JP2010190621A - Diffraction efficiency measuring device and diffraction efficiency measuring method - Google Patents
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本発明は、波長分散素子としての回折格子を搭載した回折格子分光器を用いた効率測定器及びこのような効率測定器における回折格子の溝方向調整方法に関する。 The present invention relates to an efficiency measuring instrument using a diffraction grating spectrometer equipped with a diffraction grating as a wavelength dispersion element, and a method of adjusting the groove direction of the diffraction grating in such an efficiency measuring instrument.
回折格子の製品性能を表す指標の一つに回折効率がある。回折効率は、回折格子において、入射光のエネルギーのうち回折光としてどの程度のエネルギーを取り出せるかを示す値である(非特許文献1参照)。
回折効率を測定する効率測定器は、通常、単色光を測定対象の回折格子に入射させ、その回折光を検出器に集光して光強度を検出している。回折格子は、ガラスなどの基板上に一定方向に延びる多数の溝が刻線された光学素子であり、回折効率を測定する前に回折格子の溝方向や回折光の光軸を調整する必要がある。
One of the indexes representing the product performance of a diffraction grating is diffraction efficiency. The diffraction efficiency is a value indicating how much energy can be extracted as diffracted light out of the incident light energy in the diffraction grating (see Non-Patent Document 1).
An efficiency measuring instrument that measures diffraction efficiency usually makes monochromatic light incident on a diffraction grating to be measured and collects the diffracted light on a detector to detect the light intensity. A diffraction grating is an optical element in which a number of grooves extending in a certain direction are engraved on a substrate such as glass, and it is necessary to adjust the groove direction of the diffraction grating and the optical axis of the diffracted light before measuring the diffraction efficiency. is there.
回折格子の溝方向等の調整は、例えば、検出器における回折光の入射位置と共役な位置に調整用の的部材(まとぶざい)を配置し、その的部材に回折光を合わせることにより行う方法が知られている。具体的には、視感度の高い550nmの単色光を回折格子に入射したときに得られる回折光が的部材の水平軸や垂直軸の上に位置するように回折格子の水平方向や垂直方向の傾き等を調整する。
ところが、回折効率が低い回折格子の場合や回折格子の照射域を絞った場合は回折光の強度が小さく、的部材に現れる回折光を視認し難い。このため、的部材の水平軸や垂直軸に回折光を合わせることが難しかった。
Adjustment of the groove direction of the diffraction grating and the like is performed by, for example, arranging an adjustment target member at a position conjugate with the incident position of the diffracted light in the detector and aligning the diffracted light with the target member. The method is known. Specifically, the horizontal and vertical directions of the diffraction grating are set so that the diffracted light obtained when a monochromatic light having a high visibility of 550 nm is incident on the diffraction grating is positioned on the horizontal and vertical axes of the target member. Adjust the tilt.
However, when the diffraction grating has a low diffraction efficiency or when the irradiation area of the diffraction grating is narrowed, the intensity of the diffracted light is small and it is difficult to visually recognize the diffracted light appearing on the target member. For this reason, it is difficult to match the diffracted light to the horizontal axis and vertical axis of the target member.
本発明が解決しようとする課題は、回折格子の溝方向を容易に且つ精度良く調整することができる効率測定器及び回折格子の溝方向調整方法を提供することである。 The problem to be solved by the present invention is to provide an efficiency measuring instrument and a method for adjusting the groove direction of a diffraction grating that can easily and accurately adjust the groove direction of the diffraction grating.
本発明は上記課題を解決するために成されたものであり、回折格子分光器からの光を測定対象である回折格子に入射したときに得られる回折光を検出器で受光することにより当該回折光の強度を検出して前記回折格子の回折効率を測定する効率測定器であって、
a) 前記回折格子分光器に多色光を入射する多色光源と、
b) 前記回折格子分光器からの0次回折光が前記回折格子に入射するように該回折格子を保持するホルダーと、
c) 前記検出器と光学的に共役な位置に配置された、回折格子の溝方向調整用のマークを有する的部材と、
d) 前記ホルダーに保持された前記回折格子の姿勢を調整して、前記測定対象回折格子に0次回折光が入射したときに得られる帯状の回折光の前記的部材における照射位置を前記マークに合わせることにより、前記回折格子の溝方向を調整する調整手段と、
を備えることを特徴とする。
The present invention has been made to solve the above-described problems. The diffraction light obtained when the light from the diffraction grating spectrometer is incident on the diffraction grating to be measured is received by the detector. An efficiency measuring device for detecting the intensity of light and measuring the diffraction efficiency of the diffraction grating,
a) a multicolor light source for injecting multicolor light into the diffraction grating spectrometer;
b) a holder for holding the diffraction grating so that zero-order diffracted light from the diffraction grating spectrometer is incident on the diffraction grating;
c) a target member having a mark for adjusting the groove direction of the diffraction grating, disposed at a position optically conjugate with the detector;
d) Adjusting the position of the diffraction grating held by the holder so that the irradiation position of the band-shaped diffracted light obtained when the 0th-order diffracted light is incident on the diffraction grating to be measured matches the mark. Adjusting means for adjusting the groove direction of the diffraction grating,
It is characterized by providing.
また、本発明は、回折格子分光器からの光を、測定対象である回折格子に入射したときに得られる前記回折格子からの回折光の強度を、検出器で検出することにより前記回折格子の回折効率を測定する効率測定器において、
多色光が前記回折格子分光器に入射したときに得られる0次回折光を前記回折格子に入射させ、
前記回折格子に0次回折光が入射したときに得られる前記回折格子からの帯状の回折光を、前記検出器と光学的に共役な位置に配置された溝方向調整用のマークを有する的部材に照射し、
前記測定対象回折格子の姿勢を調整して、前記的部材における前記帯状回折光の照射位置を前記マークに合わせることにより、前記回折格子の溝方向を調整する方法である。
The present invention also provides a detector for detecting the intensity of the diffracted light from the diffraction grating obtained when the light from the diffraction grating spectrometer is incident on the diffraction grating to be measured. In an efficiency measuring instrument that measures diffraction efficiency,
0-order diffracted light obtained when polychromatic light is incident on the diffraction grating spectrometer is incident on the diffraction grating;
Band-shaped diffracted light from the diffraction grating obtained when zero-order diffracted light is incident on the diffraction grating is applied to a target member having a groove direction adjustment mark disposed at a position optically conjugate with the detector. Irradiated,
It is a method of adjusting the groove direction of the diffraction grating by adjusting the position of the diffraction grating to be measured and matching the irradiation position of the band-like diffracted light on the target member with the mark.
0次回折光には光源からの光の全ての波長成分が含まれているため、1次回折光や2次回折光等の高次回折光に比べると光強度が高い。本発明では、回折格子分光器からの0次回折光を測定対象の回折格子に入射させるようにしたので、効率測定器の既存の構造をそのまま利用しつつ、回折格子への入射光強度及び回折格子に0次回折光が入射したときに得られる帯状の回折光の強度を上げることができる。このため、的部材に照射される帯状の回折光を視認しやすくなり、帯状の回折光の照射位置を溝調整用のマークに容易に且つ精度良く合わせることができる。従って、回折格子の溝方向を高い精度で調整することができる。
尚、本発明の「帯状の回折光」とは、回折格子により分光された各分光が一列に並んだものを指し、白色光が回折格子に入射したときには虹色の帯状の回折光が得られる。
Since all the wavelength components of the light from the light source are included in the 0th-order diffracted light, the light intensity is higher than that of the higher-order diffracted light such as the first-order diffracted light and the second-order diffracted light. In the present invention, since the 0th-order diffracted light from the diffraction grating spectroscope is made incident on the diffraction grating to be measured, the incident light intensity and diffraction grating on the diffraction grating can be used while using the existing structure of the efficiency measuring instrument as it is. The intensity of the band-like diffracted light obtained when zero-order diffracted light is incident on can be increased. For this reason, it becomes easy to visually recognize the strip-shaped diffracted light irradiated on the target member, and the irradiation position of the strip-shaped diffracted light can be easily and accurately aligned with the groove adjustment mark. Therefore, the groove direction of the diffraction grating can be adjusted with high accuracy.
The “band-like diffracted light” of the present invention refers to a line in which each spectrum separated by the diffraction grating is arranged in a line. When white light is incident on the diffraction grating, a rainbow-colored diffracted light is obtained. .
以下、図面を参照して本発明に係る効率測定器の一実施例を説明する。
図1に示すように、本実施例の効率測定器1は、多色光、例えば白色光を出射する光源10とその光路上に配置された分光器12、分光器12の光路上に配置されたスリット14及び測定対象の回折格子16等を保持するホルダー18、前記回折格子16からの回折光等の光強度(エネルギー)を検出する検出器20、検出器20における光入射位置と光学的に共役な位置に配置された的部材22とを備えている。分光器12は、波長分散素子としての回折格子(図示せず)を有している。
An embodiment of the efficiency measuring instrument according to the present invention will be described below with reference to the drawings.
As shown in FIG. 1, the
的部材22は、測定対象の回折格子16の光軸及び溝方向を調整するためのもので、その表面にマークとしての水平軸M1及び垂直軸M2が描かれている(図4参照)。
検出器20は、回折格子16や後述する参照ミラー(図示せず)からの反射光、或いは、回折格子16により波長毎に分光された各分光を受光するようになっており、例えば集光レンズと積分球とを含む。
The
The
ホルダー18には測定対象の回折格子16及び参照ミラーが保持される。ホルダー18は三軸駆動装置24により互いに直交する三軸(X軸、Y軸、Z軸)周りに回転駆動される。具体的には、図2に示すように、三軸駆動装置24はX軸、Y軸、Z軸を中心にホルダー18を回転駆動する。これにより、分光器12からの入射光に対する回折格子16の垂直方向(あおり方向)の傾き(X軸)、水平方向の傾き(Y軸)、回折格子の溝方向の傾き(Z軸)を調整することができる。
回折格子16は、ガラス基板上に樹脂にて溝が形成されたもので、その表面にAl等の反射膜がコーティングされている。参照ミラーは回折格子16の反射膜の反射率を求めるためのもので、回折格子16と同じ材質の反射膜が反射面にコーティングされている。
The
The diffraction grating 16 is a glass substrate with grooves formed of resin, and the surface thereof is coated with a reflective film such as Al. The reference mirror is used to determine the reflectance of the reflective film of the diffraction grating 16, and a reflective film made of the same material as that of the diffraction grating 16 is coated on the reflective surface.
このような効率測定器1では、回折格子16の回折効率の測定は次のように行われる。
(1)参照ミラーの反射強度の測定
まず、ホルダー18に参照ミラーを取り付ける。続いて、参照ミラーに分光器12からの0次光(白色光)を入射させ、得られる反射光が的部材22の水平軸M1と垂直軸M2の交点に位置するように、ホルダー18をX軸及びY軸周りに回転し、参照ミラーの水平方向及びあおり方向の傾きを調整する(図3、図4参照)。そして、参照ミラーの反射光が的部材22の水平軸M1と垂直軸M2の交点に位置したときの参照ミラーの反射強度(Ref)を測定する。
In such an efficiency measuring
(1) Measurement of reflection intensity of reference mirror First, a reference mirror is attached to the
(2)回折格子の回折光強度の測定
(2-1)回折格子の水平方向及びあおり方向の調整
ホルダー18に回折格子16を取り付ける。そして、回折格子16に分光器12からの0次光(白色光)を入射させ、得られる反射光(点状の白色光)が的部材22の垂直軸M2上に位置するように、ホルダー18をY軸周りに回転する。このとき、反射光が的部材22の垂直軸M2付近に現れる角度を予め計算で求め、ホルダー18を大きくY軸周りに回転させた後、的部材22上に実際に現れる反射光を見ながら該反射光が垂直軸M2上に位置するまでホルダー18をゆっくりY軸周りに回転させるとよい。
続いて、反射光が的部材22の水平軸M1上に位置するように、ホルダー18をX軸周りに回転する(図3,図4)。
(2) Measurement of diffraction light intensity of diffraction grating (2-1) Adjustment of horizontal and tilt directions of diffraction grating The diffraction grating 16 is attached to the
Subsequently, the
(2-2)回折格子の溝方向の調整
ここでは、回折格子16に分光器12からの0次光(白色光)を入射させ、回折格子16により波長毎に分光された各分光からなる帯状の回折光(虹色の回折光)を用いて回折格子16の溝方向を調整する。
具体的には、的部材22上に現れる回折格子16からの帯状の回折光の中心波長が550nmとなる角度を予め計算で求め、ホルダー18をY軸周りに回転させる(図5参照)。続いて、帯状の回折光の全体が的部材22の水平軸と重なるようにホルダー18をZ軸周りに回転させる(図6参照)。この結果、回折格子16の溝方向が垂直方向に調整される(図7参照)。
(2-2) Adjustment of Groove Direction of Diffraction Grating Here, the zero-order light (white light) from the
Specifically, the angle at which the center wavelength of the band-like diffracted light from the
(2-3)回折光の強度測定及び相対回折効率の計算
帯状の回折光が的部材22の水平軸に重なった状態における回折光強度(Sam)を測定する。この回折光強度(Sam)を上述の参照ミラーの反射強度(Ref)で除し、相対回折効率(Sam/Ref)を求める。
(2-3) Intensity measurement of diffracted light and calculation of relative diffraction efficiency The diffracted light intensity (Sam) in a state where the band-like diffracted light overlaps the horizontal axis of the
このように、本実施例の効率測定器1では、分光器12からの0次光(白色光)を回折格子16に入射させ、その反射光を用いて回折格子16の水平方向及びあおり方向を調整すると共に、帯状の回折光を用いて回折格子16の溝方向を調整した。分光器12により波長分散されて得られる分光(単色光)に比べると0次光(白色光)の方が光強度が大きいから、的部材22に現れる反射光も従来に比べて明るくなり、的の水平軸や垂直軸に反射光を容易に合わせることができる。また、点状の回折光を水平軸に合わせる作業よりも帯状の回折光を水平軸に重ねる作業の方が容易であり、回折格子16の溝方向を精度良く調整することができる。
As described above, in the
なお、上記実施例は一例であって、本発明の趣旨の範囲で適宜変更や修正が可能である。例えば、帯状の回折光の中心波長は視感度が高い波長であれば良く、550nmに限定されない。 In addition, the said Example is an example, Comprising: A change and correction | amendment are possible suitably in the range of the meaning of this invention. For example, the center wavelength of the strip-shaped diffracted light may be a wavelength with high visibility, and is not limited to 550 nm.
10…光源
12…分光器
16…回折格子
18…ホルダー
20…検出器
22…調整部材
DESCRIPTION OF
Claims (3)
a) 前記回折格子分光器に多色光を入射する多色光源と、
b) 前記回折格子分光器からの0次回折光が前記回折格子に入射するように該回折格子を保持するホルダーと、
c) 前記検出器と光学的に共役な位置に配置された、回折格子の溝方向調整用のマークを有する的部材と、
d) 前記ホルダーに保持された前記回折格子の姿勢を調整して、前記測定対象回折格子に0次回折光が入射したときに得られる帯状の回折光の前記的部材における照射位置を前記マークに合わせることにより、前記回折格子の溝方向を調整する調整手段と、
を備えることを特徴とする効率測定器。 Efficiency of measuring the diffraction efficiency of the diffraction grating by detecting the intensity of the diffracted light by receiving the diffracted light obtained when the light from the diffraction grating spectrometer is incident on the diffraction grating to be measured by the detector. In the measuring instrument,
a) a multicolor light source for injecting multicolor light into the diffraction grating spectrometer;
b) a holder for holding the diffraction grating so that zero-order diffracted light from the diffraction grating spectrometer is incident on the diffraction grating;
c) a target member having a mark for adjusting the groove direction of the diffraction grating, disposed at a position optically conjugate with the detector;
d) Adjusting the position of the diffraction grating held by the holder so that the irradiation position of the band-shaped diffracted light obtained when the 0th-order diffracted light is incident on the diffraction grating to be measured matches the mark. Adjusting means for adjusting the groove direction of the diffraction grating,
An efficiency measuring instrument comprising:
多色光が前記回折格子分光器に入射したときに得られる0次回折光を前記回折格子に入射させ、
前記回折格子に0次回折光が入射したときに得られる前記回折格子からの帯状の回折光を、前記検出器と光学的に共役な位置に配置された溝方向調整用のマークを有する的部材に照射し、
前記測定対象回折格子の姿勢を調整して、前記的部材における前記帯状回折光の照射位置を前記マークに合わせることにより、前記回折格子の溝方向を調整する方法。 Efficiency for measuring the diffraction efficiency of the diffraction grating by detecting with the detector the intensity of the diffraction light from the diffraction grating obtained when the light from the diffraction grating spectrometer is incident on the diffraction grating to be measured A method of adjusting the groove direction of the diffraction grating in a measuring instrument,
0-order diffracted light obtained when polychromatic light is incident on the diffraction grating spectrometer is incident on the diffraction grating;
Band-shaped diffracted light from the diffraction grating obtained when zero-order diffracted light is incident on the diffraction grating is applied to a target member having a groove direction adjustment mark disposed at a position optically conjugate with the detector. Irradiated,
A method of adjusting the groove direction of the diffraction grating by adjusting the position of the diffraction grating to be measured and adjusting the irradiation position of the band-like diffracted light on the target member to the mark.
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CN107884157A (en) * | 2017-11-28 | 2018-04-06 | 维沃移动通信有限公司 | A kind of method for detecting abnormality of diffractive-optical element, mobile terminal |
CN109342028A (en) * | 2018-10-17 | 2019-02-15 | 深圳奥比中光科技有限公司 | Diffraction optical element detection method and system |
CN111766048A (en) * | 2020-07-28 | 2020-10-13 | 深圳先进技术研究院 | Automatic grating diffraction angle spectrum measuring system |
JP2021177158A (en) * | 2020-05-08 | 2021-11-11 | 株式会社島津製作所 | Spectroscope |
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