JP2010126776A - Corrosion resistant member and method for producing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a corrosion resistant member which has excellent corrosion resistance, and can reduce particles generated when used in a plasma environment, and to provide a method for producing the same. <P>SOLUTION: The corrosion resistant member comprises: a base material; and a gadolinium oxide film formed on the base material by thermal spraying and having a porosity of 5 to 20%. Since the film of the corrosion resistant member is formed by gadolinium oxide having a low porosity, it has excellent corrosion resistance, and can reduce particles generated when used in a plasma environment. Further, since the porosity of the gadolinium oxide film is ≤20%, the strength of the film improves, chipping, peeling or the like are hard to be generated, and the risk that plasma passes through the film, so as to damage the base material is low as well. Besides, since the porosity of the gadolinium oxide film is ≥5% and the film is not too dense, cracks are hard to be generated. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a corrosion-resistant member used in a plasma environment and a method for manufacturing the same.

  In a semiconductor manufacturing apparatus or a flat panel display manufacturing apparatus, since manufacturing is performed in an environment such as a halogen-based corrosive gas or a halogen-based gas plasma, a member having corrosion resistance is used. In recent years, the corrosion resistance of rare earth compounds has been confirmed, and among them, yttrium oxide has attracted attention. And the method of producing the corrosion-resistant film | membrane containing a yttrium oxide on the base-material surface by thermal spraying is proposed (for example, refer patent document 1).

The corrosion-resistant member described in Patent Document 1 is a corrosion-resistant member covered with an oxide ceramic sprayed coating, and is manufactured using a torch-type thermal spraying device including a cathode torch and an anode torch separated from each other. . A thermal spray film is formed on the base material by putting a ceramic raw material into a plasma arc generating portion and spraying the raw material while sufficiently melting the raw material.
JP 2004-10981 A

  However, in order to increase the accuracy of the device, a lower particle property is required for a member used inside a semiconductor manufacturing apparatus or a flat panel display manufacturing apparatus. This invention is made | formed in view of such a situation, It aims at providing the corrosion-resistant member which is excellent in corrosion resistance, and can reduce the particle | grains generate | occur | produced when used in a plasma environment, and its manufacturing method.

  (1) In order to achieve the above object, a corrosion-resistant member according to the present invention comprises a base material, and a gadolinium oxide film formed by thermal spraying on the base material and having a porosity of 5% or more and 20% or less. It is characterized by providing.

  Thus, since the coating of the corrosion-resistant member of the present invention is formed of low-porosity gadolinium oxide, it has excellent corrosion resistance and can reduce particles generated when used in a plasma environment. Moreover, since the porosity of the gadolinium oxide film is 20% or less, the strength of the film is improved, it is difficult for cracks and peeling to occur, and the possibility that plasma penetrates the film and damages the substrate is low. On the other hand, since the porosity of the gadolinium oxide film is 5% or more and the film is not too dense, cracks are hardly generated. Such a coating of the corrosion resistant member can be produced by high power thermal spraying.

  (2) Further, the corrosion-resistant member according to the present invention is characterized in that the gadolinium oxide film has an average surface roughness of 5 μm or less on the exposed surface. Since the surface of the gadolinium oxide film can be made smooth as described above, the corrosion-resistant member of the present invention is hardly affected by plasma and is hardly corroded.

  (3) Further, the corrosion-resistant member according to the present invention is characterized in that the gadolinium oxide film is in close contact with the base material with a strength of 20 MPa or more. Thereby, peeling of the gadolinium oxide film during use or cleaning can be prevented. As a result, it is possible to prevent particles from being generated from the substrate exposed by peeling.

  (4) Moreover, the manufacturing method of the corrosion-resistant member which concerns on this invention is a manufacturing method of the corrosion-resistant member performed using a torch type thermal spraying apparatus provided with a cathode torch and several anode torches, Comprising: Gadolinium oxide is the said torch type thermal spraying apparatus. A raw material charging step to be charged into the torch, a gas supply step for supplying an inert gas into the torch type thermal spraying device from the cathode torch side and the anode torch side, and the cathode torch at an output of 50 kW or more in the torch type thermal spraying device And a melting step of melting the gadolinium oxide by bringing a plasma arc generated by a plurality of anode torches into contact with the gadolinium oxide, and an injection step of injecting the molten gadolinium oxide onto a substrate. It is characterized by.

  Thus, in the method for producing a corrosion-resistant member of the present invention, a spray coating can be formed in a molten state by spraying at a high output using a torch type thermal spraying apparatus having a plurality of anodes, and gadolinium oxide having a low porosity. A film can be formed. In addition, it is possible to form a smooth surface with few irregularities and a small average surface roughness Ra. Therefore, it is possible to manufacture a corrosion-resistant member that has excellent corrosion resistance and reduces particles generated when used in a plasma environment.

  (5) Further, in the method for producing a corrosion-resistant member according to the present invention, in the gas supply step, an inert gas is supplied from the cathode torch side at a flow rate of 10 L / min to 40 L / min, and from the anode torch side. An inert gas is supplied at a flow rate of 2 L / min to 15 L / min.

  By supplying an inert gas in such a gas condition range, an applied voltage for plasma generation can be increased, stable plasma can be generated, and plasma can be directly evolved. As a result, a high-power plasma arc can be brought into contact with the gadolinium oxide powder to reliably form a gadolinium oxide film in a molten state.

  (6) Moreover, the manufacturing method of the corrosion-resistant member which concerns on this invention includes the roughening process of roughening the average surface roughness of the said base material to 4.50 micrometer or more and 6.00 micrometers or less before the said injection process. It is characterized by including. Thus, the adhesion strength of a base material and a thermal spray coating can be raised by roughening the surface of a base material and forming a gadolinium oxide film on it.

  ADVANTAGE OF THE INVENTION According to this invention, it is excellent in corrosion resistance and can provide the corrosion-resistant member which can reduce the particle | grains generate | occur | produced when it uses in a plasma environment, and its manufacturing method.

As a result of intensive studies, the inventor of the present application has found that the coating film of gadolinium oxide (Gd ₂ O ₃ ) formed by high-power spraying has a low porosity and is suitable for halogen-based corrosive gas or halogen-based gas plasma. It has been found that even when exposed, it exhibits excellent corrosion resistance as compared with a film of yttrium oxide (Y ₂ O ₃ ) and the generation of particles is reduced.

(Configuration of corrosion resistant member)
Hereinafter, embodiments of the present invention will be described with reference to the drawings. The corrosion-resistant member of the present invention is suitable for use in a semiconductor manufacturing apparatus or a flat panel display apparatus, and has a base material and a gadolinium oxide film formed on the base material.

  The base material is formed of glass, quartz, a metal such as aluminum or stainless steel, a ceramic such as alumina, or the like. As described above, the material of the base material preferably has a corrosion resistance that does not cause corrosion immediately after the film is peeled off, and can maintain high adhesion with the gadolinium oxide film, In particular, it is not limited to the above.

  The gadolinium oxide film is formed on the substrate by thermal spraying and has a porosity of 5% or more and 20% or less. If the porosity of the gadolinium oxide film is less than 5%, the film is too dense and cracks may occur. On the other hand, when the porosity is higher than 20%, the strength of the gadolinium oxide film is lowered, and there is a possibility that chipping, peeling, or the like occurs, or plasma is transmitted and damages the substrate. A porosity of 20% or less can be achieved by producing a coating with high output using a torch type thermal spraying apparatus having a plurality of anodes.

  Moreover, the gadolinium oxide film has an average surface roughness of 5 μm or less on the exposed surface. By making the surface smooth, it is less susceptible to plasma and less susceptible to corrosion. By using a torch type thermal spraying apparatus having a plurality of anodes, it is possible to form a thermal spray coating in a molten state, and as a result, it is possible to form a smooth surface with few irregularities and a small average surface roughness Ra.

  The gadolinium oxide film is preferably in close contact with the substrate with a strength of 20 MPa or more. By making the adhesion strength between the gadolinium oxide film and the substrate 20 MPa or more, peeling of the gadolinium oxide film during use or during cleaning can be prevented. When peeled off, particles are likely to be generated from the exposed portion of the substrate, but this can be prevented. A manufacturing method for achieving such adhesion strength will be described later.

  The gadolinium oxide film has a purity of 99.9% or more. By making the purity 99.9% or more, the progress of corrosion of the film in the plasma environment can be suppressed. The gadolinium oxide film is provided on a substrate and has corrosion resistance against a halogen-based corrosive gas or a halogen-based gas plasma.

  The thickness of the gadolinium oxide film is preferably 50 μm or more and 1000 μm or less. By making the thickness 50 μm or more, even when exposed to halogen gas corrosive gas or halogen gas plasma, the corrosion resistance effect is obtained, and the halogen corrosive gas or halogen plasma gas reaches the base of the corrosion resistant member. Etc. become difficult to transmit. Further, by setting the thickness to 1000 μm or less, the adhesion between the gadolinium oxide film and the substrate is improved, and peeling due to the difference in thermal expansion between the substrate and the film is less likely to occur.

(Corrosion-resistant member manufacturing method)
The manufacturing method of the corrosion-resistant member of this invention is demonstrated. The corrosion-resistant member of the present invention can be produced by oxidizing and powdering gadolinium, which is a raw material of the gadolinium oxide film, and spraying it on the surface of the base material to form a gadolinium oxide film.

  The gadolinium oxide film can be formed by a thermal spraying method such as plasma spraying. Plasma spraying has a high output and is suitable for spraying high melting point materials. When the output is low, the sprayed powder is difficult to melt and it becomes difficult to smooth the sprayed coating. When the output is high, the viscosity of the thermal spray powder decreases, leading to a decrease in adhesion strength. In order to spray the coating material at a high output, it is preferable to use a torch type thermal spraying device including a cathode torch and a plurality of anode torches. Below, an example of such a torch type thermal spraying apparatus is demonstrated.

  FIG. 1 is a schematic sectional view showing an example of a torch type thermal spraying apparatus. This torch type thermal spraying apparatus includes an apparatus main body 1 having a thermal spray particle injection port 1 a, a cathode torch 2 provided on the opposite side of the thermal spray particle injection port 1 a of the apparatus main body 1, and support members on both side surfaces of the apparatus main body 1. And two anode torches 3a and 3b provided to be supported by 4a and 4b.

  Ar gas is supplied to the tip of the cathode torch 2 through an Ar gas supply pipe 11 and an Ar gas introduction path 11a to generate an arc while preventing oxidation of the torch (electrode). An accelerator nozzle 5 is provided on the downstream side of the cathode torch 2, and the arc generated in the cathode torch 2 is accelerated to generate a plasma arc 40. Air is supplied to the arc from the cathode torch 2 from the air supply pipe 12 through the air introduction path 12a, and the plasma arc 40 generated from the accelerator nozzle 5 becomes O-containing plasma.

  An oxide ceramic raw material powder, which is a thermal spray raw material powder, is introduced from a raw material supply hopper (not shown) through a raw material supply pipe 13 to the generating portion of the plasma arc 40, and the raw material powder is completely melted to form spray particles. Is done. Even if the raw material powder is supplied to the tip portion of the plasma arc 40, it is possible to completely melt the raw material powder in the same manner, but the generating portion of the plasma arc 40 is preferable because it has a higher temperature.

  Ar gas is supplied to the tip of the anode torch 3a through the Ar gas supply pipe 21a and the Ar gas introduction paths 22a and 23a, and an arc is generated while preventing the torch (electrode) from being oxidized. A plasma arc 41a extends perpendicular to the generated plasma jet 40a. Ar gas is also supplied to the tip of the anode torch 3b through the Ar gas supply pipe 21b and the Ar gas introduction passages 22b and 23b to generate an arc while preventing the torch (electrode) from being oxidized, and is emitted from the cathode torch 2 A plasma arc 41b extends perpendicular to the plasma arc 40 formed. And it becomes the plasma jet 40a in the junction of plasma arc 40, 41a, 41b. In the vicinity of the thermal spray particle injection port 1a of the apparatus main body 1, air is supplied from the air pipes 24a and 24b to the plasma jet 40a through the air introduction paths 25a and 25b, respectively, and heat that does not contribute to melting in the plasma jet 40a is trimmed.

  Connected to the cathode torch 2 and anode torches 3a and 3b are auxiliary power sources 32a and 32b that function as high-frequency starters for starting arc generation, and DC main power sources 31a and 31b as energy supply sources for sustaining the arc. . The auxiliary power supplies 32a and 32b and the DC main power supplies 31a and 31b are controlled by a control device (not shown). As described above, since the plasma arcs 41a and 41b can be generated from the plurality of anode torches 3a and 3b by a plurality of independent power sources, the thermal spray raw material powder can be melted at a high output. As a result, the porosity of the film of the corrosion resistant member can be reduced and the surface can be smoothed.

  A cooling jacket 14 is provided around the cathode torch 2 and the accelerator nozzle 5 to protect them from high temperatures, and cooling jackets 26a and 26b are also provided around the anode torches 3a and 3b. In such a torch type thermal spraying apparatus, the thermal spray particles 51 carried by the plasma jet 40a hit the base material 53, and a thermal spray film 52 is formed.

  Next, a method for manufacturing a corrosion-resistant member using such a torch type thermal spraying apparatus will be described. FIG. 2 is a flowchart showing a method for manufacturing a corrosion-resistant member. First, a base material is prepared. In order to roughen the surface, the surface is subjected to blasting as necessary (step S1). The average surface roughness of the substrate is preferably 4.50 μm or more and 6.00 μm or less. By roughening the surface of the base material and forming a gadolinium oxide film thereon, the adhesion strength between the base material and the thermal spray coating can be increased. Further, it is possible to prevent the film from being peeled off during use or cleaning of the corrosion resistant member and the substrate from being exposed due to peeling. As a result, generation of particles from the substrate can be reduced.

  Next, gadolinium oxide powder having an average particle size of 20 μm or more and 60 μm or less is introduced into the torch type thermal spraying apparatus (step S2). By using gadolinium oxide powder having an average particle size of 20 μm or more, gadolinium oxide powder flows into the plasma flame without being blown away by the plasma flame when the sprayed powder is charged. As a result, gadolinium oxide can be attached to the member in a molten state. In addition, by using gadolinium oxide powder having an average particle size of 60 μm or less, the sprayed powder flows through the plasma flame without passing through the plasma flame when the gadolinium oxide powder is introduced into the plasma flame, and adheres to the member in a molten state. Can do. It is more preferable to use a thermal spray powder having an average particle size of 30 μm or more and 50 μm or less.

  On the other hand, an inert gas is supplied into the torch type thermal spraying apparatus from the cathode torch side and the anode torch side (step S3). At that time, an inert gas such as argon gas, helium gas, nitrogen gas or the like is supplied from the cathode torch side at a flow rate of 10 L / min to 40 L / min, and from the anode torch side, a flow rate of 2 L / min to 15 L / min. An inert gas is supplied in less than min. Outside such a gas condition range, the voltage does not increase, the generated plasma becomes unstable, and the plasma does not evolve directly. An active gas such as oxygen gas may be supplied from the cathode torch side at a flow rate of 20 L / min to 80 L / min.

  Then, a voltage of 260 V or more and 290 V or less is applied to each anode of the torch type thermal spraying apparatus, a current of 100 A or more and 140 A or less is passed, and the total output is set to 52 kW or more and 80 kW or less. Thus, gadolinium oxide is melted by bringing the plasma arc generated by the cathode torch and the plurality of anode torches into contact with gadolinium oxide at an output of 50 kW or more (step S4).

  Molten gadolinium oxide is sprayed onto the substrate (step S5). By spraying the thermal spray powder into the plasma flame and injecting and adhering it to the base material in a molten state, a corrosion-resistant member having a low porosity and excellent corrosion resistance can be produced. The inert gas and the active gas used when generating plasma during plasma spraying are not particularly limited to the above examples.

  A corrosion-resistant member having a gadolinium oxide film (Example) and a member having an yttrium oxide film (Comparative Example 1) are both produced using a torch type thermal spraying device (twin anode type thermal spraying device) having a pair of anodes and sprayed. The average surface roughness Ra and maximum surface roughness Rz, porosity, adhesion strength and etching rate of the surface were measured. FIG. 3A is a table comparing the example and the comparative example 1.

(Production of Examples)
A spray powder having a purity of 99.9% or more of gadolinium oxide was prepared. The average particle diameter of the sprayed powder was 30 μm to 40 μm. The average particle size of the thermal spray powder was measured using a laser diffraction / scattering particle size measuring machine. On the other hand, an aluminum base material of 100 × 100 × 5 t (mm) was prepared, and a blasting process was performed on the projection surface. Then, an ASP7100 plasma spraying apparatus (twin anode type spraying apparatus) manufactured by Aeroplasma was used to form a 200 μm to 300 μm gadolinium oxide film on the aluminum substrate. At that time, a voltage of 275 V was applied to each anode of the plasma spraying apparatus, a current of 110 A was applied, and the sprayed powder was melted at a total output of 60 kW. Further, argon gas was supplied from the cathode torch side at a flow rate of 25 L / min, and oxygen gas was supplied at a flow rate of 40 L / min. Argon gas was supplied from the anode torch side at a flow rate of 8 L / min.

(Production of Comparative Example 1)
Similar to the production procedure of the above-described example, a thermal spray powder having a purity of 99.9% or more of yttrium oxide was prepared. The average particle diameter of the sprayed powder was 30 μm to 40 μm. An yttrium oxide film having a thickness of 200 μm to 300 μm was formed on the aluminum substrate under the same conditions as in the examples.

  For each of the shot surfaces of Example and Comparative Example 1 thus produced, Ra value (centerline average roughness), which is the arithmetic mean roughness of the roughness curve defined in JIS B0601: 2001, according to JIS B0601: 2001. The Rz value (maximum height), which is the maximum height of the specified roughness curve, was measured. As a result, it was proved that all of the examples were smaller and the surface of the corrosion-resistant member was smooth.

Moreover, the porosity was evaluated about the Example and the comparative example 1. The porosity was determined by measuring the dry weight W1, the underwater weight W2, and the saturated water weight W3 of the film, and using the Archimedes method represented by the following formula. As a result, it was found that the porosity of the example was smaller than that of Comparative Example 1.

Moreover, the etching rate was measured about the Example and the comparative example 1. The etching rate is obtained by masking a part of the gadolinium oxide film with a polyimide tape, irradiating it in CF ₄ plasma for 10 hours using an ICP etching apparatus (EIS-700SI), and measuring the level difference in the presence / absence of masking. It was. At that time, CF ₄ gas was supplied at 8 sccm, O ₂ gas was supplied at 4 sccm, and the pressure was adjusted to 0.25 Pa, and the output was 700 W.

  As shown in FIG. 3A, even when the same twin anode type thermal spraying apparatus is used, the etching rate of the example is about 1/3 of the etching rate of Comparative Example 1, and the gadolinium oxide film is more resistant to corrosion than the yttrium oxide film. It was found that the amount of generated particles was small. Therefore, it was found that the corrosion-resistant member of the present invention is suitable for use in a semiconductor manufacturing apparatus or a flat panel display apparatus using a halogen-based corrosive gas or a halogen-based gas plasma.

  In addition, the adhesion strength between the gadolinium oxide film and the substrate was tested for Example and Comparative Example 1. A gadolinium oxide film having a thickness of 200 μm to 300 μm and a purity of 99.9% or more was formed on the tip surface (surface roughness 5.11 μm) of a rod-shaped aluminum base material, and a sample for measuring the adhesion strength of the example was prepared. . Further, an yttrium oxide film having a thickness of 200 μm to 300 μm and a purity of 99.9% or more is formed on the tip surface of a rod-shaped aluminum substrate having a surface roughness of 5.02 μm. Was made. In either case, the coating was formed using an Aeroplasma ASP7100 plasma spraying apparatus. And Example and Comparative Example 1 were each joined to the front end surface of another rod-shaped member with an adhesive, and the strength at which they were peeled off by pulling, that is, the adhesion strength was measured (test method according to JIS 8866).

  As shown in FIG. 3A, the adhesion strength between the yttrium oxide film and the base material was 14 MPa under the same conditions, whereas the adhesion strength between the gadolinium oxide film and the base material was 22 MPa. Thus, it was proved that the gadolinium oxide film was more easily adhered to the base material than the yttrium oxide film, and peeling was less likely to occur.

  Next, a corrosion resistant member having a gadolinium oxide film was produced as Comparative Example 2 using a torch type thermal spraying device (single anode type thermal spraying device) having a single anode. In Comparative Example 2, the average surface roughness Ra and the maximum surface roughness Rz, the porosity, the adhesion strength, and the etching rate were measured in the same manner as in the above example. FIG. 3B is a table comparing the example and the comparative example 2.

(Production of Comparative Example 2)
A gadolinium oxide film was produced on the substrate in the same manner as in the production procedure of the above example. However, a single anode type spraying device (manufactured by Sulzer Metco) was used for spraying. The average particle diameter of the sprayed powder was 30 μm to 40 μm. A gadolinium oxide film having a thickness of 200 μm to 300 μm was formed on an aluminum substrate under the same conditions as in the examples.

  For Comparative Example 2 produced in this manner, the average surface roughness Ra and the maximum surface roughness Rz of the exposed surface were measured. As a result, all of the examples were smaller than those of Comparative Example 2, and it was proved that the coating surface of the corrosion-resistant member was smooth.

Next, the etching rate was measured for Comparative Example 2. The etching rate was determined by masking a part of the gadolinium oxide film with a polyimide tape, irradiating it in CF ₄ plasma for 10 hours using an RIE apparatus, and measuring the level difference in the presence or absence of masking. As shown in FIG. 3B, the etching rate of the example is 1/6 to 1/7 of the etching rate of the comparative example 2, and the gadolinium oxide film manufactured using the twin anode type thermal spraying apparatus is a single anode type. It was found that the gadolinium oxide film produced by using a thermal spraying device has better corrosion resistance and less generation of particles. Therefore, it was found that the corrosion-resistant member of the present invention is suitable for use in a semiconductor manufacturing apparatus or a flat panel display apparatus using a halogen-based corrosive gas or a halogen-based gas plasma.

  Further, for Comparative Example 2, the adhesion strength between the gadolinium oxide film and the substrate was tested. A gadolinium oxide film having a thickness of 200 μm to 300 μm and a purity of 99.9% or more is formed on the tip surface (surface roughness 5.13 μm) of a rod-like aluminum base material, and a sample for measuring the adhesion strength of Comparative Example 2 is produced. did. And the comparative example 2 was joined to the front end surface of the rod-shaped member with an adhesive, and the adhesion strength was measured (test method according to JIS 8866).

  As shown in FIG. 3B, the adhesion strength between the gadolinium oxide film of Comparative Example 2 and the substrate was 10 MPa under the same conditions, whereas the adhesion strength between the gadolinium oxide film and the substrate was 22 MPa. Met. As described above, it was proved that the gadolinium oxide film produced by the twin anode type thermal spraying apparatus is more easily adhered to the base material than the yttrium oxide film and is less likely to be peeled off.

  In addition, as a member used in a semiconductor manufacturing apparatus, a flat panel display manufacturing apparatus, and a solar cell manufacturing apparatus, an electrostatic electrode and a resistance heating element are mentioned inside an electrostatic chuck, a heater, etc., for example. Since a metal having low corrosion resistance is often used for the electrostatic electrode, the corrosion resistance can be significantly improved by coating the electrostatic electrode with the corrosion-resistant member of the present invention.

  The corrosion-resistant member of the present invention can also be used for gas diffusion plates, baffle plates, baffle rings, shower plates and the like for introducing halogen-based corrosion gas into the apparatus. Furthermore, it can be applied to chambers, bell jars, domes and their inner wall materials, which are processing containers into which gas is introduced, and high-frequency transmission windows, infrared transmission windows and monitoring windows, and susceptors and clamp rings used in the containers. It can also be applied to a focus ring, a shadow ring, an insulating ring, a dummy wafer, a lift pin for supporting a semiconductor wafer, a bellows cover, a cooling plate, an upper electrode, a lower electrode, and the like. Thus, the corrosion-resistant member of the present invention can be applied to various members that are exposed to a plasma atmosphere and require corrosion resistance.

It is a schematic sectional drawing which shows an example of a torch type thermal spraying apparatus. It is a flowchart which shows the manufacturing method of a corrosion-resistant member. (A) Table comparing Examples and Comparative Example 1, (b) Table comparing Examples and Comparative Example 2.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Apparatus main body 1a Thermal spray particle injection port 2 Cathode torch 3a, 3b Anode torch 4a, 4b Support member 5 Accel nozzle 11 Gas supply pipe 11a Gas introduction path 12 Air supply pipe 12a Air introduction path 13 Raw material supply pipe 14 Cooling jacket 21a Gas supply Pipe 21b Gas supply pipe 22a Gas introduction path 22b Gas introduction paths 24a, 24b Air pipes 25a, 25b Air introduction paths 26a, 26b Cooling jackets 31a, 31b DC main power supply 32a, 32b Auxiliary power supply 40 Plasma arc 40a Plasma jet 41a Plasma arc 41b Plasma arc 51 Spray particles 52 Spray film 53 Base material

Claims (6)

A substrate;
A corrosion-resistant member, comprising: a gadolinium oxide film formed by thermal spraying on the base material and having a porosity of 5% to 20%.   The corrosion-resistant member according to claim 1, wherein the gadolinium oxide film has an average surface roughness of 5 μm or less on the exposed surface.   The corrosion-resistant member according to claim 1, wherein the gadolinium oxide film is in close contact with the base material with a strength of 20 MPa or more. A method for producing a corrosion-resistant member using a torch-type thermal spraying apparatus including a cathode torch and a plurality of anode torches,
A raw material charging step of charging gadolinium oxide into the torch type thermal spraying device;
A gas supply step of supplying an inert gas into the torch type thermal spraying apparatus from the cathode torch side and the anode torch side;
In the torch type thermal spraying apparatus, a melting step of melting the gadolinium oxide by bringing the plasma arc generated by the cathode torch and the plurality of anode torches into contact with the gadolinium oxide at an output of 50 kW or more;
And a spraying step of spraying the melted gadolinium oxide onto a base material.   In the gas supply step, an inert gas is supplied from the cathode torch side at a flow rate of 10 L / min to 40 L / min, and an inert gas is supplied from the anode torch side at a flow rate of 2 L / min to 15 L / min. The method for producing a corrosion-resistant member according to claim 4.   The corrosion resistance according to claim 4 or 5, further comprising a roughening step of roughening the average surface roughness of the base material to 4.50 µm or more and 6.00 µm or less before the spraying step. Manufacturing method of member.

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