JP2010160293A - Light source device and drawing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a light source device controlling a plurality of small lamps and to provide a technology for a drawing device. <P>SOLUTION: A light source device (20) of a first view point is provided with: a light source constituted of a lamp (22) and a reflection mirror (3) and having a first identification information; a first detector (51) detecting the first identification information; a housing (21) holding one or more light sources and having a second identification information; a second detector (56) detecting the second identification information; a memory unit (92) storing information of the light source associated with the first identification information and information of the housing (21) associated with the second identification information; a determination part comparing the first identification information obtained by the first detector, the second identification information obtained by the second detector, information of light sources stored in the memory part, and information of the housing with each other to make determination; and a control part controlling a condition for driving the lamp, based on the result of the determination part. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a light source device and a drawing device that control conditions for driving a lamp stably by managing identification information of a light source having a lamp.

  Electronic circuit boards (printed boards) and flat display boards are formed with patterns by irradiation with ultraviolet light. There is an increasing demand for these circuit boards and the like to produce a small variety of products in a short period of time. In a conventional drawing apparatus, a mask is necessary for pattern formation even in a contact method or a projection exposure method, and it is difficult to meet the demand in terms of preparation, management, and maintenance of the mask. Accordingly, there is an increasing demand for a direct exposure method and apparatus for using data constituting a pattern directly from CAD data as a light control signal for a drawing apparatus.

  In particular, in the exposure of solder resist ink (hereinafter referred to as solder resist) used in an insulating process of an electronic circuit board, high energy is required for pattern exposure. Since exposure of solder resist requires high energy irradiation, the mercury lamp as the light source is usually changed to a large mercury lamp. In Patent Document 1, two large mercury lamps are arranged to cope with the exposure of solder resist.

JP2008-242169A

  However, when a large mercury lamp of 2 kW to 3 kW is mounted, there are many merits such as shortening the exposure time, but the drawing apparatus needs to focus on heat countermeasures for the mercury lamp. For this reason, the temperature control equipment is also upsized. Considering this point, it is desirable to mount a plurality of small mercury lamps in the drawing apparatus. However, when multiple small mercury lamps are used, the illuminance variation of each mercury lamp must be accurately managed.

  The present invention provides a technique relating to a light source device and a drawing apparatus capable of managing a plurality of lamps in such a situation where a plurality of small lamps must be managed.

A light source device according to a first aspect includes a light source that includes a lamp and a reflector and has first identification information, a first detector that detects first identification information, and one or more light sources that hold second identification information. A housing having a housing, a second detector for detecting second identification information, a light source information relating to the first identification information and a housing information relating to the second identification information, and a first detector A determination unit that compares the first identification information obtained in step 2 and the second identification information obtained by the second detector with the information on the light source and the housing stored in the storage unit, and determines the result of the determination unit. And a control unit for controlling conditions for driving the lamp.
The light source device having this configuration can mount the appropriate lamp and manage the lamp characteristics or lifespan by determining the first identification information or the second identification information by the determination unit.

The determination unit of the light source device according to the second aspect sends lamp power and voltage information from the storage unit to the control unit based on the first identification information, and the control unit counts the number of lamps mounted on the housing, power and voltage. The lamp is driven based on the information.
The determination unit of the light source device according to the third aspect sends information related to the lamp life from the storage unit to the control unit based on the first identification information, and the control unit drives the lamp based on the information related to the lamp life.

When there are a plurality of lamps mounted on the housing, the control unit of the light source device according to the fourth aspect has a plurality according to the lamp with the shortest lifetime among the mounted lamps based on the information on the lamp life. Control the lamp.
The determination unit of the light source device of the fifth aspect sends a mismatch signal to the control unit when the first identification information and the second identification information do not match the light source information and the housing information stored in the storage unit, The control unit displays a defective combination of the light source and the housing, and puts the lamp into a state where power supply to the lamp is stopped.

The information on the light source stored in the storage unit of the light source device according to the sixth aspect includes information on the focal position of the reflector, and the information on the housing stored in the storage unit includes information on the focal point of the housing.
The 1st identification information of the light source device of the 7th viewpoint is written in the outer peripheral part of the light source with the ink which fades with the light emitted from a light source.

A drawing apparatus according to an eighth aspect is a drawing apparatus that draws on a photosensitive substrate using a spatial light modulator having a number of reflective elements arranged in a matrix. The drawing apparatus includes a light source having first identification information, which includes a lamp and a reflecting mirror, a first detector that detects the first identification information, a housing that holds one or more light sources and has second identification information, A second detector for detecting second identification information; a storage unit for storing light source information related to the first identification information corresponding to the photosensitive substrate and housing information related to the second identification information; A determination unit that compares and determines the first identification information obtained by the detector and the second identification information obtained by the second detector, information on the light source stored in the storage unit, and information on the housing; A control unit that controls conditions for driving the lamp based on the result of the determination unit.
The drawing apparatus having this configuration can restrict the use of a lamp that does not match by determining the first identification information or the second identification information by the determination unit, and can improve the reliability of the exposure process.

The determination unit of the drawing apparatus according to the ninth aspect sends lamp power and voltage information from the storage unit to the control unit based on the first identification information, and the control unit determines the size of the photosensitive substrate and the lamp mounted on the housing. The lamp is driven based on the number information, power and voltage information.
The determination unit of the drawing apparatus according to the tenth aspect sends information on the lamp life from the storage unit to the control unit based on the first identification information, and the control unit drives the lamp based on the information on the lamp life, When the product reaches the end of its service life, the power supply to the lamp is stopped.

When there are a plurality of lamps mounted on the housing, the controller of the drawing device according to the eleventh aspect is configured to use a plurality of lamps according to the lamp with the shortest life among the lamps mounted. When one of the plurality of lamps reaches the end of its life, power supply to all the lamps mounted on the housing is stopped.
The determination unit of the drawing device of the twelfth aspect sends a mismatch signal to the control unit when the first identification information and the second identification information do not match the light source information and the housing information stored in the storage unit, The control unit displays a defective combination of the light source and the housing, and puts the lamp into a state where power supply to the lamp is stopped.

The information on the light source stored in the storage unit of the drawing apparatus according to the thirteenth aspect includes information on the focal position of the reflecting plate, and the information on the housing stored in the storage unit includes information on the focal point of the housing.
The first identification information of the drawing device according to the fourteenth aspect is written on the outer periphery of the light source with ink that fades with the light emitted from the light source.

  In the light source device according to the present invention, the determination unit determines the light source having the first identification information and the housing having the second identification information, so that an appropriate lamp can be mounted and the lamp characteristics or lifetime can be managed. In addition, the use of incompatible lamps can be restricted.

1 is an overall perspective view of a drawing apparatus 100 equipped with a light source device 20 of the present invention. It is the perspective view which showed the structure of one light source unit 20U in the light source device 20. FIG. FIG. 4 is a perspective view showing configurations of a high-pressure mercury lamp 22 and a reflector 23. (A) is the block diagram seen from the opposite side to the emission direction of the ultraviolet light in the light source unit 20U of FIG. (B) is sectional drawing which showed the AA cross section of (a). (A) is the table | surface which showed the kind of high pressure mercury lamp 22. FIG. (B) is the table | surface which showed the kind of housing 21 of the light source unit 20U. FIG. 6 is a ZY sectional view taken along the optical axis AX of the light source unit 20U and the projection optical system 30. It is a top view of the holder 49 which accommodates the light source unit 20U. It is the figure which showed the luminescent spot FC of the high pressure mercury lamp 22 at the time of attaching the light source unit 20U to the holder 49. FIG. 3 is a diagram illustrating a configuration of a drawing control system of a control unit 90. FIG. 4 is a flowchart of control of the light source device 20 in the drawing apparatus 100.

  Below, the drawing apparatus 100 of this invention is demonstrated. FIG. 1 is an overall perspective view of a drawing apparatus 100 equipped with a light source device 20 of the present invention. However, in order to explain the optical system of the drawing apparatus 100, a part thereof is cut to show the internal structure.

<Overall Configuration of Drawing Apparatus 100>
The drawing apparatus 100 is an apparatus that forms a drawing pattern by irradiating the substrate SW coated with a photosensitive material such as a photoresist with ultraviolet light. The drawing apparatus 100 includes a housing bottom part 11, a gate-like structure part 12, and a control part 90.

  The drawing apparatus 100 is based on the case bottom 11, and a gate-like structure 12 is connected to the side of the case bottom 11. A moving table 15 is installed on the upper surface of the case bottom 11. An optical light source device 20 and a projection optical system 30 are installed.

  Slides 13 are installed on the front surface of the gate-shaped structure 12, and alignment cameras AC are installed on the slide 13 at two locations. The alignment camera AC installed on the slide 13 moves in the X-axis direction, and the moving mechanism can move by linear drive or motor drive installed on the slide 13. The alignment camera AC is installed to measure the position of the reference point of the substrate SW, and is arranged at a predetermined position by moving in the X-axis direction along the slide 13. If necessary, the alignment cameras AC can be installed at a plurality of three or more locations, and a plurality of reference points on the substrate SW can be measured to detect the amount of misalignment.

  The moving table 15 installed on the upper surface of the casing bottom 11 is movable on the casing bottom 11 in the X-axis direction and the Y-axis direction. When the substrate SW is placed at a predetermined position, the moving table 15 is fixed by vacuum suction by suction means (not shown). The moving table 15 can move the substrate SW precisely in the X-axis direction and the Y-axis direction of the housing by, for example, linear moving means. The moving table 15 may use not only linear moving means but also moving means constituted by a ball screw, a slide / way, a screw driving motor, and the like. Any mechanism can be used as long as it can precisely control the movement and the current position. The control unit 90 controls the drawing apparatus 100. The control unit 90 communicates with each control unit that controls the moving table 15, the light source device 20, the projection optical system 30, the alignment camera AC, and the like. The drawing control system of the control unit 90 will be described later.

  The optical system includes a light source device 20 that is a light source and a projection optical system 30 that converts ultraviolet light into a drawing pattern. The light source device 20 includes two light source units 20U, and the projection optical system 30 includes eight projection optical systems 30. One projection optical system 30 includes a first projection lens group 32, a reflection mirror 33, a DMD (direct micro mirror device) element 34, a second projection lens group 35, and the like.

  In the drawing apparatus 100, four projection optical systems 30 correspond to one light source unit 20U, and four projection optical systems 30 correspond to the other light source unit 20U.

<Configuration of light source device>
FIG. 2 is a perspective view showing the configuration of one light source unit 20U in the light source device 20. As shown in FIG. The light source unit 20 </ b> U includes a housing 21, a high-pressure mercury lamp 22, and a reflector (or a reflector, hereinafter referred to as a reflector) 23. The light source unit 20U includes a housing 21 that supports four high-pressure mercury lamps 22 (high-pressure mercury lamp 22a to high-pressure mercury lamp 22d) and four reflectors 23 (reflectors 23a to 23d). Four high-pressure mercury lamps 22 and four reflectors 23 are installed side by side in the X-axis direction. Similarly, although not shown, the other light source unit 20U has the same configuration. That is, one projection optical system 30 corresponds to one high-pressure mercury lamp 22. The alternate long and short dash line indicates the optical axis AX of the light source device 20.

  FIG. 3 is a perspective view showing the configuration of the high-pressure mercury lamp 22 and the reflector 23 of the light source device 20. A hole into which the high-pressure mercury lamp 22 can be inserted is formed in the deepest part of the reflector 23, and the high-pressure mercury lamp 22 is inserted into the reflector 23 and fixed integrally with cement.

The high-pressure mercury lamp 22 includes a lamp tube shaft 24 and a bulb portion 25 that are made of quartz glass. A substantially elliptical bulb portion 25 is formed near the center of the lamp tube shaft 24. Although not shown, an anode and a cathode made of tungsten are disposed in the bulb portion 25 with an inter-electrode distance of about 1.0 mm. A metal foil such as molybdenum is welded to the rear ends of both electrodes, and an external lead wire is connected to the other end of the metal foil. In the discharge space between the lamp tube shaft 24 and the bulb 25, a rare gas of about 200 Torr is sealed as a rare gas for starting. Furthermore, the internal volume of the discharge space including the electrode portion is 65 mm ³ , and the high-pressure mercury lamp 22 is filled with mercury at about 0.25 mg / mm ³ . The high pressure mercury lamp 22 emits predetermined ultraviolet light when current is applied to the electrode from the external lead wire. The bright spot FC of the high-pressure mercury lamp 22 is near the tip of the cathode.

  The reflector 23 has an elliptical cross section and is made of Pyrex (registered trademark) glass or borosilicate glass. The bright spot FC of the high-pressure mercury lamp 22 is arranged at the first focal point of the elliptical reflector 23, and the second focal point is arranged on the fly-eye lens surface described later. On the inner surface of the reflector 23, a reflective film that reflects light having a wavelength of 350 nm to 450 nm is deposited. A part of the outer surface of the reflector 23 is provided with a first identification information section 50 that is individual information of the high-pressure mercury lamp 22 as a light source. The drawing apparatus 100 can acquire the individual information of each high-pressure mercury lamp 22 by reading the information of the plurality of first identification information units 50. For example, the individual information of the high-pressure mercury lamp 22 includes rated input power (W), rated voltage (V), life information (H), and focal position (mm). The first identification information unit 50 can use, for example, a one-dimensional barcode or two-dimensional barcode in which individual information is recorded. The first identification information unit 50 uses an IC chip or the like, and the rated input power (W), rated voltage (V), life information (H), and focal position (mm) of the high-pressure mercury lamp 22 are stored in the IC chip. It can be recorded.

  The rated input power (W) varies depending on the intensity of light necessary for exposure of the resist on the substrate SW, and includes 150 W and 250 W. The higher the rated input power, the greater the amount of ultraviolet rays, but the amount of heat generation also increases. Therefore, it is necessary to select the most suitable rated input power for the resist used. The rated voltage (V) is a voltage applied to obtain a predetermined light amount. The focal position of the high-pressure mercury lamp 22 is the position of the bright spot FC, that is, the focal position (mm) of the reflector 23. The lifetime (H) is a time during which a necessary amount of light can be irradiated. Since the light intensity of the high-pressure mercury lamp 22 gradually decreases as the usage time elapses, for example, after 1500 hours, it may not be possible to irradiate the necessary light intensity, or in some cases, the explosion may occur.

  FIG. 4A is a configuration diagram viewed from the opposite side of the ultraviolet light emission direction in the light source unit 20U of FIG. 2, and FIG. 4B is a cross-sectional view showing the AA cross section of FIG. . The light source unit 20U of this embodiment is a type in which four high-pressure mercury lamps 22 are mounted.

  As shown in FIG. 4B, the light source unit 20 </ b> U has a box-shaped housing 21. For example, four guide pins 26 are attached to the top and bottom of the housing 21. A leaf spring 27 is attached to the end of the guide pin 26. The leaf spring 27 is formed with a through hole 29 into which the high-pressure mercury lamp 22 and the reflector 23 can be inserted.

  A hole into which the high-pressure mercury lamp 22 can be inserted is formed in the deepest part of the reflector 23. A high-pressure mercury lamp 22 is inserted there. The reflector 23 and the high-pressure mercury lamp 22 are fixed so that the bright spot FC of the high-pressure mercury lamp 22 is arranged at the first focal point of the elliptical reflector 23 and the high-pressure mercury lamp 22 overlaps the optical axis AX of the projection optical system 30. Has been. The high-pressure mercury lamp 22 is fixed using a cement 28 at a position where the highest luminous efficiency can be obtained by taking into account the subtle deformation of the completed reflector 23.

  The reflector 23 in which the high-pressure mercury lamp 22 is fixed with cement 28 is attached to the through hole 29 of the leaf spring 27. The reflector 23 is attached to the reference surface 21 a of the housing 21 under pressure by the spring force of the leaf spring 27. For this reason, the bright spot FC comes to an optimum position with respect to the reference surface 21 a of the housing 21. In FIG. 4B, the distance from the reference plane 21a to the bright spot FC is the distance FL. Depending on the type of the high-pressure mercury lamp 22, the position of the bright spot FC of the high-pressure mercury lamp 22 is different. For this reason, another type of housing 21 includes a reference surface 21b that is different from the reference surface 21a in the position of the optical axis AX.

  The reflector 23 to which the high-pressure mercury lamp 22 is fixed can be attached to the housing 21 as long as the outer peripheral end of the reflector 23 is fixed by a leaf spring or the like so long as the deformation due to heat generation of the mounted lamp can be automatically reduced. I do not care.

  The housing 21 can also correspond to the position of the bright spot FC of the high-pressure mercury lamp 22 by changing the length of the guide pin 26 instead of changing the reference surface 21b. In the present embodiment, even if the length of the guide pin 26 instead of the housing 21 is changed to correspond to the position of the bright spot FC of the high-pressure mercury lamp 22, it is called a type of housing.

  As shown in FIGS. 2 and 4, the first detector 51 is used to acquire the first identification information unit 50 of the high-pressure mercury lamp 22. The first detector 51 is installed in the upper part of the housing 21, and the first identification information unit 50 is opposed to the first detector 51 by attaching the reflector 23 to which the high-pressure mercury lamp 22 is fixed at a predetermined position of the housing 21. It is configured to come to a position to do. Although not particularly illustrated, the cement 28 is not formed in a circle on the YZ plane but is provided with a notch so that the rotation direction can be specified so that the reflector 23 does not rotate around the optical axis AX. In addition to this, there is a method of installing a protrusion on the outer periphery of the reflector 23 so that the reflector 23 does not rotate. In addition, a notch and a sensor may be installed and a mechanism for transmitting the attachment position of the reflector 23 to the operator may be provided so that it can be determined that the reflector 23 is attached at a predetermined position around the optical axis AX.

  Further, as shown in FIG. 4, one second identification information unit 55 is installed in one light source unit 20 </ b> U. In order to obtain the second identification information unit 55, a second detector 56 is installed on the drawing apparatus 100 side at a position facing the second identification information unit 55. In the second identification information section 55, the type information of the housing 21 is stored in a one-dimensional barcode or a two-dimensional barcode, and is adhered to the housing 21. The second identification information section 55 can also store the type information of the housing 21 on a recording medium such as an IC chip.

  The type of the housing 21 differs depending on the distance FL from the reference surface 21a to the bright spot FC, that is, the position of the first focal point of the reflector 23. The drawing apparatus 100 acquires the second identification information unit 55 by the second detector 56 and acquires the first identification information unit 50 of the high-pressure mercury lamp 22 and the reflector 23 mounted by the first detector 51. It can be determined whether the high-pressure mercury lamp 22 and the reflector 23 suitable for the housing 21 are used.

  The light source unit 20U of the present embodiment is of a type that can be equipped with four high-pressure mercury lamps 22. However, the number of the light source units 20U is three or less or five or more according to the size of the substrate SW to be used. It is also possible to use the light source unit 20U on which the high-pressure mercury lamp 22 can be mounted.

<Types of high-pressure mercury lamp and housing>
FIG. 5A is a table showing the types of the high-pressure mercury lamp 22, and FIG. 5B is a table showing the types of the housing 21 of the light source unit 20U.

As shown in FIG. 5A, for example, there are types of high-pressure mercury lamps 22 described below.
The high pressure mercury lamp 22-A has a rated input power of 150 W and a rated voltage of 100V. The lifetime of the high-pressure mercury lamp 22-A is 1500 hours, and the focal position from the reference surface 21a (FIG. 4) is 6 mm.

  The high-pressure mercury lamp 22-B has a rated input power of 150 W and a rated voltage of 100V. The lifetime of the high-pressure mercury lamp 22-B is 1500 hours, and the focal position is 8 mm. The high-pressure mercury lamp 22-C has a rated input power of 150 W and a rated voltage of 100V. The lifetime of the high-pressure mercury lamp 22-C is 2000 hours, and the focal position is 8 mm.

The high-pressure mercury lamp 22-D has a rated input power of 250W and a rated voltage of 200V. The lifetime of the high-pressure mercury lamp 22-D is 1500 hours, and the focal position from the reference plane 21a (FIG. 4) is 8 mm.
The high-pressure mercury lamp 22-E has a rated input power of 250W and a rated voltage of 200V. The lifetime of the high-pressure mercury lamp 22-E is 2000 hours, and the focal position is 6 mm.
The high pressure mercury lamp 22-F has a rated input power of 250 W and a rated voltage of 200V. The lifetime of the high-pressure mercury lamp 22-F is 2000 hours, and the focal position is 8 mm.

As shown in FIG. 5B, for example, there are types of the housing 21 described below.
The housing 21-A is a housing having a reference surface 21a suitable for the high-pressure mercury lamp 22 whose focal position from the reference surface 21a is 6 mm.
The housing 21-B is a housing having a reference surface 21b (dotted line in FIG. 4B) suitable for the high-pressure mercury lamp 22 whose focal position from the reference surface 21a is 8 mm.

  That is, high pressure mercury lamps 22-A and 22-E having a focal position of 6 mm from the reference surface 21a must be attached to the housing 21-A. The high pressure mercury lamps 22-B, 22-C, 22-D and 22-F having a focal position of 8 mm must be attached to the housing 21-B. When the reflector 23 to which the high-pressure mercury lamp 22 is fixed is attached to the housing 21 of the light source unit 20U, it is necessary to determine whether they are compatible.

  In the present embodiment, the rated input power (W), the rated voltage (V), the life information (H), and the focal position (mm) are taken as the individual information of the high-pressure mercury lamp 22, and the focal point is the individual information of the light source unit 20U. Although the position (mm) is taken up, the present invention is not limited to this. For example, there are a plurality of types of high-pressure mercury lamps 22 attached to the manufacturer of the high-pressure mercury lamp 22 and the light source unit 20U. In this embodiment, in order to make the explanation easy to understand, only the individual information will be described.

  6 is a ZY sectional view taken along the optical axis AX of the light source unit 20U and the projection optical system 30. FIG. The optical system of this embodiment has a shape corresponding to one projection optical system 30 corresponding to one high-pressure mercury lamp 22. That is, the ultraviolet light emitted from each high-pressure mercury lamp 22 can pass through the corresponding projection optical system 30 to form a drawing pattern on the substrate SW. The housing 21 of the light source unit 20 </ b> U is placed on the holder 49.

  As shown in FIG. 6, the projection optical system 30 includes a first projection lens group 32, a reflection mirror 33, a DMD element 34, and a second projection lens group 35. The ultraviolet light emitted from the high-pressure mercury lamp 22 is reflected by the inner surface of the reflector 23, and further enters the DMD element 34 via the first projection lens group 32 and the reflection mirror 33, where a predetermined drawing pattern is formed. The light beam is further controlled so that it can be irradiated. The controlled light beam passes through the second projection lens group 35 and is irradiated onto the substrate SW while adjusting the magnification of the exposure drawing to be projected. Note that the drawing apparatus 100 may provide a shutter (not shown) in the middle of the ultraviolet light passage path to control the amount of ultraviolet light or to remove unnecessary ultraviolet light. The blinking of the light source lamp, the insertion and withdrawal of the shutter are controlled by the light source control unit 19 (see FIG. 8).

<Attaching the light source unit to the holder>
FIG. 7 is a top view of the holder 49 that houses the light source unit 20U. The housings 21 of the two light source units 20U need to adjust the optical axes AX of the four high-pressure mercury lamps 22 in the XY plane. The holder 49 can adjust the arranged light source unit 20U by adjusting means of the optical axis AX.

  The two light source units 20U are attached in a state of being in close contact with each other so as to constitute the optical axis AX at a uniform pitch. In order to be able to adjust the angle of the optical axis AX in the Y-axis direction and the position in the direction parallel to the optical axis, the corners of the surfaces where the light source units 20U are adjacent to each other are removed to form a taper TS. The holder 49 is fixed to an attachment portion that forms a reference surface of the drawing apparatus 100 housing.

  The holder 49 is provided with a mechanism capable of adjusting the position of the light source unit 20U in a plane (XZ plane) orthogonal to the optical axis AX. Two X-axis adjustment units 40 are installed in a direction parallel to the long axis direction (X-axis direction) of the light source unit 20U, and two Z-axis adjustment units (not shown) are installed in the Z-axis direction. The X-axis adjustment unit 40 and the Z-axis adjustment unit move horizontally in the X-axis direction so that the optical axis AX of the high-pressure mercury lamp 22 arranged in the two light source units 20U and the optical axis AX of the projection optical system 30 overlap. The horizontal movement in the Z-axis direction is adjusted.

  The X-axis adjustment unit 40 includes an X-axis reference bolt 41, an X-axis pull bolt 42, and an X-axis push bolt 43. The tips of the X-axis reference bolt 41 and the X-axis push bolt 43 have a spherical shape, and reduce the frictional resistance by reducing the area in contact with the housing 21. The X-axis pull bolt 42 is connected to the housing 21 and has a structure in which the housing 21 can be pulled out to the X-axis pull bolt 42 side by rotating.

  The X-axis reference bolt 41, the X-axis pull bolt 42, and the X-axis push bolt 43 are installed at two locations so as to correspond to the two housings 21. The following shows a method for adjusting the X axis of the housing 21.

  The light source unit 20 </ b> U is set by pressing the side surface of the housing 21 against the X-axis reference bolt 41 of the holder 49. Adjustment of the housing 21 in the X-axis direction is performed by rotating the X-axis pull bolt 42 and the X-axis push bolt 43, respectively, so that the light source unit 20U is moved in parallel with the X axis and the optical axis AX of the high-pressure mercury lamp 22 and the projection optics. Adjustment is made so that the optical axis AX of the system 30 overlaps. In order to facilitate adjustment in the X-axis direction, the housing 21 may be moved using a linear slide mechanism that is movable in the X-axis direction.

  The Z-axis adjusting unit (not shown) has a similar configuration. The holder 49 is not provided with a Y-axis adjusting portion, and only the Y-axis reference bolt 46 is provided. When the housing 21 of the light source unit 20U is attached so as to contact the Y-axis reference bolt 46 of the holder 49, the light source unit 20U has the bright spot FC of the high-pressure mercury lamp 22 disposed at the first focal point of the reflector 23 appropriately. This is because it is adjusted to be positioned.

  When the reference surface of the housing 21 of the light source unit 20U and the bright spot FC of the high-pressure mercury lamp 22 are sufficiently adjusted, it can be dealt with only by the Y-axis reference bolt 46 or the Z-axis reference bolt.

<Relationship between housing types and high-pressure mercury lamp types>
FIG. 8 is a diagram showing the bright spot FC of the high-pressure mercury lamp 22 when the housing 21 is attached to the holder 49. The light source unit 20U shown in FIG. 8 is an example to which the housing 21-B shown in FIG. 5 is applied. In this housing 21-B, two high-pressure mercury lamps 22-A shown in FIG. 5 are attached from the left side, the high-pressure mercury lamp 22-B on the right side, and the high-pressure mercury lamp 22-C on the right side. .

  In the high-pressure mercury lamp 22-A attached to the housing 21-B, the second focal point of the reflector 23 is not imaged at an appropriate position. That is, it is shifted in the direction of the optical axis AX by the distance ΔFL. In this state, the substrate SW is not irradiated with sufficient ultraviolet light. On the other hand, the high pressure mercury lamps 22 -B and 22 -C are imaged at the second focal point of the reflector 23.

  Further, the high-pressure mercury lamps 22-B and 22-C have different lamp lifetimes as shown in FIG. For example, when the high-pressure mercury lamp 22-B and the high-pressure mercury lamp 22-C are used for more than 1500 hours and 1800 hours, the substrate SW is not irradiated with sufficient ultraviolet light on the high-pressure mercury lamp 22-B side. If the substrate SW is not properly exposed, the high-pressure mercury lamp 22-C should not be lit. For this reason, when the reflector 23 to which the high-pressure mercury lamp 22 is fixed is attached to the light source unit 20U, it is necessary to determine what kind of individual information the high-pressure mercury lamp 22 has or the light source unit 20U. .

<Configuration of control unit>
FIG. 9 is a diagram showing the configuration of the drawing control system of the control unit 90. The control unit 90 of the drawing apparatus 100 includes a determination unit 91 and a storage unit 92. The control unit 90 acquires information of the first identification information unit 50 and the second identification information unit 55 and transmits the information to the determination unit 91. The determination unit 91 accumulates information of the first identification information unit 50 and the second identification information unit 55 in the storage unit 92 and records the usage time of the high-pressure mercury lamp 22 and the like. In the storage unit 92, individual information of the high-pressure mercury lamp 22 suitable for the drawing apparatus 100 and individual information of the light source unit 20U are stored in advance. The storage unit 92 also stores information on the size of the substrate SW and resist information applied to the substrate SW.

  The first detector 51 detects the first identification information unit 50 installed in the reflector 23 to which the high-pressure mercury lamp 22 is fixed. The second detector 56 detects the second identification information unit 55 installed in the light source unit 20U.

  The determination unit 91 of the control unit 90 includes the high pressure mercury lamp 22 and the matching high pressure mercury lamp 22 based on the detected individual information of the first identification information unit 50 of the reflector 23 and the second identification information unit 55 of the light source unit 20U. The reflector 23 is determined. Specifically, by reading the format of the light source unit 20U from the second identification information section 55 of the light source unit 20U, it is determined whether the compatible high-pressure mercury lamp 22 and the reflector 23 are mounted. For example, the light source unit 20U differs for each position of the second focal point of the reflector 23, and a plurality of high-pressure mercury lamps 22 of the same type (rated input power, rated voltage, focal point) need to be mounted on the light source unit 20U. . When the lamp and the reflector 23 installed in the light source unit 20U are not compatible, the control unit 90 displays a message such as “lamp non-conforming” on the operation screen, prompts the operator to replace the high-pressure mercury lamp 22 and the reflector 23, and Thereafter, the light source controller 19 is instructed not to turn on the high-pressure mercury lamp 22 by stopping the supply of power necessary for lighting to the high-pressure mercury lamp 22.

  Further, even when the high-pressure mercury lamp 22 and the reflector 23 are compatible with the light source unit 20U, the determination unit 91 monitors the usage time of the high-pressure mercury lamp 22, and the high pressure after the usable time has passed. The light source controller 19 is instructed not to turn on the high-pressure mercury lamp 22 by stopping the supply of power to the mercury lamp 22. When the high-pressure mercury lamps 22 whose usable times are not the same are mounted on the light source unit 20U, all the high-pressure mercury mounted on the light source unit 20U in accordance with the high-pressure mercury lamp 22 whose initial usable time has passed. The light source controller 19 is instructed not to turn on the high-pressure mercury lamp 22 by stopping the supply of power to the lamp 22. At the same time, the control unit 90 stops the drawing process cycle.

  The control unit 90 not only determines the suitable light source unit 20U, the high-pressure mercury lamp 22 and the reflector 23, but also acquires the size of the substrate SW placed on the moving table 15, so that the high-pressure mercury lamp 22 to be used is determined. The number can be controlled. The control unit 90 can also select the rated input power of the high-pressure mercury lamp 22 to be used depending on the type of resist on the substrate SW.

<Control flowchart>
FIG. 10 is a flowchart of control of the light source device 20 in the drawing apparatus 100.
In step S10, the drawing apparatus 100 acquires the size of the substrate SW and the type of resist. The operator inputs the size of the substrate SW used in the drawing apparatus 100 to be used, the type of resist, and the drawing pattern, and sets the reflector 23 to which the high-pressure mercury lamp 22 is fixed in the light source unit 20U. In this state, power supply to the high pressure mercury lamp 22 is stopped.

  In step S11, the first detector 51 detects the first identification information unit 50 installed in the reflector 23 to which the high-pressure mercury lamp 22 is fixed, and the second detector 56 is the second identification information installed in the light source unit 20U. The unit 55 is detected. The control unit 90 acquires information of the first identification information unit 50 and the second identification information unit 55, and the determination unit 91 determines conformity between the light source unit 20U and the reflector 23 to which the high-pressure mercury lamp 22 is fixed. The control unit 90 acquires the rated input power, the rated voltage, the focal position, the lifetime, and the type of the light source unit 20U of the high pressure mercury lamp 22 and the reflector 23, and the individual information of the light source unit 20U and the high pressure attached to the light source unit 20U. The conformity with the mercury lamp 22 and the reflector 23 is determined. If the light source unit 20U is not compatible with the high-pressure mercury lamp 22 and the reflector 23, the process proceeds to step S15 to display “lamp non-conforming” or the like on the operation screen to prompt the operator to confirm. If it matches, the process proceeds to step S12.

  In step S12, the control unit 90 acquires from the storage unit 92 the number of high-pressure mercury lamps 22 and rated input power conditions required for exposure of the resist on the substrate SW.

  In step S13, the determination unit 91 of the control unit 90 determines whether or not the high-pressure mercury lamp 22 that meets the conditions acquired in step S12 satisfies the lifetime. For example, the determination unit 91 determines whether the lifetimes of all the high-pressure mercury lamps 22 used are within a predetermined time, and whether the number of high-pressure mercury lamps 22 used and the rated input power meet predetermined conditions. If the life, number and rated input power of the high-pressure mercury lamp 22 do not meet the predetermined conditions, the process proceeds to step S16 to display “Lamp life” or “Inappropriate number of lamps” on the operation screen to prompt the operator to confirm. . If it matches, the process proceeds to step S14.

  In step S <b> 14, the determination unit 91 of the control unit 90 instructs the light source device 20 to supply a voltage. The determination unit 91 instructs the light source control unit 19 to supply power to the required number of high-pressure mercury lamps 22, and the light source control unit 19 supplies power to the light source device 20. The drawing apparatus 100 starts an exposure processing cycle when the ultraviolet light of the light source device 20 reaches a predetermined light amount. The controller 90 can continue the exposure processing cycle until the usable time of one or more high-pressure mercury lamps 22 is reached.

  After step S15 or step S16, in step S17, the high-pressure mercury lamp 22 is maintained in a state where supply of electric power necessary for lighting is stopped.

  For example, when the first identification information unit 50 uses a one-dimensional barcode or two-dimensional barcode in which individual information is recorded, the high-pressure mercury lamp 22 is used for printing the one-dimensional barcode and the two-dimensional barcode. Ink that gradually fades with the emitted ultraviolet light can be used. For example, since the bar code has faded due to the use of the high-pressure mercury lamp 22 for a certain period, the first detector 51 cannot read the bar code. For this reason, it is possible to prevent the used high-pressure mercury lamp 22 from being erroneously attached when the high-pressure mercury lamp 22 is replaced.

  The drawing pattern of the present embodiment is a concept that includes not only the circuit pattern of the wiring board but also the pattern of the entire surface used for peripheral exposure.

DESCRIPTION OF SYMBOLS 11 ... Case bottom part 12 ... Gate-like structure part 13 ... Slide 15 ... Moving table 19 ... Light source control part 20 ... Light source device
20U: Light source unit 21: Housing 22 ... Lamp 23 ... Reflector 24 ... Lamp tube shaft 25 ... Bulb portion 26 ... Guide pin 27 ... Leaf spring 28 ... Cement 30 ... Projection optical system 32 ... First projection lens group 33 ... Reflection mirror 34 ... DMD element 35 ... Second projection lens group 40 ... X-axis adjustment section (41 ... X-axis reference bolt, 42 ... X-axis pull bolt, 43 ... X-axis push bolt)
45 ... Y-axis adjusting part (46 ... Y-axis reference bolt, 47 ... Y-axis pulling bolt, 48 ... Y-axis pressing bolt)
49 ... Holder 50 ... 1st identification information part 51 ... 1st detector 55 ... 2nd identification information part 56 ... 2nd detector 90 ... Control part (91 ... determination part, 92 ... memory | storage part)
DESCRIPTION OF SYMBOLS 100 ... Drawing apparatus AC ... Alignment camera AX ... Optical axis FC ... Focus SW ... Substrate

Claims (14)

A light source including a lamp and a reflecting mirror and having first identification information;
A first detector for detecting first identification information;
A housing holding at least one light source and having second identification information;
A second detector for detecting the second identification information;
A storage unit for storing information on the light source related to the first identification information and information on a housing related to the second identification information;
Judging by comparing the first identification information obtained by the first detector and the second identification information obtained by the second detector with the information on the light source and the information on the housing stored in the storage unit A determination unit to perform,
A control unit that controls a condition for driving the lamp based on a result of the determination unit;
A light source device comprising: The determination unit sends the lamp power and voltage information from the storage unit to the control unit based on the first identification information,
The light source device according to claim 1, wherein the control unit drives the lamp based on the number information of the lamps mounted on the housing, the power, and the voltage information. The determination unit sends information on the life of the lamp from the storage unit to the control unit based on the first identification information,
The light source device according to claim 1, wherein the control unit drives the lamp based on information on a life of the lamp. When the number of lamps mounted on the housing is plural, the control unit controls the plurality of lamps according to the lamp having the shortest life among the lamps mounted based on information on the life of the lamps. The light source device according to claim 3. The determination unit sends a mismatch signal to the control unit when the first identification information and the second identification information do not match the information of the light source and the information of the housing stored in the storage unit,
The said control part makes the state which stopped the power supply to this lamp while displaying the poor combination of the said light source and the said housing. Light source device. The information on the light source stored in the storage unit includes information on a focal position of the reflector, and the information on the housing stored in the storage unit includes information on the focal point of the housing. 5. The light source device according to 5. The light source according to any one of claims 1 to 6, wherein the first identification information is written on an outer peripheral portion of the light source with ink that is faded by a light beam emitted from the light source. apparatus. In a drawing apparatus for drawing on a photosensitive substrate using spatial light modulation means having a number of reflective elements arranged in a matrix,
A light source including a lamp and a reflecting mirror and having first identification information;
A first detector for detecting first identification information;
A housing holding at least one light source and having second identification information;
A second detector for detecting the second identification information;
A storage unit for storing information on the light source related to the first identification information corresponding to the photosensitive substrate and information on a housing related to the second identification information;
Judging by comparing the first identification information obtained by the first detector and the second identification information obtained by the second detector with the information on the light source and the information on the housing stored in the storage unit A determination unit to perform,
A control unit that controls conditions for driving the lamp based on the result of the determination unit in order to irradiate the light from the light source to the spatial light modulator;
A drawing apparatus comprising: The determination unit sends the lamp power and voltage information from the storage unit to the control unit based on the first identification information,
9. The drawing according to claim 8, wherein the control unit drives the lamp based on the size of the photosensitive substrate, information on the number of the lamps mounted on the housing, the power, and the voltage information. apparatus. The determination unit sends information on the life of the lamp from the storage unit to the control unit based on the first identification information,
The said control part drives the said lamp | ramp based on the information regarding the lifetime of the said lamp | ramp, When the lifetime of the said lamp | ramp is reached, it will be in the state which stopped the electric power supply to the said lamp | ramp. The drawing apparatus described in 1. When the number of lamps mounted on the housing is plural, the control unit controls the plurality of lamps according to the lamp having the shortest life among the lamps mounted based on information on the life of the lamps. The drawing apparatus according to claim 10, wherein when one of the plurality of lamps reaches the end of its life, power supply to all the lamps mounted on the housing is stopped. The determination unit sends a mismatch signal to the control unit when the first identification information and the second identification information do not match the information of the light source and the information of the housing stored in the storage unit,
The said control part displays the combination failure of the said light source and the said housing, and makes it the state which stopped the electric power supply to this lamp | ramp, It is characterized by the above-mentioned. Drawing device. The information on the light source stored in the storage unit includes information on a focal position of the reflector, and the information on the housing stored in the storage unit includes information on the focal point of the housing. 12. The drawing apparatus according to 12. The drawing according to any one of claims 8 to 13, wherein the first identification information is written on an outer peripheral portion of the light source with ink that fades with a light beam emitted from the light source. apparatus.