JP2010155185A - Nozzle cleaning device and bubble generator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a nozzle cleaning device that cleans small nozzles one by one by combining immersion cleaning and injection cleaning and that surely removes solder particles or the like. <P>SOLUTION: The nozzle cleaning device includes: a lower tank 23 for storing a cleaning liquid; a vertical tank 22 having in a lower part a cleaning liquid retaining part in communication with the lower tank and having a rotary plate 21 which has a plurality of nozzle holders 51 for holding nozzles 17 and which, when rotatably moving downward, immerses the nozzles in the cleaning liquid of the cleaning liquid retaining part; a five-direction nozzle 102 that is arranged along a nozzle moving path by the rotary movement of the rotary plate and that jets the cleaning liquid to one nozzle; and a swirling nozzle 193 that is arranged in the cleaning liquid of the cleaning liquid retaining part and along the nozzle moving path by the rotary movement of the rotary plate, and that cleans one nozzle by generating micro bubbles by swirling flow. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a nozzle cleaning device and a bubble generating device, and more particularly to a nozzle cleaning device for cleaning small nozzles one by one, and a bubble generating device for generating microbubbles suitable for the nozzle cleaning device.

  Conventionally, various methods for cleaning related to industrial cleaning such as printed circuit board cleaning and semiconductor cleaning have been proposed. Examples include hand washing, immersion washing, spray washing, ultrasonic washing, electrolytic water washing, dry ice blast washing, plasma washing, supercritical fluid washing, and the like. Among these, when the cleaning medium is limited to liquid or vapor, immersion cleaning, jet cleaning, ultrasonic cleaning, electrolytic water cleaning, and supercritical fluid cleaning are targeted.

The current process of cleaning nozzles such as a chip mounter suction nozzle is usually composed of the following processes (1) to (5). As another method, there is a method in which the nozzle is removed from the mounter and only air blow is required.
(1) Remove the target nozzle from the mounter and set the replacement on the mounter.
(2) A setting jig in which a plurality of nozzles are arranged in an ultrasonic cleaning machine is manually set to perform cleaning. After completion, take out the setting jig by hand.
(3) Next, an air gun device is applied to the opening of the nozzle to clean the inside of the nozzle.
(4) Inspect the nozzle tip with an magnifying device.
(5) Then, store with a jig.

  In addition, there is a nozzle cleaning device described in Non-Patent Document 1 as a conventional specific cleaning device. The nozzle cleaned by this nozzle cleaning device is a chip mounter suction nozzle. The nozzle cleaning device removes solder particles and the like adhering to the chip mounter. A conventional nozzle cleaning device has a configuration in which a nozzle holder in which a plurality of nozzles are set is arranged in a cleaning chamber, and the plurality of nozzles set in the nozzle holder are collectively cleaned with a cleaning liquid. The plurality of nozzles that have been cleaned are then removed from the cleaning chamber and dried by air blowing or natural drying.

As an ordinary nozzle cleaning device, there are devices disclosed in Patent Documents 1 and 2. The nozzle cleaning device described in Patent Document 1 is a suction nozzle cleaning device for an electronic component mounting machine. In this nozzle cleaning device, a plurality of suction nozzles are attached as a unit body, and ultrasonic cleaning and air cleaning are executed for each unit body. In the suction nozzle cleaning method and apparatus described in Patent Document 2, a high-temperature gas is sprayed from the high-temperature gas spraying means toward the nozzle hole of the suction nozzle, and air of a predetermined pressure is blown away to blow off the suction nozzle. Remove internal deposits.
JP-A-10-305263 JP 2007-98241 A Nakamura Choukou Co., Ltd., Tozai Kiko Co., Ltd., “Automatic Nozzle Cleaning Machine” product brochure, printed and published in May 2007

For example, small suction nozzles with an inner diameter of 0.1 to 1.0 mm can be continuously introduced one by one, using microbubbles for cleaning, etc., and combined with immersion cleaning, jet cleaning, and steam cleaning The nozzles can be cleaned one by one, and solder particles attached to the nozzle surface and the inside of the suction holes can be removed reliably, can be dried automatically, and can be automatically discharged and aligned. There is a need for a small, high-performance nozzle cleaning device that can be used.
Further, in an actual suction nozzle using device installed in a mounting line, it is desired that the suction nozzle in use can be removed on the spot, cleaned in a short time, and mounted on the use device again.

  In view of the above-mentioned problems, the object of the present invention is to continuously insert small nozzles one by one, and can perform cleaning of the small nozzles by combining immersion cleaning and spray cleaning, and adhere to the nozzle surface and the inside of the suction holes. It is an object of the present invention to provide a small nozzle cleaning device that can reliably remove solder particles and the like, can be automatically dried, and can automatically discharge and align small nozzles.

  Another object of the present invention is to provide a bubble generator capable of effectively generating microbubbles and the like and exhibiting a high cleaning effect.

  The nozzle cleaning device and the bubble generator according to the present invention are configured as follows in order to achieve the above object.

  The nozzle cleaning device according to the present invention includes a first tank (lower tank) for storing a cleaning liquid and a cleaning liquid storage unit communicating with the first tank at a lower part, and is arranged in an annular shape to hold a nozzle to be cleaned. A second tank (vertical tank) having a plurality of nozzle holding parts and having a rotating plate that immerses the nozzle in the cleaning liquid of the cleaning liquid storage part when rotating downward, and a nozzle by rotating the rotating plate A multi-directional nozzle that is arranged along the moving path and injects the cleaning liquid to one nozzle, and is arranged along the moving path of the nozzle in the cleaning liquid in the cleaning liquid storage unit by the rotation operation of the rotating plate. And a swirl nozzle that cleans one nozzle by generating microbubbles.

  In the nozzle cleaning device described above, a plurality of nozzles clamped in each of the plurality of nozzle holding portions provided in the second tank and provided on the rotating plate that rotates in units of distance for each nozzle holding portion are provided one by one. Wash sequentially with directional nozzle and swivel nozzle. As a result, each of the small nozzles continuously fed one by one can be cleaned by combining immersion cleaning and spray cleaning using microbubbles, and solder particles adhering to the nozzle surface and the inside of the suction holes, etc. Can be reliably removed.

  In the nozzle cleaning device according to the present invention, in the above configuration, preferably, the multidirectional nozzle and the swivel nozzle are arranged in the order of the multidirectional nozzle and the swivel nozzle along the nozzle movement path by the rotation operation of the rotating plate. It is characterized by that.

  The nozzle cleaning device according to the present invention preferably has an air cylinder and a pressure tank for sucking the cleaning liquid from the first tank and discharging the cleaning liquid at a constant pressure, and the cleaning liquid discharged from the pressure tank. And a branching section for supplying the cleaning liquid to the multi-directional nozzle and the swirling nozzle.

  In the above-described configuration, the nozzle cleaning device according to the present invention preferably includes a microbubble generator on the upstream side of the branch portion. Furthermore, the microbubble generator includes an air suction pipe having an inclined end surface with respect to the flow direction of the cleaning liquid in the intermediate flow path.

  In the above-described configuration, the nozzle cleaning device according to the present invention is preferably provided from the outside of the second tank to each of the plurality of nozzle holding portions in the rotating plate through the carry-in portion formed on the tank front plate. A nozzle carry-in mechanism for carrying in and setting the nozzles, and a nozzle discharge mechanism for discharging the cleaned nozzles one by one from each of the plurality of nozzle holding parts in the rotating plate through a discharge part formed on the tank front plate. It is characterized by providing.

  The bubble generating apparatus according to the present invention cleans an object with a bubble breaking impact of a cleaning liquid sprayed from a nozzle, and the nozzle includes a first hole in the axial direction leading from the inlet side to the internal space on the outlet side, and an inlet It is characterized by comprising one hole formed in the inner surface on the side, an outer peripheral passage communicating with the hole, and at least three holes communicating the outer peripheral passage and the inner space on the outlet side.

  The bubble generator according to the present invention cleans an object with a cleaning liquid sprayed from a nozzle, and the nozzle includes a partition provided between an inlet side and an outlet side, and a hole formed in an inner surface of the inlet side. And an outer peripheral passage that leads to the hole, and at least two holes that allow the cleaning liquid flowing through the hole and the outer peripheral passage to flow into the inner space on the outlet side and create a swirling flow in the inner space.

  A bubble generator according to the present invention is an apparatus arranged in a flow path through which a cleaning liquid of a constant pressure flows from a pressurized tank apparatus toward a nozzle, and is in the axial direction of a main body portion where a flow path of a constant diameter is formed. An air suction pipe arranged almost perpendicularly is formed, and an end surface that is inclined with respect to the flow direction of the cleaning liquid in the flow path is formed at the tip opening of the air suction pipe in the flow path. It is characterized by generating.

  The present invention has the following effects.

  According to the nozzle cleaning device of the present invention, a plurality of nozzle holding portions are provided on a rotating plate that rotates with a predetermined rotation operation, and a nozzle to be cleaned is clamped one by one in each of these nozzle holding portions and rotated. Since the nozzle is moved by rotating the plate, and each of the five-way nozzle and the swivel nozzle arranged along the movement path of the nozzle is sequentially cleaned by bubble destruction impact by the cleaning liquid, one by one continuously Each of the charged small nozzles can be cleaned by a combination of immersion cleaning, spray cleaning, and steam cleaning, and solder particles and the like attached to the nozzle surface and the inside of the suction holes can be reliably and effectively removed.

  According to the bubble generating device based on the five-way nozzle according to the present invention, the microbubbles and the like are generated by the collision flow of the cleaning liquid introduced from the five holes having a predetermined positional relationship in the inner space on the outlet side, and the outlet is generated. Since the spray is made from the hole in the part, the solder particles and the like at the tip of the small nozzle can be efficiently and effectively removed.

  According to the bubble generating device based on the swirl nozzle according to the present invention, a swirl flow is made with the cleaning liquid introduced from two radial holes, preferably shifted in position in the inner space on the outlet side, and the holes in the outlet portion are jetted. As a result, the tip of the small nozzle, the inside of the hole, and the whole of the small nozzle immersed in the cleaning liquid can be efficiently and effectively cleaned.

  According to the bubble generating device for generating microbubbles according to the present invention, the air suction pipe having a predetermined arrangement relationship is provided in the flow path, and the inclined end surface having the predetermined position relation is provided at the front end opening of the air suction pipe in the flow path. Therefore, the microbubbles can be effectively generated in the cleaning liquid, and the cleaning effect can be enhanced.

  DESCRIPTION OF EMBODIMENTS Preferred embodiments (examples) of the present invention will be described below with reference to the accompanying drawings.

<External configuration of the entire device>
With reference to FIGS. 1-4, the external appearance form of the nozzle cleaning apparatus which concerns on this invention, and the nozzle which is a washing | cleaning object are demonstrated. 1 shows a front view of the nozzle cleaning device, FIG. 2 shows a right side view of the device, and FIG. 3 shows a plan view of the device. FIG. 4 shows an external perspective view of a nozzle to be cleaned.

  The nozzle cleaning device 10 is covered with a device case that forms a substantially cubic external shape as a whole. The nozzle cleaning device 10 has a dimension of about 30 cm on one side. In the front part of the nozzle cleaning apparatus 10 shown in FIG. 1, 11 is an operation panel unit, 12 is a nozzle discharge port for discharging the nozzle after completion of cleaning, 13 is a cleaning machine main body unit in which the cleaning mechanism unit is housed, Reference numeral 14 denotes a window through which the level of the cleaning liquid in the tank can be visually observed, and reference numeral 15 denotes a substrate placement area portion on which a control electronic circuit board is placed. In FIG. 1, a nozzle carry-in portion 16 for carrying nozzles to be cleaned one by one into the nozzle cleaning device 10 is provided on the left side surface portion of the nozzle cleaning device 10 as viewed from the front.

  FIG. 4 shows an example of a nozzle to be cleaned. The nozzle 17 is a chip mounter suction nozzle. The nozzle 17 is a pipe body as a whole, and is composed of a nozzle main body portion 17a having a suction hole at the distal end and an opening at the proximal end. Further, the nozzle body 17a has an annular collar portion 17b so as to be orthogonal to the axial direction of the nozzle body 17a.

  The nozzle carry-in part 16 has a guide groove for guiding the nozzle 17 so that the collar part 17 b of the nozzle 17 is inserted and rolled in the longitudinal direction of the nozzle carry-in part 16. The nozzle carry-in section 16 has a predetermined length and is provided so as to be inclined so that its position becomes lower as it enters the inside of the apparatus. The nozzle 17 placed at the upper outer end of the nozzle carry-in section 16 is guided by the inclined nozzle carry-in section 16 and moves into the nozzle cleaning device 10. Details of the shape of the nozzle carry-in portion 16 will be described later. The nozzle cleaning device 10 is a device having a mechanism for cleaning and drying the chip mounter suction nozzles one by one. The cleaned and dried nozzles are discharged one by one from the nozzle outlet 12.

  1-3, the element provided in the inside of the nozzle cleaning apparatus 10 is shown with the broken line. 21 is an internal rotating plate in which the nozzle 17 to be cleaned is set, 22 is a vertical tank, 23 is a lower tank, 24 is an air cylinder, and 25 is a pressurized tank. The rotating plate 21 shown in FIG. 1 is disposed in the vertical tank 22 shown in FIG. The vertical tank 22 and the lower tank 23 are connected to each other, and are formed in a state where the inside communicates. A cleaning liquid is accommodated in the lower tank 23. The liquid level of the cleaning liquid is basically determined based on the amount stored in the lower tank 23. A cleaning liquid container is formed in the lower part of the vertical tank 22 in communication with the lower tank 23, and the height of the liquid level is set at a predetermined position relatively below in the vertical tank 22. In the vertical tank 22, the above-mentioned rotating plate 21 is arranged so as to rotate around the rotation center 21a by a required rotating operation. In the rotating plate 21, the portion that has reached the lowest position by the rotation is immersed in the cleaning liquid stored in the cleaning liquid storage section below the vertical tank 22. A lower portion 22 a of the vertical tank 22 serves as a collection unit that collects the solder particles removed by washing the nozzle 17.

<Specific internal structure>
Next, specific structures such as a nozzle carry-in / discharge mechanism part, a nozzle holding mechanism part, a rotation drive mechanism part, a cleaning mechanism part, a pressurizing mechanism part, and a bubble generating mechanism part provided inside the nozzle cleaning device 10 are provided. explain.

<Nozzle loading mechanism>
The nozzle carry-in mechanism will be described with reference to FIGS. FIG. 5 is a partial view of the nozzle insertion portion at the outer end of the nozzle carrying-in portion, with a part of the device case cut away, and FIG. 6 is a vertical view in which the front portion of the device case is removed and the rotating plate 21 is provided. FIG. 3 is a diagram showing a structural portion on the front side of a tank 11. The nozzle carry-in mechanism includes a nozzle carry-in portion 16 as a mechanism portion for setting the nozzle 17 and introducing it into the apparatus. FIG. 7 shows a side view of only the nozzle carry-in part 16 and its related parts, and FIG. 8 shows a plan view of the nozzle carry-in part 16. The nozzle carry-in portion 16 is formed by joining two long plate members 31 and 32 with a predetermined gap 33 and a screw or the like. The gap 33 is the guide groove. The nozzle carry-in part 16 is attached to the upper part on the right side of the vertical tank 22 in an inclined state with a right-down posture. With the flange 17 b of the nozzle 17 inserted in the gap 33, the nozzle 17 is arranged at the upper end of the nozzle carry-in portion 16. As shown in FIGS. 7 and 8, the nozzle 17 disposed at the upper end of the nozzle carry-in portion 16 moves in the direction of the arrow 34 by its own weight and free rolling operation along the inclination of the nozzle carry-in portion 16. Thus, when the nozzles 17 are arranged one by one at the upper end portion of the nozzle carry-in portion 16 protruding outside the nozzle cleaning device 10, each nozzle 17 moves downward and is transferred into the nozzle cleaning device 10. A nozzle separation unit 35 is provided at a lower portion on the lower end side of the nozzle carry-in unit 16. The movement of the nozzle 17 carried into the apparatus along the nozzle carrying-in portion 16 is stopped by the stop mechanism of the nozzle separating portion 35 before the nozzle separating portion 35. The nozzle separation unit 35 has a mechanism for supplying the nozzles 17 carried by the nozzle carry-in unit 16 to the rotating plate 21 in the vertical tank 22 one by one.

  The mechanism of the nozzle separation unit 35 will be described with reference to FIG. As shown in FIG. 9, the nozzle separation unit 35 includes two stop claw plates 36 and 37. The two stop claw plates 36 and 37 are arranged side by side in the movement direction, and are provided so as to move up and down independently at different movement timings in the directions of arrows 38, respectively. When the front stop claw plate 36 moves downward, one nozzle 17 positioned at the lowermost end moves downward and is stopped by the next stop claw plate 37. Next, when the stop claw plate 36 is moved upward and the stop claw plate 37 is moved downward, one nozzle 17 is further moved downward, and is set on the carry-in rotation portion 39 from the lower end of the nozzle carry-in portion 16. In this way, the two stop claw plates 36 and 37 of the nozzle separating unit 39 are alternately moved up and down to separate the plurality of nozzles 17 carried in via the nozzle carrying-in unit 16 one by one. One separated nozzle 17 is supplied to the next carry-in rotation unit 39. The function of separating one nozzle 17 by the nozzle separating unit 35 is performed based on the presence confirmation of a nozzle by a sensor (not shown).

  The carry-in rotation unit 39 includes a support plate 42 having a groove 41 that supports the supplied nozzle 17, and a rotation drive unit 43 that rotates the support plate 42 about the axis 42 a toward the vertical tank 22 side by approximately 90 degrees. Prepare. When one nozzle 17 is supplied to the carry-in rotation unit 39, its presence is confirmed by a sensor. When the confirmation by the sensor is completed, the rotation drive unit 43 is rotated by the control system, the support plate 32 is rotated, and the nozzle 17 set on the support plate 42 is passed through the carry-in port formed on the front plate of the vertical tank 22. It carries in to the inside of the vertical tank 22, and arrange | positions in the predetermined location of the nozzle holding part 51 (shown in FIG. 12) of the rotating plate 21 which arrived at the predetermined position (position of the carrying-in part 50A shown in FIG. 12). At this time, in the nozzle holding part 51, the suction hole at the tip of the nozzle 17 is arranged so as to face the outside of the rotating plate 21.

  FIG. 11 is a plan view of the receiving plate 52 of the nozzle holding portion 51 of the rotating plate 21 provided in the vertical tank 22. The nozzle 17 carried into the vertical tank 22 is set on the receiving plate 52 of the nozzle holding unit 51. Since the receiving plate 52 is also inclined in the groove 52a in which the nozzle 17 is arranged from the inlet side to the back side, it is natural when the nozzle is carried in at the carrying-in position in the clamp release state described later. A rolling state arises, and as a result, it is easily set in the nozzle holding part 51 at the position of the carrying-in part of the rotating plate 21 in the vertical tank 22.

<Structure of rotating plate and its peripheral part>
With reference to FIG. 12 and FIG. 13, the structure of the rotating plate 21 and the peripheral part related thereto will be described. As shown in FIGS. 12 and 13, the rotating plate 21 is disposed inside the vertical tank 22 and attached so as to be able to rotate counterclockwise (arrow 53 in FIG. 12) around the rotation center 21 a. ing. The rotating plate 21 has an annular shape, and its outer peripheral edge 21A is rotatably supported by arranging, for example, four guide rollers 61, 62, 63, 64 at substantially equal intervals. The arrangement positions of the guide rollers 61 to 64 are arbitrary, but are preferably arranged at substantially equal intervals. For example, two cam followers 71 and 72 are provided on the inner peripheral edge 21 </ b> B of the rotating plate 21. Arrangement positions of the cam followers 71 and 72 are also arbitrary. A rotation drive mechanism that rotates the rotating plate 21 is provided on the back surface of the vertical tank 22. As shown in FIG. 12, the rotating plate 21 has, for example, 20 nozzle holding portions 51 attached to the front side thereof. The rotating plate 21 rotates in units of a distance corresponding to one nozzle holder 51, that is, a rotation angle of 18 ° (= 360 ° / 20). The 20 nozzle holding parts 51 attached to the front side of the rotating plate 21 have the same structure.

  In the circular space located inside the inner peripheral edge 21B of the rotating plate 21, a fixed support annular plate 54 (the portion shown by hatching in FIG. 12) attached to the back plate or the like of the vertical tank 22 is attached. Yes. In the support annular plate 54, elements in a cleaning mechanism, which will be described later, are attached to each of a plurality of predetermined locations (locations corresponding to P1, P4, etc.) on the front side.

  With reference to FIG. 14, the rotation support structure of the rotating plate 21, the rotation drive mechanism, and the nozzle holding mechanism (nozzle holding portion 51) will be described. FIG. 14 shows a cross-sectional view taken along line AA in FIG. In FIG. 14, 81 is a front plate of the vertical tank 22, and 82 is a back plate of the vertical tank 22. 21a shows the rotation center of the rotating plate 21, and FIG. 14 shows a partial sectional side view of the upper part of the rotating center 21a of the rotating plate 21. In the vertical tank 22, the rotating plate 21 is rotatably disposed in a space formed between the front plate 81 and the back plate 82 so that the surface thereof is substantially vertical.

  One guide roller 61 disposed on the upper surface of the back plate 82 is rotatably attached. The guide roller 61 supports the outer peripheral edge 21A of the rotating plate 21 and allows the rotating plate 21 to freely rotate counterclockwise. The remaining three guide rollers 62 to 64 arranged at substantially equal distances along the outer peripheral edge 21 </ b> A of the rotating plate 21 also have the same mounting structure and supporting structure. Further, the cam follower 71 is attached to the back plate 82 on the inner peripheral edge 21B side of the rotating plate 21 so that the cam follower 71 that contacts the inner peripheral edge 21B is disposed. The cam follower 71 has a built-in bearing structure and supports the rotating plate 21 so as to be rotatable from the inner peripheral side. Cam followers 72 provided at other locations also have the same mounting structure and support structure. In the support structure capable of rotating the rotary plate 21, the guide rollers 61 to 64 have V-shaped grooves formed in the circumferential portions thereof, and thus restrict the movement of the rotary plate 21 in the axial direction.

  A ring-shaped internal gear 83 is provided on the back surface of the rotating plate 21 along the edge of the inner peripheral edge 21 </ b> B of the rotating plate 21. The ring-shaped internal gear 83 has external teeth.

  In addition, on the back side of the vertical tank 22, a rotary cylinder 85 fixed to the back plate 82 via a mounting plate 84 is provided. A rotary gear 87 is attached to the rotary shaft of the rotary cylinder 85 via a one-way bearing 86. A one-way bearing 86 and a rotary gear 87 fixed to the rotary shaft of the rotary cylinder 85 are inserted into the vertical tank 22 through an opening formed in the back plate 82. In this arrangement state, the rotation gear 87 meshes with the internal gear 83 provided on the back surface side of the rotation plate 21. When the rotating gear 87 rotates in one clockwise direction via the one-way bearing 86 based on the rotating operation of the rotating cylinder 85, the rotating plate 21 is rotated counterclockwise (arrow 53 shown in FIG. 12) by the internal gear 83. It becomes possible to rotate. The counterclockwise rotation operation of the rotating plate 21 is performed every predetermined distance (18 ° rotation angle).

  The nozzle holding part 51 is attached to the front side of the rotating plate 21, includes the receiving plate 52 on the outer peripheral side of the rotating plate 21, and includes a support plate 91 having an L-shaped cross section on the inner peripheral side. The support plate 91 is fixed to the rotating plate 21. The receiving plate 51 is disposed so as to be parallel to the support plate 91. Both the support plate 91 and the receiving plate 52 are formed with grooves of the same position and the same shape from the front side to the back side (the groove 52a described above in the receiving plate 52). Further, the receiving plate 52 is elastically supported by a compression spring so as to be able to rotate around the mounting rotation shaft. The receiving plate 52 of the nozzle holding portion 51 opens the opening of the groove 52a when being pressed by the torsion spring 92 installed at the position of the loading portion 50A or the position of the discharging portion 50B when the nozzle 17 is loaded or discharged. Rotate only a slight angle. Thereby, the clamp state of the nozzle held by the nozzle holding part 51 is released. The torsion spring 92 forms a clamp release portion. The torsion spring 92 is attached to a screw 93 fixed to the back plate 82.

  Reference numeral 94 denotes a positioning hole. A plurality of (for example, 20) positioning holes 94 are formed in the circumferential direction of the rotating plate 21. A pin and a plunger (not shown) are engaged with the one positioning hole 94 shown. When the rotary cylinder 85 is driven, the pin and the plunger are removed from the positioning hole 94, and the rotary plate 21 is rotated by 18 ° via the one-way bearing 86, the rotary gear 87, and the internal gear 83.

  In FIG. 12, a region 50 </ b> A indicated by a broken line is a place for a carry-in part, and a region 50 </ b> B indicated by a broken line is a place for a discharge part. The nozzle 17 to be cleaned that is carried into the vertical tank 22 is held by the nozzle holding unit 51 that has reached the position of the carry-in unit 50 </ b> A as the rotating plate 21 rotates. In the nozzle holding part 51, the tip end part of the nozzle 17 faces outward and the base end part faces inward. At this time, the nozzle 17 is inserted into the groove between the support plate 91 and the receiving plate 52 of the nozzle holding portion 51 and is clamped by the support plate 91 and the receiving plate 52. The nozzle 17 held by the nozzle holding part 51 of the rotating plate 21 is sent in the counterclockwise direction (arrow 53) of the rotating plate 21. While the rotating plate 21 rotates and each nozzle holding part 51 moves from the carry-in part 50A to the discharge part 50B, the first nozzle cleaning is performed at the position P1, and the second nozzle cleaning is performed at the position P2. The third nozzle cleaning is performed at the location P3, the fourth nozzle cleaning is performed at the location P4, and the nozzle drying is performed at the location P5.

  In the place of the front plate 81 of the vertical tank 22 corresponding to the positions of the carry-in portion 50A and the discharge portion 50B, a carry-in port and a discharge port are formed, respectively. In addition, open / close doors (241 and 242 shown in FIGS. 6 and 25) are provided on the front side of each of the carry-in port and the discharge port. When the nozzle 17 is carried in through the carry-in port of the carry-in unit 50A or when the nozzle 17 is discharged through the discharge port of the discharge unit 50B, each open / close door is opened. At other times, the open / close door is kept closed. The drive mechanism of the opening / closing door will be described later.

  In the nozzle cleaning at the location P1, the general nozzle 101 fixed to the support annular plate 54 is used, and the nozzle 17 is cleaned from the nozzle base end side based on the bubble breaking impact. In the nozzle cleaning at the location P2, the five-direction nozzle 102 is used, and the nozzle 17 is cleaned from the nozzle tip side based on the bubble breaking impact.

  The five-direction nozzle 102 is referred to as “five-direction nozzle” because the flow of the cleaning liquid is created from five directions (one axial direction and four radial directions) as described later. However, the number of radial flows and the like can be reduced to, for example, three directions. In this case, since the flow of the cleaning liquid in four directions is made as a whole, it becomes a “four-way nozzle”. In general, it can be said to be a “multidirectional nozzle”. In the description of the embodiment, “five-direction nozzles” will be typically described.

  In principle, the five-way nozzle 102 is disposed outside the rotating plate 21 and is movably provided as indicated by an arrow 55. When the rotating plate 21 rotates, the five-way nozzle 102 moves outward and is positioned outside the outer edge of the rotating plate 21. In the nozzle cleaning at the point P3, a microvalve is generated using the swivel nozzle 103 disposed in the cleaning liquid 57 in a state in which the tip end side of the nozzle 17 is immersed in the cleaning liquid 57 stored in the cleaning liquid storage section 56. Then, the nozzle 17 is washed. 57a is a liquid level of the cleaning liquid 57, and the depth of the cleaning liquid storage section 56 is about 23 mm, and the height can be adjusted to +15 mm from the outside according to the size of the work (nozzle). In addition, in the location P3, the liquid wave generators 111 and 112 and the check valve 113 are provided. According to the liquid wave generators 111 and 112, a liquid wave is generated in a region in the vicinity of the tip of the nozzle 17 in the cleaning liquid 57 by alternately performing compressed air blow. In the nozzle cleaning at the point P4, the general nozzle 104 fixed to the support annular plate 54 is used, and the nozzle 17 is cleaned from the nozzle base end side based on the bubble breaking impact. In the place P5, nozzle drying devices 114 and 115 are provided. According to the nozzle drying devices 114 and 115, the cleaned nozzle 17 is dried by alternately performing air blowing. Furthermore, in FIG. 12, 22a shows a solder collection | recovery part, 23 has shown a part of lower tank.

  A cleaning liquid having a required pressure is supplied to each of the general nozzle 101, the five-way nozzle 102, the swivel nozzle 103, and the general nozzle 104 through a branch section having four branches by a common pressurization system. Is done.

  In FIG. 12, the arrow AL1 indicates the flow of the cleaning liquid discharged from the swivel nozzle 103, the arrow AL2 indicates the flow of the cleaning liquid that overflows from the cleaning liquid storage unit 56, and the arrow AL3 indicates the movement of the collected material (solder particles, etc.).・ Shows the flow.

  The code | symbol 105 shown by FIG. 13 is said branch part. The branch portion 105 is disposed in a circular space formed at the center of the support annular plate 54. In the structure shown in FIG. 13, two branches of the branching portion 105 are connected to each of two general nozzles 101 and 104. The other branch of the branch part 105 is extended in the internal space.

  Further, in FIG. 13, a flexible tube 106 is connected to the nozzle drying device 114 and the liquid wave generating device 111. An air flow for performing air blowing is supplied to the nozzle drying device 114, the liquid wave generating device 111, and the like through the tube 106.

  A cooling unit 107 is provided in the vertical tank 22 and above the rotating plate 22. Since the cleaning liquid 57 stored in the cleaning liquid storage section 56 at the bottom of the vertical tank 22 is warmed to about 40 ° C., it evaporates and vapor is generated. The cooling unit 107 is provided to cool the vapor in order to return the vapor to the cleaning liquid storage unit 56 again. The cooling unit 107 is attached, for example, in a state where the cooling unit 107 is inclined to the right. The cleaning liquid adhering to the cooling unit 107 moves leftward, and then falls and returns to the cleaning liquid storage unit 56. As a method of cooling, by supplying compressed air intermittently, a cooling part is cooled and dew condensation occurs. Alternatively, a Peltier element or the like can be used. As the cool air descends, the drying property of the work (nozzle) at the upper part of the vertical tank 22 can be enhanced.

<Mechanism of cleaning, pressurization and bubble generation>
The cleaning mechanism, the pressurizing mechanism, and the bubble generating mechanism will be described with reference to FIGS.

  FIG. 15 shows the pressurizing mechanism and the cleaning mechanism. In FIG. 15, 22 is a vertical tank. The rotating plate 21 described above is arranged in the vertical tank 22. Further, in the vertical tank 22, a general nozzle 101, a five-way nozzle 102, a swivel nozzle 103, a general nozzle 104, and the like that constitute a cleaning mechanism unit are arranged in association with the rotating plate 21. In FIG. 15, illustration of these elements is omitted for convenience of explanation.

  Further, a lower tank 23 is provided in communication with the lower portion of the vertical tank 22. A cleaning liquid 57 is accommodated and stored in the lower tank 23. The liquid level 57a of the cleaning liquid 57 is indicated by a broken line. The inside of the lower tank 23 is divided into a front side area 23A and a back side area 23B by a partition wall 121. An elongated hole 121 a is formed along the side of the lower edge of the partition wall 121. The front side section 23A and the back side section 23B communicate with each other through the long hole 121a. A connecting portion between the vertical tank 22 and the lower tank 23, and a solder recovery portion 22 a is provided at the lower portion of the vertical tank 22. Of the solder particles and the like removed by cleaning the nozzle, those having a specific gravity heavier than that of the liquid are collected in the solder collection unit 22a.

  The rear surface side area 23 </ b> B partitioned by the partition wall 121 has a structure capable of supplying the cleaning liquid from the opening 122 provided in the ceiling. The opening 122 is usually provided with a lid. The cleaning liquid 57 is supplied from the back side area 23B to the front side area 23A through the long hole 121a. Since the front side section 23A and the back side section 23B of the lower tank 23 are in communication with each other through the long hole 121a, the liquid level 57a of the cleaning liquid 57 has the same height. Thus, the cleaning liquid 57 supplied into the lower tank 23 is stored in a state where the liquid level is 57a.

  Moreover, the heater 123 is provided in the location near the long hole 121a inside the front side section 23A. The heater 123 is a means for heating the cleaning liquid 57 to a required temperature.

  Next, a pressurized tank 25 and an air cylinder 24 are provided at the front side section 23A. The air cylinder 24 and the pressurized tank 25 are made as an integral structure, and a piston member that reciprocates is provided inside the cylinder member. The air cylinder 24 and the like are attached in the direction of gravity in order to reduce the load on the operating portion.

  The pressurized tank 25 is connected to the rear surface side section 23B of the lower tank 23 through a cleaning liquid suction part 124 having a check valve. A filter 125 is installed at the inlet of the cleaning liquid suction part 124. The check valve provided in the cleaning liquid suction part 124 causes the cleaning liquid to flow from the back side section 23B to the internal space of the pressurized tank 25, but the reverse flow of the cleaning liquid is blocked. The piston member of the air cylinder 24 is provided so as to reciprocate, and causes the action of sucking and discharging the cleaning liquid in the pressurized tank 25.

  In FIG. 15, when the piston member of the air cylinder 24 moves upward, the cleaning liquid in the back surface side section 23 </ b> B is sucked into the pressurized tank 25 through the filter 125 and the cleaning liquid suction part 124. At this time, the cleaning liquid in the front side section 23A also flows to the back side section 23B through the long hole 121a. The two arrows 126 in FIG. 15 indicate the flow of the cleaning liquid. At this time, since it flows in the vicinity of the heater 123, the sucked cleaning liquid is heated. By providing the partition wall 121 in the lower tank 23 and supplying the cleaning liquid through the elongated hole 121a at the lower edge, it is possible to prevent inhalation of large bubbles in the cleaning liquid. Further, by setting the hole diameter of the filter 125 to 0.45 μm, for example, fine dust and the like can be removed and supplied into the pressurized tank 25.

  After the cleaning liquid 57 is sucked into the pressurized tank 25 by the suction operation of the air cylinder 24, when the piston member moves downward, a pressurizing action is generated, and the cleaning liquid in the pressurized tank 25 is discharged from the liquid discharge port 127. . The air pressure at this time is preferably 0.5 MPa. The capacity of the pressurized tank 25 is about 175 cc, for example. The liquid discharge port 127 of the pressurized tank 25 is provided with a check valve for flowing the cleaning liquid only in the discharge direction. The cleaning liquid discharged from the pressurized tank 25 is supplied to each of the general nozzle 101, the five-way nozzle 102, the swivel nozzle 103, and the general nozzle 104 described above via a flow path.

  Next, with reference to FIG. 16, the supply system of the cleaning liquid 57 discharged from the pressurized tank 25 and the structure of each nozzle will be described.

In FIG. 16, reference numeral 23 denotes a lower tank, 24 denotes an air cylinder, and 25 denotes a pressurized tank. The installation position of the lower tank 23 is indicated by a broken line. In the pressurized tank 25, 128 is a cleaning liquid suction port, and 131 is a liquid discharge unit for discharging the cleaning liquid. The cleaning liquid discharged from the liquid discharge unit 131 flows through the flow path 132, first passes through the microbubble generator 140, then flows again through the flow path 132, and passes through the four branch part 133, and the general nozzle 101, It is supplied to each of the five-direction nozzle 102, the swivel nozzle 103, and the general nozzle 104. An arrow 134 indicates the flow of the cleaning liquid. The 4-branch portion 133 corresponds to the branch 105 described above.
Each nozzle mechanism of the general nozzle 101, the five-way nozzle 102, the swivel nozzle 103, and the general nozzle 104 is a thin tube having an inner diameter of, for example, about 0.5 to 1.0 mm.

  The flow path 132 is formed of a metallic or flexible pipe member and has a required pressure resistance against the discharge pressure of the cleaning liquid. The flow path 132 has an inner diameter of about 4 mm, for example.

  The microbubble generator 140 has a substantially cylindrical shape as a whole. In the inlet portion 141 of the microbubble generator 140, a flow path 142 is formed in a tapered shape from a portion having a large diameter to a portion having a small diameter (an inner diameter of approximately 6.4 mm). In the central part 143, a channel 144 having a constant inner diameter of approximately 1.6 mm is formed. In the outlet portion 145, a tapered flow path 146 is formed from a portion having a small diameter to a portion having a large diameter. In the flow path 144 of the central portion 143, an air suction member 147 is provided in the radial direction orthogonal to the flow path 144. The air suction member 147 is a pipe-like member, and an outer end portion 147a thereof is opened to the atmosphere by a regulating valve. Further, as shown in FIG. 16, the inner end 147b of the member 147 for sucking air is cut so as to form a hypotenuse 147b-1. The hypotenuse part 147b-1 of the inner end part 147b is arranged so that the hypotenuse part 147b-1 is directed in the flow direction (traveling direction) of the cleaning liquid in the flow path 144. FIG. 17 shows an enlarged view. 17A is a bottom view, and FIG. 17B is a side view. An arrow 148 indicates the flow of the cleaning liquid. Reference numeral 147 c denotes an air hole of the air suction member 147. The hypotenuse part 147b-1 of the inner end part 147b of the air suction member 147 is disposed so as to face the traveling direction of the flow 148. As a result, a negative pressure (bubble) is easily generated behind the hypotenuse 147b-1, and a Kalman flow 149 is generated. As described above, air suction is performed by the air suction member 147 based on the generation of turbulent flow at the inner end 147b and the negative pressure, and in particular, by providing the oblique side 147b-1, microbubbles are effectively generated in the cleaning liquid. . Such an action occurs based on the application of the Venturi tube principle.

  The flow path 132 on the downstream side of the microbubble generator 140 destroys the microbubbles by forming the path in an L shape. Thereafter, the cleaning liquid is branched in four directions by the four branching portion 133.

  In the first general cylindrical nozzle 101, the cleaning liquid is discharged as it is, hits the base end portion of the nozzle 17, and the nozzle 17 is cleaned by the bubble breaking impact.

  Also in the second cylindrical general nozzle 104, the cleaning liquid is discharged as it is, hits the base end portion of the nozzle 17, and the nozzle 17 is cleaned by the bubble breaking impact.

  The five-way nozzle 102 has a cylindrical shape as a whole, and has an inlet portion 151 at one end and an outlet portion 152 at the other end. A throttle hole 153 is formed at an intermediate portion between the inlet portion 151 and the outlet portion 152, and a hole 154 formed in an inner surface portion of the throttle hole 153 on the inlet portion 151 side, and a side portion having an annular cross section leading to the hole 154 Four holes 156 leading to the passage 155 and the side passage 155 on the outlet portion 152 side are formed. When the cleaning liquid supplied from the four-branch part 133 enters the inlet part 151 of the five-way nozzle 102, it first flows to the outlet part 152 side through the throttle hole 153 (arrow 157) and secondly to the hole 154 side. It flows to the outlet portion 152 side through the passage 155 and the four holes 156 (arrow 158), and in the vicinity of the outlet portion 152, the cleaning liquid in five directions finally flows from the five holes, and these cleaning liquids merge to the outlet. It is ejected from the part 152 (arrow 159).

  A more detailed structure of the five-way nozzle 102 will be described with reference to FIGS. The five-way nozzle 102 includes a nozzle base 102A and a cylindrical nozzle cover 160. FIG. 18 shows the nozzle base 102A, (A) is a cross-sectional view of the main part of the nozzle base 102A, (B) is a cross-sectional view taken along line BB in FIG. 15 (A), and (C) is a view in the direction of arrow A1. Show. FIG. 19 shows a side view (A) and an end view (B) of the nozzle cover 160.

  In the nozzle base portion 102A, the inlet portion 151, the outlet portion 152, the throttle hole 153, the hole 154 on the inner surface side portion, and the four holes 156 on the outlet portion 152 side are formed. A recess 161 is formed over the entire outer peripheral surface of the nozzle base 102 </ b> A, and the recess 161 forms the side passage 155. In the side passage 155, the recess 161 becomes the side passage 155 by attaching the nozzle cover 160 to the nozzle base 102A. As shown in FIG. 18C, the four holes 156 are formed at equal intervals with an angle of 90 °, and as shown by the four arrows 162 (corresponding to the arrow 158 above), the four holes 156 exit from the four directions. The cleaning liquid flows into the internal space 163 on the part 152 side from the outside. The nozzle cover 160 has a cylindrical shape. The nozzle cover 160 is fitted from the outlet portion 152 side of the nozzle base 102A and is attached so as to cover the periphery of the nozzle base 102A. As a result, the side passage 155 is formed.

  Further, FIG. 18B shows the positional relationship between the five-way nozzle 102 and the nozzle 17. Cleaning liquid flows 162 and 164 (corresponding to the arrow 157 described above) are generated in the hole or the like at the tip of the nozzle 17. The cleaning liquid flows 162 and 164 merge to generate a flow as indicated by an arrow 165. In FIG. 18C, the tip of the nozzle 17 is shown at the center position.

  In the above, the axial dimension of the five-way nozzle 102 is, for example, approximately 15 mm, the outer diameter dimension of the nozzle cover 160 is, for example, approximately 10 mm, and the inner diameters of the inlet portion 151 and the outlet portion 152 are, for example, approximately 4 mm. The inlet portion 151 is formed with a female screw, and a joint member is screwed into the inlet portion 151.

  Returning to FIG. 16 again, the swivel nozzle 103 will be described. The swivel nozzle 103 has a cylindrical shape as a whole, and has an inlet portion 171 at one end and an outlet portion 172 at the other end. A partition 173 is formed between the inlet 171 and the outlet 172, and a hole 174 is formed in the inner surface of the partition 173 on the inlet 171 side, and a side passage 175 having an annular cross section leading to the hole 174, And two holes 176 leading to the side passage 175 on the outlet portion 172 side are formed. An outlet plate 178 having a small diameter hole 177 is attached to the outlet portion 172. When the cleaning liquid supplied from the four branch part 133 enters the inlet part 171 of the swivel nozzle 103, it flows to the outlet part 172 side through the hole 174, the side passage 175, and the two holes 176, and the inside of the vicinity of the outlet part 172 In the space 179, a flow of the cleaning liquid swirling around the axis is created. The flow of the swirling cleaning liquid is created by shifting the formation positions of the two holes 176 instead of facing each other. In the internal space 179 on the outlet portion 172 side of the swirl nozzle 103, a flow of cleaning liquid swirling around its axis is created, and then the cleaning liquid is ejected from the hole 177 of the outlet plate 178 of the outlet plate 172 (arrow 180).

  According to the swivel nozzle 103, the air intake port is not provided, and the saturated air in the liquid can be refined to generate microbubbles. The internal space 179 on the outlet portion 172 side is formed in a curved shape so that the shape on the bottom side becomes smaller in diameter. This shape makes it difficult for large bubbles to occur. The two holes 176 described above are guide holes and can generate a stable swirling flow.

  A more detailed structure of the swivel nozzle 103 will be described with reference to FIG. 20 and FIG. As with the five-way nozzle 102, the swivel nozzle 103 includes the nozzle base 103A and the nozzle cover 160 described with reference to FIG. FIG. 20 shows the nozzle base 103A, (A) is a cross-sectional view of the main part of the nozzle base 103A, (B) is a cross-sectional view taken along the line CC in FIG. 20 (A), and (C) is a view in the direction of arrow A2. Show. In FIG. 20B, the outlet plate 178 is shown exploded.

  In the nozzle base portion 103 </ b> A shown in FIG. 20, a hole 174 is formed in the inner surface portion near the partition wall portion 173 on the inlet portion 171 side. The hole 174 leads to the outer surface side. A recess 181 is formed on the outer peripheral surface of the nozzle base 103 </ b> A over the entire circumference, and the recess 181 forms the side passage 175 described above. In the side passage 175, the recess 181 becomes the side passage 175 by attaching the nozzle cover 160 to the nozzle base 103A. As shown in FIG. 20C, the two holes 176 are formed at positions shifted from the central axis. As indicated by the arrows 182, when the cleaning liquid flows from the outside through the peripheral side passages and into the internal space 179 on the outlet portion 172 side from the two holes 176, a swirling flow 183 is generated. The cylindrical nozzle cover 160 is fitted from the outlet 172 side of the nozzle base 103A and is attached so as to cover the periphery of the nozzle base 103A. As a result, a side passage 175 is formed. A recess 184 is formed in the end surface on the outlet portion 172 side, and an outlet plate 178 is attached to the recess 184.

  The nozzle bases 102A and 103A, the nozzle cover 160, the outlet plate 178, and the like in the five-way nozzle 102 and the swivel nozzle 103 are joined by brazing.

<Drying mechanism>
The drying mechanism related to the nozzle drying devices 114 and 115 will be described with reference to FIG. According to the nozzle dryers 114 and 115, drying is performed using air blow. Nozzle dryers 114 and 115 are supplied with air at a required temperature from a hot plate 200 (shown in FIG. 6) attached to a guide rail, which will be described later, provided outside the discharge part 50B of the vertical tank 22. For example, the temperature is set to 60 to 80 ° C. in consideration of damage in the work (nozzle). FIG. 21 shows the heater 201 of the hot plate 200 described above. 21A is a plan view of the heater 201, FIG. 21B is a side view thereof, and FIG. 21C is a right end view thereof. In FIG. 21B, a cover plate 202 fixed to the upper surface of the heater 201 by brazing or the like is also shown.

  A detachable cartridge heater 201 </ b> A is incorporated in the heater 201. A groove-like air passage 203 is formed on the upper surface of the heater 201. By fixing the cover plate 202 on the upper surface of the heater 201, a closed air passage is formed except for the entrance and exit. 204 is an air inlet and 205 is an air outlet. The air passage 203 is formed to meander partially on the upper surface of the heater 201. A plurality of C-type spring pins 206 are randomly provided in the air passage 203 of the heater 201. The spring pin 206 causes turbulent flow in the air passage 203, increases the air contact area, and efficiently transmits the heater heat.

  An air flow is supplied to the air inlet 204 with respect to the hot plate. The air is heated by flowing through the air passage 204. The heated air is given to the nozzle 17 held by the nozzle holding part 51 that has arrived at the drying location, and dries the cleaned nozzle 17.

<Nozzle discharge mechanism>
When the nozzle 17 moves to the discharge part 50B, the opening / closing door of the discharge part is opened, and the clamped state by the receiving plate 52 is released by the torsion spring 92 and discharged from the discharge port to the outside of the vertical tank 22. A guide rail 211 that moves the nozzle 17 downward is provided outside the discharge port. The discharged nozzles 17 are moved downward by the guide rail 211 and are collected by the nozzle collecting unit through the nozzle discharging unit 12.

<Nozzle clamping mechanism>
The nozzle clamp mechanism in the nozzle holding part 51 will be described with reference to FIGS. 22A and 22B are detailed plan views of the receiving plate 52. FIG. 22A shows a state during normal clamping, and FIG. 22B shows a state when releasing the clamp during loading or discharging. FIG. 23 shows a mounting structure for the rotating plate 21.

  As shown in FIG. 23, the receiving plate 52 is attached to an L-shaped support plate 221 fixed to the front side of the rotating plate 21 so as to rotate around the shaft 222. Further, as shown in FIG. 22A, the receiving plate 52 is rotated around the shaft 222 by a compression spring 225 provided between the end plate 223 of the L-shaped support plate 221 and the holding plate 224 of the receiving plate 52. In FIG. 22, it is pushed so as to rotate counterclockwise. As a result, a normal clamp state is created. Two vertical plates 226 and 227 are coupled to the presser plate 224 so as to be integrated.

  When the receiving plate 52 arrives at the carry-in portion 50A or the discharge portion 50B, it is attached to a screw 93 fixed to the back plate 82 of the vertical tank 22 as shown in FIG. The torsion spring 92 hits the vertical plate 226 integrated with the holding plate 224 of the receiving plate 52. As a result, the receiving plate 52 is slightly rotated clockwise around the shaft 222 by the torsion spring 92. When the torsion spring 92 contacts the vertical plate 226, a force as indicated by an arrow 228 is applied by the spring contact portion as shown in FIG. Therefore, as shown in FIG. 22B, a groove 52a for receiving the nozzle 17 is opened as shown by a broken line 232 with respect to the solid straight line 231, and the receiving plate 52 shown in FIG. The clamped state of the nozzle 17 is released in relation to the support plate 91 provided below having the same shape and the groove at the same position as the groove 52a.

  Note that the nozzle 17 is clamped between the receiving plate 52 and the support plate 91 in the posture as shown in FIG.

<Opening and closing mechanism of the door>
With reference to FIG. 25 and FIG. 26, the opening / closing mechanism of the two opening / closing doors 241 and 242 shown in FIG. As shown in FIG. 25, 241 is an opening / closing door of the carry-in portion 50A, and 242 is an opening / closing door of the discharge portion 50B. The open / close door 241 moves as indicated by an arrow 243. A position indicated by a solid line indicates a position in a closed state, and a position indicated by an imaginary line indicates a position in an open state. Similarly, the open / close door 242 moves as indicated by an arrow 244. A position indicated by a solid line indicates a closed position, and a position indicated by an imaginary line indicates an open position. The two open / close doors 241 and 242 are simultaneously opened / closed by a common drive mechanism 245. This means that the carry-in operation of the nozzle 17 in the carry-in unit 50A and the discharge operation of the nozzle 17 in the discharge unit 50B are synchronized and performed simultaneously. The drive mechanism 245 includes a gear support plate 246 and includes two gears 248 and 249 at positions symmetrical with respect to the center line 247. A lever 230 is fixed to the gear 248, and a projection 241 a provided on the open / close door 241 is engaged with an elongated hole 230 a formed at the tip of the lever 230. Similarly, the lever 231 is fixed to the gear 249, and a projection 242 a provided on the open / close door 242 is engaged with a long hole 231 a formed at the tip of the lever 231. The state of the gears 248 and 249 and the levers 230 and 231 shown in FIG. 25 maintains the open / close doors 241 and 242 in a closed state. A rack gear 232 that engages with the gears 248 and 249 is disposed between the two gears 248 and 249. FIG. 26 is a plan view showing the engagement relationship between the two gears 248 and 249 and the rack gear 232. The rack gear 232 includes two rack gears 232A and 232B, and operates the left and right gears respectively. In FIG. 25, when the rack gear 232 moves as indicated by an arrow 233, the gear 248 rotates clockwise and the gear 249 rotates counterclockwise. As a result, the open / close doors 241 and 242 are opened. When the rack gear 232 moves in the direction of the arrow 234 in the open state of the open / close doors 241, 242, the gear 248 rotates counterclockwise, the gear 249 rotates clockwise, and the open / close doors 241, 242 are closed. According to the opening / closing mechanism having the above configuration, the stroke of the rack gear 232 is shortened, and the opening / closing doors 241 and 242 can be opened and closed in a compact manner.

  The configurations, shapes, sizes, and arrangement relationships described in the above embodiments are merely schematically shown to the extent that the present invention can be understood and implemented, and the numerical values and the compositions (materials) of the respective components Is just an example. Therefore, the present invention is not limited to the described embodiments, and can be variously modified without departing from the scope of the technical idea shown in the claims.

  The nozzle cleaning device according to the present invention is used as a cleaning device for cleaning the chip mounter adsorption nozzles to which the solder particles are attached one by one.

It is a front view of the nozzle cleaning apparatus which concerns on embodiment of this invention. It is a right view of the nozzle cleaning apparatus which concerns on this embodiment. It is a top view of the nozzle cleaning apparatus which concerns on this embodiment. It is an external appearance perspective view of the nozzle which is a cleaning object. It is a figure which shows the outer side front-end | tip part of a nozzle carrying-in part. It is a figure which shows the internal structure of the front side of the vertical tank of a nozzle cleaning apparatus. It is a figure which shows the relationship between the inner front-end | tip part of a nozzle carrying-in part, and the structure part around the carrying-in part formed in the front part of a vertical tank. It is a front view of a nozzle carrying-in part, a nozzle separation part, and a carrying-in rotation part. It is a top view of a nozzle carrying-in part. It is a figure which shows the structure of the nozzle separation part attached to the nozzle carrying-in part. It is a top view of a receiving plate. It is a front view of the principal part of the rotating plate provided in the vertical tank and peripheral structure. It is a figure which shows the arrangement structure of the center part of a rotating plate, and the rotating plate instruction | indication structure of a guide roller. It is the sectional view on the AA line in FIG. The partial cross section side view which shows the structure of a pressurization mechanism part and a washing | cleaning mechanism part. It is a figure which shows the supply flow path system and nozzle of a washing | cleaning liquid. It is a figure which shows the structure of the air suction member in a microbubble generator. It is a figure which shows the nozzle base part of a 5 direction nozzle, (A) is principal part sectional drawing of a nozzle base, (B) is a BB sectional drawing in (A), (C) is A1 direction arrow in (A) FIG. It is a figure which shows the nozzle cover of a 5 direction nozzle, (A) is a side view, (B) is an end view. It is a figure which shows the nozzle base part of a turning nozzle, (A) is principal part sectional drawing of a nozzle base part, (B) is CC sectional view taken on the line in (A), (C) is A2 direction arrow view in (A) FIG. It is a figure which shows the heater of a hot plate, (A) is a top view, (B) is a side view, (C) is a right end view. The detailed structure of a receiving plate and its peripheral part is shown, (A) is a plan view of a normal state (at the time of clamping), and (B) is a plan view at the time of releasing the clamp. It is a fragmentary sectional side view which shows the relationship between the receiving plate and torsion spring in the nozzle holding | maintenance part of a rotating plate. It is an A3 direction arrow directional view in FIG. It is a front view which shows the door opening / closing mechanism of the carrying-in part and discharge part of a nozzle. It is a top view which shows the engagement relationship of a rack gear and two gears.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Nozzle washing | cleaning apparatus 11 Operation panel 12 Nozzle discharge part 16 Nozzle carrying-in part 17 Nozzle 21 Rotating plate 22 Vertical tank 23 Lower tank 24 Air cylinder 25 Pressurizing tank 35 Nozzle separation part 39 Loading rotation part 41 Groove 42 Support plate 50A Loading part 50B Discharge portion 51 Nozzle holding portion 52 Receiving plate 52a Groove 61-64 Guide rollers 71, 72 Cam follower 81 Front plate 82 Back plate 83 Internal gear 84 Mounting plate 85 Rotating cylinder 86 One-way bearing 87 Rotating gear 91 Support plate 92 Torsion spring 93 Screw 101 General nozzle 102 Five-way nozzle 102A Nozzle base 103 Swirling nozzle 103A Nozzle base 104 General nozzle 114 Drying device 115 Drying device 121 Partition portion 132 Flow path 140 Micro bubble generator 147 Air absorption Intruder member 201 Heater 241 Open / close door (carry-in part)
232 Open / close door (discharge section)

Claims (11)

A first tank for storing the cleaning liquid;
A cleaning liquid storage part communicating with the first tank is provided at the lower part, and has a plurality of annularly arranged nozzle holding parts for holding the nozzles to be cleaned, and the nozzles are used for the cleaning liquid when rotating downward. A second tank comprising a rotating plate immersed in the cleaning liquid of the storage unit;
A multi-directional nozzle that is arranged along a movement path of the nozzle by a rotation operation of the rotating plate and that injects the cleaning liquid to the one nozzle;
A swirl nozzle that is disposed in the cleaning liquid in the cleaning liquid storage unit and is moved along the movement path of the nozzle by a rotation operation of the rotating plate, and that cleans one of the nozzles by generating microbubbles by swirling flow;
A nozzle cleaning device comprising:   2. The nozzle according to claim 1, wherein the multidirectional nozzle and the swirl nozzle are arranged in the order of the multidirectional nozzle and the swivel nozzle along a movement path of the nozzle by a rotation operation of the rotating plate. Cleaning device. An air cylinder and a pressurized tank for sucking the cleaning liquid from the first tank and discharging the cleaning liquid at a constant pressure;
A flow path member for flowing the cleaning liquid discharged from the pressurized tank;
A branching section for supplying the cleaning liquid by branching to the multi-directional nozzle and the swivel nozzle;
The nozzle cleaning device according to claim 1, further comprising:   The nozzle cleaning apparatus according to claim 3, further comprising a microbubble generating unit upstream of the branching unit.   The multi-directional nozzle has a diameter in the inner space on the outlet side through one hole through which the cleaning liquid flows in the axial direction directly from the inlet side to the inner space on the outlet side, an inner surface hole on the inlet side, and an outer peripheral passage. The nozzle cleaning apparatus according to claim 1, further comprising at least three holes for flowing the cleaning liquid in a direction.   The swirling nozzle has a partition between the inlet side and the outlet side, and flows the cleaning liquid into the inner space on the outlet side through the inner surface hole and the outer peripheral passage on the inlet side, and the swirling flow in the inner space. The nozzle cleaning device according to claim 1, wherein the nozzle cleaning device has at least two holes to be formed.   The nozzle cleaning apparatus according to claim 4, wherein the microbubble generation unit includes an air suction pipe having an inclined end surface with respect to a flow direction of the cleaning liquid in a flow path of an intermediate part. From the outside of the second tank, through a carry-in part formed on the tank front plate, a nozzle carry-in mechanism for carrying the nozzles one by one into each of the plurality of nozzle holding parts in the rotating plate,
A nozzle discharge mechanism for discharging the nozzles, which have been cleaned one by one from each of the plurality of nozzle holding portions in the rotating plate, through a discharge portion formed on the tank front plate;
The nozzle cleaning device according to claim 1, comprising: It is a bubble generator that cleans an object with the bubble breaking impact of the cleaning liquid sprayed from the nozzle,
The nozzle is
A first axial hole leading from the inlet side to the inner space on the outlet side;
One hole formed in the inner surface of the entrance side;
An outer peripheral passage leading to the hole;
Comprising at least three holes communicating the outer peripheral passage and the inner space on the outlet side,
A bubble generator characterized by the above. A bubble generator that cleans an object with a cleaning liquid sprayed from a nozzle,
The nozzle is
A partition provided between the inlet side and the outlet side;
A hole formed in the inner surface of the inlet side, an outer peripheral passage leading to the hole,
At least two holes for flowing the cleaning liquid flowing through the hole and the outer peripheral passage into the inner space on the outlet side and creating a swirling flow in the inner space;
A bubble generator characterized by the above. A bubble generating device arranged in a flow path through which a cleaning liquid of a constant pressure flows from a pressurized tank device toward a nozzle,
An air suction pipe disposed so as to be substantially orthogonal to the axial direction of the main body portion in which a flow path having a constant diameter is formed, and at the tip opening of the air suction pipe in the flow path, A bubble generating apparatus characterized in that an end face inclined with respect to a flow direction of the cleaning liquid is formed, and micro bubbles are generated in the cleaning liquid.

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