JP2010175495A - Calibration device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a calibration device for being properly calibrated even when a measuring machine provided with an attitude change means is present. <P>SOLUTION: A shape measuring machine includes: a surface plate for mounting a measured object; an image probe for imaging the measured object through an object lens; the attitude change means for changing attitude of the image probe; and a moving means for moving the image probe. The calibration device 2 includes; a base 21 installed on the surface plate; a spinning disk 22 for rotatably providing a shaft substantially parallel to the optical axis of the object lens on the base 21 as a rotating shaft; and a linear member 24 functioning as a reference line substantially orthogonal to the optical axis of the object lens. The calibration device 2 properly calibrates in a sufficient range even when the measuring machine provided with the attitude change means is present since it includes the spinning disk 22 and the linear member 24. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a calibration apparatus, and more particularly to a calibration apparatus used for calibration of a measuring machine that measures an object to be measured based on an image.

Conventionally, a surface plate for placing an object to be measured, a probe having a contact that contacts the object to be measured, and a moving means for holding and moving the probe, and bringing the contact into contact with the object to be measured A shape measuring machine for measuring the surface shape of an object to be measured is known.
Further, in such a shape measuring machine, the imaging means for imaging the object to be measured via the objective lens is held by the moving means instead of the probe, the object to be measured is imaged by the imaging means, and based on the captured image A device that measures the shape of an object to be measured in a non-contact manner is known. In such a shape measuring machine, when a probe is replaced with an imaging means, for example, calibration is performed by using a calibration device as described in Patent Document 1.

  In the calibration device described in Patent Document 1, a sensor calibration device (calibration device) is fixed to a table (surface plate) of a measuring machine, and an outer surface of a cylinder provided in the sensor calibration device is detected by an image sensor (imaging means). The measuring machine is calibrated by taking an image. Specifically, the outer surface of the cylinder is formed so that the cross-sectional shape orthogonal to the central axis is D-shaped, and the outer surface of the cylinder is imaged by an image sensor. Then, the center position of the arc portion is calculated to calibrate the position of the image sensor, and the inclination of the straight line portion is calculated to calibrate the inclination of the image sensor.

JP 2001-165630 A

  By the way, in recent years, a shape measuring machine including a probe and a posture changing unit that can change the posture of the imaging unit is used. As such posture changing means, for example, the optical axis of the objective lens in the imaging means, and two orthogonal axes orthogonal to the optical axis are rotation axes (hereinafter, the rotation axis around the optical axis is the A axis, There is known a configuration in which a posture is changed by rotating a probe or an image pickup means as a rotation axis around the axis B). When the A axis is rotated, the axial direction of the B axis is also rotated along with the rotation of the A axis.

However, the calibration device described in Patent Document 1 has a problem that it is not possible to appropriately calibrate a measuring machine including such a posture changing unit.
Specifically, when calibrating such a measuring machine, the posture changing means images the calibration device while rotating the imaging means around the A axis and the B axis, and the posture changing means rotates about each axis. It is necessary to calibrate the error and the inclination of the imaging means. However, since the calibration device described in Patent Document 1 is fixed to the surface plate of the measuring machine, there is a problem that calibration cannot be performed within a sufficient range.

  An object of the present invention is to provide a calibration apparatus that can appropriately calibrate even a measuring instrument having posture changing means.

  A calibration apparatus according to the present invention includes a surface plate on which a measurement object is placed, an imaging unit that images the measurement object via an objective lens, and a moving unit that moves the imaging unit. A calibration device used for calibration of a measuring instrument that measures the object to be measured based on an image captured in this manner, and a base that is installed on the surface plate, and an axis that is substantially parallel to the optical axis of the objective lens And a rotation plate provided rotatably on the base, and a reference line provided on the rotation plate and substantially orthogonal to the optical axis of the objective lens.

According to such a configuration, when the posture changing unit is configured to change the posture by rotating the imaging unit around the two axes of the A axis and the B axis as described above, the imaging unit is rotated. In a state where it is not, the rotation axis of the turntable and the A axis are substantially parallel, and the reference line and the B axis are substantially parallel.
In the case where the reference line is picked up by the image pickup means while rotating the image pickup means only around the A axis by the posture changing means, the reference line is the rotation of the image pickup means in the image picked up by the image pickup means. It will rotate accordingly. Therefore, by calculating the inclination of the reference line, it is possible to calculate the rotation error around the A axis of the posture changing means and the inclination of the imaging means.

In addition, when the reference line is picked up by the image pickup unit while the image pickup unit is rotated only around the B axis by the posture change unit, the reference line is the rotation error of the posture change unit around the B axis and the image pickup unit. If there is no inclination, the inclination is substantially constant in the image picked up by the image pickup means. Therefore, by calculating the inclination of the reference line, it is possible to calculate the rotation error around the B axis of the attitude changing means and the inclination of the imaging means.
Further, in the case where the reference line is picked up by the image pickup means while rotating the image pickup means around the B axis in a state where the image pickup means is rotated around the A axis by the posture changing means, the rotation around the A axis is performed. Rotate the turntable by the same angle. According to this, the rotation error about the B axis of the attitude changing unit and the tilt of the imaging unit are the same as when the reference unit is imaged with the imaging unit while the imaging unit is rotated only about the B axis by the attitude changing unit. Can be calculated.
Therefore, according to the present invention, since the calibration apparatus includes the rotating disk and the reference line, even a measuring machine including posture changing means can appropriately calibrate within a sufficient range.

In the present invention, it is preferable that the reference line is a linear member stretched over the rotating disk.
According to such a configuration, the reference line can be provided at a position separated from the turntable. Therefore, even when the imaging means is rotated about 90 ° around the B axis by the attitude changing means, The reference line can be imaged by the imaging unit without contacting the imaging unit. Therefore, the calibration device can appropriately calibrate the measuring instrument within a sufficient range.

In this invention, it is preferable that the said linear member is made into the width | variety below the focal depth of the said objective lens.
According to such a configuration, when the imaging unit is rotated about the B axis by the posture changing unit, it is possible to appropriately capture an image of the linear member from any angle. Therefore, the calibration device can appropriately calibrate the measuring instrument within a sufficient range.

In the present invention, it is preferable that the rotating disk is provided with at least two spherical portions at predetermined positions.
According to such a configuration, since the rotation angle of the rotating disk can be measured by holding the probe on the moving means and bringing the contactor into contact with the spherical portion, the calibration device has sufficient rotation accuracy of the rotating disk. Even if this is not the case, the measuring machine can be properly calibrated.

  In the present invention, a plate-like member that is rotatably provided on the rotating disk with an axis substantially parallel to the reference line as a rotation axis is provided, and the reference line is provided on a surface of the plate-like member on the imaging means side. It is preferable.

That is, instead of the above-described configuration in which the reference line is a linear member, the reference line is provided on the plate member.
According to such a configuration, when the posture changing unit is configured to change the posture by rotating the imaging unit around the two axes of the A axis and the B axis as described above, the imaging unit is rotated. In a state where the image pickup means side of the plate-like member is not substantially perpendicular to the optical axis of the objective lens, the rotation axis of the rotating disk and the A axis are substantially parallel, and the reference line and the B axis are It becomes almost parallel.
In the case where the reference line is picked up by the image pickup means while rotating the image pickup means only around the A axis by the posture changing means, the reference line is the rotation of the image pickup means in the image picked up by the image pickup means. It will rotate accordingly. Therefore, by calculating the inclination of the reference line, it is possible to calculate the rotation error around the A axis of the posture changing means and the inclination of the imaging means.

Further, when the reference line is imaged by the imaging unit while rotating the imaging unit only around the B axis by the posture changing unit, the plate member is rotated by the same angle as the rotation angle around the B axis. The surface on the imaging means side of the plate member can be made substantially orthogonal to the optical axis of the objective lens. Here, if there is no rotation error around the B axis of the posture changing means and the inclination of the image pickup means, the reference line has a substantially constant inclination in the image picked up by the image pickup means. Therefore, by calculating the inclination of the reference line, it is possible to calculate the rotation error around the B axis of the attitude changing means and the inclination of the imaging means.
Further, in the case where the reference line is picked up by the image pickup means while rotating the image pickup means around the B axis in a state where the image pickup means is rotated around the A axis by the posture changing means, the rotation around the A axis is performed. Rotate the turntable by the same angle. According to this, the rotation error about the B axis of the attitude changing unit and the tilt of the imaging unit are the same as when the reference unit is imaged with the imaging unit while the imaging unit is rotated only about the B axis by the attitude changing unit. Can be calculated.

In the present invention, it is preferable that the plate-like member is provided with at least three spherical portions at predetermined positions.
According to such a configuration, since the posture of the plate-like member can be measured by holding the probe on the moving means and bringing the contactor into contact with the spherical portion, the calibration device includes the rotating disk and the plate-like member. Even when the rotational accuracy of the measurement is not sufficient, the measuring machine can be appropriately calibrated.

[First Embodiment]
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a first embodiment of the invention will be described with reference to the drawings.
FIG. 1 is a diagram showing a shape measuring machine 1 and a calibration device 2 according to the first embodiment of the present invention. FIG. 2 is an enlarged view showing the calibration device 2. In FIG. 1 and FIG. 2, the upper direction is the + Z-axis direction, and two axes orthogonal to the Z-axis are described as the X-axis and the Y-axis, respectively. The same applies to the following drawings.
As shown in FIG. 1, the shape measuring machine 1 includes a surface plate 11 on which an object to be measured (not shown) is placed, an image probe 12 as an imaging unit that images the object to be measured via an objective lens 121, The image probe 12 includes an attitude changing unit 13 that changes the attitude and a moving unit 14 that holds and moves the image probe 12 via the attitude changing unit 13. It is a measuring machine that measures an object to be measured based on an image.

  The posture changing means 13 includes an optical axis of the objective lens 121 in the image probe 12 (an axis in the Z-axis direction, hereinafter referred to as A-axis) and an orthogonal axis (an axis in the X-axis direction, hereinafter referred to as B-axis) orthogonal to the optical axis. The posture is changed by rotating the image probe 12 about the two axes of When the A axis is rotated, the axial direction of the B axis is also rotated along with the rotation of the A axis.

  The moving means 14 extends from both ends of the surface plate 11 in the X-axis direction in the + Z-axis direction, and is supported by the two columns 141 provided so as to be slidable along the Y-axis direction. A beam 142 extending along the direction, a slider 143 formed in a cylindrical shape extending along the Z-axis direction so as to be slidable along the X-axis direction, and the inside of the slider 143 And a ram 144 provided to be slidable in the slider 143 along the Z-axis direction. Accordingly, the moving unit 14 includes a plurality of moving axes that move the image probe 12 in the X, Y, and Z axis directions. The ram 144 holds the proximal end side of the image probe 12 via the posture changing means 13 at the end on the −Z axis direction side. The posture changing means 13 can hold a probe having a contact in addition to the image probe 12.

  As shown in FIGS. 1 and 2, the calibration device 2 is used for calibration of the shape measuring machine 1, and is substantially parallel to the base 21 installed on the surface plate 11 and the optical axis of the objective lens 121. A rotating plate 22 that is rotatably provided on the base 21 with a central axis (axis in the Z-axis direction) as a rotation axis, two columnar members 23 provided along the X-axis direction at two locations on the rotating plate 22, A linear member 24 stretched between the columnar members 23 and two reference spheres 25 provided at predetermined positions are provided.

Although not shown, the base 21 and the turntable 22 have an adjustment mechanism for adjusting the inclination of the upper surface of the turntable 22. In the present embodiment, the upper surface of the turntable 22 is adjusted to be substantially parallel to the XY plane. Further, it is desirable that the rotation accuracy of the turntable 22 is sufficiently higher than the accuracy of the moving means 14 in the shape measuring machine 1.
The linear member 24 is set to a width equal to or smaller than the focal depth of the objective lens 121 and is stretched along the X-axis direction at a predetermined height position in each columnar member 23. That is, the linear member 24 functions as a reference line that is substantially orthogonal to the optical axis of the objective lens 121.
Each reference sphere 25 includes a columnar portion 251 that is erected along the X-axis direction on the outer peripheral side of each columnar member 23 in the turntable 22, and a spherical portion 252 that is provided above the columnar portion 251.

FIG. 3 is a diagram illustrating a state in which the image probe 12 is not rotated. 3A is a diagram showing the shape measuring instrument 1 and the calibration device 2, and FIG. 3B is a diagram showing an image Im captured by the image probe 12. FIG.
In order to calibrate the shape measuring machine 1 by using the calibration device 2, first, as shown in FIG. 3A, the image probe 12 is not rotated. At this time, the rotation angle around the A axis is 0 °, and the rotation angle around the B axis is 0 °. In this state, the rotation axis of the turntable 22 and the A axis are substantially parallel, and the linear member 24 and the B axis are substantially parallel.
In this state, when the linear member 24 is imaged by the image probe 12, as shown in FIG. 3B, in the image Im imaged by the image probe 12, the linear member 24 is cross hair ( It is substantially parallel to the alternate long and short dash line in FIG.

FIG. 4 is a diagram illustrating a state in which the linear member 24 is imaged while the image probe 12 is rotated only around the A axis by the posture changing unit 13. 4A is a diagram showing the shape measuring instrument 1 and the calibration device 2, and FIG. 4B is a diagram showing an image Im captured by the image probe 12. As shown in FIG.
When the linear member 24 is imaged while rotating the image probe 12 only around the A axis by the posture changing means 13 (FIG. 4A), the linear member 24 is imaged as shown in FIG. 4B. In the image Im imaged by the probe 12, the image probe 12 rotates so as to be inclined with respect to the cross hair according to the rotation of the image probe 12. Therefore, by calculating the inclination of the linear member 24, it is possible to calculate the rotation error around the A axis of the posture changing means 13 and the inclination of the image probe 12.

FIG. 5 is a diagram illustrating a state in which the linear member 24 is imaged while the image probe 12 is rotated only around the B axis by the posture changing unit 13. 5A is a diagram showing the shape measuring instrument 1 and the calibration device 2, and FIG. 5B is a diagram showing an image Im captured by the image probe 12. As shown in FIG.
When the linear member 24 is imaged while the image probe 12 is rotated only around the B axis by the posture changing means 13 (FIG. 5A), the linear member 24 has a rotation error around the B axis and the image probe 12. If there is no inclination, the inclination is substantially constant in the image Im imaged by the image probe 12. However, in reality, since there is a rotation error about the B axis and the inclination of the image probe 12, the linear member 24 is included in the image Im imaged by the image probe 12, as shown in FIG. Incline against the crosshair. Therefore, by calculating the inclination of the linear member 24, the rotation error around the B axis and the inclination of the imaging means can be calculated.

  In FIG. 6, the linear member 24 is imaged by the image probe 12 while the image probe 12 is rotated about the B axis while the image probe 12 is rotated by a predetermined angle around the A axis by the posture changing means 13. FIG. 6A is a diagram illustrating a state in which the turntable 22 is not rotated, and FIG. 6B is a view in which the turntable 22 is rotated by the same angle as the rotation angle of the image probe 12 around the A axis. It is a figure which shows the state made to do.

When the linear member 24 is imaged by the image probe 12 while the image probe 12 is rotated around the B axis while the image probe 12 is rotated by a predetermined angle around the A axis by the posture changing means 13, FIG. ), Since the posture of the image probe 12 with respect to the linear member 24 changes, it may be difficult to image the linear member 24 with the image probe 12. For this reason, the turntable 22 is rotated by the same angle as the rotation angle around the A axis. At this time, the rotation angle of the turntable 22 is measured by holding the probe on the posture changing means 13 and bringing the contactor into contact with the spherical portion 252 of the reference sphere 25 to calibrate the rotation angle of the turntable 22.
According to this, the rotation error about the B axis and the image probe 12 are the same as when the linear member 24 is imaged by the image probe 12 while the image changer 13 rotates the image probe 12 only around the B axis. Can be calculated.

According to this embodiment, there are the following effects.
(1) Since the calibration device 2 includes the rotating disk 22 and the linear member 24, even the shape measuring machine 1 including the posture changing unit 13 can appropriately calibrate within a sufficient range.
(2) Since the reference line is the linear member 24 stretched over the turntable 22, the reference line can be provided at a position separated from the turntable 22. According to this, even if the image probe 12 is rotated approximately 90 ° around the B axis by the posture changing means 13, a line is drawn by the image probe 12 without bringing the calibration device 2 into contact with the image probe 12. The shaped member 24 can be imaged. Therefore, the calibration apparatus 2 can appropriately calibrate the shape measuring machine 1 within a sufficient range.

(3) Since the linear member 24 has a width equal to or smaller than the depth of focus of the objective lens 121, the linear member 24 can be viewed from any angle when the image probe 12 is rotated around the B axis by the attitude changing unit 13. Even if the member 24 is imaged, it can be appropriately imaged. Therefore, the calibration apparatus 2 can appropriately calibrate the shape measuring machine 1 within a sufficient range.
(4) Since the turntable 22 is provided with the two spherical portions 252 at predetermined positions, the calibration device 2 properly uses the shape measuring machine 1 even when the rotation accuracy of the turntable 22 is not sufficient. Can be calibrated.

[Second Embodiment]
Hereinafter, a second embodiment of the present invention will be described with reference to the drawings.
FIG. 7 is a diagram showing a calibration apparatus 2A according to the second embodiment of the present invention.
In the following description, parts that have already been described are assigned the same reference numerals and description thereof is omitted.
In the first embodiment, the reference line is the linear member 24 stretched over the turntable 22. On the other hand, in this embodiment, as shown in FIG. 7, the calibration apparatus 2A includes a plate-like member 27, and the reference line is a straight portion provided on the surface 27A of the plate-like member 27 on the image probe 12 side. It is different in that it is 282.

The calibration device 2A includes a base 21, a rotating disk 22, two columnar members 26 provided along two X-axis directions on the rotating disk 22, and each columnar member 26 with an axis in the X-axis direction as a rotation axis. A plate-like member 27 provided on the surface 27A of the plate-like member 27 on the image probe 12 side, and three spherical portions 29 provided at predetermined positions.
The plate 28 is formed so that the cross-sectional shape substantially parallel to the surface 27A is D-shaped, and has an arc portion 281 and a straight portion 282.
The straight line portion 282 is provided along the X-axis direction and functions as a reference line that is substantially orthogonal to the optical axis of the objective lens 121. That is, the plate-like member 27 is rotatably provided on the turntable 22 with an axis substantially parallel to the reference line as a rotation axis.
The spherical portions 29 are attached at substantially equal intervals along the outer periphery of the surface 27A of the plate-like member 27.

FIG. 8 is a diagram illustrating an image Im captured by the image probe 12.
In order to calibrate the shape measuring instrument 1 by using the calibration device 2A, first, the image probe 12 is not rotated, and the surface 27A of the plate member 27 is substantially orthogonal to the optical axis of the objective lens 121. State. In this state, the rotation axis of the turntable 22 and the A axis are parallel to each other, and the linear portion 282 and the B axis are substantially parallel to each other.
When the plate 28 is imaged by the image probe 12 in this state, as shown in FIG. 8, the straight portion 282 is substantially parallel to the cross hair.

When the image probe 12 is imaged with the image probe 12 while rotating the image probe 12 only around the A axis by the posture changing means 13, the linear part 282 is an image Im captured by the image probe 12. It rotates according to the rotation of the image probe 12 inside. Therefore, by calculating the inclination of the linear portion 282, the rotation error about the A axis of the posture changing means 13 and the inclination of the image probe 12 can be calculated.
Note that the position of the image probe 12 can be calibrated by calculating the center position of the arc portion 281 as in the calibration device described in Patent Document 1 described above.

  Further, when the linear probe 282 is imaged by the image probe 12 while rotating the image probe 12 only around the B axis by the posture changing means 13, the plate-like member 27 is moved by the same angle as the rotation angle around the B axis. By rotating, the surface 27 </ b> A on the image probe 12 side of the plate-like member 27 can be made substantially orthogonal to the optical axis of the objective lens 121. At this time, the posture of the plate member 27 is measured by holding the probe in the posture changing means 13 and bringing the contact into contact with the spherical portion 29 to calibrate the posture of the plate member 27. That is, the position of the plate 28 is calibrated. Here, the straight line portion 282 has a substantially constant inclination in the image Im imaged by the image probe 12 if there is no rotation error around the B axis of the posture changing means 13 and the inclination of the image probe 12. Therefore, by calculating the inclination of the straight line portion 282, the rotation error around the B axis of the posture changing means 13 and the inclination of the image probe 12 can be calculated.

Further, when the image probe 12 is rotated around the B axis while the image probe 12 is rotated around the A axis by the posture changing means 13 while the image probe 12 is rotated around the B axis, The turntable 22 is rotated by the same angle as the rotation angle around the A axis. At this time, the posture of the plate member 27 is measured by holding the probe in the posture changing means 13 and bringing the contact into contact with the spherical portion 29 to calibrate the posture of the plate member 27.
According to this, the rotation error about the B axis of the attitude changing unit 13 is similar to the case where the image probe 12 is imaged while rotating the image probe 12 only about the B axis by the attitude changing unit 13. And the inclination of the image probe 12 can be calculated.

In this embodiment as well, the following actions and effects can be obtained in addition to the same actions and effects as (1) in the first embodiment.
(5) Since the plate-like member 27 is provided with three spherical portions 29, the posture of the plate-like member 27 is measured by holding the probe on the moving means 14 and bringing the contactor into contact with the spherical portion 29. can do. Therefore, the calibration device 2A can appropriately calibrate the shape measuring machine 1 even when the rotation accuracy of the turntable 22 and the plate-like member 27 is not sufficient.

[Modification of Embodiment]
Note that the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope in which the object of the present invention can be achieved are included in the present invention.
For example, in the first embodiment, the reference line is the linear member 24, and in the second embodiment, the reference line is the straight portion 282. On the other hand, for example, the reference line may be a line drawn directly on the turntable 22. In short, the reference line may be a line that is provided on the rotating disk and is substantially orthogonal to the optical axis of the objective lens.

In the first embodiment, the linear member 24 has a width equal to or smaller than the focal depth of the objective lens 121. On the other hand, the linear member may have a width larger than the focal depth of the objective lens.
In the first embodiment, the turntable 22 is provided with the two spherical portions 252, but three or more spherical portions may be provided, or the spherical portions may not be provided. In the second embodiment, the plate-like member 27 is provided with the three spherical portions 29. However, four or more spherical portions may be provided, and the spherical portion is not provided. Also good.

  The present invention can be used for a calibration device, and in particular, can be used for a calibration device used for calibration of a measuring machine that measures an object to be measured based on an image.

The figure which shows the shape measuring machine and calibration apparatus which concern on 1st Embodiment of this invention. The enlarged view which shows the calibration apparatus in the said embodiment. The figure which shows the state which is not rotating the image probe in the said embodiment. The figure which shows the state which is imaging the linear member, rotating the image probe only to the periphery of the A-axis by the attitude | position change means in the said embodiment. The figure which shows the state which is imaging the linear member, rotating the image probe only around the B-axis with the attitude | position change means in the said embodiment. The figure which shows the state which has imaged the linear member with the image probe, rotating the image probe around the B axis in the state where the image probe is rotated around the A axis by a predetermined angle by the posture changing means in the embodiment. . The figure which shows the calibration apparatus which concerns on 2nd Embodiment of this invention. The figure which shows the image imaged with the image probe in the said embodiment.

1. Shape measuring machine (measuring machine)
2, 2A ... Calibration device 11 ... Surface plate 12 ... Image probe (imaging means)
14 ... Moving means 21 ... Base 22 ... Turntable 24 ... Linear member (reference line)
27 ... Plate-like member 29 ... Spherical part 121 ... Objective lens 252 ... Spherical part 282 ... Straight line part (reference line)

Claims (6)

Based on an image captured by the imaging means, comprising a surface plate for placing the measurement object, an imaging means for imaging the measurement object via an objective lens, and a moving means for moving the imaging means A calibration device used for calibration of a measuring machine for measuring the object to be measured,
A base installed on the surface plate;
A turntable provided rotatably on the base with an axis substantially parallel to the optical axis of the objective lens as a rotation axis;
A calibration apparatus, comprising: a reference line provided on the rotating plate and substantially orthogonal to the optical axis of the objective lens. The calibration device according to claim 1,
The calibration apparatus according to claim 1, wherein the reference line is a linear member stretched over the rotating disk. The calibration device according to claim 2,
The calibration apparatus according to claim 1, wherein the linear member has a width equal to or smaller than a focal depth of the objective lens. In the calibration apparatus in any one of Claims 1-3,
The calibration apparatus according to claim 1, wherein the rotating disk is provided with at least two spherical portions at predetermined positions. The calibration device according to claim 1,
A plate-like member that is rotatably provided on the turntable with an axis substantially parallel to the reference line as a rotation axis;
The calibration apparatus according to claim 1, wherein the reference line is provided on a surface of the plate-like member on the imaging means side. The calibration device according to claim 5,
The plate-like member is provided with at least three spherical portions at predetermined positions.

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