JP2010184739A - Substrate storage container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate storage container in which a rotor is positioned correctly and rotary torque is lessened when a lid is locked. <P>SOLUTION: When the rotor 4 is positioned at the first position corresponding to an unlocked position of the lid, a contact part 16 on the side of the rotor 4 or the side of the lid 2 is not in contact with a working member 17 and until the rotor 4 is rotated from the first position by an operation key to reach the second position, the non-contact state is maintained and until the rotor 4 reaches the second position from the first position, pushing force in the direction opposing to rotary force does not work and when the rotor 4 reaches the second position, the contact part 16 is in contact with the working member 17 and until the rotor is rotated further to reach the third position, the rotor 4 is forced by a forcing means 18 via the working member 17 opposing to rotary force by the operation key and further from the third position, the rotor 4 is forced by the forcing means 18 via the working member 17 so as to reach the fourth position corresponding to a locking position of the lid. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a substrate storage container for storing semiconductor wafers such as silicon, metal compounds, glass and silicon carbide, and substrates such as mask glass and liquid crystal glass, and used for transportation, storage and in-process transport.

  This type of substrate storage container includes a container main body for storing a substrate and a lid for closing the opening of the container main body. The lid includes a rotation cam that rotates about one axis, and the rotation cam. A locking mechanism (holding mechanism) having a locking arm that protrudes and protrudes from the peripheral edge of the lid body is provided in conjunction with the movement of the lid. The rotary cam is provided with a key slot (recessed portion) into which an operation key for rotating the rotary cam about its axis is provided. By rotating the operation key inserted in the key slot, The lid is automatically opened and closed by locking / unlocking the latching arm.

  In such a lid of the substrate storage container, there is a problem that the operation key cannot be inserted because the key slot is not stationary at the correct position. Specifically, the lid is attached so as to cover the opening of the container body, the operation key inserted in the key slot is locked by rotating 90 ° from the unlocked position, and the operation key is removed from the key slot. However, even at an angle close to 90 °, the operation key can be removed from the key slot by looseness between the operation key and the key slot, and therefore, the operation key can be unlocked (unlocked) to be unlocked in the next process. Even if an attempt is made to insert at a position 90 ° apart from the position, the operation key cannot be inserted into the key slot and the process is interrupted.

  For this reason, a technique for forcibly moving the position of the rotating cam to a position corresponding to the locking position of the lid by providing a spring member and biasing the rotating cam has been proposed (for example, Patent Document 1). reference).

Special table 2005-515121 gazette

  However, the substrate storage container has a problem that a large rotational torque is required to rotate the rotating cam during locking.

  The present invention has been made in order to solve such problems, and a rotating cam that enables locking of the lid by rotating around one axis by operating an operation key when the lid is locked. It is an object of the present invention to provide a substrate storage container that can accurately position a rotating body, such as the above, at a position corresponding to the locking position of the lid body and can reduce the rotational torque with respect to the rotating body as compared with the prior art. To do.

  A substrate storage container according to the present invention includes a container main body having an opening for storing a substrate, a lid for closing the opening, and a locking mechanism for locking the lid to the container main body. A lid that rotates by rotating the rotating body by operating the operation key and the engaging portion on the container body side provided in the container body in conjunction with the rotation of the rotating body. In a substrate storage container provided with a lid body, an engagement portion on the lid body side that locks / unlocks the body with respect to the container body, and a position regulation means that controls the rotational position of the rotating body. A contact portion provided on the body side or the lid side, an actuating member provided so as to be able to contact and separate from the contact portion, and an urging means for energizing the actuating member. From the first position corresponding to the unlocking position, the rotating body is rotated in one direction around the axis by the operation key. Until the contact portion reaches the second position where it comes into contact with the actuating member, the contact portion is not contacted, and the urging means rotates the rotating body in one direction by the operation key so that the urging means moves from the second position to the second position. Until the position 3 is reached, the rotary body is urged through the operating member so as to resist the rotational force applied to the rotary body by the operation key, and from the third position, the rotary key is applied to the rotary body by the operation key. The rotating body is urged via the operating member so as to assist the applied rotational force and reach the fourth position corresponding to the locking position of the lid.

  According to such a substrate storage container, when the rotating body is located at the first position corresponding to the unlocking position of the lid body, the contact portion provided on the rotating body side or the lid body side is It is made non-contact with the action | operation member provided in the contact part so that contact / separation is possible. Here, when the rotating body is rotated in one direction around the axis of the rotating body from the first position by the operation key, the contact portion and the actuating member are contacted at the second position and further rotated in one direction. Then, until the third position, the rotating body is urged through the actuating member by the urging means so as to resist the rotational force generated by the operation key. Then, since the rotating body is biased via the actuating member so that the rotating body reaches the fourth position corresponding to the locking position of the lid body by the biasing means, the rotating body is locked when the lid body is locked. It can be accurately positioned at a position corresponding to the locking position of the lid. Further, since the urging force does not act in the direction against the rotational force until the rotating body reaches the second position from the first position by the operation key, the rotational torque on the rotating body can be reduced as compared with the conventional case.

  Here, as a configuration suitably exhibiting the above-described operation, specifically, the contact portion on the rotating body side is a protrusion, and the operating member has a U-shaped groove when viewed in the axial direction. As the protrusion rotates, the protrusion comes into contact with the protrusion, and the protrusion enters the groove and swings around one axis.

  The urging means urges the rotating body in the direction opposite to the one direction via the operating member so that the rotating body returns to the fourth position when the rotating body passes the fourth position by rotation in one direction. With the configuration, when the lid is locked, the rotating body can be more accurately positioned at a position corresponding to the locking position of the lid.

  Further, as a configuration suitably exhibiting the above-described operation, specifically, a contact portion on the rotating body side is a protrusion, and the operation member has a configuration having a cam surface with which the protrusion comes into contact with the rotation of the rotating body. It is done.

  In addition, when the rotating body has a stopper for preventing the rotation body from passing the fourth position due to rotation in one direction, the rotating body is positioned at a position corresponding to the locking position of the lid body when the lid body is locked. Can be positioned more accurately.

  Here, in the substrate storage container of the present invention, the container body stores, transports, transports, transports various substrates (for example, 300 mm or 450 mm semiconductor wafer, glass wafer, mask glass, liquid crystal glass, storage disk, etc.). It can be a front open box type that has an opening in the front for storage, and is usually used with the top and bottom open and housed in an outer box, and tilted when storing / removing various precision substrates and articles It may be a top open box type. The container body may be transparent, translucent, or opaque, and can be appropriately provided with a transparent window on the back wall, side wall, ceiling, and the like. Further, the lid may be formed to be transparent, translucent, or opaque.

  Moreover, the rotary body can employ various disk shapes, ring shapes, and the like. In addition, the lid side engaging portion for locking / unlocking the lid body with respect to the container body advances and retreats from the top, bottom, front, back, left, right, four corners, etc. of the lid body peripheral surface. It can be set as the structure which performs engagement / release with respect.

  Further, as the locking mechanism, for example, a rotating body that is supported by a lid and rotates about one axis by operation of an operation key, and is slidably supported by the lid and connected to the rotating body. A plurality of connecting bars that advance and retract from the inside to the outside of the lid based on rotation, and are swingably supported in the vicinity of the opening provided on the peripheral surface of the lid, and can be rotated at the tip of each connecting bar A locking roller that is connected and protrudes and retracts from the opening of the lid based on the advance and retreat of the coupling bar and functions as an engagement portion on the lid side can be provided.

  Further, the locking mechanism is, for example, a rotating body that is supported by a lid and rotates about one axis by operation of an operation key, and is supported by the lid so as to be slidable via a bearing and directly / indirectly by the rotating body. A plurality of connecting shafts that are connected to each other and advance / retreat from the inner side to the outer side of the lid body based on the rotation of the rotating body, and are rotatably supported by the respective connecting shafts. It can also be configured to include a roller that appears and disappears from an opening provided on the surface and functions as an engaging portion on the lid side. Here, when the rotating body and the connecting shaft are indirectly connected, for example, the rotating body and the connecting shaft can be connected by a crank locking portion or the like.

  Further, the locking mechanism, for example, on the condition that dust generation is suppressed, is supported by the cover body and rotates with one axis as an axis by operating the operation key, and is slidably supported by the cover body and one gear. A plurality of connecting bars that are connected to the gears via other gears and that advance and retract from the inner side to the outer side of the lid based on the rotation of one gear, and the forward and backward movements of the connecting bars provided at the distal ends of the connecting bars. And a locking claw that appears and disappears from the opening provided on the peripheral surface of the lid body and functions as an engagement portion on the lid body side, and the end of the connecting bar is displaced from the axis of another gear It can also be set as the structure supported so that it can rotate.

  Further, the contact portion on the rotating body side can be provided as a protruding portion such as a bar or a pin in the vicinity of the axis of the rotating body, on the front surface, the back surface, or the peripheral edge portion. Moreover, if it is a rotary body side, it can also provide in components other than a rotary body. Further, the protrusions can be provided at one or a plurality of locations with respect to one rotating body, and when provided on a part other than the rotating body such as a connecting bar, the movement of the rotating body is indirectly restricted. It will be.

  As the urging means, one or a plurality of spring members made of coil springs, leaf springs, etc. can be used in addition to those made of various elastomers, rubbers and thermoplastic resins having a spring function.

  The operation keys can be operated automatically or manually.

  Thus, according to the present invention, when the lid is locked, the rotating body can be accurately positioned at a position corresponding to the locking position of the lid, and the rotational torque with respect to the rotating body can be reduced as compared with the conventional case. .

It is a perspective view which shows the board | substrate storage container which concerns on 1st embodiment of this invention, and is a perspective view which shows the state which has closed the opening of the container main body with the cover body. It is a perspective view which shows the locking mechanism accommodated in the cover body in FIG. It is a front view which shows the locking mechanism accommodated in the cover body in FIG. 1, and is a front view which shows the state which the rotation reel is located in the 1st position corresponding to the unlocking position of a cover body. FIG. 4 is a front view showing a state where the rotary reel is rotated from the state of FIG. 3 and is located at a second position. FIG. 5 is a front view showing a state in which the rotary reel is further rotated in the same direction from the state of FIG. 4 and is located at a third position. FIG. 6 is a front view showing a state where the rotary reel is further rotated in the same direction from the state of FIG. 5 and is located at a fourth position corresponding to the locking position of the lid. It is a longitudinal cross-sectional view which shows the rotating reel in FIG. 2, and its vicinity. It is a perspective view which expands and shows the A section in FIG. It is a perspective view which shows the urging means in FIG. It is a perspective view which shows the action | operation member in FIGS. It is a front view which shows the locking mechanism accommodated in the cover body of the substrate storage container which concerns on 2nd embodiment of this invention, and the rotation reel is located in the 1st position corresponding to the unlocking position of a cover body. It is a front view which shows a state. FIG. 12 is a front view showing a state where the rotary reel is rotated from the state of FIG. 11 and is located at a second position. FIG. 13 is a front view showing a state where the rotary reel is further rotated in the same direction from the state of FIG. 12 and is located at a third position. FIG. 14 is a front view showing a state where the rotary reel is further rotated in the same direction from the state of FIG. 13 and is located at a fourth position corresponding to the locking position of the lid. It is a perspective view which shows the action | operation member in FIGS. It is a front view which shows the locking mechanism accommodated in the cover body of the board | substrate storage container which concerns on 3rd embodiment of this invention, and the state which the rotary reel is located in the 4th position corresponding to the locking position of a cover body FIG. It is a front view which shows the locking mechanism accommodated in the cover body of the board | substrate storage container which concerns on 4th embodiment of this invention, and the state where the rotation reel is located in the 4th position corresponding to the locking position of a cover body FIG.

  Hereinafter, a preferred embodiment of a substrate storage container according to the present invention will be described with reference to FIGS. In each figure, the same symbol is attached to the same element, and duplicate explanation is omitted.

  1 to 10 show the first embodiment of the present invention, FIGS. 11 to 15 show the second embodiment of the present invention, FIG. 16 shows the third embodiment of the present invention, and FIG. 4th Embodiment of this invention is each shown, First, 1st embodiment shown in FIGS. 1-10 is described.

  FIG. 1 is a perspective view showing a substrate storage container according to the first embodiment of the present invention, FIG. 2 is a perspective view showing a locking mechanism in the lid body, and FIGS. 3 to 6 show that the rotary reel corresponds to the unlocking position. FIG. 7 is a longitudinal sectional view showing the rotating reel and its vicinity, and FIG. 8 is an enlarged perspective view of part A in FIG. FIG. 9 is a perspective view showing the urging means, and FIG. 10 is a perspective view showing the operating member.

  A substrate storage container 100 shown in FIG. 1 includes a container main body 1 that can store therein a plurality of (for example, 25, 26) precision substrates (not shown) made of, for example, a 300 mm or 450 mm semiconductor wafer, and the container main body. A lid 2 that is detachably mounted so as to close the front opening of 1 and opens and closes the opening, and as shown in FIGS. 1 and 2, the lid 2 is externally attached by a lid opening / closing device (not shown). And a pair of left and right locking mechanisms 3 that lock / unlock the container body 1 by operating the operation keys (not shown). Such a substrate storage container 100 is used for transportation, storage, or transportation in a process of forming an electronic circuit on a precision substrate or a process of processing.

  The container body 1 shown in FIG. 1 is formed into a transparent, translucent, or opaque front open box type using a predetermined resin, and each side wall is stepped inward as it goes to the rear (back side in the figure). As a result, the area of the back wall is set smaller than the area of the horizontally long front, and a plurality of precision substrates are arranged and accommodated in the vertical direction or the horizontal direction.

  Teeth (mounting shelves; not shown) having a substantially square shape or a substantially semicircular arc shape in plan view are juxtaposed on the inner surfaces of both side walls of the container body 1 in a vertical direction. A pair of left and right teeth support the precision substrate substantially horizontally. These teeth can be formed integrally with the container body 1 or can be formed as separate parts and attached to the container body 1. Further, the teeth on each side wall may be divided into a plurality of pieces and spaced apart.

  Further, although not shown in the front side and the rear center of the bottom surface of the container body 1, the substrate storage container 100 is formed in, for example, a substantially inverted M shape, a substantially inverted Y shape, a recessed oval shape, or the like. Positioning tools for positioning on the processing apparatus to be mounted are provided. Although this positioning tool may be provided in the container main body 1, it can also be provided in the bottom plate 6 attached to the bottom part of the container main body 1. FIG. The bottom plate 6 is formed into a polygonal shape in plan view as shown in the drawing, a substantially concave shape in plan view, a Y shape in plan view, or the like, and the size is changed as necessary.

  At the center of the ceiling of the container body 1, a robotic flange 7, which is a generally rectangular holding part in a plan view, is integrally or detachably attached. As a result, the substrate storage container 100 is automatically transported in the process. In addition, thick transfer handles 8 are selectively mounted on both side walls of the container body 1, and the substrate storage container 100 is transferred by the operator by gripping the transfer handle 8 by the operator.

  The container body 1, the teeth, the positioning tool, the bottom plate 6, the robotic flange 7, and the transport handle 8 are molded using, for example, polycarbonate, polyetherimide, polyetheretherketone, or cyclic olefin resin. The For example, a conductivity imparting agent such as carbon is appropriately added to these materials.

  The lid body 2 includes a concave fitting plate 10 (see FIG. 2) that is detachably fitted into a rim portion 9 that forms a peripheral edge on the opening side of the container body 1, and a fitting body 10 as shown in FIG. A cover plate 11 detachably mounted on the front side (front side in FIG. 1) of the fitting plate 10 so as to cover the pair of left and right locking mechanisms 3 set in the recesses of the combined plate 10. .

  As shown in FIG. 2, the fitting plate 10 is formed in a substantially rectangular shape in a laterally long front view with its four corners rounded and chamfered, and the peripheral wall is configured to have, for example, a substantially L-shaped cross section to ensure rigidity. An endless seal gasket (not shown) mounted on the peripheral wall is deformed and tightly fitted into the rim portion 9 of the container body 1 shown in FIG. 1 to ensure sealing performance. Although not shown, this seal gasket is, for example, a hollow frame-shaped base material, a tapered bent piece projecting outwardly in a tongue shape while being inclined from the base material, and a fitting plate 10 projecting from the base material. Of the substrate storage container 100, which is composed of a single (or a plurality of juxtaposed) fitting ribs that are tightly fitted in a fitting action groove formed in the peripheral wall of the plate in a pressure acting state and sealed by the lid 2. It functions as a one-way seal that prevents the gas containing dust from flowing into the inside of the substrate storage container 100 from the outside when the pressure difference occurs inside and outside, and allows the gas to flow out from the inside of the substrate storage container 100 to the outside. To do.

  As such a seal gasket, for example, a silicone rubber, a fluoro rubber, a thermoplastic polyester elastomer, a thermoplastic polyolefin elastomer, or the like is used so as to be elastically deformable.

  Further, as shown in FIG. 2, the fitting plate 10 has a concave portion for housing the locking mechanism 3 on the front side (the front side in the drawing). The fitting plate 10 is formed with a cylindrical rib 11 (see FIG. 7) for rotatably supporting a later-described rotating reel 4 constituting the locking mechanism 3 around the axis of the rotating reel 4. Yes.

  The fitting plate 10 has a pair of cam rails 15 for guiding the advance and retreat of the connecting bar 14 at positions corresponding to both side surfaces of the connecting bar 14 to be described later constituting the locking mechanism 3 in the vertical direction. 2, 7, and 8, a shaft portion 20 is provided for pivotally supporting a later-described operating member 17 constituting the locking mechanism 3 as shown in FIGS. 2, 7, and 8. ing.

  An elastic front retainer (not shown) is attached to the center of the rear surface of the fitting plate 10, and the front retainer sandwiches the front and rear peripheral edges of the precision substrate between the teeth of the container body 1. To support it elastically.

  As shown in FIG. 1, the cover plate 11 is formed in a flat plate shape, and is placed on a mounting boss 21 (see FIG. 2) provided on the fitting plate 10 and firmly screwed to the fitting plate 10. Is done. The cover plate 11 is provided with a through operation hole 22 for enabling a locking / unlocking operation from a lid opening / closing device provided in a processing apparatus on which the substrate storage container 100 is mounted. An operation key of the lid opening / closing device is inserted into 22 and rotated.

  On the back surface of the cover plate 11, a cam rail (not shown) is provided at a position facing the cam rail 15 provided on the fitting plate 10 with a gap, and the cam rail and the fitting plate 10 on the cover plate 11 side are provided. When the cover plate 11 is attached to the fitting plate 10, the cam rail 15 on the side constitutes a three-dimensional cam rail that opposes through a gap, and the opposing surface of each cam rail is used as a cam surface to guide the connecting bar 14.

  The lid 2 is molded using, for example, polycarbonate, fluorine-containing polycarbonate, polybutylene terephthalate, polyether ether ketone, polyether imide, or polyacetal.

  As shown in FIGS. 1 to 3, the locking mechanism 3 is connected to a rotating reel (rotating body) 4 that rotates about one axis by operating an operation key in the lid body 2 and the rotation of the rotating reel 4. And a position for controlling the rotational position of the rotary reel 4 and a connecting bar 14 having an engaging portion 12 that locks / unlocks the lid 2 with respect to the container body 1 by engaging / disengaging the container body 1 side. And a restricting means 5.

  As shown in FIGS. 2, 3, and 7, the rotary reel 4 is formed in a disc shape, and is fitted with an operation key inserted through a through operation hole 22 of the cover plate 11 in the center portion on the surface side. The operated recess 23 is formed in a substantially rectangular shape when viewed from the front, and a pair of guide grooves 24 for the connecting bar 14 are provided along the circumferential direction between the central portion and the peripheral portion. The guide groove 24 is formed at a predetermined angle in the rotary reel 4 and is curved in a semicircular arc shape in which the connecting bar 14 can advance and retreat as the rotary reel 4 rotates.

  Further, as shown in FIG. 7, a cylindrical rib 19 that is rotatably supported by the cylindrical rib 11 of the fitting plate 10 described above is provided at the center of the back surface of the rotary reel 4.

  The rotary reel 4 having such a configuration is rotated 90 ° clockwise or counterclockwise so as to be unlocked / locked by an operation key inserted into the operated recess 23 through the through operation hole 22 of the cover plate 11. Is done.

  As shown in FIGS. 2 and 3, the connecting bar 14 is formed in a substantially rectangular plate shape corresponding to the width between the pair of cam rails 15, and the longitudinal center line extending in the vertical direction is a rotating reel. 4 is arranged between the pair of cam rails 15, 15 so as to coincide with the axis of 4. Pins 26 protrude from both side surfaces of the connecting bar 14, and each cam rail 15 is directly or indirectly through a rotation roller for preventing dust generation that is rotatably attached to the pins 26. Between the cam surface and the cam surface of the cam rail of the cover plate 11 opposite to the cam surface.

  The connecting bar 14 is provided with a cylindrical engagement pin 27 that protrudes toward the rotary reel 4 that is the back side at the inner end thereof. The cylindrical engagement pin 27 is directly or cylindrically engaged. It is loosely fitted in the guide groove 24 of the rotary reel 4 indirectly through a dust roller for preventing dust generation that is rotatably mounted on the pin 27.

  In the connecting bar 14 having such a configuration, the cylindrical engagement pin 27 is guided to the guide groove 24 of the rotary reel 4 by the rotation of the rotary reel 4, and thereby moves forward and backward.

  Further, the connecting bar 14 is provided with the engaging portion 12 at the outer end portion thereof, and the engaging portion 12 is pivotally supported by the fitting plate 10 so as to be swingable. The engaging portion 12 protrudes and retracts from an opening 25 (see FIG. 2) provided on the peripheral surface of the lid body 2 by the vertical movement of the connecting bar 14, and is provided in the rim portion 9 of the container body 1 when it appears. The engagement hole 13 (engagement portion; see FIG. 1) is engaged.

  If a part of the tip of the engaging portion 12 is inclined in the thickness direction so that the contact area that contacts the engaging hole 13 decreases, the engaging portion 12 enters the engaging hole 13 and engages. When combined, the resistance can be reduced. A roller can also be provided here.

  The rotating reel 4 and the connecting bar 14 having the engaging portion 12 are formed using, for example, polycarbonate, fluorine-containing polycarbonate, polybutylene terephthalate, polyether ether ketone, polyether imide, or polyacetal.

  As shown in FIGS. 2 and 3, the position restricting means 5 that constitutes the locking mechanism 3 and controls the rotational position of the rotary reel 4 is provided with a protrusion 16 (contact portion; see FIG. 7) provided on the rotary reel 4 side. And an actuating member 17 provided so as to be capable of coming into contact with and separating from the protrusion 16 and an urging means 18 for energizing the actuating member 17.

  As shown in FIGS. 3 and 7, the protrusion 16 of the rotating reel 4 is a cylindrical protrusion provided at a predetermined position on the peripheral side of the back surface of the rotating reel 4, and is provided at a predetermined position in the circumferential direction. (Details will be described later).

  As shown in FIGS. 8 and 10, the actuating member 17 is configured as a substantially rectangular flat plate, and has a groove 28 having a U-shape when viewed in the axial direction (front view) at one end thereof. A cylindrical projection 29 for connecting to the biasing means 18 is provided on the surface on the end side, and is further pivotably supported by the shaft portion 20 of the fitting plate 10 between the groove 28 and the cylindrical projection 29. A cylindrical boss 80 is provided. The groove 28 is configured such that the protrusion 16 of the rotary reel 4 can enter, and the opening is expanded compared to the back side portion so that the protrusion 16 can easily enter. Widely formed.

  As shown in FIGS. 8 and 9, the urging means 18 is formed as an elastic component that uses a thermoplastic resin and has a substantially V-shape when viewed in the axial direction (front view). Cylindrical portions 30 and 31 are respectively provided at both ends of the urging means 18, and a cylindrical projection 29 on the other end side of the operating member 17 enters the cylindrical hole of one cylindrical portion 30, and the other cylindrical portion The shaft portion 32 protruding from the surface of the concave portion of the fitting plate 10 enters the cylindrical hole of the portion 31.

  The urging means 18 can be, for example, L-shaped or J-shaped in addition to the substantially V-shape, and of course can have other configurations.

  Then, the rotation of the rotary reel 4 causes the projection 16 to enter and engage with the groove 28 of the operation member 17, and the operation member 17 uses the shaft portion 20 as an axis while the projection 16 and the groove 28 engage with each other. By swinging, the biasing means 18 swings about the shaft portion 32 as an axis, and the biasing force works to control the rotational position of the rotary reel 4 (details will be described later).

  Note that the swinging range of the operating member 17 may be regulated by bringing a stopper (not shown) protruding from the surface of the concave portion of the fitting plate 10 against the operating member 17. Such restriction of the swing range of the operating member 17 can also be performed by providing a protrusion on the rotary reel 4.

  3-6 is each front view which shows the locking mechanism 3 accommodated in the cover body 2, and is specifically each front view which removed the cover plate 11 from the fitting plate 10, FIG. FIG. 4 is a front view showing a state where the reel 4 is located at a first position corresponding to the unlocking position of the lid body 2.

  In this state, the rotary reel 4 is positioned at a first position where the operated recess 23 is horizontally long, and the cylindrical engagement pin 27 of the connecting bar 14 is at one end of the guide groove 24 of the rotary reel 4. The actuating member 17 is positioned so as to face the direction in which the protrusion 16 of the rotating reel 4 can enter the groove 28 according to the rotation (counterclockwise rotation) for locking the rotating reel 4, The protrusion 16 of the rotary reel 4 and the groove 28 of the actuating member 17 are positioned so as to be separated from each other by 45 ° in the rotation angle of the rotary reel 4 (not contacted), and the connecting bar 14 is located on the innermost side. The engagement portion 12 at the distal end is in a state of being recessed from the opening 25 (see FIG. 2) of the lid body 2 and being separated from the engagement hole 13 (see FIG. 1) of the container body 1.

  Here, in order to lock the lid body 2 to the container body 1, the lid body 2 is fitted into the container body 1, and an operation key is inserted into the operated recess 23 through the through operation hole 22 of the cover plate 11 by the lid body opening / closing device. When the rotation is counterclockwise (one direction), the protrusion 16 of the rotary reel 4 approaches the groove 28 of the actuating member 17, and the cylindrical engagement pin 27 of the connecting bar 14 rotates the rotating reel. 4, the connecting bar 14 slides outward, and the engaging portion 12 at the tip of the connecting bar 14 emerges from the opening 25 of the lid 2.

  Then, when the operation key is rotated 45 ° counterclockwise from the unlocking position (the first position shown in FIG. 3) and the rotating reel 4 is positioned at the second position, as shown in FIG. The protrusion 16 comes into contact with the groove 28 of the actuating member 17 and the engagement is started. That is, the urging force by the urging means 18 does not act on the operation key until the rotating reel 4 reaches the second position from the first position.

  Further, when the operation key is rotated counterclockwise, the protrusion 16 of the rotating reel 4 is brought into an engaging state in which the protrusion 16 of the rotating reel 4 enters the groove 28 of the operating member 17 as the rotating reel 4 rotates. Oscillates clockwise with the shaft portion 20 as an axis, and by this oscillation, the biasing means 18 oscillates counterclockwise with the shaft portion 32 as an axis while narrowing the V-shaped opening angle from the initial state. Is compressed. That is, the urging means 18 exerts an urging force against the operation key against the counterclockwise rotational force, and the urging force increases as the rotating reel 4 rotates counterclockwise. .

  Further, when the operation key is rotated counterclockwise by 25 ° (70 ° counterclockwise from the unlocked position in FIG. 1) and the rotary reel 4 is positioned at the third position, as shown in FIG. The four projecting portions 16 are in the engaged state where they enter the groove 28 of the actuating member 17 most deeply, and the urging force of the urging means 18 resists the counterclockwise rotational force by the operation key. That is, until the rotary reel 4 reaches the third position from the second position, the biasing means 18 exerts a biasing force against the counterclockwise rotational force by the operation key.

  Further, when the operation key is rotated counterclockwise, the protrusion 16 of the rotary reel 4 engages with the groove 28 of the operating member 17 and enters the groove 28 of the operating member 17 in the deepest manner in FIG. At this time, the actuating member 17 further swings clockwise with the shaft portion 20 as an axis, and the biasing means 18 counteracts with the shaft portion 32 as an axis by this swing. While swinging further clockwise, the V-shaped opening angle is expanded to return to the original position. In other words, the rotating reel 4 is biased counterclockwise opposite to the time when the rotating reel 4 is moved from the second position to the third position, and the operation key has the same direction as the rotational force. The urging force acts to assist the rotation, and the rotary reel 4 is urged and pressed to reach a fourth position corresponding to the locking position of the lid 2.

  Then, as shown in FIG. 6, when the rotary reel 4 reaches the fourth position (when rotated 90 ° counterclockwise from the unlocked position in FIG. 1), the groove 28 of the actuating member 17 is substantially sideways. Thus, the pressing force against the rotating reel 4 by the urging means 18 is eliminated. That is, until the rotary reel 4 reaches the fourth position from the third position, the biasing means 18 exerts a biasing force in the same direction as the counterclockwise rotational force by the operation key. It will be in the fourth position without stopping before the fourth position corresponding to the locking position of the body 2 (for example, an angle close to 90 ° as described in the prior art).

  At this time, the connecting bar 14 is located on the outermost side and slides, and the engaging portion 12 at the tip thereof engages with the engaging hole 13 of the container body 1, whereby the lid of the container body 1 is covered. The body 2 is locked.

  Even if the rotary reel 4 slightly passes the fourth position shown in FIG. 6, in this case, the actuating member 17 is moved to the shaft portion by the further counterclockwise movement of the protrusion 16 of the rotary reel 4. Since the oscillating means 18 swings clockwise around the axis 20 and the opening angle of the V-shape is widened from the initial state, an urging force is generated to return to the initial state, and the rotating reel 4 is reversed. It rotates in the direction (direction opposite to one direction) and returns to the fourth position.

  Thus, in this embodiment, when the rotary reel 4 is located at the first position corresponding to the unlocking position of the lid body 2, the protrusion 16 provided on the rotary reel 4 side is When the rotary reel 4 is rotated in the locking direction from the first position by the operation key, it is not in contact with the operating member 17 provided so as to be able to come into contact with and separate from the projection 16, and the projection 16 at the second position. When the actuating member 17 comes into contact and is further rotated in the same direction, the rotating reel 4 is attached via the actuating member 17 by the biasing means 18 so as to resist the rotational force of the operation key until the third position. When the rotating reel 4 is further rotated in the same direction, the rotating reel 4 is moved from the third position so that the rotating reel 4 can now reach the fourth position corresponding to the locking position of the lid 2 by the biasing means 18. Is biased through the actuating member 17, so that the lid 2 During the lock, it can be positioned precisely at a position corresponding the rotation reel 4 in the locking position of the cover 2. Further, since the urging force does not act in the direction against the rotational force until the rotating reel 4 reaches the second position from the first position by the operation key, the rotational torque with respect to the rotating reel 4 can be reduced as compared with the conventional case. .

  In the present embodiment, the biasing means 18 operates the rotating reel 4 so that the rotating reel 4 returns to the fourth position after the fourth position corresponding to the locking position of the lid 2. Since the member 17 is biased in the direction opposite to the rotation direction via the member 17, the rotary reel 4 can be more accurately positioned at the fourth position when the lid 2 is locked.

  Furthermore, in the present embodiment, as described above, the position restricting means 5 (biasing means 18) can be urged and controlled so that the rotary reel 4 is positioned at the fourth position. There is no possibility that the rotating reel 4 malfunctions due to a shock and unlocks the lock. In addition, when the lid 2 is repeatedly opened and closed with respect to the container body 1, it is possible to prevent the process from being interrupted because the operation key cannot be inserted.

  FIGS. 11-14 is a front view which shows the locking mechanism accommodated in the cover body of the board | substrate storage container which concerns on 2nd embodiment of this invention, and a rotation reel moves from the position corresponding to an unlocking position to a locking position. FIG. 15 is a perspective view showing the operating member, and FIG. 15 is a front view showing the state of being rotated to the corresponding position.

  The difference between the substrate storage container of the second embodiment and that of the first embodiment is that a position restricting means 55 that is a modified configuration of the position restricting means 5 of the first embodiment is used.

  In this position restricting means 55, instead of the operating member 17 of the first embodiment, the cam surface 57a with which the protrusion 16 provided on the rotating reel 4 comes into contact with and separates from the rotating reel 4 as the rotating reel 4 rotates. And an urging means 58 formed on a compression spring is used instead of the substantially V-shaped urging means 18 of the first embodiment.

  As shown in FIGS. 11 and 15, the actuating member 57 is a plate-like member that extends in the up-down direction and is formed in a substantially rectangular shape when viewed from the front, and includes the shaft center of the rotating reel 4 and the center portion of the fitting plate 10. The side surface on the rotating reel 4 side has a cam surface 57a that gently curves so that the central portion thereof is convex toward the rotating reel 4, and this cam surface 57a is a predetermined surface described later. It is configured to contact and separate from the protrusion 16 on the rotary reel 4 side at the timing.

  Further, the urging means 58 is disposed corresponding to both ends in the longitudinal direction of the actuating member 57, and one end thereof is provided in each of both ends in the longitudinal direction of the actuating member 57 and extends in a hole 57b extending in the left-right direction in FIG. While being inserted and supported, the other end is locked to the fitting plate 10, and the actuating member 57 is biased toward the rotary reel 4 side.

  And the protrusion 57c which is provided in the both end surfaces of the longitudinal direction of the action | operation member 57, respectively, and protrudes in an up-down direction is provided in the guide rail 60 extended in the expansion-contraction direction (illustration left-right direction) of the biasing means 58. The operation member 57 is guided and slid in the expansion / contraction direction of the biasing means 58.

  Even in the substrate storage container of the second embodiment configured as described above, in the unlocked state, the rotating reel 4 is in the first position corresponding to the unlocked position of the lid 2 as shown in FIG. The protrusion 16 of the rotary reel 4 and the cam surface 57a of the actuating member 57 are not in contact with each other, and are positioned so as to be separated from each other by 30 ° in the rotation angle of the rotary reel 4.

  Then, in order to lock, the operation key inserted in the operated recess 23 is rotated counterclockwise on the left rotation reel 4 in the figure and clockwise on the right rotation reel 4 in the figure. Then, the protrusion 16 of the rotary reel 4 approaches the cam surface 57a of the actuating member 57, and the operation key is rotated 30 ° from the unlocking position (the first position shown in FIG. 11), and the rotary reel 4 is moved to the first position. When positioned at the position 2, the protrusion 16 of the rotary reel 4 comes into contact with one end side (the lower end side in the drawing) of the cam surface 57a of the operating member 57, as shown in FIG.

  Further, when the operation key is rotated in the same direction, the projecting portion 16 contacting the cam surface 57a pushes the operating member 57 while compressing the biasing means 58. In other words, the urging force acts on the operation key against the rotational force by the urging means 58, and the urging force increases as the rotating reel 4 rotates.

  Furthermore, when the operation key is rotated in the same direction by 30 ° (60 ° from the unlocked position in FIG. 11) and the rotary reel 4 is positioned in the third position, as shown in FIG. Is located at the apex of the cam surface 57a of the actuating member 57, and the urging force of the urging means 58 that resists the rotational force by the operation key is maximized. In other words, until the rotary reel 4 reaches the third position from the second position, the biasing means 58 exerts a biasing force against the rotational force by the operation key.

  Further, when the operation key is rotated in the same direction, the protrusion 16 of the rotary reel 4 is pushed back by the urging force of the urging means 58 while contacting the cam surface 57a of the operating member 57. In other words, the rotary reel 4 is biased in the opposite direction to that while the rotary reel 4 is moving from the second position to the third position, and the operation key is applied in the same direction as the rotational force. The force acts to assist the rotation, and the rotary reel 4 is urged and pressed to reach a fourth position corresponding to the locking position of the lid 2.

  Then, as shown in FIG. 14, when the rotary reel 4 reaches the fourth position (when the rotary reel 4 is rotated by 90 ° from the unlocking position in FIG. 1), the protrusion 16 is formed on the cam surface 57 a of the operating member 57. While being located on the other end side (the upper end side in the figure), the operating member 57 returns to the initial position (position shown in FIG. 11), and the pressing force against the rotating reel 4 by the urging means 58 is eliminated. That is, until the rotary reel 4 reaches the fourth position from the third position, the biasing means 58 exerts a biasing force in the same direction as the rotational force by the operation key, and the rotary reel 4 locks the lid 2. It will be positioned at the fourth position without stopping before the fourth position corresponding to the position (for example, an angle close to 90 ° as described in the prior art).

  Incidentally, the connecting bar 14 advances and retreats in the same manner as in the first embodiment in conjunction with the rotation of the rotary reel 4, and the lid 2 is locked / unlocked with respect to the container body 1.

  Even in such a second embodiment, the peripheral position of the guide groove 24 of the rotary reel 4 is set so as not to exceed the fourth position, or a rotation stopping mechanism is provided, so that it is almost the same as the first embodiment. Similarly, when the lid 2 is locked, the rotary reel 4 can be accurately positioned at the fourth position corresponding to the locking position of the lid 2, and the rotational torque with respect to the rotary reel 4 is less than that in the prior art. it can.

  FIG. 16 is a front view showing the locking mechanism housed in the lid of the substrate storage container according to the third embodiment of the present invention, in which the rotary reel is positioned at the fourth position corresponding to the locking position of the lid. It is a front view which shows the state which is carrying out.

  The difference between the substrate storage container of the third embodiment and that of the second embodiment is that a stopper 66 is provided to prevent the rotating reel 4 from passing the fourth position due to rotation in the locking direction. This is the point that the position restricting means 65 is configured by the stopper 66, the protrusion 16 of the second embodiment, the operating member 57, and the urging means 58.

  The stopper 66 is a columnar protrusion provided on the back surface of the rotary reel 4 as with the protrusion 16, and is arranged at a predetermined distance from the protrusion 16 along the periphery of the rotary reel 4.

  According to the third embodiment having such a stopper 66, the rotating reel 4 reaches the fourth position, and the protrusion 16 on the rotating reel 4 side is the other end side (the upper end side in the figure) of the cam surface 57a of the operating member 57. ) And the protrusion 16 is no longer pressed, and at the same time, the stopper 66 on the rotary reel 4 comes into contact with one end side (the lower end side in the figure) of the cam surface 57a of the cam member 57 and tries to rotate further. Since it is urged to return to the fourth position by the stopper 66, the rotary reel 4 can be positioned more accurately at the fourth position.

  The present invention has been specifically described based on the embodiment. However, the present invention is not limited to the above embodiment. For example, in the third embodiment, the stopper 66 is provided on the rotating reel 4 side. However, instead of the stopper 66, a stopper is provided on the fitting plate 10 side at a predetermined distance from the protrusion 16 along the peripheral edge of the rotary reel 4, and the rotary reel 4 rotates and the fourth reel is rotated. When the position is reached, the stopper on the side of the fitting plate 10 may come into contact with the protrusion 16 of the rotating reel 4 to prevent further rotation of the rotating reel 4 in the same direction. However, the same effect as in the case of the stopper 66 can be obtained.

  In the first and second embodiments, one end of the urging means 18 and 58 of the position regulating means 5 and 55 is locked to the lid body 2 side, and the operation is pressed by the urging means 18 and 58. In the embodiment, the members 17 and 57 are brought into contact with the protrusion 16 which is the contact portion of the rotary reel 4, but on the contrary, as shown in FIG. 17, the operating member 70 and the urging means for urging the operation member 70 are provided. 71 may be provided separately or integrally with the rotary reel 4, and a fixed cam surface 73, which is a contact portion that contacts the operating member 70, may be provided on the lid 2 side. In such a configuration, the position restricting means 99 is constituted by the fixed cam surface 73 as a contact portion provided on the lid 2 side, the operating member 70 provided on the rotating reel 4 side, and the urging means 71. Is configured.

  In the first embodiment, the position restricting means 5 including the projecting portion 16 that is the contact portion, the actuating member 17, and the biasing means 18 is configured so that the rotary reel 4 is in a fourth position corresponding to the locking position of the lid body 2. Although it also has a function as a rotation stopper that urges it to be positioned toward, it can be elastically deformed to the rotary reel 4 separately from the operating member 70, the urging means 71 and the fixed cam surface 73 as shown in FIG. The elastic locking piece 74 is provided separately or integrally, and an engagement rib 75 is provided on the lid body 2 side to engage with the elastic locking piece 74. When the rotary reel 4 passes the fourth position, the elastic locking piece is provided. Even if 74 is contracted and then extended to return to the fourth position, the same effect as in the first embodiment can be obtained.

  Further, as an example of the rotation stopping mechanism, for example, an engagement protrusion having a spherical surface, a hemispherical surface, a polygonal shape, or the like is provided on the upper surface, the lower surface, or the outer periphery of the rotating reel 4 so as to elastically support the roller component. The lid is formed with a locking rib or cam surface having an arc shape, a U shape, a V shape, an inclined surface or the like to be engaged therewith, and the ending means for urging the rotating reel 4 by the urging means Thus, they can be engaged and the rotary reel 4 can be positioned and held at a predetermined stop position.

  When the roller component is provided on the rotating reel 4 and the roller component is always in contact with the lid 2, the tip of the roller component is used in order to reduce the wear during movement and to ensure the movement. It is possible to form a rail groove concentrically with the rotating reel 4 so that the portion fits in a little so that the roller component fits into the recess formed in the terminal portion. Specifically, the part that forms the rail groove is made of a material that wears less than the material that forms the lid 2, for example, a thermoplastic resin to which polyacetal, polyethylene, or fluororesin is added. preferable.

  DESCRIPTION OF SYMBOLS 1 ... Container main body, 2 ... Cover body, 3 ... Locking mechanism, 4 ... Rotating reel (rotating body), 5, 55, 65, 99 ... Position control means, 10 ... Fitting plate, 11 ... Cover plate, 12 ... Engagement Joint part (engagement part on the lid side), 13 ... Engagement hole (engagement part on the container body side), 16 ... Projection part (contact part), 17, 57, 70 ... Actuating member, 18, 58, 71 ... Biasing means, 028 ... U-shaped groove, 57a ... cam surface, 66 ... stopper, 73 ... fixed cam surface (contact portion), 100 ... substrate storage container,

Claims (5)

A container body having an opening and containing a substrate; a lid body for closing the opening; and a locking mechanism for locking the lid body to the container body, wherein the locking mechanism operates an operation key. The lid body is configured to engage / release with respect to a rotating body that rotates about one axis as an axis, and an engaging portion on the container body side provided in the container body in conjunction with the rotation of the rotating body. In the substrate storage container provided with the lid body, the lid side engaging portion for locking / unlocking the container body, and the position regulating means for controlling the rotational position of the rotating body,
The position restricting means includes
A contact portion provided on the rotating body side or the lid body side;
An actuating member provided detachably on the contact portion;
Biasing means for biasing the actuating member,
The actuating member is
The rotating body is rotated in one direction around the axis by the operation key from a first position corresponding to the unlocking position of the lid body, and the contact portion comes into contact with the operating member. Until the position of is reached, the contact portion is not contacted,
The biasing means is
Until the rotating body is rotated in the one direction by the operation key and reaches the third position from the second position, the rotation is performed so as to resist the rotational force applied to the rotating body by the operation key. Urging the body through the actuating member;
From the third position, the rotary body is assisted such that the rotational force applied to the rotary body by the operation key and the rotary body reaches a fourth position corresponding to the locking position of the lid body. Is energized through the operating member. The contact portion on the rotating body side is a protrusion,
The actuating member has a U-shaped groove as viewed in the axial direction, and the protrusion comes into contact with the rotation of the rotating body, and the protrusion enters the groove and swings around one axis. 2. The substrate storage container according to claim 1, wherein the substrate storage container moves.   The urging means moves the rotating body opposite to the one direction through the actuating member so that the rotating body returns to the fourth position when the rotating body passes the fourth position by rotation in the one direction. 3. The substrate storage container according to claim 1, wherein the substrate storage container is biased in the direction. The contact portion on the rotating body side is a protrusion,
The substrate storage container according to claim 1, wherein the operating member has a cam surface with which the protrusion comes into contact with the rotation of the rotating body.   The substrate storage container according to claim 4, further comprising a stopper for preventing the rotating body from passing the fourth position due to the rotation in the one direction.

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