JP2010125527A - Processing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a processing apparatus capable of adjusting an elastic force which supports a processing material by elasticity. <P>SOLUTION: The processing apparatus has a processing material mounting means by which the processing material is mounted, a processing means having a tool for processing the processing material and processing the processing material by the tool, an elasticity support means for generating the elasticity and elastically supporting the processing material mounting means, a tilted amount detection means for detecting the tilted amount of the processing material mounting means, and a control device for adjusting the elastic force to set the processing material mounting means to a predetermined state based on the tilted amount of the processing material mounting means. Accordingly, the state of the processing material mounting means is easily adjusted by adjusting the elastic force based on the tilted amount of the processing material mounting means. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a processing apparatus, and more particularly to an apparatus for adjusting an elastic force for elastically supporting a processing material.

A conventional processing apparatus will be described. When drilling with a conventional processing device, the work material must be firmly fixed to the table of the processing device and the axis of rotation of the drill must be held perpendicular to the work surface of the work material. If the drill has a diameter of 1 mm or more, it is possible to keep the torque generated in the drill during processing within the torsional limit of the drill only by adjusting the feed, and the drill will not break. .
However, in a drill having a drill diameter of 0.1 mm to 1 mm, the magnitude of runout of the rotary shaft may cause breakage of the drill, and a highly accurate rotation generator is required. In addition, in order to carry out long hole machining, it is necessary to detect torque generated in the drill. Therefore, a hole drilling device having a function of detecting torque on the rotating shaft has been developed.
Furthermore, when the diameter of the drill is 0.1 mm or less, even if a device for detecting torque on the rotational drive side is incorporated, it is impossible to measure torque generated in a minute drill due to disturbance by vibration noise of the rotating shaft. .

As a method of detecting the force and torque generated in a drill having a drill diameter of 0.1 mm or less, a method of detecting the force and torque generated in the work material as a reaction of the force and torque generated in the drill can be considered. However, the conventional method of firmly fixing the workpiece to the table of the machine tool cannot detect minute force and torque generated on the workpiece.
Therefore, a machining apparatus 100 has been developed that detects minute force and torque generated in a drill by elastically supporting a workpiece material. The processing apparatus 100 is demonstrated based on FIG.7 and FIG.8.
As shown in FIG. 7, a first position detection piece 107, a second position detection piece 108, and a third position detection piece 109 are installed on the side surface of the stage 106. Further, on the side surface of the stage 106, displacement sensors include a first displacement sensor 113, a second displacement sensor 114, a third displacement sensor 115, a fourth displacement sensor 116, a fifth displacement sensor 117, and a sixth displacement sensor. A displacement sensor 118 is installed. With these displacement sensors and position detection pieces, the horizontal position and the height position of the stage 106 are detected.

As shown in FIG. 8, above the stage 106, three electromagnets, a first electromagnet 119, a second electromagnet 120, and a third electromagnet 121, are installed at a predetermined interval from the stage 106. ing. The first electromagnet 119, the second electromagnet 120, and the third electromagnet 121 apply an electromagnetic force along the Z-axis direction to the stage 106.
In addition, three sets of electromagnets of the fourth electromagnet 122, the fifth electromagnet 123, and the sixth electromagnet 124 are installed at a predetermined interval with respect to the side surface of the stage 106. The fourth electromagnet 122 and the fifth electromagnet 123 act on the stage 106 with electromagnetic force along the X-axis direction. The sixth electromagnet 124 applies an electromagnetic force along the Y-axis direction to the stage 106.
When electric power is supplied to each electromagnet, an electromagnetic force is generated in each electromagnet. This electromagnetic force becomes an attractive force to move the stage 106 made of a magnetic material. Then, the stage 106 can be positioned by adjusting the electric power supplied to each electromagnet to increase or decrease the electromagnetic force, that is, the attractive force.
JP 2007-136600 A

However, the processing apparatus 100 described above has the following points to be improved. Even when the processing material is elastically supported as in the processing apparatus 100, the elastic displacement caused by the contact between the drill and the processing material is temporarily allowed, and the processing surface is inclined in the elastic displacement. Behavior is included.
This inclination of the machining surface causes bending of the drill constrained by the machining hole. Moreover, even if it is going to correct | amend the inclination of a process surface compulsorily, it will result in generating a bending with respect to a drill conversely.
Therefore, even if there is contact between the drill and the work material, if the work surface is elastically displaced without being inclined, the drill will not be bent.

According to the knowledge of mechanics, when a force acts on one point of a rigid body elastically supported in the space, translational motion and tilt motion are generated in the rigid body. However, there is a special point determined by the elastic constant of the elastic body that supports the rigid body, and it is known that when a force acts on that point, no tilting motion occurs and only translational motion occurs. This point is called the elastic center. The position of this elastic center can be set by adjusting the elastic constant.
Therefore, there is also an elastic center in the stage where the work material is attached and elastically supported, and if the point where the drill and the work material come into contact with each other by adjusting the elastic constant is adjusted to be the elastic center, It is possible to cause only elastic displacement without tilting the processing surface. As a result, bending generated in the drill can be suppressed. However, no means has been found so far for automatically adjusting the elastic constant so that the contact point between the drill and the workpiece is the center of elasticity.
Therefore, the present invention provides a processing apparatus capable of adjusting an elastic force for elastically supporting a work material so that a contact point between a drill and a workpiece is an elastic center.

As a result of various studies, the present inventor has completed the processing apparatus according to the present invention. Means for solving the problems in the present invention and the effects of the invention will be described below.
In the processing apparatus and the processing method according to the present invention, the amount of inclination of the processing material placing unit is detected, and the processing material placing unit is brought into a predetermined state based on the amount of inclination of the processing material placing unit. The elastic force is adjusted to elastically support the work material placing means.
Thereby, the state of the work material placing means can be easily adjusted by adjusting the elastic force based on the inclination amount of the work material placing means.

In the processing apparatus according to the present invention, an elastic constant related to the elastic force is adjusted.
Thereby, it becomes possible to adjust so that the processing position of a processing material may become an elastic center. Accordingly, only the translational displacement can be generated in the work material placing means.
In the processing apparatus according to the present invention, the elastic force is adjusted so as to suppress the inclination of the processing material placing means when the processing material is processed by the tool.
Thereby, damage to the tool due to the inclination of the work material placing means can be prevented.
In the processing apparatus according to the present invention, the position of the work material placing means is detected, and the amount of inclination is calculated from the detected position.
Thereby, the amount of inclination of the work material placing means can be obtained only by detecting the position of the work material placing means.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

1. Overall Configuration of Micro Machining Device 51 FIG. 1 is a schematic diagram showing a configuration of a micro machining device 51 according to Embodiment 1 of the present invention. As shown in FIG. 1, the micro machining apparatus 51 of the present embodiment includes a drill 1, a machining unit 3, a stage 6, displacement sensors 13 to 18 (partly not shown), an actuator, an elastic support control device 25, and A control device 26 is provided. Each component will be described below.
In addition, an orthogonal coordinate system (hereinafter referred to as a reference orthogonal coordinate system) consisting of an X-axis, a Y-axis parallel to the horizontal plane, and a Z-axis parallel to the vertical direction is set as a reference for specifying the arrangement of actuators and displacement sensors described later. (See FIG. 2). In this embodiment, a state in which the mounting surface of the stage 6 is orthogonal to the Z axis is defined as a predetermined state.

1.1. Processing unit 53
The processing unit 53 includes a drill holder 2 and a drill rotating device 3. The drill holder 2 holds on the central axis Z the drill 1 that rotates about the central axis Z and cuts the work material. A drill holder 2 is attached to the drill rotating device 3.
After the drill 1 is inserted into the drill holder 2, the drill 1 is held by the drill holder 2 using a holding means (not shown).
The drill holder 2 is attached to the drill rotating device 3 using holding means (not shown). The drill holder 2 and the drill rotation device 3 are arranged so that the respective rotation axes are parallel to the Z axis. By rotating the drill rotating device 3, the drill holder 2 and eventually the drill 1 held by the drill holder 2 is rotated.

1.2. Stage 6
The stage 6 carries the processing material 4 processed by the drill 1. The stage 6 has a fixing jig 5 for fixing the processing material 4. The fixing jig 5 is attached to the stage 6 using a holding means (not shown). The stage 6 is formed in a plate shape having a square shape in plan view (see FIGS. 2 and 3). The stage 6 is formed of a material including a material having magnetic properties such as iron.
The stage 6 includes a first position detection piece 7, a second position detection piece 8, and a third position detection piece 9. Here, the top view which shows arrangement | positioning of the displacement sensor in the micro processing apparatus 51 is shown in FIG. The first position detection piece 7, the second position detection piece 8, and the third position detection piece 9 are arranged on the side surface of the stage 6. The first position detection piece 7, the second position detection piece 8, and the third position detection piece 9 are formed of the same material as the stage 6, that is, a material including a material having magnetic properties such as iron. It is assumed that gravity acts on the stage 6 in the negative z direction.

1.3. Displacement sensors 13-18
The displacement sensor detects the position of the stage 6. The displacement sensor includes a first displacement sensor 13, a second displacement sensor 14, a third displacement sensor 15, a fourth displacement sensor 16, a fifth displacement sensor 17, and a sixth displacement sensor 18. The first displacement sensor 13 to the sixth displacement sensor 18 output displacement signals y _{1 to} y ₆ , respectively. The displacement sensor is installed so that the position of the stage 6 in the horizontal direction and the position in the vertical direction can be detected as a whole. A non-contact eddy current displacement sensor is used as the displacement sensor.
In the present embodiment, as shown in FIG. 2, the first displacement sensor 13, the second displacement sensor 14, and the third displacement sensor 15 are arranged below the stage 6 with a predetermined distance from the stage 6. Further, it may be arranged above the stage 6. The first displacement sensor 13, the second displacement sensor 14, and the third displacement sensor 15 are each arranged so as to face the stage 6. The first displacement sensor 13, the distance between the parallel center lines S ₁ and the Y-axis to the Y axis in plan view is placed such that a _S. Second displacement sensor 14 is disposed such that the distance between the parallel center line S ₂ and X-axis relative to the X axis in plan view is b _S. Similarly, a third displacement sensor 15, the distance between the center line S ₃ and X-axis are arranged to be b _S.
The first displacement sensor 13, the second displacement sensor 14, and the third displacement sensor 15 detect the displacement of the stage 6 in the Z-axis direction. From the displacement of the stage 6 detected by these displacement sensors, the position of the stage 6 in the height direction is measured. The position data y _{1 to} y _{3 in} the height direction of the stage 6 thus measured are input to the elastic support control device 25 and the control device 26 described later.

On the other hand, the fourth displacement sensor 16 is installed at a predetermined distance from the side surface of the stage 6 and facing the position detection piece 7. The fifth displacement sensor 17 is installed so as to be spaced apart from the side surface of the stage 6 and to face the position detection piece 8. The fourth displacement sensor 16 and the fifth displacement sensor 17 are installed such that the center lines S ₄ and S ₅ of the respective displacement sensors are parallel to the X axis.
The sixth displacement sensor 18 is installed so as to have a predetermined distance from the side surface of the stage 6 and to face the position detection piece 9. Sixth displacement sensor 18 has a center line S ₆ is disposed so as to be parallel to the Y axis.
The fourth displacement sensor 16 detects the displacement of the first position detection piece 7, the fifth displacement sensor 17 detects the displacement of the second position detection piece 8, and the sixth displacement sensor 18 detects the displacement of the third position detection piece 9. Is done. Position data y ₄ ~y ₆ in the horizontal direction of the stage 6 measured in this way is input to the elastic supporting control device 25 to be described later.

1.4. Actuator The actuator moves the stage 6 based on the respective displacement signals y _{1 to} y ₆ obtained by the displacement sensors 13 to 18. A plan view showing the arrangement of the actuator is shown in FIG. The actuator includes a first electromagnet 19, a second electromagnet 20, a third electromagnet 21, a fourth electromagnet 22, a fifth electromagnet 23, and a sixth electromagnet 24. The electromagnetic forces generated by the first electromagnet 19 to the sixth electromagnet 24 are defined as f _{1 to} f ₆ , respectively.
Above the stage 6, three electromagnets, a first electromagnet 19, a second electromagnet 20, and a third electromagnet 21, are installed at a predetermined interval from the stage 6. The first electromagnet 19, the second electromagnet 20, and the third electromagnet 21 apply a positive electromagnetic force along the z direction to the stage 6 and balance with the gravity acting on the stage 6. In the present embodiment, the first electromagnet 19 is disposed so as to face the first displacement sensor 13 with the stage 6 interposed therebetween. The same applies to the second electromagnet 20, the second displacement sensor 14, the third electromagnet 21, and the third displacement sensor 15.
The first electromagnet 19, the center line M ₁ is disposed to be parallel to the Y axis. The first electromagnet 19, the distance between the center line M ₁ and the Y-axis in the plan view is disposed such that a. The second electromagnet 20 and the third electromagnet 21 are installed such that the center lines M ₂ and M ₃ are parallel to the X-axis direction, respectively. Second electromagnet 20, the third electromagnets 21, in plan view, the distance from the respective center line M _2, M ₃ up to the X-axis is disposed such that b.

In the present embodiment, the first displacement sensor 13 and the first electromagnet 19 are arranged to face each other with the stage 6 interposed therebetween. Further, the first displacement sensor 13 and the first electromagnet 19 include a distance a _S between the center line S _{1 and the} Y axis for the first displacement sensor 13 and a distance between the center line M _{1 and the} Y axis for the first electromagnet 19. It arrange | positions so that a may become the same. Thereby, the z-direction displacement at the xy coordinate point where the first electromagnet 19 is disposed and the z-direction displacement at the xy coordinate point where the first displacement sensor 13 is disposed can be matched. The same applies to the second electromagnet 20, the second displacement sensor 14, the third electromagnet 21, and the third displacement sensor 15.
In addition, three sets of electromagnets of the fourth electromagnet 22, the fifth electromagnet 23, and the sixth electromagnet 24 are arranged at a predetermined interval with respect to the side surface of the stage 6. The fourth electromagnet 22, the fifth electromagnet 23, and the sixth electromagnet 24 are configured by two electromagnets as one set. As shown in FIG. 3, the fourth electromagnet 22 and the fifth electromagnet 23 are arranged so that the center lines M ₄ and M _{5 of} a pair of electromagnets are parallel to the X axis. Further, a fourth electromagnet 22 and the fifth magnet 23, the center line M thereof a pair of electromagnets _4, M ₅ and is symmetrical with respect to the X axis, their center line M ₄ in a plan _view, M The distance from ₅ to the X-axis is 1 _M. The fourth electromagnet 22 and the fifth electromagnet 23 apply an electromagnetic force along the X-axis direction to the stage 6.

Sixth electromagnet 24 has a center line M ₆ of the pair of electromagnets is disposed so as to be parallel to the Y axis. The sixth electromagnet 24 applies an electromagnetic force along the Y-axis direction to the stage 6.
When electric power is supplied to each electromagnet, electromagnetic force is generated in each electromagnet. This electromagnetic force becomes an attractive force to move the stage 6 made of a magnetic material. Then, the stage 6 can be positioned by adjusting the electric power supplied to each electromagnet to increase or decrease the electromagnetic force, that is, the attractive force.

1.5. Elastic support controller 25
The elastic support control device 25 outputs output signals v _{1 to} v ₆ that give feedback control signals for elastically supporting the stage 6 based on the displacement signals y _{1 to} y ₆ in the first displacement sensor 13 to the sixth displacement sensor 18. An output signal vector v as an element is output. An electromagnetic force generated by the first electromagnet 19 to the sixth electromagnet 24 operating as an actuator by the output signal vector v acts as an elastic force on the stage 6. Based on this feedback control, the stage 6 is elastically supported by an actuator and positioned at an appropriate position. Note that the elastic support control of the stage 6 in the elastic support control device 25 is executed by using the techniques disclosed in Japanese Patent No. 3452305 and Japanese Patent Application Laid-Open No. 2007-136600.
The control device 25 performs the feedback control so that the electromagnetic forces f _{1 to} f ₆ generated by the first electromagnet 19 to the sixth electromagnet 24 operating as actuators are expressed by the following expression (1) with respect to the stage 6. Control to act as indicated elastic force. Note that the elastic constants at which the electromagnetic forces f _{1 to} f ₆ act on the stage 6 as elastic forces are k ₁ to k ₆ , respectively.

1.6. Control device 26
Controller 26, a displacement signal vector y _V to the respective displacement signals y ₁ ~y ₃ of the first displacement sensor 13 to the third displacement sensor 15 as an element as input, the elastic constants for elastically supporting the control device 25 the k ₁ to k ₃ outputs an output signal vector _{k V} whose elements. As a result, the effect that the mounting surface of the stage 6 is in a predetermined state is obtained.
The hardware configuration of the control device 26 is shown in FIG. The control device 26 includes a CPU 211, a memory 212, a hard disk 213, a keyboard 214, a mouse 215, a display 216, an optical drive 217, and a communication circuit 218.
The CPU 211 performs processing based on other applications such as an operating system (OS) and a control program recorded on the hard disk 213. The memory 212 provides a work area for the CPU 211. The hard disk 213 records and holds other applications such as an operating system (OS) and a control program. Further, the hard disk 213 stores and holds a feed speed of the drill 1, a target position signal of the stage 6, a limit value of the processing force of the drill 1 with respect to the processing material 4, and the like.
The keyboard 214 and the mouse 215 accept external commands. The display 216 displays an image such as a user interface. The optical drive 217 reads data from the optical medium, such as reading a control program from the optical medium 210 in which the control program is recorded, and reading a program of another application from another optical medium. . The communication circuit 218 acquires the displacement from the first displacement sensor 13, the second displacement sensor 14, and the third displacement sensor 15, outputs a control signal to the actuator, and transmits / receives data to / from an external communication device.

2. Operation of Control Device 26 The control operation of the actuator performed by the control device 26 will be described below.
2.1. Outline of Operation An outline of an actuator control operation performed by the control device 26 will be described with reference to FIG. FIG. 5 simply shows a state in which a processing material 4 (not shown) placed on the stage 6 is processed by a drill 1 (not shown). FIG. 5 shows a first electromagnet 19, a second electromagnet 20, and a third electromagnet 21 as the stage 6 for fixing the work material 4 and the actuator for elastically supporting the stage 6 in the vertical direction. Further, F represents the machining force applied to the work material by the drill 1, and the vertical displacements y ₁ , y ₂ , and y ₃ detected by the first displacement sensor 13, the second displacement sensor 14, and the third displacement sensor 15 are elements. the vertical displacement vector y _V to be defined by the following equation (2).

The first electromagnet 19, the second electromagnet 20, and the third electromagnet 21 are elastic in the vertical direction using elastic supporting forces f ₁ , f ₂ , and f ₃ that are generated because the stage 6 and the work material 4 are elastically supported in the vertical direction. the supporting force vector f _V defined by the following equation (3).

Between the vertical elastic support force vector f _V and vertical displacement vector y _V, the above equation (1) is satisfied.
Assuming that the machining force F (= −f) is generated at the coordinate point Q (x, y) on the table with respect to the work material 4, the force balance equation and the moment balance equation are expressed by the following equations (4) to (4) to (6).

When Expressions (4) to (6) are solved for y ₁ , y ₂ , and y ₃ , the following Expressions (7) to (9) are obtained.

When the inclination angle around the x axis is θ _x and the inclination angle around the y axis is θ _y , the inclination angles θ _x and θ _y can be expressed by the following equations (10) and (11).

When Expression (7) to Expression (9) are used, Expression (10) and Expression (11) can be expressed by the following Expression (12) and Expression (13).

In the equations (12) and (13), if the inclination angle θ _x = 0 and the inclination angle θ _y = 0, the x coordinate value and the y coordinate value of the coordinate point Q are expressed by the following equations (14) and (15). ).

When the drilling force acts on x _EC and y _EC represented by the equations (14) and (15), the tilt angles θ _x and θ _y of the stage are “0”, respectively. From this, if the processing position of the elastically supported processing material 4 is a coordinate point (x _EC , y _EC ), the processing can be performed without tilting the processing surface of the processing material 4. These coordinate points (x _EC , y _EC ) correspond to the elastic center.
In this embodiment, the elastic constants k ₁ , k ₂ , so that the machining position becomes the elastic center from a slight inclination angle generated when the drill comes into contact with the work material for any position to be machined. automatically adjust the k _3, it is possible to suppress the inclination of the stage 6.
The elastic constant k is appropriately set, and the elastic constants k ₁ , k ₂ , and k ₃ are expressed by the following formula ( ₁₎ using variables ζ _x and ζ _y that _satisfy −1 ≦ ζ _x ≦ 1 and −1 ≦ ζ _y ≦ 1. 16) to formula (18). The elastic constant k is set to an appropriate value from the user's experience.

By using the equations (12), (13), and (16) to (18), the inclination angles θ _x and θ _y can be expressed by the following equations (19) and (20).

C1 to c5 are represented by the following formulas (21) to (25), respectively.

Here, relational expressions between the variables ζ _x and ζ _y and the tilt angles θ _x and θ _y of the stage are represented by the following expressions (26) and (27). Note that γ is a positive constant.

From Expression (19) and Expression (20), Expression (26) and Expression (27) can be represented by the following Expression (28) and Expression (29), respectively.

Here, d _i = γc _i . The differential equations shown in equations (28) and (29) are easily shown to be stable. Accordingly, the variables ζ _x and ζ _y in the equations (28) and (29) converge to the constant values ζ _x0 and ζ _y0 , and the following equations (30) and (31) are established.

Expressions (30) and (31) indicate that the inclination angles θ _x and θ _y converge to 0 according to expressions (26) and (27). Further, the elastic constants k ₁ , k ₂ , and k _{3 at} this time can be calculated by substituting ζ _x0 and ζ _y0 into the variables ζ _x and ζ _y in the equations (16) to (18), respectively. .
Further, from Expression (14), Expression (15), and Expression (16) to Expression (18), the x coordinate value and the y coordinate value of the machining position Q are respectively expressed by the following Expression (32) and Expression (33). It can be expressed as

The elastic centers (X _EC , Y _EC ) can be calculated by substituting ζ _x0 and ζ _y0 into the variables ζ _x and ζ _{y in} the equations (32) and (33), respectively.
From the above, the variable zeta _x, the inclination angle theta _x of zeta _y and stage 6, theta relationship between _y Formula (26), equation (27) variable zeta _x which can be represented by, adjusting the zeta _y In this case, the current machining position becomes the elastic center from the slight inclination angle of the stage 6 that occurs when the drill 1 comes into contact with the machining material 4 without specifying the machining position on the machining material 4. In addition, the elastic constants k ₁ , k ₂ , and k ₃ can be automatically adjusted to suppress the inclination of the stage 6 and, consequently, the inclination of the processing surface of the work material 4.

Up to this point, the influence of gravity acting on the processing material 4 and the stage 6 that fixes the processing material 4 is not considered. However, the measured displacement signals y _{1 to} y ₃ may include the influence of gravity. Therefore, hereinafter, means for eliminating the influence of gravity will be described.
According to the knowledge of mechanics, gravity acting on an object can be regarded as an external force acting on the center of gravity of the object. Therefore, when the drill 1 is not in contact with the work material 4, it can be considered that an external force equal to gravity acts on the center of gravity of the object B in which the work material 4 and the stage 6 are regarded as one body. .
As a result, the means described so far can be applied to a state where only gravity is acting. A vertical displacement vector y _VG generated by gravity is expressed by the following equation (34).

Assuming that gravity acts on the center of gravity G of the object B, the force balance equation and the moment balance equation are expressed by the following equations (35) to (37) as in the equations (4) to (6). Can be represented. The coordinate point of the center of gravity G on the table is (x _G , y _G ), the mass of the object B is m, and the gravitational acceleration is g (≈9.8 m / s ² ).

Expressions (35) to (37) are the same as those in the expressions (4) to (6) where f = mg. Further, assuming that an external force (−f) by a drill acts on the coordinate point P (x, y) under the state where gravity is acting, the force balance equation and the moment balance equation are as follows: It can represent with Formula (38)-Formula (40).

The following equations (41) to (43) are obtained by subtracting both sides of equations (35) to (37) from both sides of equations (38) to (40). It is assumed that y _Fi = y _i -y _Gi (i = 1, 2, 3).

According to the equations (41) to (43), even when the working force due to the contact of the drill 1 is applied in a state where gravity acts, the displacement y _i (i = 1) measured by each displacement sensor. , 2, 3), subtracting the displacement y _Gi (i = 1, 2, 3) due to the influence of gravity indicates that the equations (4) to (6) are established. Therefore, before machining with the drill 1, the displacement due to gravity of the work material 4 and the stage 6 is measured, and the displacement due to gravity is subtracted from the elastic displacement measured by each displacement sensor, or the means of the present invention is used. If the elastic constants k ₁ , k ₂ , and k ₃ are adjusted in advance so that the inclination angles θ _x = 0 and θ _y = 0 before processing are used, even if gravity is applied, There is no problem in applying the invention.

2.2. Flowchart The operation of the CPU 211 of the control device 26 will be described with reference to the flowchart shown in FIG. The control device 26 changes the elastic constants k ₁ and k ₂ by changing the variables ζ _x and ζ _y with respect to the inclination angles θ _x and θ _y generated on the stage when the processing force is applied to the processing material 4. , K ₃ is adjusted to correct the tilt of the stage 6.
The processing force acting on the stage 6 through the processing material 4 is balanced with the elastic force that causes the stage 6 to float by the first electromagnet 19, the second electromagnet 20, and the third electromagnet 21. Therefore, by measuring the elastic force generated by the first electromagnet 19, the second electromagnet 20, and the third electromagnet 21, the machining force acting on the stage 6 can be measured.

Prior to the use of the processing device 51, the user of the processing device 51 sets the values of the variables ζ _x and ζ _y to “0”, so that the elastic constant k ₁ of the first electromagnet 19, elastic constant k ₂ of the second electromagnet _20, keep the elastic constant k ₃ of the third electromagnet 21 is set to the elastic constant k. Further, the processing position of the processing material 4 by the drill 1 is set to (a / 3, 0) in the XY coordinates in the processing surface of the stage 6.
When the CPU 211 obtains y ₁ , y ₂ , and y ₃ from the first displacement sensor 13, the second displacement sensor 14, and the third displacement sensor 15 (S 601), the stage is obtained using Expression (10) and Expression (11). The inclination angles θ _x and θ _y are calculated (S603). The CPU 211 determines whether or not the calculated inclination angles θ _x and θ _y are within a preset allowable range (S605).
When the CPU 211 determines that the calculated inclination angles θ _x and θ _y are not within the allowable range, that is, outside the allowable range, the CPU 211 calculates the variables ζ _x and ζ _y using the equations (26) and (27) ( S606). The variables ζ _x and ζ _y are calculated as follows.
When the equations (26) and (27) are integrated, the following equations (44) and (45) can be obtained.

Therefore, the variables ζ _x and ζ _y are calculated by integrating the tilt angles θ _x and θ _y calculated in step S603 with time and multiplying them by a constant γ. The inclination angle theta _x, about how the time integral of theta _y, the inclination angle theta _x acquired at a sampling time of the predetermined _interval, it should sequentially adding the discrete values of theta _y.
The CPU 211 calculates the elastic constants k ₁ , k ₂ , and k ₃ from the equations (16) to (18) using the calculated variables ζ _x and ζ _y and outputs them to the elastic support control device 25. (S607). Further, the CPU 211 calculates the coordinate values (X _EC , Y _EC ) of the elastic center using the equations (32) and (33) (S609). The CPU 211 repeats the processing from step S601 to step S609 until it is determined in step S605 that the inclination angles θ _x and θ _y are within the preset allowable range.

When the CPU 211 determines in step S605 that the inclination angles θ _x and θ _y are within the preset allowable range, the elastic constants k ₁ , k ₂ , k ₃ , and the coordinate values (X _EC , Y _EC ) is output to the worker (S611).
The CPU 211 executes the processing from step S601 to step S611 until an end instruction is received from the worker (S613).
When processing a plurality of holes for a plurality of processing materials, the processing positions are Q ₁ (x ₁ , y ₁ ), Q ₂ (x ₂ , y ₃ )... Q _n (x _n , y _n ) When given, the elastic constants (k ₁₁ , k ₂₁ , k ₃₁ ) (k ₁₂ , k ₂₂ , k ₃₂ )... So that each processing position becomes the elastic center by applying the means of the present invention. By adjusting and storing (k _1n , k _2n , k _3n ), it is possible to shorten the time for the hole drilling process.

[Other embodiments]

(1) Drill 1
In the first embodiment, a drill is used as a cutting tool, but other cutting tools such as a milling tool can be used. Furthermore, in the processing apparatus 51 of the first embodiment, a cutting tool is used, but a tool for performing other processing than cutting can also be used.
(2) Stage 6
In the above-described first embodiment, the stage 6 may include other materials as long as the material has magnetic properties. Further, the shape of the stage 6 is not limited to the above-mentioned square shape, and may be formed in other shapes such as a rectangular shape and a triangular shape.
(3) Displacement sensor In the first embodiment, an eddy current displacement sensor is used as the displacement sensor. However, other displacement sensors may be used as long as they are non-contact displacement sensors. For example, a laser displacement sensor, an electrostatic displacement sensor, or the like may be used.

(4) Actuator In the first embodiment, an electromagnet is used as an actuator, but other actuators such as a piezo element may be used.
(5) State of Stage 6 In the above-described first embodiment, the actuator is controlled by setting the state in which the mounting surface of the work material 4 on the stage 6 is orthogonal to the Z axis as a predetermined state. It is not limited to things. For example, when the processing surface of the processing material 4 is not parallel to the mounting surface of the stage 6, the state of the mounting surface that is orthogonal to the Z axis may be set as a predetermined state.
(6) Hardware Configuration of Control Device 26 In the first embodiment, the CPU 211 is used as the hardware configuration of the control device 26. However, it may be configured using a hardware logic circuit.
(7) Processing of the control device 26 In the first embodiment, the control device 26 and the elastic support control device 25 for elastically supporting the stage 6 are separated in order to emphasize the features and effects of the present invention. However, the control device 26 and the elastic support control device 25 may be integrated into a control device.

(8) Flowchart In the above-described first embodiment, each process is realized by the flowchart shown in FIG. 6, but the present invention is not limited to the illustrated example as long as the purpose of each process can be realized.
(9) Arrangement of electromagnet and displacement sensor In the first embodiment, the first electromagnet 19 to the third electromagnet 21 are arranged to face the first displacement sensor 13 to the third displacement sensor 15 with the stage 6 interposed therebetween. As a result, the displacement in the z direction of the first displacement sensor 13 to the third displacement sensor 15 and the displacement in the z direction of the first electromagnet 19 to the third electromagnet 21 are respectively matched. As long as the displacement in the z direction of 15 can be correlated with the displacement in the z direction of the first electromagnet 19 to the third electromagnet 21, the displacement is not limited to the example. For example, the first electromagnet 19 to the third electromagnet 21 and the first displacement sensor 13 to the third displacement sensor 15 may be arranged on the same side with respect to the stage 6. At this time, similarly to the fourth electromagnet 22 to the sixth electromagnet 24, the first electromagnet 19 to the third electromagnet 21 may be configured such that two electromagnets are paired with the stage 6 interposed therebetween. However, in this case, equation matrix and vertical displacement vector y _V new vertical displacement vector y _V the results obtained by multiplying the left, positive and negative for the element y _1, y _2, y ₃ (46) Adjust the sign.

The present invention prevents breakage of a micro drill and enhances work quality by suppressing bending generated in the drill simultaneously with the tilt of the stage caused by the force generated in the micro drill with respect to the stage holding the workpiece. It is useful as a processing device.

It is the schematic of the processing apparatus 51 which concerns on this invention. It is a top view which shows arrangement | positioning of a displacement sensor. It is a top view which shows arrangement | positioning of an actuator. 2 is a diagram illustrating a hardware configuration of a control device 26. FIG. It is a figure for demonstrating the actuator control operation which the control apparatus 26 performs. 3 is a flowchart showing the operation of a CPU 211 of the control device 26. It is a figure which shows the conventional processing apparatus. It is a figure which shows the conventional processing apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 51 ... Processing apparatus 53 ... Processing unit 1 ... Drill 2 ... Drill holder 3 ... Drill rotation apparatus 4 ... Work material 6 ... Stage 7 ... First position detection Piece 8 ... Second position detection piece 9 ... Third position detection piece 13 ... First displacement sensor 14 ... Second displacement sensor 15 ... Third displacement sensor 16 ... Fourth displacement Sensor 17 ... Fifth displacement sensor 18 ... Sixth displacement sensor 19 ... First electromagnet 20 ... Second electromagnet 21 ... Third electromagnet 22 ... Fourth electromagnet 23 ... First Five electromagnets 24 ... sixth electromagnet 25 ... control device for elastic support 26 ... control device

Claims (5)

Work material placing means on which the work material is placed,
A processing means for holding a tool for processing the processing material and processing the processing material with the tool;
An elastic support means for generating an elastic force, and elastically supporting the work material placing means;
An inclination amount detecting means for detecting an inclination amount of the work material placing means;
A control device for adjusting the elastic force so as to bring the processing material placing means into a predetermined state based on the inclination amount of the working material placing means;
A processing apparatus. In the processing apparatus according to claim 1,
The control means further includes
Adjusting an elastic constant related to the elastic force;
A processing device characterized by In either of the processing apparatuses according to claim 1 or claim 2,
The control means further includes
Adjusting the elastic force so as to suppress inclination of the work material placing means when the work material is processed by the tool;
A processing device characterized by In any of the processing apparatuses which concern on Claims 1-3,
The inclination amount detecting means further includes
Position detecting means for detecting the position of the processing material placing means,
A tilt amount calculating means for calculating the tilt amount from the detected position;
Having
A processing device characterized by A processing method for processing the processing material placed on the processing material placing means with a tool for processing the processing material,
Detecting the amount of inclination of the processing material placing means;
Based on the amount of inclination of the work material placing means, an elastic force is adjusted so as to keep the work material placing means in a predetermined state by suppressing the inclination of the work material placing means, and the work material placing means Elastically supporting,
A processing method characterized by