JP2005026042A - Sample holder for electron microscope, and sample setting method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sample setting method capable of setting a sample for a transmission electron microscope (TEM) in a sample holder without fixing it to an auxiliary plate and facilitated in fixing of insertion length of the TEM sample. <P>SOLUTION: In the transmission electron microscope provided with the sample holder having a side part holding member and a back surface holding member in a sample stand, the sample holder is provided with an abutment part, on which a surface of the sample abuts, between the side part holding member and the back surface holding member. The sample is fixed by the abutment part 302a, the side surface holding member 302b and the back surface holding member 303, and since the abutment part works as a positioning stopper, insertion length of the TEM sample 103 can be fixed. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a sample holder and a method for mounting the sample on the sample holder, and in particular, focusing that allows the transmission electron microscope sample to be directly mounted on the sample holder without mounting and fixing the transmission electron microscope sample on the notch mesh. A sample holder that can be tilted biaxially for use with an ion beam processing device and a transmission electron microscope, and can be easily mounted on the sample holder without damaging the sample for the transmission electron microscope. It relates to the mounting method.
[0002]
[Prior art]
FIG. 1 shows a conventional sample stage 101 and sample holder HL1 for processing a sample cut by a dicer to produce a sample for a transmission electron microscope (hereinafter referred to as TEM) by processing a focused ion beam (hereinafter referred to as FIB). In the first conventional technique, the sample stage 101 of the sample holder HL1 is configured to include the notch mesh fixing portion 102. The sample holder HL1 is a FIB-TEM shared biaxial tilted sample holder. Further, the notch mesh fixing portion 102 of the sample stage was a member made of a flat metal plate with a part cut away in order to secure the FIB incident area. Next, regarding the method for mounting the TEM sample to the sample holder shown in FIG. 1, the sample stage 101 is extracted and the sample in the first prior art is used with reference to FIGS. 2 (a) to 2 (d). The mounting method of will be described. Here, (a) and (c) are top views, and (b) and (d) are cross-sectional views. As shown in FIG. 2A, the TEM sample 103 was formed by being bonded and fixed to a notch mesh 104 obtained by notching a single hole mesh having a diameter of 3 mm. As shown in FIGS. 2A to 2D, the notch mesh fixing part 102 and the ring spring 105 are used to sandwich a part of the notch mesh 104 to which the TEM sample 103 is bonded and fixed. Wearing. An ion beam is incident from the direction of the notch and FIB processing is performed (see, for example, Patent Document 1).
[0003]
However, when using the sample stage 101 provided in the sample holder HL1 of the first prior art shown in FIG. 2, the notch mesh 104 to which the TEM sample 103 is bonded and fixed is picked up by the tweezers P. There is a case where the TEM sample 103 is detached from the notch mesh 104 due to damage. In particular, when the longitudinal direction of the TEM sample 103 cut out by the dicer is less than the size of the single hole of the notched mesh 104, the TEM sample 103 is highly likely to be detached from the notched mesh 104 because it is pasted. It was. In addition, since the sample stage 101 is configured by combining the notch mesh fixing portion 102 and the ring spring 105, it is difficult to reproduce the mounting position of the TEM sample 103. When the insertion length X1 from the sample stage 101 to the sample surface of the TEM sample 103 is different every time it is mounted, there is a problem that the work in the FIB processing, which is the subsequent work, becomes complicated.
[0004]
Therefore, as shown in FIG. 3, the FIB-TEM shared biaxial tilted sample holder HL2 provided with the sample stage 201 in the second prior art has an upper holding member 202, a lower holding member 203, and upper and lower parts on the sample stage 201. The fastening tool 204 is provided with a spring SP for fastening the holding member. 3A is a top view of the sample holder HL2, and FIG. 3B is a cross-sectional view of the sample stage 201 of the sample holder HL2. Next, with reference to FIGS. 4 and 5, the sample stage 201 will be extracted and a method for mounting the TEM sample to the sample holder in the second prior art will be described. Here, FIG. 4A shows a top view and FIG. 4B shows a cross-sectional view. As shown in FIG. 4, the lower holding member 203 and the upper holding member 202 are mounted on the lower holding member 203 by placing a notch mesh 104 on which the TEM sample 103 is mounted and fixed on the sample insertion portion J1a of the jig J1. When notched, the notch mesh 104 abuts and a contact portion 205 having a role as a positioning stopper is provided. A TEM sample 103 bonded and fixed to the notch mesh 104 is inserted between the lower holding member 203 and the upper holding member 202, and the clamping tool 204 is used as shown in FIGS. 5 (a) and 5 (b). The TEM sample 103 is mounted on the sample stage 201 by tightening the lower holding member 203 and the upper holding member 202 to sandwich the notch mesh 104.
[0005]
Therefore, the sample holder HL2 in the second prior art can hold the tip of the notch mesh 104 with the same insertion length X3 being held each time. This second conventional technique can solve the problem of avoiding damage by directly handling the TEM sample 103 with the tweezers P in the first conventional technique and making the insertion length X3 of the notch mesh 104 constant. (For example, see Patent Document 2).
[0006]
[Patent Document 1]
JP-A-87972 (page 3-4, FIG. 1)
[Patent Document 2]
Japanese Patent Laid-Open No. 11-67131 (page 2-6, FIG. 2)
[0007]
[Problems to be solved by the invention]
However, there are the following problems that cannot be solved by these first and second conventional techniques in which the TEM sample 103 bonded and fixed to the notch mesh 104 is mounted on the sample holder. When using the sample holders using these first and second prior arts, it is essential that the TEM sample 103 is always attached and fixed to the notch mesh 104. However, the TEM sample 103 is attached to the tweezers P. Since it is very difficult to reproduce the adhesive fixing position where the adhesive is fixed to the notch mesh 104 by moving it at the same time, even if the insertion length X2 of the notch mesh can be made constant by the second prior art, It was difficult to reproduce the insertion length X3 from the sample to the sample surface of the TEM sample. For this reason, it is difficult to make the insertion length of the TEM sample to the same extent every time the device is mounted. If the insertion length of the TEM sample is different every time it is mounted, there still remains a problem that work in FIB processing, which is a later work, becomes complicated.
[0008]
In addition, when the TEM sample 103 is bonded and fixed to the notch mesh 104, only one side of the sample is bonded and fixed to the notch mesh if the size of the sample in the longitudinal direction is insufficient. Even if a part of the notch mesh 104 is held between the lower holding member 203 and the upper holding member 202 of the sample holder HL2, the TEM sample 103 is removed from the notch mesh 104 during FIB processing and TEM observation. The risk of escaping was still high. In addition, the cut mesh for mounting and fixing the TEM sample 103 is expensive.
[0009]
Therefore, the present invention has been made in view of the above problems, and an object of the present invention is to provide a sample holder provided with a sample stage and a sample mounting method, in which the mounting position of the TEM sample 103 can be easily reproduced. That is, the mounting position that is the distance from the sample stage of the TEM sample 103 to the surface of the TEM sample without fixing and fixing the TEM sample 103 to the notch mesh 104 and without damaging and losing the TEM sample 103 An object of the present invention is to provide a FIB-TEM shared biaxial tilted sample holder equipped with a sample stage that can keep the angle constant. It is another object of the present invention to provide a sample mounting method capable of easily mounting the TEM sample 103 on the sample stage of the sample holder using a sample mounting jig without damaging the TEM sample 103. And
[0010]
[Means for Solving the Problems]
In order to solve the above problems, a sample holder and a sample mounting method provided with a sample stage according to the present invention include a sample mounting between a pair of side holding members and a back side holding member attached to the sample stage. Insert the TEM sample 103 placed on the jig for mounting without attaching and fixing to the notch mesh, and sandwich the two side portions of the TEM sample 103 in the longitudinal direction between the side holding members that are in contact with it, Further, two points on both side surfaces in the longitudinal direction of the TEM sample are sandwiched by the back surface holding member that comes into contact with the back surface of the TEM sample 103 sandwiched by the side portion holding member, and a total of 3 points of the TEM sample 103 are obtained. A sample holder for holding the TEM sample 103 by being sandwiched between the side holding member and the back surface holding member, when the TEM sample 103 is inserted into a sample stage of the sample holder The TEM sample 103 is sandwiched between the front surface contact portion provided on the side surface holding member that contacts the surface of the TEM sample 103 and the back surface holding member that contacts the back surface portion of the sample. The surface abutting portion abuts on the end of the surface of the TEM sample 103 and has a role as a positioning stopper, and the mounting position of the TEM sample 103 is made constant.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
(First embodiment)
Hereinafter, embodiments of the present invention will be described with reference to FIGS. The sample holder according to the embodiment of the present invention is a sample stage provided in the FIB-TEM shared biaxial tilted sample holder, and is provided with a side holding member and a back holding member, and the TEM sample 103 is attached and fixed to the notch mesh. In addition, a TEM provided on the sample stage is provided with a contact portion as a positioning stopper for making the insertion length of the TEM sample 103 constant when the TEM sample 103 is inserted into the sample stage. By providing the side holding member in contact with the side part of the sample 103 for use, the insertion length from the sample stage 301 to the surface of the TEM sample 103 is made constant, and the TEM is used by using a sample mounting jig. This makes it easy to mount the sample 103 for use.
[0012]
FIG. 6 is a view showing a sample holder HL3 according to the embodiment of the present invention, FIG. 6 (a) is a top view thereof, and FIG. 6 (b) is an enlarged view of the sample stage 301.
[0013]
As can be seen from FIG. 6A, in this embodiment, the sample stage 301 of the sample holder HL3 is formed of a U-shaped flat metal material, and the sample stage 301 has a direction perpendicular to the sample insertion direction v. A pair of side holding members 302 formed facing each other, a back surface holding member 303 formed in a direction parallel to the sample insertion direction v, and a space 301a in which the side holding member 302 and the back surface holding member 303 can expand and contract, And a space 301b. When the TEM sample 103 is not inserted, the front surface contact portion 302a of the side portion holding member 302 and the back surface contact portion 303a of the back surface holding member 303 are connected to the side surface contact portion 302b of the side portion holding member 302 and the back surface holding portion. The member surface 303b is in contact. Here, in the sample insertion direction v, the insertion side is the back surface of the TEM sample 103, and the opposite side to the insertion direction is the surface of the TEM sample 103.
[0014]
As shown in FIG. 6B, a rectangular parallelepiped space 301 a through which the side holding member 302 passes and a back surface holding member 303 pass through the U-shaped flat metal plate base of the sample stage 301. A rectangular parallelepiped space 301b is formed. In the present embodiment, the space 301b is shown as a rectangular parallelepiped, but if the shape of the back surface holding member 303 is a cylinder, the shape of the space 301b may be a cylinder. The distance between the U-shaped cutout portions of the sample stage 301 is a size that sufficiently satisfies the diameter of 3 mmφ that is the TEM observation region.
[0015]
Next, as shown in FIG. 6B, the side holding member 302 is formed so as to face the sample insertion direction v in the vertical direction, and the side surface contact portion 302b and the surface contact portion 302a between the sample surface and The space 301 a between the metal member provided with the sample stage 301 and the spring 301 is provided. The side surface holding member is a portion that holds the side surface both ends of the TEM sample 103 with the front surfaces 302a and 302b. The side contact portion 302b of the side portion holding member 302 and the surface contact portion 302a between the sample surface are formed of a metal material having a flat contact surface and sufficient strength. Surface contact portions 302a with the sample surface are formed perpendicular to each other. Since the side surface contact portion 302b of the side portion holding member 302 has a sufficient surface area with respect to the size of the side surface of the TEM sample 103 cut out by the dicer, the side surface of the sample is intimately sandwiched. Further, in this embodiment, the surface contact portions 302a with the sample surface are projected from the side surface contact portions 302b by about 100 μm, and the side holding members 302 have substantially the same width as the space 301a. And Therefore, the side holding member 302 passes through the space 301a of the sample stage 301 and expands and contracts only in the direction perpendicular to the sample insertion direction v. In the present embodiment, the springs 304 provided on the pair of opposing side holding members 302 have the same expansion and contraction strength and hold the sample side surface with the same load.
[0016]
On the other hand, as shown in FIG. 6B, the back surface holding member 303 is configured by providing a spring 305 between a metal member provided with a back surface contact portion 303 a that contacts the back surface of the sample and the sample table 301. The back surface contact portion 303a with the sample back surface is formed of a flat and sufficiently strong metal material, and the back surface contact portion 303a with the sample back surface is in contact with the back surface of the TEM sample 103 on the flat surface. This is a portion that holds the surface and the back surface of the TEM sample 103 with the contact surface 302a between the back surface contact portion 303a of the back surface holding member 303 and the sample surface of the side portion holding member 302. The back surface holding member 303 performs expansion / contraction movement only in the direction parallel to the sample insertion direction v through the space 301 b of the sample table 301.
[0017]
Next, the sample mounting jig J2 used for sample mounting will be described with reference to FIG. 7A and 7B are diagrams showing a state in which the above-described sample holder HL3 is placed on the sample mounting jig J2, that is, a diagram illustrating a sample mounting method. FIG. 7A is a top view thereof, and FIG. 7B is a side view thereof. It is.
[0018]
In particular, as can be seen from FIG. 7B, the sample mounting jig J2 includes a sample insertion portion 306 and a holder placement portion 307. The holder mounting portion 307 includes a screw 308 that can be adjusted in height at the lower portion. The height of the sample mounting jig J2 is such that the uppermost part of the semicircular projection of the sample insertion portion 306 is below the lower portion of the sample holder HL3, and the holder mounting portion 307 is the same height as the sample holder HL3. You can adjust until In other words, when the height of the holder placement portion 307 is matched with the height of the sample holder HL3, the sample holder HL3 is placed on the upper surface of the holder placement portion 307. The sample insertion portion 306 includes a semicircular protrusion and a groove 310 on which the TEM sample 103 cut out by a dicer can be placed, and is a portion for insertion into the sample holder HL3. The groove 310 on which the TEM sample 103 can be placed has a sufficient depth to allow the TEM sample 103 to be placed and a width that allows the side holding member 302 to move. In other words, in the groove 310 of the sample insertion portion 306, the TEM sample 103 is temporarily placed on the insertion side with the back surface thereof perpendicular to the sample insertion direction v. The sample insertion portion 306 is formed one step higher than the holder placement portion 307. That is, the sample insertion portion 306 has the same height as the sample stage 301 of the sample holder HL3. Further, the semicircular protrusion of the sample insertion portion 306 is sized to fit within the space of the sample stage 301 of the sample holder HL3, and is a metal having sufficient strength when the side portion holding member 302 or the back surface holding member 303 is compressed. Made of material. In the present embodiment, the depth of the groove 310 of the sample insertion portion 306 provided in the sample mounting jig J2 is about 100 nm.
[0019]
Further, as shown in FIG. 7B, when the sample holder HL3 is placed on the sample mounting jig J2, the groove 310 provided in the sample insertion portion 306 of the sample mounting jig J2 described above. The bottom and the lower surfaces of the side portion holding member 302 and the back surface holding member 303 of the sample holder HL3 are substantially the same height. That is, the sample insertion portion 306 of the sample mounting jig J2 and the sample stage 301 of the sample holder HL3 are configured as vertically standing surfaces having substantially the same height. For this reason, the semicircular protrusion 309 of the sample mounting jig J2, the side holding member 302 of the sample holder HL3, and the contact portion 303a of the back surface holding member 303 have substantially the same height. The sample insertion portion 306 can be smoothly inserted into the cut-out space portion of the sample stage 301 while the back surface holding member 303 and the side portion holding member 302 are compressed by the semicircular protrusion 309 of the sample insertion portion 306. It can be done.
[0020]
In the present embodiment, the TEM sample 103 needs to be 3 mm or less capable of TEM observation. Therefore, the size in the longitudinal direction of the sample is 3 mm or less, and the portion to be processed and observed is as central as possible. Cut out with a dicer. The size in the longitudinal direction of the TEM sample 103 according to this embodiment is about 2 mm ± 0.2 mm.
[0021]
(Second Embodiment)
Hereinafter, the sample holder HL3 and the sample mounting method according to the present invention will be described.
[0022]
As shown in FIG. 7, the sample holder HL3 is mounted on the holder mounting portion 307 of the sample mounting jig J2. At this time, the sample stage 301 of the sample holder HL3 is placed so as to be positioned on the semicircular projection 309 side of the sample insertion portion 306 of the sample mounting jig J2. Further, the sample insertion portion 306 is pulled in the direction opposite to the sample table 301.
[0023]
Next, as shown in FIG. 8, the TEM sample 103 is placed in the groove 310 of the sample insertion portion 306 of the sample mounting jig J2 using tweezers P or the like. Then, the sample insertion portion 306 on which the TEM sample 103 is placed is pushed in the sample insertion direction v using tweezers P or the like, so that the sample insertion portion 306 is slid to be inserted into the sample stage 301 of the sample holder HL3. The Then, the semicircular protrusion of the sample insertion portion 306 pushes and shrinks the side holding member 302 in the direction perpendicular to the sample insertion direction v and the back surface holding member 303 in the sample insertion direction v, so that the semicircular protrusion of the sample insertion portion 306 It is inserted into the space of the sample stage 301. Then, as shown in FIG. 9, the surface of the semicircular protrusion 309 of the sample insertion portion 306 reaches the back surface contact portion 303 a of the sample stage 301, and the groove 310 of the sample insertion portion 306 is formed on the side holding member 302. Insert until it reaches the position.
[0024]
As shown in FIG. 10, the side holding member 302 that has been compressed until then slowly extends toward the side surface of the sample, and the side contact portion 302 b comes into contact with the side surface of the TEM sample and stops. That is, when the portion of the sample to be observed reaches the center position of the sample stage 301, the surfaces at both ends of the sample and the surface 302b of the side holding member 302 come into contact with each other and stop naturally.
[0025]
Next, as shown in FIG. 11, when the height of the sample mounting jig J2 including the sample insertion portion 306 is gradually lowered, the back surface holding member 303 that has been pushed by the semicircular protrusion 309 until then. Since the back surface contact portion 303a pushes back the surface of the semicircular protrusion 309, the distance between the back surface of the sample and the back surface contact portion 303a is gradually reduced along the surface of the semicircular protrusion 309 portion.
[0026]
As shown in FIG. 12, when the holder mounting portion 307 is lowered, the back surface contact portion 303a of the back surface holding member 303 is completely held while the side surface of the TEM sample 103 is held between the side surface holding members 302. The TEM sample 103 is pushed in the direction opposite to the sample insertion direction v with the back surface in contact with the sample back surface, and the distance between the sample surface and the surface contact portion 302a of the side holding member 302 is narrowed. Then, when the holder mounting portion 307 is completely lowered, the back surface holding member 302 pushes the sample back surface in the direction opposite to the sample insertion direction v, and the sample is brought into contact with the surface of the side holding member 302 as shown in FIG. The portion 302a and the back surface contact portion 303a of the back surface holding member 303 are sandwiched and held. That is, the insertion length X4 of the TEM sample 103 is held at a fixed position by being sandwiched between the front surface contact portion 302a of the side portion holding member 302 and the back surface contact portion 303a of the back surface holding member 303.
[0027]
As described above, according to the sample holder HL3 according to the present embodiment, the three points that come into contact with the front surface contact portion 302a of the side portion holding member 302, the side surface contact portion 302b, and the back surface contact portion 303a of the back surface holding member 303. In order to hold the TEM sample 103 cut out by the dicer, the TEM sample 103 can be mounted on the sample holder HL3 without being bonded and fixed to the notch mesh, and positioned on the side holding member 302 of the sample holder HL3. Since the abutting portion functioning as a stopper is provided, the TEM sample 103 can be easily attached with the same insertion length X4. That is, when the TEM sample 103 is inserted between the sample tables 301, the sample surface comes into contact with the contact portion 302a, so that the insertion length X4 of the sample can be made constant. For this reason, the TEM sample 103 and the sample holder HL3 do not get into the depths or stop in front. Therefore, the reproducibility of the mounting position of the TEM sample 103 can be obtained in each operation.
[0028]
Furthermore, according to the sample mounting method according to the present embodiment, the sample insertion portion 306 for placing and sliding the TEM sample 103 on the sample mounting jig J2, and the holder mounting for mounting the sample holder HL3. Portion 307, and when the sample holder HL3 is placed on the holder placement portion 307, the sample insertion portion 306 and the sample stage 301 have substantially the same height. The TEM sample 103 can be slid and easily inserted into the sample holder HL3. Therefore, it is not necessary to pick up the TEM sample 103 with the tweezers P, and the possibility of damaging or losing the TEM sample 103 can be extremely reduced. In addition, the operation of inserting the TEM sample 103 between the sample bases 301 in the sample holder HL3 using the tweezers P and the operation of holding by the holding members 302 and 303 provided in the sample base 301 are necessarily necessarily performed simultaneously. Therefore, the mounting of the TEM sample 103 becomes extremely easy.
[0029]
In addition, since the semicircular protrusion 309 that is the contact portion between the side holding member 302 and the back surface holding member 303 is provided on the sample mounting jig J2, the side holding member 302 and the back surface holding member 303 are naturally spread. Can be. For this reason, the mounting operation of the TEM sample 103 to the sample holder HL3 can be further facilitated.
[0030]
【The invention's effect】
As described above, the sample holder of the present invention is provided with the side holding member and the back holding member on the sample stage, and holds the TEM sample between them, thereby fixing the sample to the notch mesh. The process can be omitted, and the cost can be reduced by the notch mesh and contamination by the adhesive can be prevented.
[0031]
Further, according to the present invention, when the TEM sample is mounted on the sample holder using the sample mounting jig provided with the sample insertion portion, the tip of the sample insertion portion of the sample mounting jig is provided. The semicircular protrusions abut against the side holding member and the back holding member of the sample holder and smoothly move the side holding member and the back holding member, thereby facilitating the sample mounting operation. . In addition, the sample mounting jig is provided with a contact portion in contact with the back surface holding member of the sample holder and serving as a stopper in the sample insertion portion, and further, the sample holder is in contact with both ends on the sample surface side to stop the sample holder. By providing the spring with a contact portion having the role of TEM, it is possible to hold the TEM sample sandwiched between almost the same insertion length each time.
[Brief description of the drawings]
FIG. 1 is a schematic diagram of a sample holder in the first prior art.
FIG. 2 is a top view (a) (c) and a cross-sectional view (b) (d) showing a sample stage of a sample holder and a sample mounting method in the first prior art.
FIG. 3 is a schematic diagram of a sample holder in the second prior art.
FIGS. 4A and 4B are a top view and a cross-sectional view showing a sample holder and a sample mounting method of a sample holder in the second prior art.
FIGS. 5A and 5B are a front view and a cross-sectional view showing a sample holder and a sample mounting method of a sample holder in the second prior art.
FIG. 6 is a schematic diagram of a sample holder and an enlarged view for explaining a sample holder of the sample holder in the embodiment of the present invention.
7A and 7B are a front view and a cross-sectional view of a sample holder and a sample mounting jig for explaining a state in which the sample is placed on the sample mounting jig in the sample mounting method according to the embodiment of the present invention.
FIG. 8 is a front view (a) and a cross section of a sample holder and a sample mounting jig for explaining a state in the middle of inserting a sample insertion portion of the sample mounting jig in the sample mounting method in the embodiment of the present invention. Figure (b)
9A and 9B are a front view and a cross-sectional view of a sample holder and a sample mounting jig for explaining a stage in the middle of inserting the sample insertion portion of the sample mounting jig in the sample mounting method according to the embodiment of the present invention. b)
10A and 10B are a front view and a cross-sectional view of a sample holder and a sample mounting jig for explaining a state in which the sample side portion is sandwiched in the sample mounting method according to the embodiment of the present invention.
11A and 11B are a front view and a cross-sectional view of a sample holder and a sample mounting jig for explaining a state in the middle of lowering the sample mounting jig in the sample mounting method according to the embodiment of the present invention.
12A and 12B are a front view and a cross-sectional view of a sample holder and a sample mounting jig for explaining a state in which the back surface holding member is in contact with the back surface of the sample mounting method according to the embodiment of the present invention.
FIGS. 13A and 13B are a front view and a cross-sectional view illustrating a state in which a sample is mounted on a sample holder using a sample mounting jig in the sample mounting method according to the embodiment of the present invention.
[Explanation of symbols]
101 Sample stage
102 Notch mesh fixing part
103 Sample for TEM
104 Notched mesh
105 Ring spring
201 Sample stage
202 Upper holding member
203 Lower holding member
204 Fastener
205 Contact part
301 Sample stage
301a space
301b space
302 Side holding member
302a Surface contact portion
302b Side contact portion
303 Back surface holding member
303a Back contact part
303b Surface of the back surface holding member
304 Spring
305 Spring
306 Sample insertion part
307 Holder placement part
308 screw
309 Semicircular projection
310 groove
HL1 sample holder
HL2 sample holder
HL3 sample holder
J1 Jig
J1a Sample insertion part
J2 Jig for sample mounting
P tweezers
X1 insertion length
X2 insertion length
X3 insertion length
X4 insertion length
SP spring

Claims (11)

In a transmission electron microscope comprising a sample holder having a side holding member and a back holding member on a sample stage,
A sample holder comprising a contact portion between which the surface of the sample contacts between the side holding member and the back surface holding member of the material holder. The sample holder according to claim 1, wherein the sample can be directly mounted on the sample holder. The sample holder is a sample holder that can be tilted biaxially, and a flat metal having a cavity through which the side holding member and the back holding member can respectively pass through the sample stage of the sample holder 2. The sample holder according to claim 1, wherein the sample holder is formed of a plate. The sample holder according to claim 1, wherein the contact portion is formed perpendicular to the side holding member and protrudes one step from the side holding member. The sample holder according to claim 1, wherein each of the side portion holding member and the back surface holding member includes a spring on a surface opposite to a surface in contact with the sample. In a transmission electron microscope comprising a sample holder having a side holding member and a back holding member on a sample stage,
A step of placing the sample on the holder mounting portion;
Contacting the holder mounting part with the back surface holding part;
A step of fixing the holder mounting portion by the side holding member,
A sample mounting method comprising a step of adjusting a height of a sample stage in the holder mounting part and the sample holder to be substantially the same before placing the sample on the holder mounting part. The mounting portion is characterized in that the height of the sample insertion portion of the sample mounting jig can be adjusted from the position where the highest portion of the sample insertion portion is lower than the sample holder mounting portion to the height of the sample stage. The sample mounting method according to claim 6. The sample insertion portion is formed with a groove having a width that allows a side holding member of the sample holder to pass along a direction perpendicular to the insertion direction of the sample for the transmission electron microscope. The sample mounting method according to claim 6, wherein a microscope sample is placed. A semicircular protrusion made of a metal material is formed at the tip of the sample insertion portion to expand the back surface holding member and the side portion holding member of the sample holder as the transmission electron microscope sample is inserted. The sample mounting method according to claim 9, wherein the sample mounting method is performed. When inserting the sample insertion portion, when the groove of the sample insertion portion comes to the position of the side holding member of the sample holder, the side holding member passes through the groove and the side contact portion and the side holding member. 10. The sample according to claim 9, wherein the side of the sample for transmission electron microscope is sandwiched by narrowing a distance from the sample for transmission electron microscope and contacting the side of the sample for transmission electron microscope. Installation method. After sandwiching the side part of the sample for the transmission electron microscope, by lowering the height of the sample holder, the back surface holding member of the sample holder and the back surface of the sample for the transmission electron microscope are projected by the protrusion of the sample insertion part. When the height of the sample holder is completely lowered, the back surface holding member advances and abuts against the back surface of the transmission electron microscope sample, and the surface of the transmission electron microscope sample is A sample mounting method, wherein the transmission electron microscope sample is always held at the same position by abutting against a contact portion as a positioning stopper of a holding member.

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