JP2010114132A - Plating method for airtight terminal - Google Patents

Plating method for airtight terminal Download PDF

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JP2010114132A
JP2010114132A JP2008283084A JP2008283084A JP2010114132A JP 2010114132 A JP2010114132 A JP 2010114132A JP 2008283084 A JP2008283084 A JP 2008283084A JP 2008283084 A JP2008283084 A JP 2008283084A JP 2010114132 A JP2010114132 A JP 2010114132A
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lead
outer ring
plating
metal outer
thickness
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JP5311968B2 (en
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Tetsushi Morikawa
哲志 森川
Akira Sasaki
明 佐々木
Akira Okuno
晃 奥野
Isato Yamauchi
勇人 山内
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NEC Schott Components Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a package for a crystal oscillator such that surface plating layers of a metal outer ring and through leads of an airtight terminal are formed within desired rate ranges and the plating thickness on the through leads is made larger than the plating thickness on the metal outer ring side within a predetermined rate. <P>SOLUTION: The package 10 for the crystal oscillator includes a cylindrical airtight terminal 20, a cylindrical metal cap 30, and a crystal piece 40 soldered to package inner sides 23a as upper ends of the through leads 23. The plating layers formed on surfaces of the metal outer ring and the pair of through leads 23 of the airtight terminal 20 are formed such that the plating thickness of the metal outer ring is selected within a range of 4 to 15 μm and the thickness of the plating layers of the through leads is 1.6 to 2.5 times as large as the thickness of the plating layer of the metal outer ring. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明はガラス対金属封着構造(以下GTMSとも呼ぶ)の気密端子をステムベースに用い、これに筒状金属キャップのリッド部材を気密封止して水晶片を気密空間に収容したシリンダタイプパッケージ、特に、小形タイプの円筒状気密端子と円筒状金属キャップとを圧入して圧接封止した水晶振動子用パッケージおよびこのパッケージに使用する気密端子の製造方法に関する。   The present invention uses a glass-to-metal sealing structure (hereinafter also referred to as GTMS) hermetic terminal as a stem base, and a cylindrical metal cap lid member is hermetically sealed to accommodate a crystal piece in an airtight space. In particular, the present invention relates to a quartz resonator package in which a small-sized cylindrical airtight terminal and a cylindrical metal cap are press-fitted and sealed, and a method for manufacturing an airtight terminal used in the package.

従来、気密端子はその用途に応じて各種の構造のものがあり、金属外環やリードの金属部材の露出部分には用途に応じた材質および厚さのめっき層が形成されている。たとえば、腕時計用水晶振動子に使用する円筒型気密端子は円筒状金属外環の内部にガラス絶縁材を介してリードが気密封着され、金属外環およびリードの露出表面には防錆およびはんだ付け性の良いNi,Au,はんだ等のめっき層が形成される。この気密端子の製造工程は、金属外環、ガラス微粉末を有機バインダとともに混練し造粒したものを所定形状に成形し仮焼きしたガラスタブレットおよび所定長さ寸法のリードを用意する準備工程、これらの原材料をグラファイト製封着治具の所定の位置に配置する組立工程、全体を中性または弱還元性雰囲気中で980〜1000℃で加熱してガラスタブレットを溶融させ、ガラスを介して金属外環とリードとを絶縁する気密封着する工程、および金属外環とリードの露出部分にめっき層を形成するバレルめっき工程を含む。このようにして製作された気密端子は次に水晶振動子をマウントして金属キャップが金属外環のめっき層を封止材として圧入され圧接封止されて水晶振動子用パッケージが構成される。特許文献1はこの種の電子部品についての改良方法を開示する。   Conventionally, there are various types of hermetic terminals depending on the application, and a plating layer having a material and thickness corresponding to the application is formed on the exposed portion of the metal outer ring or the metal member of the lead. For example, a cylindrical airtight terminal used for a quartz crystal unit for a watch has a lead hermetically sealed inside a cylindrical metal outer ring through a glass insulating material, and the metal outer ring and the exposed surface of the lead are protected against rust and solder. A plating layer of Ni, Au, solder or the like with good attachment properties is formed. The manufacturing process of this hermetic terminal includes a metal outer ring, a glass tablet obtained by kneading and granulating glass fine powder together with an organic binder into a predetermined shape, preparatory steps for preparing a glass tablet and a lead having a predetermined length, Assembling process in which raw material is placed at a predetermined position of graphite sealing jig, the whole is heated at 980-1000 ° C. in a neutral or weakly reducing atmosphere to melt the glass tablet, and the outside of the metal is exposed through the glass. A hermetically sealing step for insulating the ring and the lead, and a barrel plating step for forming a plating layer on the exposed portion of the metal outer ring and the lead. The hermetic terminal thus manufactured is then mounted with a crystal resonator, and a metal cap is press-fitted with a plating layer of a metal outer ring as a sealing material and sealed by pressure, thereby forming a crystal resonator package. Patent Document 1 discloses an improved method for this type of electronic component.

一方、気密封止したパッケージ内に水晶片を実装する水晶振動子用パッケージとして、高い気密性と信頼性を要求される場合に円筒型気密端子と円筒型金属キャップで構成するシリンダタイプが多用されている。そして、円筒型気密端子と円筒型金属キャップははんだめっきの封止材でパッケージに対する気密性を確保している。特許文献2は環境上有害なSn−Pb共晶はんだに代えてSn−Ag系合金またはSn−Bi系合金のはんだめっきを使用して円筒型気密端子の金属外環やリードの表面にめっき層を形成して封止材としている。さらに、水晶振動子用パッケージとして高い気密性と信頼性の円筒型気密端子であるガラス対金属封着構造(GTMS)型気密端子と円筒型金属キャップのパッケージが特許文献3で開示される。   On the other hand, as a crystal unit package in which a crystal piece is mounted in a hermetically sealed package, a cylinder type composed of a cylindrical airtight terminal and a cylindrical metal cap is often used when high airtightness and reliability are required. ing. The cylindrical airtight terminal and the cylindrical metal cap ensure the airtightness of the package with a solder plating sealing material. Patent Document 2 discloses a plating layer on the metal outer ring or lead surface of a cylindrical airtight terminal using solder plating of Sn-Ag alloy or Sn-Bi alloy instead of Sn-Pb eutectic solder which is environmentally harmful. Is used as a sealing material. Further, Patent Document 3 discloses a package of a glass-to-metal sealing structure (GTMS) type airtight terminal and a cylindrical metal cap, which is a highly airtight and reliable cylindrical airtight terminal as a crystal oscillator package.

特開2001−267190号公報JP 2001-267190 A 特開2002−160089号公報JP 2002-160089 A 特開2003−152129号公報JP 2003-152129 A

ところで、腕時計用水晶振動子の円筒型気密端子を使用したパッケージには、金属外環の外径寸法d1が0.90〜0.95mm程度の通称φ1.2と呼ばれる市販品がある。このような非常に小さい品種は気密端子の金属外環およびリードの露出部分へのめっき層形成の作業能率を高めるために、バレル内に多数の端子部品を収容して一括してめっきする,いわゆるバレルめっき法が行なわれる。しかしながら、前述のように非常に小さい金属外環の場合、それに応じてリードの外径寸法d2も0.13〜0.17mm程度と小さくなり、しかもリード相互の間隔寸法gが0.10〜0.20mm程度と、リードの外径寸法d2とほぼ同等程度となるため、バレルめっき法を採用するとあるリードが他のリード間に嵌まり込み、その状態でめっき層が形成されてリード同士がめっき層によってくっ付く、いわゆるアベック不良が多発するという問題点があり、その解消のために複数個のリードに対し導電材や樹脂材でお互いに橋絡することが提案された(特許文献1参照)。また、前述のとおり、リードが細く腰が弱いためにリードが折れ曲り易いほかめっき層の厚さを管理することが難しいという問題点があった。   By the way, a package using a cylindrical airtight terminal of a quartz crystal for a wristwatch includes a commercially available product called “φ1.2” having an outer diameter d1 of a metal outer ring of about 0.90 to 0.95 mm. In order to increase the work efficiency of forming the plating layer on the metal outer ring of the airtight terminal and the exposed part of the lead, such a very small variety accommodates a large number of terminal parts in the barrel and performs plating in a lump. Barrel plating is performed. However, in the case of a very small metal outer ring as described above, the outer diameter d2 of the lead is accordingly reduced to about 0.13 to 0.17 mm, and the distance g between the leads is 0.10 to 0. .20mm, approximately the same as the outer diameter d2 of the lead, when using the barrel plating method, one lead fits between the other leads, and a plating layer is formed in that state, and the leads are plated. There is a problem that so-called Abeck defects frequently stick to each other, and it has been proposed to bridge a plurality of leads with a conductive material or a resin material to solve the problem (see Patent Document 1). . Further, as described above, since the lead is thin and the waist is weak, the lead is easily bent and it is difficult to control the thickness of the plating layer.

一方、本発明者等は円筒型気密端子に円筒型金属キャップを圧入して封止する水晶振動子用パッケージでは気密端子の金属外環とリードのめっき層の膜厚選定の重要性に着目してそれぞれのめっき層の厚さに関する適正かつ適合する厚さを調査した。実験的知見によれば、リードに水晶片をはんだ付けする場合の適正なめっき層の厚さは、圧接封止するに適合する金属外環のめっき層の厚さとは異なること、およびバレルめっき法によるそれぞれの表面のめっき層の厚さは相互に異なることを見出した。その結果、円筒型気密端子に円筒型金属キャップを装着するパッケージにおいては、気密端子の金属外環およびリードのそれぞれの表面に施すめっき層の膜厚比率をある範囲内に選定することが望ましく、リード側を外環側より厚いめっき層とすべきであることが判明した。さらに、バレルめっき法によるめっき層の形成においては、リード材の長さを事前に所定長より長くすることで、めっき層の厚さを調製でき、それにより所定長の貫通リードのめっき膜厚が得られることを見出した。   On the other hand, the inventors focused on the importance of selecting the thickness of the metal outer ring of the hermetic terminal and the plating layer of the lead in the package for the crystal unit in which the cylindrical metal cap is press-fitted into the cylindrical hermetic terminal and sealed. The appropriate and suitable thickness for each plating layer was investigated. According to experimental findings, the proper plating layer thickness when soldering quartz pieces to the leads is different from the plating layer thickness of the metal outer ring that is suitable for pressure welding, and barrel plating method It was found that the thickness of the plating layer on each surface was different from each other. As a result, in the package in which the cylindrical metal cap is attached to the cylindrical hermetic terminal, it is desirable to select the film thickness ratio of the plating layer applied to each surface of the metal outer ring and the lead of the hermetic terminal within a certain range. It has been found that the lead side should be thicker than the outer ring side. Furthermore, in the formation of the plating layer by the barrel plating method, the thickness of the plating layer can be adjusted by making the length of the lead material longer than the predetermined length in advance. It was found that it can be obtained.

したがって、本発明の目的は上述するように気密端子の金属外環および貫通リードのそれぞれの表面めっき層を所望する比率範囲内に選定し、特に、小サイズの円筒型気密端子と、これを使用した水晶振動子用パッケージを提供するものである。好ましくは、バレルめっき法の利用による金属外環とリードとのめっき層の膜厚に関し、貫通リード側のめっき厚を金属外環側のめっき厚に比べて所定比率内で厚く調製することを提示するものである。   Therefore, the object of the present invention is to select the respective surface plating layers of the metal outer ring and the through lead of the hermetic terminal within a desired ratio range as described above, and in particular, to use a small-sized cylindrical hermetic terminal and the same. A crystal resonator package is provided. Preferably, regarding the thickness of the plating layer between the metal outer ring and the lead by using the barrel plating method, it is suggested that the plating thickness on the through lead side should be adjusted within a predetermined ratio compared to the plating thickness on the metal outer ring side To do.

さらに別の目的は、金属外環のめっき層の厚さとリードのめっき層の厚さとの比率を所定の範囲内に調製するバレルめっき方法を利用した気密端子の製造方法を提案する。同時に、多数の端子部品をバレルめっき法によりその外環およびリードのそれぞれの表面にろう材層を形成する際、ある端子部品のリードに他の端子部品のリードが嵌まり込んでアベック不良を発生させたり、リードが折れ曲ったりせずに、所望するめっき層の厚さに調製することを特徴とする気密端子の製造方法の提案を目的とする。また、このような気密端子を用いて水晶振動子用パッケージを提供するものである。   Still another object is to propose a method for manufacturing an airtight terminal using a barrel plating method in which the ratio between the thickness of the plating layer of the metal outer ring and the thickness of the plating layer of the lead is adjusted within a predetermined range. At the same time, when a brazing material layer is formed on the outer ring and lead surfaces of a large number of terminal parts by barrel plating, the lead of another terminal part fits into the lead of one terminal part, causing an Abeck failure. An object of the present invention is to propose a method for manufacturing an airtight terminal, which is characterized in that the thickness of the plating layer is adjusted to a desired thickness without causing the lead to be bent. Further, the present invention provides a crystal resonator package using such an airtight terminal.

本発明によれば、円筒状金属外環に気密封着されたガラス絶縁体に貫通リードを配置して貫通リードおよび金属外環を絶縁すると共にそれぞれの表面にめっき層を異なる厚さで形成した気密端子を提供する。また、この気密端子と、貫通リードの一端側でリードめっき層によりろう付けされる水晶片と、金属外環にそのめっき層を介在して圧入により封止した円筒状金属キャップとを具備し、この金属キャップが形成する空間を水晶片の収容空間とする水晶振動子において、貫通リードのめっき層の厚さを金属外環の表面めっき層の厚さに比べて1.6〜2.5倍の範囲内で厚くしたことを特徴とする水晶振動子用パッケージを提供する。ここで、めっき層ははんだ付け良好なろう材層であること、特に、金属外環はその外径寸法が0.90±0.05mm(通称φ1.2)であり、金属外環のめっき厚を4〜15μmの範囲内で設定することを特徴とする。   According to the present invention, the through leads are arranged on the glass insulator hermetically sealed to the cylindrical metal outer ring to insulate the through leads and the metal outer ring, and the plating layers are formed with different thicknesses on the respective surfaces. Provide airtight terminals. The airtight terminal, a crystal piece brazed by a lead plating layer on one end side of the penetrating lead, and a cylindrical metal cap sealed by press-fitting the plating layer on the metal outer ring, In the crystal resonator in which the space formed by the metal cap is the accommodation space for the crystal piece, the thickness of the plated layer of the through lead is 1.6 to 2.5 times the thickness of the surface plated layer of the metal outer ring. A crystal resonator package characterized in that the thickness is increased within the range described above. Here, the plated layer is a brazing material layer with good soldering. In particular, the outer diameter of the metal outer ring is 0.90 ± 0.05 mm (commonly known as φ1.2), and the plating thickness of the metal outer ring Is set within a range of 4 to 15 μm.

本発明の別の観点によれば、円筒状金属外環にガラス絶縁材を介し相互に離隔し気密封着して貫通させた所定長のリードを具備し、金属外環およびリードのそれぞれの表面にめっき層を形成する気密端子の製造方法において、所定サイズの金属外環、ガラスタブレットおよび前記所定長より長いリード材を封着治具に組み込む工程、前記ガラスタブレットを溶融し金属外環内にガラス絶縁材の介在により前記リード材を貫通配置させる端子部品の気密封着工程、多数の端子部品をバレルに収容して前記金属外環および前記リード材の表面にめっき層を一括して形成するバレルめっき工程、およびめっき層が形成された前記端子部品の前記リード材を所定長に切断する工程を含み、前記バレルめっきの際、前記リード材の長さに依存するめっき厚さを利用して、前記リードのめっき厚さ(t1)に対する前記金属外環のめっき厚さ(t2)の比率(t1/t2)を1.6〜2.5の範囲内に調製することを特徴とする気密端子の製造方法が提案される。さらに、前記バレルめっき工程の前後に前記端子部品のリード材の下端部同士を固着材により橋絡する工程および前記固着材を除去する工程を付加したことを特徴とする気密端子の製造方法が提案される。好ましくは、前記金属外環は外径寸法が0.90±0.05mmの低炭素鋼、Fe―Ni合金またはFe−Ni−Co合金からなり、前記リードは外径寸法が0.15±0.02mmのFe―Ni合金またはFe−Ni−Co合金からなる。   According to another aspect of the present invention, the cylindrical outer metal ring is provided with leads of a predetermined length that are separated from each other through a glass insulating material and hermetically sealed and penetrated, and each surface of the outer metal ring and the lead is provided. In a method for manufacturing an airtight terminal for forming a plating layer on a metal outer ring, a step of incorporating a metal outer ring of a predetermined size, a glass tablet and a lead material longer than the predetermined length into a sealing jig, melting the glass tablet into the metal outer ring A process for hermetically sealing the terminal component in which the lead material is disposed through the glass insulating material, a large number of terminal components are accommodated in the barrel, and a plating layer is collectively formed on the surface of the metal outer ring and the lead material. A barrel plating step, and a step of cutting the lead material of the terminal component on which the plating layer is formed into a predetermined length, and plating depending on the length of the lead material during the barrel plating The ratio (t1 / t2) of the plating thickness (t2) of the metal outer ring to the plating thickness (t1) of the lead is adjusted within the range of 1.6 to 2.5. A method for manufacturing a characteristic hermetic terminal is proposed. Furthermore, a method of manufacturing an airtight terminal is provided, characterized by adding a step of bridging the lower end portions of the lead materials of the terminal parts with a fixing material and a step of removing the fixing material before and after the barrel plating step. Is done. Preferably, the metal outer ring is made of low carbon steel having an outer diameter of 0.90 ± 0.05 mm, Fe—Ni alloy or Fe—Ni—Co alloy, and the lead has an outer diameter of 0.15 ± 0. .02 mm Fe—Ni alloy or Fe—Ni—Co alloy.

本発明による水晶振動子用パッケージは、ガラス対金属封着構造の円筒型気密端子を用いるので機械的強度の強化に加え気密性と信頼性が確保され、金属外環およびリードのめっき層がバレルめっきであるのでその利点が得られる。すなわち、マウント部とシール部がそれぞれ所定の比率関係の膜厚のめっき層を設けることで品質向上と性能アップに寄与する。なお、バレルめっきのめっき層にPbフリーのめっき材を使用することで環境問題がなく気密確保と安全性に役立つなどの実用的効果を発揮できる。また、はんだ付け性の良好なSn合金のめっき層を比較的厚めにリード側に設けることで水晶片とのはんだ付けを確実にするほか、金属外環側のめっき厚を薄目に規制することで厚入時のめっき材のはみだしを防ぐことができる。なお、バレルめっきは比較的少量の液の中で大量の加工品の処理が可能であるほかに労力が省けめっき加工の機械化・自動化が容易であり、前処理からめっき・後処理・洗浄・乾燥など一貫加工が容易である。また、加工品の形状・寸法、まためっきの種類に拘らず広い範囲のめっき加工ができ、小物などひっかけではめっきの難しいものの加工ができる。特に、大量生産に適し、加工費、特に労務費の低減が期待でき、加工品相互は厚さの比較的均一なめっきができるなどの利点がある。さらに、絶えずめっき液が撹拌され、めっき液の条件を均一に保つことができ、緊密に積層され、薄くても耐食性に富んだめっき皮膜が得られる。したがって、作業上のトラブルや不具合の発生が減少でき、量産化と低コスト化に寄与する。   The crystal resonator package according to the present invention uses a cylindrical airtight terminal with a glass-to-metal sealing structure, so that in addition to enhancing mechanical strength, airtightness and reliability are ensured, and the metal outer ring and lead plating layer are barrels. Since it is plating, the advantage is acquired. That is, the mount part and the seal part each contribute to quality improvement and performance improvement by providing a plating layer having a film thickness having a predetermined ratio. By using a Pb-free plating material for the barrel plating layer, there are no environmental problems and practical effects such as ensuring airtightness and safety can be exhibited. In addition to ensuring the soldering with the crystal piece by providing a relatively thick Sn alloy plating layer with good solderability on the lead side, the plating thickness on the metal outer ring side can be regulated thinly. It is possible to prevent the plating material from protruding when thickly inserted. In addition, barrel plating can process a large amount of processed products in a relatively small amount of liquid, and it saves labor and facilitates mechanization and automation of plating processing. From pretreatment to plating, posttreatment, cleaning and drying. Integrated processing is easy. In addition, a wide range of plating can be performed regardless of the shape and size of the processed product and the type of plating, and it is possible to process objects that are difficult to plate with small objects. In particular, it is suitable for mass production, and can be expected to reduce processing costs, particularly labor costs, and has the advantage that the processed products can be plated with a relatively uniform thickness. Furthermore, the plating solution is constantly stirred, the conditions of the plating solution can be kept uniform, and a plating film that is closely stacked and rich in corrosion resistance even when thin is obtained. Therefore, it is possible to reduce the occurrence of troubles and defects in work, contributing to mass production and cost reduction.

本発明による実施の形態は、円筒状外環内にガラスを貫通する一対のリードを配置してこの貫通リードと金属外環が絶縁される気密端子と、貫通リードの一端側ではんだ付けされる水晶片と、この水晶片を収容する空間を形成するように気密端子の金属外環に圧入封止により気密封着する円筒状金属キャップとを具備した水晶振動子用パッケージである。このパッケージにおいて、気密端子は、従来と同様な方法で金属外環およびリードの金属部材の全表面に、全体を電解液中に浸漬して電解Cuもしくは電解Niめっき層が形成さる。次いでリードのめっき層上にはんだ材のめっき層として、Sn合金めっき層が浸漬法により形成される。あるいは、リード金属部材上に直接Sn合金めっき層を形成してもよい。この後、このはんだ材のめっき層に水晶片がはんだ付けされる。一方、金属製のキャップはその全表面に電気Niめっき層が形成される。各めっき層の使用材料はその機能に合わせて選択される。ここで、金属キャップはその内周面にNiめっき層が形成され、気密端子の金属外環の表面に形成したSn系めっき層とで効果的なシール性が得られる。   In the embodiment according to the present invention, a pair of leads penetrating glass is arranged in a cylindrical outer ring, and an airtight terminal in which the through lead and the metal outer ring are insulated, and soldered at one end side of the through lead. A crystal resonator package comprising a crystal piece and a cylindrical metal cap that is hermetically sealed by press-fitting to a metal outer ring of an airtight terminal so as to form a space for accommodating the crystal piece. In this package, the airtight terminal is immersed in the electrolytic solution on the entire surface of the metal outer ring and the metal member of the lead in the same manner as in the prior art to form an electrolytic Cu or electrolytic Ni plating layer. Next, an Sn alloy plating layer is formed on the lead plating layer by a dipping method as a solder material plating layer. Alternatively, the Sn alloy plating layer may be formed directly on the lead metal member. Thereafter, a crystal piece is soldered to the plating layer of the solder material. On the other hand, an electric Ni plating layer is formed on the entire surface of the metal cap. The material used for each plating layer is selected according to its function. Here, the Ni cap layer is formed on the inner peripheral surface of the metal cap, and an effective sealing property is obtained with the Sn-based plating layer formed on the surface of the metal outer ring of the airtight terminal.

次に、気密端子の金属外環のコバール材の外表面に施すSn合金めっき層として4〜15μmめっき層を形成することができる。また、リードのめっき層としてのろう材はSn合金めっき層が使用され、はんだ付け性確保のために14〜24μmの範囲で比較的厚く形成してはんだ付性を確保する。これらのめっき層の下限は圧接封止材またははんだ材としての機能確保であり、上限は作業性からの制限である。かくして、円筒型気密端子を使用し、それぞれの機能を発揮するめっき層により金属キャップが密着性の確保、シール性の向上、リフロー工程に対する耐熱性の向上、および難酸化性等の耐化学変化対応性のある金属パッケージが提供できる。   Next, a 4 to 15 μm plating layer can be formed as the Sn alloy plating layer applied to the outer surface of the Kovar material of the metal outer ring of the hermetic terminal. In addition, a Sn alloy plating layer is used as a brazing material as a lead plating layer, and in order to ensure solderability, it is formed relatively thick in the range of 14 to 24 μm to ensure solderability. The lower limit of these plating layers is to ensure the function as a pressure sealing material or a solder material, and the upper limit is a limitation from workability. Thus, using a cylindrical airtight terminal, the metal cap ensures adhesion, improved sealing performance, improved heat resistance against the reflow process, and resistance to chemical changes such as oxidation resistance by using plated layers that exhibit their respective functions. A flexible metal package can be provided.

図1は本発明に係る実施例を示す水晶振動子用パッケージを示し、(a)はその分解斜視図および(b)は部分切欠き斜視図を示している。水晶振動子用パッケージ10は、直径略1.2mmの円筒体からなり、φ1.2円筒型気密端子20と、円筒型金属キャップ30と、気密端子20上で貫通リード23の上端であるパッケージ内部側23aにはんだ付けされた水晶片40とを具備して構成される。気密端子20と金属キャップ30は圧接封止材の介在により気密封着される。気密端子20のめっき層は材料コストの安いSn−Pb合金の高温はんだを使用する場合の実施例であり、はんだ用めっき層は気密端子の貫通リードには膜厚の厚いめっき層が形成され、金属キャップには少なくとも内面シール部位にNiめっき層31が比較的薄く形成される。拡大部分断面図に示すように、気密端子20は、金属外環21、この金属外環21の内側に貫通配置した一対の貫通リード23、および貫通リード23を金属外環21から絶縁して気密封着する絶縁ガラス22からなるガラス対金属封着構造である。   1A and 1B show a quartz resonator package according to an embodiment of the present invention, in which FIG. 1A is an exploded perspective view and FIG. 1B is a partially cutaway perspective view. The crystal resonator package 10 is formed of a cylindrical body having a diameter of approximately 1.2 mm, and has a φ1.2 cylindrical airtight terminal 20, a cylindrical metal cap 30, and the inside of the package that is the upper end of the through lead 23 on the airtight terminal 20. A crystal piece 40 soldered to the side 23a. The hermetic terminal 20 and the metal cap 30 are hermetically sealed by the interposition of the pressure sealing material. The plating layer of the hermetic terminal 20 is an example in the case of using a high-temperature solder of Sn—Pb alloy with a low material cost, and the plating layer for solder is formed with a thick plating layer on the through lead of the hermetic terminal, On the metal cap, the Ni plating layer 31 is relatively thinly formed at least on the inner surface seal portion. As shown in the enlarged partial cross-sectional view, the hermetic terminal 20 is configured to insulate the metal outer ring 21, the pair of through leads 23 disposed through the inner side of the metal outer ring 21, and the through leads 23 from the metal outer ring 21. This is a glass-to-metal sealing structure made of insulating glass 22 to be sealed.

気密端子20は周知の方法で予め加熱用組立治具に外環と貫通リードと共にガラスタブレットのガラス材を組み込み、加熱炉を通炉することによりガラス材を軟化・溶融して気密封着される。金属外環21および一対の貫通リード23は互いに絶縁ガラス22と熱膨張率が近似する材料が選択されて使用される。気密端子20の金属外環21と貫通リード23および金属キャップ30の金属表面部分にはそれぞれめっき層24,25,31が設けられている。金属外環21および一対の貫通リード23の金属表面部分は下地めっき層としての電解Cuめっき層およびはんだめっき層24,25が電解液に浸漬して形成される。一方、金属キャップ30にはNiめっき層が電気めっきにより形成される。この金属キャップ30は、水晶片40が気密端子20の貫通リード23の内側端子部にはんだめっき層25ではんだ付けされた後、金属外環21のNiめっき層24上に圧入され、圧接封止用めっき層と圧接して気密封止される。後述するように、それぞれのめっき層はめっき用金属材料とめっき層の膜厚が特定され、所望する作用効果を満足させるように選定される。すなわち、図に示す気密端子20の貫通リード23に水晶片40を350℃〜400℃のはんだ付け工程で接合するに好都合な高温はんだめっき層25が設けられている。この気密端子20はパッケージ10の金属ベースとなって、これにパッケージ10の水晶片40がはんだ付けにより装着される。そして、水晶片40が装着された気密端子20には金属キャップ30が被せられて金属外環21のめっき層24と金属キャップ30の内面側のNiめっき層31にて圧着により気密封止される。なお、金属キャップ30は洋白材から成り、その内周面に電気Niめっき層が形成され、金属外環21のめっき層24と効果的なシール性を発揮し、圧入結合の作業性を容易にするなど実用的効果を奏する。   The hermetic terminal 20 is hermetically sealed by softening and melting the glass material in a known manner by previously incorporating the glass material of the glass tablet together with the outer ring and the through lead into the heating assembly jig and passing through the heating furnace. . For the metal outer ring 21 and the pair of through leads 23, materials having thermal expansion coefficients similar to those of the insulating glass 22 are selected and used. Plating layers 24, 25, and 31 are provided on the metal outer ring 21, the through lead 23, and the metal surface portion of the metal cap 30 of the hermetic terminal 20, respectively. The metal surface portions of the metal outer ring 21 and the pair of through leads 23 are formed by immersing an electrolytic Cu plating layer and solder plating layers 24 and 25 as an underlying plating layer in an electrolytic solution. On the other hand, a Ni plating layer is formed on the metal cap 30 by electroplating. In the metal cap 30, after the crystal piece 40 is soldered to the inner terminal portion of the penetration lead 23 of the airtight terminal 20 with the solder plating layer 25, the metal cap 30 is press-fitted onto the Ni plating layer 24 of the metal outer ring 21, and is pressure sealed. It is hermetically sealed in pressure contact with the plating layer. As will be described later, each plating layer is selected so that the metal material for plating and the film thickness of the plating layer are specified and the desired effects are satisfied. That is, a high-temperature solder plating layer 25 that is convenient for joining the crystal piece 40 to the through lead 23 of the hermetic terminal 20 shown in the drawing in a soldering process at 350 ° C. to 400 ° C. is provided. The hermetic terminal 20 becomes a metal base of the package 10, and the crystal piece 40 of the package 10 is attached thereto by soldering. The airtight terminal 20 to which the crystal piece 40 is attached is covered with a metal cap 30 and hermetically sealed by pressure bonding with the plating layer 24 of the metal outer ring 21 and the Ni plating layer 31 on the inner surface side of the metal cap 30. . The metal cap 30 is made of a white material, and an electric Ni plating layer is formed on the inner peripheral surface thereof. The metal cap 30 exhibits an effective sealing property with the plating layer 24 of the metal outer ring 21 and facilitates the workability of the press-fit connection. There are practical effects such as.

次に、本発明に係るパッケージに使用する気密端子の構造について図面を参照しつつ詳述する。腕時計向け水晶振動子に使用する円筒型気密端子は直径略1.2mm、通称φ1.2と呼ばれる品種が多用されており、以下この品種Aについて説明する。図2において、金属外環21の内部にガラス22を介して、2本の貫通リード23が気密に封着されている。金属外環21は、例えば、低炭素鋼、Fe−Ni合金またはFe−Ni−Co合金からなり、外径寸法d1が0.90〜0.95mm、高さ寸法が0.75〜0.85mmである。ガラス22は、ソーダライムガラスやソーダバリウムガラスやホウケイ酸ガラス等よりなる。貫通リード23は、Fe−Ni合金やFe−Ni−Co合金等よりなり、外径寸法d3が0.13〜0.17mm、長さlが7.0〜8.0mmのもので、2本の貫通リード3の間隔寸法gは0.10〜0.20mmのものである。金属外環21および貫通リード23の露出部分には、めっき層24および25が形成されている。金属外環21および貫通リード23の露出部分には、例えばろう材めっき層24および25としてSn−90wt%Pb層を形成している。一方金属外環21の露出部分のろう材めっき層24は、後述するように金属キャップの圧入封止時に、金属外環21と金属キャップ間の封止材として作用して気密封止に役立つ。また、貫通リード23に関しては、リード上方部分のろう材めっき層25が水晶片の電子部品素子のろう付け用に役立ち、貫通リード23の下方部分のろう材めっき層25が貫通リード23をプリント基板等へろう付けするときのろう付け性を確保するのに役立つ。ここで、貫通リード23の下方部分のろう材めっき層25は、貫通リード23の周面部のみに形成されており、後述する理由でその下端面23bには形成されない。また、このように貫通リード23の下端面23bにめっき層25がなくても、一般に気密端子20の貫通リード23の下端部は、プリント基板等の透孔に挿入されてろう付けされた後に切断除去されるので、何ら問題になることはない。   Next, the structure of the hermetic terminal used in the package according to the present invention will be described in detail with reference to the drawings. As the cylindrical airtight terminal used for the quartz crystal unit for wristwatches, a variety called a diameter of about 1.2 mm and a so-called φ1.2 is frequently used. In FIG. 2, two through leads 23 are hermetically sealed inside a metal outer ring 21 through a glass 22. The metal outer ring 21 is made of, for example, low carbon steel, Fe—Ni alloy or Fe—Ni—Co alloy, and has an outer diameter dimension d1 of 0.90 to 0.95 mm and a height dimension of 0.75 to 0.85 mm. It is. The glass 22 is made of soda lime glass, soda barium glass, borosilicate glass, or the like. The through leads 23 are made of Fe—Ni alloy, Fe—Ni—Co alloy or the like, and have two outer diameters d3 of 0.13 to 0.17 mm and length l of 7.0 to 8.0 mm. The distance g between the through leads 3 is 0.10 to 0.20 mm. Plating layers 24 and 25 are formed on the exposed portions of the metal outer ring 21 and the through leads 23. For example, Sn-90 wt% Pb layers are formed as brazing material plating layers 24 and 25 on the exposed portions of the metal outer ring 21 and the through leads 23. On the other hand, the brazing material plating layer 24 at the exposed portion of the metal outer ring 21 serves as a sealant between the metal outer ring 21 and the metal cap and is useful for hermetic sealing when the metal cap is press-fitted and sealed as will be described later. Further, with respect to the penetration lead 23, the brazing material plating layer 25 in the upper part of the lead is useful for brazing the electronic component element of the crystal piece, and the brazing material plating layer 25 in the lower part of the penetration lead 23 is used as the printed board. Helps to ensure brazeability when brazing to etc. Here, the brazing material plating layer 25 in the lower part of the through lead 23 is formed only on the peripheral surface portion of the through lead 23 and is not formed on the lower end surface 23b for the reason described later. Further, even if the plating layer 25 is not provided on the lower end surface 23b of the through lead 23 as described above, the lower end portion of the through lead 23 of the airtight terminal 20 is generally cut after being inserted into a through hole such as a printed board and brazed. Since it is removed, there is no problem.

以下、前述した本発明の気密端子20の製造方法について、図面を参照して説明する。図3は、本発明の製造方法の第1実施態様の製造工程ブロック図を示す。まず、所定厚さの鉄・ニッケル合金等の金属板を押し出しプレス後に打ち抜いて金属外環21を製作する。また、ホウケイ酸ガラス等のガラス微粉末と有機バインダとを混練し、所定の粒度に造粒した後に、所定形状にプレス成形し、仮焼きしてガラス粒同士を結着させるとともに有機バインダを焼き飛ばしてガラスタブレット22aを製作する。さらに、所定の外径寸法のFe−Ni−Co合金等の金属線を端子部品Aのリード材23の長さlよりも長い適宜の長さ寸法lc(=l+Δl)に切断して、リード材23cを製作する(a工程)。そして、これら金属外環1,ガラスタブレット22aおよびリード23cを、グラファイト製の封着治具(図示省略)を用いて所定の関係位置に組み立て(b工程)、中性ないし弱還元性の雰囲気中で約980〜1000℃で加熱して、前記ガラスタブレット22aを溶融させて、ガラスによりリード材23cを気密に封着する(c工程)。図3の(a)ないし(c)工程によって、気密端子20の原形となる端子部品Aが製造される。   Hereinafter, a method for manufacturing the above-described hermetic terminal 20 of the present invention will be described with reference to the drawings. FIG. 3 shows a manufacturing process block diagram of the first embodiment of the manufacturing method of the present invention. First, a metal outer ring 21 is manufactured by extruding a metal plate of iron / nickel alloy or the like having a predetermined thickness after extrusion. In addition, glass fine powder such as borosilicate glass and an organic binder are kneaded and granulated to a predetermined particle size, then press-formed into a predetermined shape, calcined to bind the glass particles together, and the organic binder is baked. Fly to make glass tablet 22a. Furthermore, a metal wire such as an Fe—Ni—Co alloy having a predetermined outer diameter is cut into an appropriate length dimension lc (= l + Δl) longer than the length l of the lead material 23 of the terminal component A, thereby leading to the lead material. 23c is manufactured (step a). Then, the outer metal ring 1, the glass tablet 22a and the lead 23c are assembled at predetermined positions using a graphite sealing jig (not shown) (step b), in a neutral or weakly reducing atmosphere. The glass tablet 22a is melted by heating at about 980 to 1000 ° C., and the lead material 23c is hermetically sealed with glass (step c). 3A to 3C, the terminal component A that is the original form of the hermetic terminal 20 is manufactured.

バレルめっきする場合、好ましくは、図4に示すように、この端子部品Aのリード材23cの外方端を、リード間隔寸法gを保持したまま固着材50で橋絡する(d工程)。この端子部品Aのリード材23cの下端部を固着材で橋絡する工程は必ずしも必要でなく省略することもできる。しかし、バレルめっき処理にはリードの絡み防止のために固着材による橋絡が好ましい。次に、リード材23cの下端部を固着した多数の端子部品Aをバレル(図示省略)に収容し、このバレルをめっき浴中に浸漬して回転させる,いわゆるバレルめっき法によって、金属外環21およびリード材23cの露出部分にろう材のめっき層24および25を形成する(e工程)。次に、このめっき層24、25が形成された端子部品Aのリード23cの下方部分を、その上端側の所定位置60で切断して固着材50を除去する(f工程)。その結果、図2に示すような所定長lの寸法としてのリード23を有する気密端子20が製作完了する。このようにして得られた気密端子20の金属外環21およびリード23の露出表面にはめっき層24、25が形成されているが、先に説明したように、貫通リード23の下端面23bにはめっき層25がない。   When barrel plating is performed, preferably, as shown in FIG. 4, the outer end of the lead member 23c of the terminal component A is bridged with the fixing member 50 while maintaining the lead interval dimension g (step d). The step of bridging the lower end portion of the lead material 23c of the terminal component A with a fixing material is not always necessary and can be omitted. However, in the barrel plating process, a bridge with a fixing material is preferable to prevent the lead from being entangled. Next, a large number of terminal parts A, to which the lower end portion of the lead material 23c is fixed, are accommodated in a barrel (not shown), and this barrel is immersed in a plating bath and rotated, so-called barrel plating. Then, plating layers 24 and 25 of the brazing material are formed on the exposed portions of the lead material 23c (step e). Next, the lower part of the lead 23c of the terminal component A on which the plated layers 24 and 25 are formed is cut at a predetermined position 60 on the upper end side to remove the fixing material 50 (step f). As a result, the hermetic terminal 20 having the lead 23 having a predetermined length l as shown in FIG. Plating layers 24 and 25 are formed on the exposed surface of the metal outer ring 21 and the lead 23 of the airtight terminal 20 obtained in this way, but as described above, on the lower end surface 23b of the through lead 23. Has no plating layer 25.

この種の水晶振動子用気密端子20は、貫通リード23の上端部に水晶振動片(図示省略)を固着するが、このとき貫通リード23の上方部分のろう材めっき層25は、水晶片のろう付け性を高くして、確実にろう付けするのに役立つ。また、図1に示すように、水晶片40を固着した後、金属キャップ30を圧入により封止して水晶振動子用パッケージとするが、このとき金属外環21のろう材めっき層24は、金属外環21と金属キャップ30との間に圧着状態で満たされ、気密封止を確実にするのに役立つ。また、気密端子20を用いた水晶振動子パッケージ10は、その下方側に伸びたリードをプリント基板の透孔に挿通し、噴流式めっき装置によりろう付けするなどして組み付けられる。このとき、リードの周面部のろう材めっき層は、ろう材によるろう付け性の確保に役立つ。なお、気密端子20のリード23の下端面には、めっき層がないが、ほとんどの場合何ら問題はない。すなわち、この水晶振動子用パッケージ10の接続用のリード23をプリント基板にろう付けした後、余分なリード部分としてろう付け部分から切断される。依って、リード下端面には、ろう材めっき層がなくても、実用上何ら問題は生じない。ただし、リード下端面にもろう材層が必要な場合は、リードの切断(f工程)後に、リード下端面へのめっき工程を付加してもよい。   In this type of hermetic terminal 20 for a crystal resonator, a crystal vibrating piece (not shown) is fixed to the upper end portion of the penetrating lead 23. At this time, the brazing material plating layer 25 in the upper part of the penetrating lead 23 is formed of the crystal piece. Helps to braze reliably by increasing the brazeability. Further, as shown in FIG. 1, after fixing the crystal piece 40, the metal cap 30 is sealed by press fitting to form a crystal resonator package. At this time, the brazing material plating layer 24 of the metal outer ring 21 is The metal outer ring 21 and the metal cap 30 are filled in a crimped state, which helps to ensure a hermetic seal. Further, the crystal resonator package 10 using the hermetic terminal 20 is assembled by inserting a lead extending downward in the through hole of the printed board and brazing with a jet plating apparatus. At this time, the brazing material plating layer on the peripheral surface portion of the lead helps to secure the brazing property by the brazing material. Although there is no plating layer on the lower end surface of the lead 23 of the hermetic terminal 20, in most cases there is no problem. That is, after the connection lead 23 of the crystal resonator package 10 is brazed to the printed circuit board, it is cut from the brazed portion as an extra lead portion. Therefore, even if there is no brazing material plating layer on the lower end surface of the lead, there is no practical problem. However, if a brazing filler metal layer is also required on the lower end surface of the lead, a plating step on the lower end surface of the lead may be added after cutting the lead (step f).

次に、上記のように、リード材23cが固着材50で橋絡された多数の端子部品Aをバレル(図示省略)に収容し、このバレルをめっき浴中に浸漬して回転させる,いわゆるバレルめっき法によって、金属外環21およびリード材23cの露出部分にろう材めっき層24、25を形成する。このとき、前述のとおり、固着材50の外径寸法が、リードの間隔寸法gよりも大きいと、めっき工程中にリードの絡みが防止できる。したがって、リード同士がめっき層によってくっ付いてしまう,いわゆるアベック不良が発生しにくくなる。また、固着材50によってリード23cが固着されていると、各リード単独の場合に比較して、見かけ上リードの強度が増大してリードの折れ曲り不良も発生しにくくなる。なお、固着材には低融点金属材や合成樹脂材が使用され、処理方法に応じては紫外線硬化樹脂や熱効果樹脂が使用される。   Next, as described above, a large number of terminal parts A in which the lead material 23c is bridged by the fixing material 50 are accommodated in a barrel (not shown), and this barrel is immersed in a plating bath and rotated. By the plating method, the brazing material plating layers 24 and 25 are formed on the exposed portions of the metal outer ring 21 and the lead material 23c. At this time, as described above, if the outer diameter dimension of the fixing material 50 is larger than the lead interval dimension g, the entanglement of the leads can be prevented during the plating process. Therefore, the so-called Abeck failure in which the leads are adhered to each other by the plating layer is less likely to occur. Further, when the lead 23c is fixed by the fixing material 50, the strength of the lead is apparently increased and the bending of the lead is less likely to occur as compared with the case of each lead alone. Note that a low melting point metal material or a synthetic resin material is used as the fixing material, and an ultraviolet curable resin or a heat effect resin is used depending on the processing method.

ここで、品種名φ1.2として呼称の気密端子の具体例について本発明の特徴事項について詳述する。この場合、先ず図4に示す端子部品Aの構成部品材料とその寸法を挙げる。金属外環1は、材質:Fe−Ni合金、寸法:外径0.92mm×高さ0.8mm×厚さ0.1mmであり、ガラス22は、材質:ホウケイ酸ガラスであり、リード材23cは、材質:Fe−Ni−Co合金、寸法:外径0.15mm×長さ7.20+αmm(所定長の7.20mmより長尺の長さである)、リード間隔:0.15mmである。この端子部品Aのリード材の下端部には、たとえば、直径:0.5mm、材質:Sn−60wt%Pb合金のボール状固着材を橋絡した。次に、多数の端子部品Aを、バレルに収容し、めっき浴中に浸漬するバレルめっき法によりめっきして、ろう材めっき層24、25を、材質:Sn−90wt%Pb合金でリードの表面に厚さ18μmのめっき層を形成した。同時に、金属外環の表面には9μmのめっき層24が形成された。この結果、ろう材めっき層24をバレルめっき法により形成する工程でリード対金属外環(ハトメ)のめっき厚さの比率は2.0となった。気密端子の製造工程の最後にリードは所定長に切断され同時に橋絡用固着材が取り除かれた。製作された気密端子はそのリードの上端側に水晶片がはんだ付けされ、また、気密端子の金属外環に金属キャップが圧入して圧接封止されて水晶振動子用パッケージを完成した。ここで、金属外環とリードの相互間のろう材めっき層の厚さは組立て作業性を考慮してめっき層の厚さの比率は1.6〜2.5の範囲が実用的であることを確認した。その場合に金属外環の適正めっき厚は4〜15μmであり、リードの適正めっき厚は14〜25μmであることが判明した。なお、上記めっき層の膜厚適正値は通称φ1.2の気密端子によるものであるが、別の品種たとえばφ3、φ2およびφ1.5についても確認実験され、結果的にめっき層の厚さ比率はリード対金属外環が1.6〜2.5の範囲が適用できる。   Here, the characteristic matters of the present invention will be described in detail with respect to a specific example of an airtight terminal named as the product type φ1.2. In this case, first, the component material of the terminal component A shown in FIG. The metal outer ring 1 is made of material: Fe—Ni alloy, dimensions: outer diameter 0.92 mm × height 0.8 mm × thickness 0.1 mm, and the glass 22 is made of material: borosilicate glass. Is a material: Fe—Ni—Co alloy, dimensions: outer diameter 0.15 mm × length 7.20 + α mm (a length longer than a predetermined length of 7.20 mm), and lead interval: 0.15 mm. For example, a ball-shaped fixing material of diameter: 0.5 mm and material: Sn-60 wt% Pb alloy was bridged to the lower end portion of the lead material of the terminal component A. Next, a large number of terminal parts A are accommodated in a barrel and plated by a barrel plating method in which they are immersed in a plating bath, and the brazing material plating layers 24 and 25 are made of a material: Sn-90 wt% Pb alloy. A plating layer having a thickness of 18 μm was formed. At the same time, a 9 μm plating layer 24 was formed on the surface of the metal outer ring. As a result, in the process of forming the brazing material plating layer 24 by the barrel plating method, the ratio of the plating thickness of the lead to the metal outer ring (eyelet) was 2.0. At the end of the manufacturing process of the airtight terminal, the lead was cut to a predetermined length, and at the same time, the bridging fixing material was removed. A crystal piece was soldered to the upper end side of the lead of the manufactured hermetic terminal, and a metal cap was press-fitted into the metal outer ring of the hermetic terminal to be pressed and sealed, thereby completing a crystal resonator package. Here, the thickness of the brazing material plating layer between the outer metal ring and the lead should be practical in the range of 1.6 to 2.5 in consideration of the assembly workability. It was confirmed. In this case, it was found that the appropriate plating thickness of the metal outer ring was 4 to 15 μm, and the appropriate plating thickness of the lead was 14 to 25 μm. The appropriate thickness of the plating layer is based on a hermetic terminal having a common name of φ1.2. However, confirmation experiments have been conducted on other types such as φ3, φ2, and φ1.5, and as a result, the thickness ratio of the plating layer is obtained. The lead-to-metal outer ring is applicable in the range of 1.6 to 2.5.

比較例Comparative example

これに対して、上記のめっき層の膜厚比が前記所定の比率以外である場合に次のような欠点が生ずることが判明した。たとえば、金属外環のめっき厚が適正めっき厚の上限を超える場合、圧入時のはんだのはみだしが生ずる。また、リードのめっき厚が適正めっき厚の上限を超えるとはんだの流れ過ぎが起こり、余分のはんだろう材によるショートの危険を伴う。一方、それぞれのめっき厚が適正値の範囲の下限以下では接合不足により気密性や接続性の欠陥となり気密不良や接触不良となり実用性を欠くことが判明した。   On the other hand, it has been found that the following defects occur when the film thickness ratio of the plating layer is other than the predetermined ratio. For example, when the plating thickness of the metal outer ring exceeds the upper limit of the appropriate plating thickness, the solder protrudes during press fitting. Further, when the lead plating thickness exceeds the upper limit of the appropriate plating thickness, the solder flows too much, and there is a risk of short-circuiting due to excess solder brazing material. On the other hand, it was found that when the plating thickness is less than the lower limit of the range of the appropriate value, the lack of bonding results in defects in airtightness and connectivity, resulting in poor airtightness and poor contact, and lacks practicality.

上記本発明の実施例および比較例の結果から、本発明に係る気密端子の製造方法は、特に、小さな円筒型気密端子をベースに用い、これに金属キャップを圧入して圧接封止する水晶振動子用パッケージを構成する場合、気密端子のハトメおよびリードのめっき厚を適正化するものとして、それぞれの膜厚に関し、両者の関係を規制するものとしてリード対ハトメ膜厚の比率を見出したものである。また、この特定された比率の範囲内で選定するためのバレルめっき方法を利用した新規かつ改良された調製法を気密端子の製造方法として提案するものである。本発明の気密端子の製造方法によれば、第1に端子部品Aのリードと金属外環(いわゆるハトメ)の露出表面をバレルめっきするに際し、リード材の長さを完成後の気密端子の所定の貫通リード長より長めにして用意しておき、それによりバレルめっき特有のめっき処理で部位により異なる比率でめっき層の厚みを調製する方法が提案される。同時に固着材によってリード端を橋絡することによって、リード間の絡まり防止とそれによるめっき不良を回避するものである。すなわち、パッケージの気密性とはんだ付け性を良好にする。また、第2に気密端子のリード間のアベック不良の防止やリードが単独の場合に比べて見かけ上の強度を増大して、リード曲がり不良が発生しにくくすること、第3にガラスによって絶縁されている貫通リードのめっき条件を調製することでパッケージ組立ての作業性を向上する等の効果を得る。   From the results of the examples and comparative examples of the present invention, the manufacturing method of the hermetic terminal according to the present invention is particularly a crystal vibration using a small cylindrical hermetic terminal as a base and press-fitting and sealing a metal cap on the base. When configuring the package for the child, the ratio of lead to eyelet film thickness was found to regulate the relationship between the film thickness and the thickness of the airtight terminal eyelet and lead as appropriate. is there. In addition, a new and improved preparation method using a barrel plating method for selecting within the specified ratio range is proposed as a method for manufacturing an airtight terminal. According to the method for manufacturing a hermetic terminal of the present invention, first, when barrel plating is performed on the exposed surface of the lead of the terminal component A and the metal outer ring (so-called eyelet), the length of the lead material is set to a predetermined value for the airtight terminal after completion. A method is proposed in which the thickness of the plating layer is adjusted so as to be longer than the length of the through-lead, and the plating layer has a different ratio depending on the part in the plating process peculiar to barrel plating. At the same time, the lead ends are bridged by the fixing material, thereby preventing entanglement between the leads and avoiding defective plating. That is, the airtightness and solderability of the package are improved. Secondly, prevention of Abeck failure between the leads of the airtight terminal and increase of the apparent strength as compared with the case where the lead is single, making it difficult for the lead bending failure to occur, and third, insulation by the glass. The effect of improving the workability of the package assembly can be obtained by adjusting the plating conditions of the through leads.

本発明に係る実施例の水晶振動子用パッケージの概要図であり、図1(a)は分解斜視図、図1(b)は組立後の主要部を示す部分切欠き斜視図である。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a crystal resonator package of an embodiment according to the present invention, FIG. 1A is an exploded perspective view, and FIG. 図1のパッケージに使用する気密端子の要部断面図を示す拡大断面図である。It is an expanded sectional view which shows the principal part sectional drawing of the airtight terminal used for the package of FIG. 同じく図2の気密端子の製造方法を説明するブロックダイヤグラムである。It is a block diagram explaining the manufacturing method of the airtight terminal of FIG. 2 similarly. 同じく図3の気密端子の製造過程における端子部品状態の要部拡大断面図である。FIG. 4 is an enlarged cross-sectional view of a main part in a terminal component state in the manufacturing process of the hermetic terminal of FIG.

符号の説明Explanation of symbols

10…水晶振動子用パッケージ、 20…気密端子、 21 …金属外環、
22…絶縁ガラス、22a…ガラスタブレット(溶融前絶縁ガラス)、
23…貫通リード、 23a…リード(パッケージ内部)、
23b …リード(下端面)、 23c…リード(切断前)、
24…電解Cuめっき層及びはんだめっき層(外環部)、
25…電解Cuめっき層及びはんだめっき層(リード部)、30…金属キャップ、
31…電解Niめっき層(金属キャップ部)、40…水晶片、 50…固着材、
60…リード切断位置、
10 ... Package for crystal unit, 20 ... Airtight terminal, 21 ... Metal outer ring,
22 ... insulating glass, 22a ... glass tablet (insulating glass before melting),
23 ... through lead, 23a ... lead (inside package),
23b ... Lead (lower end surface), 23c ... Lead (before cutting),
24 ... Electrolytic Cu plating layer and solder plating layer (outer ring portion),
25 ... Electrolytic Cu plating layer and solder plating layer (lead part), 30 ... Metal cap,
31 ... Electrolytic Ni plating layer (metal cap part), 40 ... crystal piece, 50 ... fixing material,
60: Lead cutting position,

Claims (8)

円筒状金属外環にガラス絶縁体の介在により貫通リードを絶縁封着し、貫通リードおよび金属外環の各表面に、はんだ付け良好なろう材層からなるめっき層を設けた気密端子であって、前記貫通リードのめっき層の厚さを前記金属外環のめっき層の厚さに比べて1.6〜2.5倍の厚さとしたことを特徴とする気密端子。   An airtight terminal in which a through lead is insulated and sealed with a glass insulator on a cylindrical metal outer ring, and a plating layer made of a soldering layer with good soldering is provided on each surface of the through lead and the outer metal ring. A hermetic terminal, wherein the thickness of the plated layer of the through lead is 1.6 to 2.5 times the thickness of the plated layer of the metal outer ring. 前記金属外環のめっき厚は4〜15μmの範囲内に設定したことを特徴とする請求項1に記載の気密端子。   2. The hermetic terminal according to claim 1, wherein a plating thickness of the metal outer ring is set in a range of 4 to 15 μm. 前記金属外環の外径寸法が0.90±0.05mmであることを特徴とする請求項2に記載の気密端子。   The hermetic terminal according to claim 2, wherein an outer diameter of the metal outer ring is 0.90 ± 0.05 mm. 円筒状金属外環にガラス絶縁材を介し相互に離隔配置した一対の所定長の貫通リードを気密封着し、前記金属外環および前記貫通リードのそれぞれの露呈する表面にはんだ付け良好なろう材めっき層を設けた気密端子の製造方法において、所定サイズの金属外環にガラスタブレットおよび所定長より長いリード材を封着治具に組み込み、前記ガラスタブレットを加熱溶融して前記金属外環にガラス絶縁材を介してリード材を貫通させた端子部品とする気密封着工程、多数の前記端子部品をバレルに収容して前記金属外環および前記リード材の表面にめっき層を形成するバレルめっき工程、および前記端子部品の前記リード材を所定長の貫通リードに切断する工程を備え、前記貫通リードのめっき厚さ(t1)と前記金属外環のめっき厚さ(t2)との比率(t1/t2)を1.6〜2.5の範囲内に選定するよう、前記リード材の長さを調製したことを特徴とする気密端子の製造方法。   A pair of through-leads having a predetermined length spaced apart from each other through a glass insulating material are hermetically sealed to a cylindrical metal outer ring, and brazing material with good soldering to the exposed surfaces of the metal outer ring and the through-leads In a method for manufacturing an airtight terminal provided with a plating layer, a glass tablet and a lead material longer than a predetermined length are incorporated in a sealing jig in a metal outer ring of a predetermined size, and the glass tablet is heated and melted to glass on the metal outer ring. A hermetic sealing process for forming a terminal component through which a lead material is passed through an insulating material, and a barrel plating process for accommodating a large number of the terminal components in a barrel and forming a plating layer on the surface of the metal outer ring and the lead material. And a step of cutting the lead material of the terminal component into through leads having a predetermined length, the plating thickness (t1) of the through lead and the plating thickness (t of the metal outer ring) ) To select the ratio of (t1 / t2) in the range of 1.6 to 2.5 with, manufacturing method of the hermetic terminal, characterized in that to prepare the length of the lead material. 前記バレルめっき工程は端子部品のリード材の下端部同士を橋絡するめっき処理前の固着結合工程および橋絡を切離するめっき処理後の固着解除工程を備えることを特徴とする請求項4に記載の気密端子の製造方法。   The said barrel plating process is equipped with the adhesion joining process before the plating process which bridges the lower end parts of the lead material of a terminal component, and the adhesion cancellation | release process after the plating process which separates a bridge | bridging. The manufacturing method of the airtight terminal of description. 前記金属外環は外径寸法が0.90±0.05mmに成形加工された低炭素鋼、Fe―Ni合金またはFe−Ni−Co合金のいずれかの材質からなり、前記リードは外径寸法が0.15±0.02mmのFe―Ni合金またはFe−Ni−Co合金のいづれかからなることを特徴とする請求項5に記載の気密端子の製造方法。   The metal outer ring is made of any material of low carbon steel, Fe—Ni alloy or Fe—Ni—Co alloy molded to an outer diameter of 0.90 ± 0.05 mm, and the lead has an outer diameter. 6. The method of manufacturing an airtight terminal according to claim 5, wherein the material is made of either an Fe—Ni alloy or an Fe—Ni—Co alloy having a thickness of 0.15 ± 0.02 mm. 円筒状金属外環にガラス絶縁体の介在により貫通リードを絶縁して気密封着し、このリードおよび金属外環の表面に所定のめっき層を設けた気密端子と、前記貫通リードの一端側にリードめっき層の介在によりろう付けする水晶片と、前記金属外環のめっき層の介在により圧入封止した円筒状金属キャップとを具備し、前記水晶片を封止した前記金属キャップの形成空間に配置する水晶振動子において、前記貫通リードの表面のめっき層は前記金属外環の表面のめっき層に比べて厚いめっき層を有することを特徴とする水晶振動子用パッケージ。   A through-hole lead is insulated and hermetically sealed by interposing a glass insulator on a cylindrical metal outer ring, an airtight terminal provided with a predetermined plating layer on the surface of the lead and the metal outer ring, and one end side of the through-lead. A crystal piece to be brazed by the interposition of a lead plating layer and a cylindrical metal cap that is press-fitted and sealed by the interposition of a plating layer of the metal outer ring, and in the formation space of the metal cap in which the crystal piece is sealed The crystal resonator package according to claim 1, wherein the plated layer on the surface of the through lead has a thicker plated layer than the plated layer on the surface of the metal outer ring. 前記金属外環のめっき厚は4〜15μmの範囲内で選定され、かつ前記貫通リードのめっき層の厚さを前記金属外環のめっき層の厚さに比べて1.6〜2.5倍の厚さで選定したことを特徴とする請求項7に記載の水晶振動子用パッケージ。
The plating thickness of the metal outer ring is selected within a range of 4 to 15 μm, and the thickness of the plating layer of the through lead is 1.6 to 2.5 times the thickness of the plating layer of the metal outer ring. The crystal resonator package according to claim 7, wherein the crystal resonator package is selected according to the thickness of the crystal resonator.
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WO2016195027A1 (en) * 2015-06-03 2016-12-08 エヌイーシー ショット コンポーネンツ株式会社 Airtight terminal, aluminum electrolytic capacitor and method for manufacturing aluminum electrolytic capacitor

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JP2016207822A (en) * 2015-04-22 2016-12-08 エヌイーシー ショット コンポーネンツ株式会社 Airtight terminal and aluminum electrolytic capacitor employing the airtight terminal
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CN107636781A (en) * 2015-06-03 2018-01-26 恩益禧肖特电子零件有限公司 The manufacture method of airtight terminal, aluminium electrolutic capacitor and aluminium electrolutic capacitor
JPWO2016195027A1 (en) * 2015-06-03 2018-04-05 ショット日本株式会社 Hermetic terminal, aluminum electrolytic capacitor, and method of manufacturing aluminum electrolytic capacitor
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CN107636781B (en) * 2015-06-03 2020-01-17 肖特(日本)株式会社 Hermetic terminal, aluminum electrolytic capacitor, and method for manufacturing aluminum electrolytic capacitor

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