the sample cradle is necessarily made as thin as possible. Yes.

例えば、電子顕微鏡として、透過型電子顕微鏡を例に説明すると、透過型電子顕微鏡にて観察する試料は、試料クレードル部に装着して観察する。試料クレードルにTEM試料メッシュを装着し固定する為には、試料クレードルは、少なくともクレードル台座部と、試料押さえ部材が必要となる。さらに試料押さえは、クレードル本体に試料メッシュを挟み込む何がしかの固定手段が必要であり、そのため、固定用ネジを配する手段が一般的である。   For example, as an electron microscope, a transmission electron microscope will be described as an example. A sample to be observed with a transmission electron microscope is mounted on a sample cradle portion and observed. In order to mount and fix the TEM sample mesh on the sample cradle, the sample cradle needs at least a cradle pedestal and a sample pressing member. Furthermore, the sample presser requires some fixing means for sandwiching the sample mesh in the cradle body, and therefore means for arranging fixing screws is generally used.

なお、対物レンズポールピースの限られた空間を有効利用するには、試料押さえ板の厚みや、試料固定用ネジの小型化も必須条件だが、人間が扱う上では、小型化には限界があり、さらにネジ自体の耐久性の配慮から、小型化に限界がある。現状ではM1〜M2サイズのネジを用いるが一般的である。   In order to effectively use the limited space of the objective lens pole piece, the thickness of the sample pressing plate and the size of the sample fixing screw must be reduced. However, there are limits to downsizing for human use. Furthermore, there is a limit to downsizing due to the durability of the screw itself. Currently, M1-M2 size screws are generally used.

このような状況下で、試料を交換する方法として、たとえば、試料室と、試料交換室と、仕切り弁と、試料交換棒と、からなる試料交換装置が知られている(特許文献1)。   Under such circumstances, as a method for exchanging a sample, for example, a sample exchange device including a sample chamber, a sample exchange chamber, a gate valve, and a sample exchange rod is known (Patent Document 1).

特開平08−273571号公報Japanese Patent Laid-Open No. 08-273571

しかしながら、上記特許文献1のような試料交換装置を含め、既存の試料交換装置においては、クレードル本体に設けたネジ穴に固定の場合、試料メッシュを置き、その上にスペーサーリングを置き、さらにその上に試料押さえ板を置いた状態で、前記三部材を縫い付ける形態を保った状態で、ネジをピンセットで挟んで、クレードル本体に設けたネジ穴の軸位置に正確に合わせ保ち、さらに前述ネジの頭に有するスリ割りの溝に、精密ドライバー(以下、TOOLともいう)を正確に立て締め付けるのは、熟練が必要である。   However, in the existing sample exchange devices including the sample exchange device as in Patent Document 1, in the case of fixing to a screw hole provided in the cradle body, a sample mesh is placed, a spacer ring is placed thereon, and further With the sample holding plate placed on top, keeping the three members sewn together, pinching the screws with tweezers, keeping them precisely aligned with the axial positions of the screw holes in the cradle body, It is necessary to be skilled to accurately place and tighten a precision screwdriver (hereinafter also referred to as TOOL) in the slit groove on the head of the head.

このような場合を含め、試料取り付けの作業は、熟練者であってもピンセットでも挟んだネジが外れ飛んで失くす事例や、ドライバーやピンセットが誤って滑ってしまった結果、試料に接触してしまい試料を破壊させてしまう事例も多い。   In such cases, the sample attachment work is done by contacting the sample as a result of a screwdriver or tweezers accidentally slipping as a result of the screw that is pinched by both skilled and tweezers coming off and losing. In many cases, the sample is destroyed.

また、試料ホルダーは、一般に、試料を固定するための試料押さえと、試料押さえを固定するための固定ネジがあるが、まず、不器用な人の場合の問題点について説明すれば、以下の通りである。標準的な試料ホルダーにおける試料の取付方法は、図4、5で示すように、まず、試料固定ネジを緩めネジを取り外す。次に、試料押さえを取り外した後、試料台座に試料メッシュを置き試料メッシュがずれないようにスペーサーを置き、その上に試料押さえをずれないように置く。最後に、試料固定ネジで固定するが、メッシュ、スペーサー、試料押さえがずれないように慎重にピンセットでネジ穴にガイドしながら、固定ネジをドライバーでしめる工程をとる。なお、スペーサーが必要な理由として、1.試料押さえを固定ネジで締め付ける際に、試料押さえが回転し試料にダメージを与える事(曲げる、表面に接触)があり、スペーサーを試料と試料押さえの間に入れる事で、押さえが回転しても直接的な試料へのダメージを与えにくくなるためと、2.試料メッシュには様々な厚さがあり、厚みを調整するのに使用することができるためである。   The sample holder generally has a sample holder for fixing the sample and a fixing screw for fixing the sample holder. First, the problem in the case of a clumsy person will be described as follows. is there. As shown in FIGS. 4 and 5, the sample mounting method for the standard sample holder is as follows. First, the sample fixing screw is loosened and the screw is removed. Next, after removing the sample holder, a sample mesh is placed on the sample base, a spacer is placed so that the sample mesh is not displaced, and a sample holder is placed thereon so as not to be displaced. Finally, the sample is fixed with a sample fixing screw, and a process of tightening the fixing screw with a screwdriver while carefully guiding it to the screw hole with tweezers so that the mesh, spacer, and sample presser do not shift. The reasons why a spacer is necessary are as follows: When tightening the sample holder with the fixing screw, the sample holder may rotate and damage the sample (bend or contact the surface). Even if the holder rotates by inserting a spacer between the sample and the sample holder 1. It is difficult to damage the sample directly. This is because the sample mesh has various thicknesses and can be used to adjust the thickness.

また、器用な人の場合、試料固定ネジを途中まで緩め片方の手で試料押さえを持ち上げながら、試料台座と試料押さえの間にもう片方の手で試料とメッシュを置き、固定ネジをドライバーで固定する工程をとる。不器用な人及び器用な人の場合においても、既存の試料押さえは上記の手順が必要で、試料を固定するまでに、多くの作業要素に気を払う必要がある。   For dexterous people, loosen the sample fixing screw halfway, lift the sample holder with one hand, place the sample and mesh with the other hand between the sample base and sample holder, and fix the fixing screw with a screwdriver. The process to do is taken. Even in the case of clumsy people and dexterous people, the existing sample presser requires the above procedure, and it is necessary to pay attention to many working elements before fixing the sample.

加えて、不器用な人の手順においては、1.試料押さえ手段や固定手段は構造上小さい部品のため、取り外す際に飛ばしたり、落としたり、最悪失くしたりする場合がある。2.取り付け作業が複雑なため、試料や、試料押さえを何度も置き直す場合もある。3.何度も試料を置きなおす事があるため、せっかく作った試料を落としたり、壊したり、ピンセットやドライバーで突き刺したりする事がある。4.固定ネジを固定する際に、片方の手でピンセットを用いて固定ネジを支えながら、もう片方の手でドライバーを使って締める事はとても複雑な工程である。時にはドライバーやピンセットが滑り、試料メッシュを突き破る様な事故原因になる事もある。5.また、長時間試料を大気に放置すると、コンタミが付着する原因になったり、酸化したりする恐れがありますので出来る限り速やかに装着するのが望ましいのに時間が掛かってしまうという問題もある(本来は真空搬送が理想的である。)。   In addition, in the procedure of a clumsy person, 1. The sample pressing means and the fixing means are structurally small parts, so they may be skipped, dropped or lost in the worst case. 2. Due to the complexity of the installation work, the sample and sample holder may be replaced many times. 3. Since the sample may be placed many times, the sample that has been made may be dropped, broken, or pierced with tweezers or a screwdriver. 4. When fixing the fixing screw, it is a very complicated process to hold the fixing screw with tweezers with one hand and tighten with a screwdriver with the other hand. Sometimes the driver or tweezers slip, causing an accident that breaks through the sample mesh. 5. In addition, if the sample is left in the atmosphere for a long time, it may cause contamination and oxidize, so there is a problem that it takes time to install it as quickly as possible. (Originally, vacuum conveyance is ideal.)

一方、器用な人の手順においても、1.例えば左のピンセットで試料押さえを持ち上げて、もう片方の手で持ったピンセットで試料を試料押さえと台座の間にのせるので、片方の手が滑って試料を破損させてしまう恐れがある。2.試料押さえを完全に取り外していないため、一度置くのに失敗すると、置きなおすのが難しくなるため、試料を破損させてしまう恐れがある。   On the other hand, in the procedure of a dexterous person, for example, lift the sample holder with the left tweezers and place the sample between the sample holder and the pedestal with the tweezers held with the other hand. The sample may be damaged. 2. Since the sample holder has not been completely removed, if it fails to be placed once, it will be difficult to place it again, which may damage the sample.

したがって、どちらの試料の置き方も、試料を破損させる恐れがあり、電子顕微鏡利用者の悩みの種であった。   Therefore, either sample placement may cause damage to the sample, which has been a problem for electron microscope users.

そこで、上記問題点を解決すべく、本発明は、試料装着が簡易に可能な試料ホルダー先端部、及び前記試料ホルダー先端部を有する試料ホルダーを提供することを目的とする。   Accordingly, in order to solve the above-described problems, an object of the present invention is to provide a sample holder tip portion that can be easily loaded with a sample, and a sample holder having the sample holder tip portion.

上記目的を達成するために、本発明者は、試料ホルダーの試料交換に関わる事故を分析し、鋭意検討を行った結果、本発明を見出すに至った。   In order to achieve the above object, the present inventor has analyzed the accident related to the sample exchange of the sample holder, and as a result of intensive studies, has found the present invention.

すなわち、本発明の試料ホルダー先端部は、試料設置台座と、試料を載せるための試料メッシュと、前記試料メッシュを押える試料押さえ手段と、前記試料押さえ手段を固定する固定手段と、からなる試料ホルダー先端部であって、前記試料押さえ手段の下側に弾性部材を有し、前記弾性部材は、フックであり、かつ、前記固定手段の固定を緩めることにより、前記試料押さえ手段を持ち上げ、前記試料押さえ手段と前記試料設置台座との間であって、前記試料の設置位置の直上、又は周辺に前記試料を出し入れ可能な空間を作ることを特徴とする。
That is, the sample holder tip of the present invention comprises a sample holder comprising a sample mounting base, a sample mesh for placing a sample, a sample pressing means for pressing the sample mesh, and a fixing means for fixing the sample pressing means. An elastic member on the lower side of the sample pressing means , the elastic member being a hook, and lifting the sample pressing means by loosening the fixing means; It is characterized in that a space is formed between the pressing means and the sample mounting base, and directly above or around the sample installation position so that the sample can be taken in and out.

また、本発明の試料ホルダー先端部の好ましい実施態様において、前記試料押さえ手段は、1又はそれ以上から構成されることを特徴とする。   In a preferred embodiment of the sample holder tip of the present invention, the sample pressing means is composed of one or more.

また、本発明の試料ホルダー先端部の好ましい実施態様において、前記試料押さえ手段は、前記試料設置台座に設けられた溝内に収まることを特徴とする。   In a preferred embodiment of the sample holder tip of the present invention, the sample pressing means is housed in a groove provided in the sample setting base.

また、本発明の試料ホルダー先端部の好ましい実施態様において、前記試料押さえ手段は、試料ホルダーの長手方向において、移動可能であることを特徴とする。   In a preferred embodiment of the sample holder tip of the present invention, the sample pressing means is movable in the longitudinal direction of the sample holder.

また、本発明の試料ホルダー先端部の好ましい実施態様において、前記試料押さえ手段の上側に、案内溝を設け、前記案内溝を利用して前記試料押さえ手段を移動させることが可能であることを特徴とする。
In a preferred embodiment of the sample holder tip according to the present invention , a guide groove is provided above the sample pressing means, and the sample pressing means can be moved using the guide groove. And

また、本発明の試料ホルダーは、本発明の試料ホルダー先端部からなることを特徴とする。   Further, the sample holder of the present invention is characterized by comprising the tip end portion of the sample holder of the present invention.

本発明によれば、試料交換時の試料等の破損を極力低減することが可能であるという有利な効果を奏する。   According to the present invention, there is an advantageous effect that it is possible to reduce damage to a sample or the like during sample replacement as much as possible.

図1は、本発明の一実施態様における試料ホルダー先端部の取付手順を示す図である。FIG. 1 is a diagram showing a procedure for attaching a sample holder tip in one embodiment of the present invention. 図2は、本発明の一実施態様における試料ホルダー先端部の取付手順を示す図である。FIG. 2 is a diagram showing a procedure for attaching a sample holder tip in one embodiment of the present invention. 図3は、本発明の一実施態様における試料ホルダー先端部の斜視図を示す図である。FIG. 3 is a perspective view of the tip end portion of the sample holder in one embodiment of the present invention. 図4は、従来の試料の取付手順を示す図である。FIG. 4 is a diagram showing a conventional sample mounting procedure. 図5は、従来の試料の取付手順を示す図である。FIG. 5 is a diagram showing a conventional sample attachment procedure.

本発明の試料ホルダー先端部は、試料設置台座と、試料を載せるための試料メッシュと、前記試料メッシュを押える試料押さえ手段と、前記試料押さえ手段を固定する固定手段と、からなる試料ホルダー先端部であって、前記試料押さえ手段は、弾性部材を有することを特徴とする。通常は、試料設置台座の上に試料メッシュを載せ、前記試料メッシュ上に試料を載せる。前記試料メッシュは、顕微鏡に供する場合に、固定されるのが通常である。従来においては、一般に試料メッシュは、試料押さえ板を介して、ネジ等により、試料設置台座へ固定されていた。本発明においては、試料押さえ手段は、弾性部材を有する。前記弾性部材を有するために、本発明においては、試料押さえ手段を固定する固定手段を緩めるだけで、試料押さえ手段は、傾き始めて試料を出し入れ可能な程度の空間を作り出すことができる。そのため、当該空間を利用して、試料の出し入れが従来に比較して大幅に簡便かつ確実に行うことが可能となるという有利な効果を奏する。   The sample holder tip of the present invention is a sample holder tip comprising a sample mounting base, a sample mesh for placing a sample, a sample pressing means for pressing the sample mesh, and a fixing means for fixing the sample pressing means. And the said sample pressing means has an elastic member, It is characterized by the above-mentioned. Usually, a sample mesh is placed on the sample mounting base, and the sample is placed on the sample mesh. The sample mesh is usually fixed when used in a microscope. Conventionally, the sample mesh is generally fixed to the sample mounting base with screws or the like through the sample pressing plate. In the present invention, the sample pressing means has an elastic member. In order to have the elastic member, in the present invention, the sample pressing means can start to tilt and create a space in which the sample can be taken in and out only by loosening the fixing means for fixing the sample pressing means. Therefore, there is an advantageous effect that the space can be used in a simple and reliable manner in comparison with the conventional method.

また、本発明の試料ホルダー先端部の好ましい実施態様において、前記弾性部材が、フックであることを特徴とする。弾性部材については、上記空間をつくることが可能であれば、特に限定されない。簡便に設計可能という観点から、弾性部材としては、例えばフック、スプリング等を挙げることができる。なお、試料押さえ手段を固定する固定手段を緩めれば、試料押さえ手段が持ち上がり、両サイドにずらすことが可能な構造であればよいので、例えば、試料押さえ手段に直接空間を形成することが可能な機能、たとえば、フック、スプリングなどの弾性部材を付けなくても、クレードル側に当該弾性部材を配しても良い。したがって、本発明の別の実施態様においては、試料設置台座側に弾性部材を有することができる。当該弾性部材は、前記試料押さえ手段を固定する固定手段を緩めることにより、試料押さえ手段が傾く等の動作を補助するので、試料を挿入する領域に、適度な空間を形成することができる。   In a preferred embodiment of the sample holder tip of the present invention, the elastic member is a hook. The elastic member is not particularly limited as long as the space can be created. From the viewpoint of easy design, examples of the elastic member include a hook and a spring. It should be noted that if the fixing means for fixing the sample pressing means is loosened, any structure can be used as long as the sample pressing means can be lifted and shifted to both sides. For example, a space can be directly formed in the sample pressing means. Even if an elastic member such as a hook or a spring is not attached, the elastic member may be arranged on the cradle side. Therefore, in another embodiment of the present invention, an elastic member can be provided on the sample mounting base side. The elastic member assists the operation such as tilting of the sample pressing means by loosening the fixing means for fixing the sample pressing means, so that an appropriate space can be formed in the region where the sample is inserted.

また、本発明の試料ホルダー先端部の好ましい実施態様において、前記試料押さえ手段は、1又はそれ以上から構成されていてもよい。試料押さえ手段は1つであっても、複数であっても、上記空間を作りだして、試料の出し入れが従来に比較して大幅に簡便かつ確実に行うことが可能となるからである。   In the preferred embodiment of the sample holder tip of the present invention, the sample pressing means may be composed of one or more. This is because, even if there is one sample holding means or a plurality of sample pressing means, it is possible to create the above-mentioned space and to perform sample taking in and out much more easily and reliably than in the past.

また、本発明の試料ホルダー先端部の好ましい実施態様において、前記試料押さえ手段は、前記試料設置台座に設けられた溝内に収まることを特徴とする。このような構成を採用することにより、試料押さえ手段は、試料ホルダー先端部の溝にはまっているので、回転しない。試料押さえ手段が回転しないことにより、試料にダメージ(曲げたり、表面に接触したりなど。)を与えることがないという利点を有することになる。   In a preferred embodiment of the sample holder tip of the present invention, the sample pressing means is housed in a groove provided in the sample setting base. By adopting such a configuration, the sample pressing means does not rotate because it fits into the groove at the tip of the sample holder. Since the sample pressing means does not rotate, there is an advantage that the sample is not damaged (bent, contacted with the surface, etc.).

また、本発明の試料ホルダー先端部の好ましい実施態様において、前記試料押さえ手段は、試料ホルダーの長手方向において、移動可能であることを特徴とする。このように、試料押さえ手段が、移動可能とすることで、上記空間との相乗効果でより試料の出し入れがスムーズとなる。試料押さえ手段と、試料設置台座との間に適当な空間が生じ、試料押さえ手段が移動すれば、所望の位置に試料を設置して、後は、試料押さえ手段を元の位置へ移動させて、固定手段で所望の位置で固定することにより、試料にダメージを与えることなしに、より確実に試料をセットすることができる。   In a preferred embodiment of the sample holder tip of the present invention, the sample pressing means is movable in the longitudinal direction of the sample holder. Thus, by allowing the sample pressing means to move, the sample can be taken in and out more smoothly due to a synergistic effect with the space. If an appropriate space is created between the sample pressing means and the sample mounting base and the sample pressing means moves, the sample is set at a desired position, and then the sample pressing means is moved to the original position. By fixing at a desired position by the fixing means, the sample can be set more reliably without damaging the sample.

なお、試料ホルダーの長手方向において移動可能としているが、本発明のおいては、長手方向に限定されない。試料押さえ手段が移動可能であれば、上記空間との相乗効果でより試料の出し入れがスムーズとなるためである。   In addition, although it can move in the longitudinal direction of a sample holder, in this invention, it is not limited to a longitudinal direction. This is because if the sample pressing means is movable, the sample can be taken in and out more smoothly due to a synergistic effect with the space.

また、本発明の試料ホルダー先端部の好ましい実施態様において、前記試料押さえ手段は、案内溝を有してもよい。かかる案内溝を利用して、上記のように、試料押さえ手段を移動するときに、例えば、ピンセット等を用いて、試料押さえ手段を容易に横方向へスライドさせることができ、ひいては、試料を出し入れしやすくすることが可能となる。   In the preferred embodiment of the sample holder tip of the present invention, the sample pressing means may have a guide groove. When the sample pressing means is moved using the guide groove as described above, the sample pressing means can be easily slid in the lateral direction using, for example, tweezers, and the sample can be taken in and out. It becomes possible to make it easy.

本発明の試料ホルダーは、本発明の試料ホルダー先端部からなることを特徴とする。試料ホルダー先端部については、上述したものを例示することができる。   The sample holder of the present invention is characterized by comprising the sample holder tip of the present invention. As for the tip of the sample holder, those described above can be exemplified.

ここで、本発明の試料ホルダー先端部の一実施例を説明するが、本発明は、下記の実施例に限定して解釈されるものではない。また、本発明の要旨を逸脱することなく、適宜変更することが可能であることは言うまでもない。   Here, although one Example of the sample holder front-end | tip part of this invention is described, this invention is limited to the following Example and is not interpreted. Moreover, it cannot be overemphasized that it can change suitably, without deviating from the summary of this invention.

図面を参照して、本発明の試料ホルダー先端部の一実施態様を説明すれば以下の通りである。   With reference to the drawings, one embodiment of the tip of the sample holder of the present invention will be described as follows.

図1は、本発明の一実施態様における試料ホルダー先端部の取付手順を示す図である。図1中、1は固定手段によって固定された状態から、固定を緩めた状態への模式図、2は固定を緩めた状態から、試料押さえ手段を移動させた状態への模式図、3は試料押さえ手段の移動方向、4は案内溝、5は移動用スペース(溝)、6は試料設置台座に設けれた溝、7は固定手段、8は試料ホルダー本体、9は試料、10は試料押さえ手段、11は弾性部材、12は試料設置台座(クレードル本体)を、それぞれ示す。   FIG. 1 is a diagram showing a procedure for attaching a sample holder tip in one embodiment of the present invention. In FIG. 1, 1 is a schematic diagram from a state of being fixed by the fixing means to a state where the fixing is loosened, 2 is a schematic diagram from a state where the fixing is loosened, and a state where the sample pressing means is moved, and 3 is a sample Direction of movement of the holding means, 4 is a guide groove, 5 is a space for movement (groove), 6 is a groove provided on the sample mounting base, 7 is a fixing means, 8 is a sample holder body, 9 is a sample, 10 is a sample holder Means, 11 is an elastic member, and 12 is a sample mounting base (cradle body).

従来では、1.試料固定手段7を緩める工程、2.固定手段7をピンセットで取り外す工程、3.試料押さえ手段を取り外す工程(工程1〜3までは、図4参照)、4.試料設置台座上へ試料を置く工程、5.試料を押えこむための試料スペーサ―32を置く工程、6.試料押さえ手段10をピンセットで持ち上げて載せる工程、7.固定手段7をピンセットで正確な位置に固定しながら、固定する工程(工程4〜7までは、図5参照)、を要していた。   Conventionally, 1. a step of loosening the sample fixing means 7, 2. a step of removing the fixing means 7 with tweezers, 3. A step of removing the sample pressing means (see FIG. 4 for steps 1 to 3). 4. placing the sample on the sample mounting base; 5. a step of placing a sample spacer 32 for holding the sample; 6. lifting and placing the sample pressing means 10 with tweezers; A process of fixing the fixing means 7 while fixing the fixing means 7 at an accurate position with tweezers (refer to FIG. 5 for steps 4 to 7) is required.

これに対して、本発明の一実施態様における試料の取付手順を説明すれば以下の通りである。まず、図1及び図2を参照しながら説明すれば、試料押さえ手段10を固定する固定手段7を緩めることにより、図示しないが試料を載せるための試料メッシュ及び試料スペーサの固定を解除することができる。図1では、固定手段7としてネジを用いているが、試料押さえ手段10を固定することが可能であれば、特に限定されない。固定手段7の固定を緩めていくと、試料押さえ手段10が弾性部材11を有するため、試料押さえ手段10は徐々に傾き、試料を設置する位置の上に空間をつくる。すなわち、固定ネジ7を緩めると、試料押さえ手段10に設けられた弾性部材11が、スプリング代わりになって、試料押さえ手段を持ちあげて、ひいては、空間を形成する。なお、図においては、弾性部材として、フックを用いているが、特にこれに限定されないことはいうまでもない。
In contrast, the procedure for attaching the sample in one embodiment of the present invention will be described as follows. First, referring to FIG. 1 and FIG. 2, by loosening the fixing means 7 for fixing the sample pressing means 10, the fixing of the sample mesh and the sample spacer for placing the sample (not shown) can be released. it can. In FIG. 1, a screw is used as the fixing means 7, but is not particularly limited as long as the sample pressing means 10 can be fixed. When the fixing means 7 is loosened, the sample pressing means 10 has the elastic member 11, so that the sample pressing means 10 is gradually tilted to create a space above the position where the sample is placed. In other words, loosening the fixing screw 7, the elastic members 11 provided on the sample holding means 10, taken in lieu of the spring, to lift the sample holding means, therefore, to form a space. In the drawing, a hook is used as the elastic member, but it is needless to say that the hook is not particularly limited thereto.

そして、より試料を的確に設置するために、試料押さえ手段10に設けられた案内溝4を利用して、当該案内溝4に、ピンセット等の先を入れて、図1の矢印3のように両サイドに開くことができる。このようにすることで、試料が試料押さえ手段等に接触することなく、試料をセットすることができる。   Then, in order to place the sample more accurately, the tip of a tweezers or the like is inserted into the guide groove 4 using the guide groove 4 provided in the sample pressing means 10 as shown by the arrow 3 in FIG. Can be opened on both sides. By doing in this way, a sample can be set, without a sample contacting a sample press means etc.

すなわち、固定ネジを緩めると試料押さえの先端が自己的に持ち上がるので、試料押さえを横にスライドさせることが可能となる。スライドしやすい様に、押さえにピンセットの先を入れる穴をあけ、そこにピンセットの先を入れてずらせる様にすることも可能である。なお、図では、試料押さえ手段は、2個対称に配置しているが、一つでもよく、又はそれ以上であっても空間が形成されれば特に限定されない。   That is, when the fixing screw is loosened, the tip of the sample presser is lifted by itself, so that the sample presser can be slid sideways. It is also possible to make a hole to put the tip of the tweezers in the press so that it can slide easily, and to put the tip of the tweezers in there. In the figure, two sample pressing means are arranged symmetrically, but there may be one or more than one, and there is no particular limitation as long as a space is formed.

試料をセットすれば、固定手段7によって試料押さえ手段10を固定するか、試料押さえ手段10を移動させている場合には、案内溝4を再び利用して、ピンセット等の先を案内溝4に入れて、図2の矢印3のように試料押さえ手段10を内側へスライド、移動させる。その後は、固定手段7によって試料押さえ手段10を固定して、試料を固定することができる。なお、図では、固定手段としてネジを用いているので、ネジを締めれば試料の固定が完了することになる。   When the sample is set, when the sample pressing means 10 is fixed by the fixing means 7 or when the sample pressing means 10 is moved, the guide groove 4 is used again, and the tip of the tweezers or the like is placed in the guide groove 4. Then, the sample pressing means 10 is slid and moved inward as indicated by an arrow 3 in FIG. Thereafter, the sample pressing means 10 can be fixed by the fixing means 7 to fix the sample. In the figure, since a screw is used as a fixing means, fixing the sample is completed when the screw is tightened.

上記で示すように、試料押さえ手段の先端にフック等の弾性部材を設ける事で、フック等の弾性部材がスプリングの役割を果たしネジ等の固定手段を緩めるだけで、試料押さえ手段が自己的に持ち上がるので、そのまま試料をセットしてもよく、必要に応じて、試料押さえ手段をずらすだけの簡単な作業で、試料を試料ホルダーに取り付ける事が可能になる。   As shown above, by providing an elastic member such as a hook at the tip of the sample pressing means, the elastic member such as the hook serves as a spring, and the sample pressing means can self-react by simply loosening the fixing means such as a screw. Since the sample is lifted, the sample may be set as it is, and if necessary, the sample can be attached to the sample holder by simply moving the sample pressing means.

なお、図3は、本発明の一実施態様における試料ホルダー先端部の斜視図を示す図である。案内溝は、図3においては、試料押さえ手段を貫通しているが、試料押さえ手段を移動させることができれば、貫通している必要はない。また、図3では、弾性部材として、フックを採用しているが、試料押さえ手段の下側に弾性部材を1つ又はそれ以上適当な箇所へ設置することにより、試料の設置位置の直上、周辺に空間を形成することができ、試料設置時の試料の破損を防ぐことができる。

FIG. 3 is a perspective view of the tip end portion of the sample holder in one embodiment of the present invention. In FIG. 3, the guide groove penetrates the sample pressing means, but if the sample pressing means can be moved, it does not need to penetrate. In FIG. 3, a hook is used as the elastic member. However, by placing one or more elastic members below the sample pressing means at an appropriate location, the area immediately above the sample installation position A space can be formed in the sample, and the sample can be prevented from being damaged when the sample is installed.

このように、本発明においては、以下のようなメリットと特徴を有する。   Thus, the present invention has the following merits and characteristics.

すなわち、ネジ等の固定手段を緩めるだけで、試料押さえ手段が持ち上がるので、試料押さえ手段と試料設置台座との間に空間ができ、試料を脱着できる。また、試料を押さえる部分が浮いており、試料押さえ手段が試料の表面に当たったり、試料メッシュを横からぶつけて破損させたりしないことが判明した。また、試料の取り付けがスムーズ(作業効率の向上)且つ簡易的になるため何度も試料を置きなおす必要がなくなるということが判明した。作業を簡易化する事で、試料破損などの取り付けミスによる事故を減らす効果がある。さらに、作業時間の短縮が可能なので、試料へのコンタミを軽減できるという相乗的な効果も奏することが判明した。   That is, the sample pressing means is lifted simply by loosening a fixing means such as a screw, so that a space is created between the sample pressing means and the sample mounting base, and the sample can be detached. Further, it was found that the portion for holding the sample is floating, and the sample holding means does not hit the surface of the sample or damage the sample mesh by hitting it from the side. Further, it has been found that it is not necessary to place the sample again and again because the sample can be attached smoothly (improved working efficiency) and simplified. By simplifying the work, there is an effect of reducing accidents due to mounting errors such as sample breakage. Furthermore, since the working time can be shortened, it has been found that there is also a synergistic effect that the contamination on the sample can be reduced.

このような本発明の試料ホルダー先端部は、種々の人為的ミスにも対応可能であり、他の装置との組合せにおいても有利な効果を奏することから、広範な範囲での分野において有益であることが期待できる。   Such a tip of the sample holder of the present invention can cope with various human errors and has an advantageous effect even in combination with other devices, so that it is useful in a wide range of fields. I can expect that.

1 固定手段によって固定された状態から、固定を緩めた状態への模式図
2 固定を緩めた状態から、試料押さえ手段を移動させた状態への模式図
3 試料押さえ手段の移動方向
4 案内溝
5 移動用スペース(溝)
6 試料設置台座に設けられた溝
7 固定手段
8 試料ホルダー本体
9 試料
10 試料押さえ手段
11 弾性部材
12 試料設置台座(クレードル本体)
20 試料をセットした状態から、試料押さえ手段を矢印の方向へ移動させた状態への模式図
21 試料押さえ手段を移動させた状態から、固定手段により固定した状態への模式図
31 試料メッシュ
32 試料スペーサー
1 Schematic view from a state of being fixed by a fixing means to a state in which the fixing is loosened 2 Schematic view from a state in which the fixing is loosened to a state in which the sample pressing means is moved 3 Direction of movement of the sample pressing means 4 Guide groove 5 Moving space (groove)
6 Grooves provided on the sample mounting base 7 Fixing means
8 Sample holder body 9 Sample 10 Sample holding means 11 Elastic member 12 Sample mounting base (cradle body)
20 Schematic view from the state where the sample is set to the state where the sample pressing means is moved in the direction of the arrow 21 Schematic diagram from the state where the sample pressing means is moved to the state where the sample pressing means is fixed by the fixing means 31 Sample mesh 32 Sample spacer

Claims (6)

試料設置台座と、試料を載せるための試料メッシュと、前記試料メッシュを押える試料押さえ手段と、前記試料押さえ手段を固定する固定手段と、からなる試料ホルダー先端部であって、前記試料押さえ手段の下側に弾性部材を有し、前記弾性部材は、フックであり、かつ、前記固定手段の固定を緩めることにより、前記試料押さえ手段を持ち上げ、前記試料押さえ手段と前記試料設置台座との間であって、前記試料の設置位置の直上、又は周辺に前記試料を出し入れ可能な空間を作ることを特徴とする試料ホルダー先端部。 A sample holder tip comprising: a sample setting base; a sample mesh for placing a sample; a sample pressing means for pressing the sample mesh; and a fixing means for fixing the sample pressing means ; There is an elastic member on the lower side, and the elastic member is a hook, and by loosening the fixing of the fixing means, the sample pressing means is lifted, and between the sample pressing means and the sample setting base A sample holder tip , wherein a space in which the sample can be taken in and out is formed immediately above or around the installation position of the sample. 前記試料押さえ手段は、1又はそれ以上から構成される請求項1記載の試料ホルダー先端部。   The sample holder tip according to claim 1, wherein the sample pressing means is composed of one or more. 前記試料押さえ手段は、前記試料設置台座に設けられた溝内に収まることを特徴とする請求項1又は2項に記載の試料ホルダー先端部。   3. The sample holder tip portion according to claim 1, wherein the sample pressing means is housed in a groove provided on the sample setting base. 前記試料押さえ手段は、試料ホルダーの長手方向において、移動可能である請求項1〜3項のいずれか1項に記載の試料ホルダー先端部。   The sample holder tip according to any one of claims 1 to 3, wherein the sample pressing means is movable in a longitudinal direction of the sample holder. 前記試料押さえ手段の上側に、案内溝を設け、前記案内溝を利用して前記試料押さえ手段を移動させることが可能であることを特徴とする請求項4記載の試料ホルダー先端部。 The sample holder tip according to claim 4, wherein a guide groove is provided on the upper side of the sample pressing means, and the sample pressing means can be moved using the guide groove . 請求項1〜5項のいずれか1項に記載の試料ホルダー先端部からなる試料ホルダー。
The sample holder which consists of a sample holder front-end | tip part of any one of Claims 1-5 .
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US14/414,682 US9240304B2 (en) 2012-07-17 2013-07-12 Specimen holder tip part, specimen holder having said specimen holder tip part, gonio stage, and electron microscope having said gonio stage

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