JP2010145184A5 - - Google Patents
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- JP2010145184A5 JP2010145184A5 JP2008321476A JP2008321476A JP2010145184A5 JP 2010145184 A5 JP2010145184 A5 JP 2010145184A5 JP 2008321476 A JP2008321476 A JP 2008321476A JP 2008321476 A JP2008321476 A JP 2008321476A JP 2010145184 A5 JP2010145184 A5 JP 2010145184A5
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- 238000012360 testing method Methods 0.000 claims 18
- 238000001514 detection method Methods 0.000 claims 10
- 238000013461 design Methods 0.000 claims 2
- 230000004907 flux Effects 0.000 claims 2
- 238000000691 measurement method Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 238000012545 processing Methods 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008321476A JP5307528B2 (ja) | 2008-12-17 | 2008-12-17 | 測定方法及び測定装置 |
| US12/633,107 US8345263B2 (en) | 2008-12-17 | 2009-12-08 | Measurement method and measurement apparatus that measure a surface figure of an aspheric surface based on an interference pattern |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008321476A JP5307528B2 (ja) | 2008-12-17 | 2008-12-17 | 測定方法及び測定装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010145184A JP2010145184A (ja) | 2010-07-01 |
| JP2010145184A5 true JP2010145184A5 (enrdf_load_stackoverflow) | 2012-02-02 |
| JP5307528B2 JP5307528B2 (ja) | 2013-10-02 |
Family
ID=42565781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008321476A Expired - Fee Related JP5307528B2 (ja) | 2008-12-17 | 2008-12-17 | 測定方法及び測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5307528B2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5618727B2 (ja) * | 2010-09-21 | 2014-11-05 | キヤノン株式会社 | 形状測定法及び形状計測装置 |
| CN114076670B (zh) * | 2022-01-19 | 2022-07-08 | 中国科学院西安光学精密机械研究所 | 一种拼接主镜共相误差检测方法、系统及储存介质 |
| CN115183697B (zh) * | 2022-07-18 | 2024-07-16 | 西安交通大学 | 一种基于干涉光强信息的相位提取方法及系统 |
| CN119246023B (zh) * | 2024-12-04 | 2025-08-15 | 季华实验室 | 非球面反射镜的光轴检测装置及方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62126305A (ja) * | 1985-11-27 | 1987-06-08 | Kyocera Corp | 表面形状測定方法および装置 |
| JPH03156305A (ja) * | 1989-11-14 | 1991-07-04 | Matsushita Electric Works Ltd | 非球面形状測定装置 |
| JPH03243804A (ja) * | 1990-02-21 | 1991-10-30 | Kyocera Corp | 非球面の形状測定方法 |
| JPH0448201A (ja) * | 1990-06-15 | 1992-02-18 | Olympus Optical Co Ltd | 干渉測定装置 |
| JP2000097650A (ja) * | 1998-09-21 | 2000-04-07 | Nikon Corp | 非球面形状測定装置 |
| JP2000097663A (ja) * | 1998-09-21 | 2000-04-07 | Nikon Corp | 干渉計 |
| JP2002181517A (ja) * | 2000-12-11 | 2002-06-26 | Ricoh Co Ltd | 曲面形状測定方法及び装置 |
| US6781700B2 (en) * | 2001-06-20 | 2004-08-24 | Kuechel Michael | Scanning interferometer for aspheric surfaces and wavefronts |
| EP1444482B1 (en) * | 2001-11-16 | 2010-05-26 | Zygo Corporation | Scanning interferometer for aspheric surfaces and wavefronts |
| US7218403B2 (en) * | 2002-06-26 | 2007-05-15 | Zygo Corporation | Scanning interferometer for aspheric surfaces and wavefronts |
| JP2004045168A (ja) * | 2002-07-11 | 2004-02-12 | Nikon Corp | 非球面形状計測方法 |
| US7495773B2 (en) * | 2006-02-24 | 2009-02-24 | Zygo Corporation | In situ determination of pixel mapping in interferometry |
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2008
- 2008-12-17 JP JP2008321476A patent/JP5307528B2/ja not_active Expired - Fee Related