JP2010105142A - Ultrasonic machining tool - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic machining tool capable of efficiently/inexpensively machining a minute groove or a minute depressed shape on a workpiece by ultrasonic machining and also capable of extending the lifetime of the tool while maintaining machining accuracy of a recessed machined part. <P>SOLUTION: In the ultrasonic machining tool 1, hard parts 1a and soft parts 1b formed to have mutually different strengths and rigidities are extended in constant cross sections. One end of the ultrasonic machining tool 1 in the extending direction is fixed to an ultrasonic horn 2 to be a fixed end. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an ultrasonic processing tool for efficiently forming a concave processed portion, which is a fine groove or a fine depression (bottomed hole), on the surface of a workpiece using ultrasonic processing.

  It is known that when a fine groove is processed on the surface of a member, it is possible to improve or control the lubrication characteristics with the contact object. If the effect of improving the lubrication characteristics due to the formation of fine grooves is applied to, for example, a cutting tool surface for metal cutting made of cemented carbide or alumina ceramics, for example, in wet cutting, lubrication is performed compared to a tool without fine grooves. Since the agent penetrates more into the tool-chip contact area, the cutting force can be reduced. In addition, the effect of constraining the tool-chip contact area causes the friction force on the tool surface to saturate to the maximum shear yield stress of the chip material. (For example, Non-Patent Document 1).

By the way, in addition to the processing methods that add many fine grooves to the surface of highly brittle materials such as cemented carbide and ceramics, ultra-precise cutting processing method, etching processing method using photolithography technology, electric discharge processing method, laser processing method And ultrasonic processing methods.
The ultra-precise cutting method has the disadvantages that a large number of grooves cannot be processed at once, and that the cutting efficiency and the feed rate must be reduced to cut highly brittle materials in ductile mode, making it impossible to increase the machining efficiency. is there.
The etching method using photolithography technology can form microscopic grooves of sub-nanomillimeter order, but requires expensive equipment in the process of forming a photomask on the tool surface, and is a dry etching process. In this case, the processing speed is low and a special processing apparatus is required, so that the processing cost is high.
The electric discharge machining method has the disadvantages that it is difficult to process with an insulator such as ceramics, and the laser machining method has a high processing cost because it requires high energy.

On the other hand, since the ultrasonic machining method can transfer the cross-sectional shape of the tool attached to the tip of the ultrasonic horn to a ductile material, a highly brittle material, an insulator or a conductor at a relatively high processing speed, Compared to the above processing method, there is an advantage that the groove shape can be formed efficiently and at a low cost.
In this ultrasonic processing method, for example, if the tip shape of the tool is changed to a shape in which fine convex portions are arranged, an array of fine concave shapes can be formed on the workpiece (for example, Patent Document 1).
In addition, a method has been proposed in which a workpiece is covered with a material that has a high attenuation factor with respect to ultrasonic vibration and a portion that is not desired to be grooved is formed, and a fine shape is formed using a planar tool (for example, Patent Document 2). .
Toshiyuki Enomoto, Ryo Takasaki, Development of cutting tool with fine surface shape Cutting of aluminum alloy with cemented carbide tool, 2007 JSPE Spring Conference Annual Lecture, (2007) pp. 288-289. JP 2007-213323 A JP-A-6-339841

  When ultrasonic machining is performed with the tool tip in a shape with fine projections arranged, at present, the tool tip shape is, for example, ultra-precise cutting, etching using photolithography, electrical discharge machining, or laser machining. And so on. However, in this case, there is a problem that the cost for manufacturing the tool is high. Further, for example, when a large number of parallel grooves having a groove width of several μm to several tens of μm are formed, the tool tip is arranged in a comb shape in which many thin walls having a thickness of several μm to several tens of μm are arranged. Therefore, if the height of the wall formed on the tool is made higher than the thickness of the wall, the rigidity of each wall will be significantly reduced, so that the wall will be deformed by periodic load fluctuations due to ultrasonic vibration. As a result, it is difficult to ensure processing accuracy, and it is particularly difficult to perform deep groove processing. On the other hand, when the wall height is lower than the thickness, the rigidity of the tool is improved, but the tool life time is shortened, and in some cases, the problem becomes impossible to apply to deep grooving.

  Although there is a method of masking a workpiece with a material having a high attenuation factor, the masking process uses a photolithography technique, so that the processing cost is high.

  In view of the above-mentioned problems, the present invention can process a minute groove or a minute depression shape on a workpiece with high efficiency and low cost by ultrasonic machining, and maintain the machining accuracy of the concave machining portion. An object of the present invention is to provide an ultrasonic machining tool that can extend the tool life.

In order to solve the above problems, the present invention provides the following configuration.
1st invention is the tool for ultrasonic processing attached to the front-end | tip of an ultrasonic horn, and forming the concave-shaped process part which is a fine groove or a fine hollow on the surface of a workpiece by ultrasonic processing, The hard part and the soft part formed so as to have different strength and rigidity are extended with a constant cross-sectional shape, and one end in the extending direction is a fixed end fixed to the ultrasonic horn. An ultrasonic machining tool is provided.
A second invention provides the ultrasonic processing tool according to the first invention, wherein a plurality of the hard parts are provided, and the soft part is interposed between the hard parts.
A third invention is the ultrasonic processing tool of the second invention for forming a plurality of the fine grooves in parallel, wherein the hard portion is formed by a plate material having a cross-sectional shape corresponding to the fine grooves, Ultrasonic wave characterized by having a multilayer structure in which a hard part and a soft part are laminated so that the soft part formed in a layer shape softer than the plate material is interposed between the plate materials Provide machining tools.
According to a fourth aspect of the invention, there is provided the ultrasonic processing tool according to the third aspect, wherein the plate material has a cross-sectional shape having a bent portion which is a bent portion or a curved portion.
According to a fifth aspect of the present invention, the hard portion is formed by a plate material having a cross-sectional shape in which bent portions that are bent portions or curved portions are formed and portions that are arranged in parallel to each other at an interval are formed, and the plate materials are parallel to each other. The ultrasonic machining tool according to the first aspect of the present invention is characterized in that the soft portion formed in a layer shape softer than the plate material is interposed between the disposed portions.
In a sixth aspect of the invention, any one of the first to fifth aspects is characterized in that the soft portion is made of a soft material that is formed softer than a hard material that is a member constituting the hard portion using a synthetic resin. An ultrasonic processing tool according to the invention is provided.
7th invention is the ultrasonic processing tool of 6th invention which concerns on either of 2nd-5th invention, Comprising: The said synthetic resin of the said soft material is an adhesive material, and it mutually passes through a soft part. Provided is an ultrasonic processing tool characterized in that a hard material provided separately is bonded by the adhesive and integrated as a whole.
An eighth invention is the ultrasonic machining tool according to the sixth invention according to any one of the third to fifth inventions, wherein the soft material is attached to one side or both sides of a plate material which is the hard material. There is provided an ultrasonic processing tool characterized by comprising one or more laminated materials.
A ninth invention is the ultrasonic machining tool according to the sixth invention according to any one of the second to fifth inventions, wherein the hard material and the hard material are separate members. Are provided in contact with each other, and an ultrasonic processing tool is provided.
A tenth invention is the ultrasonic processing tool according to any of the seventh to ninth inventions, wherein the soft material has a structure in which thin paper is embedded in the synthetic resin. Provide sonic processing tools.
An eleventh aspect of the invention is the ultrasonic machining tool according to the sixth aspect of the invention according to any one of the first, second, and fifth aspects, wherein the cross section perpendicular to the extending direction is one or more in one soft material. Provided is an ultrasonic processing tool characterized by having a structure in which a plurality of the hard materials are embedded.
In a twelfth aspect of the invention, the hard portion has strength and rigidity equal to or higher than those of the workpiece, and the soft portion has lower strength and rigidity than the workpiece. An ultrasonic machining tool of any origin is provided.
A thirteenth aspect of the invention provides the ultrasonic machining tool according to any one of the first to twelfth aspects of the invention, wherein a hard material that is a member constituting the hard portion is formed of metal or ceramics.

The ultrasonic processing tool according to the present invention has a mechanical property of the cross section of the ultrasonic tool with respect to the surface direction of the workpiece, and a high strength region (hard portion) according to the shape of the fine groove formed in the workpiece. And a low strength region (soft portion). The hard part and the soft part are extended with a constant cross-sectional shape. Moreover, the hard part has a cross-sectional shape corresponding to the shape of the concave processed part formed on the workpiece.
In other words, the tool for ultrasonic processing according to the present invention includes the tool other than a portion (hereinafter also referred to as a tool material portion) extending in a cross-sectional shape corresponding to the shape of the concave processed portion formed on the workpiece. A soft material portion softer than the material portion, and the soft material portion and a tool material portion that is harder (relatively hard than the soft portion) than the soft portion (referred to as a hard portion). The structure extends with a constant cross-sectional shape.

The ultrasonic machining tool according to the present invention is suitable for wet ultrasonic machining, but can also be used for dry ultrasonic machining.
The wet ultrasonic machining using the ultrasonic machining tool according to the present invention is performed by combining a tool (ultrasonic machining tool) tip attached to the tip of an ultrasonic horn and a workpiece with a slurry containing fine abrasive grains. The vibration energy is given to the tool from the ultrasonic horn while being immersed in the tool, and the tool is vibrated mainly up and down with respect to the work surface of the workpiece at a frequency of several tens of kHz. Acts vertically. Fine abrasive grains exist between the tip surface of the tool (hereinafter also referred to as the tool surface) and the workpiece surface. When the tool vibrates ultrasonically, fine abrasive grains between the tool surface and the workpiece surface also vibrate with the ultrasonic waves.

By the way, when assuming ultrasonic processing using a tool made entirely of the same material, if the strength and rigidity of the tool are not significantly lower than the strength and rigidity of the workpiece, the ultrasonic vibration The energy is sufficiently transmitted to the abrasive grains, and the abrasive grains effectively strike the surface of the workpiece and gradually scrape off the surface of the workpiece. At the same time, the tool side is gradually scraped away, but if the tool height, that is, the length of the tool perpendicular to the surface of the workpiece is increased, the tool can be used continuously for a long time, and deep grooving can be performed. realizable.
On the other hand, when the strength and rigidity of the tool is significantly lower than the strength and rigidity of the workpiece, vibration energy is not sufficiently transmitted to the abrasive grains, and the strength is higher than the abrasive grains hit the workpiece. In addition, a tool having a lower rigidity is hit and the rate of abrasive grains eroding the tool or entering the tool does not increase the erosion of the work piece.

  In the ultrasonic processing tool according to the present invention, it is preferable that the strength and rigidity of the hard portion are equal to or higher than the workpiece. It goes without saying that such a hard portion has strength and rigidity that are not significantly lower than the strength and rigidity of the workpiece. On the other hand, the soft part has a lower strength and rigidity than the work piece and is softer than the work piece. In particular, the strength and rigidity are significantly lower than the work piece. It is preferable that it is formed so as to be considerably softer than.

Hard parts that have the same strength or rigidity as the work piece or higher than the work piece and have the same or higher hardness as the work piece, and the strength and rigidity are significantly lower than the work piece and considerably lower than the work piece When an ultrasonic processing tool having a soft part formed softly is used for ultrasonic processing of a workpiece in the slurry described above, the hard part is more abrasive than the soft part. As a result, the energy transmission efficiency of the ultrasonic vibration of the workpiece is higher, and the abrasive grain hits the surface of the workpiece more effectively in the part facing the hard part than in the part facing the soft part. As a result, the surface of the workpiece can be efficiently cut off. The vibration energy is not sufficiently transmitted from the soft part to the abrasive grains, and the abrasive part strikes the soft part having lower strength and rigidity than the abrasive part strikes the workpiece, and the abrasive grains erode the soft part. Alternatively, since the rate of penetration into the soft material increases, the erosion of the abrasive grains into the workpiece does not increase. As the workpiece surface is scraped off, the hard part side is gradually scraped off, but if the height of the tool, that is, the length of the tool perpendicular to the workpiece surface is increased, the tool can be continuously used for a long time. It can be used for deep groove processing reliably.
As a result, only the hard part processes the workpiece, and the soft part does not damage the workpiece significantly. In addition, the soft part functions as a support material that supports the hard part and suppresses bending, and the rigidity of the tool can be increased. For this reason, the entire tool can process the concave machining portion while maintaining high tool rigidity, and the concave machining portion can be machined from the workpiece surface to a deep position while maintaining high machining accuracy.

Examples of the material of the workpiece include metals such as cemented carbide, carbon steel, stainless steel, copper, and aluminum alloys, and brittle materials such as ceramics and glass.
Examples of the ultrasonic machining tool according to the present invention for forming a concave machining portion on a workpiece made of such a material include, for example, metal or ceramics, and have the same strength and rigidity as the workpiece. A hard part that is higher than the workpiece and has a hardness equal to or higher than that of the work piece, and a soft part made of synthetic resin (strength and rigidity are significantly lower than the work piece, and it is considerably softer than the work piece. A structure having a soft portion) can be employed.

  The ultrasonic machining tool according to the present invention includes a hard portion extending in a cross-sectional shape corresponding to the shape of the concave machining portion formed on the workpiece, and a soft portion formed softer than the hard portion. Can be obtained by a simple, highly efficient and inexpensive manufacturing method. For example, a hard material that is a member that forms a hard portion and extends in a cross-sectional shape corresponding to the shape of a concave processed portion that is formed on the workpiece, and a soft material that is a synthetic resin member that forms a soft portion Can be obtained by a manufacturing method in which the resin is integrated by bonding, pressure welding or the like, or by insert mold molding in which the liquid resin material injected into the mold is cured and the synthetic resin is molded with the hard material disposed in the mold. Is possible.

According to the ultrasonic processing tool according to the present invention, a hard part extending in a cross-sectional shape corresponding to the shape of the concave processed part formed on the workpiece, and a soft part formed softer than the hard part Can be manufactured without using ultra-precise cutting processing, etching processing utilizing photolithography technology, electric discharge processing, laser processing, or the like. For this reason, it can be manufactured at high efficiency and at low cost.
In addition, according to this ultrasonic machining tool, since the rigidity of the tool can be increased by the soft part, it becomes easy to increase the length of the tool while maintaining the machining accuracy of the concave machined part. The tool life can be extended while maintaining the machining accuracy of the part. It is also possible to increase the depth of the concave processed portion to be formed.

Hereinafter, an ultrasonic processing tool embodying the present invention will be described with reference to the drawings.
FIG. 1 is a diagram (a front sectional view) showing a state in which an ultrasonic processing tool 1 (hereinafter also simply referred to as a tool) according to an embodiment of the present invention is attached to an ultrasonic horn 2, and FIG. FIG. 3 is a diagram for explaining wet ultrasonic machining using the tool 1, and FIG. 4 is a diagram for explaining the machining principle of the concave machining portion by ultrasonic machining in FIG. is there.

As shown in FIG. 4, the tool 1 includes a plurality of grooves 5 (concave portions) having a groove width of several μm to several tens of μm on the workpiece 4 at a time (five in the illustrated example). It is the tool for ultrasonic processing for forming.
The tool 1 shown in FIGS. 1 and 2 is a plate-like hard plate 1a (plate material) using an adhesive-impregnated sheet obtained by impregnating thin paper with a liquid adhesive such as an epoxy resin. (Hereinafter also referred to as “hard plates”), a plurality of hard plates 1a are laminated, and a soft material 1b and a hard plate 1a obtained by curing the adhesive material of the adhesive-impregnated sheet are hard plates. A multi-layer structure is formed in which a plurality of the soft materials 1b are interposed between 1a.
In the illustrated example, the laminated tool 1 having a configuration in which five hard plates 1a and four soft materials 1b are laminated is illustrated, but the number of hard plates 1a and soft materials 1b constituting the tool 1 is limited to this. It is not something.

The soft material 1b functions as an adhesive layer (synthetic resin layer) that bonds the hard materials (hard plate 1a) of the tool 1 together. The tool 1 has a configuration in which the hard plates 1a on both sides are bonded together by the soft material 1b via the soft material 1b, and the whole is integrated.
In manufacturing the tool 1, the interval between the hard plates 1a can be easily controlled by sandwiching the adhesive-impregnated sheet between the hard plates 1a depending on the thickness of the thin paper.
The soft material 1b formed by curing the adhesive has a configuration in which thin paper is embedded in a resin (synthetic resin) obtained by curing the adhesive. The thin paper is preferably a highly flexible material such as tissue paper.

The workpiece 4 is a member made of a hard material such as metal, ceramics, or glass.
The hard plate 1a is a member that extends in a cross-sectional shape corresponding to the shape of the groove 5 formed in the workpiece 4 (up and down in FIG. 1). In the tool 1 illustrated in FIGS. 1 and 2, a flat hard plate 1 a is employed.
As shown in FIG. 2, the cross section of the hard plate 1a (plate material) is rectangular, and the dimension 5 in the short side direction (that is, the thickness of the hard plate 1a) is the groove 5 to be formed in the workpiece 4. The groove width and the long side dimension q (longitudinal dimension in the cross section perpendicular to the extending direction) are aligned with the length of the groove 5.
The hard plate 1a is formed in a constant cross-sectional shape over the entire length in the extending direction.

Moreover, as this hard board 1a, what was formed by the metal or ceramics is employ | adopted. It can be said that the hard plate 1a made of metal or ceramic constitutes a hard portion whose strength and rigidity are not significantly lower than the workpiece 4.
In the case of forming the concave processed portion (groove 5) in the workpiece 4 formed of any one of metal, ceramics, and glass, as the hard plate 1a (plate material), for example, a commercially available thickness A thin steel plate such as a 5-100 μm shim sheet can be suitably used. As this thin steel plate, for example, those made of SK material (carbon tool steel), those made of SUS material (SUS: stainless steel), etc. are suitable.

  In terms of extending the life of the tool 1, it is more preferable to employ a hard plate 1 a that has higher strength and rigidity than the workpiece 4. However, the hard plate 1a may be any as long as its strength and rigidity are not significantly lower than those of the workpiece 4, and those having lower strength and rigidity than those of the workpiece 4 may be employed. Of course, it is possible to employ a hard plate 1a having the same strength and rigidity as the workpiece 4.

The soft material 1b is an adhesive layer (synthetic resin layer) as described above, and its strength and rigidity are significantly lower than those of the workpiece 4, and constitutes a soft part that is considerably softer than the workpiece 4. It can be said.
The thickness r of the soft material 1b determines the distance (interval) between the grooves 5 to be formed in parallel to the workpiece 4.

The plurality of hard plates 1a (plate materials) are provided in parallel to each other via a soft material 1b (synthetic resin layer, adhesive layer).
The soft material 1b is formed in a constant cross-sectional shape over the entire length in the extending direction (the vertical direction in FIG. 1 is the extending direction).
For this reason, the tool 1 has a configuration having a constant cross-sectional shape over its entire length.

As shown in FIG. 1 and FIG. 3, ultrasonic processing for forming a concave processing portion (groove 5) in a workpiece 4 using this tool 1 is performed by using one end of the tool 1 in the extending direction of the ultrasonic horn 2. Attach to the tip.
In FIG. 1 and FIG. 3, specifically, the tool 1 is pushed into the tool mounting recess 21 formed in the ultrasonic horn 2 so as to be recessed from the tip end surface, and the tool 1 is pushed into the tool mounting recess 2a. 1 is attached to the ultrasonic horn 2. The tool 1 is in a state in which a portion other than the end inserted into the tool mounting recess 21 is projected from the tip of the ultrasonic horn 2.
One end in the extending direction of the tool 1 functions as a fixed end for attaching the tool 1 to the ultrasonic horn 2.

The mounting jig 2 a is inserted between the inner surface of the tool mounting recess 21 of the ultrasonic horn 2 and the tool 1 inserted into the tool mounting recess 21 to apply a compressive stress to the tool 1. The tool 1 is tightened from both sides to restrict the tool 1 from falling off the ultrasonic horn 2. The mounting jig 2a may be a hard member such as a metal plate, but may be a soft member compared to a metal such as a resin plate. Further, as the mounting jig 2a, for example, a leaf spring can be used. The resin plate and the leaf spring function as an elastic member for attaching the tool 1 to the ultrasonic horn 2 by applying a tightening force to the tool 1.
The mounting member tightens the tool 1 so that the vibration energy is efficiently transmitted from the ultrasonic horn 2 to the tool 1 and the tool 1 can vibrate integrally with the ultrasonic horn 2 as a whole. It is a member for attaching to 2 firmly. In this specification, this attachment state is treated as “fixed”. As the elastic member, elastic deformation does not occur when inserted between the inner surface of the tool mounting recess 21 of the ultrasonic horn 2 and the tool 1 (or the elastic deformation is very small and substantially not elastically deformed). ) Adopt things.
As a structure for attaching the tool 1 to the tip of the ultrasonic horn 2, one end of the tool 1 in the extending direction of the ultrasonic horn 2 is arranged so that the tool 1 is vibrated integrally with the tip of the ultrasonic horn 2. Any structure can be used as long as it can be firmly attached to the tip, and is not limited to the above-described attachment structure.

3 and 4 show wet ultrasonic machining using the tool 1.
As shown in FIGS. 3 and 4, in this ultrasonic machining, the tip of the tool 1 attached to the tip of the ultrasonic horn 2 (the end opposite to the fixed end attached to the ultrasonic horn 2; FIG. 3 and FIG. The ultrasonic horn 2 is vibrated by vibrating the ultrasonic horn 2 in a state in which the lower end of the tool 1 and the workpiece 4 are immersed in the slurry 3 containing fine abrasive grains 3a (see FIG. 4). Then, vibration energy is applied to the tool 1 to vibrate the tool 1 in a direction perpendicular to the machining surface 41 of the workpiece 4 at a frequency of several tens of kHz. When the tool 1 is ultrasonically vibrated, as shown in FIG. 4, the abrasive grains 3 a existing between the tip surface of the tool 1 (hereinafter also referred to as a tool surface) and the surface of the workpiece 4 (processed surface 41) are also ultrasonically generated. Will vibrate.

  At this time, between the hard plate 1a of the tool 1 and the workpiece 4, the energy of ultrasonic vibration is transmitted to the abrasive grains 3a in the slurry 3 as compared with between the soft material 1b and the workpiece 4. As a result, in the part of the workpiece 4 that faces the hard plate 1a, the abrasive grains 3a strike the surface of the workpiece 4 more effectively than in the part of the workpiece 4 that faces the soft material 1b. The surface of the workpiece 4 is efficiently cut off. In the abrasive grains 3a between the soft material 1b and the workpiece 4, the soft material 1b having lower strength and rigidity than the workpiece 4 is hit rather than the abrasive grains 3a hitting the workpiece 4. However, the erosion of the soft material 1b by the abrasive grains 3a or the rate at which the abrasive grains 3a penetrate into the soft material 1b is increased, so that the erosion of the workpiece 4 by the abrasive grains 3a does not increase. As a result, a groove 5 approximating the cross section of the hard plate 1a is formed in the workpiece 4. The processing of the concave processed portion (here, the groove 5) is performed by the hard plate 1a. If the difference between the strength and rigidity of the soft material 1b and the strength and rigidity of the workpiece 4 is large, erosion of the portion of the workpiece 4 facing the soft material 1b hardly or substantially does not occur. can do.

  The hard plate 1a and the soft material 1b are also gradually scraped off as the surface of the workpiece 4 is scraped (eroded). However, the hard plate 1a is less eroded than the soft material 1b. For this reason, as shown in FIG. 4, the erosion of the soft material 1b becomes larger than that of the hard plate 1a.

In addition, the tool 1 is improved in tool rigidity by the soft material 1b functioning as a support material that supports the hard plate 1a and suppresses bending. The tool 1 having a configuration in which the hard plates 1a are bonded and integrated with each other via the soft material 1b is particularly advantageous in improving the tool rigidity by the soft material 1b. For this reason, the tool 1 can process the concave machining portion (here, the groove 5) while maintaining high tool rigidity, which is advantageous for securing the tool rigidity when the dimension in the extending direction of the tool is increased. In addition, it is possible to increase (deep) the processing depth that can ensure high processing accuracy as compared with the prior art.
Moreover, if the dimension of the extending direction of the tool 1 is lengthened, the tool 1 can be used continuously for a long time. The depth of the groove 5 that can be formed in the workpiece 4 depends on the relationship between the erosion rate of the workpiece 4 and the wear rate of the tool 1, but the tool 1 according to the present invention increases the tool rigidity by the soft material 1b. Therefore, it is possible to lengthen the dimension in the extending direction that can ensure a desired processing accuracy. For this reason, it is advantageous for realization of deep groove processing.
Moreover, if the structure of the tool according to the present invention is used, the tool rigidity can be increased by the soft material 1b as described above, which is advantageous for the use of the hard plate 1a having a small plate thickness, and is formed on the workpiece 4. It is easy to cope with the miniaturization and deepening of the groove 5 to be performed.

  Further, if the cross-sectional shape of the tool laminated by the above method is isotropically reduced by plastic processing such as extrusion processing or drawing processing, a finer groove shape can be formed.

Moreover, according to this tool 1, it is possible to vibrate the some hard board 1a separately by the minute elastic deformation of the soft material 1b during a process.
In this way, if the plurality of hard plates 1a are individually configured to vibrate up and down, for example, a minute notch is formed in the hard plate 1a (however, in a portion constituting a fixed end fixed to the ultrasonic horn 2). For example, the resonance frequency of the plurality of hard plates 1a due to the energy of ultrasonic vibration can be varied.
Thus, if it is the structure which produced the dispersion | variation in the resonant frequency about the some hard board 1a, the slurry 3 which exists between the tool 1 front-end | tip and the workpiece 4 will be stirred, and uneven distribution of the abrasive grain 3a may be carried out. There is also an advantage that the abrasive grain density in the slurry 3 can be made uniform. Further, when the hard plate 1a moves away from the workpiece 4, a suction force that draws the slurry 3 between the hard plate 1a and the workpiece 4 that has caused the movement is generated. The abrasive grains 3a can be efficiently introduced between 1a and the workpiece 4. As a result, the supply of the slurry 3 and the abrasive grains 3a to the central portion of the region between the tip of the tool 1 and the workpiece 4 becomes smooth. The configuration in which the resonance frequencies vary among the plurality of hard plates 1a effectively contributes to improvement of processing accuracy and reduction of processing time.
Further, when the plurality of hard plates 1a have a configuration in which the resonance frequency varies, all the hard plates 1a simultaneously abut on the workpiece 4 due to the phase difference between the vibrating hard plates 1a. Less (or no more). When only a part of the plurality of hard plates 1 a constituting the tool 1 is brought into contact with the workpiece 4, the vibration energy applied to the tool 1 from the ultrasonic horn 2 comes into contact with the workpiece 4. This acts intensively on the hard plate 1a, and the removal of the workpiece 4 by the hard plate 1a is promoted. As a result, depending on the processing conditions such as the material of the hard plate 1a and the workpiece 4, there is a possibility that the efficiency of ultrasonic processing of the workpiece 4 can be improved.
In the present invention, the configuration for causing variation in the resonance frequency of the plurality of hard plates constituting the tool is not limited to the formation of the above-described notch. For example, a difference in cross-sectional shape between hard plates (for example, FIG. 6) or a difference in material can also function as a configuration for causing variation in resonance frequency.

  In addition, it is essential that the particle size of the fine abrasive grains contained in the slurry used in the present invention is smaller than the thickness of the hard plate.

As the method for manufacturing the tool 1, for example, as shown in FIG. 5, an adhesive-impregnated tape 62 in which a thin paper (thin paper tape 61) formed in a long tape shape is impregnated with an adhesive, and a hard plate The hard material base material 1a ′ having a configuration in which the dimension in the extending direction of 1a is extended to be formed in a long belt shape is laminated through a molding hole 71a penetrating through the close-contact mold member 71. It is also possible to obtain the tool 1 by cutting the obtained laminate to a desired length after the adhesive is cured.
In FIG. 5, reference numeral 72 denotes an adhesive impregnation apparatus for supplying and impregnating the thin paper tape 61 with a liquid adhesive. The thin paper tape 61 is sent to the close-contacting mold member 71 in a state where the liquid adhesive material is impregnated via the adhesive material impregnation device 72 (the adhesive material is uncured).
In the case of this manufacturing method, there exists an advantage which can manufacture the tool 1 continuously and efficiently.

The tool which concerns on this invention can change the lamination | stacking form of a hard board and a soft material variously. Thereby, various fine grooves can be formed in the workpiece.
For example, FIG. 6 shows the tool 11 formed by laminating a plurality of hard plates 11a having an L-shaped cross section to form an L-shaped cross section. A soft material 1b is provided between the hard plates 11a in layers.
FIG. 7 shows a tool 12 employing a hard material 12a having a spiral cross-sectional shape. The hard material 12a is configured to be a curved portion as a whole. The tool 12 has a circular cross-sectional outer shape. In the tool 12, the soft material 1b is also provided in a spiral shape along the hard material 12a. The soft material 1b bonds portions located on both sides of the hard plate 12a via the soft material 1b.
When the tool 12 of FIG. 7 is attached to the ultrasonic horn 2 and used, a pressing force is applied to the entire outer periphery of the tool 12 such as a mounting jig 2a having a structure in which a ring body is divided into a plurality of parts. The one configured to be able to be used is adopted.

For example, as illustrated in FIG. 6, the configuration using the bent hard plate having a cross-sectional shape is effective in increasing the rigidity of the entire tool by improving the cross-sectional secondary moment of the hard plate.
The hard plate is not limited to the L-shaped one in FIG. 6, and for example, as shown in FIG. 8, a hard plate 13a having a cross-sectional shape having a plurality of bent portions 13a1 can be employed.

Note that the tool 13 illustrated in FIG. 8 is different from the configuration including the soft portion 1b formed using the adhesive-impregnated sheet described above, and the resin coating layer 11b formed on one side of the hard plate 13a is soft. It is configured to function as a part. Here, the resin coating layer 11b is not embedded with thin paper and is entirely formed of a synthetic resin, but it is also possible to adopt a configuration in which thin paper is embedded.
For example, the tool 13 is for attaching a plurality of laminated members 13a2 having a structure in which a resin coating layer 11b is attached to one surface of a hard plate 13a, and for attaching a tool of the ultrasonic horn 2 together with an attachment jig 2a (see FIG. 1). It is used as a tool by inserting into the recess 21 and pressurizing from both sides by the mounting jig 2a to maintain the collective state.

The use of a laminated material having a structure in which a resin coating layer is attached to one surface of a hard plate is not limited to the tool 13 illustrated in FIG. 8, and can be widely applied to other embodiments according to the present invention.
As the laminated material, a structure in which a resin coating layer is attached to both surfaces of a hard plate can be employed.
When using a laminated material, the space | interval of a hard board is controllable with the thickness of a resin coating layer.

Moreover, as a tool which concerns on this invention, as shown to Fig.9 (a), (b), the soft sheet material 12b (soft material) formed in the sheet | seat shape separate from the hard board 1a using a synthetic resin. ) And the hard plate 1a are overlapped and inserted into the tool mounting recess 21 of the ultrasonic horn 2 together with the mounting jig 2a (see FIG. 1), and pressed from both sides by the mounting jig 2a to maintain the collective state. It includes what is comprised by doing. The soft sheet material 12b is disposed so as to be sandwiched between the hard plates 1a.
The hard plate is not limited to a flat plate. There is no limitation on the cross-sectional shape of the hard plate used for the tool configured to stack a plurality of hard plates using the soft sheet material 12b separate from the hard plate, for example, the hard plate 13a illustrated in FIG. It can be adopted.
The use of the soft sheet material 12b separate from the hard plate can be widely applied to other embodiments according to the present invention. For example, a tool using the spiral hard plate 12a illustrated in FIG. The present invention can also be applied to the case of configuring.

In the case of a tool having a configuration in which a laminated material or a soft sheet material is used and pressed by the mounting jig 2a to keep the collective state as described above, the presence of the soft material can increase the tool rigidity. it can.
However, in terms of improving the tool rigidity, the hard plates arranged apart from each other via a soft material or the parts separated from each other via a soft material in a spiral hard material are bonded by an adhesive. The tool having the above-described configuration is more preferable.

In addition, as shown in FIGS. 10A and 10B, the tool according to the present invention is provided such that one or more hard materials 152 are embedded in one soft material 151 made of synthetic resin. A cross-sectional structure (tool 15) can also be used.
The hard material 152 is not limited in its cross-sectional shape, and has a pin shape (hard material 152a) illustrated in FIG. 10A and a curved plate shape (hard material 152b) illustrated in FIG. 10B. In addition, various cross-sectional shapes can be used. In the case of the tool 15a in FIG. 10A, a hole (bottomed hole) can be formed as a concave workpiece in the workpiece 4 by the pin-shaped hard material 152a.
Such a tool 15 (in order to distinguish it from the tool 15 in FIG. 10A, the reference numeral 15b is added to the tool 15 in FIG. 10B) is, for example, a hard material 152 in a mold for resin molding. And a soft material 151 made of synthetic resin can be easily manufactured by insert molding.
In addition, such a tool 15 has an advantage that it can flexibly cope with the formation of concavely shaped portions having various shapes since the degree of freedom of the position and the cross-sectional shape of the hard material 152 can be ensured very large.

In the tool according to the present invention, a soft material having low rigidity and viscoplastic deformation characteristics and low fracture strength is employed.
If the workpiece is cemented carbide or ceramics, and the hard material is metal or ceramics, the hard material and the workpiece have high elastic modulus and mechanical strength, so there is a gap between the hard material and the workpiece. The energy of ultrasonic vibration is sufficiently transmitted to the abrasive grains. As a result, the abrasive gradually erodes both the hard material and the workpiece. If the abrasive grains bite into the hard material side, the hard material acts like a fixed abrasive grain of metal bond, and gradually erodes the workpiece.

  On the other hand, if ultrasonic vibration energy is absorbed when propagating through a soft material with low rigidity and viscoplastic properties and vibration is attenuated, the ultrasonic vibration energy is sufficient for the abrasive grains sandwiched between the workpieces. Therefore, the processing efficiency of the abrasive grains becomes significantly smaller than the abrasive grains between the hard material and the workpiece. Abrasive grains between the soft material and the workpiece are released from between the soft material and the workpiece during the vibration process, or bite into the soft material. Abrasive grains that have penetrated into the soft material are not held firmly inside the soft material, and if the soft material around the abrasive grains is destroyed by impact with the workpiece due to vibration, the processing efficiency will be further reduced. However, the workpiece is not greatly eroded.

  From the above, the physical properties of soft materials have low rigidity and viscoplastic deformation characteristics so as not to efficiently transmit ultrasonic vibration energy, and the fracture strength is low because they do not hold the engraved abrasive grains strongly. Required. Furthermore, since the soft material also has a function of gripping the hard material, it is required that the adhesive strength with the hard material is high.

Therefore, for example, an epoxy resin adhesive which is a thermosetting resin has a flexural modulus of about 1.5 to 2.0 GPa, which is about 1/100 of those of metals and ceramics, and a flexural strength of 40. As small as ˜60 MPa. However, the tensile shear bond strength with metal is not as small as 17 to 27 MPa. In addition, the epoxy resin-based adhesive tends to decrease the bending strength at high temperatures (40 to 60 ° C.). Since it is considered that heat is generated by ultrasonic vibration energy at the contact interface between the laminated tool and the workpiece, the mechanical strength and elastic modulus of the epoxy resin that comes into contact with the workpiece are lower than those at room temperature, The viscosity is considered to be relatively high. As a result, the epoxy resin absorbs ultrasonic vibration energy, and even if abrasive grains bite into the resin, the epoxy resin does not hold strongly, so that the workpiece is not greatly eroded.
As described above, the epoxy resin adhesive can be applied to a soft material.

(Concrete example)
FIG. 11 shows 10 parallel tools using a SUS thin steel plate having a thickness of 20 μm and laminated with 10 layers of thin paper (adhesive-impregnated sheet) impregnated with an epoxy resin adhesive. It is the figure which showed the groove processing speed with respect to the average processing stress applied to a tool at the time of forming a groove | channel in a cemented carbide alloy (cutting tool K10), and FIG. 12 is a groove | channel parallel to alumina ceramics (cutting tool KA30) similarly. It is the figure which showed the result at the time of forming.
The frequency of ultrasonic vibration is 27 kHz, and the slurry used is a mixture of water and a small amount of surfactant mixed with commercially available silicon carbide abrasive grains of # 1200 (#: mesh (particle size)). It is.

From both figures, the processing stress is approximately 0.6 MPa, the processing speed is 4 μm / min when the workpiece is cemented carbide, and the processing speed is 6 μm / min when the workpiece is alumina ceramics. Processing was completed.
The width of the formed groove was about 50 μm in both the case of cemented carbide and the case of alumina ceramics.

It is a figure (front sectional view) which shows the state where the tool for ultrasonic processing of one embodiment concerning the present invention was attached to the ultrasonic horn. FIG. 2 is a cross-sectional view taken along line AA in FIG. 1. It is a figure explaining the wet ultrasonic processing using the tool for ultrasonic processing of FIG. It is a figure explaining the processing principle of the concave processing part by the ultrasonic processing of FIG. It is a figure explaining the manufacturing method which manufactures the tool for ultrasonic processing by an extrusion system. It is a figure which shows the cross section (cross section perpendicular | vertical to the extending direction) structure of the tool for ultrasonic processing of L-shaped cross section. It is a figure which shows the cross section (cross section perpendicular | vertical to an extending direction) structure of the tool for ultrasonic processing of a cross-sectional spiral shape. It is a figure explaining an example of the manufacturing process of the tool for ultrasonic processing comprised by laminating | stacking several laminated materials of the structure by which the resin coating layer was adhered to the single side | surface of the hard board. (A), (b) is a figure explaining an example of the tool for ultrasonic processing of a structure which laminates | stacks a some hard board using the soft sheet material separate from a hard board. (A), (b) is a figure explaining an example of the ultrasonic processing tool of the cross-sectional structure provided so that one or some hard material might be embedded in one soft material which consists of synthetic resins. . Using a tool with a structure in which 10 layers of SUS thin steel sheet with a thickness of 20 μm are laminated using thin paper (adhesive-impregnated sheet) impregnated with an epoxy resin adhesive, 10 parallel grooves are made of carbide. It is the figure which showed the groove processing speed with respect to the average processing stress applied to a tool at the time of forming in an alloy (cutting tool K10). Using a SUS thin steel plate with a thickness of 20 μm and laminated with 10 layers of thin paper (adhesive material impregnated sheet) impregnated with an epoxy resin adhesive, 10 parallel grooves are made of alumina ceramics. It is the figure which showed the groove processing speed with respect to the average processing stress applied to the tool at the time of forming in (cutting tool KA30).

Explanation of symbols

  1, 11, 12, 13, 14, 15, 15a, 15b ... Ultrasonic machining tools, 1a, 11a, 12a, 13a, 152, 152a, 152b ... Hard materials, 1b, 11b, 12b, 151 ... Soft materials, DESCRIPTION OF SYMBOLS 2 ... Ultrasonic horn, 2a ... Mounting jig, 21 ... Tool mounting recess, 3 ... Slurry, 3a ... Abrasive grain, 4 ... Workpiece, 41 ... Work surface, 5 ... Concave processing part (groove).

Claims (13)

An ultrasonic processing tool for attaching to the tip of an ultrasonic horn and forming a concave processed portion that is a fine groove or a fine depression on the surface of the workpiece by ultrasonic processing,
A hard part and a soft part formed so as to have different strength and rigidity are extended in a constant cross-sectional shape, and one end in the extending direction is a fixed end fixed to the ultrasonic horn. Tool for ultrasonic machining.   The ultrasonic processing tool according to claim 1, wherein a plurality of the hard portions are provided, and the soft portion is interposed between the hard portions. The ultrasonic processing tool according to claim 2 for forming a plurality of the fine grooves in parallel,
The hard portion is formed of a plate material having a cross-sectional shape corresponding to the fine groove, and the soft portion formed in a softer layer shape than the plate material is interposed between the plate materials and the hard portion and the soft portion. An ultrasonic processing tool characterized by having a multilayer structure in which a portion is laminated.   The ultrasonic processing tool according to claim 3, wherein the plate material has a cross-sectional shape having a bent portion which is a bent portion or a bent portion.   The hard portion is formed by a plate material having a cross-sectional shape in which bent portions that are bent portions or curved portions and portions that are arranged in parallel with an interval are formed, and between the portions of the plate material that are arranged in parallel with each other The ultrasonic processing tool according to claim 1, wherein the soft portion formed in a layer shape softer than the plate material is interposed.   The super soft body according to any one of claims 1 to 5, wherein the soft portion is made of a soft material that is formed softer than a hard material that is a member constituting the hard portion using a synthetic resin. Sonic machining tool.   The ultrasonic processing tool according to any one of claims 2 to 5, wherein the synthetic resin of the soft material is an adhesive and is provided separated from each other via a soft portion. A tool for ultrasonic machining, wherein a material is bonded by the adhesive and integrated as a whole.   The ultrasonic processing tool according to any one of claims 3 to 5, wherein at least one laminated material in which the soft material is attached to one surface or both surfaces of a plate material which is the hard material is used. Ultrasonic machining tool characterized by being configured.   The ultrasonic processing tool according to any one of claims 2 to 5, wherein the hard material and a soft material that is a separate member from the hard material are brought into contact with each other. A tool for ultrasonic processing characterized by being provided.   The ultrasonic processing tool according to any one of claims 7 to 9, wherein the soft material has a structure in which a thin paper is embedded in the synthetic resin. .   The ultrasonic processing tool according to any one of claims 1, 2, and 5, wherein a cross section perpendicular to the extending direction is one or more hard materials in one soft material. An ultrasonic processing tool characterized by having a structure provided so as to be embedded.   The hard portion has a strength and rigidity equal to or higher than those of the workpiece, and the soft portion has lower strength and rigidity than the workpiece. Ultrasonic machining tool.   The ultrasonic processing tool according to claim 1, wherein a hard material that is a member constituting the hard portion is formed of metal or ceramics.

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