JP2010181405A - ボロメータ検出器の製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 41
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims abstract description 222
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 149
- 238000000034 method Methods 0.000 claims abstract description 47
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 230000009467 reduction Effects 0.000 claims abstract description 24
- 230000003647 oxidation Effects 0.000 claims abstract description 21
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 21
- 239000012528 membrane Substances 0.000 claims abstract description 18
- 230000008859 change Effects 0.000 claims abstract description 7
- 229910052742 iron Inorganic materials 0.000 claims description 52
- 238000005530 etching Methods 0.000 claims description 18
- 238000001020 plasma etching Methods 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 230000008569 process Effects 0.000 claims description 13
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 11
- 230000001590 oxidative effect Effects 0.000 claims description 11
- 238000000137 annealing Methods 0.000 claims description 10
- 239000011029 spinel Substances 0.000 claims description 10
- 229910052596 spinel Inorganic materials 0.000 claims description 10
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 9
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
- 230000005670 electromagnetic radiation Effects 0.000 claims description 5
- VBMVTYDPPZVILR-UHFFFAOYSA-N iron(2+);oxygen(2-) Chemical group [O-2].[Fe+2] VBMVTYDPPZVILR-UHFFFAOYSA-N 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052756 noble gas Inorganic materials 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 238000010292 electrical insulation Methods 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 238000009413 insulation Methods 0.000 abstract description 3
- 235000013980 iron oxide Nutrition 0.000 description 85
- 239000010408 film Substances 0.000 description 32
- 238000006722 reduction reaction Methods 0.000 description 21
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 description 9
- 230000005855 radiation Effects 0.000 description 8
- 150000002500 ions Chemical class 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 229910002091 carbon monoxide Inorganic materials 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 6
- 238000001039 wet etching Methods 0.000 description 6
- 229910000859 α-Fe Inorganic materials 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 238000002161 passivation Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 230000002378 acidificating effect Effects 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910001566 austenite Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 238000007667 floating Methods 0.000 description 3
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 3
- 238000010849 ion bombardment Methods 0.000 description 3
- -1 magnetite Fe 3 O 4 Chemical compound 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 238000004377 microelectronic Methods 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 238000003331 infrared imaging Methods 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- VTLYFUHAOXGGBS-UHFFFAOYSA-N Fe3+ Chemical compound [Fe+3] VTLYFUHAOXGGBS-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004541 SiN Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical group [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000004873 anchoring Methods 0.000 description 1
- 239000012736 aqueous medium Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000004320 controlled atmosphere Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
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- 238000007306 functionalization reaction Methods 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hcl hcl Chemical compound Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011019 hematite Substances 0.000 description 1
- 229910052595 hematite Inorganic materials 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- LIKBJVNGSGBSGK-UHFFFAOYSA-N iron(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Fe+3].[Fe+3] LIKBJVNGSGBSGK-UHFFFAOYSA-N 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052950 sphalerite Inorganic materials 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 238000007725 thermal activation Methods 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 229910001935 vanadium oxide Inorganic materials 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
- G01J5/023—Particular leg structure or construction or shape; Nanotubes
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- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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- G01J5/04—Casings
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
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- G01J5/046—Materials; Selection of thermal materials
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- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
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Abstract
【解決手段】固着点によって基板に固定された断熱アームを用いて基板の上方に浮かされた膜(1)を装備したボロメータ検出器を製造するため設計された方法である。膜(1)は、少なくとも半導体性酸化鉄を含む塩基を備えた熱に敏感な薄層(9)を有する。この方法は、半導体性酸化鉄の薄層(9)の一部の鉄原子の酸化の程度を変更するために半導体性酸化鉄の薄層(9)の局所還元及び/又は酸化の工程を少なくとも含む。
【選択図】図11
Description
Claims (13)
- 固着点(4)を介して基板(2)に固定された断熱アーム(3)を用いて前記基板(2)の上方に浮かされ、熱に敏感な半導体性酸化鉄の薄層(9)を有する膜(1)を装備したボロメータ検出器を製造する方法であって、
前記半導体性酸化鉄の薄層(9)の一部の鉄原子の酸化の程度を変更するために、前記半導体性酸化鉄の薄層(9)を局所還元及び/又は酸化する工程を少なくとも1つ備えることを特徴とするボロメータ検出器を製造する方法。 - 前記半導体性酸化鉄の薄層(9)を局所還元する工程が少なくとも1つの金属鉄領域(14,14a,14b,14c)を形成することを特徴とする、請求項1に記載のボロメータ検出器を製造する方法。
- 還元が、還元性雰囲気中で、300℃未満の温度で行われるアニールであることを特徴とする、請求項2に記載のボロメータ検出器を製造する方法。
- 還元が、少なくとも一つの還元種又は希ガスの存在下で反応性イオンエッチング技術を用いて得られる衝撃であることを特徴とする、請求項2に記載のボロメータ検出器を製造する方法。
- 前記酸化鉄が少なくとも部分的にスピネル構造化されていることを特徴とする、請求項1から4のいずれか一項に記載のボロメータ検出器を製造する方法。
- 前記半導体性酸化鉄の薄層(9)を局所酸化する工程が完全酸化された酸化鉄の薄層(16)を形成することを特徴とする、請求項1から5のいずれか一項に記載のボロメータ検出器を製造する方法。
- 前記完全酸化された酸化鉄の薄層(16)が酸化鉄Fe2O3塩基を有することを特徴とする、請求項6に記載のボロメータ検出器を製造する方法。
- 前記局所酸化する工程が、少なくとも1つの酸化種の存在下で反応性イオンエッチング技術を用いて得られる衝撃であることを特徴とする、請求項1から7のいずれか一項に記載のボロメータ検出器を製造する方法。
- 前記膜(1)が少なくとも1つの窒化チタンTiNベースの電極(7)を備え、
前記半導体性酸化鉄の薄層(9)を局所還元することにより、前記電極(7)と接触し、前記半導体性酸化鉄の薄層(9)の厚さの方向に貫通する金属鉄領域(14a)を形成することを含むことを特徴とする、請求項1から8のいずれか一項に記載のボロメータ検出器を製造する方法。 - 前記窒化チタンベースの電極(7)が、前記局所還元の間に形成され、前記半導体性酸化鉄の薄層(9)の前記金属鉄領域(14a)と接触した金属チタン領域を備えることを特徴とする、請求項9に記載のボロメータ検出器を製造する方法。
- 前記半導体性酸化鉄の薄層(9)を局所還元することにより、繰り返し同一パターンを形成し、所定のピッチ(D)で規則的に配置され、前記ピッチ(D)に対応する電磁放射が検出されることを可能にする反射フィルタを形成する、数個の金属鉄領域(14b)を形成することを含むことを特徴とする、請求項1から10のいずれか一項に記載のボロメータ検出器を製造する方法。
- 前記基板(2)は2個のアンテナ(15)を設けられ、前記半導体性酸化鉄の薄層(9)は抵抗素子(17)を設けられ、
前記半導体性酸化鉄の薄層(9)を局所還元することにより、前記抵抗素子(17)に電気的に接続され、前記アンテナ(15)と容量性結合を形成する2個の導電性の金属鉄領域(14c)を形成することと、
前記半導体性酸化鉄の薄層(9)を局所酸化することにより、前記2個の金属鉄領域(14c)と前記抵抗素子(17)とを取り囲む、電気的絶縁性及び熱伝導性がある領域を形成する完全酸化された酸化鉄の薄層(16)を形成することと、
を連続的に含むことを特徴とする、請求項1から11のいずれか一項に記載のボロメータ検出器を製造する方法。 - 半導体性酸化鉄の薄層(9)を前記膜(1)に堆積させることと、
少なくとも1つの金属鉄領域(14)を形成するために、マスク(13)を介して前記半導体性酸化鉄の薄層(9)を局所還元することと、
前記金属鉄領域(14)を選択的化学エッチングすることと、
を連続的に含むことを特徴とする、請求項1から12のいずれか一項に記載のボロメータ検出器を製造する方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0900215A FR2941297B1 (fr) | 2009-01-19 | 2009-01-19 | Procede de fabrication d'un detecteur bolometrique |
FR09/00215 | 2009-01-19 |
Publications (2)
Publication Number | Publication Date |
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JP2010181405A true JP2010181405A (ja) | 2010-08-19 |
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JP2013152114A (ja) * | 2012-01-24 | 2013-08-08 | Seiko Epson Corp | 熱型電磁波検出素子チップおよび熱型電磁波検出器並びに電子機器 |
KR102708213B1 (ko) * | 2022-03-29 | 2024-09-23 | 한국생산기술연구원 | 밴드패스필터 일체형 mems 기반의 적외선 센서 및 이의 제조방법 |
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FR2864065B1 (fr) * | 2003-12-22 | 2006-02-24 | Univ Toulouse | Utilisation de ferrites spinelles comme materiau sensible pour dispositifs bolometriques de detection de l'infrarouge. |
FR2941297B1 (fr) * | 2009-01-19 | 2011-02-11 | Commissariat Energie Atomique | Procede de fabrication d'un detecteur bolometrique |
US8354642B2 (en) * | 2010-10-13 | 2013-01-15 | International Business Machines Corporation | Monolithic passive THz detector with energy concentration on sub-pixel suspended MEMS thermal sensor |
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US9766127B2 (en) | 2013-07-15 | 2017-09-19 | The Aerospace Corporation | Terahertz detection assembly and methods for use in detecting terahertz radiation |
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FR3087886B1 (fr) * | 2018-10-24 | 2020-10-09 | Commissariat Energie Atomique | Procede de fabrication d'un microbolometre a materiau thermistance a base d'oxyde de vanadium presentant des performances ameliorees |
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KR102708213B1 (ko) * | 2022-03-29 | 2024-09-23 | 한국생산기술연구원 | 밴드패스필터 일체형 mems 기반의 적외선 센서 및 이의 제조방법 |
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CN101782441B (zh) | 2014-03-12 |
US7927908B2 (en) | 2011-04-19 |
JP5546879B2 (ja) | 2014-07-09 |
US20100184245A1 (en) | 2010-07-22 |
EP2208975A1 (fr) | 2010-07-21 |
FR2941297B1 (fr) | 2011-02-11 |
EP2208975B1 (fr) | 2011-06-22 |
CN101782441A (zh) | 2010-07-21 |
FR2941297A1 (fr) | 2010-07-23 |
ATE514061T1 (de) | 2011-07-15 |
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