JP2010187196A5 - - Google Patents

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Publication number
JP2010187196A5
JP2010187196A5 JP2009029885A JP2009029885A JP2010187196A5 JP 2010187196 A5 JP2010187196 A5 JP 2010187196A5 JP 2009029885 A JP2009029885 A JP 2009029885A JP 2009029885 A JP2009029885 A JP 2009029885A JP 2010187196 A5 JP2010187196 A5 JP 2010187196A5
Authority
JP
Japan
Prior art keywords
piezoelectric film
upper electrode
manufacturing
resonator element
vibrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009029885A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010187196A (ja
JP5347546B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2009029885A priority Critical patent/JP5347546B2/ja
Priority claimed from JP2009029885A external-priority patent/JP5347546B2/ja
Publication of JP2010187196A publication Critical patent/JP2010187196A/ja
Publication of JP2010187196A5 publication Critical patent/JP2010187196A5/ja
Application granted granted Critical
Publication of JP5347546B2 publication Critical patent/JP5347546B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009029885A 2009-02-12 2009-02-12 振動片、振動片の製造方法および振動子 Expired - Fee Related JP5347546B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009029885A JP5347546B2 (ja) 2009-02-12 2009-02-12 振動片、振動片の製造方法および振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009029885A JP5347546B2 (ja) 2009-02-12 2009-02-12 振動片、振動片の製造方法および振動子

Publications (3)

Publication Number Publication Date
JP2010187196A JP2010187196A (ja) 2010-08-26
JP2010187196A5 true JP2010187196A5 (zh) 2012-03-08
JP5347546B2 JP5347546B2 (ja) 2013-11-20

Family

ID=42767578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009029885A Expired - Fee Related JP5347546B2 (ja) 2009-02-12 2009-02-12 振動片、振動片の製造方法および振動子

Country Status (1)

Country Link
JP (1) JP5347546B2 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5369741B2 (ja) * 2009-02-12 2013-12-18 セイコーエプソン株式会社 振動片および振動子
JP5685962B2 (ja) 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08178672A (ja) * 1994-12-27 1996-07-12 Canon Inc 振動ジャイロ
JPH09166442A (ja) * 1995-12-15 1997-06-24 Japan Aviation Electron Ind Ltd 振動ジャイロ
JPH10213440A (ja) * 1997-01-29 1998-08-11 Japan Aviation Electron Ind Ltd 振動ジャイロの製造方法及びその方法により製造された振動ジャイロ
JP2000055668A (ja) * 1998-08-06 2000-02-25 Hitachi Ltd 角速度検出センサ
JP5023734B2 (ja) * 2007-02-21 2012-09-12 セイコーエプソン株式会社 圧電振動片の製造方法及び圧電振動素子
JP5067033B2 (ja) * 2007-06-20 2012-11-07 セイコーエプソン株式会社 音叉型振動子、発振器

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